TWI721861B - Hydraulic static linear slide rail - Google Patents

Abstract

A hydraulic static linear slide rail includes a slide rail and a slide block, an angle α and an angle β of asymmetric oil pad are designed between the slide rail and the slide block, the oil film thrust provided at different angles adjusts the initial clearance by changing the thickness of the oil film, so as to increase the thickness of the oil film with allowable changes and the load capacity, such that the forward rigidity and load capacity of the hydraulic static linear slide rail can be increased without adjusting a throttle valve.

Description

Hydrostatic linear slide

The present invention is related to linear slides, in particular to a hydrostatic linear slide.

The linear slide is mainly a linear displacement device that uses balls or rollers to make an infinite rolling cycle between the slide and the slide, which allows the load platform provided on the slide to perform high-precision positioning along the slide. However, the point contact mode used by the balls or the line contact mode used by the rollers will cause defects such as insufficient load force and complex structure of the linear slide, which is not conducive to the application of high stability and high precision in machining and semiconductor manufacturing. And automation equipment.

Accordingly, in order to increase the load force and reduce the structural complexity, a hydrostatic linear slide is used to replace the general linear slide. The hydrostatic linear slide is mainly used to send high-pressure lubricating fluid into the slide through a hydraulic system. In the gap between the block and the sliding rail, an oil film is formed between the sliding block and the sliding rail, so that the sliding block and the platform on it float through the flowing oil film, and can slide smoothly along the sliding block without friction. The rail is moved linearly. However, the hydrostatic linear slide rail is limited by the angle design of the slider and the slide rail structure, resulting in the defects of insufficient forward load capacity and forward rigidity. Therefore, how to develop a method that can improve the forward load capacity and forward direction The rigid hydrostatic linear slide is the motivation of the invention.

The purpose of the present invention is to provide a hydrostatic linear slide rail, which mainly improves the forward load capacity and the forward rigidity.

In order to achieve the foregoing objective, the present invention is a hydrostatic linear slide rail, comprising: a slide rail with a first side slide groove and a second side slide groove opposite to the first side slide groove; the first side slide groove The side sliding groove has a first upper support surface and a first lower support surface, and the extension surface of the first upper support surface and the extension surface of the first lower support surface intersect to form a first line segment; the second side The chute has a second upper support surface and a second lower support surface, and the extension surface of the second upper support surface and the extension surface of the second lower support surface intersect to form a second line segment; Section and the second line section are a horizontal axis, the included angle between the extension surface of the first upper supporting surface and the horizontal axis and the included angle between the extension surface of the second upper supporting surface and the horizontal axis are the same as the included angle α, the first lower The included angle between the extended surface of the supporting surface and the horizontal axis and the included angle between the extended surface of the second lower supporting surface and the horizontal axis are the same included angle β, and meet the following conditions: included angle α> included angle β; and a sliding block, sliding On the sliding rail, between the sliding block and the first upper supporting surface and the first lower supporting surface of the first side sliding groove, and between the sliding block and the second upper supporting surface and the second supporting surface of the second side sliding groove There is an oil film between the lower supporting surfaces.

The effect of the present invention is: the present invention designs an asymmetric oil cushion angle α and angle β between the slide rail and the sliding block, and the oil film thrust provided at different angles automatically adjusts the initial gap through the change of the oil film thickness to increase the allowable variation. The thickness of the oil film increases the load capacity, and the forward rigidity and forward load capacity of the hydrostatic linear slide can be improved without adjusting the throttle valve.

Preferably, the included angle α satisfies the following condition: 35 degrees≦the included angle α≦45 degrees, and the included angle β satisfies the following condition: 1 degree≦the included angle β≦25 degrees. More preferably, the included angle β satisfies the following condition: 10 degrees≦the included angle β≦20 degrees, so as to improve the forward load capacity and the forward rigidity of the hydrostatic linear slide rail optimally.

Preferably, the sliding block has a sliding groove, a first convex portion and a second convex portion; the sliding groove is sleeved on the sliding rail, and has a first side wall and a first side wall facing the first side wall. Two side walls; the first convex portion is provided on the first side wall and located in the first side sliding groove, and has a first upper surface facing the first upper supporting surface A sliding surface, a first sliding surface facing the first lower support surface, a first upper oil cavity recessed on the first upper sliding surface, and a first lower surface recessed on the first sliding surface Oil cavity; the second convex portion is provided on the second side wall and located in the second side sliding groove, and has a second upper sliding surface facing the second upper support surface, and a second lower support facing the A second lower sliding surface of the surface, a second upper oil cavity recessed on the second upper sliding surface, and a second lower oil cavity recessed on the second lower sliding surface. More preferably, the cross-sectional areas of the first upper oil cavity, the first lower oil cavity, the second upper oil cavity, and the second lower oil cavity are the same.

Preferably, the slider also has an outer surface, a first upper flow passage that penetrates the outer surface and the first upper oil cavity, a first lower flow passage that penetrates the outer surface and the first lower oil cavity, and a A second upper flow passage that penetrates the outer surface and the second upper oil cavity, and a second lower flow passage that penetrates the outer surface and the second lower oil cavity.

10: Slide rail

X axis

11: The first side chute

111: The first upper supporting surface

112: The first lower support surface

111A: extended surface

112A: extended surface

113: The first line segment

12: Second side chute

121: The second upper supporting surface

122: second lower support surface

121A: extended surface

122A: extended surface

123: second line segment

13: Horizontal axis

α: included angle

β: included angle

20: Slider

21: Chute

211: first side wall

212: second side wall

22: The first convex part

221: The first upper sliding surface

222: The first gliding surface

223: The first oil cavity

224: The first lower oil cavity

23: second convex

231: The second upper sliding surface

232: The second gliding surface

233: The second upper oil chamber

234: second lower oil chamber

24: Outer surface

25: The first upper runner

26: The first lower runner

27: The second upper runner

28: The second lower runner

Figure 1 is a three-dimensional exploded view of an embodiment of the present invention, showing the state of the slide rail and the slider separated; Figure 2 is a side view of the embodiment of the present invention, showing the state of the end surface of the slide rail; Figure 3 is a partial cross-section of the embodiment of the present invention Figure, showing the state of the internal flow channel of the slide rail; Figure 4 is a combined cross-sectional view (1) of the embodiment of the present invention, showing the cross-sectional state of the sliding block and the slide rail; Figure 5 is a combined cross-sectional view of the embodiment of the present invention (two ), showing that the sliding block and the sliding rail are combined and showing the cross-sectional state of the flow channel; and FIG. 6 is a load stiffness curve diagram of an embodiment of the present invention.

Please refer to Figs. 1 to 5, an embodiment of the present invention provides a hydrostatic linear slide rail, which is mainly composed of a slide rail 10 and a slider 20, wherein: The slide rail 10 is a strip extending along the X axis. One side of the slide rail 10 is recessed with a first side slide groove 11, and the other side is recessed with a second side opposite to the first side slide groove 11 Sliding groove 12; the first side sliding groove 11 has a first upper support surface 111 and a first lower support surface 112, and the extension surface 111A of the first upper support surface 111 and the extension of the first lower support surface 112 The surface 112A intersects with a first line segment 113; the second side sliding groove 12 has a second upper support surface 121 and a second lower support surface 122, and the extension surface 121A of the second upper support surface 121 and the first The extension surfaces 122A of the two lower support surfaces 122 intersect to form a second line segment 123; let the first line segment 113 and the second line segment 123 be a horizontal axis 13, and the extension surface 111A of the first upper support surface 111 is The included angle of the axis 13 and the included angle between the extension surface 121A of the second upper support surface 121 and the horizontal axis 13 are the same, and the included angle α is the same, the included angle between the extension surface 112A of the first lower support surface 112 and the horizontal axis 13 and The included angle between the extension surface 122A of the second lower support surface 122 and the horizontal axis 13 is the same, and the included angle β is the same, and the included angle α is above the included angle β; in this embodiment, the included angle α is 45 degrees. The included angle β is 20 degrees, so the included angle α is greater than the included angle β.

The sliding block 20 is slidably disposed on the sliding rail 10. The sliding block 20 has a sliding groove 21, a first convex portion 22 and a second convex portion 23; the sliding groove 21 is sleeved on the sliding rail 10, and There is a first side wall 211 and a second side wall 212 facing the first side wall 211; the first protrusion 22 is provided on the first side wall 211 and is located in the first side sliding groove 11 of the slide rail 10, and There is a first upper sliding surface 221 facing the first upper supporting surface 111, a first sliding surface 222 facing the first lower supporting surface 112, and a first sliding surface 222 recessed on the first upper sliding surface 221 An upper oil cavity 223 and a first lower oil cavity 224 recessed on the first sliding surface 222; the structure of the second protrusion 23 is the same as the structure of the first protrusion 22, and the second protrusion 23 is provided at The second side wall 212 is located in the second side sliding groove 12 of the slide rail 10, and has a second upper sliding surface 231 facing the second upper supporting surface 121, and a second upper sliding surface 231 facing the second lower supporting surface 122 The second lower sliding surface 232, a second upper oil cavity 233 recessed on the second upper sliding surface 231, and a second lower oil cavity 234 recessed on the second lower sliding surface 232, wherein the first upper Oil chamber 223, section The cross-sectional areas of the lower oil chamber 224, the second upper oil chamber 233, and the second lower oil chamber 234 are the same, that is, the effective areas carried by the oil chambers are all equal; in this embodiment, the slider 20 also has an outer surface 24 , A first upper flow passage 25 that penetrates the outer surface 24 and the first upper oil chamber 223, a first lower flow passage 26 that penetrates the outer surface 24 and the first lower oil chamber 224, a first lower flow passage 26 that penetrates the outer surface 24 and The second upper flow passage 27 of the second upper oil chamber 233, and a second lower flow passage 28 that penetrates the outer surface 24 and the second lower oil chamber 234, and each flow passage uses a hydraulic system (not shown in the figure) Input lubricating oil, meanwhile, between the slider 20 and the first upper supporting surface 111 and the first lower supporting surface 112 of the first side sliding groove 11, and between the sliding block 20 and the second side sliding groove 12 There is an oil film between the upper supporting surface 121 and the second lower supporting surface 122 respectively.

The above is the configuration description of the main components of the embodiment of the present invention. As for the operation mode and effect of the present invention, the description is as follows: Please refer to Fig. 2 and Fig. 4 again, since most of the hydrostatic linear slides bear The positive compressive load Fy, such as the weight of the work load, the self-weight of the carrier, etc., makes the positive load capacity and the positive rigidity more important than the tensile load capacity and the tensile rigidity. The main positive of the hydrostatic linear slide is Most of the load capacity is borne by the first lower supporting surface 112 and the second lower supporting surface 122 of the slide rail 10. Therefore, the present invention specifically designs the angle α of the slide rail 10 to be above the angle β, and the angle α The angle β is larger than the angle β, which results in a specific asymmetrical angular configuration design. At the same time, on the basis of the same cross-sectional area of each oil cavity, the slide rail forms the first lower supporting surface 112 and the second lower supporting surface 122 with an angle β. The thrust is greater than the oil film thrust on the first upper supporting surface 111 and the second upper supporting surface 121 that form an angle α.

Accordingly, the difference in thrust between the slider 20 and the sliding rail 10 due to the difference in oil film thickness (the upper oil film thickness is smaller than the lower oil film thickness) causes a difference in thrust, thereby improving the forward rigidity and forward load capacity of the hydrostatic linear slide. That is to say, the present invention designs an asymmetrical oil cushion angle α and angle β, and the oil film thrust provided at different angles adjusts the initial gap by the oil film thickness change, increasing the allowable oil film thickness and then To increase the load capacity, the forward rigidity and forward load capacity of the hydrostatic linear slide can be improved without adjusting the throttle valve. For example, let the designed oil film thickness value be 25μm, and in this embodiment, an asymmetric oil cushion angle α is designed to be 45 degrees and the included angle β is 20 degrees. After the oil film is balanced, the upper oil film thickness ( As shown by arrow A in Figure 4) will change from 25μm to 24μm, and the thickness of the lower oil film (as shown by arrow B in Figure 4) will change from 25μm to 26μm. Therefore, the thickness of the lower oil film is greater than that of the upper oil film. When the thickness of the lower oil film is greater than the thickness of the upper oil film The lower cavity pressure is weaker than the upper cavity pressure. When under external load, the lower oil film gradually shrinks. While the oil film shrinks, the cavity pressure gradually increases to generate a pressure difference to obtain the load-bearing capacity, thus improving the hydrostatic linear slide rail. Forward rigidity and forward load capacity.

It is worth noting that in this embodiment, the included angle α is not limited to 45 degrees, and can satisfy 35 degrees≦the included angle α≦45 degrees. Similarly, the included angle β is not limited to 20 degrees, and satisfies 1 degree≦the included angle β≦ 25 degrees is fine. When the included angle α is less than 35 degrees, the positive components of the upper and lower oil chambers will be similar, and the effect of self-adjusting the initial gap will be poor. This outboard load will decrease. When the included angle α is greater than 45 degrees, it will cause Defects of reduced tensile load. When the included angle β is less than 1 degree, although the forward load capacity is improved, the tensile load will be greatly reduced. Therefore, in design, the included angle β cannot be less than 1 degree; when the included angle β is greater than 25 degrees , Although the tensile load capacity is improved, it will cause a substantial decline in the forward load capacity; therefore, the included angle β cannot be greater than 25 degrees. Accordingly, when the included angle α and the included angle β satisfy the aforementioned conditions, the forward load capacity and the forward rigidity of the hydrostatic linear slide rail can be significantly improved and are better. More preferably, the included angle β satisfies the following condition: 10 degrees≦the included angle β≦20 degrees, so as to improve the forward load capacity and the forward rigidity of the hydrostatic linear slide rail optimally.

Refer to FIG. 6 at the same time, which is a load stiffness curve diagram of an embodiment of the present invention. The horizontal direction in the graph is the overall displacement, the numerical value refers to compression, the negative numerical value refers to stretching, and the vertical direction refers to the rigidity value. It can be known from the graph that the angle α is 35 degrees and the angle β is 1 degree. The angle α is 35 degrees and the included angle β is 10 degrees, or the included angle α is 40 degrees and the included angle β is 15 degrees, or the included angle α is 45 degrees and the included angle β is 20 degrees. In the measured curve, the included angle α and the included angle B are within the following range 35 degrees ≤ included angle α ≤ 45 degrees, 1 degree ≤ included angle β ≤ 25 degrees, and the measured peak value of the curve will not decline significantly. However, when the included angle When α is 55 degrees and the included angle β is 30 degrees, the measured curve peak value (about 1500 N/μm) and the included angle α is 45 degrees and the included angle β is 20 degrees. The measured curve peak value (about 1850 N/μm ) Will have a large decline. Therefore, when the included angle α and the included angle β satisfy: 35 degrees ≤ included angle α ≤ 45 degrees, 1 degree ≤ included angle β ≤ 25 degrees, for the positive load of the hydrostatic linear slide Ability and positive rigidity can be significantly improved and are better.

10: Slide rail

11: The first side chute

111: The first upper supporting surface

112: The first lower support surface

111A: extended surface

112A: extended surface

113: The first line segment

12: Second side chute

121: The second upper supporting surface

122: second lower support surface

121A: extended surface

122A: extended surface

123: second line segment

13: Horizontal axis

α: included angle

β: included angle

Claims (5)

A hydrostatic linear slide rail, comprising: a slide rail with a first side slide groove and a second side slide groove opposite to the first side slide groove; the first side slide groove has a first upper Supporting surface and a first lower supporting surface, and the extension surface of the first upper supporting surface and the extension surface of the first lower supporting surface intersect to form a first line segment; the second side sliding groove has a second upper supporting surface Surface and a second lower support surface, and the extension surface of the second upper support surface and the extension surface of the second lower support surface intersect to form a second line segment; making the first line segment and the second line segment a horizontal Axis, the angle between the extension surface of the first upper support surface and the horizontal axis and the angle between the extension surface of the second upper support surface and the horizontal axis are the same angle α, and the extension surface of the first lower support surface is the same as the angle α. The included angle of the axis and the included angle between the extension surface of the second lower support surface and the horizontal axis are the same as the included angle β, and satisfy the following conditions: included angle α> included angle β; and a sliding block slidably disposed on the sliding rail, the sliding block Between the first upper supporting surface and the first lower supporting surface of the first side sliding groove, and between the sliding block and the second upper supporting surface and the second lower supporting surface of the second side sliding groove, there is one Oil film; wherein the slider has a sliding groove, a first convex portion and a second convex portion; the sliding groove sleeves on the sliding rail, and has a first side wall and a second facing the first side wall Side wall; the first convex portion is provided on the first side wall and located in the first side sliding groove, and has a first upper sliding surface facing the first upper supporting surface, and a first lower supporting surface facing the The first sliding surface, a first upper oil cavity concavely arranged on the first upper sliding surface, and a first lower oil cavity concavely arranged on the first sliding surface; the second convex portion is arranged on the first sliding surface Two side walls are located in the second side sliding groove, and have a second upper sliding surface facing the second upper supporting surface, a second sliding surface facing the second lower supporting surface, and a concave A second upper oil cavity of the second upper sliding surface and a second lower oil cavity recessed on the second sliding surface. The hydrostatic linear slide rail according to claim 1, wherein the included angle α satisfies the following conditions: 35 degrees≦the included angle α≦45 degrees, and the included angle β satisfies the following conditions: 1 degree≦the included angle β≦25 degrees. The hydrostatic linear slide rail according to claim 1 or 2, wherein the included angle β satisfies the following condition: 10 degrees≦the included angle β≦20 degrees. The hydrostatic linear sliding rail according to claim 1, wherein the sliding block further has an outer surface, a first upper flow passage that penetrates the outer surface and the first upper oil chamber, and a first upper flow passage that penetrates the outer surface and the first upper oil chamber. A first lower flow passage of the lower oil chamber, a second upper flow passage that penetrates the outer surface and the second upper oil chamber, and a second lower flow passage that penetrates the outer surface and the second lower oil chamber. The hydrostatic linear slide rail according to claim 1, wherein the cross-sectional areas of the first upper oil cavity, the first lower oil cavity, the second upper oil cavity and the second lower oil cavity are the same.

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