CN113565873B - Hydrostatic linear slide rail - Google Patents
Hydrostatic linear slide rail Download PDFInfo
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- CN113565873B CN113565873B CN202010348094.7A CN202010348094A CN113565873B CN 113565873 B CN113565873 B CN 113565873B CN 202010348094 A CN202010348094 A CN 202010348094A CN 113565873 B CN113565873 B CN 113565873B
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- Prior art keywords
- included angle
- supporting surface
- sliding
- oil chamber
- slide rail
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16N—LUBRICATING
- F16N1/00—Constructional modifications of parts of machines or apparatus for the purpose of lubrication
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Bearings For Parts Moving Linearly (AREA)
Abstract
The invention relates to a hydrostatic linear slide rail, which mainly comprises a slide rail and a slide block, wherein an asymmetric oil pad angle alpha and an asymmetric oil pad angle beta are designed between the slide rail and the slide block, the oil film thrust provided under different angles automatically adjusts an initial gap by the change of the oil film thickness, the allowable change of the oil film thickness is increased, the load capacity is further improved, and the forward rigidity and the forward load capacity of the hydrostatic linear slide rail can be improved without adjusting a throttle valve.
Description
Technical Field
The present invention relates to linear slides, and more particularly to a hydrostatic linear slide.
Background
The linear slide rail is a linear displacement device which mainly uses balls or rollers to perform infinite rolling circulation between a slide block and the slide rail, and can enable a load platform arranged on the slide block to perform high-precision positioning along the slide rail. However, the point contact pattern adopted by the balls or the line contact pattern adopted by the rollers can cause the defects of insufficient load force, complicated structure and the like of the linear slide rail, and are not suitable for being applied to mechanical processing, semiconductor manufacturing and automation equipment with high stability and high precision.
Accordingly, in order to increase the load capacity and reduce the structural complexity, a hydrostatic linear slide rail is used to replace a common linear slide rail, and a hydraulic system mainly feeds high-pressure lubricating fluid into a gap between a slide block and the slide rail, and a layer of oil film is formed between the slide block and the slide rail, so that the slide block and a platform on the slide block are floated through the flowing oil film, and can smoothly and linearly displace along the slide rail in a friction-free state. However, the hydrostatic linear guideway is limited by the angle design of the slide block and the guideway structure, which results in the defect of insufficient forward load capacity and forward rigidity, therefore, how to develop a hydrostatic linear guideway capable of improving the forward load capacity and the forward rigidity is the motivation created by the present invention.
Disclosure of Invention
The invention aims to provide a hydrostatic linear slide rail which mainly improves the forward load capacity and the forward rigidity.
To achieve the above object, the present invention provides a hydrostatic linear guideway, comprising: the sliding rail is provided with a first side sliding groove and a second side sliding groove opposite to the first side sliding groove; the first side sliding groove is provided with a first upper supporting surface and a first lower supporting surface, and the extending surface of the first upper supporting surface is intersected with the extending surface of the first lower supporting surface to form a first line segment; the second side sliding groove is provided with a second upper supporting surface and a second lower supporting surface, and the extending surface of the second upper supporting surface and the extending surface of the second lower supporting surface are intersected to form a second line segment; the first line segment and the second line segment are used as transverse axes, the included angle between the extending surface of the first upper supporting surface and the transverse axis and the included angle between the extending surface of the second upper supporting surface and the transverse axis are both used as included angles alpha, the included angle between the extending surface of the first lower supporting surface and the transverse axis and the included angle between the extending surface of the second lower supporting surface and the transverse axis are both used as included angles beta, and the following conditions are met: the included angle alpha is larger than the included angle beta; and the sliding block is arranged on the sliding rail in a sliding manner.
The invention has the following effects: the invention designs an asymmetric oil pad angle alpha and an angle beta between the slide rail and the slide block, the oil film thrust provided under different angles automatically adjusts the initial clearance by the change of the oil film thickness, the allowable change oil film thickness is increased, the load capacity is further improved, and the forward rigidity and the forward load capacity of the hydrostatic linear slide rail can be improved without adjusting a throttle valve.
Preferably, the included angle α satisfies the following condition: an included angle α ≦ 45 degrees, said included angle β satisfying the following condition: the included angle beta is between 1 and 25 degrees. More preferably, the included angle β satisfies the following condition: the included angle beta is between 10 and 20 degrees, so that the forward load capacity and the forward rigidity of the hydrostatic linear slide rail are improved optimally.
Preferably, the sliding block is provided with a sliding groove, a first convex part and a second convex part; the sliding chute is sleeved on the sliding rail and is provided with a first side wall and a second side wall facing the first side wall; the first convex part is arranged on the first side wall, is positioned in the first side sliding groove and is provided with a first upper sliding surface facing the first upper supporting surface, a first lower sliding surface facing the first lower supporting surface, a first upper oil cavity concavely arranged on the first upper sliding surface and a first lower oil cavity concavely arranged on the first lower sliding surface; the second convex part is arranged on the second side wall, is positioned in the second side sliding groove and is provided with a second upper sliding surface facing the second upper supporting surface, a second lower sliding surface facing the second lower supporting surface, a second upper oil cavity concavely arranged on the second upper sliding surface and a second lower oil cavity concavely arranged on the second lower sliding surface. Preferably, the first upper oil chamber, the first lower oil chamber, the second upper oil chamber and the second lower oil chamber have the same cross-sectional area.
Preferably, the slider further has an outer surface, a first upper flow channel penetrating the outer surface and the first upper oil chamber, a first lower flow channel penetrating the outer surface and the first lower oil chamber, a second upper flow channel penetrating the outer surface and the second upper oil chamber, and a second lower flow channel penetrating the outer surface and the second lower oil chamber.
Drawings
FIG. 1 is an exploded perspective view of an embodiment of the present invention, showing a slide rail separated from a slider;
FIG. 2 is a side view of an embodiment of the present invention, showing the state of the end face of the slide rail;
FIG. 3 is a partial cross-sectional view of an embodiment of the present invention, showing the state of the internal flow passage of the slide rail;
FIG. 4 is a sectional view of the slider and the slide rail according to the first embodiment of the present invention;
FIG. 5 is a sectional view of the slider and the slide rail in combination with each other, showing a cross-sectional state of the runner according to the embodiment of the present invention;
FIG. 6 is a graph showing load stiffness curves for an embodiment of the present invention.
Description of the symbols in the drawings:
sliding rail 10
X-axis
First side chute 11
First upper support surface 111
First lower bearing surface 112
Second side chute 12
Second upper supporting surface 121
Second lower support surface 122
Included angle alpha
Angle of inclusion beta
First convex part 22
First upper sliding surface 221
First lower sliding surface 222
The first upper oil chamber 223
The first lower oil chamber 224
Second upper sliding surface 231
Second lower running surface 232
Second upper oil chamber 233
Second lower oil chamber 234
First upper flow path 25
The first lower flow passage 26
Second upper flow passage 27
Second lower runner 28
Detailed Description
The technical solutions of the present invention will be described clearly and completely below, and it should be apparent that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be obtained by a person skilled in the art without any inventive step based on the embodiments of the present invention, are within the scope of the present invention.
As shown in fig. 1 to fig. 5, a hydrostatic linear guideway provided in an embodiment of the present invention mainly includes a guideway 10 and a slider 20, wherein:
the slide rail 10 is a strip-shaped body extending along the X axis, one side of the slide rail 10 is concavely provided with a first side slide groove 11, and the other side of the slide rail 10 is concavely provided with a second side slide groove 12 opposite to the first side slide groove 11; the first side chute 11 has a first upper supporting surface 111 and a first lower supporting surface 112, and an extending surface 111A of the first upper supporting surface 111 intersects with an extending surface 112A of the first lower supporting surface 112 to form a first line 113; the second side sliding chute 12 has a second upper supporting surface 121 and a second lower supporting surface 122, and an extending surface 121A of the second upper supporting surface 121 intersects with an extending surface 122A of the second lower supporting surface 122 to form a second line segment 123; let the first line segment 113 and the second line segment 123 be a transverse axis 13, an included angle between the extending surface 111A of the first upper supporting surface 111 and the transverse axis 13 and an included angle between the extending surface 121A of the second upper supporting surface 121 and the transverse axis 13 are the same and are the same as an included angle α, an included angle between the extending surface 112A of the first lower supporting surface 112 and the transverse axis 13 and an included angle between the extending surface 122A of the second lower supporting surface 122 and the transverse axis 13 are the same and are the same as an included angle β, and the included angle α is above the included angle β; in this embodiment, the included angle α is 45 degrees and the included angle β is 20 degrees, so the included angle α is larger than the included angle β.
A slider 20 slidably disposed on the slide rail 10, the slider 20 having a slide groove 21, a first protrusion 22 and a second protrusion 23; the sliding groove 21 is sleeved on the sliding rail 10 and has a first side wall 211 and a second side wall 212 facing the first side wall 211; the first protrusion 22 is disposed on the first side wall 211 and located at the first side sliding slot 11 of the sliding rail 10, and has a first upper sliding surface 221 facing the first upper supporting surface 111, a first lower sliding surface 222 facing the first lower supporting surface 112, a first upper oil cavity 223 recessed in the first upper sliding surface 221, and a first lower oil cavity 224 recessed in the first lower sliding surface 222; the structure of the second protrusion 23 is the same as that of the first protrusion 22, the second protrusion 23 is disposed on the second side wall 212, is located on the second side sliding slot 12 of the slide rail 10, and has a second upper sliding surface 231 facing the second upper supporting surface 121, a second lower sliding surface 232 facing the second lower supporting surface 122, a second upper oil chamber 233 recessed in the second upper sliding surface 231, and a second lower oil chamber 234 recessed in the second lower sliding surface 232, wherein the cross-sectional areas of the first upper oil chamber 223, the first lower oil chamber 224, the second upper oil chamber 233, and the second lower oil chamber 234 are the same, that is, the effective areas of the oil chambers are all the same; in this embodiment, the slider 20 further has an outer surface 24, a first upper flow passage 25 penetrating the outer surface 24 and the first upper oil chamber 223, a first lower flow passage 26 penetrating the outer surface 24 and the first lower oil chamber 224, a second upper flow passage 27 penetrating the outer surface 24 and the second upper oil chamber 233, and a second lower flow passage 28 penetrating the outer surface 24 and the second lower oil chamber 234, and each flow passage is supplied with lubricating oil from a hydraulic system (not shown).
The above description is a configuration description of each main component of the embodiment of the present invention, and the operation and effects of the present invention are described as follows:
as shown in fig. 2 and 4, most of the hydrostatic linear slide rails bear a positive compression load Fy, such as the weight of a backpack workpiece and the weight of a carrier, so that the positive load capacity and the positive rigidity are more important than the tensile load capacity and the tensile rigidity, and most of the main positive load capacity of the hydrostatic linear slide rails is borne by the first lower support surface 112 and the second lower support surface 122 of the slide rail 10, therefore, the angle α of the slide rail 10 is specially designed to be above the angle β, and the angle α is larger than the angle β, so that a specific asymmetric angle configuration design is caused, and the oil film thrust of the first lower support surface 112 and the second lower support surface 122 of the slide rail forming the angle β is larger than the oil film thrust of the first upper support surface 111 and the second upper support surface 121 forming the angle α on the basis that the sectional areas of the oil chambers are the same.
Accordingly, the thrust generated between the slider 20 and the slide rail 10 is different due to the difference of the oil film thickness (the thickness of the upper oil film is smaller than that of the lower oil film), so as to improve the forward rigidity and the forward load capacity of the hydrostatic linear slide rail. The invention designs an asymmetric oil pad angle alpha and an angle beta, the oil film thrust provided under different angles automatically adjusts the initial clearance by the change of the oil film thickness, the allowable variable oil film thickness is increased, the load capacity is further improved, and the forward rigidity and the forward load capacity of the hydrostatic linear slide rail can be improved without adjusting a throttle valve. For example, when the designed oil film thickness is 25 μm, and in the present embodiment, an asymmetric oil pad angle α is 45 degrees and the included angle β is 20 degrees, after the oil film is balanced, the thickness of the upper oil film (as shown by arrow a in fig. 4) is changed from 25 μm to 24 μm, and the thickness of the lower oil film (as shown by arrow B in fig. 4) is changed from 25 μm to 26 μm, so that the thickness of the lower oil film is greater than that of the upper oil film, and the pressure of the lower cavity is weaker than that of the upper cavity when the thickness of the lower oil film is greater than that of the upper cavity, and when an external load is borne, the lower oil film gradually shrinks while the oil film shrinks, and the cavity pressure gradually increases to generate a pressure difference, so as to obtain a load-bearing capacity, and thus the forward rigidity and the forward load-bearing capacity of the hydrostatic linear slide rail are also improved.
It should be noted that in this embodiment, the included angle α is not limited to 45 degrees, and satisfies both the included angle α is not limited to 35 degrees and not limited to 45 degrees, and the same included angle β is not limited to 20 degrees, and satisfies both the included angle β is not limited to 1 degree and not limited to 25 degrees. When the included angle alpha is smaller than 35 degrees, the forward component forces of the upper oil cavity and the lower oil cavity are close, the effect of self-adjusting the initial clearance is poor, in addition, the lateral load is reduced, and when the included angle alpha is larger than 45 degrees, the defect of reducing the tensile load is caused. When the included angle β is smaller than 1 degree, although the forward load capacity is improved, the tensile load is greatly declined, so that the included angle β cannot be smaller than 1 degree in design; when the included angle β is greater than 25 degrees, although the tensile load capacity is improved, the positive load capacity is greatly reduced; therefore, the included angle β cannot be larger than 25 degrees. Accordingly, when the included angle α and the included angle β satisfy the above conditions, the forward load capacity and the forward rigidity of the hydrostatic linear guideway can be significantly improved and are better. More preferably, the included angle β satisfies the following condition: the included angle beta is less than or equal to 10 degrees and less than or equal to 20 degrees, so that the forward load capacity and the forward rigidity of the hydrostatic linear slide rail are improved optimally.
Fig. 6 shows a load stiffness graph according to an embodiment of the present invention. The transverse direction in the graph is the overall displacement, the positive values refer to compression, the negative values refer to tension, and the longitudinal direction refers to stiffness. From the graph, it can be seen that, in a curve in which the included angle α is 35 degrees with the included angle β being 1 degree, or in a curve in which the included angle α is 35 degrees with the included angle β being 10 degrees, or in a curve in which the included angle α is 40 degrees with the included angle β being 15 degrees, or in a curve in which the included angle α is 45 degrees with the included angle β being 20 degrees, the peak values of the curves measured at 35 degrees ≦ included angle α ≦ 45 degrees, 1 degree ≦ included angle β ≦ 25 degrees in the following ranges of the included angle α with the included angle β being 35 degrees and the included angle β ≦ being 1 degree ≦ are not greatly degraded, however, when the included angle α is 55 degrees with the included angle β being 30 degrees, the peak value of the measured curve (about 1500N/μm) and the peak value of the curve measured at the included angle α being 20 degrees (about 1850N/μm) are greatly degraded, and therefore, when the included angles α and β satisfy: when the included angle α is between 35 and 45 degrees and the included angle β is between 1 and 25 degrees, the forward load capacity and the forward rigidity of the hydrostatic linear slide rail can be obviously improved and are better.
In summary, the above-mentioned embodiments are merely preferred embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (4)
1. A hydrostatic linear slide, comprising:
the sliding rail is provided with a first side sliding groove and a second side sliding groove opposite to the first side sliding groove; the first side sliding groove is provided with a first upper supporting surface and a first lower supporting surface, and the extending surface of the first upper supporting surface is intersected with the extending surface of the first lower supporting surface to form a first line segment; the second side sliding groove is provided with a second upper supporting surface and a second lower supporting surface, and the extending surface of the second upper supporting surface and the extending surface of the second lower supporting surface are intersected to form a second line segment; the first line segment and the second line segment are used as transverse axes, the included angle between the extending surface of the first upper supporting surface and the transverse axis and the included angle between the extending surface of the second upper supporting surface and the transverse axis are both used as included angles alpha, the included angle between the extending surface of the first lower supporting surface and the transverse axis and the included angle between the extending surface of the second lower supporting surface and the transverse axis are both used as included angles beta, and the following conditions are met: the included angle alpha is larger than the included angle beta; and
the sliding block is arranged on the sliding rail in a sliding manner;
the sliding block is provided with a sliding groove, a first convex part and a second convex part; the sliding groove is sleeved on the sliding rail and is provided with a first side wall and a second side wall facing the first side wall; the first convex part is arranged on the first side wall, is positioned in the first side sliding groove and is provided with a first upper sliding surface facing the first upper supporting surface, a first lower sliding surface facing the first lower supporting surface, a first upper oil cavity concavely arranged on the first upper sliding surface and a first lower oil cavity concavely arranged on the first lower sliding surface; the second convex part is arranged on the second side wall, is positioned in the second side sliding groove and is provided with a second upper sliding surface facing the second upper supporting surface, a second lower sliding surface facing the second lower supporting surface, a second upper oil cavity concavely arranged on the second upper sliding surface and a second lower oil cavity concavely arranged on the second lower sliding surface; the first upper oil chamber, the first lower oil chamber, the second upper oil chamber and the second lower oil chamber have the same cross-sectional area.
2. The hydrostatic linear slide of claim 1, wherein the included angle α satisfies the following condition: an included angle α ≦ 35 degrees ≦ 45 degrees, the included angle β satisfying the following condition: the included angle beta is less than or equal to 1 degree and less than or equal to 25 degrees.
3. Hydrostatic linear slide according to claim 1 or 2, characterized in that said angle β satisfies the following condition: the included angle beta is between 10 and 20 degrees.
4. The hydrostatic linear slide of claim 1, wherein the slide block further has an outer surface, a first upper flow passage through the outer surface and the first upper oil chamber, a first lower flow passage through the outer surface and the first lower oil chamber, a second upper flow passage through the outer surface and the second upper oil chamber, and a second lower flow passage through the outer surface and the second lower oil chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010348094.7A CN113565873B (en) | 2020-04-28 | 2020-04-28 | Hydrostatic linear slide rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010348094.7A CN113565873B (en) | 2020-04-28 | 2020-04-28 | Hydrostatic linear slide rail |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113565873A CN113565873A (en) | 2021-10-29 |
| CN113565873B true CN113565873B (en) | 2023-02-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010348094.7A Active CN113565873B (en) | 2020-04-28 | 2020-04-28 | Hydrostatic linear slide rail |
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| CN (1) | CN113565873B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101184930A (en) * | 2005-05-25 | 2008-05-21 | 谢夫勒两合公司 | Hydrostatic bearing |
| CN101460753A (en) * | 2006-04-20 | 2009-06-17 | 谢夫勒两合公司 | Hydrostatic profile rail guide |
| CN202964011U (en) * | 2012-12-18 | 2013-06-05 | 芜湖陀曼精机科技有限公司 | Slide block type hydrostatic guide rail with bearing surfaces of different horizontal angles and slide block with oil cavities of different sizes |
| TW201411000A (en) * | 2012-03-27 | 2014-03-16 | Thk Co Ltd | Cylindrical roller, motion guidance device provided with same, and rotational bearing |
| CN106112573A (en) * | 2016-08-23 | 2016-11-16 | 苏州陈那自动化技术有限公司 | The small-sized static guide rail of built-in reducer |
| CN208997177U (en) * | 2018-06-14 | 2019-06-18 | 青岛丰光精密机械股份有限公司 | A kind of high-accuracy guiding rail mechanism |
| CN109973519A (en) * | 2019-04-07 | 2019-07-05 | 苏州华正工业科技有限公司 | Normal pressure heavy-load column rolling guide-rail pairs |
| CN110173508A (en) * | 2019-06-11 | 2019-08-27 | 海盐博友五金制造有限责任公司 | A kind of wear-resistant linear guide that supporting effect is good |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005038346A1 (en) * | 2005-08-13 | 2007-02-15 | Schaeffler Kg | Hydrostatic profiled rail guide |
-
2020
- 2020-04-28 CN CN202010348094.7A patent/CN113565873B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101184930A (en) * | 2005-05-25 | 2008-05-21 | 谢夫勒两合公司 | Hydrostatic bearing |
| CN101460753A (en) * | 2006-04-20 | 2009-06-17 | 谢夫勒两合公司 | Hydrostatic profile rail guide |
| TW201411000A (en) * | 2012-03-27 | 2014-03-16 | Thk Co Ltd | Cylindrical roller, motion guidance device provided with same, and rotational bearing |
| CN202964011U (en) * | 2012-12-18 | 2013-06-05 | 芜湖陀曼精机科技有限公司 | Slide block type hydrostatic guide rail with bearing surfaces of different horizontal angles and slide block with oil cavities of different sizes |
| CN106112573A (en) * | 2016-08-23 | 2016-11-16 | 苏州陈那自动化技术有限公司 | The small-sized static guide rail of built-in reducer |
| CN208997177U (en) * | 2018-06-14 | 2019-06-18 | 青岛丰光精密机械股份有限公司 | A kind of high-accuracy guiding rail mechanism |
| CN109973519A (en) * | 2019-04-07 | 2019-07-05 | 苏州华正工业科技有限公司 | Normal pressure heavy-load column rolling guide-rail pairs |
| CN110173508A (en) * | 2019-06-11 | 2019-08-27 | 海盐博友五金制造有限责任公司 | A kind of wear-resistant linear guide that supporting effect is good |
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| Publication number | Publication date |
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| CN113565873A (en) | 2021-10-29 |
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