TWI720693B - Reticle container - Google Patents

Abstract

The present invention discloses a reticle container which comprises an upper cover and a lower cover. A plurality of identification modules is disposed on the side edge of the reticle container. Therefore, the user can quickly identify the usage of the reticle container or number per se. On the other hand, the reticle container of the present invention further comprises a support member, a holding member and a locking module. The reticle container of the present invention is able to satisfy various structural requirements and conditions for carrying the reticle in a sealed environment.

Description

Mask container

The present invention provides a photomask container, which refers to a photomask container with multiple different adjustable positions to further improve the convenience and safety of carrying, transporting or transmitting the photomask.

In the semiconductor industry, photomasks play a very important role in the manufacturing process. Whether it is traditional yellow light lithography or etching techniques, and even the extreme ultraviolet lithography (EUVL) process in recent years, they cannot be separated from the use of photomasks.

Among the many directly or indirectly related industries of semiconductors, industries related to optoelectronics also belong to a very important piece. When making large-size panels, the size of the mask used in the manufacturing process also changes with the size of the panel. Under the premise of technological advancement, the size of the panels that can be produced by the existing panel industry is gradually increasing, and with it, the size of the mask required for its manufacturing process has also increased.

Different from the semiconductor industry such as the manufacture of processors or chips, the size of the mask used in the panel industry can be as wide as 800 mm to 960 mm, and therefore cannot be transported or stored with traditional small mask boxes; relatively necessary Use a special large-size mask box.

But under the condition that the size of the reticle carried in the reticle box is so huge, the accompanying inertial motion will become more serious. In the process of handling or conveying such a huge size of the mask, it is also more likely to cause shaking, impact or even toppling of the entire mask container due to insufficient transportation accuracy. Further, damage to the large-size photomask is caused.

For different transportation and storage conditions, the transportation specifications of each panel or semiconductor factory are not necessarily consistent. For example, in some factories, the transportation process is prone to swing from side to side; while in some factories, there will be high and low movements, which will cause the phenomenon of displacement and scraping of large-size masks. Therefore, the requirements of the photomask containers for various factory uses are not the same. With the existing technology, the current photomask containers are still difficult to overcome this point.

In order to solve the problems mentioned in the prior art, the present invention provides a photomask container. Furthermore, the photomask container mainly includes a plurality of assembly parts, an upper cover and a lower cover. The upper cover is covered with the lower cover to form a side edge.

Wherein, the upper cover includes a first left cover portion and a first right cover portion, the first left cover portion is connected and fixed to one of the assembling parts through a first left connecting area; and the first right cover portion penetrates a The first right connecting area is connected and fixed to the assembly piece connected to the first left cover part.

Similarly, the lower cover includes a second left cover portion and a second right cover portion. The second left cover part is connected and fixed to another assembly part through a second left connection area; and the second right cover part is connected and fixed to the assembly part connected to the second left cover part through a second right connection area .

Wherein, at least one identification monitoring module is further provided on the side edge, and four corners of the inner surface of the upper cover and the lower cover jointly constitute a holding area, and the inner periphery of the lower cover jointly constitutes a supporting area.

The above brief description of the present invention aims to provide a basic description of several aspects and technical features of the present invention. The brief description of the invention is not a detailed description of the invention. Therefore, its purpose is not to specifically enumerate the key or important elements of the invention, nor to define the scope of the invention. It merely presents several concepts of the invention in a concise manner.

10: Mask container

100: upper cover

101: The first left cover

1011: The first left connection area

102: The first right cover

1021: The first right connection area

200: lower cover

201: The second left cover

202: second right cover

300: Assembled parts

301: Joint plate

302: main stand

400: Identify the monitoring module

401: Containment Slot

402: identification component

4021: Protective cover

403: Monitor

404: cover

405: Joint

406: Joint hole

407: Fastening part

500: Locking module

501: Bolt

502: Latch Column

5021: threaded hole

503a: airtight groove

503b: Positioning wing groove

504: wear lock

5041: threaded column

600: Holder

601: Strip support

602: Elastic Body

6021: Hole

603: fixed hole

700a: Support

700b: Support

701: support column

702: top connection area

703: Adjust the fixed part

704: Support

705: Bridge

M: main rib

W: side rib

G: fixed groove

S: Holding area

R: Support area

RP: support point

FIG. 1 is a schematic diagram of the appearance structure of an embodiment of the present invention.

Fig. 2 is a schematic diagram of the composition structure of the upper cover of the embodiment of the present invention.

Fig. 3 is a schematic diagram of the internal structure of an embodiment of the present invention.

Fig. 4 is a schematic diagram of the disassembly of the lower cover structure of the embodiment of the present invention.

FIG. 5 is a schematic diagram of the holding area and the supporting area of the embodiment of the present invention.

FIG. 6 is a schematic diagram of the structure of the locking module according to the embodiment of the present invention.

Fig. 7 is a schematic diagram of the bolt structure of the embodiment of the present invention.

Fig. 8 is a schematic diagram of the mounting of the holding member according to the embodiment of the present invention.

FIG. 9 is a schematic diagram of the structure of the holder of the embodiment of the present invention.

FIG. 10 is a schematic diagram of the structure of the supporting member according to the embodiment of the present invention.

Fig. 11 is a schematic diagram of another support structure according to an embodiment of the present invention.

Fig. 12 is a schematic diagram of the structure of the supporting member and the bridging member of the embodiment of the present invention.

In order to understand the technical features and practical effects of the present invention, and implement it in accordance with the content of the specification, the preferred embodiment shown in the figure is further used, and the detailed description is as follows: please refer to Figures 1-3 and Figure 1 at the same time. It is a schematic diagram of the external structure of the embodiment of the present invention; FIG. 2 is a schematic diagram of the structure of the top cover of the embodiment of the present invention; FIG. 3 is a schematic diagram of the internal structure of the embodiment of the present invention.

As shown in Fig. 1, Fig. 1 shows a mask container 10 according to an embodiment of the present invention. It can be seen from FIG. 1 that the photomask container 10 of this embodiment mainly includes an upper cover 100 and a lower cover 200, and the upper cover 100 and the lower cover 200 are closed to form the photomask container 10 with side edges. It further refers to Fig. 2, and in Fig. 2 further The upper cover 100 serves as the main example. However, in essence, the lower cover 200 also has a corresponding similar structure. It can be seen from the information in FIG. 2 that, in this embodiment, the upper cover 100 and the lower cover 200 are both assembled by a plurality of assembly parts 300. In this embodiment, there are two assembly parts 300, one is embedded in the upper cover 100; the other is embedded in the lower cover 200. The assembly 300 of this embodiment is co-constructed by two joint plates 301 mounted on the main bracket 302 at the end and the end. Of course, in other possible embodiments, the assembly 300 can also be designed as an integrally formed structure, which is not limited by the present invention.

In this embodiment, the joint plate 301 is mainly located on the side edge of the mask container 10. Further according to the information recorded in FIG. 2, it can be known that the top cover 100 of this embodiment is formed by splicing the first left cover portion 101 and the first right cover portion 102. The first left cover part 101 is connected and fixed to the assembly part 300 through the first left connection area 1011; and the first right cover part 102 is connected to the same assembly part 300 connected to the first left cover part 101 through the first right connection area 1021 fixed.

Similarly, the lower cover 200 of this embodiment also includes a second left cover portion 201 and a second right cover portion 202. The second left cover part 201 can also be connected and fixed to another assembly 300 through the second left connection area (not shown, please refer to the structure of the first left connection area 1011); and the second right cover part 202 can be fixed through the second left connection area. The right connecting area (not shown in the figure, refer to the structure of the first right connecting area 1021) is connected and fixed to the assembly 300 connected to the second left cover 201.

In summary, the upper cover 100 and the lower cover 200 of the embodiment of the present invention are completed, and the mask container 10 is further formed. Next, as shown in FIG. 3, it can be seen from FIG. 3 that at least one identification monitoring module 400 is further provided on the side edge of the mask container 10 of the embodiment of the present invention. Please refer to FIG. 5 first, which is a schematic diagram of the holding area and the supporting area of the embodiment of the present invention. As shown in Fig. 5, Fig. 5 shows the lower cover 200 as an example. However, in fact, the inner surface of the upper cover 100 or the lower cover 200 of this embodiment can be designed as the same or corresponding functional areas (e.g. The holding area S and the supporting area R) are not limited by the present invention. As shown in FIG. 5, the four corners of the inner surface of the lower cover 200 of the mask container 10 of the present embodiment are co-constructed as a holding area S, and the periphery of the inner surface is co-constructed as a supporting area R.

In this embodiment, the purpose of the lower cover 200 is mainly when the photomask container 10 is placed flat, and must achieve the purpose of preventing the displacement of the photomask and evenly supporting the weight of the photomask. Since the mask container 10 of this embodiment belongs to a large-size mask (that is, a mask used in the panel industry, it is called a large-size mask because its size can be as wide as 800 mm to 960 mm). weight. During transportation or storage, it is more susceptible to shaking, collision or rupture due to inertial effects, and even the entire photomask container 10 may fall over. Therefore, in this embodiment, the inner four-corner co-structured area of the lower cover 200 of the mask container 10 (the corresponding functional area can also be provided at the corresponding position in the upper cover 100) is defined as the holding area S, and the inner peripheral edge The co-structured part is defined as the support area R, which is used to set up related components to solve the related problems of the large-size photomask.

Please refer to FIGS. 3-5 at the same time. FIG. 4 is a schematic diagram of disassembling the lower cover structure according to the embodiment of the present invention. As shown in FIG. 3, at least one identification monitoring module 400 is provided on the side edge of the mask container 10 of this embodiment. Furthermore, in order to be able to simultaneously control the first left cover part 101, the first right cover part 102, the second left cover part 201 and the second right cover part 202, even including the upper cover 100 and the lower cover after the combination is completed. The individual status of the cover 200 and the parameters (including humidity, cleanliness, etc.) inside the mask container 10 in the use status, each of the first left cover 101, the first right cover 102, the second left cover 201, and the second At least one set of identification and monitoring modules 400 can be provided on the right cover 202.

In this embodiment, each group of identification monitoring modules 400 includes a receiving slot 401, an identification element 402, a monitor 403, and a cover 404. Wherein, the accommodating groove 401 includes an opening for accommodating the monitor 403. The identification element 402 is arranged on the side edge of the mask container 10 adjacent to the accommodating groove 401. As shown in FIG. 3, in this embodiment, the identification element 402 is a radio frequency tag (RFID Tag), so it is protected After the cover 4021 is closed, the inside of the lower cover 200 is protected. As for the monitor 403, a small display can be included to display the parameters (such as humidity, cleanliness, etc.) inside the photomask container 10; the readings of the aforementioned parameters (such as humidity, cleanliness, etc.) in the photomask container 10 can come from The measurement is performed by a sensor inside the instrument or the reticle container 10, and the measured result parameters are transmitted to the monitor 403 by wireless communication for display, so that the relevant operator can immediately know the current state of the reticle container 10.

In this embodiment, the monitor 403 is further provided with at least one engaging member 405, which is correspondingly engaged with the at least one engaging hole 406 provided in the accommodating groove 401. Finally, as shown in FIG. 4, the cover plate 404 and The opening of the accommodating slot 401 is covered to protect the monitor 403.

The protective cover 4021 and the cover plate 404 used in this embodiment can be designed to be snap-fitted or any snap-fitting method, which is not limited by the present invention. In addition, in this embodiment, in order to prevent the upper cover 100 and the lower cover 200 of the reticle container 10 from separating the upper cover 100 and the lower cover 200 during vertical transportation, the side edges of the reticle container 10 A plurality of buckling parts 407 (two on one side in this embodiment) are further provided on the upper cover for tightly connecting the upper cover 100 and the lower cover 200. In addition to achieving the air-tight effect, the structural stability of the entire mask container 10 is further enhanced.

Please refer to FIGS. 5 and 6 at the same time. FIG. 6 is a schematic diagram of the structure of the locking module according to the embodiment of the present invention. FIG. 6 further explains the first left connection area 1011, the first right connection area 1021 in FIG. 2 and the second left connection area and the second right connection area of the lower cover 200 that are not shown in FIG. 2 but have a similar structure in this embodiment. It is the detailed structure of how to fix by a plurality of locking modules 500.

More specifically, the first left connection area 1011, the first right connection area 1021, the second left connection area (not shown) and the second right connection area (not shown) of this embodiment are each provided with a plurality of Each of the locking modules 500 includes a bolt 501 and a locking member 504, and the locking member 504 is fixed to the bolt 501 after passing through the main bracket 302 in the assembly 300 from the outside of the mask container 10. Refer to Figure 5 first, by In the example of FIG. 5, it can be seen that the first left connection area 1011, the first right connection area 1021, the second left connection area (not shown), and the second right connection area (not shown) are essentially two types The ribs are composed of one of the main ribs M, which are arranged longitudinally in the first left connecting area 1011, the first right connecting area 1021, the second left connecting area (not shown) and the second right connecting area (not shown) Show). Each main side is provided with multiple side ribs W. In this embodiment, the wing-shaped side rib W can stabilize the structure of the main rib M, and the connection point between the side rib W and the main rib M belongs to the setting position of the locking module 500.

Please further refer to FIG. 7, which is a schematic diagram of the bolt structure of the embodiment of the present invention. When referring to FIGS. 5-7 at the same time, it can be seen that the structure of the bolt 501 in the locking module 500 of this embodiment is positioned in accordance with the physical structure of the main rib M and the side rib W, and has the function of preventing fools during installation. The bolt 501 of this embodiment is mainly composed of a bolt 502, an airtight groove 503a, and at least one positioning wing groove 503b. The bolt 502 has a threaded hole 5021. The airtight groove 503a is ringed at the bottom of the bolt 502. Finally, at least one positioning wing groove 503b is disposed on the outer edge of the airtight groove 503a.

Through the above structure, when the bolt 501 is closed downward, the airtight groove 503a can form a first layer of airtight structure, and cooperate with the shape of the main rib M to achieve an airtight effect. At the same time, there are two positioning wing grooves 503b in this embodiment, and they are co-constructed as a straight line. When the bolt 501 is installed, the positioning wing groove 503b co-constructed as a straight line can be compliantly snapped on the linear main rib M. In addition to reducing the difficulty of installation, it can also prevent the airtight groove 503a and the positioning wing groove 503b from being produced. Weighing offset, thereby reducing the risk of the airtight effect of the mask container 10 is reduced.

In this embodiment, the bolt 501 is installed first, and then the locking member 504 passes through and fixes the light shield container 10 from the outside to the inside. As shown in FIG. 6, the top of the lock-through member 504 is substantially further provided with a threaded post 5041 with a smaller radius. The structure of the threaded post 5041 can correspond to the threaded hole 5021 on the bolting post 502 Rotate to further achieve the effect of a stable structure. Moreover, the side of the piercing member 504 of this embodiment exposed to the outside of the mask container 10 is in the shape of a funnel, which is more conducive to the smoothness and airtightness of the entire surface of the mask container 10.

Next, please refer to FIGS. 5, 8 and 9 at the same time. FIG. 8 is a schematic diagram of the mounting of the holder according to the embodiment of the present invention; FIG. 9 is a schematic diagram of the structure of the holder of the embodiment of the present invention. First, as shown in FIG. 5, the four-corner co-structured area on the inner surface of the lower cover 200 of the mask container 10 of the present embodiment is defined as the holding area S, and as shown in FIG. 8, the holding groove G is provided with the holding member 600. In this embodiment, the holding members 600 are arranged in multiple holding areas S, and the purpose is mainly to stabilize the four corners of the large-size photomask, avoid the deviation thereof, and provide sufficient supporting force.

In this embodiment, the holding member 600 mainly includes a supporting body (not shown, embedded in the elastic body), at least a strip-shaped supporting member 601, an elastic body 602, and at least one fixing hole 603. At least one supporting member 601 is disposed on the supporting body (not shown, embedded in the elastic body); the elastic body 602 has at least one opening 6021 equal to the number of the at least one supporting member 601. Thereby, the elastic body 602 covers the supporting body and makes each strip-shaped supporting member 601 extend a distance upward beyond each opening 6021. At least one fixing hole 603 is provided on the supporting body (not shown, embedded in the elastic body) and the elastic body 602 at the same time. In this embodiment, at least one fixing hole 603 may be provided at the bottom of the holding member 600 or the ends of the left and right ends, and the holding member 600 is fixed in the holding groove G, which is not limited by the present invention.

Please refer to FIGS. 4-5 and 10-12 at the same time. FIG. 10 is a schematic diagram of the support structure of an embodiment of the present invention; FIG. 11 is a schematic diagram of another support structure of an embodiment of the present invention; FIG. 12 is a support of the embodiment of the present invention Schematic diagram of the structure of parts and bridging parts.

First, FIG. 4 shows the installation of the support member 700b. Further referring to the position in FIG. 5, it can be seen that the support member 700b is disposed in the support area R on the right side. In this embodiment, since the mask container 10 It is due to the large size of the mask box, so various transportation or storage conditions (such as horizontal or vertical placement) are considered. In actual use, the height and position required to support the components in the mask container 10 are: It may not be the same.

Therefore, as shown in FIG. 5, in the photomask container 10 of the present embodiment, each supporting region R is provided with a plurality of supporting points RP with a fixed distance between each other, and the plurality of supporting points RP is more connected to a plurality of supporting members ( 700a or 700b) connection. In other words, based on the spirit of the present invention, in addition to the free adjustment of the position of the support member (700a or 700b), it also includes technical requirements such as mutual support for the weight to be supported or adjustment of the support position.

Therefore, as shown in FIGS. 10-12, the present embodiment mainly consists of two types of support members (700a or 700b), where the support member 700a has a more square shape, and the support member 700b is more rectangular. The supporting member (700a or 700b) of this embodiment is mainly composed of a supporting column 701 and an adjusting and fixing portion 703. The supporting column 701 includes a top contact area 702, and the top contact area 702 may be a screw hole or a pin hole for fixing other elements, and the present invention is not limited. The adjusting and fixing portion 703 is disposed at the bottom of the supporting column 701, and the adjusting and fixing portion 703 is correspondingly detachably fixed to the plurality of supporting points RP. As shown in FIG. 12, in this embodiment, when necessary, the top contact area 702 between the plurality of support members 701 is further connected to at least one bridge member 705 through at least one support member 704.

Furthermore, the bottom of the support 704 of this embodiment is a threaded nut, and the top is a gear-shaped nut to provide the user with rotation; in this embodiment, the nut of the support 704 is a dome According to the structure, the contact area of the support member 704 and the large-size photomask can be reduced, and the chance of scratches can be reduced.

Accordingly, in this embodiment, the height of the supporting member 704 can be adjusted arbitrarily to adapt to various different large-size photomask supporting height requirements. The bridging member 705 allows the supporting member 704 to pass through and then connect to the top joint area 702. In addition to the bridge 705, the weight can be distributed to multiple supports connected to the bridge 705. In addition to (700a or 700b), when the support 704 is tightened to a certain degree, the height of each support 704 can be restricted to be the same. In addition, if the bridge 705 straddles the first left cover portion 101 and the first right cover portion 102, it has the effect of further stabilizing the structure of the mask container 10.

However, the above are only the preferred embodiments of the present invention, and should not be used to limit the scope of implementation of the present invention, that is, simple changes and modifications made in accordance with the scope of the patent application and the description of the present invention still belong to the present invention. Covered.

100: upper cover

101: The first left cover

102: The first right cover

200: lower cover

201: The second left cover

202: second right cover

301: Joint plate

400: Identify the monitoring module

401: Containment Slot

4021: Protective cover

404: cover

406: Joint hole

407: Fastening part

600: Holder

700b: Support

Claims (10)

A mask container, including: a plurality of assembly parts; an upper cover, including: a first left cover part connected and fixed to one of the assembly parts through a first left connecting area; a first right cover part through a first A right connecting area is connected and fixed to the assembly part connected with the first left cover part; a lower cover includes: a second left cover part connected and fixed to another assembly part through a second left connecting area; and a first The two right cover parts are connected and fixed by the assembly connected to the second left cover part through a second right connecting area; the upper cover and the lower cover are covered to form a side edge; wherein, the side edge is further provided with There is at least one identification monitoring module, and the four corners of the inner surface of the upper cover and the lower cover are co-constructed as a holding area, and the inner peripheral edge of the lower cover is co-constructed as a supporting area. The photo-mask container according to claim 1, wherein the identification monitoring module includes: a containing groove including an opening; an identification element arranged on the side edge adjacent to the containing groove; and a monitor through which The opening is accommodated in the accommodating groove; and a cover plate is used to cover the opening. The light cover container according to claim 2, wherein the monitor is further provided with at least one engaging member, which is correspondingly engaged with the at least one engaging hole provided in the accommodating groove. The photomask container according to claim 1, wherein the first left connection area, the second left connection area, the first right connection area and the second right connection area are each provided with a plurality of locking modules, Each of the locking modules includes: a bolt; and a through-locking part, which is fixed with the bolt after passing through the assembly part from the outside of the light cover container. The photo-mask container according to claim 4, wherein the bolt includes: a latching post with a threaded hole; an airtight groove ringed at the bottom of the latching post; and at least one positioning wing groove disposed on the air Outer edge of dense groove. The light cover container according to claim 5, wherein a threaded post is further provided on the top of the locking member, which is screwed correspondingly with the threaded hole. The light shield container according to claim 1, wherein the holding area is provided with at least one holding member, and the holding member includes: a supporting body; at least a strip-shaped supporting member arranged on the supporting body; and an elastic body having At least one opening, the elastic body covering the supporting body and making each strip-shaped supporting member extend a distance upward beyond each of the openings; and at least one fixing hole provided on the supporting body and the elastic body. The photomask container according to claim 1, wherein the supporting area is provided with a plurality of supporting points with a fixed interval between each other, and the plurality of supporting points are further connected with a plurality of supporting members. The light shield container according to claim 8, wherein each of the supporting members includes: a supporting column including a top contact area; and an adjusting and fixing part disposed at the bottom of the supporting column, and the adjusting and fixing part is correspondingly detachably connected with The plurality of supporting points are fixedly connected. The photomask container according to claim 9, wherein a plurality of the top connecting areas between the plurality of supporting members are further connected to at least one bridge member through at least one supporting member.

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