TWI718627B - Method of detecting material surface defects with surface wave frequency - Google Patents

Method of detecting material surface defects with surface wave frequency Download PDF

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TWI718627B
TWI718627B TW108129492A TW108129492A TWI718627B TW I718627 B TWI718627 B TW I718627B TW 108129492 A TW108129492 A TW 108129492A TW 108129492 A TW108129492 A TW 108129492A TW I718627 B TWI718627 B TW I718627B
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frequency
surface wave
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detection
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TW202109029A (en
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江智偉
孫書煌
鍾天穎
鍾緯勳
謝明君
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崑山科技大學
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一種以表面波頻率偵測材料表面瑕疵之方法,包含以下步驟:使一表面波分別通過光滑無瑕疵之一材料的一材料表面及一待測材料的一待測材料表面,該材料及該待測材料自該表面波之一發射端以一輸送速率朝該表面波之一接收端移動,一處理模組由都卜勒效應關係式得到該表面波通過該材料表面之一預設頻率及該表面波通過該待測材料表面之一檢測頻率;該處理模組比對該預設頻率及該檢測頻率,當該預設頻率與該檢測頻率不相符時,該處理模組判斷該待測材料的該待測材料表面有瑕疵。藉以提供一種低成本、方便且可以連續檢測的材料表面瑕疵檢測方法。 A method for detecting material surface defects at the frequency of surface waves includes the following steps: making a surface wave pass through a material surface of a material that is smooth and flawless and a material surface of a material to be tested, the material and the material to be tested. The test material moves from a transmitting end of the surface wave toward a receiving end of the surface wave at a transmission rate, and a processing module obtains the predetermined frequency and the predetermined frequency of the surface wave passing through the surface of the material from the Doppler effect relationship The surface wave passes through a detection frequency on the surface of the material to be tested; the processing module compares the predetermined frequency with the detection frequency, and when the predetermined frequency does not match the detection frequency, the processing module determines the material to be measured The surface of the material to be tested is flawed. In this way, a low-cost, convenient and continuous detection method for material surface defects is provided.

Description

以表面波頻率偵測材料表面瑕疵之方法 Method for detecting material surface defects with surface wave frequency

本發明係關於一種材料瑕疵檢測方法,尤指利用表面波頻率進行材料表面瑕疵檢測之方法。 The invention relates to a method for detecting material defects, in particular to a method for detecting material surface defects using surface wave frequencies.

在製程中,材料表面若有裂縫,除了會降低材料本身強度之外,裂縫可能會隨著製程施加的應力增加而破壞材料,因此工業上有各種檢測方法,進行快速產品瑕疵檢測,以提升製程效率。 In the process, if there are cracks on the surface of the material, in addition to reducing the strength of the material itself, the cracks may damage the material as the stress applied by the process increases. Therefore, there are various inspection methods in the industry to conduct rapid product defect detection to improve the process effectiveness.

在不同檢測方法中,非破壞性檢測方法是一種常見的檢測方式,具體如中華民國專利證書號第I480539號提供一種光透過性材料之瑕疵檢出裝置及方法,係在行進之薄膜的上下,以正交尼可爾式配置第1及第2偏光板。光由投光器通過第1偏光板而照射於薄膜,而以受光器檢出從第2偏光板射出之光,檢出薄膜的瑕疵。在第1偏光板與投光器之間,設置有帶通濾波器。而帶通濾波器係把來自投光器的光之中,波長區域為420nm以下及700nm以上之光除去。由於不要之波長區域的光並不射入受光器,故可提高檢出瑕疵的精度。 Among different detection methods, non-destructive detection method is a common detection method. Specifically, the Republic of China Patent Certificate No. I480539 provides a defect detection device and method for light-transmitting materials, which are located above and below the traveling film. The first and second polarizers are arranged in a crossed Nicol pattern. The light is irradiated on the film by the light projector through the first polarizing plate, and the light emitted from the second polarizing plate is detected by the light receiver, and the defect of the film is detected. A band pass filter is provided between the first polarizing plate and the light projector. The band pass filter removes the light from the light projector that has a wavelength range of 420 nm or less and 700 nm or more. Since the light in the unnecessary wavelength region does not enter the light receiver, the accuracy of detecting defects can be improved.

也有技術係以超音波經過瑕疵與未經過瑕疵之時間差,檢測瑕疵的深度,而前述時間差往往是奈秒級的,要檢測到如此精確的時間差需要極為精密而昂貴的儀器,且其他目前非破壞性檢測所需之設備,如分檢機、分度盤篩選機、光學影像篩選機……等等,也都價格高昂,無法普及於傳統 製造廠;另有手持式材料檢測儀,雖然價格較為低廉,但無法連續檢測,使用上仍有諸多不便。 There is also a technology that uses the time difference between the ultrasonic wave to pass the flaw and the non-defect to detect the depth of the flaw. The aforementioned time difference is often in the order of nanoseconds. To detect such an accurate time difference requires extremely sophisticated and expensive instruments, and other current non-destructive The equipment required for sexual testing, such as sorting machines, indexing plate screening machines, optical image screening machines, etc., are also expensive and cannot be popularized in traditional Manufacturer; there is also a hand-held material detector. Although the price is relatively low, it cannot be continuously tested, and there are still many inconveniences in use.

爰此,本發明人為有效提升製程效率,而提出一種以表面波頻率偵測材料表面瑕疵之方法,包含以下步驟:A.使一表面波通過光滑無瑕疵之一材料的一材料表面,該材料自該表面波之一發射端以一輸送速率朝該表面波之一接收端移動,一處理模組依據都卜勒效應關係式

Figure 108129492-A0305-02-0003-11
計算得到該表面波通過該材料表面之一預設頻率;B.再使該表面波通過一待測材料的一待測材料表面,該待測材料以相同的該輸送速率自該發射端朝該接收端移動,該處理模組依據都卜勒效應關係式計算得到該表面波通過該待測材料表面之一檢測頻率;C.該處理模組比對該預設頻率及該檢測頻率,當該預設頻率與該檢測頻率不相符時,該處理模組判斷該待測材料的該待測材料表面有瑕疵;D.一儲存模組儲存複數之該檢測頻率,該處理模組由該預設頻率及複數之該檢測頻率分析得到一良率。 In this regard, in order to effectively improve the process efficiency, the inventor proposes a method for detecting material surface defects with a surface wave frequency, which includes the following steps: A. A surface wave passes through a surface of a material that is smooth and flawless. From a transmitting end of the surface wave to a receiving end of the surface wave at a transmission rate, a processing module is based on the Doppler effect relationship
Figure 108129492-A0305-02-0003-11
It is calculated that the surface wave passes through a predetermined frequency of the material surface; B. The surface wave is then passed through a material surface of a material to be tested, and the material to be tested is transferred from the transmitting end toward the When the receiving end moves, the processing module calculates the detection frequency of the surface wave passing through the surface of the material to be measured according to the Doppler effect relation; C. The processing module compares the preset frequency with the detection frequency, when the When the preset frequency does not match the detection frequency, the processing module determines that the surface of the material to be tested is flawed; D. A storage module stores a plurality of the detection frequencies, and the processing module is determined by the preset The frequency and the detection frequency of the plural number are analyzed to obtain a yield rate.

其中,該表面波之頻率及該輸送速率由該處理模組控制。 Wherein, the frequency of the surface wave and the transmission rate are controlled by the processing module.

其中,該材料係隨一輸送帶以該輸送速率自該發射端輸送至該接收端。 Wherein, the material is conveyed from the transmitting end to the receiving end along with a conveyor belt at the conveying rate.

其中,該表面波係為超音波。 Among them, the surface wave system is ultrasonic.

根據上述技術特徵可達成以下功效: According to the above technical features, the following effects can be achieved:

1.以高解析度且價格低廉的表面波頻率檢測待測材料表面瑕疵,省下其他非破壞性檢測之精密儀器所需的高額成本。 1. Detect the surface defects of the material to be tested with high-resolution and low-cost surface wave frequency, saving the high cost of other precision instruments for non-destructive testing.

2.待測材料隨輸送帶移動,通過發射端及接收端後即可完成瑕疵檢測,方便且可以連續量測。 2. The material to be tested moves with the conveyor belt, and the defect detection can be completed after passing through the transmitting end and the receiving end, which is convenient and can be continuously measured.

3.處理模組由儲存模組儲存之複數檢測頻率分析得到良率,方便工廠依據良率進行製造設備的檢修或升級,確保待測材料品質。 3. The processing module obtains the yield rate by analyzing the multiple detection frequencies stored in the storage module, which is convenient for the factory to repair or upgrade the manufacturing equipment based on the yield rate to ensure the quality of the materials to be tested.

4.處理模組控制表面波的發射頻率及輸送速率,可依據不同材料選擇適當的表面波頻率及輸送速率,且無需人工操作。 4. The processing module controls the transmission frequency and transmission rate of the surface wave, and can select the appropriate surface wave frequency and transmission rate according to different materials, and does not require manual operation.

1:處理模組 1: Processing module

2:發射端 2: Transmitter

3:接收端 3: receiving end

4:輸送帶 4: Conveyor belt

5:通知模組 5: Notification module

6:儲存模組 6: Storage module

A:材料 A: Material

B:待測材料 B: Material to be tested

S1:前置步驟 S1: Preliminary steps

S2:檢測步驟 S2: Detection steps

S3:比對步驟 S3: Comparison steps

S4:分析步驟 S4: Analysis step

[第一圖]係本發明實施例之系統方塊圖。 [The first figure] is a system block diagram of an embodiment of the present invention.

[第二圖]係本發明實施例之流程示意圖。 [The second figure] is a schematic flow diagram of an embodiment of the present invention.

[第三圖]係本發明實施例之實施示意圖一,示意使用光滑無瑕疵之材料。 [The third figure] is the first schematic diagram of the embodiment of the present invention, showing the use of smooth and flawless materials.

[第四圖]係本發明實施例之實施示意圖二,示意使用待測材料。 [Fourth figure] is the second schematic diagram of the embodiment of the present invention, showing the use of the material to be tested.

綜合上述技術特徵,本發明以表面波頻率偵測材料表面瑕疵之方法的主要功效將可於下述實施例清楚呈現。 Combining the above technical features, the main effect of the method of detecting material surface defects by using surface wave frequencies of the present invention will be clearly demonstrated in the following embodiments.

請先參閱第一圖,係揭示實施該以表面波頻率偵測材料表面瑕疵之方法的一系統,該系統包含一處理模組(1)、一發射端(2)、一接收端(3)、一輸送帶(4)、一通知模組(5)及一儲存模組(6)。 Please refer to the first figure, which is a system that implements the method of detecting material surface defects at a surface wave frequency. The system includes a processing module (1), a transmitting terminal (2), and a receiving terminal (3). , A conveyor belt (4), a notification module (5) and a storage module (6).

該處理模組(1)訊號連接該發射端(2)、該接收端(3)、該輸送帶(4)、該通知模組(5)及該儲存模組(6),該處理模組(1)控制該發射端(2)發出之一表面波的一發射頻率及該輸送帶(4)之一輸送速率,在製程或生產速度之調整 上有需要時,可依據不同材料選擇適當的該表面波之該發射頻率及該輸送速率,無須一使用者自行操作設定。 The processing module (1) is signal connected to the transmitting terminal (2), the receiving terminal (3), the conveyor belt (4), the notification module (5) and the storage module (6), and the processing module (1) Control the transmission frequency of a surface wave emitted by the transmitter (2) and a transmission rate of the conveyor belt (4), in the adjustment of the manufacturing process or production speed When necessary, the transmission frequency and the transmission rate of the surface wave can be selected appropriately according to different materials, without a user's own operation and setting.

該發射端(2)及該接收端(3)分別發射及接收該表面波,該表面波係為超音波。該通知模組(5)可以是顯示器、警報器或語音播放器等等,例如當該處理模組(1)判斷一待測材料(B)有瑕疵時,該通知模組(5)可以藉由畫面、鈴響或語音等方式通知該使用者該待測材料(B)有瑕疵。該儲存模組(6)可以是雲端伺服器等虛擬儲存裝置,也可以是硬碟、隨身碟等實體儲存裝置。 The transmitting terminal (2) and the receiving terminal (3) respectively transmit and receive the surface wave, and the surface wave system is an ultrasonic wave. The notification module (5) can be a display, an alarm, or a voice player, etc. For example, when the processing module (1) determines that a material to be tested (B) is defective, the notification module (5) can borrow The user is notified that the material to be tested (B) is defective by means of screen, ringing or voice. The storage module (6) can be a virtual storage device such as a cloud server, or a physical storage device such as a hard disk and a flash drive.

請參閱第一圖至第四圖,以下將詳細說明該表面波頻率偵測材料表面瑕疵之方法的步驟: Please refer to the first to fourth figures, the following will describe in detail the steps of the surface wave frequency method for detecting material surface defects:

一前置步驟(S1):如第三圖所示,該發射端(2)發射該表面波,使該表面波通過光滑無瑕疵之一材料(A)的一材料表面,該材料(A)自該表面波之該發射端(2)隨該輸送帶(4)以該輸送速率朝該表面波之該接收端(3)移動,該處理模組(1)依據都卜勒效應關係式

Figure 108129492-A0305-02-0005-1
計算得到該表面波通過該材料(A)之該材料表面的一預設頻率。 A pre-step (S1): as shown in the third figure, the transmitting end (2) emits the surface wave, so that the surface wave passes through a surface of a material (A) that is smooth and flawless, and the material (A) The transmitting end (2) of the surface wave moves with the conveyor belt (4) toward the receiving end (3) of the surface wave at the conveying rate, and the processing module (1) is based on the Doppler effect relationship
Figure 108129492-A0305-02-0005-1
A preset frequency of the surface wave passing through the material surface of the material (A) is calculated.

都卜勒效應關係式中,fo即為該預設頻率,fs為該發射端(2)發出該表面波之頻率,即為該發射頻率。v為該表面波於該材料(A)中行進之波速,會依據不同材料而有不同波速,以等向性材料舉例來說,縱波在中碳鋼中之行走速率為每秒5923公尺,橫波在中碳鋼中之行走速率則為每秒3240公尺。vo為該接收端(3)之相對速率,該發射端(2)與該接收端(3)係同步開啟,當該發射端(2)向該材料(A)發出該表面波後,該表面波沿著該材料(A)之該材料表面傳遞,同時該材料(A)受該輸送帶(4)以該輸送速率輸送,使該表面波朝著該接收端(3)前進,而該接收端(3)不動,vo為0。vs則為該材料(A)之速率,也就是該輸 送帶(4)之該輸送速率,例如該輸送帶(4)以每秒1公分之該輸送速率輸送,則vs也會是每秒1公分。又在都卜勒效應關係式中,該表面波接近該接收端(3)是取上運算符,綜合以上所述,都卜勒效應關係式可以被改寫成

Figure 108129492-A0305-02-0006-2
,該處理模組(1)再據此計算該預設頻率。 In the Doppler effect equation, f o is the preset frequency, and f s is the frequency of the surface wave emitted by the transmitting end (2), which is the transmitting frequency. v is the wave speed of the surface wave traveling in the material (A), which varies according to different materials. Taking an isotropic material for example, the traveling speed of the longitudinal wave in medium carbon steel is 5923 meters per second. The travel speed of transverse waves in medium carbon steel is 3240 meters per second. v o is the relative velocity of the receiving end (3). The transmitting end (2) and the receiving end (3) are turned on synchronously. When the transmitting end (2) sends the surface wave to the material (A), the The surface wave is transmitted along the surface of the material (A), and the material (A) is conveyed by the conveyor belt (4) at the conveying rate, so that the surface wave advances toward the receiving end (3), and the The receiving end (3) does not move, and v o is 0. v s is the rate of the material (A), that is, the conveying rate of the conveyor belt (4). For example, if the conveyor belt (4) is conveyed at the conveying rate of 1 cm per second, then v s will also be every 1 cm per second. In the Doppler effect equation, the surface wave approaching the receiving end (3) is the operator. Based on the above, the Doppler effect equation can be rewritten as
Figure 108129492-A0305-02-0006-2
, The processing module (1) then calculates the preset frequency accordingly.

一檢測步驟(S2):如第四圖所示,該發射端(2)再發射該表面波,使該表面波通過該待測材料(B)的一待測材料表面,該待測材料(B)以與該材料(A)相同的該輸送速率自該發射端(2)朝該接收端(3)移動,該處理模組(1)再依據都卜勒效應關係式,以與該前置步驟(S1)相同之計算方式得到該表面波通過該待測材料表面之一檢測頻率。 A detection step (S2): as shown in the fourth figure, the transmitting end (2) then emits the surface wave, and the surface wave passes through the surface of a material to be tested of the material to be tested (B), and the material to be tested ( B) Move from the transmitting end (2) to the receiving end (3) at the same conveying rate as the material (A), and the processing module (1) then according to the Doppler effect relationship formula to compare with the previous Set the same calculation method in step (S1) to obtain a detection frequency of the surface wave passing through the surface of the material to be tested.

一比對步驟(S3):該處理模組(1)比對該預設頻率及該檢測頻率,當該預設頻率與該檢測頻率不相符時,該處理模組(1)判斷該待測材料(B)的該待測材料表面有瑕疵,該處理模組(1)並控制該通知模組(5)發出一警示。舉例來說,若該通知模組(5)是警報器,該警示即為警報器的警報聲響;若該通知模組(5)是顯示器,該警示則為顯示器畫面的閃爍或是顯示器畫面上顯示驚嘆號等可以引起該使用者注意的方式,方便該使用者將有瑕疵之該待測材料(B)挑出,避免該待測材料(B)加工完畢才發現有瑕疵,如此可以提升生產效率。 A comparison step (S3): the processing module (1) compares the preset frequency and the detection frequency, and when the preset frequency does not match the detection frequency, the processing module (1) determines the to-be-tested frequency The material (B) has a defect on the surface of the material to be tested, and the processing module (1) controls the notification module (5) to issue a warning. For example, if the notification module (5) is a siren, the warning is the alarm sound of the siren; if the notification module (5) is a display, the warning is the flashing of the display screen or on the display screen Displaying exclamation marks and other methods that can attract the user’s attention is convenient for the user to pick out the material to be tested (B) with defects, and to prevent the material to be tested (B) from being found to have defects after processing, which can improve production efficiency .

當該待測材料表面有瑕疵時,指的是該待測材料表面有裂縫或傷痕,使得該表面波無法直接沿原路徑直線由該待測材料表面通過,需要經過裂縫或傷痕。該表面波經過裂縫或傷痕而到達該接收端(3)之時間相較於經過該材料(A)表面到達該接收端(3)之時間會更長,對該表面波而言,相當於在該待測材料(B)上的速度vp相較於在該材料(A)上的速度vs慢,則該待測材料(B) 之該檢測頻率

Figure 108129492-A0305-02-0007-3
會小於該材料(A)之該預設頻率
Figure 108129492-A0305-02-0007-4
,該處理模組(1)因此判斷該待測材料(B)為有瑕疵。 When there is a flaw on the surface of the material to be tested, it means that there are cracks or scars on the surface of the material to be tested, so that the surface wave cannot pass through the surface of the material to be tested directly along the original path and needs to pass through the cracks or scars. The time for the surface wave to reach the receiving end (3) through cracks or scars is longer than the time for the surface wave to reach the receiving end (3) through the surface of the material (A). For the surface wave, it is equivalent to The speed v p on the test material (B) is slower than the speed v s on the material (A), then the detection frequency of the test material (B)
Figure 108129492-A0305-02-0007-3
Will be less than the preset frequency of the material (A)
Figure 108129492-A0305-02-0007-4
Therefore, the processing module (1) determines that the material to be tested (B) is defective.

一分析步驟(S4):該儲存模組(6)儲存複數之該檢測頻率,該處理模組(1)由該預設頻率及複數之該檢測頻率分析得到一良率,該處理模組(1)並控制該通知模組(5)發出一通知訊息。舉例來說。若該通知模組(5)為顯示器,該通知訊息即可以是在顯示器畫面上顯示該良率;若該通知模組(5)為語音播放器,該通知訊息則可以是播放該良率之語音,方便該使用者依據該良率進行相關製造設備的檢修或升級,確保該待測材料(B)之品質。 An analysis step (S4): the storage module (6) stores a plurality of the detection frequencies, the processing module (1) analyzes the preset frequency and the plurality of the detection frequencies to obtain a yield, the processing module ( 1) And control the notification module (5) to send a notification message. for example. If the notification module (5) is a display, the notification message can display the yield rate on the display screen; if the notification module (5) is a voice player, the notification message can be a display of the yield rate The voice is convenient for the user to perform maintenance or upgrade of related manufacturing equipment according to the yield rate to ensure the quality of the material to be tested (B).

該待測材料(B)隨該輸送帶(4)移動通過該發射端(2)及該接收端(3)後,並經過該處理模組(1)之比對,即可完成即時之瑕疵檢測,該以表面波頻率偵測材料瑕疵之方法方便、快速且可以連續量測,且由於表面波頻率之檢測儀器解析度較檢測時間之檢測儀器為高,也省下其他非破壞性檢測之精密儀器所需的高額成本。 After the material to be tested (B) moves with the conveyor belt (4) through the transmitting end (2) and the receiving end (3), and is compared by the processing module (1), the instant defect can be completed Detection. This method of detecting material defects with surface wave frequency is convenient, fast and can be continuously measured. Because the resolution of surface wave frequency detection equipment is higher than that of detection time, it also saves other non-destructive testing. The high cost required for precision instruments.

要特別說明的是,並非對每一該待測材料(B)的檢測都需要從該前置步驟(S1)開始、該分析步驟(S4)結束。當進行一次該前置步驟(S1)後,即可取得該材料(A)在該輸送速率下以該發射頻率之該表面波檢測之該預設頻率,之後若維持該輸送速率及該發射頻率,只要是同樣材質之該待測材料(B)即可直接由該檢測步驟(S2)開始進行檢測,加速檢測的效率,並由該比對步驟(S3)找出有無瑕疵,當同一批生產之該待測材料(B)都確認完有無瑕疵後,可以再由該分析步驟(S4)確認此批該待測材料(B)之該良率。 It should be particularly noted that not every test of the material to be tested (B) needs to start with the pre-step (S1) and end with the analysis step (S4). After performing the pre-step (S1) once, the preset frequency detected by the surface wave of the emission frequency of the material (A) at the delivery rate can be obtained, and then if the delivery rate and the emission frequency are maintained , As long as the material to be tested (B) is of the same material, the inspection can be started directly from the inspection step (S2) to speed up the inspection efficiency, and the comparison step (S3) can find out whether there are defects. When the same batch is produced After the material to be tested (B) is confirmed to be flawless, the analysis step (S4) can be used to confirm the yield of the material to be tested (B).

綜合上述實施例之說明,當可充分瞭解本發明之操作、使用及本發明產生之功效,惟以上所述實施例僅係為本發明之較佳實施例,當不能 以此限定本發明實施之範圍,即依本發明申請專利範圍及發明說明內容所作簡單的等效變化與修飾,皆屬本發明涵蓋之範圍內。 Based on the description of the above-mentioned embodiments, when the operation and use of the present invention and the effects of the present invention can be fully understood, the above-mentioned embodiments are only the preferred embodiments of the present invention. Therefore, the scope of implementation of the present invention is limited, that is, simple equivalent changes and modifications made according to the scope of patent application and description of the invention are all within the scope of the present invention.

S1:前置步驟 S1: Preliminary steps

S2:檢測步驟 S2: Detection steps

S3:比對步驟 S3: Comparison steps

S4:分析步驟 S4: Analysis step

Claims (4)

一種以表面波頻率偵測材料表面瑕疵之方法,包含以下步驟:A.使一表面波通過光滑無瑕疵之一材料的一材料表面,該材料自該表面波之一發射端以一輸送速率朝該表面波之一接收端移動,一處理模組依據都卜勒效應關係式
Figure 108129492-A0305-02-0009-5
計算得到該表面波通過該材料表面之一預設頻率;B.再使該表面波通過一待測材料的一待測材料表面,該待測材料以相同的該輸送速率自該發射端朝該接收端移動,該處理模組依據都卜勒效應關係式計算得到該表面波通過該待測材料表面之一檢測頻率;C.該處理模組比對該預設頻率及該檢測頻率,當該預設頻率與該檢測頻率不相符時,該處理模組判斷該待測材料的該待測材料表面有瑕疵;D.一儲存模組儲存複數之該檢測頻率,該處理模組由該預設頻率及複數之該檢測頻率分析得到一良率。
A method for detecting material surface defects at the frequency of surface waves, including the following steps: A. Pass a surface wave through a surface of a material that is smooth and flawless, and the material is conveyed at a transmission rate from an emitting end of the surface wave toward One of the receiving end of the surface wave moves, and a processing module is based on the Doppler effect relationship
Figure 108129492-A0305-02-0009-5
It is calculated that the surface wave passes through a predetermined frequency of the material surface; B. The surface wave is then passed through a material surface of a material to be tested, and the material to be tested is transferred from the transmitting end toward the When the receiving end moves, the processing module calculates the detection frequency of the surface wave passing through the surface of the material to be measured according to the Doppler effect relation; C. The processing module compares the preset frequency with the detection frequency, when the When the preset frequency does not match the detection frequency, the processing module determines that the surface of the material to be tested is flawed; D. A storage module stores a plurality of the detection frequencies, and the processing module is determined by the preset The frequency and the detection frequency of the plural number are analyzed to obtain a yield rate.
如請求項1所述之以表面波頻率偵測材料表面瑕疵之方法,其中,該表面波之頻率及該輸送速率由該處理模組控制。 The method for detecting surface defects of a material with a surface wave frequency as described in claim 1, wherein the frequency of the surface wave and the transmission rate are controlled by the processing module. 如請求項1所述之以表面波頻率偵測材料表面瑕疵之方法,其中,該材料係隨一輸送帶以該輸送速率自該發射端輸送至該接收端。 The method for detecting surface defects of a material using a surface wave frequency as described in claim 1, wherein the material is conveyed from the transmitting end to the receiving end along a conveyor belt at the conveying rate. 如請求項1所述之以表面波頻率偵測材料表面瑕疵之方法,其中,該表面波係為超音波。 The method for detecting surface defects of a material using a surface wave frequency as described in claim 1, wherein the surface wave is ultrasonic.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201303264A (en) * 2011-02-01 2013-01-16 Zygo Corp Interferometric heterodyne optical encoder system
TWI487587B (en) * 2009-01-29 2015-06-11 Ultratech Inc Processing substrates using direct and recycled radiation
TW201802461A (en) * 2016-03-31 2018-01-16 統一半導體公司 Method and system for the inspection of wafers for microelectronics or optics by laser doppler effect

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI487587B (en) * 2009-01-29 2015-06-11 Ultratech Inc Processing substrates using direct and recycled radiation
TW201303264A (en) * 2011-02-01 2013-01-16 Zygo Corp Interferometric heterodyne optical encoder system
TW201802461A (en) * 2016-03-31 2018-01-16 統一半導體公司 Method and system for the inspection of wafers for microelectronics or optics by laser doppler effect

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