TWI714699B - Encoder - Google Patents
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- TWI714699B TWI714699B TW106100789A TW106100789A TWI714699B TW I714699 B TWI714699 B TW I714699B TW 106100789 A TW106100789 A TW 106100789A TW 106100789 A TW106100789 A TW 106100789A TW I714699 B TWI714699 B TW I714699B
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- offset
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- encoder
- phase signal
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/2448—Correction of gain, threshold, offset or phase control
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/24471—Error correction
- G01D5/2449—Error correction using hard-stored calibration data
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
本發明提供一種於使用MR元件之編碼器中,使偏移適當反映而提高精度之技術。 編碼器具備MR元件10及控制部20。控制部20具備ADC21、角度算出部22及偏移控制部23。角度算出部22經由ADC21自MR元件10獲取A相信號及B相信號,而算出磁鐵50之角度位置。偏移控制部23根據A相信號及B相信號算出利薩如波形,又,自將圓形之利薩如波形等分割之特定之候選點使用連續之3點,求出2條2點間之垂直平分線,將其交點作為偏移算出。The present invention provides a technique for appropriately reflecting the offset in an encoder using MR elements to improve accuracy. The encoder includes an MR element 10 and a control unit 20. The control unit 20 includes an ADC 21, an angle calculation unit 22 and an offset control unit 23. The angle calculation unit 22 obtains the A-phase signal and the B-phase signal from the MR element 10 via the ADC 21 to calculate the angular position of the magnet 50. The offset control unit 23 calculates the Lissajous waveform based on the A-phase signal and the B-phase signal, and uses three consecutive points from the specific candidate points that are divided into the circular Lissajous waveform, etc., to obtain two points between two points. Calculate the vertical bisector with the intersection point as the offset.
Description
本發明係關於一種編碼器,例如係關於一種算出基於具有π/2之相位差之A相信號及B相信號之磁感測器輸出獲得之旋轉角之磁式編碼器。The present invention relates to an encoder, for example, to a magnetic encoder that calculates the rotation angle obtained based on the output of a magnetic sensor having a phase difference of π/2 between an A-phase signal and a B-phase signal.
作為檢測被檢測物之位移量或位移之絕對值之裝置,已知有磁式編碼器。例如,作為磁式編碼器,存在如下者,即,使被磁化成NS之2極之圓盤狀之磁鐵旋轉,利用MR(Magnetic Random,磁阻)元件檢測其磁場變化,將所獲得之Sin信號及Cos信號進行AD(Analog/Digital,類比/數位)轉換並擷取至微電腦,檢測出旋轉位置之絕對值。 於此種磁式編碼器中,例如若將反正切信號之相位作為參數,將Sin信號作為正交座標系統之Y座標,將Cos信號作為正交座標系統之X座標進行描繪,則獲得所謂之利薩如波形。若假定Sin信號及Cos信號為無噪音等之理想之信號,則成為無中心偏移或變形之圓形。但是,實際上存在因感測器之偏差等而為中心偏移之圓形,即自Y座標與X座標之交點至利薩如波形之圓周上之距離不同之情形。因此,於自工廠出貨編碼器時,通常預先進行偏移修正。進而,亦存在如下技術,即,考慮出貨時(初始)之偏移調整環境與實際之使用環境、尤其溫度環境不同之使用環境之不同,對偏移誤差進行調整(例如,參照專利文獻1)。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2010-78340號公報 然而,於藉由與Y軸之交點2點及與X軸之交點2點算出偏移之技術中,在僅活動較小之旋轉角度般之情形之應用中,偏移算出存在極限,從而謀求即使於此種狀況下亦可實現精度提高之技術。 本發明係鑒於上述狀況而完成者,目的在於在使用MR元件之編碼器中,使偏移適當反映而提高精度。As a device for detecting the displacement or the absolute value of the displacement, a magnetic encoder is known. For example, as a magnetic encoder, there is one that rotates a two-pole disk-shaped magnet that is magnetized into NS, and uses MR (Magnetic Random, magnetoresistive) elements to detect changes in the magnetic field to obtain Sin The signal and Cos signal undergo AD (Analog/Digital) conversion and capture to the microcomputer to detect the absolute value of the rotation position. In this kind of magnetic encoder, for example, if the phase of the arctangent signal is used as a parameter, the Sin signal is used as the Y coordinate of the orthogonal coordinate system, and the Cos signal is drawn as the X coordinate of the orthogonal coordinate system, the so-called Lissajous waveform. If it is assumed that the Sin signal and the Cos signal are ideal signals without noise, etc., they become a circle without center shift or distortion. However, there is actually a circle whose center is offset due to the deviation of the sensor, that is, the distance from the intersection of the Y coordinate and the X coordinate to the circumference of the Lissajous waveform is different. Therefore, when the encoder is shipped from the factory, offset correction is usually performed in advance. Furthermore, there is also a technique that considers the difference between the offset adjustment environment at the time of shipment (initial) and the actual use environment, especially the use environment with different temperature environments, and adjusts the offset error (for example, refer to Patent Document 1 ). [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2010-78340 However, in the technique of calculating the offset from 2 points of intersection with the Y axis and 2 points of intersection with the X axis, In applications where there is only a small rotation angle of movement, there is a limit to the offset calculation, and a technology that can improve accuracy even under such conditions is sought. The present invention was completed in view of the above-mentioned situation, and its object is to appropriately reflect the offset in an encoder using MR elements to improve accuracy.
本發明之編碼器具備:磁鐵,其被磁化成NS之2極;磁感測器,其以與上述磁鐵對向之方式配置,輸出具有π/2之相位差之A相信號及B相信號;旋轉量算出部,其基於上述A相信號及上述B相信號而算出旋轉量;及偏移控制部,其基於上述A相信號及上述B相信號,於正交座標系統上形成利薩如波形,並基於上述利薩如波形算出上述A相信號與上述B相信號之偏移;且上述偏移控制部係根據由在上述利薩如波形所呈現之圓周上被均等地分割為特定數量之候選點中之連續之3點形成之2個邊之垂直平分線之交點而檢測偏移。 此處,所謂具有π/2之相位差之A相信號及B相信號例如係指Sin信號及Cos信號。與如先前般藉由與Y軸之交點2點及與X軸之交點2點算出偏移之情形相比,即使為較小之旋轉角度亦可檢測偏移。因此,即使於僅活動較小之旋轉角度之應用中亦可使用。 亦可為,上述偏移控制部於利薩如波形存在變形之情形時,以成為理想圓之方式進行修正並根據上述連續之3點算出上述偏移。 即使於利薩如波形所呈現之圓形存在變形之情形時,亦可算出更加準確之偏移。 又,亦可為,上述連續之3點至少包含1個上述正交座標系統之任一座標軸與上述利薩如波形之交點。 一般而言,利薩如波形在與正交座標系統之軸(X軸、Y軸)之交點處之變形較少。因此,藉由包含與軸之交點,而於變形修正中無需對與軸之交點進行修正,能夠更快算出偏移。 亦可為,上述連續之3點為上述正交座標系統之任一座標軸與上述利薩如波形之交點。 藉由將3點均作為與軸之交點,而自利薩如波形之變形較少之位置選擇3點,因此3點均無需變形修正,因此能夠更快算出偏移。 亦可為,與上述座標軸上之交點之檢測係根據上述A相信號或上述B相信號之其中任一者變為零時之值與另一者之值之組合而算出。 可不進行最大值檢測或最小值檢測,而利用簡單之方法檢測與軸之交點,從而算出偏移。 亦可為,上述偏移控制部於決定應用於算出上述旋轉量之上述偏移時,將上次算出之偏移與最新算出之偏移平滑化後使用。 藉由於算出上述旋轉量時應用對最新偏移加上對前一個偏移進行加權所得之值而進行平滑化(濾波)所得者,即使存在環境溫度變化、使用時之裝置溫度上升等變化,亦可追隨該等變化而檢測出適當之偏移,並且藉由進行濾波,能夠形成無變動之偏移。 亦可為,上述偏移控制部於決定應用於算出上述旋轉量之上述偏移時,直接使用於最初之3點所檢測出之偏移,而以後依次檢測出之偏移則在進行加權後使其反映至於上述最初之3點所檢測出之偏移。 能夠於編碼器旋轉後立即迅速地算出偏移,且如上所述,能夠作為無變動之偏移而算出。 根據本發明,於使用MR元件之編碼器中,能夠使偏移適當地反映而提高精度。The encoder of the present invention is provided with: a magnet, which is magnetized into two poles of NS; and a magnetic sensor, which is arranged so as to face the above-mentioned magnet, and outputs a phase A signal and a phase B signal with a phase difference of π/2 Rotation amount calculation unit, which calculates the amount of rotation based on the A-phase signal and the B-phase signal; and an offset control unit, which based on the A-phase signal and the B-phase signal, forms Lissajous on a quadrature coordinate system And calculate the offset between the A-phase signal and the B-phase signal based on the above-mentioned Lissajous waveform; and the offset control unit is divided into a specific number based on the circle represented by the above-mentioned Lissajous waveform. Detect the offset at the intersection of the vertical bisector of the two sides formed by 3 consecutive points among the candidate points. Here, the so-called A-phase signal and B-phase signal having a phase difference of π/2 refer to, for example, Sin signal and Cos signal. Compared with the case where the offset is calculated by the 2 points of intersection with the Y axis and the 2 points of intersection with the X axis as before, the offset can be detected even with a small rotation angle. Therefore, it can be used even in applications with only small rotation angles. Alternatively, when the Lissajous waveform is deformed, the offset control unit may correct it to become an ideal circle and calculate the offset based on the three consecutive points. Even when the shape of the Lissajous waveform is deformed, a more accurate offset can be calculated. In addition, it is also possible that the three consecutive points include at least one intersection point between any one of the orthogonal coordinate systems and the Lissajous waveform. Generally speaking, the Lissajous waveform deforms less at the intersection with the axes of the orthogonal coordinate system (X-axis, Y-axis). Therefore, by including the intersection with the axis, it is not necessary to correct the intersection with the axis in the deformation correction, and the offset can be calculated faster. Alternatively, the above-mentioned continuous 3 points are the intersection points of any one axis of the above-mentioned orthogonal coordinate system and the above-mentioned Lissajous waveform. By taking all 3 points as the intersection with the axis, and choosing 3 points from the position where the distortion of the Lissajous waveform is less, no distortion correction is needed at all 3 points, so the offset can be calculated faster. Alternatively, the detection of the intersection with the aforementioned coordinate axis is calculated based on the combination of the value when either the aforementioned A-phase signal or the aforementioned B-phase signal becomes zero and the value of the other. It is not possible to perform maximum or minimum detection, but use a simple method to detect the intersection with the axis to calculate the offset. It is also possible that the offset control unit smoothes the offset calculated last time and the offset newly calculated when determining the offset applied to calculate the rotation amount. The result is smoothed (filtered) due to the application of the latest offset plus the weighted value of the previous offset when calculating the above-mentioned rotation amount, even if there are changes in the ambient temperature, the device temperature rise during use, etc. Appropriate offset can be detected following these changes, and by filtering, an unchangeable offset can be formed. Alternatively, when the offset control unit determines the offset applied to calculate the rotation amount, it directly uses the offset detected at the first three points, and the offset detected sequentially afterwards is weighted Make it reflect the offset detected at the first 3 points above. The offset can be quickly calculated immediately after the encoder is rotated, and as described above, it can be calculated as an offset without fluctuation. According to the present invention, in an encoder using an MR element, the offset can be appropriately reflected to improve accuracy.
以下,參照圖式對用於實施發明之形態(以下稱作「實施形態」)進行說明。 圖1係進行本發明之實施形態之偏移值修正之編碼器1之硬體構成之概念圖。圖2係編碼器1之功能方塊圖,主要著眼於偏移修正之功能而表示。 編碼器1具有與旋轉體之旋轉連動而輸出信號變化之MR元件10及控制部20。於本實施形態中,作為旋轉體,使用被磁化成一對S極及N極之磁極之圓盤狀之磁鐵50。固定於馬達裝置之框架等,並且磁鐵50係以連結於馬達裝置之旋轉輸出軸等之狀態被使用。 於編碼器1中,自MR元件10朝向控制部20輸出彼此具有π/2之相位差之Cos信號(A相信號)及Sin信號(B相信號)。更具體而言,MR元件10具備相對於磁鐵50之相位彼此具有90°之相位差之A相之磁阻圖案及B相之磁阻圖案,並對應於磁鐵50之旋轉而輸出A相信號及B相信號。 再者,於圖式中,雖僅圖示有成為A相感測器及B相感測器之一構成要素之MR元件10,但除此之外例如亦可藉由整流電路、低通濾波器、差動增幅放大器、向MR元件10供給勵磁電流之驅動器等各種電氣要素對A相感測器及B相感測器之輸出進行算出處理。 控制部20例如由MPU(Microprocessor Unit,微處理單元)、ROM(Read Only Memory,唯讀記憶體)、RAM(Random Access Memory,隨機存取記憶體)等各種電氣要素形成,功能上具備A/D(Analog/Digital,類比/數位)轉換部21(以下,記為「ADC21」)、角度算出部22及偏移控制部23。 ADC21獲取自MR元件10輸出之類比信號並進行數位化,並將其輸出至角度算出部22及偏移控制部23。角度算出部22基於來自MR元件10之輸出(A相信號、B相信號)算出磁鐵50之角度位置。 偏移控制部23具有算出利薩如波形之功能及偏移修正功能。角度算出部22於磁鐵50之角度位置之算出時,自偏移控制部23獲取偏移,進行適當之角度位置之算出。 偏移控制部23具備偏移算出部24、偏移資料記憶部25及變形修正用資料記憶部26。 偏移算出部24算出A相信號與B相信號之偏移,並提供至角度算出部22之角度位置之算出處理。關於具體之偏移之算出順序,將參照圖4及圖5於下文敍述,但簡單而言,自將圓形之利薩如波形等分割之候選點選擇連續之3點,進而求出2條連續之2點間之垂直平分線,將其交點算出為偏移。藉由編碼器1啟動後最初之偏移算出處理獲得之值直接被用於角度算出部22。對於以後獲得之偏移,於與最初之偏移平滑化之後被用於角度算出部22。藉此,於啟動時儘早反映最新之偏移,以後可使用無變動之偏移。再者,進行如何之加權而平滑化可根據目的而適當選擇。 偏移資料記憶部25保持偏移之資料。此處,記憶出貨時之偏移之值以及在實際使用狀態後算出之偏移之值,用於上述之平滑化處理。 變形修正用資料記憶部26保持在利薩如波形中產生變形之情形時,用於進行變形修正之資料。存在如下情形,即,因MR元件10及其附帶之放大器、驅動器等,使ADC21獲取之類比信號(A相信號及B相信號)產生變形。又,變形之原因中,亦存在磁鐵50與MR元件10之形狀上之問題,即幾何學之主要原因。磁鐵50形成為圓盤狀,各極為半圓狀,自半圓狀之區域至半圓狀之區域,磁通線並不完全一致而呈帶有圓形之分佈。又,對形成於MR元件10之橋接電路之各區段施加之磁通根據場所而稍微不同。由此,利薩如波形產生變形。 此種變形一般因溫度特性而一致變化,因此預先記憶用於正規化之修正值,並於製作利薩如波形時應用,藉此可獲得無變形(或變形非常小)之圓形。再者,於本實施形態中,如下文所述,於算出偏移之情形時,由於預先確定特定之候補點,因此實際保持之資料量及變形修正所需要之計算量較小即可。 圖3係用於說明本實施形態中應用之偏移算出方法之圖。此處,自於圓形之利薩如波形上均等地分割之候選點中使用連續之3點,根據由該等連續之3點形成之2個邊之垂直平分線之交點算出偏移。 此處,作為連續之3點,設為第1點P1(X1,Y1)、第2點P2(X2,Y2)、第3點P3(X3,Y3)。連結第1點P1(X1,Y1)與第2點P2(X2,Y2)之邊之垂直平分線和該邊之第1交點Pm1(Xm1,Ym1)、連結第2點P2(X2,Y2)與第3點P3(X3,Y3)之邊之垂直平分線和該邊之第2交點Pm2(Xm2,Ym2)利用下式獲得。 Xm1=(X1+X2)/2 Ym1=(Y1+Y2)/2 Xm2=(X2+X3)/2 Ym2=(Y2+Y3)/2 通過第1交點Pm1(Xm1,Ym1)之垂直平分線L1與通過第2交點Pm2(Xm2,Ym2)之垂直平分線L2之交點P0(X0,Y0)利用下式獲得。該交點P0(X0、Y0)之值成為新算出之偏移。 X0=(Nr1×Ys2-Nr2×Ys1)/(Nr1-Nr2) Y0=(Ys2-Ys1)/(Nr1-Nr2) 其中,Nr1(L1之斜率)、Nr2(L2之斜率)、Ys1、Ys2設為下式。 Nr1=-(X2-X1)/(Y2-Y1) Nr2=-(X3-X2)/(Y3-Y2) Ys1=Ym1-Nr1×Xm1 Ys2=Ym2-Nr2×Xm2 圖4係表示利薩如波形與候選點之關係之圖,圖4(a)表示將利薩如波形4等分之例,圖4(b)表示將圖4(a)進一步等分割而將利薩如波形8等分之例。 如圖4(a)所示,假定將利薩如波形4等分,且與X軸及Y軸之4個交點(P1~P4)成為候選點之情形。此處,與圖3同樣地,使用第1~第3點P1~P3算出成為偏移之交點P0。一般而言,於利薩如波形與軸上(X軸上或Y軸上)之交點處變形較少,因此所獲得之作為交點P0(X0,Y0)之偏移之值非常準確。就其他觀點而言,即使不進行變形修正,亦能以充分之精度獲得偏移。又,藉由磁鐵50旋轉一周而輸出2週期量之Sin信號及Cos信號,因此於圓形之利薩如波形中,能夠以中心角180度、即磁鐵50之旋轉為90度(180度/2)來檢測偏移,即,能夠快速地進行偏移之算出處理。 又,於圖4(b)中,使用進一步進行等分割而將利薩如波形8等分之位置之8個候選點(P1~P8)中之第3點P3~第5點P5,算出成為偏移之交點P0。於自8等分之候選點選擇連續之3點之情形時,必須包含1點或2點X軸或Y軸上之點。又,軸上之點以外之點相對於原點具有±45度之斜率,對應於A相信號與B相信號之交點。該位置由於變形較大,因此使用對變形進行了修正之值。其結果,所獲得之作為交點P0(X0,Y0)之偏移之值非常準確。於此情形時,於圓形之利薩如波形中,能夠以中心角90度、即磁鐵50之旋轉為45度來檢測偏移。因此,即使於磁鐵50安裝於僅稍微旋轉之裝置之情形時,亦可適當地算出偏移,能夠提高編碼器1之檢測精度。 繼而,使用圖5之流程圖說明偏移之算出步驟之概要。控制部20獲取自MR元件10輸出之A相信號及B相信號(S10)。所獲取之A相信號及B相信號被輸出至角度算出部22及偏移控制部23。 偏移算出部24基於A相信號及B相信號而獲取利薩如波形(S12)。此時,視需要參照變形修正用資料記憶部26而實施上述之變形修正。繼而,偏移算出部24自特定之候選點特定出連續之3點(S14),求出2條連結連續之2點而獲得之邊之垂直平分線,並算出其等之交點(S16),確定最新之偏移(S18)。 若確定最新之偏移,則偏移算出部24判斷是否為啟動編碼器1後最初之偏移之算出(S20)。 若為最初之偏移之算出(S20之Y(是)),則偏移算出部24將該最新之偏移通知給角度算出部22(S22)。通知後,將所算出之偏移保存至偏移資料記憶部25(S24)。 若非最初之偏移之算出(S20之N(否)),則偏移算出部24使用該最新之偏移與記錄於偏移資料記憶部25之過去算出之偏移進行平滑化處理(S26),將平滑化後之偏移通知給角度算出部22(S28)。通知後,將所算出之偏移保存至偏移資料記憶部25(S24)。 基於實施形態對本發明進行了說明,但該實施形態為例示,業者應當理解該等各構成要素之組合等可存在各種變化例,並且該等變化例亦屬於本發明之範圍內。Hereinafter, a mode for implementing the invention (hereinafter referred to as an "embodiment") will be described with reference to the drawings. Fig. 1 is a conceptual diagram of the hardware configuration of an
1‧‧‧編碼器10‧‧‧MR元件20‧‧‧控制部21‧‧‧ADC(AD轉換部)22‧‧‧角度算出部23‧‧‧偏移控制部24‧‧‧偏移算出部25‧‧‧偏移資料記憶部26‧‧‧變形修正用資料記憶部50‧‧‧磁鐵L1‧‧‧垂直平分線L2‧‧‧垂直平分線P0‧‧‧交點P1~P8‧‧‧候選點Pm1‧‧‧第1交點Pm2‧‧‧第2交點1‧‧‧
圖1係實施形態之編碼器之硬體構成之概念圖。 圖2係實施形態之編碼器之功能方方塊圖。 圖3係用於說明實施形態之偏移算出方法之圖。 圖4(a)、(b)係表示實施形態之利薩如波形與候選點之關係之圖。 圖5係表示實施形態之偏移之算出步驟之概要之流程圖。Figure 1 is a conceptual diagram of the hardware configuration of the encoder of the embodiment. Figure 2 is a functional block diagram of the encoder of the embodiment. Fig. 3 is a diagram for explaining the offset calculation method of the embodiment. Figure 4 (a) and (b) are diagrams showing the relationship between the Lissajous waveform and candidate points in the embodiment. Fig. 5 is a flowchart showing the outline of the procedure for calculating the offset of the embodiment.
10‧‧‧MR元件 10‧‧‧MR element
20‧‧‧控制部 20‧‧‧Control Department
21‧‧‧ADC(AD轉換部) 21‧‧‧ADC (AD conversion section)
22‧‧‧角度算出部 22‧‧‧Angle calculation section
23‧‧‧偏移控制部 23‧‧‧Offset Control Unit
24‧‧‧偏移算出部 24‧‧‧Offset calculation section
25‧‧‧偏移資料記憶部 25‧‧‧Offset data memory
26‧‧‧變形修正用資料記憶部 26‧‧‧Data memory for deformation correction
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