TWI711104B - Heater block and substrate heat treatment apparatus using same - Google Patents

Abstract

The present disclosure provides a heater block and a substrate heat treatment apparatus using the same. The heater block comprises heating lamps configured to transfer heat to a rectangular substrate comprising short and long sides with different lengths, the heating lamps comprising a plurality of light bulbs. The light bulbs are arranged such that a number of the light bulbs disposed parallel to the short side of the rectangular substrate and a number of the light bulbs disposed parallel to the long side of the rectangular substrate are the same as each other.

Description

Heater block and substrate hot spot using the heater block Management device

The present invention relates to a heater block and a substrate heat treatment device, and more specifically, to a heater block that performs heat treatment on a substrate and a substrate heat treatment device using the heater block.

Heat treatment is the basic process in the semiconductor manufacturing process. For example, ohmic contact alloying, ion implantation damage annealing, dopant activation, and the formation of thin films such as TiN, TiSi2, CoCi2, etc. require heat treatment The manufacturing process.

Furnace and rapid thermal processing (rapid thermal processing, RTP) devices are devices that perform heat treatment. Rapid thermal processing (RTP) devices have not received high attention, because they maintain the overall temperature of the substrate uniformly, maintain the same temperature-time characteristics of the replaced substrate, and accurately measure and control the substrate temperature There are difficulties. However, with the temperature measurement technology and temperature control of RTP devices With the gradual development of technology, RTP devices have recently replaced furnaces.

The RTP device uses the radiant light of a tungsten halogen lamp to transfer heat to the substrate. Therefore, the RTP device includes a heater block and a plurality of tungsten halogen lamps, and the plurality of tungsten halogen lamps are located at the side surface facing the substrate among the side surfaces of the heater block.

Even if the RTP device is used to heat the substrate, the overall temperature of the substrate still needs to be maintained uniformly. This is because the uneven temperature of the substrate can cause serious problems such as substrate warpage and dislocation, and film slip. To solve the problem of uneven substrate temperature, a technique for accurately measuring and controlling the substrate temperature and a technique for transferring uniform heat to the entire area of the substrate are required.

The technique used to transfer uniform heat to the entire area of the substrate is related to the arrangement of tungsten halogen lamps. Therefore, many technologies related to the arrangement of tungsten halogen lamps have been known.

In the case of a lamp arrangement for heat treatment of a small semiconductor substrate (for example, a wafer) as shown in FIG. 1, the bulbs are arranged in a circle on the lamp mounting surface. This is to perform uniform heat treatment on the entire area of the semiconductor substrate by arranging the small bulbs into a corresponding circle (because the semiconductor substrate (wafer) has a circular shape). In the semiconductor heat treatment device, the integrated small bulbs are arranged to correspond to the shape of the semiconductor substrate (wafer), so that thermal compensation can be performed on the edge (boundary) area of the wafer by a two-dimensional compensation method. Therefore, thermal uniformity can be easily ensured.

On the contrary, the lamp arrangement for heat-treating the large glass substrate used in the display device uses a large linear lamp to form a linear arrangement as shown in FIG. 2. This is to perform uniform heat treatment on the entire area of the glass substrate by arranging the lamps into a corresponding linear shape (because the glass substrate has a rectangular shape). Therefore, in terms of the shape of the lamp arrangement of the heat treatment device for the glass substrate, the length and the number of the arrangement of the linear lamps are determined in consideration of the size of the glass.

At the same time, the linear lamp has an input degree of freedom in a single direction. Therefore, a one-dimensional compensation method should be used to thermally compensate the edge area of the glass. When thermal compensation is performed by the one-dimensional compensation method, there is the following limitation: the enhancement of thermal uniformity of the entire area of the glass is limited. That is, in the case of a linear lamp, since the lamps should be arranged in one direction, there is a one-dimensional compensation limitation in which compensation is performed only in one direction.

In addition, when the lamps of the heat treatment apparatus for glass substrates are arranged using small bulbs, since too many bulbs are required, there is a limitation that the manufacturing cost of the heat treatment apparatus for glass substrates may increase.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Korean Patent No. 1031226

The present invention provides a heater block capable of ensuring thermal uniformity when performing heat treatment on a rectangular substrate. The invention also arranges lamps suitable for two-dimensional compensation To ensure thermal uniformity when the rectangular substrate is heat-treated.

According to an exemplary embodiment, a heater block includes a heater lamp for transferring heat to a rectangular substrate including short sides and long sides with different lengths, the heater lamp includes a plurality of bulbs, wherein The bulbs are arranged so that the number of the bulbs arranged parallel to the short side of the rectangular substrate and the number of the bulbs arranged parallel to the long side of the rectangular substrate are the same as each other.

When the short side of the bulb: the long side arrangement ratio is the interval between the bulbs arranged parallel to the short side of the rectangular substrate versus the bulbs arranged parallel to the long side of the rectangular substrate The short-side: long-side arrangement ratio of the bulb can be determined such that the number of bulbs arranged in a direction parallel to the short side of the rectangular substrate and the The number of bulbs arranged in the direction of the long sides of the rectangular substrate is the same as each other.

When the ratio of the length of the short side of the rectangular substrate to the length of the long side is the ratio of the short side of the rectangular substrate: the long side substrate, the bulbs can be arranged in a linear shape, and can be arranged according to the The short side: long side substrate ratio of the rectangular substrate determines the short side: long side arrangement ratio of the bulb.

The short side: long side arrangement ratio of the bulb may be determined to be the same value as the short side: long side substrate ratio of the rectangular substrate.

When the short-side: long-side substrate ratios of the plurality of rectangular substrates to be heat-treated are different from each other, the short-side: long-side arrangement ratio of the bulb may be determined as the ratio of the plurality of rectangular substrates The short side: the average value of the substrate ratio on the long side.

The short side: long side arrangement ratio of the bulb may have a ratio of about 1:1.14 Any arrangement ratio within the range of about 1:1.35.

According to another exemplary embodiment, a heater block includes a heater lamp for transferring heat to a rectangular substrate having short and long sides with different lengths, the heater lamp includes a plurality of bulbs, The plurality of bulbs are respectively arranged parallel to the short side and the long side of the rectangular substrate, and the bulbs parallel to the short side of the rectangular substrate are arranged so as to be self-parallel to the The center point between the bulbs on the long side of the rectangular substrate is parallel to an extension line on which the short side extends.

When the gap between the center points of the two bulbs arranged parallel to the long side of the rectangular substrate is the bottom side, and from the center point between the two bulbs to the position in the direction parallel to the short side When the distance between the center points of the nearest bulbs is the height, the bulbs can be arranged so that the bottom edge: height ratio is 1.5:1.

According to still another exemplary embodiment, a heater block includes a heater lamp for transferring heat to a rectangular substrate including short and long sides with different lengths, the heater lamp includes a plurality of bulbs, Wherein the plurality of bulbs are respectively arranged parallel to the short side and the long side of the rectangular substrate, and the bulbs parallel to the long side of the rectangular substrate are arranged so as to be self-parallel to the The center point between the bulbs on the short side of the rectangular substrate is parallel to an extension line on which the long side extends.

When the gap between the center points of the two bulbs arranged parallel to the short side of the rectangular substrate is the bottom side, and from the center point between the two bulbs to the direction parallel to the long side The distance between the center point of the bulb closest to the upper position is the height When, the bulbs can be arranged so that the bottom edge: height ratio is 1:1.2.

According to yet another exemplary embodiment, a substrate heat treatment apparatus includes: a processing chamber including a heat treatment space for a rectangular substrate including short sides and long sides with different lengths; a heater block including a heat generating A plurality of bulbs, wherein when the short side: long side arrangement ratio of the bulb is the interval between the bulbs arranged parallel to the short side of the rectangular substrate, the distance between the bulbs is parallel to the long side of the rectangular substrate When the ratio of the intervals between the bulbs placed, the heating lamp includes the plurality of bulbs, and the short side: long side arrangement ratio of the bulbs may be determined so that all the bulbs are parallel to the rectangular substrate. The number of bulbs arranged in the direction of the short side and the number of bulbs arranged in the direction parallel to the long side of the rectangular substrate are the same as each other; a substrate support member for supporting the rectangular substrate; and a heat treatment control part for The bulbs are individually controlled so that the rectangular substrate is uniformly heat-treated.

According to yet another exemplary embodiment, a substrate heat treatment apparatus includes: a processing chamber including a heat treatment space for a rectangular substrate including short sides and long sides with different lengths; a heater block including A plurality of thermal energy bulbs, wherein the plurality of bulbs are respectively arranged parallel to the short side and the long side of the rectangular substrate, and the bulbs parallel to the short side of the rectangular substrate are arranged to form Located on an extension line extending parallel to the short side from the center point between the bulbs parallel to the long side of the rectangular substrate; a substrate support member for supporting the rectangular substrate; and a heat treatment control part, It is used to individually control the bulbs so that the rectangular substrate can be uniformly heat-treated.

According to yet another exemplary embodiment, a substrate heat treatment device includes: The treatment room includes a heat treatment space for a rectangular substrate, the rectangular substrate includes short sides and long sides with different lengths; the heater block includes a plurality of bulbs for generating heat, wherein the plurality of bulbs are respectively parallel The bulbs that are arranged on the short side and the long side of the rectangular substrate and are parallel to the long side of the rectangular substrate are arranged so as to be located in parallel to the short side of the rectangular substrate The center point between the bulbs is parallel to the extension line extending from the long side; a substrate support member for supporting the rectangular substrate; and a heat treatment control part for individually controlling the bulbs so that the rectangular The substrate is uniformly heat-treated.

The bulb located at the edge portion of the heater block can be controlled to generate more heat energy than other bulbs.

10‧‧‧Glass substrate

61, 62, 63, 71, 72, 73, 110‧‧‧Bulb

100‧‧‧Heater block

101‧‧‧Light mounting surface

200‧‧‧Processing room

300‧‧‧Quartz window

301‧‧‧Sealing components

400‧‧‧Substrate support member

410‧‧‧Lift pin

a’, b’‧‧‧ interval

A, A1‧‧‧Short side

B, B1‧‧‧long side

α1, α2‧‧‧Bottom

β1、β2‧‧‧Height

The exemplary embodiments can be understood in more detail by reading the following description in conjunction with the accompanying drawings. In the accompanying drawings: FIG. 1 is a view of the lamp mounting surface when the bulb is mounted on the lamp mounting surface of the wafer heat treatment apparatus.

Fig. 2 is a view of the lamp mounting surface when the linear lamp is mounted on the lamp mounting surface of the glass substrate heat treatment device.

3 is a cross-sectional view of a substrate heat treatment apparatus to which a heater block according to an exemplary embodiment is applied.

Figure 4 illustrates the lamp installation table when the bulbs are installed in the heater block at predetermined intervals On the surface, a view of a bulb used to heat treat a rectangular glass substrate.

FIG. 5 is a view illustrating a light bulb used for heat treatment of a rectangular glass substrate when the light bulb is mounted on the lamp mounting surface of the heater block according to the exemplary embodiment in a linear shape that takes into account the substrate ratio.

6 is a view illustrating a light bulb used for heat treatment of a rectangular glass substrate when the light bulb is mounted on the lamp mounting surface of the heater block according to the exemplary embodiment in the triangular shape of the first example.

FIG. 7 is a view illustrating a bulb used for heat treatment of a rectangular glass substrate when the bulb is mounted on the lamp mounting surface of the heater block according to the exemplary embodiment in the triangular shape of the second example.

Fig. 8 is an experimental result illustrating the distribution of heat transferred to the glass substrate when the linear lamp is installed in the heater block by the usual method.

FIG. 9 is an experiment result illustrating the distribution of heat transferred to the glass substrate when the bulb is placed in the heater block according to the exemplary embodiment.

Hereinafter, the embodiments will be explained in more detail with reference to the drawings. However, the present invention may have different forms and should not be construed as being limited to the embodiments described herein. More precisely, these embodiments are provided to make this disclosure thorough and complete, and to fully convey the scope of the present invention to those skilled in the art. In the drawings, the same reference numbers indicate the same elements throughout the text.

Below, glass substrates are used in LCD, OLED, solar cells, etc. Large substrate. Here, the large substrate does not mean a semiconductor wafer, but a glass substrate with a large area used in the display industry and the photovoltaic industry. For example, a glass substrate for a display has a size ranging from 270mm×360mm in the first generation to a large size range of 2200mm×2500mm in the latest eighth generation, and has a rectangular structure with short lengths of different lengths. Side and long side.

3 is a cross-sectional view of a substrate heat treatment apparatus to which a heater block according to an exemplary embodiment is applied.

The processing chamber 200 defines an internal space as a heat treatment space of the glass substrate 10, and the glass substrate 10 is placed in the heat treatment space. The glass substrate 10 has a quadrangular (rectangular) shape having short sides and long sides of different lengths. Here, the short side may correspond to the width of the glass substrate 10, and in this case, the long side may correspond to the length of the glass substrate 10. The processing chamber 200 is formed in a closed hollow rectangular column shape, but the present invention is not limited to this, but can have various column shapes. That is, it may be in the shape of a cylinder or a polygonal cylinder. In addition, at each of one side surface and the other side surface of the processing chamber 200, an entrance (not shown) for putting in/out a substrate is provided. Here, any inlet is connected to a transfer module (not shown).

The processing chamber 200 includes a substrate supporting member 400 for supporting the glass substrate 10 at the inner side thereof. The substrate support member 400 may include a plurality of lift pins 410 moving in a vertical direction inside thereof, and may be connected to a mechanism for providing lifting force, such as an air cylinder (not shown). The glass substrate 10 may be supported by lifting pins 410. Of course, the mechanism for supporting the glass substrate 10 to the substrate supporting member 400 is not limited to the lifting pins 410. Various mechanisms capable of supporting the glass substrate 10 to the substrate supporting member 400, such as a mechanism using electrostatic force (electrostatic chuck) or a mechanism using vacuum holding force (not shown), may be used variously.

A quartz window 300 can be provided between the heater block 100 and the processing chamber 200. The quartz window 300 is formed of a material that transmits heat to the glass substrate 10 located under the quartz window 300. The quartz window 300 keeps the processing chamber 200 sealed between the heater block 100 and the processing chamber 200. The quartz window 300 uses a sealing member 301 to seal the gap between the heater block 100 and the processing chamber 200 to maintain the vacuum of the heater block 100 and protect the processing chamber 200 from the external environment (pressure, gas, and pollutants) influences. In addition, the quartz window 300 protects the plurality of bulbs 110 in the heater block 100 and prevents by-products caused by the heat generated by the bulbs 110 from falling on the glass substrate 10 in the heat treatment space in the processing chamber 200.

The heat treatment control part (not shown) individually controls the plurality of bulbs 110 in the heater block 100 so that the glass substrate 10 is uniformly heat treated. For example, the glass substrate 10 having a rectangular shape should be uniformly heat-treated. For this reason, the radiant heat energy from the bulb 110 facing the edge portion of the glass substrate 10 should be greater than the radiant heat energy from the bulb 110 facing the central portion of the glass substrate 10. Therefore, the heat treatment control member can individually control the bulbs 110 in such a way that the radiant heat energy from each bulb 110 facing the glass substrate 10 is different from or the same as each other, so that the entire area of the glass substrate 10 is irradiated with uniform heat energy.

The heat treatment control unit individually controls each bulb so that it is located in the heater area The bulbs at the edge portion of the block 100 generate more heat energy than the bulbs 110 located at the center portion of the heater block 100. This is because only by transferring more heat energy to the farther edge part, can the entire glass substrate be uniformly transferred. In addition, when the bulbs are arranged in a linear shape, the heat treatment control unit individually controls the bulbs so that the bulbs closest to the corner of the heater block 100 are generated more than the other bulbs 110 located at the edge of the heater block 100. Less heat. This is because the bulbs located at the end of the first side and the bulbs located at the end of the second side are gathered at the corners of the heater block 100, and therefore are generated at the corners of the heater block 100. The heat energy is greater than the heat energy of other edge parts.

The heater block 100 includes heating lamps that generate heat energy. The plurality of bulbs 110 may be arranged in a linear shape or a triangular shape as heating lamps. The bulb 110 is a bulb formed of glass or quartz, and a plurality of bulbs 110 are arranged on the lamp mounting surface 101 of the heater block 100 so that the plurality of bulbs 110 and the glass substrate 10 face each other. The plurality of bulbs 110 transfer heat energy by irradiating light toward the glass substrate 10.

In order to perform uniform heat transfer on the glass substrate 10 with different lengths of short and long sides, the plurality of bulbs 110 should be evenly arranged on the lamp mounting surface 101 of the heater block 100, and the The number of bulbs 110 is minimized to reduce manufacturing costs. That is, the same amount of radiation should be irradiated per unit area of the glass substrate 10, and the number of bulbs should be minimized. To this end, the plurality of bulbs 110 arranged on the lamp mounting surface 101 of the heater block 100 are arranged in a linear shape or a triangular shape.

In the following, the arrangement of linear shapes will be explained first, followed by triangles Like arrangement.

First, an example in which the plurality of bulbs are arranged on the lamp mounting surface 101 so as to be arranged in a linear shape is explained. Since the glass substrate 10 has a rectangular shape, the short side and the long side have different lengths. Therefore, when the bulbs 110 are arranged with the same interval along the linear arrangement of the short side and the long side of the lamp mounting surface, the number of bulbs 110 arranged along the short side becomes different from the number of bulbs 110 arranged along the long side. Number of. For example, as shown in FIG. 4, when the rectangular glass substrate 10 is positioned to face the square lamp mounting surface 101 of the heater block 100, and when the bulb is along the short side A (width) and the long side of the lamp mounting surface When the direction of B (length) is arranged at the same interval, the number of bulbs 110 placed at the facing positions along the direction of the short side A1 (width) and the long side B1 (height) of the glass substrate 10 becomes different. For example, referring to FIG. 4, it can be understood that the number of bulbs 110 arranged at a position facing the glass substrate 10 in the direction of the short side A1 of the glass substrate 10 (first arrangement) is three, while the number of bulbs 110 arranged on the long side of the glass substrate 10 The number of bulbs 110 arranged at a position facing the glass substrate 10 in the direction of the side B1 (second arrangement) is four. As such, since the long side of the glass substrate is longer than the short side of the glass substrate, the number of bulbs 110 placed to face the glass substrate becomes different depending on the direction of the short side or the long side.

As described above, when the number of bulbs 110 arranged facing the glass substrate in the direction parallel to the short side A1 of the glass substrate (first arrangement) is the same as when facing the glass substrate arranged in the direction parallel to the long side B1 of the glass substrate ( When the numbers of the bulbs 110 in the second arrangement are different from each other, since too many bulbs 110 are required, the cost efficiency of manufacturing the heater block 100 is low. In addition, even if a large number of bulbs are installed, the heat energy is even Sexual aspects are also inefficient.

Therefore, in an exemplary embodiment, when the plurality of light bulbs 110 that generate heat energy are arranged in a linear shape on the lamp mounting surface 101 of the heater block, the light bulbs 110 are arranged so as to be short parallel to the glass substrate. The number of bulbs 110 arranged facing the glass substrate in the direction of side A1 (first arrangement) and the number of bulbs 110 arranged facing the glass substrate (second arrangement) in the direction parallel to the long side B1 of the glass substrate equal. In this way, when the plurality of bulbs 110 are arranged to face the glass substrate 110 having short sides and long sides of different lengths, they are arranged facing the glass substrate in a direction parallel to the short side A1 of the glass substrate (the first The number of bulbs 110 in the first arrangement is the same as the number of bulbs 110 arranged facing the glass substrate in the direction parallel to the long side B1 of the glass substrate (second arrangement), and therefore the bulb 110 used least. Although the above arrangement has lower uniform heat transfer efficiency than the arrangement of the bulb 110 shown in FIG. 4 (for example, the arrangement of the bulb 110 in which the bulb 110 is arranged at the same interval on the short side and the long side), the heat treatment efficiency of the glass substrate It will not decrease because the heat energy can be evenly transferred along the short and long sides of the glass substrate.

In an exemplary embodiment, the number of bulbs 110 arranged (first arrangement) facing the glass substrate in a direction parallel to the short side A1 of the glass substrate is equal to that in the direction parallel to the long side B1 of the glass substrate. The number of bulbs 110 arranged facing the glass substrate (second arrangement) may be the same, and the short side:long side arrangement ratio of the bulbs is determined so that the number of bulbs arranged in a direction parallel to the short side of the glass substrate Comparing with the number of bulbs 110 arranged in a direction parallel to the long side B1 of the glass substrate with. Here, the short-side:long-side arrangement ratio of the bulb means the distance a'between the bulbs arranged parallel to the short side A1 of the glass substrate 10 versus the bulbs arranged parallel to the long side B1 of the glass substrate 10 as shown in FIG. The ratio between the interval b'. For reference, the arrangement ratio of the bulbs means the interval at which the bulbs are arranged, and specifically, the interval between the center points of each bulb 110.

At the same time, when the ratio of the length of the short side A1 of the glass substrate 10 to the length of the long side B1 is the ratio of the short side to the long side of the glass substrate 10, the bulb 110 can be determined according to the ratio of the short side to the long side of the glass substrate 10 The short side: the arrangement ratio of the long side. That is, the short side: long side of the bulb 110 as the arrangement ratio when the bulb 110 is mounted on the lamp mounting surface 101 can be determined based on the short side: long side substrate ratio which is the ratio of the short side: long side of the glass substrate 10 Permutation ratio.

For example, the short-side:long-side arrangement ratio of the bulb 110 may be realized to have the same short-side:long-side arrangement ratio as the short-side:long-side substrate ratio of the glass substrate 10. As shown in Figure 5, when the substrate ratio of the short side A1: long side B1 of the glass substrate 10 is 1:1.2, the short side: long side arrangement ratio of the bulb-it is the bulb placed parallel to the short side A1 of the glass substrate 10 The ratio of the interval a′ between the bulbs to the interval b′ between the bulbs arranged parallel to the long side B1 of the glass substrate 10-is also realized as 1:1.2.

At the same time, when the heater block 100 is manufactured by arranging the bulbs 110 corresponding to the short-side:long-side substrate ratio of the glass substrate 10, the versatility of the heat treatment apparatus can be weakened. To solve this problem, another option is to use the average value of the substrate ratio of the glass substrate 10. That is, the number of bulbs 110 arranged in the direction parallel to the short side A1 of the glass substrate 10 (first arrangement) can be compared with that in parallel to the glass substrate. The number of bulbs 110 arranged in the direction of the long side B1 (second arrangement) is the same. The method is implemented so that the short side: long side arrangement ratio of the bulb 110 is short side: long side substrate ratio of a plurality of glass substrates 10 different The short side: the average of the long side substrate ratio.

The glass substrate 10 means a glass substrate with a large area used in the display industry and the photovoltaic industry. As shown in Table 1 below, the glass substrate 10 has various sizes ranging from 270 mm×360 mm in the first generation to 2200 mm×2500 mm in the latest eighth generation.

Therefore, the average value of the substrate ratios of the glass substrates 10 of the first to eighth generations can be determined as the short side: long side arrangement ratio of the bulb 110. The short-side:long-side arrangement ratio of the bulb 110 is allowed to have any arrangement ratio in the range of about 1:1.14 to about 1:1.35. Preferably, due to the width of the first to eighth generation glass substrates 10: The average of the length substrate ratio is 1:1.2, so when the short side is the width and the long side is the length, the short side:long side arrangement ratio of the bulb 110 can be realized to have an arrangement ratio of 1:1.2.

In the above, the embodiment in which the bulbs 110 are arranged in a linear shape is explained. However, even if the bulbs 110 are not arranged in a linear shape on the lamp mounting surface 101, for example, the bulbs 110 are arranged in a triangular shape, uniform heat energy can be transferred to the glass substrate and the number of bulbs 110 can be minimized. Hereinafter, an embodiment in which the bulbs 110 are arranged in a triangular shape will be explained.

Since the glass substrate 10 has a rectangular shape, the short side and the long side of the glass substrate 10 have different lengths. Therefore, in order to uniformly dispose the bulbs 110 on the glass substrate 10 and dispose the minimum number of bulbs 110, the bulbs 110 are arranged in a triangular shape. For example, the plurality of bulbs 110 are arranged parallel to the short side A1 and the long side B1 of the glass substrate 10 as shown in FIG. 6. The bulbs parallel to the short side A1 of the glass substrate are arranged to be located on an extension line parallel to the short side A1 from the center point between the bulbs parallel to the long side B1 of the glass substrate.

When the distance between the center points of the two bulbs 61 and 62 arranged parallel to the long side B1 of the glass substrate is the bottom side α1, and from the center point between the two bulbs 61 and 62 to the center point parallel to the short side When the distance between the center point of the bulb 63 closest to the position in the direction of A1 is the height β1, the bulbs are arranged so that the bottom side: height ratio is 1.5:1. This is because when the ratio of the base α1 of the triangle parallel to the long side B1 of the glass substrate 10 to the height β1 is less than or greater than 1.5, it is difficult to optimize the thermal efficiency because it is difficult to transfer uniform thermal energy.

At the same time, as another embodiment, as shown in FIG. 7, the multiple bulbs are similarly arranged parallel to the short side A1 and the long side B1 of the glass substrate 10. Parallel to glass The bulbs on the long side B1 of the glass substrate are arranged on a parallel line extending in the direction of the long side B1 from the center point between the bulbs parallel to the short side A1 of the glass substrate. That is, when the distance between the center points of the two bulbs 71 and 72 arranged parallel to the short side A1 of the glass substrate is the bottom side α2, and from the center point between the two bulbs 71 and 72 to the parallel When the distance between the center points of the bulbs 73 closest to the position of the long side B1 is the height β2, the bulbs are arranged such that the bottom side: height ratio is 1:1.2. This is because when the ratio of the height β2 of the triangle parallel to the long side B1 of the glass substrate 10 to the base α2 is less than or greater than 1.2, it is difficult to optimize the thermal efficiency because it is difficult to transfer uniform thermal energy.

For reference, it can be seen from the results of simulating the glass substrate using the two-dimensional heat treatment equation that this triangular arrangement ratio has the best thermal efficiency, and the arrangement ratio with the smallest number of bulbs can be obtained. As known, once the measured temperature T of the glass substrate in the following equation 1 is known, the heat distribution energy S distributed on the heat-treated glass substrate can be calculated.

Among them, T is the measured absolute temperature, P is the lamp driving power, and j is the number of lamps. In addition, s is the lamp distance variable, a is the thermal distribution model coefficient, and b is the initial thermal energy.

Among them, S is the heat distribution energy, A is the heat distribution shape, P is the lamp driving power, m is the heat distribution position of the bulb in the short-side direction, and n is the heat distribution position of the bulb in the long-side direction.

The heat distribution energy can be changed according to the distribution positions of the plurality of bulbs 110 as shown in Equation 2 above. From the simulation and experimental results obtained by adjusting this distribution position, the triangle arrangement ratio with the smallest number of bulbs 110 can be obtained.

Meanwhile, in FIG. 8, the heat distribution transmitted to the glass substrate 10 when a general linear lamp is placed on the lamp mounting surface 101 is illustrated, and in FIG. 9, it is illustrated when the bulb 110 according to an exemplary embodiment is placed on the lamp mounting surface 101. The heat transfer to the glass substrate 10 is distributed on the surface 101. In FIGS. 8 and 9, the x-axis and the y-axis respectively indicate the positions of the width and length sides of the glass substrate, and the height indicates the heat distribution of the glass substrate. As shown in Fig. 8, since the individual control is restricted by the linear arrangement of the linear lamps, a surface with uniform heat distribution may not be obtained. However, as shown in FIG. 9, when the bulbs 110 are arranged in a triangular shape and individually controlled, it can be understood that a surface with a uniform heat distribution can be obtained. The area of uniform heat distribution can be widened by individually controlling the bulbs 110 arranged in a triangular shape.

Above, an exemplary embodiment in which a rectangular glass substrate having short sides and long sides different in length from each other is used is explained. However, the type of the substrate is not limited to this, but it is obvious that the present invention can be applied to various other rectangular substrates, as long as the rectangular substrate is a rectangular substrate having short and long sides with different lengths.

According to an exemplary embodiment, it is possible to easily perform the adjustment of each lamp by arranging the plurality of bulbs in a heater block that performs heat treatment on a rectangular substrate. Individual control of the bubble. In addition, according to an exemplary embodiment, the bulbs are arranged in consideration of the ratio of the width to the length of the rectangular substrate, so that thermal uniformity can be maintained during the heat treatment of the rectangular substrate, and the number of bulbs arranged in the heater block minimize. Therefore, the manufacturing cost of the substrate heat treatment device using the bulb can be reduced.

Although the present invention has been described with reference to specific embodiments, the present invention is not limited thereto but only by the scope of the patent application. Therefore, those skilled in the art should easily understand that various modifications and changes can be made to the present invention without departing from the spirit and scope of the present invention defined by the scope of the attached patent application.

10‧‧‧Glass substrate

110‧‧‧Bulb

101‧‧‧Light mounting surface

a’, b’‧‧‧ interval

A, A1‧‧‧Short side

B, B1‧‧‧long side

Claims (14)

A heater block includes a heater lamp for transferring heat to a rectangular substrate including short sides and long sides with different lengths, the heater lamp includes a plurality of bulbs, wherein the bulbs are arranged into Make the number of the bulbs arranged parallel to the short side of the rectangular substrate and the number of the bulbs arranged parallel to the long side of the rectangular substrate the same as each other, wherein when the short side of the bulb: When the long-side arrangement ratio is the ratio of the interval between the bulbs arranged parallel to the short side of the rectangular substrate to the interval between the bulbs arranged parallel to the long side of the rectangular substrate, The short side: long side arrangement ratio of the bulb is determined so that the number of the bulbs arranged in a direction parallel to the short side of the rectangular substrate is equal to the number of bulbs arranged in a direction parallel to the rectangular substrate. The number of the bulbs arranged in the direction of the long side is the same as each other. The heater block according to claim 1, wherein when the ratio of the length of the short side of the rectangular substrate to the length of the long side is the short side of the rectangular substrate: the long side substrate ratio When the bulbs are arranged in a linear shape, and the short side: long side arrangement ratio of the bulb is determined according to the short side: long side substrate ratio of the rectangular substrate. The heater block according to the second item of the scope of patent application, wherein the value of the short side: long side arrangement ratio of the bulb is determined to be relative to the short side: long side substrate ratio of the rectangular substrate The value is the same. The heater block according to the second item of the scope of patent application, wherein when the short side: long side substrate ratios of the plurality of rectangular substrates to be heat treated are different from each other When, the short-side:long-side arrangement ratio of the bulb is determined as an average of the short-side:long-side substrate ratios of the plurality of rectangular substrates. The heater block according to claim 4, wherein the short side: long side arrangement ratio of the bulb has any arrangement ratio in the range of about 1:1.14 to about 1:1.35. A heater block includes a heater lamp for transferring heat to a rectangular substrate including short sides and long sides with different lengths, the heater lamp includes a plurality of bulbs, wherein the plurality of bulbs are respectively The bulbs that are arranged parallel to the short side and the long side of the rectangular substrate, and that are parallel to the short side of the rectangular substrate are arranged so as to be self-parallel to the long side of the rectangular substrate The center point between the bulbs is parallel to the extension line of the short side, wherein the gap between the center points of the two bulbs arranged parallel to the long side of the rectangular substrate is the bottom side, And when the distance from the center point between the two bulbs to the center point of the bulb closest in the direction parallel to the short side is the height, the bulbs are arranged such that the bottom edge: height The ratio is 1.5:1. A heater block includes a heater lamp for transferring heat to a rectangular substrate including short sides and long sides with different lengths, the heater lamp includes a plurality of bulbs, wherein the plurality of bulbs are respectively The bulbs that are arranged parallel to the short side and the long side of the rectangular substrate, and are arranged parallel to the long side of the rectangular substrate are arranged to be located on the short side parallel to the rectangular substrate The center point between the bulbs is parallel to the extension line of the long side, wherein the gap between the center points of the two bulbs arranged parallel to the short side of the rectangular substrate is the bottom side, And from the center point between the two bulbs to the side parallel to the long side When the distance between the center points of the bulbs closest to the upward position is the height, the bulbs are arranged so that the bottom edge: height ratio is 1:1.2. A substrate heat treatment device, comprising: a processing chamber, including a heat treatment space for a rectangular substrate, the rectangular substrate including short sides and long sides with different lengths; a heater block, including a plurality of bulbs that generate heat, wherein The short side of the bulb: the long side arrangement ratio is the interval between the bulbs arranged parallel to the short side of the rectangular substrate versus the distance between the bulbs arranged parallel to the long side of the rectangular substrate When the ratio of the interval, the short-side: long-side arrangement ratio of the bulb is determined so that the number of the bulbs arranged in the direction parallel to the short side of the rectangular substrate is equal to the The number of the bulbs arranged in the direction of the long side of the rectangular substrate are the same as each other; a substrate supporting member to support the rectangular substrate; and a heat treatment control part to individually control the bulbs so that all The rectangular substrate is uniformly heat-treated. The substrate heat treatment device described in the scope of patent application, wherein when the ratio of the length of the short side to the length of the long side of the rectangular substrate is the short side: long side substrate ratio of the rectangular substrate The bulbs are arranged in a linear shape, and the short side: long side arrangement ratio of the bulb is determined according to the short side: long side substrate ratio of the rectangular substrate. A substrate heat treatment device, comprising: a treatment chamber, including a heat treatment space for a rectangular substrate, the rectangular substrate including short sides and long sides with different lengths; The heater block includes a plurality of bulbs that generate heat energy, and the plurality of bulbs are respectively arranged parallel to the short side and the long side of the rectangular substrate, so that the light bulb is parallel to the short side of the rectangular substrate. The bulbs are arranged to be located on an extension line parallel to the short side from the center point between the bulbs parallel to the long side of the rectangular substrate; a substrate support member for supporting the rectangular substrate; And a heat treatment control component for individually controlling the bulbs so that the rectangular substrate can be uniformly heat treated. The substrate heat treatment device according to claim 10, wherein when the gap between the center points of the two bulbs arranged in parallel to the long side of the rectangular substrate is the bottom side, and the distance between the two When the distance from the center point between the bulbs to the center point of the bulb closest in the direction parallel to the short side is the height, the bulbs are arranged so that the bottom side: height ratio is 1.5:1 . A substrate heat treatment device, comprising: a processing chamber, including a heat treatment space for a rectangular substrate, the rectangular substrate including short sides and long sides with different lengths; a heater block, including a plurality of bulbs that generate heat, and a plurality of The bulbs are respectively arranged parallel to the short side and the long side of the rectangular substrate, so that the bulbs parallel to the long side of the rectangular substrate are arranged to be located on all sides parallel to the rectangular substrate. The center point between the bulbs on the short side is parallel to the extension line of the long side; a substrate support member for supporting the rectangular substrate; and a heat treatment control part for individually controlling the bulbs so that The rectangular substrate is uniformly heat-treated. The substrate heat treatment device according to claim 12, wherein when the gap between the center points of the two bulbs arranged in parallel to the long side of the rectangular substrate is the bottom side, When the distance from the center point between the bulbs to the center point of the bulb closest in the direction parallel to the short side is the height, the bulbs are arranged so that the bottom side: height ratio is 1:1.2 . The substrate heat treatment device according to any one of claims 8, 10, and 12, wherein the heat treatment control part controls the bulb so that it is located at the edge of the heater block The bulb at the location generates more heat energy than the other bulbs.

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