TWI710775B - Testing device for antenna in package ic - Google Patents

Testing device for antenna in package ic Download PDF

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TWI710775B
TWI710775B TW108132283A TW108132283A TWI710775B TW I710775 B TWI710775 B TW I710775B TW 108132283 A TW108132283 A TW 108132283A TW 108132283 A TW108132283 A TW 108132283A TW I710775 B TWI710775 B TW I710775B
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Taiwan
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socket
integrated circuit
circuit chip
movable arm
testing device
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TW108132283A
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Chinese (zh)
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TW202111339A (en
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李君平
陳世宗
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中華精測科技股份有限公司
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Publication of TW202111339A publication Critical patent/TW202111339A/en

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Abstract

A testing device for testing an antenna in package IC is disclosed. The wireless chip includes a signal antenna. The testing device includes a substrate including a socket disposed on the substrate. The socket has a positioning surface for supporting the antenna in package IC. A movable arm includes a pick-and-place head movable above the socket for extracting and placing the antenna in package IC on the positioning surface. A reflector is movably disposed above the socket. A signal receiving chip located on one side of the socket and below the reflector is electrically connected to the substrate. The antenna in package IC is configured to emit wireless signals which are to be reflected to the receiving chip via the reflector for testing.

Description

積體電路晶片的測試裝置Integrated circuit chip testing device

本申請是有關一種測試裝置,特別是指一種用於具無線天線的積體電路晶片的測試裝置。This application relates to a testing device, in particular to a testing device for integrated circuit chips with wireless antennas.

無線傳輸及無線通訊的技術已被廣泛地使用於各行各業,並已逐漸取代傳統資訊傳播的方式,進而創造出新世代的電子產業。為滿足無線傳輸及通訊的需求,各式電子產品無一不具有無線傳輸的功能,其中具無線天線的積體電路(integrated circuit, IC) 即為不可或缺的元件之一。Wireless transmission and wireless communication technologies have been widely used in all walks of life, and have gradually replaced traditional methods of information dissemination, thereby creating a new generation of electronic industries. In order to meet the needs of wireless transmission and communication, all kinds of electronic products have the function of wireless transmission. Among them, an integrated circuit (IC) with a wireless antenna is one of the indispensable components.

傳統無線天線IC晶片主要包括天線及微電路,並具有天線封裝在晶片內(antenna in package, AIP)的結構。通過在電子產品內設置IC晶片,即可和接收或傳送端進行無線訊號傳輸作業。因此,無線天線IC晶片的測試也是生產成本的主要部份。目前自動量產測試AIP 晶片,還沒有統一規格,甚至需要依賴人員手動取放晶片在插座(socket),嚴重影響生產效率。具體而言,傳統自動量產測試AIP 晶片的測試設備,插座上設有測試天線,且插座上具有上蓋。在測試過程中,人員需要使用吸筆吸取與放置晶片於插座上,然後將插座的上蓋蓋上後,利用上蓋壓住晶片,使晶片的錫球與插座上的彈簧針(pogo pin)導通。由於插座上蓋的測試天線要接收晶片發出的無線訊號,但會干涉搬料機去吸取與放置晶片,使自動化測試難以實現。此外,目前無線天線IC晶片的訊號測試方法是利用測試天線,將測試訊號傳輸到昂貴的自動測試設備(automatic test equipment, ATE)進行最終測試。然而,對於基本的無線訊號測試,ATE成本高昂,並非測試選用的最佳方案。The traditional wireless antenna IC chip mainly includes an antenna and a microcircuit, and has an antenna in package (AIP) structure. By setting the IC chip in the electronic product, wireless signal transmission can be performed with the receiving or transmitting end. Therefore, the testing of wireless antenna IC chips is also a major part of the production cost. Currently, there is no uniform specification for automatic mass production and testing of AIP chips, and it is even necessary to rely on personnel to manually pick and place chips in sockets, which seriously affects production efficiency. Specifically, in the traditional automatic mass production test equipment for AIP chips, the socket is equipped with a test antenna and the socket has an upper cover. During the test, the personnel need to use a suction pen to pick up and place the chip on the socket, and then cover the upper cover of the socket, and then press the chip with the upper cover to make the solder ball of the chip conduct with the pogo pin on the socket. Since the test antenna on the upper cover of the socket needs to receive the wireless signal from the chip, it will interfere with the transfer machine to pick up and place the chip, making it difficult to realize automated testing. In addition, the current signal testing method for wireless antenna IC chips is to use a test antenna to transmit the test signal to expensive automatic test equipment (ATE) for final testing. However, for basic wireless signal testing, ATE is expensive and not the best solution for testing.

本申請的目的在於提供一種具無線訊號天線的積體電路晶片的測試裝置,其可在晶片搬料台內,對積體電路晶片的訊號品質進行快速且精確的自動化測試。The purpose of the present application is to provide a testing device for integrated circuit chips with wireless signal antennas, which can perform rapid and accurate automated testing of the signal quality of integrated circuit chips in a chip carrier.

本申請的另一目的在於提供一種可以在同一測試平台,通過不受遮擋的訊號傳送環境,自動化地檢測積體電路晶片的無線訊號是否符合檢測標準的積體電路晶片的測試裝置。Another object of the present application is to provide a testing device for integrated circuit chips that can automatically detect whether the wireless signal of the integrated circuit chip meets the testing standard on the same test platform through an unobstructed signal transmission environment.

為達到前述目的,本申請提供一種積體電路晶片的測試裝置,該積體電路晶片包括無線訊號天線及設於積體電路晶片的底部的錫球面,該測試裝置包括:一載板,包括一設於該載板上的插座,其具有一用於承放該積體電路晶片的軟板;一活動臂,其可活動於該插座的上方,用以提取及置放該積體電路晶片於該軟板上;一具有反射面的反射罩,可活動地設於該插座的上方;以及一無線收訊元件,位於該插座的一側及該反射面的下方,並電性連接於該載板,其中該積體電路晶片的無線訊號天線用以發出無線訊號,並經由該反射面反射至該無線收訊元件以進行測試。In order to achieve the foregoing objective, the present application provides a testing device for an integrated circuit chip. The integrated circuit chip includes a wireless signal antenna and a tin spherical surface provided on the bottom of the integrated circuit chip. The testing device includes: a carrier including a The socket provided on the carrier board has a flexible board for holding the integrated circuit chip; a movable arm which can move above the socket for picking up and placing the integrated circuit chip on The soft board; a reflective cover with a reflective surface, which can be movably installed above the socket; and a wireless receiving element, located on one side of the socket and below the reflective surface, and electrically connected to the carrier The board, wherein the wireless signal antenna of the integrated circuit chip is used to send out a wireless signal, and is reflected to the wireless receiving element through the reflective surface for testing.

依據本申請的一實施例,該測試裝置更包括一插座上蓋,其可活動地設於該插座的上方,並包括一連接部及一抵壓柱,其中該連接部面向該插座設置,該抵壓柱設於該連接部上,並朝該插座方向延伸一預定距離,用以抵壓該積體電路晶片的邊部。According to an embodiment of the present application, the testing device further includes a socket upper cover, which is movably disposed above the socket, and includes a connecting portion and a pressing post, wherein the connecting portion is disposed facing the socket, and the pressing The pressing post is arranged on the connecting part and extends a predetermined distance in the direction of the socket for pressing against the edge of the integrated circuit chip.

依據本申請的另一實施例,該測試裝置更包括一開放空間,其形成於該抵壓柱、該連接部及該反射面之間,並暴露於該插座上。According to another embodiment of the present application, the testing device further includes an open space formed between the pressing column, the connecting portion and the reflecting surface, and is exposed on the socket.

依據本申請的另一實施例,該反射罩設於該插座上蓋的連接部的下方,且該反射罩的一端位於該插座的正上方,另一端朝該載板的方向向下傾斜設置。According to another embodiment of the present application, the reflective cover is disposed below the connecting portion of the upper cover of the socket, and one end of the reflective cover is located directly above the socket, and the other end is inclined downwardly toward the carrier board.

依據本申請的另一實施例,該反射罩的該另一端延伸至該無線收訊元件上。According to another embodiment of the present application, the other end of the reflective cover extends to the wireless receiving element.

依據本申請的另一實施例,該插座上蓋的抵壓柱靠近該插座的一端更設有一凸條,其對應該積體電路晶片的周圍設置。According to another embodiment of the present application, an end of the pressing post of the upper cover of the socket close to the socket is further provided with a protruding strip corresponding to the periphery of the integrated circuit chip.

依據本申請的另一實施例,該測試裝置更包括一屏蔽體,用以罩蓋該插座上蓋及該反射罩。According to another embodiment of the present application, the testing device further includes a shield for covering the upper cover of the socket and the reflector.

依據本申請的另一實施例,該活動臂包括一吸嘴部,其對應該積體電路晶片的周邊設置,用以定位並吸取該積體電路晶片。According to another embodiment of the present application, the movable arm includes a suction nozzle portion, which is arranged corresponding to the periphery of the integrated circuit chip, and is used for positioning and sucking the integrated circuit chip.

依據本申請的另一實施例,該吸嘴部為無線訊號可穿透的穿透物質所製。According to another embodiment of the present application, the suction nozzle is made of a penetrating material that can penetrate wireless signals.

依據本申請的另一實施例,該活動臂的吸嘴部更包括一開口部,該開口部包括一開口及一可活動地設置於該開口上的遮板。According to another embodiment of the present application, the suction nozzle of the movable arm further includes an opening, and the opening includes an opening and a shutter movably disposed on the opening.

依據本申請的另一實施例,該反射罩連接於該活動臂,並位於該活動臂的上方,且該反射罩依據該活動臂的移動而連動於該插座的正上方。According to another embodiment of the present application, the reflector is connected to the movable arm and located above the movable arm, and the reflector is linked directly above the socket according to the movement of the movable arm.

依據本申請的另一實施例,該反射面為一拋物鏡反射面,其具有一朝向該插座設置的凹部。According to another embodiment of the present application, the reflective surface is a parabolic mirror reflective surface, which has a concave portion facing the socket.

依據本申請的另一實施例,該無線收訊元件設於該載板設有該插座的同一表面上。According to another embodiment of the present application, the wireless receiving element is arranged on the same surface of the carrier board where the socket is provided.

依據本申請的另一實施例,該插座設有一真空吸取裝置,用以由該插座方向真空吸取該積體電路晶片。According to another embodiment of the present application, the socket is provided with a vacuum suction device for vacuum suction of the integrated circuit chip from the direction of the socket.

本申請積體電路晶片的測試裝置可通過該活動臂、該插座上蓋和該反射罩的配合,或該活動臂和該反射罩的配合,建立遠場測試環境,並通過該拋物鏡反射面來量測該積體電路晶片發射的球面波訊號。在該活動臂的吸嘴部、該插座上蓋和該反射面的配合下,可以使該積體電路晶片的訊號傳輸路徑不會受到遮擋,可有效達到快速且準確的測量效果。在單獨該活動臂和該反射面的配合下,及利用該吸嘴的穿透材質,使該積體電路晶片的訊號可以穿透或繞射,進而達到快速且準確的測量效果。此外,本申請的測試裝置亦可利用插座的真空吸取裝置,同樣可使該積體電路晶片的訊號順利穿透或繞射到反射面,且準確地發送到該無線收訊元件,進而完成訊號測試。本申請的積體電路晶片的測試裝置利用無線收訊元件及反射罩的設置,有效解決傳統積體電路晶片難以自動化測試的問題,並降低傳統自動測試設備(automatic test equipment, ATE)所需的昂貴測試成本, 進而達到在晶片搬料機完成自動化測試積體電路晶片,大幅提升測試產能,滿足量產的需求。The testing device of the integrated circuit chip of the present application can establish a far-field test environment through the cooperation of the movable arm, the upper cover of the socket and the reflector, or the cooperation of the movable arm and the reflector, and the reflection surface of the parabolic mirror Measure the spherical wave signal emitted by the integrated circuit chip. With the cooperation of the suction nozzle part of the movable arm, the upper cover of the socket and the reflecting surface, the signal transmission path of the integrated circuit chip can be prevented from being blocked, which can effectively achieve a fast and accurate measurement effect. With the cooperation of the movable arm and the reflective surface alone, and the use of the penetrating material of the suction nozzle, the signal of the integrated circuit chip can be penetrated or diffracted, thereby achieving a fast and accurate measurement effect. In addition, the test device of the present application can also use the vacuum suction device of the socket, which can also make the signal of the integrated circuit chip smoothly penetrate or diffract to the reflective surface, and accurately send to the wireless receiving element, thereby completing the signal test. The testing device for integrated circuit chips of the present application utilizes the arrangement of wireless receiving components and reflectors, which effectively solves the problem that traditional integrated circuit chips are difficult to automatically test, and reduces the need for traditional automatic test equipment (ATE) Expensive testing costs, which in turn achieves the completion of automated testing of integrated circuit chips on the wafer transfer machine, which greatly increases the testing capacity and meets the demand for mass production.

本申請為一種用於測試具有無線訊號收發功能的積體電路晶片的測試裝置,進而確保積體電路晶片在上料後可正確運作於電子產品。本申請的積體電路晶片可適用於需要無線傳輸功能的電子產品,如智能手機或平板等,並可應用於4G或5G的行動通訊技術。特別說明的是,本申請的測試裝置是在晶片搬料機(handler)內完成自動化的測試。請參閱圖1。圖1為本申請積體電路晶片的測試裝置的一實施例的結構示意圖。於此實施例中,本申請的積體電路晶片6的測試裝置1包括一載板2、一活動臂3、一反射罩4、一插座上蓋5、及一無線收訊元件7(如圖1及圖3所示)。該載板2為印刷電路板,其包括一設於該載板2上的插座21,其中該插座21具有一用於承放該積體電路晶片6的軟板211,其為用於錫球接觸之高速傳輸的軟性電路板,及多個顯露於軟板211的彈簧針(pogo pin, 未圖示)。該積體電路晶片6包括封裝於內部的無線訊號天線61,及設於該積體電路晶片6的一側的錫球面62,其上佈設有錫球(未圖示),該無線訊號天線61用以發射或接收無線訊號。該反射罩4包括一反射面41,其為拋物鏡反射面,並具有一朝向該插座21設置的凹部40(如圖3所示)。該無線收訊元件7位於該插座21的一側及該反射罩4的下方,並電性連接於該載板2。於此實施例中,該無線收訊元件7具有無線天線,其具體為收訊天線電路板(如圖1-4所示),用於接收來自該無線訊號天線61的訊號。具體而言,該無線收訊元件7設於該載板2設有該插座21的同一表面上,即該無線收訊元件7與該插座21間隔一預定距離,並且位於同一側。The present application is a testing device for testing integrated circuit chips with wireless signal transceiving functions, so as to ensure that the integrated circuit chips can operate correctly in electronic products after being loaded. The integrated circuit chip of the present application can be applied to electronic products that require wireless transmission functions, such as smart phones or tablets, and can be applied to 4G or 5G mobile communication technologies. In particular, the testing device of the present application completes automated testing in a wafer handler (handler). Please refer to Figure 1. FIG. 1 is a schematic structural diagram of an embodiment of a testing device for integrated circuit chips of the present application. In this embodiment, the testing device 1 of the integrated circuit chip 6 of the present application includes a carrier board 2, a movable arm 3, a reflective cover 4, a socket cover 5, and a wireless receiving element 7 (as shown in FIG. 1 And shown in Figure 3). The carrier board 2 is a printed circuit board, which includes a socket 21 arranged on the carrier board 2, wherein the socket 21 has a flexible board 211 for holding the integrated circuit chip 6, which is used for solder balls The flexible circuit board for high-speed transmission in contact, and a plurality of pogo pins (not shown) exposed on the flexible board 211. The integrated circuit chip 6 includes a wireless signal antenna 61 encapsulated inside, and a tin spherical surface 62 provided on one side of the integrated circuit chip 6, on which tin balls (not shown) are arranged, the wireless signal antenna 61 Used to transmit or receive wireless signals. The reflector 4 includes a reflecting surface 41, which is a parabolic mirror reflecting surface, and has a recess 40 (as shown in FIG. 3) facing the socket 21. The wireless receiving element 7 is located on one side of the socket 21 and under the reflector 4 and is electrically connected to the carrier board 2. In this embodiment, the wireless receiving element 7 has a wireless antenna, which is specifically a receiving antenna circuit board (as shown in FIGS. 1-4), for receiving signals from the wireless signal antenna 61. Specifically, the wireless receiving element 7 is arranged on the same surface of the carrier board 2 where the socket 21 is provided, that is, the wireless receiving element 7 and the socket 21 are separated by a predetermined distance and located on the same side.

如圖1所示,該活動臂3包括一吸嘴31,其可活動於該插座21的上方,用以提取及置放該積體電路晶片6於該軟板211上。如圖1所示,該活動臂3相對該吸嘴部31的一端為省略表示而未完全顯示,其是設置於該搬料機(未圖示)內,其中該活動臂3利用真空吸取技術,通過該吸嘴部31定位並吸取該積體電路晶片6。As shown in FIG. 1, the movable arm 3 includes a suction nozzle 31 which can be moved above the socket 21 for picking up and placing the integrated circuit chip 6 on the flexible board 211. As shown in FIG. 1, the end of the movable arm 3 opposite to the suction nozzle portion 31 is omitted and not fully shown. It is set in the conveyor (not shown), wherein the movable arm 3 uses vacuum suction technology , The integrated circuit chip 6 is positioned and sucked by the sucking nozzle portion 31.

圖2為該活動臂3置放該積體電路晶片6的結構示意圖。如圖2所示,該活動臂3朝該插座21的方向下移,並置放該積體電路晶片6於該軟板211上。FIG. 2 is a schematic diagram of the structure of the movable arm 3 where the integrated circuit chip 6 is placed. As shown in FIG. 2, the movable arm 3 moves downward toward the socket 21 and places the integrated circuit chip 6 on the flexible board 211.

圖3為圖1的測試裝置的另一結構示意圖。如圖3所示,該插座上蓋5可活動地設於該插座21的上方,其中圖3所示的插座上蓋5為省略表示,而未完全顯示其是設置於該自動搬料機內。具體而言,該插座上蓋5包括一連接部51及一抵壓柱52,其中該連接部51面向該插座21設置,該抵壓柱52設於該連接部51上,並朝該插座21方向延伸一預定距離。如圖3所示,該抵壓柱52垂直於該插座21。特別說明的是,於此實施例中,該反射罩4設於該插座上蓋5的連接部51的下方,且該反射罩4的一端位於該插座21的正上方,另一端朝該載板2的方向向下傾斜設置,其中該反射面4的該另一端延伸至該無線收訊元件7上方。換言之,該反射面41對應於該無線收訊元件7的一端,其相對於該載板2的高度是低於該反射面41另一端相對於該載板2的高度。 具體而言,該插座2的周圍設有外框20,而該抵壓柱52靠近該插座21的一端更設有一凸條521,其對應該積體電路晶片6的周圍設置,並位於該外框20及該基座21之間。此外,該抵壓柱52、該連接部51及該反射面4之間共同形成一開放空間50,其暴露於該插座21上。亦即,該抵壓柱52是設於相對該插座21相鄰該邊框20的位置,進而不會遮擋該插座21的中央部位的上方。FIG. 3 is another schematic diagram of the structure of the testing device in FIG. 1. As shown in Fig. 3, the socket upper cover 5 can be movably arranged above the socket 21, wherein the socket upper cover 5 shown in Fig. 3 is omitted, and it is not fully shown that it is installed in the automatic feeder. Specifically, the socket upper cover 5 includes a connecting portion 51 and a pressing column 52, wherein the connecting portion 51 is disposed facing the socket 21, and the pressing column 52 is disposed on the connecting portion 51 and facing the socket 21. Extend a predetermined distance. As shown in FIG. 3, the pressing column 52 is perpendicular to the socket 21. Specifically, in this embodiment, the reflective cover 4 is disposed under the connecting portion 51 of the upper cover 5 of the socket, and one end of the reflective cover 4 is located directly above the socket 21, and the other end faces the carrier board 2. The direction of is inclined downward, and the other end of the reflective surface 4 extends above the wireless receiving element 7. In other words, the reflective surface 41 corresponds to one end of the wireless receiving element 7, and its height relative to the carrier board 2 is lower than the height of the other end of the reflective surface 41 relative to the carrier board 2. Specifically, an outer frame 20 is provided around the socket 2, and an end of the pressing column 52 close to the socket 21 is further provided with a protruding bar 521, which is provided around the integrated circuit chip 6 and is located on the outer side. Between the frame 20 and the base 21. In addition, an open space 50 is formed between the pressing column 52, the connecting portion 51 and the reflecting surface 4, which is exposed on the socket 21. That is, the pressing column 52 is arranged at a position adjacent to the frame 20 relative to the socket 21, and thus does not block the upper part of the central part of the socket 21.

續請參閱圖3配合圖1、圖2及圖4觀之,其中圖4為該插座上蓋5加壓該積體電路晶片6的結構示意圖。本實施例的測試裝置1是通過該活動臂3及該插座上蓋5的配合完成。於實際測試時,先通過該活動臂3放置該積體電路晶片6於該插座21後,該活動臂3移開(如圖1及圖2所示),再由該插座上蓋5下移並抵壓該積體電路晶片6(如圖3所示);此時,該抵壓柱52的凸條521壓抵該積體電路晶片6的最外圍邊部,使該積體電路晶片6底部的錫球與該插座21的pogo pin端(彈簧針)定位並電性導通(如圖4所示)。之後,該積體電路晶片6經由控制發出無線訊號。由於該插座上蓋5的開放空間50位於該積體電路晶片6的正上方,該無線訊號不會受到遮擋,使該無線訊號的球面波訊號向外朝上地傳送至該反射面4,並經由該反射面4的反射而形成平面波,其射向下方的無線收訊元件7(如圖4所示),其中該無線收訊元件7順利接收該無線訊號,並傳送到外部運算設備(例如,電腦)進行運算而產生測試結果,用以測試該積體電路晶片6的訊號傳送功能是否正常。Please refer to FIG. 3 in conjunction with FIG. 1, FIG. 2 and FIG. 4. FIG. 4 is a schematic diagram of the structure of the socket cover 5 pressing the integrated circuit chip 6. The testing device 1 of this embodiment is completed by the cooperation of the movable arm 3 and the upper cover 5 of the socket. In the actual test, after the integrated circuit chip 6 is placed on the socket 21 by the movable arm 3, the movable arm 3 is moved away (as shown in Figs. 1 and 2), and then the upper cover 5 of the socket is moved down and combined Press the integrated circuit chip 6 (as shown in FIG. 3); at this time, the protruding strips 521 of the pressing column 52 press against the outermost edge of the integrated circuit chip 6 to make the bottom of the integrated circuit chip 6 The solder ball is positioned and electrically connected to the pogo pin end (pogo pin) of the socket 21 (as shown in FIG. 4). After that, the integrated circuit chip 6 sends out wireless signals through control. Since the open space 50 of the upper cover 5 of the socket is located directly above the integrated circuit chip 6, the wireless signal will not be blocked, so that the spherical wave signal of the wireless signal is transmitted upwards to the reflecting surface 4 and passes through The reflection of the reflective surface 4 forms a plane wave, which is directed to the wireless receiving element 7 below (as shown in FIG. 4). The wireless receiving element 7 smoothly receives the wireless signal and transmits it to an external computing device (for example, The computer) performs calculations to generate test results to test whether the signal transmission function of the integrated circuit chip 6 is normal.

續請參閱圖3及圖4,本實施例的測試裝置1更包括一屏蔽體501,用以罩蓋該插座上蓋5及該反射罩4,其中該屏蔽體501為吸波材所製,可減少該積體電路晶片6的無線訊號受外部干擾,或多次反射引起的損耗。3 and 4, the testing device 1 of this embodiment further includes a shielding body 501 for covering the socket upper cover 5 and the reflective cover 4, wherein the shielding body 501 is made of a wave-absorbing material, Reduce the loss of the wireless signal of the integrated circuit chip 6 caused by external interference or multiple reflections.

請參閱圖5至圖8為本申請測試裝置1的另一實施例。圖5至圖8所述的實施例與前述實施例的主要區別在於:圖5的實施例並無採用該加壓臂5,且反射罩的結構關係並不相同。如圖5所示,本實施例的測試裝置1包括載板2、活動臂3、反射罩4、積體電路晶片6及無線收訊元件7,其相同於前述實施例中的元件構造於此不再複述。特別說明的是,本實施例的反射罩4是連接於活動臂3,並位於該活動臂3的上方(如圖5所示),且該反射罩4可依據該活動臂3的移動而連動於該插座21的正上方。此外,本實施例的無線收訊元件7為一種無線收訊晶片,用於接收來自該無線訊號天線61的訊號。具體而言,該反射罩4具有反射面41,其對應於該外框20的一端,相對於該載板2的高度低於該反射面41的另一端,使該反射面41的凹部40朝向該無線收訊元件7的方向設置。特別說明的是,該吸嘴部31為無線訊號可穿透的穿透物質所製。Please refer to FIG. 5 to FIG. 8 for another embodiment of the testing device 1 of the present application. The main difference between the embodiment described in FIGS. 5 to 8 and the foregoing embodiment is that the embodiment of FIG. 5 does not use the pressure arm 5, and the structural relationship of the reflector is not the same. As shown in FIG. 5, the test device 1 of this embodiment includes a carrier board 2, a movable arm 3, a reflector 4, an integrated circuit chip 6 and a wireless receiving element 7, which are the same as those in the previous embodiment. Do not repeat it again. Specifically, the reflector 4 of this embodiment is connected to the movable arm 3 and is located above the movable arm 3 (as shown in FIG. 5), and the reflector 4 can be linked according to the movement of the movable arm 3 Just above the socket 21. In addition, the wireless receiving element 7 of this embodiment is a wireless receiving chip for receiving signals from the wireless signal antenna 61. Specifically, the reflective cover 4 has a reflective surface 41, which corresponds to one end of the outer frame 20, and the height relative to the carrier 2 is lower than the other end of the reflective surface 41, so that the concave portion 40 of the reflective surface 41 faces The direction of the wireless receiving element 7 is set. In particular, the suction nozzle portion 31 is made of a penetrating material that can penetrate wireless signals.

續請參閱圖5配合圖6-7觀之。本實施例的測試裝置1運作時,該活動臂3先置放該積體電路晶片6於該插座21上,之後,藉由該活動臂3的吸嘴部31抵壓該積體電路晶片6(如圖6所示)。由於該吸嘴部31為無線訊號可穿透的穿透物質所製,該積體電路晶片6發出的無線訊號的訊號波,仍然可以通過該吸嘴部31而傳送到該反射面41,並由該反射面41反射至該無線收訊元件7。換言之,縱使該吸嘴部31是罩蓋於該積體電路晶片6上,但不會影響訊號發射品質,仍可通過該反射面4而反射到該無線收訊元件7,進而完成測試作業。Please refer to Figure 5 in conjunction with Figure 6-7. When the testing device 1 of this embodiment is operating, the movable arm 3 first places the integrated circuit chip 6 on the socket 21, and then the suction nozzle portion 31 of the movable arm 3 presses the integrated circuit chip 6 (As shown in Figure 6). Since the suction nozzle portion 31 is made of a penetrating material that can penetrate wireless signals, the signal wave of the wireless signal emitted by the integrated circuit chip 6 can still be transmitted to the reflecting surface 41 through the suction nozzle portion 31, and It is reflected by the reflective surface 41 to the wireless receiving element 7. In other words, even if the suction nozzle portion 31 is covered on the integrated circuit chip 6, it will not affect the signal emission quality, and it can still be reflected to the wireless receiving element 7 through the reflecting surface 4 to complete the test operation.

請參閱圖8。圖8所示的測試裝置1的插座21更進一步配置有一真空吸取裝置210,用以由該插座21的下方,通過該插座21的若干縫隙(未圖示)吸取該積體電路晶片6。亦即,該活動臂3於置放該積體電路晶片6後可移開,而可使該吸嘴部31與該積體電路晶片6保持一預定距離,用以讓出該積體電路晶片6的訊號繞射空間,且不須施力加壓該積體電路晶片6。此時,可通過該真空吸取裝置210持續吸取該積體電路晶片6,使該積體電路晶片6和該插座21電性導通,而無線訊號可更快速的發射至該反射面41,並反射至該無線收訊元件7,進而完成測試作業。該真空吸取裝置210的原理與一般真空吸取原理相同,即利用真空泵浦(未圖示)產生吸附作用。Refer to Figure 8. The socket 21 of the testing device 1 shown in FIG. 8 is further equipped with a vacuum suction device 210 for sucking the integrated circuit chip 6 from below the socket 21 through several gaps (not shown) of the socket 21. That is, the movable arm 3 can be moved away after the integrated circuit chip 6 is placed, so that the suction nozzle portion 31 and the integrated circuit chip 6 can be kept at a predetermined distance for freeing the integrated circuit chip The signal diffraction space of 6 does not require force to press the integrated circuit chip 6. At this time, the integrated circuit chip 6 can be continuously sucked by the vacuum suction device 210, so that the integrated circuit chip 6 and the socket 21 are electrically connected, and the wireless signal can be transmitted to the reflecting surface 41 and reflected more quickly To the wireless receiving component 7 to complete the test operation. The principle of the vacuum suction device 210 is the same as the general vacuum suction principle, that is, a vacuum pump (not shown) is used to generate adsorption.

請參閱圖9,其為圖5的測試裝置的另一結構示意圖。於此實施例中,為確保該吸嘴部31完全不會影響訊號品質,該吸嘴部31更可包括一開口部32,該開口部32包括一開口321及一可活動地設置於該開口321上的遮板322。具體而言,當該吸嘴部31在加壓該積體電路晶片6後,該遮板322可自動移動,並開啟該開口321,使該積體電路晶片6的無線訊號可以不受該吸嘴部31的遮擋而發射到該反射面41,並更快速的反射至該無線收訊元件7,進而完成測試作業。一旦該測試作業完成後,該遮板322關閉該開口321並回復成常態狀態。Please refer to FIG. 9, which is another structural diagram of the testing device of FIG. 5. In this embodiment, in order to ensure that the suction nozzle portion 31 does not affect the signal quality at all, the suction nozzle portion 31 may further include an opening 32. The opening 32 includes an opening 321 and a movably disposed at the opening. 321 on the shutter 322. Specifically, when the suction nozzle portion 31 presses the integrated circuit chip 6, the shutter 322 can automatically move and open the opening 321 so that the wireless signal of the integrated circuit chip 6 can be protected from the suction. The mouth 31 is shielded and emitted to the reflecting surface 41, and is reflected to the wireless receiving element 7 more quickly, thereby completing the test operation. Once the test operation is completed, the shutter 322 closes the opening 321 and returns to a normal state.

綜上所述,本申請積體電路晶片的測試裝置可通過該活動臂、該插座上蓋和該反射罩的配合,或該活動臂和該反射罩的配合,建立遠場測試環境,並通過該弧形反射罩的反射面來量測該積體電路晶片發射的訊號。在該活動臂、該插座上蓋和該反射面的配合下,可以使該積體電路晶片的訊號傳輸路徑不會受到遮擋,可有效達到快速且準確的測量效果。在單獨該活動臂和該反射面的配合下,及利用該取放頭的穿透材質,使該積體電路晶片的訊號可以穿透或繞射,進而達到快速且準確的測量效果。此外,本申請的測試裝置亦可利用該活動臂的開口部及該插座的真空吸取裝置,同樣可使該積體電路晶片的訊號順利且準確地發送到該無線收訊元件,進而完成訊號測試。本申請的積體電路晶片的測試裝置利用無線收訊元件及反射面的設置,有效解決傳統積體電路晶片難以自動化測試的問題,並降低傳統自動測試設備(automatic test equipment, ATE)所需的昂貴測試成本, 進而達到在晶片搬料機完成自動化測試積體電路晶片,大幅提升測試產能,滿足量產的需求。In summary, the testing device for integrated circuit chips of the present application can establish a far-field test environment through the cooperation of the movable arm, the upper cover of the socket and the reflector, or the cooperation of the movable arm and the reflector, and pass the The reflective surface of the curved reflector is used to measure the signal emitted by the integrated circuit chip. With the cooperation of the movable arm, the upper cover of the socket, and the reflective surface, the signal transmission path of the integrated circuit chip can be prevented from being blocked, which can effectively achieve rapid and accurate measurement effects. With the cooperation of the movable arm and the reflective surface alone, and the use of the penetrating material of the pick-and-place head, the signal of the integrated circuit chip can be penetrated or diffracted, thereby achieving rapid and accurate measurement. In addition, the test device of the present application can also use the opening of the movable arm and the vacuum suction device of the socket, which can also enable the signal of the integrated circuit chip to be smoothly and accurately sent to the wireless receiving component, thereby completing the signal test . The testing device for integrated circuit chips of the present application utilizes the arrangement of wireless receiving components and reflective surfaces, which effectively solves the problem that traditional integrated circuit chips are difficult to automatically test, and reduces the need for traditional automatic test equipment (ATE) Expensive testing costs, which in turn achieves the completion of automated testing of integrated circuit chips on the wafer transfer machine, which greatly increases the testing capacity and meets the demand for mass production.

本實施例用以說明本發明的技術思想,而並非用以限定本發明的技術思想,因此本發明的權利範圍並不限定於本實施例。本發明的保護範圍應由權利要求書解釋,應解釋為與上述保護範圍相同或等同的所有技術思想均包括在本發明的權利範圍內。This embodiment is used to illustrate the technical idea of the present invention, but not to limit the technical idea of the present invention. Therefore, the scope of rights of the present invention is not limited to this embodiment. The protection scope of the present invention should be interpreted by the claims, and it should be interpreted that all technical ideas that are the same or equivalent to the above protection scope are included in the scope of the present invention.

1:測試裝置 2:載板 20:外框 21:插座 210:真空吸取裝置 211:軟板 3:活動臂 31:吸嘴部 32:開口部 321:開口 322:遮板 4:反射罩 40:凹部 41:反射面 5:插座上蓋 50:開放空間 501:屏蔽體 51:連接部 52:抵壓柱 521:凸條 6:積體電路晶片 61:無線訊號天線 62:錫球面 7:無線收訊元件 1: Test device 2: carrier board 20: Outer frame 21: socket 210: Vacuum suction device 211: Soft Board 3: movable arm 31: Nozzle 32: Opening 321: open 322: Shutter 4: reflector 40: recess 41: reflective surface 5: Socket cover 50: open space 501: Shield 51: connecting part 52: pressure column 521: Rib 6: Integrated circuit chip 61: Wireless signal antenna 62: Tin spherical surface 7: Wireless receiving components

圖1為本申請的積體電路晶片的測試裝置的一實施例的結構示意圖。 圖2為圖1的測試裝置的一活動臂置放一積體電路晶片的結構示意圖。 圖3為圖1的測試裝置的另一結構示意圖,用以顯示一插座上蓋。 圖4為圖3的插座上蓋加壓該積體電路晶片的結構示意圖。 圖5為本申請的積體電路晶片的測試裝置的另一實施例的結構示意圖。 圖6為圖5的測試裝置的一活動臂置放該積體電路晶片的結構示意圖。 圖7為圖6的活動臂加壓於該積體電路晶片的結構示意圖。 圖8為圖5的測試裝置的另一結構示意圖。 圖9為圖5的測試裝置的另一結構示意圖。 FIG. 1 is a schematic structural diagram of an embodiment of an integrated circuit chip testing device of the present application. FIG. 2 is a schematic structural diagram of an integrated circuit chip placed on a movable arm of the testing device of FIG. 1. Fig. 3 is another schematic diagram of the structure of the testing device of Fig. 1 for showing an upper cover of a socket. FIG. 4 is a schematic structural diagram of the upper cover of the socket of FIG. 3 pressing the integrated circuit chip. FIG. 5 is a schematic structural diagram of another embodiment of the testing device for integrated circuit chips of this application. 6 is a schematic diagram of the structure of the integrated circuit chip placed on a movable arm of the testing device of FIG. 5. FIG. 7 is a schematic view showing the structure of the movable arm of FIG. 6 pressing on the integrated circuit chip. FIG. 8 is another schematic diagram of the structure of the testing device of FIG. 5. FIG. 9 is another schematic diagram of the structure of the testing device of FIG. 5.

1:測試裝置 1: Test device

2:載板 2: carrier board

20:外框 20: Outer frame

21:插座 21: socket

211:軟板 211: Soft Board

4:反射罩 4: reflector

40:凹部 40: recess

41:反射面 41: reflective surface

5:插座上蓋 5: Socket cover

50:開放空間 50: open space

501:屏蔽體 501: Shield

51:連接部 51: connecting part

52:抵壓柱 52: pressure column

521:凸條 521: Rib

6:積體電路晶片 6: Integrated circuit chip

61:無線訊號天線 61: Wireless signal antenna

62:錫球面 62: Tin spherical surface

7:無線收訊元件 7: Wireless receiving components

Claims (12)

一種積體電路晶片的測試裝置,該積體電路晶片包括無線訊號天線,該測試裝置包括:一載板,包括一設於該載板上的插座,其具有一用於承放該積體電路晶片的軟板;一活動臂,其可活動於該插座的上方,用以提取及置放該積體電路晶片於該軟板上;一具有反射面的反射罩,可活動地設於該插座的上方;一插座上蓋,其可活動地設於該插座的上方,並包括一連接部及一抵壓柱,其中該連接部面向該插座設置,該抵壓柱設於該連接部上,並朝該插座方向延伸一預定距離,用以抵壓該積體電路晶片的邊部;以及一無線收訊元件,位於該插座的一側及該反射面的下方,並電性連接於該載板,其中該積體電路晶片的無線訊號天線用以發出無線訊號,並經由該反射面反射至該無線收訊元件以進行測試。 A test device for an integrated circuit chip. The integrated circuit chip includes a wireless signal antenna. The test device includes a carrier board, including a socket provided on the carrier board, and a socket for receiving the integrated circuit A flexible board for the chip; a movable arm that can be moved above the socket for picking up and placing the integrated circuit chip on the flexible board; a reflector with a reflective surface that can be movably installed on the socket Above; a socket upper cover, which is movably arranged above the socket, and includes a connecting portion and a pressing column, wherein the connecting portion faces the socket set, the pressing column is arranged on the connecting portion, and Extending a predetermined distance in the direction of the socket for pressing against the edge of the integrated circuit chip; and a wireless receiving element located on one side of the socket and below the reflecting surface and electrically connected to the carrier board , Wherein the wireless signal antenna of the integrated circuit chip is used to emit a wireless signal, and is reflected to the wireless receiving element through the reflective surface for testing. 如申請專利範圍第1項所述積體電路晶片的測試裝置,其中一開放空間形成於該抵壓柱、該連接部及該反射面之間,並暴露於該插座上。 As for the testing device of the integrated circuit chip described in item 1 of the scope of patent application, an open space is formed between the pressing column, the connecting portion and the reflecting surface, and is exposed on the socket. 如申請專利範圍第1項所述積體電路晶片的測試裝置,其中該反射罩設於該插座上蓋的連接部的下方,且該反射罩的一端位於該插座的正上方,另一端朝該載板的方向向下傾斜設置。 As for the testing device of the integrated circuit chip described in the first item of the scope of patent application, the reflective cover is arranged below the connecting part of the upper cover of the socket, and one end of the reflective cover is located directly above the socket, and the other end faces the load. The direction of the board is inclined downward. 如申請專利範圍第3項所述積體電路晶片的測試裝置,其中該反射罩的該另一端延伸至該無線收訊元件上。 Such as the testing device of the integrated circuit chip described in item 3 of the scope of patent application, wherein the other end of the reflective cover extends to the wireless receiving element. 如申請專利範圍第1項所述積體電路晶片的測試裝置,其中該插座上蓋的抵壓柱靠近該插座的一端更設有一凸條,其對應該積體電路晶片的周圍設置。 For example, in the testing device of the integrated circuit chip described in the first item of the scope of patent application, an end of the pressing post of the socket cover close to the socket is further provided with a protruding strip corresponding to the surrounding of the integrated circuit chip. 如申請專利範圍第1項所述積體電路晶片的測試裝置,更包括一屏蔽體,用以罩蓋該插座上蓋及該反射罩。 For example, the integrated circuit chip testing device described in the first item of the scope of patent application further includes a shielding body for covering the upper cover of the socket and the reflecting cover. 一種積體電路晶片的測試裝置,該積體電路晶片包括無線訊號天線,該測試裝置包括:一載板,包括一設於該載板上的插座,其具有一用於承放該積體電路晶片的軟板;一活動臂,其可活動於該插座的上方,用以提取及置放該積體電路晶片於該軟板上;一具有反射面的反射罩,可活動地設於該插座的上方;以及一無線收訊元件,位於該插座的一側及該反射面的下方,並電性連接於該載板,其中該積體電路晶片的無線訊號天線用以發出無線訊號,並經由該反射面反射至該無線收訊元件以進行測試;其中該活動臂包括一吸嘴部,其對應該積體電路晶片的周邊設置,用以定位並吸取該積體電路晶片;其中該反射罩連接於該活動臂,並位於該活動臂的上方,該反射罩依據該活動臂的移動而連動於該插座的正上方。 A test device for an integrated circuit chip. The integrated circuit chip includes a wireless signal antenna. The test device includes a carrier board, including a socket provided on the carrier board, and a socket for receiving the integrated circuit A flexible board for the chip; a movable arm that can be moved above the socket for picking up and placing the integrated circuit chip on the flexible board; a reflector with a reflective surface that can be movably installed on the socket And a wireless receiving element located on one side of the socket and below the reflecting surface, and is electrically connected to the carrier board, wherein the wireless signal antenna of the integrated circuit chip is used to send out wireless signals through The reflective surface is reflected to the wireless receiving element for testing; wherein the movable arm includes a suction nozzle portion, which is arranged corresponding to the periphery of the integrated circuit chip, and is used for positioning and sucking the integrated circuit chip; wherein the reflective cover Connected to the movable arm and located above the movable arm, the reflector is linked to the socket directly above the socket according to the movement of the movable arm. 如申請專利範圍第7項所述積體電路晶片的測試裝置,其中該吸嘴部為無線訊號可穿透的穿透物質所製。 For example, the testing device of the integrated circuit chip described in item 7 of the scope of patent application, wherein the suction nozzle part is made of a penetrating material that can penetrate wireless signals. 如申請專利範圍第7項所述積體電路晶片的測試裝置,其中該活動臂的吸嘴部更包括一開口部,該開口部包括一開口及一可活動地設置於該開口上的遮板。 For example, the testing device for integrated circuit chips described in the scope of the patent application, wherein the suction nozzle of the movable arm further includes an opening, the opening includes an opening and a shield movably disposed on the opening . 如申請專利範圍第1項所述積體電路晶片的測試裝置,其中該反射面為一拋物鏡反射面,其具有一朝向該插座設置的凹部。 According to the test device of the integrated circuit chip described in the first item of the scope of patent application, the reflective surface is a parabolic mirror reflective surface, which has a concave portion facing the socket. 如申請專利範圍第1項所述積體電路晶片的測試裝置,其中該無線收訊元件設於該載板設有該插座的同一表面上。 For the test device of integrated circuit chip described in the first item of the patent application, the wireless receiving element is arranged on the same surface of the carrier board where the socket is provided. 如申請專利範圍第1項所述積體電路晶片的測試裝置,其中該插座設有一真空吸取裝置,用以由該插座方向真空吸取該積體電路晶片。 For the test device of the integrated circuit chip described in the first item of the scope of patent application, the socket is provided with a vacuum suction device for vacuum suction of the integrated circuit chip from the direction of the socket.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201022112A (en) * 2008-12-12 2010-06-16 Chroma Ate Inc Independent test machine for semiconductor elements and testing and sorting system
CN105980867A (en) * 2013-12-17 2016-09-28 基萨公司 Waveguides for capturing close-proximity electromagnetic radiation transmitted by wireless chips during testing on automated test equipment (ate)
TW201908745A (en) * 2017-07-11 2019-03-01 川升股份有限公司 Antenna radiation pattern measurement system for multipath scenario application

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201022112A (en) * 2008-12-12 2010-06-16 Chroma Ate Inc Independent test machine for semiconductor elements and testing and sorting system
CN105980867A (en) * 2013-12-17 2016-09-28 基萨公司 Waveguides for capturing close-proximity electromagnetic radiation transmitted by wireless chips during testing on automated test equipment (ate)
TW201908745A (en) * 2017-07-11 2019-03-01 川升股份有限公司 Antenna radiation pattern measurement system for multipath scenario application

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