TWI707898B - Manufacturing method of resin sheet - Google Patents

Manufacturing method of resin sheet Download PDF

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TWI707898B
TWI707898B TW105127087A TW105127087A TWI707898B TW I707898 B TWI707898 B TW I707898B TW 105127087 A TW105127087 A TW 105127087A TW 105127087 A TW105127087 A TW 105127087A TW I707898 B TWI707898 B TW I707898B
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resin
layer
support
varnish
resin varnish
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TW201726776A (en
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秋本裕
奈良橋弘久
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日商味之素股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18Manufacture of films or sheets
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L101/00Compositions of unspecified macromolecular compounds
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/46Manufacturing multilayer circuits
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08JWORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2363/00Characterised by the use of epoxy resins; Derivatives of epoxy resins
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00Applications
    • C08L2203/20Applications use in electrical or conductive gadgets
    • C08L2203/206Applications use in electrical or conductive gadgets use in coating or encapsulating of electronic parts

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Medicinal Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Materials Engineering (AREA)
  • Laminated Bodies (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

本發明係提供一種於形成樹脂層時,可抑制樹脂層之高邊及縮孔之產生、且膜厚及塗佈寬度之控制為良好的樹脂薄片之製造方法。 The present invention provides a method for manufacturing a resin sheet that can suppress the occurrence of high sides and shrinkage holes of the resin layer and control the film thickness and coating width well when forming a resin layer.

一種樹脂薄片之製造方法,其係包含下述步驟:(A)將包含樹脂組成物及溶劑的樹脂清漆塗佈於支撐體上之步驟、與(B)將樹脂清漆進行乾燥來形成樹脂層之步驟;其中於步驟(A)中,將樹脂清漆以滴液法對於支撐體滴液時之接觸角為0.1°~20°,且於步驟(B)中,樹脂層的厚度為5μm以下。 A method for manufacturing a resin sheet, which includes the following steps: (A) a step of coating a resin varnish containing a resin composition and a solvent on a support, and (B) drying the resin varnish to form a resin layer Steps; wherein in step (A), the contact angle of the resin varnish on the support by the dropping method is 0.1°-20°, and in step (B), the thickness of the resin layer is 5 μm or less.

Description

樹脂薄片之製造方法 Manufacturing method of resin sheet

本發明係關於一種樹脂薄片之製造方法。 The present invention relates to a method for manufacturing a resin sheet.

作為印刷線路板之製造技術,已知有廣泛使用將形成有電路的導體層與絕緣層交替地重疊的增層(Build-up)方式。於增層方式中,絕緣層一般係藉由將包含樹脂層的樹脂薄片層合於內層基板中並使樹脂層硬化而形成。 As a manufacturing technique of a printed wiring board, a build-up method in which a conductor layer on which a circuit is formed and an insulating layer are alternately overlapped is known. In the build-up method, the insulating layer is generally formed by laminating a resin sheet including a resin layer in an inner substrate and hardening the resin layer.

另一方面,因應近年的電子機器之小型化、薄型化而朝向樹脂層之薄膜化進展。例如於專利文獻1中記載著於支撐體上形成有厚度為2~18μm的第1層(樹脂層)的絕緣樹脂薄片。 On the other hand, in response to the miniaturization and thinning of electronic devices in recent years, there has been progress towards thinner resin layers. For example, Patent Document 1 describes an insulating resin sheet in which a first layer (resin layer) having a thickness of 2 to 18 μm is formed on a support.

[先前技術文獻] [Prior Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2014-17301號公報 [Patent Document 1] JP 2014-17301 A

於支撐體上形成較薄的樹脂層時,一般是使用以大量溶劑來稀釋樹脂組成物而得到的不揮發成分濃度為低的樹脂清漆,藉由增加塗膜的厚度從而確保塗佈穩定性。近年,就絕緣層之表面平滑性或硬化時的異物附著風險之減低之觀點而言,有以附著支撐體之狀態下來進行熱硬化樹脂層之情形,於如此般情形時大都使用附有脫模層的支撐體或使用密著力較低的材質的支撐體。如此般的狀況之中,於支撐體的表面上塗佈樹脂清漆時,由於支撐體表面與樹脂清漆的極性之差異、或因溶劑之揮發所致極性變化,故樹脂層的厚度於端部附近的區域將會產生較中央為更大的「高邊」(high-edge)或縮孔(cissing)之情形。 When a thin resin layer is formed on a support, a resin varnish with a low concentration of non-volatile components obtained by diluting the resin composition with a large amount of solvent is generally used to ensure coating stability by increasing the thickness of the coating film. In recent years, from the viewpoint of the surface smoothness of the insulating layer and the reduction of the risk of foreign matter adhesion during curing, there are cases where the thermosetting resin layer is carried out in a state where the support is attached. In such cases, the mold release is mostly used. The support of the layer or the support of a material with low adhesion is used. In such a situation, when the resin varnish is applied to the surface of the support, the thickness of the resin layer is near the end due to the difference in polarity between the surface of the support and the resin varnish, or the polarity changes due to the volatilization of the solvent. The area of ?? will produce a "high-edge" or cissing that is larger than the center.

為了解決如此般的問題,雖認為可使用調平劑等的塗佈性改善劑,但會有鍍敷特性之變化或保存時之滲出等的風險。又,支撐體表面與塗液之極性之差異為小時(若潤濕性高時),將較所設定的塗佈寬度來得更潤濕擴散,而塗佈寬度或膜厚之控制亦有變得困難之情形。 In order to solve such problems, it is considered that coatability improvers such as leveling agents can be used, but there is a risk of changes in plating characteristics or bleeding during storage. In addition, if the difference between the polarity of the support surface and the coating liquid is small (if the wettability is high), it will be more wetted and spread than the set coating width, and the coating width or film thickness control will also become Difficult situation.

本發明之課題係提供一種於形成樹脂層時,可抑制樹脂層之高邊及縮孔之產生、且膜厚及塗佈寬度之控制為良好的樹脂薄片之製造方法。 The subject of the present invention is to provide a method for manufacturing a resin sheet that can suppress the occurrence of high sides and shrinkage holes in the resin layer and control the film thickness and coating width well when forming the resin layer.

本發明人對於上述課題經深入研究結果發現,藉由包含將樹脂清漆以滴液法對於支撐體滴液時之接觸角成為0.1°~20°之方式並將樹脂清漆塗佈於支撐體上之步驟,可解決上述課題,因而完成本發明。 The inventor of the present invention has conducted in-depth research on the above subject and found that by including the method of applying the resin varnish to the support when the contact angle when the resin varnish is dropped on the support by the dropping method becomes 0.1°~20° Steps can solve the above-mentioned problems, thus completing the present invention.

即,本發明係包含以下之內容。 That is, the present invention includes the following contents.

[1].一種樹脂薄片之製造方法,其係包含下述步驟:(A)將包含樹脂組成物及溶劑的樹脂清漆塗佈於支撐體上之步驟、與(B)將樹脂清漆進行乾燥來形成樹脂層之步驟;其中於步驟(A)中,將樹脂清漆以滴液法對於支撐體滴液時之接觸角為0.1°~20°,且於步驟(B)中,樹脂層的厚度為5μm以下。 [1]. A method of manufacturing a resin sheet, which includes the following steps: (A) a step of coating a resin varnish containing a resin composition and a solvent on a support, and (B) drying the resin varnish The step of forming a resin layer; wherein in step (A), the contact angle when the resin varnish is dropped on the support by the dropping method is 0.1°-20°, and in step (B), the thickness of the resin layer is Below 5μm.

[2].如[1]之樹脂薄片之製造方法,其中,樹脂清漆中的不揮發成分的含有量為40質量%以下。 [2]. The method for producing a resin sheet according to [1], wherein the non-volatile content in the resin varnish is 40% by mass or less.

[3].如[1]或[2]之樹脂薄片之製造方法,其中,支撐體係具備有脫模層。 [3]. The method for manufacturing a resin sheet as in [1] or [2], wherein the support system is provided with a release layer.

[4].如[1]~[3]中任一項之樹脂薄片之製造方法,其中,溶劑係包含極性溶劑。 [4]. The method for manufacturing a resin sheet according to any one of [1] to [3], wherein the solvent includes a polar solvent.

[5].如[1]~[4]中任一項之樹脂薄片之製造方法,其中,溶劑係包含比介電率12以上的極性溶劑與比介電率9以下的非極性溶劑。 [5]. The method for producing a resin sheet according to any one of [1] to [4], wherein the solvent includes a polar solvent with a specific permittivity of 12 or more and a non-polar solvent with a permittivity of 9 or less.

[6].如[1]~[5]中任一項之樹脂薄片之製造方法,其中,於步驟(A)中係藉由凹板塗佈法來塗佈樹脂清漆。 [6]. The method of manufacturing a resin sheet according to any one of [1] to [5], wherein in step (A), the resin varnish is coated by a gravure coating method.

[7].如[1]~[6]中任一項之樹脂薄片之製造方法,其中,樹脂薄片係為印刷線路板的絕緣層用。 [7]. The method of manufacturing a resin sheet according to any one of [1] to [6], wherein the resin sheet is used for the insulating layer of a printed circuit board.

依據本發明係可提供一種於形成樹脂層時,可抑制樹脂層之高邊及縮孔之產生、且膜厚及塗佈寬度之控制為良好的樹脂薄片之製造方法。 According to the present invention, it is possible to provide a method for manufacturing a resin sheet that can suppress the occurrence of high sides and shrinkage of the resin layer, and control the film thickness and coating width well when forming the resin layer.

[實施發明之最佳形態] [Best form to implement invention] [樹脂薄片之製造方法] [Method of manufacturing resin sheet]

以下,對於本發明之樹脂薄片之製造方法來作說明。 Hereinafter, the method of manufacturing the resin sheet of the present invention will be described.

本發明之樹脂薄片之製造方法,其特徵為包含下述步驟:(A)將包含樹脂組成物及溶劑的樹脂清漆塗佈於支撐體上之步驟、與(B)將樹脂清漆進行乾燥來形成樹脂層之步驟;其中於步驟(A)中,將樹脂清漆以滴液法對於支撐體滴液時之接觸角為0.1°~20°,且於步驟(B)中,樹脂層的厚度為5μm以下。 The method for producing a resin sheet of the present invention is characterized by comprising the following steps: (A) a step of coating a resin varnish containing a resin composition and a solvent on a support, and (B) drying the resin varnish to form The step of the resin layer; wherein in step (A), the contact angle when the resin varnish is dropped on the support by the dropping method is 0.1°~20°, and in step (B), the thickness of the resin layer is 5μm the following.

<步驟(A)> <Step (A)>

於步驟(A)中,將包含樹脂組成物及溶劑的樹脂清漆塗佈於支撐體上。樹脂清漆係藉由將樹脂組成物溶解於溶劑中或使其分散來作調製。以下,對於樹脂清漆中所包含的樹脂組成物及溶劑來作說明。 In step (A), a resin varnish containing a resin composition and a solvent is coated on the support. The resin varnish is prepared by dissolving or dispersing the resin composition in a solvent. Hereinafter, the resin composition and solvent contained in the resin varnish will be described.

(樹脂組成物) (Resin composition)

作為樹脂組成物,可舉例如包含硬化性樹脂與其硬化劑的組成物。作為硬化性樹脂,係可使用於形成印刷線路板的絕緣層時所使用的以往周知的硬化性樹脂,其中以環氧樹脂為較佳。因此,於一實施形態中,樹脂組成物係包含環氧樹脂及硬化劑。樹脂組成物因應所需進而亦可包含無機填充材、熱可塑性樹脂、硬化促進劑、耐燃劑及橡膠粒子等的添加劑。 Examples of the resin composition include a composition containing a curable resin and a curing agent. As the curable resin, a conventionally known curable resin used when forming an insulating layer of a printed wiring board can be used, and among them, epoxy resin is preferred. Therefore, in one embodiment, the resin composition includes an epoxy resin and a hardener. The resin composition may further contain additives such as inorganic fillers, thermoplastic resins, hardening accelerators, flame retardants, and rubber particles as required.

-環氧樹脂- -Epoxy resin-

作為環氧樹脂,可舉例如雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AF型環氧樹脂等的雙酚型環氧樹脂、雙環戊二烯型環氧樹脂、三酚型環氧樹脂、萘酚酚醛型環氧樹脂、酚酚醛型環氧樹脂、tert-丁基-鄰苯二酚型環氧樹脂、萘型環氧樹脂、萘酚型環氧樹脂、蒽型環氧樹脂、縮水甘油胺型環氧樹脂、縮水甘油酯型環氧樹脂、甲酚酚醛型環氧樹脂、聯苯型環氧樹脂、線狀脂肪族環氧樹脂、具有丁二烯構造的環氧樹脂、脂環式環氧樹脂、雜環式環氧樹脂、含有螺環的環氧樹脂、環己烷二甲醇型環氧樹脂、伸萘基醚型環氧樹脂、三羥甲基型環氧樹脂、四苯乙烷型環氧樹脂等。環氧樹脂係可單獨使用1種、或可組合2種以上來使用。 Examples of epoxy resins include bisphenol A epoxy resins, bisphenol F epoxy resins, bisphenol S epoxy resins, and bisphenol AF epoxy resins. Diene epoxy resin, triphenol epoxy resin, naphthol novolac epoxy resin, phenol novolac epoxy resin, tert-butyl-catechol epoxy resin, naphthalene epoxy resin, naphthalene Phenolic epoxy resin, anthracene epoxy resin, glycidylamine epoxy resin, glycidyl ester epoxy resin, cresol novolac epoxy resin, biphenyl epoxy resin, linear aliphatic epoxy resin , Epoxy resin with butadiene structure, alicyclic epoxy resin, heterocyclic epoxy resin, epoxy resin containing spiro ring, cyclohexane dimethanol type epoxy resin, naphthyl ether type epoxy resin Resin, trimethylol type epoxy resin, tetraphenylethane type epoxy resin, etc. The epoxy resin system can be used individually by 1 type or in combination of 2 or more types.

作為環氧樹脂,係以使用由雙酚型環氧樹脂、氟系環氧樹脂(例如雙酚AF型環氧樹脂)、雙環戊 二烯型環氧樹脂、萘型環氧樹脂、聯苯型環氧樹脂及此等的環氧樹脂的混合物所成之群中所選出一種或二種以上的環氧樹脂為較佳。 As the epoxy resin, bisphenol epoxy resin, fluorine epoxy resin (such as bisphenol AF epoxy resin), dicyclopentane One or more epoxy resins selected from the group consisting of diene epoxy resins, naphthalene epoxy resins, biphenyl epoxy resins, and mixtures of these epoxy resins are preferred.

環氧樹脂係以在1分子中具有2個以上的環氧基的環氧樹脂為較佳。將環氧樹脂的不揮發成分設為100質量%時,至少50質量%以上係以在1分子中具有2個以上的環氧基的環氧樹脂者為較佳。其中,係以在1分子中具有2個以上的環氧基、且在溫度20℃下包含液狀的環氧樹脂(以下稱為「液狀環氧樹脂」),與在1分子中具有3個以上的環氧基、且在溫度20℃下固體狀的環氧樹脂(以下稱為「固體狀環氧樹脂」)為較佳。作為環氧樹脂,藉由併用液狀環氧樹脂與固體狀環氧樹脂,可得到具有優異可撓性的樹脂組成物。又,樹脂組成物的硬化物的斷裂強度亦為提升。 The epoxy resin is preferably an epoxy resin having two or more epoxy groups in one molecule. When the non-volatile content of the epoxy resin is 100% by mass, at least 50% by mass or more is preferably an epoxy resin having two or more epoxy groups in one molecule. Among them, the system has two or more epoxy groups in one molecule, and contains a liquid epoxy resin (hereinafter referred to as "liquid epoxy resin") at a temperature of 20°C, and has 3 epoxy groups in one molecule. One or more epoxy groups and a solid epoxy resin (hereinafter referred to as "solid epoxy resin") at a temperature of 20°C are preferred. As the epoxy resin, by using a liquid epoxy resin and a solid epoxy resin in combination, a resin composition having excellent flexibility can be obtained. In addition, the breaking strength of the cured product of the resin composition is also improved.

作為液狀環氧樹脂,係以雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AF型環氧樹脂、萘型環氧樹脂、縮水甘油酯型環氧樹脂、酚酚醛型環氧樹脂、具有酯骨架的脂環式環氧樹脂、及具有丁二烯構造的環氧樹脂為較佳,以雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AF型環氧樹脂及萘型環氧樹脂為又較佳。作為液狀環氧樹脂之具體例,可舉出DIC(股)製的「HP4032」、「HP4032D」、「HP4032SS」(萘型環氧樹脂)、三菱化學(股)製的「828US」、「jER828EL」(雙酚A型環氧樹脂)、「jER807」(雙酚F型環氧樹脂)、「jER152」 (酚酚醛型環氧樹脂)、「YL7760」(雙酚AF型環氧樹脂)、新日鐵住金化學(股)製的「ZX1059」(雙酚A型環氧樹脂與雙酚F型環氧樹脂的混合品)、nagasechemtex(股)製的「EX-721」(縮水甘油酯型環氧樹脂)、(股)Daicel製的「CELLOXIDE 2021P」(具有酯骨架的脂環式環氧樹脂)、「PB-3600」(具有丁二烯構造的環氧樹脂)。此等係可單獨使用1種、或可組合2種以上來使用。 As liquid epoxy resin, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AF type epoxy resin, naphthalene type epoxy resin, glycidyl ester type epoxy resin, phenol phenol type Epoxy resins, alicyclic epoxy resins with ester skeletons, and epoxy resins with butadiene structure are preferred, and bisphenol A type epoxy resins, bisphenol F type epoxy resins, and bisphenol AF type epoxy resins are preferred. Epoxy resins and naphthalene type epoxy resins are more preferable. Specific examples of liquid epoxy resins include "HP4032", "HP4032D", "HP4032SS" (naphthalene-type epoxy resin) manufactured by DIC Corporation, and "828US", "Mitsubishi Chemical Corporation" manufactured by Mitsubishi Chemical Corporation. "jER828EL" (bisphenol A type epoxy resin), "jER807" (bisphenol F type epoxy resin), "jER152" (Phenolic novolac type epoxy resin), "YL7760" (bisphenol AF type epoxy resin), "ZX1059" (bisphenol A type epoxy resin and bisphenol F type epoxy resin) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd. Resin mixture), "EX-721" (glycidyl ester type epoxy resin) manufactured by Nagasechemtex (Stock), "CELLOXIDE 2021P" (alicyclic epoxy resin with ester skeleton) manufactured by Daicel, "PB-3600" (epoxy resin with butadiene structure). These systems may be used individually by 1 type, or may be used in combination of 2 or more types.

作為固體狀環氧樹脂,係以萘型4官能環氧樹脂、甲酚酚醛型環氧樹脂、雙環戊二烯型環氧樹脂、三酚型環氧樹脂、萘酚型環氧樹脂、聯苯型環氧樹脂、伸萘基醚型環氧樹脂、蒽型環氧樹脂、雙酚A型環氧樹脂、四苯乙烷型環氧樹脂為較佳,以萘型4官能環氧樹脂、萘酚型環氧樹脂、及聯苯型環氧樹脂為又較佳。作為固體狀環氧樹脂之具體例,可舉例DIC(股)製的「HP4032H」(萘型環氧樹脂)、「HP-4700」、「HP-4710」(萘型4官能環氧樹脂)、「N-690」(甲酚酚醛型環氧樹脂)、「N-695」(甲酚酚醛型環氧樹脂)、「HP-7200」(雙環戊二烯型環氧樹脂)、「HP-7200HH」、「EXA7311」、「EXA7311-G3」、「EXA7311-G4」、「EXA7311-G4S」、「HP6000」(伸萘基醚型環氧樹脂)、日本化藥(股)製的「EPPN-502H」(三酚型環氧樹脂)、「NC7000L」(萘酚酚醛型環氧樹脂)、「NC3000H」、「NC3000」、「NC3000L」、「NC3100」(聯苯型環氧 樹脂)、新日鐵住金化學(股)製的「ESN475V」(萘酚型環氧樹脂)、「ESN485」(萘酚酚醛型環氧樹脂)、三菱化學(股)製的「YX4000H」、「YL6121」(聯苯型環氧樹脂)、「YX4000HK」(聯二甲酚型環氧樹脂)、「YX8800」(蒽型環氧樹脂)、大阪Gas Chemicals(股)製的「PG-100」、「CG-500」、三菱化學(股)製的「YL7800」(茀型環氧樹脂)、三菱化學(股)製的「jER1010」(固體狀雙酚A型環氧樹脂)、「jER1031S」(四苯乙烷型環氧樹脂)等。 As solid epoxy resin, naphthalene type tetrafunctional epoxy resin, cresol novolac type epoxy resin, dicyclopentadiene type epoxy resin, triphenol type epoxy resin, naphthol type epoxy resin, biphenyl Type epoxy resin, naphthyl ether type epoxy resin, anthracene type epoxy resin, bisphenol A type epoxy resin, tetraphenylethane type epoxy resin are preferred, and naphthalene type tetrafunctional epoxy resin, naphthalene type epoxy resin Phenolic epoxy resins and biphenyl epoxy resins are more preferable. Specific examples of solid epoxy resins include "HP4032H" (naphthalene type epoxy resin), "HP-4700", "HP-4710" (naphthalene type tetrafunctional epoxy resin) manufactured by DIC (Stock), "N-690" (cresol novolac epoxy resin), "N-695" (cresol novolac epoxy resin), "HP-7200" (dicyclopentadiene epoxy resin), "HP-7200HH ", "EXA7311", "EXA7311-G3", "EXA7311-G4", "EXA7311-G4S", "HP6000" (naphthyl ether type epoxy resin), and "EPPN-502H" manufactured by Nippon Kayaku Co., Ltd. ”(Triphenol type epoxy resin), “NC7000L” (Naphthol novolac epoxy resin), “NC3000H”, “NC3000”, “NC3000L”, “NC3100” (biphenyl type epoxy Resin), "ESN475V" (naphthol type epoxy resin), "ESN485" (naphthol novolac epoxy resin) manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., "YX4000H" manufactured by Mitsubishi Chemical Co., Ltd., and " YL6121" (biphenyl type epoxy resin), "YX4000HK" (bixylenol type epoxy resin), "YX8800" (anthracene type epoxy resin), "PG-100" manufactured by Osaka Gas Chemicals, "CG-500", "YL7800" manufactured by Mitsubishi Chemical Corporation (茀-type epoxy resin), "jER1010" (solid bisphenol A epoxy resin) manufactured by Mitsubishi Chemical Corporation, "jER1031S" ( Tetraphenylethane type epoxy resin) and so on.

環氧樹脂若包含固形環氧樹脂與液狀環氧樹脂時,相對於液狀環氧樹脂的質量ML之固形環氧樹脂的質量MS的比(MS/ML)係以1~10的範圍內為較佳。藉由將MS/ML設為上述範圍內,可得到下述之效果:i)在樹脂薄片之形態下使用時,可帶來適度的黏著性;ii)在樹脂薄片之形態下使用時,可得到充分的可撓性、且操作性為提升;以及iii)可得到具有充分的斷裂強度的硬化物等。 If the epoxy resin contains solid epoxy resin and liquid epoxy resin, the ratio of the mass M S of the solid epoxy resin to the mass M L of the liquid epoxy resin (M S /M L ) is 1~ The range of 10 is preferable. By setting M S /M L within the above range, the following effects can be obtained: i) When used in the form of a resin sheet, it can bring appropriate adhesion; ii) When used in the form of a resin sheet , Can obtain sufficient flexibility, and the handling is improved; and iii) a cured product with sufficient breaking strength can be obtained.

樹脂組成物中的環氧樹脂的含有量,就可得到良好的機械強度、展現絕緣可靠性的絕緣層之觀點而言,較佳為0.1質量%以上,又較佳為5質量%以上,更佳為10質量%以上。環氧樹脂的含有量之上限,只要是可發揮本發明之效果並無特別限定,但較佳為50質量%以下,又較佳為45質量%以下,更佳為40質量%以下。 The content of the epoxy resin in the resin composition is preferably 0.1% by mass or more, more preferably 5% by mass or more, from the viewpoint of obtaining an insulating layer with good mechanical strength and insulation reliability. Preferably, it is 10% by mass or more. The upper limit of the epoxy resin content is not particularly limited as long as the effects of the present invention can be exerted, but it is preferably 50% by mass or less, more preferably 45% by mass or less, and more preferably 40% by mass or less.

尚、本發明中,樹脂組成物中的各成分的含有量如無 特別說明,將樹脂組成物中的不揮發成分設為100質量%時的值。 Still, in the present invention, the content of each component in the resin composition is In particular, the value when the non-volatile content in the resin composition is set to 100% by mass.

環氧樹脂的環氧當量較佳為50~5000,又較佳為50~3000,更佳為80~2000,進而又較佳為110~1000。藉由成為該範圍內,故硬化物的交聯密度將變得充分,而可帶來表面粗度較小的絕緣層。尚,環氧當量係可依據JIS K7236來進行測定,為包含1當量的環氧基的樹脂質量。 The epoxy equivalent of the epoxy resin is preferably 50-5000, more preferably 50-3000, more preferably 80-2000, and still more preferably 110-1000. By being in this range, the crosslink density of the cured product becomes sufficient, and an insulating layer with a small surface roughness can be obtained. The epoxy equivalent can be measured in accordance with JIS K7236, and is the mass of the resin containing 1 equivalent of epoxy groups.

環氧樹脂之重量平均分子量,較佳為100~5000,又較佳為250~3000,更佳為400~1500。於此,環氧樹脂之重量平均分子量係藉由凝膠滲透層析(GPC)法來作測定之聚苯乙烯換算之重量平均分子量。 The weight average molecular weight of the epoxy resin is preferably 100 to 5000, more preferably 250 to 3000, and more preferably 400 to 1500. Here, the weight average molecular weight of the epoxy resin is the weight average molecular weight in terms of polystyrene measured by gel permeation chromatography (GPC).

-硬化劑- -hardener-

作為硬化劑,只要具有硬化環氧樹脂的機能即可並無特別限定,可舉例如酚系硬化劑、萘酚系硬化劑、活性酯系硬化劑、苯并

Figure 105127087-A0202-12-0009-2
系硬化劑、氰酸酯系硬化劑及碳二醯亞胺系硬化劑。硬化劑係可單獨使用1種、或亦可併用2種以上。 The curing agent is not particularly limited as long as it has the function of curing epoxy resin. Examples include phenolic curing agents, naphthol curing agents, active ester curing agents, benzo
Figure 105127087-A0202-12-0009-2
Hardener, cyanate ester hardener and carbodiimide hardener. The hardener system may be used alone or in combination of two or more kinds.

作為酚系硬化劑及萘酚系硬化劑,就耐熱性及耐水性之觀點而言,以具有酚醛構造的酚系硬化劑、或具有酚醛構造的萘酚系硬化劑為較佳。又,就與導體層(電路配線)之密著性之觀點而言,以含氮酚系的硬化劑或含氮萘酚系的硬化劑為較佳,以含有三嗪構造的酚系硬 化劑或含有三嗪構造的萘酚系硬化劑為又較佳。其中,就高度滿足耐熱性、耐水性、及與導體層之密著性(剝離強度)之觀點而言,以使用含有三嗪構造的酚酚醛系硬化劑為較佳。 As the phenol-based curing agent and the naphthol-based curing agent, from the viewpoint of heat resistance and water resistance, a phenol-based curing agent having a phenolic structure or a naphthol-based curing agent having a phenolic structure is preferable. Also, from the viewpoint of adhesion to the conductor layer (circuit wiring), a nitrogen-containing phenol hardener or a nitrogen-containing naphthol hardener is preferred, and a phenol hardener containing a triazine structure is preferred. A chemical agent or a naphthol hardener containing a triazine structure is more preferable. Among them, from the viewpoint of highly satisfying heat resistance, water resistance, and adhesion (peel strength) to the conductor layer, it is preferable to use a phenol-phenolic hardener containing a triazine structure.

作為酚系硬化劑及萘酚系硬化劑之具體例,可舉例如明和化成(股)製的「MEH-7700」、「MEH-7810」、「MEH-7851」、日本化藥(股)製的「NHN」、「CBN」、「GPH」、新日鐵住金化學(股)製的「SN170」、「SN180」、「SN190」、「SN475」、「SN485」、「SN495」、「SN375」、「SN395」、DIC(股)製的「LA7052」、「LA7054」、「LA3018」等。 Specific examples of phenolic hardeners and naphthol hardeners include "MEH-7700", "MEH-7810", "MEH-7851" manufactured by Meiwa Chemical Co., Ltd., and Nippon Kayaku Co., Ltd. "NHN", "CBN", "GPH", "SN170", "SN180", "SN190", "SN475", "SN485", "SN495", "SN375" manufactured by Nippon Steel & Sumitomo Chemical Co., Ltd. , "SN395", "LA7052", "LA7054", "LA3018", etc. under the DIC (share) system.

作為活性酯系硬化劑並無特別限制,一般較佳使用為酚酯(phenol ester)類、苯硫酸酯(thiophenol ester)類、N-羥基胺酯類、雜環羥基化合物的酯類等的在1分子中具有2個以上反應活性高的酯基的化合物。該活性酯系硬化劑係藉由羧酸化合物及/或硫代羧酸化合物與羥基化合物及/或硫醇化合物進行縮合反應而得到者為較佳。特別就耐熱性提升之觀點而言,以由羧酸化合物與羥基化合物所得到的活性酯系硬化劑為較佳,以由羧酸化合物與苯酚(phenol)化合物及/或萘酚化合物所得到的活性酯系硬化劑為又較佳。作為羧酸化合物,可舉例如苯甲酸、乙酸、琥珀酸、馬來酸、伊康酸、鄰苯二甲酸、間苯二甲酸、對苯二甲酸、焦蜜石酸等。作為苯酚(phenol)化合物或萘酚化合物,可舉例如氫醌、間苯二酚、雙酚 A、雙酚F、雙酚S、還原酚酞、甲基化雙酚A、甲基化雙酚F、甲基化雙酚S、苯酚、o-甲酚、m-甲酚、p-甲酚、鄰苯二酚、α-萘酚、β-萘酚、1,5-二羥基萘、1,6-二羥基萘、2,6-二羥基萘、二羥基二苯甲酮、三羥基二苯甲酮、四羥基二苯甲酮、間苯三酚、苯三酚、二環戊二烯基二苯酚、酚酚醛等。 There are no particular restrictions on the active ester-based hardener. Generally, phenol esters, thiophenol esters, N-hydroxyamine esters, heterocyclic hydroxy compound esters, etc. are preferably used. A compound having two or more highly reactive ester groups in one molecule. The active ester curing agent is preferably obtained by a condensation reaction of a carboxylic acid compound and/or a thiocarboxylic acid compound and a hydroxyl compound and/or a thiol compound. Particularly from the viewpoint of improving heat resistance, active ester hardeners obtained from carboxylic acid compounds and hydroxy compounds are preferred, and those obtained from carboxylic acid compounds and phenol compounds and/or naphthol compounds are preferred. Active ester hardeners are more preferable. Examples of the carboxylic acid compound include benzoic acid, acetic acid, succinic acid, maleic acid, itaconic acid, phthalic acid, isophthalic acid, terephthalic acid, and pyromellitic acid. Examples of phenol compounds or naphthol compounds include hydroquinone, resorcinol, and bisphenol A, bisphenol F, bisphenol S, reduced phenolphthalein, methylated bisphenol A, methylated bisphenol F, methylated bisphenol S, phenol, o-cresol, m-cresol, p-cresol , Catechol, α-naphthol, β-naphthol, 1,5-dihydroxynaphthalene, 1,6-dihydroxynaphthalene, 2,6-dihydroxynaphthalene, dihydroxybenzophenone, trihydroxydi Benzophenone, tetrahydroxybenzophenone, phloroglucinol, pyrogallol, dicyclopentadienyl diphenol, phenol phenol, etc.

具體而言,以包含二環戊二烯基二苯酚構造的活性酯化合物、包含萘構造的活性酯化合物、包含酚酚醛的乙醯基化物的活性酯化合物、包含酚酚醛的苯甲醯化物的活性酯化合物為較佳,其中以包含萘構造的活性酯化合物、包含二環戊二烯基二苯酚構造的活性酯化合物為又較佳。 Specifically, an active ester compound containing a dicyclopentadienyl diphenol structure, an active ester compound containing a naphthalene structure, an active ester compound containing an acetyl compound of phenolic phenol, and an active ester compound containing a phenolic phenolic compound Active ester compounds are preferable, and among them, an active ester compound containing a naphthalene structure and an active ester compound containing a dicyclopentadienyl diphenol structure are more preferable.

作為活性酯系硬化劑之市售品,可舉出包含二環戊二烯基二苯酚構造的活性酯化合物之「EXB9451」、「EXB9460」、「EXB9460S」、「HPC-8000-65T」(DIC(股)製)、包含萘構造的活性酯化合物之「EXB9416-70BK」(DIC(股)製)、包含酚酚醛的乙醯基化物的活性酯化合物之「DC808」(三菱化學(股)製)、包含酚酚醛的苯甲醯化物的活性酯化合物之「YLH1026」(三菱化學(股)製)等。 Examples of commercially available active ester hardeners include "EXB9451", "EXB9460", "EXB9460S", "HPC-8000-65T" (DIC) and active ester compounds containing a dicyclopentadienyl diphenol structure. (Stock), "EXB9416-70BK" (manufactured by DIC Co., Ltd.) containing an active ester compound containing naphthalene structure, and "DC808" (manufactured by Mitsubishi Chemical Co., Ltd.) containing an active ester compound containing phenolic phenolic acetamide ), "YLH1026" (manufactured by Mitsubishi Chemical Co., Ltd.), an active ester compound containing phenolic benzoic acid, etc.

作為苯并

Figure 105127087-A0202-12-0011-3
系硬化劑之具體例,可舉出昭和高分子(股)製的「HFB2006M」、四國化成工業(股)製的「P-d」、「F-a」。 As benzo
Figure 105127087-A0202-12-0011-3
Specific examples of the curing agent include "HFB2006M" manufactured by Showa Polymer Co., Ltd., and "Pd" and "Fa" manufactured by Shikoku Chemical Industry Co., Ltd.

作為氰酸酯系硬化劑,可舉例如雙酚A二氰 酸酯、多酚氰酸酯(低聚(3-亞甲基-1,5-伸苯基氰酸酯))、4,4’-亞甲基雙(2,6-二甲基苯基氰酸酯)、4,4’-亞乙基二苯基二氰酸酯、六氟雙酚A二氰酸酯、2,2-雙(4-氰酸酯)苯基丙烷、1,1-雙(4-氰酸酯苯基甲烷)、雙(4-氰酸酯-3,5-二甲基苯基)甲烷、1,3-雙(4-氰酸酯苯基-1-(甲基亞乙基))苯、雙(4-氰酸酯苯基)硫醚、及雙(4-氰酸酯苯基)醚等的2官能氰酸酯樹脂、由酚酚醛及甲酚酚醛等所衍生的多官能氰酸酯樹脂、此等氰酸酯樹脂一部分進行三嗪化的預聚物等。作為氰酸酯系硬化劑之具體例,可舉出lonza Japan(股)製的「PT30」及「PT60」(皆為酚酚醛型多官能氰酸酯樹脂)、「BA230」(雙酚A二氰酸酯的一部分或全部被三嗪化成為三聚體的預聚物)等。 As the cyanate ester curing agent, for example, bisphenol A dicyanide Ester, polyphenol cyanate (oligo(3-methylene-1,5-phenylene cyanate)), 4,4'-methylenebis(2,6-dimethylphenyl) Cyanate), 4,4'-ethylene diphenyl dicyanate, hexafluorobisphenol A dicyanate, 2,2-bis(4-cyanate) phenyl propane, 1,1 -Bis(4-cyanate phenylmethane), bis(4-cyanate-3,5-dimethylphenyl)methane, 1,3-bis(4-cyanatephenyl-1-( (Methylethylene)) benzene, bis(4-cyanate phenyl) sulfide, and bis(4-cyanate phenyl) ether and other bifunctional cyanate resins, made of phenol phenol and cresol phenol The derivatized polyfunctional cyanate resins, prepolymers in which part of these cyanate resins are triazineized, etc. Specific examples of cyanate ester hardeners include "PT30" and "PT60" (both phenolic novolac type polyfunctional cyanate resin) manufactured by Lonza Japan (Stock), and "BA230" (bisphenol A di Part or all of the cyanate ester is triazineized into a trimer (prepolymer) and the like.

作為碳二醯亞胺系硬化劑之具體例,可舉出日清紡Chemical(股)製的「V-03」、「V-07」等。 Specific examples of the carbodiimide-based hardener include "V-03" and "V-07" manufactured by Nisshinbo Chemical Co., Ltd., and the like.

本發明中,硬化劑係包含由酚系硬化劑、氰酸酯系硬化劑及活性酯系硬化劑中選出之1種以上為較佳,以包含由含有三嗪構造的酚系硬化劑、氰酸酯系硬化劑及活性酯系硬化劑中選出之1種以上為又較佳。 In the present invention, the curing agent preferably contains one or more selected from a phenolic curing agent, a cyanate ester curing agent, and an active ester curing agent. At least one selected from an acid ester curing agent and an active ester curing agent is more preferable.

樹脂組成物中的硬化劑的含有量並無特別限定,但較佳為0.1質量%以上,又較佳為1質量%以上,更佳為5質量%以上。硬化劑的含有量之上限只要是可發揮本發明之效果並無特別限定,較佳為30質量%以下,又較佳為25質量%以下,更佳為20質量%以下。 The content of the curing agent in the resin composition is not particularly limited, but is preferably 0.1% by mass or more, more preferably 1% by mass or more, and more preferably 5% by mass or more. The upper limit of the content of the curing agent is not particularly limited as long as the effect of the present invention can be exerted, and it is preferably 30% by mass or less, more preferably 25% by mass or less, and more preferably 20% by mass or less.

環氧樹脂與硬化劑之量比,就[環氧樹脂的環氧基的合計數]:[硬化劑的反應基的合計數]之比率而言,以1:0.2~1:2的範圍內為較佳,以1:0.3~1:1.5為又較佳,以1:0.4~1:1為更佳。於此,所謂硬化劑的反應基係活性羥基、活性酯基等,且依硬化劑的種類而有所不同。又,環氧樹脂的環氧基的合計數,係對於環氧樹脂將各環氧樹脂的固形物含量質量除以環氧當量的值來進行合計的值,所謂硬化劑的反應基的合計數,係對於全部的硬化劑將各硬化劑的固形物含量質量除以反應基當量的值進行合計的值。藉由將環氧樹脂與硬化劑之量比設為上述範圍內,可更加提升樹脂組成物的硬化物之耐熱性。 The ratio of the amount of epoxy resin to hardener is the ratio of [total number of epoxy groups of epoxy resin]: [total number of reactive groups of hardener], in the range of 1:0.2~1:2 It is better, and 1:0.3~1:1.5 is more preferred, and 1:0.4~1:1 is more preferred. Here, the reactive groups of the so-called hardener are active hydroxyl groups, active ester groups, etc., and differ depending on the type of hardener. In addition, the total number of epoxy groups of the epoxy resin is the total value obtained by dividing the solid content mass of each epoxy resin by the epoxy equivalent for the epoxy resin, the so-called total number of the reactive groups of the hardener , Is the value obtained by dividing the solid content mass of each curing agent by the equivalent of the reactive group for all curing agents. By setting the ratio of the amount of the epoxy resin to the curing agent within the above range, the heat resistance of the cured product of the resin composition can be further improved.

樹脂組成物除了上述環氧樹脂、硬化劑以外,亦可包含無機填充材、熱可塑性樹脂、硬化促進劑、耐燃劑及橡膠粒子等的添加劑。 The resin composition may contain additives such as inorganic fillers, thermoplastic resins, curing accelerators, flame retardants, and rubber particles in addition to the epoxy resins and curing agents described above.

-無機填充材- -Inorganic filler-

無機填充材之材料並無特別限定,可舉例如二氧化矽、氧化鋁、玻璃、堇青石、矽氧化物、硫酸鋇、碳酸鋇、滑石、黏土、雲母粉、氧化鋅、水滑石、水鋁礦、氫氧化鋁、氫氧化鎂、碳酸鈣、碳酸鎂、氧化鎂、氮化硼、氮化鋁、氮化錳、硼酸鋁、碳酸鍶、鈦酸鍶、鈦酸鈣、鈦酸鎂、鈦酸鉍、氧化鈦、氧化鋯、鈦酸鋇、鈦酸鋯酸鋇、鋯酸鋇、鋯酸鈣、磷酸鋯、及磷酸鎢酸鋯等。此等之中,以二氧化矽為特別適合。又作為二氧化矽係以球狀二氧化 矽為較佳。無機填充材係可單獨使用1種、或可組合2種以上來使用。作為無機填充材之市售品,可舉例如(股)Admatechs製「SO-C2」、「SO-C1」、「SO-C4」等。 The material of the inorganic filler is not particularly limited, and examples include silica, alumina, glass, cordierite, silica, barium sulfate, barium carbonate, talc, clay, mica powder, zinc oxide, hydrotalcite, and aluminum Minerals, aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, magnesium oxide, boron nitride, aluminum nitride, manganese nitride, aluminum borate, strontium carbonate, strontium titanate, calcium titanate, magnesium titanate, titanium Bismuth oxide, titanium oxide, zirconium oxide, barium titanate, barium zirconate titanate, barium zirconate, calcium zirconate, zirconium phosphate, and zirconium tungstate phosphate, etc. Among these, silicon dioxide is particularly suitable. Spherical Dioxide Silicon is preferred. The inorganic filler system may be used alone or in combination of two or more kinds. Examples of commercially available inorganic fillers include "SO-C2", "SO-C1", and "SO-C4" manufactured by Admatechs.

無機填充材之平均粒徑並無特別限定,但就可得到表面粗度小的絕緣層之觀點或微細配線形成性提升之觀點而言,以5μm以下為較佳,以4μm以下為又較佳,以3μm以下為更佳,以1μm以下、0.7μm以下、0.5μm以下、或0.3μm以下為更佳。另一方面,使用樹脂組成物來形成樹脂清漆時,就可得到具有適度的黏度且操作性為良好的樹脂清漆之觀點、就防止樹脂薄片之溶融黏度上昇之觀點而言,無機填充材的平均粒徑係以0.01μm以上為較佳,以0.03μm以上為又較佳,以0.05μm以上、0.07μm以上、或0.1μm以上為更佳。 The average particle size of the inorganic filler is not particularly limited, but from the viewpoint of obtaining an insulating layer with a small surface roughness or the viewpoint of improving the formation of fine wiring, 5μm or less is preferred, and 4μm or less is more preferred It is more preferably 3 μm or less, and more preferably 1 μm or less, 0.7 μm or less, 0.5 μm or less, or 0.3 μm or less. On the other hand, when a resin composition is used to form a resin varnish, it is possible to obtain a resin varnish with a moderate viscosity and good workability. From the viewpoint of preventing the melt viscosity of the resin sheet from increasing, the average inorganic filler The particle size is preferably 0.01 μm or more, more preferably 0.03 μm or more, and more preferably 0.05 μm or more, 0.07 μm or more, or 0.1 μm or more.

無機填充材之平均粒徑係可依據米氏(Mie)散射理論藉由雷射繞射‧散射法來進行測定。具體而言係可藉由雷射繞射散射式粒度分布測定裝置,以體積基準來作成無機填充材之粒度分布,並將其均粒徑作為平均粒徑來進行測定。測定樣品係可較佳使用為藉由超音波使無機填充材來分散至水中者。作為雷射繞射散射式粒度分布測定裝置,係可使用堀場製作所(股)製「LA-500」等。 The average particle size of the inorganic filler can be measured by the laser diffraction and scattering method based on the Mie scattering theory. Specifically, the particle size distribution of the inorganic filler can be created on a volume basis by a laser diffraction scattering particle size distribution measuring device, and the average particle size can be measured as the average particle size. The measurement sample system can preferably be used as an inorganic filler dispersed in water by ultrasonic waves. As a laser diffraction scattering type particle size distribution measuring device, "LA-500" manufactured by Horiba Manufacturing Co., Ltd. etc. can be used.

無機填充材就提高耐濕性及分散性之觀點而言,以用胺基矽烷系偶合劑、環氧矽烷系偶合劑、巰基矽烷系偶合劑、矽烷系偶合劑、有機矽氮烷化合物、鈦酸酯系偶合劑等的1種以上的表面處理劑來作處理為較佳。作 為表面處理劑之市售品,可舉例如信越化學工業(股)製「KBM403」(3-縮水甘油氧基丙基三甲氧基矽烷)、信越化學工業(股)製「KBM803」(3-巰基丙基三甲氧基矽烷)、信越化學工業(股)製「KBE903」(3-胺基丙基三乙氧基矽烷)、信越化學工業(股)製「KBM573」(N-苯基-3-胺基丙基三甲氧基矽烷)、信越化學工業(股)製「SZ-31」(六甲基二矽氮烷)、信越化學工業(股)製「KBM103」(苯基三甲氧基矽烷)、信越化學工業(股)製「KBM-4803」(長鏈環氧型矽烷偶合劑)等。 Inorganic fillers, from the viewpoint of improving moisture resistance and dispersibility, use aminosilane coupling agents, siloxane oxide coupling agents, mercaptosilane coupling agents, silane coupling agents, organosilazane compounds, titanium One or more surface treatment agents such as an acid ester coupling agent are preferably treated. Make Commercial products of surface treatment agents include "KBM403" (3-glycidoxypropyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., and "KBM803" manufactured by Shin-Etsu Chemical Co., Ltd. (3- Mercaptopropyl trimethoxysilane), "KBE903" (3-aminopropyltriethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd., and "KBM573" (N-phenyl-3) manufactured by Shin-Etsu Chemical Co., Ltd. -Aminopropyltrimethoxysilane), "SZ-31" (hexamethyldisilazane) manufactured by Shin-Etsu Chemical Co., Ltd., and "KBM103" (phenyltrimethoxysilane) manufactured by Shin-Etsu Chemical Co., Ltd. ), "KBM-4803" (long-chain epoxy silane coupling agent) manufactured by Shin-Etsu Chemical Co., Ltd., etc.

藉由表面處理劑之表面處理的程度,係可依無機填充材之每單位表面積的碳量來作評估。無機填充材之每單位表面積的碳量,就無機填充材之分散性提升之觀點而言,以0.02mg/m2以上為較佳,以0.1mg/m2以上為又較佳,以0.2mg/m2以上為更佳。另一方面,就樹脂清漆的溶融黏度或防止在薄片形態下的溶融黏度之上昇之觀點而言,以1mg/m2以下為較佳,以0.8mg/m2以下為又較佳,以0.5mg/m2以下為更佳。 The degree of surface treatment by the surface treatment agent can be evaluated based on the amount of carbon per unit surface area of the inorganic filler. The amount of carbon per unit surface area of the inorganic filler, from the viewpoint of improving the dispersibility of the inorganic filler, is preferably 0.02 mg/m 2 or more, more preferably 0.1 mg/m 2 or more, and 0.2 mg /m 2 or more is more preferable. On the other hand, from the viewpoint of the melting viscosity of the resin varnish or the prevention of the increase of the melting viscosity in the sheet form, 1 mg/m 2 or less is preferable, 0.8 mg/m 2 or less is more preferable, and 0.5 The mg/m 2 or less is more preferable.

無機填充材的每單位表面積的碳量,係可藉由溶劑(例如,甲基乙基酮(MEK))將表面處理後的無機填充材進行洗淨處理後來進行測定。具體而言係可以將作為溶劑的充分量的MEK加入至以表面處理劑經表面處理後的無機填充材中,並以25℃下進行超音波洗淨5分鐘。除去上清液,使固形物含量乾燥後,使用碳分析計來 測定無機填充材的每單位表面積的碳量。作為碳分析計係可使用堀場製作所(股)製「EMIA-320V」等。 The amount of carbon per unit surface area of the inorganic filler can be measured after washing the surface-treated inorganic filler with a solvent (for example, methyl ethyl ketone (MEK)). Specifically, a sufficient amount of MEK as a solvent can be added to the inorganic filler surface-treated with a surface treatment agent, and ultrasonic cleaning can be performed at 25°C for 5 minutes. After removing the supernatant and drying the solid content, use a carbon analyzer to The amount of carbon per unit surface area of the inorganic filler is measured. As a carbon analyzer system, "EMIA-320V" manufactured by Horiba Manufacturing Co., Ltd. can be used.

樹脂組成物中的無機填充材的含有量,就可得到於其上方能形成微細的配線的絕緣層之觀點而言,較佳為70質量%以下,又較佳為60質量%以下、50質量%以下、或40質量%以下。樹脂組成物中的無機填充材的含有量之下限並無特別限定,亦可為0質量%,但通常可設為5質量%以上、10質量%以上、20質量%以上等。 The content of the inorganic filler in the resin composition is preferably 70% by mass or less, more preferably 60% by mass or less, and 50% by mass from the viewpoint of obtaining an insulating layer on which fine wiring can be formed. % Or less, or 40% by mass or less. The lower limit of the content of the inorganic filler in the resin composition is not particularly limited, and it may be 0% by mass, but it can usually be set to 5% by mass or more, 10% by mass or more, or 20% by mass or more.

-熱可塑性樹脂- -Thermoplastic resin-

作為熱可塑性樹脂,可舉例如苯氧基樹脂、聚乙烯縮醛樹脂、聚烯烴樹脂、聚丁二烯樹脂、聚醯亞胺樹脂、聚醯胺醯亞胺樹脂、聚醚醯亞胺樹脂、聚碸樹脂、聚醚碸樹脂、聚苯醚樹脂、聚碳酸酯樹脂、聚醚醚酮樹脂、聚酯樹脂等的熱可塑性樹脂。熱可塑性樹脂係可單獨使用1種、或亦可組合2種以上來使用。 Examples of thermoplastic resins include phenoxy resins, polyvinyl acetal resins, polyolefin resins, polybutadiene resins, polyimide resins, polyimide resins, polyetherimide resins, Thermoplastic resins such as polyether resin, polyether resin, polyphenylene ether resin, polycarbonate resin, polyether ether ketone resin, and polyester resin. A thermoplastic resin system may be used individually by 1 type, or may be used in combination of 2 or more types.

熱可塑性樹脂的聚苯乙烯換算之重量平均分子量係以5,000~100,000的範圍內為較佳,以10,000~60,000的範圍內為又較佳,以20,000~60,000的範圍內為更佳。熱可塑性樹脂的聚苯乙烯換算之重量平均分子量係以凝膠滲透層析(GPC)法來作測定。具體而言熱可塑性樹脂的聚苯乙烯換算之重量平均分子量,係可使用(股)島津製作所製LC-9A/RID-6A的測定裝置、昭和電工(股)製Shodex K-800P/K-804L/K-804L的管柱、使 用三氯甲烷等來作為移動相,在40℃下測定管柱溫度並使用標準聚苯乙烯的檢量線進行計算。 The weight average molecular weight of the thermoplastic resin in terms of polystyrene is preferably in the range of 5,000 to 100,000, more preferably in the range of 10,000 to 60,000, and more preferably in the range of 20,000 to 60,000. The weight average molecular weight of the thermoplastic resin in terms of polystyrene is measured by the gel permeation chromatography (GPC) method. Specifically, the weight average molecular weight of the thermoplastic resin in terms of polystyrene can be measured using the LC-9A/RID-6A measuring device manufactured by Shimadzu Corporation, and Shodex K-800P/K-804L manufactured by Showa Denko Corporation. /K-804L string, use Use chloroform etc. as the mobile phase, measure the column temperature at 40°C and use the calibration curve of standard polystyrene for calculation.

作為苯氧基樹脂,可舉例如具有由雙酚A骨架、雙酚F骨架、雙酚S骨架、雙酚苯乙酮骨架、酚醛骨架、聯苯骨架、茀骨架、雙環戊二烯骨架、降冰片烯骨架、萘骨架、蒽骨架、金剛烷骨架、萜烯骨架、及三甲基環己烷骨架所成群中選出之1種以上的骨架的苯氧基樹脂。苯氧基樹脂的末端係酚性羥基、環氧基等的任一的官能基皆可。苯氧基樹脂係可單獨使用1種、或可組合2種以上來使用。作為苯氧基樹脂之具體例,可舉出三菱化學(股)製的「1256」及「4250」(皆為含有雙酚A骨架的苯氧基樹脂)、「YX8100」(含有雙酚S骨架的苯氧基樹脂)、及「YX6954」(含有雙酚苯乙酮骨架的苯氧基樹脂),除此之,可舉出新日鐵住金化學(股)製的「FX280」及「FX293」、三菱化學(股)製的「YL6954BH30」、「YX7553」、「YL7769BH30」、「YL6794」、「YL7213」、「YL7290」及「YL7482」等。 Examples of phenoxy resins include bisphenol A skeletons, bisphenol F skeletons, bisphenol S skeletons, bisphenol acetophenone skeletons, phenolic skeletons, biphenyl skeletons, pyrene skeletons, dicyclopentadiene skeletons, A phenoxy resin with one or more skeletons selected from the group of bornene skeleton, naphthalene skeleton, anthracene skeleton, adamantane skeleton, terpene skeleton, and trimethylcyclohexane skeleton. The terminal of the phenoxy resin may be any functional group such as a phenolic hydroxyl group and an epoxy group. A phenoxy resin system may be used individually by 1 type, or may be used in combination of 2 or more types. Specific examples of phenoxy resins include "1256" and "4250" manufactured by Mitsubishi Chemical Corporation (both are phenoxy resins containing bisphenol A skeleton), and "YX8100" (containing bisphenol S skeleton) Phenoxy resin), and "YX6954" (phenoxy resin containing bisphenol acetophenone skeleton). In addition to these, Nippon Steel & Sumikin Chemical Co., Ltd.’s "FX280" and "FX293" , "YL6954BH30", "YX7553", "YL7769BH30", "YL6794", "YL7213", "YL7290" and "YL7482" manufactured by Mitsubishi Chemical Corporation.

作為聚乙烯縮醛樹脂,可舉例如聚乙烯甲醛樹脂、聚乙烯基丁醛樹脂,以聚乙烯基丁醛樹脂為較佳。作為聚乙烯縮醛樹脂之具體例,可舉例如電氣化學工業(股)製的「電化butyral 4000-2」、「電化butyral 5000-A」、「電化butyral 6000-C」、「電化butyral 6000-EP」、積水化學工業(股)製的S-LEC BH系列、 BX系列、KS系列、BL系列、BM系列等。 Examples of polyvinyl acetal resins include polyvinyl formaldehyde resins and polyvinyl butyral resins, and polyvinyl butyral resins are preferred. Specific examples of polyvinyl acetal resins include "Denkabutyral 4000-2", "Denkabutyral 5000-A", "Denkabutyral 6000-C", and "Denkabutyral 6000-" manufactured by Denka Chemical Industry Co., Ltd. EP", S-LEC BH series manufactured by Sekisui Chemical Co., Ltd., BX series, KS series, BL series, BM series, etc.

作為聚醯亞胺樹脂之具體例,可舉出新日本理化(股)製的「RIKACOAT SN20」及「RIKACOAT PN20」。作為聚醯亞胺樹脂之具體例,又可舉出使2官能性羥基末端聚丁二烯、二異氰酸酯化合物及四元酸酐反應而得到的線狀聚醯亞胺(日本特開2006-37083號公報記載的聚醯亞胺)、含有聚矽氧烷骨架的聚醯亞胺(日本特開2002-12667號公報及日本特開2000-319386號公報等所記載的聚醯亞胺)等的改質聚醯亞胺。 Specific examples of polyimide resins include "RIKACOAT SN20" and "RIKACOAT PN20" manufactured by Nippon Rika Co., Ltd. As a specific example of the polyimide resin, a linear polyimide obtained by reacting a bifunctional hydroxyl-terminated polybutadiene, a diisocyanate compound, and a tetrabasic acid anhydride (Japanese Patent Application Publication No. 2006-37083) The polyimide described in the publication), the polyimide containing a polysiloxane skeleton (the polyimide described in the Japanese Patent Laid-Open No. 2002-12667 and the Japanese Patent Laid-Open No. 2000-319386), etc. Quality polyimide.

作為聚醯胺醯亞胺樹脂之具體例,可舉出東洋紡績(股)製的「VYLOMAX HR11NN」及「VYLOMAX HR16NN」。作為聚醯胺醯亞胺樹脂之具體例,又可舉出日立化成工業(股)製的「KS9100」、「KS9300」(含有聚矽氧烷骨架的聚醯胺醯亞胺)等的改質聚醯胺醯亞胺。 Specific examples of polyimide resins include "VYLOMAX HR11NN" and "VYLOMAX HR16NN" manufactured by Toyobo Co., Ltd. As specific examples of polyimide resins, modification of "KS9100" and "KS9300" (polysiloxane skeleton-containing polyimide imide) manufactured by Hitachi Chemical Co., Ltd. can also be cited. Polyamide imine.

作為聚醚碸樹脂之具體例,可舉出住友化學(股)製的「PES5003P」等。 As a specific example of the polyether sulfite resin, "PES5003P" manufactured by Sumitomo Chemical Co., Ltd. and the like can be cited.

作為聚碸樹脂之具體例,可舉出Solvay Advanced Polymers(股)製的聚碸「P1700」、「P3500」等。 As a specific example of the polymer resin, the polymer "P1700" and "P3500" manufactured by Solvay Advanced Polymers (stocks) can be mentioned.

其中,與其他的成分之組合時,就表面粗度可更低而得到與導體層之密著性為優異的絕緣層之觀點而言,作為熱可塑性樹脂係以苯氧基樹脂、聚乙烯縮醛樹脂為較佳。因此,在適合的一實施形態中,熱可塑性樹脂成 分係包含由苯氧基樹脂及聚乙烯縮醛樹脂所成之群中所選出之1種以上。 Among them, when combined with other components, from the viewpoint that the surface roughness can be lower and an insulating layer with excellent adhesion to the conductor layer can be obtained, as the thermoplastic resin, phenoxy resin or polyethylene shrinkage is used. Aldehyde resin is preferred. Therefore, in a suitable embodiment, the thermoplastic resin is The sub-system includes one or more selected from the group consisting of phenoxy resin and polyvinyl acetal resin.

樹脂組成物中的熱可塑性樹脂的含有量,就適度地調整樹脂薄片的溶融黏度之觀點而言,較佳為0質量%~20質量%,又較佳為0.5質量%~10質量%,更佳為1質量%~8質量%。 The content of the thermoplastic resin in the resin composition is preferably from 0% by mass to 20% by mass, more preferably from 0.5% by mass to 10% by mass, from the viewpoint of appropriately adjusting the melting viscosity of the resin sheet. Preferably, it is 1% by mass to 8% by mass.

-硬化促進劑- -Hardening accelerator-

作為硬化促進劑,可舉例如磷系硬化促進劑、胺系硬化促進劑、咪唑系硬化促進劑、胍系硬化促進劑等,以磷系硬化促進劑、胺系硬化促進劑、咪唑系硬化促進劑為較佳,以胺系硬化促進劑、咪唑系硬化促進劑為又較佳。硬化促進劑係可單獨使用1種,亦可組合2種以上來使用。 Examples of hardening accelerators include phosphorus hardening accelerators, amine hardening accelerators, imidazole hardening accelerators, guanidine hardening accelerators, etc., such as phosphorus hardening accelerators, amine hardening accelerators, and imidazole hardening accelerators. The agent is preferable, and an amine-based hardening accelerator and an imidazole-based hardening accelerator are more preferable. The hardening accelerator system may be used individually by 1 type, and may be used in combination of 2 or more types.

作為磷系硬化促進劑,可舉例如三苯膦、硼酸鏻化合物、四苯基鏻四苯基硼酸鹽、n-丁基鏻四苯基硼酸鹽、四丁基鏻癸酸鹽、(4-甲基苯基)三苯基鏻硫氰酸鹽、四苯基鏻硫氰酸鹽、丁基三苯基鏻硫氰酸鹽等,以三苯膦、四丁基鏻癸酸鹽為較佳。 Examples of phosphorus-based hardening accelerators include triphenylphosphine, phosphonium borate compounds, tetraphenylphosphonium tetraphenylborate, n-butylphosphonium tetraphenylborate, tetrabutylphosphonium decanoate, (4- (Methyl phenyl) triphenyl phosphonium thiocyanate, tetraphenyl phosphonium thiocyanate, butyl triphenyl phosphonium thiocyanate, etc., preferably triphenyl phosphine, tetrabutyl phosphonium decanoate .

作為胺系硬化促進劑,可舉例如三乙基胺、三丁基胺等的三烷基胺、4-二甲基胺基吡啶、苄基甲基胺、2,4,6,-參(二甲基胺基甲基)苯酚、1,8-二氮雜雙環(5,4,0)-十一烯等,以4-二甲基胺基吡啶、1,8-二氮雜雙環(5,4,0)-十一烯為較佳。 Examples of amine-based hardening accelerators include trialkylamines such as triethylamine and tributylamine, 4-dimethylaminopyridine, benzylmethylamine, 2,4,6,-reference ( Dimethylaminomethyl)phenol, 1,8-diazabicyclo(5,4,0)-undecene, etc., with 4-dimethylaminopyridine, 1,8-diazabicyclo( 5,4,0)-Undecene is preferred.

作為咪唑系硬化促進劑,可舉例如2-甲基咪 唑、2-十一烷基咪唑、2-十七烷基咪唑、1,2-二甲基咪唑、2-乙基-4-甲基咪唑、1,2-二甲基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、2-苯基-4-甲基咪唑、1-苄基-2-甲基咪唑、1-苄基-2-苯基咪唑、1-氰基乙基-2-甲基咪唑、1-氰基乙基-2-十一烷基咪唑、1-氰基乙基-2-乙基-4-甲基咪唑、1-氰基乙基-2-苯基咪唑、1-氰基乙基-2-烷基咪唑偏苯三甲酸鹽、1-氰基乙基-2-苯基咪唑偏苯三甲酸鹽、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-十一烷基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-乙基-4’-甲基咪唑基-(1’)]-乙基-s-三嗪、2,4-二胺基-6-[2’-甲基咪唑基-(1’)]-乙基-s-三嗪異氰脲酸加成物、2-苯基咪唑異氰脲酸加成物、2-苯基-4,5-二羥基甲基咪唑、2-苯基-4-甲基-5羥基甲基咪唑、2,3-二氫-1H-吡咯并[1,2-a]苯并咪唑、1-十二烷基-2-甲基-3-苄基咪唑鎓氯化物、2-甲基咪唑啉、2-苯基咪唑啉等的咪唑啉化合物及咪唑啉化合物與環氧樹脂之加成物,以2-乙基-4-甲基咪唑、1-苄基-2-苯基咪唑為較佳。 Examples of imidazole-based hardening accelerators include 2-methylimid Azole, 2-undecylimidazole, 2-heptadecylimidazole, 1,2-dimethylimidazole, 2-ethyl-4-methylimidazole, 1,2-dimethylimidazole, 2-ethyl 4-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 1-cyano 2-methylimidazole, 1-cyanoethyl-2-undecylimidazole, 1-cyanoethyl-2-ethyl-4-methylimidazole, 1-cyanoethyl- 2-Phenylimidazole, 1-cyanoethyl-2-alkylimidazole trimellitate, 1-cyanoethyl-2-phenylimidazole trimellitate, 2,4-diamino- 6-[2'-Methylimidazolyl-(1')]-ethyl-s-triazine, 2,4-diamino-6-[2'-undecylimidazolyl-(1') ]-Ethyl-s-triazine, 2,4-diamino-6-[2'-ethyl-4'-methylimidazolyl-(1')]-ethyl-s-triazine, 2 ,4-Diamino-6-[2'-methylimidazolyl-(1')]-ethyl-s-triazine isocyanuric acid adduct, 2-phenylimidazole isocyanuric acid adduct Compounds, 2-phenyl-4,5-dihydroxymethylimidazole, 2-phenyl-4-methyl-5hydroxymethylimidazole, 2,3-dihydro-1H-pyrrolo[1,2-a ] Benzimidazole, 1-dodecyl-2-methyl-3-benzylimidazolium chloride, 2-methylimidazoline, 2-phenylimidazoline and other imidazoline compounds and imidazoline compounds and rings The adduct of oxygen resin is preferably 2-ethyl-4-methylimidazole and 1-benzyl-2-phenylimidazole.

作為咪唑系硬化促進劑,係可使用市售品可舉例如三菱化學(股)製的「P200-H50」等。 As the imidazole-based hardening accelerator, a commercially available product can be used, for example, "P200-H50" manufactured by Mitsubishi Chemical Corporation.

作為胍系硬化促進劑,可舉例如雙氰胺、1-甲基胍、1-乙基胍、1-環己基胍、1-苯基胍、1-(o-甲苯基)胍、二甲基胍、二苯基胍、三甲基胍、四甲基胍、五甲基胍、1,5,7-三氮雜雙環[4.4.0]癸-5-烯、7-甲基-1,5,7-三氮雜雙環[4.4.0]癸-5-烯、1-甲基雙胍、1-乙基雙胍、1- n-丁基雙胍、1-n-十八烷基雙胍、1,1-二甲基雙胍、1,1-二乙基雙胍、1-環己基雙胍、1-烯丙基雙胍、1-苯基雙胍、1-(o-甲苯基)雙胍等,以雙氰胺、1,5,7-三氮雜雙環[4.4.0]癸-5-烯為較佳。 As the guanidine hardening accelerator, for example, dicyandiamide, 1-methylguanidine, 1-ethylguanidine, 1-cyclohexylguanidine, 1-phenylguanidine, 1-(o-tolyl)guanidine, metformin Guanidine, diphenylguanidine, trimethylguanidine, tetramethylguanidine, pentamethylguanidine, 1,5,7-triazabicyclo[4.4.0]dec-5-ene, 7-methyl-1 ,5,7-Triazabicyclo[4.4.0]dec-5-ene, 1-methyl biguanide, 1-ethyl biguanide, 1- n-butyl biguanide, 1-n-octadecyl biguanide, 1,1-dimethyl biguanide, 1,1-diethyl biguanide, 1-cyclohexyl biguanide, 1-allyl biguanide, 1-benzene Dicyandiamide, 1,5,7-triazabicyclo[4.4.0]dec-5-ene and the like are preferred.

樹脂組成物中的硬化促進劑的含有量並無特別限定,但以在0.05質量%~3質量%的範圍內來使用為較佳。 The content of the hardening accelerator in the resin composition is not particularly limited, but it is preferably used within the range of 0.05% by mass to 3% by mass.

-耐燃劑- -Flame Resistant Agent-

樹脂組成物係亦可包含耐燃劑。作為耐燃劑,可舉例如有機磷系耐燃劑、有機系含有氮的磷化合物、氮化合物、聚矽氧系耐燃劑、金屬氫氧化物等。耐燃劑係可單獨使用1種、或亦可併用2種以上。 The resin composition system may also contain a flame retardant. Examples of flame retardants include organic phosphorus flame retardants, organic nitrogen-containing phosphorus compounds, nitrogen compounds, silicone flame retardants, and metal hydroxides. The flame retardant system may be used individually by 1 type, or may use 2 or more types together.

作為耐燃劑,係亦可使用市售品,可舉例如三光(股)製的「HCA-HQ」等。 As the flame retardant, commercially available products may also be used, and examples include "HCA-HQ" manufactured by Sanko Co., Ltd.

樹脂組成物中的耐燃劑的含有量並無特別限定,但較佳為0.5質量%~20質量%,又較佳為1質量%~15質量%,更佳以1.5質量%~10質量%為更佳。 The content of the flame retardant in the resin composition is not particularly limited, but is preferably 0.5% by mass to 20% by mass, more preferably 1% by mass to 15% by mass, and more preferably 1.5% by mass to 10% by mass Better.

-有機填充材- -Organic filler-

樹脂組成物係亦可進而包含有機填充材。作為有機填充材,可使用能運用在形成印刷線路板之絕緣層時的任意的有機填充材,可舉例如橡膠粒子、聚醯胺微粒子、聚矽氧粒子等,以橡膠粒子為較佳。 The resin composition system may further include an organic filler. As the organic filler, any organic filler that can be used for forming the insulating layer of a printed wiring board can be used, and examples thereof include rubber particles, polyamide particles, polysiloxane particles, etc., and rubber particles are preferred.

作為橡膠粒子,係亦可使用市售品,可舉例如Aica工業(股)製的「AC3816N」等。 As the rubber particles, commercially available products may also be used, and examples include "AC3816N" manufactured by Aica Industries Co., Ltd. and the like.

樹脂組成物中的有機填充材的含有量,較佳為1質量%~20質量%,又較佳為2質量%~10質量%。 The content of the organic filler in the resin composition is preferably 1% by mass to 20% by mass, and more preferably 2% by mass to 10% by mass.

樹脂組成物係進而因應所需亦可包含除了耐燃劑、及有機填充材以外之其他添加劑,作為上述其他添加劑,可舉例如有機銅化合物、有機鋅化合物及有機鈷化合物等的有機金屬化合物、以及增稠劑、消泡劑、調平劑、密著性賦予劑、及著色劑等的樹脂添加劑等。 The resin composition system may further contain other additives in addition to flame retardants and organic fillers as required. Examples of the above-mentioned other additives include organic copper compounds, organic zinc compounds, and organic cobalt compounds, and other organic metal compounds, and Resin additives such as thickeners, defoamers, leveling agents, adhesion imparting agents, and coloring agents.

(溶劑) (Solvent)

作為樹脂清漆所包含的溶劑,對於支撐體只要可得到展現所期望的接觸角的樹脂清漆即可,並無特別限定可使用周知的溶劑。作為溶劑,可舉例如丙酮、甲基乙基酮(MEK)及環己酮等的酮類、乙酸乙酯、乙酸丁酯、乙酸溶纖劑、丙二醇單甲基醚乙酸酯及卡必醇乙酸酯等的乙酸酯類、溶纖劑及丁基卡必醇等的卡必醇類、甲苯、二甲苯及乙苯等的芳香族烴類、二甲基甲醯胺、二甲基乙醯胺(DMAc)及N-甲基吡咯啶酮等的醯胺系溶媒等。有機溶劑係可單獨使用1種、亦可組合2種以上來使用,亦可使用包含如溶劑石油腦之類的二種以上的溶劑者。 As the solvent contained in the resin varnish, as long as the resin varnish exhibiting a desired contact angle can be obtained for the support, a known solvent can be used without particular limitation. Examples of solvents include ketones such as acetone, methyl ethyl ketone (MEK) and cyclohexanone, ethyl acetate, butyl acetate, cellosolve acetate, propylene glycol monomethyl ether acetate, and carbitol Acetates such as acetates, cellosolves and carbitols such as butyl carbitol, aromatic hydrocarbons such as toluene, xylene, and ethylbenzene, dimethylformamide, dimethyl ethyl Amide-based solvents such as amide (DMAc) and N-methylpyrrolidone. An organic solvent system may be used individually by 1 type, and may be used in combination of 2 or more types, and you may use what contains 2 or more types of solvents, such as a solvent naphtha.

就抑制縮孔及高邊之觀點而言,溶劑係以包含極性溶劑為較佳。本發明中,極性溶劑的比介電率(20~25℃),較佳為10以上,又較佳為12以上、14以 上、16以上、18以上或20以上。較佳為50以下。作為如此般的極性溶劑,可舉例如乙醇(25.3)、甲基乙基酮(18.6)、環己酮(16.1)、DMAc(38.85)等(括弧內的值係表示比介電率)。 From the viewpoint of suppressing cratering and high edges, it is preferable that the solvent contains a polar solvent. In the present invention, the specific permittivity (20~25℃) of the polar solvent is preferably 10 or more, more preferably 12 or more, 14 or more Above, above 16, 18 or above 20. Preferably it is 50 or less. As such a polar solvent, for example, ethanol (25.3), methyl ethyl ketone (18.6), cyclohexanone (16.1), DMAc (38.85), etc. (the value in parentheses indicates the specific permittivity).

就抑制對於廣泛種類的支撐體之縮孔及高邊之觀點而言,溶劑係以包含極性溶劑與非極性溶劑為較佳。關於極性溶劑係如前述般。本發明中,非極性溶劑的比介電率(20~25℃),較佳為未滿10,又較佳為9以下、8以下、7以下、6以下或5以下。較佳為1以上或1.5以上。作為如此般的非極性溶劑,可舉例如甲苯(2.38)、二甲苯(甲基的鍵結位置,即因應鄰位、間位、對位為2.27~2.56)、乙苯(2.45)、溶劑石油腦(將甲苯、二甲苯、乙苯作為主成分的芳香族烴的混合溶劑)。其中,溶劑係以包含比介電率12以上的極性溶劑與比介電率9以下的非極性溶劑為較佳;以包含比介電率14以上的極性溶劑與比介電率8以下的非極性溶劑為又較佳;以包含比介電率16以上的極性溶劑與比介電率6以下的非極性溶劑為更佳;以一起包含由乙醇及甲基乙基酮中選出之一種或二種以上的極性溶劑、與由甲苯及溶劑石油腦中選出之一種或二種以上的非極性溶劑者為又較佳。溶劑中的極性溶劑與非極性溶劑之質量比[極性溶劑/非極性溶劑]係依據此等溶劑的比介電率或支撐體的種類,但較佳為2/8~8/2,又較佳為3/7~7/3。 From the viewpoint of suppressing cratering and high edges for a wide variety of supports, the solvent preferably contains a polar solvent and a non-polar solvent. The polar solvent system is as described above. In the present invention, the specific permittivity (20-25°C) of the non-polar solvent is preferably less than 10, and more preferably less than 9, 8, 7, 7, 6, or 5. Preferably it is 1 or more or 1.5 or more. Examples of such non-polar solvents include toluene (2.38), xylene (the bonding position of the methyl group, that is, 2.27~2.56 corresponding to the ortho, meta, and para positions), ethylbenzene (2.45), solvent petroleum Brain (a mixed solvent of aromatic hydrocarbons with toluene, xylene, and ethylbenzene as main components). Among them, the solvent is preferably a polar solvent with a specific permittivity of 12 or more and a non-polar solvent with a permittivity of 9 or less; a polar solvent with a permittivity of 14 or more and a non-polar solvent with a permittivity of 8 or less are preferred. Polar solvents are more preferred; polar solvents with a specific permittivity of 16 or higher and non-polar solvents with a permittivity of 6 or less are more preferred; to include one or two selected from ethanol and methyl ethyl ketone. More than one kind of polar solvents, and one or more kinds of non-polar solvents selected from toluene and solvent naphtha are more preferable. The mass ratio of the polar solvent to the non-polar solvent in the solvent [polar solvent/non-polar solvent] is based on the specific permittivity of these solvents or the type of support, but it is preferably 2/8~8/2, and more The best is 3/7~7/3.

就抑制對於支撐體之縮孔及高邊之觀點而 言,溶劑係以包含沸點100℃以上(較佳為105℃以上,又較佳為110℃以上、115℃以上、或120℃以上)的溶劑,與沸點未滿100℃(較佳為95℃以下,又較佳為90℃以下、85℃以下、或80℃以下)的溶劑為適合。沸點100℃以上的溶劑與沸點未滿100℃的溶劑之質量比[(沸點100℃以上的溶劑)/(沸點未滿100℃的溶劑)]係較佳為2/8~8/2,又較佳為3/7~7/3。 From the viewpoint of suppressing shrinkage and high sides of the support In other words, the solvent contains a solvent with a boiling point of 100°C or higher (preferably 105°C or higher, more preferably 110°C or higher, 115°C or higher, or 120°C or higher), and a boiling point of less than 100°C (preferably 95°C) Below, 90°C or less, 85°C or less, or 80°C or less) solvents are suitable. The mass ratio of a solvent with a boiling point above 100°C and a solvent with a boiling point below 100°C [(a solvent with a boiling point above 100°C)/(a solvent with a boiling point below 100°C)] is preferably 2/8 to 8/2, and Preferably it is 3/7~7/3.

步驟(A)中使用的樹脂清漆中的不揮發成分的含有量,就控制塗佈寬度為容易的觀點而言,較佳為5質量%以上,又較佳為10質量%以上、15質量%以上或20質量%以上。樹脂清漆中的不揮發成分的含有量之上限值,較佳為40質量%以下,又較佳為35質量%以下。 The content of the non-volatile components in the resin varnish used in step (A), from the viewpoint of easy control of the coating width, is preferably 5% by mass or more, and more preferably 10% by mass or more and 15% by mass Or more than 20% by mass. The upper limit of the content of the non-volatile components in the resin varnish is preferably 40% by mass or less, and more preferably 35% by mass or less.

對於支撐體只要能展現所期望的接觸角即可,樹脂清漆的黏度並無特別限定。就塗佈寬度控制為容易的觀點而言,較佳為2mPa‧s以上,又較佳為2.5mPa‧s以上或3mPa‧s以上。樹脂清漆的黏度之上限,只要是可對於支撐體之塗佈即可,並無特別限定。就進一步能享受本發明之效果,所謂於形成較薄的樹脂層時可帶來良好的膜厚之控制之觀點而言,較佳為15mPa‧s以下,又較佳為14mPa‧s以下、13mPa‧s以下、12mPa‧s以下、11mPa‧s以下或10mPa‧s以下。 The support has only to exhibit a desired contact angle, and the viscosity of the resin varnish is not particularly limited. From the viewpoint of easy control of the coating width, it is preferably 2 mPa·s or more, and more preferably 2.5 mPa·s or more or 3 mPa·s or more. The upper limit of the viscosity of the resin varnish is not particularly limited as long as it can be applied to the support. In order to further enjoy the effects of the present invention, the so-called good film thickness control when forming a thinner resin layer is preferably 15mPa‧s or less, more preferably 14mPa‧s or less, 13mPa ‧S or less, 12mPa‧s or less, 11mPa‧s or less, or 10mPa‧s or less.

樹脂清漆之黏度係可使用例如旋轉振動式黏度計((股)Tech-jam製viscometer VM-10A),以25℃的溫度條件下來進行測定。 The viscosity of the resin varnish can be measured at a temperature of 25°C using, for example, a rotary vibration viscometer (viscometer VM-10A manufactured by Tech-jam).

作為步驟(A)中使用的支撐體,可舉例如由塑膠材料所構成的薄膜、金屬箔、脫模紙,以由塑膠材料所構成的薄膜、金屬箔為較佳。 As the support used in the step (A), for example, a film made of a plastic material, metal foil, and release paper, and a film made of a plastic material or a metal foil is preferred.

作為支撐體若使用由塑膠材料所構成的薄膜時,作為塑膠材料可舉例如聚對苯二甲酸乙二酯(以下有時簡稱「PET」)、聚萘二甲酸乙二酯(以下有時簡稱「PEN」)等的聚酯、聚碳酸酯(以下有時簡稱「PC」)、聚甲基丙烯酸甲酯(PMMA)等的丙烯酸、環狀聚烯烴、三乙醯基纖維素(TAC)、聚醚硫醚(PES)、聚醚酮、聚醯亞胺等。其中,以聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯為較佳,以便宜的聚對苯二甲酸乙二酯為特佳。 When a film made of a plastic material is used as the support, examples of the plastic material include polyethylene terephthalate (hereinafter sometimes referred to as "PET"), polyethylene naphthalate (hereinafter sometimes referred to as (“PEN”) and other polyester, polycarbonate (hereinafter sometimes referred to as “PC”), polymethylmethacrylate (PMMA) and other acrylic, cyclic polyolefin, triacetyl cellulose (TAC), Polyether sulfide (PES), polyether ketone, polyimide, etc. Among them, polyethylene terephthalate and polyethylene naphthalate are preferred, and inexpensive polyethylene terephthalate is particularly preferred.

作為支撐體若使用金屬箔時,作為金屬箔可舉例如銅箔、鋁箔等,以銅箔為較佳。作為銅箔係可使用由銅的單金屬所構成的箔,亦可使用由銅與其他金屬(例如錫、鉻、銀、鎂、鎳、鋯、矽、鈦等)之合金所構成的箔。 When metal foil is used as a support, copper foil, aluminum foil, etc. are mentioned as a metal foil, Copper foil is preferable. As the copper foil system, a foil made of a single metal of copper can be used, and a foil made of an alloy of copper and other metals (for example, tin, chromium, silver, magnesium, nickel, zirconium, silicon, titanium, etc.) can also be used.

如同前述般,於製造印刷線路板時,近年為了達到絕緣層之表面平滑性或硬化時的異物附著風險之減低,故有以附著支撐體之狀態下來熱硬化樹脂層之情形。如此般情形時,大多使用附有脫模層的支撐體或使用密著力較低材質的支撐體,但在上述支撐體形成較薄樹脂層時膜厚的控制將有變得困難之情形。此點在本發明中,即使是在附有脫模層的支撐體或使用密著力較低材質的支撐體 上形成較薄樹脂層之情形時,也可實現良好的膜厚之控制。 As mentioned above, in the manufacture of printed wiring boards, in recent years, in order to achieve the surface smoothness of the insulating layer or to reduce the risk of foreign matter adhesion during hardening, the resin layer may be thermo-hardened while the support is attached. In such a case, a support body with a release layer or a support body of a material with low adhesion is often used. However, when the support body is formed with a thin resin layer, it may become difficult to control the film thickness. In the present invention, even if it is a support with a release layer or a support with a material with low adhesion When a thinner resin layer is formed on it, good film thickness control can be achieved.

因此,於進一步能享受本發明之效果的一實施形態中,支撐體係具備脫模層,即支撐體係附有脫模層的支撐體。作為於附有脫模層的支撐體的脫模層中使用的脫模劑,可舉例如由醇酸樹脂、聚烯烴樹脂、胺基甲酸酯樹脂、丙烯酸樹脂及聚矽氧樹脂所成之群中所選出之1種以上的脫模劑。附有脫模層的支撐體係亦可使用市售品,可舉例如具有將醇酸樹脂系脫模劑作為主成分的脫模層的PET薄膜、lintec(股)製的「SK-1」、「AL-5」、「AL-7」等。 Therefore, in an embodiment that can further enjoy the effects of the present invention, the support system includes a mold release layer, that is, a support body with a mold release layer attached to the support system. Examples of the mold release agent used in the mold release layer of the support with the mold release layer include alkyd resins, polyolefin resins, urethane resins, acrylic resins, and silicone resins. One or more mold release agents selected from the group. The support system with a release layer can also use commercially available products. Examples include PET film with a release layer based on an alkyd resin-based release agent, "SK-1" manufactured by Lintec (Stock), "AL-5", "AL-7", etc.

作為支撐體的厚度並無特別限定,但以在5μm~75μm的範圍內為較佳,以在10μm~60μm的範圍內為又較佳。尚,若使用附有脫模層的支撐體時,附有脫模層的支撐體全體的厚度以設為上述範圍內為較佳。 The thickness of the support is not particularly limited, but it is preferably in the range of 5 μm to 75 μm, and more preferably in the range of 10 μm to 60 μm. However, when using a support with a release layer, the thickness of the entire support with a release layer is preferably within the above range.

於步驟(A)中,樹脂清漆的塗佈只要能形成厚度為均勻的塗膜即可,可藉由以往周知的任意方法來實施。可使用例如模具塗佈法、柯馬(comma)塗佈法、凹板塗佈法、棒式塗佈法等的方法將樹脂清漆塗佈於支撐體上。此等的方法之中,就適合於形成膜厚較小的樹脂層之觀點而言,以凹板塗佈法為較佳。 In the step (A), the coating of the resin varnish may be carried out by any conventionally known method as long as it can form a coating film having a uniform thickness. The resin varnish can be coated on the support using methods such as a die coating method, a comma coating method, a gravure coating method, and a bar coating method. Among these methods, the gravure coating method is preferable from the viewpoint of being suitable for forming a resin layer with a small film thickness.

於步驟(A)中,將樹脂清漆以滴液法對於支撐體滴液時之接觸角為0.1°~20°。依據如此般的構成,故可抑制縮孔及高邊。該接觸角係較佳為0.2°以上,又較佳 為0.4°以上。又,該接觸角之上限係較佳為18°以下,又較佳為16°以下、14°以下、12°以下、11°以下或10°以下。 In step (A), the contact angle when the resin varnish is dropped on the support by the dropping method is 0.1°-20°. With such a structure, shrinkage and high sides can be suppressed. The contact angle is preferably 0.2° or more, and more preferably It is 0.4° or more. Moreover, the upper limit of the contact angle is preferably 18° or less, and more preferably 16° or less, 14° or less, 12° or less, 11° or less, or 10° or less.

將樹脂清漆以滴液法對於支撐體滴液時之接觸角,係可使用自動接觸角計(協和界面科學(股)製DropMaster DMs-401)來進行測定。具體而言係可依據後述中(藉由滴液法之接觸角之測定方法)所記載之方法來進行測定。 The contact angle when the resin varnish is dropped on the support by the dropping method can be measured using an automatic contact angle meter (DropMaster DMs-401 manufactured by Kyowa Interface Science Co., Ltd.). Specifically, the measurement can be performed according to the method described in the following (Method of Measuring Contact Angle by the Dropping Method).

<步驟(B)> <Step (B)>

於步驟(B)中,將樹脂清漆乾燥後而形成樹脂層。藉此,可於支撐體上形成樹脂層。 In step (B), the resin varnish is dried to form a resin layer. Thereby, a resin layer can be formed on the support.

本發明中,既不會有高邊或縮孔的問題且藉由所期望的塗佈寬度可形成厚度5μm以下的較薄樹脂層。樹脂層的厚度係4μm以下,亦可為3μm以下。樹脂層的厚度之下限並無特別限定,但通常為1μm以上。 In the present invention, there is no problem of high sides or shrinkage holes, and a thin resin layer with a thickness of 5 μm or less can be formed with a desired coating width. The thickness of the resin layer is 4 μm or less, and may be 3 μm or less. The lower limit of the thickness of the resin layer is not particularly limited, but it is usually 1 μm or more.

樹脂清漆的乾燥係可藉由加熱、吹拂熱風等的周知的乾燥方法來實施。乾燥條件係可因應樹脂清漆所包含的溶劑的沸點等來決定。乾燥條件並無特別限定,但以樹脂層中的有機溶劑的含有量為10質量%以下,較佳以設為5質量%以下之方式並使其乾燥。 The drying system of the resin varnish can be performed by a well-known drying method such as heating and blowing hot air. The drying conditions can be determined in accordance with the boiling point of the solvent contained in the resin varnish. The drying conditions are not particularly limited, but the content of the organic solvent in the resin layer is 10% by mass or less, and it is preferable to dry it so that it is 5% by mass or less.

乾燥處理係可僅只實施1次,亦可實施多次。若實施多次乾燥處理時,各自的乾燥條件係可相同、亦可不同。 The drying treatment system may be implemented only once or multiple times. When the drying treatment is performed multiple times, the respective drying conditions may be the same or different.

若僅只實施乾燥處理1次時,藉由例如以50 ℃~200℃(較佳為80℃~200℃,又較佳為90℃~200℃)下進行1分鐘~30分鐘(較佳為1分鐘~20分鐘,又較佳為1分鐘~15分鐘)來使樹脂清漆乾燥,從而可以形成樹脂層。 If only the drying process is performed once, for example, 50 ℃~200℃ (preferably 80℃~200℃, and more preferably 90℃~200℃) for 1 minute to 30 minutes (preferably 1 minute to 20 minutes, more preferably 1 minute to 15 minutes) ) To dry the resin varnish to form a resin layer.

若實施乾燥處理多次時,例如可以較第一次的乾燥處理的高溫下,來實施第2次以後的乾燥處理。例如可藉由50℃以上未滿150℃(較佳為70℃以上140℃以下,又較佳為80℃以上130℃以下、或90℃以上120℃以下)的溫度來進行第一次的乾燥處理,可以150℃以上200℃以下(較佳為160℃以上200℃以下、170℃以上200℃以下、或180℃以上200℃以下)的溫度下來進行第2次以後的乾燥處理。若實施乾燥處理多次時,各自的乾燥處理的時間係可以例如1分鐘~30分鐘(較佳為1分鐘~20分鐘,又較佳為1分鐘~15分鐘、或1分鐘~10分鐘)。 If the drying treatment is performed multiple times, for example, the second and subsequent drying treatments can be performed at a higher temperature than the first drying treatment. For example, the first drying can be performed at a temperature above 50°C but less than 150°C (preferably 70°C or more and 140°C or less, and more preferably 80°C or more and 130°C or less, or 90°C or more and 120°C or less) The treatment can be carried out at a temperature of 150°C or higher and 200°C or lower (preferably 160°C or higher and 200°C or lower, 170°C or higher and 200°C or lower, or 180°C or higher and 200°C or lower) for the second and subsequent drying treatments. If the drying treatment is performed multiple times, the time for each drying treatment can be, for example, 1 minute to 30 minutes (preferably 1 minute to 20 minutes, and more preferably 1 minute to 15 minutes, or 1 minute to 10 minutes).

樹脂薄片在未與樹脂層的支撐體接合的面(即與支撐體呈相反側的面)上,進而可設置以支撐體為基準的保護薄膜。因此,於一實施形態中,本發明支樹脂薄片之製造方法係於步驟(B)之後,進而包含以與樹脂層接合之方式來設置保護薄膜之步驟(以下亦稱為「步驟(C)」)。 The resin sheet may further be provided with a protective film based on the support on the surface that is not bonded to the support of the resin layer (that is, the surface on the opposite side to the support). Therefore, in one embodiment, the manufacturing method of the branched resin sheet of the present invention is after step (B), and further includes a step of providing a protective film by bonding with the resin layer (hereinafter also referred to as "step (C)" ).

於步驟(C)中,保護薄膜係以藉由輥或壓機壓黏等對樹脂層進行層合處理為較佳。層合處理係可使用市售的真空貼合機來實施。作為市售的真空貼合機,可舉 例如(股)名機製作所製的真空加壓式貼合機、Nichigo-Morton(股)製的真空貼合機等。 In step (C), the protective film is preferably laminated with the resin layer by a roll or a press. The lamination process can be implemented using a commercially available vacuum laminator. As a commercially available vacuum laminating machine, you can include For example, a vacuum pressure laminator manufactured by Meiji Seisakusho Co., Ltd., a vacuum laminator manufactured by Nichigo-Morton (stock), etc.

保護薄膜的厚度並無特別限定,例如為1μm~40μm。藉由層合保護薄膜可防止對於樹脂層的表面的灰塵等的附著或傷痕。樹脂薄片係可捲成輥狀後來保存。樹脂薄片若具有保護薄膜時,將可藉由剝下保護薄膜來使用。 The thickness of the protective film is not particularly limited, and is, for example, 1 μm to 40 μm. By laminating the protective film, it is possible to prevent adhesion and scratches of dust and the like on the surface of the resin layer. The resin sheet can be rolled into a roll and stored later. If the resin sheet has a protective film, it can be used by peeling off the protective film.

本發明之方法中所製造的樹脂薄片,係可使用作為用來形成印刷線路板的絕緣層的樹脂薄片(印刷線路板的絕緣層用樹脂薄片)。其中,於藉由增層方式之印刷線路板的製造中,可適合使用作為用來形成絕緣層的樹脂薄片(印刷線路板的增層絕緣層用樹脂薄片),且更可適合使用作為用來形成於其上方藉由鍍敷製程而形成電路的絕緣層的樹脂薄片(藉由鍍敷製程而形成電路的印刷線路板的增層絕緣層用樹脂薄片)。 The resin sheet produced in the method of the present invention can be used as a resin sheet for forming an insulating layer of a printed wiring board (resin sheet for an insulating layer of a printed wiring board). Among them, in the manufacture of printed wiring boards by the build-up method, it can be suitably used as a resin sheet for forming an insulating layer (resin sheet for build-up insulating layers of printed wiring boards), and more suitable for use as A resin sheet on which an insulating layer of a circuit is formed by a plating process (resin sheet for a build-up insulating layer of a printed wiring board on which a circuit is formed by a plating process) is formed.

[層合薄片及其製造方法] [Laminated sheet and its manufacturing method]

於一實施形態中,將可能使依據本發明所得到的樹脂薄片的樹脂層與以絕緣樹脂層作為代表的各種薄膜作接合從而形成層合薄片。 In one embodiment, it is possible to bond the resin layer of the resin sheet obtained according to the present invention and various films represented by the insulating resin layer to form a laminated sheet.

作為絕緣樹脂層係於形成印刷線路板的絕緣層時,可使用以往周知的絕緣樹脂層。絕緣樹脂層的厚度,就絕緣層的薄型化之觀點而言,較佳為70μm以下,又較佳為60μm以下、50μm以下、40μm以下、30 μm以下、或20μm以下。絕緣樹脂層的厚度支下限並無特別限定,但通常可為1μm以上、5μm以上、10μm以上等。 When forming an insulating layer of a printed wiring board as an insulating resin layer, a conventionally well-known insulating resin layer can be used. The thickness of the insulating resin layer is preferably 70 μm or less, and more preferably 60 μm or less, 50 μm or less, 40 μm or less, and 30 μm or less from the viewpoint of making the insulating layer thinner. μm or less, or 20 μm or less. The lower limit of the thickness of the insulating resin layer is not particularly limited, but it can usually be 1 μm or more, 5 μm or more, 10 μm or more.

就可得到機械強度為優異的薄型絕緣層之觀點而言,作為絕緣樹脂層係以預浸體為較佳,但亦可使用不含有薄片狀纖維基材的熱硬化性樹脂組成物層(以下簡稱為「熱硬化性樹脂組成物層」)。熱硬化性樹脂組成物層只要是於硬化後可展現充分的硬度與絕緣性即可並無特別限定,但一般為包含有環氧樹脂及硬化劑。環氧樹脂及硬化劑之種類或含有量係分別說明如同於上述(樹脂組成物)中的環氧樹脂及硬化劑。 From the viewpoint of obtaining a thin insulating layer with excellent mechanical strength, a prepreg is preferred as the insulating resin layer, but a thermosetting resin composition layer that does not contain a sheet-like fiber substrate (below Abbreviated as "thermosetting resin composition layer"). The thermosetting resin composition layer is not particularly limited as long as it can exhibit sufficient hardness and insulation after curing, but generally contains an epoxy resin and a curing agent. The types or content of the epoxy resin and the hardener are described respectively as the epoxy resin and the hardener in the above (resin composition).

就使所得到的絕緣層的熱膨脹率降低,並防止因絕緣層與導體層之熱膨脹的差所致使裂隙或電路變形之產生之觀點而言,熱硬化性樹脂組成物層係以進而包含無機填充材為較佳。作為無機填充材係可使用於上述(樹脂組成物)中的無機填充材。熱硬化性樹脂組成物層中的無機填充材的含有量,就使所得到的絕緣層的熱膨脹率降低之觀點而言,若將熱硬化性樹脂組成物層中的不揮發成分設為100質量%時,較佳為50質量%以上,又較佳為55質量%以上,更佳為60質量%以上、65質量%以上、70質量%以上、或75質量%以上。無機填充材的含有量之上限,就所得到的絕緣層的機械強度之觀點而言,較佳為95質量%以下,又較佳為90質量%以下或85質量%以下。做為使熱硬化性樹脂組成物層中可含有的其他成分, 可舉例如於上述(樹脂組成物)中已說明的熱可塑性樹脂、硬化促進劑、及耐燃劑及橡膠粒子等的添加劑。 From the viewpoint of reducing the thermal expansion coefficient of the obtained insulating layer and preventing the generation of cracks or circuit deformation due to the difference in thermal expansion between the insulating layer and the conductor layer, the thermosetting resin composition layer system further contains an inorganic filler The material is better. As an inorganic filler system, the inorganic filler in the above-mentioned (resin composition) can be used. In terms of the content of the inorganic filler in the thermosetting resin composition layer, from the viewpoint of reducing the thermal expansion coefficient of the resulting insulating layer, if the non-volatile content in the thermosetting resin composition layer is set to 100 mass %, preferably 50% by mass or more, more preferably 55% by mass or more, more preferably 60% by mass or more, 65% by mass or more, 70% by mass or more, or 75% by mass or more. The upper limit of the content of the inorganic filler is preferably 95% by mass or less, and more preferably 90% by mass or less or 85% by mass from the viewpoint of the mechanical strength of the insulating layer to be obtained. As other components that can be contained in the thermosetting resin composition layer, For example, additives such as thermoplastic resins, hardening accelerators, flame retardants, rubber particles, etc., described in the above (resin composition) can be mentioned.

於適合的一實施形態中,可藉由將依本發明之製造方法所得到的樹脂薄片的樹脂層與預浸體作接合從而製作層合薄片。 In a suitable embodiment, a laminated sheet can be produced by joining the resin layer of the resin sheet obtained by the production method of the present invention and the prepreg.

預浸體係使熱硬化性樹脂組成物含浸於薄片狀纖維基材中而成者。 In the prepreg system, a thermosetting resin composition is impregnated in a sheet-like fiber base material.

預浸體中使用的熱硬化性樹脂組成物,只要是該硬化物具有充分的硬度與絕緣性即可並無特別限定,可使用被作為印刷線路板的絕緣層的形成中所使用的以往周知的熱硬化性樹脂組成物。可使用例如上述之熱硬化性樹脂組成物層的形成中使用的樹脂組成物。又或是預浸體中使用的熱硬化性樹脂組成物,亦可與本發明之樹脂薄片中的樹脂層的形成中使用的樹脂組成物為相同。 The thermosetting resin composition used in the prepreg is not particularly limited as long as the cured product has sufficient hardness and insulating properties, and conventionally known ones used in the formation of insulating layers of printed wiring boards can be used. The thermosetting resin composition. For example, the resin composition used in the formation of the above-mentioned thermosetting resin composition layer can be used. In addition, the thermosetting resin composition used in the prepreg may be the same as the resin composition used in the formation of the resin layer in the resin sheet of the present invention.

預浸體中使用的薄片狀纖維基材並無特別限定,可使用玻璃布、芳族聚醯胺不織布、液晶聚合物不織布等的預浸體用基材來作為常用者。就絕緣層的薄型化之觀點而言,薄片狀纖維基材的厚度較佳為50μm以下,又較佳為40μm以下,更佳為30μm以下、25μm以下或20μm以下。薄片狀纖維基材的厚度之下限並無特別限定,但通常可為5μm以上、10μm以上等。 The sheet-like fibrous substrate used in the prepreg is not particularly limited, and the substrates for prepregs such as glass cloth, aromatic polyamide nonwoven fabric, liquid crystal polymer nonwoven fabric, etc. can be used as common ones. From the viewpoint of reducing the thickness of the insulating layer, the thickness of the flaky fibrous substrate is preferably 50 μm or less, more preferably 40 μm or less, and more preferably 30 μm or less, 25 μm or less, or 20 μm or less. The lower limit of the thickness of the sheet-like fibrous base material is not particularly limited, but it can usually be 5 μm or more, 10 μm or more.

預浸體係可藉由熱溶法、溶劑法等的周知的方法來製造。 The prepreg system can be produced by a well-known method such as a hot melt method and a solvent method.

預浸體的厚度係可為70μm以下、60μm以 下、50μm以下、40μm以下、或亦可為30μm以下。預浸體的厚度之下限並無特別限定,但通常可為10μm以上、12μm以上等。尚,預浸體的厚度係藉由調整熱硬化性樹脂組成物的含浸量而可容易地變更。 The thickness of the prepreg can be 70μm or less, 60μm or less Lower, 50 μm or less, 40 μm or less, or 30 μm or less. The lower limit of the thickness of the prepreg is not particularly limited, but it can usually be 10 μm or more, 12 μm or more. Still, the thickness of the prepreg can be easily changed by adjusting the impregnation amount of the thermosetting resin composition.

層合薄片係可以與樹脂薄片的樹脂層與絕緣樹脂層(較佳為預浸體)接合之方式藉由層合來製作。例如可以該樹脂薄片的樹脂層與絕緣樹脂層接合之方式,於絕緣樹脂層上將依據本發明所得到的樹脂薄片藉由層合處理來製造層合薄片。 The laminated sheet can be produced by lamination by bonding the resin layer of the resin sheet and the insulating resin layer (preferably a prepreg). For example, the resin layer of the resin sheet and the insulating resin layer can be joined, and the resin sheet obtained according to the present invention can be laminated on the insulating resin layer to produce a laminated sheet.

層合處理係可使用市售的真空貼合機來實施。市售的真空貼合機係如同前述般。 The lamination process can be implemented using a commercially available vacuum laminator. Commercially available vacuum laminating machines are as described above.

於層合薄片的製造中,絕緣樹脂層係可以包含支撐體、與該支撐體接合的絕緣樹脂層的黏著薄片之形態下來使用。作為支撐體係可使用與對於上述樹脂薄片所說明的支撐體相同者。 In the manufacture of the laminated sheet, the insulating resin layer can be used in the form of an adhesive sheet including a support and an insulating resin layer bonded to the support. As the support system, the same ones as those described for the above-mentioned resin sheet can be used.

於其他的一實施形態中,依本發明所得到的樹脂薄片的樹脂層,亦可藉由塗佈絕緣樹脂組成物後使塗佈膜乾燥而形成絕緣樹脂層從而製造層合薄片。 In another embodiment, the resin layer of the resin sheet obtained according to the present invention may be formed by coating an insulating resin composition and then drying the coating film to form an insulating resin layer to produce a laminated sheet.

於此方法中,絕緣樹脂層係將絕緣樹脂組成物溶解於有機溶劑中來調製絕緣樹脂清漆,使用模塗佈機或凹版塗佈器等將該絕緣樹脂清漆塗佈於支撐體上,並可藉由使絕緣樹脂清漆乾燥而來製作。 In this method, the insulating resin layer is prepared by dissolving the insulating resin composition in an organic solvent to prepare an insulating resin varnish, and the insulating resin varnish is coated on the support using a die coater or a gravure coater, etc. It is produced by drying the insulating resin varnish.

作為絕緣樹脂組成物,係以包含環氧樹脂及硬化劑的組成物為較佳。環氧樹脂及硬化劑的種類或含有 量,係分別說明如同於上述(樹脂組成物)中的環氧樹脂及硬化劑。作為有機溶劑,係可使用與上述之樹脂清漆中所包含的溶劑為相同者。 As the insulating resin composition, a composition containing an epoxy resin and a hardener is preferable. Type or content of epoxy resin and hardener The amounts are described separately as the epoxy resin and hardener in the above (resin composition). As the organic solvent, the same solvent as that contained in the above-mentioned resin varnish can be used.

絕緣樹脂清漆的乾燥係可藉由加熱、吹拂熱風等的周知的乾燥方法來實施。 The drying system of the insulating resin varnish can be performed by a well-known drying method such as heating and blowing hot air.

層合薄片係可使用作為用來形成印刷線路板的絕緣層的層合薄片(印刷線路板的絕緣層用層合薄片)。其中,於藉由增層方式之印刷線路板的製造中,可適合使用作為用來形成絕緣層的層合薄片(印刷線路板的增層絕緣層用層合薄片),且更可適合使用作為用來形成於其上方藉由鍍敷製程而形成電路的絕緣層的層合薄片(藉由鍍敷製程而形成電路的印刷線路板的增層絕緣層用層合薄片)。 As the laminated sheet system, a laminated sheet for forming an insulating layer of a printed wiring board (a laminated sheet for an insulating layer of a printed wiring board) can be used. Among them, in the manufacture of printed wiring boards by the build-up method, it can be suitably used as a laminated sheet for forming an insulating layer (a laminated sheet for a build-up insulating layer of a printed wiring board), and can be more suitably used as A laminate sheet used to form an insulating layer on which a circuit is formed by a plating process (a laminate sheet for a build-up insulating layer of a printed wiring board where a circuit is formed by a plating process).

尚,於層合薄片之製造時,若以上述黏著薄片的形態下來使用絕緣樹脂層時,所得到的層合薄片中,在絕緣樹脂層之未與本發明之樹脂薄片接合的面(即與本發明之樹脂薄片呈相反側的面)上,具有源自於黏著薄片的支撐體。於製造層合板、或印刷線路板時,將可藉由剝下源自於上述黏著薄片的支撐體來使用。 Furthermore, when the insulating resin layer is used in the form of the above-mentioned adhesive sheet during the manufacture of the laminated sheet, the resulting laminated sheet will have a surface of the insulating resin layer that is not bonded to the resin sheet of the present invention (that is, with The resin sheet of the present invention has a support derived from the adhesive sheet on the surface on the opposite side). When manufacturing laminates or printed wiring boards, it can be used by peeling off the support derived from the above-mentioned adhesive sheet.

[層合板及其製造方法] [Laminate and its manufacturing method]

依據本發明之製造方法所得到的樹脂薄片係可使用於印刷線路板等的層合板之製造中。於一實施形態中,層合板係可使用依據本發明之製造方法所得到的樹脂薄片與絕 緣樹脂層,並藉由包含下述步驟(I-1)之方法來製造(以下亦稱為「第1實施形態」)。 The resin sheet obtained by the manufacturing method of the present invention can be used in the manufacture of laminates such as printed wiring boards. In one embodiment, the laminate can use the resin sheet and insulation obtained by the manufacturing method of the present invention. The edge resin layer is manufactured by a method including the following step (I-1) (hereinafter also referred to as "first embodiment").

(I-1)在樹脂層彼此以互相對向之方式所配置的2片樹脂薄片之間配置1片以上的絕緣樹脂層,並在減壓下、以200℃以上進行加熱及加壓來作一體成型之步驟 (I-1) One or more insulating resin layers are arranged between two resin sheets arranged in such a way that the resin layers are opposed to each other, and the insulating resin layer is heated and pressurized at 200°C or higher under reduced pressure. One-piece molding steps

於第1實施形態中使用的樹脂薄片及絕緣樹脂層係如同前述般。於第1實施形態中,絕緣樹脂層係以預浸體為較佳。 The resin sheet and insulating resin layer used in the first embodiment are as described above. In the first embodiment, the insulating resin layer is preferably a prepreg.

步驟(I-1)係可程序例如使用真空熱壓機裝置並用以下之程序來實施。 Step (I-1) can be carried out by a procedure such as using a vacuum heat press device and the following procedure.

首先,在真空熱壓機裝置中,在樹脂層彼此以互相對向之方式所配置的2片樹脂薄片之間,以配置1片以上的絕緣樹脂層之方式來安置層合的層合構造。 First, in a vacuum heat press device, a laminated structure is arranged such that one or more insulating resin layers are arranged between two resin sheets arranged so that the resin layers face each other.

接著,以減壓條件下來進行將層合構造作加熱壓黏之真空熱壓機處理。真空熱壓機處理係可藉由使用經加熱的SUS板等的金屬板從該兩個面對層合構造進行押壓的以往周知的真空熱壓機裝置來實施。作為市售的真空熱壓機裝置,可舉例如(股)名機製作所製的「MNPC-V-750-5-200」、北川精機(股)製的「VH1-1603」等。 Then, under reduced pressure, the laminated structure is heated and pressed by a vacuum hot press. The vacuum heat press process can be implemented by a conventionally known vacuum heat press device that presses a metal plate such as a heated SUS plate from the two facing laminated structures. As a commercially available vacuum heat press device, for example, "MNPC-V-750-5-200" manufactured by Meike Manufacturing Co., Ltd., "VH1-1603" manufactured by Kitagawa Seiki Co., Ltd., and the like can be cited.

真空熱壓機處理之條件並無特別限定,可使用於製造層合板時所使用的周知之條件。 The conditions of the vacuum heat press processing are not particularly limited, and it can be used for well-known conditions used in the manufacture of laminates.

步驟(I-1)係使用2片以上的絕緣樹脂層,並可於絕緣樹脂層彼此之間進而配置內層基板來實施。2片以上的絕緣樹脂層係可相同亦可為不同。 Step (I-1) is implemented by using two or more insulating resin layers, and placing an inner substrate between the insulating resin layers. Two or more insulating resin layers may be the same or different.

本發明中,所謂「內層基板」主要為玻璃環氧基板、金屬基板、聚酯基板、聚醯亞胺基板、BT樹脂基板、熱硬化型聚苯醚基板等的基板,或在該基板的一片面或者兩面上形成經圖型加工的導體層(電路)的電路基板。又於製造印刷線路板時,進而,應形成絕緣層及/或導體層的中間製造物的內層電路基板亦包含在本發明所謂的「內層基板」中。 In the present invention, the so-called "inner substrate" mainly refers to substrates such as glass epoxy substrates, metal substrates, polyester substrates, polyimide substrates, BT resin substrates, thermosetting polyphenylene ether substrates, etc., or on the substrates A circuit board with a pattern-processed conductor layer (circuit) formed on one or both sides. In the production of printed wiring boards, furthermore, the inner layer circuit board on which the insulating layer and/or the conductor layer should be formed as an intermediate product is also included in the so-called "inner layer substrate" in the present invention.

藉由步驟(I-1)將樹脂薄片的樹脂層與絕緣樹脂層一體化來形成絕緣層。 In step (I-1), the resin layer of the resin sheet and the insulating resin layer are integrated to form an insulating layer.

於其他的實施形態中,層合板係可使用上述之層合薄片,並藉由包含下述步驟(II-1)及(II-2)之方法來製造(以下亦稱為「第2實施形態」)。 In other embodiments, the laminate may use the above-mentioned laminate sheet and be manufactured by a method including the following steps (II-1) and (II-2) (hereinafter also referred to as "the second embodiment ").

(II-1)將層合薄片以絕緣樹脂層與內層基板相接之方式來層合於內層基板上之步驟 (II-1) The step of laminating the laminated sheet on the inner substrate with the insulating resin layer in contact with the inner substrate

(II-2)將層合薄片熱硬化後來形成絕緣層之步驟 (II-2) The step of thermally hardening the laminated sheet to form an insulating layer

於第2實施形態中所使用的層合薄片及內層基板係如同前述般。 The laminated sheet and the inner substrate used in the second embodiment are as described above.

於步驟(II-1)中,將層合薄片以絕緣樹脂層與內層基板相接之方式來層合於內層基板上。 In step (II-1), the laminated sheet is laminated on the inner substrate in such a way that the insulating resin layer is in contact with the inner substrate.

於步驟(II-1)中的層合薄片與內層基板之層合係可藉由例如從支撐體側將層合薄片加熱壓黏於內層基板上來進行。作為將層合薄片加熱壓黏於內層基板上之構件(以下亦稱為「加熱壓黏構件」),可舉例如經加熱的金屬板(SUS鏡板等)或金屬輥(SUS輥)等。尚,並非 將加熱壓黏構件直接壓製於層合薄片上,而是為使層合薄片能充分地追随內層基板的表面凹凸,故以藉由耐熱橡膠等的彈性材來進行壓製為較佳。 The lamination system of the laminate sheet and the inner substrate in step (II-1) can be performed by, for example, heating and pressing the laminate sheet on the inner substrate from the support side. As a member for heating and pressing the laminated sheet to the inner substrate (hereinafter also referred to as "heating and pressing member"), for example, a heated metal plate (SUS mirror plate, etc.) or metal roller (SUS roller), etc. can be mentioned. Still not The heating and pressing member is directly pressed on the laminated sheet, but in order to make the laminated sheet fully follow the surface irregularities of the inner substrate, it is preferable to press with an elastic material such as heat-resistant rubber.

層合薄片與內層基板之層合係可藉由真空層合法來實施。於真空層合法中,加熱溫度較佳為60℃~160℃,又較佳為80℃~140℃的範圍內,壓黏壓力較佳為1kgf/cm2~18kgf/cm2(0.098MPa~1.77MPa),又較佳為3kgf/cm2~15kgf/cm2(0.29MPa~1.47MPa)的範圍內,壓黏時間較佳為20秒鐘~400秒鐘,又較佳為30秒鐘~300秒鐘的範圍內。層合係較佳為以壓力26.7hPa以下之減壓條件下來實施。 The lamination system of the laminated sheet and the inner substrate can be implemented by a vacuum lamination method. In the vacuum lamination method, the heating temperature is preferably 60°C~160°C, and more preferably within the range of 80°C~140°C, and the pressure bonding pressure is preferably 1kgf/cm 2 ~18kgf/cm 2 (0.098MPa~1.77 MPa), and preferably within the range of 3kgf/cm 2 ~15kgf/cm 2 (0.29MPa~1.47MPa), the pressure bonding time is preferably 20 seconds to 400 seconds, and more preferably 30 seconds to 300 Within seconds. The lamination system is preferably carried out under reduced pressure of 26.7 hPa or less.

於步驟(II-1)中,層合薄片係可層合於內層基板的一面上、亦可層合於內層基板的兩面上。 In the step (II-1), the laminated sheet can be laminated on one side of the inner substrate or on both sides of the inner substrate.

層合薄片與內層基板之層合係可藉由市售的真空貼合機來進行。市售的真空貼合機係如同前述般。 The lamination system of the laminated sheet and the inner substrate can be performed by a commercially available vacuum laminator. Commercially available vacuum laminating machines are as described above.

於步驟(II-2)中,將層合薄片熱硬化後來形成絕緣層。熱硬化之條件並無特別限定,可使用於形成印刷線路板的絕緣層時通常所採用之條件。 In step (II-2), the laminated sheet is thermally cured to form an insulating layer. The thermal curing conditions are not particularly limited, and the conditions generally used when forming the insulating layer of a printed wiring board can be used.

藉由步驟(II-2),層合薄片中的樹脂層與絕緣樹脂層的雙方都被熱硬化而形成一體化的絕緣層。 In the step (II-2), both the resin layer and the insulating resin layer in the laminated sheet are thermally cured to form an integrated insulating layer.

不論第1實施形態及第2實施形態之差別,進而可實施(III)於絕緣層上開孔之步驟、(IV)將絕緣層進行粗化處理之步驟、(V)於絕緣層的表面上形成電路之步驟。因此,於一實施形態中,層合板係包含於絕緣 層的表面上所形成的電路。 Regardless of the difference between the first embodiment and the second embodiment, (III) the step of making holes on the insulating layer, (IV) the step of roughening the insulating layer, and (V) on the surface of the insulating layer Steps to form a circuit. Therefore, in one embodiment, the laminate is included in the insulating The circuit formed on the surface of the layer.

尚,支撐體不論第1實施形態及第2實施形態之差別,只要於絕緣層的表面上形成電路之前除去即可,就所得到的絕緣層之表面平滑性或硬化時的異物附著風險之減低之觀點而言,以於樹脂層之熱硬化後來除去為較佳。詳細而言,於第1實施形態中,支撐體只要於步驟(I-1)與步驟(III)之間、步驟(III)與步驟(IV)之間、或步驟(IV)與步驟(V)之間來除去即可。於第2實施形態中,支撐體只要是於步驟(II-2)與步驟(III)之間、步驟(III)與步驟(IV)之間、或步驟(IV)與步驟(V)之間來除去即可。 Regardless of the difference between the first embodiment and the second embodiment, as long as the support is removed before forming a circuit on the surface of the insulating layer, the surface smoothness of the obtained insulating layer and the risk of foreign matter adhesion during curing are reduced. From a standpoint, it is better to remove the resin layer after thermal hardening. In detail, in the first embodiment, the support only needs to be between step (I-1) and step (III), between step (III) and step (IV), or between step (IV) and step (V). ). In the second embodiment, as long as the support is between step (II-2) and step (III), between step (III) and step (IV), or between step (IV) and step (V) Just remove it.

步驟(III)係於絕緣層上開孔之步驟,藉此可於絕緣層上形成通孔洞、穿通孔等的孔洞。步驟(III)係因應使用於絕緣層之形成的樹脂層及絕緣樹脂層之組成等,可使用例如鑽孔、雷射、電漿等來實施。孔洞的尺寸或形狀係可因應印刷線路板之設計來適當決定。 Step (III) is a step of opening a hole on the insulating layer, whereby holes such as through holes and through holes can be formed on the insulating layer. Step (III) can be implemented using, for example, drilling, laser, plasma, etc., depending on the resin layer used for the formation of the insulating layer and the composition of the insulating resin layer. The size or shape of the hole can be appropriately determined according to the design of the printed circuit board.

步驟(IV)係將絕緣層進行粗化處理之步驟。粗化處理之程序、條件並無特別限定,可採用於形成印刷線路板的絕緣層時通常所使用的周知的程序、條件。可依此順序實施例如藉由膨潤液之膨潤處理、藉由氧化劑之粗化處理、藉由中和液之中和處理來將絕緣層進行粗化處理。作為膨潤液並無特別限定,可舉出鹼溶液、界面活性劑溶液等,較佳為鹼溶液,作為該鹼溶液係以氫氧化鈉溶液、氫氧化鉀溶液為又較佳。作為市售的膨潤液,可舉 例如Atotech Japan(股)製的「Swelling Dip Securiganth P」、「Swelling Dip Securiganth SBU」等。藉由膨潤液之膨潤處理並無特別限定,可藉由例如將絕緣層浸漬於30~90℃的膨潤液中1分鐘~20分鐘來進行。作為氧化劑並無特別限定,可舉例如於氫氧化鈉的水溶液中溶解過錳酸鉀或過錳酸鈉的鹼性過錳酸溶液。藉由鹼性過錳酸溶液等的氧化劑之粗化處理,係以使絕緣層浸漬於加熱至60℃~80℃的氧化劑溶液中10分鐘~30分鐘來進行為較佳。又,於鹼性過錳酸溶液中的過錳酸鹽的濃度係以5質量%~10質量%為較佳。作為市售的氧化劑,可舉例如Atotech Japan(股)製的「Concentrate Compact CP」、「Dosing solution Securiganth P」等的鹼性過錳酸溶液。又,作為中和液係以酸性的水溶液為較佳,作為市售品可舉例如Atotech Japan(股)製的「Reduction solution Securiganth P」。藉由中和液之處理係可使藉由氧化劑進行了粗化處理的處理面於30~80℃的中和液中浸漬5分鐘~30分鐘來進行。 Step (IV) is a step of roughening the insulating layer. The procedures and conditions of the roughening treatment are not particularly limited, and well-known procedures and conditions generally used when forming the insulating layer of a printed wiring board can be adopted. In this order, for example, a swelling treatment by a swelling liquid, a roughening treatment by an oxidizing agent, and a neutralization treatment by a neutralization liquid can be performed to roughen the insulating layer. The swelling liquid is not particularly limited, and an alkali solution, a surfactant solution, etc. are mentioned, and an alkali solution is preferred. As the alkali solution, a sodium hydroxide solution or a potassium hydroxide solution is more preferred. As a commercially available swelling fluid, there are For example, "Swelling Dip Securiganth P" and "Swelling Dip Securiganth SBU" manufactured by Atotech Japan (stock). The swelling treatment by the swelling liquid is not particularly limited, and can be performed by, for example, immersing the insulating layer in the swelling liquid at 30 to 90° C. for 1 to 20 minutes. The oxidizing agent is not particularly limited, and, for example, an alkaline permanganic acid solution in which potassium permanganate or sodium permanganate is dissolved in an aqueous solution of sodium hydroxide is mentioned. The roughening treatment by an oxidizing agent such as an alkaline permanganic acid solution is preferably performed by immersing the insulating layer in an oxidizing agent solution heated to 60°C to 80°C for 10 minutes to 30 minutes. In addition, the concentration of permanganate in the alkaline permanganic acid solution is preferably 5 to 10% by mass. Examples of commercially available oxidants include alkaline permanganic acid solutions such as "Concentrate Compact CP" manufactured by Atotech Japan Co., Ltd. and "Dosing solution Securiganth P". In addition, an acidic aqueous solution is preferable as the neutralizing liquid, and as a commercially available product, for example, "Reduction solution Securiganth P" manufactured by Atotech Japan (Stock) can be mentioned. The treatment by the neutralization liquid can be performed by immersing the treated surface roughened by the oxidizing agent in the neutralization liquid at 30 to 80°C for 5 to 30 minutes.

步驟(V)係於絕緣層的表面上形成電路(導體層)之步驟。 Step (V) is a step of forming a circuit (conductor layer) on the surface of the insulating layer.

使用於導體層的導體材料並無特別限定。於適合的實施形態中,導體層係包含由金、鉑、鈀、銀、銅、鋁、鈷、鉻、鋅、鎳、鈦、鎢、鐵、錫及銦所成之群中所選出之1種以上的金屬。導體層係可為單金屬層亦可為合金層,作為合金層可舉例如由上述之群中所選出之2 種以上金屬的合金(例如,鎳‧鉻合金、銅‧鎳合金及銅‧鈦合金)所形成的層。其中,就導體層形成的通用性、成本、圖型化之容易性等的觀點而言,以鉻、鎳、鈦、鋁、鋅、金、鈀、銀或銅的單金屬層,或鎳‧鉻合金、銅‧鎳合金、銅‧鈦合金的合金層為較佳,以鉻、鎳、鈦、鋁、鋅、金、鈀、銀或銅的單金屬層,或鎳‧鉻合金的合金層為又較佳,以銅的單金屬層為更佳。 The conductor material used for the conductor layer is not particularly limited. In a suitable embodiment, the conductor layer includes one selected from the group consisting of gold, platinum, palladium, silver, copper, aluminum, cobalt, chromium, zinc, nickel, titanium, tungsten, iron, tin, and indium. More than species of metals. The conductor layer may be a single metal layer or an alloy layer. Examples of the alloy layer include 2 selected from the above group A layer formed by an alloy of more than one metal (for example, nickel‧chromium alloy, copper‧nickel alloy and copper‧titanium alloy). Among them, in terms of the versatility, cost, and ease of patterning of the conductor layer, a single metal layer of chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver or copper, or nickel? The alloy layer of chromium alloy, copper‧nickel alloy, copper‧titanium alloy is preferable, and a single metal layer of chromium, nickel, titanium, aluminum, zinc, gold, palladium, silver or copper, or an alloy layer of nickel‧chromium alloy To be more preferable, a single metal layer of copper is more preferable.

導體層係可為單層構造、亦可為由不同種類的金屬或合金所構成的單金屬層或合金層層合2層以上的多層構造。導體層若為多層構造時,與絕緣層相接的層係以鉻、鋅或鈦的單金屬層,或鎳‧鉻合金的合金層為較佳。 The conductor layer may have a single-layer structure, a single metal layer made of different types of metals or alloys, or a multilayer structure in which two or more alloy layers are laminated. If the conductor layer has a multilayer structure, the layer connected to the insulating layer is preferably a single metal layer of chromium, zinc or titanium, or an alloy layer of nickel-chromium alloy.

導體層的厚度係依所期望的印刷線路板之設計而定,但通常為3μm~50μm,較佳為5μm~30μm。 The thickness of the conductor layer depends on the design of the desired printed circuit board, but it is usually 3 μm-50 μm, preferably 5 μm-30 μm.

導體層係可藉由鍍敷製程來形成。例如藉由半加成法、全加成法等的以往周知的技術鍍敷於絕緣層的表面上,從而可形成具有所期望的配線圖型的導體層。 The conductor layer can be formed by a plating process. For example, by plating on the surface of the insulating layer by a conventionally known technique such as a semi-additive method and a full-additive method, a conductor layer having a desired wiring pattern can be formed.

層合板係因應其製造方法或構造(例如於第1實施形態中的內層基板之使用的有無、於第1及第2實施形態中的電路的有無等)而能使用於各種的用途。例如亦可使用作為印刷線路板之製造中所使用的絕緣性芯基板、內層電路基板等的內層基板、亦可使用作為印刷線路板。 The laminate can be used for various applications depending on its manufacturing method and structure (for example, the presence or absence of the inner substrate in the first embodiment, the presence or absence of circuits in the first and second embodiments, etc.). For example, it is also possible to use as an inner layer substrate such as an insulating core substrate and an inner layer circuit board used in the manufacture of a printed wiring board, or as a printed wiring board.

[半導體裝置] [Semiconductor Device]

可使用由上述層合板所構成的印刷線路板、或使用上述層合板所製造的印刷線路板來製造半導體裝置。 The semiconductor device can be manufactured using a printed wiring board composed of the above-mentioned laminate or a printed wiring board manufactured using the above-mentioned laminate.

作為半導體裝置,可舉出被提供於電器產品(例如電腦、手機、數位相機及電視等)及交通工具(例如自動二輪車、汽車、電車、船舶及航空機等)等之各種半導體裝置。 Examples of semiconductor devices include various semiconductor devices provided in electrical products (for example, computers, mobile phones, digital cameras, and televisions, etc.) and vehicles (for example, motorcycles, automobiles, trams, ships, and aircrafts).

[實施例] [Example]

以下,藉由實施例更具體說明本發明,但本發明並非被限定於此等之實施例中。尚,於以下之記載中除非特別指明,其「份」及「%」分別係指「質量份」及「質量%」之意。 Hereinafter, the present invention will be described in more detail through examples, but the present invention is not limited to these examples. However, in the following description, unless otherwise specified, "parts" and "%" refer to "parts by mass" and "% by mass" respectively.

[樹脂清漆之調製] [Preparation of resin varnish] (標準樹脂清漆之調製) (Preparation of standard resin varnish)

將伸萘基醚型環氧樹脂(DIC(股)製「EXA-7311-G4S」、環氧當量186)10份、聯二甲酚型環氧樹脂(三菱化學(股)製「YX4000HK」、環氧當量約185)10份、聯苯型環氧樹脂(日本化藥(股)製「NC3000H」、環氧當量288)20份、及苯氧基樹脂(三菱化學(股)製「YX7553BH30」、固形物含量30質量%的環己酮:甲基乙基酮(MEK)的1:1溶液)25份,在溶劑石油腦15份及環己酮5份的混合溶媒中,一邊攪拌一邊使其加熱溶解。冷卻至室溫後,於此中混合含有三嗪骨架的酚酚醛系硬化 劑(羥基當量125、DIC(股)製「LA-7054」、固形物含量60%的MEK溶液)10份、萘酚系硬化劑(新日鐵住金化學(股)製「SN485」、羥基當量215、固形物含量60%的MEK溶液)19份、聚乙烯基丁醛樹脂(玻璃轉移溫度105℃、積水化學工業(股)製「KS-1」)的固形物含量15%的乙醇與甲苯的1:1的混合溶液10份、胺系硬化促進劑(4-二甲基胺基吡啶(DMAP)、固形物含量5質量%的MEK溶液)1份、咪唑系硬化促進劑(三菱化學(股)製「P200-H50」、固形物含量50質量%的丙二醇單甲基醚溶液)2份、以胺基矽烷系偶合劑(信越化學工業(股)製「KBM573」)作表面處理的球狀二氧化矽((股)Admatechs製「SOC2」、平均粒徑0.5μm、每單位表面積的碳量0.38mg/m2)50份,利用高速旋轉混合機均勻地分散後,用濾筒(ROKITECHNO製「SHP050」)進行過濾來調製標準樹脂清漆。 10 parts of naphthyl ether type epoxy resin (DIC Corporation "EXA-7311-G4S", epoxy equivalent 186), dixylenol type epoxy resin (Mitsubishi Chemical Corporation "YX4000HK", Epoxy equivalent approximately 185) 10 parts, biphenyl type epoxy resin (Nippon Kayaku Co., Ltd. "NC3000H", epoxy equivalent 288) 20 parts, and phenoxy resin (Mitsubishi Chemical Co., Ltd. "YX7553BH30" , Cyclohexanone with a solid content of 30% by mass: 25 parts of a 1:1 solution of methyl ethyl ketone (MEK), in a mixed solvent of 15 parts of naphtha and 5 parts of cyclohexanone, while stirring It is heated to dissolve. After cooling to room temperature, mix 10 parts of phenolic hardener containing triazine skeleton (hydroxy equivalent 125, "LA-7054" made by DIC (stock), 60% solid content MEK solution), naphthol Hardener (Nippon Steel & Sumikin Chemical Co., Ltd. "SN485", hydroxyl equivalent 215, solid content 60% MEK solution) 19 parts, polyvinyl butyral resin (glass transition temperature 105°C, Sekisui Chemical Industry ( (Stock) made "KS-1") 10 parts of a 1:1 mixed solution of 15% ethanol and toluene, amine hardening accelerator (4-dimethylaminopyridine (DMAP), solid content 5 mass% MEK solution) 1 part, imidazole-based hardening accelerator (Mitsubishi Chemical Co., Ltd. "P200-H50", 50 mass% propylene glycol monomethyl ether solution), 2 parts, aminosilane-based Coupling agent (Shin-Etsu Chemical Co., Ltd. "KBM573") surface-treated spherical silica ((Stock) Admatechs "SOC2", average particle size 0.5μm, carbon content per unit surface area 0.38mg/m 2 ) 50 parts, uniformly dispersed by a high-speed rotary mixer, filtered with a filter cartridge ("SHP050" manufactured by ROKITECHNO) to prepare a standard resin varnish.

(樹脂清漆1之調製) (Preparation of resin varnish 1)

將甲基乙基酮(MEK)與溶劑石油腦以50:50(質量比)混合而成的溶劑混合至標準樹脂清漆中,且將不揮發成分之含有量以成為25%之方式來作調整從而調製樹脂清漆1。 Mix the solvent of methyl ethyl ketone (MEK) and solvent naphtha at 50:50 (mass ratio) into the standard resin varnish, and adjust the content of non-volatile components to 25% Thus, the resin varnish 1 was prepared.

(樹脂清漆2之調製) (Preparation of resin varnish 2)

將乙醇與甲苯以50:50(質量比)混合而成的溶劑混 合至標準樹脂清漆中,且將不揮發成分之含有量以成為25%之方式來作調整從而調製樹脂清漆2。 A solvent mixture made by mixing ethanol and toluene at a ratio of 50:50 (mass ratio) Incorporate into a standard resin varnish, and adjust the non-volatile content to 25% to prepare resin varnish 2.

(樹脂清漆3之調製) (Preparation of resin varnish 3)

將MEK與環己酮以50:50(質量比)混合而成的溶劑混合至標準樹脂清漆中,且將不揮發成分之含有量以成為25%之方式來作調整從而調製樹脂清漆3。 A solvent prepared by mixing MEK and cyclohexanone at 50:50 (mass ratio) was mixed into a standard resin varnish, and the content of non-volatile components was adjusted to 25% to prepare resin varnish 3.

(樹脂清漆4之調製) (Preparation of resin varnish 4)

在標準樹脂清漆中混合環己酮,且將不揮發成分之含有量以成為25%之方式來作調整從而調製樹脂清漆4。 The standard resin varnish is mixed with cyclohexanone, and the content of the non-volatile components is adjusted to 25% to prepare the resin varnish 4.

(樹脂清漆5之調製) (Preparation of resin varnish 5)

將MEK與溶劑石油腦以50:50(質量比)混合而成的溶劑混合至標準樹脂清漆中,且將不揮發成分之含有量以成為35%之式來作調整從而調製樹脂清漆5。 A solvent prepared by mixing MEK and solvent naphtha at a 50:50 (mass ratio) was mixed into a standard resin varnish, and the content of non-volatile components was adjusted to 35% to prepare resin varnish 5.

(樹脂清漆6之調製) (Preparation of resin varnish 6)

將乙醇與甲苯以50:50(質量比)混合而成的溶劑混合至標準樹脂清漆中,且將不揮發成分之含有量以成為35%之式來作調整從而調製樹脂清漆6。 A solvent prepared by mixing ethanol and toluene at 50:50 (mass ratio) was mixed into a standard resin varnish, and the content of non-volatile components was adjusted to 35% to prepare a resin varnish 6.

(樹脂清漆7之調製) (Preparation of resin varnish 7)

將MEK與環己酮以50:50(質量比)混合而成的溶劑 混合至標準樹脂清漆中,且將不揮發成分之含有量以成為35%之式來作調整從而調製樹脂清漆7。 A solvent made by mixing MEK and cyclohexanone at 50:50 (mass ratio) It is mixed into a standard resin varnish, and the content of the non-volatile components is adjusted to 35% to prepare a resin varnish 7.

(樹脂清漆8之調製) (Preparation of resin varnish 8)

在標準樹脂清漆中混合環己酮,且將不揮發成分之含有量以成為35%之式來作調整從而調製樹脂清漆8。 The standard resin varnish was mixed with cyclohexanone, and the content of the non-volatile components was adjusted to 35% to prepare resin varnish 8.

(樹脂清漆9之調製) (Preparation of resin varnish 9)

將MEK與溶劑石油腦以50:50(質量比)混合而成的溶劑混合至標準樹脂清漆中,且將不揮發成分之含有量以成為15%之方式來作調整從而調製樹脂清漆9。 A solvent prepared by mixing MEK and solvent naphtha at a 50:50 (mass ratio) was mixed into a standard resin varnish, and the content of non-volatile components was adjusted to 15% to prepare a resin varnish 9.

(樹脂清漆10之調製) (Preparation of resin varnish 10)

在標準樹脂清漆中混合二甲基乙醯胺(DMAc),且將不揮發成分之含有量以成為25%之方式來作調整從而調製樹脂清漆10。 The standard resin varnish is mixed with dimethylacetamide (DMAc), and the content of non-volatile components is adjusted so as to be 25% to prepare the resin varnish 10.

(樹脂清漆11之調製) (Preparation of resin varnish 11)

在標準樹脂清漆中混合DMAc,且將不揮發成分之含有量以成為35%之式來作調整從而調製樹脂清漆11。 The standard resin varnish was mixed with DMAc, and the content of the non-volatile components was adjusted to 35% to prepare the resin varnish 11.

(樹脂清漆的黏度之測定) (Determination of viscosity of resin varnish)

利用旋轉振動式黏度計((股)Tech-jam製viscometer VM-10A),在25℃的溫度條件下來測定樹脂 清漆1~11的黏度。將從測定開始至2分鐘後的值作為各樹脂清漆的黏度,並將結果表示於表1。 Using a rotary vibration viscometer (viscometer VM-10A manufactured by Tech-jam), the resin is measured at a temperature of 25°C Viscosity of varnish 1~11. The value from the start of the measurement to 2 minutes later was used as the viscosity of each resin varnish, and the results are shown in Table 1.

[實施例1~25及比較例1~8] [Examples 1 to 25 and Comparative Examples 1 to 8]

將樹脂清漆1~11分別塗佈至支撐體1~3,並依後述之方法來測定接觸角後,依下述方法使塗佈於支撐體上的樹脂清漆乾燥而形成樹脂層,並對於縮孔、高邊、塗佈寬度來進行評估試驗。 After coating the resin varnish 1 to 11 on the support 1 to 3, and measuring the contact angle according to the method described later, the resin varnish applied on the support is dried according to the following method to form a resin layer. Hole, high side, and coating width are used for evaluation test.

所使用的支撐體1~3係如以下般。 The supporting bodies 1 to 3 used are as follows.

支撐體1:對PET薄膜(Toray(股)製「Lumirror T60」)設置由醇酸系脫模劑所構成的脫模層而調製成的支撐體(表面粗度係22nm、藉由滴液法所測定的水接觸角係90°) Support 1: A PET film ("Lumirror T60" manufactured by Toray Co., Ltd.) is prepared by setting a mold release layer composed of an alkyd-based mold release agent (surface roughness 22nm, by dripping method). (The measured water contact angle is 90°)

支撐體2:對PET薄膜(Toray(股)製「Lumirror T60」)設置由烯烴系脫模劑所構成的脫模層而調製成的支撐體(表面粗度係22nm、藉由滴液法所測定的水接觸角係110°) Support 2: A PET film (“Lumirror T60” manufactured by Toray Co., Ltd.) is prepared by setting a mold release layer composed of an olefin-based mold release agent (surface roughness is 22nm, and is prepared by the dropping method). The measured water contact angle is 110°)

支撐體3:直接使用PET薄膜(Toray(股)製「Lumirror T60」)(表面粗度係22nm、藉由滴液法所測定的水接觸角係75°) Support 3: PET film (“Lumirror T60” manufactured by Toray Co., Ltd.) is directly used (surface roughness is 22nm, water contact angle measured by drip method is 75°)

(實施例1) (Example 1)

藉由凹版塗佈器,以乾燥後的樹脂層的厚度成為2μm之方式,將樹脂清漆1均勻地塗佈於支撐體1上,並 藉由從100℃至120℃下進行乾燥3分鐘而於支撐體1上形成樹脂層,從而製作樹脂薄片。 With a gravure coater, the resin varnish 1 is uniformly coated on the support 1 so that the thickness of the dried resin layer becomes 2 μm, and The resin layer is formed on the support 1 by drying from 100° C. to 120° C. for 3 minutes to produce a resin sheet.

(實施例2) (Example 2)

除了使用樹脂清漆2來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 2 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(實施例3) (Example 3)

除了使用樹脂清漆3來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 3 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1 to produce a resin sheet.

(實施例4) (Example 4)

除了使用樹脂清漆4來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 4 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(實施例5) (Example 5)

除了使用樹脂清漆5來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 5 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1 to produce a resin sheet.

(實施例6) (Example 6)

除了使用樹脂清漆6來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 6 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(實施例7) (Example 7)

除了使用樹脂清漆7來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 7 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(實施例8) (Example 8)

除了使用樹脂清漆8來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 8 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(實施例9) (Example 9)

除了使用支撐體2來替代支撐體1以外,與實施例1以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the support 2 was used instead of the support 1, a resin layer was formed on the support 2 in the same manner as in Example 1, thereby fabricating a resin sheet.

(實施例10) (Example 10)

除了使用樹脂清漆2來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 2 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(實施例11) (Example 11)

除了使用樹脂清漆3來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 3 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(實施例12) (Example 12)

除了使用樹脂清漆5來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 5 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(實施例13) (Example 13)

除了使用樹脂清漆6來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 6 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(實施例14) (Example 14)

除了使用樹脂清漆7來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 7 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(實施例15) (Example 15)

除了使用樹脂清漆9來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 9 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(實施例16) (Example 16)

除了使用支撐體3來替代支撐體1以外,與實施例1以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the support 3 was used instead of the support 1, a resin layer was formed on the support 3 in the same manner as in Example 1, thereby producing a resin sheet.

(實施例17) (Example 17)

除了使用樹脂清漆2來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 2 was used instead of the resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(實施例18) (Example 18)

除了使用樹脂清漆3來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 3 was used instead of the resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(實施例19) (Example 19)

除了使用樹脂清漆4來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 4 was used instead of the resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(實施例20) (Example 20)

除了使用樹脂清漆5來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作 樹脂薄片。 Except that resin varnish 5 was used instead of resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby making Resin flakes.

(實施例21) (Example 21)

除了使用樹脂清漆6來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 6 was used instead of the resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(實施例22) (Example 22)

除了使用樹脂清漆7來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 7 was used instead of the resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(實施例23) (Example 23)

除了使用樹脂清漆8來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 8 was used instead of the resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(實施例24) (Example 24)

除了使用樹脂清漆10來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 10 is used instead of the resin varnish 1, a resin layer is formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(實施例25) (Example 25)

除了使用樹脂清漆11來替代樹脂清漆1以外,與實 施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 In addition to the use of resin varnish 11 instead of resin varnish 1, and the actual In Example 16, a resin layer was formed on the support 3 in the same manner to produce a resin sheet.

(比較例1) (Comparative example 1)

除了使用樹脂清漆9來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 9 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(比較例2) (Comparative example 2)

除了使用樹脂清漆10來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 10 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(比較例3) (Comparative example 3)

除了使用樹脂清漆11來替代樹脂清漆1以外,與實施例1以相同之方式於支撐體1上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 11 was used instead of the resin varnish 1, a resin layer was formed on the support 1 in the same manner as in Example 1, thereby producing a resin sheet.

(比較例4) (Comparative Example 4)

除了使用樹脂清漆4來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 4 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(比較例5) (Comparative Example 5)

除了使用樹脂清漆8來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 8 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(比較例6) (Comparative Example 6)

除了使用樹脂清漆10來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 10 was used instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(比較例7) (Comparative Example 7)

除了使用樹脂清漆11來替代樹脂清漆1以外,與實施例9以相同之方式於支撐體2上形成樹脂層,從而製作樹脂薄片。 Except for using the resin varnish 11 instead of the resin varnish 1, a resin layer was formed on the support 2 in the same manner as in Example 9 to produce a resin sheet.

(比較例8) (Comparative Example 8)

除了使用樹脂清漆9來替代樹脂清漆1以外,與實施例16以相同之方式於支撐體3上形成樹脂層,從而製作樹脂薄片。 Except that the resin varnish 9 was used instead of the resin varnish 1, a resin layer was formed on the support 3 in the same manner as in Example 16, thereby producing a resin sheet.

(藉由滴液法的接觸角之測定方法) (Measurement method of contact angle by drip method)

使用自動接觸角計(協和界面科學(股)製DropMaster DMs-401),來測定將各樹脂清漆以滴液法對於支撐體滴液時之接觸角。詳細而言,將樹脂清漆填充至注射器中來製作0.8μL的滴液,藉由滴液法使其附著於 支撐體上,將從附著起至2000ms後的值,設為將各樹脂清漆以滴液法對於支撐體滴液時之接觸角,並將結果表示於表1。 An automatic contact angle meter (DropMaster DMs-401 manufactured by Kyowa Interface Science Co., Ltd.) was used to measure the contact angle when each resin varnish was dripped onto the support by the drip method. Specifically, the resin varnish is filled into a syringe to make 0.8 μL drops, and the drops are adhered to On the support, the value from the time of adhesion to 2000 ms was taken as the contact angle when each resin varnish was dropped on the support by the dropping method, and the results are shown in Table 1.

(縮孔之評估) (Assessment of shrinkage)

計數實施例1~25及比較例1~8中所形成的樹脂層10m2中的縮孔缺點之個數。在樹脂層10m2中可發現直徑0.1mm以上的縮孔為10個以上者設以「×」、縮孔的個數為2~9個者設以「△」、縮孔的個數為0~1個者設以「○」,並將結果表示於表1。 Count the number of shrinkage defects in the resin layer 10m 2 formed in Examples 1-25 and Comparative Examples 1-8. In the resin layer 10m 2 , it can be found that there are more than 10 shrinkage holes with a diameter of 0.1mm or more. Set it as "×", if the number of shrinkage holes is 2-9, set it as "△", and the number of shrinkage holes is 0. ~1 is set as "○", and the results are shown in Table 1.

(高邊之評估) (High-side evaluation)

將實施例1~25及比較例1~8中所形成的樹脂層,使用測微計來測定中央份、與厚度最大的部分(最大厚度部分)的厚度。中央部與最大厚度部分之厚度的差為10μm以上者設以「×」、2μm~10μm者設以「△」、0~2μm者設以「○」,並將結果表示於表1。 The resin layers formed in Examples 1 to 25 and Comparative Examples 1 to 8 were used to measure the thickness of the central part and the thickest part (the thickest part) using a micrometer. If the thickness difference between the central part and the largest thickness part is 10μm or more, set "×", if 2μm~10μm is set as "△", if 0~2μm is set as "○", and the results are shown in Table 1.

(關於塗佈寬度控制之評估) (Evaluation of coating width control)

將實施例1~25及比較例1~8中所形成的樹脂層的塗佈寬度利用不銹鋼製尺來測定。相對於目標塗佈寬度1000mm,將實際塗佈寬度的差為5mm以上者設以「×」、2mm~5mm者設以「△」、0~2mm者設以「○」,並將結果表示於表1。 The coating width of the resin layer formed in Examples 1-25 and Comparative Examples 1-8 was measured with a stainless steel ruler. Relative to the target coating width of 1000mm, set the actual coating width with a difference of 5mm or more with "×", 2mm~5mm with "△", and 0~2mm with "○", and display the result in Table 1.

表1中係表示:樹脂清漆之黏度、將樹脂清漆以滴液法對於支撐體滴液時之接觸角、縮孔之評估結果、高邊之評估結果、關於塗佈寬度控制之評估結果,同時表示各樹脂清漆之調製中使用的溶劑種類與量、不揮發成分的含有量等。 Table 1 shows: the viscosity of the resin varnish, the contact angle when the resin varnish is dropped on the support by the drip method, the evaluation result of shrinkage, the evaluation result of the high side, the evaluation result of the coating width control, and It shows the type and amount of solvent used in the preparation of each resin varnish, and the content of non-volatile components.

Figure 105127087-A0202-12-0054-1
Figure 105127087-A0202-12-0054-1

Claims (8)

一種樹脂薄片之製造方法,其係包含下述步驟:(A)將包含樹脂組成物及溶劑的樹脂清漆塗佈於支撐體上之步驟、與(B)將樹脂清漆進行乾燥來形成樹脂層之步驟;其中於步驟(A)中,樹脂清漆以滴液法對於支撐體滴液時之接觸角為0.1°~20°,且於步驟(B)中,樹脂層的厚度為5μm以下,支撐體係由塑膠材料所構成的薄膜或脫模紙。 A method for manufacturing a resin sheet, which includes the following steps: (A) a step of coating a resin varnish containing a resin composition and a solvent on a support, and (B) drying the resin varnish to form a resin layer Step; wherein in step (A), the contact angle of the resin varnish on the support body is 0.1°-20° by the drip method, and in step (B), the thickness of the resin layer is 5μm or less, the support system Film or release paper made of plastic materials. 一種樹脂薄片之製造方法,其係包含下述步驟:(A)將包含樹脂組成物及溶劑的樹脂清漆塗佈於支撐體上之步驟、與(B)將樹脂清漆進行乾燥來形成樹脂層之步驟;其中於步驟(A)中,樹脂清漆以滴液法對於支撐體滴液時之接觸角為0.1°~20°,且於步驟(B)中,樹脂層的厚度為5μm以下,支撐體係具備脫模層。 A method for manufacturing a resin sheet, which includes the following steps: (A) a step of coating a resin varnish containing a resin composition and a solvent on a support, and (B) drying the resin varnish to form a resin layer Step; wherein in step (A), the contact angle of the resin varnish on the support body is 0.1°-20° by the drip method, and in step (B), the thickness of the resin layer is 5μm or less, the support system With release layer. 如請求項1或2之樹脂薄片之製造方法,其中,樹脂清漆中的不揮發成分的含有量為40質量%以下。 The method for producing a resin sheet according to claim 1 or 2, wherein the content of non-volatile components in the resin varnish is 40% by mass or less. 如請求項1之樹脂薄片之製造方法,其中,支撐體係具備有脫模層。 The method for manufacturing a resin sheet according to claim 1, wherein the support system is provided with a release layer. 如請求項1或2之樹脂薄片之製造方法,其中,溶劑係包含極性溶劑。 The method for producing a resin sheet according to claim 1 or 2, wherein the solvent includes a polar solvent. 如請求項1或2之樹脂薄片之製造方法,其中,溶劑係包含比介電率12以上的極性溶劑與比介電率9以下的非極性溶劑。 The method for producing a resin sheet according to claim 1 or 2, wherein the solvent includes a polar solvent with a specific dielectric rate of 12 or higher and a non-polar solvent with a dielectric rate of 9 or lower. 如請求項1或2之樹脂薄片之製造方法,其中, 於步驟(A)中係藉由凹板塗佈法來塗佈樹脂清漆。 Such as the method of manufacturing the resin sheet of claim 1 or 2, wherein: In step (A), the resin varnish is applied by a gravure coating method. 如請求項1或2之樹脂薄片之製造方法,其中,樹脂薄片係印刷線路板之絕緣層用。 The method for manufacturing a resin sheet according to claim 1 or 2, wherein the resin sheet is used for the insulating layer of a printed wiring board.
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