TWI706126B - Gas sensing device and gas sensing system - Google Patents

Gas sensing device and gas sensing system Download PDF

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TWI706126B
TWI706126B TW108133461A TW108133461A TWI706126B TW I706126 B TWI706126 B TW I706126B TW 108133461 A TW108133461 A TW 108133461A TW 108133461 A TW108133461 A TW 108133461A TW I706126 B TWI706126 B TW I706126B
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gas sensing
opening
electrode
gas
sensing device
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TW108133461A
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Chinese (zh)
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TW202026620A (en
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劉丞偉
陳俊吉
吳信賢
黃馨儀
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財團法人工業技術研究院
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Priority to CN201911370542.7A priority Critical patent/CN111380937A/en
Priority to US16/727,675 priority patent/US20200209186A1/en
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Publication of TWI706126B publication Critical patent/TWI706126B/en

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Abstract

A gas sensing device comprises a housing, a cover body, and a gas sensing module. The housing has an accommodation space. The cover body is disposed on the housing. The cover body has a top surface, a bottom surface, and a gas passage. The bottom surface faces the accommodating space. The gas passage is connected to the accommodating space. The gas passage has a first opening and a second opening. The first opening is located on the top surface. The second opening is located on the bottom surface. The area of the first opening is larger than the area of the second opening. A gas sensing system comprises two aforementioned gas sensing devices, and one of the gas sensing devices is provided with a filter module.

Description

氣體感測裝置及氣體感測系統Gas sensing device and gas sensing system

本發明係關於一種氣體感測裝置及氣體感測系統,特別是一種具有增強氣流的擴散能力之氣體感測裝置及氣體感測系統。The present invention relates to a gas sensing device and a gas sensing system, in particular to a gas sensing device and a gas sensing system with enhanced gas diffusion capability.

在人類居住的環境中以及可能發生爆炸、火災或毒性等其他危險的環境中,需要氣體感測裝置以偵測可能產生潛在危險的目標氣體的濃度。氣體感測裝置必須具有能對如一氧化碳、氮氧化物、二氧化硫、硫化氫、二氧化碳、氫氣、磷化氫、臭氧等目標氣體之濃度及其變化產生可靠回應的靈敏度。In environments where humans live and in environments where explosions, fires, or toxicity may occur, gas sensing devices are needed to detect the concentration of potentially dangerous target gases. The gas sensing device must have the sensitivity to reliably respond to the concentration and changes of target gases such as carbon monoxide, nitrogen oxide, sulfur dioxide, hydrogen sulfide, carbon dioxide, hydrogen, phosphine, and ozone.

現行的氣體感測器之感測機構為環境氣流以自然擴散的方式進入氣體感測器中。然而,流經氣體感測器周圍區域的氣體易受氣流擴散性不佳或環境氣場等影響,使得進入氣體感測器內的待測氣體量不足,造成氣體感測器的靈敏度與精準度下降,導致氣體感測器無法應用於偵測環境中之低濃度目標氣體。The sensing mechanism of the current gas sensor is that the ambient airflow enters the gas sensor in a natural diffusion manner. However, the gas flowing through the area around the gas sensor is susceptible to poor air diffusivity or environmental gas field, which makes the amount of gas to be measured entering the gas sensor insufficient, resulting in the sensitivity and accuracy of the gas sensor As a result, the gas sensor cannot be used to detect low-concentration target gases in the environment.

本發明在於提供一種氣體感測裝置及氣體感測系統,藉由蓋體具有第二開口之直徑小於第一開口的直徑的結構,調整蓋體周圍的局部流場,從而增加經由第一開口與第二開口進入氣體感測裝置的氣體量。The present invention is to provide a gas sensing device and a gas sensing system. The cover has a structure in which the diameter of the second opening is smaller than the diameter of the first opening to adjust the local flow field around the cover to increase the flow through the first opening. The second opening enters the gas amount of the gas sensing device.

本發明所揭露的氣體感測裝置,包括殼體、蓋體以及氣體感測模組。殼體具有容置空間。蓋體設置於殼體。蓋體具有頂面、底面和氣體通道。底面面向容置空間。氣體通道與容置空間相連通。氣體通道具有第一開口與第二開口。第一開口位於頂面。第二開口位於底面。第一開口之面積大於第二開口之面積。氣體感測模組設置於容置空間中。The gas sensing device disclosed in the present invention includes a housing, a cover, and a gas sensing module. The shell has an accommodation space. The cover is arranged on the shell. The cover has a top surface, a bottom surface and a gas channel. The bottom surface faces the accommodating space. The gas channel communicates with the accommodating space. The gas channel has a first opening and a second opening. The first opening is located on the top surface. The second opening is located on the bottom surface. The area of the first opening is larger than the area of the second opening. The gas sensing module is arranged in the containing space.

本發明所揭露的氣體感測系統,包括載體、第一氣體感測裝置以及第二氣體感測裝置。第一氣體感測裝置設置於載體上。第一氣體感測裝置具有如前述之氣體感測裝置之結構。第二氣體感測裝置設置於載體上。第二氣體感測裝置具有如前述之氣體感測裝置之結構。第二氣體感測裝置更包含過濾模組。過濾模組包含固定結構與選擇性濾材。固定結構設置於蓋體且位於容置空間中。選擇性濾材設置於固定結構中,且選擇性濾材遮蔽第二開口。The gas sensing system disclosed in the present invention includes a carrier, a first gas sensing device, and a second gas sensing device. The first gas sensing device is arranged on the carrier. The first gas sensing device has the structure of the aforementioned gas sensing device. The second gas sensing device is arranged on the carrier. The second gas sensing device has the structure of the aforementioned gas sensing device. The second gas sensing device further includes a filter module. The filter module includes a fixed structure and a selective filter material. The fixing structure is arranged on the cover and located in the accommodating space. The selective filter material is arranged in the fixed structure, and the selective filter material shields the second opening.

本發明在於提供一種氣體感測裝置,藉由蓋體具有第二開口之直徑小於第一開口的直徑的結構,調整蓋體周圍的局部流場,從而增加經由第一開口與第二開口進入氣體感測裝置的氣體量。如此一來,隨著進入氣體感測裝置的氣體量提升,本發明之氣體感測裝置偵測氣體濃度的靈敏度和精準度也可得到提升。The present invention is to provide a gas sensing device. The cover has a structure in which the diameter of the second opening is smaller than that of the first opening to adjust the local flow field around the cover to increase the gas entering through the first and second openings. The gas volume of the sensing device. In this way, as the amount of gas entering the gas sensing device increases, the sensitivity and accuracy of the gas sensing device of the present invention for detecting gas concentration can also be improved.

以上之關於本揭露內容之說明及以下之實施方式之說明係用以示範與解釋本發明之精神與原理,並且提供本發明之專利申請範圍更進一步之解釋。The above description of the content of the disclosure and the description of the following embodiments are used to demonstrate and explain the spirit and principle of the present invention, and to provide a further explanation of the patent application scope of the present invention.

以下在實施方式中詳細敘述本發明之詳細特徵以及優點,其內容足以使任何熟習相關技藝者了解本發明之技術內容並據以實施,且根據本說明書所揭露之內容、申請專利範圍及圖式,任何熟習相關技藝者可輕易地理解本發明相關之目的及優點。以下之實施例係進一步詳細說明本發明之觀點,但非以任何觀點限制本發明之範疇。在下文及圖式中,相似的元件以相同的符號表示。The detailed features and advantages of the present invention are described in detail in the following embodiments, and the content is sufficient to enable anyone familiar with the relevant art to understand the technical content of the present invention and implement it accordingly, and according to the content disclosed in this specification, the scope of patent application and the drawings Anyone who is familiar with the relevant art can easily understand the related purpose and advantages of the present invention. The following examples further illustrate the viewpoints of the present invention in detail, but do not limit the scope of the present invention by any viewpoint. In the following and in the drawings, similar elements are represented by the same symbols.

請參照圖1A、圖1B及圖2,圖1A係為根據本發明第一實施例所繪示之氣體感測裝置剖面圖。圖1B係為根據本發明第一實施例所繪示之氣體感測裝置部分放大圖。圖2係為根據本發明第一實施例所繪示之氣體感測裝置立體圖。如圖1A所示,本發明第一實施例之氣體感測裝置10包括殼體15、蓋體11以及氣體感測模組12。殼體15具有容置空間150。蓋體11設置於殼體15上。Please refer to FIG. 1A, FIG. 1B and FIG. 2. FIG. 1A is a cross-sectional view of the gas sensing device according to the first embodiment of the present invention. FIG. 1B is a partially enlarged view of the gas sensing device according to the first embodiment of the present invention. Fig. 2 is a perspective view of the gas sensing device according to the first embodiment of the present invention. As shown in FIG. 1A, the gas sensing device 10 of the first embodiment of the present invention includes a housing 15, a cover 11 and a gas sensing module 12. The housing 15 has an accommodation space 150. The cover 11 is arranged on the housing 15.

在本發明之第一實施例中,殼體15為圓柱狀。在其他實施例中,殼體15可為方柱狀、多邊形柱狀等形狀。殼體15和蓋體11的結構尺寸僅為示例,例如在圖1A中,為左右寬度較寬的圓柱結構,本發明不限於此。In the first embodiment of the present invention, the housing 15 is cylindrical. In other embodiments, the housing 15 may have a square column shape, a polygonal column shape, or the like. The structural dimensions of the housing 15 and the cover 11 are only examples. For example, in FIG. 1A, they are cylindrical structures with wider left and right widths, and the present invention is not limited to this.

在本發明之第一實施例中,蓋體11包含頂面110、底面112和氣體通道111。底面112面向容置空間150,氣體通道111與容置空間150相連通。氣體通道111具有第一開口1101與第二開口1102,第一開口1101位於頂面110,第二開口1102位於底面112。詳細來說,氣體通道111更具有斜坡面113、壁面114和第三開口1103。斜坡面113之一邊連接頂面110,斜坡面113之相對另一邊連接壁面114之一邊。第三開口1103位於斜坡面113與壁面114之交界。壁面114遠離斜坡面113之一邊連接底面112。底面112之中心為連通容置空間150之第二開口1102。換句話說,底面112與水平面平行且以第二開口1102為中心擴展,但不以此為限。於本發明其他實施例中,第二開口1102可不位於底面112之中心,且底面112可不與水平面平行。第二開口1102之直徑D2可等於或小於第三開口1103之直徑D3(D2≦D3),圖1A實施例為直徑D2等於直徑D3。在一些實施例中,當直徑D2小於直徑D3時,壁面114呈現一斜坡面。In the first embodiment of the present invention, the cover 11 includes a top surface 110, a bottom surface 112 and a gas channel 111. The bottom surface 112 faces the accommodating space 150, and the gas channel 111 communicates with the accommodating space 150. The gas channel 111 has a first opening 1101 and a second opening 1102. The first opening 1101 is located on the top surface 110, and the second opening 1102 is located on the bottom surface 112. In detail, the gas channel 111 further has a slope surface 113, a wall surface 114 and a third opening 1103. One side of the slope surface 113 is connected to the top surface 110, and the opposite side of the slope surface 113 is connected to one side of the wall surface 114. The third opening 1103 is located at the junction of the slope surface 113 and the wall surface 114. One side of the wall surface 114 away from the slope surface 113 is connected to the bottom surface 112. The center of the bottom surface 112 is the second opening 1102 communicating with the accommodating space 150. In other words, the bottom surface 112 is parallel to the horizontal plane and expands around the second opening 1102, but not limited to this. In other embodiments of the present invention, the second opening 1102 may not be located at the center of the bottom surface 112, and the bottom surface 112 may not be parallel to the horizontal plane. The diameter D2 of the second opening 1102 may be equal to or smaller than the diameter D3 of the third opening 1103 (D2≦D3). In the embodiment of FIG. 1A, the diameter D2 is equal to the diameter D3. In some embodiments, when the diameter D2 is smaller than the diameter D3, the wall surface 114 presents a slope surface.

請參照圖2,如圖2所示,蓋體11具有頂面110、第一開口1101、第二開口1102。第一開口1101之面積大於第二開口1102之面積(水平面截面積)。第二開口1102之直徑D2小於第一開口1101的直徑D1(D2>D1)。再者,第二開口1102之中心於第一開口1101之正交投影與第一開口1101之中心重疊,因此蓋體11具有倒錐形或V字的斜坡結構。斜坡面113和水平面的角度θ為14度。在其他實施例中斜坡面113和水平面的角度可為14度至42度。也就是說,斜坡面113上任兩條法線L1、L2之交點O位於殼體15朝向蓋體11的方向Z上,且此交點O位於殼體15外(繪示於圖15)。回到圖1A,藉由蓋體11具有第二開口1102之直徑D2小於第一開口1101的直徑D1的結構,調整蓋體11周圍的局部流場,從而增加經由第一開口1101與第二開口1102進入氣體感測裝置10的容置空間150的氣體量。Please refer to FIG. 2. As shown in FIG. 2, the cover 11 has a top surface 110, a first opening 1101, and a second opening 1102. The area of the first opening 1101 is larger than the area (cross-sectional area of the horizontal plane) of the second opening 1102. The diameter D2 of the second opening 1102 is smaller than the diameter D1 of the first opening 1101 (D2>D1). Furthermore, the orthogonal projection of the center of the second opening 1102 on the first opening 1101 overlaps the center of the first opening 1101, so the cover 11 has an inverted cone or V-shaped slope structure. The angle θ between the slope surface 113 and the horizontal plane is 14 degrees. In other embodiments, the angle between the slope surface 113 and the horizontal plane may be 14 degrees to 42 degrees. That is, the intersection O of any two normal lines L1 and L2 on the slope surface 113 is located in the direction Z of the casing 15 toward the cover 11, and this intersection O is located outside the casing 15 (shown in FIG. 15). Returning to FIG. 1A, the cover 11 has a structure in which the diameter D2 of the second opening 1102 is smaller than the diameter D1 of the first opening 1101 to adjust the local flow field around the cover 11 to increase the passage through the first opening 1101 and the second opening. 1102 The amount of gas entering the accommodating space 150 of the gas sensing device 10.

在本發明之第一實施例中,頂面110、第一開口1101、第二開口1102、第三開口1103之形狀為圓形。在其他實施例中,頂面110、第一開口1101、第二開口1102、第三開口1103之形狀可為如橢圓形、梯形、方形、矩形等之四邊形、多邊形或其他幾何形狀。In the first embodiment of the present invention, the shape of the top surface 110, the first opening 1101, the second opening 1102, and the third opening 1103 are circular. In other embodiments, the shape of the top surface 110, the first opening 1101, the second opening 1102, and the third opening 1103 may be quadrilateral, polygonal, or other geometric shapes such as ellipse, trapezoid, square, rectangle, etc.

在本發明之第一實施例中,如圖1A和圖1B所示,氣體感測模組12包含工作電極1200、第一輔助電極1201、參考電極1202、第二輔助電極1203、第一間隔物122、第二間隔物123、第三電解液吸濕膜124、第四電解液吸濕膜125、電解液127和電解液槽121。工作電極1200、第一輔助電極1201、參考電極1202、第二輔助電極1203統稱為電化學感測電極120。工作電極1200設置在第二開口1102和第一輔助電極1201之間。第一間隔物122位於工作電極1200與第一輔助電極1201之間,且第一間隔物122電性連接工作電極1200與第一輔助電極1201(此處電性連接藉由第一電解液吸濕膜122-1所吸取的電解液127達成,電解液127中所含的電解質(electrolyte)在水溶液狀態可以產生自由離子而導電),第一間隔物122包含第一電解液吸濕膜122-1和第一防水膜122-2。第二間隔物123位於第一輔助電極1201與參考電極1202之間,且第二間隔物123電性連接第一輔助電極1201與參考電極1202,第二間隔物123包含第二電解液吸濕膜123-1和第二防水膜123-2。第三電解液吸濕膜124位於第二輔助電極1203與參考電極1202之間。第三電解液吸濕膜124用以使第二輔助電極1203與參考電極1202電性連接。第四電解液吸濕膜125設置在第二輔助電極1203和電解液槽121之間。電解液127容置於電解液槽121內。電解液槽121內填充有吸濕膜(未繪出)。電解液槽121頂面暴露吸濕膜用以與第二輔助電極1203連接,整體而言,電化學感測電極120位於電解液槽121之上,彼此物理性與電化學連接。在其他實施例中可不包含第一輔助電極1201和第二間隔物123。藉由上述之工作電極1200、第一輔助電極1201分別提供電訊獨立之電流值和電壓值,經由微處理器進行運算,即可獲得待測氣體中目標氣體之濃度。In the first embodiment of the present invention, as shown in FIGS. 1A and 1B, the gas sensing module 12 includes a working electrode 1200, a first auxiliary electrode 1201, a reference electrode 1202, a second auxiliary electrode 1203, and a first spacer 122, the second spacer 123, the third electrolyte moisture absorption membrane 124, the fourth electrolyte moisture absorption membrane 125, the electrolyte 127, and the electrolyte tank 121. The working electrode 1200, the first auxiliary electrode 1201, the reference electrode 1202, and the second auxiliary electrode 1203 are collectively referred to as the electrochemical sensing electrode 120. The working electrode 1200 is disposed between the second opening 1102 and the first auxiliary electrode 1201. The first spacer 122 is located between the working electrode 1200 and the first auxiliary electrode 1201, and the first spacer 122 is electrically connected to the working electrode 1200 and the first auxiliary electrode 1201 (here, electrically connected by the first electrolyte to absorb moisture The electrolyte 127 absorbed by the membrane 122-1 is reached. The electrolyte (electrolyte) contained in the electrolyte 127 can generate free ions and conduct electricity in an aqueous solution. The first spacer 122 includes the first electrolyte moisture absorption membrane 122-1 And the first waterproof membrane 122-2. The second spacer 123 is located between the first auxiliary electrode 1201 and the reference electrode 1202, and the second spacer 123 is electrically connected to the first auxiliary electrode 1201 and the reference electrode 1202, and the second spacer 123 includes a second electrolyte moisture absorption film 123-1 and the second waterproof membrane 123-2. The third electrolyte moisture absorption film 124 is located between the second auxiliary electrode 1203 and the reference electrode 1202. The third electrolyte moisture absorption film 124 is used to electrically connect the second auxiliary electrode 1203 and the reference electrode 1202. The fourth electrolyte moisture absorption membrane 125 is provided between the second auxiliary electrode 1203 and the electrolyte tank 121. The electrolyte 127 is contained in the electrolyte tank 121. The electrolyte tank 121 is filled with a moisture-absorbing film (not shown). The top surface of the electrolyte tank 121 exposes a moisture-absorbing film for connection with the second auxiliary electrode 1203. In general, the electrochemical sensing electrode 120 is located on the electrolyte tank 121 and is physically and electrochemically connected to each other. In other embodiments, the first auxiliary electrode 1201 and the second spacer 123 may not be included. Through the above-mentioned working electrode 1200 and the first auxiliary electrode 1201, respectively, the current value and the voltage value independently provided by telecommunications are provided, and the concentration of the target gas in the gas to be measured can be obtained through calculation by the microprocessor.

在本發明之第一實施例中,圖1A所示,工作電極1200包含金屬材料以及多孔材料。金屬材料可為三元複合金屬或單原子金屬。三元複合金屬或單原子金屬承載在多孔材料上,多孔材料作為載體。在其他實施例中,多孔材料承載在疏水高分子片材上。在一實施例中,多孔材料具有零維(粒子或原子)或二維奈米結構,多孔材料可為碳所組成之多孔材料,如微米尺寸之碳載體、石墨烯(graphene)、摻雜石墨烯(doped graphene,摻雜氮或磷或硼等元素)、多壁奈米碳管(multi-walled carbon nanotube)、單壁奈米碳管(single-walled carbon nanotube)等。在一實施例中,三元複合金屬之結構為奈米線結構,並且三元複合金屬奈米線為核殼結構,一種金屬為核心,另外兩種金屬依序包覆該核心,三元複合金屬奈米線散佈於多孔材料上,三元複合金屬係選自由鉑、鈀、鈷、銀、錫、銅、鎳、金、釕所構成的任意三種金屬所組合而成之群組,例如金屬鉑鈷銀(PtCoAg)、鉑錫銀(PtSnAg)、鉑鈀鎳(PtPdNi)等。在一實施例中,一種或多種單原子金屬散佈於多孔材料上,單原子金屬包含鉑、鈀、鈷、銀、錫、銅、鎳、金、釕的任意一種金屬。在一實施例中,工作電極1200之結構包含多孔材料以及承載在多孔材料上由單種金屬材料構成的金屬顆粒。金屬顆粒的粒徑約為1Å或為單原子金屬顆粒。金屬顆粒包含多個單金屬顆粒零星散佈在多孔材料上,多個單金屬顆粒可由同一種金屬元素所構成。金屬元素可選自鉑、鈀、鈷、銀、錫、銅、鎳、金、釕中的任意一種金屬。在另一實施例中,金屬顆粒包含多個且複數種單金屬顆粒,由不同種類的單原子金屬顆粒所構成,亦即至少兩種單金屬顆粒散佈於多孔材料上。金屬元素選自由鉑、鈀、鈷、銀、錫、銅、鎳、金、釕所組合成之群組至少其中之二者,例如:金原子與銀原子散佈或金原子與鈷原子散佈、鉑原子與鎳原子、銅原子與鈷原子、金原子與銅原子等。In the first embodiment of the present invention, as shown in FIG. 1A, the working electrode 1200 includes a metal material and a porous material. The metal material can be a ternary composite metal or a monoatomic metal. The ternary composite metal or monoatomic metal is carried on the porous material, and the porous material is used as the carrier. In other embodiments, the porous material is carried on the hydrophobic polymer sheet. In one embodiment, the porous material has a zero-dimensional (particle or atom) or two-dimensional nanostructure. The porous material can be a porous material composed of carbon, such as a micron-sized carbon support, graphene, and doped graphite. Alkene (doped graphene, doped with elements such as nitrogen or phosphorus or boron), multi-walled carbon nanotube (multi-walled carbon nanotube), single-walled carbon nanotube (single-walled carbon nanotube), etc. In one embodiment, the structure of the ternary composite metal is a nanowire structure, and the ternary composite metal nanowire is a core-shell structure, one metal is the core, and the other two metals sequentially cover the core, the ternary composite Metal nanowires are scattered on porous materials. The ternary composite metal is selected from the group consisting of any three metals consisting of platinum, palladium, cobalt, silver, tin, copper, nickel, gold, and ruthenium, such as metals Platinum cobalt silver (PtCoAg), platinum tin silver (PtSnAg), platinum palladium nickel (PtPdNi), etc. In one embodiment, one or more monoatomic metals are dispersed on the porous material, and the monoatomic metals include any one of platinum, palladium, cobalt, silver, tin, copper, nickel, gold, and ruthenium. In one embodiment, the structure of the working electrode 1200 includes a porous material and metal particles composed of a single metal material carried on the porous material. The particle size of the metal particles is about 1Å or monoatomic metal particles. The metal particles include a plurality of single metal particles scattered on the porous material, and the plurality of single metal particles may be composed of the same metal element. The metal element can be selected from any metal selected from platinum, palladium, cobalt, silver, tin, copper, nickel, gold, and ruthenium. In another embodiment, the metal particles include multiple and plural kinds of monometallic particles, which are composed of different kinds of monoatomic metal particles, that is, at least two monometallic particles are dispersed on the porous material. The metal element is selected from at least two of the group consisting of platinum, palladium, cobalt, silver, tin, copper, nickel, gold, and ruthenium, for example: gold atoms and silver atoms interspersed or gold atoms and cobalt atoms interspersed, platinum Atoms and nickel atoms, copper atoms and cobalt atoms, gold atoms and copper atoms, etc.

由於奈米線或單原子結構的尺寸為奈米等級,因而具有較大的表面積,因此進行氧化還原之作用的反應速率越快。因此藉由包含奈米線之三元複合金屬或單原子結構金屬所形成之工作電極1200,可提高氣體感測裝置10之感測靈敏度與精準度,具有實現低濃度偵測極限(ppb等級)之功能。Since the size of nanowires or monoatomic structures is at the nanometer level, they have a larger surface area, so the faster the reaction rate for redox. Therefore, the working electrode 1200 formed of a ternary composite metal or a monoatomic structure metal containing nanowires can improve the sensing sensitivity and accuracy of the gas sensing device 10, and has a low concentration detection limit (ppb level). The function.

在本發明之第一實施例中,第一輔助電極1201之材料與工作電極1200相同。第二輔助電極1203包含多孔碳材或鉑(Pt)等可導電材料。參考電極1202包含氯化銀(AgCl)、氯化汞(HgCl2 )、碳鉑(Pt/C)等可導電材料。在其他實施例中,第一輔助電極1201、參考電極1202和第二輔助電極1203可分別承載在不同之疏水高分子片材上。In the first embodiment of the present invention, the material of the first auxiliary electrode 1201 is the same as that of the working electrode 1200. The second auxiliary electrode 1203 includes a conductive material such as porous carbon material or platinum (Pt). The reference electrode 1202 includes conductive materials such as silver chloride (AgCl), mercury chloride (HgCl 2 ), and carbon platinum (Pt/C). In other embodiments, the first auxiliary electrode 1201, the reference electrode 1202, and the second auxiliary electrode 1203 may be carried on different hydrophobic polymer sheets, respectively.

在本發明之第一實施例中,如圖1B所示,第一間隔物122包含第一電解液吸濕膜122-1和第一防水膜122-2。第一電解液吸濕膜122-1設置在工作電極1200和第一防水膜122-2之間。第二間隔物123包含第二電解液吸濕膜123-1和第二防水膜123-2。第二電解液吸濕膜123-1設置在第一輔助電極1201和第二防水膜123-2之間。在其他實施例中,第二防水膜123-2可設置於兩個第二電解液吸濕膜123-1之間。第一防水膜122-2和第二防水膜123-2為穩定不透水的聚合物。第一電解液吸濕膜122-1至第四電解液吸濕膜125用於確保工作電極1200、第一輔助電極1201、參考電極1202和第二輔助電極1203與電解液接觸。第一電解液吸濕膜122-1、第二電解液吸濕膜123-1、第三電解液吸濕膜124至第四電解液吸濕膜125由電解液127可透過的親水非導電材料製成。各電解液吸濕膜之結構為多孔結構或是織物結構,起到通過毛細現象輸送電解液127的作用(請參見圖9,詳細內容會在下面相關段落中進行進一步說明)。各電解液吸濕膜從電解液槽121吸取電解液127,藉以保持各電解液吸濕膜含電解液的濕潤狀態。In the first embodiment of the present invention, as shown in FIG. 1B, the first spacer 122 includes a first electrolyte moisture absorption membrane 122-1 and a first waterproof membrane 122-2. The first electrolyte moisture absorption membrane 122-1 is disposed between the working electrode 1200 and the first waterproof membrane 122-2. The second spacer 123 includes a second electrolyte moisture absorption film 123-1 and a second waterproof film 123-2. The second electrolyte moisture absorption membrane 123-1 is disposed between the first auxiliary electrode 1201 and the second waterproof membrane 123-2. In other embodiments, the second waterproof membrane 123-2 may be disposed between the two second electrolyte moisture absorption membranes 123-1. The first waterproof membrane 122-2 and the second waterproof membrane 123-2 are stable and impermeable polymers. The first electrolyte moisture absorption membrane 122-1 to the fourth electrolyte moisture absorption membrane 125 are used to ensure that the working electrode 1200, the first auxiliary electrode 1201, the reference electrode 1202, and the second auxiliary electrode 1203 are in contact with the electrolyte. The first electrolyte moisture-absorbing membrane 122-1, the second electrolyte moisture-absorbing membrane 123-1, the third electrolyte moisture-absorbing membrane 124 to the fourth electrolyte moisture-absorbing membrane 125 are hydrophilic non-conductive materials permeable by electrolyte 127 production. The structure of each electrolyte moisture-absorbing membrane is a porous structure or a fabric structure, which functions to transport the electrolyte 127 through capillary phenomena (please refer to FIG. 9, and the details will be further described in the relevant paragraphs below). Each electrolytic solution moisture-absorbing membrane absorbs the electrolytic solution 127 from the electrolytic solution tank 121, thereby maintaining the wet state of each electrolytic solution moisture-absorbing membrane containing the electrolyte.

在本發明之第一實施例中,如圖1A和圖1B所示,電解液槽121之底部中央設置具有一開孔1210,一栓塞126匹配插入開孔1210中以在電解液槽121灌入電解液127後將電解液槽121密封。電解液槽121內之電解液127依循方向T,藉由貫穿上下之通道16,依序通過第四電解液吸濕膜125、第二輔助電極1203、第三電解液吸濕膜124、參考電極1202、第二間隔物123、第一輔助電極1201、第一間隔物122、工作電極1200。通道16內具有做為燈芯之吸濕膜,起到通過毛細現象輸送電解液127的作用。電解液槽121位於殼體15之底部。電解液槽121提供之電解液127可以包含硫酸、過氯酸、離子液體等液態電解質。In the first embodiment of the present invention, as shown in FIGS. 1A and 1B, the bottom center of the electrolyte tank 121 is provided with an opening 1210, and a plug 126 is matched and inserted into the opening 1210 to fill the electrolyte tank 121 After the electrolyte 127, the electrolyte tank 121 is sealed. The electrolyte 127 in the electrolyte tank 121 follows the direction T and passes through the upper and lower channels 16 through the fourth electrolyte moisture absorption membrane 125, the second auxiliary electrode 1203, the third electrolyte moisture absorption membrane 124, and the reference electrode in sequence 1202, a second spacer 123, a first auxiliary electrode 1201, a first spacer 122, and a working electrode 1200. The passage 16 has a moisture-absorbing film as a wick, which functions to transport the electrolyte 127 through capillary phenomenon. The electrolyte tank 121 is located at the bottom of the casing 15. The electrolyte 127 provided by the electrolyte tank 121 may include liquid electrolytes such as sulfuric acid, perchloric acid, and ionic liquid.

在本發明之第一實施例中,圖1A所示過濾模組13包含固定結構130與選擇性濾材135。固定結構130設置於蓋體11且位於容置空間150中。選擇性濾材135設置於固定結構130中,且選擇性濾材135遮蔽第二開口1102。選擇性濾材135包含兩個片材以及金屬氧化物,此片材具有大量可供氣體穿過的孔洞。片材為疏水多孔高分子膜,例如PTFE、PVDF等。金屬氧化物設置於兩個片材之間(例如夾在兩片材之間)以遮蔽第二開口1102,如圖2所示。In the first embodiment of the present invention, the filter module 13 shown in FIG. 1A includes a fixed structure 130 and a selective filter material 135. The fixing structure 130 is disposed on the cover 11 and located in the accommodating space 150. The selective filter material 135 is disposed in the fixing structure 130, and the selective filter material 135 covers the second opening 1102. The selective filter material 135 includes two sheets and metal oxides, and the sheet has a large number of holes for gas to pass through. The sheet is a hydrophobic porous polymer membrane, such as PTFE, PVDF, etc. The metal oxide is disposed between the two sheets (for example, sandwiched between the two sheets) to cover the second opening 1102, as shown in FIG. 2.

選擇性濾材135包含金屬氧化物和做為黏著劑之疏水高分子膜。金屬氧化物包含具有β或γ晶相一維奈米結構。金屬氧化物包含二氧化錳(MnO2 )、三氧化二錳(Mn2 O3 )、四氧化三錳(Mn3 O4 )或氫氧化氧錳(MnOOH)。例如,金屬氧化物包含β-MnO2 奈米線、γ-MnOOH奈米線。因此包含前述之二氧化錳、三氧化二錳、四氧化三錳或氫氧化氧錳(MnOOH)之選擇性濾材135可用於移除待測氣體中的臭氧(O3 )。由於金屬氧化物的尺寸為奈米等級,因而具有較大的表面積,進而使得金屬氧化物在移除待測氣體中的干擾氣體時,有較好的去除效率。The selective filter material 135 includes a metal oxide and a hydrophobic polymer membrane as an adhesive. The metal oxide includes a one-dimensional nanostructure having a β or γ crystal phase. The metal oxide includes manganese dioxide (MnO 2 ), manganese trioxide (Mn 2 O 3 ), trimanganese tetraoxide (Mn 3 O 4 ), or manganese oxyhydroxide (MnOOH). For example, metal oxides include β-MnO 2 nanowires and γ-MnOOH nanowires. Therefore, the selective filter material 135 containing the aforementioned manganese dioxide, dimanganese trioxide, trimanganese tetraoxide or manganese oxyhydroxide (MnOOH) can be used to remove ozone (O 3 ) in the gas to be measured. Since the size of the metal oxide is of the nanometer level, it has a larger surface area, so that the metal oxide has a better removal efficiency when removing the interfering gas in the gas to be measured.

疏水高分子之顆粒尺寸可為40μm至700μm。疏水高分子可包含過氟烷基化物(PFA)、聚四氟乙烯(PTFE)或聚氟化二乙烯(PVDF)。The particle size of the hydrophobic polymer can range from 40 μm to 700 μm. The hydrophobic polymer may include perfluoroalkylate (PFA), polytetrafluoroethylene (PTFE) or polyvinylidene fluoride (PVDF).

在本發明之第一實施例中,由疏水高分子結合金屬氧化物所構成之選擇性濾材135具有孔洞。因此待測氣體通過選擇性濾材135時,干擾氣體被選擇性濾材135吸收分解,其他氣體可通過選擇性濾材135之孔洞而進入至容置空間150。圖1A所示,在本發明之第一實施例中,氣體感測裝置10可包含用以去除干擾氣體之過濾模組13,但不以此為限。在其他實施例中,若不需先移除會對量測結果產生干擾之干擾氣體,則氣體感測裝置10可不包含用以去除干擾氣體之過濾模組13。In the first embodiment of the present invention, the selective filter material 135 composed of a hydrophobic polymer combined with a metal oxide has holes. Therefore, when the gas to be measured passes through the selective filter material 135, the interference gas is absorbed and decomposed by the selective filter material 135, and other gases can enter the accommodating space 150 through the holes of the selective filter material 135. As shown in FIG. 1A, in the first embodiment of the present invention, the gas sensing device 10 may include a filter module 13 for removing interference gas, but it is not limited to this. In other embodiments, if it is not necessary to remove the interfering gas that would interfere with the measurement result first, the gas sensing device 10 may not include the filter module 13 for removing the interfering gas.

在本發明之第一實施例中,氣體感測裝置10還包含導電結構14-1~14-4。4個導電結構14-1~14-4的一端設置在殼體15外部,導電結構14-1~14-4可視為接腳(pin),另一端分別電性連接工作電極1200、第一輔助電極1201、參考電極1202和第二輔助電極1203,利用電線將工作電極1200連接導電結構14-1;第一輔助電極1201連接導電結構14-2;參考電極1202連接導電結構14-3;第二輔助電極1203連接導電結構14-4。氣體感測裝置10的電化學感測電極120藉由4個導電結構14-1~14-4獲得由外部提供偵測目標氣體濃度所需之電力,以及將電化學反應產生之電流傳送至微處理器(未繪示)以計算目標氣體濃度。計算出之氣體濃度可經由外接之顯示裝置(未繪示)提供給使用者參考。In the first embodiment of the present invention, the gas sensing device 10 further includes conductive structures 14-1 to 14-4. One end of the four conductive structures 14-1 to 14-4 is arranged outside the housing 15, and the conductive structure 14 -1~14-4 can be regarded as pins, and the other ends are electrically connected to the working electrode 1200, the first auxiliary electrode 1201, the reference electrode 1202, and the second auxiliary electrode 1203, respectively. The working electrode 1200 is connected to the conductive structure 14 by wires -1; the first auxiliary electrode 1201 is connected to the conductive structure 14-2; the reference electrode 1202 is connected to the conductive structure 14-3; the second auxiliary electrode 1203 is connected to the conductive structure 14-4. The electrochemical sensing electrode 120 of the gas sensing device 10 obtains the power required to detect the concentration of the target gas from the outside through the four conductive structures 14-1 to 14-4, and transmits the current generated by the electrochemical reaction to the micro A processor (not shown) to calculate the target gas concentration. The calculated gas concentration can be provided to the user for reference via an external display device (not shown).

由於二氧化氮(NO2 )和臭氧(O3 )的氧化電位極為相近,在進行二氧化氮或臭氧的濃度感測時,二氧化氮和臭氧會彼此干擾而影響量測精準度。因此在本發明之第一實施例中,如圖1A所示,為了區隔二氧化氮和臭氧,被過濾模組13去除之干擾氣體為臭氧,藉由去除臭氧來提高氣體感測系統感測二氧化氮濃度之精準度。前述氣體感測裝置10為待測氣體包含臭氧時之示例。在其他實施例中,特定氣體如一氧化碳、二氧化碳、氮氧化物、硫氧化物、氮的氫化物、氨的氫化物、磷的氫化物、硫的氫化物、砷的氫化物、硼的氫化物、醇、醛、氫之不飽和或飽和烴蒸氣或鹵代烴時,可以選擇使用相應的金屬氧化物和相應的電解液來設計特定的氣體感測裝置10。Since the oxidation potentials of nitrogen dioxide (NO 2 ) and ozone (O 3 ) are very similar, when the concentration of nitrogen dioxide or ozone is sensed, nitrogen dioxide and ozone will interfere with each other and affect the measurement accuracy. Therefore, in the first embodiment of the present invention, as shown in FIG. 1A, in order to separate nitrogen dioxide and ozone, the interfering gas removed by the filter module 13 is ozone, and ozone is removed to improve the sensing of the gas sensing system The accuracy of nitrogen dioxide concentration. The aforementioned gas sensing device 10 is an example when the gas to be measured contains ozone. In other embodiments, specific gases such as carbon monoxide, carbon dioxide, nitrogen oxides, sulfur oxides, nitrogen hydrides, ammonia hydrides, phosphorus hydrides, sulfur hydrides, arsenic hydrides, and boron hydrides When alcohol, aldehyde, hydrogen are unsaturated or saturated hydrocarbon vapor or halogenated hydrocarbon, you can choose to use the corresponding metal oxide and the corresponding electrolyte to design the specific gas sensing device 10.

請參照圖3至圖12,圖3係為根據本發明第二實施例所繪示之氣體感測裝置剖面圖。圖4係為根據本發明第二實施例所繪示之氣體感測裝置分解圖。圖5係為根據本發明第二實施例所繪示之氣體感測裝置立體圖。圖6係為根據本發明第二實施例所繪示之蓋體示意圖。圖7係為根據本發明第二實施例所繪示之過濾模組示意圖。圖8係為根據本發明第二實施例所繪示之氣體感測模組剖面圖。圖9係為根據本發明第二實施例所繪示之氣體感測模組64疊層爆炸示意圖。圖10係為根據本發明第二實施例所繪示之內容器上座示意圖。圖11係為根據本發明第二實施例所繪示之內容器下座示意圖。圖12係為根據本發明第二實施例所繪示之殼體示意圖。Please refer to FIGS. 3-12. FIG. 3 is a cross-sectional view of the gas sensing device according to the second embodiment of the present invention. FIG. 4 is an exploded view of the gas sensing device according to the second embodiment of the present invention. FIG. 5 is a perspective view of the gas sensing device according to the second embodiment of the present invention. FIG. 6 is a schematic diagram of the cover according to the second embodiment of the present invention. FIG. 7 is a schematic diagram of the filter module according to the second embodiment of the present invention. FIG. 8 is a cross-sectional view of the gas sensing module according to the second embodiment of the present invention. FIG. 9 is a schematic diagram illustrating the laminated explosion of the gas sensing module 64 according to the second embodiment of the present invention. Fig. 10 is a schematic diagram of the upper seat of the inner container according to the second embodiment of the present invention. Fig. 11 is a schematic diagram of the lower seat of the inner container according to the second embodiment of the present invention. Fig. 12 is a schematic diagram of a housing drawn according to a second embodiment of the present invention.

如圖3至圖5所示,本發明第二實施例之氣體感測裝置60包括蓋體61、內容器上座62、內容器下座63、氣體感測模組64、殼體65以及過濾模組66。氣體感測模組64和過濾模組66設置於蓋體61和內容器上座62之間,內容器上座62設置於內容器下座63上方,內容器下座63設置於內容器上座62和殼體65之間。在另一實施例中,氣體感測裝置60可不包括過濾模組66。圖4係為根據本發明第二實施例所繪示之氣體感測裝置60分解圖。蓋體61與殼體65結合為最外層殼體,內容器上座62與內容器下座63藉由第一卡固件625、第二卡固件631互相固定,並且中空處形成電解液槽121,密封件634防止電解液滲漏。氣體感測模組64位於內容器上座62和過濾模組66之間,過濾模組66固定於蓋體61之底面112。特別地,氣體感測模組64與電解液槽121由內容器上座62所區隔,只由連通口624貫通兩部分。圖5係為根據本發明第二實施例所繪示之氣體感測裝置60立體圖,蓋體61與殼體65結合為最外層殼體,藉由蓋體61具有第二開口1102之直徑D2小於第一開口1101的直徑D1以及斜坡面113的結構,可增強氣流從外部流動進入氣體感測裝置60內部。過濾模組66遮蔽第二開口1102,以過濾外部空氣且吸附特定氣體。As shown in FIGS. 3 to 5, the gas sensing device 60 of the second embodiment of the present invention includes a cover 61, an upper inner container base 62, a lower inner container base 63, a gas sensing module 64, a housing 65, and a filter mold. Group 66. The gas sensing module 64 and the filter module 66 are arranged between the cover 61 and the upper inner container base 62, the inner container upper seat 62 is arranged above the inner container lower seat 63, and the inner container lower seat 63 is arranged on the inner container upper seat 62 and the shell体65 between. In another embodiment, the gas sensing device 60 may not include the filter module 66. FIG. 4 is an exploded view of the gas sensing device 60 according to the second embodiment of the present invention. The cover 61 and the shell 65 are combined to form the outermost shell. The upper inner container base 62 and the lower inner container base 63 are fixed to each other by the first fastener 625 and the second fastener 631, and an electrolyte tank 121 is formed in the hollow to seal The member 634 prevents electrolyte leakage. The gas sensing module 64 is located between the upper inner container 62 and the filter module 66, and the filter module 66 is fixed on the bottom surface 112 of the cover 61. In particular, the gas sensing module 64 and the electrolyte tank 121 are separated by the upper inner container 62, and only the communication port 624 penetrates the two parts. Fig. 5 is a perspective view of the gas sensing device 60 according to the second embodiment of the present invention. The cover 61 and the housing 65 are combined to form the outermost housing. The diameter D2 of the cover 61 with the second opening 1102 is smaller than The diameter D1 of the first opening 1101 and the structure of the slope surface 113 can enhance the air flow from the outside into the gas sensing device 60. The filter module 66 shields the second opening 1102 to filter external air and adsorb specific gases.

如圖3所示,在本發明之第二實施例中,殼體65和蓋體61之間具有容置空間650。內容器上座62、內容器下座63、氣體感測模組64以及過濾模組66位於容置空間650中。第二實施例中之蓋體61、殼體65和過濾模組66的結構與第一實施例之蓋體11、殼體15和過濾模組13的結構類似,因此不再贅述。圖6係為根據本發明第二實施例所繪示之蓋體61示意圖,第二開口1102之直徑D2小於第一開口1101的直徑D1(D2>D1)。As shown in FIG. 3, in the second embodiment of the present invention, there is an accommodation space 650 between the housing 65 and the cover 61. The upper inner container base 62, the lower inner container base 63, the gas sensing module 64 and the filter module 66 are located in the accommodating space 650. The structures of the cover 61, the housing 65 and the filter module 66 in the second embodiment are similar to the structures of the cover 11, the housing 15 and the filter module 13 in the first embodiment, so they will not be described in detail. 6 is a schematic diagram of the cover 61 according to the second embodiment of the present invention. The diameter D2 of the second opening 1102 is smaller than the diameter D1 of the first opening 1101 (D2>D1).

如圖7所示,在本發明之第二實施例中,過濾模組66之固定結構130具有可供空氣流通的多個孔,且選擇性濾材135由固定結構130夾持於該些孔中。固定結構130設置於蓋體61和氣體感測模組64之間。第二實施例中之過濾模組66材料與第一實施例之過濾模組13類似,因此不再贅述。As shown in FIG. 7, in the second embodiment of the present invention, the fixing structure 130 of the filter module 66 has a plurality of holes for air circulation, and the selective filter material 135 is clamped in the holes by the fixing structure 130 . The fixing structure 130 is disposed between the cover 61 and the gas sensing module 64. The material of the filter module 66 in the second embodiment is similar to that of the filter module 13 in the first embodiment, so it will not be repeated.

如圖8和圖9所示,本發明第二實施例之氣體感測模組64剖面圖以及氣體感測模組64之疊層爆炸示意圖,在氣體感測模組64之疊層爆炸示意圖中,其僅顯示各層的層疊關係,各層的尺寸僅為示意,不以此為限。本發明第二實施例之氣體感測模組64與第一實施例之氣體感測模組12結構類似,故不贅述相同之處,以下參考圖8和圖9進一步說明第二實施例之氣體感測模組64。氣體感測模組64中,疏水高分子層1200A設置在工作電極1200和過濾模組66之間(如碳黑所構成的工作電極1200的面朝下配置),疏水高分子層1201A設置在第一防水膜122-2和第一輔助電極1201之間(如碳黑所構成的第一輔助電極1201的面朝下配置),疏水高分子層1202A設置在參考電極1202和第三電解液吸濕膜124之間(如碳黑所構成的參考電極1202的面朝上配置),疏水高分子層1203A設置在第三電解液吸濕膜124和第二輔助電極1203之間(如碳黑所構成的第二輔助電極1203的面朝下配置)。第二間隔物123還包含設置在第二防水膜123-2和參考電極1202之間的一第五電解液吸濕膜123-3。氣體感測模組64還包含分別對應於工作電極1200、第一輔助電極1201、參考電極1202、第二輔助電極1203的4個電極線(未繪示)。對應於工作電極1200之一第一電極線131(未繪示)設置在工作電極1200和第一電解液吸濕膜122-1之間,並且第一電極線131與工作電極1200電性連接。對應於第一輔助電極1201之一第二電極線132(未繪示)設置在第一輔助電極1201和第二電解液吸濕膜123-1之間,並且第二電極線132與第一輔助電極1201電性連接。對應於參考電極1202之一第三電極線133(未繪示)設置在參考電極1202和第二間隔物123的第五電解液吸濕膜123-3之間,且第三電極線133與參考電極1202電性連接。對應於第二輔助電極1203之一第四電極線134(未繪示)設置在第二輔助電極1203和第四電解液吸濕膜125之間,且第四電極線134與第二輔助電極1203電性連接。第一防水膜122-2、疏水高分子層1201A、第二防水膜123-2各具有第一貫通孔1221、第二貫通孔1201B以及第三貫通孔1231,而第一貫通孔1221、第二貫通孔1201B以及第三貫通孔1231中分別填充有第一貫通孔吸濕膜1222、第二貫通孔吸濕膜12011以及第三貫通孔吸濕膜1232。上述貫通孔吸濕膜係能將電解液127傳遞到不同層次。As shown in FIGS. 8 and 9, the cross-sectional view of the gas sensing module 64 and the schematic diagram of the laminated explosion of the gas sensing module 64 in the second embodiment of the present invention are shown in the schematic diagram of the laminated explosion of the gas sensing module 64 , It only shows the stacking relationship of each layer, the size of each layer is only for illustration, not limited to this. The gas sensing module 64 of the second embodiment of the present invention is similar in structure to the gas sensing module 12 of the first embodiment, so the similarities will not be repeated. The gas of the second embodiment will be further described with reference to FIGS. 8 and 9 below. Sensing module 64. In the gas sensing module 64, the hydrophobic polymer layer 1200A is arranged between the working electrode 1200 and the filter module 66 (for example, the working electrode 1200 made of carbon black is arranged facing down), and the hydrophobic polymer layer 1201A is arranged on the first Between a waterproof membrane 122-2 and the first auxiliary electrode 1201 (for example, the first auxiliary electrode 1201 made of carbon black is arranged facing down), the hydrophobic polymer layer 1202A is disposed on the reference electrode 1202 and the third electrolyte to absorb moisture Between the membranes 124 (such as the configuration of the reference electrode 1202 made of carbon black facing up), the hydrophobic polymer layer 1203A is arranged between the third electrolyte moisture absorption membrane 124 and the second auxiliary electrode 1203 (such as carbon black) The second auxiliary electrode 1203 is arranged facing down). The second spacer 123 also includes a fifth electrolyte moisture absorption membrane 123-3 disposed between the second waterproof membrane 123-2 and the reference electrode 1202. The gas sensing module 64 also includes four electrode lines (not shown) corresponding to the working electrode 1200, the first auxiliary electrode 1201, the reference electrode 1202, and the second auxiliary electrode 1203, respectively. A first electrode wire 131 (not shown) corresponding to one of the working electrodes 1200 is disposed between the working electrode 1200 and the first electrolyte moisture absorption film 122-1, and the first electrode wire 131 is electrically connected to the working electrode 1200. A second electrode line 132 (not shown) corresponding to one of the first auxiliary electrodes 1201 is disposed between the first auxiliary electrode 1201 and the second electrolyte moisture absorption film 123-1, and the second electrode line 132 is connected to the first auxiliary electrode 1201. The electrode 1201 is electrically connected. A third electrode line 133 (not shown) corresponding to one of the reference electrodes 1202 is provided between the reference electrode 1202 and the fifth electrolyte moisture absorption film 123-3 of the second spacer 123, and the third electrode line 133 is connected to the reference The electrode 1202 is electrically connected. A fourth electrode line 134 (not shown) corresponding to one of the second auxiliary electrodes 1203 is disposed between the second auxiliary electrode 1203 and the fourth electrolyte moisture absorption film 125, and the fourth electrode line 134 and the second auxiliary electrode 1203 Electrical connection. The first waterproof membrane 122-2, the hydrophobic polymer layer 1201A, and the second waterproof membrane 123-2 each have a first through hole 1221, a second through hole 1201B, and a third through hole 1231, and the first through hole 1221, the second through hole 1231 The through holes 1201B and the third through holes 1231 are respectively filled with a first through hole moisture absorption film 1222, a second through hole moisture absorption film 12011, and a third through hole moisture absorption film 1232. The above-mentioned through-hole moisture absorption film system can transfer the electrolyte 127 to different levels.

如圖10所示,在本發明之第二實施例(圖3)中,內容器上座62具有一上槽620、一分隔層621與一下槽622,分隔層621設置在上槽620與下槽622之間,多個支撐塊626支撐分隔層621,支撐塊626提升結構剛性。氣體感測模組64設置在內容器上座62的上槽620內。上槽620的邊緣具有多個凹口623,且分隔層621具有連通口624。下槽622之表面上具有一第一卡固件625。第一電極線131至第四電極線134分別穿過多個凹口623,沿著內容器上座62之外邊緣以及內容器下座63之外邊緣向下延伸,然後連接到4個導電結構14-1~14-4。分隔層621的連通口624使電解液槽121內的電解液127可經由穿過連通口624之吸附物(未繪示)之毛細現象將電解液127移動至氣體感測模組12的第四電解液吸濕膜125,如同圖1B,電解液槽121內之電解液127依循方向T,藉由貫穿上下之通道16,將電解液127補充到各電解液吸濕膜。As shown in FIG. 10, in the second embodiment of the present invention (FIG. 3), the upper inner container 62 has an upper groove 620, a separation layer 621 and a lower groove 622, and the separation layer 621 is disposed on the upper groove 620 and the lower groove Between 622, a plurality of support blocks 626 support the separation layer 621, and the support blocks 626 enhance the structural rigidity. The gas sensing module 64 is disposed in the upper groove 620 of the upper base 62 of the inner container. The edge of the upper groove 620 has a plurality of notches 623, and the separation layer 621 has a communication opening 624. A first fastener 625 is provided on the surface of the lower groove 622. The first electrode wire 131 to the fourth electrode wire 134 respectively pass through the plurality of notches 623, extend downward along the outer edge of the upper inner container base 62 and the outer edge of the lower inner base 63, and then are connected to the four conductive structures 14- 1~14-4. The communication port 624 of the separation layer 621 allows the electrolyte 127 in the electrolyte tank 121 to move the electrolyte 127 to the fourth part of the gas sensing module 12 through the capillary phenomenon of the adsorbent (not shown) passing through the communication port 624. The electrolyte moisture absorption membrane 125, as shown in FIG. 1B, the electrolyte 127 in the electrolyte tank 121 follows the direction T, and supplements the electrolyte 127 to each electrolyte moisture absorption membrane by passing through the upper and lower channels 16.

如圖11所示,在本發明之第二實施例(圖3)中,內容器下座63包含一下座上槽630、用以與第一卡固件625匹配卡固的一第二卡固件631以及一凸起結構632。第二卡固件631位於下座上槽630面對內容器上座62的表面上。下座上槽630具有一密封孔633。電解液127通過密封孔633由外注入下座上槽630內,並藉由一密封件634將密封孔633密封。內容器上座62和內容器下座63所圍成的空間為電解液槽121。內容器上座62之下槽622和內容器下座63之下座上槽630相匹配而可接合成一體。As shown in FIG. 11, in the second embodiment of the present invention (FIG. 3), the inner container lower seat 63 includes a lower seat upper slot 630, and a second fastener 631 for matching and securing with the first fastener 625. And a raised structure 632. The second fastener 631 is located on the surface of the upper groove 630 of the lower base facing the upper base 62 of the inner container. The upper groove 630 of the lower seat has a sealing hole 633. The electrolyte 127 is injected into the upper groove 630 of the lower seat through the sealing hole 633 from the outside, and the sealing hole 633 is sealed by a sealing member 634. The space enclosed by the upper inner container seat 62 and the lower inner container seat 63 is an electrolyte tank 121. The lower groove 622 of the upper inner container seat 62 and the upper groove 630 of the lower inner container lower seat 63 match and can be connected into one body.

如圖12所示,在本發明之第二實施例(圖3)中,殼體65底部具有4個導電孔651以及用以與內容器下座63之凸起結構632相結合之通口部652。4個導電孔651分別對應可插入4個導電結構14-1~14-4。As shown in FIG. 12, in the second embodiment of the present invention (FIG. 3), the bottom of the housing 65 has four conductive holes 651 and openings for combining with the raised structure 632 of the lower base 63 of the inner container 652. The 4 conductive holes 651 respectively correspond to the 4 conductive structures 14-1 to 14-4 that can be inserted.

請參照圖13A及圖13B,圖13A和圖13B係為根據本發明第一實施例(圖1A)和第二實施例(圖3)所使用之蓋體11|、61及殼體15、65與比較例所使用之蓋體及殼體之流場分佈圖。流場分佈中氣流速度為0.4 m/s至0.6m/s。氣流為自然風。氣流的流向為由右至左(如箭頭所示)。箭頭的長度代表氣流大小,箭頭較長代表氣流較強,箭頭較短代表氣流較弱。如圖13A所示,藉由蓋體11、61具有第二開口1102之直徑D2小於第一開口1101的直徑D1以及斜坡面113的結構,當氣流從右至左方流動通過氣體感測裝置10、60時,可在不需外加風扇的情況下,即可在第二開口1102之內外產生對流現象A。再者,固定結構130的中心部分使進入容置空間150、650之氣流擾動情況呈現迴旋分布B(環繞固定結構130的中心部分),從而使氣流進一步向容置空間150、650中之氣體感測模組12、64移動,使得對流現象之效果得到進一步提升。在其他實施例中,也可不設置固定結構130的中心部分。因此氣體感測裝置10、60藉由蓋體11、61具有第二開口1102之直徑D2小於第一開口1101的直徑D1的結構,可增強氣體感測裝置10、60周圍之局部流場,從而增強氣流的擴散能力。相較之下,如圖13B所示,比較例之氣體感測裝置之蓋體具有非斜坡之結構,使得部分氣流於開口處流出,在開口處之內外無產生對流現象C(開口處的箭頭較短)。因此進入氣體感測裝置之氣體以擴散為主,由圖13B可知氣流擾動較為靜止,因而質傳效果較差。由圖13A和圖13B之結果,證實當蓋體11、61具有第二開口1102之直徑D2小於第一開口1101的直徑D1以及斜坡面113的結構時,可調整蓋體11、61周圍的局部流場,因此圖13A中,第二開口1102有較佳的對流現象,加上進入容置空間150、650之氣流擾動情況因為固定結構130的中心部分而呈現迴旋分布B,從而增加經由第一開口1101與第二開口1102進入氣體感測裝置10、60的氣體量。相較地,圖13B的開口部的氣流則呈現靜止的狀態C。Please refer to Figures 13A and 13B. Figures 13A and 13B are the covers 11|, 61 and shells 15, 65 used in the first embodiment (Figure 1A) and the second embodiment (Figure 3) of the present invention The flow field distribution diagram of the cover and the shell used in the comparative example. The air velocity in the flow field distribution ranges from 0.4 m/s to 0.6 m/s. The airflow is natural wind. The direction of air flow is from right to left (as indicated by the arrow). The length of the arrow represents the size of the airflow, longer arrows represent stronger airflow, and shorter arrows represent weaker airflow. As shown in FIG. 13A, the cover 11, 61 has a structure in which the diameter D2 of the second opening 1102 is smaller than the diameter D1 of the first opening 1101 and the slope surface 113, when the airflow flows through the gas sensing device 10 from right to left At 60 o'clock, convection phenomenon A can be generated inside and outside the second opening 1102 without an external fan. Furthermore, the central part of the fixed structure 130 makes the air flow disturbance into the accommodating space 150, 650 present a swirling distribution B (surrounding the central part of the fixed structure 130), so that the air flow is further directed toward the air in the accommodating space 150, 650 The movement of the measuring modules 12 and 64 further enhances the effect of convection phenomena. In other embodiments, the central part of the fixing structure 130 may not be provided. Therefore, the gas sensing device 10, 60 has a structure in which the diameter D2 of the second opening 1102 is smaller than the diameter D1 of the first opening 1101 by the cover 11, 61, thereby enhancing the local flow field around the gas sensing device 10, 60, thereby Enhance the diffusion ability of airflow. In contrast, as shown in Figure 13B, the cover of the gas sensing device of the comparative example has a non-slope structure, so that part of the airflow flows out at the opening, and there is no convection phenomenon C (the arrow at the opening) Shorter). Therefore, the gas entering the gas sensing device is mainly diffused. It can be seen from Fig. 13B that the gas flow disturbance is relatively static, so the mass transfer effect is poor. From the results of FIGS. 13A and 13B, it is confirmed that when the cover 11, 61 has a structure in which the diameter D2 of the second opening 1102 is smaller than the diameter D1 of the first opening 1101 and the slope surface 113, the part around the cover 11, 61 can be adjusted 13A, the second opening 1102 has a better convection phenomenon. In addition, the air flow turbulence entering the accommodating space 150, 650 presents a swirling distribution B due to the central part of the fixed structure 130, thereby increasing the passage through the first The amount of gas entering the gas sensing devices 10 and 60 through the opening 1101 and the second opening 1102. In contrast, the airflow in the opening of FIG. 13B is in a static state C.

請參照圖14,圖14係為金屬氧化物和疏水高分子結合構成之選擇性濾材135之SEM圖。如圖14所示,在具有β或γ晶相一維奈米結構的金屬氧化物之間透過疏水高分子結合為整體以構成選擇性濾材135。金屬氧化物和疏水高分子的混合比例可為1:5至1:10(重量比分率)。Please refer to FIG. 14, which is an SEM image of a selective filter material 135 composed of a combination of metal oxide and hydrophobic polymer. As shown in FIG. 14, the metal oxides with a one-dimensional nanostructure of β or γ crystal phase are combined into a whole through a hydrophobic polymer to form a selective filter material 135. The mixing ratio of metal oxide and hydrophobic polymer can be 1:5 to 1:10 (weight ratio).

以下說明本發明過濾模組13之選擇性濾材135中,金屬氧化物與疏水高分子的比例(重量比分率)對於選擇性濾材135過濾效果之影響。於本發明第一實施例中,金屬氧化物MnO2 和疏水高分子PTFE之比例如下表1所示。The following describes the influence of the ratio (weight ratio) of the metal oxide to the hydrophobic polymer in the selective filter material 135 of the filter module 13 of the present invention on the filtering effect of the selective filter material 135. In the first embodiment of the present invention, the ratio of the metal oxide MnO 2 and the hydrophobic polymer PTFE is shown in Table 1 below.

表1 H1 (PTFE為625 μm) H2 (PTFE為350μm) H3 (PTFE為44 μm)   MnO2:PTFE   去除效率 MnO2:PTFE 去除效率 MnO2 : PTFE 去除效率 MnO2微米球形顆粒 (對照組) 1:5 82 % 1:5 82 % 1:5 83 % MnO2微米球形顆粒 (對照組) 1:10   83 % 1:10 82 % 1:10   85 % MnO2微米球形顆粒(對照組) 1:15 63 % 1:15 60 % 1:15 68 % β-MnO2奈米線(實施例) 1:5 93 % 1:5 95 % 1:5 96 % β-MnO2奈米線(實施例) 1:10   95 % 1:10 96 % 1:10 100% β-MnO2奈米線   1:15 75 % 1:15 76 % 1:15 84 %   γ-MnOOH:PTFE   去除效率 γ-MnOOH :PTFE 去除效率 γ-MnOOH : PTFE 去除效率 γ-MnOOH奈米線(實施例) 1:5   74% 1:5   76% 1:5   78% γ-MnOOH奈米線(實施例) 1:10   80% 1:10   81% 1:10   83% γ-MnOOH奈米線 1:15 62% 1:15 63% 1:15 65% Table 1 H1 (625 μm for PTFE) H2 (350μm for PTFE) H3 (44 μm for PTFE) MnO2: PTFE Removal efficiency MnO2: PTFE Removal efficiency MnO2: PTFE Removal efficiency MnO2 micron spherical particles (control group) 1:5 82% 1:5 82% 1:5 83% MnO2 micron spherical particles (control group) 1:10 83% 1:10 82% 1:10 85% MnO2 micron spherical particles (control group) 1:15 63% 1:15 60% 1:15 68% β-MnO2 Nanowire (Example) 1:5 93% 1:5 95% 1:5 96% β-MnO2 Nanowire (Example) 1:10 95% 1:10 96% 1:10 100% β-MnO2 nanowire 1:15 75% 1:15 76% 1:15 84% γ-MnOOH: PTFE Removal efficiency γ-MnOOH: PTFE Removal efficiency γ-MnOOH: PTFE Removal efficiency γ-MnOOH nanowire (example) 1:5 74% 1:5 76% 1:5 78% γ-MnOOH nanowire (example) 1:10 80% 1:10 81% 1:10 83% γ-MnOOH nanowire 1:15 62% 1:15 63% 1:15 65%

如表1所示,疏水高分子PTFE的尺寸分別為625 μm(H1)、350μm(H2)、44μm(H3)。金屬氧化物MnO2 和疏水高分子PTFE的混合比例為1:5、1:10或1:15。相較於本發明部分實施例中β-MnO2 奈米線和疏水高分子PTFE之比例為1:5或1:10所構成之選擇性濾材135,MnO2 微米球形顆粒所構成之選擇性濾材為對照組。β-MnO2 奈米線和疏水高分子PTFE之比例為1:5或1:10所構成之選擇性濾材135之臭氧的去除效率皆大於90%。β-MnO2 奈米線和疏水高分子PTFE之比例為1:15所構成之選擇性濾材135之臭氧的去除效率大於75%。β-MnO2 奈米線和疏水高分子PTFE之比例為1:5或1:10所構成之選擇性濾材135之臭氧的去除效率優於MnO2 微米球形顆粒所構成之選擇性濾材。在一實施例中,選擇性濾材135以γ-MnOOH奈米線和疏水高分子PTFE為1:10的混合比例下,臭氧的去除效率皆大於80%。在一實施例中,選擇性濾材135以γ-MnOOH奈米線和疏水高分子PTFE為1:5的混合比例下,臭氧的去除效率皆大於70%。在一較佳實施例中,選擇性濾材135以β-MnO2 奈米線和疏水高分子PTFE為1:10的混合比例所構成(去除效率達100%)。β-MnO2 奈米線與γ-MnO2奈米線具有較大吸附面積與吸附效率(相較於顆粒狀),此時,干擾氣體(臭氧)的去除效率大於99%。再者,由疏水高分子PTFE的尺寸和臭氧的去除效率之結果可知疏水高分子PTFE的尺寸越小,臭氧的去除效率越好。As shown in Table 1, the sizes of the hydrophobic polymer PTFE are 625 μm (H1), 350 μm (H2), and 44 μm (H3). The mixing ratio of metal oxide MnO 2 and hydrophobic polymer PTFE is 1:5, 1:10 or 1:15. Compared with the selective filter material 135 composed of β-MnO 2 nanowires and hydrophobic polymer PTFE in some embodiments of the present invention of 1:5 or 1:10, the selective filter material composed of MnO 2 micron spherical particles For the control group. The ozone removal efficiency of the selective filter material 135 formed by the ratio of β-MnO 2 nanowire and hydrophobic polymer PTFE of 1:5 or 1:10 is greater than 90%. The ratio of β-MnO 2 nanowire and hydrophobic polymer PTFE is 1:15, and the ozone removal efficiency of selective filter material 135 is greater than 75%. The ratio of β-MnO 2 nanowire and hydrophobic polymer PTFE is 1:5 or 1:10, and the ozone removal efficiency of the selective filter material 135 is better than that of the selective filter material formed by MnO 2 micron spherical particles. In one embodiment, when the selective filter material 135 uses a mixture ratio of γ-MnOOH nanowire and hydrophobic polymer PTFE at a ratio of 1:10, the ozone removal efficiency is greater than 80%. In one embodiment, when the selective filter material 135 uses a mixture ratio of γ-MnOOH nanowire and hydrophobic polymer PTFE at a ratio of 1:5, the ozone removal efficiency is greater than 70%. In a preferred embodiment, the selective filter material 135 is composed of β-MnO 2 nanowires and hydrophobic polymer PTFE in a mixing ratio of 1:10 (removal efficiency reaches 100%). β-MnO 2 nanowires and γ-MnO 2 nanowires have larger adsorption area and adsorption efficiency (compared to granular). At this time, the removal efficiency of interference gas (ozone) is greater than 99%. Furthermore, from the results of the size of the hydrophobic polymer PTFE and the removal efficiency of ozone, it can be seen that the smaller the size of the hydrophobic polymer PTFE, the better the removal efficiency of ozone.

請參照圖15,圖15係為根據本發明第三實施例的氣體感測系統50示意圖。如圖15所示,本發明第三實施例之氣體感測系統50包括載體20、第一氣體感測裝置30以及第二氣體感測裝置40。第一氣體感測裝置30設置於載體20上。第二氣體感測裝置40設置於載體20上。本發明第三實施例的第一氣體感測裝置30和第二氣體感測裝置40之結構相似於第一實施例之氣體感測裝置10(圖1A)或第二實施例之氣體感測裝置60(圖3),故相同處不再贅述,以下僅對差異處進行說明。也就是說,圖15中的第一氣體感測裝置30和第二氣體感測裝置40是以第一實施例的氣體感測裝置10為例進行繪示,但是第三實施例的氣體感測系統50中的第一氣體感測裝置30和第二氣體感測裝置40可分別置換為第二實施例的氣體感測裝置60(未圖示),第二氣體感測裝置40包含過濾模組13。以下以第一實施例的氣體感測裝置10為例進行描述,但不限於此。Please refer to FIG. 15, which is a schematic diagram of a gas sensing system 50 according to a third embodiment of the present invention. As shown in FIG. 15, the gas sensing system 50 of the third embodiment of the present invention includes a carrier 20, a first gas sensing device 30 and a second gas sensing device 40. The first gas sensing device 30 is disposed on the carrier 20. The second gas sensing device 40 is disposed on the carrier 20. The structure of the first gas sensing device 30 and the second gas sensing device 40 of the third embodiment of the present invention is similar to the gas sensing device 10 of the first embodiment (FIG. 1A) or the gas sensing device of the second embodiment 60 (Figure 3), so the same points will not be repeated, and only the differences will be described below. That is to say, the first gas sensing device 30 and the second gas sensing device 40 in FIG. 15 are illustrated using the gas sensing device 10 of the first embodiment as an example, but the gas sensing device of the third embodiment The first gas sensing device 30 and the second gas sensing device 40 in the system 50 can be replaced with the gas sensing device 60 of the second embodiment (not shown), and the second gas sensing device 40 includes a filter module 13. The following description takes the gas sensing device 10 of the first embodiment as an example, but it is not limited thereto.

在本發明之第三實施例中,載體20可為印刷電路板(PCB)塑膠基板。第一氣體感測裝置30不包含過濾模組,而第二氣體感測裝置40包含過濾模組13。In the third embodiment of the present invention, the carrier 20 may be a printed circuit board (PCB) plastic substrate. The first gas sensing device 30 does not include a filter module, and the second gas sensing device 40 includes a filter module 13.

在本發明之第三實施例中,還包括電路(未圖示)、微處理器(未圖示)以及供電裝置(未圖示)。供電裝置可為電池。氣體感測系統50用低雜訊電路來進行數據收集、利用微處理器來演算自第一氣體感測裝置30與第二氣體感測裝置40收集到的數據,以及將演算後的數據利用視覺化軟體來進行數值展示,從而確定至少一種分析物的濃度(例如NO2 和/或O3 )。氣體感測系統50還可包括溫度偵測和/或濕度偵測元件。In the third embodiment of the present invention, a circuit (not shown), a microprocessor (not shown), and a power supply device (not shown) are further included. The power supply device may be a battery. The gas sensing system 50 uses a low-noise circuit for data collection, a microprocessor to calculate the data collected from the first gas sensing device 30 and the second gas sensing device 40, and the calculated data using visual Software to perform numerical display to determine the concentration of at least one analyte (such as NO 2 and/or O 3 ). The gas sensing system 50 may also include temperature detection and/or humidity detection elements.

以下說明本發明第三實施例之氣體感測系統50的氣體偵測流程。在本發明之第三實施例中,藉由第一氣體感測裝置30不包含過濾模組,因此可偵測到之待測氣體的濃度將包含可被過濾模組去除之干擾氣體的濃度。另一方面,由於第二氣體感測裝置40包含過濾模組13,因此可偵測到之待測氣體的濃度將不包含被過濾模組去除之干擾氣體的濃度,而是偵測到目標氣體的濃度。藉由將第一氣體感測裝置30所偵測到之待測氣體的濃度減去第二氣體感測裝置40所偵測到之目標氣體的濃度,可獲得被過濾模組去除之干擾氣體的濃度。因此,本發明第三實施例之氣體感測系統50具有準確感測干擾氣體的濃度和目標氣體的濃度之感測功能。The following describes the gas detection process of the gas sensing system 50 of the third embodiment of the present invention. In the third embodiment of the present invention, since the first gas sensing device 30 does not include a filter module, the detectable concentration of the gas to be measured will include the concentration of interference gas that can be removed by the filter module. On the other hand, since the second gas sensing device 40 includes the filter module 13, the concentration of the detected gas to be measured will not include the concentration of the interfering gas removed by the filter module, but the target gas is detected concentration. By subtracting the concentration of the target gas detected by the second gas sensing device 40 from the concentration of the gas to be measured detected by the first gas sensing device 30, the interference gas removed by the filter module can be obtained concentration. Therefore, the gas sensing system 50 of the third embodiment of the present invention has a sensing function of accurately sensing the concentration of the interference gas and the concentration of the target gas.

舉例來說,第一氣體感測裝置30偵測到之待測氣體包含二氧化氮和臭氧(R1=[NO2 ]+[O3 ])。第二氣體感測裝置40偵測到之待測氣體包含二氧化氮(R2=[NO2 ]),不包含臭氧(被過濾模組13吸附)。換句話說,第二氣體感測裝置40可偵測目標氣體二氧化氮的濃度。藉由將第一氣體感測裝置30所偵測到之二氧化氮和臭氧的總濃度,扣除第二氣體感測裝置40所偵測到之二氧化氮的濃度,即可獲得臭氧的濃度(R1-R2=[NO2 ]+[O3 ]-[NO2 ]=[O3 ])。亦即,採取電訊號扣抵的方式,得到目標氣體的濃度訊號。For example, the gas to be measured detected by the first gas sensing device 30 includes nitrogen dioxide and ozone (R1=[NO 2 ]+[O 3 ]). The gas to be measured detected by the second gas sensing device 40 contains nitrogen dioxide (R2=[NO 2 ]), but does not contain ozone (adsorbed by the filter module 13). In other words, the second gas sensing device 40 can detect the concentration of the target gas nitrogen dioxide. By subtracting the total concentration of nitrogen dioxide and ozone detected by the first gas sensing device 30 from the concentration of nitrogen dioxide detected by the second gas sensing device 40, the concentration of ozone can be obtained ( R1-R2=[NO 2 ]+[O 3 ]-[NO 2 ]=[O 3 ]). That is, the signal deduction method is adopted to obtain the concentration signal of the target gas.

請參照圖16,圖16係為本發明之包含過濾模組13之第二氣體感測裝置40之濃度偵測圖,橫軸為時間(秒),縱軸為感測器顯示濃度(ppb)。如圖16所示,在通入濃度為400 ppb之臭氧期間,第二氣體感測裝置40之量測結果沒有特殊的波動。這是因為臭氧完全被過濾模組13吸收分解。由圖16之結果可知第二氣體感測裝置40的偵測結果不受到通入之臭氧的影響。因此,圖16顯示過濾模組13具有優異的臭氧吸收效果。Please refer to FIG. 16. FIG. 16 is a concentration detection diagram of the second gas sensing device 40 including the filter module 13 of the present invention. The horizontal axis is time (seconds), and the vertical axis is the sensor display concentration (ppb). . As shown in FIG. 16, during the period of injecting ozone with a concentration of 400 ppb, the measurement result of the second gas sensing device 40 has no special fluctuations. This is because ozone is completely absorbed and decomposed by the filter module 13. It can be seen from the result of FIG. 16 that the detection result of the second gas sensing device 40 is not affected by the passing ozone. Therefore, FIG. 16 shows that the filter module 13 has an excellent ozone absorption effect.

圖17係為根據本發明第三實施例的氣體感測系統50,測得電流隨時間變化的曲線圖。為了確認本發明之獲得氣體感測系統50之靈敏度,首先以零級空氣產生器和稀釋氣體產生器產生含有不同臭氧濃度值之氣體。將含有臭氧之氣體通入氣體感測系統50獲得相應電流值。同時以臭氧氣體分析儀對氣體進行分析,以再次確定臭氧濃度值。結果請參照圖17,圖17係為根據本發明第二實施例的氣體感測系統50,測得電流隨時間變化的曲線圖。如圖17所示,左邊的縱軸為氣體感測系統50測得的電流值(μA)。右邊的縱軸則為臭氧氣體分析儀(Ecotech serinus 10)測得的臭氧的濃度值(ppb)。橫軸為時間(秒)。由氣體感測系統50測得的電流值相應於臭氧氣體分析儀測得的臭氧的濃度值,所測得的電流值(實線)貼近實際臭氧濃度,可獲得氣體感測系統之靈敏度可達0至100ppb。由圖17之臭氧濃度量測結果可知本發明的氣體感測系統之結構雖不複雜,仍可測得ppb等級濃度的臭氧,具有偵測ppb等級的能力。FIG. 17 is a graph of the gas sensing system 50 according to the third embodiment of the present invention, and the measured current changes with time. In order to confirm the sensitivity of the gas sensing system 50 obtained in the present invention, a zero-level air generator and a dilution gas generator are first used to generate gas with different ozone concentration values. The gas containing ozone is passed into the gas sensing system 50 to obtain the corresponding current value. At the same time, the gas is analyzed with an ozone gas analyzer to determine the ozone concentration value again. Please refer to FIG. 17 for the result. FIG. 17 is a graph of the measured current with time according to the gas sensing system 50 of the second embodiment of the present invention. As shown in FIG. 17, the vertical axis on the left is the current value (μA) measured by the gas sensing system 50. The vertical axis on the right is the ozone concentration value (ppb) measured by an ozone gas analyzer (Ecotech serinus 10). The horizontal axis is time (seconds). The current value measured by the gas sensing system 50 corresponds to the ozone concentration value measured by the ozone gas analyzer. The measured current value (solid line) is close to the actual ozone concentration, and the sensitivity of the gas sensing system can reach 0 to 100ppb. From the ozone concentration measurement result in FIG. 17, it can be seen that although the structure of the gas sensing system of the present invention is not complicated, it can still measure the ppb concentration of ozone and has the ability to detect the ppb concentration.

請參照圖18,圖18係為根據本發明第三實施例的氣體感測系統50所測得之二氧化氮濃度值圖。如圖18所示,縱軸為本發明之氣體感測系統50測得的二氧化氮濃度值,橫軸為商用之氣體感測器測得的二氧化氮濃度值。結果如圖18所示,例如:座標點(180.0, 181.2)代表商用之氣體感測器測得的二氧化氮濃度為180.0ppb;本發明之氣體感測系統50測得的二氧化氮濃度為181.2ppb。量測曲線可作出回歸曲線關係式y=0.9658x+2.7175,斜率為0.9658非常接近斜率1(代表X=Y),可知本發明的氣體感測系統50之二氧化氮偵測效果可和商用之氣體感測器的程度類似,所以本發明已具備足夠之可靠度,達到商業化的要求。Please refer to FIG. 18, which is a graph of the concentration of nitrogen dioxide measured by the gas sensing system 50 according to the third embodiment of the present invention. As shown in FIG. 18, the vertical axis is the concentration of nitrogen dioxide measured by the gas sensing system 50 of the present invention, and the horizontal axis is the concentration of nitrogen dioxide measured by a commercial gas sensor. The result is shown in Figure 18. For example, the coordinate point (180.0, 181.2) represents the nitrogen dioxide concentration measured by a commercial gas sensor of 180.0ppb; the nitrogen dioxide concentration measured by the gas sensing system 50 of the present invention is 181.2ppb. The measurement curve can make the regression curve relationship y=0.9658x+2.7175, and the slope of 0.9658 is very close to slope 1 (representing X=Y). It can be seen that the nitrogen dioxide detection effect of the gas sensing system 50 of the present invention is comparable to that of commercial use. The degree of the gas sensor is similar, so the present invention has sufficient reliability to meet the requirements of commercialization.

綜合以上所述,本發明之氣體感測裝置及氣體感測系統藉由蓋體具有第二開口之直徑小於第一開口的直徑的以及斜坡面結構,調整蓋體周圍的局部流場,從而增加經由第一開口與第二開口進入氣體感測裝置的氣體量。如此一來,隨著進入氣體感測裝置的氣體量提升,本發明之氣體感測裝置偵測氣體濃度的靈敏度和精準度也可得到提升。再者,氣體感測裝置及氣體感測系統藉由包含三元複合金屬之奈米結構的工作電極或包含單金屬顆粒的工作電極和包含金屬氧化物之奈米結構的過濾模組之設置,可高靈敏度與精準度,實現低濃度偵測極限。此外,氣體感測裝置及氣體感測系統可用於長期的環境監測。In summary, the gas sensing device and the gas sensing system of the present invention adjust the local flow field around the cover by adjusting the local flow field around the cover by having the cover with a second opening with a diameter smaller than that of the first opening and a slope surface structure. The amount of gas entering the gas sensing device through the first opening and the second opening. In this way, as the amount of gas entering the gas sensing device increases, the sensitivity and accuracy of the gas sensing device of the present invention for detecting gas concentration can also be improved. Furthermore, the gas sensing device and the gas sensing system are provided by a nano-structured working electrode containing a ternary composite metal or a working electrode containing a single metal particle and a filter module containing a nano-structured metal oxide. High sensitivity and accuracy can achieve low concentration detection limit. In addition, the gas sensing device and the gas sensing system can be used for long-term environmental monitoring.

雖然本發明以前述之實施例揭露如上,然其並非用以限定本發明。在不脫離本發明之精神和範圍內,所為之更動與潤飾,均屬本發明之專利保護範圍。關於本發明所界定之保護範圍請參考所附之申請專利範圍。Although the present invention is disclosed in the foregoing embodiments, it is not intended to limit the present invention. All changes and modifications made without departing from the spirit and scope of the present invention fall within the scope of patent protection of the present invention. For the scope of protection defined by the present invention, please refer to the attached patent scope.

10:氣體感測裝置 11:蓋體 12:氣體感測模組 13:過濾模組 14-1~14-4:導電結構 15:殼體 16:通道 20:載體 30:第一氣體感測裝置 40:第二氣體感測裝置 50:氣體感測系統 60:氣體感測裝置 61:蓋體 62:內容器上座 63:內容器下座 64:氣體感測模組 65:殼體 66:過濾模組 110:頂面 111:氣體通道 112:底面 113:斜坡面 114:壁面 120:電化學感測電極 121:電解液槽 122:第一間隔物 122-1:第一電解液吸濕膜 122-2:第一防水膜 123:第二間隔物 123-1:第二電解液吸濕膜 123-2:第二防水膜 123-3:第五電解液吸濕膜 124:第三電解液吸濕膜 125:第四電解液吸濕膜 126:栓塞 127:電解液 130:固定結構 131:第一電極線 132:第二電極線 133:第三電極線 134:第四電極線 135:選擇性濾材 150:容置空間 620:上槽 621:分隔層 622:下槽 623:凹口 624:連通口 625:第一卡固件 626:支撐塊 630:下座上槽 631:第二卡固件 632:凸起結構 633:密封孔 634:密封件 650:容置空間 651:導電孔 652:通口部 1101:第一開口 1102:第二開口 1103:第三開口 1200:工作電極 1200A:疏水高分子層 1201:第一輔助電極 1201A:疏水高分子層 1201B:第二貫通孔 1202:參考電極 1202A:疏水高分子層 1203:第二輔助電極 1203A:疏水高分子層 1210:開孔 1221:第一貫通孔 1231:第三貫通孔 1222:第一貫通孔吸濕膜 1232:第三貫通孔吸濕膜 12011:第二貫通孔吸濕膜 10: Gas sensing device 11: Lid 12: Gas sensing module 13: Filter module 14-1~14-4: Conductive structure 15: shell 16: channel 20: Carrier 30: The first gas sensing device 40: The second gas sensing device 50: Gas sensing system 60: Gas sensing device 61: Lid 62: Inner container upper seat 63: Lower inner container 64: Gas sensing module 65: shell 66: filter module 110: top surface 111: gas channel 112: Bottom 113: Slope 114: Wall 120: Electrochemical sensing electrode 121: Electrolyte tank 122: first spacer 122-1: First electrolyte moisture absorption film 122-2: The first waterproof membrane 123: second spacer 123-1: Second electrolyte moisture absorption membrane 123-2: Second waterproof membrane 123-3: The fifth electrolyte moisture absorption membrane 124: Third electrolyte moisture absorption membrane 125: fourth electrolyte moisture absorption membrane 126: Embolism 127: Electrolyte 130: fixed structure 131: first electrode line 132: second electrode line 133: third electrode line 134: Fourth electrode wire 135: selective filter material 150: accommodation space 620: upper slot 621: Separation layer 622: Bottom Slot 623: Notch 624: Connecting port 625: First card firmware 626: Support Block 630: Lower seat upper slot 631: Second card firmware 632: raised structure 633: Seal hole 634: Seal 650: housing space 651: Conductive hole 652: mouth 1101: first opening 1102: second opening 1103: third opening 1200: working electrode 1200A: Hydrophobic polymer layer 1201: first auxiliary electrode 1201A: Hydrophobic polymer layer 1201B: second through hole 1202: Reference electrode 1202A: Hydrophobic polymer layer 1203: second auxiliary electrode 1203A: Hydrophobic polymer layer 1210: opening 1221: first through hole 1231: third through hole 1222: first through hole moisture absorption film 1232: Third through hole moisture absorption film 12011: Second through-hole moisture absorption film

圖1A係為根據本發明第一實施例所繪示之氣體感測裝置剖面圖。 圖1B係為根據本發明第一實施例所繪示之氣體感測裝置部分放大圖。 圖2係為根據本發明第一實施例所繪示之氣體感測裝置立體圖。 圖3係為根據本發明第二實施例所繪示之氣體感測裝置剖面圖。 圖4係為根據本發明第二實施例所繪示之氣體感測裝置分解圖。 圖5係為根據本發明第二實施例所繪示之氣體感測裝置立體圖。 圖6係為根據本發明第二實施例所繪示之蓋體示意圖。 圖7係為根據本發明第二實施例所繪示之過濾模組示意圖。 圖8係為根據本發明第二實施例所繪示之氣體感測模組剖面圖。 圖9係為根據本發明第二實施例所繪示之氣體感測模組疊層爆炸示意圖。 圖10係為根據本發明第二實施例所繪示之內容器上座示意圖。 圖11係為根據本發明第二實施例所繪示之內容器下座示意圖。 圖12係為根據本發明第二實施例所繪示之殼體示意圖。 圖13A和13B係為根據本發明第一實施例和/或第二實施例與比較例之流場分佈圖。 圖14係為金屬氧化物和疏水高分子結合為整體以構成選擇性濾材之SEM圖。 圖15係為根據本發明第三實施例的氣體感測系統示意圖。 圖16係為本發明之包含過濾模組之氣體感測裝置之濃度偵測圖。 圖17係為根據本發明第三實施例的氣體感測系統,測得電流隨時間變化的曲線圖。 圖18係為根據本發明第三實施例的氣體感測系統所測得之二氧化氮濃度值圖。FIG. 1A is a cross-sectional view of the gas sensing device according to the first embodiment of the present invention. FIG. 1B is a partially enlarged view of the gas sensing device according to the first embodiment of the present invention. Fig. 2 is a perspective view of the gas sensing device according to the first embodiment of the present invention. FIG. 3 is a cross-sectional view of the gas sensing device according to the second embodiment of the present invention. FIG. 4 is an exploded view of the gas sensing device according to the second embodiment of the present invention. FIG. 5 is a perspective view of the gas sensing device according to the second embodiment of the present invention. FIG. 6 is a schematic diagram of the cover according to the second embodiment of the present invention. FIG. 7 is a schematic diagram of the filter module according to the second embodiment of the present invention. FIG. 8 is a cross-sectional view of the gas sensing module according to the second embodiment of the present invention. FIG. 9 is a schematic diagram illustrating the explosion of the gas sensing module stack according to the second embodiment of the present invention. Fig. 10 is a schematic diagram of the upper seat of the inner container according to the second embodiment of the present invention. Fig. 11 is a schematic diagram of the lower seat of the inner container according to the second embodiment of the present invention. Fig. 12 is a schematic diagram of a housing drawn according to a second embodiment of the present invention. 13A and 13B are flow field distribution diagrams according to the first embodiment and/or the second embodiment of the present invention and the comparative example. Figure 14 is an SEM image of the combination of metal oxide and hydrophobic polymer to form a selective filter material. Fig. 15 is a schematic diagram of a gas sensing system according to a third embodiment of the present invention. Fig. 16 is a concentration detection diagram of the gas sensor device including the filter module of the present invention. Fig. 17 is a graph showing the change of measured current with time according to the gas sensing system of the third embodiment of the present invention. FIG. 18 is a graph of the concentration of nitrogen dioxide measured by the gas sensing system according to the third embodiment of the present invention.

10:氣體感測裝置 10: Gas sensing device

11:蓋體 11: Lid

12:氣體感測模組 12: Gas sensing module

13:過濾模組 13: Filter module

14-1~14-4:導電結構 14-1~14-4: Conductive structure

15:殼體 15: shell

16:通道 16: channel

110:頂面 110: top surface

111:氣體通道 111: gas channel

112:底面 112: Bottom

113:斜坡面 113: Slope

114:壁面 114: Wall

120:電化學感測電極 120: Electrochemical sensing electrode

121:電解液槽 121: Electrolyte tank

122:第一間隔物 122: first spacer

123:第二間隔物 123: second spacer

124:第三電解液吸濕膜 124: Third electrolyte moisture absorption membrane

125:第四電解液吸濕膜 125: fourth electrolyte moisture absorption membrane

127:電解液 127: Electrolyte

130:固定結構 130: fixed structure

135:選擇性濾材 135: selective filter material

150:容置空間 150: accommodation space

1100:通道 1100: Channel

1101:第一開口 1101: first opening

1102:第二開口 1102: second opening

1103:第三開口 1103: third opening

1200:工作電極 1200: working electrode

1201:第一輔助電極 1201: first auxiliary electrode

1202:參考電極 1202: Reference electrode

1203:第二輔助電極 1203: second auxiliary electrode

Claims (12)

一種氣體感測裝置,包括:一殼體,具有一容置空間;一蓋體,設置於該殼體上,該蓋體具有一頂面、一底面和一氣體通道,該底面面向該容置空間,該氣體通道與該容置空間相連通,該氣體通道具有一第一開口與一第二開口,該第一開口位於該頂面,該第二開口位於該底面,該第一開口之面積大於該第二開口之面積;以及一氣體感測模組,設置於該容置空間中;其中該氣體感測模組包含一工作電極、一第一輔助電極、一參考電極、一第二輔助電極、和一電解液槽,該第一輔助電極位於該工作電極與該參考電極之間,該參考電極位於該第一輔助電極與該第二輔助電極之間,該第二輔助電極位於該參考電極與該電解液槽之間,該工作電極包含一多孔材料以及承載在該多孔材料上的一奈米線結構,該奈米線結構為一三元複合金屬。 A gas sensing device includes: a housing with an accommodating space; a cover provided on the housing, the cover having a top surface, a bottom surface and a gas channel, the bottom surface facing the accommodating Space, the gas channel communicates with the accommodating space, the gas channel has a first opening and a second opening, the first opening is located on the top surface, the second opening is located on the bottom surface, the area of the first opening Larger than the area of the second opening; and a gas sensing module disposed in the accommodating space; wherein the gas sensing module includes a working electrode, a first auxiliary electrode, a reference electrode, and a second auxiliary electrode Electrode, and an electrolyte bath, the first auxiliary electrode is located between the working electrode and the reference electrode, the reference electrode is located between the first auxiliary electrode and the second auxiliary electrode, and the second auxiliary electrode is located on the reference Between the electrode and the electrolyte tank, the working electrode includes a porous material and a nanowire structure carried on the porous material, and the nanowire structure is a ternary composite metal. 如請求項1所述之氣體感測裝置,更包含一過濾模組,該過濾模組包含一固定結構與一選擇性濾材,該固定結構設置於該蓋體且位於該容置空間中,該選擇性濾材設置於該固定結構內,且該選擇性濾材遮蔽該第二開口,該選擇性濾材包含一金屬氧化物,該金屬氧化物具有一一維奈米結構。 The gas sensing device according to claim 1, further comprising a filter module, the filter module comprising a fixed structure and a selective filter material, the fixed structure is arranged on the cover and located in the containing space, the The selective filter material is disposed in the fixed structure, and the selective filter material shields the second opening. The selective filter material includes a metal oxide, and the metal oxide has a one-dimensional nanostructure. 如請求項2所述之氣體感測裝置,其中該一維奈米結構為β或γ晶相一維奈米結構。 The gas sensing device according to claim 2, wherein the one-dimensional nanostructure is a β or γ crystal phase one-dimensional nanostructure. 如請求項3所述之氣體感測裝置,其中該金屬氧化物包含二氧化錳、三氧化二錳、四氧化三錳或氫氧化氧錳(MnOOH)。 The gas sensing device according to claim 3, wherein the metal oxide comprises manganese dioxide, manganese trioxide, trimanganese tetraoxide or manganese oxyhydroxide (MnOOH). 如請求項1所述之氣體感測裝置,其中該三元複合金屬選自由鉑、鈀、鈷、銀、錫、銅、鎳、金、釕所構成的任意三種金屬所組合而成之群組。 The gas sensing device according to claim 1, wherein the ternary composite metal is selected from the group consisting of any three metals consisting of platinum, palladium, cobalt, silver, tin, copper, nickel, gold, and ruthenium . 如請求項5所述之氣體感測裝置,其中該三元複合金屬包含鉑鈷銀金屬(PtCoAg)、鉑錫銀(PtSnAg)、鉑鈀鎳(PtPdNi)。 The gas sensing device according to claim 5, wherein the ternary composite metal includes platinum cobalt silver (PtCoAg), platinum tin silver (PtSnAg), and platinum palladium nickel (PtPdNi). 一種氣體感測裝置,包括:一殼體,具有一容置空間;一蓋體,設置於該殼體上,該蓋體具有一頂面、一底面和一氣體通道,該底面面向該容置空間,該氣體通道與該容置空間相連通,該氣體通道具有一第一開口與一第二開口,該第一開口位於該頂面,該第二開口位於該底面,該第一開口之面積大於該第二開口之面積;以及一氣體感測模組,設置於該容置空間中;其中該氣體感測模組包含一工作電極、一第一輔助電極、一參考電極、一第二輔助電極、和一電解液槽,該第一輔助電極位於該工作電極與該參考電極之間,該參考電極位於該第一輔助電極與該第二輔助電極之間,該第二輔助電極位於該參考電極與該電解液槽之間,該工作電極包含一多孔材料以及承載在該多孔材料上的多個單原子金屬顆粒,該些金屬顆粒由鉑、鈀、鈷、銀、錫、銅、鎳、金、釕其中之一所構成。 A gas sensing device includes: a housing with an accommodating space; a cover provided on the housing, the cover having a top surface, a bottom surface and a gas channel, the bottom surface facing the accommodating Space, the gas channel communicates with the accommodating space, the gas channel has a first opening and a second opening, the first opening is located on the top surface, the second opening is located on the bottom surface, the area of the first opening Larger than the area of the second opening; and a gas sensing module disposed in the accommodating space; wherein the gas sensing module includes a working electrode, a first auxiliary electrode, a reference electrode, and a second auxiliary electrode Electrode, and an electrolyte bath, the first auxiliary electrode is located between the working electrode and the reference electrode, the reference electrode is located between the first auxiliary electrode and the second auxiliary electrode, and the second auxiliary electrode is located on the reference Between the electrode and the electrolyte tank, the working electrode includes a porous material and a plurality of monoatomic metal particles carried on the porous material. The metal particles are composed of platinum, palladium, cobalt, silver, tin, copper, and nickel. It is composed of one of, gold and ruthenium. 一種氣體感測裝置,包括:一殼體,具有一容置空間;一蓋體,設置於該殼體上,該蓋體具有一頂面、一底面和一氣體通道,該底面面向該容置空間,該氣體通道與該容置空間相連通,該氣體通道具有 一第一開口與一第二開口,該第一開口位於該頂面,該第二開口位於該底面,該第一開口之面積大於該第二開口之面積;以及一氣體感測模組,設置於該容置空間中;其中該氣體感測模組包含一工作電極、一第一輔助電極、一參考電極、一第二輔助電極、和一電解液槽,該第一輔助電極位於該工作電極與該參考電極之間,該參考電極位於該第一輔助電極與該第二輔助電極之間,該第二輔助電極位於該參考電極與該電解液槽之間,該工作電極包含一多孔材料以及承載在該多孔材料上的多個第一金屬顆粒和多個第二金屬顆粒,該些第一金屬顆粒由鉑、鈀、鈷、銀、錫、銅、鎳、金、釕其中之一的單原子所構成,該些第二金屬顆粒由鉑、鈀、鈷、銀、錫、銅、鎳、金、釕其中之一的單原子所構成,且該些第二金屬顆粒與該些第一金屬顆粒由不同金屬所構成。 A gas sensing device includes: a housing with an accommodating space; a cover provided on the housing, the cover having a top surface, a bottom surface and a gas channel, the bottom surface facing the accommodating Space, the gas channel communicates with the accommodating space, and the gas channel has A first opening and a second opening, the first opening is located on the top surface, the second opening is located on the bottom surface, the area of the first opening is larger than the area of the second opening; and a gas sensing module is provided In the containing space; wherein the gas sensing module includes a working electrode, a first auxiliary electrode, a reference electrode, a second auxiliary electrode, and an electrolyte tank, the first auxiliary electrode is located at the working electrode Between the reference electrode and the reference electrode, the reference electrode is located between the first auxiliary electrode and the second auxiliary electrode, the second auxiliary electrode is located between the reference electrode and the electrolyte tank, and the working electrode includes a porous material And a plurality of first metal particles and a plurality of second metal particles carried on the porous material, the first metal particles are made of one of platinum, palladium, cobalt, silver, tin, copper, nickel, gold, and ruthenium The second metal particles are composed of a single atom of platinum, palladium, cobalt, silver, tin, copper, nickel, gold, and ruthenium, and the second metal particles and the first The metal particles are composed of different metals. 一種氣體感測系統,包括:一載體;一第一氣體感測裝置,設置於該載體上,該第一氣體感測裝置具有如請求項1、5、7-8中任一項所載之氣體感測裝置之結構;以及一第二氣體感測裝置,設置於該載體上,該第二氣體感測裝置具有如請求項1、5、7-8中任一項所載之氣體感測裝置之結構,該第二氣體感測裝置更包含一過濾模組,該過濾模組包含一固定結構與一選擇性濾材,該固定結構設置於該蓋體且位於該容置空間中,該選擇性濾材設置於該固定結構中,且該選擇性濾材遮蔽該第二開口。 A gas sensing system includes: a carrier; a first gas sensing device arranged on the carrier, and the first gas sensing device has the requirements of any one of claims 1, 5, 7-8 The structure of the gas sensing device; and a second gas sensing device arranged on the carrier, the second gas sensing device having the gas sensing contained in any one of claims 1, 5, 7-8 The structure of the device, the second gas sensing device further includes a filter module, the filter module includes a fixed structure and a selective filter material, the fixed structure is arranged on the cover and located in the containing space, the selection The sexual filter material is arranged in the fixing structure, and the selective filter material shields the second opening. 如請求項9所述之氣體感測系統,其中該選擇性濾材包含一金屬氧化物,該金屬氧化物具有一一維奈米結構。 The gas sensing system according to claim 9, wherein the selective filter material comprises a metal oxide, and the metal oxide has a one-dimensional nanostructure. 如請求項10所述之氣體感測系統,其中該一維奈米結構為β或γ晶相一維奈米結構。 The gas sensing system according to claim 10, wherein the one-dimensional nanostructure is a β or γ crystal phase one-dimensional nanostructure. 如請求項10所述之氣體感測系統,其中該金屬氧化物包含二氧化錳、三氧化二錳、四氧化三錳或氫氧化氧錳(MnOOH)。The gas sensing system according to claim 10, wherein the metal oxide comprises manganese dioxide, manganese trioxide, trimanganese tetraoxide or manganese oxyhydroxide (MnOOH).
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