TWI704101B - Adjustable sensing capacitance microelectromechanical system (mems) apparatus - Google Patents

Abstract

A Adjustable Sensing Capacitance Microelectromechanical System (MEMS) Apparatus includes an ASIC and a sensing component. The ASIC includes a top surface, a readout circuit and a plurality of electrical switches. The sensing component, configured to sensing physical quantity, includes a fixed electrode and a movable electrode. The fixed electrode includes a plurality of electrode units. The movable electrode is movable relative to the fixed electrode. The electrical switches are respectively and electrically coupled to the electrode units so as to control a working state of each of the electrical switches, thereby changing a sensing capacitance of the MEMS sensor.

Description

Microcomputer inductance measuring device capable of adjusting inductive capacitance value

The invention relates to a microcomputer inductance measuring device, in particular to a microcomputer inductance measuring device that can adjust the value of the inductive capacitance.

Microcomputer inductance detector is a device that converts the change of the measured physical quantity into the change of capacitance. The microcomputer inductance sensor itself is a variable capacitor. Because this sensor has the characteristics of simple structure, small size, high sensitivity, high resolution, and non-contact measurement, it is widely used to detect displacement and acceleration. , Vibration, pressure, pressure difference, liquid height and other mechanical physical changes.

The traditional capacitive microcomputer inductance sensor includes upper and lower electrodes, one of which is a fixed electrode, and the other is a movable electrode. When the movable electrode is subjected to an external force, the movable electrode will deform to a certain degree and approach the fixed electrode. The capacitance value of the capacitive microcomputer inductance sensor is affected by the distance between the fixed electrode and the movable electrode. A certain amount of change occurs through the distance between the two electrodes, so that the capacitance value changes, and then the potential difference between the electrodes changes. By reading the electric potential difference before and after the electrode is deformed, the user can infer the degree of change of the physical quantity.

Due to the increasing demand for trace detection, capacitive microcomputer inductance sensors need to have high sensitivity in order to be able to detect small changes in physical quantities. Generally speaking, a small change in the distance between the fixed electrode and the movable electrode of the microcomputer inductance sensor can produce a significant potential difference change, thereby improving the sensitivity of the microcomputer inductance sensor. However, if a capacitive microcomputer inductance sensor suitable for micro-detection is used to detect a large physical quantity change, the integrated circuit in the capacitive microcomputer inductance sensor may be burned due to the excessive change in the potential difference. Therefore, the existing capacitive microcomputer inductance sensor suitable for micro-detection cannot also be used for detecting large physical quantity changes.

In view of the above problems, the present invention discloses a microcomputer inductance measuring device capable of adjusting the inductive capacitance value. The inductive capacitance value can be adjusted appropriately, which helps to solve the problem that the existing microcomputer inductance sensor cannot simultaneously detect small physical changes and relatively The problem of large changes in physical quantities.

The invention discloses a microcomputer inductance measuring device capable of adjusting the value of inductive capacitance, including a special application integrated circuit chip and a sensing element. The special application integrated circuit chip includes an upper surface, a reading circuit and a plurality of electrical switches. The sensing element is used to detect physical quantities and includes a fixed electrode and a movable electrode. The fixed electrode includes a plurality of electrode units. The movable electrode can move relative to the fixed electrode. The electrical switches are electrically coupled to the electrode units, respectively, for controlling a working state of the electrode units, so as to adjust an induction capacitance value of the microcomputer inductance sensor.

The present invention also discloses a microcomputer inductive sensing device capable of adjusting the value of the sensing capacitance, which includes a substrate, a special application integrated circuit chip, a first sensing element for detecting a first physical quantity, and a second physical quantity for detecting的一 second sensing element. The special application integrated circuit chip is arranged on the substrate, and the special application integrated circuit chip includes a reading circuit, a plurality of first electrical switches and a plurality of second electrical switches. The first sensing element is disposed on the substrate, and the first sensing element includes a first fixed electrode and a first movable electrode. The first fixed electrode includes a plurality of first electrode units. The first movable electrode is movable relative to the first fixed electrode. Each of the first electrical switches is electrically coupled to each of the first electrode units, so as to control the working state of each of the first electrode units, so as to adjust the distance between the first fixed electrode and the first movable electrode. The value of the sensing capacitance. The second sensing element is disposed on the substrate, and the second sensing element includes a second fixed electrode and a second movable electrode. The second fixed electrode includes a plurality of second electrode units. The second movable electrode is movable relative to the second fixed electrode. Each of the second electrical switches is electrically coupled to each of the second electrode units to control the working state of each of the second electrode units, so as to adjust the distance between the second fixed electrode and the second movable electrode The value of the sensing capacitance.

According to the microcomputer inductance measuring device capable of adjusting the inductive capacitance value disclosed in the present invention, a plurality of electrical switches are respectively electrically coupled to a plurality of electrode units to control the working state of these electrode units. By independently controlling the working status of these electrode units, the inductive capacitance value of the microcomputer inductance sensor can be adjusted to accurately measure the degree of change of the physical quantity to be detected and prevent the failure of the integrated circuit chip for special applications. When detecting a slight change in physical quantity, most of the electrode units can be turned on (that is, the electrical switches are turned on to supply charge to the electrode units). When a large physical quantity change is to be detected, a small number of electrode units can be turned on to reduce the inductive capacitance value of the microcomputer inductance sensor, thereby avoiding failure of the reading circuit in the integrated circuit chip for special applications.

The above description of the content of the disclosure and the description of the following embodiments are used to demonstrate and explain the spirit and principle of the present invention, and to provide a further explanation of the patent application scope of the present invention.

The detailed features and advantages of the present invention are described in detail in the following embodiments, and the content is sufficient to enable anyone familiar with the relevant art to understand the technical content of the present invention and implement it accordingly, and according to the content disclosed in this specification, the scope of patent application and the drawings Anyone who is familiar with the relevant art can easily understand the related purpose and advantages of the present invention. The following examples further illustrate the viewpoint of the present invention in detail, but do not limit the scope of the present invention by any viewpoint.

According to an embodiment of the present invention, the microcomputer inductance sensor includes an Application Specific Integrated Circuit (ASIC), a fixed electrode, and a movable electrode. Please refer to FIG. 1, which is a three-dimensional schematic diagram of a microcomputer inductance measuring device capable of adjusting the inductive capacitance value according to the first embodiment of the present invention. In this embodiment, the microcomputer inductance sensing device 1 capable of adjusting the value of inductive capacitance includes a special application integrated circuit chip 10 and a sensing element 11.

The application-specific integrated circuit chip 10 is designed and manufactured by specific user requirements and specific electronic system requirements. The application-specific integrated circuit chip 10 includes an upper surface 110.

The sensing element 11 includes a fixed electrode 20 and a movable electrode 30. The fixed electrode 20 is disposed on the upper surface 110 of the integrated circuit chip 10 for special applications. The fixed electrode 20 includes a plurality of electrode units 210 arranged at intervals. The electrode unit 210 is, for example, a metal conductive pad, which is disposed on the upper surface 110 of the integrated circuit chip 10 for special applications. The number of electrode units 210 shown in FIG. 1 is not used to limit the present invention.

The movable electrode 30 can move relative to the fixed electrode 20. In detail, the movable electrode 30 includes a fixed portion 310 and a movable portion 320 connected to each other. The fixed portion 310 is disposed on the upper surface 110 of the integrated circuit chip 10 for special applications, and the movable portion 320 corresponds to the electrode unit 210. One end of the movable portion 320 of the movable electrode 30 is connected to the fixed portion 310, and the opposite end of the movable portion 320 is suspended. When an external force is applied to the movable electrode 30 to deform the movable portion 320, the suspended end of the movable portion 320 can move closer to or away from the electrode unit 210 relative to the fixed electrode 20, and the suspended end of the movable portion 320 is between the electrode unit 210 When the distance between φ is changed, the sensing capacitance value of the microcomputer inductance measuring device 1 that can adjust the sensing capacitance value can be changed.

Please also refer to FIG. 2, which is a schematic diagram of the electrical connection relationship between the special application integrated circuit chip and the electrode unit in the microcomputer inductance measuring device with adjustable inductive capacitance value in FIG. 1. In this embodiment, the special application integrated circuit chip 10 further includes a reading circuit 120 and a plurality of electrical switches 130. The number of electrical switches 130 corresponds to the number of electrode units 210.

The reading circuit 120 is electrically coupled to the electrode unit 210 of the fixed electrode 20 in order to read the potential difference between the fixed electrode 20 and the movable electrode 30 to confirm the capacitance value of the capacitive sensor 1.

The electrical switches 130 are respectively electrically coupled to the electrode units 210 of the fixed electrode 20, and the electrical switches 130 are used to control a working state of the corresponding electrode unit 210. In one embodiment, the electrical switch 130 is a capacitive sensor switch. In another embodiment, the electrical switch 130 is a recoverable fuse switch.

The working state of the electrode unit 210 includes an on state and an off state. When the electrical switch 130 of the integrated circuit chip 10 for a special application is turned on to supply charge to the electrode unit 210, the working state of the electrode unit 210 can be defined as an on state. In the open state, there is a potential difference between the fixed electrode 20 and the movable electrode 30. In contrast, when the electrical switch 130 does not supply charge to the electrode unit 210, the working state of the electrode unit 210 can be defined as the off state. In the closed state, there is no potential difference between the fixed electrode 20 and the movable electrode 30.

The specific manner in which the electrical switch 130 controls the working state of the electrode unit 210 is not intended to limit the present invention. For example, the user can manually adjust whether the electrical switch 130 is to be turned on to supply charge to the electrode unit 210, or the integrated circuit chip 10 for a special application can be automatically controlled according to the operation instructions in the external register (not shown) It is determined whether to turn on the electrical switch 130 to supply electric charge to the electrode unit 210.

The following describes the method of detecting the change of the physical quantity using the microcomputer inductance measuring device 1 that can adjust the inductive capacitance value. Please refer to Figure 3 and Figure 4. FIG. 3 is a schematic diagram of the working state of the electrode unit when the microcomputer inductance measuring device with adjustable sensing capacitance value of FIG. 1 detects a small physical quantity change. 4 is a schematic diagram of the working state of the electrode unit when the microcomputer inductive sensing device with adjustable sensing capacitance value of FIG. 1 detects a large physical quantity change. In FIGS. 3 and 4, the electrode unit 210 that is painted in black is in a closed state, and the electrode unit 210 that is not painted in black is in an open state.

According to an embodiment of the present invention, each electrical switch 130 controls each electrode unit 210 of the fixed electrode 20 respectively. Furthermore, the electrode units 210 of the fixed electrodes 20 are arranged on the upper surface 110 of the integrated circuit chip 10 for special applications to form an electrode array. According to the working state of each electrode unit 210 in the electrode array, these electrode units 210 further include multiple electrode combinations. 3 and 4 show the electrode array with 4 columns×4 rows, but the number of columns and rows of the electrode array are not used to limit the present invention.

FIG. 3 illustrates several electrode combinations 21, 22, 23 and 24 formed by the electrode unit 210. In this embodiment, each electrode combination 21, 22, 23, 24 includes a plurality of electrode units 210 arranged along the Y-axis direction. Through the control of the integrated circuit chip 10 in a special application, the plurality of electrical switches 130 can each form an electrical path to supply electric charge to each electrode unit 210 in the electrode assembly 21, 22, 23, thereby enabling the electrode assembly 21 The working state of each electrode unit 210 in, 22, and 23 is in an on state. At the same time, the special application integrated circuit chip 10 can make each of the plurality of electrical switches 130 form an electrical disconnection, and cannot supply electric charge to each electrode unit 210 in the electrode assembly 24, thereby making each electrode assembly 24 The working state of the electrode unit 210 is in a closed state.

FIG. 4 illustrates several electrode combinations 25, 26, 27 and 28 formed by the electrode unit 210. Similarly, through the control of the integrated circuit chip 10 in a special application, a plurality of electrical switches 130 can be turned on to supply electric charges to each electrode unit 210 in the electrode assembly 25, so that each electrode unit in the electrode assembly 25 The working state of 210 is on. At the same time, the special application integrated circuit chip 10 can make the multiple electrical switches 130 non-conducting, and cannot supply electric charge to each electrode unit 210 in the electrode combinations 26, 27, 28, thereby making the electrode combinations 26, 27, 28 The working state of each electrode unit 210 is in a closed state.

The implementation aspect of the electrode assembly formed by the electrode unit 210 is not limited to the aspect illustrated in FIGS. 3 and 4. In another embodiment, all electrode units 210 in two adjacent electrode combinations are in an open state, and all electrode units 210 in another two adjacent electrode combinations are in an off state. In yet another embodiment, all the electrode units 210 may be in an on state.

As described above, part of the electrical switches 130 of the integrated circuit chip 10 for special applications are controlled separately to form electrical paths to supply electric charges to part of the electrode units 210 respectively. The other part of the electrical switches 130 are controlled separately to form an electrical disconnection, and cannot supply charge to the other part of the electrode unit 210. By controlling the working state of the electrode unit 210 or the electrode assembly, the sensing capacitance value of the microcomputer inductive sensing device 1 with adjustable sensing capacitance value can be changed. In this way, the microcomputer inductance measuring device 1 capable of adjusting the inductive capacitance value can be adapted to detect different physical quantities, and prevent the integrated circuit chip 10 for special applications from reading an excessively large inductive capacitance value and failing.

In the following, the application of the microcomputer inductance measuring device 1 with adjustable inductive capacitance value to detect pressure is taken as an example for more specific description, but it is not used to limit what can be detected by the microcomputer inductance measuring device 1 with adjustable inductive capacitance value. Physical quantity. The microcomputer inductance measuring device 1 that can adjust the inductive capacitance value can also detect physical quantities such as displacement, acceleration, vibration, and air pressure.

First, the case of using the microcomputer inductance measuring device 1 with an adjustable inductive capacitance value to detect a small pressure change (for example, a pressure difference of 100~1000 Pa) is described. When pressure is applied to the movable electrode 30 of the microcomputer inductive sensing device 1 with an adjustable inductive capacitance value, the movable portion 320 is deformed and the distance between the movable portion 320 and the electrode unit 210 is changed. Since the pressure applied to the movable electrode 30 is small, the gap between the movable portion 320 and the electrode unit 210 will also change less. At this time, the microcomputer inductance measuring device 1 capable of adjusting the value of the inductive capacitance needs to have greater sensitivity, so that the reading circuit 120 of the integrated circuit chip 10 for special applications can successfully obtain a larger inductive capacitance. As shown in FIG. 3, the three sets of electrical switches 130 respectively control the working states of the electrode units 210 in the corresponding three-electrode combinations 21, 22, and 23, so that these electrode units 210 are in an open state. At the same time, another set of electrical switches 130 controls the electrode units 210 in the corresponding electrode assembly 24, so that these electrode units 210 are in a closed state. When measuring small pressure changes, since most of the electrode units 210 are in the on state, the microcomputer inductance measuring device 1 that can adjust the inductive capacitance value will produce a higher inductive capacitance value. At this time, the distance between the movable portion 320 and the electrode unit 210 requires only a small change to produce a certain degree of significant potential difference change. In this way, the microcomputer inductance sensing device 1 with adjustable sensing capacitance value in which most of the electrode units 210 in FIG. 3 are in the on state is suitable for detecting slight pressure changes.

However, the microcomputer inductive sensing device 1 with adjustable sensing capacitance value in FIG. 3 is not suitable for detecting large pressure changes (for example, a pressure difference of more than 10 ⁵ Pa). When a relatively large pressure is applied to the movable electrode 30, the sensing capacitance value generated by the microcomputer inductance measuring device 1 that can adjust the sensing capacitance value is too large, which may cause the reading circuit 120 to fail. At this time, it is necessary to adjust the inductive capacitance value of the microcomputer inductance measuring device 1 by changing the working state of the electrode unit 210.

As shown in FIG. 4, a group of electrical switches 130 control the working states of the electrode units 210 in the corresponding electrode assembly 25, so that the electrode units 210 are in an open state. Simultaneously, the other three sets of electrical switches 130 control the electrode units 210 in the corresponding electrode combinations 26, 27, 28 to keep them in the closed state. Since only a few electrode units 210 are supplied with electric charges and are in an on state, the microcomputer inductive sensing device 1 that can adjust the inductive capacitance value will have a lower inductive capacitance value. At this time, even if the distance between the movable portion 320 and the electrode unit 210 changes greatly, the capacitance change (inductive capacitance value) generated thereby will not be too large, thereby preventing the reading circuit 120 from failing. In this way, the microcomputer inductance sensor 1 in which most of the electrode units 210 in FIG. 4 are closed is suitable for detecting large pressure changes.

In summary, by controlling the working states of the electrode units 210 through the plurality of electrical switches 130, the inductive capacitance value of the microcomputer inductance measuring device 1 with adjustable inductive capacitance value can be adjusted, which further allows the user to or The control system can increase or decrease the inductive capacitance value of the microcomputer inductive sensing device 1 that can adjust the inductive capacitance value according to the degree of change of the physical quantity to be detected. When detecting a slight change in physical quantity, leave most of the electrode units 210 in an on state to increase the inductive capacitance value of the microcomputer inductive sensing device 1 that can adjust the inductive capacitance value, and it can be used when the physical quantity changes slightly. The capacitance change between the fixed electrode 20 and the movable electrode 30 was successfully read. When a large physical quantity change is to be detected, a small number of electrode units 210 are turned on to reduce the sensing capacitance value of the microcomputer inductive sensing device 1 which can adjust the sensing capacitance value, so as to avoid reading due to excessive physical change The circuit 120 is damaged.

Other aspects of the microcomputer inductance sensor of the present invention are disclosed below. FIG. 5 is a three-dimensional schematic diagram of a microcomputer inductance measuring device capable of adjusting inductive capacitance according to a second embodiment of the present invention. 6 is a schematic top view of the microcomputer inductance measuring device capable of adjusting the inductive capacitance value of FIG. 5. In this embodiment, the microcomputer inductance sensing device 1a capable of adjusting the inductive capacitance value includes a special application integrated circuit chip 10 and a sensing element 11a. For further description of the integrated circuit chip 10 for special applications, please refer to the first embodiment, which will not be repeated below.

The application-specific integrated circuit chip 10 includes an upper surface 110, a reading circuit, and a plurality of electrical switches. The sensing element 11a includes a fixed electrode 20a and a movable electrode 30a. The fixed electrode 20a includes a plurality of first electrode units 210a arranged at intervals and a plurality of second electrode units 220a arranged at intervals.

Both the first electrode unit 210a and the second electrode unit 220a are disposed on the upper surface 110 of the integrated circuit chip 10 for special applications. The reading circuit is electrically coupled to the first electrode unit 210a and the second electrode unit 220a so as to read the potential difference between the fixed electrode 20a and the movable electrode 30a. Some of the electrical switches are electrically coupled to the first electrode units 210a, and the other part of the electrical switches are electrically coupled to the second electrode units 220a. The electrical switch is used to control the working state of the corresponding first electrode unit 210a or the second electrode unit 220a. The number of the first electrode unit 210a and the second electrode unit 220a is not used to limit the present invention.

The movable electrode 30a includes a fixed portion 310a, a movable portion 320a, and a flexible portion 330a connected to each other. The fixed portion 310a is provided on the upper surface 110 of the integrated circuit chip 10 for special applications, and the movable portion 320a is connected to the fixed portion 310a via the flexure 330a. The first electrode unit 210a and the second electrode unit 220a are respectively located on two opposite sides of the movable portion 320a. The movable electrode 30a can move relative to the fixed electrode 20a along a direction perpendicular to the normal of the upper surface 110.

In this embodiment, the arrangement of the fixed electrode 20a and the movable electrode 30a constitutes a comb-shaped electrode structure. As shown in FIG. 6, each first electrode unit 210a includes a plurality of first comb-shaped teeth 211a, and each second electrode unit 220a includes a plurality of second comb-shaped teeth 221a. The movable portion 320a of the movable electrode 30a includes a plurality of third comb-shaped teeth 321a. When the movable part 320a moves relative to the fixed electrode 20a, the capacitance value of the microcomputer inductance sensing device 1a that can adjust the inductive capacitance value can be changed. The working state of each first electrode unit 210a and second electrode unit 220a is controlled through the special application integrated circuit chip 10, and the microcomputer inductance measuring device 1a that can adjust the inductive capacitance value can be increased or decreased according to the change degree of the physical quantity to be detected The value of the sensing capacitance.

FIG. 7 is a three-dimensional cross-sectional schematic diagram of a microcomputer inductance measuring device capable of adjusting the inductive capacitance value according to a third embodiment of the present invention. In this embodiment, the microcomputer inductance sensing device 1b capable of adjusting the inductive capacitance value includes a special application integrated circuit chip 10 and a sensing element 11b. For further description of the integrated circuit chip 10 for special applications, please refer to the first embodiment, which will not be repeated below.

The application-specific integrated circuit chip 10 includes an upper surface 110, a reading circuit, and a plurality of electrical switches. The sensing element 11b includes a fixed electrode 20 and a movable electrode 30b, and the fixed electrode 20 includes a plurality of electrode units 210 arranged at intervals.

The electrode unit 210 is disposed on the upper surface 110 of the integrated circuit chip 10 for special applications. The reading circuit is electrically coupled to the electrode unit 210 for reading the potential difference between the fixed electrode 20 and the movable electrode 30b. The electrical switches are respectively electrically coupled to the electrode units 210 to control the working state of the corresponding electrode units 210.

The fixed portion 310 b of the movable electrode 30 b surrounds the electrode unit 210 of the fixed electrode 20. The movable portion 320b of the movable electrode 30b is suspended above the electrode unit 210. The movable electrode 30b is joined with the integrated circuit chip 10 for special applications to form an airtight space, and the electrode unit 210 is accommodated in the airtight space. This helps prevent the electrode unit 210 from being contaminated with dust due to exposure to the air.

In this embodiment, the microcomputer inductance measuring device 1b capable of adjusting the value of the inductive capacitance is suitable for an altimeter. When the microcomputer inductance measuring device 1b capable of adjusting the inductive capacitance value is used to measure the change of height, the working state of most of the electrode units 210 can be turned on by using an electrical switch. In this way, when the atmospheric pressure changes slightly due to the altitude change, the microcomputer inductance measuring device 1b that can adjust the inductive capacitance value will generate a larger inductive capacitance, so that the integrated circuit chip 10 for special applications can accurately calculate the altitude Variety.

In this embodiment, the microcomputer inductance measuring device 1b that can adjust the inductive capacitance value is also suitable for barometers. When the microcomputer inductance measuring device 1b with adjustable inductive capacitance value is applied to measure high-pressure gas, the working state of most of the electrode units 210 can be turned off by using an electrical switch. In this way, when the high-pressure gas in the container is measured by gas pressure, the microcomputer inductance measuring device 1b that can adjust the inductive capacitance value will not generate an excessively large inductive capacitance, and prevent the integrated circuit chip 10 for special applications from failing.

Please refer to Figure 8 and Figure 9 together. FIG. 8 is a three-dimensional cross-sectional schematic diagram of a microcomputer inductance measuring device capable of adjusting the inductive capacitance value according to a fourth embodiment of the present invention. 9 is a schematic cross-sectional view of the microcomputer inductance measuring device capable of adjusting the inductive capacitance value of FIG. 8. In this embodiment, the microcomputer inductance sensing device 1c capable of adjusting the inductive capacitance value includes a special application integrated circuit chip 10 and a sensing element 11c. For further description of the integrated circuit chip 10 for special applications, please refer to the first embodiment, which will not be repeated below.

The application-specific integrated circuit chip 10 includes an upper surface 110, a reading circuit, and a plurality of electrical switches. The sensing element 11c includes a fixed electrode 20c and a movable electrode 30c.

The fixed electrode 20c includes a central electrode unit 210c and a plurality of ring electrode units 220c arranged at intervals, and the ring electrode unit 220c surrounds the central electrode unit 210c. In detail, the ring electrode units 220c and the central electrode unit 210c are arranged in concentric circles with the center. The central electrode unit 210c and the ring electrode unit 220c are disposed on the upper surface 110 of the integrated circuit chip 10 for special applications. The reading circuit is electrically coupled to the central electrode unit 210c and the ring electrode unit 220c to read the potential difference between the fixed electrode 20c and the movable electrode 30c. One of the electrical switches is electrically coupled to the central electrode unit 210c, and the remaining electrical switches are electrically coupled to the ring electrode units 220c, respectively. The electrical switch is used to control the working state of the corresponding central electrode unit 210c or the ring electrode unit 220c. The number of ring electrode units 220c is not used to limit the present invention.

The fixed portion 310c of the movable electrode 30c surrounds the central electrode unit 210c and the ring electrode unit 220c of the fixed electrode 20c, and the movable portion 320c of the movable electrode 30c is suspended above the central electrode unit 210c and the ring electrode unit 220c.

Please refer to Figure 10 and Figure 11 together. 10 is a three-dimensional schematic diagram of a microcomputer inductance measuring device capable of adjusting the inductive capacitance value according to a fifth embodiment of the present invention. FIG. 11 is a schematic diagram of the electrical connection relationship between a special application integrated circuit chip and an electrode unit in the microcomputer inductance measuring device with adjustable inductive capacitance value of FIG. 10.

In this embodiment, the microcomputer inductance sensing device 1d capable of adjusting the inductive capacitance value includes a substrate 2d, a special application integrated circuit chip 10d, a first sensing element 11d, and a second sensing element 11e.

The substrate 2d is, for example, a silicon substrate, which has an upper surface 21. The special application integrated circuit chip 10d, the first sensing element 11d, and the second sensing element 11e are all disposed on the upper surface 21 of the substrate 2d.

The first sensing element 11d includes a first fixed electrode 20d and a first movable electrode 30d. The first fixed electrode 20d includes a plurality of first electrode units 210d arranged at intervals. The first movable electrode 30d includes a first fixed portion 310d and a first movable portion 320d. The first fixed portion 310d is disposed on the substrate 2d and surrounds the first electrode unit 210d, and the first movable portion 320d is suspended above the first electrode unit 210d. The first movable electrode 30d is joined with the special application integrated circuit chip 10d to form an airtight space, and the first electrode unit 210d is accommodated in the airtight space. When an external force is applied to the first movable electrode 30d to deform the first movable portion 320d, the first movable portion 320d can move relative to the first fixed electrode 20d, so that the distance between the first movable portion 320d and the first electrode unit 210d Change, thereby changing the value of the sensing capacitance between the first fixed electrode 20d and the first movable electrode 30d.

The second sensing element 11e includes a second fixed electrode 20e and a second movable electrode 30e. The second fixed electrode 20e includes a plurality of second electrode units 210e arranged at intervals. The second movable electrode 30e includes a plurality of second fixed portions 310e and a second movable portion 320e. The second fixed portions 310e are provided on the substrate 2d, and the second movable portion 320e is interposed between the plurality of second fixed portions 310e. The second movable portion 320e includes a movable mass 321e and a plurality of elastic members 322e. The movable mass 321e is connected to the plurality of second fixing portions 310e via the plurality of elastic members 322e, and the movable mass 321e is suspended above the second electrode unit 210e. The movable mass 321e can move relative to the second fixed electrode 20e to thereby change the inductive capacitance value between the second fixed electrode 20e and the second movable electrode 30e.

The special application integrated circuit chip 10d includes a reading circuit 120d, a plurality of first electrical switches 130d, and a plurality of second electrical switches 130e. The number of first electrical switches 130d corresponds to the number of first electrode units 210d, and the number of second electrical switches 130e corresponds to the number of second electrode units 210e. The reading circuit 120d is electrically coupled to the first electrode unit 210d and the second electrode unit 210e, so as to read the potential difference between the first fixed electrode 20d and the first movable electrode 30d, thereby confirming the capacitance of the first sensing element 11d value. In addition, the reading circuit 120d is also electrically coupled to the second electrode unit 210e, so as to read the potential difference between the second fixed electrode 20e and the second movable electrode 30e to confirm the capacitance value of the second sensing element 11e.

The first electrical switches 130d are respectively electrically coupled to the first electrode units 210d, and the first electrical switches 130d are used to control the working state of the corresponding first electrode units 210d. In addition, the second electrical switches 130e are respectively electrically coupled to the second electrode units 210e, and the second electrical switches 130e are used to control the working state of the corresponding second electrode units 210e.

The working states of the first electrode unit 210d and the second electrode unit 210e include an open state and a closed state. When the first electrical switch 130d of the integrated circuit chip 10d for the special application is turned on to supply electric charge to the first electrode unit 210d, the working state of the first electrode unit 210d can be defined as an on state. Similarly, when the second electrical switch 130e of the integrated circuit chip 10d for the special application is turned on to supply electric charge to the second electrode unit 210e, the working state of the second electrode unit 210e can be defined as an on state. In the open state, there is a potential difference between the first fixed electrode 20d and the first movable electrode 30d or between the second fixed electrode 20e and the second movable electrode 30e.

In contrast, when the first electrical switch 130d does not supply electric charge to the first electrode unit 210d, the working state of the first electrode unit 210d is defined as the off state. When the second electrical switch 130e of the integrated circuit chip 10d for the special application does not supply charge to the second electrode unit 210e, the working state of the second electrode unit 210e can be defined as the off state. In the closed state, there is no potential difference between the first fixed electrode 20d and the first movable electrode 30d or between the second fixed electrode 20e and the second movable electrode 30e.

In this embodiment, the first sensing element 11d is used to detect a first physical quantity, and the second sensing element 11e is used to detect a second physical quantity different from the first physical quantity. Furthermore, the first sensing element 11d is a barometer, and the second sensing element 11e is an accelerometer.

As shown in FIG. 10, the first electrode unit 210d is controlled by the first electrical switch 130d, so that the working state of part of the first electrode unit 210d is in the on state, and the working state of the other part of the first electrode unit 210d is in the off state. When the air pressure around the microcomputer inductance sensor 1d increases, the first movable portion 320d is deformed to change the distance between the first movable portion 320d and the first electrode unit 210d. The change in the distance between the first movable portion 320d and the first electrode unit 210d causes a change in the potential difference between the first fixed electrode 20d and the first movable electrode 30d.

In addition, the second electrode units 210e are respectively controlled through the second electrical switches 130e, so that the working states of part of the second electrode units 210e are in the on state, and the working states of the other part of the second electrode units 210e are in the off state. When the acceleration of the vehicle (for example, a car) equipped with the microcomputer inductive sensing device 1d with adjustable inductive capacitance value changes, the second movable part 320e moves closer to one of the second fixed parts 310e, so that the second fixed electrode 20e and the first The potential difference changes between the two movable electrodes 30e.

In this embodiment, the area A1 of each first electrode unit 210d is equal to the area A2 of each second electrode unit 210e. When the first sensing element 11d and the second sensing element 11e perform detection at the same time, the number of the first electrode units 210d in the open state is N1, and the number of the second electrode units 210e in the open state is N2, and satisfies The following conditions: N1>N2. In this way, when the first sensing element 11d detects a slight air pressure change and the second sensing element 11e detects an acceleration change, the second sensing element 11e does not generate an excessively large sensing capacitance, which helps prevent special applications The integrated circuit chip 10d fails. In another embodiment, when the first sensing element 11d detects a larger first physical quantity change and the second sensing element 11e detects a smaller second physical quantity change, each first electrode unit The area of 210d is equal to the area of each second electrode unit 210e, and the number (N1) of the first electrode unit 210d in the open state is smaller than the number (N2) of the second electrode unit 210e in the open state.

In another embodiment, when the first sensing element 11d and the second sensing element 11e are simultaneously detecting, the total area of the plurality of first electrode units 210d in the open state is TA1, and the plurality of open state The total area of the second electrode unit 210e is TA2, and the following condition is satisfied: TA1>TA2. In this way, when the first sensing element 11d detects a slight air pressure change and the second sensing element 11e detects an acceleration change, the second sensing element 11e does not generate an excessively large sensing capacitance, which helps prevent special applications The integrated circuit chip 10d fails.

In another embodiment, when the first sensing element 11d detects a larger change in the first physical quantity and the second sensing element 11e detects a smaller change in the second physical quantity, a plurality of The total area (TA1) of the first electrode unit 210d is smaller than the total area (TA2) of the plurality of second electrode units 210e in the open state.

In summary, in the microcomputer inductance measuring device capable of adjusting the inductive capacitance value disclosed in the present invention, a plurality of electrical switches are electrically coupled to a plurality of electrode units to control the working state of these electrode units. By independently controlling the working status of these electrode units, the inductive capacitance value of the microcomputer inductance sensor can be adjusted to accurately measure the degree of change of the physical quantity to be detected and prevent the failure of the integrated circuit chip for special applications. When detecting a slight change in physical quantity, most of the electrode units can be turned on (that is, the electrical switches are turned on to supply charge to the electrode units). When a large physical quantity change is to be detected, a small number of electrode units can be turned on to reduce the inductive capacitance value of the microcomputer inductance sensor, thereby avoiding failure of the reading circuit in the integrated circuit chip for special applications.

Although the present invention is disclosed in the foregoing embodiments, these embodiments are not intended to limit the present invention. All changes and modifications made without departing from the spirit and scope of the present invention fall within the scope of patent protection of the present invention. For the scope of protection defined by the present invention, please refer to the attached patent scope.

1. 1a, 1b, 1c, 1d: microcomputer inductance measuring device that can adjust the value of inductive capacitance

2d: substrate

21: upper surface

10.10d: Special application integrated circuit chip

110: upper surface

120, 120d: reading circuit

130: electrical switch

130d: The first electrical switch

130e: The second electrical switch

11, 11a, 11b, 11c: sensing element

11d: the first sensing element

11e: second sensing element

20, 20a, 20c: fixed electrode

20d: first fixed electrode

20e: second fixed electrode

210: Electrode unit

210a, 210d: the first electrode unit

211a: first comb tooth

220a, 210e: second electrode unit

221a: second comb tooth

210c: Central electrode unit

220c: Ring electrode unit

21, 22, 23, 24, 25, 26, 27, 28: electrode combination

30, 30a, 30b, 30c: movable electrode

30d: first movable electrode

30e: second movable electrode

310, 310a, 310b, 310c: fixed part

310d: The first fixed part

310e: second fixed part

320, 320a, 320b, 320c: movable part

320d: the first movable part

320e: second movable part

321a: third comb tooth

321e: Electrode parts

322e: elastic part

330a: Flexure

FIG. 1 is a three-dimensional schematic diagram of a microcomputer inductance measuring device capable of adjusting inductive capacitance according to a first embodiment of the present invention. 2 is a schematic diagram of the electrical connection relationship between a special application integrated circuit chip and an electrode unit in the microcomputer inductance measuring device with adjustable inductive capacitance value of FIG. 1. FIG. 3 is a schematic diagram of the working state of the electrode unit when the microcomputer inductance measuring device with adjustable sensing capacitance value of FIG. 1 detects a small physical quantity change. 4 is a schematic diagram of the working state of the electrode unit when the microcomputer inductive sensing device with adjustable sensing capacitance value of FIG. 1 detects a large physical quantity change. FIG. 5 is a three-dimensional schematic diagram of a microcomputer inductance measuring device capable of adjusting inductive capacitance according to a second embodiment of the present invention. 6 is a schematic top view of the microcomputer inductance measuring device capable of adjusting the inductive capacitance value of FIG. 5. FIG. 7 is a three-dimensional cross-sectional schematic diagram of a microcomputer inductance measuring device capable of adjusting the inductive capacitance value according to a third embodiment of the present invention. FIG. 8 is a three-dimensional cross-sectional schematic diagram of a microcomputer inductance measuring device capable of adjusting the inductive capacitance value according to a fourth embodiment of the present invention. 9 is a schematic cross-sectional view of the microcomputer inductance measuring device capable of adjusting the inductive capacitance value of FIG. 8. 10 is a three-dimensional schematic diagram of a microcomputer inductance measuring device capable of adjusting the inductive capacitance value according to a fifth embodiment of the present invention. FIG. 11 is a schematic diagram of the electrical connection relationship between a special application integrated circuit chip and an electrode unit in the microcomputer inductance measuring device with adjustable inductive capacitance value of FIG. 10.

1: Microcomputer inductance measuring device with adjustable inductive capacitance value

10: Special application integrated circuit chip

110: upper surface

11: sensing element

20: fixed electrode

210: Electrode unit

30: movable electrode

310: fixed part

320: movable part

Claims (20)

A microcomputer inductance measurement device capable of adjusting the value of inductive capacitance includes: a special application integrated circuit chip, including: an upper surface; a reading circuit; and a plurality of electrical switches; and a sensing element for detecting To measure a physical quantity, the sensing element includes: a fixed electrode including a plurality of electrode units; and a movable electrode that can move relative to the fixed electrode; wherein each of the plurality of electrical switches is electrically coupled to each of the plurality of electrical switches. Each electrode unit can change a sensing capacitance value of the sensing element by controlling the number of each electrode unit in a working state. As described in the first item of the scope of patent application, the microcomputer inductance measuring device with adjustable inductive capacitance value, wherein the working state includes an open state and a closed state, when the special application integrated circuit chip passes through each of the plurality of electrical When the switch supplies charge to each of the plurality of electrode units, the working state of each of the plurality of electrode units can be defined as the open state. When the special application integrated circuit chip does not supply charge to each of the plurality of electrical switches In the case of the plurality of electrode units, the working state of each of the plurality of electrode units can be defined as the closed state. As described in the second item of the scope of patent application, the microcomputer inductance measuring device that can adjust the inductive capacitance value, in which a part of the plurality of electrode units can form an electrode combination, and a part of the plurality of electrical switches can make the electrode The multiple electrode units in the combination have the same working state. As described in item 2 of the scope of patent application, the microcomputer inductance measurement device capable of adjusting the value of the inductive capacitance, wherein the plurality of electrical switches are capacitive inductive switches. As described in item 2 of the scope of patent application, the microcomputer inductance measuring device capable of adjusting the value of the inductive capacitance, wherein the plurality of electrical switches are resettable fuse switches. As described in the first item of the scope of patent application, the microcomputer inductance measuring device capable of adjusting the inductive capacitance value, wherein the plurality of electrode units are arranged on the upper surface of the integrated circuit chip for the special application. As described in the first item of the patent application, the microcomputer inductance measuring device capable of adjusting the inductive capacitance value further includes a substrate, wherein the plurality of electrode units and the special application integrated circuit chip are all disposed on the substrate. As described in item 6 of the scope of patent application, the microcomputer inductance measuring device with adjustable inductive capacitance value, wherein the movable electrode includes a fixed part and a movable part, and the fixed part is arranged on the integrated circuit chip for the special application Surface, and the movable part corresponds to the plurality of electrode units. As described in item 8 of the scope of patent application, the microcomputer inductance measuring device capable of adjusting the inductive capacitance value, wherein one end of the movable part of the movable electrode is connected to the fixed part, and the opposite end of the movable part is suspended. As described in item 8 of the scope of patent application, the microcomputer inductive sensing device capable of adjusting the inductive capacitance value, wherein the fixed portion of the movable electrode surrounds the plurality of electrode units. The microcomputer inductive sensing device capable of adjusting the inductive capacitance value as described in item 8 of the scope of patent application, wherein the plurality of electrode units of the fixed electrode include a central electrode unit and at least one ring electrode unit, and the at least one ring electrode The cell surrounds the central electrode cell. As described in item 8 of the scope of patent application, the microcomputer inductive sensing device capable of adjusting the inductive capacitance value, wherein the movable electrode can move relative to the fixed electrode along a direction perpendicular to the normal line of the upper surface. As described in item 12 of the scope of patent application, the microcomputer inductive sensing device capable of adjusting the inductive capacitance value, wherein the plurality of electrode units of the fixed electrode include at least one first electrode unit and at least one second electrode unit, and the movable electrode It includes a fixed portion, a flexible portion, and a movable portion. The movable portion is connected to the fixed portion via the flexible portion, and the at least one first electrode unit and the at least one second electrode unit are respectively located on the movable portion Opposite two sides. A microcomputer inductance measurement device capable of adjusting inductive capacitance value includes: a substrate; a special application integrated circuit chip arranged on the substrate, and the special application integrated circuit chip includes a reading circuit and a plurality of first circuits And a plurality of second electrical switches; a first sensing element disposed on the substrate, the first sensing element is used to detect a first physical quantity, including: a first fixed electrode, including a plurality of first An electrode unit; and a first movable electrode movable relative to the first fixed electrode, each of the plurality of first electrical switches is electrically coupled to each of the plurality of first electrode units, for controlling each of the plurality The working state of the first electrode unit can further change the sensing capacitance value of the first sensing element; and a second sensing element is disposed on the substrate, and the second sensing element is used to detect a second physical quantity , Including: a second fixed electrode, including a plurality of second electrode units; and A second movable electrode can move relative to the second fixed electrode, and each of the plurality of second electrical switches is electrically coupled to each of the plurality of second electrode units to control each of the plurality of second electrode units The working state of the second sensor can change the sensing capacitance value of the second sensing element. The microcomputer inductance device capable of adjusting the sensing capacitance value as described in claim 14, wherein the first movable electrode includes a first fixed part and a first movable part, and the first fixed part is disposed on the substrate And surround the plurality of first electrode units, and the first movable part is suspended above the plurality of first electrode units. As described in item 15 of the scope of patent application, the microcomputer inductive sensing device capable of adjusting the inductive capacitance value, wherein the second movable electrode includes a plurality of second fixed parts and a second movable part, and the plurality of second fixed parts are arranged On the substrate, the second movable portion is interposed between the plurality of second fixed portions, and the second movable portion includes a movable mass and a plurality of elastic members, and each of the plurality of elastic members is respectively connected to the movable mass and For each of the plurality of second fixed parts, the movable mass is suspended above the plurality of second electrode units. As described in item 16 of the scope of patent application, the microcomputer inductance measuring device capable of adjusting the inductive capacitance value, wherein the first physical quantity is air pressure, and the second physical quantity is acceleration. As described in item 14 of the scope of patent application, the microcomputer inductance measuring device capable of adjusting the inductive capacitance value, wherein when the special application integrated circuit chip supplies electric charge to each of the plurality of first electrical switches through each of the plurality of first electrical switches In the case of an electrode unit, the working state of each of the plurality of first electrode units is defined as an open state, and when the special application integrated circuit chip uses each of the plurality of first electrical switches When the electric charge is not supplied to each of the plurality of first electrode units, the working state of each of the plurality of first electrode units is defined as the off state, when the special application integrated circuit chip supplies electric charge through each of the plurality of second electrical switches To each of the plurality of second electrode units, the working state of each of the plurality of second electrode units is defined as an open state. When the special application integrated circuit chip does not supply electric charge to each of the plurality of second electrical switches For each of the plurality of second electrode units, the working state of each of the plurality of second electrode units is defined as a closed state, and the total area of the plurality of first electrode units in the open state is not equal to the plurality of open state The total area of the second electrode unit. As described in item 18 of the scope of patent application, the microcomputer inductive sensing device with adjustable sensing capacitance, wherein the total area of the plurality of first electrode units in the open state is larger than that of the plurality of second electrode units in the open state The total area. As described in item 19 of the scope of patent application, the microcomputer inductance measuring device capable of adjusting the inductive capacitance value, wherein the area of each of the plurality of first electrode units is equal to the area of each of the plurality of second electrode units, and is turned on The number of the plurality of first electrode units in the state is greater than the number of the plurality of second electrode units in the open state.

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