TWI697564B - Heat treatment furnace - Google Patents

Heat treatment furnace Download PDF

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TWI697564B
TWI697564B TW108144902A TW108144902A TWI697564B TW I697564 B TWI697564 B TW I697564B TW 108144902 A TW108144902 A TW 108144902A TW 108144902 A TW108144902 A TW 108144902A TW I697564 B TWI697564 B TW I697564B
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unit
process atmosphere
container
heat treatment
treatment furnace
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TW108144902A
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TW202122593A (en
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謝志男
許恭銘
楊景富
何玫蓉
黃家宏
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財團法人金屬工業研究發展中心
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Abstract

A heat treatment furnace comprises a stove unit, an accommodation unit mounted in said stove unit, a mixing unit mounted in said stove unit, and an exhaust unit mounted on said stove unit. Said stove unit includes an outer pot, and an inner pot having at least one first gas passage at the bottom and at least one second gas passage at the top. Said accommodation unit includes at least one container adapted to accommodate a workpiece as well as allowing the process gas to flow through. Said exhaust unit is adapted to create circulation of the process gas in said stove unit, said at least one first gas passage, and said at least one second gas passage, and cooperate with said mixing unit to stir said workpieces, hence increasing the chance of the surface of each workpiece contacting with said process gas.

Description

熱處理爐Heat treatment furnace

本發明是有關於一種工件加工裝置,特別是指一種熱處理爐。 The invention relates to a workpiece processing device, in particular to a heat treatment furnace.

科技發展至今,產業界對於微小機組零件的使用需求上升,而微小零件之製程的其中一道工法,即是將該等零件置於一具有腐蝕效果的該製程氣氛中,藉由該製程氣氛對於該等零件表面產生腐蝕作用,消除該等零件之氧化層後,才能進行下一道製程。 Since the development of science and technology, the industry’s demand for the use of components for micro-units has increased. One of the methods of the manufacturing process of micro-components is to place the parts in a process atmosphere with a corrosive effect. Wait for the surface of the parts to corrode and eliminate the oxide layer of the parts before proceeding to the next process.

然而,目前有關此熱處理工藝的技術,仍是停滯不前。由於考量到產能及效率,勢必需要批次同時處理多數個零件,但一定數量的該等零件在處理空間中將會彼此堆疊而相互遮蔽,倘若沒有經過妥善處理,該製程氣氛僅能夠接觸位於外層的零件,而沒辦法進入被堆埋於內層的零件中,因此,位於內層的零件必然沒辦法受到均勻的該製程氣氛處理,進而使得整體零件的品質不均,嚴重影響到產品的良率。 However, the current technology related to this heat treatment process is still stagnant. Due to capacity and efficiency considerations, it is necessary to process many parts in batches at the same time, but a certain number of these parts will be stacked on each other in the processing space and shield each other. If not properly processed, the process atmosphere can only touch the outer layer The parts that are buried in the inner layer cannot enter the parts that are buried in the inner layer. Therefore, the parts located in the inner layer must not be treated by the uniform atmosphere of the process, which in turn makes the quality of the overall parts uneven, which seriously affects the quality of the product. rate.

有鑒於上述同時處理多數所述零件時發生的問題,倘 若針對各種不同的零件皆設計對應的夾持治具,以供每一零件彼此排列設置,雖然可提升每一零件之表面與該製程氣氛接觸的機會,但是研發製造成本也會提升,且需要耗費人力來排列,同樣會連帶影響製造的成本。 In view of the above-mentioned problems when dealing with most of the parts mentioned above, if If corresponding clamping fixtures are designed for various parts, so that each part can be arranged and arranged with each other, although the chance of contact between the surface of each part and the process atmosphere can be improved, the R&D and manufacturing cost will also increase. And it requires labor to arrange, which will also affect the cost of manufacturing.

因此,本發明之目的,即在提供一種適用於各種微小零件,且能夠供該製程氣氛與微小零件均勻接觸的熱處理爐。 Therefore, the purpose of the present invention is to provide a heat treatment furnace that is suitable for various small parts and can provide the process atmosphere to uniformly contact the small parts.

於是,本發明熱處理爐,適用於利用一製程氣氛處理多個工件,並包含一爐具單元、一設置於該爐具單元中的容置單元、一設置於該爐具單元中的攪拌單元,及一設置於該爐具單元上的抽風單元。 Therefore, the heat treatment furnace of the present invention is suitable for treating a plurality of workpieces with a process atmosphere, and includes a furnace unit, a receiving unit provided in the furnace unit, and a stirring unit provided in the furnace unit, And an exhaust unit arranged on the stove unit.

該爐具單元包括一界定出一設置空間的外鍋件、一適用於調整所需溫度的控溫件,及一設置於該設置空間中並界定出一容置空間的內鍋件,該內鍋件具有至少一位於底部並連通該設置空間且適用於供該製程氣氛通過的第一氣體通道,及至少一位於頂部並連通該設置空間且適用於供該製程氣氛通過的第二氣體通道。 The stove unit includes an outer pot that defines an installation space, a temperature control member suitable for adjusting the required temperature, and an inner pot that is arranged in the installation space and defines an accommodating space. The pot has at least one first gas channel located at the bottom and communicating with the installation space and suitable for passing the process atmosphere, and at least one second gas channel located at the top and communicating with the installation space and suitable for passing the process atmosphere.

該容置單元包括至少一適用於容置所述工件且適用於供該製程氣氛通過的盛裝件,該至少一盛裝件具有一承接部,及一由該承接部周緣向上延伸的環繞部。 The accommodating unit includes at least one container suitable for accommodating the workpiece and suitable for passing the process atmosphere. The at least one container has a receiving part and a surrounding part extending upward from the periphery of the receiving part.

該攪拌單元包括一沿一朝向該容置單元之軸線而延伸 的主軸件、至少一徑向連接於該主軸件的撥動件,及一用以驅動該主軸件轉動該至少一撥動件撥動所述工件的驅動件。 The stirring unit includes an axis extending along an axis facing the containing unit The main shaft member, at least one toggle member radially connected to the main shaft member, and a driving member for driving the main shaft member to rotate the at least one toggle member to toggle the workpiece.

該抽風單元設置於該內鍋件的上方,用以使該製程氣氛在該容置空間、該至少一第一氣體通道,及該至少一第二氣體通道中構成循環流場。 The air exhaust unit is arranged above the inner pot to make the process atmosphere form a circulating flow field in the containing space, the at least one first gas channel, and the at least one second gas channel.

本發明之功效在於:藉由該爐具單元內部形成之連通該容置空間及該設置空間的該至少一第一氣體通道及該至少一第二氣體通道,並配合適用於容置多個工件且供該製程氣氛通過之該容置單元,當該抽風單元運轉時,將使得該製程氣氛通過該至少一盛裝件並與該等工件接觸,並在該爐具單元中形成該循環流場。於此同時,該驅動件將驅動該主軸件轉動並使該至少一撥動件撥動所述工件,配合均勻的該製程氣氛循環流場,提升每一該工件與該製程氣氛的反應面積。 The effect of the present invention is that the at least one first gas passage and the at least one second gas passage formed inside the stove unit communicate with the accommodating space and the installation space, and are adapted to accommodate multiple workpieces When the accommodating unit for the process atmosphere to pass through, when the exhaust unit is in operation, the process atmosphere will pass through the at least one container and contact the workpieces, and form the circulating flow field in the furnace unit. At the same time, the driving member drives the spindle member to rotate and causes the at least one toggle member to move the workpieces to match the uniform process atmosphere circulating flow field to increase the reaction area of each workpiece and the process atmosphere.

I:工件 I: Workpiece

A:製程氣氛 A: Process atmosphere

C:軸線 C: axis

1:爐具單元 1: Stove unit

11:外鍋件 11: Outer pot pieces

110:設置空間 110: Setting space

111:進氣孔 111: air inlet

112:出氣孔 112: vent hole

12:控溫件 12: Temperature control parts

13:內鍋件 13: inner pot

130:容置空間 130: accommodation space

131:第一氣體通道 131: First gas channel

132:第二氣體通道 132: Second gas channel

14:測壓件 14: pressure measuring parts

2:容置單元 2: containing unit

21:盛裝件 21: Costumes

211:承接部 211: Acceptance Department

212:環繞部 212: Surround

2121:第四氣體通道 2121: Fourth Gas Channel

21A:第一盛裝件 21A: The first decoration

21B:第二盛裝件 21B: The second decoration

21C:第三盛裝件 21C: The third decoration

21D:第四盛裝件 21D: The fourth decoration

22:內封抵件 22: inner seal

23:外封抵件 23: Outer envelope

231:第三氣體通道 231: Third Gas Channel

3:攪拌單元 3: mixing unit

31:主軸件 31: Spindle

311:軸桿部 311: Shaft

32:撥動件 32: Toggle

321:第一推桿部 321: first putter

322:第一推動部 322: First Promotion Department

323:第二推桿部 323: Second putter

324:第二推動部 324: Second Promotion Department

33:驅動件 33: Driver

4:抽風單元 4: Ventilation unit

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是一立體分解圖,說明本發明熱處理爐之一實施例;及圖2是一示意圖,說明製程氣氛在該實施例中流動的方式。 Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: FIG. 1 is a three-dimensional exploded view illustrating an embodiment of the heat treatment furnace of the present invention; and FIG. 2 is a schematic diagram illustrating The way the process atmosphere flows in this embodiment.

在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it should be noted that in the following description, similar elements are represented by the same numbers.

參閱圖1與圖2,本發明熱處理爐之一實施例,包含一爐具單元1、一設置於該爐具單元1中並適用於盛裝工件I的容置單元2、一設置於該爐具單元1中的攪拌單元3,及一設置於該爐具單元1上的抽風單元4。在進行詳細說明前,要先行說明的是,由於熱處理微小工件I通常是在強酸或是強鹼的製程環境,因此,前述之該爐具單元1、該容置單元2、該攪拌單元3,及該抽風單元4,較佳因應製程環境的不同來調整材質。具體來說,以下本實施例所述之該製程氣氛A,是屬於能夠腐蝕去除該等工件I表面氧化層的酸性氣體,且需要在高溫環境下進行,因此,本實施例是採用耐高溫且抗腐蝕的材質,然而並不以此為限。 1 and 2, an embodiment of the heat treatment furnace of the present invention includes a furnace unit 1, a containing unit 2 arranged in the furnace unit 1 and suitable for holding a workpiece I, and a furnace unit 2 arranged in the furnace The stirring unit 3 in the unit 1 and an exhaust unit 4 arranged on the stove unit 1. Before proceeding in detail, it should be explained first that since the heat treatment of the small workpiece I is usually in a strong acid or strong alkali process environment, the aforementioned stove unit 1, the containing unit 2, and the stirring unit 3, As for the exhaust unit 4, it is preferable to adjust the material according to the different manufacturing process environment. Specifically, the process atmosphere A described in this embodiment below is an acid gas that can corrode and remove the oxide layer on the surface of the workpieces I and needs to be performed in a high temperature environment. Therefore, this embodiment adopts high temperature resistance and Corrosion-resistant materials, but not limited to this.

該爐具單元1包括一界定出一設置空間110的外鍋件11、一適用於提供製程環境所需溫度的控溫件12、一設置於該設置空間110中並界定出一容置空間130的內鍋件13,及一設置於該外鍋件11並適用於檢測該製程氣氛A之氣壓的測壓件14。該外鍋件11具有一鄰近於該攪拌單元3下方並連通該設置空間110且適用於供該製程氣氛A進入之進氣孔111,及一鄰近於該攪拌單元3上方並連通該設置空間110且適用於供該製程氣氛A流出之出氣孔112。而 該內鍋件13具有多個位於底部並連通該設置空間110且適用於供該製程氣氛A通過的第一氣體通道131,及多個位於頂部並連通該設置空間110且適用於供該製程氣氛A通過的第二氣體通道132。在本實施例中,該測壓件14是設置在該出氣孔112旁,藉由檢測通過該出氣孔112的該製程氣氛A的氣壓,判斷該爐具單元1中的該製程氣氛A含量是否足夠,以此調整通過該進氣孔111及該出氣孔112的該製程氣氛A流率,來穩定該爐具單元1中該製程氣氛A含量的動態平衡。 The stove unit 1 includes an outer pot 11 that defines a setting space 110, a temperature control member 12 suitable for providing a temperature required by the process environment, and a setting space 110 that is arranged in the setting space 110 and defines an accommodating space 130 The inner pot 13 and a pressure measuring member 14 arranged on the outer pot 11 and suitable for detecting the air pressure of the process atmosphere A. The outer pot 11 has an air inlet 111 adjacent to the bottom of the stirring unit 3 and communicating with the installation space 110 and suitable for the process atmosphere A to enter, and an air inlet 111 adjacent to the top of the stirring unit 3 and communicating with the installation space 110 And it is suitable for the vent hole 112 for the process atmosphere A to flow out. and The inner pot 13 has a plurality of first gas channels 131 at the bottom and communicating with the installation space 110 and suitable for passing the process atmosphere A, and a plurality of first gas channels 131 at the top and communicating with the installation space 110 and suitable for the process atmosphere. A second gas passage 132 through. In this embodiment, the pressure measuring element 14 is arranged beside the air outlet 112, and by detecting the air pressure of the process atmosphere A passing through the air outlet 112, it is determined whether the content of the process atmosphere A in the furnace unit 1 is It is sufficient to adjust the flow rate of the process atmosphere A through the air inlet 111 and the air outlet 112 to stabilize the dynamic balance of the process atmosphere A content in the furnace unit 1.

該容置單元2設置在該內鍋件13之該容置空間130中,並包括至少一適用於容置該等工件I且適用於供該製程氣氛A通過的盛裝件21、至少一鄰近設置於該至少一盛裝件21且形狀大小實質與該每一承接部211相同的內封抵件22,及至少一由該軸線C徑向往該內鍋件13延伸而使形狀大小實質與該內鍋件13內徑相同並設置於該至少一盛裝件21上的外封抵件23。每一該盛裝件21具有一承接部211、一由該承接部211周緣向上延伸的環繞部212;而該至少一外封抵件23具有多個鄰近地圍繞該軸線C設置並適用於供該製程氣氛A通過之第三氣體通道231。每一該盛裝件21之該環繞部212具有多個連通該容置空間130並適用於供該製程氣氛A橫向通過之第四氣體通道2121,具體而言,該承接部211及該環繞部212為具有供氣體通過之氣孔的板材或是具有能夠承載工件I之 結構強度的篩網,因此能藉由所述篩網的無數細小孔洞,形成所述的第四氣體通道2121。無論如何,只要能夠承載該等工件I且能夠讓該製程氣氛A流通,即屬本發明之專利範圍,故不以上述為限。 The accommodating unit 2 is arranged in the accommodating space 130 of the inner pot 13 and includes at least one container 21 suitable for accommodating the workpieces I and suitable for passing the process atmosphere A, and at least one adjacently arranged On the at least one container 21 and the shape and size of each receiving portion 211 is substantially the same inner sealing member 22, and at least one radially extending from the axis C to the inner pot 13 so that the shape and size are substantially the same as the inner pot The member 13 has the same inner diameter and is arranged on the outer sealing member 23 on the at least one containing member 21. Each container 21 has a receiving portion 211 and a surrounding portion 212 extending upward from the periphery of the receiving portion 211; and the at least one outer sealing member 23 has a plurality of adjacently arranged around the axis C and is suitable for supplying the The third gas channel 231 through which the process atmosphere A passes. The surrounding portion 212 of each container 21 has a plurality of fourth gas channels 2121 communicating with the accommodating space 130 and suitable for the process atmosphere A to pass laterally, specifically, the receiving portion 211 and the surrounding portion 212 It is a plate with pores for gas to pass through or a plate capable of supporting the workpiece I The screen with structural strength can therefore form the fourth gas channel 2121 through the numerous small holes of the screen. In any case, as long as the workpieces I can be carried and the process atmosphere A can be circulated, it belongs to the scope of the patent of the present invention, so it is not limited to the above.

需要特別說明的是,所述盛裝件21的數量是四個,並可以彼此獨立放置且發揮功效,也可因應該等工件I的數量來進行疊置,在本實施例中,為了方便說明,以下將會把該等盛裝件21由下往上區分為彼此可脫離地疊置之第一盛裝件21A、第二盛裝件21B、第三盛裝件21C,及第四盛裝件21D,而前述之內封抵件22是分別設置在該第一盛裝件21A及該第三盛裝件21C下方,前述之外封抵件23則是分別設置在該第一盛裝件21A與該第二盛裝件21B之間,及該第三盛裝件21C與該第四盛裝件21D之間,然而並不以此為限,使用者可依照加工的產能需求調整該等盛裝件21的數量,以及該等內封抵件22及該等外封抵件23的設置位置。 It should be particularly noted that the number of the holding members 21 is four, and they can be placed independently of each other and have functions, or they can be stacked according to the number of workpieces I. In this embodiment, for the convenience of description, Hereinafter, the containers 21 will be divided into a first container 21A, a second container 21B, a third container 21C, and a fourth container 21D that are detachably stacked from bottom to top. The inner sealing member 22 is respectively arranged below the first container 21A and the third container 21C, and the aforementioned outer sealing member 23 is respectively arranged between the first container 21A and the second container 21B Between the third container 21C and the fourth container 21D, but not limited to this, the user can adjust the number of the container 21 and the inner seal according to the processing capacity requirements. The installation positions of the pieces 22 and the outer sealing and resisting pieces 23.

該攪拌單元3包括一沿一朝向該容置單元2之軸線C而延伸的主軸件31、至少一徑向連接於該主軸件31的撥動件32,及一用以驅動該主軸件31轉動該至少一撥動件32撥動所述工件I的驅動件33。其中,該主軸件31具有四分別設置於該等盛裝件21且彼此可脫離地卡接的軸桿部311;而所述撥動件32對應該等軸桿部311數量也是四個,每一撥動件32具有一由對應之該軸桿部311徑向往該環繞部212延伸的第一推桿部321、一設置於該第一推桿部 321遠離於該主軸件31之一端的第一推動部322、一由對應之該軸桿部311徑向以遠離該第一推桿部321的方向往該環繞部212延伸的第二推桿部323,及一設置於該第二推桿部323鄰近於該主軸件31之一端的第二推動部324。具體而言,該驅動件33是一與該主軸件31彼此嚙接的馬達。 The stirring unit 3 includes a main shaft member 31 extending along an axis C toward the accommodating unit 2, at least one dial member 32 radially connected to the main shaft member 31, and a driving member 31 for driving the main shaft member 31 to rotate The at least one toggle member 32 toggles the driving member 33 of the workpiece 1. Wherein, the main shaft member 31 has four shaft portions 311 respectively disposed on the holding members 21 and detachably clamped to each other; and the number of the toggle member 32 corresponding to the shaft portions 311 is also four, each The toggle member 32 has a first push rod portion 321 extending radially from the corresponding shaft portion 311 to the surrounding portion 212, and a first push rod portion 321 disposed on the first push rod portion 321 is away from the first pushing portion 322 at one end of the main shaft member 31, and a second pushing rod portion extending from the corresponding shaft portion 311 in a radial direction away from the first pushing rod portion 321 toward the surrounding portion 212 323, and a second pushing portion 324 disposed on the second pushing rod portion 323 adjacent to one end of the main shaft 31. Specifically, the driving member 33 is a motor that meshes with the main shaft member 31.

在本實施例中,該等軸桿部311及該等撥動件32均分別設置於該第一盛裝件21A、第二盛裝件21B、第三盛裝件21C,及第四盛裝件21D,並藉由彼此可脫離地連接的該等軸桿部311,當該驅動件33驅動設置於該第四盛裝件21D之該軸桿部311旋轉時,將會帶動下方之相連的該等軸桿部311一同使相連的該等撥動件32一同轉動來達成攪拌該等工件I的效果。且值得一提的是,每一軸桿部311均能和相連之個別盛裝件21獨立進行盛裝及攪拌的作業,並視需求進行該等軸桿部311的連接以及該等盛裝件21的疊置。 In this embodiment, the shaft portions 311 and the toggle members 32 are respectively disposed on the first container 21A, the second container 21B, the third container 21C, and the fourth container 21D, and With the shaft portions 311 detachably connected to each other, when the driving member 33 drives the shaft portion 311 provided in the fourth container 21D to rotate, it will drive the connected shaft portions below 311 rotates the connected toggle members 32 together to achieve the effect of stirring the workpieces I. And it is worth mentioning that each shaft portion 311 can independently carry out the operation of holding and stirring with the connected individual holding parts 21, and the connection of the shaft portions 311 and the stacking of the holding parts 21 are carried out as required. .

該抽風單元4設置於該內鍋件13的上方,用以經由該等第二氣體通道132向上抽引該內鍋件13中的該製程氣氛A,而會在該等第二氣體通道132形成一負壓,使得該容置空間130中的該製程氣氛A由下往上通過該第一盛裝件21A、該第二盛裝件21B、該第三盛裝件21C,及該第四盛裝件21D,通過該等第二氣體通道132後再經由設置空間110重新向下輸送至該等第一氣體通道131並進 入該容置空間130中,使得該爐具單元1內部形成一均勻循環的製程氣氛流場。 The air exhaust unit 4 is arranged above the inner pot 13 to draw the process atmosphere A in the inner pot 13 upward through the second gas passages 132, and will form in the second gas passages 132 A negative pressure causes the process atmosphere A in the containing space 130 to pass from bottom to top through the first container 21A, the second container 21B, the third container 21C, and the fourth container 21D, After passing through the second gas passages 132, it is transported downwards to the first gas passages 131 through the arrangement space 110 again. Into the accommodating space 130, a uniformly circulating process atmosphere flow field is formed inside the stove unit 1.

參閱圖2,以下將進一步說明本實施例製程氣氛流場的細部流動方式,當該製程氣氛A通過該等第一氣體通道131而進入該容置空間130中時,將會因為該抽風單元4所形成的負壓而向上移動,上升的過程中首先將會碰上設置於該第一盛裝件21A下方的該內封抵件22,而只能從該第一盛裝件21A之該環繞部212的第四氣體通道2121橫向進入再上升,並遇到設置於該第一盛裝件21A及該第二盛裝件21B之間的該外封抵件23而被阻斷由外緣上升的路徑,所以只能經由該外封抵件23位於該軸線C附近的該第三氣體通道231縱向上升並進入該第二盛裝件21B,並被設置於該第二盛裝件21B及該第三盛裝件21C之間的內封抵件22阻斷由中部上升的路徑,而只能夠經由該第二盛裝件21B之該第四氣體通道2121橫向流出並上升,在受到設置於該第三盛裝件21C及該第四盛裝件21D之間的該外封抵件23阻擋後,重新經由該第三盛裝件21C之該第四氣體通道2121橫向進入,並經由該外封抵件23位於軸線C附近的該第三氣體通道231縱向上升,最後再被該抽風單元4從該等第二氣體通道132抽出並重新經由該設置空間110向下推送至該等第一氣體通道131中。由上可知,該外封抵件23及該內封抵件22之間的大小關係,以及設置於該外封抵件23上的該等第三氣體通道 231,形成了控制該製程氣氛A流動的路徑,而為了提升該製程氣氛A在該等盛裝件21中橫向擴散的範圍,即需要增加該等第三氣體通道231及該等第四氣體通道2121之間的距離,而每一該第四氣體通道2121是設置於位在外緣之個別環繞部212,因此,所述之該等第三氣體通道231較佳是鄰近地設置在位於中間之該軸線C。 Referring to FIG. 2, the detailed flow method of the process atmosphere flow field of this embodiment will be further described below. When the process atmosphere A enters the accommodating space 130 through the first gas channels 131, it will be caused by the exhaust unit 4 The formed negative pressure moves upwards. During the ascending process, it will first hit the inner seal member 22 arranged below the first container 21A, and only from the surrounding portion 212 of the first container 21A The fourth gas channel 2121 enters laterally and rises again, and encounters the outer sealing member 23 provided between the first container 21A and the second container 21B, and is blocked from the path ascending from the outer edge, so The third gas passage 231, which is located near the axis C, can only rise longitudinally through the outer sealing member 23 and enter the second container 21B, and is arranged between the second container 21B and the third container 21C The inner sealing member 22 between the middle part blocks the path ascending from the middle part, and can only flow out and rise laterally through the fourth gas passage 2121 of the second container 21B, and is installed in the third container 21C and the second container 21C. After the outer sealing member 23 between the four containing members 21D is blocked, it enters laterally again through the fourth gas channel 2121 of the third containing member 21C, and passes through the outer sealing member 23 near the third axis C. The gas passage 231 rises longitudinally, and is finally drawn out from the second gas passages 132 by the exhaust unit 4 and pushed down into the first gas passages 131 through the setting space 110 again. It can be seen from the above that the size relationship between the outer sealing member 23 and the inner sealing member 22, and the third gas passages provided on the outer sealing member 23 231. A path for controlling the flow of the process atmosphere A is formed. In order to increase the range of the process atmosphere A spreading laterally in the containers 21, it is necessary to increase the third gas channels 231 and the fourth gas channels 2121 Each of the fourth gas passages 2121 is arranged at the individual surrounding portion 212 at the outer edge. Therefore, the third gas passages 231 are preferably arranged adjacently on the axis in the middle C.

需要強調的是,所述之該等外封抵件23及該等內封抵件22的設置方式,是為了改變該製程氣氛A在該內鍋件13中的流動路徑,來進一步提升該等工件I之表面與該製程氣氛A接觸的機會。而上述內容只是提供其中一種實施方式,使用者可依照自身需求,調整該等外封抵件23及該等內封抵件22的設置方式來調整該製程氣氛A流動的方向,無論如何,只要能夠供該製程氣氛A通過,即屬本發明之專利範圍,故不以上述為限。 It needs to be emphasized that the arrangement of the outer sealing members 23 and the inner sealing members 22 is to change the flow path of the process atmosphere A in the inner pot 13 to further improve the Opportunity for the surface of the workpiece I to contact the process atmosphere A. The above content only provides one of the implementation methods. The user can adjust the arrangement of the outer sealing members 23 and the inner sealing members 22 according to their own needs to adjust the flow direction of the process atmosphere A. In any case, as long as Being able to pass the process atmosphere A is within the scope of the patent of the present invention, so it is not limited to the above.

該製程氣氛A在該等盛裝件21之間流動的同時,該驅動件33也將驅動該主軸件31圍繞該軸線C旋轉,並帶動該第一推桿部321及該第二推桿部323以該軸線C為軸心旋轉,進而驅使該第一推動部322及該第二推動部324以大小不同的半徑同心旋轉,藉由遠離於該主軸件31之該第一推動部322,及鄰近於該主軸件31之該第二推動部324所能推動區域的差異,將會提升該等工件I在每一該盛裝件21中來回移動的路徑,進一步提升該等工件I之表面與該製程氣氛A接觸的機會。 While the process atmosphere A flows between the containing parts 21, the driving part 33 will also drive the spindle part 31 to rotate around the axis C, and drive the first push rod portion 321 and the second push rod portion 323 Rotate with the axis C as the axis, and then drive the first pushing portion 322 and the second pushing portion 324 to rotate concentrically with different radii, by the first pushing portion 322 away from the main shaft 31 and adjacent The difference in the pushing area of the second pushing portion 324 of the main shaft 31 will increase the path of the workpieces I moving back and forth in each of the holding members 21, and further improve the surface of the workpieces I and the process Atmosphere A chance to contact.

綜上所述,本發明熱處理爐,藉由該爐具單元1內部相配合形成之連通該容置空間130及該設置空間110的該等第一氣體通道131及該等第二氣體通道132,設置於該等盛裝件21之間的該等外封抵件23及該等內封抵件22,以及該等第三氣體通道231及該等第四氣體通道2121,限制該製程氣氛A的流動方向,使得該製程氣氛流場能夠均勻地充盈整個容置空間130。於此同時,該攪拌單元3之該驅動件33驅動該主軸件31轉動,帶動該等撥動件32進一步攪拌該等工件I,提升該等工件I之表面與該製程氣氛A接觸的機會,故確實能達成本發明之目的。 To sum up, the heat treatment furnace of the present invention uses the first gas passages 131 and the second gas passages 132 to communicate with the accommodating space 130 and the installation space 110 formed by the inside of the furnace unit 1. The outer sealing pieces 23 and the inner sealing pieces 22, and the third gas passages 231 and the fourth gas passages 2121, which are arranged between the containing pieces 21, restrict the flow of the process atmosphere A Direction, so that the process atmosphere flow field can evenly fill the entire containing space 130. At the same time, the driving member 33 of the stirring unit 3 drives the spindle member 31 to rotate, and drives the toggle members 32 to further agitate the workpieces I, increasing the chance of the surfaces of the workpieces I contacting the process atmosphere A. It can indeed achieve the purpose of the invention.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.

I:工件 I: Workpiece

C:軸線 C: axis

1:爐具單元 1: Stove unit

11:外鍋件 11: Outer pot pieces

110:設置空間 110: Setting space

111:進氣孔 111: air inlet

112:出氣孔 112: vent hole

13:內鍋件 13: inner pot

130:容置空間 130: accommodation space

131:第一氣體通道 131: First gas channel

132:第二氣體通道 132: Second gas channel

2:容置單元 2: containing unit

21:盛裝件 21: Costumes

211:承接部 211: Acceptance Department

212:環繞部 212: Surround

2121:第四氣體通道 2121: Fourth Gas Channel

21A:第一盛裝件 21A: The first decoration

21B:第二盛裝件 21B: The second decoration

21C:第三盛裝件 21C: The third decoration

21D:第四盛裝件 21D: The fourth decoration

22:內封抵件 22: inner seal

23:外封抵件 23: Outer envelope

231:第三氣體通道 231: Third Gas Channel

3:攪拌單元 3: mixing unit

31:主軸件 31: Spindle

311:軸桿部 311: Shaft

32:撥動件 32: Toggle

321:第一推桿部 321: first putter

322:第一推動部 322: First Promotion Department

323:第二推桿部 323: Second putter

324:第二推動部 324: Second Promotion Department

33:驅動件 33: Driver

4:抽風單元 4: Ventilation unit

Claims (7)

一種熱處理爐,適用於利用一製程氣氛處理多個工件,並包含:一爐具單元,包括一界定出一設置空間的外鍋件、一適用於調整所需溫度的控溫件,及一設置於該設置空間中並界定出一容置空間的內鍋件,該內鍋件具有至少一位於底部並連通該設置空間且適用於供該製程氣氛通過的第一氣體通道,及至少一位於頂部並連通該設置空間且適用於供該製程氣氛通過的第二氣體通道;一容置單元,設置於該容置空間中,並包括至少一適用於容置所述工件且適用於供該製程氣氛通過的盛裝件,該至少一盛裝件具有一承接部,及一由該承接部周緣向上延伸的環繞部;一攪拌單元,設置於該容置單元中,並包括一沿一朝向該容置單元之軸線而延伸的主軸件、至少一徑向連接於該主軸件的撥動件,及一用以驅動該主軸件轉動該至少一撥動件撥動所述工件的驅動件;及一抽風單元,設置於該內鍋件的上方,用以使該製程氣氛在該容置空間、該至少一第一氣體通道,及該至少一第二氣體通道中構成循環流場。 A heat treatment furnace is suitable for treating multiple workpieces with a process atmosphere, and includes: a stove unit, including an outer pot that defines a setting space, a temperature control part suitable for adjusting the required temperature, and a setting An inner pot that defines an accommodating space in the installation space. The inner pot has at least one first gas channel at the bottom and communicating with the installation space and suitable for the process atmosphere to pass through, and at least one at the top And connected to the installation space and suitable for the second gas passage for the process atmosphere to pass through; an accommodating unit is provided in the accommodating space, and includes at least one suitable for accommodating the workpiece and suitable for the process atmosphere The passing container, the at least one container has a receiving portion, and a surrounding portion extending upward from the periphery of the receiving portion; a stirring unit, arranged in the containing unit, and including a direction toward the containing unit A main shaft extending from the axis of the shaft, at least one toggle member radially connected to the main shaft, and a driving member for driving the main shaft to rotate the at least one toggle member to toggle the workpiece; and an air exhaust unit , Arranged above the inner pot to make the process atmosphere form a circulating flow field in the containing space, the at least one first gas channel, and the at least one second gas channel. 如請求項1所述的熱處理爐,其中,該攪拌單元之該撥動件具有一由該主軸件徑向往該環繞部延伸的第一推桿部、一設置於該第一推桿部遠離於該主軸件之一端的第一推動部、一由該主軸件徑向以遠離該第一推桿部的方向往 該環繞部延伸的第二推桿部,及一設置於該第二推桿部鄰近於該主軸件之一端的第二推動部。 The heat treatment furnace according to claim 1, wherein the toggle member of the stirring unit has a first push rod portion extending radially from the main shaft member to the surrounding portion, and a first push rod portion disposed away from The first pushing portion at one end of the main shaft member, a radial direction from the main shaft member away from the first push rod portion A second push rod part extending from the surrounding part, and a second push part arranged at an end of the second push rod part adjacent to the main shaft. 如請求項1所述的熱處理爐,其中,該容置單元還包括至少一鄰近設置於該至少一盛裝件的內封抵件,及至少一由該軸線徑向往該內鍋件延伸並設置於該至少一盛裝件上的外封抵件,該至少一外封抵件具有至少一鄰近地設置於該軸線的第三氣體通道。 The heat treatment furnace according to claim 1, wherein the accommodating unit further includes at least one inner sealing member adjacent to the at least one container, and at least one radially extending from the axis toward the inner pot and disposed in The outer sealing member on the at least one container, the at least one outer sealing member has at least one third gas channel adjacent to the axis. 如請求項3所述的熱處理爐,其中,該至少一內封抵件大小形狀與該承接部實質相同,而該至少一外封抵件大小形狀則與該內鍋件的內徑實質相同。 The heat treatment furnace according to claim 3, wherein the size and shape of the at least one inner sealing member is substantially the same as the receiving portion, and the size and shape of the at least one outer sealing member is substantially the same as the inner diameter of the inner pot member. 如請求項1所述的熱處理爐,其中,該至少一盛裝件之該環繞部具有至少一連通該容置空間並適用於供該製程氣氛橫向通過之第四氣體通道。 The heat treatment furnace according to claim 1, wherein the surrounding portion of the at least one container has at least one fourth gas channel communicating with the accommodating space and suitable for lateral passage of the process atmosphere. 如請求項1所述的熱處理爐,其中,該爐具單元之該外鍋件具有一鄰近於該攪拌單元下方並連通該設置空間且適用於供該製程氣氛進入之進氣孔,及一鄰近於該攪拌單元上方並連通該設置空間且適用於供該製程氣氛流出之出氣孔。 The heat treatment furnace according to claim 1, wherein the outer pot member of the stove unit has an air inlet adjacent to the bottom of the stirring unit and communicating with the installation space and suitable for entering the process atmosphere, and an adjacent It is above the stirring unit and communicates with the installation space and is suitable for vent holes for the process atmosphere to flow out. 如請求項6所述的熱處理爐,其中,該爐具單元還包括一設置於該外鍋件並適用於檢測該製程氣氛之氣壓的測壓件。 The heat treatment furnace according to claim 6, wherein the furnace unit further includes a pressure measuring part arranged on the outer pot and suitable for detecting the pressure of the process atmosphere.
TW108144902A 2019-12-09 2019-12-09 Heat treatment furnace TWI697564B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101353718A (en) * 2008-09-18 2009-01-28 东庵(天津)金属有限公司 Box type non-oxidation heat processing furnace
WO2011108546A1 (en) * 2010-03-02 2011-09-09 Jfeスチール株式会社 Blast furnace operation method, iron mill operation method, and method for utilizing a gas containing carbon oxides
TW201525147A (en) * 2013-09-30 2015-07-01 Jfe Steel Corp Control apparatus and control method of converter blowing equipment
CN107190131A (en) * 2017-07-28 2017-09-22 河南诺巴迪材料科技有限公司 Lengthen multi-temperature zone atmosphere heat treatment stove
US20180311613A1 (en) * 2015-11-04 2018-11-01 Danieli Corus B.V. Process and device for treating furnace gas

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101353718A (en) * 2008-09-18 2009-01-28 东庵(天津)金属有限公司 Box type non-oxidation heat processing furnace
WO2011108546A1 (en) * 2010-03-02 2011-09-09 Jfeスチール株式会社 Blast furnace operation method, iron mill operation method, and method for utilizing a gas containing carbon oxides
TW201525147A (en) * 2013-09-30 2015-07-01 Jfe Steel Corp Control apparatus and control method of converter blowing equipment
US20180311613A1 (en) * 2015-11-04 2018-11-01 Danieli Corus B.V. Process and device for treating furnace gas
CN107190131A (en) * 2017-07-28 2017-09-22 河南诺巴迪材料科技有限公司 Lengthen multi-temperature zone atmosphere heat treatment stove

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