TWI697564B - Heat treatment furnace - Google Patents
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- TWI697564B TWI697564B TW108144902A TW108144902A TWI697564B TW I697564 B TWI697564 B TW I697564B TW 108144902 A TW108144902 A TW 108144902A TW 108144902 A TW108144902 A TW 108144902A TW I697564 B TWI697564 B TW I697564B
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Abstract
Description
本發明是有關於一種工件加工裝置,特別是指一種熱處理爐。 The invention relates to a workpiece processing device, in particular to a heat treatment furnace.
科技發展至今,產業界對於微小機組零件的使用需求上升,而微小零件之製程的其中一道工法,即是將該等零件置於一具有腐蝕效果的該製程氣氛中,藉由該製程氣氛對於該等零件表面產生腐蝕作用,消除該等零件之氧化層後,才能進行下一道製程。 Since the development of science and technology, the industry’s demand for the use of components for micro-units has increased. One of the methods of the manufacturing process of micro-components is to place the parts in a process atmosphere with a corrosive effect. Wait for the surface of the parts to corrode and eliminate the oxide layer of the parts before proceeding to the next process.
然而,目前有關此熱處理工藝的技術,仍是停滯不前。由於考量到產能及效率,勢必需要批次同時處理多數個零件,但一定數量的該等零件在處理空間中將會彼此堆疊而相互遮蔽,倘若沒有經過妥善處理,該製程氣氛僅能夠接觸位於外層的零件,而沒辦法進入被堆埋於內層的零件中,因此,位於內層的零件必然沒辦法受到均勻的該製程氣氛處理,進而使得整體零件的品質不均,嚴重影響到產品的良率。 However, the current technology related to this heat treatment process is still stagnant. Due to capacity and efficiency considerations, it is necessary to process many parts in batches at the same time, but a certain number of these parts will be stacked on each other in the processing space and shield each other. If not properly processed, the process atmosphere can only touch the outer layer The parts that are buried in the inner layer cannot enter the parts that are buried in the inner layer. Therefore, the parts located in the inner layer must not be treated by the uniform atmosphere of the process, which in turn makes the quality of the overall parts uneven, which seriously affects the quality of the product. rate.
有鑒於上述同時處理多數所述零件時發生的問題,倘 若針對各種不同的零件皆設計對應的夾持治具,以供每一零件彼此排列設置,雖然可提升每一零件之表面與該製程氣氛接觸的機會,但是研發製造成本也會提升,且需要耗費人力來排列,同樣會連帶影響製造的成本。 In view of the above-mentioned problems when dealing with most of the parts mentioned above, if If corresponding clamping fixtures are designed for various parts, so that each part can be arranged and arranged with each other, although the chance of contact between the surface of each part and the process atmosphere can be improved, the R&D and manufacturing cost will also increase. And it requires labor to arrange, which will also affect the cost of manufacturing.
因此,本發明之目的,即在提供一種適用於各種微小零件,且能夠供該製程氣氛與微小零件均勻接觸的熱處理爐。 Therefore, the purpose of the present invention is to provide a heat treatment furnace that is suitable for various small parts and can provide the process atmosphere to uniformly contact the small parts.
於是,本發明熱處理爐,適用於利用一製程氣氛處理多個工件,並包含一爐具單元、一設置於該爐具單元中的容置單元、一設置於該爐具單元中的攪拌單元,及一設置於該爐具單元上的抽風單元。 Therefore, the heat treatment furnace of the present invention is suitable for treating a plurality of workpieces with a process atmosphere, and includes a furnace unit, a receiving unit provided in the furnace unit, and a stirring unit provided in the furnace unit, And an exhaust unit arranged on the stove unit.
該爐具單元包括一界定出一設置空間的外鍋件、一適用於調整所需溫度的控溫件,及一設置於該設置空間中並界定出一容置空間的內鍋件,該內鍋件具有至少一位於底部並連通該設置空間且適用於供該製程氣氛通過的第一氣體通道,及至少一位於頂部並連通該設置空間且適用於供該製程氣氛通過的第二氣體通道。 The stove unit includes an outer pot that defines an installation space, a temperature control member suitable for adjusting the required temperature, and an inner pot that is arranged in the installation space and defines an accommodating space. The pot has at least one first gas channel located at the bottom and communicating with the installation space and suitable for passing the process atmosphere, and at least one second gas channel located at the top and communicating with the installation space and suitable for passing the process atmosphere.
該容置單元包括至少一適用於容置所述工件且適用於供該製程氣氛通過的盛裝件,該至少一盛裝件具有一承接部,及一由該承接部周緣向上延伸的環繞部。 The accommodating unit includes at least one container suitable for accommodating the workpiece and suitable for passing the process atmosphere. The at least one container has a receiving part and a surrounding part extending upward from the periphery of the receiving part.
該攪拌單元包括一沿一朝向該容置單元之軸線而延伸 的主軸件、至少一徑向連接於該主軸件的撥動件,及一用以驅動該主軸件轉動該至少一撥動件撥動所述工件的驅動件。 The stirring unit includes an axis extending along an axis facing the containing unit The main shaft member, at least one toggle member radially connected to the main shaft member, and a driving member for driving the main shaft member to rotate the at least one toggle member to toggle the workpiece.
該抽風單元設置於該內鍋件的上方,用以使該製程氣氛在該容置空間、該至少一第一氣體通道,及該至少一第二氣體通道中構成循環流場。 The air exhaust unit is arranged above the inner pot to make the process atmosphere form a circulating flow field in the containing space, the at least one first gas channel, and the at least one second gas channel.
本發明之功效在於:藉由該爐具單元內部形成之連通該容置空間及該設置空間的該至少一第一氣體通道及該至少一第二氣體通道,並配合適用於容置多個工件且供該製程氣氛通過之該容置單元,當該抽風單元運轉時,將使得該製程氣氛通過該至少一盛裝件並與該等工件接觸,並在該爐具單元中形成該循環流場。於此同時,該驅動件將驅動該主軸件轉動並使該至少一撥動件撥動所述工件,配合均勻的該製程氣氛循環流場,提升每一該工件與該製程氣氛的反應面積。 The effect of the present invention is that the at least one first gas passage and the at least one second gas passage formed inside the stove unit communicate with the accommodating space and the installation space, and are adapted to accommodate multiple workpieces When the accommodating unit for the process atmosphere to pass through, when the exhaust unit is in operation, the process atmosphere will pass through the at least one container and contact the workpieces, and form the circulating flow field in the furnace unit. At the same time, the driving member drives the spindle member to rotate and causes the at least one toggle member to move the workpieces to match the uniform process atmosphere circulating flow field to increase the reaction area of each workpiece and the process atmosphere.
I:工件 I: Workpiece
A:製程氣氛 A: Process atmosphere
C:軸線 C: axis
1:爐具單元 1: Stove unit
11:外鍋件 11: Outer pot pieces
110:設置空間 110: Setting space
111:進氣孔 111: air inlet
112:出氣孔 112: vent hole
12:控溫件 12: Temperature control parts
13:內鍋件 13: inner pot
130:容置空間 130: accommodation space
131:第一氣體通道 131: First gas channel
132:第二氣體通道 132: Second gas channel
14:測壓件 14: pressure measuring parts
2:容置單元 2: containing unit
21:盛裝件 21: Costumes
211:承接部 211: Acceptance Department
212:環繞部 212: Surround
2121:第四氣體通道 2121: Fourth Gas Channel
21A:第一盛裝件 21A: The first decoration
21B:第二盛裝件 21B: The second decoration
21C:第三盛裝件 21C: The third decoration
21D:第四盛裝件 21D: The fourth decoration
22:內封抵件 22: inner seal
23:外封抵件 23: Outer envelope
231:第三氣體通道 231: Third Gas Channel
3:攪拌單元 3: mixing unit
31:主軸件 31: Spindle
311:軸桿部 311: Shaft
32:撥動件 32: Toggle
321:第一推桿部 321: first putter
322:第一推動部 322: First Promotion Department
323:第二推桿部 323: Second putter
324:第二推動部 324: Second Promotion Department
33:驅動件 33: Driver
4:抽風單元 4: Ventilation unit
本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是一立體分解圖,說明本發明熱處理爐之一實施例;及圖2是一示意圖,說明製程氣氛在該實施例中流動的方式。 Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: FIG. 1 is a three-dimensional exploded view illustrating an embodiment of the heat treatment furnace of the present invention; and FIG. 2 is a schematic diagram illustrating The way the process atmosphere flows in this embodiment.
在本發明被詳細描述之前,應當注意在以下的說明內容中,類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it should be noted that in the following description, similar elements are represented by the same numbers.
參閱圖1與圖2,本發明熱處理爐之一實施例,包含一爐具單元1、一設置於該爐具單元1中並適用於盛裝工件I的容置單元2、一設置於該爐具單元1中的攪拌單元3,及一設置於該爐具單元1上的抽風單元4。在進行詳細說明前,要先行說明的是,由於熱處理微小工件I通常是在強酸或是強鹼的製程環境,因此,前述之該爐具單元1、該容置單元2、該攪拌單元3,及該抽風單元4,較佳因應製程環境的不同來調整材質。具體來說,以下本實施例所述之該製程氣氛A,是屬於能夠腐蝕去除該等工件I表面氧化層的酸性氣體,且需要在高溫環境下進行,因此,本實施例是採用耐高溫且抗腐蝕的材質,然而並不以此為限。
1 and 2, an embodiment of the heat treatment furnace of the present invention includes a
該爐具單元1包括一界定出一設置空間110的外鍋件11、一適用於提供製程環境所需溫度的控溫件12、一設置於該設置空間110中並界定出一容置空間130的內鍋件13,及一設置於該外鍋件11並適用於檢測該製程氣氛A之氣壓的測壓件14。該外鍋件11具有一鄰近於該攪拌單元3下方並連通該設置空間110且適用於供該製程氣氛A進入之進氣孔111,及一鄰近於該攪拌單元3上方並連通該設置空間110且適用於供該製程氣氛A流出之出氣孔112。而
該內鍋件13具有多個位於底部並連通該設置空間110且適用於供該製程氣氛A通過的第一氣體通道131,及多個位於頂部並連通該設置空間110且適用於供該製程氣氛A通過的第二氣體通道132。在本實施例中,該測壓件14是設置在該出氣孔112旁,藉由檢測通過該出氣孔112的該製程氣氛A的氣壓,判斷該爐具單元1中的該製程氣氛A含量是否足夠,以此調整通過該進氣孔111及該出氣孔112的該製程氣氛A流率,來穩定該爐具單元1中該製程氣氛A含量的動態平衡。
The
該容置單元2設置在該內鍋件13之該容置空間130中,並包括至少一適用於容置該等工件I且適用於供該製程氣氛A通過的盛裝件21、至少一鄰近設置於該至少一盛裝件21且形狀大小實質與該每一承接部211相同的內封抵件22,及至少一由該軸線C徑向往該內鍋件13延伸而使形狀大小實質與該內鍋件13內徑相同並設置於該至少一盛裝件21上的外封抵件23。每一該盛裝件21具有一承接部211、一由該承接部211周緣向上延伸的環繞部212;而該至少一外封抵件23具有多個鄰近地圍繞該軸線C設置並適用於供該製程氣氛A通過之第三氣體通道231。每一該盛裝件21之該環繞部212具有多個連通該容置空間130並適用於供該製程氣氛A橫向通過之第四氣體通道2121,具體而言,該承接部211及該環繞部212為具有供氣體通過之氣孔的板材或是具有能夠承載工件I之
結構強度的篩網,因此能藉由所述篩網的無數細小孔洞,形成所述的第四氣體通道2121。無論如何,只要能夠承載該等工件I且能夠讓該製程氣氛A流通,即屬本發明之專利範圍,故不以上述為限。
The
需要特別說明的是,所述盛裝件21的數量是四個,並可以彼此獨立放置且發揮功效,也可因應該等工件I的數量來進行疊置,在本實施例中,為了方便說明,以下將會把該等盛裝件21由下往上區分為彼此可脫離地疊置之第一盛裝件21A、第二盛裝件21B、第三盛裝件21C,及第四盛裝件21D,而前述之內封抵件22是分別設置在該第一盛裝件21A及該第三盛裝件21C下方,前述之外封抵件23則是分別設置在該第一盛裝件21A與該第二盛裝件21B之間,及該第三盛裝件21C與該第四盛裝件21D之間,然而並不以此為限,使用者可依照加工的產能需求調整該等盛裝件21的數量,以及該等內封抵件22及該等外封抵件23的設置位置。
It should be particularly noted that the number of the holding
該攪拌單元3包括一沿一朝向該容置單元2之軸線C而延伸的主軸件31、至少一徑向連接於該主軸件31的撥動件32,及一用以驅動該主軸件31轉動該至少一撥動件32撥動所述工件I的驅動件33。其中,該主軸件31具有四分別設置於該等盛裝件21且彼此可脫離地卡接的軸桿部311;而所述撥動件32對應該等軸桿部311數量也是四個,每一撥動件32具有一由對應之該軸桿部311徑向往該環繞部212延伸的第一推桿部321、一設置於該第一推桿部
321遠離於該主軸件31之一端的第一推動部322、一由對應之該軸桿部311徑向以遠離該第一推桿部321的方向往該環繞部212延伸的第二推桿部323,及一設置於該第二推桿部323鄰近於該主軸件31之一端的第二推動部324。具體而言,該驅動件33是一與該主軸件31彼此嚙接的馬達。
The stirring
在本實施例中,該等軸桿部311及該等撥動件32均分別設置於該第一盛裝件21A、第二盛裝件21B、第三盛裝件21C,及第四盛裝件21D,並藉由彼此可脫離地連接的該等軸桿部311,當該驅動件33驅動設置於該第四盛裝件21D之該軸桿部311旋轉時,將會帶動下方之相連的該等軸桿部311一同使相連的該等撥動件32一同轉動來達成攪拌該等工件I的效果。且值得一提的是,每一軸桿部311均能和相連之個別盛裝件21獨立進行盛裝及攪拌的作業,並視需求進行該等軸桿部311的連接以及該等盛裝件21的疊置。
In this embodiment, the
該抽風單元4設置於該內鍋件13的上方,用以經由該等第二氣體通道132向上抽引該內鍋件13中的該製程氣氛A,而會在該等第二氣體通道132形成一負壓,使得該容置空間130中的該製程氣氛A由下往上通過該第一盛裝件21A、該第二盛裝件21B、該第三盛裝件21C,及該第四盛裝件21D,通過該等第二氣體通道132後再經由設置空間110重新向下輸送至該等第一氣體通道131並進
入該容置空間130中,使得該爐具單元1內部形成一均勻循環的製程氣氛流場。
The
參閱圖2,以下將進一步說明本實施例製程氣氛流場的細部流動方式,當該製程氣氛A通過該等第一氣體通道131而進入該容置空間130中時,將會因為該抽風單元4所形成的負壓而向上移動,上升的過程中首先將會碰上設置於該第一盛裝件21A下方的該內封抵件22,而只能從該第一盛裝件21A之該環繞部212的第四氣體通道2121橫向進入再上升,並遇到設置於該第一盛裝件21A及該第二盛裝件21B之間的該外封抵件23而被阻斷由外緣上升的路徑,所以只能經由該外封抵件23位於該軸線C附近的該第三氣體通道231縱向上升並進入該第二盛裝件21B,並被設置於該第二盛裝件21B及該第三盛裝件21C之間的內封抵件22阻斷由中部上升的路徑,而只能夠經由該第二盛裝件21B之該第四氣體通道2121橫向流出並上升,在受到設置於該第三盛裝件21C及該第四盛裝件21D之間的該外封抵件23阻擋後,重新經由該第三盛裝件21C之該第四氣體通道2121橫向進入,並經由該外封抵件23位於軸線C附近的該第三氣體通道231縱向上升,最後再被該抽風單元4從該等第二氣體通道132抽出並重新經由該設置空間110向下推送至該等第一氣體通道131中。由上可知,該外封抵件23及該內封抵件22之間的大小關係,以及設置於該外封抵件23上的該等第三氣體通道
231,形成了控制該製程氣氛A流動的路徑,而為了提升該製程氣氛A在該等盛裝件21中橫向擴散的範圍,即需要增加該等第三氣體通道231及該等第四氣體通道2121之間的距離,而每一該第四氣體通道2121是設置於位在外緣之個別環繞部212,因此,所述之該等第三氣體通道231較佳是鄰近地設置在位於中間之該軸線C。
Referring to FIG. 2, the detailed flow method of the process atmosphere flow field of this embodiment will be further described below. When the process atmosphere A enters the
需要強調的是,所述之該等外封抵件23及該等內封抵件22的設置方式,是為了改變該製程氣氛A在該內鍋件13中的流動路徑,來進一步提升該等工件I之表面與該製程氣氛A接觸的機會。而上述內容只是提供其中一種實施方式,使用者可依照自身需求,調整該等外封抵件23及該等內封抵件22的設置方式來調整該製程氣氛A流動的方向,無論如何,只要能夠供該製程氣氛A通過,即屬本發明之專利範圍,故不以上述為限。
It needs to be emphasized that the arrangement of the
該製程氣氛A在該等盛裝件21之間流動的同時,該驅動件33也將驅動該主軸件31圍繞該軸線C旋轉,並帶動該第一推桿部321及該第二推桿部323以該軸線C為軸心旋轉,進而驅使該第一推動部322及該第二推動部324以大小不同的半徑同心旋轉,藉由遠離於該主軸件31之該第一推動部322,及鄰近於該主軸件31之該第二推動部324所能推動區域的差異,將會提升該等工件I在每一該盛裝件21中來回移動的路徑,進一步提升該等工件I之表面與該製程氣氛A接觸的機會。
While the process atmosphere A flows between the containing
綜上所述,本發明熱處理爐,藉由該爐具單元1內部相配合形成之連通該容置空間130及該設置空間110的該等第一氣體通道131及該等第二氣體通道132,設置於該等盛裝件21之間的該等外封抵件23及該等內封抵件22,以及該等第三氣體通道231及該等第四氣體通道2121,限制該製程氣氛A的流動方向,使得該製程氣氛流場能夠均勻地充盈整個容置空間130。於此同時,該攪拌單元3之該驅動件33驅動該主軸件31轉動,帶動該等撥動件32進一步攪拌該等工件I,提升該等工件I之表面與該製程氣氛A接觸的機會,故確實能達成本發明之目的。
To sum up, the heat treatment furnace of the present invention uses the
惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited by this, all simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification still belong to This invention patent covers the scope.
I:工件 I: Workpiece
C:軸線 C: axis
1:爐具單元 1: Stove unit
11:外鍋件 11: Outer pot pieces
110:設置空間 110: Setting space
111:進氣孔 111: air inlet
112:出氣孔 112: vent hole
13:內鍋件 13: inner pot
130:容置空間 130: accommodation space
131:第一氣體通道 131: First gas channel
132:第二氣體通道 132: Second gas channel
2:容置單元 2: containing unit
21:盛裝件 21: Costumes
211:承接部 211: Acceptance Department
212:環繞部 212: Surround
2121:第四氣體通道 2121: Fourth Gas Channel
21A:第一盛裝件 21A: The first decoration
21B:第二盛裝件 21B: The second decoration
21C:第三盛裝件 21C: The third decoration
21D:第四盛裝件 21D: The fourth decoration
22:內封抵件 22: inner seal
23:外封抵件 23: Outer envelope
231:第三氣體通道 231: Third Gas Channel
3:攪拌單元 3: mixing unit
31:主軸件 31: Spindle
311:軸桿部 311: Shaft
32:撥動件 32: Toggle
321:第一推桿部 321: first putter
322:第一推動部 322: First Promotion Department
323:第二推桿部 323: Second putter
324:第二推動部 324: Second Promotion Department
33:驅動件 33: Driver
4:抽風單元 4: Ventilation unit
Claims (7)
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TW108144902A TWI697564B (en) | 2019-12-09 | 2019-12-09 | Heat treatment furnace |
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TWI697564B true TWI697564B (en) | 2020-07-01 |
TW202122593A TW202122593A (en) | 2021-06-16 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101353718A (en) * | 2008-09-18 | 2009-01-28 | 东庵(天津)金属有限公司 | Box type non-oxidation heat processing furnace |
WO2011108546A1 (en) * | 2010-03-02 | 2011-09-09 | Jfeスチール株式会社 | Blast furnace operation method, iron mill operation method, and method for utilizing a gas containing carbon oxides |
TW201525147A (en) * | 2013-09-30 | 2015-07-01 | Jfe Steel Corp | Control apparatus and control method of converter blowing equipment |
CN107190131A (en) * | 2017-07-28 | 2017-09-22 | 河南诺巴迪材料科技有限公司 | Lengthen multi-temperature zone atmosphere heat treatment stove |
US20180311613A1 (en) * | 2015-11-04 | 2018-11-01 | Danieli Corus B.V. | Process and device for treating furnace gas |
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2019
- 2019-12-09 TW TW108144902A patent/TWI697564B/en active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101353718A (en) * | 2008-09-18 | 2009-01-28 | 东庵(天津)金属有限公司 | Box type non-oxidation heat processing furnace |
WO2011108546A1 (en) * | 2010-03-02 | 2011-09-09 | Jfeスチール株式会社 | Blast furnace operation method, iron mill operation method, and method for utilizing a gas containing carbon oxides |
TW201525147A (en) * | 2013-09-30 | 2015-07-01 | Jfe Steel Corp | Control apparatus and control method of converter blowing equipment |
US20180311613A1 (en) * | 2015-11-04 | 2018-11-01 | Danieli Corus B.V. | Process and device for treating furnace gas |
CN107190131A (en) * | 2017-07-28 | 2017-09-22 | 河南诺巴迪材料科技有限公司 | Lengthen multi-temperature zone atmosphere heat treatment stove |
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