CN203721682U - Heat treatment device capable of realizing fast air cooling - Google Patents
Heat treatment device capable of realizing fast air cooling Download PDFInfo
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- CN203721682U CN203721682U CN201420074182.2U CN201420074182U CN203721682U CN 203721682 U CN203721682 U CN 203721682U CN 201420074182 U CN201420074182 U CN 201420074182U CN 203721682 U CN203721682 U CN 203721682U
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- air
- wall
- annealing device
- cooled fast
- heater
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Abstract
The utility model provides a heat treatment device capable of realizing fast air cooling. The heat treatment device comprises a furnace body. The furnace body is provided with an inner wall, an outer wall, and a connection plate. Bottom portions of the inner wall and the outer wall are provided with an air inlet. The connection plate is used to connect the inner wall and the outer wall. The connection plate is provided with a plurality of through holes for airflow to pass through. The top portion of the furnace body is provided with a detachable air exhaust device. The air exhaust device is provided with at least one air outlet for the airflow to pass through. The air inlet is communicated with the air outlet. According to the utility model, an interlayer for the air ventilation of the inner and outer walls is arranged on the furnace body, the bottom portions of the inner wall and the outer wall are not connected to form an air inlet, and the top portion of the furnace body is provided with a detachable air exhaust device, so in the furnace body cooling process, cold air is sent into the interlayer of the inner and outer walls and exhausted to the air outlet, so the effect of quickening the furnace body cooling process can be realized.
Description
Technical field
The utility model relates to a kind of heat treatment equipment, specifically, relates to a kind of annealing device that can be air-cooled fast.
Background technology
In the Technology for Heating Processing of semiconductor crystal wafer, rapid thermal treatment (RTP) is one of critical process during semiconductor is manufactured, in technical process, can rise to fast high temperature, operating temperature range contains 500～1100 DEG C, after technique finishes, wafer after the high temperature anneal must first be lowered the temperature, and arrives after normal temperature, passes back on slide holder.
For make annealing device by technological requirement fast cooling to target temperature, require body of heater to possess fast cooling structure, existing annealing device does not possess the function of fast cooling, cause technique and course of processing inefficiency, percent defective high, be unfavorable for heat treated continuity and success rate, therefore, research and develop a kind of annealing device that can be air-cooled fast and become those skilled in the art's problem demanding prompt solution.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of annealing device that can be air-cooled fast, makes this annealing device possess the function of fast cooling, improves process efficiency.
In order to solve the problems of the technologies described above, the utility model provides a kind of annealing device that can be air-cooled fast, comprise body of heater, described body of heater is provided with inwall, outer wall, connecting plate, the bottom of described inwall and described outer wall is provided with air intake vent, described connecting plate is used for connecting described inwall and described outer wall, and described connecting plate is provided with the through hole that some air feed stream passes through; The top of described body of heater is provided with dismountable air exhausting device, and described air exhausting device is provided with the exhaust outlet that at least one air feed stream passes through, and described air intake vent is communicated with described exhaust outlet.
Preferably, described air exhausting device comprises the top change and the bottom retainer ring that are ring bodies; Wherein, described top change upside is provided with the first rotation limit of extending to ring wall inner side, and described exhaust outlet is located on described top change lateral wall; Described bottom retainer ring upside is provided with the second rotation limit of extending to ring wall outside; The space air feed stream that is provided with default spacing between described bottom retainer ring lateral wall and described top change madial wall passes through, and the change of described top can horizontally rotate with respect to bottom retainer ring.
Preferably, described bottom retainer ring downside is provided with to retainer ring body inner side or/and the fixed edge that extend in outside, and the top of described fixed edge and described body of heater removably connects.
Preferably, the described second edge that rotates limit is provided with downward bending edge.
Preferably, described exhaust outlet connects exhaust duct and heat sink successively.
Preferably, described heat sink comprises successively the valve, heat exchanger and the blower fan that connect, and heat exchanger is or/and described blower fan described in described valve control.
Preferably, described inboard wall of furnace body or outer wall are provided with cooling water channel array, with so that cooling water by reducing the temperature of described inwall or outer wall.
Preferably, described cooling water channel array is that isodensity distributes.
Preferably, described exhaust outlet is multiple, and is uniformly distributed along the outer wall of described air exhausting device.
Preferably, described connecting plate is circulus, and described connecting plate welds with described inwall and described outer wall respectively.
Compared with existing scheme, the utility model by being provided with the interlayer of inside and outside wall for ventilating on body of heater, and the bottom of inwall and outer wall is not connected to become the entrance of wind, at the top of body of heater, dismountable air exhausting device is set.In the process of body of heater cooling, in the interlayer of inside and outside wall, pass into cold wind, dispatch, to exhaust outlet, is played the effect of accelerating body of heater cooling.Further, be provided with cooling water channel array by inboard wall of furnace body or outer wall, with so that cooling water by reducing the temperature of described inwall or outer wall.
Brief description of the drawings
In order to be illustrated more clearly in the technical scheme in the utility model embodiment, to the accompanying drawing of required use in embodiment be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the cutaway view of the utility model annealing device;
Fig. 2 is the structural representation of the utility model air exhausting device;
Fig. 3 is the structural representation that the utility model is provided with the annealing device of air exhausting device;
Fig. 4 is the structural representation that the utility model is removed the annealing device of air exhausting device.
Number in the figure is described as follows:
1, body of heater; 2, inwall; 3, outer wall; 4, connecting plate; 5, air intake vent; 6, through hole; 7, air exhausting device; 8, exhaust outlet; 9, top change; 10, bottom retainer ring; 11, first rotate limit; 12, second rotate limit; 13, fixed edge; 14, heat-insulation layer; 15, heater strip; 16, process duct; 17, wafer; 18, heat-preservation cylinder; 19, thermocouple; 20, stove silk lead-in wire.
Embodiment
Below will coordinate graphic and embodiment to describe execution mode of the present utility model in detail, and by this utility model implementation procedure how application technology means solve technical problem and reach technology effect can be fully understood and be implemented according to this.
As shown in Figures 1 to 4, the utility model provides a kind of annealing device that can be air-cooled fast, comprise body of heater 1, described body of heater 1 is provided with inwall 2, outer wall 3, connecting plate 4, described inwall 2 is provided with air intake vent 5 with the bottom of described outer wall 3, described connecting plate 4 is for connecting described inwall 2 and described outer wall 3, and described connecting plate 4 is provided with the through hole 6 that some air feed stream passes through; The top of described body of heater 1 is provided with dismountable air exhausting device 7, and described air exhausting device 7 is provided with the exhaust outlet 8 that at least one air feed stream passes through, and described air intake vent 5 is communicated with described exhaust outlet 8.Described connecting plate 4 is circulus, and described connecting plate 4 welds with described inwall 2 and described outer wall 3 respectively.
By be provided with the interlayer of inside and outside wall for ventilating on body of heater 1, the bottom of inwall 2 and outer wall 3 is not connected to become the entrance of wind, and dismountable air exhausting device 7 is set at the top of body of heater 1.In the process of body of heater cooling, in the interlayer of inside and outside wall, pass into cold wind, dispatch, to exhaust outlet 8, is played and is accelerated the effect that body of heater 1 is lowered the temperature.
In order further to strengthen cooling effect, described body of heater 1 inwall 2 or outer wall 3 are provided with cooling water channel array (not shown), with so that cooling water by reducing the temperature of described inwall 2 or outer wall 3.Described cooling water channel array is that isodensity distributes.
As shown in Figure 1, body of heater 1 comprises inwall 2 and outer wall 3, the top of body of heater 1 is provided with air exhausting device 7, in body of heater 1, be provided with the brilliant boat for carrying wafer 17, described brilliant boat is arranged on the heat-preservation cylinder 18 of below, between wafer 17 and body of heater 1, is provided with process duct 16, described process duct 16 is hood-shaped, the reaction environment of wafer 17 is sealed, and body of heater 1 madial wall is provided with heat-insulation layer 14, on described heat-insulation layer 14, is wound around heater strip 15.
As shown in Figure 3, the outer wall of body of heater is provided with stove silk lead-in wire 20 and thermocouple 19 on longitudinally, in order to ensure the sealing of the interlayer between inside and outside wall, adopt encapsulant that the fixing clearance at stove silk lead-in wire 20 and thermocouple place 19 is sealed and filled up, described encapsulant is preferably metal material.
As shown in Figure 4, Fig. 4 is the body of heater that removes top air exhausting device, at the top of body of heater 1, be provided with connecting plate 4 and be used for connecting inside and outside wall, connecting plate 4 is provided with some through holes 6, and in the time that body of heater 1 is lowered the temperature, the cooling blast entering from air intake vent 5 is through the through hole 6 of described connecting plate 4, enter in air exhausting device 7, after air exhausting device 7 is collected, enter exhaust duct (not providing figure) from exhaust outlet 8.Described exhaust duct is connected with heat sink; Described heat sink comprises successively the valve, heat exchanger and the blower fan that connect, and heat exchanger is or/and described blower fan described in described valve control.
As shown in Figure 2, described air exhausting device 7 comprises the top change 9 and the bottom retainer ring 10 that are ring bodies; Wherein, change 9 upsides in described top are provided with the first rotation limit 11 of extending to ring wall inner side, and described exhaust outlet 8 is located on described top change 9 lateral walls; Described bottom retainer ring 10 upsides are provided with the second rotation limit 12 of extending to ring wall outside; The space air feed stream that is provided with default spacing between described bottom retainer ring 10 lateral walls and described top change 9 madial walls passes through, and described top change 9 can horizontally rotate with respect to bottom retainer ring 10.Rotate in order further to strengthen first the fluency rotating between limit 11 and the second rotation limit 12, reduce friction, the described second edge that rotates limit 12 is provided with downward bending edge.
Air-flow enters from the space between two rings of air exhausting device 7, then enters exhaust duct through exhaust outlet 8; Top change 9 and bottom retainer ring 10 form an entrance in the bottom of air exhausting device, communicate with exhaust outlet 8.
Wherein, described bottom retainer ring 10 downsides are provided with to ring body inner side or/and the fixed edge 13 that extend in outside, and described fixed edge 13 is provided with fixture for fixing described bottom retainer ring 10.Described fixture comprises bolt, nut, is provided with the through hole of some quantity on described fixed edge 13, and the aperture of described through hole coordinates with the external diameter of bolt.The utility model by solid bottom retainer ring 10, makes top change 9 can horizontally rotate with respect to bottom retainer ring 10, makes in the change of top 9 exhaust outlet 8 can be turned to optional position, and exhaust outlet 8 can be docked with exhaust duct at an arbitrary position.
As shown in Figure 2, the exhaust outlet 8 of top change 9 lateral walls is at least one, when exhaust outlet 8 is while being multiple, is uniformly distributed or uneven distribution along described top change 9 lateral wall horizontal directions, and exhaust outlet 8 can be docked with exhaust duct at an arbitrary position.Wherein, described exhaust outlet 8 is provided with dismountable air draft lid, air draft lid can be connected with exhaust outlet 8 by some screws.Described top change 9 and described bottom retainer ring 10 are respectively stainless steel material integrative-structure.
Above-mentioned explanation illustrates and has described some preferred embodiments of the present utility model, but as previously mentioned, be to be understood that the utility model is not limited to disclosed form herein, should not regard the eliminating to other embodiment as, and can be used for various other combinations, amendment and environment, and can, in utility model contemplated scope described herein, change by technology or the knowledge of above-mentioned instruction or association area.And the change that those skilled in the art carry out and variation do not depart from spirit and scope of the present utility model, all should be in the protection range of the utility model claims.
Claims (10)
- One kind can be air-cooled fast annealing device, comprise body of heater, it is characterized in that, described body of heater is provided with inwall, outer wall, connecting plate, the bottom of described inwall and described outer wall is provided with air intake vent, described connecting plate is used for connecting described inwall and described outer wall, and described connecting plate is provided with the through hole that some air feed stream passes through; The top of described body of heater is provided with dismountable air exhausting device, and described air exhausting device is provided with the exhaust outlet that at least one air feed stream passes through, and described air intake vent is communicated with described exhaust outlet.
- 2. annealing device that can be air-cooled fast according to claim 1, is characterized in that, described air exhausting device comprises the top change and the bottom retainer ring that are ring bodies; Wherein, described top change upside is provided with the first rotation limit of extending to ring wall inner side, and described exhaust outlet is located on described top change lateral wall; Described bottom retainer ring upside is provided with the second rotation limit of extending to ring wall outside; The space air feed stream that is provided with default spacing between described bottom retainer ring lateral wall and described top change madial wall passes through, and the change of described top can horizontally rotate with respect to bottom retainer ring.
- 3. annealing device that can be air-cooled fast according to claim 2, is characterized in that, described bottom retainer ring downside is provided with to retainer ring body inner side or/and the fixed edge that extend in outside, and the top of described fixed edge and described body of heater removably connects.
- 4. annealing device that can be air-cooled fast according to claim 2, is characterized in that, the described second edge that rotates limit is provided with downward bending edge.
- 5. annealing device that can be air-cooled fast according to claim 1, is characterized in that, described exhaust outlet connects exhaust duct and heat sink successively.
- 6. annealing device that can be air-cooled fast according to claim 5, is characterized in that, described heat sink comprises successively the valve, heat exchanger and the blower fan that connect, and heat exchanger is or/and described blower fan described in described valve control.
- 7. annealing device that can be air-cooled fast according to claim 1, is characterized in that, described inboard wall of furnace body or outer wall are provided with cooling water channel array, with so that cooling water by reducing the temperature of described inwall or outer wall.
- 8. annealing device that can be air-cooled fast according to claim 7, is characterized in that, described cooling water channel array is that isodensity distributes.
- 9. annealing device that can be air-cooled fast according to claim 1, is characterized in that, described exhaust outlet is multiple, and is uniformly distributed along the outer wall of described air exhausting device.
- 10. according to the arbitrary described annealing device that can be air-cooled fast of claim 1～9, it is characterized in that, described connecting plate is circulus, and described connecting plate welds with described inwall and described outer wall respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420074182.2U CN203721682U (en) | 2014-02-20 | 2014-02-20 | Heat treatment device capable of realizing fast air cooling |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420074182.2U CN203721682U (en) | 2014-02-20 | 2014-02-20 | Heat treatment device capable of realizing fast air cooling |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203721682U true CN203721682U (en) | 2014-07-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420074182.2U Withdrawn - After Issue CN203721682U (en) | 2014-02-20 | 2014-02-20 | Heat treatment device capable of realizing fast air cooling |
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| Country | Link |
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| CN (1) | CN203721682U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103762164A (en) * | 2014-02-20 | 2014-04-30 | 北京七星华创电子股份有限公司 | Heat treatment device capable of rapidly achieving air cooling |
| CN104561456A (en) * | 2015-01-22 | 2015-04-29 | 北京七星华创电子股份有限公司 | Furnace body for cooling rapidly |
| CN110144448A (en) * | 2019-06-03 | 2019-08-20 | 江苏建中新材料科技有限公司 | A kind of process for heat treatment of steel pipe suitable for manufacturing passenger car transmission shaft |
-
2014
- 2014-02-20 CN CN201420074182.2U patent/CN203721682U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103762164A (en) * | 2014-02-20 | 2014-04-30 | 北京七星华创电子股份有限公司 | Heat treatment device capable of rapidly achieving air cooling |
| CN103762164B (en) * | 2014-02-20 | 2016-11-23 | 北京七星华创电子股份有限公司 | Can heat treatment device capable of rapidly achieving air cooling |
| CN104561456A (en) * | 2015-01-22 | 2015-04-29 | 北京七星华创电子股份有限公司 | Furnace body for cooling rapidly |
| CN110144448A (en) * | 2019-06-03 | 2019-08-20 | 江苏建中新材料科技有限公司 | A kind of process for heat treatment of steel pipe suitable for manufacturing passenger car transmission shaft |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20140716 Effective date of abandoning: 20161012 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |