CN219474302U

CN219474302U - Cooling device of diffusion furnace

Info

Publication number: CN219474302U
Application number: CN202223454427.8U
Authority: CN
Inventors: 陈龙飞; 陈真; 余小龙
Original assignee: Hefei Euphony Electronic Packaging Co ltd
Current assignee: Hefei Euphony Electronic Packaging Co ltd
Priority date: 2022-12-23
Filing date: 2022-12-23
Publication date: 2023-08-04
Anticipated expiration: 2032-12-23

Abstract

The utility model discloses a cooling device of a diffusion furnace, which comprises a fixing frame, wherein a quartz tube is arranged in the fixing frame, the quartz tube is a discharge channel, an insulating layer is arranged on the outer side of the quartz tube, the insulating layer is fixed on the outer side of the quartz tube, an isolating layer is arranged on the outer side of the insulating layer, the isolating layer is sleeved on the outer side of the insulating layer, a radiating hole is formed in the surface of the isolating layer, the radiating hole penetrates through the isolating layer and extends to the inner part of the isolating layer, a cooling layer is arranged on the outer side of the isolating layer, the cooling layer comprises a gas cooling section and a natural transition section, and an air inlet pipe is arranged at the top of the cooling layer. The air cooling device adopted by the utility model has stable atmosphere environment, can achieve the same effect as water cooling, and meets the process requirements of batch products; in the structure, no configuration is needed, water resources are saved, the cost is reduced, and the use is safer.

Description

Cooling device of diffusion furnace

Technical Field

The utility model relates to the technical field of cooling of diffusion furnaces, in particular to a cooling device of a diffusion furnace.

Background

The diffusion furnace is one of important technological equipment in the front working procedure of semiconductor production line, and is mainly used in sintering, packaging, oxidizing, heat treating and other processes of semiconductor device, discrete device, photoelectronic device, metal pipe shell and other products.

Most diffusion furnaces consist of a control system, a boat inlet and outlet system, a furnace body heating system, a gas control system and the like. Six layers of furnace body heating systems are arranged. The top layer is provided with a water-cooling radiator and a heat exhausting fan, and a water-cooling system is arranged between each two layers of heating furnace bodies to isolate the temperature of each layer of furnace tubes from being influenced mutually. After the heat preservation of the workpiece in the constant temperature area is finished, the workpiece can be pulled to a cooling section for cooling to a certain temperature, and the workpiece is pulled out of the furnace mouth to be taken away.

Most of the diffusion furnaces in the market at present are water cooling devices, the water cooling structure is complex, and devices such as an engine, a water circulation system, a water tank and the like are needed to be equipped. The water tank is placed in an extra field, so that the cost is not controlled; and the water cooling system has potential safety hazards such as water leakage and the like even if used for a long time. Therefore, in order to solve this current situation, improvement is required.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model provides a cooling device of a diffusion furnace, which solves the problems that the water cooling structure is complex and devices such as an engine, a water circulation system, a water tank and the like are required to be equipped. The water tank is placed in an extra field, so that the cost is not controlled; and the water cooling system has potential safety hazard and water leakage problem even if used for a long time.

In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a cooling device of diffusion furnace, includes the mount, and the inside of mount sets up the quartz capsule, and wherein, the quartz capsule is discharge channel, the outside of quartz capsule sets up the heat preservation, and the heat preservation is fixed in the quartz capsule outside, the outside of heat preservation sets up the isolation layer, and the isolation layer outside is located to the isolation layer cover, and the louvre is seted up on its surface, and the louvre runs through the isolation layer and extends to the isolation layer inside, the outside of isolation layer sets up the cooling layer, and the cooling layer includes air cooling section and natural changeover portion, and the top of cooling layer sets up the intake pipe, and its bottom sets up the outlet duct, intake pipe and outlet duct all set up with the cooling layer intercommunication, intake pipe source position intercommunication compressor.

Further, the gas cooling section is a stainless steel sleeve, the stainless steel sleeve is sleeved on the outer surface of the quartz tube, a sleeve is arranged between the stainless steel sleeves, and the sleeve is fixed on the outer surface of the stainless steel sleeve.

Further, the air inlet pipe and the air outlet pipe are respectively communicated with the stainless steel sleeve and the sleeve, and the stainless steel sleeve is not communicated with the sleeve.

Further, the inside heating panel that sets up of sleeve pipe, heating panel cover are located the quartz capsule surface, and set up the ball between quartz capsule and the heating panel, and the ball forms the support to the heating panel.

Further, the spiral plate is arranged in the stainless steel sleeve and is fixed in the stainless steel sleeve to form an air channel, the air inlet pipe is communicated with the end part of the air channel, and the air outlet pipe is communicated with the tail part of the air channel.

Further, the end part of the air duct is arranged at one end of the stainless steel sleeve close to the sleeve, the tail part of the air duct is arranged at one end of the stainless steel sleeve deviating from the sleeve, and the spiral plate is attached to the quartz tube.

Further, the stainless steel sleeve extends to the discharging position of the quartz tube, one end of the stainless steel sleeve, which is internally provided with the isolation sleeve, is a natural transition section, and the stainless steel sleeve is fixed on the outer surface of the fixing frame.

Advantageous effects

The utility model provides a cooling device of a diffusion furnace. Compared with the prior art, the method has the following beneficial effects:

1. the air cooling device adopted by the utility model has stable atmosphere environment, can achieve the same effect as water cooling, and meets the process requirements of batch products; in the structure, no configuration is needed, water resources are saved, the cost is reduced, and the use is safer.

2. The cooling of the workpiece at the cold end position is accelerated through multistage cooling, so that the workpiece can be quickly lowered to a certain degree of stability, the cooling efficiency of the workpiece is ensured, and the middle position of the air cooling section can be quickly cooled through the gas distribution of the gas inlet pipe.

Drawings

FIG. 1 is a front view of the present utility model;

FIG. 2 is a front cross-sectional view of the present utility model;

FIG. 3 is a side cross-sectional view of a sleeve construction of the present utility model;

fig. 4 is a side cross-sectional view of the spacer structure of the present utility model.

In the figure: 1 quartz tube, 2 heat preservation, 3 isolation layer, 4 cooling layer, 5 compressor, 6 intake pipe, 7 outlet duct, 8 screw plate, 9 heating panel, 10 sleeve pipe, 11 ball, 12 mount.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, the utility model provides a cooling device of a diffusion furnace, which comprises a fixing frame 12, wherein a quartz tube 1 is arranged in the fixing frame 12, the quartz tube 1 is a discharging channel, an insulating layer 2 is arranged on the outer side of the quartz tube 1, the insulating layer 2 is fixed on the outer side of the quartz tube 1, an isolating layer 3 is arranged on the outer side of the insulating layer 2, the isolating layer 3 is sleeved on the outer side of the insulating layer 2, a radiating hole is formed in the surface of the insulating layer, the radiating hole penetrates through the isolating layer 3 and extends into the isolating layer 3, a cooling layer 4 is arranged on the outer side of the isolating layer 3, the cooling layer 4 comprises an air cooling section and a natural transition section, an air inlet pipe 6 is arranged at the top of the cooling layer 4, an air outlet pipe 7 is arranged at the bottom of the cooling layer, the air inlet pipe 6 and the air outlet pipe 7 are both communicated with the cooling layer 4, and the source position of the air inlet pipe 6 is communicated with a compressor 5.

In the present utility model, the compressor 5 is an air compressor 5, and external air is compressed by the compressor 5 and then introduced into the air intake pipe 6, thereby continuously supplying cool air for cooling.

In one embodiment, the air cooling section is a stainless steel sleeve, the stainless steel sleeve is sleeved on the outer surface of the quartz tube 1, a sleeve 10 is arranged between the stainless steel sleeves, and the sleeve 10 is fixed on the outer surface of the stainless steel sleeve.

In this embodiment, the stainless steel sleeve is fixed in the fixing frame 12 to form a support for the quartz tube 1, and the size of the sleeve 10 is larger than that of the stainless steel sleeve, wherein the stainless steel sleeve is symmetrically arranged, one of the stainless steel sleeves is arranged on one side of the sleeve 10 facing away from the feeding position of the quartz tube 1, one end of the section of stainless steel tube facing away from the sleeve 10 is open, the isolation layer 3 extends into the stainless steel tube, and the other is sealed.

In one embodiment, the air inlet pipe 6 and the air outlet pipe 7 are respectively communicated with the stainless steel sleeve and the sleeve 10, and the stainless steel sleeve is not communicated with the sleeve 10.

In this embodiment, the number of air inlet pipes 6 is three, two are arranged outside the stainless steel sleeve and outside the sleeve 10, two air outlet pipes 7 are arranged outside the sealed stainless steel sleeve, and the other is arranged outside the sleeve 10.

In one embodiment, the heat dissipation plate 9 is arranged inside the sleeve 10, the heat dissipation plate 9 is sleeved on the outer surface of the quartz tube 1, and the balls 11 are arranged between the quartz tube 1 and the heat dissipation plate 9, and the balls 11 form a support for the heat dissipation plate 9.

In this embodiment, the inner side of the heat dissipation plate 9 is annular, and the heat dissipation plate is sleeved on the outer surface of the quartz tube 1 to absorb the heat of the quartz tube 1, and friction generated in the rotation process of the heat dissipation plate 9 can be reduced through the arrangement of the balls 11, so that the stability of the heat dissipation plate 9 in the working process is ensured.

In one embodiment, a spiral plate 8 is arranged inside the stainless steel sleeve, the spiral plate 8 is fixed inside the stainless steel sleeve and forms an air channel, the air inlet pipe 6 is communicated with the end part of the air channel, and the air outlet pipe 7 is communicated with the tail part of the air channel.

In this embodiment, the spiral plate 8 can guide the air flow so that it can move in the stainless steel sleeve along the path of the air duct, so as to spread the heat, and the heat can be intensively cooled at the position of the sleeve 10.

In one embodiment, the end of the air duct is arranged at one end of the stainless steel sleeve close to the sleeve 10, the tail of the air duct is arranged at one end of the stainless steel sleeve away from the sleeve 10, and the spiral plate 8 is attached to the quartz tube 1.

In this embodiment, the end of the air duct is disposed at a side close to the sleeve 10, and heat dissipation is concentrated from the position of the sleeve 10, and the positions of the three air inlet pipes 6 are all close to the side of the sleeve 10, so as to ensure the heat dissipation effect of the position of the sleeve 10.

In one embodiment, the stainless steel sleeve extends to the discharging position of the quartz tube 1, one end of the stainless steel sleeve, where the isolation sleeve is arranged, is a natural transition section, and the stainless steel sleeve is fixed on the outer surface of the fixing frame 12.

The embodiment of the utility model also provides a working principle of the cooling device, when the cooling device is used, air is supplied by the compressor 5, enters the air inlet pipe 6, is split by the air inlet pipe 6, one part of the air enters the sleeve 10, the other part of the air enters the stainless steel sleeve, the compressor 5 continuously supplies air, the heat dissipation plate 9 rotates in the sleeve 10, hot air enters the air outlet pipe 7 in the rotating process of the heat dissipation plate 9, so that the heat dissipation plate 9 is cooled, the heat dissipation plate 9 continuously absorbs the heat of the quartz tube 1, the other part of the air circulates in the air channel, is outwards diffused from a position close to the sleeve 10, is discharged from the position of the air outlet pipe 7, reduces a workpiece to a certain temperature, and is pulled out of a furnace mouth to take away the workpiece.

The utility model relates to a circuit and an electronic component which are all in the prior art, and can be completely realized by a person skilled in the art, and needless to say, the protection content of the utility model does not relate to the improvement of an internal structure and a method, and it is to be noted that standard parts used by the utility model can be purchased from the market, special-shaped parts can be customized according to the description of the specification and the drawing, the specific connection modes of the parts adopt conventional means such as mature bolts, rivets, welding and the like in the prior art, and the machines, the parts and the equipment adopt conventional models in the prior art, so that the inventor does not detail the description.

And all that is not described in detail in this specification is well known to those skilled in the art.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a cooling device of diffusion furnace, includes mount (12), and the inside of mount (12) sets up quartz capsule (1), and wherein, quartz capsule (1) are discharge channel, the outside of quartz capsule (1) sets up heat preservation (2), and heat preservation (2) are fixed in quartz capsule (1) outside, its characterized in that: the outside of heat preservation (2) sets up isolation layer (3), and isolation layer (3) cover is located in the heat preservation (2) outside, and the louvre is seted up on its surface, and the louvre runs through isolation layer (3) and extends to isolation layer (3) inside, the outside of isolation layer (3) sets up cooling layer (4), and cooling layer (4) are including gas cooling zone and natural changeover portion, and the top of cooling layer (4) sets up intake pipe (6), and its bottom sets up outlet duct (7), intake pipe (6) all with cooling layer (4) intercommunication setting with outlet duct (7), intake pipe (6) source position intercommunication compressor (5).

2. A cooling apparatus of a diffusion furnace according to claim 1, wherein: the gas cooling section is a stainless steel sleeve, the stainless steel sleeve is sleeved on the outer surface of the quartz tube (1), a sleeve (10) is arranged between the stainless steel sleeves, and the sleeve (10) is fixed on the outer surface of the stainless steel sleeve.

3. A cooling apparatus of a diffusion furnace according to claim 2, wherein: the air inlet pipe (6) and the air outlet pipe (7) are respectively communicated with the stainless steel sleeve and the sleeve (10), and the stainless steel sleeve is not communicated with the sleeve (10).

4. A cooling apparatus of a diffusion furnace according to claim 3, wherein: the sleeve (10) is internally provided with a radiating plate (9), the radiating plate (9) is sleeved on the outer surface of the quartz tube (1), and a ball (11) is arranged between the quartz tube (1) and the radiating plate (9), and the ball (11) forms a support for the radiating plate (9).

5. A cooling apparatus of a diffusion furnace according to claim 3, wherein: the inside of stainless steel cover sets up screw plate (8), and screw plate (8) are fixed in stainless steel cover inside and form the wind channel, and intake pipe (6) intercommunication wind channel tip, outlet duct (7) intercommunication wind channel afterbody.

6. The cooling apparatus of a diffusion furnace according to claim 5, wherein: the end part of the air duct is arranged at one end of the stainless steel sleeve, which is close to the sleeve (10), the tail part of the air duct is arranged at one end of the stainless steel sleeve, which is away from the sleeve (10), and the spiral plate (8) is attached to the quartz tube (1).

7. A cooling apparatus of a diffusion furnace according to claim 3, wherein: the stainless steel sleeve extends to the discharging position of the quartz tube (1), one end of the stainless steel sleeve, which is internally provided with the isolation sleeve, is a natural transition section, and the stainless steel sleeve is fixed on the outer surface of the fixing frame (12).