TWI689695B - Oven with air bearing and its application method - Google Patents
Oven with air bearing and its application method Download PDFInfo
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- TWI689695B TWI689695B TW107141211A TW107141211A TWI689695B TW I689695 B TWI689695 B TW I689695B TW 107141211 A TW107141211 A TW 107141211A TW 107141211 A TW107141211 A TW 107141211A TW I689695 B TWI689695 B TW I689695B
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Abstract
本發明係一種具有氣浮軸承的烘箱及其應用方法,其包含一箱體、一輸送部及一加熱部;箱體具有一內部空間及一開口,內部空間設有一支撐板,鄰近於開口的相對兩側分別貫穿有一進料口及一出料口;輸送部設於支撐板,包含複數氣浮軸承,氣浮軸承可旋轉地設於支撐板上;一待加工的料帶貫穿進料口及出料口貼靠於各氣浮軸承上;加熱部設於內部空間且對料帶進行均勻加熱;藉此達到加熱及輸送部在輸送料帶的過程中,因為利用氣浮軸承支撐輪做為料帶的輸送媒介,能夠以較低張力傳送料帶減少料帶張力變形與支撐輪間產生滑移磨擦,以避免料帶遭到破壞。The invention is an oven with air bearing and its application method, which includes a box body, a conveying part and a heating part; the box body has an internal space and an opening, the internal space is provided with a supporting plate, which is adjacent to the opening A feed port and a feed port are respectively penetrated on the opposite sides; the conveying part is provided on the support plate and includes a plurality of air float bearings, and the air float bearings are rotatably provided on the support plate; a material belt to be processed penetrates the feed port And the discharge port is close to each air bearing; the heating part is located in the internal space and uniformly heats the material belt; thereby achieving the heating and conveying part in the process of conveying the material belt, because the air bearing is used to support the wheel As the conveying medium of the material belt, the material belt can be conveyed with lower tension to reduce the tension deformation of the material belt and the sliding friction between the support wheels to avoid the material belt from being damaged.
Description
本發明係涉及一種軸承,尤指一種利用流體所支承的氣浮軸承。 The invention relates to a bearing, in particular to an air bearing supported by fluid.
現有之軟性電路板(Flexible Printed Circuit board,FPC)在以覆晶接合技術(Chip on Film,COF)生產製造時,是一種將晶粒覆晶接合(Flip Chip Bonding)在軟性電路板基材上的技術,將驅動IC及其電子零件直接放置於薄膜(Film)上,相較於傳統的印刷電路板採用印刷蝕刻阻劑的工法在硬式的基板上做出電路的線路及圖面,能夠進一步達到更輕薄短小的目的。在覆晶接合技術的製程中,塗膠後會經過烘箱初步烘乾,但是要能確保產品能徹底除濕,並使膠體硬化,則需要長久性的烘烤,在這個階段,則使用專門烘烤軟性電路板的烘箱,並設定烘烤時間及溫度加以烘烤。 The existing flexible printed circuit board (FPC) is produced by chip on film (COF), which is a kind of Flip Chip Bonding on the flexible circuit board substrate Technology, the driver IC and its electronic parts are placed directly on the film (Film). Compared with the traditional printed circuit board, the method of printing etching resist is used to make the circuit lines and drawings on the hard substrate, which can further To achieve the purpose of more light and thin. In the process of flip chip bonding technology, the glue will be initially dried in an oven after coating, but to ensure that the product can be completely dehumidified and harden the colloid, it requires long-term baking. At this stage, special baking is used. The oven of the flexible circuit board, and set the baking time and temperature to bake.
然而,現有技術的烘箱,在箱體內部設有複數軸承,以供所輸送的軟性電路板通過加熱並予以烘烤,所使用的軸承皆為一般的滾珠軸承,此種設計的軸承因為有較大的摩擦力,容易導致軟性電路板因與軸承轉動輸送所產生磨擦,進而使得軟性電路板表面刮傷,產生塗層脫落的情形。 However, in the prior art oven, a plurality of bearings are provided inside the box body for heating and baking the conveyed flexible circuit board. The bearings used are all general ball bearings. The large friction force may easily cause the friction of the flexible circuit board due to the rotation and transportation of the bearing, which may scratch the surface of the flexible circuit board and cause the coating to fall off.
因此,現有技術的烘箱,其整體在輸送軟性電路板的構造存在有如前述的問題及缺點,實有待加以改良。 Therefore, the entire oven of the prior art has the above-mentioned problems and shortcomings in the structure of conveying the flexible circuit board, which needs to be improved.
有鑒於現有技術的缺點及不足,本發明提供一種具有氣浮軸承的烘箱及其應用方法,其可藉由設置在烘箱內的加熱部及氣浮軸承,達到對料帶的加熱烘烤以及輸送部在輸送料帶的過程中,減少料帶與氣浮軸承之間產生磨擦之目的。 In view of the shortcomings and deficiencies of the prior art, the present invention provides an oven with an air bearing and its application method, which can achieve heating, baking and transportation of the material belt by the heating part and the air bearing provided in the oven In the process of conveying the material belt, the purpose of reducing friction between the material belt and the air bearing is reduced.
為達上述之發明目的,本發明所採用的技術手段為設計一種具有氣浮軸承的烘箱,其用以加熱一料帶,且包含:一箱體,其具有一內部空間及與該內部空間連通的一開口,該開口設於該箱體的一側面,且相對於該開口的該內部空間設有一支撐板,鄰近於該開口的相對兩側分別貫穿有一進料口及一出料口,且該進料口及該出料口與該內部空間相連通,用以供該料帶進出;一輸送部,其設置於該支撐板朝向該開口的一側面,且包含:複數氣浮軸承,其可旋轉地設於該支撐板上,該複數氣浮軸承呈上下兩排橫向等間距交叉排列,且該料帶繞設於各該氣浮軸承,其中各該氣浮軸承包含:一固定座,其為一中空柱體且固設於該支撐板上;一進氣軸,其為一中空柱狀體,且一端與該固定座連接,包含:一進氣道,其從該進氣軸的一端沿該進氣軸的軸心方向延伸;至少一出氣道,其穿設於該進氣軸的外壁面且與該進氣道相連通;一導氣內環,其為一中空柱體,其壁面為空心結構且具有一容氣空間,且該壁面的外表面貫穿有複數第一導氣孔,該壁面的內表面貫穿有至少一第二導氣孔,該導氣內環套設於該進氣軸且各該第二導氣孔對應於各該出氣道; 一轉動外環,其為一中空柱體,且套設於該導氣內環;兩側擋塊,各該側擋塊為中空環狀片體,且該兩側擋塊分別套設於該進氣軸且位於該轉動外環的兩側邊,兩側擋塊分別連接於導氣內環的兩側邊並且與轉動外環間有間隙;一定位鎖附塊,其為一中空柱體,且套設於該進氣軸相對於該固定座的另一端;一支撐輪,其為一中空柱體,且套設於該轉動外環;兩蓋體,其分別蓋設於該支撐輪的兩端面;一加熱部,其設於該內部空間且安裝於該支撐板,並相鄰於該料帶的移動路徑。 In order to achieve the above purpose of the invention, the technical means adopted by the present invention is to design an oven with air bearing, which is used to heat a material belt, and includes: a box body having an internal space and communicating with the internal space An opening provided on a side of the box, and the inner space relative to the opening is provided with a support plate, and a feed port and a feed port are respectively penetrated on opposite sides adjacent to the opening, and The feeding port and the discharging port communicate with the internal space for feeding and discharging of the material belt; a conveying part is provided on a side of the supporting plate facing the opening, and includes: a plurality of air bearing, which The plurality of air bearings are rotatably arranged on the support plate. The plurality of air bearings are arranged in two horizontal rows at equal intervals across each other, and the strip is wound around each air bearing. Each air bearing includes: a fixed seat, It is a hollow cylinder and is fixed on the support plate; an intake shaft, which is a hollow cylindrical body, and one end is connected to the fixing seat, including: an intake passage, which is from the intake shaft One end extends in the direction of the axis of the intake shaft; at least one air outlet, which is penetrated on the outer wall surface of the air inlet shaft and communicates with the air inlet; an air guide inner ring, which is a hollow cylinder, The wall surface is a hollow structure and has a gas-holding space, and the outer surface of the wall surface is penetrated by a plurality of first air guide holes, the inner surface of the wall surface is penetrated by at least one second air guide hole, and the air guide inner ring is sleeved on the inlet An air shaft and each second air guide hole corresponds to each air outlet; A rotating outer ring, which is a hollow cylinder, and sleeved on the gas guide inner ring; two side stoppers, each of the side stoppers is a hollow annular piece, and the two side stoppers are sleeved on the The intake shaft is located on both sides of the rotating outer ring. The two stoppers are respectively connected to the two sides of the air guiding inner ring and have a gap with the rotating outer ring; a positioning lock attachment block, which is a hollow cylinder And sleeved on the other end of the intake shaft relative to the fixed seat; a support wheel, which is a hollow cylinder, and sleeved on the rotating outer ring; two cover bodies, which are respectively covered on the support wheel The two end surfaces of the; a heating portion, which is provided in the internal space and installed on the support plate, and is adjacent to the moving path of the material belt.
為達到上述的發明目的,本發明進一步提供一種具有氣浮軸承的烘箱之應用方法,其操作步驟為: In order to achieve the above-mentioned object of the invention, the present invention further provides an application method of an oven with an air bearing, the operation steps are:
a.將料帶從輸送部的進料口處輸入並繞設於各該氣浮軸承 a. Input the material belt from the inlet of the conveying part and wind it around each air bearing
b.再將空氣導入進氣軸的進氣道,使得空氣經由至少一出氣道穿過複數第二導氣孔進入到導氣內環的空心壁面內,並且從複數第一導氣孔吹出將轉動外環懸浮起來並且藉由料帶的施力而轉動 b. Introduce air into the intake channel of the intake shaft, so that the air passes through the plurality of second air guide holes through at least one air outlet into the hollow wall surface of the air guide inner ring, and blow out from the plurality of first air guide holes to rotate outside The ring floats and rotates by the force of the material belt
c.加熱部對料帶進行加熱動作 c. The heating part heats the material belt
d.料帶從輸送部的出料口處輸出 d. The material belt is output from the outlet of the conveying part
本發明的優點在於,藉由將氣浮軸承可旋轉地設置在烘箱箱體內的支撐板上,再將料帶貼靠於各氣浮軸承,藉此設計達到料帶在輸送的過程中,可以以低張力輸入料帶,降低料帶張力變形,此外,也可以減少轉動中與氣浮軸承產生磨擦,防止料帶表面刮傷的情形發生。 The advantage of the present invention is that, by arranging the air bearing rotatably on the support plate in the oven box, and then attaching the material belt to each air bearing, the design can achieve that the material belt can be transported in the process. Entering the material belt with low tension reduces the tension deformation of the material belt. In addition, it can also reduce friction with the air bearing during rotation to prevent the surface of the material belt from being scratched.
進一步而言,所述之具有氣浮軸承的烘箱,其中該加熱部包含複數加熱棒,該複數加熱棒設置於該支撐板且鄰近於該料帶。 Further, in the oven with an air bearing, the heating part includes a plurality of heating rods, the plurality of heating rods are disposed on the support plate and adjacent to the material belt.
進一步而言,所述之具有氣浮軸承的烘箱,其中該導氣內環進一步包含一導氣外柱、一導氣內柱及兩墊圈,該導氣外柱為一中空柱體,該第一導氣孔貫穿該導氣外柱,該導氣內柱一中空柱體,該第二導氣孔貫穿該導氣內柱,該兩墊圈固設於該導氣內柱與該導氣外柱之間,使得導氣外柱與導氣內柱保持一特定距離。 Further, in the oven with air bearing, the inner air guide ring further includes an outer air guide column, an inner air guide column and two gaskets, the outer air guide column is a hollow cylinder, the first An air guide hole penetrates the air guide outer column, the air guide inner column is a hollow cylinder, the second air guide hole penetrates the air guide inner column, and the two gaskets are fixed between the air guide inner column and the air guide outer column The external air-conducting column and the internal air-conducting column maintain a specific distance.
進一步而言,所述之具有氣浮軸承的烘箱之應用方法,其中該料帶從該進料口進入到該內部空間後上下依序繞設於各該氣浮軸承。 Further, in the application method of the oven with an air bearing, the material tape is wound around the air bearing sequentially from top to bottom after entering the internal space from the feed port.
進一步而言,所述之具有氣浮軸承的烘箱之應用方法,其中該輸送部以低張力將料帶輸送移動。 Further, in the application method of the oven with air bearing, the conveying part conveys the material belt with low tension.
10:箱體 10: cabinet
11:開口 11: opening
12:支撐板 12: Support plate
13:進料口 13: Feed port
14:出料口 14: Outlet
20:輸送部 20: Transportation Department
21:氣浮軸承 21: air bearing
211:固定座 211: Fixed seat
212:進氣軸 212: intake shaft
2121:進氣道 2121: Intake port
2122:出氣道 2122: Outlet
213:導氣內環 213: Air-conducting inner ring
2131:第一導氣孔 2131: First air hole
2132:第二導氣孔 2132: Second air hole
2133:墊圈 2133: washer
2134:導氣內柱 2134: Inner gas guide column
2135:導氣外柱 2135: Outer gas guide column
214:轉動外環 214: Turn the outer ring
215:側擋塊 215: Side stop
216:定位鎖附塊 216: Positioning lock attachment block
217:支撐輪 217: Support wheel
218:蓋體 218: Cover
30:料帶 30: Strip
40:加熱部 40: Heating section
41:加熱棒 41: Heating rod
圖1係本發明之立體外觀圖。 FIG. 1 is a perspective external view of the present invention.
圖2係本發明之局部放大圖。 Fig. 2 is a partially enlarged view of the present invention.
圖3係本發明之氣浮軸承立體外觀圖。 3 is a perspective external view of the air bearing of the present invention.
圖4係本發明之氣浮軸承分解圖。 4 is an exploded view of the air bearing of the present invention.
圖5係本發明之氣浮軸承徑向剖面圖。 5 is a radial cross-sectional view of the air bearing of the present invention.
圖6係本發明之氣浮軸承軸向剖面圖。 6 is an axial cross-sectional view of the air bearing of the present invention.
圖7係本發明之氣浮軸承動作示意圖。 7 is a schematic view of the action of the air bearing of the present invention.
以下配合圖式以及本發明之較佳實施例,進一步闡述本發明為達成預定發明目的所採取的技術手段。 In the following, with reference to the drawings and preferred embodiments of the present invention, the technical means adopted by the present invention to achieve the intended purpose of the invention will be further described.
請參閱圖1及圖2所示,本發明之具有氣浮軸承的烘箱包含一箱體10、一輸送部20及一加熱部40。
Please refer to FIG. 1 and FIG. 2, the oven with air bearing of the present invention includes a
箱體10具有一內部空間及與內部空間連通的一開口11,開口11設於箱體10的一側面,且相對於開口11的內部空間設有一支撐板12,鄰近於開口11的相對兩側分別貫穿有一進料口13及一出料口14,且進料口13及出料口14與該內部空間相連通;在本實施例中,箱體10的內部空間設置有一支撐板12,支撐板12將內部空間分隔成一前方空間與一後方空間,前方空間具有一朝前方的開口11,而相鄰於開口11的兩側邊分別貫穿有一進料口13及一出料口14,而後方空間之箱體10設有朝向後方的開口及位在兩側的進料口及出料口等結構與前方空間相同,但不以此為限,也可將箱體10構造組裝成單邊使用,為便於了解以下描述內容以位在箱體10前方空間的構造為例予以說明。
The
前述之輸送部20設置於支撐板12朝向開口11的一側面,且包含複數氣浮軸承21,氣浮軸承21可旋轉地設置於支撐板12上。一料帶30貫穿進料口13及出料口14,且貼靠於輸送部20的各氣浮軸承21的外表面,在本實施例中,料帶30為待加熱物件,如軟性電路板等料件。
The aforementioned conveying
請參閱圖3及圖4所示,在本實施例中,各該複數氣浮軸承21呈上、下兩排橫向等間距交叉排列,即上排的其中一氣浮軸承21在縱向位置位在下排的相鄰兩氣浮軸承21之間,且每一氣浮軸承21包含一固定座211、一進氣軸212、一導氣內環213、一轉動外環214、兩側擋塊215、一定位鎖附塊216、一支撐輪217及兩蓋體218,固定座211為一中空柱體,且固設於支撐板12上,在本實施例中,各該複數氣浮軸承21以固定座211安裝設置於支撐板12上。
Please refer to FIG. 3 and FIG. 4. In this embodiment, each of the
請參閱圖4至圖7所示,進氣軸212為一中空柱狀體,且一端固設於固定座211,進氣軸212包含一進氣道2121及至少一出氣道2122,進氣道2121從進氣軸212的一端沿進氣軸212的軸心方向延伸,在本實施例中,進氣道2121
的入口端即進氣軸212與固定座211連接的一端,進氣道2121延伸至進氣軸212大約中間的位置,但不以此為限,其延伸距離可依使用者需求做改變;出氣道2122穿設於進氣軸212的外壁面且與進氣道2121相連通,在本實施例中,出氣道2122為四個,且等圓心角地環繞分佈於進氣軸212,並且與進氣道2121相連通,但不以此為限,出氣道2122數量可依使用者需求做改變。
Please refer to FIG. 4 to FIG. 7, the
導氣內環213為一中空柱體,其壁面為空心結構且具有一容氣空間,在本實施例中,導氣內環213由一導氣內柱2134、一導氣外柱2135及兩墊圈2133所構成,導氣外柱2135為一中空柱體,且其貫穿有第一導氣孔2131與容置空間連通,導氣內柱2134一中空柱體,且其貫穿有第二導氣孔2132與容置空間連通,導氣內柱2134套設固定於進氣軸212且各第二導氣孔2132對應於各出氣道2122,導氣內柱2134不轉動,導氣外柱2135藉由兩墊圈2133設置於導氣內柱2134外壁面的兩端,使得導氣外柱2135套設於導氣內柱2134外部且保持一特定距離,但不以此為限,導氣內環213亦可為一體成型之構造。
The air guide
轉動外環214為一中空柱體,且可相對於導氣內環213轉動地套設於導氣內環213,在本實施例中,轉動外環214的內徑大於導氣內環213的外徑,使得轉動外環214可相對於導氣內環213同軸旋轉,而轉動外環214與導氣內環213之間距可依據使用者所灌入的氣體壓力做一適度調整,僅要能達到具有氣浮功效之目的即可。
The rotating
側擋塊215為中空環狀片體,且套設於進氣軸212位於轉動外環214的兩側邊,兩側擋塊215分別連接於導氣內環213的兩側邊並且與轉動外環214間有間隙,換言之,轉動外環214的柱體長度小於導氣內環213的柱體長度,使得轉動外環214的兩端並不會凸出於導氣內環213,當產生氣浮時,兩側擋塊215不轉動且與轉動外環214保持一特定距離。
The
定位鎖附塊216為一中空柱體,且套設於進氣軸212相對於固定座211的另一端,在本實施例中,定位鎖附塊216卡合於進氣軸212且不轉動,用以將導氣內環213、轉動外環214及側檔塊215組裝位於進氣軸212上,但不以此為限,其他可使導氣內環213、轉動外環214及側檔塊215組裝位於進氣軸212之構件皆可。
The positioning
支撐輪217為一中空柱體,固定套設於轉動外環214與其同步轉動,料帶30貼靠於支撐輪217,而蓋體218分別蓋設於支撐輪217的兩端面,在本實施例中,蓋體218鎖固於支撐輪217,使得氣浮軸承21的一側藉由定位鎖附塊216推抵,另一側藉由靠近於固定座211側的蓋體218的一側邊推抵於固定座211,將支撐輪217定位於進氣軸212上的位置,但不以此為限,亦可為其他固定方式。
The
此外,針對氣浮軸承21氣體流動路徑做進一步說明,使用者將氣體藉由進氣軸212端輸入進氣道2121,經由出氣道2122流向導氣內環213的第二導氣孔2132進入到容氣空間,再經由容氣空間流向第一導氣孔2131吹向轉動外環214,經由側擋塊215與轉動外環214之間的間隙,由蓋體218及進氣軸212之間的間隙流出至外部。
In addition, for further description of the gas flow path of the
加熱部40設於箱體10的內部空間,且可對料帶30進行加熱,在本實施例中,加熱部40包含複數加熱棒41,加熱棒41設置於支撐板12且鄰近於料帶30用以對料帶30進行加熱動作,但不以此為限,加熱部40可為熱風扇或紅外線加熱箱,僅要能達到加熱功效之裝置皆可。
The
請參閱圖1及圖7所示,本發明之氣浮軸承的烘箱之應用方法包含以下步驟:a.將料帶30從輸送部20的進料口13處輸入並上下交錯繞設於各該氣浮軸承21;
b.再將空氣導入進氣軸212的進氣道2121,使得空氣經由至少一出氣道2122穿過複數第二導氣孔2132進入到導氣內環213的空心壁面內,並且從複數第一導氣孔2131吹出推抵轉動外環214,使得導氣內環213與轉動外環214之間形成有一間距,並且藉由料帶30的施力而轉動;c.加熱部40對料帶30進行加熱動作;d.料帶30從輸送部20的出料口14處輸出。
Please refer to FIG. 1 and FIG. 7, the application method of the air bearing bearing oven of the present invention includes the following steps: a. The
在本實施例中,輸送部20以低張力將料帶30輸入,料帶30從進料口13進入到內部空間後上下依序繞設於各氣浮軸承21,詳言之,前述之低張力即相較於現有技術採用滾珠軸承的結構,本實施例會以較低張力的形式傳輸,現有技術當料帶30於傳輸的過程中,因料帶30與滾珠軸承之間產生較大的摩擦力,而導致料帶30需承受較大的張力進而發生拉扯及斷裂的情形;而本發明由於採用氣浮式的軸承,因此可降低料帶30與支撐輪217之間的摩擦力,進而使料帶30以低張力的形式傳輸,減少料帶30因張力產生變形、拉扯及斷裂的情形;而料帶30進入到內部空間後,採用貼靠位於下方氣浮軸承21的下半部及上方氣浮軸承21的上半部,交互繞設直至料帶30從出料口14處離開。
In this embodiment, the conveying
前述過程中,由於採用氣浮軸承21,因此利用空氣當介質,以幾近零磨擦的方式轉動,防止料帶30表面滑動刮傷。
In the foregoing process, since the
前述過程中,由於採用低張力的方式傳輸料帶30,因此可降低料帶30張力變形的情形產生。
In the foregoing process, since the
前述過程中,由於氣浮軸承21採上下交錯排列的方式配置,因此可以減少整體機構的體積之外,也可以增加料帶30的行進路線,延長加熱的時間。
In the foregoing process, since the
以上所述僅是本發明之較佳實施例而已,並非對本發明做任何形式上的限制,雖然本發明已以較佳實施例揭露如上,然而並非用以限定本發 明,任何所屬技術領域中具有通常知識者,在不脫離本發明技術方案的範圍內,當可利用上述揭示的技術內容作出些許更動或修飾作為等同變化的等效時施例,但凡是未脫離本發明技術方案的內容,依據本發明的技術實質對以上實施例所做的任何簡單修改、等同變化與修飾,均仍屬於本發明技術方案的範圍內。 The above is only the preferred embodiment of the present invention, and does not limit the present invention in any form. Although the present invention has been disclosed as the above with the preferred embodiment, it is not intended to limit the present invention. It is clear that any person with ordinary knowledge in the technical field of the art, without departing from the scope of the technical solution of the present invention, can make some alterations or modifications as equivalents of equivalent changes by using the technical contents disclosed above, but those who have not departed The contents of the technical solution of the present invention, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention still fall within the scope of the technical solution of the present invention.
10:箱體 10: cabinet
11:開口 11: opening
12:支撐板 12: Support plate
13:進料口 13: Feed port
14:出料口 14: Outlet
20:輸送部 20: Transportation Department
21:氣浮軸承 21: air bearing
30:料帶 30: Strip
40:加熱部 40: Heating section
41:加熱棒 41: Heating rod
Claims (6)
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TWM515635U (en) * | 2015-08-12 | 2016-01-11 | 群翊工業股份有限公司 | Drying device |
CN105952798A (en) * | 2016-07-13 | 2016-09-21 | 重庆大学 | High-precision static pressure air bearing |
CN106014484A (en) * | 2016-07-06 | 2016-10-12 | 朱光波 | Pneumatic rotation device |
CN106195007A (en) * | 2016-07-28 | 2016-12-07 | 重庆大学 | A kind of pneumatic air supporting rotary apparatus |
TWM574671U (en) * | 2018-11-20 | 2019-02-21 | 群翊工業股份有限公司 | Oven with air bearing |
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Publication number | Priority date | Publication date | Assignee | Title |
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TWM515635U (en) * | 2015-08-12 | 2016-01-11 | 群翊工業股份有限公司 | Drying device |
CN106014484A (en) * | 2016-07-06 | 2016-10-12 | 朱光波 | Pneumatic rotation device |
CN105952798A (en) * | 2016-07-13 | 2016-09-21 | 重庆大学 | High-precision static pressure air bearing |
CN106195007A (en) * | 2016-07-28 | 2016-12-07 | 重庆大学 | A kind of pneumatic air supporting rotary apparatus |
TWM574671U (en) * | 2018-11-20 | 2019-02-21 | 群翊工業股份有限公司 | Oven with air bearing |
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