TWI688750B - Encoder - Google Patents

Abstract

The present invention provides an encoder with high accuracy and capable of suppressing the influence of external magnetic flux. The encoder 1 includes a plurality of magneto-sensitive element sensor sections 60 including a first magneto-sensitive element 70 and a second magneto-sensitive element 79 that detect the position of the magnet 30. As the magneto-sensitive element sensor section 60, at least the first magneto-sensitive element is provided The sensor section 61 and the second magneto-sensitive element sensor section 62, the first magneto-sensitive element sensor section 61 and the second magneto-sensitive element sensor section 62 are arranged in such a manner that the first magneto-sensitive element sensor section 61 and the first The outputs of the first magneto-sensitive elements 70 and the outputs of the second magneto-sensitive elements 79 of the two magneto-sensitive element sensor sections 62 are arranged at positions having a phase difference of an even multiple of 180° in electrical angle, that is, in mechanical angle Below 30°.

Description

Encoder

The invention relates to an encoder.

Since before, various encoders have been used. Among them, a magnetic encoder using a magnetic sensor is often used.

For example, Patent Document 1 discloses a rotary encoder capable of detecting movement of a magnetic scale with a phase difference of 90° in an electrical angle meter.

Also, for example, Patent Document 2 and Patent Document 3 disclose a magnetic encoder including a Hall sensor (magnetic sensor) arranged every 90° in mechanical angle, and a sensor arranged relative to these sensors. The Hall sensor is a mechanical angle meter that deviates from each 60° position.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2012-118000

[Patent Document 2] WO2007/132603

[Patent Document 3] WO2009/84346

As disclosed in Patent Document 1, by detecting the movement of the magnetic scale with a phase difference of 90° using an electrical angle meter, a high-precision encoder can be formed.

Furthermore, as disclosed in Patent Document 2 and Patent Document 3, by arranging the magnetic sensitive elements at a plurality of positions, a high-precision encoder can also be formed.

However, in a magnetic encoder, an external magnetic flux may be affected by driving the device including the encoder, etc., and the performance of the encoder may deteriorate. Moreover, for example, only a plurality of units provided with magnetic sensitive elements at positions that can be detected with an electrical angle meter at a phase difference of 90° cannot suppress the influence of external magnetic flux. That is, depending on the position of the unit (magneto-sensitive element) or the manner in which the magneto-sensitive elements are connected to each other, there is a case where the influence of external magnetic flux cannot be suppressed.

Therefore, an object of the present invention is to provide an encoder with high accuracy and capable of suppressing the influence of external magnetic flux.

The encoder of the first aspect of the present invention is characterized by including: a magnet having a plurality of N poles and S poles alternately magnetized; and a plurality of magneto-sensitive element sensor sections including a first magneto-sensitive element that detects the position of the magnet And a second magneto-sensitive element arranged to detect the position of the magnet with respect to the output of the first magneto-sensitive element having a phase difference of 90° in an electrical angle meter; and as the magneto-sensitive element sensor section , At least a first magneto-sensitive element sensor section and a second magneto-sensitive element sensor section are provided, the first magneto-sensitive element sensor section and the second magneto-sensitive element sensor section are arranged in the following manner, that is, The output of the first magnetic sensor of the first magnetic sensor element and the output of the first magnetic sensor of the second magnetic sensor element, and the output of the first magnetic sensor element The output configuration of the second magnetic sensitive element and the output of the second magnetic sensitive element of the second magnetic sensitive element sensor section At a position with an odd multiple of 180° in electrical angle, that is, 30° or less in mechanical angle, connect the positive output terminal of the first magnetic sensor element to the second magnetic sensor sensor Is connected to connect the negative output terminal of the first magnetic sensor element and the positive output terminal of the second magnetic sensor element.

According to this aspect, a plurality of magneto-sensitive element sensor sections are included, and the magneto-sensitive element sensor section is provided with a magneto-sensitive element at a position that can be detected with an electrical angle meter at a phase difference of 90°, and therefore can be formed with high accuracy Encoder. Furthermore, the outputs of the first magneto-sensitive elements and the outputs of the second magneto-sensitive elements are arranged at positions having an odd multiple of 180° in electrical angle, that is, 30° or less in mechanical angle The first magneto-sensitive element sensor section and the second magneto-sensitive element sensor section, and the positive output terminal of the first magneto-sensitive element sensor section and the negative output terminal of the second magneto-sensitive element sensor section are connected to connect the first magneto-sensitive element The negative output terminal of the element sensor section is connected to the positive output terminal of the second magnetic sensor element section. That is, by inverting one of the outputs of the first magneto-sensitive element sensor section and the second magneto-sensitive element sensor section disposed at a position that is phase-shifted by 1/2 period of the magnetic cycle, that is, a close position, By averaging, the influence of external magnetic flux can be suppressed.

The encoder of the second aspect of the present invention is characterized by including: a magnet having a plurality of N poles and S poles alternately magnetized; and a plurality of magneto-sensitive element sensor sections including a first magneto-sensitive element that detects the position of the magnet And a second magneto-sensitive element arranged to detect the position of the magnet with respect to the output of the first magneto-sensitive element having a phase difference of 90° in an electrical angle meter; and as the magneto-sensitive element sensor section , At least a first magneto-sensitive element sensor section and a second magneto-sensitive element sensor section are provided, and the first magneto-sensitive element sensor section and the second magneto-sensitive element sensor section are arranged in such a manner that the The output of the first magneto-sensitive element of the first magneto-sensitive element sensor section and the output of the first magneto-sensitive element of the second magneto-sensitive element sensor section, and the position of the first magneto-sensitive element sensor section The output of the second magneto-sensitive element and the output of the second magneto-sensitive element of the second magneto-sensitive element sensor section are arranged at positions having a phase difference of an even multiple of 180° in electrical angle, that is, in mechanical angle 30° or less, connect the positive output terminal of the first magnetic sensor element and the positive output terminal of the second magnetic sensor element, and connect the negative output terminal of the first magnetic sensor element to The negative output terminal of the second magnetic sensor element is connected.

According to this aspect, it includes a plurality of magneto-sensitive element sensor sections that are provided with a magneto-sensitive element at a position that can be detected with an electrical angle meter at a phase difference of 90°, and therefore can be formed with high accuracy Encoder. In addition, the outputs of the first magneto-sensitive elements and the outputs of the second magneto-sensitive elements are arranged at positions having a phase difference of an even multiple of 180° in electrical angle, that is, 30° or less in mechanical angle. A magneto-sensitive element sensor section and a second magneto-sensitive element sensor section, and the positive output terminal of the first magneto-sensitive element sensor section and the positive output terminal of the second magneto-sensitive element sensor section are connected to connect the first magneto-sensitive element The negative output terminal of the sensor unit is connected to the negative output terminal of the second magneto-sensitive element sensor unit. In other words, by inputting the first magnetic sensor element and the second magnetic sensor element at a position that is phase-shifted by one period from the magnetic period, that is, close to the position. Averaging can suppress the influence of external magnetic flux.

The encoder of the third aspect of the present invention is according to the first aspect or the second aspect, characterized in that the first magnetic sensor element and the second magnetic sensor element are arranged as follows That is, the first magneto-sensitive element of the first magneto-sensitive element sensor section and the first magneto-sensitive element of the second magneto-sensitive element sensor section, and the The second magneto-sensitive element and the second magneto-sensitive element of the second magneto-sensitive element sensor section are arranged within two cycles with a magnetic period meter.

According to this aspect, the first magneto-sensitive element sensor portion and the second magneto-sensitive element sensor portion are arranged in a narrow range within two cycles in terms of the magnetic cycle. Therefore, the influence of external magnetic flux can be effectively suppressed.

The encoder of the fourth aspect of the present invention is any one of the first to third aspects, characterized in that the magnetic sensor element includes the first magnetic sensor and the first magnetic sensor in one package. The second magnetic sensor.

According to this aspect, since the first magneto-sensitive element and the second magneto-sensitive element are provided in one package, the first magneto-sensitive element and the second magneto-sensitive element can be positioned with high accuracy, and it can be formed to a particularly high accuracy Encoder.

An encoder according to a fifth aspect of the present invention is any one of the first to fourth aspects, characterized in that the first magneto-sensitive element and the second magneto-sensitive element are Hall elements.

According to this aspect, the first magneto-sensitive element and the second magneto-sensitive element are Hall elements, which can independently detect the direction of the magnetic field (discrimination of N pole and S pole), and therefore can be inexpensive The encoder is formed inexpensively.

An encoder of a sixth aspect of the present invention is any one of the first to fifth aspects, characterized in that the first magneto-sensitive element and the second magneto-sensitive element are magnetoresistive elements.

According to this aspect, the encoder can be formed by using the magnetoresistive element, so the rotating magnetic field of the opposing magnet is detected. Therefore, compared with the case of detecting the strength of the magnetic flux like the Hall element, even if it is caused by uneven magnetization or jitter of the rotating part Even if the magnetic flux intensity is changed, the rotation position can be detected stably.

An encoder according to a seventh aspect of the present invention is any one of the first to sixth aspects, characterized in that the magnet is a magnet having a plurality of N poles and S poles alternately magnetized in the circumferential direction A rotating magnet, and the encoder includes a second rotating magnet that can rotate together with the first rotating magnet and has N poles and S poles magnetized in the circumferential direction, and a first that detects the position of the second rotating magnet Two magnetosensitive elements for rotating magnets.

According to this aspect, the second rotating magnet and the second rotating magnet magneto-sensitive element can detect not only the amount of rotation of the rotating magnet (first rotating magnet) but also the absolute position.

An encoder of an eighth aspect of the present invention is any one of the first to seventh aspects, characterized in that the magnetic sensor element is composed of the first magnetic element sensor and the first The two magnetic sensor elements are composed of both.

According to this aspect, the magnetic sensor element includes both the first magnetic sensor element and the second magnetic sensor element, so the encoder can be formed inexpensively.

An encoder according to a ninth aspect of the present invention is any one of the first to seventh aspects, characterized in that the encoder is such that the magnet is alternately magnetized with a plurality of N poles in the circumferential direction And the rotary encoder of the S-pole rotating magnet, as the magnetic sensor element, in addition to the first magnetic sensor element and the second magnetic sensor element, at least the rotating magnet On the opposite side of the first magneto-sensitive element sensor section or the second magneto-sensitive element sensor section based on the rotation axis, a third magnet including the first magneto-sensitive element and the second magneto-sensitive element is provided Sensitive element sensor section.

According to this aspect, since the third magneto-sensitive element sensor section is provided on the opposite side of the first magneto-sensitive element sensor section or the second magneto-sensitive element sensor section based on the rotation axis of the rotating magnet, the first magneto-sensitive element is used. The output (detection result) of the sensor section or the second magneto-sensitive element sensor section and the output (detection result) from the third magneto-sensitive element sensor section can suppress all changes even when a magnetic flux fluctuation occurs in the rotating magnet Describe the effects of flux changes.

The present invention can provide an encoder with high accuracy and capable of suppressing the influence of external magnetic flux.

1: Encoder (rotary encoder)

2: rotating body

10: fixed body

11: Supporting member

12: substrate

13: Sensor support plate

15: Sensor substrate

16: Terminal

17: connector

20: Second rotating magnet

21, 31: magnetized surface

30: First rotating magnet

40, 50: Magnetic sensor element (magnetic sensor for the second rotating magnet)

41, 42, 43, 44: magnetoresistive pattern

51, 52: Magnetic sensor element

60: Magnetic sensor element (magnetic sensor for the first rotating magnet)

61: Magnetic sensor element (first magnetic sensor element)

62: Magnetic sensor element (second magnetic sensor element)

63: Magnetic sensor element (third magnetic sensor element)

64: magneto-sensitive element sensor section (fourth magneto-sensitive element sensor section)

70: The first magnetic sensor

71, 72, 73, 74, 75, 76, 77, 78: magnetic sensor

79: Second magnetic sensor

90: Data Processing Department

91, 92, 93: amplifier

121: Floor section

122: opening

123: Main body

124: protrusion

125: hole

191, 192, 193: screws

201, 202, 203, 204: output line

cos, sin: sine wave signal

GND: ground terminal

HE1N, HE2N: negative output terminal

HE1P, HE2P: positive output terminal

L: rotation axis direction

L1: One side in the rotation axis direction L

L2: the opposite side of the L1 side

VC: voltage terminal

FIG. 1 is an explanatory diagram (perspective view) showing the appearance and the like of an encoder (rotary encoder) to which the present invention is applied.

2 is an explanatory diagram showing the appearance and the like of an encoder to which the present invention is applied (plan view Figure).

Fig. 3 is a side view showing a part of a fixing body to which the encoder of the present invention is applied.

4 is an explanatory diagram showing the layout of a rotary magnet and a magnetic sensor element part to which the encoder of the present invention is applied.

FIG. 5 is an explanatory diagram showing the principle of detection in an encoder to which the present invention is applied.

6 is an explanatory diagram showing the principle of detection in an encoder to which the present invention is applied.

7 is an explanatory diagram showing a basic configuration of a method for determining an angular position in an encoder to which the present invention is applied.

FIG. 8 is a schematic plan view for explaining the arrangement of the magnetic sensor element portion with respect to the rotating magnet in the encoder to which the present invention is applied.

9 is a schematic enlarged view for explaining the arrangement of the magnetic sensor element portion with respect to the rotating magnet in the encoder to which the present invention is applied.

FIG. 10 is a diagram showing the wiring of the magnetic sensor element of the encoder to which the present invention is applied.

FIG. 11 is a diagram showing a Lissajous circle in the case where one magnetic sensor element is used, and there is no external magnetic flux, no variation in magnetic flux, and no rotation deviation of the rotating magnet.

FIG. 12 is a diagram showing a Lissajous circle when two magnetic sensor elements are used, and there is no external magnetic flux, no variation in magnetic flux, and no rotation deviation of the rotating magnet.

13 is a diagram showing a detection angle error when a single magnetic sensor element is used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet Figure.

14 is a diagram showing a detection angle error when two magnetic sensor elements are used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet.

15 is a diagram showing a Lissajous circle in the case where one magneto-sensitive element sensor unit is used and there is external magnetic flux, no variation in magnetic flux, and no rotation deviation of the rotating magnet.

16 is a diagram showing a Lissajous circle when two magnetic sensor elements are used, and there is external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet.

FIG. 17 is a diagram showing a detection angle error when one magnetic sensor element is used and there is external magnetic flux, there is no variation in magnetic flux, and there is no deviation in rotation of the rotating magnet.

FIG. 18 is a diagram showing a Lissajous circle when one magnetic sensor element is used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet.

FIG. 19 is a diagram showing a Lissajous circle when two magnetic sensor elements are used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet.

FIG. 20 is a diagram showing a detection angle error when one magnetic sensor element is used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet.

FIG. 21 is a diagram showing a detection angle error when two magnetic sensor elements are used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet.

22 is a diagram showing the use of four magnetic sensor elements, and there is external magnetic flux, Diagram of Lissajous circle when there is magnetic flux fluctuation and rotation of the rotating magnet is deviated.

FIG. 23 is a diagram showing a detection angle error when four magnetic sensor elements are used, and there is external magnetic flux, there is magnetic flux variation, and there is a deviation in rotation of the rotating magnet.

FIG. 24 is a schematic enlarged view for explaining the arrangement of the magnetic sensor element portion with respect to the rotating magnet in the encoder to which the present invention is applied.

25 is a diagram showing the wiring of the magnetic sensor element of the encoder to which the present invention is applied.

Hereinafter, an embodiment of the encoder (rotary encoder) of the present invention will be described.

In addition, in the following description, an embodiment of a rotary encoder will be described. However, the encoder of the present invention is not limited to a rotary encoder, and may be, for example, a linear encoder.

In the following description, as the rotary encoder, a magnetic type rotary encoder in which the magnetic sensor element portion includes a magnet and a magnetic sensor (magnetoresistive element, Hall element) will be mainly described. At this time, any structure may be adopted in which the magnet is provided on the fixed body and the magneto-sensitive element is provided on the rotating body, and the magnetosensitive element is provided on the fixed body and the magnet is provided on the rotating body. However, in the following description, the description will focus on the structure in which the magnetosensitive element is provided on the fixed body and the rotating magnet is provided on the rotating body. That is, the following "rotating magnet" also includes a case where the rotating magnet does not rotate and the magnetic sensor rotates. condition. In the drawings referred to below, the structure of the rotating magnet and the magneto-sensitive element is schematically shown. For example, the number of magnetic poles in the rotating magnet or the number of output lines from the magneto-sensitive element may be reduced. The situation indicated. In addition, in order to make the structure easy to understand, there are cases where some structural components are omitted (simplified).

(the whole frame)

FIG. 1 is an explanatory diagram showing the appearance and the like of the encoder 1 of the present embodiment, and is a perspective view of the encoder 1 viewed from one side (L1 side) in the rotation axis direction L (L1 side) and obliquely. 2 is an explanatory diagram showing the appearance and the like of the encoder 1 of the present embodiment, and is a plan view seen from one side (L1 side) in the rotation axis direction L. 3 is a side view showing a part of the fixed body 10 of the encoder 1 of this embodiment.

The encoder 1 shown in FIGS. 1 to 3 is a device that magnetically detects the rotation of the rotating body 2 relative to the fixed body 10 around the axis (around the rotation axis). The fixed body 10 is fixed to the frame of the motor device, etc., and rotates The body 2 is used in a state of being connected to a rotary output shaft of a motor device or the like. The fixed body 10 includes a sensor substrate 15 and a plurality of support members 11 that support the sensor substrate 15. In this embodiment, the support member 11 includes a base body 12 including a bottom plate portion 121 formed with a circular opening 122 and a base 12 fixed to The sensor support plate 13 on the base 12. In addition, in FIGS. 1 to 3, although the illustration is omitted for easy observation of the internal structure, the support member 11 is formed at a position facing the support member 11 in the drawing with the rotation axis direction L as a reference 11 A support member 11 having the same structure (one of the support members 11 is formed with a magneto-sensitive element sensor section 61 and a magneto-sensitive element sensor section 62 described later, and the other support member 11 is formed with a magneto-sensitive element sensor section described below 63 And magnetic sensor element 64). In addition, each support member 11 is provided with a magnetic sensor element 60 (magnetic sensor element 61, magnetic sensor element 62, magnetic sensor element 63, and magnetic sensor The element sensor section 64, see FIG. 4), the details of which will be described later. The magneto-sensitive element sensor section 60 is a magneto-sensitive element sensor section that includes a magneto-sensitive element that detects the direction of a magnetic field caused by a plurality of N poles and S poles alternately magnetized in the circumferential direction on the magnetized surface 31 A rotating magnet 30 is formed.

The sensor support plate 13 is fixed to a substantially cylindrical body portion 123 by screws 191, screws 192, and the like, and the substantially cylindrical body portion 123 is on the base body 12 from the edge portion of the opening 122 in the direction of the rotation axis One side on L, that is, the L1 side protrudes. In addition, in FIGS. 1 and 3, the side opposite to the L1 side in the rotation axis direction L is indicated as the L2 side. A plurality of terminals 16 protrude from the sensor support plate 13 toward the L1 side in the rotation axis direction L. On the end surface of the body portion 123 located on the L1 side in the rotation axis direction L, protrusions 124, holes 125, and the like are formed, and the sensor substrate 15 is fixed to the body portion 123 with screws 193 and the like through the holes 125 and the like. At this time, the sensor substrate 15 is fixed with high accuracy in a state where it is positioned at a predetermined position by the protrusion 124 or the like.

In the sensor substrate 15, a connector 17 is provided on the surface on the L1 side in the rotation axis direction L. In addition, the sensor substrate 15 is provided with a magnetic resistance (MR) element (MR element) as a magnetic sensor element sensor section 40 and a Hall element as a magnetic sensor element sensor section 50. The magneto-sensitive element sensor section 40 and the magneto-sensitive element sensor section 50 are magneto-sensitive elements that detect the direction of the magnetic field. The magnetic field is formed by the second rotating magnet 20 having an N pole and an S pole each magnetized on the magnetized surface 21.

The rotating body 2 includes a first rotating magnet 30, a second rotating magnet 20, and the like, and is a cylindrical member disposed inside the body portion 123, and the motor is connected to the inside of the rotating body 2 by a method such as fitting. Rotating output shaft (not shown). Therefore, the rotating body 2 can rotate around the axis.

(Layout of rotating magnet and magnetic sensor element)

4 is an explanatory diagram showing the layout of the rotating magnet and the magnetic sensor element portion of the encoder 1 of this embodiment. Furthermore, in FIG. 4, the arrow indicates the rotation direction of the first rotating magnet 30. In addition, the data processing unit 90 in FIG. 4 includes a central processing unit (CPU) or the like that operates based on a program stored in a memory not shown in advance.

As shown in FIG. 3, in the encoder 1 of the present embodiment, a plurality of magneto-sensitive element sensor sections (four magneto-sensitive element sensor sections 60 that detect the magnetic field of the first rotating magnet 30 and The magnetic sensor element portion 40 of the magnetic field of the two rotating magnets 20 and the two magnetic element sensor portions 50).

The encoder 1 of this embodiment has a first rotating magnet 30 on the side of the rotating body 2 at a position radially outward relative to the second rotating magnet 20. The first rotating magnet 30 is arranged in the circumferential direction The ring-shaped magnetized surface 31 having a plurality of N poles and S poles alternately magnetized toward the L1 side in the rotation axis direction L. In the first rotating magnet 30 of the present embodiment, a total of 32 pairs of N poles and S poles are formed. However, the number of pairs of N poles and S poles is not limited to 32 pairs. Also, the encoder 1 of this embodiment On the side of the fixed body 10, a magneto-sensitive element sensor section 60 (magneto-sensitive element sensor section 61, magneto-sensitive element sensor section 62) opposite to the magnetization surface 31 of the first rotating magnet 30 in the rotation axis direction L on the L1 side is included , The magnetic sensor element 63 and the magnetic sensor element 64). The details of the magnetic sensor element 60 (the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic sensor element 64) will be described later.

The encoder 1 of the present embodiment includes a second rotating magnet 20 having a magnetized surface 21 magnetized with one N pole and one S pole in the circumferential direction toward the L1 side in the rotation axis direction L. Also, the encoder 1 of the present embodiment includes a magneto-sensitive element sensor portion 40 opposed to the magnetization surface 21 of the second rotating magnet 20 on the L1 side in the rotation axis direction L on the side of the fixed body 10, and The magneto-sensitive element sensor portion 50 (the magneto-sensitive element sensor portion 51 and the magneto-sensitive element sensor portion 52) of the magnetized surface 21 of the two rotating magnets 20 facing the L1 side in the rotation axis direction L. The magnetic sensor element 52 is arranged at a position that is offset from the magnetic sensor element 51 by 90° in a mechanical angle around the rotation center axis (circumferential direction).

The first rotating magnet 30 and the second rotating magnet 20 rotate around the axis of rotation integrally with the rotating body 2. The second rotating magnet 20 includes a disc-shaped permanent magnet. The first rotating magnet 30 has a cylindrical shape, and is arranged at a position radially outward from the second rotating magnet 20. The first rotating magnet 30 and the second rotating magnet 20 include bonded magnets and the like.

The magneto-sensitive element sensor section 40 is a magnetoresistive pattern including a phase A (SIN) and a phase B that have a phase difference of 90° with respect to the second rotating magnet 20 in an electrical angle. (COS) magnetoresistive element with a magnetoresistive pattern. In the magneto-sensitive element sensor section 40, the A-phase magnetoresistive pattern includes the +a-phase (SIN+) magnetoresistive pattern 43 and the -a-phase (SIN) having a phase difference of 180° to detect the movement of the rotating body 2 -)的 magnetoresistive pattern 41. The B-phase magnetoresistive pattern includes a +b-phase (COS+) magnetoresistive pattern 44 and a -b-phase (COS-) magnetoresistive pattern 42 having a phase difference of 180° to detect the movement of the rotating body 2. Here, the +a-phase magnetoresistive pattern 43 and the -a-phase magnetoresistive pattern 41 constitute a bridge circuit, and the +b-phase magnetoresistive pattern 44 and the -b-phase magnetoresistive pattern 42 also correspond to the +a-phase The magnetoresistive pattern 43 and the -a phase magnetoresistive pattern 41 similarly constitute a bridge circuit.

In this embodiment, the magneto-sensitive element sensor section 40, the magneto-sensitive element sensor section 51, the magneto-sensitive element sensor section 52, and the magneto-sensitive element sensor section 60 (magneto-sensitive element sensor section 61, magneto-sensitive element sensor section 62, magneto-sensitive The element sensor portion 63 and the magnetic sensor element portion 64) are both provided on the surface on the L2 side in the rotation axis direction L of the sensor substrate 15 (see FIG. 3 ). In addition, the sensor substrate 15 is provided with an amplifier 91 electrically connected to the magnetic sensor element 40, an amplifier 92 electrically connected to the magnetic sensor element 50, and an amplifier 93 electrically connected to the magnetic sensor element 60. Then, the output line 201 is connected from the magnetic sensor element 61 to the data processor 90 via the amplifier 93, the output wire 202 from the magnetic sensor element 62 is connected to the output line 201, and the magnetic wire sensor 63 is connected The output line 203 is connected to the output line 201 closer to the data processing unit 90 side than the connection point of the output line 201 and the output line 202, and the output line 204 from the magnetic sensor element 64 is connected to the output line 203. Furthermore, in FIG. 4, the output line 201, the output line 202, The output line 203 and the output line 204 are simply expressed (see FIG. 10 for details).

The encoder 1 of this embodiment is configured as described above, and can detect the rough absolute position of the second rotating magnet 20 based on the detection results of the magnetic sensor element 40 and the magnetic sensor element 50 (ie, The rough absolute position of the rotating body 2). Further, based on the detection result of the magnetic sensor element section 60, the detailed rotation amount of the first rotating magnet 30 (that is, the detailed rotation amount of the rotating body 2) can be detected. Further, based on the detection results of the magnetic sensor element section 40 and the magnetic sensor element section 50 and the detection results of the magnetic sensor element section 60, the detailed absolute position (angular position) of the rotating body 2 can be detected.

The encoder 1 of this embodiment uses the Hall element as the magnetic sensor element 60 as described above, but a magnetoresistive element (MR element) may be used as the magnetic sensor element 60. When a magnetoresistive element is used as the magneto-sensitive element sensor section 60, the first rotating magnet 30 does not include a ring-shaped magnetization in which a plurality of N poles and S poles are alternately magnetized in a circumferential direction in the circumferential direction as in the present embodiment. For the magnet having the structure of the surface 31, a magnet including the structure of the magnetization surface 31 which is configured such that a plurality of N poles and S poles are alternately magnetized in the circumferential direction on both the inside and the outside can be used. On the inner side and the outer side, the N pole and the S pole are different from each other (checkered pattern: staggered). When a magnetoresistive element is used as the magneto-sensitive element sensor section 60, by using such a first rotating magnet 30, it is possible to use the magnetoresistive element to detect changes in the magnetic field in the circumferential direction and changes in the magnetic field in the radial direction, that is, to detect the rotating magnetic field .

(Detection principle of angular position)

FIG. 5 is an explanatory diagram showing the principle of detection in the encoder 1 of this embodiment. An explanatory diagram of signals and the like output from the magnetic sensor element. 6 is an explanatory diagram showing the detection principle in the encoder 1 of the present embodiment, and is an explanatory diagram showing the relationship between the signal shown in FIG. 5 and the angular position (electrical angle) of the rotating body 2. 7 is an explanatory diagram showing the basic structure of the method of determining the angular position in the encoder 1 of this embodiment.

As shown in FIG. 4, in the encoder 1 of this embodiment, the outputs of the magnetic sensor element 40, the magnetic sensor element 50, and the magnetic sensor element 60 are output via the amplifier 91, the amplifier 92, and the amplifier 93 The data processing unit 90 includes a CPU and the like that perform interpolation processing or various arithmetic processing. The data processing unit 90 obtains the angular position (absolute position) of the rotating body 2 relative to the fixed body 10 based on the outputs from the magnetic sensor element unit 40, the magnetic sensor element unit 50, and the magnetic sensor element unit 60.

More specifically, in the encoder 1, if the rotating body 2 rotates once, the magnetic flux of the magnetized surface 21 of the second rotating magnet 20 changes as indicated by the uppermost sine wave in FIG. 5. If the rotating body 2 rotates once, the second rotating magnet 20 rotates once. Therefore, from the magnetic sensor element 40, as shown in the second sine wave from above in FIG. 5, a sine wave of two cycles is output Signal sin, sine wave signal cos. Therefore, in the data processing unit 90, as shown in FIG. 6, as long as θ=tan-1(sin/cos) is obtained from the sine wave signal sin and the sine wave signal cos, the angular position θ of the rotating body 2 can be known. Furthermore, in this embodiment, the magnetic sensor element 51 and the magnetic sensor element 52 as Hall elements are arranged at positions offset by 90° from the center of the second rotating magnet 20. Therefore, as shown in Figure 5 from the top of the third wave As can be seen from the waveform at the bottom of FIG. 5, it can be known whether the current position is in any one of the sine wave signal sin and the sine wave signal cos, so the absolute angular position of the rotating body 2 can be known.

The detailed structure of the magnetic sensor element 60 will be described later. Each magnetic sensor element 60 (magnetic sensor element 61, magnetic element sensor 62, magnetic element sensor 63, and magnetic element The sensor portion 64) includes a first magneto-sensitive element 70 (see FIG. 8), and a phase difference of 90° with the first magneto-sensitive element 70 in an electrical angle (a phase based on the phase of the first rotating magnet 30 The second magneto-sensitive element 79 (see FIG. 8) at the position of the difference). Furthermore, in the encoder 1 of the present embodiment, the first rotating magnet 30 including a ring-shaped magnetized surface 31 having a plurality of N poles and S poles alternately magnetized in the circumferential direction is used, and each time the rotating body 2 rotates When the magnetic pole of the first rotating magnet 30 is divided into one period, the magnetic sensor elements 60 (the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor The sensor section 63 and the magnetic sensor element section 64) output a sine wave signal sin and a sine wave signal cos. In detail, the sine wave signal cos is output from the first magnetic sensor 70, and the sine wave signal sin is output from the second magnetic sensor 79. Therefore, as for the sine wave signal sin and the sine wave signal cos output from the respective magnetic sensor elements 60, as shown in FIG. 6, as long as θ=tan-1(sin is obtained from the sine wave signal sin and the sine wave signal cos /cos), the angular position θ of the rotating body 2 within an angle corresponding to one period of the magnetic pole of the first rotating magnet 30 is known.

Therefore, in this embodiment, based on the absolute angle of one revolution and one cycle Degree data (the uppermost data in FIG. 7) and incremental angular data for N cycles of one revolution (the second data from the top in FIG. 7) detect the instantaneous angular position of the rotating body 2. Therefore, even when the resolution of the absolute angle data of one revolution and one cycle is low, as shown in the high-resolution absolute value data (the lowermost data in FIG. 7 ), the absolute angle data of high resolution can be obtained .

In the detection method described above, second absolute angle data is prepared by interpolating and dividing the absolute angle data of one rotation and one cycle into the number of magnetic pole pairs of the first rotating magnet 30 (N is a positive integer of 2 or more), and the detection instant is The outputs from the magneto-sensitive element sensor section 40 and the magneto-sensitive element sensor section 50 are located in the period 1, 2...n-1, n, n+1...N of the second absolute angle data Which period of time. Also, it is detected at which position in the period 1, 2...m-1, m, m+1...N that the output from the magnetic sensor element 60 corresponds to the incremental angle data at the moment . In addition, the period of the second absolute angle data at which the output of the magnetic sensor element unit 40 and the magnetic sensor element unit 50 at the instant is set as the superordinate data of the digital data, and the output from the magnetic sensor element unit 60 is equivalent to Which position of the incremental angle data is the lower data of the digital data, and detects the absolute angular position of the rotating body 2 at the instant.

The data processing unit 90 shown in FIG. 4 is provided with a memory (not shown) that stores the second absolute angle data and the incremental angle data. In addition, the data processing unit 90 is provided with an angular position determination unit (not shown) based on the instantaneous output from the magnetic sensor element unit 40 and the magnetic sensor element unit 50 and the instantaneous The output of the magnetic sensor element 60, the second absolute angle data stored in the memory, and the incremental angle data stored in the memory determine the instant The absolute angular position of the rotating body 2 between.

(Arrangement of the magnetic sensor element 60 relative to the first rotating magnet 30)

Next, the configuration of the magneto-sensitive element sensor section 60 of the encoder 1 of this embodiment and the arrangement of the magneto-sensitive element sensor sections 60 with respect to the first rotating magnet 30 will be described.

Here, FIG. 8 is a diagram for explaining the magneto-sensitive element sensor section 60 (magneto-sensitive element sensor section 61, magneto-sensitive element sensor section 62, magneto-sensitive element with respect to the first rotating magnet 30 in the encoder 1 of the present embodiment Schematic plan view of the arrangement of the sensor portion 63 and the magnetic sensor element 64). In addition, in FIG. 8, the arrow indicates the rotation direction of the first rotating magnet 30. 9 is a diagram for explaining the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic sensor of the first rotary magnet 30 in the encoder 1 of this embodiment. A schematic enlarged view of the arrangement of the unit 64. FIG. 10 shows the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic sensor element 64 relative to the first rotating magnet 30 in the encoder 1 of this embodiment. Diagram of the wiring.

As shown in FIGS. 8 and 9, the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic sensor element 64 of this embodiment each include two magnetic elements (first The magneto-sensitive element 70 and the second magneto-sensitive element 79). Specifically, the magneto-sensitive element sensor section 61 includes the magneto-sensitive element 71 as the first magneto-sensitive element 70 and the magneto-sensitive element 72 as the second magneto-sensitive element 79, and the magneto-sensitive element sensor section 62 includes as the first magneto-sensitive element 70 magnetic sensitive element 73 and as the second magnetic sensitive The magnetic sensor 74 of the element 79, the magnetic sensor element 63 includes the magnetic sensor 75 as the first magnetic sensor 70 and the magnetic sensor 76 as the second magnetic sensor 79, and the magnetic sensor sensor 64 includes as the first A magnetic sensor 77 of a magnetic sensor 70 and a magnetic sensor 78 as a second magnetic sensor 79. The magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic sensor element 64 of this embodiment differ only in the arrangement with respect to the first rotating magnet 30, and the rest are the same.

Furthermore, as shown in FIG. 9, in the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic element sensor 64, the first magnetic element 70 and the second magnetic element 79 are arranged at positions corresponding to the N pole and S pole of the magnetized surface 31 of the first rotating magnet 30 with a phase difference of 90° in electrical angle (positions separated by 1/4 period in terms of magnetic period) )on. The magnetic sensor element 60 of this embodiment is formed in such a structure, and as described above, each time the rotating body 2 rotates one period of the magnetic pole of the first rotating magnet 30, a sine wave signal sin, a sine wave is output Signal cos.

Further, as shown in FIG. 9, the magnetic sensor element 62 is arranged to output a signal having a phase difference of 540° in electrical angle with respect to the output of the magnetic element sensor 61 (separated by one and a half on a magnetic period meter) Cycle position). Further, as shown in FIGS. 8 and 9, the magnetic sensor element 63 is disposed at a position that is 180° offset from the magnetic sensor element 61 by a mechanical angle (a position that is offset by 180° in the circumferential direction by a mechanical angle) In the above, the magnetic sensor element 64 is disposed at a position that is 180° offset from the magnetic sensor element 62 by a mechanical angle.

That is, with respect to the first magneto-sensitive element from the magneto-sensitive element sensor section 61, that is The output of the magnetic sensitive element 71 and the output of the magnetic sensitive element 73 which is the first magnetic sensitive element of the magnetic sensitive element sensor section 62 deviate from the sine wave signal cos by 1/2 period in terms of the magnetic period. In addition, the output of the first magnetic sensor 75 which is the first magnetic sensor from the magnetic sensor element 63 does not have a sine wave signal cos with respect to the output of the first magnetic sensor 71 which is the first magnetic sensor from the magnetic sensor element 61. Of phase deviation. In addition, with respect to the output of the first magnetic sensor element 64 that is the first magnetic sensor element of the magnetic sensor element portion 63, the sine wave signal Cos deviates by 1/2 period in terms of magnetic period.

Similarly, with respect to the output of the second magneto-sensitive element, ie, the magneto-sensitive element 72 from the magneto-sensitive element sensor section 61, the sine wave The signal sin deviates by 1/2 period in terms of magnetic period. Furthermore, the output of the second magnetic sensor element 63 which is the second magnetic sensor element of the magnetic sensor element 63 does not have a sinusoidal wave signal sin with respect to the output of the magnetic sensor element 72 which is the second magnetic sensor element of the magnetic sensor element 61 Of phase deviation. In addition, the sine wave signal is output from the output of the magnetic sensor 78 which is the second magnetic sensor of the magnetic sensor element 64 with respect to the output of the magnetic sensor 76 which is the second magnetic sensor of the magnetic sensor element 63. Sin deviates by 1/2 period in terms of magnetic period.

As described above, in this embodiment, the wiring is formed as shown in FIG. 10. Here, VC in the figure represents the voltage terminal, GND represents the ground terminal, HE1P represents the positive output terminal from the first magnetic sensitive element 70, HE1N represents the negative output terminal from the first magnetic sensitive element 70, and HE2P represents the second magnetic The positive output terminal of the sensitive element 79, HE2N represents the negative output terminal from the second magnetic sensitive element 79. With Specifically, the positive and negative poles of the output line 202 of the magnetic sensor element 62 are connected to the output line 201 of the magnetic sensor element 61 in reverse. The positive and negative poles of the output line 204 of the magnetic sensor element 64 are connected to the output line 203 of the magnetic sensor element 63 in reverse. In addition, the output line 203 connected to the output line 204 is connected to the output line 201 connected to the output line 202 with positive electrodes and negative electrodes.

(Effect of the encoder 1 of this embodiment)

Next, the effect of the encoder 1 of this embodiment will be described.

Here, FIG. 11 is a diagram showing a Lissajous circle when only one magnetic sensor element 61 is used, and there is no external magnetic flux, no variation in magnetic flux, and no rotation deviation of the rotating magnet. 12 is a diagram showing the Lissajous circle when two magnetic sensor elements 61 and 62 are used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet . 13 is a diagram showing a detection angle error when only one magnetic sensor element 61 is used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet. 14 is a diagram showing a detection angle error when two magnetic sensor elements 61 and 62 are used, and there is no external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet. 15 is a diagram showing a Lissajous circle when only one magnetic sensor element 61 is used, and there is external magnetic flux, there is no magnetic flux variation, and there is no rotation deviation of the rotating magnet. 16 is a diagram showing a Lisaru circle when two magnetic sensor elements 61 and 62 are used, and there is external magnetic flux, no magnetic flux fluctuation, and no rotation deviation of the rotating magnet . Also, FIG. 17 shows that only one magnetic sensor element 61 is used, and there is an external magnetic A diagram of the detected angle error when there is no magnetic flux fluctuation and no rotation deviation of the rotating magnet. 18 is a diagram showing a Lissajous circle when only one magnetic sensor element 61 is used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet. 19 is a diagram showing the Lissajous circle when two magnetic sensor elements 61 and 62 are used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet . In addition, FIG. 20 is a diagram showing a detection angle error when only one magnetic sensor element 61 is used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet. Furthermore, FIG. 21 is a diagram showing a detection angle error when two magnetic sensor elements 61 and 62 are used, and there is external magnetic flux, there is magnetic flux variation, and there is no rotation deviation of the rotating magnet. 22 shows the use of four magnetic sensor element 61, magnetic sensor element 62, magnetic sensor element 63 and magnetic element sensor 64, and there is external magnetic flux, there is magnetic flux fluctuations, there is rotation Diagram of Lisajo circle with rotation of magnet deviated. 23 shows the use of four magnetic sensor element 61, magnetic sensor element 62, magnetic element sensor 63 and magnetic element sensor 64, and there is an external magnetic flux, there is flux variation, there is rotation A diagram of the detected angle error when the rotation of the magnet deviates.

11, 15 and 18 are when the maximum temperature (Max) is set to 25°C, -20°C, 105°C, and the minimum temperature (Min) is set to 25°C, -20°C, 105 In the case of ℃, the horizontal axis is the Lissajous circle of the differential voltage (unit V) of the magnetic sensor 71 and the vertical axis is the differential voltage (unit V) of the magnetic sensor 72. In addition, in FIGS. 12, 16 and 19, the maximum temperature is set to 25°C, In the case of -20°C, 105°C, and when the minimum temperature is 25°C, -20°C, 105°C, the horizontal axis is the differential voltage (unit) between the magnetic sensor 71 and the magnetic sensor 73 Is V), and the vertical axis is the Lissajous circle of the differential voltage (in V) between the magnetic sensitive element 72 and the magnetic sensitive element 74. 22 is a case where the maximum temperature is set to 25 °C, -20 °C, 105 °C, and the minimum temperature is set to 25 °C, -20 °C, 105 °C, the horizontal axis is the magnetic sensor 71. The differential voltage (unit V) of the magnetic sensor 73, the magnetic sensor 75 and the magnetic sensor 77, the vertical axis is set to the magnetic sensor 72, the magnetic sensor 74, the magnetic sensor 76 and the magnetic sensor The Lissajous circle of the differential voltage (in V) in 78.

13, FIG. 14, FIG. 17, FIG. 20, FIG. 21 and FIG. 22 show the case where the highest temperature is set to 25° C., -20° C., 105° C., and the lowest temperature is set to 25° C., -20 In the case of ℃ and 105°C, the horizontal axis is the angular position of the first rotating magnet 30 (unit is degree (deg)), and the vertical axis is the detection angle error of detection angle error (unit is degree (deg)) Graph.

When there is no external magnetic flux, magnetic flux fluctuation, or rotation deviation of the first rotating magnet 30, if only one magnetic sensor element 61 is used, there may be a Lissajous circle as shown in FIG. 11, There are also cases where an angle error is detected as shown in FIG. 13. On the other hand, if two magnetic sensor elements 61 and 62 are used, a Lissajous circle as shown in FIG. 12 is formed, and as shown in FIG. 14, almost no angle error is detected .

The Lisaru circle shown in FIG. 12 becomes a Lisaru circle concentric with the intersection of the horizontal axis 0V and the vertical axis 0V as the center. Therefore, as shown in FIG. 14, the detection angle The degree error is approximately 0 from 0 degrees to 360 degrees. On the other hand, the Lisaru circle shown in FIG. 11 is not a Lisaru circle centered on the intersection of the horizontal axis 0V and the vertical axis 0V, and an angular error is detected as shown in FIG. 13.

Furthermore, when four magnetic sensor elements 61, magnetic sensor elements 62, magnetic sensor elements 63, and magnetic sensor elements 64 are used, two magnetic sensor elements 61 and magnetic elements are used In the case of the sensor unit 62, it is formed into a Lisaru circle having substantially the same shape as the Lisaru circle shown in FIG. 12, and is almost undetected like the graph of the angle error shown in FIG. 14. Out of angle error.

When there is external magnetic flux, there is no magnetic flux fluctuation and the rotation deviation of the first rotating magnet 30, if only one magnetic sensor element 61 is used, a Lissajous circle as shown in FIG. 15 is formed and detected Angle error as shown in FIG. 17. On the other hand, if two magnetic sensor elements 61 and 62 are used, the Lissajous circle as shown in FIG. 16 (which is almost the same as the Lissajous circle shown in FIG. 12 is formed) ), and as shown in Fig. 14, almost no angle error was detected.

When two magnetic sensor elements 61 and 62 are used, the reason why the angle error is hardly detected is that they are close to the magnetic sensor element 61 and the magnetic sensor 62 Detecting the magnetic field separately and combining these detection results (total signal) can eliminate the influence of the external magnetic field on the change of the magnetic field (offset of the magnetic field due to the external magnetic field). In particular, as in the present embodiment, the configuration in which the detection results of the magnetic sensor element 61 and the magnetic sensor element 62 are inverted and combined can be effectively eliminated The influence of external magnetic field on the change of magnetic field.

Furthermore, when four magnetic sensor elements 61, magnetic sensor elements 62, magnetic sensor elements 63, and magnetic sensor elements 64 are used, two magnetic sensor elements 61 and magnetic elements are used In the case of the sensor unit 62, it is formed into a Lisaru circle having substantially the same shape as the Lisaru circle shown in FIG. 16, and is almost undetected like the graph of the angle error shown in FIG. 14. Out of angle error.

When there is external magnetic flux and magnetic flux variation and there is no rotation deviation of the first rotating magnet 30, if only one magnetic sensor element 62 is used, a Lissajous circle as shown in FIG. 18 is formed and detected The angle error as shown in Fig. 20. In addition, if two magnetic sensor elements 61 and 62 are used, a Lissajous circle as shown in FIG. 19 is formed, and an angle error as shown in FIG. 21 is detected. That is, when two magneto-sensitive element sensor sections 61 and 62 are used, although it is inferior to the case where only one magneto-sensitive element sensor section 62 is used, an angle error is detected.

On the other hand, when four magnetic sensor elements 61, 62, 63, and 64 are used, they are formed as Lisaru circles shown in FIG. 16. The Lisaru circle of substantially the same shape has almost no angle error detected as in the angle error graph shown in FIG. 14. When four magnetic sensor element 61, magnetic sensor element 62, magnetic element sensor 63, and magnetic element sensor 64 are used, the reason why the angle error is hardly detected is that Part 61 and magnetic sensor transmission The sensor portion 63 and the magnetic sensor element portion 62 and the magnetic sensor element portion 64 are located at opposite positions (in other expressions, they are arranged at substantially equal intervals with respect to the first rotating magnet 30), and Combining these detection results (total signal) can eliminate the influence of magnetic flux fluctuations on magnetic field changes (magnetic field bias due to magnetic flux fluctuations).

Furthermore, when there is a fluctuation in magnetic flux, there is no external magnetic flux and the rotational deviation of the first rotating magnet 30, etc., for example, even if both the magnetic sensor element 61 and the magnetic sensor element 63 are used, or the magnetic sensor Both the portion 62 and the magnetic sensor element portion 64 can also effectively suppress the angle error. The reason for this is that, even with this structure, the magnetic fields can be detected at substantially equal intervals with respect to the first rotating magnet 30, and these detection results can be combined (total signals) to eliminate the magnetic field fluctuations that affect the magnetic field. Effect of change (offset of magnetic field due to flux fluctuation).

When the external magnetic flux, the magnetic flux fluctuation, and the rotational deviation of the first rotating magnet 30 are all present, if only one magnetic sensor element 62 is used, it is formed substantially the same as the Lissajous circle shown in FIG. 18 Lisaru circle, and detected the same angle error as shown in FIG. 20. Furthermore, if two magneto-sensitive element sensor sections 61 and 62 are used, a Lissajous circle that is substantially the same as the Lissajous circle as shown in FIG. 19 is formed and detected as shown in FIG. 21 The angular error as shown is the same angular error. In addition, if four magnetic sensor elements 61, 62, 63 and 63 are formed, the Lissajous circle is formed as shown in FIG. 22, and An angle error as shown in FIG. 23 is detected. The curve of the angle error shown in Figure 23 In the line diagram, the angular error is in the shape of a sine wave.

When the angle error takes the form of a sine wave, a high-precision error detection device (for example, an optical encoder capable of detecting an angle error optically) or the like can be used to simply correct the angle error. Hereinafter, as an example of the method of correcting the angle error, a method of correcting the angle error by creating a correction table will be described. However, it is not limited to this correction method.

The angle error correction method is a method (correction table creation method) executed by a correction table creation device (in this embodiment, the data processing unit 90). The correction table creation device generates a signal based on the magnetic sensor On the other hand, a correction table that corrects the error of the encoder 1 that detects the angular position of the first rotating magnet 30. Then, by using a high-precision error detection device (not shown), an error of the angular position of the first rotating magnet 30 detected by the encoder 1 to be measured for one revolution is calculated, and the calculated rotation Fourier transform (Fourier transform) of the error of one circle is performed, and the inherent error component is measured, and only the value of the main error period component of the calculated inherent error component is inverse Fourier transformed, and the error amount at each angular position is used as a correction The value correction table stores the created correction table in the storage unit of the encoder 1 (in this embodiment, the memory provided in the data processing unit 90). As described above, the correction table is created using the main error period component, and the angle error can be corrected by creating the correction table with high accuracy.

If expressed otherwise, the encoder 1 of this embodiment is a correction table creation device that creates a correction table that corrects the error of the encoder 1 that detects the angular position based on the signal of the magnetic sensor. And, including: one rotation error calculation component, Using a high-precision error detection device, calculate the error of the angular position of the first rotating magnet 30 detected by the encoder 1 for one rotation; the inherent error component calculation component is determined by the error calculation component for the one rotation The calculated error of one revolution is Fourier transformed to calculate the inherent error component; the correction table creation component performs inverse Fourier transform only on the value of the main error period component of the inherent error component calculated by the inherent error component calculation component, On the other hand, a correction table in which the amount of error at each angular position is set as a correction value is created; and a correction table storage unit stores the correction table created by the correction table creation unit in the storage unit of the encoder 1. Because of this structure, the correction table is created using the main error period component among the inherent error components, and the angle error can be corrected by creating a high-precision correction table.

In addition, the encoder 1 of the present embodiment is configured to suppress the influence of higher harmonics. Specifically, as described above, the encoder 1 of the present embodiment includes the detection results (detection data) based on the magnetic sensor element section 40, the magnetic sensor element section 50, and the magnetic sensor element section 60, and is determined by data processing A data processing unit 90 that extracts the angular position of the rotating body 2 is provided with a harmonic elimination pattern that eliminates harmonics of a predetermined order (for example, seven times) or less, and the data processing unit 90 is formed to be able to use the cancellation to exceed the predetermined The correction data of the higher-order harmonic of the order corrects the detection data of the magnetic sensor element 60. That is, it is configured to be able to eliminate higher harmonics below a predetermined order (for example, seventh or less) using a harmonic elimination pattern, and use the correction data to eliminate high harmonics exceeding a predetermined order (for example, more than seventh order) Subharmonic.

(Examples of other structures)

Next, an embodiment having a configuration different from that of the encoder 1 (a configuration having a different arrangement of the magnetic sensor element 60) will be described with reference to FIGS. 24 and 25. 24 is a schematic diagram for explaining the arrangement of the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic sensor element 64 with respect to the first rotating magnet 30 in the encoder 1. The enlarged view corresponds to FIG. 9. 25 is a diagram showing the wiring of the magnetic sensor element 61, the magnetic sensor element 62, the magnetic sensor element 63, and the magnetic sensor element 64 of the first rotating magnet 30 in the encoder 1. Is a diagram corresponding to FIG. 10.

In the encoder 1 shown in FIGS. 9 and 10, the outputs of the magnetic sensor element 61 and the magnetic sensor sensor 62 and the output of the magnetic sensor element 63 and the magnetic sensor sensor 64 are at an electrical angle. They are arranged at intervals of 540°, and the magnetic sensor element 61 and the magnetic sensor element 63 are arranged at an interval of 180° in mechanical angle (see FIG. 9 ). On the other hand, in the encoder 1 shown in FIGS. 24 and 25, the outputs of the magnetic sensor element 61 and the magnetic sensor sensor 62, and the outputs of the magnetic sensor element 63 and the magnetic sensor sensor 64 The magnetic sensor element 61 and the magnetic sensor element 63 are arranged at an interval of 360° in an electrical angle meter, and are arranged at an interval of 180° in a mechanical angle and 180° in a positive electrical angle (see FIG. 24 ).

As described above, in the encoder 1 shown in FIGS. 9 and 10, etc., the magnetic sensor element 61 and the magnetic sensor element 62, and the magnetic element sensor 63 and the magnetic element sensor 64 are The phase of the first rotating magnet 30 is arranged with the magnetic cycle deviated by 1/2 cycle. In addition, the magnetic sensor element 61 The magnetic sensor element 63 is arranged so that the phase of the first rotating magnet 30 does not deviate from the phase. On the other hand, in the encoder 1 shown in FIGS. 24 and 25, the magnetic sensor element 61 and the magnetic sensor element 62, and the magnetic element sensor 63 and the magnetic element sensor 64 are the first The phase of the rotating magnet 30 is arranged so that the reference phase does not deviate. In addition, the magnetic sensor element 61 and the magnetic sensor element 63 are arranged with the phase of the first rotating magnet 30 deviated by 1/2 of the period of the magnetic period.

Therefore, the wiring of the encoder 1 shown in FIGS. 24 and 25 is formed as shown in FIG. 25. Specifically, the output line 202 of the magnetic sensor element 62 is connected to the output line 201 of the magnetic sensor element 61 with positive electrodes and negative electrodes. The output line 204 of the magnetic sensor element 64 is connected to the output line 203 of the magnetic sensor element 63 with positive electrodes and negative electrodes. In addition, the positive and negative poles of the output line 203 connected to the output line 204 are reversely connected to the output line 201 connected to the output line 202.

In addition, in the encoder 1 shown in FIGS. 9 and 10 and the like, and the encoder 1 shown in FIGS. 24 and 25, the magnetic sensor element 61 and the magnetic sensor element 63 and the magnetic sensor The portion 62 and the magnetic sensor element portion 64 are arranged at an interval of 180° or approximately 180° in mechanical angle, but it is not limited to this structure. For example, the magnetic sensor elements may be arranged at intervals of approximately 120° in mechanical angle with respect to the magnetic sensor element 61 and the magnetic sensor element 62 on both sides in the circumferential direction (ie, at equal intervals) Or three magneto-sensitive element sensor portions are arranged at substantially equal intervals). Similarly, it can also be arranged at equal intervals or substantially equal intervals Place more than four magnetic sensor elements. However, it is preferable that the outputs of the magnetic sensor elements are positioned at a phase difference of an integer multiple of 180° in electrical angle. Because of this structure, it is possible to effectively eliminate the influence of magnetic flux fluctuations by combining the detection results of the various magnetic sensor elements.

In addition to the arrangement of the magnetic sensor element 60, the magnetic sensor element 40 or the magnetic sensor element 50 may have other configurations. That is, the encoder 1 shown in FIG. 4 includes a magneto-sensitive element sensor portion 40 that is a magnetoresistive element located at a position facing the center of the second rotating magnet 20, and a sensor located at a position facing the second rotating magnet 20. Magnetic element sensor portion 51, which is a magnetic element, and a magnetic element, which is a Hall element located at a position facing the second rotating magnet 20 and deviating from the magnetic sensor element portion 51 in the circumferential direction by a mechanical angle of 90° The sensor unit 52 can be configured as another structure as long as the rough absolute position of the second rotating magnet 20 can be detected.

For example, the encoder 1 shown in FIG. 4 may be configured such that the magneto-sensitive element sensor section 40 is omitted, that is, includes a magneto-sensitive element sensor that is a Hall element located at a position facing the second rotating magnet 20 The structure of the magnetic sensor element 52, which is a Hall element located at a position opposed to the second rotating magnet 20 and a mechanical angle in the circumferential direction with respect to the magnetic sensor element 51, is offset by 90°. Even with this structure, since the Hall element, that is, the magnetic sensor element portion 51 and the magnetic sensor element portion 52 can detect the direction of the magnetic field from the N pole to the S pole, the roughness of the second rotating magnet 20 can also be detected Absolute position.

In addition, for example, a configuration may be adopted in which the magnetic sensor element 40 is omitted in the encoder 1 shown in FIG. 4, and the magnetic sensor element 51 is deviated by 180° in the mechanical direction in the circumferential direction from the magnetic sensor element 51. The magnetic element sensor portion, which is a Hall element, is provided at a position where the magnetic element sensor portion, which is a Hall element, is provided at a position that is 180° apart from the magnetic sensor element portion 52 in the circumferential direction by a mechanical angle. Even with this structure, since the four Hall elements, that is, the magnetic sensor element portions, can detect the direction of the magnetic field from the N pole to the S pole, the rough absolute position of the second rotating magnet 20 can also be detected.

Here, if the encoder 1 to which the present invention can be applied is summarized, the encoder 1 to which the present invention can be applied includes: a first rotating magnet 30 which is a magnet having a plurality of N poles and S poles alternately magnetized; And a plurality of magneto-sensitive element sensor sections 60, including a first magneto-sensitive element 70 that detects the position of the first rotating magnet 30, and a phase difference of 90° in electrical angle with respect to the output of the first magneto-sensitive element 70 The second magneto-sensitive element 79 that detects the position of the first rotating magnet 30.

As shown in FIGS. 8 and 9, as the magnetic sensor element 60, at least the magnetic sensor element 61 as the first magnetic sensor element and the magnetic element as the second magnetic sensor element are provided. The sensor section 62, the magnetic sensor element section 61, and the magnetic sensor element section 62 are arranged in such a manner that the output and magnetic sensitivity of the first magnetic sensor element 70, that is, the magnetic sensor element 71 of the magnetic sensor element section 61 The output of the first magneto-sensitive element 70 of the element sensor section 62, that is, the magneto-sensitive element 73, and the output of the second magneto-sensitive element 79 of the magneto-sensitive element sensor section 61, that is, the magneto-sensitive element 72, and the second of the magneto-sensitive element sensor section 62 The output of the magnetic sensitive element 79, that is, the magnetic sensitive element 74 It is placed at a position having an odd multiple of 180° (specifically 540°) in electrical angle, that is, 30° or less in mechanical angle.

Further, as shown in FIG. 10, the positive output terminal HE1P and the positive output terminal HE2P of the magnetic sensor element 61 are connected to the negative output terminal HE1N and the negative output terminal HE2N of the magnetic sensor element 62 to connect the magnetic sensor The negative output terminal HE1N and the negative output terminal HE2N of the unit 61 are connected to the positive output terminal HE1P and the positive output terminal HE2P of the magnetic sensor element 62.

By including a plurality of magneto-sensitive element sensor sections 60 provided with magneto-sensitive elements at positions that can be detected with an electrical angle meter at a phase difference of 90°, the encoder 1 can be formed with high accuracy. In addition, the output of the first magneto-sensitive elements 70 and the output of the second magneto-sensitive elements 79 are arranged at positions having an odd multiple of 180° in electrical angle, that is, 30° or less in mechanical angle On the other hand, the first magnetic sensor element 61 and the second magnetic sensor element 62 are arranged, and the positive output terminal HE1P and the positive output terminal HE2P of the magnetic sensor element 61 and the negative output terminal of the magnetic sensor element 62 are arranged. HE1N and the negative output terminal HE2N are connected, and the negative output terminal HE1N and the negative output terminal HE2N of the magnetic sensor element 61 are connected to the positive output terminal HE1P and the positive output terminal HE2P of the magnetic sensor element 62. That is, by inverting and averaging one of the outputs of the magnetic sensor element 61 and the magnetic sensor element 62 arranged at a position that is phase-shifted by 1/2 period of the magnetic cycle, that is, a close position , Can suppress the influence of external magnetic flux. For example, when the power supply line in which a large current flows outside the encoder 1 approaches, in order to make the first magneto-sensitive element sensor section 61 and the second magneto-sensitive element sensor section 62 relative to the The generated magnetic field cancels the magnetic flux at the same level, and it can be arranged at a mechanical angle of 30° or less to suppress the influence of external magnetic flux.

In the above description, the magnetic sensor element 61 is set as the first magnetic sensor element, and the magnetic element sensor 62 is set as the second magnetic element sensor, but it may be The magnetic sensor element 62 is regarded as a first magnetic sensor element, and the magnetic sensor element 61 is regarded as a second magnetic sensor element. Similarly, the magnetic sensor element 63 may be regarded as the first magnetic sensor element, the magnetic sensor element 64 may be regarded as the second magnetic sensor element, and the magnetic element sensor 64 may be regarded as the first A magneto-sensitive element sensor section, the magneto-sensitive element sensor section 63 is regarded as a second magneto-sensitive element sensor section.

Further, as shown in FIG. 24, in the encoder 1 to which the present invention can be applied, as the magnetic sensor element 60, at least the magnetic sensor element 61 and the magnetic sensor element 62 are provided, and the magnetic sensor element 61 and The magnetic sensor element 62 is configured in such a manner that the output of the first magnetic sensor 70 of the magnetic sensor element 61, that is, the output of the magnetic sensor 71 and the first magnetic sensor 70 of the magnetic sensor element 62 That is, the output of the magnetic sensor 73, and the output of the second magnetic sensor 79 of the magnetic sensor element 61, that is, the magnetic sensor 72 and the output of the second magnetic sensor 79 of the magnetic sensor element 62, that is, the magnetic sensor 74 It is arranged at a position having a phase difference of an even multiple of 180° (specifically 360°) in electrical angle, that is, 30° or less in mechanical angle.

Further, as shown in FIG. 25, the positive output terminal HE1P and the positive output terminal HE2P of the magnetic sensor element 61 are connected to the positive output terminal HE1P and the positive output terminal HE2P of the magnetic sensor element 62 to connect the magnetic sensor Department 61 The negative output terminal HE1N and the negative output terminal HE2N are connected to the negative output terminal HE1N and the negative output terminal HE2N of the magnetic sensor element 62.

By including a plurality of magneto-sensitive element sensor sections 60 provided with magneto-sensitive elements at positions that can be detected with an electrical angle meter at a phase difference of 90°, the encoder 1 can be formed with high accuracy. In addition, the output of the first magneto-sensitive elements 70 and the output of the second magneto-sensitive elements 79 are arranged at positions having an even multiple of 180° in phase difference in electrical angle, that is, 30° or less in mechanical angle The magnetic sensor element 61 and the magnetic sensor element 62 are arranged, and the positive output terminals HE1P and HE2P of the magnetic sensor element 61 and the positive output terminals HE1P and positive output terminals of the magnetic sensor element 62 are arranged. HE2P is connected to connect the negative output terminal HE1N and the negative output terminal HE2N of the magnetic sensor element 61 to the negative output terminal HE1N and the negative output terminal HE2N of the magnetic sensor element 62. That is, by averaging the outputs of the magnetic sensor element section 61 and the magnetic sensor element section 62 arranged at a position without phase shift (a position shifted by one period in terms of the magnetic cycle), that is, a close position, it can be suppressed Influence of external magnetic flux. For example, when the power supply line in which a large current flows outside the encoder 1 approaches, in order to cause the first magnetic sensor element 61 and the second magnetic sensor element 62 to cancel the magnetic flux at the same level with respect to the generated magnetic field It can be placed at a mechanical angle of 30° or less to suppress the influence of external magnetic flux.

In addition, in the encoder 1 to which the present invention can be applied, the magnetic sensor element 61 and the magnetic sensor element 62 are a magnetic sensor 71 which is the first magnetic sensor of the magnetic sensor element 61 and the magnetic sensor Part 62 of the first magneto-sensitive element That is, the magnetic sensor 73 and the second magnetic sensor 72 of the magnetic sensor element 61 and the second magnetic sensor 74 of the magnetic sensor sensor 62 are arranged in two Within a narrow range within a period. Therefore, the influence of external magnetic flux can be effectively suppressed.

As shown in FIGS. 8 and 9, in the encoder 1 to which the present invention can be applied, the magnetic sensor element 60 includes the first magnetic sensor 70 and the second magnetic sensor 79 in one package. Therefore, the first magneto-sensitive element 70 and the second magneto-sensitive element 79 can be positioned with high accuracy, and the encoder 1 can be formed with particularly high accuracy.

In addition, as described above, in the encoder 1 to which the present invention can be applied, the first magneto-sensitive element 70 and the second magneto-sensitive element 79 are Hall elements, and can independently detect the direction of the magnetic field (discrimination of N pole and S pole) Therefore, the encoder 1 can be formed inexpensively.

However, as described above, the first magneto-sensitive element 70 and the second magneto-sensitive element 79 may be magnetoresistive elements. By doing so, the rotating magnetic field of the opposing magnets is detected, so that even if the magnetic flux intensity fluctuates due to uneven magnetization or jitter of the rotating portion, the rotating position can be stably detected.

Further, as shown in FIG. 4 and the like, the encoder 1 to which the present invention can be applied includes a first rotating magnet 30 in which a plurality of N poles and S poles are alternately magnetized in the circumferential direction, and detecting the position of the first rotating magnet 30 as The magneto-sensitive element sensor section 60 of the magneto-sensitive element for the first rotating magnet, the second rotating magnet 20 that can rotate together with the first rotating magnet 30 and magnetize the N pole and the S pole in the circumferential direction, and detects the second rotating magnet The magnetic sensor element 40, which is a magnetic sensor for the second rotating magnet at the position 20 And magnetic sensor element 50. Therefore, the second rotating magnet 20 and the magnetic sensor element portion 40 and the magnetic sensor element portion 50 can detect not only the amount of rotation of the first rotating magnet 30 (rotating body 2) but also the absolute position (angular position).

In addition, the encoder 1 includes a second rotating magnet 20 having N and S poles magnetized in the circumferential direction, but as long as it can detect the absolute position (angular position) of the rotating body 2 The structure of the second rotating magnet 20 is not limited to a structure in which one N pole and one S pole are magnetized in the circumferential direction.

As shown in FIGS. 8 and 9, the encoder 1 to which the present invention can be applied is a first rotary magnet 30 which is a rotary encoder in which a plurality of N-pole and S-pole rotating magnets are alternately magnetized in the circumferential direction. As the magnetic sensor element 60, in addition to the magnetic sensor element 61 as the first magnetic sensor element and the magnetic element sensor 62 as the second magnetic sensor element, the first rotating magnet 30 is also used. The opposite side of the magneto-sensitive element sensor section 61 and the magneto-sensitive element sensor section 62 based on the rotation axis of the magnetic field is provided with a magnet as the third magneto-sensitive element sensor section including the first magneto-sensitive element 70 and the second magneto-sensitive element 79 The sensitive element sensor section 63 and the magnetic sensitive element sensor section 64 as the fourth magnetic sensitive element sensor section including the first magnetic sensitive element 70 and the second magnetic sensitive element 79.

As described above, by providing the magneto-sensitive element sensor section (third magneto-sensitive element) at least on the opposite side of the first magneto-sensitive element sensor section or the second magneto-sensitive element sensor section based on the rotation axis of the first rotary magnet 30 Sensor section), even when the magnetic flux fluctuation occurs in the first rotating magnet 30, the output (detection result) from the first magnetosensitive element sensor section or the second magnetosensitive element sensor section can be used The magnetic flux variation is suppressed from the output (detection result) of the third magnetic sensor element (the structure shown in FIGS. 8 and 9 etc., and from the fourth magnetic sensor element according to circumstances). Impact.

Here, the "opposite side" refers to a mechanical angle of 90° or more and 270° or less.

In the above description, the magnetic sensor element 61 is the first magnetic sensor element, the magnetic sensor element 62 is the second magnetic sensor element, and the magnetic element sensor is the 63 is set as the third magneto-sensitive element sensor section, and the magneto-sensitive element sensor section 64 is set as the fourth magneto-sensitive element sensor section. However, the magneto-sensitive element sensor section 62 may be regarded as the first magneto-sensitive element sensor section. , The magnetic sensor element 61 is regarded as the second magnetic sensor sensor, the magnetic sensor sensor 64 is regarded as the third magnetic sensor sensor, and the magnetic sensor sensor 63 is regarded as the fourth magnetic sensor unit. Similarly, the magnetic sensor element 63 may be regarded as the first magnetic sensor element, the magnetic sensor element 64 may be regarded as the second magnetic sensor element, and the magnetic element sensor 61 may be regarded as the third For the magnetic sensor element, the magnetic sensor element 62 is regarded as the fourth magnetic sensor element, and the magnetic element sensor 64 is regarded as the first magnetic element sensor, and the magnetic sensor element 63 is regarded as The second magneto-sensitive element sensor section regards the magneto-sensitive element sensor section 62 as a third magneto-sensitive element sensor section, and the magneto-sensitive element sensor section 61 as a fourth magneto-sensitive element sensor section. In addition, other magnetic sensor elements may be provided.

However, the magneto-sensitive element sensor section 60 may also include as the first magneto-sensitive element Both the magneto-sensitive element sensor section 61 of the element sensor section and the magneto-sensitive element sensor section 62 as the second magneto-sensitive element sensor section. If other expressions are made, the magnetic sensor element 63 and the magnetic sensor element 64 may not be included. By configuring the magnetic sensor element 60 using both the first magnetic sensor element and the second magnetic sensor element, the encoder 1 can be constructed at low cost.

The present invention is not limited to the embodiments described above, and can be implemented in various structures without departing from the gist thereof. For example, the technical features in the embodiments corresponding to the technical features in each form described in the summary column of the invention may be appropriately replaced or combined to solve a part or all of the problem, or to achieve the effect Part or all.

In addition, as long as the technical features are not described as necessary in this specification, they can be deleted as appropriate.

30‧‧‧The first rotating magnet

31‧‧‧Magnetized surface

60‧‧‧Magnetic sensor sensor section (Magnetic sensor for the first rotating magnet)

61‧‧‧Magnetic sensor unit (first magnetosensitive sensor unit)

62‧‧‧Magnetic sensor unit (second magnetic sensor unit)

63‧‧‧Magnetic sensor unit (third magnetic sensor unit)

64‧‧‧Magnetic sensor unit (fourth magnetic sensor unit)

70‧‧‧The first magnetic sensor

71, 72, 73, 74, 75, 76, 77, 78

79‧‧‧Second magnetic sensor

L‧‧‧Rotation axis direction

Claims (16)

An encoder includes: a magnet having a plurality of N poles and S poles alternately magnetized; and a plurality of magneto-sensitive element sensor parts including a first magneto-sensitive element that detects the position of the magnet, The output of the first magneto-sensitive element is a second magneto-sensitive element that detects the position of the magnet with the position of a phase difference of 90° in an electrical angle meter; and as the magneto-sensitive element sensor section, at least the first magneto-sensitive element is provided An element sensor section and a second magnetic sensor element section, the first magnetic sensor element section and the second magnetic element sensor section are arranged in such a manner that the first magnetic element sensor section The output of the first magneto-sensitive element and the output of the first magneto-sensitive element of the second magneto-sensitive element sensor section, and the output of the second magneto-sensitive element of the first magneto-sensitive element sensor section The output and the output of the second magneto-sensitive element of the second magneto-sensitive element sensor section are arranged at a position that has a phase difference of an odd multiple of 180° in electrical angle, that is, 30° or less in mechanical angle. The positive output terminal of the first magnetic sensor element is connected to the negative output terminal of the second magnetic sensor element, and the negative output terminal of the first magnetic sensor element is connected to the second magnetic sensor Connect the positive output terminal of the element sensor section. The encoder according to item 1 of the patent application scope, wherein the first magnetic sensor element portion and the second magnetic sensor element portion are as follows Configuration, that is, the output of the first magnetic sensor of the first magnetic sensor element and the output of the first magnetic sensor of the second magnetic sensor element, and the first magnetic The output of the second magneto-sensitive element of the sensor element sensor section and the output of the second magneto-sensitive element of the second magnetic sensor element section are arranged within two cycles on a magnetic cycle meter. The encoder according to item 1 of the scope of the patent application, wherein the magneto-sensitive element sensor section includes the first magneto-sensitive element and the second magneto-sensitive element in one package. The encoder as described in item 1 of the patent application range, wherein the first magneto-sensitive element and the second magneto-sensitive element are Hall elements. The encoder according to item 1 of the patent application scope, wherein the first magneto-sensitive element and the second magneto-sensitive element are magnetoresistive elements. The encoder as described in item 1 of the patent application range, wherein the magnet is a first rotating magnet having a plurality of N poles and S poles alternately magnetized in the circumferential direction, and the encoder includes A rotating magnet rotates together and has a second rotating magnet having N poles and S poles magnetized in the circumferential direction, and a second rotating magnet magneto-sensitive element that detects the position of the second rotating magnet. The encoder according to item 1 of the patent application range, wherein the magnetic sensor element is composed of both the first magnetic sensor element and the second magnetic sensor element. The encoder according to any one of claims 1 to 6, wherein the encoder is a rotation of the magnet in which a plurality of N poles and S poles are alternately magnetized in the circumferential direction The encoder, as the magneto-sensitive element sensor section, in addition to the first magneto-sensitive element sensor section and the second magneto-sensitive element sensor section, at least in the first A third magneto-sensitive element sensor section including the first magneto-sensitive element and the second magneto-sensitive element is provided on the opposite side of a magneto-sensitive element sensor section or the second magneto-sensitive element sensor section. An encoder includes: a magnet having a plurality of N poles and S poles alternately magnetized; and a plurality of magneto-sensitive element sensor parts including a first magneto-sensitive element that detects the position of the magnet, The output of the first magneto-sensitive element is a second magneto-sensitive element that detects the position of the magnet with the position of a phase difference of 90° in an electrical angle meter; and as the magneto-sensitive element sensor section, at least the first magneto-sensitive element is provided An element sensor section and a second magnetic sensor element section, the first magnetic sensor element section and the second magnetic element sensor section are arranged in such a manner that the first magnetic element sensor section The output of the first magneto-sensitive element and the output of the first magneto-sensitive element of the second magneto-sensitive element sensor section, and the output of the second magneto-sensitive element of the first magneto-sensitive element sensor section The output and the output of the second magneto-sensitive element of the second magneto-sensitive element sensor section are arranged at a position that has a phase difference of an even multiple of 180° in electrical angle, that is, a mechanical An angle meter of 30° or less, connects the positive output terminal of the first magnetic sensor element and the positive output terminal of the second magnetic sensor element, and outputs the negative output of the first magnetic sensor element The terminal is connected to the negative output terminal of the second magnetic sensor element. The encoder according to item 9 of the patent application range, wherein the first magneto-sensitive element sensor section and the second magneto-sensitive element sensor section are configured in such a manner that the first magneto-sensitive element The output of the first magnetosensitive element of the sensor section and the output of the first magnetosensitive element of the second magnetosensitive element sensor section, and the second magnetosensitive of the first magnetosensitive element sensor section The output of the element and the output of the second magnetic-sensitive element of the second magnetic-sensitive element sensor section are arranged within two cycles on a magnetic cycle meter. The encoder according to item 9 of the patent application scope, wherein the magneto-sensitive element sensor section includes the first magneto-sensitive element and the second magneto-sensitive element in one package. The encoder as described in item 9 of the patent application scope, wherein the first magneto-sensitive element and the second magneto-sensitive element are Hall elements. The encoder as described in item 9 of the patent application scope, wherein the first magneto-sensitive element and the second magneto-sensitive element are magnetoresistive elements. The encoder according to item 9 of the patent application range, wherein the magnet is a first rotating magnet having a plurality of N poles and S poles alternately magnetized in the circumferential direction, and the encoder includes A rotating magnet rotates together and in a circle In the circumferential direction, a second rotating magnet magnetized with an N pole and an S pole, and a second magnetic sensitive element for a rotating magnet that detects the position of the second rotating magnet. The encoder according to item 9 of the patent application range, wherein the magnetic sensor element is composed of both the first magnetic sensor element and the second magnetic sensor element. The encoder according to any one of items 9 to 14 of the patent application range, wherein the encoder is a rotating magnet in which the magnet is alternately magnetized with a plurality of N poles and S poles in the circumferential direction A rotary encoder, as the magnetic sensor element, in addition to the first magnetic sensor element and the second magnetic sensor element, at least the reference to the rotation axis of the rotary magnet On the opposite side of the first magneto-sensitive element sensor section or the second magneto-sensitive element sensor section, a third magneto-sensitive element sensor section including the first magneto-sensitive element and the second magneto-sensitive element is provided.

Images