TWI687695B - Method for expanding and upgrading functions of automatic test system - Google Patents
Method for expanding and upgrading functions of automatic test system Download PDFInfo
- Publication number
- TWI687695B TWI687695B TW108121662A TW108121662A TWI687695B TW I687695 B TWI687695 B TW I687695B TW 108121662 A TW108121662 A TW 108121662A TW 108121662 A TW108121662 A TW 108121662A TW I687695 B TWI687695 B TW I687695B
- Authority
- TW
- Taiwan
- Prior art keywords
- test system
- automatic test
- expanding
- pogo pin
- upgrading
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06716—Elastic
- G01R1/06722—Spring-loaded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
一種自動測試系統之功能擴充升級的方法,將彈簧針搭接裝置分別電連接於擴充儀器設備及自動測試系統之彈簧針介面的彈簧針,即可在擴充儀器設備與自動測試系統的彈簧針介面之間建立訊號路徑,以實現自動測試系統功能擴充或性能升級。本發明之方法幾乎不受制於自動測試系統內部的原始設計框架,因此具有非常良好的擴充自由度,而且可以避免擴充儀器設備對測試系統的內部電路造成不良影響,並且直接相容於現有的探針卡,還容易按照測試需求的變化來調整或解除擴充儀器設備,為一種方便實用又完全可逆及無破壞性的系統功能擴充升級方法。 A method for expanding and upgrading the functions of an automatic test system, electrically connecting a spring pin lap device to an expansion instrument device and a spring pin interface of an automatic test system, that is, to expand the interface between the instrument device and the automatic test system Establish a signal path between them to achieve automatic test system function expansion or performance upgrade. The method of the present invention is hardly subject to the original design framework inside the automatic test system, so it has a very good degree of freedom in expansion, and can avoid the adverse effects of the expansion of the instrumentation on the internal circuit of the test system, and is directly compatible with the existing The needle card is also easy to adjust or cancel the expansion equipment according to the change of test requirements, which is a convenient, practical, fully reversible and non-destructive system function expansion and upgrade method.
Description
本發明為一種功能擴充升級的方法,尤指一種自動測試系統之功能擴充升級的方法,運用彈簧針搭接裝置分別電連接於擴充儀器設備以及自動測試系統彈簧針介面之彈簧針的這個創新途徑,將擴充儀器設備整合到自動測試系統,以實現自動測試系統功能擴充或性能升級之目的。 The present invention is a method of function expansion and upgrade, especially a method of function expansion and upgrade of an automatic test system, which uses a spring pin lap device to be electrically connected to the expansion instrument and the spring pin of the spring pin interface of the automatic test system. , Integrate the expansion equipment into the automatic test system to achieve the purpose of automatic test system function expansion or performance upgrade.
半導體晶圓廠與光電產業界的元件測試產線,有時會面臨過往所採購的自動測試系統其性能已不符合目前最新的測試應用要求或產能所需,於是必須考慮是否要汰換測試系統或進行測試系統功能升級擴充。 The component test production lines of semiconductor fabs and the optoelectronic industry sometimes face the automatic test systems purchased in the past whose performance does not meet the latest test application requirements or production capacity requirements, so it is necessary to consider whether to replace the test system Or upgrade and expand the function of the test system.
對於自動測試系統功能擴充,主要有以下兩種常見的方法: For the automatic test system function expansion, there are the following two common methods:
1、測試系統原廠在設計自動測試系統的時候,在系統內部預留擴充插槽或是在系統外部側板預留一些擴充接口。 1. When designing the automatic test system, the original manufacturer of the test system reserves an expansion slot inside the system or reserves some expansion interfaces on the external side panel of the system.
2、可在測試載板或探針卡這些環節來設計配套方案,透過測試載板或探針卡的中介轉接,將擴充儀器設備連接至測試系統與待測物。 2. The supporting scheme can be designed in the test carrier board or probe card, and the expansion instrument can be connected to the test system and the object to be tested through the intermediary transfer of the test carrier board or probe card.
然而目前常見的困難點如下所述: However, the current common difficulties are as follows:
1、並非所有自動測試系統的原廠設計,均有預留規格適用或數量充足的擴充插槽或擴充接口。畢竟測試系統原廠未必能夠完全事先預知客戶端的未來新應用,因此很難在系統設計階段去預想各種可能性,而且系統原廠必然會有降低成本的考量,不便加入太多的預留設計。 1. Not all the original design of the automatic test system has reserved slots or interfaces with sufficient specifications or sufficient quantity. After all, the original manufacturer of the test system may not be able to fully predict the future new application of the client in advance, so it is difficult to anticipate various possibilities at the system design stage, and the original manufacturer of the system will inevitably have cost reduction considerations, so it is inconvenient to add too many reserved designs.
2、容易受限於測試系統本身的機構設計,或是測試系統的管理者對於設備管理便利性與成本控管考量,未必適合採用修改測試載板或改造探針卡的方式來整合擴充儀器設備,以進行系統功能擴充升級。 2. It is easy to be limited by the mechanism design of the test system itself, or the test system administrator's considerations for the convenience of equipment management and cost control, and may not be suitable for integrating and expanding the instrument and equipment by modifying the test carrier board or modifying the probe card. To expand and upgrade system functions.
3、探針卡是需要經常拆換保養的耗材,若把擴充儀器設備接合在探針卡上,就經常會面臨必須拆卸與重新安裝儀器纜線的困擾。 3. The probe card is a consumable that needs to be frequently replaced and maintained. If the expansion instrument is connected to the probe card, it will often face the trouble of having to remove and reinstall the instrument cable.
因此發明人憑藉多年相關實務經驗,經過積極思考,原型試驗及不斷改善,終於研發出更實用的測試系統功能擴充升級方法。 Therefore, with years of relevant practical experience, the inventor finally developed a more practical test system function expansion and upgrade method after active thinking, prototype testing and continuous improvement.
本發明揭露一種自動測試系統之功能擴充升級的方法,將用於系統功能擴充的至少一彈簧針搭接裝置分別電連接一擴充儀器設備以及自動測試系統之一彈簧針介面的一彈簧針,該彈簧針搭接裝置具有至少一金屬搭接件及至少一訊號線,該訊號線兩端分別電連接於該金屬搭接件及該擴充儀器設備,該金屬搭接件搭接於該彈簧針;當自動測試系統運作時,該彈簧針會電連接一待測物,使得該待測物與該擴充儀器設備之間可以透過該彈簧針搭接裝置而建立量測訊號路徑而傳遞電訊號,如此即可實現自動測試系統的功能擴充升級。 The invention discloses a method for expanding and upgrading functions of an automatic test system, and electrically connecting at least one pogo pin lap device used for system function expansion to an expanded instrument and a pogo pin interface of a pogo pin interface of an automatic test system The pogo pin lap device has at least one metal lap piece and at least one signal line, and both ends of the signal line are electrically connected to the metal lap piece and the expansion instrument respectively, and the metal lap piece is overlapped with the pogo pin; When the automatic test system is in operation, the pogo pin will be electrically connected to a test object, so that the test signal path can be established between the test object and the expansion instrument through the pogo pin overlapping device to transmit electrical signals. The function expansion and upgrading of the automatic test system can be realized.
藉由上述之測試系統功能擴充方法,本發明的優點如下: With the above test system function expansion method, the advantages of the present invention are as follows:
1、完全不必透過測試系統的內部電路板或輔助接口,因此可以實現最大程度的擴充性,不易受制於測試系統內部原始設計框架所可能導致的擴充侷限性。 1. There is no need to pass through the internal circuit board or auxiliary interface of the test system, so it can achieve the greatest degree of scalability, and is not easily subject to the expansion limitations that may be caused by the original design framework inside the test system.
2、不必改變自動測試系統既有的一探針卡,不會造成該探針卡之相關購置成本或維護成本的增加。 2. There is no need to change the existing probe card of the automatic test system, which will not increase the related purchase cost or maintenance cost of the probe card.
3、透過搭接該彈簧針是屬於系統外部的擴充途徑,並未經過測試系統內部電路,因此有助於避免該擴充儀器設備對於測試系統內部電路可能造成的不良影響。 3. It is an expansion path outside the system by overlapping the pogo pin without passing through the internal circuit of the test system, so it helps to avoid the possible adverse effects of the expansion instrument on the internal circuit of the test system.
4、因為完全沒有變更自動測試系統或該探針卡的原始設計,系統使用者隨時可以解除此擴充方案,輕易地將自動測試系統再回復到原廠設計的初始狀態。所以這是一種完全可逆,完全無破壞性的擴充升級方案。 4. Because there is no change to the original design of the automatic test system or the probe card, system users can release this expansion solution at any time and easily restore the automatic test system to the original state of the original design. So this is a completely reversible and completely non-destructive expansion and upgrade program.
10‧‧‧彈簧針搭接裝置 10‧‧‧Spring pin overlapping device
101‧‧‧彈簧針搭接裝置 101‧‧‧Spring pin overlapping device
102‧‧‧彈簧針搭接裝置 102‧‧‧Spring pin overlapping device
12‧‧‧絕緣固定件 12‧‧‧Insulation fixings
121‧‧‧套孔 121‧‧‧Sleeve
122‧‧‧套孔 122‧‧‧Sleeve
123‧‧‧套孔 123‧‧‧Sleeve
14‧‧‧金屬搭接件 14‧‧‧Metal lap joint
18‧‧‧訊號線 18‧‧‧Signal line
20‧‧‧擴充儀器設備 20‧‧‧Expansion of equipment
22‧‧‧接線盒 22‧‧‧ Junction box
221‧‧‧繼電器模組 221‧‧‧Relay module
222‧‧‧繼電器驅動單元 222‧‧‧ Relay drive unit
23‧‧‧彈簧針匣 23‧‧‧spring needle magazine
231‧‧‧敏感量測設備 231‧‧‧sensitive measuring equipment
24‧‧‧彈簧針 24‧‧‧ pogo pin
25‧‧‧探針卡 25‧‧‧Probe card
26‧‧‧彈簧針介面 26‧‧‧ Pogo pin interface
30‧‧‧系統儀控電腦 30‧‧‧System instrument control computer
40‧‧‧待測物 40‧‧‧ test object
S1‧‧‧步驟一 S1‧‧‧Step 1
S2‧‧‧步驟二 S2‧‧‧Step 2
圖1為本發明自動測試系統之功能擴充升級的方法之方塊示意圖 FIG. 1 is a block diagram of a method of function expansion and upgrade of an automatic test system of the present invention
圖2為本發明彈簧針搭接裝置結合擴充儀器設備與彈簧針介面的示意圖 FIG. 2 is a schematic diagram of the pogo pin overlapping device of the present invention combined with an expanded instrument and pogo pin interface
圖3為本發明彈簧針搭接裝置先透過接線盒作為中繼轉接,再連接至擴充 Figure 3 shows the spring pin lap device of the present invention is first used as a relay through the junction box, and then connected to the expansion
儀器設備,並且將擴充儀器設備連結系統儀控電腦的示意圖 Instrument and equipment, and the schematic diagram of connecting the extended instrument and equipment to the system instrument control computer
圖4為本發明接線盒內建繼電器模組的示意圖 4 is a schematic diagram of the built-in relay module of the junction box of the present invention
圖5為本發明將繼電器驅動單元設置於接線盒外的示意圖 5 is a schematic diagram of the present invention is the relay drive unit is installed outside the junction box
圖6為本發明彈簧針搭接裝置之第一實施例的立體示意圖 6 is a perspective view of a first embodiment of a spring pin overlapping device of the present invention
圖7為圖6的立體分解示意圖 7 is a schematic exploded view of FIG. 6
圖8為本發明彈簧針搭接裝置之第二實施例的立體示意圖 8 is a schematic perspective view of a second embodiment of a spring pin overlapping device of the present invention
圖9為圖8的立體分解示意圖 9 is a schematic exploded view of FIG. 8
圖10為本發明彈簧針搭接裝置之第三實施例的立體示意圖 10 is a schematic perspective view of a third embodiment of the spring pin overlapping device of the present invention
圖11為圖10的立體分解示意圖 11 is a schematic exploded view of FIG. 10
圖12為本發明之彈簧針搭接裝置將要搭接於自動測試系統之彈簧針介面 並將與探針卡電連接的示意圖 FIG. 12 is a pogo pin interface device of the present invention to be connected to a pogo pin interface of an automatic test system Schematic diagram of electrical connection with the probe card
圖13為本發明之第一實施例的彈簧針搭接裝置裝設於彈簧針的示意圖 13 is a schematic view of the first embodiment of the present invention, the spring pin overlapping device is installed on the spring pin
圖14為本發明之第二實施例的彈簧針搭接裝置裝設於彈簧針的示意圖 14 is a schematic view of a second embodiment of the present invention, the spring pin overlapping device is installed on the spring pin
圖15為本發明之第三實施例的彈簧針搭接裝置裝設於彈簧針的示意圖 15 is a schematic view of a third embodiment of the present invention, the spring pin overlapping device is installed in the spring pin
以下將詳述本案的各種實施例,並配合圖式輔助說明。除了這些詳細描述外,本發明還可以廣泛地施行在其他的實施例中,任何在此所述之實施例的輕易替代、修改、等效變化都包含在本案的範圍內,並以之後的專利範圍為準。在說明書的描述中,為了使讀者對本發明有較完整的瞭解,提供了許多特定細節;然而,本發明可能在省略部分或全部這些特性細節的前提下,仍可實施。此外,眾所周知的步驟或元件並未描述於細節中,以避免造成本發明不必要之限制。圖式中相同或類似的元件將以相同或類似的符號來表示。特別注意的是,圖式僅為示意之用,並非代表元件實際的尺寸或數量,除非有特別說明。 The various embodiments of the present case will be described in detail below, with the help of the drawings. In addition to these detailed descriptions, the present invention can be widely implemented in other embodiments, and any easy replacement, modification, and equivalent change of any of the embodiments described herein are included in the scope of this case, and the following patents The scope shall prevail. In the description of the specification, in order to allow the reader to have a more complete understanding of the present invention, many specific details are provided; however, the present invention may be implemented on the premise that some or all of these feature details are omitted. In addition, well-known steps or elements are not described in detail to avoid unnecessary limitation of the invention. The same or similar elements in the drawings will be represented by the same or similar symbols. It is important to note that the drawings are for illustrative purposes only and do not represent the actual size or number of elements unless otherwise specified.
參閱圖1並搭配圖2~圖6,為本發明揭露的一種自動測試系統之功能擴充升級的方法:步驟一S1:將至少一彈簧針搭接裝置10分別電連接一擴充儀器設備20及自動測試系統之一彈簧針介面26的一彈簧針24,該彈簧針搭接裝置10具有至少一金屬搭接件14及至少一訊號線18,該訊號線18兩端分別電連接該金屬搭接件14及該擴充儀器設備20,該金屬搭接件14搭接該彈簧針24。
Referring to FIG. 1 and accompanying FIGS. 2-6, it is a method for expanding and upgrading the function of an automatic test system disclosed in the present invention: Step 1 S1: electrically connect at least one pogo
步驟二S2:依照自動測試系統的原本操作方式,該彈簧針
24會電連接於一待測物40,使得該待測物40與該擴充儀器設備20之間可透過該彈簧針搭接裝置10而建立量測所需之訊號路徑而傳遞電訊號,如此即實現自動測試系統的功能擴充升級。此實施例之該待測物40為半導體矽晶圓,搭配一探針卡25作為中介輔助。
Step 2 S2: According to the original operation mode of the automatic test system, the
參閱圖2,該擴充儀器設備20連接一系統儀控電腦30,該系統儀控電腦30可控制該擴充儀器設備20自動執行相關測試任務。
Referring to FIG. 2, the
參閱圖3,可於該擴充儀器設備20與該彈簧針搭接裝置10之間電連接一接線盒22,該接線盒22用於中繼轉接該擴充儀器設備20的訊號纜線,藉此可以避免脆弱的該彈簧針24或該彈簧針搭接裝置10直接承受過大的儀器連接纜線張力而可能造成損壞。
Referring to FIG. 3, a
參閱圖4,該接線盒22內部另增設可程式控制的一繼電器模組221,該繼電器模組221連接該系統儀控電腦30,該系統儀控電腦30可透過軟體程式來控制該繼電器模組221的開關,達到連結或分離該彈簧針搭接裝置10與該擴充儀器設備20之間的訊號線路,以降低該彈簧針搭接裝置10的搭接路徑對於自動測試系統內建之一敏感量測設備231的干擾程度。舉例來說,某些自動測試系統內建靈敏的小電流或小電容量測功能,若不把該彈簧針搭接裝置10的搭接路徑加以適當隔離,將有可能干擾到該敏感量測設備231的測試功能。此外,若擔心該擴充儀器設備20十分靈敏脆弱,不適合隨時都一直搭接在該彈簧針24上,也可以藉由該繼電器模組221的使用來提供必要的隔離保護。
Referring to FIG. 4, a
參閱圖5,為簡化該接線盒22內部電路設計,可在該接線盒22外部設置一繼電器驅動單元222,該繼電器驅動單元222電連
接該接線盒22內部的該繼電器模組221及該系統儀控電腦30,再透過該系統儀控電腦30進行該繼電器驅動單元222的可程式控制,如此可以簡化該接線盒22內部所設置之該繼電器模組221的電路及減少該接線盒22的散熱需求,並且能夠減縮該接線盒22的體積。
Referring to FIG. 5, in order to simplify the internal circuit design of the
參閱圖6、圖7並搭配圖2,揭露本發明一彈簧針搭接裝置10的第一實施例,該彈簧針搭接裝置10係由一金屬搭接件14及一訊號線18所組成,該訊號線18接合至該金屬搭接件14形成電連接,該金屬搭接件14具有一套孔121,該套孔121可套接於一彈簧針24。
6 and 7 in conjunction with FIG. 2, a first embodiment of a pogo
參閱圖8及圖9並搭配圖2,揭露本發明一彈簧針搭接裝置101的第二實施例,該彈簧針搭接裝置101具有一絕緣固定件12、一金屬搭接件14及一訊號線18,該金屬搭接件14與該訊號線18形成電連接,該金屬搭接件14係使用線成型彈簧,該金屬搭接件14外部覆設該絕緣固定件12,使該金屬搭接件14與該絕緣固定件12之間形成一套孔122,該套孔122可套接於一彈簧針24。
8 and 9 in conjunction with FIG. 2, a second embodiment of a pogo
參閱圖10及圖11並搭配圖2,揭露本發明一彈簧針搭接裝置102第三實施例,該彈簧針搭接裝置102有一絕緣固定件12、一金屬搭接件14及一訊號線18,該金屬搭接件14以彈性金屬片彎折構成,該金屬搭接件14與該訊號線18形成電連接,該金屬搭接件14外部覆設該絕緣固定件12。該金屬搭接件14與該絕緣固定件12之間形成一套孔123,該套孔123的周圍係由該金屬搭接件14及該絕緣固定件12所共同圍構而成,該套孔123可套接於一彈簧針24。
10 and 11 together with FIG. 2, a third embodiment of a pogo
參閱圖12,揭露該彈簧針搭接裝置10將搭接於該彈簧針
介面26的任一該彈簧針24上。
Referring to FIG. 12, it is revealed that the pogo
上述中,該彈簧針24與該待測物40之間更包含該探針卡25或一測試載板(圖未示),若該待測物40為半導體廠的晶圓,通常自動測試系統就會搭配該探針卡25進行電路元件探測。當自動測試系統運作執行測試任務時,該彈簧針介面26與該探針卡25或該測試載板作為中介進行介面接合,使得各該彈簧針24與該探針卡25或該測試載板形成電連接,進而使得該待測物40與該彈簧針搭接裝置10之間形成電連結。
In the above, the
參閱圖13並搭配圖6、圖7及圖12,該彈簧針搭接裝置10的該套孔121係套設於一彈簧針匣23的該彈簧針24上,使用者可以將該彈簧針搭接裝置10推抵至該彈簧針24的根部,該彈簧針24周壁接觸該金屬搭接件14呈電連接狀態。
Referring to FIG. 13 in conjunction with FIGS. 6, 7 and 12, the
參閱圖14並搭配圖8、圖9及圖12,該彈簧針搭接裝置101的該套孔122係套設於該彈簧針匣23的該彈簧針24上,使用者可將該絕緣固定件12推抵至該彈簧針24的根部,該彈簧針24周壁接觸該金屬搭接件14,該彈簧針24與該金屬搭接件14呈電連接狀態。
Referring to FIG. 14 together with FIG. 8, FIG. 9 and FIG. 12, the
參閱圖15並搭配圖10~圖12,該彈簧針搭接裝置102的該套孔123係套設於該彈簧針匣23的該彈簧針24上,使用者可將該絕緣固定件12推抵至該彈簧針24的根部,該彈簧針24周壁接觸該金屬搭接件14的旁側以及該絕緣固定件12的內側壁面,該彈簧針24與該金屬搭接件14呈電連接狀態。
Referring to FIG. 15 together with FIGS. 10-12, the
上述該絕緣固定件12的材質可以使用耐熱且電絕緣特性
良好的鐵氟龍(PTFE)或其它熱塑性絕緣材質;若該絕緣固定件12使用熱塑性絕緣材質,例如:過氟烷基化物(PFA),則可以採用金屬包射或模壓成型的加工方法來製作。
The material of the insulating fixing
10‧‧‧彈簧針搭接裝置 10‧‧‧Spring pin overlapping device
20‧‧‧擴充儀器設備 20‧‧‧Expansion of equipment
24‧‧‧彈簧針 24‧‧‧ pogo pin
26‧‧‧彈簧針介面 26‧‧‧ Pogo pin interface
40‧‧‧待測物 40‧‧‧ test object
S1‧‧‧步驟一 S1‧‧‧Step 1
S2‧‧‧步驟二 S2‧‧‧Step 2
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW108121662A TWI687695B (en) | 2019-06-21 | 2019-06-21 | Method for expanding and upgrading functions of automatic test system |
CN202010380880.5A CN112213607A (en) | 2019-06-21 | 2020-05-08 | Method for expanding and upgrading functions of automatic test system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW108121662A TWI687695B (en) | 2019-06-21 | 2019-06-21 | Method for expanding and upgrading functions of automatic test system |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI687695B true TWI687695B (en) | 2020-03-11 |
TW202101010A TW202101010A (en) | 2021-01-01 |
Family
ID=70767397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108121662A TWI687695B (en) | 2019-06-21 | 2019-06-21 | Method for expanding and upgrading functions of automatic test system |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN112213607A (en) |
TW (1) | TWI687695B (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101105504A (en) * | 2006-07-10 | 2008-01-16 | 中芯国际集成电路制造(上海)有限公司 | Probe card device |
TW200925612A (en) * | 2007-09-28 | 2009-06-16 | Formfactor Inc | Apparatus for testing devices |
US9599662B2 (en) * | 2009-10-02 | 2017-03-21 | Ers Electronic Gmbh | Apparatus for conditioning semiconductor chips and test method using the apparatus |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8008938B2 (en) * | 2007-10-24 | 2011-08-30 | King Yuan Electronics Co., Ltd. | Testing system module |
TWI400449B (en) * | 2009-08-10 | 2013-07-01 | Mpi Corp | Probe card having an expanded power plane, a structure of the expanded power plane and method thereof |
TWI416117B (en) * | 2009-10-28 | 2013-11-21 | Mpi Corp | Probe card |
CN202256409U (en) * | 2011-08-17 | 2012-05-30 | 东莞利扬微电子有限公司 | Probe card and multi-chip test system using the same |
-
2019
- 2019-06-21 TW TW108121662A patent/TWI687695B/en active
-
2020
- 2020-05-08 CN CN202010380880.5A patent/CN112213607A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101105504A (en) * | 2006-07-10 | 2008-01-16 | 中芯国际集成电路制造(上海)有限公司 | Probe card device |
TW200925612A (en) * | 2007-09-28 | 2009-06-16 | Formfactor Inc | Apparatus for testing devices |
US9599662B2 (en) * | 2009-10-02 | 2017-03-21 | Ers Electronic Gmbh | Apparatus for conditioning semiconductor chips and test method using the apparatus |
Also Published As
Publication number | Publication date |
---|---|
TW202101010A (en) | 2021-01-01 |
CN112213607A (en) | 2021-01-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6515003B2 (en) | Interface device, interface unit, probe device and connection method | |
TW561263B (en) | Parallel test board used in testing semiconductor memory devices | |
KR101342450B1 (en) | Electronic component testing apparatus, socket board assembly and interface apparatus | |
CN102236071A (en) | Test apparatus and connection device | |
TWI677686B (en) | Contactor | |
TWI720535B (en) | Integrated circuit with antenna in package testing apparatus | |
US20210181288A1 (en) | Test apparatus which tests semiconductor chips | |
TWI687695B (en) | Method for expanding and upgrading functions of automatic test system | |
JP2002261645A (en) | Radio module and electronic devices | |
CN205792591U (en) | Fiber connection points light leakage detecting device | |
US10440849B2 (en) | First socket nested in a second socket | |
KR20170142608A (en) | Apparatus for testing semiconductor devices | |
US20160204594A1 (en) | Electronic device with circuit protection and assembling method thereof | |
KR20180134457A (en) | Test extend gender to test solid state disk | |
CN203216610U (en) | Infrared temperature sensor with front mounted lens | |
US11175310B2 (en) | Method for upgrading an automatic testing system | |
KR101892646B1 (en) | Probe Card Low Leakage Current Measuring Device | |
KR19990006984A (en) | Electrical connection device and method of blind auto dock | |
WO2021174590A1 (en) | Transmission line test device | |
US11567102B2 (en) | Auxiliary device for functional expansion and signal acquisition of testing system | |
CN221148753U (en) | Wafer testing device | |
CN216870614U (en) | Signal expansion device | |
TWI701440B (en) | Auxiliary device for function expansion applied to test system | |
JP6801935B2 (en) | How to attach the communication device to the gas meter | |
KR101743743B1 (en) | Device for supporting semiconductor package and insert carrier for testing semiconductor package |