TWI686259B - Flux for solder paste, solder paste, method of forming solder bump using solder paste, and method of producing bonded body - Google Patents

Flux for solder paste, solder paste, method of forming solder bump using solder paste, and method of producing bonded body Download PDF

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Publication number
TWI686259B
TWI686259B TW107125969A TW107125969A TWI686259B TW I686259 B TWI686259 B TW I686259B TW 107125969 A TW107125969 A TW 107125969A TW 107125969 A TW107125969 A TW 107125969A TW I686259 B TWI686259 B TW I686259B
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solder
flux
solder paste
less
mass
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TW107125969A
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Chinese (zh)
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TW201919811A (en
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八十嶋司
石川雅之
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日商三菱綜合材料股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • B23K35/262Sn as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0255Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in welding
    • B23K35/0261Rods, electrodes, wires
    • B23K35/0266Rods, electrodes, wires flux-cored
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C11/00Alloys based on lead
    • C22C11/06Alloys based on lead with tin as the next major constituent
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C13/00Alloys based on tin
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C5/00Alloys based on noble metals
    • C22C5/02Alloys based on gold
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering

Abstract

The present invention is directed to a flux for a solder paste. The flux includes a viscous agent, a solvent and a thixotropic agent. The acid value of the flux is 100mgKOH/g or less. In the thermogravimetric measurement, the reduction rate at 300ºC is 80 mass% or more. The flux for solder paste has a viscosity of 0.5 Pa·s or more and a tacking force of 1.0 N or more.

Description

焊膏用助焊劑、焊膏、使用焊膏之焊料凸塊的形成方法及接合體的製造方法Method for forming soldering flux for solder paste, solder paste, solder bump using solder paste, and method for manufacturing joint body

本發明係關於一種可得到在將電子零件接合於基板之時等所使用的焊料之焊膏用助焊劑、焊膏、使用焊膏之焊料凸塊的形成方法及接合體的製造方法。   本案係根據在2017年7月28日,於日本已申請的日本特願2017-147084號以及在2018年7月17日,於日本已申請的日本特願2018-133872號而主張優先權,在此援用該內容。The present invention relates to a method of forming solder paste flux, solder paste, and solder bumps using solder paste that can be used when joining electronic components to a substrate, etc., and a method of manufacturing a bonded body. This case is based on the Japanese Patent Application No. 2017-147084 filed in Japan on July 28, 2017 and the Japanese Patent Application No. 2018-133872 filed on July 17, 2018 in Japan. This invokes the content.

先前,於軟焊係使用藉由包含松香、溶劑、觸變劑及活性劑的助焊劑與焊料粉末而構成的焊膏。在使用如此的焊膏而形成焊料凸塊的情況,若將焊膏塗布於基板之上而進行回焊處理,則於焊料之上面殘留基於松香等所致的殘渣,所以有將此殘渣藉由藥品等而洗淨的必要而為煩雜。   為了節省洗淨如此的殘渣的工作量,所以已知有於軟焊後不產生殘渣的助焊劑,及含有此助焊劑的焊膏(參照專利文獻1)。   記載於此專利文獻1之助焊劑因為含有甲酸銨、與在常溫為液體,在大氣壓的沸點為150℃以上之脂肪族多元醇,所以具有還原性,以效率佳地還原氧化被膜,除去已產生於基板等的氧化被膜。在此專利文獻1之構成係抑制將電子零件等軟焊於基板後之助焊劑之殘渣。Previously, solder pastes composed of flux and solder powder containing rosin, solvents, thixotropic agents, and active agents were used for soldering. In the case of using such solder paste to form solder bumps, if the solder paste is applied on the substrate and reflowed, residues based on rosin etc. will remain on the solder, so this residue may be caused by The necessity of washing medicines and so on is troublesome. In order to save the workload of cleaning such residues, fluxes that do not generate residues after soldering and solder pastes containing such fluxes are known (refer to Patent Document 1). The flux described in this Patent Document 1 contains ammonium formate and an aliphatic polyhydric alcohol which is a liquid at normal temperature and has a boiling point of 150° C. or higher at atmospheric pressure, so it has reducibility and efficiently reduces the oxide film to remove the generated It is used for the oxide coating on the substrate. The structure of Patent Document 1 is to suppress the residue of flux after soldering electronic parts and the like to the substrate.

然而,記載於專利文獻1之助焊劑及含有該助焊劑的焊膏因為在低溫被分解,所以焊料表面成為因助焊劑而不被被覆而露出的狀態。因此,有焊料之表面被再氧化的疑慮。   對於此,提案有可抑制焊料之表面之再氧化的焊料凸塊之形成方法(參照專利文獻2)。However, the flux described in Patent Document 1 and the solder paste containing the flux are decomposed at a low temperature, so the solder surface is exposed without being covered by the flux. Therefore, there is a concern that the surface of the solder is re-oxidized.   For this, a method of forming solder bumps that can suppress the reoxidation of the surface of the solder is proposed (see Patent Document 2).

此專利文獻2所記載之焊料凸塊之形成方法,係將具有開口部的遮罩配置於基板上,於此開口部內以填充包含助焊劑和焊料粉末的焊膏之方式而印刷焊膏,在剝離遮罩後,將基板上之凸塊前驅物進行回焊處理而形成焊料凸塊的方法,且助焊劑係含有松香、溶劑及觸變劑,助焊劑之酸價值為100mg KOH/g以下,助焊劑之鹵素含量為0.03質量%以下,設為在甲酸氣體環境下及/或在藉由熱而分解甲酸的氣體之環境下進行回焊處理的構成。   在此焊料凸塊之形成方法,係藉由在甲酸氣體環境下及/或在藉由熱而分解甲酸的氣體之環境下進行回焊處理,還原焊料粉末等之氧化被膜而使焊料熔融圓滑化。 [先前技術文獻] [專利文獻]The method of forming a solder bump described in this Patent Document 2 is to arrange a mask having an opening on a substrate, and print solder paste in the opening by filling a solder paste containing flux and solder powder, in After peeling off the mask, the bump precursor on the substrate is reflowed to form a solder bump. The flux contains rosin, solvent and thixotropic agent. The acid value of the flux is 100mg KOH/g or less. The halogen content of the flux is 0.03% by mass or less, and it is configured to perform the reflow treatment in a formic acid gas environment and/or in an environment in which formic acid is decomposed by heat. Here, the method of forming solder bumps is to melt and smooth the solder by performing the reflow process under the formic acid gas environment and/or the environment where the formic acid gas is decomposed by heat, reducing the oxide film of the solder powder, etc. . [Prior Technical Literature] [Patent Literature]

[專利文獻1] 日本國特開2011-83809號公報(A)   [專利文獻2] 日本國特開2016-78095號公報(A)[Patent Document 1] Japanese Patent Laid-Open No. 2011-83809 (A)    [Patent Document 2] Japanese Patent Laid-Open No. 2016-78095 (A)

[發明所欲解決之課題][Problems to be solved by the invention]

然而,在專利文獻2所記載之焊料凸塊之形成方法係因為使用將松香設為主成分的助焊劑,所以若回焊包含使用於此形成方法的助焊劑的焊膏,則產生基於松香的殘渣,所以有洗淨焊料的必要。又,即使洗淨焊料,亦有無法完全除去殘渣的情況,在此情況,有電子零件與基板之接合性低下的疑慮。However, the method of forming solder bumps described in Patent Document 2 uses a flux containing rosin as the main component, so if a solder paste containing solder flux used in this forming method is reflowed, a rosin-based Residue, so it is necessary to clean the solder. In addition, even if the solder is cleaned, the residue may not be completely removed. In this case, there is a concern that the adhesion between the electronic component and the substrate is low.

本發明係鑑於如此的事情所為者,其目的為提供一種可得到可抑制殘渣之產生的焊料之焊膏用助焊劑、焊膏、使用焊膏之焊料凸塊的形成方法及接合體的製造方法。 [用以解決課題之手段]The present invention is made in view of such circumstances, and an object of the present invention is to provide a method for forming a solder paste flux, a solder paste, a solder bump using solder paste, and a method for manufacturing a bonded body that can obtain solder that can suppress generation of residues . [Means to solve the problem]

本發明之一態樣之焊膏用助焊劑(以下,稱為「本發明之焊膏用助焊劑」)係包含黏稠劑、溶劑及觸變劑的焊膏用助焊劑,酸價值為100mg KOH/g以下,在熱重量測定中在300℃之減少率為80質量%以上,黏度為0.5Pa・s以上,且,黏合力(tacking force)為1.0N以上。   尚,所謂黏合力係意味著將焊料用助焊劑塗布於基板等時之對於基板的黏著強度,根據JISZ 3284而測定。The flux for solder paste of one aspect of the present invention (hereinafter, referred to as "flux for solder paste of the present invention") is a flux for solder paste containing a thickener, a solvent, and a thixotropic agent, and the acid value is 100 mg KOH /g or less, the reduction rate at 300° C. in thermogravimetric measurement is 80% by mass or more, the viscosity is 0.5 Pa・s or more, and the tacking force is 1.0 N or more.  Still, the adhesive force system means that the adhesive strength to the substrate when the solder flux is applied to the substrate, etc., is measured in accordance with JISZ 3284.

在本發明係焊膏用助焊劑為於熱重量測定,在300℃之減少率為80質量%以上,所以在包含焊膏用助焊劑的焊膏被回焊時,因為作為助焊劑之揮發份多,所以在上述包含焊膏用助焊劑的焊膏被回焊而形成焊料凸塊的情況,亦可抑制殘渣產生。   又,若焊膏用助焊劑之黏度為未達0.5Pa・s,則此助焊劑之黏度過小,無法構成焊膏,有無法塗布於基板等的疑慮。進而,若焊膏用助焊劑之黏合力為未達1.0N,則因為黏著強度低,所以在將包含此助焊劑的焊膏塗布於基板等時,有已塗布的焊膏由基板等脫落的疑慮。對於此,在本發明係助焊劑之黏度為0.5Pa・s以上,且,因為黏合力被設定為1.0N以上,所以可確保由焊膏用助焊劑及焊料粉末所構成的焊膏之形狀保持性。In the present invention, the flux for solder paste is measured by thermogravimetry, and the reduction rate at 300° C. is 80% by mass or more. Therefore, when the solder paste containing the solder paste flux is reflowed, it is because of the volatile content of the flux Many, therefore, in the case where the solder paste containing the solder paste flux is reflowed to form solder bumps, the generation of residues can also be suppressed. If the viscosity of the flux for solder paste is less than 0.5 Pa・s, the viscosity of this flux is too small to constitute a solder paste, and there is a concern that it cannot be applied to a substrate. Furthermore, if the adhesive strength of the solder paste flux is less than 1.0N, the adhesive strength is low, so when the solder paste containing this flux is applied to a substrate, etc., the applied solder paste may come off from the substrate, etc. doubt. In this regard, the viscosity of the flux of the present invention is 0.5 Pa・s or more, and because the adhesive force is set to 1.0 N or more, it is possible to ensure that the shape of the solder paste composed of the solder paste flux and the solder powder is maintained Sex.

又,透過將焊膏用助焊劑之酸價值設定為100mg KOH/g以下,可抑制略會殘留的助焊劑殘渣與周圍之金屬部分,例如配線之銅等之反應,可抑制腐蝕,可確保接合體之長期信賴性。除此之外,抑制設為焊膏時之焊料粉末與助焊劑進行反應,因為作為焊膏之黏度變化變少,所以可將通常係需要冷藏保管的焊膏在室溫長期間(例如,6個月以上)保存,可提昇長期保管性。   又,若此酸價值超過100mg KOH/g,則焊膏用助焊劑與焊料粉末之氧化物之還原反應所產生的還原水之產生變多,因為焊料凸塊內之孔隙變多,所以將上述酸價值設定為100mg KOH/g以下。   尚,於本發明之焊膏用助焊劑係不包含通常之助焊劑所包含的松香類或活性劑為較佳,但如為滿足上述熱重量測定及酸價值之要件的範圍則亦可稍微含有。In addition, by setting the acid value of the flux for solder paste to 100 mg KOH/g or less, the reaction of the slightly remaining flux residue with the surrounding metal parts, such as copper of wiring, etc. can be suppressed, corrosion can be suppressed, and bonding can be ensured The long-term reliability of the body. In addition, it suppresses the reaction between the solder powder and the flux when it is set as a solder paste. Since the viscosity of the solder paste changes less, it is possible to store the solder paste that usually needs to be stored in the refrigerator at room temperature for a long period of time (for example, 6 (More than months) storage, can improve long-term storage. In addition, if the acid value exceeds 100 mg KOH/g, the generation of reduced water due to the reduction reaction of the solder paste flux and the oxide of the solder powder will increase, because the pores in the solder bumps will increase, so the above The acid value is set to 100 mg KOH/g or less. It is preferred that the flux for solder paste of the present invention does not contain the rosin or active agent contained in the ordinary flux, but it may also be slightly contained if it meets the range of the requirements of the above thermogravimetric measurement and acid value .

作為本發明之焊膏用助焊劑之較佳的態樣係松香類之含量為10質量%以下為佳。   即使於焊膏用助焊劑內含有松香類,該量如為10質量%以下,則可使焊膏用助焊劑之酸價值呈現為100mg KOH/g以下。亦即,焊膏用助焊劑係如在10質量%以下之範圍內包含松香類則無妨。As a preferred aspect of the solder paste flux of the present invention, the content of rosin is preferably 10% by mass or less.   Even if the amount of rosin is contained in the flux for solder paste, if the amount is less than 10% by mass, the acid value of the flux for solder paste can be 100 mg KOH/g or less. That is, it is okay if the flux for solder paste contains rosin in the range of 10% by mass or less.

本發明之其他態樣之焊膏(以下,稱為「本發明之焊膏」)係混合上述焊膏用助焊劑與焊料粉末而成。   本發明之焊膏係因為包含上述焊膏用助焊劑,所以即使在焊膏被回焊的情況,亦可抑制殘渣之產生,可抑制因殘渣殘留所生的接合性低下。The solder paste of another aspect of the present invention (hereinafter, referred to as "solder paste of the present invention") is formed by mixing the above-mentioned solder paste flux and solder powder. Since the solder paste of the present invention contains the above-mentioned flux for solder paste, even when the solder paste is reflowed, the generation of residues can be suppressed, and the deterioration of the adhesion caused by the residues can be suppressed.

作為本發明之焊膏之較佳的態樣係前述焊膏用助焊劑之含有率為30體積%以上、90體積%以下為佳。   在焊膏用助焊劑之含有率為未達30體積%之情況,無法構成膏體、或是,成為乾的膏體,有無法將焊膏塗布於基板等的疑慮。另一方面,焊膏用助焊劑之含有率若超過90體積%,則有焊膏之黏度變得過低而塗布性能惡化、助焊劑和焊料粉末變得容易分離的疑慮。   相對於此,在上述態樣係因為焊膏用助焊劑之含有率為30體積%以上、90體積%以下,所以可構成適切的黏度之焊膏,可抑制塗布性能之惡化、或助焊劑與焊料粉末之分離。As a preferable aspect of the solder paste of the present invention, the content of the flux for the solder paste is preferably 30% by volume or more and 90% by volume or less.  When the content of the flux for the solder paste is less than 30% by volume, the paste cannot be formed or becomes a dry paste, and there is a concern that the solder paste cannot be applied to the substrate. On the other hand, if the content of the solder paste flux exceeds 90% by volume, the viscosity of the solder paste becomes too low, the coating performance deteriorates, and the flux and the solder powder may be easily separated. On the other hand, in the above-mentioned aspect, because the content of the flux for the solder paste is 30% by volume or more and 90% by volume or less, the solder paste with appropriate viscosity can be formed, and the deterioration of the coating performance can be suppressed, or the flux and Separation of solder powder.

作為本發明之焊膏之較佳的態樣係前述焊料粉末為Sn-Ag-Cu焊料粉末、Sn-Cu焊料粉末、Sn-Ag焊料粉末、Pb-Sn焊料粉末、Au-Sn焊料粉末、Au-Ge焊料粉末、Au-Si焊料粉末之任一者為佳。   如為上述態樣,則可將上述各種粉末之任一者作為焊料粉末使用。特別是,在焊料粉末為Au-Sn焊料粉末之情況,包含Au-Sn焊料粉末的焊膏係因為是高融點之焊膏,所以於回焊時容易產生殘渣之飛散,但因為以使用上述焊膏用助焊劑抑制殘渣之產生,所以可防止回焊時之殘渣之飛散。A preferred aspect of the solder paste of the present invention is that the aforementioned solder powder is Sn-Ag-Cu solder powder, Sn-Cu solder powder, Sn-Ag solder powder, Pb-Sn solder powder, Au-Sn solder powder, Au -Either Ge solder powder or Au-Si solder powder is preferred.   If it is the above-mentioned aspect, any of the above-mentioned various powders can be used as the solder powder. In particular, in the case where the solder powder is Au-Sn solder powder, the solder paste containing Au-Sn solder powder is a high-melting-point solder paste, so it is easy to generate flying residues during reflow, but because of the use of the above The flux for solder paste suppresses the generation of residues, so it can prevent the residues from flying away during reflow.

本發明之其他態樣之使用焊膏之焊料凸塊的形成方法(以下,稱為「使用本發明之焊膏的焊料凸塊之形成方法」)係將具有開口部的遮罩配置於基板上,於前述開口部內以填充上述焊膏之方式印刷前述焊膏,在剝離前述遮罩後,將前述基板上之凸塊前驅物在甲酸氣體環境下進行回焊處理而形成焊料凸塊。   如藉由如此的構成,則以抑制上述殘渣產生,而可省去焊料凸塊之洗淨步驟,此外因為在甲酸氣體環境下進行回焊處理,所以即使未包含進行還原除去氧化物的松香類等,亦還原基板上之氧化被膜及焊料之表面之氧化被膜而可使焊料熔融圓滑化。In another aspect of the present invention, a method of forming solder bumps using solder paste (hereinafter, referred to as "a method of forming solder bumps using the solder paste of the present invention") is to arrange a mask having an opening on a substrate Printing the solder paste in the opening so as to fill the solder paste, and after peeling off the mask, the bump precursor on the substrate is subjected to a reflow process in a formic acid gas environment to form solder bumps. With such a configuration, the generation of the above-mentioned residues can be suppressed, and the solder bump cleaning step can be omitted. In addition, because the reflow process is performed in a formic acid gas environment, even if the rosin that performs reduction to remove oxides is not included Also, the oxide film on the substrate and the oxide film on the surface of the solder are reduced to melt and smooth the solder.

本發明之其他態樣之使用焊膏的接合體之製造方法(以下,稱為「使用本發明之焊膏的接合體之製造方法」)係使用焊膏的接合體之製造方法,且在接合物與被接合物之間配置上述焊膏,藉由在甲酸氣體環境下加熱而焊接前述接合物與前述被接合物。   如藉由如此的構成,則以抑制上述殘渣產生,可省去接合部之洗淨步驟,此外因為在甲酸氣體環境下進行回焊處理,所以即使未包含進行還原除去氧化物的松香類等,亦還原接合物及被接合物上之氧化被膜及焊料之表面之氧化被膜而可使焊料熔融圓滑化,可將接合物及被接合物更強固地接合。   尚,作為配置焊膏的方法係無特別限定,例如可以印刷法或藉由分配器所為的塗布、針轉印等配置。又,作為接合物係例如為基板等,作為被接合物係例如為LED元件等之半導體元件等。 [發明的效果]The manufacturing method of a bonded body using solder paste in another aspect of the present invention (hereinafter, referred to as "the manufacturing method of a bonded body using the solder paste of the present invention") is a manufacturing method of a bonded body using solder paste, and The solder paste is arranged between the object and the object to be joined, and the object to be joined and the object to be joined are welded by heating in a formic acid gas environment. With such a configuration, in order to suppress the generation of the above-mentioned residue, the step of cleaning the joint can be omitted, and because the reflow process is performed in a formic acid gas environment, even if rosin that does not reduce oxides is included, It also reduces the oxide film on the bonding object and the bonded object and the oxide film on the surface of the solder to melt and smooth the solder, so that the bonding object and the bonded object can be bonded more strongly. There is no particular limitation on the method of disposing the solder paste. For example, it can be arranged by a printing method, coating by a dispenser, or needle transfer. In addition, the bonded object system is, for example, a substrate, and the bonded object system is, for example, a semiconductor element such as an LED element. [Effect of invention]

在本發明之焊膏用助焊劑、焊膏、使用焊膏之焊料凸塊的形成方法及接合體的製造方法係可抑制殘渣之產生及焊料之表面之再氧化。In the solder paste flux, solder paste, solder bump using solder paste forming method and joint manufacturing method of the present invention, generation of residue and reoxidation of the solder surface can be suppressed.

以下,說明關於有關本發明的焊膏用助焊劑、焊膏、使用焊膏之焊料凸塊的形成方法。   本實施形態之焊膏用助焊劑(以下,有僅稱為助焊劑的情況)係包含黏稠劑、溶劑及觸變劑的助焊劑,且酸價值為100mg KOH/g以下,在熱重量測定中在300℃之減少率為80質量%以上,黏度為0.5Pa・s以上,且,黏合力為1.0N以上。   以下,將助焊劑之構成、酸價值、在熱重量測定的300℃之減少率、黏度及黏合力,關於以上述之方式規定的理由而說明。Hereinafter, a method of forming solder bumps, solder paste, and solder bumps using solder paste according to the present invention will be described. The flux for solder paste of the present embodiment (hereinafter, sometimes referred to simply as flux) is a flux containing a thickener, a solvent, and a thixotropic agent, and has an acid value of 100 mg KOH/g or less, in thermogravimetric measurement The reduction rate at 300°C is 80% by mass or more, the viscosity is 0.5 Pa・s or more, and the adhesive force is 1.0 N or more.  The composition of the flux, the acid value, the reduction rate at 300°C measured by thermogravimetry, the viscosity, and the adhesive force will be explained for the reasons specified above.

[助焊劑之構成]   助焊劑係包含黏稠劑、溶劑及觸變劑而構成。尚,在本實施形態,助焊劑係僅由黏稠劑、溶劑及觸變劑構成。   助焊劑之酸價值係被設為100mg KOH/g以下。因為藉由將此酸價值設定為100mg KOH/g以下,抑制設為焊膏時之焊料粉末與助焊劑進行反應,作為焊膏之黏度變化變少。又,因為若酸價值超過上述值,則在助焊劑與焊料粉末之氧化物之還原反應所產生的還原水之產生變多,所形成的焊料凸塊內之孔隙變多。尚,助焊劑之酸價值係50mg KOH/g以下為較佳,10mg KOH/g以下為更佳。於酸價值之下限無特別限制,亦可為測定之偵測下限值以下,例如為0.01mg KOH/g。   進而,助焊劑係在熱重量測定中於300℃之減少率為80質量%以上。此係因為若在熱重量測定於300℃之減少率為未達80質量%,則包含助焊劑的焊膏被回焊時,殘渣之量變多。尚,助焊劑係在熱重量測定中於300℃之減少率為85質量%以上為較佳,90質量%以上為更佳。減少量之上限係無特別限制,但作為使用一般上可利用的黏稠劑的情況之數值,例如為99.5質量%。[Structure of Flux]    Flux consists of a thickener, a solvent and a thixotropic agent. In addition, in this embodiment, the flux system is composed only of a thickener, a solvent, and a thixotropic agent. The acid value of the flux is set to 100 mg KOH/g or less. By setting the acid value to 100 mg KOH/g or less, the reaction between the solder powder and the flux when the solder paste is set is suppressed, and the viscosity change as a solder paste becomes less. In addition, if the acid value exceeds the above value, the generation of reduced water due to the reduction reaction between the flux and the oxide of the solder powder increases, and the voids in the formed solder bumps increase. Still, the acid value of the flux is preferably 50 mg KOH/g or less, and more preferably 10 mg KOH/g or less. There is no particular limit to the lower limit of the acid value, and it may also be below the detected lower limit of detection, for example, 0.01 mg KOH/g.   Furthermore, in the thermogravimetric measurement, the reduction rate of the flux system at 300°C is 80% by mass or more. This is because if the reduction rate at 300°C by thermogravimetric measurement is less than 80% by mass, the amount of residue increases when the solder paste containing flux is reflowed. In addition, the reduction rate of the flux system at 300°C in thermogravimetric measurement is preferably 85% by mass or more, and more preferably 90% by mass or more. The upper limit of the amount of reduction is not particularly limited, but as a value when a generally available thickener is used, for example, it is 99.5% by mass.

作為包含於助焊劑的溶劑係可使用醇、酮、酯、醚、芳香族系、烴類、萜烯系及萜系等之溶劑。具體而言係可將苄醇,乙醇,乙基醇,異丙醇,丁醇,二乙二醇,乙二醇,乙基溶纖劑,丁基溶纖劑,丁基卡必醇,異丙醇,乙酸乙酯,乙酸丁酯,苯甲酸丁酯,己二酸二乙酯,十二烷,十四烯,α-萜品醇,2-甲基-2,4-戊二醇,2-乙基-1,3-己二醇,甲苯,二甲苯,丙二醇單苯基醚,二乙二醇單己醚,乙二醇單丁醚,二乙二醇單丁醚,己二酸二異丁酯,己二醇,環己烷二甲醇,2-萜品基氧基乙醇、2-二氫萜品基氧基乙醇,檸檬醛,沉香醇,檸檬烯,香芹酚,蒎烯,法呢烯等單獨或混合此等而使用。As the solvent system included in the flux, solvents such as alcohols, ketones, esters, ethers, aromatic systems, hydrocarbons, terpene systems, terpene systems, and the like can be used. Specifically, benzyl alcohol, ethanol, ethyl alcohol, isopropyl alcohol, butanol, diethylene glycol, ethylene glycol, ethyl cellosolve, butyl cellosolve, butyl carbitol, isopropanol , Ethyl acetate, butyl acetate, butyl benzoate, diethyl adipate, dodecane, tetradecene, α-terpineol, 2-methyl-2,4-pentanediol, 2- Ethyl-1,3-hexanediol, toluene, xylene, propylene glycol monophenyl ether, diethylene glycol monohexyl ether, ethylene glycol monobutyl ether, diethylene glycol monobutyl ether, diisopropyl adipate Butyl ester, hexanediol, cyclohexanedimethanol, 2-terpineoloxyethanol, 2-dihydroterpineoloxyethanol, citral, linalool, limonene, carvacrol, pinene, farnes Alkenes are used alone or in combination.

又,作為被包含於助焊劑的觸變劑係可將硬化蓖麻油、氫化蓖麻油、巴西棕櫚蠟、醯胺、羥基脂肪酸類、二亞苄基山梨醇、雙(p-甲基亞苄基)山梨醇、蜂蠟、硬脂酸醯胺、羥基硬脂酸伸乙基雙醯胺單獨或混合此等而使用。進而於此等按照必要而添加如辛酸、月桂酸、肉荳蔻酸、棕櫚酸、硬脂酸、山萮酸般的脂肪酸、如1,2-羥基硬脂酸般的羥基脂肪酸、抗氧化劑、界面活性劑、胺類等而使用。In addition, as the thixotropic agent system included in the flux, hardened castor oil, hydrogenated castor oil, carnauba wax, amide, hydroxy fatty acids, dibenzylidene sorbitol, bis(p-methylbenzylidene ) Sorbitol, beeswax, stearic acid amide, hydroxystearic acid ethyl bis bisamide, used alone or in combination. Furthermore, fatty acids such as caprylic acid, lauric acid, myristic acid, palmitic acid, stearic acid, behenic acid, hydroxy fatty acids such as 1,2-hydroxystearic acid, antioxidants, and interfaces are added as necessary. Used as active agents, amines, etc.

助焊劑之黏度為0.5Pa・s以上。若助焊劑之黏度為未達0.5Pa・s,則此助焊劑之黏度過小,無法構成焊膏,有無法塗布於基板等的疑慮。尚,助焊劑之黏度係1.0Pa・s以上為較佳。尚,黏度為室溫(25℃)之時之黏度。黏度之上限無特別限制,但由塗布性等之觀點視之,例如為100Pa・s。   又,助焊劑之黏合力為1.0N以上。若助焊劑之黏合力未達1.0N,則因為黏著強度低,所以在將包含此助焊劑的焊膏塗布於基板等時,有已塗布的焊膏由基板等脫落的疑慮。尚,助焊劑之黏合力係1.2N以上為較佳。尚,黏合力為室溫(25℃)之時之數值。黏合力之上限無特別限制,但由遮罩之脫版性等之觀點視之,例如為100N。The viscosity of the flux is 0.5Pa・s or more. If the viscosity of the flux is less than 0.5 Pa・s, the viscosity of the flux is too small to constitute a solder paste, and there is a concern that it cannot be applied to the substrate. Still, the viscosity of the flux is preferably 1.0 Pa・s or more. Still, the viscosity is the viscosity at room temperature (25°C). The upper limit of the viscosity is not particularly limited, but from the viewpoint of coatability, etc., for example, it is 100 Pa・s.  Furthermore, the adhesion of flux is 1.0N or more. If the adhesive strength of the flux is less than 1.0N, the adhesive strength is low, so that when the solder paste containing this flux is applied to a substrate or the like, the applied solder paste may fall off from the substrate or the like. Still, the adhesion of the flux is preferably 1.2 N or more. Still, the adhesive force is the value at room temperature (25 ℃). The upper limit of the adhesive force is not particularly limited, but it is 100N, for example, from the standpoint of the releasability of the mask.

[黏稠劑之構成]   黏稠劑係在常溫(25℃)為固體或黏度為1Pa・s以上之液體為最佳。此係因為若黏稠劑為在常溫下黏度為未達1 Pa・s之液體,則助焊劑之黏度過小,無法構成焊膏,有無法塗布於基板等的疑慮。如此的黏稠劑為在常溫下具有1Pa・s以上之黏度,或是在常溫下為固體,所以由包含此黏稠劑的助焊劑及焊料粉末所構成的焊膏具有形狀保持性。黏度之上限無特別限制,但由塗布性等之觀點視之,例如為400Pa・s。   又,黏稠劑係在熱重量測定中於300℃之減少量為90質量%以上。此係因為助焊劑成分之中多數為黏稠劑,所以若在熱重量測定中於300℃之減少率為未達90質量%,則無法將在助焊劑之熱重量測定中於300℃之減少率作為80%以上。於減少率之上限無特別限制,亦可使用減少100質量%的黏稠劑。   此黏稠劑之黏合力被設定為1.1N以上。如上述,因為助焊劑成分之中多數為黏稠劑,所以若黏稠劑之黏合力為未達1.1N,則無法將助焊劑之黏合力作為1.0N以上。黏合力之上限無特別限制,但由遮罩之脫版性等之觀點視之,例如為200N。[Structure of Viscosity Agent]    Viscosity agent is a solid at room temperature (25℃) or a liquid with a viscosity of 1Pa・s or more. This is because if the viscosity is a liquid with a viscosity of less than 1 Pa・s at room temperature, the viscosity of the flux is too small to constitute a solder paste, and there is a concern that it cannot be applied to a substrate. Such a viscosity agent has a viscosity of 1 Pa・s or more at room temperature, or is solid at room temperature, so a solder paste composed of flux and solder powder containing the viscosity agent has shape retention. The upper limit of the viscosity is not particularly limited, but from the viewpoint of coatability, etc., for example, it is 400 Pa・s.  Furthermore, the reduction of the viscosity agent at 300°C in thermogravimetric measurement is 90% by mass or more. This is because most of the flux components are viscous, so if the reduction rate at 300°C in thermogravimetric measurement does not reach 90% by mass, the reduction rate at 300°C in thermogravimetric measurement of flux cannot be As more than 80%. There is no particular limitation on the upper limit of the reduction rate, and a thickener with a reduction of 100% by mass can also be used.   The viscosity of this thickener is set to 1.1 N or more. As described above, since most of the flux components are thickeners, if the adhesive strength of the thickener is less than 1.1 N, the adhesive strength of the flux cannot be made 1.0 N or more. The upper limit of the adhesive force is not particularly limited, but it is 200N, for example, from the standpoint of the release of the mask.

作為被包含於助焊劑的黏稠劑係分解溫度低,具有黏稠性者為較佳。例如,作為黏稠劑係除了異冰片基環己醇、異冰片基酚及此等之衍生物以外,可使用數量平均分子量為700以上、1500以下之聚丁烯等。尚,聚丁烯之數量平均分子量設為700以上、1500以下係因為若數量平均分子量為未達700則黏度成為未達1Pa・s而黏稠效果低,焊膏之印刷性為低下,因為若數量平均分子量超過1500則耐熱性變高而成為容易殘留作為殘渣。   如此在本實施形態係因為未將黏稠劑藉由松香類、二聚酸及數量平均分子量為超過1500的聚丁烯等而構成,所以在熱重量測定於300℃之減少率成為90質量%以上,一邊抑制殘留殘渣於焊料凸塊、一邊確保黏稠性。   尚,本實施形態之助焊劑係因為如上述之方式,作為主成分未包含松香類等,所以還原除去氧化物而浸潤於底層,缺乏被覆焊料凸塊而防止再氧化的效果。如此的松香類之機能係藉由後述的甲酸氣體而填補。The viscous system contained in the flux has a low decomposition temperature and is preferably viscous. For example, as the viscous agent, in addition to isobornylcyclohexanol, isobornylphenol, and derivatives thereof, polybutene having a number average molecular weight of 700 or more and 1500 or less can be used. Still, the number average molecular weight of polybutene is set to 700 or more and 1500 or less because if the number average molecular weight is less than 700, the viscosity becomes less than 1 Pa・s and the viscosity effect is low, and the printability of the solder paste is low, because if the quantity If the average molecular weight exceeds 1500, the heat resistance becomes high and it tends to remain as a residue. In this way, in this embodiment, since the viscosity agent is not composed of rosin, dimer acid, and polybutene having a number average molecular weight of more than 1500, the reduction rate at 300°C by thermogravimetric measurement becomes 90% by mass or more , While maintaining the residual residue on the solder bumps, while ensuring the viscosity.  Further, the flux of the present embodiment does not contain rosin or the like as the main component as described above, so it reduces and removes the oxide to infiltrate the underlying layer, and lacks the effect of covering the solder bumps to prevent reoxidation. Such rosin-like functions are filled by formic acid gas described later.

如此的助焊劑之調配組成係例如溶劑為19質量%~60質量%,黏稠劑為30質量%~80質量%,觸變劑為1.0質量%~10質量%。在溶劑為未達19質量%係焊膏為難以成為膏狀,若溶劑超過60質量%,則被印刷塗布於基板上的狀態之焊膏(以下,有稱為凸塊前驅物的情況)之形狀保持性成為不良。在觸變劑為未達1.0質量%係焊膏之形狀保持性成為不良,若超過10質量%,則焊膏變得過硬。又,黏稠劑為未達30質量%之情況,無法構成膏體、或是,成為乾的膏體,有無法將焊膏塗布於基板等的疑慮。   另一方面,若黏稠劑超過80質量%,則有焊膏之黏度變得過高,或是,黏著力變得過高,印刷時之刮除性惡化,或是以分配器所致的塗布時或針轉印時之形狀惡化的疑慮。較佳的助焊劑之調配組成係黏稠劑為35質量%以上、80質量%以下,觸變劑為2質量%以上、6質量%以下,剩餘部分為溶劑。又,進而佳的助焊劑之調配組成係黏稠劑為35質量%以上、70質量%以下,觸變劑為2.5質量%以上、5.5質量%以下,剩餘部分為溶劑。   尚,若於焊膏用助焊劑內大量包含活性劑,則作為焊膏時之焊料粉末與助焊劑進行反應,因為黏度變化變大,所以即使冷藏保存亦只能保存幾個月。因此,在本實施形態,於焊膏用助焊劑係作為不包含活性劑。The composition of such flux is, for example, a solvent of 19% by mass to 60% by mass, a viscosity of 30% by mass to 80% by mass, and a thixotropic agent of 1.0% by mass to 10% by mass. When the solvent is less than 19% by mass, it is difficult for the solder paste to become a paste. If the solvent exceeds 60% by mass, the solder paste is printed on the substrate (hereinafter referred to as a bump precursor) The shape retention property becomes poor. When the thixotropic agent is less than 1.0% by mass, the shape retention of the solder paste becomes poor, and if it exceeds 10% by mass, the solder paste becomes too hard. In addition, when the viscosity agent is less than 30% by mass, the paste cannot be formed, or it becomes a dry paste, and there is a concern that the solder paste cannot be applied to the substrate. On the other hand, if the viscosity exceeds 80% by mass, the viscosity of the solder paste becomes too high, or the adhesion becomes too high, the scraping property during printing deteriorates, or the coating is caused by the dispenser Do not worry about the shape deterioration at the time or needle transfer. The preferred composition of the flux composition is that the viscosity is 35% by mass or more and 80% by mass or less, the thixotropic agent is 2% by mass or more and 6% by mass or less, and the remainder is the solvent. Furthermore, the composition of a further preferable flux is a thickener of 35% by mass or more and 70% by mass or less, a thixotropic agent of 2.5% by mass or more and 5.5% by mass or less, and the remainder being a solvent.  Still, if a large amount of active agent is contained in the solder paste flux, the solder powder when used as a solder paste reacts with the flux, and the viscosity change becomes large, so it can only be stored for a few months even if it is refrigerated. Therefore, in this embodiment, the flux system for solder paste does not contain an active agent.

[焊膏之構成]   焊膏係混合上述助焊劑、與焊料粉末而成的混合體,助焊劑之含有率設定為30體積%以上、90體積%以下。在焊膏用助焊劑之含有率為未達30體積%之情況,無法構成膏體,或是,成為乾的膏體,有無法將焊膏印刷塗布於基板等的疑慮。另一方面,若焊膏用助焊劑之含有率超過90體積%,則有焊膏之黏度變得過高,或是,黏著力變得過高,印刷時之刮除性惡化,或是以分配器所致的塗布時或針轉印時之形狀惡化的疑慮。因此,在本實施形態係助焊劑之含有率被設定為30體積%以上、90體積%以下。尚,助焊劑之含有率係40體積%以上、90體積%以下為較佳。   由此,焊膏之黏度係成為0.4Pa・s以上,焊膏之黏合力成為0.8N以上。[Structure of Solder Paste]    Solder paste is a mixture of the above flux and solder powder, and the flux content is set to 30% by volume or more and 90% by volume or less. When the content of the flux for the solder paste is less than 30% by volume, the paste cannot be formed, or it becomes a dry paste, and there is a concern that the solder paste cannot be printed and applied to the substrate. On the other hand, if the content of the flux for solder paste exceeds 90% by volume, the viscosity of the solder paste becomes too high, or the adhesive force becomes too high, and the scraping property during printing deteriorates, or There is a concern that the shape of the dispenser will deteriorate when it is applied or when the needle is transferred. Therefore, in this embodiment, the flux content is set to 30% by volume or more and 90% by volume or less. Still, the content of the flux is preferably 40% by volume or more and 90% by volume or less.   As a result, the viscosity of the solder paste becomes 0.4 Pa・s or more, and the adhesive force of the solder paste becomes 0.8 N or more.

又,作為焊料粉末係可例示Sn-Ag-Cu焊料粉末、Sn-Cu焊料粉末、Sn-Ag焊料粉末、Pb-Sn焊料粉末、Au-Sn焊料粉末、Au-Ge焊料粉末。又,焊料粉末之平均粒徑係例如在0.1~30.0μm之範圍內,藉由此而可提昇向遮罩開口部之膏體填充性及凸塊前驅物之形狀保持性。   尚,為了將凸塊形成作為窄間距,較佳為焊料粉末之平均粒徑係處於0.1~10.0μm之範圍內。In addition, examples of the solder powder system include Sn-Ag-Cu solder powder, Sn-Cu solder powder, Sn-Ag solder powder, Pb-Sn solder powder, Au-Sn solder powder, and Au-Ge solder powder. In addition, the average particle diameter of the solder powder is, for example, in the range of 0.1 to 30.0 μm, thereby improving the paste filling property to the opening of the mask and the shape retention property of the bump precursor. In order to form the bumps as a narrow pitch, the average particle diameter of the solder powder is preferably in the range of 0.1 to 10.0 μm.

[焊料凸塊之形成方法]   接著,說明使用焊膏之焊料凸塊的形成方法。   此形成方法係具備印刷焊膏的印刷步驟,將焊膏在甲酸氣體環境下加熱的回焊步驟。以下,依序詳細地說明印刷步驟、回焊步驟。[Method of forming solder bumps] Next, a method of forming solder bumps using solder paste will be described.   This forming method includes a printing step of printing solder paste, and a reflow step of heating the solder paste in a formic acid gas environment. Hereinafter, the printing step and the reflow step will be described in detail in order.

(印刷步驟)   在印刷步驟係於矽晶圓、玻璃環氧樹脂基板等之基板上配置具有開口部的遮罩,以於此開口部內填充焊膏之方式印刷塗布焊膏。此印刷塗布後,將遮罩由基板剝離,於基板上形成凸塊前驅物。尚,焊膏係作為印刷塗布,但亦可藉由分配器等所致的吐出供給,且亦可藉由針轉印裝置等所致的針轉印。   在此情況,因為黏稠劑為在常溫為固體或黏度為 1Pa・s以上之液體,所以可確保由包含黏稠劑的焊膏用助焊劑及焊料粉末所構成的焊膏之形狀保持性。又,因為焊膏用助焊劑之含有率為30體積%以上、90體積%以下,所以可構成適切的黏度及黏著力之焊膏,可抑制印刷時之刮除性惡化等。(Printing step)   In the printing step, a mask having an opening is arranged on a substrate such as a silicon wafer or a glass epoxy substrate, and the opening is filled with solder paste to print and apply the solder paste. After this printing and coating, the mask is peeled off from the substrate to form a bump precursor on the substrate. Although the solder paste is applied for printing, it can also be supplied by discharge by a dispenser or the like, and also by needle transfer by a needle transfer device or the like.  In this case, because the thickener is a liquid that is solid at room temperature or has a viscosity of 1 Pa・s or more, the shape retention of the solder paste composed of the solder paste flux containing the thickener and the solder powder can be ensured. In addition, since the content rate of the solder paste flux is 30% by volume or more and 90% by volume or less, it is possible to construct a solder paste with appropriate viscosity and adhesion, and it is possible to suppress the deterioration of scraping properties during printing.

(回焊步驟)   在回焊步驟係首先作為預備加熱,在甲酸氣體環境下,將已形成於基板上的凸塊前驅物以低於焊料粉末之融點的溫度加熱30秒~2分鐘(預熱步驟),使在助焊劑中之孔隙源的溶劑揮發。在此甲酸氣體環境下之各加熱步驟係藉由在常溫將N2 通氣至純度99%之甲酸而產生將甲酸溶入N2 氣體內的氣體,將此已溶入甲酸的N2 氣體供給至爐內而實行。此已溶入甲酸的N2 氣體(甲酸氣體)之甲酸濃度係例如設定為大約3體積%。尚,亦可藉由於爐內置入甲酸而產生甲酸氣體環境。   之後,以高於焊料粉末之融點的溫度,例如,以焊料粉末之融點+30℃之溫度加熱10秒~1分鐘(正式加熱步驟),溶融焊料粉末。此時,甲酸係與被包含在焊料粉末的Sn等之金屬氧化物反應而產生甲酸鹽後,進而被置於高溫化而甲酸鹽為藉由甲酸而還原。以如此之方式在甲酸氣體環境下,若實行各加熱步驟,則藉由甲酸之還原力而還原焊料粉末等之氧化被膜。而且,若冷卻已熔融的焊料,則藉由表面張力而形成略半球狀之焊料凸塊。(Reflow step) The reflow step is first used as preliminary heating. In the formic acid gas environment, the bump precursor formed on the substrate is heated at a temperature lower than the melting point of the solder powder for 30 seconds to 2 minutes (pre- Thermal step) to evaporate the solvent of the pore source in the flux. Each heating step in this formic acid gas environment generates a gas in which formic acid is dissolved in N 2 gas by ventilating N 2 to 99% purity formic acid at normal temperature, and this N 2 gas dissolved in formic acid is supplied to Implemented in the furnace. The formic acid concentration of the N 2 gas (formic acid gas) in which formic acid has been dissolved is set to, for example, about 3% by volume. Still, the formic acid gas environment can also be generated by formic acid being built into the furnace. After that, the solder powder is melted by heating at a temperature higher than the melting point of the solder powder, for example, at a temperature of the melting point of the solder powder + 30°C for 10 seconds to 1 minute (formal heating step). At this time, the formic acid system reacts with metal oxides such as Sn contained in the solder powder to generate formate, and then the temperature is increased to formate is reduced by formic acid. In such a manner, under the formic acid gas environment, if each heating step is performed, the oxide film of the solder powder or the like is reduced by the reducing power of formic acid. Furthermore, if the molten solder is cooled, a slightly hemispherical solder bump is formed by surface tension.

在此情況,在本實施形態係焊膏用助焊劑為於熱重量測定,在300℃之減少率為80質量%以上,其中尤其在黏稠劑為於熱重量測定,在300℃之減少量為90質量%以上,所以在包含焊膏用助焊劑的焊膏被回焊時,因為作為助焊劑之揮發份多,凸塊前驅物被回焊而形成焊料凸塊的情況,亦可抑制殘渣產生,可省去焊料凸塊之洗淨步驟。   又,因為在甲酸氣體環境下進行回焊處理,所以即使於構成焊膏的助焊劑內未包含還原除去氧化物的松香類,亦可藉由甲酸氣體之還原力而還原焊料粉末或基板上之氧化被膜而使焊料熔融圓滑化。In this case, in this embodiment, the flux for solder paste is measured by thermogravimetry, and the reduction rate at 300°C is 80% by mass or more. Among them, the reduction amount at 300°C is especially when the viscosity is measured by thermogravimetry. 90% by mass or more, so when the solder paste containing the flux for solder paste is reflowed, the volatile content of the flux is large, and the bump precursor is reflowed to form a solder bump, which can also suppress the generation of residue , The solder bump cleaning step can be omitted. In addition, because the reflow process is performed in a formic acid gas environment, even if the rosin that reduces and removes oxides is not included in the flux constituting the solder paste, the solder powder or the substrate can be reduced by the reducing power of the formic acid gas The coating is oxidized to melt and smooth the solder.

又,因為藉由使用本實施形態之焊膏用助焊劑而抑制殘渣之產生,所以即使焊料粉末為高融點之Au-Sn焊料粉末亦可防止回焊時之殘渣之飛散。   更進一步,因為焊膏用助焊劑之酸價值被設定為100 mg KOH/g以下,所以除了可抑制在焊料凸塊內的孔隙之產生以外,可長期間保存焊膏(例如,6個月以上),可提昇長期保管性。In addition, since the generation of residues is suppressed by using the flux for solder paste of the present embodiment, even if the solder powder is a high-melting point Au-Sn solder powder, it is possible to prevent the scattering of the residues during reflow. Furthermore, because the acid value of the solder paste flux is set to 100 mg KOH/g or less, in addition to suppressing the generation of voids in the solder bumps, the solder paste can be stored for a long period of time (for example, more than 6 months ), can improve long-term storage.

尚,本發明係不限定於上述實施形態,在不逸脫本發明之旨趣的範圍內可加以各式各樣的變更。   在上述實施形態係助焊劑設為僅由黏稠劑、溶劑及觸變劑所構成,但不限於此,如為酸價值為100mg KOH/g以下,於熱重量測定在300℃之減少率為80質量%以上之範圍內,黏度為0.5Pa・s以上,且黏合力為1.0N以上,則助焊劑亦可微量地包含松香類及活性劑。例如,如在松香類之情況係10質量%以下,在活性劑之情況為0.1質量%以下之範圍,則亦可包含此等於助焊劑。   又,在上述實施形態係以在回焊步驟實行預熱步驟及正式加熱步驟,使加熱溫度以兩階段階段性地上昇,但不限於此,亦可僅實行正式加熱步驟。又,亦可使加熱溫度以三階段以上,階段性地上昇。   更進一步,在上述實施形態係說明關於使用焊膏之焊料凸塊之製造方法,但不限於此,本發明之焊膏係亦可被使用於接合體之製造方法,其係被配置於接合物與被接合物之間,藉由在甲酸氣體環境下進行加熱而焊接接合物與被接合物。 [實施例]However, the present invention is not limited to the above-mentioned embodiment, and various changes can be made within the scope that does not deviate from the gist of the present invention. In the above-mentioned embodiment, the flux is composed only of a thickener, a solvent, and a thixotropic agent, but it is not limited to this. If the acid value is 100 mg KOH/g or less, the reduction rate at 300° C. by thermogravimetric measurement is 80 Within the range of mass% or more, the viscosity is 0.5 Pa・s or more, and the adhesive force is 1.0 N or more, the flux may also contain a small amount of rosin and active agent. For example, if it is 10% by mass or less in the case of rosin and 0.1% by mass or less in the case of the active agent, then this flux may be included. In the above embodiment, the preheating step and the main heating step are performed in the reflow step to increase the heating temperature in two stages, but it is not limited to this, and only the main heating step may be performed. In addition, the heating temperature may be increased stepwise in three or more stages. Furthermore, the above embodiment describes the method of manufacturing solder bumps using solder paste, but it is not limited to this. The solder paste of the present invention can also be used in a method of manufacturing a bonded body, which is arranged in a bonded object Between the object and the object to be joined, the object to be joined is welded by heating in a formic acid gas environment. [Example]

變更諸條件,同時製造焊膏,進行關於由此焊膏而得到的焊料凸塊之回焊後之殘渣之量、焊膏之長期保管性及形狀保持性的實驗。關於已得到的實施例1~9以及比較例1~6之樣本,在參照表1及表2的同時進行說明。Various conditions were changed, and solder paste was produced at the same time. Experiments were conducted on the amount of residue after solder reflow obtained from the solder paste, the long-term storage property and shape retention of the solder paste. The obtained samples of Examples 1 to 9 and Comparative Examples 1 to 6 will be described while referring to Tables 1 and 2.

尚,在表1中關於在個別助焊劑及黏稠劑的熱重量測定的於300℃之減少率(以下,在表1係稱為300℃TG減少),係使用一般之熱重量測定裝置而測定。例如,在助焊劑之熱重量測定係將10mg之助焊劑在N2 環境下,藉由測定以昇溫10℃/min、使溫度由室溫(25℃)上昇至300℃時之重量變化,求出上述減少率。黏稠劑亦相同。   又,關於助焊劑及黏稠劑之黏度係依據JIS Z 8803而測定。尚,在表1係關於在常溫(25℃)為液狀者係表示依據上述JIS Z 8803而測定的黏度,關於在常溫為固體者係於表1表示為固體。   進而,關於助焊劑之酸價值係依據JIS Z 3197而測定。尚,關於酸價值過小而超出偵測界限者係表示為偵測界限以下。In addition, in Table 1, the reduction rate at 300°C (hereinafter referred to as 300°C TG reduction in Table 1) measured by the thermogravimetric measurement of individual fluxes and thickeners is measured using a general thermogravimetric measuring device . For example, in the thermogravimetric measurement of flux, the weight change of 10 mg of flux in a N 2 environment is measured by raising the temperature by 10° C./min and increasing the temperature from room temperature (25° C.) to 300° C. The above-mentioned reduction rate. The thickener is the same. In addition, the viscosity of the flux and the thickener is measured in accordance with JIS Z 8803. In addition, Table 1 shows the viscosity measured according to the above-mentioned JIS Z 8803 for the liquid at normal temperature (25°C), and Table 1 shows the solid for the solid at normal temperature. Furthermore, the acid value of the flux is measured in accordance with JIS Z 3197. Still, those whose acid value is too small and exceeds the detection limit are indicated below the detection limit.

藉由將如此的表示於表1的焊料粉末及助焊劑,以表1所示的比例混合,製造焊膏。又,助焊劑係藉由混合黏稠劑、觸變劑、溶劑、活性劑而製作,黏稠劑、觸變劑、溶劑及活性劑係設為依照表1所記載,觸變劑係設為5質量%,將剩餘部分設為溶劑。   關於回焊後之殘渣之有無、焊膏之長期保管性及形狀保持性之評估,藉由下述手法而進行。By mixing the solder powder and the flux shown in Table 1 in the proportions shown in Table 1, solder paste was produced. In addition, the flux is prepared by mixing a thickener, a thixotropic agent, a solvent, and an active agent. The thickener, thixotropic agent, solvent, and active agent are as described in Table 1, and the thixotropic agent is 5 mass. %, set the remaining part as the solvent.   The evaluation of the presence or absence of residue after reflow, the long-term storage of solder paste and shape retention is carried out by the following method.

(回焊後之殘渣之有無)   於銅板之表面使用厚度200μm之印刷用模板遮罩,將各實施例1~9以及比較例1~6之焊膏各自印刷塗布為直徑6.5mm之圓形,由銅板除去印刷用模板遮罩。以如此的方式進行,關於各試料,將圓形之凸塊前驅物形成於銅板上,設為評估用基板。   接著,以在甲酸氣體環境下,加熱此評估用基板,使凸塊前驅物進行回焊處理。此時,波峰溫度係設為各焊料粉末之融點+30℃,加熱時間係設為1分鐘。在此甲酸氣體環境下之加熱係藉由在常溫將N2 通氣而產生將甲酸溶入N2 氣體內的氣體,將此已溶入甲酸的N2 氣體供給至爐內而實行。此已溶入甲酸的N2 氣體(甲酸氣體)之甲酸濃度係設為大約3體積%。   之後,使用電子顯微鏡(SEM),觀察已被回焊處理的凸塊前驅物(焊料凸塊),將殘渣之面積為未達焊膏之塗布面積之3成之情況判定為良好,殘渣覆蓋焊膏之塗布面積之3成以上的情況判定為不良。(The presence or absence of residue after reflow) Using a 200 μm thick stencil mask for printing on the surface of the copper plate, the solder pastes of each of Examples 1 to 9 and Comparative Examples 1 to 6 were printed and applied to a circle with a diameter of 6.5 mm. The template mask for printing is removed from the copper plate. In this way, for each sample, a circular bump precursor was formed on the copper plate and used as the evaluation substrate. Next, the substrate for evaluation is heated in a formic acid gas environment, and the bump precursor is subjected to a reflow process. At this time, the peak temperature is set to the melting point of each solder powder + 30°C, and the heating time is set to 1 minute. In this acid-based heating atmosphere of N 2 by ventilation at room temperature to produce the carboxylic acid dissolved gas in N 2 gas, this acid was dissolved in N 2 gas supplied to the furnace and implementation. The concentration of formic acid in the N 2 gas (formic acid gas) into which formic acid has been dissolved is set to about 3% by volume. Then, using an electron microscope (SEM), observe the bump precursors (solder bumps) that have been reflowed, and determine that the area of the residue is less than 30% of the coating area of the solder paste, and the residue covers the solder A case where 30% or more of the application area of the paste is judged as defective.

(焊膏之長期保管性)   將膏體以室溫保管6個月後,使用此膏體而與上述同樣地作成評估用基板,於此進行上述回焊處理而形成焊料凸塊。   之後,以光學顯微鏡觀察,將焊料粉末之未熔融粉之產生量與焊膏製作之後不久為相同的情況判定為良好,焊料粉末之未熔融粉之產生量為較焊膏製作之後不久更增加的情況判定為不良。(Long-term storage properties of solder paste) After the paste was stored at room temperature for 6 months, the paste was used to prepare a substrate for evaluation in the same manner as described above, and then the reflow process was performed to form solder bumps. After that, observation with an optical microscope determined that the amount of unmelted powder of the solder powder was the same as that immediately after the solder paste was produced, and the amount of unmelted powder of the solder powder was increased more than that after the solder paste was produced. The situation is judged to be bad.

(形狀保持性)   於評估基板上以間距200μm、開口徑120μm、厚度25μm之遮罩塗布焊膏,形成100個凸塊前驅物。以目視形成100個凸塊前驅物的評估基板、或以光學顯微鏡觀察,在100個焊料凸塊前驅物之中,遺漏為5處所以下、印刷塌邊所致的橋部為5處所以下、凸塊前驅物之缺損為5處所以下之情況判定為良好,遺漏、橋部及缺損之任一者為多於5處所地產生的情況判定為不良。(Shape retention)   The solder paste was applied on the evaluation substrate with a mask having a pitch of 200 μm, an opening diameter of 120 μm, and a thickness of 25 μm to form 100 bump precursors. Evaluate the substrate with 100 bump precursors visually or observe with an optical microscope. Of the 100 solder bump precursors, the omission is less than 5 places, and the bridge caused by printing collapse is less than 5 places. The case where the defect of the block precursor is 5 places or less is judged to be good, and the case where any one of the omissions, bridges, and defects is generated in more than 5 places is judged to be bad.

Figure 02_image001
Figure 02_image001

Figure 02_image003
Figure 02_image003

如由表1及表2可了解,比較例1、3及6係於助焊劑之熱重量測定在300℃之減少量為低至60質量%以下,所以回焊之殘渣產生的區域超過焊膏之塗布面積之3成,回焊後之殘渣多。另一方面,在實施例1~9,助焊劑係於熱重量測定中在300℃之減少率為80質量%以上,所以回焊後之殘渣少。又,在比較例2、4及5,亦於助焊劑之熱重量測定中在300℃之減少率為80質量%以上,所以回焊後之殘渣少。因此,可了解在助焊劑之熱重量測定,在300℃之減少量均為80質量%以上為有效的範圍。As can be understood from Tables 1 and 2, Comparative Examples 1, 3, and 6 are based on the thermogravimetric determination of flux at 300°C and the amount of reduction is as low as 60% by mass or less, so the area generated by reflow residues exceeds solder paste. 30% of the coating area, there are many residues after reflow. On the other hand, in Examples 1 to 9, the reduction rate of the flux at 300°C in thermogravimetric measurement was 80% by mass or more, so there was little residue after reflow. Also, in Comparative Examples 2, 4 and 5, the reduction rate at 300°C was also 80% by mass or more in the thermogravimetric measurement of the flux, so there was little residue after reflow. Therefore, it can be understood that in the thermogravimetric measurement of the flux, the reduction at 300° C. is 80% by mass or more, which is an effective range.

又,比較例1、2及5係因為助焊劑之酸價值高達200~1500mg KOH/g,所以長期保管性差。另一方面,在實施例1~9係因為助焊劑之酸價值為100mg KOH/g以下,所以焊膏之長期保管性優異。又,在比較例3、4及6,因為助焊劑之酸價值均為偵測界限以下,所以焊膏之長期保管性優異。因此,可了解助焊劑之酸價值為100mg KOH/g以下為有效的範圍。   尚,在實施例2,助焊劑係包含0.1質量%之活性劑,但因為助焊劑之酸價值為100mg KOH/g以下,所以長期保管性優異。另一方面,在比較例2,助焊劑為包含0.2質量%之活性劑,所以助焊劑之酸價值成為高達200mg KOH/g,長期保管性差。因此,可了解助焊劑之酸價值如為上述範圍內,則亦可包含0.1質量%以下之活性劑。In addition, in Comparative Examples 1, 2 and 5, the acid value of the flux is as high as 200 to 1500 mg KOH/g, so the long-term storage property is poor. On the other hand, in Examples 1-9, since the acid value of the flux is 100 mg KOH/g or less, the solder paste has excellent long-term storage properties. In addition, in Comparative Examples 3, 4 and 6, since the acid value of the flux is below the detection limit, the solder paste has excellent long-term storability. Therefore, it can be understood that the acid value of the flux is 100 mg KOH/g or less as an effective range.  Also, in Example 2, the flux contains 0.1% by mass of the active agent, but since the acid value of the flux is 100 mg KOH/g or less, the long-term storage property is excellent. On the other hand, in Comparative Example 2, the flux contains 0.2% by mass of the active agent, so the acid value of the flux is as high as 200 mg KOH/g, and the long-term storage property is poor. Therefore, it can be understood that if the acid value of the flux is within the above range, an active agent of 0.1% by mass or less may be included.

在比較例5係助焊劑包含40質量%之聚合松香,所以助焊劑之酸價值成為高達800mg KOH/g,長期保管性差。另一方面,在實施例8,助焊劑係雖然包含5質量%聚合松香,但是長期保管性優異。   又,在比較例6,因為助焊劑包含40質量%之松香酯,所以於熱重量測定中在300℃之減少量成為低至60質量%以下,回焊後之殘渣多。另一方面,在實施例9,助焊劑係雖然包含10質量%松香酯,但是回焊後之殘差少。   由此等之情事,可了解如助焊劑之酸價值、於熱重量測定中在300℃之減少量為上述範圍內,則亦可包含10質量%以下之松香類。In Comparative Example 5, the flux contains 40% by mass of polymerized rosin, so the acid value of the flux is as high as 800 mg KOH/g, and the long-term storage property is poor. On the other hand, in Example 8, although the flux system contained 5% by mass of polymerized rosin, it was excellent in long-term storage.   Furthermore, in Comparative Example 6, since the flux contains 40% by mass of rosin ester, the reduction at 300°C in thermogravimetric measurement is as low as 60% by mass or less, and there are many residues after reflow. On the other hand, in Example 9, although the flux system contains 10% by mass of rosin ester, the residual after reflow is small.   From these facts, it can be understood that, for example, the acid value of the flux and the reduction at 300°C in the thermogravimetric measurement are within the above range, and rosin of 10% by mass or less can also be included.

進而,比較例4係助焊劑之黏度為低至0.3 Pa・s,黏合力亦小至0.8N,所以印刷塌邊等產生,形狀保持性差。另一方面,實施例1~9係助焊劑之黏度為1Pa・s以上,黏合力亦為1.0N以上,所以形狀保持性優異。另一方面,比較例1~3及5係助焊劑之黏度為0.5Pa・s以上,黏合力亦為1.0N以上,所以形狀保持性優異。因此,可了解助焊劑之黏度為0.5Pa・s以上,且,黏合力為1.0N以上為有效的範圍。 [產業上之可利用性]Furthermore, in Comparative Example 4, the flux has a viscosity as low as 0.3 Pa・s and an adhesive force as small as 0.8 N. Therefore, printing sags and the like are generated, and shape retention is poor. On the other hand, the viscosity of the flux of Examples 1 to 9 is 1 Pa·s or more, and the adhesive force is also 1.0 N or more, so the shape retention property is excellent. On the other hand, Comparative Examples 1 to 3 and 5 series fluxes have a viscosity of 0.5 Pa・s or more and an adhesive force of 1.0 N or more, so they have excellent shape retention. Therefore, it can be understood that the viscosity of the flux is 0.5 Pa・s or more, and that the adhesive force is 1.0 N or more is an effective range. [Industry availability]

可有效率地提昇電子零件之向基板接合之信賴性。It can effectively improve the reliability of electronic components to be bonded to the substrate.

Claims (7)

一種焊膏用助焊劑,其係包含黏稠劑、溶劑及觸變劑的焊膏用助焊劑,其特徵為:酸價值為100mg KOH/g以下,將10mg之助焊劑在N2環境下,以昇溫10℃/min,使溫度由25℃的室溫上昇至300℃時之重量之減少率為80質量%以上,黏度為0.5Pa.s以上,且,黏合力(tacking force)為1.0N以上。 A soldering flux for solder paste, which contains a thickener, a solvent, and a thixotropic flux, and is characterized in that the acid value is 100 mg KOH/g or less, and 10 mg of the soldering flux is used under an N 2 environment. When the temperature is increased by 10℃/min, the weight reduction rate when the temperature is increased from 25℃ to 300℃ is 80% by mass or more, and the viscosity is 0.5Pa. s or more, and the tacking force is 1.0 N or more. 如請求項1之焊膏用助焊劑,其中,松香類之含量為10質量%以下。 The flux for solder paste according to claim 1, wherein the content of rosin is 10% by mass or less. 一種焊膏,其特徵為:混合如請求項1或2之焊膏用助焊劑、與焊料粉末而成。 A solder paste characterized by mixing flux for solder paste according to claim 1 or 2 with solder powder. 如請求項3之焊膏,其中,前述焊膏用助焊劑之含有率為30體積%以上、90體積%以下。 The solder paste according to claim 3, wherein the content rate of the solder paste flux is 30% by volume or more and 90% by volume or less. 如請求項3或4之焊膏,其中,前述焊料粉末為Sn-Ag-Cu焊料粉末、Sn-Cu焊料粉末、Sn-Ag焊料粉末、Pb-Sn焊料粉末、Au-Sn焊料粉末、Au-Ge焊料粉末、Au-Si焊料粉末之任一者。 The solder paste according to claim 3 or 4, wherein the aforementioned solder powder is Sn-Ag-Cu solder powder, Sn-Cu solder powder, Sn-Ag solder powder, Pb-Sn solder powder, Au-Sn solder powder, Au- Either Ge solder powder or Au-Si solder powder. 一種使用焊膏之焊料凸塊的形成方法,其特徵為:將 具有開口部的遮罩配置於基板上,於前述開口部內以填充如請求項3至5中任一項之焊膏之方式印刷前述焊膏,在剝離前述遮罩後,將前述基板上之凸塊前驅物在甲酸氣體環境下進行回焊處理形成焊料凸塊。 A method of forming solder bumps using solder paste is characterized by: A mask having an opening is arranged on the substrate, the solder paste is printed in the opening so as to be filled with the solder paste according to any one of claims 3 to 5, and after the mask is peeled off, the protrusions on the substrate The block precursor is reflowed in a formic acid gas environment to form solder bumps. 一種使用焊膏的接合體之製造方法,其特徵為:在接合物與被接合物之間配置如請求項3至5中任一項之焊膏,藉由在甲酸氣體環境下加熱而焊接前述接合物與前述被接合物。 A method of manufacturing a bonded body using solder paste, characterized in that the solder paste as described in any one of claims 3 to 5 is arranged between the bonded object and the bonded object, and the foregoing is soldered by heating in a formic acid gas environment The bonded object and the aforementioned bonded object.
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