TWI683175B - Detecting method of circuit board - Google Patents

Detecting method of circuit board Download PDF

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TWI683175B
TWI683175B TW107138176A TW107138176A TWI683175B TW I683175 B TWI683175 B TW I683175B TW 107138176 A TW107138176 A TW 107138176A TW 107138176 A TW107138176 A TW 107138176A TW I683175 B TWI683175 B TW I683175B
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negative film
circuit board
exposure
circuit boards
temperature
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TW107138176A
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Chinese (zh)
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TW202016644A (en
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王啟毓
鄭章民
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志聖工業股份有限公司
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Abstract

A detecting method of circuit board includes a filtering step, a rejoining step, and an exposing step. The filtering step is implemented by determining the number of suitable circuit boards, which can be exposed under a first predetermined condition defined by a first film, and determining the number of unsuitable circuit boards, which cannot be exposed under the first predetermined condition. The rejoining step is implemented by finding a second predetermined condition defined by a second film, which can be used to expose at least one of the unsuitable circuit boards. The exposing step is implemented in an exposing apparatus, and the exposing apparatus has an environmental control mechanism to cool an ambient temperature in the exposing apparatus, so that when Y number of the suitable circuit boards, the first film, at least one of the unsuitable circuit boards, and the second film are in the exposing process at an ambient temperature, the ambient temperature can be maintained to be less than a predetermined temperature by the environmental control mechanism.

Description

電路板檢測方法 Circuit board inspection method

本發明涉及一種檢測方法,且還涉及一種電路板檢測方法。 The invention relates to a detection method, and also relates to a circuit board detection method.

現今科技發達進而帶動各式電子產品的發展,而各式電子產品又多以印刷電路板為其基礎元件,因此提供優良的印刷電路板便為各家廠商所欲追求的發展方向。在現有的電路板生產方法中,電路板的曝光作業需搭配底片來加以實施,但電路板常會因為製程上的誤差而使電路板產生形變,進而造成每個電路板的尺寸非完全相同。進一步地說,電路板在以底片進行曝光作業時,影響底片品質的最關鍵因素常為漲縮問題,並且底片太常產生漲縮或是底片的漲縮幅度過大,則易縮短底片的使用壽命。然而,現有的電路板生產過程中,並未對於底片的漲縮問題有相對應的改良方案。 Nowadays, the development of science and technology has driven the development of various electronic products, and most of the electronic products use printed circuit boards as their basic components. Therefore, providing excellent printed circuit boards is the development direction that various manufacturers want to pursue. In the existing circuit board production method, the exposure operation of the circuit board needs to be implemented with a negative film, but the circuit board often deforms the circuit board due to errors in the manufacturing process, thereby causing the size of each circuit board to be not exactly the same. Furthermore, when the circuit board is exposed to negative film, the most critical factor affecting the quality of the negative film is often the problem of expansion and contraction. If the negative film is too often shrinking or the expansion and contraction of the negative film are too large, it is easy to shorten the life of the negative film. . However, in the existing circuit board production process, there is no corresponding improvement plan for the expansion and contraction of the negative film.

於是,本發明人認為上述缺陷可改善,乃特潛心研究並配合科學原理的運用,終於提出一種設計合理且有效改善上述缺陷的本發明。 Therefore, the inventor believes that the above-mentioned defects can be improved, and Naite devotes himself to research and cooperates with the application of scientific principles, and finally proposes a reasonable design and effectively improves the above-mentioned defects of the present invention.

本發明實施例在於提供一種電路板檢測方法,能有效地改善現有電路板生產方法所產生的缺陷。 An embodiment of the present invention is to provide a circuit board inspection method, which can effectively improve the defects generated by the existing circuit board production methods.

本發明實施例公開一種電路板檢測方法,包括:一篩選步驟:以相對於一第一底片的一第一預設值進行X個待測電路板的檢測,篩選出能在所述第一預設值下進行曝光作業的Y個適格電路板、及不能在所述第一預設值下進行曝光作業的Z個淘汰電路 板,並且X=Y+Z;其中,X為正整數、Y與Z皆為不小於零的整數;一再生步驟:找出能夠使Z個所述淘汰電路板中的至少其中一個所述淘汰電路板進行曝光作業的一第二預設值;其中,所述第二預設值是相對於一第二底片;以及一曝光步驟:依據所述第一預設值並以所述第一底片依序使Y個所述適格電路板進行曝光作業,並且依據所述第二預設值並以所述第二底片使相對應的至少一個所述淘汰電路板進行曝光作業;其中,所述曝光步驟於一曝光設備內實施,並且所述曝光設備以一環境控制機構來對所述曝光設備內的一環境溫度進行冷卻,以使Y個所述適格電路板、所述第一底片、與至少一個所述淘汰電路板、及所述第二底片能在所述曝光設備內進行所述曝光作業的過程中,維持所述環境溫度在一預定溫度以下。 An embodiment of the present invention discloses a circuit board inspection method, including: a screening step: carrying out inspection on X circuit boards to be tested with a first preset value relative to a first negative film, screening out the first pre Y qualified circuit boards performing exposure operation under the set value, and Z elimination circuits that cannot perform exposure operation under the first preset value Board, and X=Y+Z; where X is a positive integer, and Y and Z are both integers not less than zero; a regeneration step: find out that at least one of the Z eliminated circuit boards can be eliminated A second preset value for the exposure operation of the circuit board; wherein, the second preset value is relative to a second negative film; and an exposure step: according to the first preset value and using the first negative film Sequentially performing exposure operations on the Y qualified circuit boards, and performing exposure operations on at least one of the eliminated circuit boards corresponding to the second negative film according to the second preset value; wherein, the exposure The steps are implemented in an exposure device, and the exposure device uses an environmental control mechanism to cool an ambient temperature in the exposure device, so that the Y qualified circuit boards, the first negative film, and at least One of the eliminated circuit board and the second negative film can maintain the ambient temperature below a predetermined temperature during the exposure operation in the exposure apparatus.

綜上所述,本發明實施例所公開的電路板檢測方法,是透過環境控制機構來對曝光設備內的環境溫度進行冷卻並能維持在預定溫度以下,藉以控制底片(如:第一底片與第二底片)於上述預定溫度以下的環境溫度進行曝光作業,進而避免底片產生大幅地漲縮、以提升底片的使用壽命。 In summary, the circuit board detection method disclosed in the embodiments of the present invention is to cool the ambient temperature in the exposure device through the environmental control mechanism and maintain it below a predetermined temperature, thereby controlling the negative film (eg, the first negative film and (Second negative film) Perform exposure operation at an ambient temperature below the predetermined temperature, thereby preventing the negative film from greatly expanding and contracting, so as to increase the service life of the negative film.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。 In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention, but these descriptions and drawings are only used to illustrate the present invention, not to make any protection to the scope of the present invention. limits.

1‧‧‧檢測設備 1‧‧‧ Testing equipment

11‧‧‧攝像裝置 11‧‧‧Camera device

12‧‧‧運算裝置 12‧‧‧Calculating device

2‧‧‧底片 2‧‧‧ film

21‧‧‧第一底片 21‧‧‧First film

21P‧‧‧中心點 21P‧‧‧Center

22‧‧‧第二底片 22‧‧‧Second negative

3‧‧‧標準玻璃底片 3‧‧‧Standard glass negative

4‧‧‧待測電路板 4‧‧‧ circuit board to be tested

41‧‧‧適格電路板 41‧‧‧ qualified circuit board

42‧‧‧淘汰電路板 42‧‧‧ Elimination of circuit boards

4P‧‧‧中心點 4P‧‧‧Center

R1‧‧‧第一預設值 R1‧‧‧ First preset value

R2‧‧‧第二預設值 R2‧‧‧ Second preset value

W‧‧‧寬度方向 W‧‧‧Width direction

L‧‧‧長度方向 L‧‧‧Long

100‧‧‧曝光設備 100‧‧‧Exposure equipment

5‧‧‧環境控制機構 5‧‧‧Environmental Control Agency

51‧‧‧溫度感測器 51‧‧‧Temperature sensor

52‧‧‧降溫裝置 52‧‧‧cooling device

53‧‧‧濕度控制器 53‧‧‧Humidity controller

54‧‧‧濕度感測器 54‧‧‧Humidity sensor

61‧‧‧曝光環境 61‧‧‧ exposure environment

62‧‧‧承載平台 62‧‧‧Bearing platform

圖1為本發明電路板檢測方法的流程示意圖。 FIG. 1 is a schematic flowchart of the circuit board inspection method of the present invention.

圖2為本發明電路板檢測方法所使用的檢測設備的功能方塊示意圖。 2 is a functional block diagram of a testing device used in the circuit board testing method of the present invention.

圖3為本發明電路板檢測方法的底片及預設值的示意圖。 FIG. 3 is a schematic diagram of a film and a preset value of the circuit board detection method of the present invention.

圖4為本發明電路板檢測方法的篩選步驟示意圖(一)。 4 is a schematic diagram (1) of the screening steps of the circuit board inspection method of the present invention.

圖5為本發明電路板檢測方法的篩選步驟示意圖(二)。 5 is a schematic diagram (2) of the screening steps of the circuit board inspection method of the present invention.

圖6為本發明電路板檢測方法的再生步驟示意圖。 6 is a schematic diagram of regeneration steps of the circuit board inspection method of the present invention.

圖7為本發明電路板曝光方法的流程示意圖。 7 is a schematic flowchart of the circuit board exposure method of the present invention.

圖8為本發明電路板檢測方法的流程示意圖。 FIG. 8 is a schematic flowchart of the circuit board detection method of the present invention.

圖9為圖8中功能方塊示意圖。 9 is a schematic diagram of the functional block in FIG. 8.

[實施例一] [Example 1]

請參閱圖1至圖6,為本發明的實施例一,需先說明的是,本實施例對應附圖所提及的相關數量與外型,僅用來具體地說明本發明的實施方式,以便於了解本發明的內容,而非用來侷限本發明的保護範圍。 Please refer to FIG. 1 to FIG. 6, which is the first embodiment of the present invention. It should be noted that this embodiment corresponds to the relevant quantity and appearance mentioned in the drawings, and is only used to specifically describe the embodiment of the present invention. In order to understand the content of the present invention, it is not used to limit the protection scope of the present invention.

如圖1所示,本實施例公開一種電路板檢測方法,尤其是指一種電路板在進行曝光作業前的檢測方法。所述電路板檢測方法包括步驟如下:一準備步驟、一篩選步驟、一再生步驟、及一曝光步驟。以下將對各步驟的具體實施方式作一說明,但下述說明並非限制各個步驟的必要實施順序。 As shown in FIG. 1, this embodiment discloses a circuit board inspection method, and particularly refers to a circuit board inspection method before performing an exposure operation. The circuit board inspection method includes the following steps: a preparation step, a screening step, a regeneration step, and an exposure step. The specific implementation of each step will be described below, but the following description does not limit the necessary implementation order of each step.

準備步驟:請參閱圖2和圖3所示,提供一檢測設備1,包括一攝像裝置11以及電性連接於所述攝像裝置11的一運算裝置12,藉以通過上述檢測設備1的攝像裝置11與運算裝置12而實施下述各種比較或選擇作業。其中,所述攝像裝置11能擷取N種底片2的影像及X個待測電路板4的影像並傳送至所述運算裝置12。上述底片2與待測電路板4於本實施例中皆大致呈四邊形,並且所述待測電路板4於本實施例中是指尚未搭配底片2進行曝光作業的電路板。 Preparation steps: Please refer to FIG. 2 and FIG. 3 to provide a detection device 1 including an imaging device 11 and an arithmetic device 12 electrically connected to the imaging device 11 to pass the imaging device 11 of the detection device 1 The following various comparison or selection operations are performed with the arithmetic device 12. Among them, the camera device 11 can capture images of N kinds of negative films 2 and X images of the circuit board 4 to be tested and send them to the computing device 12. In this embodiment, the negative film 2 and the circuit board 4 to be tested are substantially quadrilateral. In this embodiment, the circuit board to be tested 4 refers to a circuit board that has not been exposed to the negative film 2 for exposure.

進一步地說,所述運算裝置12能比較上述N種底片2以及一 標準玻璃底片3(N為大於1的正整數),並將每種底片2定義出相關於電路板曝光作業的一漲縮係數。舉例來說,所述標準玻璃底片3在相互垂直的寬度方向W與長度方向L的漲縮係數皆預設為1,運算裝置12可以依據各種底片2的影像與上述標準玻璃底片3的影像,而在寬度方向W與長度方向L上進行尺寸比較,藉以定義出各種底片2在寬度方向W與長度方向L的漲縮係數(如:0.995、1.005)。 Furthermore, the arithmetic device 12 can compare the above-mentioned N kinds of negative films 2 and a Standard glass film 3 (N is a positive integer greater than 1), and each film 2 defines a coefficient of expansion and contraction related to the exposure operation of the circuit board. For example, the expansion and contraction coefficients of the standard glass negative film 3 in the mutually perpendicular width direction W and length direction L are both preset to 1, and the computing device 12 can be based on various images of the negative film 2 and the image of the standard glass negative film 3, By comparing the dimensions in the width direction W and the length direction L, the expansion and contraction coefficients of the various backsheets 2 in the width direction W and the length direction L (eg, 0.995, 1.005) are defined.

再者,本實施例的標準玻璃底片3可以是透明狀,藉以利於將兩種底片2分別對位地設置於上述標準玻璃底片3的相反兩個表面上,使攝像裝置11能夠同時取得標準玻璃底片3及置於其上的兩種底片2的影像,進而能令運算裝置12同時進行上述兩種底片2的漲縮係數運算。需說明的是,本實施例雖是以攝像裝置11同時擷取標準玻璃底片3及置於其上的兩種底片2的影像,以作為底片2漲縮係數的判斷標準,但本發明不排除以其他方式實施。例如:運算裝置12內可預設有標準玻璃底片3的影像,以使攝像裝置11僅需擷取各種底片2的影像後,即可通過運算裝置12進行底片2的漲縮係數運算。 Furthermore, the standard glass negative 3 of this embodiment may be transparent, so as to facilitate the positioning of the two types of negatives 2 on the opposite surfaces of the standard glass negative 3, so that the imaging device 11 can obtain the standard glass at the same time The images of the negative film 3 and the two negative films 2 placed thereon can enable the computing device 12 to perform the expansion and contraction coefficient calculation of the two negative films 2 at the same time. It should be noted that although this embodiment uses the camera device 11 to simultaneously capture images of the standard glass film 3 and the two types of film 2 placed on it as the criterion for determining the expansion and contraction coefficient of the film 2, the present invention does not exclude Implement in other ways. For example, the image of the standard glass negative film 3 can be preset in the computing device 12 so that the camera device 11 only needs to capture images of various negative films 2, and then the computing device 12 can perform the expansion and contraction coefficient calculation of the negative film 2.

篩選步驟:請參閱圖4和圖5所示,以一第一預設值R1進行上述X個待測電路板4的檢測,篩選出能在所述第一預設值R1下進行曝光作業的Y個適格電路板41、及不能在所述第一預設值R1下進行曝光作業的Z個淘汰電路板42。其中,X=Y+Z、X為正整數、Y與Z皆為不小於零的整數。於本實施例中,所述第一預設值R1定義為一第一底片21的尺寸相對於一容許誤差(如:小於35微米)而向內縮及向外擴的一虛擬尺寸範圍(如圖3中,鄰近第一底片21邊緣的內側矩形虛線與外側矩形虛線所包圍的區域)。再者,所述N種底片2包括上述第一底片21,也就是說,所述攝像裝置11已擷取所述第一底片21的影像並傳送至所述運 算裝置12中。 Screening steps: Please refer to FIG. 4 and FIG. 5 to perform the detection of the X number of circuit boards 4 under test with a first preset value R1, and screen out those that can perform exposure operations under the first preset value R1 Y eligible circuit boards 41 and Z eliminated circuit boards 42 that cannot perform exposure operations under the first preset value R1. Among them, X=Y+Z, X is a positive integer, and Y and Z are both integers not less than zero. In this embodiment, the first predetermined value R1 is defined as a virtual size range in which the size of a first negative film 21 shrinks inwards and expands outwards with respect to an allowable error (eg, less than 35 microns) (eg In FIG. 3, the area enclosed by the inner rectangular dashed line and the outer rectangular dashed line adjacent to the edge of the first negative film 21). Furthermore, the N kinds of negative films 2 include the above-mentioned first negative film 21, that is to say, the camera 11 has captured the image of the first negative film 21 and transmitted it to the transport 算装置12。 Computing device 12.

更詳細地說,所述運算裝置12是依據所述X個待測電路板的影像,藉以在上述N種底片2中,選擇出在所述容許誤差內能夠進行曝光作業的待測電路板4數量為最多的第一底片21。並且所述運算裝置12依據自攝像裝置11傳送的所述第一底片21的影像與X個待測電路板4的影像,而判斷出上述Y個適格電路板41及Z個淘汰電路板42。 In more detail, the computing device 12 selects the circuit board to be tested 4 that can perform the exposure operation within the allowable error based on the images of the X circuit boards to be tested The number of the first negative film 21 is the largest. Moreover, the computing device 12 determines the Y eligible circuit boards 41 and the Z eliminated circuit boards 42 according to the image of the first negative film 21 and the images of the X circuit boards 4 to be tested transmitted from the camera device 11.

進一步地說,所述篩選步驟於本實施例中是將所述第一底片21依序疊置於每個待測電路板4,並且所述第一底片21的中心點21P大致對齊或鄰近於相疊置的待測電路板4的中心點4P;接著,當所述第一底片21與相疊置的待測電路板4的尺寸差異大於或小於所述容許誤差時(如圖5),則相疊置的待測電路板4判定為一個淘汰電路板42,反之,當所述第一底片21與相疊置的待測電路板4的尺寸差異在所述容許誤差內時(如圖4),則相疊置的待測電路板4判定為一個適格電路板41。此外,上述雖是以第一底片21的中心點21P大致對齊或鄰近於相疊置待測電路板4的中心點4P為例,但本發明並不受限於此。上述中心點21P及中心點4P,於本實施例中皆大致定義為由其所有頂點相對於平面中心的連線的交點。 Further, in this embodiment, the screening step is to sequentially stack the first negative film 21 on each circuit board 4 to be tested, and the center point 21P of the first negative film 21 is substantially aligned or adjacent to The center point 4P of the circuit board under test 4 stacked on top of each other; then, when the size difference between the first negative film 21 and the circuit board under test 4 stacked on each other is larger or smaller than the allowable error (see FIG. 5), Then the circuit board 4 under test is determined to be an obsolete circuit board 42. On the contrary, when the size difference between the first film 21 and the circuit board 4 under test is within the allowable error (as shown in FIG. 4), the circuit board to be tested 4 stacked on top of each other is determined to be a suitable circuit board 41. In addition, although the above is an example in which the center point 21P of the first negative film 21 is substantially aligned with or adjacent to the center point 4P of the circuit board 4 to be stacked, the present invention is not limited thereto. In this embodiment, the center point 21P and the center point 4P are generally defined as intersections of lines connecting all vertices with respect to the center of the plane.

換個角度來說,上述第一底片21與相疊置待測電路板4間的尺寸差異判斷過程也可以是:所述第一底片21在四個角落各預設有對位部(圖中未標示),並且上述待測電路板4的四個角落也各預設有相對應的對位部(圖中未標示)。將所述第一底片21的其中一個對位部大致對齊於上述待測電路板4的其中一個對位部,接著取得第一底片21的其他對位部與相疊置待測電路板4的相鄰對位部之間的距離值,而後再比較上述距離值與容許誤差;若上述第一底片21與待測電路板4在上述四個角落所測得的其中一個距離值大於容許誤差,則相疊置待測電路板4判定為淘汰電路板 42。 To put it another way, the process of determining the difference in size between the first negative film 21 and the circuit board 4 to be tested can also be: the first negative film 21 is provided with alignment parts at four corners (not shown in the figure). Marked), and the four corners of the circuit board 4 to be tested are also preset with corresponding alignment parts (not marked in the figure). Align one of the alignment portions of the first negative film 21 with one of the alignment portions of the circuit board 4 to be tested, and then obtain the other alignment portions of the first negative film 21 and the overlapping of the circuit board to be tested 4 The distance between the adjacent alignment parts, and then compare the above distance with the allowable error; if one of the distances measured by the first film 21 and the circuit board under test 4 at the four corners is greater than the allowable error, Then the circuit board 4 to be tested is judged to be a phase-out circuit board 42.

再生步驟:請參閱圖6所示,找出能夠使Z個所述淘汰電路板42中的至少其中一個淘汰電路板42進行曝光作業的一第二預設值R2。其中,當Z大於1時,所述Z個淘汰電路板42能夠依據M種預設值進行曝光作業(M大於1並且小於Z的正整數),所述M種預設值包含有上述第二預設值R2,也可進一步包含有第三預設值、第四預設值、及第五預設值等等。再者,於所述M種預設值中,上述第二預設值R2能夠進行曝光作業的淘汰電路板42數量為最多。而於本實施例中,第二預設值R2定義為一第二底片22的尺寸相對於所述容許誤差而向內縮及向外擴的一虛擬尺寸範圍,並且所述N種底片2包括上述第二底片22。 Regeneration step: Please refer to FIG. 6 to find a second preset value R2 that enables at least one of the Z eliminated circuit boards 42 to perform an exposure operation. When Z is greater than 1, the Z eliminated circuit boards 42 can perform exposure operations according to M preset values (M is greater than 1 and a positive integer less than Z), and the M preset values include the second The preset value R2 may further include a third preset value, a fourth preset value, a fifth preset value, and so on. Furthermore, among the M preset values, the second preset value R2 is the largest number of eliminated circuit boards 42 capable of performing exposure operations. In this embodiment, the second preset value R2 is defined as a virtual size range in which the size of a second negative film 22 shrinks inward and expands outward relative to the allowable error, and the N kinds of negative films 2 include The second film 22 above.

更詳細地說,所述運算裝置12依據上述Z個淘汰電路板42的影像,而判斷出能夠在所述容許誤差內對至少一個所述淘汰電路板42進行曝光作業的第二底片22。舉例來說,所述第一底片21的漲縮係數為1.005,而圖5所示的淘汰電路板42相較於第一底片21的尺寸差異,小於所述容許誤差,所以運算裝置12以小於第一底片21的漲縮係數為其中一個篩選條件,進而在其餘的底片2中進行選擇,例如:本實施例是選擇圖6所示的具有漲縮係數為0.995的第二底片22。 In more detail, the computing device 12 determines, based on the images of the Z obsolete circuit boards 42, the second negative film 22 that can perform exposure operations on at least one of the obsolete circuit boards 42 within the allowable error. For example, the expansion and contraction coefficient of the first negative film 21 is 1.005, and the size difference of the eliminated circuit board 42 shown in FIG. 5 is smaller than the allowable error compared to the size difference of the first negative film 21, so the computing device 12 is less than The expansion and contraction coefficient of the first negative film 21 is one of the screening conditions, and then the remaining negative film 2 is selected. For example, in this embodiment, the second negative film 22 shown in FIG. 6 having the expansion and contraction coefficient of 0.995 is selected.

藉此,因應每個電路板的尺寸並非完全相同,所以本實施例的待測電路板4在以底片2進行曝光作業前,先進行上述電路板檢測方法,藉以避免待測電路板4與底片2在曝光作業的過程中產生對位問題,並且所述電路板檢測方法通過再生步驟而能依據上述淘汰電路板42選擇其他合適的底片,進而有效地降低電路板的淘汰率及節省生產時間。 In this way, since the size of each circuit board is not exactly the same, the circuit board under test 4 of this embodiment performs the above-mentioned circuit board inspection method before performing the exposure operation with the film 2 to avoid the circuit board under test 4 and the film 2 The alignment problem occurs during the exposure operation, and the circuit board inspection method can select other suitable negatives according to the above-mentioned obsolete circuit board 42 through the regeneration step, thereby effectively reducing the elimination rate of the circuit board and saving production time.

[實施例二] [Example 2]

請參閱圖7,為本發明的實施例二,本實施例與上述實施例一類似,相同處則不再加以贅述,而兩個實施例的主要差異如下所述。 Please refer to FIG. 7, which is the second embodiment of the present invention. This embodiment is similar to the above-mentioned first embodiment, and the same points will not be described again. The main differences between the two embodiments are as follows.

具體來說,本實施例公開一種電路板曝光方法,包括實施例一所述的電路板檢測方法以及一曝光步驟。其中,所述曝光步驟為;依據所述第一預設值R1依序使Y個所述適格電路板41進行曝光作業,並且依據所述第二預設值R2使相對應的至少一個所述淘汰電路板42進行曝光作業。進一步地說,依據上述M種預設值分別使相對應的所述淘汰電路板42進行曝光作業。 Specifically, this embodiment discloses a circuit board exposure method, including the circuit board inspection method described in embodiment 1 and an exposure step. Wherein, the exposure step is: sequentially performing exposure operations on the Y suitable circuit boards 41 according to the first preset value R1, and enabling at least one of the corresponding ones according to the second preset value R2 The circuit board 42 is eliminated for exposure operation. Further, according to the M preset values, the corresponding eliminated circuit boards 42 are respectively exposed to light.

須說明的是,若是某個預設值所對應的淘汰電路板42數量過少時(如:少於三個),由於僅針對上述過少的淘汰電路板42進行曝光步驟所需花費的製造成本,反而比直接拋棄上述過少的淘汰電路板42還要高,所以上述過少的淘汰電路板42也可無須進一步實施上述的曝光步驟而直接拋棄。 It should be noted that if the number of obsolete circuit boards 42 corresponding to a certain preset value is too small (eg, less than three), the manufacturing cost of the exposure step only for the too few obsolete circuit boards 42 mentioned above, On the contrary, it is higher than directly discarding the excessively small elimination circuit board 42, so the excessively low elimination circuit board 42 can be directly discarded without further performing the above-mentioned exposure step.

[實施例三] [Embodiment 3]

請參閱圖8和圖9,為本發明的實施例三,本實施例與上述實施例二類似,相同處則不再加以贅述,而本實施例與上述兩個實施例的主要差異如下所述。 Please refer to FIG. 8 and FIG. 9, which is the third embodiment of the present invention. This embodiment is similar to the above-mentioned second embodiment, and the same parts will not be repeated here. The main differences between this embodiment and the above two embodiments are as follows .

具體來說,本實施例公開一種電路板檢測方法,其包括有準備步驟、篩選步驟、再生步驟、及曝光步驟。其中,上述準備步驟、篩選步驟、再生步驟、及曝光步驟已記載於實施例一和二的內容則不再於本實施例中加以贅述,而本實施例於下述主要進一步說明如何完善曝光步驟。 Specifically, this embodiment discloses a circuit board inspection method, which includes a preparation step, a screening step, a regeneration step, and an exposure step. Among them, the content of the above preparation steps, screening steps, regeneration steps, and exposure steps that have been recorded in Embodiments 1 and 2 will not be repeated in this embodiment, and this embodiment mainly further describes how to improve the exposure step in the following .

進一步地說,所述曝光步驟於本實施例中是置於一曝光設備100內實施。其中,所述曝光設備100包含有一曝光機(未示於圖)、一環境控制機構5、及至少一個承載平台62。 Further, the exposure step is implemented in an exposure apparatus 100 in this embodiment. Wherein, the exposure apparatus 100 includes an exposure machine (not shown in the figure), an environmental control mechanism 5, and at least one carrying platform 62.

所述曝光機(未示於圖)是用來提供底片進行曝光顯影作業 及電路板進行線路圖騰佈置的儀器,上述曝光機通常形成有一曝光區域並且相對處於一獨立環境(一般屬於高溫低濕的環境),而上述曝光設備100的內部於本實施例中定義為一曝光環境61。其中,上述曝光環境61的溫度定義為一曝光溫度,並且所述曝光溫度即為一曝光作業下的一種環境溫度,上述曝光環境61的濕度定義為一環境濕度。 The exposure machine (not shown) is used to provide negative film for exposure and development operations And the circuit board totem layout equipment, the exposure machine usually forms an exposure area and is relatively in an independent environment (generally belongs to a high temperature and low humidity environment), and the inside of the exposure apparatus 100 is defined as an exposure in this embodiment Environment 61. Wherein, the temperature of the exposure environment 61 is defined as an exposure temperature, and the exposure temperature is an ambient temperature under an exposure operation, and the humidity of the exposure environment 61 is defined as an ambient humidity.

所述承載平台62用以承載上述底片2(如:第一底片21或上述第二底片22)進行曝光。上述第一底片21及第二底片22中的任一個在未進行曝光作業前因應本身材質不同,其種類可分為鹵化銀(俗稱黑白片)、偶氮(俗稱棕片)、金屬底片、或玻璃底片(Glass Photo-mask),但本發明不受限於此。 The carrying platform 62 is used to carry the above-mentioned negative film 2 (such as the first negative film 21 or the second negative film 22) for exposure. Either of the first negative film 21 and the second negative film 22 can be divided into silver halide (commonly known as black and white film), azo (commonly known as brown film), metal negative film, or glass according to different materials before exposure. Glass (mask), but the invention is not limited to this.

也就是說,在特定的相對濕度下,上述底片2的尺寸會隨著環境溫度的上升而漲大,環境溫度下降而縮小,因而形成一漲縮現象。再者,底片2製造時因為本身材質的因素而無法預先控制底片2中的濕度與每個生產區域的濕度一致,因此在曝光作業的過程中,盡可能使底片2所在的環境溫度維持於一預定溫度,以避免有大幅漲縮的現象發生。 That is to say, under a specific relative humidity, the size of the above-mentioned negative film 2 will increase with the increase of the ambient temperature, and shrink with the decrease of the ambient temperature, thus forming a phenomenon of ups and downs. Furthermore, the negative film 2 cannot be controlled in advance due to its own material during manufacturing, so the humidity of the negative film 2 is consistent with the humidity of each production area. Therefore, during the exposure operation, the ambient temperature of the negative film 2 should be kept as low as possible. Pre-set the temperature to avoid the phenomenon of large expansion and contraction.

所述預定溫度於本實施例中是指使上述底片2(包含第一底片21與第二底片22)處於其內能夠較不會有大幅漲縮現象發生的一安全溫度值。再者,第一底片21與第二底片22於本實施例中會因應本身材質的不同,而可能具有不同的變形溫度,亦即第一底片21具有一變形溫度,並且第二底片22也具有一變形溫度。據此,所述預定溫度不大於第一底片21的變形溫度、也不大於所述第二底片22的變形溫度。 In this embodiment, the predetermined temperature refers to a safe temperature value in which the above-mentioned negative film 2 (including the first negative film 21 and the second negative film 22) can be kept in a position in which the phenomenon of substantial expansion and contraction is less likely to occur. In addition, in this embodiment, the first negative film 21 and the second negative film 22 may have different deformation temperatures according to different materials, that is, the first negative film 21 has a deformation temperature, and the second negative film 22 also has One deformation temperature. According to this, the predetermined temperature is not greater than the deformation temperature of the first negative film 21 nor the deformation temperature of the second negative film 22.

換個角度來說,當第一底片21本身的溫度值到達其變形溫度時,第一底片21會產生形變,也就是說,變形溫度例如是第一底片21產生形變的一個臨界溫度值;如果第一底片21本身太常隨著環境溫度的上升或下降而產生漲縮形變,都很容易縮短第一底 片21的使用壽命。因此,預設溫度是用來盡可能地使第一底片21本身的溫度值不會達到其變形溫度,藉以降低第一底片21發生形變的機率。 To put it another way, when the temperature value of the first negative film 21 reaches its deformation temperature, the first negative film 21 will deform, that is, the deformation temperature is, for example, a critical temperature value at which the first negative film 21 deforms; if the first A film 21 itself is too often deformed with the rise or fall of the ambient temperature, it is easy to shorten the first bottom The life of the film 21. Therefore, the preset temperature is used to prevent the temperature value of the first negative film 21 from reaching its deformation temperature as much as possible, thereby reducing the probability of deformation of the first negative film 21.

再者,當第二底片22也產生相同於第一底片21的漲縮形變現象時,預設溫度是用來盡可能地使第二底片22本身的溫度值不會達到其變形溫度,藉以降低第二底片22發生形變的機率。 Furthermore, when the second negative film 22 also produces the same expansion and contraction deformation as the first negative film 21, the preset temperature is used to make the temperature value of the second negative film 22 itself not reach its deformation temperature as much as possible to reduce The probability of deformation of the second negative film 22.

另外,所述電路板檢測方法於本實施例中定義有第一預設值與第二預設值,並且第一預設值R1是相對於第一底片21而定義,第二預設值R2是相對於第二底片22而定義。於本實施例中,第一預設值R1定義為第一底片21的尺寸相對於容許誤差(如:小於35微米)而向內縮及向外擴的虛擬尺寸範圍(如圖3中,鄰近第一底片21邊緣的內側矩形虛線與外側矩形虛線所包圍的區域),而所述第二預設值R2定義為第二底片22的尺寸相對於容許誤差而向內縮及向外擴的虛擬尺寸範圍。 In addition, the circuit board detection method in this embodiment defines a first preset value and a second preset value, and the first preset value R1 is defined relative to the first negative film 21, and the second preset value R2 It is defined relative to the second negative film 22. In this embodiment, the first preset value R1 is defined as the virtual size range in which the size of the first negative film 21 shrinks inwards and expands outwards with respect to the allowable error (eg, less than 35 microns) (as shown in FIG. 3, adjacent The area enclosed by the inner rectangular dashed line and the outer rectangular dashed line at the edge of the first negative film 21), and the second preset value R2 is defined as the virtual size of the second negative film 22 shrinking inwards and expanding outwards relative to the allowable error Size range.

所述環境控制機構5包含有一溫度感測器51、降溫裝置52、濕度控制器53及濕度感測器54。需說明的是,所述環境控制機構5於本實施例中是以同時包含有上述元件為例,但在本發明未繪示的其他實施例中,所述環境控制機構5也可以是包含有溫度感測器51、降溫裝置52、濕度控制器53、及濕度感測器54的至少其中之一。 The environmental control mechanism 5 includes a temperature sensor 51, a cooling device 52, a humidity controller 53, and a humidity sensor 54. It should be noted that, in this embodiment, the environmental control mechanism 5 includes the above components as an example, but in other embodiments not shown in the present invention, the environmental control mechanism 5 may also include At least one of the temperature sensor 51, the cooling device 52, the humidity controller 53, and the humidity sensor 54.

所述溫度感測器51用以偵測承載平台62的溫度;所述降溫裝置52於本實施例中包含有一冰水機或一霧化降溫器,用以冷卻環境溫度,並且環境控制機構5依據溫度感測器51所偵測到的溫度值,而對應地調整降溫裝置52的運作(如:冰水機或霧化降溫器的出風量)。 The temperature sensor 51 is used to detect the temperature of the carrying platform 62; the cooling device 52 in this embodiment includes an ice water machine or an atomizing cooling device for cooling the ambient temperature, and the environmental control mechanism 5 According to the temperature value detected by the temperature sensor 51, the operation of the cooling device 52 (such as the air output of the ice water machine or the atomizing cooling device) is adjusted accordingly.

更詳細地說,上述冰水機一般是設置有一出風口及一通風口,所述通風口內設置有一風流扇,藉由環境控制機構5控制所 述風流扇將機內產生的帶有些微濕氣冷風由所述出風口吹出,可將冷風吹向曝光環境61,使得環境溫度達到非純乾燥的降溫效果,但本發明不受限於此。再者,上述霧化降溫器也可依據曝光環境61的環境溫度及相對環境濕度而控制適當吹出霧化冷風,使得環境溫度達到非純乾燥的降溫效果。 In more detail, the above ice water machine is generally provided with an air outlet and a vent, and an air flow fan is provided in the vent, which is controlled by the environmental control mechanism 5 The air flow fan blows out the slightly moist cold air generated in the machine through the air outlet, which can blow the cold air toward the exposure environment 61, so that the ambient temperature can achieve a non-pure dry cooling effect, but the present invention is not limited to this. In addition, the above-mentioned atomization temperature reducer can also control the appropriate blowing of atomized cold wind according to the ambient temperature and relative environmental humidity of the exposure environment 61, so that the ambient temperature achieves a non-pure dry cooling effect.

所述濕度控制器53用以對曝光設備100內的曝光環境61的所述環境濕度進行控制。上述濕度感測器54用以偵測環境濕度,以使環境控制機構5能依據濕度感測器54所偵測到的濕度值,而對應地調整濕度控制器53的運作。 The humidity controller 53 is used to control the ambient humidity of the exposure environment 61 in the exposure apparatus 100. The humidity sensor 54 is used to detect the ambient humidity, so that the environmental control mechanism 5 can adjust the operation of the humidity controller 53 according to the humidity value detected by the humidity sensor 54.

依上所述,所述曝光設備100於本實施例中通過環境控制機構5來對曝光設備100內的曝光環境61的環境溫度進行冷卻,以使Y個所述適格電路板41與至少一個所述淘汰電路板42能在曝光設備100內進行曝光作業的過程中,維持環境溫度在預定溫度以下。 As described above, in this embodiment, the exposure apparatus 100 uses the environment control mechanism 5 to cool the ambient temperature of the exposure environment 61 in the exposure apparatus 100, so that the Y qualified circuit boards 41 and at least one The elimination circuit board 42 can maintain the ambient temperature below a predetermined temperature during the exposure operation in the exposure apparatus 100.

舉例來說,所述環境控制機構5於本實施例中能通過降溫裝置52的冰水機或霧化降溫器,而維持環境溫度在預定溫度以下。而於本實施例中,環境控制機構5是依據溫度感測器51與濕度感測器54所測得的曝光環境61的環境溫度及相對環境濕度,而控制降溫裝置52的冰水機或霧化降溫器(或濕度控制器53)產生些微濕氣冷風或霧化冷風吹向承載平台62,以對曝光環境61達到非純乾燥的降溫效果,用以維持環境溫度在預定溫度以下。 For example, in this embodiment, the environmental control mechanism 5 can maintain the ambient temperature below a predetermined temperature by the ice water machine or the atomizing temperature reducer of the temperature reducing device 52. In this embodiment, the environmental control mechanism 5 controls the ice machine or mist of the cooling device 52 according to the ambient temperature and relative ambient humidity of the exposure environment 61 measured by the temperature sensor 51 and the humidity sensor 54 The desuperheater (or humidity controller 53) generates a slight amount of moist cold air or atomized cold air to blow towards the supporting platform 62 to achieve a non-pure and dry cooling effect on the exposure environment 61 to maintain the ambient temperature below a predetermined temperature.

此外,所述電路板檢測方法於本實施例中雖是以包含有實施例二所載的至少部分內容來說明,但本發明不受限於此。舉例來說,所述電路板檢測方法也可以是包含:將至少一個電路板4與一底片2於一曝光設備100內實施一曝光作業。其中,所述曝光設備100以一環境控制機構5來對所述曝光設備100內的一環境溫度進行冷卻,以使至少一個所述電路板4與所述底片2能在所 述曝光設備100內進行所述曝光作業的過程中,維持所述環境溫度在一預定溫度以下。 In addition, although the circuit board detection method is described in this embodiment by including at least part of the content contained in the second embodiment, the present invention is not limited to this. For example, the circuit board inspection method may also include: performing an exposure operation on at least one circuit board 4 and a negative film 2 in an exposure apparatus 100. Wherein, the exposure apparatus 100 uses an environmental control mechanism 5 to cool an ambient temperature in the exposure apparatus 100, so that at least one of the circuit board 4 and the negative film 2 can be During the exposure operation in the exposure apparatus 100, the ambient temperature is maintained below a predetermined temperature.

[本發明實施例的技術效果] [Technical Effects of Embodiments of the Invention]

依據上述實施例所載,因應每個電路板的尺寸並非完全相同,所以本實施例的待測電路板4在以底片2進行曝光作業前,先進行上述電路板檢測的各項步驟。 According to the above embodiment, since the size of each circuit board is not exactly the same, the circuit board 4 to be tested in this embodiment performs the above steps of circuit board inspection before performing the exposure operation with the negative film 2.

綜上所述,本發明實施例所公開的電路板檢測方法,是透過環境控制機構5來對曝光設備100內的環境溫度進行冷卻,並使環境溫度能維持在預定溫度以下,藉以控制底片(如:第一底片與第二底片)於上述預定溫度以下的環境溫度進行曝光作業,進而避免底片產生大幅地漲縮、以提升底片的使用壽命。 In summary, the circuit board detection method disclosed in the embodiment of the present invention is to cool the ambient temperature in the exposure apparatus 100 through the environmental control mechanism 5 and maintain the ambient temperature below a predetermined temperature to control the negative film ( For example, the first negative film and the second negative film) are exposed at an ambient temperature below the predetermined temperature to prevent the negative film from greatly expanding and contracting, so as to increase the service life of the negative film.

其中,所述曝光步驟是於曝光設備100內實施,並且曝光過程中環境控制機構5控制曝光環境61的環境溫度與環境濕度(例如:冷卻上述底片2所在的承載平台62的溫度與週遭附近的溫度),以使底片2在曝光作業的過程中能處於均勻的溫度與溼度,進而降低底片2發生漲縮的機率,達到維持底片2尺寸穩定效果,並且提升底片2的使用壽命。 Wherein, the exposure step is implemented in the exposure apparatus 100, and the environmental control mechanism 5 controls the ambient temperature and the ambient humidity of the exposure environment 61 during the exposure process (for example: cooling the temperature of the supporting platform 62 where the negative film 2 is located and the surrounding vicinity Temperature), so that the negative film 2 can be at a uniform temperature and humidity during the exposure operation, thereby reducing the probability of the negative film 2 from rising and shrinking, achieving the effect of maintaining the size stability of the negative film 2, and increasing the service life of the negative film 2.

再者,由於至少一個電路板4在預定溫度以下的環境溫度中有效地進行曝光作業,藉以避免待測電路板4與底片2在曝光作業的過程中產生異常對位問題,並且通過再生步驟而能依據上述淘汰電路板42選擇其他合適的底片,以有效地降低電路板的淘汰率及節省生產時間。藉此,本實施例進而能大幅提升生產品質及效率。 Furthermore, since at least one circuit board 4 effectively performs the exposure operation at an ambient temperature below a predetermined temperature, thereby avoiding the problem of abnormal alignment between the circuit board 4 to be tested and the negative film 2 during the exposure operation, and through the regeneration step Other suitable negatives can be selected according to the above-mentioned obsolete circuit board 42 to effectively reduce the elimination rate of the circuit board and save production time. With this, the embodiment can further greatly improve the production quality and efficiency.

以上所述僅為本發明的優選可行實施例,並非用來侷限本發明的保護範圍,凡依本發明申請專利範圍所做的同等變化與修飾,皆應屬本發明的涵蓋範圍。 The above are only preferred and feasible embodiments of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent changes and modifications made in accordance with the patent application scope of the present invention shall fall within the scope of the present invention.

100‧‧‧曝光設備 100‧‧‧Exposure equipment

5‧‧‧環境控制機構 5‧‧‧Environmental Control Agency

51‧‧‧溫度感應器 51‧‧‧Temperature sensor

52‧‧‧降溫裝置 52‧‧‧cooling device

53‧‧‧濕度控制器 53‧‧‧Humidity controller

54‧‧‧濕度感測器 54‧‧‧Humidity sensor

61‧‧‧曝光環境 61‧‧‧ exposure environment

62‧‧‧承載平台 62‧‧‧Bearing platform

2‧‧‧底片 2‧‧‧ film

Claims (9)

一種電路板檢測方法,包括:一篩選步驟:以相對於一第一底片的一第一預設值進行X個待測電路板的檢測,篩選出能在所述第一預設值下進行曝光作業的Y個適格電路板、及不能在所述第一預設值下進行曝光作業的Z個淘汰電路板,並且X=Y+Z;其中,X為正整數、Y與Z皆為不小於零的整數;一再生步驟:找出能夠使Z個所述淘汰電路板中的至少其中一個所述淘汰電路板進行曝光作業的一第二預設值;其中,所述第二預設值是相對於一第二底片;以及一曝光步驟:依據所述第一預設值並以所述第一底片依序使Y個所述適格電路板進行曝光作業,並且依據所述第二預設值並以所述第二底片使相對應的至少一個所述淘汰電路板進行曝光作業;其中,所述曝光步驟於一曝光設備內實施,並且所述曝光設備以一環境控制機構來對所述曝光設備內的一環境溫度進行冷卻,以使Y個所述適格電路板、所述第一底片、至少一個所述淘汰電路板、及所述第二底片能在所述曝光設備內進行所述曝光作業的過程中,維持所述環境溫度在一預定溫度以下。 A circuit board detection method includes: a screening step: performing detection of X circuit boards to be tested with a first preset value relative to a first negative film, and screening for exposure under the first preset value Y qualified circuit boards for operation and Z eliminated circuit boards that cannot be exposed under the first preset value, and X=Y+Z; where X is a positive integer, and Y and Z are not less than An integer of zero; a regeneration step: find a second preset value that enables at least one of the Z eliminated circuit boards to perform an exposure operation; wherein, the second preset value is Relative to a second negative film; and an exposure step: according to the first preset value and sequentially using the first negative film to expose the Y suitable circuit boards, and according to the second preset value And use the second negative film to expose at least one of the corresponding eliminated circuit boards; wherein, the exposure step is performed in an exposure device, and the exposure device uses an environmental control mechanism to perform the exposure An ambient temperature in the device is cooled so that the Y qualified circuit boards, the first negative film, at least one of the eliminated circuit boards, and the second negative film can be exposed in the exposure device During the operation, the ambient temperature is maintained below a predetermined temperature. 如請求項1所述的電路板檢測方法,其中,所述第一預設值定義為所述第一底片的尺寸相對於一容許誤差而向內縮及向外擴的一虛擬尺寸範圍,而所述第二預設值定義為所述第二底片的尺寸相對於所述容許誤差而向內縮及向外擴的一虛擬尺寸範圍;其中,所述預定溫度不大於所述第一底片的一變形溫度、也不大於所述第二底片的一變形溫度。 The circuit board inspection method according to claim 1, wherein the first preset value is defined as a virtual size range in which the size of the first negative film shrinks inward and expands outward with respect to an allowable error, and The second preset value is defined as a virtual size range in which the size of the second negative film shrinks inward and expands outward relative to the allowable error; wherein the predetermined temperature is not greater than the first negative film A deformation temperature is also not greater than a deformation temperature of the second negative film. 如請求項2所述的電路板檢測方法,其中,所述環境控制機構包含有一冰水機或一霧化降溫器,用以維持所述環境溫度在所 述預定溫度以下。 The circuit board detection method according to claim 2, wherein the environmental control mechanism includes an ice water machine or an atomizing temperature reducer to maintain the ambient temperature at all Said below the predetermined temperature. 如請求項3所述的電路板檢測方法,其中,所述曝光設備包含有至少一個承載平台,用以承載所述第一底片或所述第二底片;所述環境控制機構包含有一溫度感測器,用以偵測至少一個所述承載平台的溫度,並且所述環境控制機構依據所述溫度感測器所偵測到的溫度值,而對應地調整所述冰水機或所述霧化降溫器的出風量。 The circuit board inspection method according to claim 3, wherein the exposure apparatus includes at least one carrying platform for carrying the first negative film or the second negative film; the environmental control mechanism includes a temperature sensor For detecting the temperature of at least one of the carrying platforms, and the environmental control mechanism adjusts the ice machine or the atomizer accordingly according to the temperature value detected by the temperature sensor The air volume of the desuperheater. 如請求項2至4中任一項所述的電路板檢測方法,其進一步提供有一攝像裝置以及電性連接於所述攝像裝置的一運算裝置;在所述篩選步驟之前,所述攝像裝置擷取N種底片的影像及X個所述待測電路板的影像並傳送至所述運算裝置;在所述篩選步驟中,所述運算裝置依據X個所述待測電路板的影像,以在N種所述底片中,選擇出在所述容許誤差內能夠進行曝光作業的所述待測電路板數量為最多的所述第一底片,N為大於1的正整數。 The circuit board detection method according to any one of claims 2 to 4, which further provides a camera device and an arithmetic device electrically connected to the camera device; before the screening step, the camera device captures Taking images of N kinds of negative films and X images of the circuit board to be tested and transmitting them to the computing device; in the screening step, the computing device is based on X images of the circuit board to be tested Among the N kinds of negative films, the first negative film with the largest number of the circuit boards to be tested that can perform the exposure operation within the allowable error is selected, and N is a positive integer greater than 1. 如請求項5所述的電路板檢測方法,其中,N種所述底片包括所述第二底片;在所述篩選步驟之前,所述運算裝置比較N種所述底片以及一標準玻璃底片,並將每種所述底片定義出相關於電路板曝光作業的一漲縮係數。 The circuit board inspection method according to claim 5, wherein the N kinds of negative films include the second negative film; before the screening step, the arithmetic device compares the N kinds of negative films and a standard glass negative film, and Each of the negative films defines a coefficient of expansion and contraction related to the exposure operation of the circuit board. 如請求項2至4中任一項所述的電路板檢測方法,其中,在所述篩選步驟中,將所述第一底片依序疊置於每個所述待測電路板,並且所述第一底片的中心點對齊或鄰近於相疊置的所述待測電路板的中心點,當所述第一底片與相疊置的所述待測電路板的尺寸差異大於或小於所述容許誤差時,則相疊置的所述待測電路板判定為一個所述淘汰電路板。 The circuit board inspection method according to any one of claims 2 to 4, wherein, in the screening step, the first negative film is sequentially stacked on each of the circuit boards to be tested, and the The center point of the first negative film is aligned with or adjacent to the center point of the stacked circuit boards under test, when the size difference between the first negative film and the stacked circuit boards under test is larger or smaller than the allowable When there is an error, the stacked circuit boards under test are determined to be one of the eliminated circuit boards. 如請求項1所述的電路板檢測方法,其中,所述環境控制機構包含有一濕度控制器,用以對所述曝光設備內的一環境濕度進行控制。 The circuit board detection method according to claim 1, wherein the environmental control mechanism includes a humidity controller for controlling an environmental humidity in the exposure device. 如請求項8所述的電路板檢測方法,其中,所述環境控制機構包含有一濕度感測器,用以偵測所述環境濕度,並且所述環境控制機構依據所述濕度感測器所偵測到的濕度值,而對應地調整所述濕度控制器的運作。 The circuit board detection method according to claim 8, wherein the environmental control mechanism includes a humidity sensor for detecting the environmental humidity, and the environmental control mechanism is detected based on the humidity sensor The measured humidity value adjusts the operation of the humidity controller accordingly.
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