TWI679732B - Magnetic field reliability testing device, magnetic field generating board and testing method of magnetic field reliability - Google Patents

Magnetic field reliability testing device, magnetic field generating board and testing method of magnetic field reliability Download PDF

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TWI679732B
TWI679732B TW107141602A TW107141602A TWI679732B TW I679732 B TWI679732 B TW I679732B TW 107141602 A TW107141602 A TW 107141602A TW 107141602 A TW107141602 A TW 107141602A TW I679732 B TWI679732 B TW I679732B
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magnetic field
electromagnet
tester
test
power
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TW107141602A
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TW202021051A (en
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學理 莊
Harry-Hak-Lay Chuang
張智揚
Chih-Yang Chang
王清煌
Ching-Huang Wang
江典蔚
Tien-Wei Chiang
施孟君
Meng-Chun Shih
王家佑
Chia-Yu Wang
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台灣積體電路製造股份有限公司
Taiwan Semiconductor Manufacturing Co., Ltd.
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Abstract

一種磁場可靠性測試裝置、磁場生成板及磁場可靠性的測試方法。磁場可靠性測試裝置包括測試器及磁場生成板。測試器包括多個待測物件插槽以及電源供應端。測試器利用待測物件插槽測試多個待測物件的功能。磁場生成板包括多個電磁鐵以及電源接收端。電源接收端耦接測試器的電源供應端以從測試器獲得電磁鐵的電力。每個電磁鐵的位置設置至每個待測物件插槽的相應位置。每個電磁鐵獲得電力以提供磁場至對應的每個待測物件插槽。測試器在電磁鐵提供磁場的情況下測試待測物件的功能是否完善。A magnetic field reliability test device, a magnetic field generation board, and a magnetic field reliability test method. The magnetic field reliability test device includes a tester and a magnetic field generation board. The tester includes multiple slots for the object to be tested and a power supply terminal. The tester uses the DUT slot to test the functions of multiple DUTs. The magnetic field generating board includes a plurality of electromagnets and a power receiving end. The power receiving end is coupled to the power supply end of the tester to obtain the power of the electromagnet from the tester. The position of each electromagnet is set to the corresponding position of each slot of the object to be tested. Each electromagnet receives power to provide a magnetic field to each corresponding DUT slot. The tester tests whether the function of the object to be tested is complete under the condition of the magnetic field provided by the electromagnet.

Description

磁場可靠性測試裝置、磁場生成板及磁場可靠性的測試方法Magnetic field reliability test device, magnetic field generation board, and magnetic field reliability test method

本揭露的實施例是有關於一種可靠性測試技術,且特別是有關於一種磁場可靠性測試裝置、磁場生成板及磁場可靠性的測試方法。The disclosed embodiments relate to a reliability test technology, and more particularly to a magnetic field reliability test device, a magnetic field generation board, and a magnetic field reliability test method.

為了能夠得知即將出售的產品是否能夠正常運行,廠商通常會設計測試設備來檢測產品的功能是否完善。例如,利用測試機台來檢測磁阻式隨機存取記憶體(Magnetoresistive Random Access Memory;MRAM)是否能正常進行讀取/寫入操作的功能。一般來說,MRAM的測試機台具備MRAM的讀取/寫入操作功能的測試,但不會另增加外部磁場而影響MRAM的運行。從另一角度來說,MRAM是以磁場效應來實現資料的存取,且使用MRAM的附近環境中有可能存在強烈的磁場而有可能影響到MRAM的運作,但目前的測試機台並未對MRAM在磁場影響下進行可靠度測試。In order to know whether the products to be sold can operate normally, manufacturers usually design test equipment to check whether the functions of the products are complete. For example, a test machine is used to detect whether the magnetoresistive random access memory (MRAM) can perform read / write operations normally. In general, MRAM test machines are equipped with MRAM read / write operation tests, but will not increase the external magnetic field to affect the operation of MRAM. From another perspective, MRAM uses the effect of magnetic fields to access data, and there may be a strong magnetic field in the surrounding environment where MRAM is used, which may affect the operation of MRAM, but the current test equipment has not MRAM performs reliability tests under the influence of magnetic fields.

本揭露實施例的磁場可靠性測試裝置包括測試器以及磁場生成板。測試器包括多個待測物件插槽以及電源供應端。測試器利用待測物件插槽測試多個待測物件的功能。磁場生成板包括多個電磁鐵以及電源接收端。電源接收端耦接測試器的電源供應端以從測試器獲得電磁鐵的電力。每個電磁鐵的位置設置至每個待測物件插槽的相應位置。每個電磁鐵獲得電力以提供磁場至對應的每個待測物件插槽。測試器在電磁鐵提供磁場的情況下測試待測物件的功能是否完善。The magnetic field reliability test device of the present disclosure includes a tester and a magnetic field generating board. The tester includes multiple slots for the object to be tested and a power supply terminal. The tester uses the DUT slot to test the functions of multiple DUTs. The magnetic field generating board includes a plurality of electromagnets and a power receiving end. The power receiving end is coupled to the power supply end of the tester to obtain the power of the electromagnet from the tester. The position of each electromagnet is set to the corresponding position of each slot of the object to be tested. Each electromagnet receives power to provide a magnetic field to each corresponding DUT slot. The tester tests whether the function of the object to be tested is complete under the condition of the magnetic field provided by the electromagnet.

本揭露實施例的磁場生成板包括多個電磁鐵以及電源接收端。電磁鐵以特定形式相互連接以成為電磁鐵串。電源接收端耦接電磁鐵串。電源接收端耦接測試器的電源供應端以獲得電磁鐵的電力。電磁鐵獲得電力以分別提供磁場至測試器中的待測物件插槽。測試器在電磁鐵提供磁場的情況下測試位於待測物件插槽中的待測物件的功能是否完善。The magnetic field generating board of the present disclosure includes a plurality of electromagnets and a power receiving end. The electromagnets are connected to each other in a specific form to form an electromagnet string. The power receiving end is coupled to the electromagnet string. The power receiving end is coupled to the power supply end of the tester to obtain the power of the electromagnet. The electromagnet obtains power to provide a magnetic field to the DUT slot in the tester. The tester tests whether the function of the test object located in the test object slot is complete under the condition of the magnetic field provided by the electromagnet.

本揭露實施例的磁場可靠性的測試方法包括以下步驟。提供測試器,所述測試器包括多個待測物件插槽以及電源供應端,且測試器利用待測物件插槽測試多個待測物件的功能。提供磁場生成板,其中磁場生成板包括多個電磁鐵以及電源接收端。將電源接收端耦接測試器的電源供應端,以使電磁鐵從測試器獲得電磁鐵的電力,其中每個電磁鐵的位置設置至每個待測物件插槽的相應位置,每個電磁鐵獲得所述電力以提供磁場至對應的每個待測物件插槽。以及,在電磁鐵提供磁場的情況下,通過測試器測試待測物件的功能是否完善。The method for testing the magnetic field reliability of the embodiment of the disclosure includes the following steps. A tester is provided. The tester includes a plurality of test object slots and a power supply end, and the tester uses the test object slots to test the functions of the plurality of test objects. A magnetic field generating board is provided, wherein the magnetic field generating board includes a plurality of electromagnets and a power receiving end. The power receiving end is coupled to the power supply end of the tester so that the electromagnet obtains the power of the electromagnet from the tester, wherein the position of each electromagnet is set to the corresponding position of each slot of the object to be tested, and each electromagnet The electric power is obtained to provide a magnetic field to each slot of the object under test. And, in the case of the magnetic field provided by the electromagnet, the tester is used to test whether the function of the object to be tested is perfect.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.

圖1依照本揭露一實施例的一種磁場可靠性測試裝置的示意圖。磁場可靠性測試裝置可用來對待測物件(如,圖1中的待測物件116)進行可靠度測試。例如,本實施例的待測物件為經封裝的磁阻式隨機存取記憶體(MRAM)電路。由於磁阻式隨機存取記憶體電路是以磁場效應來實現資料的存取,許多廠商或使用者可能會認為當磁阻式隨機存取記憶體(MRAM)電路在運作時的環境中有外部磁場的話會影響到其運作(如,資料的讀取/寫入操作)的可靠度。因此,本揭露以測試機台為基礎,並額外設計磁場生成板來對測試機台中的每個待測物件插槽額外提供磁場,並且此磁場可透過測試機台來控制其大小。藉此,測試機台便可在主動地控制磁場生成板的磁場的情況下對每個待測物件進行相關功能的可靠度測試。FIG. 1 is a schematic diagram of a magnetic field reliability test apparatus according to an embodiment of the disclosure. The magnetic field reliability test device can be used to perform a reliability test on an object to be tested (eg, the object to be tested 116 in FIG. 1). For example, the object under test in this embodiment is a packaged magnetoresistive random access memory (MRAM) circuit. Because magnetoresistive random access memory circuits use magnetic field effects to access data, many manufacturers or users may think that when magnetoresistive random access memory (MRAM) circuits operate in an external environment, The magnetic field will affect the reliability of its operation (such as data read / write operations). Therefore, this disclosure is based on a test machine, and an additional magnetic field generating board is additionally designed to provide an additional magnetic field to each slot of the object under test in the test machine, and this magnetic field can be controlled by the test machine. In this way, the test machine can perform a reliability test of related functions for each object under test while actively controlling the magnetic field of the magnetic field generating board.

如此一來,本揭露的磁場可靠性測試裝置可提供磁阻式隨機存取記憶體電路的磁場可靠度測試資料,使得設計所述磁阻式隨機存取記憶體電路時能夠參考這些測試資料以作為佐證。另外,測試機台也可透過其電源供應端便可簡易地控制磁場生成板,不需額外設置針對磁場生成板所使用的控制電路、控制指令及相關流程,降低測試機台的成本。換句話說,在已具備控制機台的情況下,可另外購買本揭露提出的磁場生成板便可對磁阻式隨機存取記憶體電路進行磁場可靠性測試。In this way, the magnetic field reliability test device disclosed in the present disclosure can provide magnetic field reliability test data of the magnetoresistive random access memory circuit, so that the test data can be referred to when designing the magnetoresistive random access memory circuit. As evidence. In addition, the test machine can also easily control the magnetic field generating board through its power supply end, without the need to additionally set control circuits, control instructions and related processes for the magnetic field generating board, reducing the cost of the test machine. In other words, if the control machine is already provided, the magnetic field reliability board of the magnetoresistive random access memory circuit can be tested by purchasing the magnetic field generating board proposed in this disclosure separately.

在此說明磁場可靠性測試裝置中各個元件的功能。磁場可靠性測試裝置包括測試器110以及磁場生成板120。測試器110主要包括多個待測物件插槽112以及電源供應端114。測試器110還可包括處理器,以利用特定流程來對待測物件116進行其功能的可靠度測試。換句話說,若希望對待測物件116進行磁場可靠度測試,則可將待測物件116放入測試器110中的待測物件插槽116。測試器110便可利用待測物件插槽114來測試這些待測物件116的功能是否完善可靠。The function of each element in the magnetic field reliability test device is explained here. The magnetic field reliability test apparatus includes a tester 110 and a magnetic field generation board 120. The tester 110 mainly includes a plurality of test object slots 112 and a power supply terminal 114. The tester 110 may further include a processor to perform a reliability test of the function of the object under test 116 using a specific process. In other words, if it is desired to perform a magnetic field reliability test on the object under test 116, the object under test 116 may be placed in the object test socket 116 in the tester 110. The tester 110 can use the DUT slot 114 to test whether the functions of the DUT 116 are complete and reliable.

磁場生成板120主要包括多個電磁鐵122以及電源接收端125。電源接收端125耦接測試器110的電源供應端114以從測試器110獲得電磁鐵122的電力。每個電磁鐵122的位置設置至每個待測物件插槽112的相應位置。電磁鐵122之間以串接形式相互連接,從而成為電磁鐵串。每個電磁鐵122從電源接收端125獲得電力以提供磁場B至對應的每個待測物件插槽112。如此一來,測試器110在電磁鐵122提供磁場B的情況下可透過待測物件插槽112來測試待測物件116的功能是否完善。此外,由於這些電磁鐵122以串接形式相互連接,因此只要流經的電流相同,每個電磁鐵122皆會產生相同大小的磁場。The magnetic field generating board 120 mainly includes a plurality of electromagnets 122 and a power receiving end 125. The power receiving terminal 125 is coupled to the power supply terminal 114 of the tester 110 to obtain power from the electromagnet 122 from the tester 110. The position of each of the electromagnets 122 is set to a corresponding position of each of the object insertion slots 112. The electromagnets 122 are connected to each other in series to form an electromagnet string. Each electromagnet 122 obtains power from the power receiving end 125 to provide a magnetic field B to each corresponding DUT slot 112. In this way, the tester 110 can test whether the function of the test object 116 is complete through the test object slot 112 under the condition that the magnetic field B is provided by the electromagnet 122. In addition, since these electromagnets 122 are connected to each other in series, as long as the same current flows, each electromagnet 122 will generate a magnetic field of the same magnitude.

特別說明的是,由於測試器110通常具備可調整電力的電源供應端以對外部的設備供電,因此本揭露還設計可供測試器110外掛的磁場生成板120。測試器110可改變電源供應端114的電力(例如,改變電源供應端114中流經的電流大小及電流方向)以同時調整每個電磁鐵122所提供的磁場B。此外,為使電磁鐵122的磁場B能夠較佳地發揮功效,每個電磁鐵122與對應的每個待測物件插槽112之間的距離D可設置在0.5毫米以下,以讓待測物件116能夠受到較大的磁場B的影響。In particular, since the tester 110 usually has a power supply terminal capable of adjusting power to supply power to external devices, the present disclosure also designs a magnetic field generating board 120 that can be externally connected to the tester 110. The tester 110 can change the power of the power supply terminal 114 (for example, change the magnitude and direction of the current flowing through the power supply terminal 114) to adjust the magnetic field B provided by each electromagnet 122 at the same time. In addition, in order to make the magnetic field B of the electromagnet 122 function better, the distance D between each electromagnet 122 and the corresponding slot 112 of each DUT can be set below 0.5 mm, so that the DUT can be tested. 116 can be affected by a larger magnetic field B.

圖2是圖1中磁場生成板120的詳細示意圖。圖2左方繪示磁場生成板120的俯視圖(亦即,位於X軸與Y軸平面的圖示)。磁場生成板120是以燒入板(burn-in board)來實現。磁場生成板120上的多個電磁鐵122之間以串接形式相互連接而成為電磁鐵串。電磁鐵串的兩端電性耦接到磁場生成板120的兩個電源接收端125。磁場生成板120還具備手把128以供使用者方便拿取。圖2右方則繪示以柱狀外形實現的電磁鐵(位於Y軸與X軸平面的電磁鐵)。每個電磁鐵122是以柱狀電磁鐵實現。柱狀電磁鐵的高度為11毫米,且柱狀電磁鐵的橫截面(也就是,圓形截面)直徑為14毫米。應用本實施例者亦可採用不同形狀的電磁鐵122來實現磁場生成板120,只要能對圖1中測試器110的每個待測物件插槽112提供穩定的磁場即可。FIG. 2 is a detailed schematic diagram of the magnetic field generating plate 120 in FIG. 1. The left side of FIG. 2 illustrates a top view of the magnetic field generating plate 120 (that is, a diagram on the X-axis and Y-axis planes). The magnetic field generating board 120 is implemented by a burn-in board. The plurality of electromagnets 122 on the magnetic field generating board 120 are connected to each other in series to form an electromagnet string. Two ends of the electromagnet string are electrically coupled to two power receiving ends 125 of the magnetic field generating board 120. The magnetic field generating board 120 is further provided with a handle 128 for the user to conveniently take it. The right side of FIG. 2 shows an electromagnet implemented in a columnar shape (an electromagnet located on the Y-axis and X-axis planes). Each electromagnet 122 is implemented as a columnar electromagnet. The height of the columnar electromagnet is 11 mm, and the diameter of the cross section (that is, the circular cross section) of the columnar electromagnet is 14 mm. Those applying this embodiment can also use different shapes of electromagnets 122 to implement the magnetic field generating board 120, as long as a stable magnetic field can be provided to each of the test object slots 112 of the tester 110 in FIG.

圖3為圖1中電磁鐵122與對應的每個待測物件插槽112之間的距離D以及磁場B之間的關係圖。圖3中的橫軸表示以毫米為單位的距離D,圖3中的縱軸表示以特斯拉(tesla;T)作為磁通量單位的磁場B。從圖3可看出,當距離D的數值越大,磁場B的大小將急遽下降,因此應用本實施例者可盡量將電磁鐵盡量接近對應的待測物件插槽,藉以在節省電力的情況下獲得較佳的磁場B。FIG. 3 is a relationship diagram between the distance D and the magnetic field B between the electromagnet 122 and the corresponding slot 112 of each DUT in FIG. 1. The horizontal axis in FIG. 3 represents a distance D in millimeters, and the vertical axis in FIG. 3 represents a magnetic field B with Tesla (Ts) as a unit of magnetic flux. It can be seen from FIG. 3 that when the distance D is larger, the magnitude of the magnetic field B will decrease sharply. Therefore, the person applying this embodiment can try to place the electromagnet as close as possible to the corresponding slot of the object to be tested, thereby saving power. A better magnetic field B is obtained.

圖4依照本揭露一實施例的一種磁場可靠性的測試方法的流程圖。請同時參考圖1及圖4,於步驟S410中,提供測試器110。測試器110包括多個待測物件插槽112以及電源供應端114。測試器110利用待測物件插槽112測試多個待測物件116的功能。於步驟S420中,提供磁場生成板120。磁場生成板120包括多個電磁鐵122以及電源接收端125。於步驟S430中,將電源接收端125耦接測試器110的電源供應端114,以使電磁鐵122從測試器110獲得電磁鐵122的電力。每個電磁鐵122的位置設置至每個待測物件插槽112的相應位置,且每個電磁鐵122獲得電力以提供磁場B至對應的每個待測物件插槽112。於步驟S430中,在電磁鐵122提供磁場B的情況下,通過測試器110測試待測物件116的功能是否完善。相關步驟的詳細說明請見本揭露各實施例。FIG. 4 is a flowchart of a magnetic field reliability testing method according to an embodiment of the disclosure. Please refer to FIG. 1 and FIG. 4 at the same time. In step S410, a tester 110 is provided. The tester 110 includes a plurality of test object slots 112 and a power supply terminal 114. The tester 110 uses the DUT slot 112 to test the functions of multiple DUTs 116. In step S420, a magnetic field generating board 120 is provided. The magnetic field generating board 120 includes a plurality of electromagnets 122 and a power receiving end 125. In step S430, the power receiving end 125 is coupled to the power supply end 114 of the tester 110, so that the electromagnet 122 obtains the power of the electromagnet 122 from the tester 110. The position of each electromagnet 122 is set to a corresponding position of each slot of the object under test 112, and each electromagnet 122 receives power to provide a magnetic field B to the corresponding slot 112 of each of the object under test. In step S430, when the magnetic field B is provided by the electromagnet 122, the tester 110 tests whether the function of the object 116 to be tested is complete. For a detailed description of the related steps, please refer to the embodiments of the present disclosure.

本揭露實施例揭露一種磁場可靠性測試裝置,其包括測試器以及磁場生成板。測試器包括多個待測物件插槽以及電源供應端。測試器利用待測物件插槽測試多個待測物件的功能。磁場生成板包括多個電磁鐵以及電源接收端。電源接收端耦接測試器的電源供應端以從測試器獲得電磁鐵的電力。每個電磁鐵的位置設置至每個待測物件插槽的相應位置。每個電磁鐵獲得電力以提供磁場至對應的每個待測物件插槽。測試器在電磁鐵提供磁場的情況下測試待測物件的功能是否完善。The disclosed embodiment discloses a magnetic field reliability testing device, which includes a tester and a magnetic field generating board. The tester includes multiple slots for the object to be tested and a power supply terminal. The tester uses the DUT slot to test the functions of multiple DUTs. The magnetic field generating board includes a plurality of electromagnets and a power receiving end. The power receiving end is coupled to the power supply end of the tester to obtain the power of the electromagnet from the tester. The position of each electromagnet is set to the corresponding position of each slot of the object to be tested. Each electromagnet receives power to provide a magnetic field to each corresponding DUT slot. The tester tests whether the function of the object to be tested is complete under the condition of the magnetic field provided by the electromagnet.

於部分實施例中,測試器改變電源供應端的電力以調整每個電磁鐵所提供的磁場。In some embodiments, the tester changes the power at the power supply to adjust the magnetic field provided by each electromagnet.

於部分實施例中,待測物件為經封裝的磁阻式隨機存取記憶體(MRAM)電路。In some embodiments, the object under test is a packaged magnetoresistive random access memory (MRAM) circuit.

於部分實施例中,電磁鐵之間以串接形式相互連接。In some embodiments, the electromagnets are connected to each other in series.

於部分實施例中,每個電磁鐵與對應的每個待測物件插槽之間的距離在0.5毫米以下In some embodiments, the distance between each electromagnet and the corresponding slot of each object under test is less than 0.5 mm

於部分實施例中,每個電磁鐵以柱狀電磁鐵實現。柱狀電磁鐵的高度為14毫米,且柱狀電磁鐵的橫截面直徑為11毫米。In some embodiments, each electromagnet is implemented as a cylindrical electromagnet. The height of the columnar electromagnet is 14 mm, and the cross-sectional diameter of the columnar electromagnet is 11 mm.

於部分實施例中,磁場生成板為燒入板。In some embodiments, the magnetic field generating board is a burn-in board.

本揭露實施例揭露一種磁場生成板,其包括多個電磁鐵以及電源接收端。電磁鐵以特定形式相互連接以成為電磁鐵串。電源接收端耦接電磁鐵串。電源接收端耦接測試器的電源供應端以獲得電磁鐵的電力。電磁鐵獲得電力以分別提供磁場至測試器中的待測物件插槽。測試器在電磁鐵提供磁場的情況下測試位於待測物件插槽中的待測物件的功能是否完善。The disclosed embodiment discloses a magnetic field generating board, which includes a plurality of electromagnets and a power receiving end. The electromagnets are connected to each other in a specific form to form an electromagnet string. The power receiving end is coupled to the electromagnet string. The power receiving end is coupled to the power supply end of the tester to obtain the power of the electromagnet. The electromagnet obtains power to provide a magnetic field to the DUT slot in the tester. The tester tests whether the function of the test object located in the test object slot is complete under the condition of the magnetic field provided by the electromagnet.

於部分實施例中,每個電磁鐵所提供的磁場是由測試器改變電源供應端的電力來進行調整。In some embodiments, the magnetic field provided by each electromagnet is adjusted by the tester changing the power at the power supply end.

於部分實施例中,待測物件為經封裝的磁阻式隨機存取記憶體電路。In some embodiments, the object under test is a packaged magnetoresistive random access memory circuit.

於部分實施例中,電磁鐵之間以串接形式相互連接以成為電磁鐵串。In some embodiments, the electromagnets are connected to each other in series to form an electromagnet string.

於部分實施例中,每個電磁鐵與對應的每個待測物件插槽之間的距離在0.5毫米以下。In some embodiments, the distance between each electromagnet and the corresponding slot of each object under test is less than 0.5 mm.

於部分實施例中,每個電磁鐵以柱狀電磁鐵實現,柱狀電磁鐵的高度為14毫米,柱狀電磁鐵的橫截面直徑為11毫米。In some embodiments, each electromagnet is realized by a columnar electromagnet. The height of the columnar electromagnet is 14 mm, and the cross-sectional diameter of the columnar electromagnet is 11 mm.

於部分實施例中,磁場生成板為燒入板。In some embodiments, the magnetic field generating board is a burn-in board.

本揭露實施例揭露一種磁場可靠性的測試方法,其包括以下步驟。提供測試器,所述測試器包括多個待測物件插槽以及電源供應端,且測試器利用待測物件插槽測試多個待測物件的功能。提供磁場生成板,其中磁場生成板包括多個電磁鐵以及電源接收端。將電源接收端耦接測試器的電源供應端,以使電磁鐵從測試器獲得電磁鐵的電力,其中每個電磁鐵的位置設置至每個待測物件插槽的相應位置,每個電磁鐵獲得所述電力以提供磁場至對應的每個待測物件插槽。以及,在電磁鐵提供磁場的情況下,通過測試器測試待測物件的功能是否完善。The disclosed embodiment discloses a method for testing the reliability of a magnetic field, which includes the following steps. A tester is provided. The tester includes a plurality of test object slots and a power supply end, and the tester uses the test object slots to test the functions of the plurality of test objects. A magnetic field generating board is provided, wherein the magnetic field generating board includes a plurality of electromagnets and a power receiving end. The power receiving end is coupled to the power supply end of the tester so that the electromagnet obtains the power of the electromagnet from the tester, wherein the position of each electromagnet is set to the corresponding position of each slot of the object to be tested, and each electromagnet The electric power is obtained to provide a magnetic field to each slot of the object under test. And, in the case of the magnetic field provided by the electromagnet, the tester is used to test whether the function of the object to be tested is perfect.

於部分實施例中,待測物件為經封裝的磁阻式隨機存取記憶體電路。In some embodiments, the object under test is a packaged magnetoresistive random access memory circuit.

於部分實施例中,電磁鐵之間以串接形式相互連接。In some embodiments, the electromagnets are connected to each other in series.

於部分實施例中,每個電磁鐵與對應的每個待測物件插槽之間的距離在0.5毫米以下。In some embodiments, the distance between each electromagnet and the corresponding slot of each object under test is less than 0.5 mm.

於部分實施例中,每個電磁鐵以柱狀電磁鐵實現,柱狀電磁鐵的高度為14毫米,柱狀電磁鐵的橫截面直徑為11毫米,並且磁場生成板為燒入板。In some embodiments, each electromagnet is implemented by a columnar electromagnet. The height of the columnar electromagnet is 14 mm, the cross-sectional diameter of the columnar electromagnet is 11 mm, and the magnetic field generating plate is a burn-in plate.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.

110‧‧‧測試器110‧‧‧Tester

112‧‧‧待測物件插槽 112‧‧‧ Object to be tested slot

114‧‧‧電源供應端 114‧‧‧Power supply side

116‧‧‧待測物件 116‧‧‧ Object to be tested

120‧‧‧磁場生成板 120‧‧‧ Magnetic field generating board

122‧‧‧電磁鐵 122‧‧‧Electromagnet

125‧‧‧電源接收端 125‧‧‧Power receiving end

128‧‧‧手把 128‧‧‧Handle

B‧‧‧磁場 B‧‧‧ Magnetic Field

D‧‧‧距離 D‧‧‧distance

X‧‧‧X軸 X‧‧‧X axis

Y‧‧‧Y軸 Y‧‧‧Y axis

Z‧‧‧Z軸 Z‧‧‧Z axis

圖1依照本揭露一實施例的一種磁場可靠性測試裝置的示意圖。 圖2是圖1中磁場生成板的詳細示意圖。 圖3為圖1中電磁鐵與對應的每個待測物件插槽之間的距離D以及磁場B之間的關係圖。 圖4依照本揭露一實施例的一種磁場可靠性的測試方法的流程圖。FIG. 1 is a schematic diagram of a magnetic field reliability test apparatus according to an embodiment of the disclosure. FIG. 2 is a detailed schematic diagram of the magnetic field generating plate in FIG. 1. FIG. 3 is a relationship diagram between the distance D and the magnetic field B between the electromagnet and the corresponding slot of each DUT in FIG. 1. FIG. 4 is a flowchart of a magnetic field reliability testing method according to an embodiment of the disclosure.

Claims (9)

一種磁場可靠性測試裝置,包括:測試器,包括多個待測物件插槽以及電源供應端,所述測試器利用所述待測物件插槽測試多個待測物件的功能;以及磁場生成板,包括多個電磁鐵以及電源接收端,所述電源接收端耦接所述測試器的所述電源供應端以從所述測試器獲得所述電磁鐵的電力,其中每個電磁鐵的位置設置至每個待測物件插槽的相應位置,每個電磁鐵獲得所述電力以提供磁場至對應的每個待測物件插槽,所述測試器在所述電磁鐵提供所述磁場的情況下測試所述待測物件的功能是否完善,並且每個電磁鐵與對應的每個待測物件插槽之間的距離在0.5毫米以下。A magnetic field reliability test device includes: a tester including a plurality of test object slots and a power supply end, the tester uses the test object slots to test the functions of a plurality of test objects; and a magnetic field generation board Comprising a plurality of electromagnets and a power receiving end, the power receiving end being coupled to the power supply end of the tester to obtain the power of the electromagnet from the tester, wherein the position of each electromagnet is set To the corresponding position of each DUT slot, each electromagnet obtains the power to provide a magnetic field to the corresponding DUT slot, and the tester is under the condition that the electromagnet provides the magnetic field It is tested whether the function of the object under test is perfect, and the distance between each electromagnet and the corresponding slot of each object under test is less than 0.5 mm. 如申請專利範圍第1項所述的磁場可靠性測試裝置,其中所述測試器改變所述電源供應端的所述電力以調整每個電磁鐵所提供的所述磁場。The magnetic field reliability testing device according to item 1 of the patent application scope, wherein the tester changes the electric power at the power supply end to adjust the magnetic field provided by each electromagnet. 如申請專利範圍第1項所述的磁場可靠性測試裝置,其中所述待測物件為經封裝的磁阻式隨機存取記憶體電路。The magnetic field reliability test device according to item 1 of the scope of patent application, wherein the object to be tested is a packaged magnetoresistive random access memory circuit. 如申請專利範圍第1項所述的磁場可靠性測試裝置,其中每個電磁鐵以柱狀電磁鐵實現,所述柱狀電磁鐵的高度為11毫米,所述柱狀電磁鐵的橫截面直徑為14毫米。The magnetic field reliability test device according to item 1 of the scope of patent application, wherein each electromagnet is implemented by a columnar electromagnet, the height of the columnar electromagnet is 11 mm, and the cross-sectional diameter of the columnar electromagnet It is 14 mm. 一種磁場生成板,包括:多個電磁鐵,所述電磁鐵以特定形式相互連接以成為電磁鐵串;以及電源接收端,耦接所述電磁鐵串,所述電源接收端耦接測試器的電源供應端以獲得所述電磁鐵的電力,所述電磁鐵獲得所述電力以分別提供磁場至所述測試器中的所述待測物件插槽,所述測試器在所述電磁鐵提供所述磁場的情況下測試位於所述待測物件插槽中的待測物件的功能是否完善,其中每個電磁鐵與對應的每個待測物件插槽之間的距離在0.5毫米以下。A magnetic field generating board includes: a plurality of electromagnets, the electromagnets are connected to each other to form an electromagnet string in a specific form; and a power receiving end coupled to the electromagnet string, and the power receiving end is coupled to a tester The power supply end obtains the electric power of the electromagnet, and the electromagnet obtains the electric power to respectively provide a magnetic field to the test object slot in the tester, and the tester provides In the case of the magnetic field described above, it is tested whether the function of the test object located in the test object slot is perfect, wherein the distance between each electromagnet and the corresponding test object slot is less than 0.5 mm. 如申請專利範圍第5項所述的磁場生成板,其中每個電磁鐵所提供的所述磁場是由所述測試器改變所述電源供應端的所述電力來進行調整。The magnetic field generating board according to item 5 of the scope of patent application, wherein the magnetic field provided by each electromagnet is adjusted by the tester by changing the electric power at the power supply end. 如申請專利範圍第5項所述的磁場生成板,其中所述待測物件為經封裝的磁阻式隨機存取記憶體電路。The magnetic field generating board according to item 5 of the scope of patent application, wherein the object to be tested is a packaged magnetoresistive random access memory circuit. 如申請專利範圍第5項所述的磁場生成板,其中每個電磁鐵以柱狀電磁鐵實現,所述柱狀電磁鐵的高度為11毫米,所述柱狀電磁鐵的橫截面直徑為14毫米。The magnetic field generating board according to item 5 of the scope of patent application, wherein each electromagnet is realized by a columnar electromagnet, the height of the columnar electromagnet is 11 mm, and the diameter of the cross section of the columnar electromagnet is 14 Mm. 一種磁場可靠性的測試方法,包括:提供測試器,所述測試器包括多個待測物件插槽以及電源供應端,所述測試器利用所述待測物件插槽測試多個待測物件的功能;提供磁場生成板,所述磁場生成板包括多個電磁鐵以及電源接收端;將所述電源接收端耦接所述測試器的所述電源供應端,以使所述電磁鐵從所述測試器獲得所述電磁鐵的電力,其中每個電磁鐵的位置設置至每個待測物件插槽的相應位置,每個電磁鐵獲得所述電力以提供磁場至對應的每個待測物件插槽,並且每個電磁鐵與對應的每個待測物件插槽之間的距離在0.5毫米以下;以及在所述電磁鐵提供所述磁場的情況下,通過所述測試器測試所述待測物件的功能是否完善。A method for testing the reliability of a magnetic field includes: providing a tester, the tester comprising a plurality of test object slots and a power supply end, and the tester using the test object slots to test a plurality of test objects Function: Provide a magnetic field generating board, the magnetic field generating board includes a plurality of electromagnets and a power receiving end; and the power receiving end is coupled to the power supply end of the tester so that the electromagnet is removed from the The tester obtains the electric power of the electromagnet, wherein the position of each electromagnet is set to a corresponding position of each slot of the object to be tested, and each electromagnet obtains the power to provide a magnetic field to each of the corresponding objects to be tested And the distance between each electromagnet and the corresponding slot of each object under test is less than 0.5 mm; and in the case where the electromagnetic field provides the magnetic field, the test is tested by the tester Whether the function of the object is perfect.
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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140070800A1 (en) * 2012-09-12 2014-03-13 Ho-Youn CHO Magnetic field generation unit and semiconductor test apparatus including the same
US20160055951A1 (en) * 2014-08-19 2016-02-25 Tatsuya Kishi Electromagnet, tester and method of manufacturing magnetic memory

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140070800A1 (en) * 2012-09-12 2014-03-13 Ho-Youn CHO Magnetic field generation unit and semiconductor test apparatus including the same
US20160055951A1 (en) * 2014-08-19 2016-02-25 Tatsuya Kishi Electromagnet, tester and method of manufacturing magnetic memory

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