TWI676032B - Horizontal support structure and horizontal support system for integrated circuit - Google Patents

Abstract

The present disclosure provides a horizontal support structure and system for an integrated circuit, wherein the horizontal support structure is mounted on a probe interface panel. The probe interface panel includes a circuit carrier board, a support board, a support post, and a support base. The circuit carrier board is formed with a central hole and is disposed corresponding to the support post. The horizontal supporting structure of the integrated circuit includes a probe card and a universal screw joint. The probe card is detachably assembled on the bearing seat. The probe card includes a circuit substrate, a support frame, a probe head and a stopper head mounted on two ends of the support frame, and a plurality of probes arranged at one end of the probe head. The universal screw connector is connected to the support column and protrudes from the center hole, and one end of the universal screw connector can movably abut the stopper head. When each probe of the probe head tests the integrated circuit, the circuit substrate is in a horizontal state.

Description

Horizontal support structure and system of integrated circuit

The present disclosure relates to a horizontal support structure for a probe card, and more particularly to a horizontal support structure and system for an integrated circuit.

In the semiconductor process, after the wafer is manufactured and before the dicing and packaging are performed, in order to ensure the yield of the wafer and avoid the cost waste caused by the continued processing of defective products, the electrical test at the wafer stage must be performed first, that is, through the probe The probe on the probe card (PC) is directly in contact with the pad or bump on the wafer, which leads to the wafer signal, and then cooperates with peripheral test equipment and software control to achieve automatic measurement. the goal of.

Because the probe card is transferred to the Automatic Test Equipment (ATE) for wafer testing, the probe card needs to be transferred to the Probe Interface Board (PIB) to perform wafer testing operations. As shown in FIG. 1, when the probe card 1 is transferred to the probe interface panel 2, the two sides of the circuit board 11 of the probe card 1 substantially abut the transfer support seat below the probe interface panel 2. 21 on. When the probe card 1 tests wafer 3 (wafer), the needle pressure of the probe 12 will increase with the test process. The gap 4 between the center area of the probe card 1 and the probe interface panel 2 causes the probe The circuit board 11 of the card 1 is gradually deformed and bent, which affects the test result.

The existing automatic test equipment will be provided with a gasket 22 in the gap 3 for the probe card 1 to abut against to solve the problem of no stable support. However, when the number of probes 12 of the probe card 1 is increasing, and the test force that the probe card 1 is subjected to is increasing, the method of supporting by the gasket 22 still cannot be effectively solved. In view of this, it is necessary to provide a horizontal support structure for an integrated circuit to solve the problems that the level of the probe card 1 is poor and the circuit board 11 of the probe card 1 is deformed.

The purpose of the present disclosure is to provide a horizontal support structure and system for an integrated circuit in which a probe of a probe card can be stably supported, so that a circuit substrate is not deformed and bent and maintained in a horizontal state.

Another object of the present disclosure is to provide a horizontal support structure and system for an integrated circuit having an adjustable length and more than one supporting force (locking force).

To achieve the above object, the present disclosure provides a horizontal supporting structure of an integrated circuit, which is mounted on a probe interface panel. The probe interface panel includes a circuit carrier board, a support board attached to one side of the circuit carrier board, a support post fixedly connected to the support board, and a bearing seat disposed on the other side of the circuit carrier board. The circuit carrier board is formed with a central hole and is arranged correspondingly to the supporting column. The horizontal supporting structure of the integrated circuit includes a probe card and a universal screw joint. The probe card is detachably assembled on the bearing seat. The probe card includes a circuit substrate, a support frame provided on the circuit substrate, a probe head and a stopper installed at two ends of the support frame, and a plurality of probes provided at one end of the probe head, each of which The probe is electrically connected to the circuit substrate. The universal screw joint is fixed to the support post and protrudes from the center hole, and one end of the universal screw joint can movably abut the stopper. When each probe of the probe head tests the integrated circuit, the circuit substrate is in a horizontal state.

In one of the preferred embodiments of the present disclosure, the universal screw joint includes a thread A rod, a spherical neck protruding from one end of the threaded rod, and a coupling head connecting the spherical neck. The threaded rod is screwed to an assembling hole of the supporting column, and the coupling head protrudes from the central hole.

In one of the preferred embodiments of the present disclosure, one end of the coupling head is provided with a cavity covering the spherical neck, and the other end is a flat surface or an arc surface.

In one of the preferred embodiments of the present disclosure, the number of universal screw members includes a plurality of, and the number of assembly holes is also a plurality.

In one of the preferred embodiments of the present disclosure, a set screw is further included. The set screw is further screwed to the support post and abuts against the universal screw joint.

In one of the preferred embodiments of the present disclosure, it also includes a corresponding attachment seat fixedly connected to the bearing seat. The probe card is clamped between the lock attachment base and the bearing base of the probe interface panel.

In order to achieve the above object, the present disclosure further provides a horizontal support system of an integrated circuit, which includes a probe interface panel, a probe card and a universal screw joint. The probe interface panel includes a circuit carrier board, a support board attached to one side of the circuit carrier board, a support post fixedly connected to the support board, and a bearing seat disposed on the other side of the circuit carrier board. The circuit carrier board is formed with a central hole and is disposed corresponding to the support post. The probe card is detachably assembled on the bearing seat. The probe card includes a circuit substrate, a support frame provided on the circuit substrate, a probe head and a stopper installed at two ends of the support frame, and a plurality of probes provided at one end of the probe head, each of which The probe is electrically connected to the circuit substrate. The universal screw joint is fixed to the support post and protrudes from the center hole, and one end of the universal screw joint can movably abut the stopper. When each probe of the probe head tests the integrated circuit, the circuit substrate is in a horizontal state.

In one preferred embodiment of the present disclosure, the universal screw joint includes a threaded rod, a spherical neck protruding from one end of the threaded rod, and a coupling head connected to the spherical neck. Threaded rod It is screwed to an assembly hole of the support column, and the coupling head protrudes from the center hole.

In one of the preferred embodiments of the present disclosure, one end of the coupling head is provided with a cavity covering the spherical neck, and the other end is a flat surface or an arc surface.

In one of the preferred embodiments of the present disclosure, a set screw is further included. The set screw is further screwed to the support post and abuts against the universal screw joint.

The present disclosure also has the following effects. By installing at least one universal screw on the probe interface panel to abut the probe card, the circuit board of the probe card is not deformed by force, and test distortion is avoided. Universal screw joints are easy to install, fast, low cost, and can be widely used in various automatic test machines. According to the present disclosure, after the universal screw is installed, the horizontal state of the circuit board of the probe card can be visually / intuitively ensured that each probe of the probe card can obtain a stable supporting effect, thereby improving the reliability of the probe card. ).

[current technology]

1‧‧‧ Probe Card

11‧‧‧Circuit Board

12‧‧‧ Probe

2‧‧‧ Probe Interface Panel

21‧‧‧ transfer dock

3‧‧‧ wafer

4‧‧‧ clearance

[this invention]

100‧‧‧ Probe Interface Panel

102‧‧‧Circuit Carrier Board

104‧‧‧Support plate

106‧‧‧ support post

108‧‧‧bearing seat

110‧‧‧ center hole

112‧‧‧Assembly hole

118‧‧‧lock attachment

200‧‧‧ Probe Card

202‧‧‧Circuit Board

204‧‧‧ support frame

206‧‧‧ Probe head

208‧‧‧ Probe

210‧‧‧ Stop

300‧‧‧Universal screw joint

302‧‧‧Threaded Rod

304‧‧‧ spherical neck

306‧‧‧Connector

308‧‧‧Capacity

400‧‧‧stop screw

FIG. 1 shows a schematic diagram of a horizontal support structure of an existing integrated circuit; FIG. 2 shows a schematic diagram of a horizontal support structure and system of a integrated circuit according to a preferred embodiment of the present disclosure; and FIG. 3 shows a universal card according to a preferred embodiment of the present disclosure. 4 is a cross-sectional view of FIG. 3; and FIG. 5 is another schematic view of a horizontal support structure and system of a integrated circuit according to a preferred embodiment of the present disclosure.

In order to make the above and other objectives, features, and advantages of this disclosure more obvious and easier Understand that the preferred embodiments of the present disclosure will be given below, and will be described in detail with the accompanying drawings.

Please refer to FIG. 2, which shows a schematic diagram of a horizontal support structure and a system of an integrated circuit according to a preferred embodiment of the present disclosure. The present disclosure provides a horizontal supporting structure of an integrated circuit, which is mounted on a probe interface panel 100. The probe interface panel 100 includes a circuit carrier board 102, a support board 104 attached to one side of the circuit carrier board 102, a support post 106 fixedly connected to the support board 104, and a bearing seat provided on the other side of the circuit carrier board 102. 108. The circuit carrier board 102 is formed with a central hole 110 and is disposed corresponding to the support post 106. The horizontal supporting structure of the integrated circuit includes a probe card 200 and a universal screw joint 300.

Please refer to FIG. 3 and FIG. 4 together, a schematic view and a cross-sectional view of a universal screw joint according to a preferred embodiment of the present disclosure. As shown in the figure, the probe card 200 is detachably assembled on the supporting base 108, and is screw-connected, for example, with screws. The probe card 200 includes a circuit substrate 202, a support frame 204 disposed on the circuit substrate 202, a probe head 206 and a stopper 210 mounted on two ends of the support frame 204, and a probe head 206 disposed on one end of the probe head 206. A plurality of probes 208, each of which is electrically connected to the circuit substrate 202, and is used for extracting an electronic signal of the integrated circuit (not shown).

The universal screw joint 300 is fixed to the support post 106 and protrudes from the center hole 110, and one end of the universal screw joint 300 is movable against the stopper 210. When testing the integrated circuit (not shown) of each of the probes 208 of the probe head 206, since the universal screw joint 300 is stably supported, the circuit substrate 202 does not deform and maintains a horizontal state. When the probe card 200 is assembled on the bearing base 108 of the probe interface panel 100, the stopper head 210 can quickly contact the movable end of the universal screw joint 300 (that is, the coupling head 306) to maintain a stable support. It is effective to prevent the circuit board 202 of the probe card 200 from being deformed and bent during the test process, so that the test result is not affected or distorted.

As shown in FIG. 3 and FIG. 4, the universal screw joint 300 includes a threaded rod 302, a spherical neck 304 protruding from one end of the threaded rod 302, and a coupling head connected to the spherical neck 304. 306. The threaded rod 302 is screwed to an assembly hole 112 of the support post 106, and the coupling head 306 protrudes from the central hole 110. Specifically, the threaded rod 302 with an external thread is screwed to the assembly hole 112 with an internal thread, wherein the outer surface of the coupling head 306 may not be provided with an external thread and its outer diameter is smaller than the outer diameter of the threaded rod 302 for easy penetration The assembling hole 112 abuts against the stopper head 210.

In particular, because the number of probes 208 on each probe card 200 is different, the required supporting force is also different. You can lock or adjust the length / distance by selecting a threaded rod 302 with a corresponding locking force. It is suitable for testing machines such as the probe interface panel 100 and achieves the effect of stable support. Therefore, the universal screw joint 300 disclosed in the present disclosure has the advantages of being easy to install, fast, low in cost, and widely applicable to various automatic testing machines.

In addition, one end of the coupling head 306 is provided with a receiving cavity 308 covering the spherical neck 304, and the other end is a flat surface, an arc surface, or other suitable shapes, which are not limited. The coupling head 306 can rotate freely at a large angle by the spherical neck 304, and quickly aligns with the stopper head 210 of the probe card 200 by a flat surface or an arc surface to abut the probe card 200. In this embodiment, a set screw 400 is further included to prevent the universal screw joint 300 from loosening and displacing. The set screw 400 is screwed into the assembly hole 112 of the support post 106 and abuts against the universal screw joint 300. Specifically, when the universal screw joint 300 is locked to the group of the support posts 106 After the hole 112 is installed, the stop screw 400 is screwed in to further prevent the universal screw joint 300 from loosening.

Please refer to FIG. 5 again, which is another schematic diagram of a horizontal support structure and a system of an integrated circuit according to a preferred embodiment of the present disclosure. As shown in the figure, the number of the universal screw joints 300 includes a plurality of, and the number of the assembly holes 112 also corresponds to a plurality of. Generally speaking, three universal joints 300 can be provided to form a multi-point supporting force and strengthen the horizontal supporting force for the probe card 200. In the embodiments shown in FIG. 2 and FIG. 5, a lock base 118 corresponding to the base 108 is also included. The probe card 200 is clamped between the lock base 118 and the supporting base 108 of the probe interface panel 100, so as to ensure that the probe card 200 can be firmly and reliably clamped on the probe interface panel 100.

The present disclosure further provides a horizontal support system for an integrated circuit, which includes a probe interface panel 100, a probe card 200, and a universal screw connector 300, as shown in FIGS. 2 to 5. For related structures and connection relationships of the probe interface panel 100, the probe card 200, and the universal screw joint 300 of the present disclosure, reference may be made to the foregoing embodiments, and details are not described herein again.

Therefore, the present disclosure can provide a stable and good support force for the probe card 200 by installing the universal screw connector 300, and avoid the suspension of the stopper 210 of the probe head 206 to deform the circuit substrate 202. By additionally screwing in the stop screw 400 against the universal screw joint 300, the universal joint screw 300 can be prevented from loosening during the test of the integrated circuit by the probe card 200. In addition, the present disclosure can directly visualize / intuitively the horizontal state of the circuit board 202 of the probe card 200, ensure that each probe 208 of the probe card 200 obtains a stable support effect, and improve the reliability of the probe card 200.

Although the present disclosure has been disclosed above using the preferred embodiment, it is not intended to limit the present disclosure. Disclosure, those with ordinary knowledge in the technical field to which this disclosure belongs can make various modifications and retouching without departing from the spirit and scope of this disclosure. Therefore, the scope of protection of this disclosure shall be defined by the scope of the attached patent application. Prevail.

Claims (10)

A horizontal support structure of an integrated circuit is mounted on a probe interface panel, the probe interface panel includes a circuit carrier board, a support board attached to one side of the circuit carrier board, and a support fixedly connected to the support board. A pillar and a bearing seat disposed on the other side of the circuit carrier board, wherein the circuit carrier board is formed with a central hole and is arranged correspondingly to the support post; the horizontal supporting structure of the integrated circuit includes: a probe card, which is removable The probe card is assembled on the bearing base, and the probe card includes a circuit substrate, a support frame provided on the circuit substrate, a probe head and a stopper head mounted on two ends of the support frame, and the probe card. A plurality of probes at one end of the needle, each of which is electrically connected to the circuit substrate; and a plurality of universal screw joints, each of which is fixed to the support post and protrudes; In the center hole, and one end of each of the universal screw joints can movably abut against the stop head, wherein each of the probes of the probe head is leveled when testing the integrated circuit status. For example, the horizontal supporting structure of the integrated circuit of claim 1, wherein the universal screw joint includes a threaded rod, a spherical neck protruding from one end of the threaded rod, and a connection head connected to the spherical neck, The threaded rod is screwed into an assembling hole of the support post, and the coupling head protrudes from the central hole. For example, the horizontal supporting structure of the integrated circuit of claim 2, wherein one end of the joint is provided with a cavity covering the spherical neck, and the other end is a flat surface or an arc surface. For example, the horizontal support structure of the integrated circuit of claim 2, wherein the number of the assembly holes is plural. For example, the horizontal support structure of the integrated circuit of claim 1 further includes a set screw, which is further screwed to the support post and abuts the universal screw joint. For example, the horizontal supporting structure of the integrated circuit of claim 1 further includes a corresponding locking attachment fixedly connected to the bearing base, and the probe card is clamped between the locking attachment and the bearing base of the probe interface panel. between. A horizontal support system for an integrated circuit includes a probe interface board including a circuit carrier board, a support board attached to one side of the circuit carrier board, a support post fixedly connected to the support board, and a circuit board. A carrier seat on the other side of the carrier board, wherein the circuit carrier board is formed with a central hole and is arranged corresponding to the support column; a probe card is detachably assembled on the carrier seat, and the probe card includes a circuit substrate A support frame provided on the circuit substrate, a probe head and a stopper installed at two ends of the support frame, and a plurality of probes provided at one end of the probe head, each of which is electrically And a plurality of universal screw joints, each of which is fixed to the support post and protrudes from the center hole, and one end of each universal screw joint The abutment head is movably abutted, and when each of the probes of the probe head tests the integrated circuit, the circuit substrate is in a horizontal state. For example, the horizontal supporting system of the integrated circuit of claim 7, wherein the universal screw joint includes a threaded rod, a spherical neck protruding from one end of the threaded rod, and a connection head connected to the spherical neck, The threaded rod is screwed into an assembling hole of the support post, and the coupling head protrudes from the central hole. For example, the horizontal support system of the integrated circuit of claim 8, wherein one end of the joint is provided with a cavity covering the spherical neck, and the other end is a flat surface or an arc surface. For example, the horizontal support system of the integrated circuit of claim 7 further includes a set screw, which is further screwed to the support post and abuts the universal screw joint.