TWI669178B - Processing device for collecting laser light by using droplets and processing method thereof - Google Patents

Abstract

The invention includes a working portion and a laser source. The working department has a working space for setting a workpiece to be processed. The workpiece has a working surface for covering a working fluid, and the working fluid is a mixture of a polymer material and a solvent. The respiratory diagram method is used to convert the working solution into a polymer film after volatilization of the solvent, and a plurality of droplets are condensed on the polymer film to form a lens portion. The laser light source emits a laser light toward the lens portion to be concentrated on the working surface, so that the working surface forms at least one laser processing recess. Therefore, the case can change the shape or arrangement of the droplets to easily control the laser aggregation or processing conditions, and the non-planar structure can also perform the advantages of laser processing micro-nano holes.

Description

Processing device for collecting laser light by using droplets and processing method thereof

The invention relates to a processing device for collecting laser light by using droplets and a processing method thereof, in particular, a method for changing the shape or arrangement of droplets can be easily controlled to change laser gathering or processing conditions, and a non-planar structure can also be carried out. Laser processing micro-nano holes or surface texture processing devices using droplets to concentrate laser light and processing methods thereof.

The conventional breath figure method is often applied to the production of a polymer film having a regular arrangement of micropores. For example, in the respiratory diagram method disclosed in Japanese Patent Publication No. 2011-105730, the organic solution is mainly evaporated. Absorbing latent heat to cool the polymer coating, and on the cooled polymer coating, condensing moisture into a plurality of micro-shaped small water liquids to form a plurality of concave surfaces or balls on the polymer coating layer Concave surface. And after the organic solvent is completely evaporated, the polymer coating is hardened and the condensed water liquid is evaporated to obtain a polymer film having regularly arranged micropores.

Next, the method of "manufacturing a film having a nanostructure on a film surface" of the Republic of China Patent Publication No. 201434889 is also a film in which a nanostructure is formed on a film surface by a respiratory diagram method.

Although this breath pattern method is a well-known technique, it is mainly applied to the manufacture of a porous film. In the process of the respiratory diagram method, since the condensed droplets quickly disappear and cannot be used as a lens, they cannot be applied to laser processing.

Therefore, the inventors of the present patent have developed a technique for applying laser droplets generated by a breath pattern method as a lens to laser processing.

The object of the present invention is to provide a processing device for collecting laser light by using droplets and a processing method thereof, which can easily control the change of laser aggregation or processing conditions by changing the shape or arrangement of droplets. And non-planar structures can also perform the advantages of laser processing micro-nano holes. In particular, the problem to be solved by the present invention is the problem of the finished product defects which may occur due to slag splashing and heat-affected zones in the technique of producing micro-nano holes by laser processing of substrates. These problems can be solved by using droplets as lenses. At the same time, there is currently no technique for applying the respiratory map method to laser processing micro-nano holes.

The technical means for solving the above problems is to provide a processing device for collecting laser light by using a droplet, and a processing method thereof, the processing device comprising: a working portion having a working space, wherein a workpiece to be processed is provided; Having a working surface, the working surface is coated with a working fluid; the working fluid is a mixture of a polymer material and a solvent; and the working fluid is volatilized into a polymer film by the respiratory diagram method And condensing a plurality of droplets on the polymer film and the working surface, wherein the plurality of droplets are used to form a lens portion, the lens portion is in contact with the working surface, is located in the polymer film, and is located At least one of the polymer films, the breathing pattern method is defined as supplying and supplying moisture in the working space, the moisture and the plurality of droplets being the same component, and one part of the moisture The portion is condensed into the plurality of droplets; further, the transmittance of the polymer film and the droplet is higher than 90%, and the relative volatilization velocity of the droplet is lower than water; a laser source is used for Send a ray to the lens Light, the laser energy concentration making the lens portion on the working surface, the working surface is formed thereby enabling laser processing at least a concave portion.

The processing method includes the following steps: Preparation steps; two. Droplet formation step; three. Laser processing steps.

The above objects and advantages of the present invention will be readily understood from the following detailed description of the preferred embodiments illustrated herein.

The invention will be described in detail in the following examples in conjunction with the drawings:

10‧‧‧Working Department

10A‧‧‧Workspace

10B‧‧‧First Work Department

10C‧‧‧Second Work Department

101‧‧‧First space

102‧‧‧Second space

20‧‧‧Laser light source

21‧‧‧Laser light

30‧‧‧Working fluid

30A‧‧‧ polymer film

40, 60A‧‧‧ droplets

50‧‧‧Water

51‧‧‧ hole department

60‧‧‧ liquid

90‧‧‧Processing

91‧‧‧Work surface

911‧‧ ‧ laser processing recess

92‧‧‧3D working surface

M‧‧‧Lens Department

Θ‧‧‧contact angle

W1, S1‧‧‧ preparation steps

W2‧‧‧ droplet formation steps

W3‧‧‧ Laser processing steps

S2‧‧‧ immersion step

S3‧‧‧Rotating coating step

S4‧‧‧Rotation removal step

S5‧‧‧Complete lens step

Figure 1 is a schematic view of the apparatus of the present invention

Figure 2 is a partial cross-sectional view of Figure 1.

Figure 3 is a schematic illustration of one of the processes of the first processing method of the present invention

Figure 4 is a schematic view showing the second process of the first processing method of the present invention.

Figure 5 is a schematic view showing the third process of the first processing method of the present invention.

Figure 6A is a schematic view of the fourth process of the first processing method of the present invention.

6B is a schematic view showing another application example of the first processing method of the present invention.

Figure 7 is a schematic view showing one of the processes of droplet focusing laser processing of the first processing method of the present invention.

Figure 8 is a schematic view showing the second process of droplet focusing laser processing in the first processing method of the present invention.

Figure 9 is a schematic illustration of one of the processes of the second processing method of the present invention

Figure 10 is a schematic view showing the second process of the second processing method of the present invention.

Figure 11 is a schematic view showing the third process of the second processing method of the present invention.

Figure 12 is a schematic view showing the fourth process of the second processing method of the present invention.

Figure 13 is a schematic view of droplet focusing laser processing of the second processing method of the present invention

Figure 14 is a schematic view showing one of the processes of the third processing method of the present invention.

Figure 15 is a schematic view showing the second process of the third processing method of the present invention.

Figure 16 is a schematic view showing the third process of the third processing method of the present invention.

Figure 17 is a schematic view showing the fourth process of the third processing method of the present invention.

Figure 18 is a schematic view showing the fifth process of the third processing method of the present invention.

Figure 19 is a schematic view showing the sixth process of the third processing method of the present invention.

Figure 20 is a flow chart of the first processing method of the present invention.

Figure 21 is a flow chart of the third processing method of the present invention.

Figure 22 is an actual enlarged photograph of the processing cost of the present invention.

Figure 23 is a partial enlarged photo of Figure 22.

Referring to Figures 1 and 2, the present invention is a processing apparatus for collecting laser light by using a droplet, and a processing method thereof, the processing apparatus comprising a working portion 10 and a laser light source 20.

The working portion 10 has a working space 10A, and a workpiece 90 is disposed therein. The workpiece 90 has a working surface 91. The working surface 91 is covered with a working fluid 30 (see FIG. 3). The working fluid 30 is a mixture of a polymer material and a solvent; and the working fluid 30 is volatilized in the solvent (see FIG. 4) by a breath figure method to become a polymer film 30A. (refer to FIG. 5), and a plurality of droplets 40 are condensed on the polymer film 30A and the working surface 91, and the plurality of droplets 40 are used to form a lens portion M, that is, the lens portion M (ie, The plurality of droplets 40) are in contact with the working surface 91, located in the polymer film 30A, and at least one of the polymer film 30A. The respiratory pattern is defined as being provided in the working space 10A. Incorporating and supplying moisture (as shown in Fig. 1, the moisture is indicated by a hollow arrow, not numbered, and the first is clearly indicated), the moisture and the plurality of droplets 40 are the same component, and one of the moisture The portion is condensed into the plurality of droplets 40; further, the transmittance of the polymer film 30A and the droplets 40 is higher than 90%, and the The relative volatilization rate of the droplets 40 is lower than that of water.

The laser light source 20 is configured to emit a laser beam 21 (see FIG. 6A or FIG. 6B) toward the lens portion M, and the lens portion M concentrates laser energy (including focusing and defocusing) in the work. On the surface 91 (including the polymer film 30A), the working surface 91 is further formed with at least one laser processing recess 911 (see FIGS. 7 and 8).

In practice, the working space 10A may be open or sealed, and a part of moisture may be allowed to condense the plurality of droplets 40 on the polymer film 30A and the working surface 91.

The polymer film 30A has toluene and polymethylmethacrylate (in English, polymethyl methaerylate, PMMA for short) in 1 wt%.

The droplet 40 is one of glycerin, a mixture of glycerin and water, and a liquid having a high surface tension which is not volatile and highly transparent.

For the application examples of this case, please refer to Table 1 below and Table 2 below:

Refer to Figures 22 and 23, which are photographs of actual finished products processed according to the parameters of Tables 1 and 2.

Each of the droplets 40 has a contact angle θ (see Figure 7) which is greater than 90 degrees. Of course, this is an example, and it is only necessary to have the lens portion M.

The light transmittance of each of the droplets 40 is greater than 90%.

Each of the droplets 40 has a relative volatilization rate lower than that of water.

The parts of the processing method include the following three types:

The first processing method consists of the following steps (see Figure 20):

One. Preparation Step W1: Referring to Figures 1, 2, and 3, a working portion 10 and a laser light source 20 are prepared in advance. The working part 10 has a working space 10A, and a workpiece 90 is disposed therein; The workpiece 90 has a working surface 91 which is coated with a working fluid 30 which is a mixture of a polymer material and a solvent.

two. The droplet formation step W2: using the breath figure method, the working solution 30 is volatilized in the solvent (see FIG. 4) to become a polymer film 30A (see FIG. 5), and can be at the height On the molecular film 30A and the working surface 91, a plurality of droplets 40 are condensed, and the plurality of droplets 40 are used to form a lens portion M, and the lens portion M (that is, the plurality of droplets 40) is in contact with the working surface. 91. At least one of the polymer film 30A located in the polymer film 30A, wherein the breath diagram method is defined as supplying and supplying moisture in the working space 10A (as shown in FIG. 1). , the moisture is indicated by a hollow arrow, which is not numbered, and the first and second droplets 40 are the same component, and one part of the moisture is condensed into the plurality of droplets 40; The light transmittance of the polymer film 30A and the liquid droplets 40 is higher than 90%, and the relative volatilization speed of the liquid droplets 40 is lower than that of water.

In short, the plurality of droplets 40 may contact the working surface 91, or may be in the polymer film 30A or on the working surface 91, depending on the density between the droplet 40 and the polymer film 30A. In comparison, the present embodiment is such that the plurality of droplets 40 contact the polymer film 30A.

three. Laser processing step W3: the laser light source 20 is configured to emit a laser beam 21 (see FIGS. 6A and 6B) toward the lens portion M, and the lens portion M concentrates the laser energy on the working surface 91 ( On the polymer film 30A), at least one laser processing recess 911 is formed on the working surface 91 (see FIGS. 7 and 8).

The second processing method (see Figures 9, 10, 11, 12 and 13) differs from the first processing method only in that: in the droplet formation step W2, by the first breath In the drawing method, the plurality of water liquids 50 are condensed in the polymer film 30A to form a plurality of holes 51 (which may be formed into holes having a spherical shape in the lower portion); and then the plurality of holes 51 are filled in the holes The droplet 40 is formed to form the lens portion M. The manner in which the droplets 40 are filled can be carried out by applying air pressure or spin coating.

The third processing method (refer to FIG. 21) is mainly applied to the non-planar workpiece 90, and the difference from the first and second processing methods is:

[a] Preparation Step S1: A first working unit 10B and a second working unit 10C are prepared in advance (see FIGS. 14, 15, 16, and 17). The first working portion 10B has a first space 101 for accommodating the working fluid 30. The second working portion 10C has a second space 102 for accommodating a liquid 60. There is a 3D (eg, round, columnar, cylindrical, any irregular 3D surface shape) working surface 92.

[b] immersion step S2: immersing the workpiece 90 into the first space 101, and after the 3D working surface 92 is immersed in the working fluid 30, the first space 101 is taken out, and then, by using the respiratory diagram method, The water liquid 50 (this process is clearly described in the second processing method, which is omitted here, and the same) is formed on the polymer film 30A formed by the working liquid 30 to form a plurality of holes 51.

[c] spin coating step S3: immersing the position of the 3D working curved surface 92 forming the plurality of holes 51 into the liquid 60, and filling the liquid 60 into the plurality of holes in a (low speed) rotation manner 51.

[d] Rotation removal step S4: Referring to Fig. 18, the excess liquid 60 is removed by the (low speed) rotation method, and finally the corresponding droplets 60A are respectively provided in the plurality of holes 51.

[e] Finishing the lens portion Step S5: Referring to Fig. 19, the plurality of droplets 60A constitute the lens portion M, which can be used for subsequent laser processing.

The liquid 60 (including the liquid droplets 60A) is one of glycerin, a mixture of glycerin and water, and a liquid having a high surface tension which is not volatile and highly transparent.

The advantages and functions of the present invention are as follows:

[1] Changing the shape or arrangement of droplets can easily control changes in laser agglomeration or processing conditions. In the traditional laser processing, if you want to change the laser concentration (including focus and defocus) conditions, you must re-select different lens groups, the time and cost are relatively high. The invention uses droplets to be used as a lens group, and skillfully utilizes the prior art of the respiratory diagram method to control the arrangement of droplets required, or to utilize different compositions of droplets. To change the shape of the droplet and the contact angle, the laser aggregation conditions can be easily changed. Therefore, changing the droplet composition or the parameter conditions of the respiratory pattern method can easily control the change of laser aggregation or droplet arrangement conditions. Therefore, changing the shape or arrangement of the droplets can easily control the changing of laser concentration or processing conditions.

[2] Non-planar structures can also be laser processed micro-nano holes. The traditional breathing diagram method is mainly used for the workpiece to be processed in a plane. When the object to be processed has an irregular surface, it is not easy to generate minute droplets for laser (aggregation) processing. However, for the present invention, even if it is a curved surface, a cylindrical surface, or an irregular surface of any 3D working surface, the working fluid can be easily applied, and then the non-planar (for example, 3D working surface) of the object to be processed. In the above, a plurality of droplets are condensed as a lens portion for collecting laser light for laser processing. Therefore, non-planar structures can also be laser processed micro-nano holes.

The present invention has been described in detail with reference to the preferred embodiments of the present invention, without departing from the spirit and scope of the invention.

Claims (9)

A laser processing device for collecting laser light by using a droplet, comprising: a working portion having a working space, wherein a workpiece to be processed is disposed; the object to be processed has a working surface, and the working surface is covered with a working surface a working fluid; the working fluid is a mixture of a polymer material and a solvent; and the working fluid is volatilized in the solvent to form a polymer film by using a respiratory diagram method, and the polymer film and the working surface are And condensing a plurality of droplets for forming a lens portion, the lens portion contacting at least one of the working surface, the polymer film, and the polymer film, wherein The respiratory diagram system is defined as supplying and supplying moisture in the working space, the moisture is the same component as the plurality of droplets, and one part of the moisture is condensed into the plurality of droplets; The light transmittance of the polymer film and the liquid droplet is higher than 90%, and the relative volatilization speed of the liquid droplet is lower than water; a laser light source is used to emit a laser light toward the lens portion, the lens portion Focusing laser energy on the worksheet On, thereby enabling the working surface is formed of at least one laser processing recess. The processing device for collecting laser light by using a droplet according to the first aspect of the invention, wherein: the solvent of the working fluid is toluene; the polymer material of the working fluid is polymethyl methacrylate; It is selected from one of a mixture of glycerin, glycerin and water. The processing device for collecting laser light by using a droplet according to claim 2, wherein: the transmittance of each droplet is greater than 90%; and the relative volatilization velocity of each droplet is lower than water. A processing method for collecting laser light by using a droplet, comprising the following steps: Preparing step: preparing a working part and a laser light source in advance; the working part has a working space, and a workpiece to be processed therein; the workpiece to be processed has a working surface, which is covered with a working fluid, the work The liquid system is a mixture of a polymer material and a solvent; a droplet forming step: using a respiratory diagram method, the working fluid is evaporated into a polymer film after the solvent is volatilized, and a plurality of droplets can be condensed on the polymer film and the working surface, and the plurality of droplets are used Forming a lens portion that contacts at least one of the working surface, the polymer film, and the polymer film. The respiratory pattern is defined as being supplied in the working space. And supplying moisture, the moisture and the plurality of droplets being the same component, and one part of the moisture is condensed into the plurality of droplets; further, the transmittance of the polymer film and the droplet is higher than 90%, and the relative volatilization speed of the droplet is lower than water; Laser processing step: the laser light source is configured to emit a laser light toward the lens portion, and the lens portion concentrates the laser energy on the working surface to form at least one laser processing recess on the working surface. The processing method for collecting laser light by using a droplet according to the fourth aspect of the invention, wherein: the solvent of the working fluid is toluene; the polymer material of the working fluid is polymethyl methacrylate; It is selected from one of a mixture of glycerin, glycerin and water; the transmittance of each droplet is greater than 90; the relative volatilization rate of each droplet is lower than that of water. A processing method for collecting laser light by using a droplet, comprising the following steps: Preparing step: preparing a working part and a laser light source in advance; the working part has a working space, and a workpiece to be processed therein; the workpiece to be processed has a working surface, which is covered with a working fluid, the work The liquid system is a mixture of a polymer material and a solvent; a droplet forming step: using a first breath pattern method, the working fluid is evaporated into a polymer film after the solvent is volatilized, and a plurality of water liquids are condensed in the polymer film to form a plurality of holes; And filling the droplets in the plurality of holes to form a lens portion; the lens portion is in contact with the working surface, located in the polymer film, and at least one of the polymer films, wherein The respiratory diagram system is defined as supplying and supplying moisture in the working space, the moisture is the same component as the plurality of droplets, and one part of the moisture is condensed into the plurality of droplets; The transmittance of the polymer film and the droplet is higher than 90%, and the relative volatilization speed of the droplet is lower than water; Laser processing step: the laser light source is configured to emit a laser light toward the lens portion, and the lens portion concentrates the laser energy on the working surface to form at least one laser processing recess on the working surface. The processing method for collecting laser light by droplets according to claim 6, wherein: the solvent of the working fluid is toluene; the polymer material of the working fluid is polymethyl methacrylate; It is selected from one of a mixture of glycerin, glycerin and water; the transmittance of each droplet is greater than 90; the relative volatilization rate of each droplet is lower than that of water. A processing method for collecting laser light by using a droplet, comprising the following steps: Preparing step: preparing a first working part, a second working part and a laser light source; the first working part has a first space for accommodating a working fluid, the working liquid is a polymer material And a solvent mixture; the second working portion has a second space for accommodating a liquid; the first and the second space are for sequentially accommodating a workpiece to be processed, and the workpiece to be processed has a 3D working surface; The immersion step: immersing the object to be processed into the first space, and after the 3D working surface is covered with the working fluid, taking out the first space, and then, mixing a liquid solution, and using the first respiratory diagram method, After the solvent evaporates, the working fluid becomes a polymer film, and the plurality of water liquids are condensed in the polymer film to form a plurality of holes; a spin coating step: immersing the position of the 3D working surface forming the plurality of holes in the liquid, and rotating the liquid into the plurality of holes; Rotating removal step: using a rotating method to remove excess liquid, and finally having corresponding droplets in the plurality of holes; Completing the lens portion step: the plurality of droplets forming a lens portion for emitting a laser light toward the lens portion, thereby collecting laser energy on the 3D working surface to form on the 3D working surface At least one laser processing recess. The processing method for collecting laser light by using a droplet according to claim 8, wherein: the solvent of the working fluid is toluene; the polymer material of the working fluid is polymethyl methacrylate; It is selected from one of a mixture of glycerin, glycerin and water; the transmittance of each droplet is greater than 90; the relative volatilization rate of each droplet is lower than that of water.