TWI668065B - Solder powder, method for producing same, and method for preparing solder paste using the same - Google Patents

Solder powder, method for producing same, and method for preparing solder paste using the same Download PDF

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TWI668065B
TWI668065B TW105140255A TW105140255A TWI668065B TW I668065 B TWI668065 B TW I668065B TW 105140255 A TW105140255 A TW 105140255A TW 105140255 A TW105140255 A TW 105140255A TW I668065 B TWI668065 B TW I668065B
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powder
solder
copper
nickel
tin
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TW105140255A
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TW201739545A (en
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植杉隆二
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日商三菱綜合材料股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/16Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/24Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from liquid metal compounds, e.g. solutions
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/17Metallic particles coated with metal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/02Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
    • B23K35/0222Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
    • B23K35/0244Powders, particles or spheres; Preforms made therefrom
    • B23K35/025Pastes, creams, slurries
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • B23K35/262Sn as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/30Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
    • B23K35/302Cu as the principal constituent
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/40Making wire or rods for soldering or welding

Abstract

本發明課題係製作一種在保存時銅不會向錫擴散,粉末彼此間不會緊貼,且由鎳構成之擴散防止層及錫層的厚度不均較小的焊料粉末。 The subject of the present invention is to produce a solder powder in which copper does not diffuse into tin during storage, and the powders do not adhere to each other, and the thickness of the diffusion preventing layer and the tin layer composed of nickel are small.

解決手段為,對銅粉末的分散液添加混合鎳的金屬鹽,而得到溶有此金屬鹽且分散有銅粉末的第1溶解液。將此溶解液進行pH調整後,添加混合第1還原劑,使鎳離子還原,而得到析出的鎳被覆銅粉末而分散的分散液。將此液進行固液分離,將固體成分乾燥而得到由鎳構成之擴散防止層被覆銅核而成的金屬粉末。對金屬粉末的分散液添加混合錫的金屬鹽,而得到溶有此金屬鹽且分散有金屬粉末的第2溶解液。將此溶解液進行pH調整後,添加混合第2還原劑,使錫離子還原,而得到析出的錫被覆金屬粉末而分散的分散液。將此液進行固液分離,將固體成分乾燥而得到金屬粉末以錫層被覆的焊料粉末。 The solution is to add a metal salt of nickel mixed to the dispersion of the copper powder to obtain a first solution in which the metal salt is dissolved and copper powder is dispersed. After the pH of the solution was adjusted, a first reducing agent was added and the nickel ions were reduced to obtain a dispersion in which the precipitated nickel-coated copper powder was dispersed. This liquid was subjected to solid-liquid separation, and the solid component was dried to obtain a metal powder obtained by coating a copper core with a diffusion preventing layer made of nickel. A metal salt containing tin is added to the dispersion of the metal powder to obtain a second solution in which the metal salt is dissolved and the metal powder is dispersed. After the pH of the solution is adjusted, a second reducing agent is added and the tin ions are reduced to obtain a dispersion in which the precipitated tin is coated with the metal powder and dispersed. This liquid was subjected to solid-liquid separation, and the solid component was dried to obtain a solder powder in which the metal powder was coated with a tin layer.

Description

焊料粉末及其製造方法及使用此粉末之焊接用膏之調製方法 Solder powder, method for producing same, and method for preparing solder paste using the same

本發明係有關於一種用於電子零件等的安裝之中心核由銅構成、被覆層包含錫層的焊料粉末及其製造方法及使用此粉末之焊接用膏之調製方法。 The present invention relates to a solder powder comprising a center core for mounting an electronic component or the like, a solder layer comprising a tin layer, a method for producing the same, and a method for preparing a solder paste using the powder.

以往,已有人揭露一種中心核由銅構成、被覆層由錫構成的平均粒徑為5μm以下的焊料粉末(例如參照專利文獻1)。此焊料粉末,由環保而言為無鉛,且較為微細,因而印刷性優良。又,藉由構成中心核的金屬元素採用銅,於迴焊時不僅被覆層,連中心核也會熔融而形成Cu-Sn合金,因此,焊料的機械強度因形成之Cu-Sn合金而提升。 In the past, a solder powder having a center core of copper and a coating layer made of tin and having an average particle diameter of 5 μm or less has been disclosed (for example, see Patent Document 1). This solder powder is lead-free and environmentally friendly, and is fine, so that it is excellent in printability. Further, since the metal element constituting the central core is made of copper, not only the coating layer but also the central core is melted to form a Cu-Sn alloy during reflow, and therefore the mechanical strength of the solder is enhanced by the formed Cu-Sn alloy.

然而,專利文獻1所記載之中心核由銅構成、被覆層由錫構成的焊料粉末,在製造焊料粉末後經長時間保存時,由於銅向錫的擴散係數大於錫向銅的擴散係數,而有中心核的銅向被覆層的錫擴散,在中心核與被覆層之間形成Cu3Sn、Cu6Sn5等熔點較高的金屬間化合物 層、或中心核全部的銅向被覆層的錫中擴散而使被覆層全體形成銅與錫的金屬間化合物之虞。 However, in the case where the center core described in Patent Document 1 is made of copper and the coating layer is made of tin, the diffusion coefficient of copper to tin is larger than the diffusion coefficient of tin to copper when the solder powder is produced for a long period of time. The copper having the central core diffuses into the coating layer, and an intermetallic compound layer having a high melting point such as Cu 3 Sn or Cu 6 Sn 5 or a copper-coated layer of the central core is formed between the central core and the coating layer. In the middle, the entire coating layer forms an intermetallic compound of copper and tin.

為解決此點,有人揭露一種具備以Cu球構成之核層、與被覆此核層之以錫為主成分的焊接層,且在Cu球與焊接層之間形成有以Ni構成之擴散防止層的Cu核球(例如參見專利文獻2)。此擴散防止層係供防止構成Cu球的Cu向焊接層擴散。此專利文獻2中,作為於Cu球形成焊接層之方法,其示出周知之滾鍍等的電鍍法、連接於鍍敷槽的泵在鍍敷槽中使鍍敷液產生高速亂流,藉由鍍敷液的亂流而於Cu球形成鍍敷被膜之方法、藉由在電鍍槽設置振動板使其以既定的頻率振動,使鍍敷液經高速亂流攪拌,藉由鍍敷液的亂流而於Cu球形成鍍敷被膜之方法等,其中揭示對Cu球被覆Ni鍍層後,形成焊接層。 In order to solve this problem, there has been disclosed a solder layer having a core layer made of Cu balls and a tin-based solder layer covering the core layer, and a diffusion preventing layer made of Ni is formed between the Cu balls and the solder layer. Cu nucleus (see, for example, Patent Document 2). This diffusion preventing layer is for preventing diffusion of Cu constituting the Cu ball to the solder layer. In Patent Document 2, as a method of forming a solder layer on a Cu ball, a plating method such as a known barrel plating or a pump connected to a plating bath causes a high-speed turbulent flow of a plating solution in a plating tank. A method of forming a plating film on a Cu ball by a turbulent flow of a plating solution, and providing a vibration plate at a plating tank to vibrate at a predetermined frequency, thereby causing the plating solution to be stirred at a high speed by a high-speed turbulent flow, by a plating solution A method of forming a plating film on a Cu ball by turbulent flow, etc., in which it is disclosed that a Cu layer is coated with a Ni plating layer to form a solder layer.

又,專利文獻2中記載,焊接層係含有40%以上的Sn,且含有20ppm以上220ppm以下的Ge,對直徑100μm的Cu球被覆膜厚(單側)2μm的Ni鍍層後,形成膜厚(單側)18μm的Sn-Ag-Cu-Ge焊接鍍敷被膜,顯示直徑約140μm的Cu核球。 Further, Patent Document 2 discloses that the solder layer contains 40% or more of Sn and contains 20 ppm or more of 220 ppm or less of Ge, and a Cu plating layer having a diameter of 100 μm is coated with a film thickness of 1 μm (one side) of Ni plating layer to form a film thickness. (Single side) 18 μm Sn-Ag-Cu-Ge solder plating film, showing Cu nuclear spheres having a diameter of about 140 μm.

〔先前技術文獻〕 [Previous Technical Literature] 〔專利文獻〕 [Patent Document]

[專利文獻1]日本特開2008-138266號公報(請求項1、段落[0005]、段落[0014]) [Patent Document 1] Japanese Laid-Open Patent Publication No. 2008-138266 (Request Item 1, Paragraph [0005], Paragraph [0014])

[專利文獻2]日本專利第5652560號公報(請求項1、段落[0033]、段落[0035]、段落[0067]、段落[0068]) [Patent Document 2] Japanese Patent No. 5652560 (Request Item 1, Paragraph [0033], Paragraph [0035], Paragraph [0067], Paragraph [0068]

然而,如專利文獻2所記載,在以藉由滾鍍法等的鍍鎳而以Ni構成的擴散防止層被覆Cu球的方法中,因球彼此緊貼而容易形成凝聚的球,且有鍍敷被膜的膜厚易發生不均的缺點。又,將Cu球(銅核)的半徑設為1時,專利文獻2所示之Cu核球之由Ni構成的擴散防止層其厚度為0.02的比率,因此有不易防止Cu向錫擴散的問題。 However, as described in Patent Document 2, in the method of coating a Cu ball by a diffusion preventing layer made of Ni by nickel plating by a barrel plating method or the like, the balls are easily adhered to each other due to the close contact of the balls, and plating is performed. The film thickness of the applied film is liable to cause unevenness. In addition, when the radius of the Cu ball (copper core) is set to 1, the thickness of the diffusion preventing layer made of Ni of the Cu core ball shown in Patent Document 2 is 0.02, so that it is difficult to prevent the diffusion of Cu into tin. .

本發明第1目的在於提供一種製造在粉末保存時中心核的銅不會向錫層的錫擴散,粉末彼此不會緊貼,且由鎳構成之擴散防止層的厚度不均較小的焊料粉末之方法及使用此粉末之焊接用膏。又,本發明第2目的在於提供一種將經長時間保存之焊料粉末在保存前或保存期間較短的焊料粉末熔融的溫度下進行迴焊,也不會產生焊料未充分熔融所引起的接合不良的焊料粉末及其製造方法及使用此粉末之焊接用膏之調製方法。再者,本發明之第3目的在於提供一種迴焊後,不易發生再熔融及接合強度的降低,尤其適於需暴露於高溫環境之電子零件等的安裝的焊料粉末及其製造方法及使用此粉末之焊接用膏之調製方法。 A first object of the present invention is to provide a solder powder which is produced by dispersing copper which does not penetrate into the tin layer during the storage of the powder, does not adhere to each other, and has a small thickness unevenness of the diffusion preventing layer made of nickel. The method and the welding paste using the powder. Further, a second object of the present invention is to provide a reflow process in which solder powder which has been stored for a long period of time is reflowed at a temperature at which solder powder which is short before storage or during storage is melted, and which does not cause insufficient bonding due to insufficient solder melting. A solder powder, a method for producing the same, and a method for preparing a solder paste using the powder. Further, a third object of the present invention is to provide a solder powder which is less likely to cause remelting and a decrease in joint strength after reflow, and is particularly suitable for mounting an electronic component or the like which is required to be exposed to a high temperature environment, a method for producing the same, and a method for producing the same. A method of preparing a paste for soldering of powder.

本發明第1觀點係如第1圖所示,為一種焊料粉末之製造方法,其係包含:調製分散有銅粉末的第1分散液之步驟S1;將鎳的金屬鹽添加混合於銅粉末的第1分散液而調製溶有鎳的金屬鹽且分散有銅粉末的第1溶解液之步驟S2;調整第1溶解液的pH之步驟S3;藉由對經pH調整之第1溶解液添加混合第1還原劑,使鎳離子還原,而調製析出的鎳被覆銅粉末而分散的第2分散液之步驟S4;將第2分散液進行固液分離,並將經固液分離之固體成分乾燥而製作由鎳構成之擴散防止層被覆銅核而成的金屬粉末之步驟S5;調製分散有此金屬粉末的第3分散液之步驟S6;將錫的金屬鹽添加混合於金屬粉末的第3分散液而調製溶有錫的金屬鹽且分散有金屬粉末的第2溶解液之步驟S7;調整前述第2溶解液的pH之步驟S8;藉由對此經pH調整之第2溶解液添加混合第2還原劑,使錫離子還原,而調製析出的錫被覆金屬粉末而分散的第4分散液之步驟S9;及將第4分散液進行固液分離,並將經固液分離之固體成分乾燥而製作金屬粉末以錫層被覆的焊料粉末之步驟S10。 According to a first aspect of the invention, there is provided a method for producing a solder powder comprising: a step S1 of preparing a first dispersion liquid in which copper powder is dispersed; and a metal salt of nickel added to the copper powder. a first dispersion liquid to prepare a first dissolving solution in which a metal salt of nickel is dissolved and in which copper powder is dispersed; a step S2 of adjusting the pH of the first dissolving liquid; and a step S3 of adjusting the pH of the first dissolving liquid; and adding and mixing the pH-adjusted first dissolving liquid In the first reducing agent, the nickel ion is reduced to prepare a second dispersion liquid in which the precipitated nickel is coated with the copper powder, and the second dispersion liquid is subjected to solid-liquid separation, and the solid component separated by solid-liquid separation is dried. Step S5 of preparing a metal powder obtained by coating a copper core with a diffusion preventing layer made of nickel; preparing a third dispersion liquid in which the metal powder is dispersed; and adding a metal salt of tin to the third dispersion of the metal powder a step S7 of preparing a second metal solution in which a metal salt of tin is dispersed and dispersing a metal powder; a step S8 of adjusting the pH of the second solution; and a second addition of the pH-adjusted second solution; Reducing agent to reduce tin ions and prepare for precipitation Step S9 of dispersing the fourth dispersion liquid in which tin is coated with the metal powder; and solid-liquid separation of the fourth dispersion liquid, and drying the solid component separated by solid-liquid separation to prepare a solder powder in which the metal powder is coated with a tin layer Step S10.

本發明第2觀點係如第2圖所示,為一種由鎳構成之擴散防止層12被覆銅核11而成的金屬粉末13以錫層14被覆的焊料粉末10。其具特徵之構成在於,前述焊料粉末的平均粒徑為1μm以上30μm以下,相對於前 述焊料粉末的總量100質量%,銅的含有比例為2質量%以上70質量%以下,將前述銅核的半徑設為1時,前述由鎳構成之擴散防止層的厚度為0.04以上0.51以下的比率。 According to the second aspect of the present invention, as shown in FIG. 2, the metal powder 13 in which the diffusion preventing layer 12 made of nickel is coated with the copper core 11 is coated with the solder powder 10 of the tin layer 14. It is characterized in that the solder powder has an average particle diameter of 1 μm or more and 30 μm or less, relative to the front. The total amount of the solder powder is 100% by mass, and the content ratio of copper is 2% by mass or more and 70% by mass or less. When the radius of the copper core is 1, the thickness of the diffusion preventing layer made of nickel is 0.04 or more and 0.51 or less. The ratio.

本發明第3觀點為一種方法,其係藉由將依第1觀點之方法所製成的焊料粉末或者如第2觀點之焊料粉末與焊接用助焊劑混合予以膏體化來調製焊接用膏。 According to a third aspect of the present invention, there is provided a method of preparing a solder paste by mixing a solder powder prepared by the method according to the first aspect or a solder powder of the second aspect with a soldering flux.

本發明第4觀點為一種方法,其係使用依第3觀點之方法所製成的焊接用膏來安裝電子零件。 A fourth aspect of the present invention is a method of mounting an electronic component using a solder paste prepared by the method of the third aspect.

本發明第1觀點之焊料粉末之製造方法係將由鎳構成之擴散防止層,藉由將分散有銅粉末的第1溶解液中之鎳離子還原,而形成於銅核的表面,並將錫層形成於由鎳構成之擴散防止層被覆銅核而成的金屬粉末的表面,藉此製造焊料粉末。其結果,有別於專利文獻2所記載之滾鍍法等方法,就焊料粉末的層構造,各個粉末的不均度較小,粉末彼此不會緊貼,且由鎳構成之擴散防止層的厚度不均亦小。 In the method for producing a solder powder according to the first aspect of the present invention, the diffusion preventing layer made of nickel is formed on the surface of the copper core by reducing nickel ions in the first solution in which the copper powder is dispersed, and the tin layer is formed. A solder powder is produced by forming a surface of a metal powder formed by coating a copper core with a diffusion preventing layer made of nickel. As a result, unlike the method such as the barrel plating method described in Patent Document 2, the layer structure of the solder powder is such that the unevenness of each powder is small, the powders do not adhere to each other, and the diffusion preventing layer made of nickel is used. The thickness is not uniform.

如第2圖所示,本發明第2觀點之焊料粉末10,由鎳構成之擴散防止層12被覆銅核11而成的金屬粉末13經錫層14被覆,將銅核的半徑設為1時,由鎳構成之擴散防止層12的厚度為0.04以上0.51以下的比率。亦即,於本發明之焊料粉末10中,由於在銅核11與錫層 14之間插入設置有既定厚度的由鎳構成之擴散防止層12,不會大幅改變習知由銅核與被覆其之錫層所構成之焊料粉末的焊接特性,不但可防止中心核的銅向錫層的錫擴散,還可防止錫層的錫向中心核的銅擴散。其結果,可發揮將經長時間保存之焊料粉末在保存前或保存期間較短的焊料粉末熔融的溫度下進行迴焊,也不會產生焊料未充分熔融所引起的接合不良之優良的效果。又,迴焊後,由於會形成由Cu3Sn、Cu6Sn5、Ni3Sn、Ni3Sn2、Ni3Sn4、NiSn3、(Ni,Cu)3Sn4、(Ni,Cu)6Sn5等熔點較高的金屬間化合物及銅構成之接合層,因此,迴焊後,不易發生再熔融及接合強度的降低,尤其適合安裝於需暴露於高溫環境的電子零件等。 As shown in Fig. 2, in the solder powder 10 according to the second aspect of the present invention, the metal powder 13 obtained by coating the copper core 11 with the diffusion preventing layer 12 made of nickel is covered with the tin layer 14, and the radius of the copper core is set to 1 The thickness of the diffusion preventing layer 12 made of nickel is a ratio of 0.04 or more and 0.51 or less. That is, in the solder powder 10 of the present invention, since the diffusion preventing layer 12 made of nickel having a predetermined thickness is interposed between the copper core 11 and the tin layer 14, the conventional copper core and the coating are not greatly changed. The soldering property of the solder powder formed of the tin layer not only prevents the diffusion of tin from the central core to the tin layer, but also prevents the tin of the tin layer from diffusing to the central core. As a result, it is possible to perform reflow soldering at a temperature at which the solder powder which has been stored for a long period of time is melted before the storage or the storage period is short, and it is excellent in the joint failure caused by insufficient solder melting. Further, after reflow, Cu 3 Sn, Cu 6 Sn 5 , Ni 3 Sn, Ni 3 Sn 2 , Ni 3 Sn 4 , NiSn 3 , (Ni, Cu) 3 Sn 4 , (Ni, Cu) are formed. 6 Intermetallic compound such as Sn 5 and a bonding layer made of copper. Therefore, after reflow, remelting and reduction of joint strength are less likely to occur, and it is particularly suitable for mounting on electronic parts that are exposed to a high temperature environment.

依本發明第3觀點之方法所調製的焊接用膏係使用上述本發明之焊料粉末而得。因此,此焊接用膏其於迴焊時迅速熔融,熔融性優良。 The solder paste prepared by the method of the third aspect of the present invention is obtained by using the above-described solder powder of the present invention. Therefore, this solder paste is rapidly melted at the time of reflow, and is excellent in meltability.

於本發明第4觀點之安裝電子零件的方法中,由於係使用上述本發明之焊接用膏,於迴焊時焊接用膏迅速熔融,熔融性優良,故可簡便地以高精度安裝電子零件。安裝有此電子零件之接合體,於迴焊時不僅被覆層,連中心核也會熔融而形成Cu-Sn合金或Sn-Ni-Cu合金,因此,藉由形成之Cu-Sn合金或Sn-Ni-Cu合金,於焊料接合後即使暴露於高溫環境下,也不易引起再熔融及接合強度的降低。 In the method of mounting an electronic component according to the fourth aspect of the present invention, since the solder paste of the present invention is used, the solder paste is rapidly melted during reflow, and the meltability is excellent, so that the electronic component can be easily mounted with high precision. The joint body on which the electronic component is mounted is not only coated but also the central core is melted to form a Cu-Sn alloy or a Sn-Ni-Cu alloy during reflow, and therefore, a Cu-Sn alloy or Sn- formed by the Cu-Sn alloy or Sn- The Ni-Cu alloy is less likely to cause remelting and a decrease in joint strength even after exposure to a high temperature environment after solder bonding.

10‧‧‧焊料粉末 10‧‧‧ solder powder

11‧‧‧銅核 11‧‧‧ copper core

12‧‧‧由鎳構成之擴散防止層 12‧‧‧Diffusion prevention layer composed of nickel

13‧‧‧金屬粉末 13‧‧‧Metal powder

14‧‧‧錫層 14‧‧‧ tin layer

第1圖為表示本實施形態之焊料粉末之製造步驟的圖。 Fig. 1 is a view showing a manufacturing procedure of the solder powder of the embodiment.

第2圖為本實施形態之由鎳構成之擴散防止層被覆銅核而成的金屬粉末以錫層被覆的焊料粉末的剖面構造圖。 Fig. 2 is a cross-sectional structural view of a solder powder in which a metal powder obtained by coating a copper core with a diffusion preventing layer made of nickel is coated with a tin layer.

〔實施發明之形態〕 [Formation of the Invention]

以下基於圖式來說明實施本發明之形態。 The form in which the present invention is carried out will be described below based on the drawings.

〔焊料粉末之製造方法〕 [Method of Manufacturing Solder Powder]

為形成中心核而使用銅粉末。首先,如第1圖之步驟S1及S2所示,將銅粉末與分散劑添加混合於溶媒而調製分散有銅粉末的第1分散液,對其添加混合含鎳化合物並使銅粉末分散,而調製溶有含鎳化合物的第1溶解液。此銅粉末較佳具有0.1μm以上27μm以下的平均粒徑。若未達此下限值,焊料粉末的平均粒徑有未達1μm之傾向,比表面積增高,因粉末之表面氧化層的影響而使焊料的熔融性降低。又,若超出上限值,則焊料粉末的平均粒徑易超過30μm。超過30μm時,在形成凸塊時會產生凸塊的共面性降低的缺點,而且,在以焊料塗覆圖型表面時會發生塗佈不均,而產生無法均勻地塗覆圖型整面的缺點。銅粉末的平均粒徑更佳為2~20μm。此銅粉末,除了能以藉 由還原反應的化學手法獲得,還可藉由如原子化法等的物理手法獲得。此外,於本說明書中,粉末的平均粒徑係指以採用雷射繞射散射法之粒度分布測定裝置(堀場製作所公司製,雷射繞射/散射式粒徑分布測定裝置LA-950)所測得的體積累積中位徑(Median徑,D50)。 Copper powder is used to form the central core. First, as shown in steps S1 and S2 of Fig. 1, a copper powder and a dispersing agent are added to a solvent to prepare a first dispersion liquid in which copper powder is dispersed, and a nickel-containing compound is added and mixed to disperse the copper powder. The first solution in which the nickel-containing compound is dissolved is prepared. The copper powder preferably has an average particle diameter of 0.1 μm or more and 27 μm or less. If the lower limit is not reached, the average particle diameter of the solder powder tends to be less than 1 μm, and the specific surface area is increased, and the meltability of the solder is lowered by the influence of the surface oxide layer of the powder. Moreover, if it exceeds the upper limit, the average particle diameter of the solder powder easily exceeds 30 μm. When the thickness exceeds 30 μm, the coplanarity of the bumps is lowered when the bumps are formed, and coating unevenness occurs when the surface of the pattern is coated with solder, and the entire surface of the pattern cannot be uniformly coated. Shortcomings. The average particle diameter of the copper powder is more preferably 2 to 20 μm. This copper powder can be borrowed It is obtained by a chemical method of a reduction reaction, and can also be obtained by a physical method such as an atomization method. In addition, in the present specification, the average particle diameter of the powder refers to a particle size distribution measuring apparatus (Radio Diffraction/Scattering Particle Size Distribution Measuring Apparatus LA-950, manufactured by Horiba, Ltd.) using a laser diffraction scattering method. The measured volume cumulative median diameter (Median diameter, D50).

第1溶解液中之銅粉末及鎳化合物的比例係於焊料粉末製造後,調整成各金屬元素的含有比例為後述之範圍。作為鎳化合物,可舉出氯化鎳(II)、硫酸鎳(II)、硝酸鎳(II)等。作為溶媒,可舉出水、醇、醚、酮、酯等。又,作為分散劑,可舉出纖維素系、乙烯基系、多元醇等,其他可使用明膠、酪蛋白等。 The ratio of the copper powder and the nickel compound in the first dissolution liquid is adjusted so that the content ratio of each metal element is a range described later after the production of the solder powder. Examples of the nickel compound include nickel (II) chloride, nickel (II) sulfate, and nickel (II) nitrate. Examples of the solvent include water, alcohol, ether, ketone, ester, and the like. Further, examples of the dispersing agent include cellulose, vinyl, and polyhydric alcohol, and gelatin, casein, and the like can be used.

如第1圖之步驟S3所示,進行所調製之第1溶解液的pH調整。pH較佳考量生成之焊料粉末的再溶解等,而調整於0.1~2.0的範圍。此外,亦可對溶媒添加上述鎳化合物使其溶解後,加入錯合劑將鎳錯合後,再添加分散劑。藉由添加錯合劑,pH即使處於鹼側,鎳離子也不會沉澱,可於較廣的範圍進行合成。作為錯合劑,可舉出琥珀酸、酒石酸、乙醇酸、乳酸、鄰苯二甲酸、蘋果酸、檸檬酸、草酸、乙二胺四乙酸、亞胺基二乙酸、氮基三乙酸或其鹽等。 The pH adjustment of the prepared first solution is performed as shown in step S3 of Fig. 1 . The pH is preferably measured in the range of 0.1 to 2.0 by re-dissolving the generated solder powder. Further, after dissolving the above nickel compound in a solvent and dissolving the nickel, a dislocation agent may be added to the mixture, and then a dispersing agent may be added. By adding a miscending agent, even if the pH is on the alkali side, nickel ions are not precipitated, and synthesis can be carried out over a wide range. Examples of the blocking agent include succinic acid, tartaric acid, glycolic acid, lactic acid, phthalic acid, malic acid, citric acid, oxalic acid, ethylenediaminetetraacetic acid, iminodiacetic acid, nitrogen triacetic acid or a salt thereof. .

其次,調製溶有還原劑的水溶液,將此水溶液的pH調整成與第1溶解液同等程度。作為還原劑,可舉出次膦酸鈉等的磷酸系化合物、四氫硼酸鈉、二甲基胺硼烷等的硼氫化物、肼等的氮化合物、三價鈦離子或二價 鉻離子等的金屬離子等。 Next, an aqueous solution in which a reducing agent is dissolved is prepared, and the pH of the aqueous solution is adjusted to the same level as that of the first solution. Examples of the reducing agent include a phosphoric acid compound such as sodium phosphinate, a borohydride such as sodium tetrahydroborate or dimethylamine borane, a nitrogen compound such as hydrazine, a trivalent titanium ion or a divalent compound. Metal ions such as chromium ions.

其次,如第1圖之步驟S4所示,藉由對上述含鎳離子的第1溶解液中添加還原劑水溶液予以混合,使第1溶解液中的鎳離子還原,而調製析出的鎳被覆銅粉末而分散的第2分散液。作為混合第1溶解液與還原劑水溶液之方法,可舉出向容器內的溶解液以既定的添加速度滴下還原劑水溶液,再以攪拌器等進行攪拌的方法;使用具有既定口徑的反應管,對此反應管內以既定的流量注入兩液,而使其混合的方法等。 Next, as shown in step S4 of Fig. 1, by adding a reducing agent aqueous solution to the first solution containing nickel ions, the nickel ions in the first solution are reduced to prepare nickel precipitated copper. The second dispersion liquid dispersed in powder. As a method of mixing the first solution and the reducing agent aqueous solution, a method of dropping a reducing agent aqueous solution into a solution in a container at a predetermined addition rate and stirring it with a stirrer or the like; and using a reaction tube having a predetermined diameter, A method of injecting two liquids at a predetermined flow rate in the reaction tube, and mixing them.

其次,如第1圖之步驟S5所示,將此第2分散液藉由傾析等進行固液分離,以水或pH經調整成0.5~2的鹽酸水溶液、硝酸水溶液、硫酸水溶液、或者甲醇、乙醇、丙酮等洗淨回收之固體成分。洗淨後,再度進行固液分離並回收固體成分。較佳重複洗淨至固液分離之步驟2~5次。藉由對回收之固體成分進行真空乾燥,而製作以由銅構成之中心核(銅核)與被覆此中心核之鎳層(由鎳構成之擴散防止層)所構成的Cu核附有Ni層之金屬粉末。 Next, as shown in step S5 of Fig. 1, the second dispersion is subjected to solid-liquid separation by decantation or the like, and adjusted to 0.5 to 2 aqueous hydrochloric acid, nitric acid aqueous solution, sulfuric acid aqueous solution, or methanol by water or pH. The solid components recovered by washing, ethanol, acetone, etc. After washing, the solid-liquid separation was again performed and the solid content was recovered. It is preferred to repeat the washing to the solid-liquid separation step 2 to 5 times. By vacuum drying the recovered solid component, a Cu core composed of a central nucleus (copper core) made of copper and a nickel layer (a diffusion preventing layer made of nickel) covering the central nucleus is formed with a Ni layer. Metal powder.

其次,如第1圖之步驟S6及S7所示,將上述金屬粉末與分散劑添加混合於溶媒而調製分散有Cu核附有Ni層之金屬粉末的第3分散液,對其添加混合含錫化合物並使Cu核附有Ni層之金屬粉末分散,而調製溶有含錫化合物的第2溶解液。作為錫化合物,可舉出氯化錫(II)、硫酸錫(II)、乙酸錫(II)、草酸錫(II)等。 含錫化合物的添加比例係於焊料粉末製造後調整成各金屬元素的含有比例為後述之範圍。分散媒及溶媒可使用與上述相同的分散媒及溶媒。 Next, as shown in steps S6 and S7 of Fig. 1, the metal powder and the dispersing agent are added to the solvent to prepare a third dispersion in which the metal powder having the Cu core and the Ni layer is dispersed, and the mixed tin is added thereto. The compound disperses the metal powder in which the Cu core is attached with the Ni layer, and prepares the second solution in which the tin-containing compound is dissolved. Examples of the tin compound include tin (II) chloride, tin (II) sulfate, tin (II) acetate, and tin (II) oxalate. The addition ratio of the tin-containing compound is adjusted so that the content ratio of each metal element after the production of the solder powder is a range described later. As the dispersion medium and the solvent, the same dispersion medium and solvent as described above can be used.

如第1圖之步驟S8所示,進行所調製之第2溶解液的pH調整。pH較佳考量生成之焊料粉末的再溶解等,而調整於0.1~2.0的範圍。此外,亦可對溶媒添加上述錫化合物使其溶解後,加入錯合劑將錫錯合後,再添加分散劑。藉由添加錯合劑,pH即使處於鹼側,錫離子也不會沉澱,可於較廣的範圍進行合成。作為錯合劑,可使用與上述相同的錯合劑。 The pH adjustment of the prepared second solution is performed as shown in step S8 of Fig. 1 . The pH is preferably measured in the range of 0.1 to 2.0 by re-dissolving the generated solder powder. Further, after adding the above tin compound to a solvent to dissolve it, a dislocation agent may be added to align the tin, and then a dispersant may be added. By adding a miscending agent, even if the pH is on the alkali side, tin ions are not precipitated, and synthesis can be carried out over a wide range. As the blocking agent, the same complexing agent as described above can be used.

其次,如第1圖之步驟S9所示,藉由對上述含錫離子的第2溶解液以與上述之方法相同的方法添加混合溶有與上述之還原劑相同的還原劑的還原劑水溶液,使第2溶解液中的錫離子還原,而調製析出的錫被覆Cu核附有Ni層之金屬粉末而分散的第4分散液。 Next, as shown in step S9 of Fig. 1, a reducing agent aqueous solution in which the same reducing agent as the above reducing agent is dissolved is added to the second solution containing the tin ions in the same manner as the above-described method. The tin ion in the second solution is reduced, and the precipitated tin is coated with a fourth dispersion in which the Cu core is coated with the metal powder of the Ni layer and dispersed.

最終,如第1圖之步驟S10所示,將此第4分散液,以與上述之方法相同的方法洗淨並進行固液分離,回收固體成分。較佳重複洗淨至固液分離之步驟2~5次。藉由對回收之固體成分進行真空乾燥,而製作以錫層被覆Cu核附有Ni層之金屬粉末的焊料粉末。 Finally, as shown in step S10 of Fig. 1, the fourth dispersion liquid is washed in the same manner as the above-described method, and subjected to solid-liquid separation to recover a solid component. It is preferred to repeat the washing to the solid-liquid separation step 2 to 5 times. A solder powder in which a metal powder having a Cu layer and a Ni layer is coated with a tin layer is formed by vacuum drying the recovered solid component.

〔焊料粉末〕 [solder powder]

如第2圖所示,以上述方法所製作之焊料粉末10,由鎳構成之擴散防止層12被覆中心核之銅核11而成的金 屬粉末13係以錫層14被覆。由於此焊料粉末係如此形成為由銅構成之中心核以熔點較低的錫層之被覆層被覆之構造,迴焊時的熔融性優良。又,由於在構成粉末的一個金屬粒子內,包含銅與錫,因而不易發生迴焊時的熔融不均或組成偏差,可獲得較高的接合強度。再者,由於焊料粉末在中心核與被覆層之間具有由鎳構成之擴散防止層,可防止銅向錫的擴散及錫向銅的擴散。更且,迴焊後,由於會形成由Cu3Sn、Cu6Sn5、Ni3Sn、Ni3Sn2、Ni3Sn4、NiSn3、(Ni,Cu)3Sn4、(Ni,Cu)6Sn5等熔點較高的金屬間化合物及銅構成之接合層,因此,迴焊後,不易發生再熔融及接合強度的降低,尤其適合安裝於需暴露於高溫環境的電子零件等。 As shown in Fig. 2, the solder powder 10 produced by the above method is coated with a tin layer 14 by a metal powder 13 in which a diffusion preventing layer 12 made of nickel is coated with a copper core 11 of a center core. Since the solder powder is formed such that the center core made of copper is coated with a coating layer of a tin layer having a low melting point, the meltability at the time of reflow is excellent. Further, since copper and tin are contained in one metal particle constituting the powder, melting unevenness or composition variation at the time of reflow is less likely to occur, and high joint strength can be obtained. Further, since the solder powder has a diffusion preventing layer made of nickel between the center core and the coating layer, diffusion of copper into tin and diffusion of tin into copper can be prevented. Further, after reflow, Cu 3 Sn, Cu 6 Sn 5 , Ni 3 Sn, Ni 3 Sn 2 , Ni 3 Sn 4 , NiSn 3 , (Ni, Cu) 3 Sn 4 , (Ni, Cu) are formed. ) 6 Intermetallic compound with a high melting point such as Sn 5 and a bonding layer made of copper. Therefore, remelting and reduction of joint strength are less likely to occur after reflow, and it is particularly suitable for mounting on electronic parts that are exposed to a high temperature environment.

由鎳構成之擴散防止層12,將銅核的半徑設為1時,其厚度為0.04以上0.51以下的比率。較佳為0.05以上0.20以下的比率。若未達0.04則無法防止銅或錫的擴散,而超過0.51則焊料粉末的熔融性會降低。 When the radius of the copper core is set to 1, the diffusion preventing layer 12 made of nickel has a thickness of 0.04 or more and 0.51 or less. It is preferably a ratio of 0.05 or more and 0.20 or less. If it is less than 0.04, the diffusion of copper or tin cannot be prevented, and if it exceeds 0.51, the meltability of the solder powder is lowered.

由此 thus

以上述方法所製作之焊料粉末10其平均粒徑為1μm以上30μm以下。將焊料粉末的平均粒徑限定於1μm以上30μm以下,係根據上述之理由。 The solder powder 10 produced by the above method has an average particle diameter of 1 μm or more and 30 μm or less. The reason why the average particle diameter of the solder powder is limited to 1 μm or more and 30 μm or less is based on the above reasons.

又,以上述方法所製作之焊料粉末10,相對於粉末的總量100質量%,銅的含有比例為2質量%以上70質量%以下。以往的焊料粉末,由於係作為Sn-Pb系共晶焊料(組成比Sn:Pb=63:37質量%)的替代品使 用,因此,基於熔點相近、要求共晶組成之理由,而使銅的比例以0.5~1.5質量%的比例含有。另一方面,以上述方法所製作之焊料粉末,較此使其含有高於2質量%,由此,於迴焊後,會形成具有880~600℃左右之較高凝固起始溫度的Sn-Cu合金或具有800~400℃左右之較高凝固起始溫度的Sn-Ni-Cu合金。此外,銅的含有比例即使較少,迴焊後,仍會形成凝固起始溫度比錫更高的Sn-Cu合金或Sn-Ni-Cu合金,而藉由使其含有更多的銅,凝固起始溫度會進一步提高是因為在合金中具有高熔點之金屬間化合物的比率進一步提高之故。藉此,以包含此焊料粉末的焊接用膏之迴焊所形成的焊料凸塊,耐熱性大幅提升,可防止再熔融及接合強度的降低。因此,尤其可適用於作為用於需暴露於高溫環境之電子零件等的安裝的高溫焊料。銅的含有比例若未達2質量%,由於凝固起始溫度變低,迴焊後所形成的焊料凸塊無法獲得充分的耐熱性,在高溫環境下使用時會發生再熔融,而無法作為高溫焊料使用。另一方面,若超過70質量%則凝固起始溫度會過高,焊料無法充分熔融,而產生發生接合不良之缺點。其中,粉末的總量100質量%中所占之銅的含有比例較佳取10~60質量%。 In addition, the solder powder 10 produced by the above method has a copper content of 2% by mass or more and 70% by mass or less based on 100% by mass of the total amount of the powder. The conventional solder powder is used as a substitute for Sn-Pb eutectic solder (composition ratio Sn: Pb = 63: 37% by mass). Therefore, the ratio of copper is contained in a ratio of 0.5 to 1.5% by mass based on the reason that the melting point is close and the eutectic composition is required. On the other hand, the solder powder produced by the above method is more than 2% by mass, whereby after reflowing, Sn having a higher solidification initiation temperature of about 880 to 600 ° C is formed. A Cu alloy or a Sn-Ni-Cu alloy having a higher solidification initiation temperature of about 800 to 400 °C. In addition, even if the content ratio of copper is small, after reflow, a Sn-Cu alloy or a Sn-Ni-Cu alloy having a higher solidification initiation temperature than tin is formed, and solidified by containing more copper. The initial temperature is further increased because the ratio of the intermetallic compound having a high melting point in the alloy is further increased. Thereby, the solder bump formed by the reflow of the solder paste containing the solder powder is greatly improved in heat resistance, and remelting and reduction in bonding strength can be prevented. Therefore, it is particularly applicable to high-temperature solder which is used for mounting of electronic parts or the like which are required to be exposed to a high-temperature environment. If the content ratio of copper is less than 2% by mass, since the solidification initiation temperature becomes low, the solder bump formed after reflowing cannot obtain sufficient heat resistance, and remelting occurs in a high-temperature environment, and cannot be used as a high temperature. Solder is used. On the other hand, if it exceeds 70% by mass, the solidification initiation temperature is too high, and the solder cannot be sufficiently melted, which causes a disadvantage of occurrence of joint failure. Among them, the content of copper in 100% by mass of the total amount of the powder is preferably from 10 to 60% by mass.

再者,相對於焊料粉末的總量100質量%,焊料粉末中之鎳的含有比例為1質量%以上且未達15質量%,較佳為2~10質量%。依據此含有比例,而決定前述之由鎳構成之擴散防止層的厚度。鎳的含有比例若未達1 質量%,不易防止銅或錫的擴散;若超過15質量%,則會產生焊料粉末的熔融性降低的缺點。 In addition, the content ratio of nickel in the solder powder is 1% by mass or more and less than 15% by mass, and preferably 2 to 10% by mass, based on 100% by mass of the total amount of the solder powder. Based on this content ratio, the thickness of the diffusion preventing layer made of nickel described above is determined. If the content of nickel is less than 1 When the mass is %, it is difficult to prevent the diffusion of copper or tin; if it exceeds 15% by mass, the meltability of the solder powder is lowered.

再者,焊料粉末中之錫的含有比例,粉末中之上述銅及鎳以外的其餘部分,即相對於焊料粉末的總量100質量%為29質量%以上且未達97質量%,較佳為40~90質量%。這是因為,錫的含有比例若未達29質量%,於迴焊時不會顯示焊料粉末所需要的低熔點。又,若為97質量%以上,結果銅的含有比例減少,迴焊後所形成之焊料凸塊的耐熱性會降低。亦即,安裝後的焊料一暴露於高溫環境下,安裝後的焊料便發生再熔融、或於焊料的一部分生成液相,而有與基板等的接合強度降低之虞。 In addition, the content of the tin in the solder powder is preferably 29% by mass or more and less than 97% by mass based on 100% by mass of the total amount of the solder powder in the powder, and the remainder other than the copper and nickel in the powder. 40 to 90% by mass. This is because if the content ratio of tin is less than 29% by mass, the low melting point required for the solder powder is not exhibited at the time of reflow. In addition, when it is 97% by mass or more, the content ratio of copper is decreased, and the heat resistance of the solder bump formed after the reflow is lowered. In other words, when the solder after the mounting is exposed to a high temperature environment, the solder after the mounting is remelted or a liquid phase is formed in a part of the solder, and the bonding strength with the substrate or the like is lowered.

〔焊接用膏及其調製方法〕 [Welding paste and its preparation method]

以上述方法所製作之焊料粉末係適用於作為與焊接用助焊劑混合經膏體化而得到的焊接用膏之材料。焊接用膏的調製係藉由將焊料粉末與焊接用助焊劑以既定的比例混合予以膏體化來進行。焊接用膏的調製所使用之焊接用助焊劑不特別限定,可使用將溶劑、松香、觸變劑及活性劑等的各成分混合所調製而成的助焊劑。 The solder powder produced by the above method is suitable for use as a material for a solder paste obtained by paste-mixing with a soldering flux. The preparation of the solder paste is carried out by paste-mixing the solder powder and the soldering flux in a predetermined ratio. The soldering flux used for the preparation of the solder paste is not particularly limited, and a flux prepared by mixing various components such as a solvent, a rosin, a thixotropic agent, and an active agent can be used.

作為適用於上述焊接用助焊劑之調製的溶劑,可舉出二乙二醇單己醚、二乙二醇單丁醚、二乙二醇單丁醚乙酸酯、四乙二醇、2-乙基-1,3-己二醇、α-萜品醇等沸點為180℃以上的有機溶劑。又,作為松香,可舉出松香膠、氫化松香、聚合松香、酯松香等。 Examples of the solvent to be used in the preparation of the flux for soldering include diethylene glycol monohexyl ether, diethylene glycol monobutyl ether, diethylene glycol monobutyl ether acetate, tetraethylene glycol, and 2- An organic solvent having a boiling point of 180 ° C or higher, such as ethyl-1,3-hexanediol or α-terpineol. Further, examples of the rosin include rosin gum, hydrogenated rosin, polymerized rosin, and ester rosin.

又,作為觸變劑,可舉出硬化蓖麻油、脂肪酸醯胺、天然油脂、合成油脂、N,N’-伸乙基雙-12-羥基硬脂酸醯胺、12-羥基硬脂酸、1,2,3,4-二苄叉-D-山梨糖醇及其衍生物等。 Further, examples of the thixotropic agent include hardened castor oil, fatty acid decylamine, natural fats and oils, synthetic fats and oils, N,N'-extended ethyl bis-12-hydroxystearic acid decylamine, and 12-hydroxystearic acid. 1,2,3,4-dibenzylidene-D-sorbitol and its derivatives.

又,作為活性劑,較佳為氫鹵酸胺鹽,具體而言可舉出三乙醇胺、二苯基胍、乙醇胺、丁胺、胺基丙醇、聚氧乙烯油基胺、聚氧乙烯月桂基胺、聚氧乙烯硬脂醯胺、二乙胺、三乙胺、甲氧基丙基胺、二甲基胺基丙基胺、二丁基胺基丙基胺、乙基己基胺、乙氧基丙基胺、乙基己氧基丙基胺、二丙胺、異丙胺、二異丙胺、哌啶、2,6-二甲基哌啶、苯胺、甲胺、乙胺、丁胺、3-胺基-1-丙烯、異丙胺、二甲基己基胺、環己胺等的胺之氫氯酸鹽或氫溴酸鹽。 Further, as the active agent, a hydrohalic acid amine salt is preferred, and specific examples thereof include triethanolamine, diphenylguanidine, ethanolamine, butylamine, aminopropanol, polyoxyethylene oleylamine, and polyoxyethylene laurel. Amine, polyoxyethylene stearylamine, diethylamine, triethylamine, methoxypropylamine, dimethylaminopropylamine, dibutylaminopropylamine, ethylhexylamine, B Oxypropylpropylamine, ethylhexyloxypropylamine, dipropylamine, isopropylamine, diisopropylamine, piperidine, 2,6-dimethylpiperidine, aniline, methylamine, ethylamine, butylamine, 3 a hydrochloride or hydrobromide salt of an amine such as amino-1-propene, isopropylamine, dimethylhexylamine or cyclohexylamine.

焊接用助焊劑可藉由將上述各成分以既定的比例混合而得。溶劑在助焊劑總量100質量%中所占的比例較佳取30~60質量%、觸變劑的比例較佳取1~10質量%,活性劑的比例較佳取0.1~10質量%。溶劑的比例若未達下限值,由於助焊劑的黏度會過高,而有產生使用其之焊接用膏的黏度亦隨之提高,而頻繁發生焊料的填充性降低或塗佈不均等印刷性降低之缺點的情形。另一方面,超過上限值的話則助焊劑的黏度會過低,從而使用其之焊接用膏的黏度也隨之降低,而有產生焊料粉末與助焊劑成分發生沉降分離之缺點的情形。又,觸變劑的比例若未達下限值,由於焊接用膏的黏度會過低,而有產生焊料 粉末與助焊劑成分發生沉降分離之缺點的情形。另一方面,超過上限值的話則焊接用膏的黏度會過高,而有產生焊料填充性或塗佈不均等印刷性降低之缺點的情形。又,若活性劑的比例未達下限值,則焊料粉末不會熔融,有產生無法獲得充分的接合強度之缺點的情形;另一方面,超過上限值的話則於保存中活性劑容易與焊料粉末反應,而有產生焊接用膏的保存穩定性降低之缺點的情形。此外,焊接用助焊劑中亦可添加黏度穩定劑。作為黏度穩定劑,可舉出可溶於溶劑的多酚類、磷酸系化合物、硫系化合物、生育酚、生育酚之衍生物、抗壞血酸、抗壞血酸之衍生物等。黏度穩定劑過多時,會有產生焊料粉末的熔融性降低等缺點的情形,因此,較佳取10質量%以下。 The flux for soldering can be obtained by mixing the above components in a predetermined ratio. The proportion of the solvent in the total amount of the flux 100% by mass is preferably from 30 to 60% by mass, the proportion of the thixotropic agent is preferably from 1 to 10% by mass, and the proportion of the active agent is preferably from 0.1 to 10% by mass. If the ratio of the solvent is less than the lower limit, the viscosity of the flux may be too high, and the viscosity of the solder paste used therewith may be increased, and the solder filling property of the solder may be lowered frequently or the printing property may be uneven. A situation in which the disadvantages are reduced. On the other hand, when the upper limit is exceeded, the viscosity of the flux is too low, so that the viscosity of the solder paste used therewith is also lowered, and there is a disadvantage that the solder powder and the flux component are precipitated and separated. Moreover, if the ratio of the thixotropic agent does not reach the lower limit value, the viscosity of the solder paste is too low, and the solder is generated. The disadvantage of the sedimentation separation of the powder and the flux component. On the other hand, when it exceeds the upper limit, the viscosity of the solder paste may be too high, and there is a case in which the printability of solder filling property or coating unevenness is lowered. Further, when the ratio of the active agent is less than the lower limit, the solder powder is not melted, and there is a disadvantage that sufficient joint strength cannot be obtained. On the other hand, if the ratio exceeds the upper limit, the active agent is easily stored during storage. The solder powder reacts, and there is a case where the storage stability of the solder paste is lowered. In addition, a viscosity stabilizer may be added to the flux for soldering. Examples of the viscosity stabilizer include polyphenols, phosphate compounds, sulfur compounds, tocopherols, tocopherol derivatives, ascorbic acid, and ascorbic acid derivatives which are soluble in a solvent. When the viscosity stabilizer is too large, there is a disadvantage that the meltability of the solder powder is lowered. Therefore, it is preferably 10% by mass or less.

調製焊接用膏時之焊接用助焊劑的混合量,較佳取用使該助焊劑在調製後之焊膏100質量%中所占的比例為5~30質量%的量。這是因為,未達下限值的話,因助焊劑不足而不易達膏體化;另一方面,超過上限值的話則焊膏中之助焊劑的含有比例過多,金屬的含有比例減少,於焊料熔融時不易獲得期望大小的焊料凸塊之故。 The amount of the flux for soldering in the case of preparing the solder paste is preferably such that the flux accounts for 5 to 30% by mass of the solder paste after preparation. This is because if the lower limit is not reached, the flux is not easily formed due to insufficient flux. On the other hand, if the upper limit is exceeded, the flux content in the solder paste is too large, and the metal content is reduced. It is not easy to obtain a solder bump of a desired size when the solder is melted.

由於此焊接用膏係以上述本發明之焊料粉末作為材料,因此,迴焊時迅速熔融,熔融性優良;而另一方面,迴焊後,熔融之焊料粉末形成高熔點的金屬間化合物,耐熱性上昇,從而不易引起由熱所導致的再熔融。因此,本發明之焊接用膏,尤其可適用於需暴露於高溫環境之電子零件等的安裝。 Since the solder paste of the present invention is made of the above-described solder powder of the present invention, it is rapidly melted during reflow and has excellent meltability; on the other hand, after reflow, the molten solder powder forms a high melting point intermetallic compound, and is resistant to heat. The sex rises, so that it is less likely to cause remelting caused by heat. Therefore, the solder paste of the present invention is particularly suitable for mounting electronic parts and the like which are required to be exposed to a high temperature environment.

〔使用焊接用膏之電子零件的安裝方法與接合體〕 [Installation method and joint body of electronic parts using solder paste]

要使用以上述方法所調製之焊接用膏將矽晶片、LED晶片等的電子零件安裝於各種放熱基板、FR4(Flame Retardant Type 4)基板、科伐合金等的基板,係以針轉印法在上述基板的既定位置轉印焊接用膏、或藉由印刷法在既定位置印刷焊接用膏。其次,在經轉印或印刷的焊膏上裝載作為電子零件的晶片元件。於此狀態下,在迴焊爐、氮氣環境中、250~400℃的溫度下保持5~120分鐘,使焊料粉末進行迴焊。視情況而定,亦可對晶片與基板加壓同時予以接合。藉此,使晶片元件與基板接合得到接合體,而將電子零件安裝於基板上。 The soldering paste prepared by the above method is used to mount electronic components such as a germanium wafer or an LED chip on various heat radiating substrates, FR4 (Flame Retardant Type 4) substrates, and Kovar alloy substrates by a needle transfer method. The paste for soldering at a predetermined position of the substrate or the paste for printing is printed at a predetermined position by a printing method. Next, a wafer component as an electronic component is loaded on the transferred or printed solder paste. In this state, the solder powder is reflowed in a reflow furnace or a nitrogen atmosphere at a temperature of 250 to 400 ° C for 5 to 120 minutes. Depending on the case, the wafer and the substrate may be pressed while being joined. Thereby, the wafer element and the substrate are bonded to each other to obtain a bonded body, and the electronic component is mounted on the substrate.

〔實施例〕 [Examples]

其次,與比較例共同詳細說明本發明之實施例。 Next, an embodiment of the present invention will be described in detail in conjunction with a comparative example.

<實施例1> <Example 1>

首先,對50mL水添加4.35×10-3mol的硫酸鎳(II)、9.66×10-4mol的次膦酸鈉、3.29×10-4mol的檸檬酸鈉,使用攪拌器以旋轉速度300rpm攪拌5分鐘,調製成溶解液。將此溶解液以硫酸將pH調整為5.0後,添加0.2g之作為分散劑的聚乙烯醇500(平均分子量為500的聚乙烯醇),進一步以旋轉速度300rpm攪拌10分鐘。其 次,對此溶解液添加50mL水中溶有0.2g之作為分散劑的聚乙烯醇500(平均分子量為500的聚乙烯醇),且分散有平均粒徑為0.18μm之銅粉末3.40g的分散液,以旋轉速度500rpm攪拌10分鐘,得到分散有使鎳在銅粉末表面析出的被覆鎳之銅粉末的分散液。重複以下操作4次,來進行洗淨:將此分散液靜置60分鐘使生成的粉末沉降後,捨棄上澄液,對其添加100mL水並以旋轉速度300rpm攪拌10分鐘。最後藉由將其以真空乾燥機進行乾燥,而得到以銅為中心核、以鎳為第1被覆層(擴散防止層)的粉末。 First, add 4.35 × 10 -3 mol of nickel (II) sulfate, 9.66 × 10 -4 mol of sodium phosphinate, 3.29 × 10 -4 mol of sodium citrate to 50 mL of water, and stir at a rotation speed of 300 rpm using a stirrer. 5 minutes, prepared into a solution. After the pH of the solution was adjusted to 5.0 with sulfuric acid, 0.2 g of polyvinyl alcohol 500 (polyvinyl alcohol having an average molecular weight of 500) as a dispersing agent was added, and the mixture was further stirred at a rotation speed of 300 rpm for 10 minutes. Next, to this solution, 0.2 g of polyvinyl alcohol 500 (polyvinyl alcohol having an average molecular weight of 500) as a dispersing agent was dissolved in 50 mL of water, and a dispersion of 3.40 g of copper powder having an average particle diameter of 0.18 μm was dispersed. The mixture was stirred at a rotation speed of 500 rpm for 10 minutes to obtain a dispersion liquid of nickel-coated copper powder in which nickel was precipitated on the surface of the copper powder. The following operation was repeated four times to carry out washing: After the dispersion was allowed to stand for 60 minutes to precipitate the formed powder, the supernatant liquid was discarded, 100 mL of water was added thereto, and the mixture was stirred at a rotation speed of 300 rpm for 10 minutes. Finally, this was dried by a vacuum dryer to obtain a powder having copper as a center core and nickel as a first coating layer (diffusion preventing layer).

接著,將上述粉末0.37g分散於50mL水中而調製成分散液。對此分散液添加2.56×10-2mol的硫酸錫(II),使用攪拌器以旋轉速度300rpm攪拌5分鐘,調製成混合液。將此混合液以硫酸將pH調整為0.5後,添加0.5g之作為分散劑的聚乙烯醇500(平均分子量為500的聚乙烯醇),進一步以旋轉速度300rpm攪拌10分鐘。其次,對此混合液以添加速度50mL/min添加pH經調整為0.5之1.58mol/L的二價鉻離子水溶液50mL,以旋轉速度500rpm攪拌10分鐘將錫離子還原,由此得到分散有使錫在被覆鎳之銅粉末表面析出之最外層為錫的被覆鎳之銅粉末的分散液。重複以下操作4次,來進行洗淨:將此分散液靜置60分鐘使生成的粉末沉降後,捨棄上澄液,對其添加100mL水並以旋轉速度300rpm攪拌10分鐘。最後藉由將其以真空乾燥機進行乾燥,而得到平均粒徑為 1.1μm,且分別形成為以銅為中心核、以鎳為第1被覆層(擴散防止層)、以錫為第2被覆層(最外層)的焊料粉末。 Next, 0.37 g of the above powder was dispersed in 50 mL of water to prepare a dispersion. To the dispersion, 2.56 × 10 -2 mol of tin (II) sulfate was added, and the mixture was stirred at a rotation speed of 300 rpm for 5 minutes using a stirrer to prepare a mixed solution. After the pH of the mixture was adjusted to 0.5 with sulfuric acid, 0.5 g of polyvinyl alcohol 500 (polyvinyl alcohol having an average molecular weight of 500) as a dispersing agent was added, and the mixture was further stirred at a rotation speed of 300 rpm for 10 minutes. Next, 50 mL of a divalent chromium ion aqueous solution having a pH adjusted to 0.5 to 1.58 mol/L was added to the mixed solution at a rate of 50 mL/min, and tin ions were reduced by stirring at a rotation speed of 500 rpm for 10 minutes to thereby obtain a dispersed tin. A dispersion of nickel-coated copper powder on the outermost layer of the nickel-coated copper powder is tin. The following operation was repeated four times to carry out washing: After the dispersion was allowed to stand for 60 minutes to precipitate the formed powder, the supernatant liquid was discarded, 100 mL of water was added thereto, and the mixture was stirred at a rotation speed of 300 rpm for 10 minutes. Finally, the film was dried in a vacuum dryer to obtain an average particle diameter of 1.1 μm, and each of them was formed to have copper as a center core, nickel as a first coating layer (diffusion preventing layer), and tin as a second coating. The layer (outermost layer) of solder powder.

<實施例2~28、比較例1~55> <Examples 2 to 28, Comparative Examples 1 to 55>

除在實施例2~28、比較例1~55中,均藉由調整使用之銅粉末的粒徑及銅粉末的添加量、硫酸鎳(II)及硫酸錫(II)的添加量、以及其他成分的比例,來控制成既定的銅中心核半徑、鎳擴散防止層及錫最外層的厚度、甚而既定粒徑的焊料粉末以外,係以與實施例1同樣的方式得到焊料粉末。 In addition, in Examples 2 to 28 and Comparative Examples 1 to 55, the particle diameter of the copper powder to be used, the amount of copper powder added, the amount of nickel (II) sulfate and tin (II) sulfate added, and the like were adjusted. The solder powder was obtained in the same manner as in Example 1 except that the ratio of the components was controlled to a predetermined copper center core radius, a thickness of the nickel diffusion preventing layer and the tin outermost layer, and even a solder powder having a predetermined particle diameter.

<比較例56> <Comparative Example 56>

首先,對50mL水添加4.35×10-3mol的硫酸鎳(II)、9.66×10-4mol的次膦酸鈉、3.29×10-4mol的檸檬酸鈉,使用攪拌器以旋轉速度300rpm攪拌5分鐘,調製成溶解液。將此溶解液以硫酸將pH調整為5.0後,添加0.2g之作為分散劑的聚乙烯醇500(平均分子量為500的聚乙烯醇),進一步以旋轉速度300rpm攪拌10分鐘。其次,對此溶解液添加50mL水中溶有0.2g之作為分散劑的聚乙烯醇500(平均分子量為500的聚乙烯醇),且分散有平均粒徑為0.18μm之銅粉末3.40g的分散液,以旋轉速度500rpm攪拌10分鐘,得到分散有使鎳在銅粉末表面析出的被覆鎳之銅粉末的分散液。重複以下操作4次,來 進行洗淨:將此分散液靜置60分鐘使生成的粉末沉降後,捨棄上澄液,對其添加100mL水並以旋轉速度300rpm攪拌10分鐘。最後藉由將其以真空乾燥機進行乾燥,而得到以銅為中心核、以鎳為第1被覆層(擴散防止層)的粉末。 First, add 4.35 × 10 -3 mol of nickel (II) sulfate, 9.66 × 10 -4 mol of sodium phosphinate, 3.29 × 10 -4 mol of sodium citrate to 50 mL of water, and stir at a rotation speed of 300 rpm using a stirrer. 5 minutes, prepared into a solution. After the pH of the solution was adjusted to 5.0 with sulfuric acid, 0.2 g of polyvinyl alcohol 500 (polyvinyl alcohol having an average molecular weight of 500) as a dispersing agent was added, and the mixture was further stirred at a rotation speed of 300 rpm for 10 minutes. Next, to this solution, 0.2 g of polyvinyl alcohol 500 (polyvinyl alcohol having an average molecular weight of 500) as a dispersing agent was dissolved in 50 mL of water, and a dispersion of 3.40 g of copper powder having an average particle diameter of 0.18 μm was dispersed. The mixture was stirred at a rotation speed of 500 rpm for 10 minutes to obtain a dispersion liquid of nickel-coated copper powder in which nickel was precipitated on the surface of the copper powder. The following operation was repeated four times to carry out washing: After the dispersion was allowed to stand for 60 minutes to precipitate the formed powder, the supernatant liquid was discarded, 100 mL of water was added thereto, and the mixture was stirred at a rotation speed of 300 rpm for 10 minutes. Finally, this was dried by a vacuum dryer to obtain a powder having copper as a center core and nickel as a first coating layer (diffusion preventing layer).

接著,使用山本鍍金試驗器(股)製小型滾筒裝置,對上述以銅為中心核且以鎳為擴散防止層的粉末進行鍍錫。就使用之鍍敷液組成,係使用錫酸鈉100g/L、氫氧化鈉10g/L及乙酸鈉15g/L的鍍敷液150mL中分散有5.0g粉末的液。再者,就鍍敷處理條件,係陽極使用錫、浴溫設為50℃、滾筒旋轉速度設為19rpm、電壓設為0.8V。就鍍錫膜厚,係以處理時間來調整,於此比較例中,係藉由進行0.3小時處理,而得到分散有使錫在被覆鎳之銅粉末表面析出之最外層為錫的被覆鎳之銅粉末的分散液。重複以下操作4次,來進行洗淨:將此分散液靜置60分鐘使生成的粉末沉降後,捨棄上澄液,對其添加100mL水並以旋轉速度300rpm攪拌10分鐘。最後藉由將其以真空乾燥機進行乾燥,而得到平均粒徑為3.3μm,且分別形成為以銅為中心核、以鎳為第1被覆層(擴散防止層)、以錫為第2被覆層(最外層)的焊料粉末。 Next, the powder of the above-mentioned copper-centered core and nickel as a diffusion preventing layer was tin-plated using a small-sized roller apparatus manufactured by Yamamoto gold-plated tester (strand). The composition of the plating solution to be used was a solution in which 5.0 g of a powder was dispersed in 150 mL of a plating solution of sodium stannate 100 g/L, sodium hydroxide 10 g/L, and sodium acetate 15 g/L. Further, in the plating treatment conditions, tin was used for the anode, the bath temperature was set to 50 ° C, the drum rotation speed was set to 19 rpm, and the voltage was set to 0.8 V. The thickness of the tin-plated film was adjusted by the treatment time. In this comparative example, by coating for 0.3 hours, the coated nickel having the outermost layer of tin precipitated on the surface of the nickel-coated copper powder was dispersed. A dispersion of copper powder. The following operation was repeated four times to carry out washing: After the dispersion was allowed to stand for 60 minutes to precipitate the formed powder, the supernatant liquid was discarded, 100 mL of water was added thereto, and the mixture was stirred at a rotation speed of 300 rpm for 10 minutes. Finally, the film was dried in a vacuum dryer to obtain an average particle diameter of 3.3 μm, and each of them was formed with copper as a center core, nickel as a first coating layer (diffusion preventing layer), and tin as a second coating. The layer (outermost layer) of solder powder.

<比較例57~65> <Comparative Examples 57 to 65>

除在比較例57~65中,均藉由調整使用之銅粉末的粒徑及銅粉末的添加量、硫酸鎳(II)及硫酸錫(II)的 添加量、以及其他成分的比例及處理條件,來控制成既定的銅中心核半徑、鎳擴散防止層及錫最外層的厚度、甚而既定粒徑的焊料粉末以外,係以與比較例56同樣的方式得到焊料粉末。 In addition to Comparative Examples 57 to 65, the particle diameter of the copper powder used and the amount of copper powder added, nickel (II) sulfate, and tin (II) sulfate were adjusted. The addition amount, the ratio of the other components, and the treatment conditions were the same as those of Comparative Example 56 except that the predetermined copper center core radius, the thickness of the nickel diffusion preventing layer and the tin outermost layer, and even the solder powder having a predetermined particle diameter were controlled. The way to get the solder powder.

<比較試驗及評定> <Comparative test and evaluation>

針對實施例1~28及比較例1~65中所得之焊料粉末,根據以下所述方法,測定焊料粉末之銅的含有比例[質量%]、平均粒徑[μm]、由銅構成之中心核的平均半徑[μm]、由鎳構成之擴散防止層的平均厚度[μm]、由錫構成之被覆層的平均厚度[μm]。將此等結果示於以下表1~表5。又,使用此等焊料粉末分別調製焊接用膏,評定改變迴焊時之最大保持溫度時的接合強度。將此等結果示於以下表6~表10。此外,將由銅構成之中心核的平均半徑、由鎳構成之擴散防止層的平均厚度與由錫構成之被覆層的平均厚度的和作為焊料粉末的平均半徑。 With respect to the solder powders obtained in Examples 1 to 28 and Comparative Examples 1 to 65, the content ratio [% by mass] of copper of the solder powder, the average particle diameter [μm], and the central core composed of copper were measured by the following method. The average radius [μm], the average thickness [μm] of the diffusion preventing layer made of nickel, and the average thickness [μm] of the coating layer made of tin. These results are shown in Tables 1 to 5 below. Further, the solder paste was prepared by using these solder powders, and the joint strength at the time of changing the maximum holding temperature at the time of reflow was evaluated. These results are shown in Tables 6 to 10 below. Further, the sum of the average radius of the center core made of copper, the average thickness of the diffusion preventing layer made of nickel, and the average thickness of the coating layer made of tin is taken as the average radius of the solder powder.

(1)焊料粉末之銅的含有比例的分析:根據感應耦合電漿原子發射光譜分析(島津製作所公司製ICP發射光譜儀:ICPS-7510),來進行焊料粉末之銅的含有比例的分析。 (1) Analysis of the content ratio of copper in the solder powder: The ratio of the copper content of the solder powder was analyzed by inductively coupled plasma atomic emission spectrometry (ICP emission spectrometer manufactured by Shimadzu Corporation: ICPS-7510).

(2)焊料粉末的平均粒徑:以採用雷射繞射散射法的粒度分布測定裝置(堀場製作所公司製,雷射繞射/散射式粒徑分布測定裝置LA-950)測定粒徑分布,以其體積累積中位徑(Median徑,D50)作為焊料粉末的平均粒徑。 (2) Average particle diameter of the solder powder: The particle size distribution is measured by a particle size distribution measuring apparatus (Radio Diffraction/scattering type particle size distribution measuring apparatus LA-950, manufactured by Horiba, Ltd.) using a laser diffraction scattering method. The volume cumulative median diameter (Median diameter, D 50 ) was taken as the average particle diameter of the solder powder.

(3)由銅構成之中心核的半徑、由鎳構成之擴散防止層的厚度及由錫構成之被覆層的厚度的測定:將焊料粉末埋入熱硬化性環氧樹脂中,將焊料粉末的剖面進行乾式研磨後,使用電子顯微鏡(Scanning Electron Microscope,SEM)進行觀察,針對30個焊料粒子,分別測定由銅構成之中心核的半徑、由鎳構成之擴散防止層的厚度及由錫構成之被覆層的厚度,求出各者的平均值。進而,根據由上述測定所得之由鎳構成之擴散防止層的厚度及由銅構成之中心核的半徑的平均值來算出厚度之平均值的比率(擴散防止層厚度/中心核的半徑)。 (3) The radius of the center core made of copper, the thickness of the diffusion preventing layer made of nickel, and the thickness of the coating layer made of tin: the solder powder is embedded in the thermosetting epoxy resin, and the solder powder is placed. After dry grinding of the section, use an electron microscope (Scanning Electron) Microscope, SEM), measured the radius of the center core made of copper, the thickness of the diffusion preventing layer made of nickel, and the thickness of the coating layer made of tin for 30 solder particles, and obtained the average value of each. . Further, the ratio of the average value of the thickness (the thickness of the diffusion preventing layer/the radius of the center core) is calculated from the average value of the thickness of the diffusion preventing layer made of nickel and the radius of the central core made of copper.

(4)焊料粉末的凝聚性:根據以下方法來判斷:以採用雷射繞射散射法的粒度分布測定裝置(堀場製作所公司製,雷射繞射/散射式粒徑分布測定裝置LA-950)測定粒徑分布,將在所得粒徑分布曲線中,除期望之粒徑的分布峰外,於較此為大之粒徑側尚有分布峰之具有2個以上之粒徑曲線的情形評為「有」凝聚;將未觀察到此種峰的情形評為「無」凝聚。 (4) Cohesiveness of the solder powder: It is judged by the following method: a particle size distribution measuring apparatus using a laser diffraction scattering method (Rapid diffraction/scattering particle size distribution measuring apparatus LA-950, manufactured by Horiba, Ltd.) The particle size distribution is measured, and in the obtained particle size distribution curve, in addition to the distribution peak of the desired particle diameter, the case where there are two or more particle diameter curves of the distribution peak on the larger particle diameter side is rated as " There is "cohesion"; the case where no such peak is observed is rated as "no" condensation.

(5)接合強度:將作為溶劑之50質量%的二乙二醇單己醚、作為松香之46質量%的聚合松香(軟化點95℃)、作為活性劑之環己胺氫溴酸鹽1.0質量%與作為觸變劑之硬化蓖麻油3.0質量%混合而調製成助焊劑。其次,將此助焊劑、與實施例1~28及比較例1~65中所得之焊料粉末,以助焊劑為88質量%、焊料粉末為12質量%的比例混合而分別調製成焊接用膏。 (5) Bonding strength: 50% by mass of diethylene glycol monohexyl ether as a solvent, 46% by mass of a rosin as a polymerized rosin (softening point: 95 ° C), and an active agent of cyclohexylamine hydrobromide 1.0 The mass % was mixed with 3.0% by mass of the hardened castor oil as a thixotropic agent to prepare a flux. Then, the flux and the solder powder obtained in Examples 1 to 28 and Comparative Examples 1 to 65 were mixed at a ratio of 88% by mass of the flux and 12% by mass of the solder powder to prepare a solder paste.

將上述調製之焊膏,以針轉印法,使用尖端部直徑100μm的針轉印於0.5mm厚之科伐合金(Fe-Ni-Co系合金)基板的既定位置處。此外,於科伐合金基板上進行鍍鎳,進而於其上進行快速鍍金。接著,在經轉印 的焊膏上配載0.9mm見方的LED晶片。進而,一邊使用加壓用夾具對LED晶片及基板以1.0MPa的壓力加壓,一邊在紅外線加熱爐中、氮氣環境中,以0.17小時、既定的最大保持溫度進行迴焊,使LED晶片與科伐合金基板接合,而得到接合試樣。此外,將上述迴焊時的最大保持溫度設定為250℃、300℃、350℃之不同的溫度,按每一實施例或比較例各實施三次而得到接合試樣。 The solder paste prepared as described above was transferred to a predetermined position of a 0.5 mm thick Kovar alloy (Fe-Ni-Co alloy) substrate by a needle transfer method using a needle having a tip end diameter of 100 μm. Further, nickel plating is performed on the Kovar substrate, and then rapid gold plating is performed thereon. Next, after transfer The solder paste is loaded with a 0.9 mm square LED chip. Furthermore, while the LED wafer and the substrate were pressurized at a pressure of 1.0 MPa using a pressurizing jig, the reflow was performed in an infrared heating furnace in a nitrogen atmosphere at a predetermined maximum holding temperature for 0.17 hours to cause the LED wafer and the section. The alloyed substrate was joined to obtain a bonded sample. Further, the maximum holding temperature at the time of the above reflowing was set to a temperature different from 250 ° C, 300 ° C, and 350 ° C, and each of the examples or the comparative examples was carried out three times to obtain a joined sample.

針對上述經接合之科伐合金基板及LED晶片的接合強度,依據JIS Z 3198-7所記載的無鉛焊料試驗方法-第7部之「晶片零件經焊料接合之剪切強度測定方法」,在室溫及300℃、保存0日及30日後的條件下分別測定接合剪切強度,求出將室溫下的剪切強度設為100時在300℃下保存0日及30日後的相對剪切強度。表中,「優」表示相對剪切強度為90以上之情形;「良」表示未達90至80以上之情形;「尚可」表示未達80至70以上之情形;「欠佳」則表示未達70之情形。 The bonding strength of the bonded Kovar substrate and the LED wafer is in accordance with the lead-free solder test method described in JIS Z 3198-7 - "Parts "Measurement method for shear strength of wafer parts by solder bonding") The joint shear strength was measured under the conditions of 300 ° C and 0 days and 30 days after storage, and the relative shear strength after storage at 300 ° C for 0 days and 30 days was obtained when the shear strength at room temperature was 100. . In the table, "excellent" means that the relative shear strength is above 90; "good" means less than 90 to 80; "can" means less than 80 to 70; "poor" means The situation has not reached 70.

由表6~表10比較實施例1~28與比較例1~65,可知以下結果。 Comparing Examples 1 to 28 with Comparative Examples 1 to 65 from Tables 6 to 10, the following results were obtained.

就焊料粉末的平均粒徑為0.5μm的比較例,由於粒徑過小,因粉末表面之氧化膜的影響,自保存焊料粉末之前,焊料粉末未熔融。就將前述銅核的半徑設為1時,由鎳構成之擴散防止層的厚度為0.03的比較例,由於擴散防止層的厚度過薄,無法防止銅或錫的擴散,而有接合強度為欠佳之情形。又,就銅的含量為75質量%左右的比較例,由於銅的含量過多,凝固起始溫度過高,而有於迴焊時焊料未熔融之情形。又,就銅的含量為1.5質量%左右的比較例,由於銅的含量過少,凝固起始溫度變低,無法獲得充分的耐熱性,而有接合強度為欠佳之情形。 In the comparative example in which the average particle diameter of the solder powder was 0.5 μm, since the particle diameter was too small, the solder powder was not melted before the solder powder was preserved due to the influence of the oxide film on the surface of the powder. When the radius of the copper core is set to 1, the thickness of the diffusion preventing layer made of nickel is 0.03. Since the thickness of the diffusion preventing layer is too thin, diffusion of copper or tin cannot be prevented, and the bonding strength is insufficient. Good situation. Further, in the comparative example in which the content of copper was about 75% by mass, the content of copper was too large, and the solidification initiation temperature was too high, and the solder was not melted during reflow. In the comparative example in which the content of copper is about 1.5% by mass, the content of copper is too small, the solidification initiation temperature is lowered, and sufficient heat resistance cannot be obtained, and the joint strength is not good.

就焊料粉末的平均粒徑為40μm左右的比較例,粒徑過大,於迴焊後形成具有較大空隙(空孔)的接合層而無法獲得緻密的接合層,因此,有接合強度為欠佳之情形。又,就擴散防止層的厚度與中心核的半徑的比率小於0.04的比較例,由於擴散防止效果較小,銅向由錫構成之被覆層擴散,導致焊料粉末的熔融性降低,而有為欠佳之情形。反之擴散防止層的厚度與中心核的半徑的比率超過0.51的比較例,由於鎳的比率過高,致焊料粉末的熔融性降低,而有接合強度為欠佳之情形。就藉由滾鍍而形成由錫構成之被覆層的比較例,由於大量生成了強固凝聚的粉末,使用雷射繞射散射法所得之焊料粉末的平均粒徑與藉由SEM觀察進行測定所得之焊料粉末的平均粒徑的值,得到大幅不同的值,而且,無法獲得良好的印刷膜,對於任一試樣皆無法測定接合強度。 In the comparative example in which the average particle diameter of the solder powder was about 40 μm, the particle diameter was too large, and a bonding layer having a large void (void) was formed after the reflow, and a dense bonding layer could not be obtained. Therefore, the bonding strength was poor. The situation. Further, in the comparative example in which the ratio of the thickness of the diffusion preventing layer to the radius of the center core is less than 0.04, since the diffusion preventing effect is small, copper is diffused to the coating layer made of tin, and the meltability of the solder powder is lowered, and there is a deficiency. Good situation. On the other hand, in the comparative example in which the ratio of the thickness of the diffusion preventing layer to the radius of the central core exceeds 0.51, since the ratio of nickel is too high, the meltability of the solder powder is lowered, and the joint strength is unsatisfactory. In the comparative example in which the coating layer made of tin was formed by barrel plating, the average particle diameter of the solder powder obtained by the laser diffraction scattering method and the measurement by SEM observation were obtained because a large amount of strongly agglomerated powder was formed. The value of the average particle diameter of the solder powder was greatly different, and a good printed film could not be obtained, and the joint strength could not be measured for any of the samples.

相對於此,就焊料粉末的平均粒徑處於1μm以上30μm以下的範圍內,相對於焊料粉末的總量100質量%,銅的含有比例處於2質量%以上70質量%以下的範圍內,將前述銅核的半徑設為1時,由鎳構成之擴散防止層的厚度為0.04以上0.51以下的範圍內的實施例1~28,幾無凝聚之粉末而能夠獲得良好的印刷膜,同時,焊料粉末在保存前及保存30日後之各250℃、300℃、350℃的所有的迴焊溫度下接合強度為尚可、良或優。 On the other hand, the average particle diameter of the solder powder is in the range of 1 μm or more and 30 μm or less, and the content ratio of copper is in the range of 2% by mass or more and 70% by mass or less based on 100% by mass of the total amount of the solder powder. When the radius of the copper core is set to 1, the thickness of the diffusion preventing layer made of nickel is in the range of 0.04 or more and 0.51 or less, and the powder is not aggregated, and a good printed film can be obtained, and the solder powder can be obtained. The joint strength was acceptable, good or excellent at all reflow temperatures of 250 ° C, 300 ° C, and 350 ° C before storage and after 30 days of storage.

〔產業上可利用性〕 [Industrial Applicability]

本發明可適合利用於有時要長時間保存的焊料粉末。又,可適合利用於電子零件的安裝,尤為暴露於高溫環境之電子零件的安裝。 The present invention can be suitably utilized for a solder powder which is sometimes stored for a long time. Moreover, it can be suitably used for the mounting of electronic parts, especially the mounting of electronic parts exposed to a high temperature environment.

Claims (4)

一種焊料粉末之製造方法,其係包含:調製銅粉末之第1分散液的步驟;將鎳之金屬鹽添加混合於前述銅粉末之第1分散液,而調製前述鎳之金屬鹽溶解且前述銅粉末分散的第1溶解液之步驟;調整前述第1溶解液之pH的步驟;藉由對前述經pH調整之第1溶解液添加混合第1還原劑,使鎳離子還原,而調製析出之鎳被覆銅粉末,進行分散之第2分散液的步驟;將前述第2分散液進行固液分離,並將前述經固液分離之固體成分乾燥,製作由鎳構成之擴散防止層被覆銅核而成之金屬粉末的步驟;調製前述金屬粉末之第3分散液的步驟;將錫之金屬鹽添加混合於前述金屬粉末的第3分散液中,調製前述錫之金屬鹽溶解且前述金屬粉末分散之第2溶解液的步驟;調整前述第2溶解液之pH的步驟;藉由對前述經pH調整之第2溶解液添加混合第2還原劑,使錫離子還原,調製析出的錫被覆前述金屬粉末,進行分散之第4分散液的步驟;及將前述第4分散液進行固液分離,並將前述經固液分離之固體成分乾燥,製作前述金屬粉末以錫層被覆之焊料粉末的步驟。 A method for producing a solder powder, comprising: a step of preparing a first dispersion liquid of copper powder; and adding a metal salt of nickel to the first dispersion liquid of the copper powder to prepare a metal salt of the nickel to be dissolved and the copper a step of dispersing the first solution in the powder; a step of adjusting the pH of the first solution; and adding the first reducing agent to the pH-adjusted first solution to reduce nickel ions to prepare precipitated nickel a step of coating the copper powder to disperse the second dispersion; and performing solid-liquid separation on the second dispersion; and drying the solid component separated by solid-liquid separation to form a diffusion preventing layer made of nickel to coat the copper core a step of preparing a metal powder; a step of preparing a third dispersion of the metal powder; and adding a metal salt of tin to the third dispersion of the metal powder to prepare a solution in which the metal salt of tin is dissolved and the metal powder is dispersed a step of dissolving the solution; a step of adjusting the pH of the second solution; and adding a second reducing agent to the pH-adjusted second solution to reduce tin ions to prepare precipitated tin a step of coating the metal powder to disperse the fourth dispersion; and solid-liquid separating the fourth dispersion, and drying the solid-liquid separated solid component to prepare a solder powder in which the metal powder is coated with a tin layer A step of. 一種焊料粉末,其係由鎳構成之擴散防止層被覆銅核而成之金屬粉末以錫層被覆的焊料粉末,其特徵為:前述焊料粉末的平均粒徑為1μm以上30μm以下,相對於前述焊料粉末的總量100質量%,銅的含有比例為2質量%以上70質量%以下,將前述銅核的半徑設為1時,前述由鎳構成之擴散防止層的厚度為0.05以上0.20以下的比率。 A solder powder in which a metal powder obtained by coating a copper core with a diffusion preventing layer made of nickel is coated with a tin layer, wherein the solder powder has an average particle diameter of 1 μm or more and 30 μm or less with respect to the solder. The total amount of the powder is 100% by mass, and the content ratio of copper is 2% by mass or more and 70% by mass or less. When the radius of the copper core is 1, the thickness of the diffusion preventing layer made of nickel is 0.05 or more and 0.20 or less. . 一種製造焊接用膏的方法,其係藉由將依請求項1之方法所製造的焊料粉末或如請求項2之焊料粉末與焊接用助焊劑以調製後之焊膏100質量%中所佔之該助焊劑的比例成為5~30質量%的量進行混合予以膏體化。 A method for producing a solder paste, which is obtained by using the solder powder produced by the method of claim 1 or the solder powder of claim 2 and the soldering flux for 100% by mass of the solder paste after preparation The ratio of the flux is 5 to 30% by mass, and the mixture is paste-formed. 一種安裝電子零件的方法,其係使用依請求項3之方法所製成的焊接用膏。 A method of mounting an electronic component using the solder paste prepared by the method of claim 3.
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