TWI664369B - Flow path structure of small fluid control valve - Google Patents

Abstract

The invention provides a flow path structure of a small fluid control valve capable of suppressing a limitation of a maximum flow rate. In the flow path structure of the small fluid control valve of the present invention, in the upper perspective, the vertical width of the valve body is narrower than the horizontal width. Inside the valve body, there are formed in the valve body arranged in a horizontal direction below the valve body and each having The first flow path and the second flow path that are open have a first annular recessed portion formed around the opening of the first flow path in the lower surface, and around the opening of the second flow path in the lower surface. A ring-shaped second annular recessed portion is formed, and the first flow path and the second flow path are respectively connected to the valve chamber. A through hole is formed in the valve body to penetrate from the end surface in the widthwise direction to the valve chamber. A blocking member is provided to block the opening of the through hole at the end surface.

Description

Flow path structure of small fluid control valve Field of invention

The invention relates to a flow path structure of a small fluid control valve for controlling fluid.

Background of the invention

Heretofore, there is a fluid control valve in which a valve chamber is formed inside a valve body of the fluid control valve, and a first flow path and a second flow path having openings in the lower surface are formed, and the first flow path and the second flow path are connected to The valve chamber is communicated (see Patent Document 1). The fluid control valve described in Patent Document 1 is a small fluid control valve having a width of about 10 mm in order to reduce the occupied area when a plurality of valves are gathered.

Prior art literature

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2011-12700

Summary of invention

However, in the fluid control valve described in Patent Document 1, Around the openings of the first flow path and the second flow path, an annular recessed portion for arranging a sealing member is formed. For example, it is necessary to form the first flow path and the annular recessed portion so that the first flow path and the annular recessed portion do not interfere with each other, so the shape or size of the first flow path is limited. Therefore, in the small-sized fluid control valve described in Patent Document 1, the flow path area of the first flow path or the flow path area of the connection portion between the first flow path and the valve chamber cannot be sufficiently secured, and the fluid can flow through the fluid. The maximum flow of fluid to the control valve is limited.

The present invention has been made in order to solve such a problem, and a main object thereof is to provide a flow path structure of a small-sized fluid control valve capable of suppressing a limitation of a maximum flow rate.

Hereinafter, the means for solving the said subject, and its effect are described.

The first means is a flow path structure of a small fluid control valve. The small fluid control valve is provided with a valve body, and the valve body has a valve chamber formed therein. In the upper view, the longitudinal width of the valve body is smaller than the lateral width. It is narrow, and a first flow path and a second flow path are formed in the valve body, which are arranged below the valve body in the width direction and have openings. In the lower surface, the first flow path is formed. A ring-shaped first annular recessed portion is formed around the opening, and a ring-shaped second annular recessed portion is formed around the opening of the second flow path in the lower surface, and the first flow path is formed. And the second flow path is respectively connected to the valve chamber, and the valve body is formed with a through hole penetrating from the end surface in the widthwise direction to the valve chamber, and is provided with a through hole that can pass the through hole to the end surface. Occlusive structure Pieces.

According to the above configuration, the small fluid control valve includes the valve body, and the valve chamber is formed inside the valve body. In the above perspective, the longitudinal width of the valve body will be narrower than the lateral width. That is, in order to make the occupied area of the small fluid control valve small, the vertical width of the valve body is made narrow.

Inside the valve body, a first flow path and a second flow path are formed, which are arranged in the widthwise direction of the lower surface of the valve body and have openings, respectively. A first annular recessed portion is formed around the opening of the first flow path on the lower surface of the valve body, and a second annular recessed portion is formed around the opening of the second flow path. Therefore, when connecting a small fluid control valve to a fluid flow path or other equipment, the sealing member can be arranged in the first annular recessed portion and the second annular recessed portion.

The valve body is formed with a through hole penetrating from the end surface in the widthwise direction to the valve chamber, and is provided with a second closing member that can close the opening of the through hole at the end surface. Therefore, the space in the valve chamber can be enlarged by the through hole, and the fluid can easily flow through the valve chamber. In addition, the valve body is cut from the end surface in the widthwise direction to form a through hole, and the opening of the through hole at the end surface is closed by a second closing member, so that the valve chamber can be easily expanded to a free position. Shape or size.

In a second means, in the valve body, an annular valve seat is formed around the opening of the valve chamber in the second flow path, and the through hole penetrates the valve chamber from an end surface in the widthwise direction. And it penetrates to the said 1st flow path.

According to the above configuration, the first flow path can be enlarged by the through hole. The area of the flow path at the connection to the valve chamber.

The third means is a flow path structure of a small fluid control valve. The small fluid control valve is provided with a valve body, and the valve body has a valve chamber formed therein. In the upper view, the longitudinal width of the valve body is smaller than the lateral width. It is narrow, and a first flow path and a second flow path are formed in the valve body, which are arranged below the valve body in the width direction and have openings. In the lower surface, the first flow path is formed. A ring-shaped first annular recessed portion is formed around the opening, and a ring-shaped second annular recessed portion is formed around the opening of the second flow path in the lower surface, and the first flow path is formed. The second flow path is connected to the valve chamber, and the valve body is formed with a through hole penetrating from the end surface in the longitudinal width direction to the valve chamber, and is provided with a through hole that can pass the through hole to the end surface. An occlusion member whose opening is occluded.

According to the above-mentioned configuration, the valve body is formed with a through hole penetrating from the end surface in the longitudinal direction to the valve chamber, and is provided with the second closing member capable of closing the opening of the through hole at the end surface. Therefore, the space in the valve chamber can be enlarged by the through holes, and the fluid can easily flow through the valve chamber. In addition, the valve body is cut from the end surface in the longitudinal direction to form a through-hole, and the opening of the through-hole at the end surface is closed by a second closing member, so that the valve chamber can be easily expanded to a free position. Shape or size.

In a fourth means, in the valve body, an annular valve seat is formed around the opening of the valve chamber in the second flow path, and the through hole is connected to the first flow path.

According to the above configuration, the first flow path can be enlarged by the through hole. The area of the flow path at the connection to the valve chamber.

In a fifth means, in the valve body, an annular valve seat is formed around the opening of the valve chamber in the first flow path, and the through hole is connected to the second flow path.

According to the said structure, the flow-path area of the connection part between a 2nd flow path and a valve chamber can be enlarged by a through-hole.

In a sixth means, the end surface is a first end surface, the through hole penetrates from the first end surface in the longitudinal width direction to the second end surface through the valve chamber, and further includes a through hole that allows the through hole to pass through the first end surface. Blocking member that blocks the opening on the two end faces.

According to the above configuration, the through hole penetrates the valve chamber from the first end surface in the longitudinal width direction of the valve body to the second end surface. In addition, the openings of the through holes in the first and second end faces are blocked by the blocking member, respectively. Therefore, the valve body is cut from one end surface to the other end surface in the longitudinal width direction, whereby a through hole can be easily formed, and the valve chamber can be enlarged in the vicinity of both end surfaces.

In the seventh means, the through hole is formed in a range including a position of the valve seat in a height direction of the valve body.

According to the above configuration, since the through hole is formed in a range including the position of the valve seat in the height direction of the valve body, the space around the valve seat can be enlarged in the valve chamber. Therefore, the fluid can be easily circulated around the valve seat, and the fluid can have a flow path with an opening inside the valve seat and the valve chamber.

The eighth means is as follows: The first flow path includes: from the first The first recessed portion extends in a direction perpendicular to the lower surface, and a first connection flow path that connects the first vertical flow path and the valve chamber. The second flow path includes: from the second ring The second recessed portion extends in a direction perpendicular to the lower surface, and a second connection flow path connecting the second vertical flow path and the valve chamber. The first connection flow path includes a first end surface flow path. The first end surface flow path is formed by a groove-shaped first groove-shaped recessed portion having an opening at an end surface in the longitudinal width direction in the valve body, and a blocking member capable of closing the opening of the first groove-shaped recessed portion. .

The ninth means is a flow path structure of a small-sized fluid control valve including a valve body, and a valve chamber is formed in the valve body. In a top view, the aspect ratio of the valve body is horizontal. The width is also narrow. Inside the valve body, a first flow path and a second flow path are formed on the lower surface of the valve body, which are arranged in the widthwise direction and have openings, respectively. A ring-shaped first annular recessed portion is formed around the opening of the flow path, and a ring-shaped second annular recessed portion is formed around the opening of the second flow path in the lower surface. The flow path includes a first vertical flow path extending from the first annular recessed portion in a direction perpendicular to the lower surface, a first connection flow path connecting the first vertical flow path and the valve chamber, and the second flow path. The path includes a second vertical flow path extending from the second annular recessed portion in a direction perpendicular to the lower surface, a second connection flow path connecting the second vertical flow path and the valve chamber, and the first connection flow. The path includes a first end face flow path, and the first end face flow path That the opening of the can with the first groove-like recess of the first closing of the closing member is formed by a first groove-shaped recess has a groove-shaped opening in the end face of the valve body to the width of the vertical direction.

According to the eighth and ninth means, the first flow path includes a first vertical flow path extending from the first annular recessed portion in a direction perpendicular to the lower surface of the valve body, and the second flow path includes a second loop The second vertical flow path extending from the recessed portion in a direction perpendicular to the lower surface of the valve body. Therefore, the first recessed portion and the second recessed portion can be connected to the first recessed portion and the second recessed portion, respectively, and interference between the annular recessed portion and the first and second channels can be suppressed. Therefore, the flow passage area of the connection portion between the annular recessed portion and the first and second flow passages can be made larger than the structure in which the annular recessed portion connects the first flow passage and the second flow passage obliquely. The first vertical flow path and the valve chamber are connected by a first connection flow path, and the second vertical flow path and the valve chamber are connected by a second connection flow path.

Here, in order to connect the annular recessed portion to the first flow path and the second flow path vertically, one of the first connection flow path and the second connection flow path, for example, the shape or size of the first connection flow path may be changed. Limitations. In this regard, the first connection flow path includes a first end surface flow path. The first end flow path is a groove-shaped first groove-shaped recess having an opening on an end surface of the valve body in the longitudinal width direction. A first blocking member that blocks the opening of the first groove-shaped recessed portion. In the first end surface flow path, the end surface in the longitudinal direction is cut into a groove shape in the valve body to form a first groove-shaped recessed portion, and the opening of the first groove-shaped recessed portion is closed by the first blocking member. Easily form free shapes or sizes. For example, the first occlusion member is welded or adhered to the opening of the first groove-shaped recessed portion, whereby the opening of the first groove-shaped recessed portion is closed by the first occlusion member. Therefore, even with a structure in which the annular recessed portion connects the first flow path and the second flow path vertically, the flow path area of the first connection flow path can be secured by forming the first end surface flow path. As a result, the maximum flow rate can be suppressed in a small fluid control valve restricted.

In the tenth means, the second connection flow path includes a second end surface flow path, and the second end surface flow path is a second groove having a groove-like shape having an opening at an end surface of the valve body in the longitudinal width direction. And a third blocking member that can block the opening of the second groove-shaped recess.

According to the above configuration, the second connection flow path includes the second end surface flow path. The second end surface flow path is a groove-shaped second groove-shaped recessed part having an opening on an end surface of the valve body in the longitudinal width direction. A third blocking member that blocks the opening of the second groove-shaped recessed portion. Therefore, the flow path area of the second connection flow path can be easily secured, and the degree of freedom in arranging the first flow path and the second flow path can be improved.

In the eleventh means, the valve body is formed with the two first flow paths.

According to the above configuration, since the two first flow paths are formed, a fluid control valve having a three-port having two first flow paths and one second flow path can be manufactured. In addition, the flow path area can be secured for each of the three flow paths.

In a twelfth means, the valve chamber is a first valve chamber, a second valve chamber is formed inside the valve body, and the first connection flow path connects the first vertical flow path, the first valve chamber, and The second valve chamber.

According to the above configuration, the first valve chamber and the second valve chamber are formed inside the valve body, and the first connection flow path connects the first vertical flow path, the first valve chamber, and the second valve chamber. Therefore, in a merging valve or a diverter valve including the first valve chamber and the second valve chamber, the flow path area of each flow path can be secured.

In a thirteenth means, the valve body is formed with two of the valve bodies. 2nd flow path.

According to the configuration described above, since the two second flow paths are formed, a fluid control valve having a three-port having one first flow path and two second flow paths can be manufactured. In addition, the flow path area can be secured for each of the three flow paths.

Specifically, as in the fourteenth means, a configuration may be adopted in which the length in the height direction of the valve body in the first end face flow path is longer than the length in the width direction of the valve body in the first end face flow path. Still long. With this configuration, the first connection flow path can be extended toward the height of the valve body while the flow path area of the first connection flow path is secured, and the arrangement of the first connection flow path can be made easier.

Specifically, as in the fifteenth means, a configuration may be adopted in which: in the valve body, an annular valve seat is formed around the opening of the valve chamber in the second connection flow path. According to this structure, the second flow path and the valve chamber can be blocked and communicated by contacting and leaving the valve body of the fluid control valve with respect to the valve seat, and the second flow path can be blocked and communicated through the valve chamber. The first flow path.

In a sixteenth means, the first end surface flow path has an opening in the valve chamber.

According to the above configuration, since the first end surface flow path has an opening in the valve chamber, the first connection flow path can be easily connected to the valve chamber, and the connection portion between the first connection flow path and the valve chamber can be easily secured. Flow path area.

Specifically, as in the seventeenth means, a configuration may be adopted in which the length in the widthwise direction of the valve body in the first end surface flow path is longer than The length in the height direction of the valve body in the first end face flow path is also long. According to this structure, the first connection flow path can be extended in the width direction of the valve body while the flow path area of the first connection flow path is secured, and the arrangement of the first connection flow path can be made easier.

Specifically, as in the eighteenth means, a configuration may be adopted in which: in the valve body, an annular valve seat is formed around the opening of the valve chamber in the first connection flow path. According to this structure, the first flow path and the valve chamber can be blocked and communicated by contacting and leaving the valve body of the fluid control valve with the valve seat, and the first flow path and the first flow path can be blocked and communicated through the valve chamber. 2nd flow path.

In a nineteenth means, the second connection flow path includes a second end surface flow path, and the second end surface flow path is a second groove having a groove shape having an opening at an end surface of the valve body in the longitudinal width direction. The second recessed portion is formed with a third blocking member capable of blocking the opening of the second grooved recess, and the second end surface flow path has an opening in the valve chamber.

According to the above configuration, since the second end surface flow path has an opening in the valve chamber, the second connection flow path can be easily connected to the valve chamber, and the connection portion between the second connection flow path and the valve chamber can be easily secured. Flow path area.

In a twentieth aspect, the valve body is formed with a through hole penetrating from the end surface in the longitudinal width direction to the valve chamber, and is provided with a second blocking member capable of blocking the opening of the through hole at the end surface, The through-hole is connected to the first connection flow path.

According to the above-mentioned configuration, the through-hole is oriented in a direction from the longitudinal width of the valve body. The end face of the pierce is penetrated to the valve chamber and is connected to the first connection flow path. Therefore, the flow path area of the connection portion between the first connection flow path and the valve chamber can be enlarged by the through hole.

In a twenty-first means, the valve body is formed with a through hole penetrating from the end surface in the longitudinal direction to the valve chamber, and is provided with a second blocking member capable of blocking the opening of the through hole at the end surface, The through-hole is connected to the second connection flow path.

According to the above configuration, the through-hole penetrates from the end surface in the longitudinal width direction of the valve body to the valve chamber, and is connected to the second connection flow path. Therefore, the flow path area of the connection portion between the second connection flow path and the valve chamber can be enlarged by the through hole.

In the twenty-second means, the end surface is a first end surface, the through hole is penetrated from the first end surface in the longitudinal width direction to the second end surface through the valve chamber, and is provided with the through hole in the first A second blocking member that blocks the openings on the two end faces.

According to the above configuration, the through hole penetrates the valve chamber from the first end surface in the longitudinal width direction of the valve body to the second end surface. Further, the openings of the through holes in the first and second end faces are blocked by the second blocking member, respectively. Therefore, the valve body is cut from one end surface to the other end surface in the longitudinal width direction, whereby a through hole can be easily formed, and the valve chamber can be enlarged in the vicinity of both end surfaces.

In a twenty-third means, the valve body is formed with a through hole that penetrates the valve chamber from the end surface in the widthwise direction to the first connection flow path, and includes a through hole that can pass the through hole to the end surface. Open-closed The second occlusion member of the plug.

According to the above configuration, the through hole penetrates from the end surface of the valve body in the widthwise direction to the valve chamber, and penetrates through the valve chamber to the first connection flow path. Therefore, the flow path area of the connection portion between the first connection flow path and the valve chamber can be enlarged by the through hole.

In a twenty-fourth means, the valve body is formed with a through hole penetrating from an end surface in the longitudinal width direction to the valve chamber, and the through hole is formed at a position including the valve seat in a height direction of the valve body. Range.

According to the above configuration, since the through hole is formed in a range including the position of the valve seat in the height direction of the valve body, the space around the valve seat can be enlarged in the valve chamber. Therefore, the fluid can be easily circulated around the valve seat, and the fluid can be easily circulated in the flow path having an opening inside the valve seat and the valve chamber.

10‧‧‧Valve Department

11, 111, 211, 311, 411, 511, 611, 711, 811, 911, 1011 1111, 1211‧‧‧ valve body

11a‧‧‧below

11b‧‧‧Screw hole

11c, 111c, 211d, 311d, 1011d, 1111d

12‧‧‧valve

13‧‧‧Valve seat

21‧‧‧The first flow path (the first connection flow path)

21a, 31a, 31b, 121a, 126a, 131a, 136a, 151c, 221a, 231a, 251c, 321a, 326a, 331a, 351c, 51c

22‧‧‧ the first annular recess

31‧‧‧The second flow path

32‧‧‧ 2nd annular recess

41‧‧‧valve frame

41a‧‧‧ Welding Department

41b‧‧‧Cylinder

42‧‧‧ Stem

42a‧‧‧Valve body holding part

42b‧‧‧Cylinder

43‧‧‧Compression spring

43a‧‧‧Spring Press

45‧‧‧Valve body

48‧‧‧ bellows

51,151,251,351‧‧‧through holes

55‧‧‧ Occlusion member (cover)

111d, 411d, 511d, 711d

111e, 411e, 611e‧‧‧ 2nd end face

123‧‧‧The first vertical flow path (the first flow path)

124, 224, 324, 424, ‧‧‧ first horizontal flow path

126, 226, 326, 426‧‧‧ the first groove-shaped recess

129, 139, 229, 329, 429‧‧‧ lid (1st occlusion member)

133‧‧‧Second vertical flow path (second flow path)

134, 327, 334‧‧‧ 2nd horizontal flow path

136, 336‧‧‧‧ 2nd groove-shaped recess

137‧‧‧3rd horizontal flow path

138, 328‧‧‧ 3rd vertical flow path

155, 255, 339, 355, 529, 629‧‧‧ lid

148‧‧‧ diaphragm

223, 323, 423‧‧‧ the first vertical flow path

227, 427, ‧ ‧ 4th horizontal flow path

231‧‧‧Second flow path

333‧‧‧The second vertical flow path

431‧‧‧Second flow path (second connection flow path)

3, 11, 12, 15, 16, 18, 19, 22‧‧‧ cut

Fig. 1 is a sectional view showing a valve portion of a fluid control valve according to a first embodiment.

FIG. 2 is a top view showing a valve body in the valve portion of FIG. 1. FIG.

FIG. 3 is a sectional view taken along line 3-3 of the valve portion of FIG. 1.

Fig. 4 is a sectional view showing a valve portion of a fluid control valve according to a second embodiment.

FIG. 5 is a top view showing a valve body in the valve portion of FIG. 4.

Fig. 6 is a sectional view showing a valve portion of a fluid control valve according to a third embodiment.

FIG. 7 is a top view showing a valve body in the valve portion of FIG. 6.

Fig. 8 is a sectional view showing a valve portion of a fluid control valve according to a fourth embodiment.

FIG. 9 is a top view showing a valve body in the valve portion of FIG. 8.

Fig. 10 is a front view showing a valve body of a fluid control valve according to a fifth embodiment.

11 is a cross-sectional view taken along the line 11-11 in FIG. 10.

Fig. 12 is a sectional view taken along the line 12-12 in Fig. 11.

FIG. 13 is a rear view of the valve body of FIG. 10.

Fig. 14 is a front view showing a valve body of a fluid control valve according to a sixth embodiment.

FIG. 15 is a sectional view taken along the line 15-15 in FIG. 14. FIG.

16 is a sectional view taken along the line 16-16 in FIG. 15.

Fig. 17 is a front view showing a valve body of a fluid control valve according to a seventh embodiment.

18 is a sectional view taken along the line 18-18 in FIG. 17.

FIG. 19 is a sectional view taken along the line 19-19 in FIG. 18. FIG.

FIG. 20 is a rear view of the valve body of FIG. 17.

Fig. 21 is a front view showing a valve body of a fluid control valve according to an eighth embodiment.

22 is a sectional view taken along the line 22-22 in FIG. 21.

Fig. 23 is a sectional view taken along the line 23-23 in Fig. 22;

Fig. 24 is a front view showing a valve body of a fluid control valve according to a ninth embodiment.

Fig. 25 is a front view showing a valve body of a fluid control valve according to a tenth embodiment.

Fig. 26 is a front view showing a valve body of a fluid control valve according to an eleventh embodiment.

Fig. 27 is a front view showing a valve body of a fluid control valve according to a twelfth embodiment.

Fig. 28 is a front view showing a valve body of a fluid control valve according to a thirteenth embodiment.

Forms used to implement the invention

(First Embodiment)

Hereinafter, a first embodiment of a small-sized fluid control valve used in a semiconductor manufacturing apparatus and the like will be described with reference to FIGS. 1 to 3. 1 is a cross-sectional view showing a valve portion 10 of a fluid control valve according to this embodiment, FIG. 2 is a top view showing a valve body 11 in the valve portion 10 of FIG. 1, and FIG. 3 is a sectional view of the valve portion 10 of FIG. 1. -3 sectional view.

The fluid control valve includes a valve portion 10 that controls a fluid, and an actuator portion (not shown) that applies a driving force to the valve portion 10. The actuator unit may be an air compressor, an electromagnetic solenoid, a piezoelectric element, a motor, or the like. The actuator portion is connected to the valve portion 10 through an adapter (not shown).

The valve portion 10 includes a valve body 11, a valve holder 41, a valve stem 42, a compression spring 43, a valve body 45, a bellows 48, and the like.

The valve body 11 is formed in a block shape (roughly a cuboid shape). In the upper perspective shown in FIG. 2, the vertical width of the valve body 11 (upper and lower directions in FIG. 2) Width) will be narrower than the horizontal width (width in the left-right direction in Figure 2). The vertical width of the valve body 11 is approximately 10 mm, and the horizontal width is approximately 33 mm. Screw holes 11b are formed at both ends of the valve body 11 in the widthwise direction. A screw or the like is connected to the screw hole 11b to connect the valve body 11 with other flow path blocks or equipment.

A valve chamber 12 is formed inside the valve body 11. The valve chamber 12 extends upward from the middle of the height direction (upward and downward direction in FIG. 1) of the valve body 11 and is a cylindrical space. The valve chamber 12 is formed in the center in the widthwise direction and the center in the widthwise direction in the upper perspective as shown in FIG. 2. The upper end of the valve chamber 12 has an opening on the upper surface of the valve body 11.

A first flow path 21 and a second flow path 31 having openings on the lower surface 11 a of the valve body 11 are formed inside the valve body 11. The first flow path 21 and the second flow path 31 are formed side by side in the widthwise direction of the valve body 11. The opening 21 a of the first flow path 21 on the lower surface 11 a and the opening 31 a of the second flow path 31 on the lower surface 11 a are formed side by side in the widthwise direction of the valve body 11. In the lower surface 11a, a ring-shaped first annular recessed portion 22 is formed around the opening 21a of the first flow path 21. In the lower surface 11a, a ring-shaped second annular recessed portion 32 is formed around the opening 31a of the second flow path 31.

The first flow path 21 and the second flow path 31 are connected to the valve chamber 12, respectively. The first flow path 21 extends from the bottom to the middle portion of the valve chamber 12 and is connected to the outer peripheral edge portion of the valve chamber 12. The second flow path 31 is connected to the center of the bottom of the valve chamber 12. When the valve body 11 is connected to another flow path block or device, sealing members such as an O-ring or a gasket are arranged in the first annular recessed portion 22 and the second annular recessed portion 32, respectively.

In the valve body 11, an opening 31 b in the valve chamber 12 in the second flow path 31. A ring-shaped valve seat 13 is formed around. The valve seat 13 is formed on the bottom of the valve chamber 12 and is formed in parallel with the lower surface 11a.

A valve frame 41 is fixed to the upper portion of the valve body 11 by welding. The welding portion 41 a between the valve body 11 and the valve frame 41 seals the space between the valve body 11 and the valve frame 41. The valve frame 41 is formed in a cylindrical shape. A cylindrical valve stem 42 is inserted into the valve frame 41. The valve stem 42 is slidably supported by the inner peripheral surface of the valve frame 41. A valve body holding portion 42a is provided below the valve stem 42. The valve body holding portion 42a can hold the valve body 45. The valve body 45 is formed in a disc shape by a chemically resistant fluororesin or the like. The valve body 45 may be formed of an elastic body or the like. The valve body 45 faces the second flow path 31 and the valve seat 13. A portion of the valve body 45 that faces the valve seat 13 is formed with an annular convex portion.

A compression spring 43 is held on the upper portion of the valve frame 41. One end of the compression spring 43 is supported by the upper portion of the valve frame 41, and the other end is supported by a spring pressing tool 43 a mounted on the valve stem 42. With this configuration, the compression spring 43 imparts potential energy to the valve stem 42 in a direction away from the valve seat 13. The outer periphery of the cylindrical portion 42 b of the valve stem 42 and the cylindrical portion 41 b of the valve frame 41 are covered with a bellows 48. One end of the bellows 48 is connected to the upper portion of the cylindrical portion 41 b of the valve frame 41, and the other end of the bellows 48 is connected to the lower portion of the cylindrical portion 42 b of the valve stem 42, specifically, the valve body holding portion 42 a . The bellows 48 blocks the cylindrical portion 42 b of the valve stem 42 and the cylindrical portion 41 b of the valve frame 41 from the valve chamber 12.

In the above configuration, the actuator section generates a driving force for the valve stem 42. With this driving force and the potential imparting ability of the compression spring 43, the valve stem 42 moves back and forth in the direction of the valve seat 13. Thereby, the valve body 45 comes into contact with and leaves the valve seat 13. When the valve body 45 is in contact with the valve seat 13, the second flow path 31 and the valve chamber 12 It is blocked, and the second flow path 31 and the first flow path 21 are also blocked. On the other hand, when the valve body 45 is separated from the valve seat 13, the second flow path 31 communicates with the valve chamber 12, and the second flow path 31 communicates with the first flow path 21 through the valve chamber 12.

One of the first flow path 21 and the second flow path 31 becomes an inflow path of the fluid, and the other becomes an outflow path of the fluid. Either the first flow path 21 or the second flow path 31 may be a fluid inflow path. The fluid may be a gas or a liquid. The gas may be a reaction gas, nitrogen, air, or the like. The liquid can be medicinal solution, water, oil, etc. When the first flow path 21 and the second flow path 31 communicate with each other, the fluid flows into the valve chamber 12 from one of the inflow channels, and the fluid passes through the valve chamber 12 and flows out from the other to the outflow channel. When the first flow path 21 and the second flow path 31 are blocked, the fluid stops flowing.

In the flow path structure of the small-sized fluid control valve of this embodiment, a through hole 51 is formed in the valve body 11 from the end surface 11c in the widthwise direction to the valve chamber 12. The through-hole 51 penetrates the valve chamber 12 from the end surface 11 c and penetrates to the first flow path 21. The through-hole 51 has a circular cross section. The through hole 51 is connected to the upper end portion of the first flow path 21 (first connection flow path). That is, at the upper end portion of the first flow path 21, the first flow path 21, the valve chamber 12, and the through hole 51 are connected to each other. The diameter of the through-hole 51 is larger than the diameter of the first flow path 21, and the cross-sectional area of the through-hole 51 is larger than the cross-sectional area of the first flow path 21.

The opening 51c of the through-hole 51 in the end surface 11c is closed by a cover 55 (a closing member, a second closing member). In detail, by welding the lid 55 to the opening 51c, the opening 51c is closed by the lid 55. In addition, the cover 55 can be closed by the cover 55 by adhering the cover 55 to the opening 51c with an adhesive or the like. The cover 55 has a cross-sectional shape with the through-hole 51 Sheets of similar shape, that is, formed by circular sheets. The cover 55 is attached to the end surface 11c.

The through hole 51 is formed by cutting the valve body 11 from the end surface 11c in the widthwise direction. After the valve body 11 is cut to a position penetrating through the valve chamber 12, the valve body 11 is further cut to a position penetrating through the first flow path 21, thereby forming a through hole 51. Then, the opening 51 c of the through-hole 51 is closed by the cover 55. The valve chamber 12 and the through hole 51 may be formed in the valve body 11 first.

The embodiment described above has the following advantages.

• The valve body 11 is formed with a through hole 51 that penetrates from the end surface 11c in the widthwise direction to the valve chamber 12, and is provided with a cover 55 that can block the through hole 51 at the opening 51c of the end surface 11c. Therefore, the space in the valve chamber 12 can be enlarged by the through hole 51, and the fluid can be easily circulated in the valve chamber 12. Further, the valve body 11 is cut from the end surface 11c in the widthwise direction to form a through-hole 51, and the cover 51 is used to close the opening 51c of the through-hole 51 in the end surface 11c, so that the valve chamber 12 can be easily enlarged. Into free shapes or sizes.

• The space around the bellows 48 in the valve chamber 12 can be enlarged by the through hole 51. Therefore, the fluid can be easily circulated around the bellows 48.

‧The through hole 51 penetrates from the end surface 11 c in the widthwise direction of the valve body 11 to the valve chamber 12, and penetrates through the valve chamber 12 to the first flow path 21. Therefore, the flow path area of the connection portion between the first flow path 21 and the valve chamber 12 can be enlarged by the through hole 51.

• The diameter of the through-hole 51 is larger than the diameter of the first flow path 21, and the cross-sectional area of the through-hole 51 is larger than the cross-sectional area of the first flow path 21. So it can be light The flow path area of the connection portion between the first flow path 21 and the valve chamber 12 is easily enlarged.

(Second Embodiment)

Hereinafter, the second embodiment will be described focusing on the differences from the first embodiment. FIG. 4 is a cross-sectional view showing the valve portion 10 of the fluid control valve according to this embodiment, and FIG. 5 is a top view of the valve body 111 shown in the valve portion 10 of FIG. 4. The same components as those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

Although the general shape of the valve body 111 is the same as that of the valve body 11 of the first embodiment, the end surface 111c in the widthwise direction is formed into a curved shape. In the flow path structure of the small-sized fluid control valve of this embodiment, a through-hole 151 is formed in the valve body 111 instead of the through-hole 51 of the first embodiment. A lid 155 is provided instead of the lid 55 of the first embodiment. The other configurations are basically the same as those of the first embodiment.

The valve body 111 is formed with a through hole 151 penetrating from the first end surface 111 d in the longitudinal direction of the valve body 111 to the valve chamber 12. The through hole 151 penetrates the valve chamber 12 from the first end surface 111d and penetrates to the second end surface 111e. The through-hole 151 has a circular cross section. The through hole 151 is connected to the upper end portion of the first flow path 21 (first connection flow path). That is, at the upper end portion of the first flow path 21, the first flow path 21, the valve chamber 12, and the through hole 151 are connected to each other. The diameter of the through-hole 151 is larger than the diameter of the first flow path 21 and the valve chamber 12, and the cross-sectional area of the through-hole 151 is larger than the cross-sectional area of the first flow path 21 and the valve chamber 12.

Openings 151c of the through holes 151 in the first and second end faces 111d and 111e are closed by covers 155 (blocking members, second blocking members), respectively. The cover 155 has a shape similar to the cross-sectional shape of the through hole 151 Sheets, that is, formed by circular sheets. The cover 155 is attached to the first end surface 111d and the second end surface 111e, respectively.

The through hole 151 is formed by cutting the valve body 111 from the first end surface 111d in the longitudinal width direction. After the valve body 111 is cut to a position penetrating through the valve chamber 12, the valve body 111 is further cut to a position penetrating through the second end surface 111e, thereby forming a through hole 151. Then, the opening 151c of the through-hole 151 is closed by the cover 155. The valve chamber 12 and the through hole 151 may be formed in the valve body 111 first.

The embodiment described above has the following advantages. Here, only the advantages different from those of the first embodiment will be described.

-The valve body 111 is formed with a through hole 151 penetrating from the first end surface 111d in the longitudinal direction to the valve chamber 12, and has a cover 155 that can block the through hole 151 at the opening 151c of the first end surface 111d. Therefore, the space in the valve chamber 12 can be enlarged by the through hole 151, and the fluid can be easily circulated in the valve chamber 12. In addition, the valve body 111 is cut from the first end surface 111d in the longitudinal direction to form a through hole 151, and the cover 155 is used to close the opening 151c of the through hole 151 in the first end surface 111d, whereby the valve can be The chamber 12 is easily enlarged into a free shape or size.

The through hole 151 penetrates from the first end surface 111d in the longitudinal direction of the valve body 111 to the valve chamber 12 and is connected to the first flow path 21. Therefore, the flow path area of the connection portion between the first flow path 21 and the valve chamber 12 can be enlarged by the through hole 151.

‧The through hole 151 penetrates through the valve chamber 12 from the first end surface 111d in the longitudinal direction of the valve body 111 to the second end surface 111e. Moreover, the through hole 151 The openings in the first end surface 111d and the second end surface 111e are blocked by the cover 155, respectively. Therefore, the valve body 111 is cut from one end surface to the other end surface in the longitudinal direction, whereby the through hole 151 can be easily formed, and the valve chamber 12 can be enlarged in the vicinity of both end surfaces 111d and 111e.

• The diameter of the through-hole 51 is larger than the diameter of the first flow path 21 and the valve chamber 12, and the cross-sectional area of the through-hole 51 is larger than the cross-sectional area of the first flow path 21 and the valve chamber 12. Therefore, the flow path area of the connection portion between the first flow path 21 and the valve chamber 12 and the flow path area of the valve chamber 12 can be easily enlarged.

(Third Embodiment)

Hereinafter, the third embodiment will be described focusing on the differences from the first embodiment. FIG. 6 is a cross-sectional view showing the valve portion 10 of the fluid control valve according to this embodiment, and FIG. 7 is a top view of the valve body 211 shown in the valve portion 10 of FIG. 6. The same components as those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

Although the general shape of the valve body 211 is the same as that of the valve body 11 of the first embodiment, the end surface 111c in the widthwise direction is formed into a curved shape. In the flow path structure of the small-sized fluid control valve of this embodiment, a through hole 251 is formed in the valve body 211 instead of the through hole 51 of the first embodiment. In other words, a through-hole 251 is formed instead of the through-hole 151 of the second embodiment. A cover 255 is provided instead of the cover 55 of the first embodiment. In other words, a cover 255 is provided instead of the cover 155 of the second embodiment. The other configurations are basically the same as those of the first embodiment.

The valve body 211 is formed with a through hole 251 that penetrates from the end surface 211d in the longitudinal direction of the valve body 211 to the valve chamber 12. The cross section of the through hole 251 is Oval. The through hole 251 is formed in a range including the position of the valve seat 13 in the height direction of the valve body 211. The through hole 251 is formed at the same position as the valve chamber 12 and the valve seat 13 in the widthwise direction of the valve body 211. The long diameter of the through hole 251 is substantially equal to the diameter of the valve chamber 12.

The opening 251c of the through hole 251 in the end surface 211d is closed by the cover 255 (the closing member and the second closing member). The cover 255 is formed of a plate material having a cross-sectional shape similar to that of the through hole 251, that is, an oval plate material. The cover 255 is attached to the end surface 211d.

The through hole 251 is formed by cutting the valve body 211 from the end surface 211d in the widthwise direction. The valve body 211 is cut to a position penetrating the valve chamber 12, thereby forming a through hole 251. Then, the opening 251c of the through-hole 251 is closed by the cover 255. The valve chamber 12 and the through hole 251 may be formed in the valve body 211 first.

The embodiment described above has the following advantages. Here, only the advantages different from those of the above-mentioned embodiments will be described.

‧ Since the through hole 251 is formed in a range including the position of the valve seat 13 in the height direction of the valve body 211, the space around the valve seat 13 in the valve chamber 12 can be enlarged. Therefore, the fluid can be easily circulated around the valve seat 13, and the fluid can be easily circulated through the second flow path 31 having an opening inside the valve seat 13 and the valve chamber 12.

(Fourth Embodiment)

Hereinafter, the fourth embodiment will be described focusing on the differences from the first embodiment. FIG. 8 is a cross-sectional view showing the valve portion 10 of the fluid control valve according to this embodiment, and FIG. 9 is a valve body shown in the valve portion 10 of FIG. 8. Top view of 311. The same components as those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

Although the general shape of the valve body 311 is the same as that of the valve body 11 of the first embodiment, the end surface 111c in the widthwise direction is formed into a curved shape. In the flow path structure of the small-sized fluid control valve of this embodiment, a through-hole 351 is formed in the valve body 311 instead of the through-hole 51 of the first embodiment. In other words, a through-hole 351 is formed instead of the through-hole 251 of the third embodiment. A lid 355 is provided instead of the lid 55 of the first embodiment. In other words, a cover 355 is provided instead of the cover 255 of the third embodiment. The other configurations are basically the same as those of the first embodiment.

The valve body 311 is formed with a through hole 351 that penetrates from the end surface 311d in the longitudinal direction of the valve body 311 to the valve chamber 12. The through-hole 351 has a circular cross section. The through hole 351 is formed in a range including the position of the valve seat 13 in the height direction of the valve body 311. In the widthwise direction of the valve body 311, a through hole 351 is formed at a position on the side opposite to the first flow path 21 of the valve chamber 12 and the valve seat 13. That is, the first flow path 21 and the through hole 351 face each other with the bellows 48 and the valve chamber 12 interposed therebetween.

The opening 351c of the through hole 351 in the end surface 311d is closed by the cover 355 (the closing member and the second closing member). The cover 355 is formed by a plate material having a cross-sectional shape similar to that of the through-hole 351, that is, by a circular plate material. The cover 355 is attached to the end surface 311d.

The through hole 351 is formed by cutting the valve body 311 from the end surface 311d in the longitudinal width direction. The valve body 311 is cut to a position penetrating a part of the valve chamber 12 and the valve seat 13, thereby forming a through hole 351. then, The opening 351c of the through hole 351 is closed by the cover 355. In addition, the valve chamber 12 and the through hole 351 may be formed in the body 311 first.

The embodiment described above has the following advantages. Here, only the advantages different from those of the above-mentioned embodiments will be described.

• The first flow path 21 and the through hole 351 face each other with the bellows 48 and the valve chamber 12 interposed therebetween. Therefore, when the first flow path 21 becomes the inflow flow path, the space of the portion where the fluid on the side opposite to the first flow path 21 does not easily flow through the bellows 48 can be enlarged. Therefore, the fluid can be easily circulated around the valve seat 13 on the side opposite to the first flow path 21, and the second flow path 31 having an opening inside the valve seat 13 and the valve chamber 12 can be easily circulated. .

(Fifth Embodiment)

Hereinafter, the fifth embodiment will be described focusing on the differences from the first embodiment. FIG. 10 is a front view showing the valve body 411 of the fluid control valve according to this embodiment, FIG. 11 is a cross-sectional view taken along the line 11-11 in FIG. 10, FIG. 12 is a cross-sectional view taken along the line 12-12 in FIG. 11, and FIG. Rear view of the valve body 411. The same components as those in the first embodiment are denoted by the same reference numerals, and descriptions thereof will be omitted.

The schematic shape of the valve body 411 is the same as that of the valve body 11 of the first embodiment. In the flow path structure of the small fluid control valve of the present embodiment, the valve body 411 does not have the through-hole 51 of the first embodiment, and the first flow path 21 and the second flow path 31 of the first embodiment are changed. Composition. The other configurations are basically the same as those of the first embodiment.

Inside the valve body 411, a first vertical flow path 123 (first flow path) and a second vertical flow path are formed on the lower surface 11a of the valve body 411, respectively. Road 133 (second flow path). The first vertical flow path 123 and the second vertical flow path 133 extend from the first annular recessed portion 22 and the second annular recessed portion 32 in a direction perpendicular to the lower surface 11a, respectively. The first vertical flow path 123 and the second vertical flow path 133 are formed to be aligned in the widthwise direction of the valve body 411. The opening 121a of the first vertical flow path 123 on the lower surface 11a and the opening 131a of the second vertical flow path 133 on the lower surface 11a are aligned in the widthwise direction of the valve body 411. In the lower surface 11a, a ring-shaped first annular recessed portion 22 is formed around the opening 121a of the first vertical flow path 123. In the lower surface 11a, a ring-shaped second annular recessed portion 32 is formed around the opening 131a of the second vertical flow path 133.

The first vertical flow path 123 and the second vertical flow path 133 are connected to the valve chamber 12 through the first connection flow path and the second connection flow path, respectively.

The first connection flow path includes a first end surface flow path formed by the first groove-shaped recessed portion 126 and the cover 129 (the first closing member). The first groove-shaped recessed portion 126 is a groove-shaped recessed portion, and the valve body 411 has an opening in the first end surface 411d in the longitudinal width direction. The length in the height direction of the valve body 411 in the first groove-shaped recessed portion 126 (the first end surface flow path) is longer than the length in the width direction of the valve body 411 in the first groove-shaped recessed portion 126. The first groove-shaped recess 126 is connected to the first vertical flow path 123 by a first horizontal flow path 124 extending in the longitudinal width direction (horizontal direction) in the valve body 411. The first groove-shaped recessed portion 126 has an opening in the valve chamber 12. The first groove-shaped recessed portion 126 extends from the bottom to the middle portion of the valve chamber 12 and is connected to the outer peripheral edge portion of the valve chamber 12.

The opening 126 a of the first groove-shaped recessed portion 126 on the first end surface 411 d is closed by the cover 129. In detail, by welding the lid 129 to the opening 126 a, the opening 126 a is closed by the lid 129. The lid 129 is The shape of the opening 126 a of the first groove-shaped recessed portion 126 is a plate having a similar shape, that is, formed by an oval plate. The cover 129 is attached to the first end surface 411d.

The first groove-shaped recessed portion 126 is formed by cutting the valve body 411 from the first end surface 411d in the widthwise direction. After the first groove-shaped recessed portion 126 is formed, the first horizontal flow path 124 is formed by cutting the valve body 411 in the longitudinal width direction. Then, the opening 126 a of the first groove-shaped recessed portion 126 is closed by the cover 129. The valve chamber 12, the first vertical flow path 123, the first groove-shaped recess 126, and the first horizontal flow path 124 may be formed in the valve body 411 first.

The second connection flow path includes a second end surface flow path formed by the second groove-shaped recessed portion 136 and the cover 139 (third blocking member). The second groove-shaped recessed portion 136 is a groove-shaped recessed portion, and the valve body 411 has an opening in the second end surface 411e in the longitudinal direction. The length in the widthwise direction of the valve body 411 in the second groove-shaped recessed portion 136 (the second end surface flow path) is longer than the length in the height direction of the valve body 411 in the second groove-shaped recessed portion 136. The second groove-shaped recessed portion 136 is connected to the second vertical flow path 133 by a second horizontal flow path 134 extending in the longitudinal width direction (horizontal direction) in the valve body 411. The second groove-shaped recessed portion 136 is connected to a third horizontal flow path 137 that extends in the longitudinal width direction (horizontal direction) in the valve body 411. The third horizontal flow path 137 is connected to a third vertical flow path 138 extending in a direction perpendicular to the lower surface 11 a and having an opening in the valve chamber 12. The third vertical flow path 138 has an opening in the bottom of the valve chamber 12. In the valve body 411, an annular valve seat 13 is formed around the opening of the valve chamber 12 in the third vertical flow path 138.

The opening 136a of the second groove-shaped recess 136 in the second end surface 411e will Blocked by cover 139. The lid 139 is a plate material having a shape similar to that of the opening 136a of the second groove-shaped recessed portion 136, that is, is formed of an oval plate material. The cover 139 is attached to the second end surface 411e.

The second groove-shaped recessed portion 136 is formed by cutting the valve body 411 from the second end surface 411e in the longitudinal width direction. After the second groove-shaped recessed portion 136 is formed, the second horizontal flow path 134 and the third horizontal flow path 137 are formed by cutting the valve body 411 in the longitudinal width direction. Further, by cutting the valve body 411 in the height direction, the third vertical flow path 138 can be formed. Then, the opening 136 a of the second groove-shaped recessed portion 136 is closed by the lid 139. The second groove-shaped recess 136, the second horizontal flow path 134, the third horizontal flow path 137, and the third vertical flow path 138 may be formed in the valve body 411 first.

The first vertical flow path 123, the first horizontal flow path 124, and the first end surface flow path (the first groove-shaped recessed portion 126 and the cover 129) constitute a first flow path. The first horizontal flow path 124 and the first end surface flow path constitute a first connection flow path. In addition, through the second vertical flow path 133, the second horizontal flow path 134, the second end surface flow path (the second groove-shaped recess 136 and the cover 139), the third horizontal flow path 137, and the third vertical flow path 138, Forms the second flow path. The second horizontal flow path 134, the second end surface flow path, the third horizontal flow path 137, and the third vertical flow path 138 constitute a second connection flow path.

The embodiment described above has the following advantages. Here, only the advantages different from those of the first embodiment will be described.

‧The first flow path includes a first vertical flow path 123 extending from the first annular recessed portion 22 in a direction perpendicular to the lower surface 11a of the valve body 411, and the second flow path includes a vertical direction from the second annular recessed portion 32 11a below the valve body 411 The second vertical flow path 133 extends in the direction. Therefore, the first flow path and the second flow path can be connected perpendicularly to the annular recesses 22 and 32, respectively, and the interference between the annular recesses 22 and 32 and the first flow path and the second flow path can be suppressed. Therefore, rather than a structure in which the first flow path and the second flow path are connected obliquely to the annular recesses 22 and 32, it is possible to individually connect the annular recesses 22 and 23 to the first flow path and the second flow path. The area of the flow path becomes larger.

‧In order to connect the first flow path and the second flow path perpendicularly to the annular recesses 22 and 32, respectively, one of the first connection flow path and the second connection flow path may have a shape such as the shape of the first connection flow path or The size may be restricted. In this regard, the first connection flow path includes a first end surface flow path, and the first end flow path is a first groove shape having a groove shape having an opening on the first end surface 411d in the longitudinal direction in the valve body 411. The recessed portion 126 is formed by a cover 129 that can close the opening 126 a of the first groove-shaped recessed portion 126. The first end surface flow path is formed by cutting the first end surface 411d in the longitudinal direction in a groove shape in the valve body 411 to form a first groove-shaped recessed portion 126, and an opening 126a of the first groove-shaped recessed portion 126 is formed by a cover 129. The occlusion can thereby be easily formed into a free shape or size. Therefore, even in a structure in which the first flow path and the second flow path are vertically connected to the annular recesses 22 and 32, respectively, the flow path area of the first connection flow path can be secured by forming the first end surface flow path. As a result, in a small fluid control valve, it is possible to suppress the maximum flow rate from being restricted.

‧The second connection flow path includes a second end surface flow path. The second end surface flow path is a groove-shaped second groove-shaped recess 136 having a groove-shaped second end surface in the longitudinal direction of the valve body 411, and The cover 139 is formed by closing the opening 136 a of the second groove-shaped recess 136. Therefore, the flow path area of the second connection flow path can be easily secured, and the arrangement of the first flow path and the second flow path can be improved. Degrees of freedom.

‧The length in the height direction of the valve body 411 in the first end face flow path is longer than the length in the width direction of the valve body 411 in the first end face flow path. Therefore, while ensuring the flow path area of the first connection flow path, the first connection flow path can be extended in the height direction of the valve body 411, and the first connection flow path can be easily arranged.

‧ Since the first end face flow path has an opening in the valve chamber 12, the first connection flow path can be easily connected to the valve chamber 12, and the flow at the connection portion between the first connection flow path and the valve chamber 12 can be easily secured. Road area.

(Sixth embodiment)

Hereinafter, the sixth embodiment will be described focusing on the differences from the fifth embodiment. FIG. 14 is a front view showing the valve body 511 of the fluid control valve according to this embodiment, FIG. 15 is a cross-sectional view taken along the line 15-15 in FIG. 14, and FIG. 16 is a cross-sectional view taken along the line 16-16 in FIG. The same components as those in the first embodiment and the fifth embodiment are denoted by the same reference numerals, and a description thereof will be omitted.

In the flow path structure of the small fluid control valve of the present embodiment, two first flow paths are formed in the valve body 511, and the configuration of the first flow path and the second flow path of the fifth embodiment is changed. The other configurations are basically the same as those of the fifth embodiment.

Inside the valve body 511, two first vertical flow paths 223 (first flow paths) and a second flow path 231 having openings on the lower surface 11a of the valve body 511 are formed. The first vertical flow path 223 and the second flow path 231 extend from the first annular recessed portion 22 and the second annular recessed portion 32 in a direction perpendicular to the lower surface 11a, respectively. The two first vertical flow paths 223 and the second flow path 231 are arranged in the width direction of the valve body 511. Column formation. The two openings 221a of the first vertical flow path 223 on the lower surface 11a and the openings 231a of the second flow path 231 on the lower surface 11a are aligned in the widthwise direction of the valve body 511. In the lower surface 11 a, a ring-shaped first annular recessed portion 22 is formed around each of the openings 221 a of the two first vertical flow paths 223. In the lower surface 11a, a ring-shaped second annular recessed portion 32 is formed around the opening 231a of the second flow path 231.

Each of the two first vertical flow paths 223 is connected to the valve chamber 12 through a first connection flow path. The first connection flow path includes a first end surface flow path formed by the first groove-shaped recessed portion 226 and the cover 229 (the first closing member). The first groove-shaped recessed portion 226 is a groove-shaped recessed portion, and has an opening in the valve body 511 in the first end surface 511d in the longitudinal direction. The length in the height direction of the valve body 511 in the first groove-shaped recessed portion 226 (the first end surface flow path) is longer than the length in the width direction of the valve body 511 in the first groove-shaped recessed portion 226. The first groove-shaped recess 226 is connected to the first vertical flow path 223 by a first horizontal flow path 224 extending in the longitudinal width direction (horizontal direction) in the valve body 511. The first groove-shaped recessed portion 226 is connected to the valve chamber 12 through a fourth horizontal flow path 227 extending in the direction (horizontal direction) of the valve chamber 12 in the valve body 511.

The second flow path 231 (second connection flow path) has an opening in the bottom of the valve chamber 12. In the valve body 511, an annular valve seat 13 is formed around the opening of the second flow path 231 in the valve chamber 12.

The first vertical flow path 223, the first horizontal flow path 224, the first end surface flow path (the first groove-shaped recess 226 and the cover 229), and the fourth horizontal flow path 227 constitute a first flow path. The first horizontal flow path 224, the first end surface flow path, and the fourth horizontal flow path 227 constitute a first connection flow path. It is also possible to put two first One of the flow paths is used as the second flow path.

The embodiment described above has the following advantages. Here, only the advantages different from those of the above-mentioned embodiments will be described.

‧Since two first flow paths are formed, a three-port fluid control valve having two first flow paths and one second flow path 231 can be manufactured. In addition, the flow path area can be secured for each of the three flow paths.

(Seventh embodiment)

Hereinafter, the seventh embodiment will be described focusing on the differences from the fifth embodiment. FIG. 17 is a front view showing the valve body 611 of the fluid control valve according to this embodiment, FIG. 18 is a sectional view taken along the line 18-18 in FIG. 17, FIG. 19 is a sectional view taken along the line 19-19 in FIG. 18, and FIG. 20 is FIG. Rear view of the valve body 611. The same components as those in the first embodiment and the fifth embodiment are denoted by the same reference numerals, and a description thereof will be omitted.

In the flow path structure of the small fluid control valve of this embodiment, two valve chambers 12 (first valve chamber, second valve chamber) and two second flow paths are formed in the valve body 611, and the first The structure of the first flow path of the fifth embodiment. The other configurations are basically the same as those of the fifth embodiment.

Inside the valve body 611, a first vertical flow path 323 (first flow path) and two second vertical flow paths 333 (second flow path) are formed on the lower surface 11a of the valve body 611, respectively. The first vertical flow path 323 and the second vertical flow path 333 extend from the first annular recessed portion 22 and the second annular recessed portion 32 in a direction perpendicular to the lower surface 11a, respectively. The first vertical flow path 323 and the two second vertical flow paths 333 are formed to be aligned in the widthwise direction of the valve body 611. The opening 321a of the first vertical flow path 323 in the lower surface 11a and the opening of the two second vertical flow paths 333 in the lower surface 11a 331a is formed by being aligned in the widthwise direction of the valve body 611. In the lower surface 11a, a ring-shaped first annular recessed portion 22 is formed around the opening 321a of the first vertical flow path 323. In the lower surface 11a, a ring-shaped second annular recessed portion 32 is formed around the opening 331a of the two second vertical flow paths 333, respectively.

The first vertical flow path 323 and the second vertical flow path 333 are connected to the valve chamber 12 through the first connection flow path and the second connection flow path, respectively.

The first connection flow path includes a first end surface flow path formed by the first groove-shaped recessed portion 326 and the cover 329 (the first closing member). The first groove-shaped recessed portion 326 is a groove-shaped recessed portion and has an opening in the valve body 611 in the second end surface 611e in the longitudinal direction. The length in the widthwise direction of the valve body 611 in the first groove-shaped recessed portion 326 (the first end surface flow path) is longer than the length in the height direction of the valve body 611 in the first groove-shaped recessed portion 326. The first groove-shaped recesses 326 extend in the lateral width direction of the valve body 611 to the same positions as the respective valve seats 13 of the two valve chambers 12.

The central portion of the first groove-shaped recessed portion 326 in the lateral width direction of the valve body 611 is a first horizontal flow path 324 extending in the valve body 611 in the longitudinal width direction (horizontal direction), and flows perpendicularly to the first vertical flow path 324. Road 323 is connected. The first groove-shaped recessed portion 326 is connected to two second horizontal flow paths 327 extending in the longitudinal width direction (horizontal direction) in the valve body 611, respectively. The second horizontal flow path 327 is connected to the third vertical flow path 328 extending in a direction perpendicular to the lower surface 11 a and having openings in the two valve chambers 12 respectively.

The opening 326 a of the first groove-shaped recessed portion 326 on the second end surface 611 e is closed by the cover 329. The cover 329 is a plate material having a shape similar to the shape of the opening 326a of the first groove-shaped recessed portion 326, that is, an oval plate material. The cover 329 is attached to the second end surface 611e.

The first groove-shaped recessed portion 326 is formed by cutting the valve body 611 from the second end surface 611e in the widthwise direction. After the first groove-shaped recessed portion 326 is formed, the first horizontal flow path 324 is formed by cutting the valve body 611 in the longitudinal direction, and the second level is formed by cutting the valve body 611 in the longitudinal direction. Flow path 327. Then, the opening 326 a of the first groove-shaped recessed portion 326 is closed by the cover 329. The valve chamber 12, the first vertical flow path 323, the first groove-shaped recess 326, the first horizontal flow path 324, and the second horizontal flow path 327 may be formed in the valve body 611 first.

The second connection flow path forms the valve body 611 in the same manner as the first connection flow path of the fifth embodiment. The second connection flow path is formed corresponding to each of the two valve chambers 12.

The first vertical flow path 323, the first horizontal flow path 324, the first end surface flow path (the first groove-shaped recessed portion 326 and the cover 329), and the second horizontal flow path 327 constitute a first flow path. The first horizontal flow path 324, the first end surface flow path, and the second horizontal flow path 327 constitute a first connection flow path. The second vertical flow path 333, the second horizontal flow path 334, and the second end surface flow path (the second groove-shaped recess 336 and the cover 339) constitute a second flow path. The second horizontal flow path 334 and the second end surface flow path constitute a second connection flow path.

The embodiment described above has the following advantages. Here, only the advantages different from those of the above-mentioned embodiments will be described.

‧Two valve chambers 12 (a first valve chamber and a second valve chamber) are formed inside the valve body 611, and the first connection flow path connects the first vertical flow path 323 and the two valve chambers 12. Therefore, the flow path area of each flow path can be secured in a merging valve or a diverter valve provided with two valve chambers 12.

‧Since two second flow paths are formed, a three-port fluid control valve having one first flow path and two second flow paths can be manufactured. In addition, the flow path area can be secured for each of the three flow paths.

‧The length in the widthwise direction of the valve body 611 in the first end face flow path is longer than the length in the height direction of the valve body 611 in the first end face flow path. Therefore, while ensuring the flow path area of the first connection flow path, the first connection flow path can be extended in the widthwise direction of the valve body 611, and the first connection flow path can be easily arranged.

‧ Since the second end surface flow path has an opening in the valve chamber 12, the second connection flow path can be easily connected to the valve chamber 12, and the flow at the connection portion between the second connection flow path and the valve chamber 12 can be easily secured. Road area.

(Eighth embodiment)

Hereinafter, the eighth embodiment will be described focusing on the differences from the sixth embodiment. FIG. 21 is a front view showing the valve body 711 of the fluid control valve according to this embodiment, FIG. 22 is a sectional view taken along line 22-22 in FIG. 21, and FIG. 23 is a sectional view taken along line 23-23 in FIG. The same components as those in the first embodiment and the sixth embodiment are denoted by the same reference numerals, and a description thereof will be omitted.

In the flow path structure of the small fluid control valve of this embodiment, two valve chambers 12 (a first valve chamber and a second valve chamber) and two second flow paths are formed in the valve body 711, corresponding to two The valve chamber 12 changes the configuration of the first flow path in the sixth embodiment. The other configurations are basically the same as those of the sixth embodiment.

The first vertical flow path 423 is connected to each of the two valve chambers 12 through the first connection flow path. The first connection flow path includes a first end surface flow path formed by the first groove-shaped recessed portion 426 and the cover 429 (the first closing member). First groove-shaped recess 426 The groove-shaped recessed portion has an opening in the valve body 711 in the first end surface 711d in the longitudinal direction. The length in the height direction of the valve body 711 in the first groove-shaped recessed portion 426 (the first end surface flow path) is longer than the length in the width direction of the valve body 711 in the first groove-shaped recessed portion 426. The first groove-shaped recess 426 is connected to the first vertical flow path 423 by a first horizontal flow path 424 extending in the longitudinal width direction (horizontal direction) in the valve body 711. The first groove-shaped recessed portion 426 is connected to each of the two valve chambers 12 through a fourth horizontal flow path 427 extending in the direction (horizontal direction) of the two valve chambers 12 in the valve body 711.

The second flow path 431 (second connection flow path) has an opening in the bottom of the valve chamber 12. In the valve body 711, an annular valve seat 13 is formed around the opening of the valve chamber 12 in the second flow path 431.

The first vertical flow path 423, the first horizontal flow path 424, the first end surface flow path (the first groove-shaped recessed portion 426 and the cover 429), and the fourth horizontal flow path 427 constitute a first flow path. The first horizontal flow path 424, the first end surface flow path, and the fourth horizontal flow path 427 constitute a first connection flow path.

The embodiment described above has the following advantages. Here, only the advantages different from those of the above-mentioned embodiments will be described.

‧Two valve chambers 12 (a first valve chamber and a second valve chamber) are formed inside the valve body 711, and the first connection flow path connects the first vertical flow path 423 and the two valve chambers 12. Therefore, the flow path area of each flow path can be secured in a merging valve or a diverter valve provided with two valve chambers 12.

(Ninth Embodiment)

Hereinafter, the ninth embodiment will be described focusing on the differences from the first and fifth embodiments. Fig. 24 is a diagram showing a fluid control according to this embodiment. Front view of the valve body 811. The same components as those in the first and fifth embodiments are denoted by the same reference numerals, and a description thereof will be omitted.

The flow path structure of the small-sized fluid control valve of this embodiment is the flow path structure of the fifth embodiment. The through-hole 51 of the first embodiment is formed, and the opening 51 c of the through-hole 51 is closed by the cover 55. Therefore, this embodiment has the same advantages as the first embodiment and the fifth embodiment.

(Tenth embodiment)

Hereinafter, the tenth embodiment will be described focusing on the differences from the second and fifth embodiments. FIG. 25 is a front view showing the valve body 911 of the fluid control valve according to the present embodiment. The same components as those in the second and fifth embodiments are denoted by the same reference numerals, and a description thereof will be omitted.

The flow path structure of the small fluid control valve according to this embodiment is the flow path structure of the fifth embodiment. The through-hole 151 of the second embodiment is formed, and the opening 151c and the first groove of the through-hole 151 are covered by a cover 529. The opening 126 a of the concave portion 126 is closed. Therefore, this embodiment has the same advantages as the second embodiment and the fifth embodiment.

(Eleventh embodiment)

Hereinafter, the eleventh embodiment will be described focusing on the differences from the second and seventh embodiments. FIG. 26 is a front view showing a valve body 1011 of a fluid control valve according to this embodiment. The same components as those in the second and seventh embodiments are denoted by the same reference numerals, and a description thereof will be omitted.

The flow path structure of the small-sized fluid control valve of this embodiment is the flow path structure of the seventh embodiment. The through-hole 151 of the second embodiment is formed, and the opening 151c and the first groove of the through-hole 151 are covered by the cover 529. Dent 326 The opening 326a is closed. Therefore, this embodiment has the same advantages as the second embodiment and the seventh embodiment.

In addition, this embodiment has the following advantages. Here, only the advantages different from those of the above-mentioned embodiments will be described.

‧The through hole 151 penetrates from the end surface 1011d in the longitudinal width direction of the valve body 1011 to the valve chamber 12 and is connected to the second connection flow path. Therefore, the flow path area of the connection portion between the second connection flow path and the valve chamber 12 can be enlarged by the through hole.

(12th Embodiment)

Hereinafter, the twelfth embodiment will be described focusing on differences from the third and fifth embodiments. FIG. 27 is a front view showing the valve body 1111 of the fluid control valve according to the present embodiment. The same components as those in the third and fifth embodiments are denoted by the same reference numerals, and a description thereof will be omitted.

The flow path structure of the small fluid control valve according to this embodiment is the flow path structure of the fifth embodiment, and the through hole 251 of the third embodiment is formed, and the opening 251c of the through hole 251 and the first groove are formed by a cover 629. The opening 126 a of the concave portion 126 is closed. However, the through hole 251 and the first groove-shaped recessed portion 126 are formed by the end surface 1111d on the same side in the longitudinal width direction of the valve body 1111. Therefore, this embodiment has the same advantages as the third embodiment and the fifth embodiment.

(Thirteenth embodiment)

Hereinafter, the thirteenth embodiment will be described focusing on differences from the fifth embodiment. FIG. 28 is a front view showing a valve body 1211 of the fluid control valve according to this embodiment. Regarding the same components as the fifth embodiment, The same reference numerals are attached, and descriptions thereof are omitted.

The flow path structure of the small-sized fluid control valve according to this embodiment is the flow path structure of the fifth embodiment, and is applicable to a diaphragm-type small-sized fluid control valve. This fluid control valve is provided with a diaphragm 148 instead of the bellows 48 and the valve body 45 of FIG. 1. In the space below the diaphragm 148, the periphery of the valve seat 13 becomes the valve chamber 12. With such a configuration, there is an advantage that the fifth embodiment is based.

In addition, each of the embodiments described above may be modified and implemented as follows.

‧ A flow path structure may be adopted in which the through-hole 51 does not penetrate to the first connection flow path, but only penetrates to the valve chamber 12.

‧The first end face flow path is not limited to a structure that extends vertically to the lower surface 11a of the valve body, but may be a structure that extends slightly obliquely to the lower surface 11a.

Claims (24)

A flow path structure of a small fluid control valve. The small fluid control valve is provided with a valve body, and the valve body has a valve chamber formed therein. In the upper perspective, the longitudinal width of the valve body is narrower than the lateral width. The chamber has an opening on the upper surface of the valve body, and inside the valve body, there are formed a first flow path and a second flow path which are arranged below the valve body in the widthwise direction and have openings, respectively. A ring-shaped first annular recess is formed around the opening of the first flow path, and a ring-shaped second ring is formed around the opening of the second flow path in the lower surface. The first recess and the second recess are connected to the valve chamber respectively, and the valve body is formed with a through hole that penetrates from the end surface in the widthwise direction to the valve chamber. A blocking member that closes an opening of the through hole in the end surface. The flow path structure of the small fluid control valve according to claim 1, wherein in the valve body, an annular valve seat is formed around the opening of the valve chamber in the second flow path, and the through hole extends from the horizontal direction. The end surface in the wide direction passes through the valve chamber and penetrates to the first flow path. A flow path structure of a small fluid control valve. The small fluid control valve is provided with a valve body, and the valve body is formed with a valve chamber inside. In the upper perspective, the longitudinal width of the valve body is narrower than the lateral width. Inside the valve body, there are formed a first flow path and a second flow path which are arranged in the width direction of the lower surface of the valve body and have openings, respectively. In the lower surface, the openings in the first flow path are formed. An annular first annular recessed portion is formed around the periphery, and in the aforementioned lower surface, an annular second annular recessed portion is formed around the opening of the second flow path, the first flow path and the second The flow path is respectively connected to the valve chamber, and the valve body is formed with a through hole penetrating from the end surface in the longitudinal width direction to the valve chamber, and is provided with a block that can close the opening of the through hole at the end surface. member. The flow path structure of the small fluid control valve according to claim 3, wherein in the valve body, an annular valve seat is formed around the opening of the valve chamber in the second flow path, and the through hole is connected to The first flow path. The flow path structure of the small fluid control valve according to claim 3, wherein in the valve body, an annular valve seat is formed around the opening of the valve chamber in the first flow path, and the through hole is connected to The second flow path. The flow path structure of the small fluid control valve according to any one of claims 3 to 5, wherein the end surface is a first end surface, and the through-hole passes through the valve chamber from the first end surface in the longitudinal width direction to the first Both end surfaces are provided with a blocking member capable of blocking the opening of the through hole in the second end surface. The flow path structure of the small fluid control valve according to any one of claims 2, 4, and 5, wherein the through-hole is formed in a range including a position of the valve seat in a height direction of the valve body. For example, the flow path structure of the small fluid control valve according to claim 1, wherein the first flow path includes a first vertical flow path extending from the first annular recessed portion to a direction perpendicular to the lower surface, and connected to the first first flow path. The vertical flow path and the first connection flow path of the valve chamber. The second flow path includes a second vertical flow path extending from the second annular recessed portion in a direction perpendicular to the lower surface, and a second vertical flow path connecting the second vertical recess. The flow path and the second connection flow path of the valve chamber. The first connection flow path includes a first end face flow path. The first end face flow path has an opening in an end face of the valve body in the longitudinal width direction. The groove-shaped first groove-shaped recessed portion is formed by a blocking member capable of blocking the opening of the first groove-shaped recessed portion. A flow path structure of a small fluid control valve. The small fluid control valve is provided with a valve body, and the valve body is formed with a valve chamber inside. In the upper perspective, the longitudinal width of the valve body is narrower than the lateral width. Inside the valve body, there are formed a first flow path and a second flow path which are arranged in the width direction of the lower surface of the valve body and have openings, respectively. In the lower surface, the openings in the first flow path are formed. A ring-shaped first ring-shaped recessed portion is formed around the periphery. In the aforementioned lower surface, a ring-shaped second ring-shaped recessed portion is formed around the opening of the second flow path. The first flow path includes: The first vertical flow path of the first annular recessed portion extending in a direction perpendicular to the lower surface, and the first connection flow path connecting the first vertical flow path and the valve chamber, and the second flow path includes: The second annular recessed portion extends in a direction perpendicular to the lower surface, a second vertical flow path, and a second connection flow path connecting the second vertical flow path and the valve chamber. The first connection flow path includes a first end surface. Flow path, the first end flow path is formed by the valve The body is formed of a first groove-shaped recessed portion having an opening in an end surface in the longitudinal width direction and a first blocking member capable of blocking the opening of the first groove-shaped recessed portion. For example, the flow path structure of the small fluid control valve according to claim 9, wherein the second connection flow path includes a second end surface flow path, and the second end flow path is an end surface in the longitudinal direction of the valve body. A groove-shaped second groove-shaped recessed portion having an opening, and a third blocking member capable of blocking the opening of the second groove-shaped recessed portion. The flow path structure of the small fluid control valve according to claim 9 or 10, wherein the first flow path is formed in the valve body. The flow path structure of the small fluid control valve according to claim 9 or 10, wherein the valve chamber is a first valve chamber, and a second valve chamber is formed inside the valve body, and the first connection flow path is connected to the first valve chamber. The vertical flow path, the first valve chamber, and the second valve chamber. The flow path structure of the small fluid control valve according to claim 12, wherein the valve body is formed with the two second flow paths. The flow path structure of the small fluid control valve according to claim 9, wherein the length in the height direction of the valve body in the first end face flow path is longer than the length in the width direction of the valve body in the first end face flow path. Still long. The flow path structure of the small-sized fluid control valve according to claim 9, wherein in the valve body, an annular valve seat is formed around the opening of the valve chamber in the second connection flow path. The flow path structure of the small fluid control valve according to claim 9, wherein the first end surface flow path has an opening in the valve chamber. The flow path structure of the small fluid control valve according to claim 9, wherein the length in the width direction of the valve body in the first end face flow path is longer than the length in the height direction of the valve body in the first end face flow path. Still long. The flow path structure of the small fluid control valve according to claim 9, wherein in the valve body, an annular valve seat is formed around the opening of the valve chamber in the first connection flow path. For example, the flow path structure of the small fluid control valve according to claim 9, wherein the second connection flow path includes a second end surface flow path, and the second end flow path is an end surface in the longitudinal direction of the valve body. The second groove-shaped recessed portion having an opening is formed by a third blocking member that can block the opening of the second groove-shaped recessed portion, and the second end surface flow path has an opening in the valve chamber. The flow path structure of the small fluid control valve according to claim 15 or 16, wherein the valve body is formed with a through hole that penetrates from the end surface in the longitudinal direction to the valve chamber, and is provided with a through hole that allows the through hole to pass through. The second blocking member that closes the opening on the end surface, and the through hole is connected to the first connection flow path. The flow path structure of the small fluid control valve according to claim 18 or 19, wherein the valve body is formed with a through hole that penetrates from the end surface in the longitudinal direction to the valve chamber, and is provided with a through hole that allows the through hole to pass through The second blocking member that closes the opening on the end surface, and the through hole is connected to the second connection flow path. The flow path structure of the small fluid control valve according to claim 20, wherein the end surface is a first end surface, and the through-hole is penetrated from the first end surface in the longitudinal width direction to the second end surface through the valve chamber, and is provided with There is a second blocking member that can block the opening of the through hole in the second end surface. The flow path structure of the small fluid control valve according to claim 15 or 16, wherein the valve body is formed with a through hole penetrating from the end surface in the widthwise direction through the valve chamber to the first connection flow path, and The second blocking member is provided to block an opening of the through hole at the end surface. The flow path structure of the small fluid control valve according to claim 15 or 18, wherein the valve body is formed with a through hole penetrating from an end surface in the longitudinal direction to the valve chamber, and the through hole is formed in the valve. The range of the position of the valve seat is included in the height direction of the body.