JP6648112B2 - Flow path structure of small fluid control valve - Google Patents

Description

  The present invention relates to a channel structure of a small fluid control valve for controlling a fluid.

  Conventionally, a valve chamber, a first flow path and a second flow path that are open at the lower surface are formed inside a valve body of a fluid control valve, and the first flow path and the second flow path are communicated with the valve chamber. (See Patent Document 1). The fluid control valve described in Patent Literature 1 is a small fluid control valve having a width of about 10 mm in order to reduce an occupied area when a plurality of valves are integrated.

JP 2011-12700 A

  By the way, in the fluid control valve described in Patent Literature 1, an annular concave portion for disposing a seal member is formed around the openings of the first flow path and the second flow path. For example, since it is necessary to form the first flow path and the annular recess so that the first flow path and the annular recess do not interfere with each other, the shape and dimensions of the first flow path are limited. Therefore, in the small-sized fluid control valve described in Patent Document 1, it is not possible to sufficiently secure the flow passage area of the first flow passage or the flow passage area of the connection portion between the first flow passage and the valve chamber. The maximum flow rate of the fluid that can flow through the control valve is limited.

  The present invention has been made to solve such a problem, and a main object of the present invention is to provide a flow path structure of a small-sized fluid control valve capable of suppressing a limitation on a maximum flow rate.

  Hereinafter, the means for solving the above-mentioned problems and the effects thereof will be described.

  The first means is a flow channel structure of a small fluid control valve including a valve body having a valve chamber formed therein, wherein a vertical width of the valve body is narrower than a horizontal width in a top view, Inside the main body, a first flow path and a second flow path that are respectively opened in the lateral direction on the lower surface of the valve main body are formed, and the lower surface of the opening of the first flow path is formed on the lower surface. An annular first annular recess is formed around the periphery, and an annular second annular recess is formed around the opening of the second channel on the lower surface, and the first channel and the first channel are formed. The second flow path is connected to each of the valve chambers, and the valve main body is formed with a through-hole penetrating from the end face in the width direction to the valve chamber, and the end face of the through-hole is formed in the valve body. And a closing member that closes the opening.

  According to the above configuration, the small fluid control valve includes the valve body, and the valve chamber is formed inside the valve body. In top view, the vertical width of the valve body is smaller than the horizontal width. That is, in order to reduce the area occupied by the small fluid control valve, the vertical width of the valve body is reduced.

  Inside the valve main body, a first flow path and a second flow path that are respectively opened in the lateral direction on the lower surface of the valve main body are formed. On the lower surface of the valve body, an annular first annular recess is formed around the opening of the first flow path, and an annular second annular recess is formed around the opening of the second flow path. Therefore, when the small fluid control valve is connected to a fluid flow path or another device, a seal member can be disposed in the first annular concave portion and the second annular concave portion.

  The valve body has a through hole penetrating from the end face in the lateral width direction to the valve chamber, and includes a second closing member for closing an opening of the through hole at the end face. For this reason, the space in the valve chamber can be enlarged by the through hole, and the fluid can be easily circulated in the valve chamber. Moreover, the valve chamber is easily cut into a free shape and size by forming a through hole by cutting from the end face in the width direction in the valve body and closing the opening at the end face of the through hole with the second closing member. Can be expanded.

  In the second means, in the valve body, an annular valve seat is formed around an opening of the second flow path in the valve chamber, and the through hole is formed from an end face in the lateral width direction. It penetrates through the valve chamber to the first flow path.

  According to the above configuration, the flow passage area of the connection portion between the first flow passage and the valve chamber can be enlarged by the through hole.

  The third means is a flow path structure of a small fluid control valve including a valve body in which a valve chamber is formed, wherein a vertical width of the valve body is narrower than a horizontal width in a top view, Inside the main body, a first flow path and a second flow path that are respectively opened in the lateral direction on the lower surface of the valve main body are formed, and the lower surface of the opening of the first flow path is formed on the lower surface. An annular first annular recess is formed around the periphery, and an annular second annular recess is formed around the opening of the second channel on the lower surface, and the first channel and the first channel are formed. The second flow path is connected to each of the valve chambers, and the valve body is formed with a through hole penetrating from the end face in the vertical width direction to the valve chamber, and the end face of the through hole is formed. And a closing member for closing the opening at the end.

  According to the above configuration, the valve main body is formed with the through hole penetrating from the end face in the longitudinal width direction to the valve chamber, and includes the second closing member that closes the opening of the through hole at the end face. . For this reason, the space in the valve chamber can be enlarged by the through hole, and the fluid can be easily circulated in the valve chamber. In addition, the valve body is easily formed into a free shape and size by forming a through hole by cutting from the end surface in the longitudinal width direction of the valve body and closing the opening at the end surface of the through hole with the second closing member. Can be expanded to:

  In the fourth means, in the valve body, an annular valve seat is formed around an opening of the second flow path in the valve chamber, and the through hole is connected to the first flow path. ing.

  According to the above configuration, the flow passage area of the connection portion between the first flow passage and the valve chamber can be enlarged by the through hole.

  In a fifth aspect, in the valve body, an annular valve seat is formed around an opening of the first flow path in the valve chamber, and the through hole is connected to the second flow path. ing.

  According to the above configuration, the flow passage area of the connection portion between the second flow passage and the valve chamber can be enlarged by the through hole.

  In the sixth means, the end face is a first end face, and the through hole penetrates from the first end face in the longitudinal width direction to a second end face via the valve chamber, and A closing member for closing an opening at the second end surface;

  According to the above configuration, the through hole penetrates from the first end face in the longitudinal width direction of the valve body to the second end face via the valve chamber. The openings at the first end surface and the second end surface of the through hole are closed by closing members. Therefore, by cutting from one end face in the longitudinal width direction to the other end face in the valve body, the through hole can be easily formed, and the valve chamber can be enlarged near both end faces.

  In a seventh aspect, the through hole is formed in a range including the position of the valve seat in a height direction of the valve body.

  According to the above configuration, since the through hole is formed in a range including the position of the valve seat in the height direction of the valve body, the space around the valve seat in the valve chamber can be enlarged. For this reason, it becomes easy to distribute | circulate a fluid around a valve seat, and it becomes easy to distribute | circulate a fluid between the flow path opened inside a valve seat, and a valve chamber.

  Eighth means is that the first flow path is a first vertical flow path extending from the first annular recess in a direction perpendicular to the lower surface, and a first connection connecting the first vertical flow path and the valve chamber. A second vertical flow path extending from the second annular recess in a direction perpendicular to the lower surface, and a second connection connecting the second vertical flow path and the valve chamber. A flow path, wherein the first connection flow path is a groove-shaped first groove-shaped recess that opens on the end face in the longitudinal width direction in the valve body, and a closing member that closes the opening of the first groove-shaped recess. And a first end surface flow path formed by the above.

  The ninth means is a flow channel structure of a small fluid control valve including a valve body in which a valve chamber is formed, and a vertical width of the valve body is smaller than a horizontal width in a top view, Inside the valve body, a first flow path and a second flow path that are respectively opened in the lateral direction on the lower surface of the valve main body are formed, and the lower surface of the first flow path is formed on the lower surface. An annular first annular concave portion is formed around the opening, and an annular second annular concave portion is formed on the lower surface around the opening of the second flow channel, and the first flow channel is formed. Includes a first vertical flow path extending from the first annular recess in a direction perpendicular to the lower surface, and a first connection flow path connecting the first vertical flow path and the valve chamber; A second vertical flow path extending from the second annular recess in a direction perpendicular to the lower surface; A first connection flow path including a flow path and a second connection flow path that connects the valve chamber, wherein the first connection flow path is a groove-shaped first groove-shaped concave portion that is opened at an end face in the vertical width direction in the valve body; A first closing channel formed by a first closing member closing the opening of the first groove-shaped recess.

  According to the eighth and ninth means, the first flow path includes the first vertical flow path extending from the first annular recess in a direction perpendicular to the lower surface of the valve body, and the second flow path extends from the second annular recess. A second vertical flow path extends in a direction perpendicular to the lower surface of the valve body. Therefore, the first flow path and the second flow path can be vertically connected to the annular recess, respectively, and it is possible to suppress interference between the annular recess and the first flow path and the second flow path. . Therefore, compared with a structure in which the first flow path and the second flow path are obliquely connected to the annular recess, the flow area of the connecting portion between the annular recess and the first flow path and the second flow path is increased. be able to. The first vertical flow path and the valve chamber are connected by a first connection flow path, and the second vertical flow path and the valve chamber are connected by a second connection flow path.

  Here, in order to vertically connect the first flow path and the second flow path to the annular recess, one of the first connection flow path and the second connection flow path, for example, the shape of the first connection flow path or the like. Dimensions may be limited. In this regard, the first connection flow path is formed by a groove-shaped first groove-shaped recess that opens on the end face in the longitudinal direction of the valve body and a first closing member that closes the opening of the first groove-shaped recess. A first end surface flow path. The first end face flow path is formed by cutting the end face in the longitudinal width direction into a groove shape in the valve body to form a first groove-shaped recess, and closing an opening of the first groove-shaped recess with a first closing member. It can be easily formed into any shape and size. For example, by welding or bonding the first closing member to the opening of the first groove-shaped recess, the opening of the first groove-shaped recess is closed by the first closing member. Therefore, even in a structure in which the first flow path and the second flow path are respectively connected vertically to the annular recess, the flow path area of the first connection flow path is secured by forming the first end flow path. be able to. As a result, it is possible to suppress the maximum flow rate from being limited in the small fluid control valve.

  In the tenth means, the second connection flow path is a groove-shaped second groove-shaped recess opening on the end face in the longitudinal width direction in the valve body, and a first groove closing the opening of the second groove-shaped recess. A second end surface channel formed by the closing member.

  According to the above configuration, the second connection flow path is formed by the groove-shaped second groove-shaped recess opening on the end face in the longitudinal width direction in the valve body and the first closing member closing the opening of the second groove-shaped recess. A second end surface flow path formed. For this reason, it becomes easy to secure the flow path area of the second connection flow path, and the degree of freedom in arranging the first flow path and the second flow path can be improved.

  In an eleventh means, the valve body has the two first flow paths formed therein.

  According to the above configuration, since two first flow paths are formed, a three-port fluid control valve including two first flow paths and one second flow path can be manufactured. In each of the three flow paths, a flow path area can be secured.

  In a twelfth aspect, the valve chamber is a first valve chamber, a second valve chamber is formed inside the valve body, and the first connection channel is the first vertical channel, The first valve chamber is connected to the second valve chamber.

  According to the above configuration, the first valve chamber and the second valve chamber are formed inside the valve body, and the first connection flow path includes the first vertical flow path, the first valve chamber, and the second valve chamber. Are connected. For this reason, in the merging valve or the branch valve provided with the first valve chamber and the second valve chamber, the flow path area of each flow path can be secured.

  In a thirteenth aspect, the valve body has two second flow paths.

  According to the above configuration, since two second flow paths are formed, a three-port fluid control valve including one first flow path and two second flow paths can be manufactured. In each of the three flow paths, a flow path area can be secured.

  Specifically, as in a fourteenth aspect, the height of the valve body in the first end face flow path is longer than the length of the valve body in the width direction of the first end flow path. Such a configuration can be adopted. According to such a configuration, the first connection flow path can be extended in the height direction of the valve body while securing the flow path area of the first connection flow path, and the arrangement of the first connection flow path is facilitated. Can be.

  Specifically, as in the fifteenth aspect, the valve body has a configuration in which an annular valve seat is formed around an opening of the second connection flow path in the valve chamber. Can be. According to such a configuration, the valve body of the fluid control valve is brought into contact with and separated from the valve seat, so that the second flow path and the valve chamber can be shut off and communicated with each other. The two flow paths and the first flow path can be blocked and communicated.

  In a sixteenth aspect, the first end surface flow path is open in the valve chamber.

  According to the above configuration, since the first end face flow path is opened in the valve chamber, the first connection flow path can be easily connected to the valve chamber, and the connection between the first connection flow path and the valve chamber can be achieved. The passage area of the portion can be easily secured.

  Specifically, as in the seventeenth means, the length in the width direction of the valve body in the first end face flow path is longer than the length in the height direction of the valve body in the first end face flow path. Such a configuration can be adopted. According to such a configuration, it is possible to extend the first connection flow channel in the lateral width direction of the valve main body while securing the flow channel area of the first connection flow channel, thereby facilitating the arrangement of the first connection flow channel. it can.

  Specifically, as in an eighteenth aspect, in the valve body, a configuration is adopted in which an annular valve seat is formed around an opening of the first connection flow path in the valve chamber. Can be. According to such a configuration, by contacting and separating the valve body of the fluid control valve with respect to the valve seat, the first flow path and the valve chamber can be cut off and communicated with each other. The first flow path and the second flow path can be blocked and communicated.

  In a nineteenth aspect, the second connection flow path includes a groove-shaped second groove-shaped recess opening on the end face in the longitudinal direction of the valve body, and a first groove closing the opening of the second groove-shaped recess. A second end surface flow path formed by a closing member, wherein the second end surface flow path is open in the valve chamber.

  According to the above configuration, since the second end face flow path is opened in the valve chamber, the second connection flow path can be easily connected to the valve chamber, and the connection between the second connection flow path and the valve chamber can be achieved. The passage area of the portion can be easily secured.

  In a twentieth means, a through hole is formed in the valve body and penetrates from an end face in the longitudinal width direction to the valve chamber, and a second closing member for closing an opening at the end face of the through hole is provided. And the through hole is connected to the first connection channel.

  According to the above configuration, the through hole penetrates from the end face in the vertical width direction of the valve body to the valve chamber, and is connected to the first connection flow path. For this reason, the flow passage area of the connection portion between the first connection flow passage and the valve chamber can be enlarged by the through hole.

  In a twenty-first means, a through-hole is formed in the valve body from an end face in the longitudinal width direction to the valve chamber, and a second closing member for closing an opening of the through-hole at the end face is provided. And the through-hole is connected to the second connection channel.

  According to the above configuration, the through hole penetrates from the end face in the vertical width direction of the valve body to the valve chamber, and is connected to the second connection flow path. Therefore, the flow passage area of the connection portion between the second connection flow passage and the valve chamber can be enlarged by the through hole.

  In a twenty-second means, the end face is a first end face, and the through hole penetrates from the first end face in the longitudinal width direction to a second end face via the valve chamber, and A second closing member for closing the opening at the second end surface;

  According to the above configuration, the through hole penetrates from the first end face in the longitudinal width direction of the valve body to the second end face via the valve chamber. The openings at the first end face and the second end face of the through hole are closed by second closing members, respectively. Therefore, by cutting from one end face in the longitudinal width direction to the other end face in the valve body, the through hole can be easily formed, and the valve chamber can be enlarged near both end faces.

  In a twenty-third means, a through hole is formed in the valve body from an end face in the width direction to the first connection flow path through the valve chamber, and a through hole at the end face of the through hole is formed. A second closing member for closing the opening is provided.

  According to the above configuration, the through hole penetrates from the end face in the lateral width direction of the valve body to the valve chamber, and penetrates to the first connection flow path via the valve chamber. For this reason, the flow passage area of the connection portion between the first connection flow passage and the valve chamber can be enlarged by the through hole.

  In a twenty-fourth aspect, the valve body is formed with a through-hole penetrating from the end face in the longitudinal width direction to the valve chamber, and the through-hole is provided in the valve seat in a height direction of the valve body. Are formed in a range including the position of.

  According to the above configuration, since the through hole is formed in a range including the position of the valve seat in the height direction of the valve body, the space around the valve seat in the valve chamber can be enlarged. For this reason, it becomes easy to distribute | circulate a fluid around a valve seat, and it becomes easy to distribute | circulate a fluid between the flow path opened inside a valve seat, and a valve chamber.

FIG. 2 is a sectional view showing a valve section of the fluid control valve according to the first embodiment. The top view which shows the valve main body among the valve parts of FIG. FIG. 3 is a sectional view taken along line 3-3 of the valve unit in FIG. 1. Sectional drawing which shows the valve part of the fluid control valve which concerns on 2nd Embodiment. The top view which shows the valve main body among the valve parts of FIG. FIG. 10 is a sectional view showing a valve section of a fluid control valve according to a third embodiment. The top view which shows the valve main body among the valve parts of FIG. FIG. 14 is a sectional view showing a valve section of a fluid control valve according to a fourth embodiment. FIG. 9 is a top view showing a valve main body in the valve section of FIG. 8. The front view showing the valve main part of the fluid control valve concerning a 5th embodiment. FIG. 11 is a sectional view taken along line 11-11 of FIG. 10. FIG. 12 is a sectional view taken along line 12-12 of FIG. 11. The rear view of the valve main body of FIG. The front view showing the valve main part of the fluid control valve concerning a 6th embodiment. FIG. 15 is a sectional view taken along line 15-15 of FIG. 14; FIG. 16 is a sectional view taken along line 16-16 of FIG. 15. The front view showing the valve main part of the fluid control valve concerning a 7th embodiment. FIG. 18 is a sectional view taken along line 18-18 of FIG. 17. FIG. 19 is a sectional view taken along line 19-19 of FIG. 18. FIG. 18 is a rear view of the valve body of FIG. 17. The front view showing the valve main part of the fluid control valve concerning an 8th embodiment. FIG. 22 is a sectional view taken along line 22-22 of FIG. 21. FIG. 23 is a sectional view taken along line 23-23 of FIG. 22. The front view showing the valve main part of the fluid control valve concerning a 9th embodiment. The front view showing the valve main part of the fluid control valve concerning a 10th embodiment. The front view showing the valve main part of the fluid control valve concerning an 11th embodiment. The front view showing the valve main part of the fluid control valve concerning a 12th embodiment. The front view showing the valve body of the fluid control valve concerning a 13th embodiment.

(1st Embodiment)
Hereinafter, a first embodiment embodied as a small fluid control valve used in a semiconductor manufacturing apparatus or the like will be described with reference to FIGS. FIG. 1 is a sectional view showing a valve portion 10 of the fluid control valve according to the present embodiment, FIG. 2 is a top view showing a valve body 11 of the valve portion 10 in FIG. 1, and FIG. FIG. 3 is a sectional view taken along line -3.

  The fluid control valve includes a valve unit 10 for controlling a fluid, and an actuator unit (not shown) for applying a driving force to the valve unit 10. As the actuator unit, a pneumatic device, an electromagnetic solenoid, a piezo element, a motor, or the like can be used. An actuator unit is connected to the valve unit 10 via an adapter (not shown).

  The valve section 10 includes a valve body 11, a holder 41, a stem 42, a compression spring 43, a valve body 45, a bellows 48, and the like.

  The valve main body 11 is formed in a block shape (a rectangular parallelepiped shape in general). In the top view shown in FIG. 2, the vertical width (vertical width in FIG. 2) of the valve body 11 is smaller than the horizontal width (horizontal width in FIG. 2). The vertical width of the valve body 11 is approximately 10 mm, and the horizontal width is approximately 33 mm. Bolt holes 11b are formed at both ends in the width direction of the valve body 11. Bolts for connecting the valve body 11 to other flow path blocks or devices are inserted into the bolt holes 11b.

  A valve chamber 12 is formed inside the valve body 11. The valve chamber 12 extends upward from the middle of the valve body 11 in the height direction (vertical direction in FIG. 1) and is a columnar space. The valve chamber 12 is formed at the center in the vertical width direction and the center in the horizontal width direction when viewed from above in FIG. The upper end of the valve chamber 12 opens on the upper surface of the valve body 11.

  Inside the valve main body 11, a first flow path 21 and a second flow path 31 that are respectively opened on the lower surface 11a of the valve main body 11 are formed. The first flow path 21 and the second flow path 31 are formed side by side in the width direction of the valve body 11. The opening 21a on the lower surface 11a of the first flow passage 21 and the opening 31a on the lower surface 11a of the second flow passage 31 are formed side by side in the width direction of the valve body 11. On the lower surface 11a, an annular first annular concave portion 22 is formed around the opening 21a of the first flow path 21. On the lower surface 11a, an annular second annular concave portion 32 is formed around the opening 31a of the second flow path 31.

  The first flow path 21 and the second flow path 31 are connected to the valve chamber 12, respectively. The first flow path 21 extends from the bottom to the middle of the valve chamber 12 and is connected to the outer peripheral edge of the valve chamber 12. The second flow path 31 is connected to the center of the bottom of the valve chamber 12. When connecting the valve body 11 to another flow path block or device, a seal member such as an O-ring or a gasket is disposed in each of the first annular concave portion 22 and the second annular concave portion 32.

  In the valve body 11, an annular valve seat 13 is formed around the opening 31b in the valve chamber 12 of the second flow path 31. The valve seat 13 is formed at the bottom of the valve chamber 12, and is formed parallel to the lower surface 11a.

  A holder 41 is fixed to the upper part of the valve body 11 by welding. The welded portion 41a between the valve body 11 and the holder 41 seals the space between the valve body 11 and the holder 41. The holder 41 is formed in a cylindrical shape. A cylindrical stem 42 is inserted into the holder 41. The stem 42 is slidably supported by the inner peripheral surface of the holder 41. A valve body holding portion 42a is provided below the stem 42. The valve body 45 is held by the valve body holding portion 42a. The valve body 45 is formed in a disk shape from a fluorine resin having chemical resistance or the like. Note that the valve body 45 may be formed of an elastic body or the like. The valve body 45 faces the second flow path 31 and the valve seat 13. An annular projection is formed at a portion of the valve body 45 facing the valve seat 13.

  A compression spring 43 is held on the upper part of the holder 41. One end of the compression spring 43 is supported on the upper part of the holder 41, and the other end is supported by a spring retainer 43 a attached to the stem 42. With such a configuration, the compression spring 43 urges the stem 42 in a direction to separate the stem 42 from the valve seat 13. The outer circumferences of the cylindrical portion 42b of the stem 42 and the cylindrical portion 41b of the holder 41 are covered with a bellows 48. One end of the bellows 48 is connected to an upper portion of the cylindrical portion 41b of the holder 41, and the other end of the bellows 48 is connected to a lower portion of the cylindrical portion 42b of the stem 42, specifically, to a valve body holding portion 42a. The bellows 48 blocks the cylindrical portion 42 b of the stem 42 and the cylindrical portion 41 b of the holder 41 from the valve chamber 12.

  In the above configuration, a driving force is applied to the stem 42 by the actuator section. The stem 42 is reciprocated in the direction of the valve seat 13 by the driving force and the urging force of the compression spring 43. Thereby, the valve body 45 comes into contact with and separates from the valve seat 13. When the valve element 45 contacts the valve seat 13, the second flow path 31 and the valve chamber 12 are shut off, and the second flow path 31 and the first flow path 21 are shut off. On the other hand, when the valve element 45 is separated from the valve seat 13, the second flow path 31 communicates with the valve chamber 12, and thus the second flow path 31 communicates with the first flow path 21 via the valve chamber 12. .

  One of the first channel 21 and the second channel 31 is a fluid inflow channel, and the other is a fluid outflow channel. Either the first flow path 21 or the second flow path 31 may be used as a fluid inflow flow path. Further, the fluid may be a gas or a liquid. As the gas, a reaction gas, nitrogen, air, or the like can be used. As the liquid, a chemical, water, oil, or the like can be used. When the first flow path 21 and the second flow path 31 are communicated with each other, the fluid flows into the valve chamber 12 from one side serving as the inflow channel, and from the other side serving as the outflow channel via the valve chamber 12. Fluid flows out. When the first flow path 21 and the second flow path 31 are shut off, the flow of the fluid is stopped.

  In the flow path structure of the small fluid control valve according to the present embodiment, a through hole 51 penetrating from the end face 11 c in the width direction to the valve chamber 12 is formed in the valve body 11. The through hole 51 penetrates from the end face 11c to the first flow path 21 via the valve chamber 12. The cross section of the through hole 51 is circular. The through hole 51 is connected to the upper end of the first flow path 21 (first connection flow path). That is, at the upper end of the first flow path 21, the first flow path 21, the valve chamber 12, and the through hole 51 are connected to each other. The diameter of the through-hole 51 is larger than the diameter of the first flow path 21, and the cross-sectional area of the through-hole 51 is larger than the cross-sectional area of the first flow path 21.

  The opening 51c at the end face 11c of the through hole 51 is closed by a lid 55 (a closing member, a second closing member). Specifically, by welding the lid 55 to the opening 51c, the opening 51c is closed by the lid 55. The opening 51c can be closed by the lid 55 by bonding the lid 55 to the opening 51c with an adhesive or the like. The lid 55 is formed of a plate material having a similar shape to the cross-sectional shape of the through hole 51, that is, a circular plate material. The lid 55 is attached to the end face 11c.

  The through-hole 51 is formed by cutting the valve body 11 from the end face 11c in the width direction. After cutting the valve main body 11 to a position penetrating the valve chamber 12, and further cutting the valve main body 11 to a position penetrating the first flow path 21, a through hole 51 is formed. After that, the opening 51 c of the through hole 51 is closed by the lid 55. Either the valve chamber 12 or the through hole 51 may be formed in the valve body 11 first.

  The embodiment described above has the following advantages.

  The valve body 11 has a through hole 51 penetrating from the end face 11c in the lateral width direction to the valve chamber 12, and is provided with a lid 55 for closing the opening 51c at the end face 11c of the through hole 51. For this reason, the space in the valve chamber 12 can be enlarged by the through hole 51, and the fluid can be easily circulated in the valve chamber 12. Moreover, by cutting the end face 11c in the width direction of the valve body 11 to form the through hole 51 and closing the opening 51c at the end face 11c of the through hole 51 with the lid 55, the valve chamber 12 can be formed in any shape or shape. Can be easily expanded to dimensions.

  The space around the bellows 48 in the valve chamber 12 can be enlarged by the through hole 51. For this reason, the fluid can be easily circulated around the bellows 48.

  The through hole 51 penetrates from the end face 11 c in the width direction of the valve body 11 to the valve chamber 12 and penetrates to the first flow path 21 via the valve chamber 12. For this reason, the flow passage area of the connection portion between the first flow passage 21 and the valve chamber 12 can be enlarged by the through hole 51.

  The diameter of the through-hole 51 is larger than the diameter of the first flow path 21, and the cross-sectional area of the through-hole 51 is larger than the cross-sectional area of the first flow path 21. For this reason, the flow passage area of the connection portion between the first flow passage 21 and the valve chamber 12 can be easily enlarged.

(2nd Embodiment)
Hereinafter, the second embodiment will be described focusing on the differences from the first embodiment. FIG. 4 is a sectional view showing the valve section 10 of the fluid control valve according to the present embodiment, and FIG. 5 is a top view showing the valve body 111 of the valve section 10 in FIG. The same members as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  The general shape of the valve main body 111 is the same as that of the valve main body 11 of the first embodiment, but the end face 111c in the lateral width direction is formed in a curved shape. In the flow channel structure of the small fluid control valve of the present embodiment, a through hole 151 is formed in the valve body 111 instead of the through hole 51 of the first embodiment. Further, a cover 155 is provided instead of the cover 55 of the first embodiment. Other configurations are basically the same as those of the first embodiment.

  The valve body 111 has a through-hole 151 that penetrates from the first end face 111 d in the longitudinal width direction of the valve body 111 to the valve chamber 12. The through hole 151 penetrates from the first end face 111d to the second end face 111e via the valve chamber 12. The cross section of the through hole 151 is circular. The through hole 151 is connected to the upper end of the first flow path 21 (first connection flow path). That is, at the upper end of the first flow path 21, the first flow path 21, the valve chamber 12, and the through hole 151 are connected to each other. The diameter of the through-hole 151 is larger than the diameter of the first flow path 21 and the valve chamber 12, and the cross-sectional area of the through-hole 151 is larger than the cross-sectional area of the first flow path 21 and the valve chamber 12.

  The openings 151c at the first end surface 111d and the second end surface 111e of the through hole 151 are closed by lids 155 (closing members, second closing members), respectively. The lid 155 is formed of a plate material having a similar shape to the cross-sectional shape of the through hole 151, that is, a circular plate material. The lid 155 is attached to each of the first end face 111d and the second end face 111e.

  The through-hole 151 is formed by cutting the valve body 111 from the first end face 111d in the vertical width direction. After cutting the valve main body 111 to a position penetrating the valve chamber 12, and further cutting the valve main body 111 to a position penetrating the second end face 111e, a through hole 151 is formed. After that, the opening 151 c of the through hole 151 is closed by the lid 155. Either the valve chamber 12 or the through hole 151 may be formed in the valve body 111 first.

  The embodiment described above has the following advantages. Here, only the advantages different from the first embodiment will be described.

  The valve body 111 has a through-hole 151 that penetrates from the first end face 111d in the vertical width direction to the valve chamber 12, and includes a lid 155 that closes the opening 151c of the through-hole 151 at the first end face 111d. ing. For this reason, the space in the valve chamber 12 can be enlarged by the through hole 151, and the fluid can be easily circulated in the valve chamber 12. Moreover, the through hole 151 is formed by cutting the first end face 111d in the longitudinal direction in the valve body 111, and the opening 151c of the through hole 151 in the first end face 111d is closed by the lid 155, so that the valve chamber 12 Can be easily expanded to any shape and size.

  The through-hole 151 penetrates from the first end face 111 d in the vertical width direction of the valve main body 111 to the valve chamber 12 and is connected to the first flow path 21. For this reason, the flow passage area of the connection portion between the first flow passage 21 and the valve chamber 12 can be enlarged by the through hole 151.

  -The through-hole 151 penetrates from the first end face 111d in the vertical width direction of the valve body 111 to the second end face 111e via the valve chamber 12. The openings at the first end surface 111d and the second end surface 111e of the through hole 151 are closed by the lid 155, respectively. For this reason, by cutting from one end face in the longitudinal width direction to the other end face in the valve body 111, the through hole 151 can be easily formed, and the valve chamber 12 is enlarged near both end faces 111d and 111e. be able to.

  The diameter of the through-hole 51 is larger than the diameter of the first flow path 21 and the valve chamber 12, and the cross-sectional area of the through-hole 51 is larger than the cross-sectional area of the first flow path 21 and the valve chamber 12. . For this reason, the flow path area of the connection portion between the first flow path 21 and the valve chamber 12 and the flow path area of the valve chamber 12 can be easily enlarged.

(Third embodiment)
Hereinafter, the third embodiment will be described focusing on differences from the first embodiment. FIG. 6 is a cross-sectional view illustrating the valve section 10 of the fluid control valve according to the present embodiment, and FIG. 7 is a top view illustrating the valve body 211 of the valve section 10 in FIG. The same members as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  The general shape of the valve main body 211 is the same as that of the valve main body 11 of the first embodiment, but the end face 111c in the lateral width direction is formed in a curved shape. In the flow path structure of the small fluid control valve of the present embodiment, a through hole 251 is formed in the valve body 211 instead of the through hole 51 of the first embodiment. In other words, a through hole 251 is formed instead of the through hole 151 of the second embodiment. Further, a cover 255 is provided instead of the cover 55 of the first embodiment. In other words, a cover 255 is provided instead of the cover 155 of the second embodiment. Other configurations are basically the same as those of the first embodiment.

  The valve main body 211 has a through hole 251 penetrating from the end surface 211 d of the valve main body 211 in the vertical width direction to the valve chamber 12. The cross section of the through hole 251 is an oval. The through hole 251 is formed in a range including the position of the valve seat 13 in the height direction of the valve main body 211. The through hole 251 is formed at the same position as the valve chamber 12 and the valve seat 13 in the width direction of the valve main body 211. The major diameter of the through hole 251 is substantially equal to the diameter of the valve chamber 12.

  The opening 251c at the end surface 211d of the through hole 251 is closed by a lid 255 (a closing member, a second closing member). The lid 255 is formed of a plate material having a similar shape to the cross-sectional shape of the through hole 251, that is, an oval plate material. The lid 255 is attached to the end face 211d.

  The through hole 251 is formed by cutting the valve body 211 from the end face 211d in the vertical width direction. By cutting the valve body 211 to a position penetrating the valve chamber 12, a through hole 251 is formed. Thereafter, the opening 251c of the through hole 251 is closed by the lid 255. Either the valve chamber 12 or the through hole 251 may be formed in the valve body 211 first.

  The embodiment described above has the following advantages. Here, only the advantages different from the above-described embodiments will be described.

  -Since the through-hole 251 is formed in the range including the position of the valve seat 13 in the height direction of the valve main body 211, the space around the valve seat 13 in the valve chamber 12 can be enlarged. For this reason, it becomes easy to circulate the fluid around the valve seat 13, and furthermore, it becomes easy to circulate the fluid between the second flow path 31 opened inside the valve seat 13 and the valve chamber 12.

(Fourth embodiment)
Hereinafter, the fourth embodiment will be described focusing on differences from the first embodiment. FIG. 8 is a cross-sectional view showing the valve section 10 of the fluid control valve according to the present embodiment, and FIG. 9 is a top view showing the valve body 311 of the valve section 10 in FIG. The same members as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  The general shape of the valve main body 311 is the same as that of the valve main body 11 of the first embodiment, but the end face 111c in the lateral width direction is formed in a curved shape. In the flow path structure of the small fluid control valve of the present embodiment, a through hole 351 is formed in the valve body 311 instead of the through hole 51 of the first embodiment. In other words, a through hole 351 is formed instead of the through hole 251 of the third embodiment. Further, a cover 355 is provided instead of the cover 55 of the first embodiment. In other words, a lid 355 is provided instead of the lid 255 of the third embodiment. Other configurations are basically the same as those of the first embodiment.

  The valve main body 311 is formed with a through hole 351 that penetrates from the end face 311d in the vertical width direction of the valve main body 311 to the valve chamber 12. The cross section of the through hole 351 is circular. The through hole 351 is formed in a range including the position of the valve seat 13 in the height direction of the valve body 311. In the width direction of the valve body 311, the through hole 351 is formed at a position on the opposite side of the valve chamber 12 and the valve seat 13 from the first flow path 21. That is, the first flow path 21 and the through hole 351 face each other with the bellows 48 and the valve chamber 12 interposed therebetween.

  The opening 351c at the end surface 311d of the through hole 351 is closed by a lid 355 (a closing member, a second closing member). The lid 355 is formed of a plate material similar to the cross-sectional shape of the through hole 351, that is, a circular plate material. The lid 355 is attached to the end face 311d.

  The through hole 351 is formed by cutting the valve body 311 from the end face 311d in the vertical width direction. By cutting the valve body 311 to a position penetrating through the valve chamber 12 and a part of the valve seat 13, a through hole 351 is formed. After that, the opening 351 c of the through hole 351 is closed by the lid 355. Either the valve chamber 12 or the through hole 351 may be formed in the valve body 311 first.

  The embodiment described above has the following advantages. Here, only the advantages different from the above-described embodiments will be described.

  The first flow path 21 and the through hole 351 face each other with the bellows 48 and the valve chamber 12 interposed therebetween. For this reason, when the first flow path 21 is the inflow flow path, it is possible to enlarge the space on the opposite side of the bellows 48 from the first flow path 21 where the fluid is difficult to flow. Therefore, it becomes easier to flow the fluid around the valve seat 13 to the portion on the opposite side of the first flow passage 21, and furthermore, to flow the fluid between the second flow passage 31 opened inside the valve seat 13 and the valve chamber 12. It will be easier.

(Fifth embodiment)
Hereinafter, the fifth embodiment will be described focusing on differences from the first embodiment. 10 is a front view showing a valve body 411 of the fluid control valve according to the present embodiment, FIG. 11 is a sectional view taken along line 11-11 of FIG. 10, and FIG. 12 is a sectional view taken along line 12-12 of FIG. FIG. 13 is a rear view of the valve body 411 of FIG. The same members as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  The schematic shape of the valve body 411 is the same as that of the valve body 11 of the first embodiment. In the flow path structure of the small fluid control valve of the present embodiment, the through hole 51 of the first embodiment is not formed in the valve body 411, and the first flow path 21 and the second flow path of the first embodiment are not formed. 31 has been changed. Other configurations are basically the same as those of the first embodiment.

  Inside the valve main body 411, a first vertical flow path 123 (first flow path) and a second vertical flow path 133 (second flow path) that are respectively opened on the lower surface 11a of the valve main body 411 are formed. The first vertical channel 123 and the second vertical channel 133 extend from the first annular recess 22 and the second annular recess 32 in a direction perpendicular to the lower surface 11a, respectively. The first vertical flow path 123 and the second vertical flow path 133 are formed side by side in the width direction of the valve body 411. The opening 121a on the lower surface 11a of the first vertical channel 123 and the opening 131a on the lower surface 11a of the second vertical channel 133 are formed side by side in the width direction of the valve body 411. On the lower surface 11a, an annular first annular concave portion 22 is formed around the opening 121a of the first vertical channel 123. On the lower surface 11a, an annular second annular recess 32 is formed around the opening 131a of the second vertical channel 133.

  The first vertical flow path 123 and the second vertical flow path 133 are connected to the valve chamber 12 by a first connection flow path and a second connection flow path, respectively.

  The first connection flow path includes a first end face flow path formed by the first groove-shaped recess 126 and the lid 129 (first closing member). The first groove-shaped concave portion 126 is a groove-shaped concave portion, and is opened on the first end face 411d in the longitudinal direction in the valve body 411. The length in the height direction of the valve body 411 in the first groove-shaped recess 126 (first end surface flow path) is longer than the length in the width direction of the valve body 411 in the first groove-shaped recess 126. The first groove-shaped recess 126 is connected to the first vertical channel 123 by a first horizontal channel 124 extending in the longitudinal width direction (horizontal direction) in the valve body 411. The first groove-shaped recess 126 opens in the valve chamber 12. The first groove-shaped recess 126 is connected to the outer peripheral edge of the valve chamber 12 from the bottom to the middle of the valve chamber 12.

  The opening 126 a at the first end surface 411 d of the first groove-shaped recess 126 is closed by the lid 129. Specifically, by welding the lid 129 to the opening 126a, the opening 126a is closed by the lid 129. The lid 129 is formed of a plate material having a shape similar to the shape of the opening 126 a of the first groove-shaped recess 126, that is, an oval plate material. The lid 129 is attached to the first end surface 411d.

  The first groove-shaped concave portion 126 is formed by cutting the valve body 411 from the first end face 411d in the vertical width direction. After forming the first groove-shaped recess 126, the first horizontal flow path 124 is formed by cutting the valve body 411 in the vertical width direction. After that, the opening 126 a of the first groove-shaped recess 126 is closed by the lid 129. Note that any one of the valve chamber 12, the first vertical channel 123, the first groove-shaped recess 126, and the first horizontal channel 124 may be formed in the valve body 411 first.

  The second connection flow path includes a second end face flow path formed by the second groove-shaped recess 136 and the lid 139 (first closing member). The second groove-shaped recess 136 is a groove-shaped recess, and is opened in the valve body 411 on the second end face 411 e in the vertical width direction. The length in the width direction of the valve body 411 in the second groove-shaped recess 136 (second end surface flow path) is longer than the length in the height direction of the valve body 411 in the second groove-shaped recess 136. The second groove-shaped recess 136 is connected to the second vertical channel 133 by a second horizontal channel 134 extending in the vertical width direction (horizontal direction) in the valve body 411. The second groove-shaped recess 136 is connected to a third horizontal flow path 137 extending in the vertical width direction (horizontal direction) in the valve body 411. The third horizontal flow path 137 is connected to a third vertical flow path 138 extending in a direction perpendicular to the lower surface 11 a and opening to the valve chamber 12. The third vertical flow path 138 opens at the bottom of the valve chamber 12. In the valve body 411, an annular valve seat 13 is formed around the opening of the third vertical flow path 138 in the valve chamber 12.

  An opening 136 a of the second groove-shaped recess 136 at the second end surface 411 e is closed by a lid 139. The lid 139 is formed of a plate having a shape similar to the shape of the opening 136a of the second groove-shaped recess 136, that is, an oval plate. The lid 139 is attached to the second end surface 411e.

  The second groove-shaped recess 136 is formed by cutting the valve body 411 from the second end face 411e in the vertical width direction. After forming the second groove-shaped recess 136, the second horizontal flow path 134 and the third horizontal flow path 137 are formed by cutting the valve body 411 in the vertical width direction. The third vertical flow path 138 is formed by cutting the valve body 411 in the height direction. After that, the opening 136 a of the second groove-shaped recess 136 is closed by the lid 139. Note that any one of the second groove-shaped recess 136, the second horizontal flow path 134, the third horizontal flow path 137, and the third vertical flow path 138 may be formed in the valve body 411 first.

  The first vertical flow path 123, the first horizontal flow path 124, and the first end surface flow path (the first groove-shaped concave portion 126 and the lid 129) form a first flow path. A first connection channel is constituted by the first horizontal channel 124 and the first end surface channel. Further, the second vertical flow path 133, the second horizontal flow path 134, the second end face flow path (the second groove-shaped recess 136 and the lid 139), the third horizontal flow path 137, and the third vertical flow path 138 form Two flow paths are configured. The second horizontal flow path 134, the second end face flow path, the third horizontal flow path 137, and the third vertical flow path 138 form a second connection flow path.

  The embodiment described above has the following advantages. Here, only the advantages different from the first embodiment will be described.

  The first flow path includes a first vertical flow path 123 extending from the first annular recess 22 in a direction perpendicular to the lower surface 11 a of the valve body 411, and the second flow path extends from the second annular recess 32 to the valve body 411. It includes a second vertical channel 133 extending in a direction perpendicular to the lower surface 11a. For this reason, the first flow path and the second flow path can be vertically connected to the annular recesses 22 and 32, respectively, and the annular recesses 22 and 32 interfere with the first flow path and the second flow path, respectively. Can be suppressed. Therefore, as compared with the structure in which the first flow path and the second flow path are obliquely connected to the annular concave parts 22 and 32, the connection between the annular concave parts 22 and 23 and the first flow path and the second flow path is different. The flow area of the section can be increased.

  In order to vertically connect the first flow path and the second flow path to the annular recesses 22 and 32, respectively, one of the first connection flow path and the second connection flow path, for example, the shape of the first connection flow path And dimensions may be limited. In this regard, the first connection flow path includes a groove-shaped first groove-shaped recess 126 opened on the first end surface 411d in the longitudinal direction in the valve body 411 and a lid 129 for closing the opening 126a of the first groove-shaped recess 126. And a first end surface flow path formed by the above. The first end surface channel is formed by cutting the first end surface 411d in the longitudinal direction in the valve body 411 into a groove shape to form the first groove-shaped recess 126, and the opening 126a of the first groove-shaped recess 126 is closed by the lid 129. By closing, it can be easily formed into a free shape and size. Therefore, even in a structure in which the first flow path and the second flow path are vertically connected to the annular recesses 22 and 32, the flow path area of the first connection flow path is formed by forming the first end face flow path. Can be secured. As a result, it is possible to suppress the maximum flow rate from being limited in the small fluid control valve.

  The second connection flow path is formed by the groove-shaped second groove-shaped recess 136 opened on the second end face in the longitudinal direction in the valve body 411 and the lid 139 closing the opening 136a of the second groove-shaped recess 136. A second end face flow path. For this reason, it becomes easy to secure the flow path area of the second connection flow path, and the degree of freedom in arranging the first flow path and the second flow path can be improved.

  -The length in the height direction of the valve body 411 in the first end face flow path is longer than the length in the width direction of the valve body 411 in the first end face flow path. For this reason, the first connection flow path can be extended in the height direction of the valve body 411 while securing the flow path area of the first connection flow path, and the arrangement of the first connection flow path can be facilitated. .

  Since the first end surface flow path is opened in the valve chamber 12, the first connection flow path can be easily connected to the valve chamber 12, and the connection portion between the first connection flow path and the valve chamber 12 can be easily connected. The flow path area can be easily secured.

(Sixth embodiment)
Hereinafter, the sixth embodiment will be described focusing on differences from the fifth embodiment. 14 is a front view showing a valve body 511 of the fluid control valve according to the present embodiment, FIG. 15 is a sectional view taken along line 15-15 of FIG. 14, and FIG. 16 is a sectional view taken along line 16-16 of FIG. is there. The same members as those in the first embodiment and the fifth embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  In the channel structure of the small fluid control valve of the present embodiment, two first channels are formed in the valve body 511, and the configuration of the first channel and the second channel of the fifth embodiment is changed. Have been. Other configurations are basically the same as those of the fifth embodiment.

  Inside the valve main body 511, two first vertical flow paths 223 (first flow paths) and second flow paths 231 that are respectively opened on the lower surface 11a of the valve main body 511 are formed. The first vertical flow channel 223 and the second flow channel 231 extend from the first annular concave portion 22 and the second annular concave portion 32 in a direction perpendicular to the lower surface 11a, respectively. The two first vertical flow paths 223 and the second flow path 231 are formed side by side in the width direction of the valve body 511. The opening 221a on the lower surface 11a of the two first vertical flow paths 223 and the opening 231a on the lower surface 11a of the second flow path 231 are formed side by side in the width direction of the valve body 511. On the lower surface 11a, annular first annular concave portions 22 are formed around the openings 221a of the two first vertical channels 223, respectively. On the lower surface 11a, an annular second annular concave portion 32 is formed around the opening 231a of the second flow path 231.

  The two first vertical flow paths 223 are respectively connected to the valve chamber 12 by the first connection flow paths. The first connection flow path includes a first end face flow path formed by the first groove-shaped recess 226 and the lid 229 (first closing member). The first groove-shaped concave portion 226 is a groove-shaped concave portion, and is opened on the first end face 511d in the longitudinal direction in the valve body 511. The length in the height direction of the valve body 511 in the first groove-shaped recess 226 (first end surface flow path) is longer than the length in the width direction of the valve body 511 in the first groove-shaped recess 226. The first groove-shaped recess 226 is connected to the first vertical flow channel 223 by a first horizontal flow channel 224 extending in the vertical width direction (horizontal direction) in the valve body 511. The first groove-shaped recess 226 is connected to the valve chamber 12 by a fourth horizontal flow path 227 extending in the direction (horizontal direction) of the valve chamber 12 in the valve body 511.

  The second flow path 231 (second connection flow path) opens at the bottom of the valve chamber 12. In the valve body 511, an annular valve seat 13 is formed around the opening of the second flow path 231 in the valve chamber 12.

  The first vertical flow path 223, the first horizontal flow path 224, the first end face flow path (the first groove-shaped recess 226 and the lid 229), and the fourth horizontal flow path 227 constitute a first flow path. I have. The first horizontal flow path 224, the first end face flow path, and the fourth horizontal flow path 227 form a first connection flow path. Further, one of the two first flow paths can be regarded as a second flow path.

  The embodiment described above has the following advantages. Here, only the advantages different from the above-described embodiments will be described.

  -Since two first flow paths are formed, a three-port fluid control valve including two first flow paths and one second flow path 231 can be manufactured. In each of the three flow paths, a flow path area can be secured.

(Seventh embodiment)
Hereinafter, the seventh embodiment will be described focusing on differences from the fifth embodiment. 17 is a front view showing a valve body 611 of the fluid control valve according to the present embodiment, FIG. 18 is a sectional view taken along line 18-18 of FIG. 17, and FIG. 19 is a sectional view taken along line 19-19 of FIG. FIG. 20 is a rear view of the valve main body 611 of FIG. The same members as those in the first embodiment and the fifth embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  In the flow channel structure of the small fluid control valve of the present embodiment, two valve chambers 12 (a first valve chamber and a second valve chamber) and two second flow paths are formed in the valve body 611, The configuration of the first flow path of the fifth embodiment is changed. Other configurations are basically the same as those of the fifth embodiment.

  Inside the valve main body 611, a first vertical flow path 323 (first flow path) and two second vertical flow paths 333 (second flow path) that are respectively opened on the lower surface 11a of the valve main body 611 are formed. . The first vertical channel 323 and the second vertical channel 333 extend from the first annular recess 22 and the second annular recess 32 in a direction perpendicular to the lower surface 11a, respectively. The first vertical flow path 323 and the two second vertical flow paths 333 are formed side by side in the width direction of the valve body 611. The opening 321a on the lower surface 11a of the first vertical flow channel 323 and the opening 331a on the lower surface 11a of the two second vertical flow channels 333 are formed side by side in the width direction of the valve body 611. On the lower surface 11a, an annular first annular concave portion 22 is formed around the opening 321a of the first vertical channel 323. On the lower surface 11a, annular second annular concave portions 32 are formed around the openings 331a of the two second vertical channels 333, respectively.

  The first vertical flow path 323 and the second vertical flow path 333 are connected to the valve chamber 12 by the first connection flow path and the second connection flow path, respectively.

  The first connection flow path includes a first end face flow path formed by the first groove-shaped recess 326 and the lid 329 (first closing member). The first groove-shaped concave portion 326 is a groove-shaped concave portion, and is opened on the second end surface 611e in the longitudinal width direction in the valve body 611. The length in the width direction of the valve body 611 in the first groove-shaped recess 326 (first end surface flow path) is longer than the length in the height direction of the valve body 611 in the first groove-shaped recess 326. The first groove-shaped recess 326 extends to the same position as the respective valve seats 13 of the two valve chambers 12 in the width direction of the valve body 611.

  The center of the first groove-shaped recess 326 in the horizontal width direction of the valve body 611 is connected to the first vertical flow path 323 by a first horizontal flow path 324 extending in the vertical width direction (horizontal direction) in the valve body 611. . The first groove-shaped recess 326 is connected to two second horizontal flow paths 327 extending in the longitudinal width direction (horizontal direction) in the valve body 611. The second horizontal flow paths 327 are connected to third vertical flow paths 328 extending in a direction perpendicular to the lower surface 11a and opening to the two valve chambers 12, respectively.

  The opening 326 a at the second end surface 611 e of the first groove-shaped recess 326 is closed by a lid 329. The lid 329 is formed of a plate having a shape similar to the shape of the opening 326a of the first groove-shaped recess 326, that is, an oval plate. The lid 329 is attached to the second end face 611e.

  The first groove-shaped recess 326 is formed by cutting the valve body 611 from the second end face 611e in the vertical width direction. After forming the first groove-shaped recess 326, the first horizontal flow path 324 is formed by cutting the valve main body 611 in the vertical width direction, and the second horizontal flow path 327 cuts the valve main body 611 in the vertical width direction. Formed. After that, the opening 326 a of the first groove-shaped recess 326 is closed by the lid 129. Note that any one of the valve chamber 12, the first vertical flow path 323, the first groove-shaped recess 326, the first horizontal flow path 324, and the second horizontal flow path 327 may be formed in the valve body 611 first. .

  The second connection channel is formed in the valve body 611 in the same manner as the first connection channel of the fifth embodiment. The second connection flow paths are formed corresponding to the two valve chambers 12, respectively.

  The first vertical flow path 323, the first horizontal flow path 324, the first end face flow path (the first groove-shaped recess 326 and the lid 329), and the second horizontal flow path 327 constitute a first flow path. I have. The first horizontal flow path 324, the first end face flow path, and the second horizontal flow path 327 constitute a first connection flow path. The second vertical flow path 333, the second horizontal flow path 334, and the second end face flow path (the second groove-shaped recess 336 and the lid 339) form a second flow path. The second horizontal flow path 334 and the second end face flow path constitute a second connection flow path.

  The embodiment described above has the following advantages. Here, only the advantages different from the above-described embodiments will be described.

  -Two valve chambers 12 (a first valve chamber and a second valve chamber) are formed inside the valve main body 611, and the first connection flow path includes a first vertical flow path 323 and two valve chambers 12 Are connected. For this reason, in the merging valve and the branch valve provided with the two valve chambers 12, the flow path area of each flow path can be secured.

  -Since two second flow paths are formed, a three-port fluid control valve including one first flow path and two second flow paths can be manufactured. In each of the three flow paths, a flow path area can be secured.

  -The length of the valve body 611 in the width direction in the first end face flow path is longer than the length of the valve body 611 in the height direction in the first end face flow path. For this reason, the first connection flow path can be extended in the width direction of the valve body 611 while securing the flow area of the first connection flow path, and the arrangement of the first connection flow path can be facilitated.

  -Since the second end surface flow path is open in the valve chamber 12, the second connection flow path can be easily connected to the valve chamber 12, and the connection between the second connection flow path and the valve chamber 12 can be easily connected. The flow path area can be easily secured.

(Eighth embodiment)
Hereinafter, the eighth embodiment will be described focusing on differences from the sixth embodiment. 21 is a front view showing a valve body 711 of the fluid control valve according to the present embodiment, FIG. 22 is a sectional view taken along line 22-22 of FIG. 21, and FIG. 23 is a sectional view taken along line 23-23 of FIG. is there. The same members as those in the first embodiment and the sixth embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  In the flow channel structure of the small fluid control valve according to the present embodiment, two valve chambers 12 (a first valve chamber and a second valve chamber) and two second flow paths are formed in the valve main body 711. The configuration of the first flow path of the sixth embodiment is changed corresponding to the two valve chambers 12. Other configurations are basically the same as those of the sixth embodiment.

  The first vertical flow path 423 is connected to each of the two valve chambers 12 by a first connection flow path. The first connection flow path includes a first end face flow path formed by the first groove-shaped recess 426 and the lid 429 (first closing member). The first groove-shaped concave portion 426 is a groove-shaped concave portion, and is opened on the first end face 711d in the longitudinal direction in the valve body 711. The height of the valve body 711 in the first groove-shaped recess 426 (first end surface flow path) in the height direction is longer than the length of the valve body 711 in the width direction of the first groove-shaped recess 426. The first groove-shaped recess 426 is connected to the first vertical flow channel 423 by a first horizontal flow channel 424 extending in the vertical width direction (horizontal direction) in the valve body 711. The first groove-shaped concave portions 426 are respectively connected to the two valve chambers 12 by fourth horizontal flow paths 427 extending in the direction (horizontal direction) of the two valve chambers 12 in the valve body 711.

  The second flow path 431 (second connection flow path) opens at the bottom of the valve chamber 12. In the valve body 711, an annular valve seat 13 is formed around the opening of the second flow path 431 in the valve chamber 12.

  The first vertical flow path 423, the first horizontal flow path 424, the first end face flow path (the first groove-shaped recess 426 and the lid 429), and the fourth horizontal flow path 427 constitute a first flow path. I have. The first horizontal flow path 424, the first end face flow path, and the fourth horizontal flow path 427 form a first connection flow path.

  The embodiment described above has the following advantages. Here, only the advantages different from the above-described embodiments will be described.

  -Two valve chambers 12 (a first valve chamber and a second valve chamber) are formed inside the valve body 711, and the first connection flow path includes a first vertical flow path 423 and two valve chambers 12 Are connected. For this reason, in the merging valve and the branch valve provided with the two valve chambers 12, the flow path area of each flow path can be secured.

(Ninth embodiment)
Hereinafter, the ninth embodiment will be described focusing on differences from the first and fifth embodiments. FIG. 24 is a front view showing a valve body 811 of the fluid control valve according to the present embodiment. The same members as those in the first and fifth embodiments are denoted by the same reference numerals, and description thereof will be omitted.

  The flow path structure of the small fluid control valve according to the present embodiment is different from the flow path structure according to the fifth embodiment in that the through hole 51 according to the first embodiment is formed, and the opening 51 c of the through hole 51 is closed by the lid 55. is there. Therefore, this embodiment has the same advantages as the first embodiment and the fifth embodiment.

(Tenth embodiment)
Hereinafter, the tenth embodiment will be described focusing on differences from the second and fifth embodiments. FIG. 25 is a front view showing the valve main body 911 of the fluid control valve according to the present embodiment. The same members as those in the second and fifth embodiments are denoted by the same reference numerals, and description thereof will be omitted.

  The flow path structure of the small fluid control valve of the present embodiment is different from the flow path structure of the fifth embodiment in that the through-hole 151 of the second embodiment is formed, and the opening 151 c of the through-hole 151 and the first groove-shaped recess 126 are formed. Is closed by a lid 529. Therefore, this embodiment has the same advantages as the second embodiment and the fifth embodiment.

(Eleventh embodiment)
Hereinafter, the eleventh embodiment will be described focusing on differences from the second and seventh embodiments. FIG. 26 is a front view showing the valve main body 1011 of the fluid control valve according to the present embodiment. The same members as those in the second and seventh embodiments are denoted by the same reference numerals, and description thereof will be omitted.

  The flow path structure of the small fluid control valve of the present embodiment is different from the flow path structure of the seventh embodiment in that the through-hole 151 of the second embodiment is formed, and the opening 151c of the through-hole 151 and the first groove-shaped recess 326 are formed. The opening 326a is closed by a lid 529. Therefore, this embodiment has the same advantages as the second embodiment and the seventh embodiment.

  Further, this embodiment has the following advantages. Here, only the advantages different from the above-described embodiments will be described.

  -The through-hole 151 penetrates from the end face 1011d of the valve body 1011 in the longitudinal width direction to the valve chamber 12, and is connected to the second connection flow path. Therefore, the flow passage area of the connection portion between the second connection flow passage and the valve chamber 12 can be enlarged by the through hole.

(Twelfth embodiment)
Hereinafter, the twelfth embodiment will be described focusing on differences from the third and fifth embodiments. FIG. 27 is a front view showing a valve main body 1111 of the fluid control valve according to the present embodiment. The same members as those in the third and fifth embodiments are denoted by the same reference numerals, and description thereof will be omitted.

  The flow path structure of the small fluid control valve according to the present embodiment is different from the flow path structure according to the fifth embodiment in that the through-hole 251 of the third embodiment is formed, and the opening 251c of the through-hole 251 and the first groove-shaped recess 126 Is closed by a lid 629. However, the through hole 251 and the first groove-shaped recess 126 are formed from the end face 1111d on the same side in the longitudinal width direction of the valve body 1111. Therefore, this embodiment has the same advantages as the third embodiment and the fifth embodiment.

(Thirteenth embodiment)
Hereinafter, the thirteenth embodiment will be described focusing on differences from the fifth embodiment. FIG. 28 is a front view showing a valve body 1211 of the fluid control valve according to the present embodiment. The same members as those in the fifth embodiment are denoted by the same reference numerals, and description thereof will be omitted.

  The flow path structure of the small fluid control valve of the present embodiment is obtained by applying the flow path structure of the fifth embodiment to a diaphragm type small fluid control valve. This fluid control valve includes a diaphragm 148 instead of the bellows 48 and the valve body 45 in FIG. In the space below the diaphragm 148, the periphery of the valve seat 13 is the valve chamber 12. According to such a configuration, there is an advantage according to the fifth embodiment.

  Note that the above embodiments may be modified and implemented as follows.

  A flow path structure in which the through hole 51 does not penetrate to the first connection flow path but penetrates only the valve chamber 12 can be adopted.

  -The 1st end surface channel is not limited to the structure which extends perpendicularly to the lower surface 11a of the valve body, but may be a structure which extends slightly inclining with respect to the lower surface 11a.

  DESCRIPTION OF SYMBOLS 11 ... Valve main body, 11a ... Lower surface, 11c ... End surface, 12 ... Valve chamber, 21 ... 1st flow path, 21a ... Opening, 22 ... 1st annular recessed part, 31 ... 2nd flow path, 31a ... Opening, 32 ... No. 2 annular concave portion, 51 ... through hole, 51c ... opening, 55 ... closing member.

Claims (24)

A flow path structure of a small fluid control valve including a valve body having a valve chamber formed therein,
The vertical width of the valve body is narrower than the horizontal width in a top view,
The valve chamber is open at an upper surface of the valve body,
Inside the valve body, a first flow path and a second flow path that are respectively opened on the lower surface of the valve body in the direction of the width are formed,
On the lower surface, an annular first annular recess is formed around the opening of the first flow path,
On the lower surface, an annular second annular recess is formed around the opening of the second flow path,
The first flow path and the second flow path are connected to the valve chamber, respectively.
In the valve body, a through hole is formed that penetrates from the end face in the width direction to the valve chamber,
A flow path structure for a small fluid control valve, comprising a closing member for closing an opening at the end face of the through hole. In the valve body, an annular valve seat is formed around an opening of the second flow path in the valve chamber,
The flow path structure of the small fluid control valve according to claim 1, wherein the through hole penetrates from the end face in the width direction to the first flow path via the valve chamber. A flow path structure of a small fluid control valve including a valve body having a valve chamber formed therein,
The vertical width of the valve body is narrower than the horizontal width in a top view,
Inside the valve body, a first flow path and a second flow path that are respectively opened on the lower surface of the valve body in the direction of the lateral width are formed,
On the lower surface, an annular first annular recess is formed around the opening of the first flow path,
On the lower surface, an annular second annular recess is formed around the opening of the second flow path,
The first flow path and the second flow path are connected to the valve chamber, respectively.
In the valve body, a through hole is formed that penetrates from the end face in the longitudinal width direction to the valve chamber,
A flow path structure for a small fluid control valve, comprising a closing member for closing an opening at the end face of the through hole. In the valve body, an annular valve seat is formed around an opening of the second flow path in the valve chamber,
The flow path structure of the small fluid control valve according to claim 3, wherein the through hole is connected to the first flow path. In the valve body, an annular valve seat is formed around an opening of the first flow path in the valve chamber,
The flow path structure of the small fluid control valve according to claim 3, wherein the through hole is connected to the second flow path. The end face is a first end face,
The through hole penetrates from the first end face in the direction of the longitudinal width to a second end face via the valve chamber,
The flow path structure of a small fluid control valve according to any one of claims 3 to 5, further comprising a closing member that closes an opening of the through hole at the second end surface.   The flow path structure of a small fluid control valve according to any one of claims 2, 4, and 5, wherein the through hole is formed in a range including a position of the valve seat in a height direction of the valve body. The first flow path includes a first vertical flow path extending from the first annular recess in a direction perpendicular to the lower surface, and a first connection flow path connecting the first vertical flow path and the valve chamber,
The second flow path includes a second vertical flow path extending from the second annular recess in a direction perpendicular to the lower surface, and a second connection flow path connecting the second vertical flow path and the valve chamber,
The first connection flow path is formed by a groove-shaped first groove-shaped recess that opens on the end face in the longitudinal width direction of the valve body and a closing member that closes the opening of the first groove-shaped recess. The flow path structure of the small fluid control valve according to any one of claims 1 to 7, comprising one end face flow path. A flow path structure of a small fluid control valve including a valve body having a valve chamber formed therein,
The vertical width of the valve body is narrower than the horizontal width in a top view,
Inside the valve body, a first flow path and a second flow path that are respectively opened on the lower surface of the valve body in the direction of the width are formed,
On the lower surface, an annular first annular recess is formed around the opening of the first flow path,
On the lower surface, an annular second annular recess is formed around the opening of the second flow path,
The first flow path includes a first vertical flow path extending from the first annular recess in a direction perpendicular to the lower surface, and a first connection flow path connecting the first vertical flow path and the valve chamber,
The second flow path includes a second vertical flow path extending from the second annular recess in a direction perpendicular to the lower surface, and a second connection flow path connecting the second vertical flow path and the valve chamber,
The first connection flow path is formed by a groove-shaped first groove-shaped concave portion that is opened on the end face in the vertical width direction in the valve body, and a first closing member that closes an opening of the first groove-shaped concave portion. A flow path structure of the small fluid control valve, including a first end face flow path.   The second connection flow path is formed by a groove-shaped second groove-shaped concave portion that opens on the end face in the vertical width direction in the valve body, and a first closing member that closes an opening of the second groove-shaped concave portion. The flow path structure of the small fluid control valve according to claim 9, further comprising a second end flow path.   The flow path structure of a small fluid control valve according to claim 9 or 10, wherein the valve body has two of the first flow paths. The valve chamber is a first valve chamber;
A second valve chamber is formed inside the valve body,
The flow path structure of the small fluid control valve according to claim 9 or 10, wherein the first connection flow path connects the first vertical flow path, the first valve chamber, and the second valve chamber.   The flow path structure of the small fluid control valve according to claim 12, wherein the valve body has two of the second flow paths.   The length of the valve body in the height direction in the first end face flow path is longer than the length of the valve body in the width direction of the first end face flow path. 3. The flow path structure of the small fluid control valve according to 1.   15. The small fluid control valve according to claim 9, wherein an annular valve seat is formed around an opening of the second connection flow path in the valve chamber of the valve body. 16. Flow path structure.   The flow path structure of a small fluid control valve according to claim 9, wherein the first end face flow path is open in the valve chamber.   14. The valve body according to claim 9, wherein a length of the valve body in the width direction in the first end face flow path is longer than a length of the valve body in the height direction in the first end face flow path. A flow path structure of the small fluid control valve according to any one of the preceding claims.   The valve body according to any one of claims 9, 10, 12, 13, and 17, wherein an annular valve seat is formed around an opening of the first connection channel in the valve chamber in the valve body. Flow path structure of small fluid control valve. The second connection flow path is formed by a groove-shaped second groove-shaped recess opening in the end face in the longitudinal width direction of the valve body and a first closing member closing the opening of the second groove-shaped recess. A second end surface flow path,
The flow path structure of a small fluid control valve according to any one of claims 9, 10, 12, 13, 17, and 18, wherein the second end face flow path is open in the valve chamber. In the valve body, a through hole is formed that penetrates from the end face in the longitudinal width direction to the valve chamber,
A second closing member for closing an opening at the end face of the through hole;
The flow path structure of a small fluid control valve according to claim 15, wherein the through hole is connected to the first connection flow path. In the valve body, a through hole is formed that penetrates from the end face in the longitudinal width direction to the valve chamber,
A second closing member for closing an opening at the end face of the through hole;
The flow path structure of a small fluid control valve according to claim 18 or 19, wherein the through hole is connected to the second connection flow path. The end face is a first end face,
The through hole penetrates from the first end face in the direction of the vertical width to a second end face via the valve chamber,
22. The flow path structure of a small fluid control valve according to claim 20, further comprising a second closing member that closes an opening of the through hole at the second end surface. The valve body has a through hole formed therethrough from the end face in the width direction to the first connection flow path via the valve chamber.
The flow path structure of a small fluid control valve according to claim 15 or 16, further comprising a second closing member that closes an opening at the end face of the through hole. In the valve body, a through hole is formed that penetrates from the end face in the longitudinal width direction to the valve chamber,
19. The flow path structure of a small fluid control valve according to claim 15, wherein the through hole is formed in a range including a position of the valve seat in a height direction of the valve body.

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