TWI651794B - Method for correcting chip apparatus and chip apparatus using the method - Google Patents

Abstract

The present invention provides a method for correcting a crystallizing apparatus for correcting errors of respective predetermined positions of a holding member of a crystallizing apparatus in a crystal plane, the correction method comprising: causing an image sensing member to draw a reference including a reference correcting member The reference image correcting image capturing step of the position image, the collating image capturing step of the aligning image showing the relative positional relationship between the holding member and the reference correcting member, and the image processing calculating step, and calculating the position of the holding member Corresponding to the state of the reference correcting member, the difference between the holding member and the predetermined position is taken, and the compensation correction value corresponding to the predetermined position of the holding member is generated correspondingly. The present invention also provides a crystallizing apparatus using the correction method.

Description

Method for correcting crystallizing device and crystallizing device using the same

The present invention relates to a method for calibrating a crystallizing apparatus and a crystallizing apparatus using the same, and more particularly to a method for correcting a crystallizing apparatus for correcting errors at respective predetermined positions in a crystal plane and using the method Crystal equipment.

In the process of semiconductor wafer level packaging, the wafer must be cut into a plurality of crystal grains, and then the good products are picked out and reconfigured onto the substrate for subsequent processing. In the process of reconfiguration, due to the precision process, the accuracy of the placement and arrangement of the crystal grains is extremely strict, and the accuracy below micron or less is usually required. In order to ensure the high precision of the crystal, the conventional crystal setting device usually adds an image sensing member linked with the robot arm in front of the robot arm. Since the position difference between the image sensing member and the robot arm is known, The position of the robot arm can be derived from the image captured by the image sensing member.

However, in fact, the position difference between the robot arm and the image sensing member is not always constant, and after the robot arm moves for a certain distance, there is an error between the actual position and the predetermined position, thereby causing the robot arm and the image sense. The positional difference between the members is different everywhere on the crystal plane. And this positional difference fluctuates with temperature (deformation of the crystallizer structure due to thermal expansion) and equipment conditions (such as the smoothness of the moving axis). Therefore, a degree of error occurs in each of the crystallographic positions on the crystal plane between the robot arm and the image sensing member, and this error is difficult. Being measured and unable to be corrected, the image sensing member cannot accurately and accurately calculate the position of the robot arm, so that the placed crystal grains cannot be arranged neatly.

Accordingly, in order to solve the above problems, it is an object of the present invention to provide a method of correcting a crystallizing apparatus for correcting errors in a crystal plane and a crystallizing apparatus using the same.

The technical means adopted by the present invention to solve the problems of the prior art provides a method for correcting a crystallizing device for correcting errors of a predetermined position of a holding member of a crystallizing device in a crystal plane. The crystal device includes a crystal arranging mechanism and a pair of positioning mechanism, the crystallization mechanism includes the holding member and an image sensing member, the aligning mechanism includes a pair of image sensing members and a plane disposed on the crystal plane a reference correction member, wherein the holding member is configured to hold a die or a marking member, the correction method comprises: a reference correction image capturing step, wherein the image sensing member is correspondingly corrected in position at a predetermined position In the state of the member, the image sensing member captures a reference position image containing the reference correction member; a pair of bit image capturing steps, the position of the holding member corresponds to the reference correction member, and the alignment image is utilized a sensing member, in a state in which the position of the holding member corresponds to the reference correcting member, capturing a mark indicating that the holding member held by the holding member is opposite to the reference correcting member And an image processing calculation step, wherein the holding member is calculated in a state that the holding member is in position corresponding to the reference correcting member, and the positional image and the reference position image are calculated a difference from the predetermined position, and correspondingly generating a compensation correction value corresponding to the predetermined position of the holding member.

In an embodiment of the invention, a method for correcting a crystallizing device is provided, which is a step of sequentially performing the reference correction image capturing step, the alignment image capturing step, and the image processing calculating step.

In an embodiment of the invention, a method for correcting a crystallizing device is provided, wherein the alignment image capturing step, the reference corrected image capturing step, and the image processing calculating step are sequentially performed.

In an embodiment of the present invention, a method for correcting a crystallizing device is provided. After the image processing calculation step, a step-by-step correction step is further included, and the method is repeated at each predetermined position according to a seeding sequence of the holding member. The reference correction image capturing step, the alignment image capturing step, and the image processing calculating step, and sequentially calculating the compensation correction values of the holding members at respective predetermined positions.

In an embodiment of the present invention, a method for correcting a crystallizing device is provided. After the step of correcting the step, a step of crystallizing is further included, so that the image sensing component captures an image of the actual to-be-crystallized region and images the image. The identification determines a position to be crystallized, and the holding member holds the die to be crystallized according to a compensation correction value corresponding to the position to be crystallized.

Another technical means for solving the problems of the prior art is to provide a crystal device for crystallizing in a crystal plane, the crystal device comprising: a crystal mechanism comprising a holding member and An image sensing member for holding a die or a marking member; a pair of positioning mechanisms including a reference correcting member and a pair of bit image sensing members, the alignment image sensing member being in the light a reference correction member is disposed on the road, wherein the image sensing member captures a reference position image containing the reference correction member in a state where the image sensing member corresponds to the reference correction member at a predetermined position; and a correction The system includes: a movement control unit coupled to the holding member, the movement control unit configured to move the holding member to the predetermined position such that the holding member position corresponds to the reference correction member; a pair of bit images The capturing control unit is connected to the aligning image sensing member, and the aligning image capturing control unit is matched in a state that the holding member position corresponds to the reference correcting member And causing the alignment image sensing component to capture a registration image showing a relative positional relationship between the marker and the reference correction component held by the holding member; and an image processing calculation control unit connecting the alignment The image sensing member, the image sensing member, and the movement control unit, the image processing calculation control unit calculates a state in which the holding member corresponds to the reference correction member at the position of the alignment image and the reference position image And a difference between the holding member and the predetermined position, and correspondingly generating a compensation correction value corresponding to the predetermined position of the holding member.

In an embodiment of the invention, a crystal setting device is provided, the reference correction member being a photomask or a light transmissive member having an image signature.

In an embodiment of the invention, a crystal setting apparatus is provided, the upper surface of the reference correction member being flush with the crystallographic plane.

In an embodiment of the invention, a crystal setting device is provided, the alignment image sensing member being disposed directly toward the reference correction member to directly capture the alignment image.

In an embodiment of the invention, a crystal setting device is provided. The alignment mechanism further includes a mirror disposed to be inclined at an angle to the reference correction member to pass the alignment image sensing member through the mirror. Take the alignment image.

Through the technical means adopted by the present invention, the error of each predetermined position of the holding member in the crystal plane can be accurately corrected, and the compensation correction can be performed according to the error of each position, so that the error of the holding member at the predetermined position can be Make up, thereby greatly improving the accuracy of the crystal.

The specific embodiments of the present invention will be further described by the following examples and the accompanying drawings.

100‧‧ ‧ crystallizing equipment

100a‧‧ ‧ crystallizing equipment

1‧‧ ‧ crystallizing mechanism

11‧‧‧ Holding components

111‧‧‧Markings

12‧‧‧Image sensing components

2‧‧‧ Alignment agency

21‧‧‧ benchmark correction component

22‧‧‧ Alignment image sensing component

22a‧‧‧ Alignment image sensing component

23‧‧‧Mirror

2a‧‧‧ Alignment agency

3‧‧‧ calibration system

31‧‧‧Mobile Control Unit

32‧‧‧ Alignment image capture control unit

33‧‧‧Image Processing Calculation Control Unit

F‧‧‧ crystal plane

M1‧‧‧ reference position image

M2‧‧‧ alignment image

S101‧‧‧Reference corrected image capture step

S102‧‧‧ Alignment image capture step

S103‧‧‧Image processing calculation steps

1 is a flow chart showing a method of correcting a crystallizing apparatus according to an embodiment of the present invention.

2 is a schematic diagram showing an image sensing member capturing a reference position image according to an embodiment of the present invention.

FIG. 3 is a schematic diagram showing the alignment image captured by the alignment image sensing member according to the present invention.

Fig. 4 is a schematic view showing a reference position image according to an embodiment of the present invention.

Figure 5 is a schematic diagram showing a registration image in accordance with an embodiment of the present invention.

Fig. 6 is a schematic diagram showing an image processing calculation step according to an embodiment of the present invention.

Fig. 7 is a view showing a crystal placing apparatus according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to Figs. 1 to 7 . This description is not intended to limit the embodiments of the invention, but is an embodiment of the invention.

Referring to Fig. 1, and referring to Figs. 2 to 6, the description of this embodiment is as follows. A method for correcting a crystallizing apparatus according to an embodiment of the present invention is for correcting an error of a predetermined position of a holding member 11 of a crystallizing apparatus 100 in a crystal plane F. The crystal device 100 includes a crystal seeding mechanism 1, a pair of position mechanisms 2, and a correction system 3. The correction method of this embodiment includes a reference correction image capturing step S101, a pair of bit image capturing step S102, and an image processing calculating step S103.

The crystallizing mechanism 1 includes a holding member 11 and an image sensing member 12 for holding a die or a marking member 111. In the present embodiment, the holding member 11 is a suction type vacuum nozzle, and the marking member 111 is a photomask having a marking pattern, but the invention is not limited thereto.

The registration mechanism 2 includes a reference correction member 21 and a pair of bit image sensing members 22, and the registration image sensing member 22 corresponds to the reference correction member 21 on the optical path. The reference correction member 21 is a photomask or a light transmissive member having an image signature. In the present embodiment, the upper surface of the reference correction member 21 is flush with the crystal plane F, and the reference correction member 21 is light transmissive.

The correction system 3 includes a movement control unit 31, a pair of bit image capture control unit 32, and an image processing calculation control unit 33. The movement control unit 31 is connected to the holding member 11 , and the alignment image capturing control unit 32 is connected to the alignment image sensing member 22 . The image processing calculation control unit 33 is connected to the alignment image sensing member 22 , the image sensing member 12 and the movement control. Unit 31.

Next, how the crystal setting apparatus 100 of the embodiment of the present invention performs the correction method will be described.

Referring to FIG. 2, in the reference corrected image capturing step S101, in a state where the image sensing member 12 is positioned to correspond to the reference correcting member 21 at a predetermined position, the image sensing member 12 captures a The reference position image M1 of the reference correction member 21. The field of view of the reference correction member 21 on the image sensing member 12 is as shown in Fig. 4.

In the aligning image capturing step S102, as shown in FIG. 3, the movement control unit 31 is configured to move the holding member 11 so that the position of the holding member 11 corresponds to the reference correcting member 21. In the present embodiment, the movement control causes the holding member 11 to move to the aforementioned predetermined position and the position corresponds to the reference correcting member 21. In this embodiment, the position of the holding member 11 is known by using a linear optical scale or a position encoder, and the holding member 11 is moved from a standby position or a previous position to the predetermined position, and The invention is not limited to this. By this movement, the holding member 11 is attached to the crystal plane F by superimposing the marker 111 on the upper side of the reference correction member 21 in the Z direction. However, due to the total cause of mechanical shock, temperature, friction, etc., when the holding member 11 is moved to the predetermined position, a degree of error often occurs, and the predetermined position of the image sensing member 12 cannot be perfectly overlapped. Therefore, the next step is to calculate the difference between the holding member 11 and the predetermined position.

In a state where the position of the holding member 11 corresponds to the reference correcting member 21, the aligning image capturing control unit 32 is configured to cause the aligning image sensing member 22 to capture a marker 111 that displays the holding member 11 The registration image M2 (as shown in Fig. 5) in the relative positional relationship with the reference correction member 21.

As shown in FIG. 5, in the present embodiment, the surface of the marking member 111 has a plurality of arranged circle-shaped marking patterns; as shown in FIGS. 4 and 5, the surface of the reference correcting member 21 is in this embodiment. It is a grid-like pattern, but the present invention is not limited thereto, and the pattern and arrangement of the marker 111 and the reference correction member 21 may be other marking patterns.

Referring to FIG. 6, in the image processing calculation step S103, the image processing calculation control unit 33 compares the registration image M2 with the reference position image M1, and calculates that the holding member 11 is in the state corresponding to the reference correction member 21, The difference between the member 11 and the predetermined position is taken, the difference including the position and angle error, and correspondingly produces a compensation correction value of the holding member 11 at a predetermined position. For example, as shown in FIG. 6, the meter is marked to indicate a predetermined position (which may be a built-in ratio of the image sensing member 12). For the reference point, it may also be a pixel at a specific position in the reference position image M1, or a specific area recognized by the image. If the circle mark coincides with the position of the rice mark, there is no error between the holding member 11 and the predetermined position. Figure 6 shows a partial difference between the circle mark and the meter mark, indicating that there is an error between the predetermined position and the holding member 11, and the difference (including the position and angle) can be calculated by calculating the circle mark and The difference between the meters and the angle between the marks is known.

The spirit of the image processing calculation step S103 is that since the image sensing member 12 cannot directly capture the holding member 11 and knows the true position of the holding member 11, the light-receiving reference correction member 21 is used as a reference point for comparison. By superimposing the reference position image M1 on the reference correction member 21 in the registration image M2, the position of the holding member 11 in the original field of view of the image sensing member 12 in a state where the position corresponds to the reference correction member 21 can be estimated. And calculating the difference between the predetermined position and the holding member 11, and correspondingly generating the compensation correction value corresponding to the predetermined position of the holding member 11.

The compensation correction value may be a value including the X, Y direction and the angle. For example, the error value between the predetermined position and the holding member 11 obtained by image analysis is (-1, -1, -0.1°) on the XY plane. , the corresponding correction correction value is (1, 1, 0.1°).

However, the present invention is not limited thereto, and the error between the predetermined position and the holding member 11 can be calculated by comparing the reference position image M1 and the registration image M2 by various possible image processing and calculation methods, thereby calculating the holding member 11 The compensation correction value corresponding to the predetermined position.

Referring to FIG. 2 and FIG. 3, further, in the embodiment, the alignment mechanism 2 further includes a mirror 23 disposed at an oblique angle with the reference correction member 21 to allow the alignment image sensing member 22 to pass through. The mirror 23 captures the alignment image M2. With such an arrangement, the length of the alignment mechanism 2 in the Z direction can be folded, which is advantageous for the crystallizer 100 to reduce the volume.

As shown in FIG. 7, further, in another embodiment, the alignment mechanism 2a of the crystal device 100a includes only the reference correction member 21 and the alignment image sensing member 22a. Reference correction member 21 and front An embodiment is identical, and the aligning image sensing member 22a is disposed directly toward the reference correcting member 21 to directly capture the aligning image M2. With such an arrangement, the number of components can be reduced and the production cost can be reduced.

Further, in the correction method of the embodiment, after the image processing calculation step S103, a sequence correction step and a seeding step after the sequence correction step are further included.

The sequential correction step repeats the reference correction image capturing step S101, the registration image capturing step S102, and the image processing calculating step S103 at respective predetermined positions in accordance with the seeding order of the holding member 11. The image processing calculation control unit 33 sequentially calculates the compensation correction values of the holding members 11 at respective predetermined positions.

For example, the compensation correction values for the respective predetermined positions may be, for example, as shown in the following table according to the crystallographic order.

Next, in the seeding step, the alignment mechanism 2 can be removed and replaced with a substrate to be crystallized. The image processing calculation control unit 33 causes the image sensing member 12 to capture an actual image of the area to be crystallized on the substrate and determine a position to be crystallized by image recognition, so that the holding member 11 holds a die according to the image. The compensation correction value corresponding to the position to be crystallized is crystallized. For example, if the coordinate of the position to be crystallized determined by image recognition is (100, 100), the corresponding compensation correction value is (+0.1, +0.2, 0.01°), and the holding member 11 is (+0.1, +0.2, 0.01°). Compensate the position and angle and perform crystallization. Moreover, since the upper surface of the reference correction member 21 is flush with the crystal plane F, and the crystal plane F is the surface of the crystal substrate placed at the same position after the alignment mechanism 2 is removed, the image is captured by the alignment image. The error calculated in step S102 to the image processing calculation step S103 is completely in accordance with the actual crystallizing condition, and is not affected by the change of the holding member 11 in the Z direction.

It should be noted that, in this embodiment, the reference correction image capturing step S101, the aligning image capturing step S102, and the image processing calculating step S103 are sequentially performed as the description; however, the present invention is not limited thereto, and may be The aligning image capturing step S102, the reference corrected image capturing step S101, and the image processing calculating step S103 are sequentially performed. In other words, the order between the reference corrected image capturing step S101 and the aligning image capturing step S102 can be changed as long as the reference position image M1 and the aligning image M2 can be respectively captured to perform the image processing calculating step S103.

The above description and description are only illustrative of the preferred embodiments of the present invention, and those of ordinary skill in the art can make other modifications in accordance with the scope of the invention as defined below and the description above, but such modifications should still be It is within the scope of the invention to the invention of the invention.

Claims (10)

A method for correcting a crystallizing device for correcting an error of a predetermined position of a holding member of a crystallizing device in a crystal plane, the seeding device comprising a crystal mechanism and a pair of positioning mechanisms The mechanism includes the holding member and an image sensing member, the alignment mechanism includes a pair of image sensing members and a reference correction member disposed on the crystal plane, wherein the holding member is configured to hold a die Or a marking component, the calibration method includes: a reference correction image capturing step, wherein the image sensing component captures a reference to the reference correction component in a predetermined position and the image sensing component captures the reference a reference position image of the correcting member; a pair of bit image capturing steps to position the holding member corresponding to the reference correcting member, and using the aligning image sensing member at the position of the holding member corresponding to the reference correcting member a state in which a relative image showing the relative positional relationship between the marker and the reference correction member held by the holding member is captured; and an image processing calculation step is performed Calculating, by the alignment image and the reference position image, a difference between the holding member and the predetermined position in a state where the holding member corresponds to the reference correction member, and correspondingly generating the pair of holding members A compensation correction value for the position should be predetermined. The method for correcting the crystallizing device according to claim 1 is to sequentially perform the reference correction image capturing step, the alignment image capturing step, and the image processing calculating step. The method for correcting the crystallizing device according to claim 1 is to sequentially perform the alignment image capturing step, the reference corrected image capturing step, and the image processing calculating step. The method for correcting a crystallizing device according to claim 1, further comprising a step by step correction step of repeating the reference corrected image at each predetermined position according to a crystallographic sequence of the holding member The capturing step, the aligning image capturing step, and the image processing calculating step, and sequentially calculating the compensation correction values of the holding members at respective predetermined positions. The method for correcting the crystallizing device according to claim 4, further comprising a crystallizing step after the step of the sequential correction step, so that the image sensing component captures an image of the actual to-be-crystallized region and determines the image recognition by image recognition. The crystallizing position is such that the holding member holds the die to be crystallized according to the compensation correction value corresponding to the position to be crystallized. A crystal device for crystallizing in a crystallographic plane, the crystallizer comprising: a crystal pulling mechanism comprising a holding member and an image sensing member for holding a die or a marking member; a pair of positioning mechanisms including a reference correcting member and a pair of bit image sensing members, the alignment image sensing member corresponding to the reference correcting member on the optical path, wherein the image sensing member is at a predetermined position And the image sensing member captures a reference position image containing the reference correction member; and a correction system includes: a movement control unit that connects the holding member, the movement control The unit is configured to move the holding member such that the holding member position corresponds to the reference correcting member; a pair of bit image capturing control unit is coupled to the aligning image sensing member, wherein the position of the holding member corresponds to In the state of the reference correcting member, the aligning image capturing control unit is configured to cause the aligning image sensing member to capture a mark indicating that the holding member is held by the aligning image sensing member And an image processing calculation control unit, connected to the image sensing member And determining, by the bit image and the reference position image, a difference between the holding member and the predetermined position in a state where the holding member corresponds to the reference correcting member, and correspondingly generating the holding member corresponds to a predetermined A compensation correction value for the position. The crystallizing device of claim 6, wherein the reference correcting member is a photomask or a light transmissive member having an image signature. The seeding apparatus of claim 6, wherein an upper surface of the reference correction member is flush with the crystallographic plane. The crystallizing device of claim 6, wherein the alignment image sensing member is disposed directly toward the reference correction member to directly capture the alignment image. The crystallizing device of claim 6, wherein the alignment mechanism further comprises a mirror disposed to be inclined at an angle to the reference correction member to cause the alignment image sensing member to capture the pair through the mirror Bit image.