TWI650476B - A dust removing device for an automatic door and the automatic door of the same - Google Patents

Abstract

An automatic door dust removing device is installed on a sliding rail of an automatic door machine, the sliding rail bottom has at least one sliding slot, and is connected with a plurality of movable door panels, the sliding rail has a top plate, and the top plate is provided with a plurality of dust exhausting a vacuum box, the dust box is disposed above the top plate, an air flow passage is formed inside the dust box, a plurality of the dust exhaust holes and the air flow passage are connected to each other; a negative pressure device, the negative pressure The device is coupled to the dust box for generating a negative pressure in the air flow passage inside the dust box.

Description

 Automatic door machine dust removal device and automatic door machine  

The invention relates to an automatic door machine dust removing device and an automatic door machine, in particular to an automatic door machine dust removing device and an automatic door machine used for an automatic door machine used in a clean room.

Processes for products such as semiconductor components, liquid crystal panels, and solar substrates must be performed in a clean room because they need to be carried out in a highly clean environment. As the semiconductor process, as well as the new generation of liquid crystal panels, solar substrates and other processes, the substrate size has been gradually expanded, the line width has been continuously reduced, and the component density has been increasing. Therefore, the requirements for the cleanliness of the clean room have been increasing. Therefore, in addition to the dust-proof capability of various equipment in the clean room, the requirements are increasing.

The automatic door machine used in the existing clean room usually has a slide rail and a plurality of movable door panels connected under the slide rail. The slide rail has at least one sliding slot, and the sliding slot is internally provided with a pulley, and a driving device such as a belt. The movable door panel is connected through the connecting mechanism and the pulley and the belt driving device, and can be driven by the belt driving device, and along the chute Reciprocating displacement.

In the existing automatic door machine, since there are movable parts such as pulleys and pulleys inside the slide rail, and the movable door of the automatic door machine must be frequently opened or closed, these moving parts are inevitably generated with dust particles, and these dusts are generated. The particles will diverge from the opening or gap of the slide rail, so that the space around the automatic door machine is contaminated by dust particles.

For the above reasons, dust particles generated by friction of moving parts inside the automatic door rail become one of the sources of clean room pollution. However, the existing techniques for reducing the dust pollution of the automatic door machine mostly reduce the generation of dust by selecting materials such as rollers and drive belts that are resistant to dust and dust. However, since the moving parts inside the slide rail of the automatic door machine are frequently operated, it is impossible to completely avoid the generation of dust particles regardless of the material selected.

Therefore, how to overcome the shortage of dust pollution caused by the existing automatic door machine by improving the structural design has become one of the important topics to be solved by this undertaking.

The embodiment of the invention provides an automatic door dust removing device and an automatic door machine capable of effectively reducing dust pollution of an automatic door machine.

An automatic door dust removing device according to an embodiment of the present invention, wherein the automatic door machine includes a slide rail and at least one movable door panel, wherein the slide rail has at least one sliding slot, and one is located above the sliding slot The top plate of the movable door panel is received in the sliding slot and can be reciprocally displaced along the longitudinal axis of the sliding slot. The automatic door dust removing device comprises: a plurality of dust collecting holes, The dust exhaust holes are disposed on the top plate in a direction parallel to at least one of the sliding grooves, and the plurality of dust exhaust holes and at least one of the sliding grooves communicate with each other; a dust box, the dust box Covering a plurality of the dust exhaust holes, an air flow passage is formed inside the dust box, a plurality of the dust exhaust holes and the air flow passage are connected to each other; a negative pressure device, the negative pressure device and the The dust box is connected to generate a negative pressure in the air flow passage inside the dust box.

In a preferred embodiment of the present invention, at least one of the bottom sides of the chute has an opening, and the plurality of exhaust holes are disposed on the top plate in a direction parallel to the longitudinal axis of at least one of the chutes. Upper, the dust box is disposed on the top plate in a direction parallel to a longitudinal axis of the chute, and the plurality of dust exhaust holes are covered by the dust box, when the inside of the dust box is When the air flow passage forms a negative pressure state, a flow can be generated from the opening into the at least one of the chutes, and then enter through the plurality of the dust exhaust holes Airflow into the airflow passage such that at least one of the dust particles inside the chute is carried by the airflow into the airflow passage.

In a preferred embodiment of the present invention, the vacuum device includes: a plurality of air suction devices, wherein the plurality of air suction devices are disposed on one side of the dust box, and one end of the plurality of air suction devices The dust box is connected.

In a preferred embodiment of the present invention, a plurality of the air extracting devices are respectively provided with a filtering device with respect to the other end of the dust box, and the air extracting device can extract the gas in the air flow passage and make The withdrawn gas passes through the filtration device.

In a preferred embodiment of the present invention, the negative pressure device is an air suction pipe, and the air suction pipe is connected to a negative pressure air suction device.

The embodiment of the invention further provides an automatic door machine, comprising: a sliding rail, the sliding rail has at least one sliding slot, and a top plate located above the sliding slot, wherein the top plate is provided with a plurality of dust discharging holes, A plurality of the dust exhaust holes are connected to at least one of the sliding slots; at least one movable door panel, at least one upper end of the movable door panel is connected to at least one of the sliding slots through a plurality of connecting devices, and is capable of being along at least one a reciprocating displacement of the longitudinal axis of the chute; a dust box, the dust box is disposed above the top plate, the dust box covers a plurality of the dust holes, and the inside of the dust box forms a a plurality of the dust exhaust holes and the air flow passages communicate with each other; a vacuum device, the vacuum device and the dust box are connected to cause the air flow passage inside the dust box to generate a negative Pressure.

For a better understanding of the features and technical aspects of the present invention, reference should be made to the accompanying drawings.

1‧‧‧Automatic door machine

2‧‧‧ wall

10‧‧‧Slide rails

11‧‧‧Aluminum extruded body

12‧‧‧Chute

121‧‧‧ openings

13‧‧‧ top board

14‧‧‧Dust holes

15‧‧‧Baffle

16‧‧‧floor

20‧‧‧ activity gate

21‧‧‧active door panels

22‧‧‧Connecting device

23‧‧‧ pulley

30‧‧‧Dust box

31‧‧‧Air passage

32‧‧‧Exhaust pipe

40‧‧‧Negative pressure device

40a‧‧‧Negative pressure pumping device

41‧‧‧Exhaust device

42‧‧‧Filter device

43‧‧‧Control box

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a sectional view showing the combination of a first embodiment of the present invention.

Fig. 1A is a partially enlarged sectional view showing the first embodiment of the present invention.

Figure 2 is a front elevational view of the combination of the first embodiment of the present invention.

Figure 3 is a plan view of a first embodiment of the present invention.

4 is a perspective view showing the first embodiment of the dust removing device for an automatic door machine of the present invention.

Figure 5 is a cross-sectional view showing a combination of a second embodiment of the present invention.

The invention relates to an automatic door machine dust removing device and an automatic door machine which are used in a clean room. As shown in FIG. 1 to FIG. 4, in the first embodiment of the automatic door machine 1 of the present invention, the automatic door machine 1 of the present invention comprises: a slide rail 10, a movable door 20, a dust box 30, and a plurality of negative doors. Pressing device 40.

The slide rail 10 has an aluminum extruded body 11 as shown in FIG. 1 and FIG. 1A. In this embodiment, the slide rail 10 can be mounted on a wall surface 2, and the movable door is moved through the slide rail 10. 20 is installed at the door of the wall 2. The top cover of the slide rail 10 has a top plate 13 , and the bottom of the top plate 13 defines two mutually parallel sliding slots 12 . The two sliding slots 12 have a partition 15 therein for isolating the two sliding slots 12 . The bottoms of the two sliding slots 12 respectively have an opening 121, and the bottom of the sliding rail 10 has an inwardly extending bottom plate 16 on each side of the opening 121 of the sliding slot 12.

The movable door 20 has a plurality of movable door panels 21, and each of the movable door panels 21 has a plurality of connecting devices 22 at the upper ends thereof, and is connected to the sliding slots 12 at the bottom of the sliding rails 10 through the connecting device 22. In this embodiment, the connecting devices 22 at the top end of the movable door panel 21 are respectively connected to the plurality of pulleys 23, and the plurality of pulleys 23 and the bottom plate 16 of the sliding rail 10 are engaged with each other, whereby the movable door panel 21 is guided by the sliding slot 12, and can be along The longitudinal direction of the chute 12 is reciprocally displaced. The inside of the chute 12 is further provided with a belt driving device (not shown) for driving the respective movable door panels 21 to be displaced, so that the movable door 20 is opened or closed.

The present invention is provided with a plurality of dust exhaust holes 14 on the top plate 13 of the slide rail 10 corresponding to the positions of the respective chutes 12. As shown in FIG. 4, a plurality of the dust exhaust holes 14 are aligned with the longitudinal axis of the chute 12. The parallel directions are provided on the top plate 13, so that each of the dust exhaust holes 14 and the chute communicate with each other.

The dust box 30 is disposed above the slide rail 10. In this embodiment, the dust box 30 is a box with a rectangular cross section, and the bottom of the dust box 30 is connected to the top plate 13. Square, and a plurality of dust holes 14 are covered. The inside of the dust box 30 forms an air flow path 31, thereby causing a plurality of the dust exhaust holes 14 and the air flow path 31 to communicate with each other. The vacuum device 40 is connected to the dust box 30, and the gas inside the dust box 30 is evacuated through the negative pressure device 40, so that the air flow passage 31 inside the dust box 30 is in a negative pressure state.

As shown in FIG. 1 and FIG. 1A, since the plurality of dust exhaust holes 14 on the top plate 13 are covered by the dust box 30, and each of the chutes 12 can communicate with the air flow passage 31 through the dust exhaust hole 14, the inside of the dust box 30 is When a negative pressure is generated, the gas inside each of the chutes 12 can be sucked into the air flow passage 31 by vacuum suction, so that it will form from the opening 121 of the chute into the chute 12, and then enter through the dust exhaust hole 14. The air flow to the inside of the air flow passage 31. Therefore, the negative pressure inside the air flow passage 31 can force the air flow to flow only from the chute 12 to the air flow passage 31 in a unidirectional manner, so that dust, particles, and the like inside the chute 12 can be sucked into the dust box 30, and then Dust and particles are carried out of the dust box 30 via the vacuum device 40.

As shown in FIG. 2, FIG. 3 and FIG. 4, in the first embodiment of the present invention, each of the vacuum devices 40 is attached to the side surface of the dust box 30. In this embodiment, each of the vacuum devices 40 includes an air extracting device 41 and a filtering device 42 respectively. The dust box 30 is provided with a plurality of openings on the plate body on the side of the wall surface 2, and the plurality of suction devices 41 are provided at a plurality of openings of the dust box 30 with respect to the plate body of the wall surface 2. The air extracting device 41 has an exhaust fan inside, and one end of the air extracting device 41 is connected to the opening of the side panel body of the dust box 30, and the other end is connected to the filtering device 42, and the airflow can be transmitted through the air extracting device 41. The gas in the passage 31 is withdrawn and forces the gas withdrawn from the gas flow passage 31 through the filtering device 42.

In this embodiment, the filter device 42 has a plurality of filters inside, and the filter device 42 can be a high-efficiency filter (HEPA), and the filter device 42 can pass the pumping device 41. The dust particles contained in the extracted gas are blocked to prevent dust particles from being released into the air to prevent dust particles from contaminating the space around the automatic door machine. The filtering device 42 can The replacement or cleaning is easily removed so that after the filter unit 42 is used for a period of time, it is still possible to maintain a good dust removal effect and avoid airflow blockage.

In this embodiment, the dust box 30 is disposed above the slide rail 10 in a direction parallel to the longitudinal axis of the chute 12, and the plurality of the negative pressure devices 40 are also along the longitudinal axis of the chute 12. Parallel directions are provided on the dust box 30 at appropriate intervals. At the same time, this embodiment further adds a control box 43 to one side of the dust box 30 for connecting a plurality of the negative pressure devices 40 and controlling the operation of the plurality of the negative pressure devices 40.

It should be noted that the positions of the plurality of the negative pressure devices 40 and the separation distance can be selected according to the results of the airflow simulation analysis, and the positions and spacings thereof disposed on the dust box 30 are selected to operate the respective negative pressure devices 40. At this time, the negative pressure values generated at the respective positions of the air flow passages 31 in the dust box 30 can be averaged, so that the gas inside the respective chutes 12 can enter the dust box 30 at a stable flow rate and pressure to ensure each of the slide rails 10 The dust particles inside the chute 12 can be sucked into the dust box 30.

According to the first embodiment of the present invention, the dust particles generated by the movable parts (for example, the pulley 23, the belt drive mechanism, and the like) inside the slide rail 10 of the automatic door machine 1 can be sucked into the dust box 30. And the dust particles are carried away from the dust box 30 via the negative pressure device 40, so that it is possible to effectively prevent the dust particles generated by the friction of the movable parts inside the slide rail 10 of the automatic door machine 1 from polluting the air in the surrounding space, thereby being able to conform to the new generation. Clean room with higher specifications for dust protection.

As shown in FIG. 2, the second embodiment of the automatic door machine of the present invention, in the second embodiment of the present invention, the basic structure of the automatic door machine 1 is the same as that of the first embodiment, so that the repeated components are not repeatedly introduced here. . In the second embodiment, the vacuum device used is not directly connected to the dust box 30, but is connected via a extension pipe and a dust box. In this embodiment, the negative pressure device includes an air suction pipe 32, one end of the air suction pipe 32 is connected to the dust suction box 30, and the other end is connected to a negative pressure air suction device 40a, and the negative pressure air suction device 40a may be a vacuum pump or blower, in addition to a semiconductor factory The vacuum line in the room or the clean room can generate a vacuum suction through the vacuum suction device 40a, and the gas inside the dust box 30 is extracted through the air suction pipe 32, and the dust particles in the dust box 30 are taken away from the vacuum. Box 30.

The second embodiment of the present invention can also effectively remove the dust particles generated by the moving parts inside the slide rail 10 of the automatic door machine 1, thereby achieving the effect of improving the cleanliness and dustproof capability of the automatic door machine 1.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, equivalent technical changes made by using the present specification and the contents of the drawings are included in the protection scope of the present invention. .

Claims (4)

An automatic door machine dust removing device, wherein the automatic door machine comprises a sliding rail and at least one movable door panel, wherein the sliding rail has at least one sliding slot, and a top panel located above at least one of the sliding slots, at least one The upper end of the movable door panel is received in at least one of the sliding slots and is reciprocally displaceable along a longitudinal axis of at least one of the sliding slots. The automatic door dust removing device comprises: a plurality of dust collecting holes, and a plurality of The dust exhaust hole is disposed on the top plate corresponding to the position of the at least one chute, and the plurality of dust exhaust holes and at least one of the chutes communicate with each other; a dust box, the dust box is disposed at the a wall surface above the slide rail, the dust box covers a plurality of the dust exhaust holes, an air flow passage is formed inside the dust box, and the plurality of dust exhaust holes and the air flow passage are connected to each other. And the dust box is provided with a plurality of openings on the plate body on one side of the wall surface; and a plurality of negative pressure devices, the plurality of the negative pressure devices are arranged in a direction parallel to the longitudinal axis of the chute And at a proper spacing in the vacuum box relative to the a side of the wall for causing a negative pressure to be generated in the air flow passage inside the dust box; a plurality of the negative pressure devices having a plurality of air suction devices, wherein the plurality of air suction devices are disposed in the dust suction box One end of the plurality of air suction devices and the dust suction box are connected with respect to a plurality of the openings on the plate body on one side of the wall surface with respect to a side surface of the wall surface; each of the air suction The device is respectively provided with a filtering device with respect to the other end of the dust box, the filtering device having a plurality of high-efficiency screens, the pumping device capable of extracting the gas in the airflow passage and passing the extracted gas through The filtering device is configured to remove dust particles in the gas extracted by the air extracting device. The automatic door dust removing device according to claim 1, wherein at least one of the bottom sides of the chute has an opening, and the plurality of the dust removing holes are along the longitudinal direction of at least one of the chutes a shaft parallel direction is disposed on the top plate, the dust box is disposed on the top plate in a direction parallel to a longitudinal axis of the sliding slot, and a plurality of the dust exhaust holes are covered by the dust box. When the air flow passage inside the dust box forms a negative pressure state, a flow can be generated from the opening into the at least one of the chutes and into the air flow passage through the plurality of the dust exhaust holes. The air flow causes the dust particles inside at least one of the chutes to be carried by the air flow into the air flow passage. An automatic door machine includes: a slide rail having at least one chute, and a top plate located above the at least one of the chutes, wherein the top plate and the at least one of the chutes are disposed at a position corresponding to the plurality of chutes a dust exhaust hole, wherein the plurality of dust exhaust holes communicate with at least one of the sliding slots; at least one movable door panel, at least one upper end of the movable door panel is connected to at least one of the sliding slots through a plurality of connecting devices, and is capable of Reciprocally displaced along a longitudinal axis of at least one of the chutes; and a dust box disposed on a wall above the rail and connected to the top of the top plate, the dust box covering Above the plurality of dust exhaust holes, an air flow passage is formed inside the dust box, a plurality of the dust exhaust holes and the air flow passage communicate with each other, and the dust box is opposite to the wall side Having a plurality of openings in the plate; a plurality of negative pressure devices, the plurality of negative pressure devices being disposed in a direction parallel to a longitudinal axis of the chute, and disposed at an appropriate spacing in the dust box relative to the One side of the wall for the interior of the dust box The air flow passage generates a negative pressure; the plurality of negative pressure devices respectively have a plurality of air suction devices, and the plurality of air suction devices are disposed on a side of the dust box relative to the wall surface, and the plurality of pumping devices One end of the gas device and the dust box are connected with a plurality of the openings on the plate body on one side of the wall surface; each of the air suction devices is respectively provided with a filtering device with respect to the other end of the dust box The filtering device has a plurality of high-efficiency screens capable of extracting gas in the gas flow passage and passing the extracted gas through The filtering device is configured to remove dust particles in the gas extracted by the air extracting device. The automatic door machine of claim 3, wherein the slide rail is an aluminum extrusion, at least one of the sliding grooves is formed on a bottom side of the slide rail, and at least one of the bottom sides of the slide has a Opening, when the air flow passage inside the dust box forms a negative pressure state, can generate a flow from the opening into at least one of the chutes, and then enter the air flow through the plurality of dust exhaust holes Airflow in the passage such that at least one of the dust particles inside the chute is carried by the airflow into the airflow passage.