TWI648931B - Laser apparatus and method for generating laser by using the laser apparatus - Google Patents

Laser apparatus and method for generating laser by using the laser apparatus Download PDF

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TWI648931B
TWI648931B TW105130090A TW105130090A TWI648931B TW I648931 B TWI648931 B TW I648931B TW 105130090 A TW105130090 A TW 105130090A TW 105130090 A TW105130090 A TW 105130090A TW I648931 B TWI648931 B TW I648931B
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laser
trigger signal
light
gain medium
generating
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TW201742342A (en
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李京九
李在烈
申亘浩
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Eo科技股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09Processes or apparatus for excitation, e.g. pumping
    • H01S3/091Processes or apparatus for excitation, e.g. pumping using optical pumping
    • H01S3/0915Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light
    • H01S3/0933Processes or apparatus for excitation, e.g. pumping using optical pumping by incoherent light of a semiconductor, e.g. light emitting diode

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Lasers (AREA)

Abstract

本發明提供一種雷射裝置及雷射產生方法。雷射裝置根據雷射調變訊號產生觸發訊號。另外,雷射裝置根據觸發訊號將光抽運裝置同步化而向增益介質射出抽運光。The invention provides a laser device and a laser generating method. The laser device generates a trigger signal based on the laser modulation signal. In addition, the laser device synchronizes the optical pumping device according to the trigger signal to emit the pumping light to the gain medium.

Description

雷射裝置以及使用該雷射裝置產生雷射的方法Laser device and method for producing laser using the same

本發明是有關於一種雷射裝置及利用上述雷射裝置的雷射產生方法,且有關於一種藉由以不使雷射裝置的增益介質受損的方式向增益介質供給抽運光而產生雷射光的技術。BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a laser device and a laser generating method using the same, and relates to a method for generating a lightning beam by supplying pumping light to a gain medium in a manner that does not damage the gain medium of the laser device. The technique of shooting light.

通常,雷射加工製程是指向加工對象物的表面掃描雷射光而對加工對象物表面的形狀或物理性質等進行加工的製程。此種加工對象物可有多種例子,其形狀可呈二維平面形狀。作為雷射加工製程的例子,可列舉於加工對象物的表面上形成圖案的圖案化製程、使加工對象物的物性變形的製程、利用雷射對加工對象物進行加熱而改變加工對象物的形狀的製程、利用雷射光切割加工對象物的製程等。Generally, the laser processing process is a process of processing the shape or physical properties of the surface of the object to be processed by scanning the laser light toward the surface of the object to be processed. There are various examples of such an object to be processed, and the shape thereof may be a two-dimensional planar shape. Examples of the laser processing process include a patterning process for forming a pattern on the surface of the object to be processed, a process for deforming the physical properties of the object to be processed, and heating the object to be processed by a laser to change the shape of the object to be processed. The process, the process of cutting the object to be processed by laser light, and the like.

雷射(LASER)裝置是以利用光的受激發射(Stimulated emission)現象產生雷射光的方式製成的機械裝置。利用主振盪器受激發射光而以光束具有相干性(coherence)的形態射出雷射。因雷射的單色性、相干性特徵而使雷射裝置有效地利用於包括製造製程在內的整個產業,除此之外,亦廣泛地用作發揮於進行外科手術時精確地切割皮膚或選擇性地切除身體組織的一部分的作用的醫用設備。A laser (LASER) device is a mechanical device that is produced by utilizing a phenomenon of stimulated emission of light to generate laser light. The laser is excited by the main oscillator and the laser is emitted in a form in which the beam has coherence. The laser device is effectively utilized in the entire industry including the manufacturing process due to the monochromaticity and coherence characteristics of the laser. In addition, it is widely used to accurately cut the skin or perform surgery. A medical device that selectively excises a portion of body tissue.

雷射裝置可僅藉由上述主振盪器產生雷射光,但為了射出強度較強的雷射光而利用增益介質(Gain medium)放大雷射光的能量。雷射裝置藉由光抽運作用而向增益介質注入激發能量。於是,增益介質內部的電子藉由光抽運作用而激發,從而產生雷射光。The laser device can generate laser light only by the above-described main oscillator, but a Gain medium is used to amplify the energy of the laser light in order to emit a strong intensity of the laser light. The laser device injects excitation energy into the gain medium by means of a light pumping operation. Thus, electrons inside the gain medium are excited by the light pumping operation to generate laser light.

然而,於在增益介質的內部進行光抽運的過程中,增益介質會產生發熱現象。另外,若向增益介質的內部注入大於容許值的能量,則產生增益介質灼傷的問題。However, during the optical pumping process inside the gain medium, the gain medium generates heat. Further, when energy larger than the allowable value is injected into the inside of the gain medium, there is a problem that the gain medium is burned.

[發明欲解決的課題][Question to be solved by the invention]

於利用增益介質產生雷射光的過程中,防止增益介質因高溫而受損。In the process of generating laser light by using a gain medium, the gain medium is prevented from being damaged due to high temperature.

[解決課題的手段][Means for solving the problem]

於一態樣中, 提供一種雷射裝置,其包括: 雷射調變訊號產生器,產生雷射調變訊號; 第一觸發訊號產生器,接收上述雷射調變訊號而產生第一觸發訊號; 第二觸發訊號產生器,接收上述雷射調變訊號而產生第二觸發訊號; 種子雷射產生裝置,藉由上述第一觸發訊號同步化而向增益介質射出種子雷射光;及 光抽運裝置,藉由上述第二觸發訊號同步化而向上述增益介質射出抽運光。In one aspect, a laser device is provided, comprising: a laser modulation signal generator for generating a laser modulation signal; and a first trigger signal generator for receiving the laser modulation signal to generate a first trigger signal a second trigger signal generator that receives the laser modulation signal to generate a second trigger signal; and a seed laser generating device that emits seed laser light to the gain medium by synchronizing the first trigger signal; and optical pumping The device emits pumping light to the gain medium by synchronizing the second trigger signal.

上述光抽運裝置可包括雷射二極體。The above optical pumping device may include a laser diode.

上述光抽運裝置可更包括向上述雷射二極體供給電流的電流供給部,上述電流供給部藉由上述第二觸發訊號同步化而變更電流等級。The optical pumping device may further include a current supply unit that supplies a current to the laser diode, and the current supply unit changes the current level by synchronizing the second trigger signal.

上述第二觸發訊號產生器可於接收上述雷射調變訊號而經過特定的延遲時間後,產生上述第二觸發訊號。The second trigger signal generator may generate the second trigger signal after receiving the laser modulation signal and after a specific delay time.

上述第一觸發訊號產生器可於接收上述雷射調變訊號而經過第一延遲時間後,產生上述第一觸發訊號,上述第二觸發訊號產生器於接收上述雷射調變訊號而經過第二延遲時間後,產生上述第二觸發訊號, 上述第二延遲時間大於上述第一延遲時間。The first trigger signal generator may generate the first trigger signal after receiving the laser modulation signal and after the first delay time, and the second trigger signal generator receives the laser modulation signal and passes the second After the delay time, the second trigger signal is generated, and the second delay time is greater than the first delay time.

上述光抽運裝置可將上述抽運光射出作脈衝光。The above optical pumping device can emit the pumping light as pulsed light.

上述脈衝光的脈寬可取決於既定的上述種子雷射光的放大比率。The pulse width of the pulsed light described above may depend on a predetermined amplification ratio of the above-described seed laser light.

上述光抽運裝置可於即將產生上述種子雷射光的強度成為最大的種子雷射光前至上述種子雷射光的強度成為最大的時間區間中的任一時點結束上述脈衝光的射出。The optical pumping device can terminate the emission of the pulsed light at any point in time before the intensity of the seed laser light having the highest intensity of the seed laser light to the maximum of the seed laser light.

於另一態樣中, 提供一種雷射產生方法,其包括如下步驟: 產生雷射調變訊號的步驟; 根據上述雷射調變訊號而產生第一觸發訊號的步驟; 根據上述雷射調變訊號而產生第二觸發訊號的步驟; 藉由上述第一觸發訊號同步化而向增益介質射出種子雷射光的步驟;及 藉由上述第二觸發訊號同步化而向上述增益介質射出抽運光的步驟。In another aspect, a laser generating method is provided, comprising the steps of: generating a laser modulation signal; generating a first trigger signal according to the laser modulation signal; and performing the laser modulation according to the foregoing a step of generating a second trigger signal by the signal; a step of emitting seed laser light to the gain medium by synchronizing the first trigger signal; and emitting pumping light to the gain medium by synchronizing the second trigger signal step.

向上述增益介質射出上述抽運光的步驟可藉由上述第二觸發訊號而變更供給至雷射二極體的電流等級。The step of emitting the pumping light to the gain medium may change the current level supplied to the laser diode by the second trigger signal.

產生上述第二觸發訊號的步驟可於接收上述雷射調變訊號而經過特定的延遲時間後,產生上述第二觸發訊號。The step of generating the second trigger signal may generate the second trigger signal after receiving the laser modulation signal and after a specific delay time.

產生上述第一觸發訊號的步驟可於接收上述雷射調變訊號而經過第一延遲時間後,產生上述第一觸發訊號,產生上述第二觸發訊號的步驟於接收上述雷射調變訊號而經過第二延遲時間後,產生上述第二觸發訊號, 上述第二延遲時間大於上述第一延遲時間。The step of generating the first trigger signal may be performed after receiving the laser modulation signal and after the first delay time, generating the first trigger signal, and the step of generating the second trigger signal is performed after receiving the laser modulation signal After the second delay time, the second trigger signal is generated, and the second delay time is greater than the first delay time.

向增益介質射出上述抽運光的步驟可將上述抽運光射出作脈衝光。The step of emitting the pumping light to the gain medium may emit the pumping light as pulsed light.

上述脈衝光的脈寬可取決於既定的種子雷射光的放大比率。The pulse width of the pulsed light described above may depend on the amplification ratio of the predetermined seed laser light.

向增益介質射出上述抽運光的步驟可於即將產生上述種子雷射光的強度成為最大的種子雷射光前至上述種子雷射光的強度成為最大的時間區間中的任一時點結束上述脈衝光的射出。The step of emitting the pump light to the gain medium may terminate the emission of the pulse light at any point in time before the seed laser light having the highest intensity of the seed laser light is maximized and when the intensity of the seed laser light is maximized. .

[發明之效果][Effects of the Invention]

根據例示性的實施例,光抽運裝置可藉由觸發訊號同步化而向增益介質射出抽運光。藉此,可防止於增益介質中儲存過多的能量。並且,可減少光抽運裝置的耗電。According to an exemplary embodiment, the optical pumping device can emit pumping light to the gain medium by trigger signal synchronization. Thereby, excessive energy can be prevented from being stored in the gain medium. Moreover, the power consumption of the optical pumping device can be reduced.

於以下圖式中,相同的參照符號表示相同的構成要素,為了說明的明確性及便利性,可於圖中誇張地表示各構成要素的尺寸。另一方面,以下所說明的實施例僅為示例,可根據此種實施例實現各種變形。In the following drawings, the same reference numerals are given to the same components, and the size of each component may be exaggerated in the drawing for clarity and convenience of description. On the other hand, the embodiments described below are merely examples, and various modifications can be made according to such embodiments.

第一、第二等用語可用於說明各種構成要素,但構成要素不應受用語的限定。用語僅以將一個構成要素區別於其他構成要素為目的而使用。The first and second terms can be used to describe various constituent elements, but the constituent elements should not be limited by the terms. The term is used only for the purpose of distinguishing one component from another component.

若未於文中明確表示,則單數的表達包括複數的表達。並且,於記載為某個部分「包括」某個構成要素時,若無特別相反的記載,則是指可更包括其他構成要素,並非是指排除其他構成要素。If not explicitly indicated in the text, the singular expression includes the plural expression. In addition, when a part is "included" as a component, unless otherwise stated, it means that it may include other components, and does not mean that other components are excluded.

並且,說明書中所記載的「…部」、 「模組」等用語是指對至少一個功能或動作進行處理的單位。Further, terms such as "parts" and "modules" described in the specification refer to units that process at least one function or operation.

圖1是表示比較例的雷射裝置的圖。Fig. 1 is a view showing a laser device of a comparative example.

參照圖1,比較例的雷射裝置可包括產生種子雷射(Seed laser)的種子雷射產生裝置10。種子雷射產生裝置10可產生雷射光脈衝。種子雷射產生裝置10可藉由光纖22向增益介質20傳輸雷射光脈衝。Referring to FIG. 1, the laser device of the comparative example may include a seed laser generating device 10 that generates a seed laser. The seed laser generating device 10 can generate laser light pulses. The seed laser generating device 10 can transmit laser light pulses to the gain medium 20 via the optical fiber 22.

比較例的雷射裝置可包括向增益介質20供給能量的光抽運裝置30。光抽運裝置30可藉由向增益介質20照射光而提高儲存於增益介質20的能量。增益介質20可放大自種子雷射產生裝置10接收的種子雷射光。增益介質20可藉由放大種子雷射光訊號S1而射出形狀與種子雷射光訊號S1相同的輸出光訊號S2。The laser device of the comparative example may include an optical pumping device 30 that supplies energy to the gain medium 20. The optical pumping device 30 can increase the energy stored in the gain medium 20 by irradiating light to the gain medium 20. The gain medium 20 can amplify the seed laser light received from the seed laser generating device 10. The gain medium 20 can emit the same output optical signal S2 having the same shape as the seed laser light signal S1 by amplifying the seed laser light signal S1.

根據比較例,光抽運裝置30可持續地向增益介質20射出固定強度的抽運光。因此,隨著光抽運裝置30向增益介質20射出抽運光的時間增加而儲存於增益介質20的能量會增加。若種子雷射光照射至增益介質20,則增益介質20可利用儲存於增益介質20的能量放大種子雷射光而射出作輸出雷射光。According to the comparative example, the optical pumping device 30 can continuously emit the pumping light of a fixed intensity to the gain medium 20. Therefore, as the time during which the optical pumping device 30 emits the pumping light to the gain medium 20 increases, the energy stored in the gain medium 20 increases. If the seed laser light is irradiated to the gain medium 20, the gain medium 20 can amplify the seed laser light by the energy stored in the gain medium 20 and emit it as the output laser light.

若增益介質20射出輸出雷射光,則儲存於增益介質20的能量會釋放到外部。因此,於種子雷射光以週期性的脈衝形狀照射至增益介質20的情形時,儲存於增益介質20的能量亦可週期性地反覆實現減少與增加。然而,若種子雷射光非週期性地照射至增益介質20,則會於種子雷射光的照射時間間隔較長的區間對增益介質20供給過多的能量。If the gain medium 20 emits the output laser light, the energy stored in the gain medium 20 is released to the outside. Therefore, when the seed laser light is irradiated to the gain medium 20 in a periodic pulse shape, the energy stored in the gain medium 20 can be periodically repeatedly reduced and increased. However, if the seed laser light is irradiated to the gain medium 20 non-periodically, excessive energy is supplied to the gain medium 20 in a section where the irradiation time interval of the seed laser light is long.

圖2是表示於比較例的雷射裝置中非週期性地產生種子雷射光的情形時的增益介質20內部的能量變化的圖。FIG. 2 is a view showing changes in energy inside the gain medium 20 when the seed laser light is generated non-periodically in the laser device of the comparative example.

於圖2中,(a)曲線圖是表示自種子雷射產生裝置10射出的種子雷射光的輸出功率隨時間而發生變化的曲線圖。並且,(b)曲線圖是表示藉由光抽運裝置30而向增益介質20射出的抽運光的輸出功率隨時間而發生變化的曲線圖。並且,(c)曲線圖是表示儲存於增益介質20的能量隨時間而發生變化的曲線圖。In Fig. 2, (a) is a graph showing changes in the output power of the seed laser light emitted from the seed laser generating device 10 with time. Further, the graph (b) is a graph showing that the output power of the pump light emitted to the gain medium 20 by the optical pumping device 30 changes with time. Further, the (c) graph is a graph showing that the energy stored in the gain medium 20 changes with time.

參照圖2,光抽運裝置30可向增益介質20射出固定強度的抽運光。於該情形時,可藉由調節抽運光的強度而對自增益介質20射出的輸出雷射光的輸出功率進行調節。參照(c)曲線圖,因抽運光照射至增益介質20而儲存於增益介質20的能量會增加。另外,若種子雷射光入射至增益介質20,則會自增益介質20射出輸出雷射光而使儲存於增益介質20的能量急遽地減少。Referring to FIG. 2, the optical pumping device 30 can emit a fixed intensity pumping light to the gain medium 20. In this case, the output power of the output laser light emitted from the gain medium 20 can be adjusted by adjusting the intensity of the pump light. Referring to the (c) graph, the energy stored in the gain medium 20 due to the pumping light being irradiated to the gain medium 20 is increased. Further, when the seed laser light is incident on the gain medium 20, the output laser light is emitted from the gain medium 20, and the energy stored in the gain medium 20 is drastically reduced.

於種子雷射光週期性地入射至增益介質20的期間,儲存於增益介質20的能量亦會週期性地發生增加與減少。因此,儲存於增益介質20的能量不會增加至固定量以上。然而,於種子雷射光非週期性地入射至增益介質20的區間,在未入射種子雷射光的期間,儲存於增益介質20的能量會持續增加。另外,若不射出種子雷射光的時間變長,則儲存於增益介質20的能量會變得過高。While the seed laser light is periodically incident on the gain medium 20, the energy stored in the gain medium 20 also periodically increases and decreases. Therefore, the energy stored in the gain medium 20 does not increase above a fixed amount. However, in the section where the seed laser light is incident non-periodically to the gain medium 20, the energy stored in the gain medium 20 continues to increase during the period when the seed laser light is not incident. Further, if the time for not emitting the seed laser light becomes long, the energy stored in the gain medium 20 becomes too high.

若儲存於增益介質20的能量變得過高,則增益介質20會因過熱而受損。例如,若儲存於增益介質20的能量變得高於容許值,則會於增益介質20的內部產生受激布里恩散射(stimulated Brillouin scattering)現象。即,於增益介質20的內部,入射光與散射光非線性地結合而放大,從而會引起增益介質20的高溫現象。If the energy stored in the gain medium 20 becomes too high, the gain medium 20 may be damaged by overheating. For example, if the energy stored in the gain medium 20 becomes higher than the allowable value, a phenomenon of stimulated Brillouin scattering occurs inside the gain medium 20. That is, in the inside of the gain medium 20, the incident light and the scattered light are nonlinearly combined and amplified, thereby causing a high temperature phenomenon of the gain medium 20.

圖3是表示例示性的實施例的雷射裝置100的圖。FIG. 3 is a diagram showing a laser device 100 of an exemplary embodiment.

參照圖3,例示性的實施例的雷射裝置100可包括:雷射調變訊號產生器110,產生雷射調變訊號;第一觸發訊號產生器122,接收雷射調變訊號而產生第一觸發訊號;第二觸發訊號產生器132,接收雷射調變訊號而產生第二觸發訊號;種子雷射產生裝置124,藉由第一觸發訊號同步化而向增益介質射出種子雷射光;及光抽運裝置134,藉由第二觸發訊號同步化而向上述增益介質射出抽運光。Referring to FIG. 3, the laser device 100 of the exemplary embodiment may include: a laser modulation signal generator 110 that generates a laser modulation signal; and a first trigger signal generator 122 that receives a laser modulation signal to generate a first a trigger signal; the second trigger signal generator 132 receives the laser modulation signal to generate a second trigger signal; and the seed laser generating device 124 emits the seed laser light to the gain medium by synchronizing the first trigger signal; and The optical pumping device 134 emits pumping light to the gain medium by synchronizing the second trigger signal.

雷射調變訊號產生器110可將特定的脈衝訊號產生作雷射調變訊號。可週期性或非週期性地產生雷射調變訊號。雷射調變訊號產生器110的雷射調變訊號可為使雷射裝置100輸出雷射光的訊號。The laser modulation signal generator 110 can generate a specific pulse signal as a laser modulation signal. The laser modulation signal can be generated periodically or non-periodically. The laser modulation signal of the laser modulation signal generator 110 may be a signal for causing the laser device 100 to output laser light.

第一觸發訊號產生器122可自雷射調變訊號產生器接收雷射調變訊號。若第一觸發訊號產生器122接收雷射調變訊號,則可產生第一觸發訊號。第一觸發訊號產生器122可將第一觸發訊號發送至種子雷射產生裝置124。種子雷射產生裝置124可藉由第一觸發訊號而同步化。種子雷射產生裝置124同步化是指種子雷射產生裝置124的動作狀態發生變更,若種子雷射產生裝置124藉由第一觸發訊號而同步化,則動作狀態發生變更而可向外部射出種子雷射光。The first trigger signal generator 122 can receive the laser modulation signal from the laser modulation signal generator. If the first trigger signal generator 122 receives the laser modulation signal, the first trigger signal may be generated. The first trigger signal generator 122 can send the first trigger signal to the seed laser generating device 124. The seed laser generating device 124 can be synchronized by the first trigger signal. The synchronization of the seed laser generating device 124 means that the operating state of the seed laser generating device 124 is changed. If the seed laser generating device 124 is synchronized by the first trigger signal, the operating state is changed and the seed can be emitted to the outside. laser.

第二觸發訊號產生器132可自雷射調變訊號產生器接收雷射調變訊號。若第二觸發訊號產生器132接收雷射調變訊號,則可產生第二觸發訊號。第二觸發訊號產生器132可將第二觸發訊號發送至光抽運裝置134。光抽運裝置134可藉由第二觸發訊號而同步化。光抽運裝置134同步化是指光抽運裝置134的動作狀態發生變更。 The second trigger signal generator 132 can receive the laser modulation signal from the laser modulation signal generator. If the second trigger signal generator 132 receives the laser modulation signal, the second trigger signal may be generated. The second trigger signal generator 132 can send the second trigger signal to the optical pumping device 134. The optical pumping device 134 can be synchronized by the second trigger signal. The synchronization of the optical pumping device 134 means that the operating state of the optical pumping device 134 is changed.

例如,光抽運裝置134可包括雷射二極體134b及向雷射二極體134b供給電流的電流供給部134a。光抽運裝置134的電流供給部134a可藉由第二觸發訊號同步化而變更供給至雷射二極體134b的電流等級。藉由電流供給部134a變更供給至雷射二極體134b的電流等級,雷射二極體134b射出至增益介質138的光能會發生變化。 For example, the optical pumping device 134 may include a laser diode 134b and a current supply portion 134a that supplies a current to the laser diode 134b. The current supply unit 134a of the optical pumping device 134 can change the current level supplied to the laser diode 134b by synchronizing the second trigger signal. The current level supplied to the laser diode 134b is changed by the current supply unit 134a, and the light energy emitted from the laser diode 134b to the gain medium 138 changes.

種子雷射產生裝置124可藉由第一觸發訊號同步化而向增益介質138射出種子雷射光。種子雷射產生裝置124可於內部包括主振盪器。種子雷射產生裝置124藉由主振盪器受激發射光,藉此可將符合相干性的雷射光射出作種子雷射光。自種子雷射產生裝置124射出的種子雷射光的強度可呈脈衝形狀。可週期性或非週期性地射出種子雷射光。 The seed laser generating device 124 can emit the seed laser light to the gain medium 138 by synchronizing the first trigger signal. The seed laser generating device 124 can internally include a main oscillator. The seed laser generating device 124 is stimulated to emit light by the main oscillator, whereby the collimated laser light can be emitted as seed laser light. The intensity of the seed laser light emitted from the seed laser generating device 124 may be in the shape of a pulse. The seed laser light can be emitted periodically or non-periodically.

作為例示,增益介質138可包括自如鐿(Yb)、釹(Nd)、鉺(Er)、銩(Tm)等的稀土類元素獲得的活性離子(active ion)。並且,作為例示,增益介質138亦可包括自如鉻(Cr)、鈦(Ti)等的過渡金屬元素獲得的活性離子(active ion)。By way of example, the gain medium 138 may include active ions obtained from rare earth elements such as Yb, Nd, Er, Tm, and the like. Also, as an example, the gain medium 138 may also include active ions obtained from transition metal elements such as chromium (Cr), titanium (Ti), and the like.

增益介質138可呈摻雜有自如鐿(Yb)、釹(Nd)、鉺(Er)、銩(Tm)等的稀土類元素獲得的活性離子(active ion)、或自如鉻(Cr)、鈦(Ti)等的過渡金屬元素獲得的活性離子(active ion)的狀態。增益介質138可利用自光抽運裝置134接收的能量放大種子雷射光而射出作輸出雷射光。The gain medium 138 may be an active ion doped with a rare earth element such as Yb, Nd, Er, Tm, or the like, or freely available as chromium (Cr) or titanium. A state of an active ion obtained by a transition metal element such as (Ti). The gain medium 138 can amplify the seed laser light using the energy received from the optical pumping device 134 to emit the output laser light.

光抽運裝置134可藉由第二觸發訊號同步化而向增益介質138射出抽運光。可根據照射抽運光的時間而確定由光抽運裝置134供給至增益介質138的能量。每當光抽運裝置134感測到第二觸發訊號時,均能夠以單脈衝形態向增益介質138射出抽運光。即,每當光抽運裝置134感測到第二觸發訊號時,均可向增益介質138射出脈衝(impulse)光。光抽運裝置134射出脈衝光的時間間隔可取決於產生第二觸發訊號的時間間隔。並且,光抽運裝置134射出的脈衝光的脈寬可取決於既定的輸出雷射光的輸出功率。例如,於種子雷射光與輸出雷射光之間的放大比率較大的情形時,脈衝光的脈寬會相對較大。相反地,於種子雷射光與輸出雷射光之間的放大比率較小的情形時,脈衝光的脈寬會相對較小。The optical pumping device 134 can emit the pumping light to the gain medium 138 by synchronizing the second trigger signal. The energy supplied by the optical pumping device 134 to the gain medium 138 can be determined based on the time at which the pumping light is irradiated. Each time the optical pumping device 134 senses the second trigger signal, the pumping light can be emitted to the gain medium 138 in a single pulse configuration. That is, each time the optical pumping device 134 senses the second trigger signal, it can emit impulse light to the gain medium 138. The time interval at which the optical pumping device 134 emits the pulsed light may depend on the time interval at which the second triggering signal is generated. Moreover, the pulse width of the pulsed light emitted by the optical pumping device 134 may depend on the output power of the predetermined output laser light. For example, when the amplification ratio between the seed laser light and the output laser light is large, the pulse width of the pulse light is relatively large. Conversely, when the amplification ratio between the seed laser light and the output laser light is small, the pulse width of the pulse light is relatively small.

圖4是例示性地表示雷射調變訊號、第一觸發訊號及第二觸發訊號的圖。4 is a diagram exemplarily showing a laser modulation signal, a first trigger signal, and a second trigger signal.

於圖4中,(a)曲線圖是表示於雷射調變訊號產生器110中產生的雷射調變訊號的強度隨時間而發生變化的曲線圖。並且,(b)曲線圖是表示第一觸發訊號的強度隨時間而發生變化的曲線圖。並且,(c)曲線圖是表示第二觸發訊號的強度隨時間而發生變化的曲線圖。In FIG. 4, (a) is a graph showing changes in the intensity of the laser modulation signal generated in the laser modulation signal generator 110 with time. And, (b) the graph is a graph indicating that the intensity of the first trigger signal changes with time. And, (c) the graph is a graph indicating that the intensity of the second trigger signal changes with time.

參照圖4,若產生雷射調變訊號,則會與此對應地產生第一觸發訊號及第二觸發訊號。第一觸發訊號及第二觸發訊號可為電脈衝訊號。第一觸發訊號產生器122及第二觸發訊號產生器132可自雷射調變訊號擷取觸發而分別產生第一觸發訊號及第二觸發訊號。第一觸發訊號及第二觸發訊號的脈寬可窄於雷射調變訊號的脈寬。Referring to FIG. 4, if a laser modulation signal is generated, a first trigger signal and a second trigger signal are generated correspondingly. The first trigger signal and the second trigger signal may be electrical pulse signals. The first trigger signal generator 122 and the second trigger signal generator 132 can generate the first trigger signal and the second trigger signal respectively from the laser modulation signal acquisition trigger. The pulse width of the first trigger signal and the second trigger signal may be narrower than the pulse width of the laser modulation signal.

第一觸發訊號產生器122可於感測到雷射調變訊號後,經過特定的延遲時間d而產生第一觸發訊號。相反地,第二觸發訊號產生器132可於感測到雷射調變訊號時立即產生第二觸發訊號。因此,會較第二觸發訊號延遲產生第一觸發訊號。The first trigger signal generator 122 may generate the first trigger signal after a specific delay time d after sensing the laser modulation signal. Conversely, the second trigger signal generator 132 can generate the second trigger signal immediately upon sensing the laser modulation signal. Therefore, the first trigger signal is generated later than the second trigger signal.

若較第二觸發訊號延遲產生第一觸發訊號,則會較抽運雷射光延遲射出種子雷射光。若較抽運雷射光延遲射出種子雷射光,則會於射出種子雷射光前,藉由抽運光而於增益介質138中儲存有能量。增益介質138於射出種子雷射光前,可利用藉由抽運光而儲存的能量放大種子雷射光。種子雷射光的放大比率可取決於增益介質138中所儲存的能量。並且,儲存於增益介質138的能量可於種子雷射光入射至增益介質138前,取決於抽運光射出於增益介質138的時間。另外,可取決於放大種子雷射光所需的抽運光照射時間。因此,至第一觸發訊號產生器122感測雷射調變訊號而產生第一觸發訊號為止的延遲時間可取決於放大種子雷射光所需的抽運光照射時間。另外,至第一觸發訊號產生器122感測雷射調變訊號而產生第一觸發訊號為止的延遲時間亦可根據抽運光的脈寬而變更。If the first trigger signal is delayed compared to the second trigger signal, the laser light is delayed to shoot the seed laser light. If the pump laser light is delayed by the pumping of the laser light, energy is stored in the gain medium 138 by pumping the light before the seed laser light is emitted. The gain medium 138 can amplify the seed laser light by utilizing the energy stored by pumping the light before ejecting the seed laser light. The magnification ratio of the seed laser light may depend on the energy stored in the gain medium 138. Also, the energy stored in the gain medium 138 may be before the seed laser light is incident on the gain medium 138, depending on when the pumping light is incident on the gain medium 138. In addition, it may depend on the pumping light illumination time required to amplify the seed laser light. Therefore, the delay time until the first trigger signal generator 122 senses the laser modulation signal to generate the first trigger signal may depend on the pumping light irradiation time required to amplify the seed laser light. In addition, the delay time until the first trigger signal generator 122 senses the laser modulation signal to generate the first trigger signal may also be changed according to the pulse width of the pumping light.

圖5是例示性地表示雷射調變訊號、第一觸發訊號及第二觸發訊號的圖。FIG. 5 is a diagram exemplarily showing a laser modulation signal, a first trigger signal, and a second trigger signal.

於圖5中,(a)曲線圖是表示於雷射調變訊號產生器110中產生的雷射調變訊號的強度隨時間而發生變化的曲線圖。並且,(b)曲線圖是表示第一觸發訊號的強度隨時間而發生變化的曲線圖。並且,(c)曲線圖是表示第二觸發訊號的強度隨時間而發生變化的曲線圖。In FIG. 5, (a) is a graph showing changes in the intensity of the laser modulation signal generated in the laser modulation signal generator 110 with time. And, (b) the graph is a graph indicating that the intensity of the first trigger signal changes with time. And, (c) the graph is a graph indicating that the intensity of the second trigger signal changes with time.

參照圖5,若產生雷射調變訊號,則會與此對應地產生第一觸發訊號及第二觸發訊號。第一觸發訊號及第二觸發訊號可為電脈衝訊號。Referring to FIG. 5, if a laser modulation signal is generated, a first trigger signal and a second trigger signal are generated correspondingly. The first trigger signal and the second trigger signal may be electrical pulse signals.

第一觸發訊號產生器122可於感測到雷射調變訊號後,經過第一延遲時間d1而產生第一觸發訊號。相反地,第二觸發訊號產生器132可於感測到雷射調變訊號後,經過第二延遲時間d2而產生第二觸發訊號。第一延遲時間d1可大於第二延遲時間d2。因此,可較第二觸發訊號延遲產生第一觸發訊號。The first trigger signal generator 122 may generate the first trigger signal after the first delay time d1 after sensing the laser modulation signal. Conversely, the second trigger signal generator 132 may generate the second trigger signal after the second delay time d2 after sensing the laser modulation signal. The first delay time d1 may be greater than the second delay time d2. Therefore, the first trigger signal can be generated later than the second trigger signal.

種子雷射光的放大比率可取決於增益介質138中所儲存的能量。並且,儲存於增益介質138的能量可於種子雷射光入射至增益介質138前,取決於抽運光射出於增益介質138的時間。因此,第一延遲時間d1與第二延遲時間d2之間的差異可取決於放大種子雷射光所需的抽運光照射時間。並且,第一延遲時間d1與第二延遲時間d2之間的差異亦可根據抽運光的脈寬而變更。The magnification ratio of the seed laser light may depend on the energy stored in the gain medium 138. Also, the energy stored in the gain medium 138 may be before the seed laser light is incident on the gain medium 138, depending on when the pumping light is incident on the gain medium 138. Therefore, the difference between the first delay time d1 and the second delay time d2 may depend on the pumping light irradiation time required to amplify the seed laser light. Further, the difference between the first delay time d1 and the second delay time d2 may be changed according to the pulse width of the pumping light.

圖6及圖7是例示性地表示雷射調變訊號、種子雷射光的輸出功率及抽運光的輸出功率的圖。6 and 7 are diagrams exemplarily showing the output of the laser modulation signal, the output power of the seed laser light, and the output power of the pump light.

於圖6及圖7中,(a)曲線圖是表示於雷射調變訊號產生器110中產生的雷射調變訊號的強度隨時間而發生變化的曲線圖。並且,(b)曲線圖是表示自種子雷射光產生器射出的種子雷射光的輸出功率隨時間而發生變化的曲線圖。並且,(c)曲線圖是表示自光抽運裝置134射出的抽運光的輸出功率隨時間而發生變化的曲線圖。In FIGS. 6 and 7, the graph (a) is a graph showing changes in the intensity of the laser modulation signal generated in the laser modulation signal generator 110 with time. Further, (b) the graph is a graph showing that the output power of the seed laser light emitted from the seed laser light generator changes with time. Further, the (c) graph is a graph showing that the output power of the pump light emitted from the optical pumping device 134 changes with time.

參照圖6,可較抽運光更延遲射出種子雷射光。並且,每當產生雷射調變訊號時,抽運光與種子雷射光均能夠以脈衝形態射出。抽運光可於種子雷射光的強度成為最大的時點結束射出。作為其他例,參照圖7,抽運光可於即將產生種子雷射光前結束射出。Referring to Figure 6, the seed laser light can be emitted more delayed than the pumping light. Moreover, each time the laser modulation signal is generated, both the pumping light and the seed laser light can be emitted in a pulsed form. The pumping light can be emitted at the point when the intensity of the seed laser light becomes maximum. As another example, referring to Fig. 7, the pumping light can be terminated before the seed laser light is generated.

即,僅可自射出種子雷射光前至種子雷射光的強度成為最大的時間區間中的任一時點為止射出抽運光。作為一例,可於種子雷射光的強度成為最大的時點或即將射出種子雷射光前結束抽運光的射出。若僅至上述時間區間為止射出抽運光,則抽運光的能量均可用於放大種子雷射光。因此,於放大種子雷射光而輸出後,可防止多餘的能量殘留於增益介質138。並且,亦可減少供給至增益介質138的能量的消耗量。That is, the pumping light can be emitted only from any point in the time interval from when the seed laser light is emitted to when the intensity of the seed laser light is maximum. As an example, the emission of the pump light may be ended before the intensity of the seed laser light is maximized or immediately before the seed laser light is emitted. If the pumping light is emitted only until the above time interval, the energy of the pumping light can be used to amplify the seed laser light. Therefore, after the seed laser light is amplified and output, excess energy can be prevented from remaining on the gain medium 138. Moreover, the amount of energy consumed by the gain medium 138 can also be reduced.

可藉由調節抽運光的脈寬及產生第一觸發訊號與第二觸發訊號的時間差而使結束抽運光的射出的時點與開始種子雷射光的射出或成為最大的時點一致。若使抽運光僅射出至開始射出種子雷射光或成為最大的時點為止,則可提高儲存至增益介質138的能量用於放大種子雷射光的比率。並且,可減少射出抽運光所需的電力。The timing at which the end of the pumping light is emitted can be made coincident with the time when the emission of the starting seed laser light is maximized by adjusting the pulse width of the pumping light and generating the time difference between the first trigger signal and the second trigger signal. If the pumping light is emitted only until the point at which the seed laser light is emitted or becomes the maximum, the energy stored in the gain medium 138 can be increased to amplify the ratio of the seed laser light. Also, the power required to emit the pumping light can be reduced.

圖8是表示藉由如圖6所示般射出種子雷射光與抽運光而儲存於增益介質的能量與輸出雷射的光功率發生變化的曲線圖。Fig. 8 is a graph showing changes in the energy stored in the gain medium and the optical power of the output laser when the seed laser light and the pump light are emitted as shown in Fig. 6.

於圖8中,(a)曲線圖是表示種子雷射光的輸出功率隨時間而發生變化的曲線圖。並且,(b)曲線圖是表示抽運光的輸出功率隨時間而發生變化的曲線圖。並且,(c)曲線圖是表示儲存於增益介質138的能量隨時間而發生變化的曲線圖。並且,(d)曲線圖是表示輸出雷射光的輸出功率隨時間而發生變化的圖。In Fig. 8, the graph (a) is a graph showing that the output power of the seed laser light changes with time. Further, (b) the graph is a graph showing that the output power of the pump light changes with time. Further, the (c) graph is a graph showing that the energy stored in the gain medium 138 changes with time. Further, the (d) graph is a diagram showing that the output power of the output laser light changes with time.

參照圖8,於射出抽運光的期間,儲存於增益介質138的能量會增加。另外,若射出種子雷射光,則會自增益介質138射出輸出雷射光而儲存於增益介質的能量減少。種子雷射光與抽運光一併同步化而射出,故而儲存於增益介質的能量不會超過容許值。並且,於射出種子雷射光前射出抽運光,故而於射出種子雷射光時,可於增益介質138中儲存有用於進行放大的能量。並且,於射出種子雷射光後,不射出抽運光,故而可防止多餘的能量儲存至增益介質138。Referring to Fig. 8, the energy stored in the gain medium 138 increases during the emission of the pump light. Further, when the seed laser light is emitted, the energy output from the gain medium 138 to output the laser light and stored in the gain medium is reduced. The seed laser light is synchronized with the pumping light to be emitted, so that the energy stored in the gain medium does not exceed the allowable value. Further, the pumping light is emitted before the seed laser light is emitted. Therefore, when the seed laser light is emitted, energy for amplification can be stored in the gain medium 138. Moreover, after the seed laser light is emitted, the pumping light is not emitted, so that excess energy can be prevented from being stored in the gain medium 138.

圖9是表示非週期性地射出種子雷射光的情形的圖。Fig. 9 is a view showing a state in which seed laser light is emitted aperiodically.

於圖9中,(a)曲線圖是表示種子雷射光的輸出功率隨時間而發生變化的曲線圖。並且,(b)曲線圖是表示抽運光的輸出功率隨時間而發生變化的曲線圖。並且,(c)曲線圖是表示儲存於增益介質138的能量隨時間而發生變化的曲線圖。並且,(d)曲線圖是表示輸出雷射光的輸出功率隨時間而發生變化的曲線圖。In Fig. 9, (a) is a graph showing changes in the output power of the seed laser light over time. Further, (b) the graph is a graph showing that the output power of the pump light changes with time. Further, the (c) graph is a graph showing that the energy stored in the gain medium 138 changes with time. Further, the (d) graph is a graph showing that the output power of the output laser light changes with time.

參照圖9,於不射出種子雷射光的區間,亦不會射出抽運光。於圖2的情形時,若於固定地射出抽運光時非週期性地射出種子雷射光,則儲存於增益介質138的能量會變得過多而損傷增益介質138。然而,於圖8的情形時,抽運光亦藉由第二觸發訊號同步化而射出,故而於不射出種子雷射光的時間區間,不會射出抽運光。並且,可根據抽運光的脈寬而確定種子雷射光的放大比率。因此,可防止儲存於增益介質138的能量的變得過多。Referring to Fig. 9, the pumping light is not emitted in the section where the seed laser light is not emitted. In the case of FIG. 2, if the seed laser light is emitted non-periodically when the pump light is fixedly emitted, the energy stored in the gain medium 138 may become excessive and the gain medium 138 may be damaged. However, in the case of FIG. 8, the pumping light is also emitted by the synchronization of the second trigger signal, so that the pumping light is not emitted during the time interval in which the seed laser light is not emitted. And, the amplification ratio of the seed laser light can be determined according to the pulse width of the pumping light. Therefore, it is possible to prevent the energy stored in the gain medium 138 from becoming excessive.

圖10是表示利用參照圖3至圖9進行說明的雷射裝置100的雷射產生方法的流程圖。FIG. 10 is a flowchart showing a laser generating method of the laser device 100 described with reference to FIGS. 3 to 9.

於對圖10的實施例進行說明時,省略與圖3至圖9重複的內容。When the embodiment of Fig. 10 is explained, the contents overlapping with Figs. 3 to 9 are omitted.

參照圖10,例示性的實施例的雷射產生方法可包括如下步驟:產生雷射調變訊號的步驟1110;根據雷射調變訊號而產生第一觸發訊號的步驟1120;根據雷射調變訊號而產生第二觸發訊號的步驟1130;藉由第一觸發訊號同步化而向增益介質138射出種子雷射光的步驟1140;及藉由第二觸發訊號同步化而向上述增益介質138射出抽運光的步驟1150。 Referring to FIG. 10, the laser generating method of the exemplary embodiment may include the following steps: a step 1110 of generating a laser modulation signal; a step 1120 of generating a first trigger signal according to the laser modulation signal; and adjusting according to the laser a step 1130 of generating a second trigger signal by the signal; a step 1140 of emitting the seed laser light to the gain medium 138 by synchronizing the first trigger signal; and pumping the pump to the gain medium 138 by synchronizing the second trigger signal Step 1150 of light.

於步驟1110中,雷射調變訊號產生器110可產生雷射調變訊號。雷射調變訊號可週期性或非週期性地產生作特定的脈衝訊號。 In step 1110, the laser modulation signal generator 110 can generate a laser modulation signal. The laser modulation signal can be generated periodically or non-periodically as a specific pulse signal.

於步驟1120中,第一觸發訊號產生器122可接收雷射調變訊號而產生第一觸發訊號。第一觸發訊號可將種子雷射產生裝置124同步化。 In step 1120, the first trigger signal generator 122 can receive the laser modulation signal to generate the first trigger signal. The first trigger signal can synchronize the seed laser generating device 124.

於步驟1130中,第二觸發訊號產生器132可接收雷射調變訊號而產生第二觸發訊號。第二觸發訊號可將光抽運裝置134同步化。 In step 1130, the second trigger signal generator 132 can receive the laser modulation signal to generate a second trigger signal. The second trigger signal can synchronize the optical pumping device 134.

可分別於產生雷射調變訊號後,經過不同的延遲時間而產生第一觸發訊號與第二觸發訊號。例如,可較第二觸發訊號延遲產生第一觸發訊號。另外,可較抽運光延遲射出種子雷射光。 The first trigger signal and the second trigger signal may be generated after different delay times after the laser modulation signal is generated. For example, the first trigger signal may be generated later than the second trigger signal. In addition, the seed laser light can be emitted delayed by the pumping light.

於步驟1140中,種子雷射產生裝置124可向增益介質138射出種子雷射光。並且,於步驟1150中,光抽運裝置134可向增益介質138射出抽運光。可分別根據產生第一觸發訊號及第二觸發訊號的時點而確定射出種子雷射光與抽運光的時點。In step 1140, the seed laser generating device 124 can emit seed laser light to the gain medium 138. Also, in step 1150, the optical pumping device 134 can emit pumping light to the gain medium 138. The timing at which the seed laser light and the pump light are emitted may be determined according to the time points at which the first trigger signal and the second trigger signal are generated.

每當接收第二觸發訊號時,光抽運裝置134均可將抽運光作為脈衝光而射出至增益介質138。脈衝光的脈寬可取決於既定的種子雷射光的放大比率。並且,於步驟1140中,光抽運裝置134可於種子雷射光的強度為最大時結束射出作脈衝光的抽運光的射出。如上所述,藉由調節抽運光的射出,可減少抽運光的電力消耗,有效地管理儲存至增益介質138的能量。Each time the second trigger signal is received, the optical pumping device 134 can emit the pumping light as pulsed light to the gain medium 138. The pulse width of the pulsed light may depend on the amplification ratio of the given seed laser light. Further, in step 1140, the optical pumping device 134 may terminate the emission of the pumping light that emits the pulsed light when the intensity of the seed laser light is maximum. As described above, by adjusting the emission of the pump light, the power consumption of the pump light can be reduced, and the energy stored in the gain medium 138 can be efficiently managed.

以上,參照圖1至圖10,對比較例及例示性的實施例的雷射裝置與利用雷射裝置的雷射產生方法進行了說明。根據實施例,光抽運裝置134可藉由觸發訊號同步化而向增益介質138射出抽運光。藉此,可防止於增益介質138中儲存過多的能量。並且,可減少光抽運裝置134的電力消耗。The laser device of the comparative example and the exemplary embodiment and the laser generating method using the laser device have been described above with reference to Figs. 1 to 10 . According to an embodiment, the optical pumping device 134 can emit pumping light to the gain medium 138 by trigger signal synchronization. Thereby, excessive energy can be prevented from being stored in the gain medium 138. Also, the power consumption of the optical pumping device 134 can be reduced.

於上述說明中,具體地記載有諸多事項,但這些事項並不限定發明的範圍,應解釋為較佳實施例的示例。因此,不應由所說明的實施例界定本發明的範圍,而應由申請專利範圍中所記載的技術思想界定。In the above description, various matters are specifically described, but these matters are not intended to limit the scope of the invention, and should be construed as an example of a preferred embodiment. Therefore, the scope of the invention should not be limited by the illustrated embodiments, but should be defined by the technical idea recited in the claims.

10、124‧‧‧種子雷射產生裝置10, 124‧‧‧ Seed laser generating device

20、138‧‧‧增益介質20, 138‧‧‧ Gain media

22‧‧‧光纖22‧‧‧ fiber

30、134‧‧‧光抽運裝置30, 134‧‧‧ optical pumping device

100‧‧‧雷射裝置100‧‧‧ Laser device

110‧‧‧雷射調變訊號產生器110‧‧‧Laser Modulation Signal Generator

122‧‧‧第一觸發訊號產生器122‧‧‧First trigger signal generator

132‧‧‧第二觸發訊號產生器132‧‧‧Second trigger signal generator

134a‧‧‧電流供給部134a‧‧‧ Current Supply Department

134b‧‧‧雷射二極體134b‧‧‧Laser diode

1110、1120、1130、1140、1150‧‧‧步驟1110, 1120, 1130, 1140, 1150‧‧ steps

d‧‧‧延遲時間d‧‧‧Delayed time

d1‧‧‧第一延遲時間D1‧‧‧First delay time

d2‧‧‧第二延遲時間D2‧‧‧second delay time

S1‧‧‧種子雷射光訊號S1‧‧ seed laser light signal

S2‧‧‧輸出光訊號S2‧‧‧ output optical signal

圖1是表示比較例的雷射裝置的圖。 圖2是表示於比較例的雷射裝置中非週期性地產生種子雷射光的情形時的增益介質內部的能量變化的圖。 圖3是表示例示性的實施例的雷射裝置的圖。 圖4是例示性地表示雷射調變訊號、第一觸發訊號及第二觸發訊號的圖。 圖5是例示性地表示雷射調變訊號、第一觸發訊號及第二觸發訊號的圖。 圖6及圖7是例示性地表示雷射調變訊號、種子雷射光的輸出功率及抽運光的輸出功率的圖。 圖8是表示藉由如圖6所示般射出種子雷射光與抽運光而儲存於增益介質的能量及輸出雷射的光功率發生變化的曲線圖。 圖9是表示非週期性地射出種子雷射光的情形的圖。 圖10是表示利用參照圖3至圖9進行說明的雷射裝置的雷射產生方法的流程圖。Fig. 1 is a view showing a laser device of a comparative example. FIG. 2 is a view showing changes in energy inside the gain medium when the seed laser light is generated non-periodically in the laser device of the comparative example. Fig. 3 is a view showing a laser device of an exemplary embodiment. 4 is a diagram exemplarily showing a laser modulation signal, a first trigger signal, and a second trigger signal. FIG. 5 is a diagram exemplarily showing a laser modulation signal, a first trigger signal, and a second trigger signal. 6 and 7 are diagrams exemplarily showing the output of the laser modulation signal, the output power of the seed laser light, and the output power of the pump light. Fig. 8 is a graph showing changes in the energy stored in the gain medium and the optical power of the output laser when the seed laser light and the pump light are emitted as shown in Fig. 6. Fig. 9 is a view showing a state in which seed laser light is emitted aperiodically. FIG. 10 is a flow chart showing a laser generating method using the laser device described with reference to FIGS. 3 to 9.

Claims (13)

一種雷射裝置,包括:雷射調變訊號產生器,產生雷射調變訊號;第一觸發訊號產生器,接收所述雷射調變訊號而產生第一觸發訊號;第二觸發訊號產生器,接收所述雷射調變訊號而產生第二觸發訊號;種子雷射產生裝置,藉由所述第一觸發訊號同步化而向增益介質射出種子雷射光;以及光抽運裝置,藉由所述第二觸發訊號同步化而向所述增益介質射出抽運光,其中所述第二觸發訊號產生器於接收所述雷射調變訊號而經過特定的延遲時間後,產生所述第二觸發訊號。 A laser device includes: a laser modulation signal generator for generating a laser modulation signal; a first trigger signal generator for receiving the laser modulation signal to generate a first trigger signal; and a second trigger signal generator Receiving the laser modulation signal to generate a second trigger signal; the seed laser generating device emits seed laser light to the gain medium by synchronizing the first trigger signal; and the optical pumping device The second trigger signal is synchronized to emit pumping light to the gain medium, wherein the second trigger signal generator generates the second trigger after receiving a predetermined delay time after receiving the laser modulation signal Signal. 如申請專利範圍第1項所述的雷射裝置,其中所述光抽運裝置包括雷射二極體。 The laser device of claim 1, wherein the optical pumping device comprises a laser diode. 如申請專利範圍第2項所述的雷射裝置,其中所述光抽運裝置更包括向所述雷射二極體供給電流的電流供給部,所述電流供給部藉由所述第二觸發訊號同步化而變更電流等級。 The laser device of claim 2, wherein the optical pumping device further comprises a current supply portion that supplies current to the laser diode, the current supply portion being driven by the second trigger The signal is synchronized to change the current level. 如申請專利範圍第1項所述的雷射裝置,其中所述第一觸發訊號產生器於接收所述雷射調變訊號而經過第一延遲時間後,產生所述第一觸發訊號,所述第二觸發訊號產生器於接收所述雷射調變訊號而經過第二延遲時間後,產生所述第二觸發訊 號,所述第二延遲時間大於所述第一延遲時間。 The laser device of claim 1, wherein the first trigger signal generator generates the first trigger signal after receiving the laser modulation signal and after a first delay time, The second trigger signal generator generates the second trigger signal after receiving the laser modulation signal and after a second delay time No. The second delay time is greater than the first delay time. 如申請專利範圍第1項所述的雷射裝置,其中所述光抽運裝置將所述抽運光射出作脈衝光。 The laser device of claim 1, wherein the optical pumping device emits the pumping light as pulsed light. 如申請專利範圍第5項所述的雷射裝置,其中所述脈衝光的脈寬取決於既定的所述種子雷射光的放大比率。 The laser device of claim 5, wherein the pulse width of the pulsed light depends on a predetermined amplification ratio of the seed laser light. 如申請專利範圍第5項所述的雷射裝置,其中所述光抽運裝置於即將產生所述種子雷射光之前至所述種子雷射光的強度變得最大的時間區間中的任一時點,結束所述脈衝光的射出。 The laser device of claim 5, wherein the optical pumping device is at any point in a time interval from when the seed laser light is to be generated until the intensity of the seed laser light becomes maximum. The emission of the pulsed light is ended. 一種雷射產生方法,包括:產生雷射調變訊號的步驟;根據所述雷射調變訊號而產生第一觸發訊號的步驟;根據所述雷射調變訊號而產生第二觸發訊號的步驟;藉由所述第一觸發訊號同步化而向增益介質射出種子雷射光的步驟;以及藉由所述第二觸發訊號同步化而向所述增益介質射出抽運光的步驟,其中產生所述第二觸發訊號的步驟於接收所述雷射調變訊號而經過特定的延遲時間後,產生所述第二觸發訊號。 A laser generating method includes: a step of generating a laser modulation signal; a step of generating a first trigger signal according to the laser modulation signal; and a step of generating a second trigger signal according to the laser modulation signal a step of emitting seed laser light to the gain medium by synchronizing the first trigger signal; and a step of emitting pump light to the gain medium by synchronizing the second trigger signal, wherein the generating The step of the second trigger signal generates the second trigger signal after a specific delay time is received after receiving the laser modulation signal. 如申請專利範圍第8項所述的雷射產生方法,其中將所述抽運光射出至所述增益介質的步驟藉由所述第二觸發訊號而變更供給至雷射二極體的電流等級。 The laser generating method of claim 8, wherein the step of emitting the pumping light to the gain medium changes a current level supplied to the laser diode by the second trigger signal . 如申請專利範圍第8項所述的雷射產生方法,其中產生所述第一觸發訊號的步驟於接收所述雷射調變訊號而經過第一延遲時間後,產生所述第一觸發訊號,產生所述第二觸發訊號的步驟於接收所述雷射調變訊號而經過第二延遲時間後,產生所述第二觸發訊號,所述第二延遲時間大於所述第一延遲時間。 The method for generating a laser according to claim 8, wherein the step of generating the first trigger signal generates the first trigger signal after receiving the laser modulation signal and after a first delay time, The step of generating the second trigger signal generates the second trigger signal after receiving the laser modulation signal and after a second delay time, where the second delay time is greater than the first delay time. 如申請專利範圍第8項所述的雷射產生方法,其中將所述抽運光射出至所述增益介質的步驟將所述抽運光射出作脈衝光。 The laser generating method of claim 8, wherein the step of emitting the pumping light to the gain medium emits the pumping light as pulsed light. 如申請專利範圍第11項所述的雷射產生方法,其中所述脈衝光的脈寬取決於既定的所述種子雷射光的放大比率。 The laser generating method of claim 11, wherein the pulse width of the pulsed light depends on a predetermined amplification ratio of the seed laser light. 如申請專利範圍第11項所述的產生雷射的方法,其中將所述抽運光射出至所述增益介質的步驟於即將產生所述種子雷射光之前至所述種子雷射光的強度變得最大的時間區間中的任一時點,結束所述脈衝光的射出。 The method of producing a laser according to claim 11, wherein the step of ejecting the pumping light to the gain medium until the intensity of the seed laser light is about to be generated immediately before the seed laser light is generated At any one of the largest time intervals, the emission of the pulsed light is ended.
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