TWI647870B - Organic thin film transistor and pixel structure - Google Patents

Organic thin film transistor and pixel structure Download PDF

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TWI647870B
TWI647870B TW106141694A TW106141694A TWI647870B TW I647870 B TWI647870 B TW I647870B TW 106141694 A TW106141694 A TW 106141694A TW 106141694 A TW106141694 A TW 106141694A TW I647870 B TWI647870 B TW I647870B
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organic
layer
source
drain
film transistor
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TW201926754A (en
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陳維翰
劉冠顯
吳安茹
蔡佳宏
許世華
涂峻豪
劉竹育
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友達光電股份有限公司
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Abstract

一種有機薄膜電晶體,包括基板、至少一源極、至少一汲極、至少一閘極、至少二源極/汲極轉接電極、有機介面處理層、至少一有機半導體層及至少一有機閘極絕緣層。源極/汲極轉接電極設置於基板上,其具有多層導電層且分別連接於源極與汲極。有機介面處理層設置於基板上且與源極、汲極及源極/汲極轉接電極部分重疊。有機半導體層設置於基板上且包覆源極與汲極。有機閘極絕緣層設置於基板上且設置於閘極與有機半導體層之間。有機閘極絕緣層與有機介面處理層部分重疊。畫素結構包括上述有機薄膜電晶體。An organic thin film transistor comprising a substrate, at least one source, at least one drain, at least one gate, at least two source/drain transfer electrodes, an organic interface layer, at least one organic semiconductor layer, and at least one organic gate Extremely insulating layer. The source/drain transfer electrode is disposed on the substrate and has a plurality of conductive layers and is respectively connected to the source and the drain. The organic interface layer is disposed on the substrate and partially overlaps the source, drain, and source/drain transfer electrodes. The organic semiconductor layer is disposed on the substrate and covers the source and the drain. The organic gate insulating layer is disposed on the substrate and disposed between the gate and the organic semiconductor layer. The organic gate insulating layer partially overlaps the organic interface processing layer. The pixel structure includes the above organic thin film transistor.

Description

有機薄膜電晶體及畫素結構Organic thin film transistor and pixel structure

本發明是有關於一種薄膜電晶體及畫素結構,且特別是有關於一種具有有機半導體層的有機薄膜電晶體及畫素結構。 The present invention relates to a thin film transistor and a pixel structure, and more particularly to an organic thin film transistor and a pixel structure having an organic semiconductor layer.

目前,有機薄膜電晶體之有機半導體層常被用來包覆源極、汲極,以避免源極、汲極於製程中被破壞並汙染設備腔體。然而,於資料線上覆蓋有機半導體層容易導致有額外的寄生電容產生,進而造成此有機薄膜電晶體有電阻電容時間延遲(RC time delay)的問題。因此,目前亟需一種能解決前述問題的手段。 At present, the organic semiconductor layer of the organic thin film transistor is often used to coat the source and the drain to prevent the source and the drain from being destroyed in the process and contaminating the device cavity. However, covering the organic semiconductor layer on the data line tends to cause additional parasitic capacitance, which causes the organic thin film transistor to have a problem of RC time delay. Therefore, there is a need for a means to solve the aforementioned problems.

本發明提供一種有機薄膜電晶體,其可改善了電阻電容時間延遲的問題。 The present invention provides an organic thin film transistor which can improve the problem of time delay of resistance and capacitance.

本發明提供一種畫素結構,包括上述的有機薄膜電晶體,且可具有較大的開口率並改善了電阻電容時間延遲的問題。 The present invention provides a pixel structure including the above-described organic thin film transistor, and which can have a large aperture ratio and improve the problem of time delay of resistance and capacitance.

本發明的一種有機薄膜電晶體,包括基板、至少一源極、 至少一汲極、至少一閘極、至少二源極/汲極轉接電極、有機介面處理層、至少一有機半導體層及至少一有機閘極絕緣層。源極、汲極與閘極設置於基板上。源極/汲極轉接電極設置於基板上且具有多層導電層。源極/汲極轉接電極分別連接於源極與汲極。有機介面處理層設置於基板上且與源極、汲極及源極/汲極轉接電極部分重疊。有機半導體層設置於基板上且包覆源極與汲極。有機閘極絕緣層設置於基板上且設置於閘極與有機半導體層之間。有機閘極絕緣層與有機介面處理層部分重疊。 An organic thin film transistor of the present invention, comprising a substrate, at least one source, At least one drain, at least one gate, at least two source/drain transfer electrodes, an organic interface layer, at least one organic semiconductor layer, and at least one organic gate insulating layer. The source, the drain and the gate are disposed on the substrate. The source/drain transfer electrode is disposed on the substrate and has a plurality of conductive layers. The source/drain transfer electrodes are connected to the source and the drain, respectively. The organic interface layer is disposed on the substrate and partially overlaps the source, drain, and source/drain transfer electrodes. The organic semiconductor layer is disposed on the substrate and covers the source and the drain. The organic gate insulating layer is disposed on the substrate and disposed between the gate and the organic semiconductor layer. The organic gate insulating layer partially overlaps the organic interface processing layer.

本發明的一種畫素結構,包括有機薄膜電晶體、掃描線、資料線以及畫素電極。有機薄膜電晶體設置於主動元件區。有機半導體層只位於主動元件區中。掃描線電性連接於閘極。資料線連接於源極,且有機半導體層不位於資料線上。畫素電極電性連接於二源極/汲極轉接電極其中一者。 A pixel structure of the present invention includes an organic thin film transistor, a scan line, a data line, and a pixel electrode. The organic thin film transistor is disposed in the active device region. The organic semiconductor layer is only located in the active device region. The scan line is electrically connected to the gate. The data line is connected to the source, and the organic semiconductor layer is not located on the data line. The pixel electrode is electrically connected to one of the two source/drain transfer electrodes.

本發明之目的之一為可改善/減少畫素結構的電阻電容時間延遲的問題。 One of the objects of the present invention is to improve/reduce the problem of the time delay of the resistance and capacitance of the pixel structure.

本發明之目的之一為可增加畫素結構的開口率。 One of the objects of the present invention is to increase the aperture ratio of the pixel structure.

本發明之目的之一為可減少有機半導體層與有機介面處理層交界處之缺陷。 One of the objects of the present invention is to reduce defects in the interface between the organic semiconductor layer and the organic interface layer.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.

10、10a‧‧‧畫素結構 10, 10a‧‧‧ pixel structure

100、100a‧‧‧有機薄膜電晶體 100, 100a‧‧‧Organic film transistor

110‧‧‧基板 110‧‧‧Substrate

120‧‧‧源極 120‧‧‧ source

122‧‧‧汲極 122‧‧‧汲polar

124‧‧‧閘極 124‧‧‧ gate

130、132‧‧‧源極/汲極轉接電極 130, 132‧‧‧ source/drain transfer electrode

134A、134B、134C‧‧‧第一圖案化導電層 134A, 134B, 134C‧‧‧ first patterned conductive layer

136A、136B、136C‧‧‧第二圖案化導電層 136A, 136B, 136C‧‧‧ second patterned conductive layer

140‧‧‧有機介面處理層 140‧‧‧Organic interface layer

142‧‧‧第一接觸孔 142‧‧‧First contact hole

144‧‧‧第二接觸孔 144‧‧‧second contact hole

146‧‧‧接觸洞 146‧‧‧Contact hole

150‧‧‧有機半導體層 150‧‧‧Organic semiconductor layer

160‧‧‧有機閘極絕緣層 160‧‧‧Organic gate insulation

162‧‧‧第一有機層 162‧‧‧First organic layer

164‧‧‧第二有機層 164‧‧‧Second organic layer

170‧‧‧掃描線 170‧‧‧ scan line

180‧‧‧資料線 180‧‧‧Information line

190‧‧‧畫素電極 190‧‧‧ pixel electrodes

A‧‧‧主動元件區 A‧‧‧Active component area

S1‧‧‧第一表面 S1‧‧‧ first surface

S2‧‧‧第二表面 S2‧‧‧ second surface

S3、S4‧‧‧表面 S3, S4‧‧‧ surface

P1、P2、P3、P4‧‧‧側壁 P1, P2, P3, P4‧‧‧ side walls

F‧‧‧交疊區 F‧‧· overlap zone

圖1A是依照本發明一實施例的一種畫素結構的俯視示意圖。 1A is a top plan view of a pixel structure in accordance with an embodiment of the invention.

圖1B是沿圖1A中剖線A-A’的剖面示意圖。 Fig. 1B is a schematic cross-sectional view taken along line A-A' of Fig. 1A.

圖1C是沿圖1A中交疊區剖線B-B’的剖面示意圖。 Fig. 1C is a schematic cross-sectional view taken along line B-B' of the overlapping portion in Fig. 1A.

圖2A是依照本發明另一實施例的一種畫素結構的俯視示意圖。 2A is a top plan view of a pixel structure in accordance with another embodiment of the present invention.

圖2B是沿圖2A中剖線C-C’的剖面示意圖。 Fig. 2B is a schematic cross-sectional view taken along line C-C' of Fig. 2A.

以下將以圖式揭露本發明之多個實施方式,為明確說明起見,許多實務上的細節將在以下敘述中一併說明。然而,應瞭解到,這些實務上的細節不應用以限制本發明。也就是說,在本發明部分實施方式中,這些實務上的細節是非必要的。此外,為簡化圖式起見,一些習知慣用的結構與元件在圖式中將以簡單示意的方式為之。 The various embodiments of the present invention are disclosed in the drawings, and in the claims However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified manner.

在附圖中,為了清楚起見,放大了各元件等的厚度。在整個說明書中,相同的附圖標記表示相同的元件。應當理解,當諸如層、膜、區域或基板的元件被稱為在“另一元件上”、或“連接到另一元件”、“重疊於另一元件”時,其可以直接在另一元件上或與另一元件連接,或者中間元件可以也存在。相反,當元件被稱為“直接在另一元件上”或“直接連接到”另一元件時,不存在中間元件。如本文所使用的,“連接”可以指物理及/或電性連接。再者, 電性連接或耦接可為二元件間存在其它元件。 In the drawings, the thickness of each element or the like is exaggerated for the sake of clarity. Throughout the specification, the same reference numerals denote the same elements. It will be understood that when an element such as a layer, film, region or substrate is referred to as "on another element," or "connected to another element," It may be connected to another element or an intermediate element may also be present. In contrast, when an element is referred to as “directly on” or “directly connected to” another element, As used herein, "connected" may refer to both physical and/or electrical connections. Furthermore, Electrical connections or couplings may result in the presence of other components between the two components.

應當理解,儘管術語“第一”、“第二”、“第三”等在本文中可以用於描述各種元件、部件、區域、層及/或部分,但是這些元件、部件、區域、及/或部分不應受這些術語的限制。這些術語僅用於將一個元件、部件、區域、層或部分與另一個元件、部件、區域、層或部分區分開。因此,下面討論的“第一元件”、“部件”、“區域”、“層”、或“部分”可以被稱為第二元件、部件、區域、層或部分而不脫離本文的教導。 It will be understood that the terms "first", "second", "third", etc., may be used herein to describe various elements, components, regions, layers and/or portions, but such elements, components, regions, and / Or part of it should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer, Thus, "a first element", "a component", "a", "a", "a" or "a"

這裡使用的術語僅僅是為了描述特定實施例的目的,而不是限制性的。如本文所使用的,除非內容清楚地指示,否則單數形式“一”、“一個”和“該”旨在包括複數形式,包括“至少一個”。“或”表示“及/或”。如本文所使用的,術語“及/或”包括一個或多個相關所列項目的任何和所有組合。還應當理解,當在本說明書中使用時,術語“包括”及/或“包括”指定所述特徵、區域、整體、步驟、操作、元件的存在及/或部件,但不排除一個或多個其它特徵、區域整體、步驟、操作、元件、部件及/或其組合的存在或添加。 The terminology used herein is for the purpose of describing particular embodiments, As used herein, the singular forms "", "," “or” means “and/or”. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items. It is also to be understood that the terms "comprises" and / or "comprising", when used in the specification, are in the The presence or addition of other features, regions, steps, operations, components, components, and/or combinations thereof.

此外,諸如“下”或“底部”和“上”或“頂部”的相對術語可在本文中用於描述一個元件與另一元件的關係,如圖所示。應當理解,相對術語旨在包括除了圖中所示的方位之外的裝置的不同方位。例如,如果一個附圖中的裝置翻轉,則被描述為在其他元件的“下”側的元件將被定向在其他元件的“上”側。因此,示例性術語“下”可以包括“下”和“上”的取向,取決於附圖的特定取向。類似 地,如果一個附圖中的裝置翻轉,則被描述為在其它元件“下”或“下方”的元件將被定向為在其它元件“上”或“上方”。因此,示例性術語“下”或“下面”可以包括上和下的取向。 Further, relative terms such as "lower" or "bottom" and "upper" or "top" may be used herein to describe the relationship of one element to another, as shown. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation shown. For example, if the device in one figure is turned over, the elements that are described as "on" the other elements will be directed to the "on" side of the other elements. Thus, the exemplary term "lower" can be used in the <RTI ID=0.0> </ RTI> </ RTI> <RTIgt; similar Elements that are described as "under" or "beneath" other elements will be "on" or "above" the other elements. Thus, the exemplary term "lower" or "lower" can encompass both an upper and a lower orientation.

本文使用的“約”、“實質上”、或“近似”包括所述值和在本領域普通技術人員確定的特定值的可接受的偏差範圍內的平均值,考慮到所討論的測量和與測量相關的誤差的特定數量(即,測量系統的限制)。例如,“約”可以表示在所述值的一個或多個標準偏差內,或±30%、±20%、±10%、±5%內。再者,本文使用的“約”、”近似”或“實質上”可依光學性質、蝕刻性質或其它性質,來選擇較可接受的偏差範圍或標準偏差,而可不用一個標準偏差適用全部性質。 As used herein, "about," "substantially," or "approximate" includes the values and average values within acceptable ranges of the particular values determined by those of ordinary skill in the art, in view of the measurements and The specific amount of error associated with the measurement (ie, the limits of the measurement system) is measured. For example, "about" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%. Furthermore, as used herein, "about", "approximately" or "substantially" may select a more acceptable range or standard deviation depending on optical properties, etching properties or other properties, and may apply all properties without a standard deviation. .

除非另有定義,本文使用的所有術語(包括技術和科學術語)具有與本發明所屬領域的普通技術人員通常理解的相同的含義。將進一步理解的是,諸如在通常使用的字典中定義的那些術語應當被解釋為具有與它們在相關技術和本發明的上下文中的含義一致的含義,並且將不被解釋為理想化的或過度正式的意義,除非本文中明確地這樣定義。 All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs, unless otherwise defined. It will be further understood that terms such as those defined in commonly used dictionaries should be interpreted as having meanings consistent with their meaning in the context of the related art and the present invention, and will not be construed as idealized or excessive. Formal meaning, unless explicitly defined in this article.

圖1A是依照本發明一實施例的一種畫素結構的俯視示意圖。圖1B是沿圖1中剖線A-A’的剖面示意圖。圖1C是沿圖1A中剖線B-B’的剖面示意圖。 1A is a top plan view of a pixel structure in accordance with an embodiment of the invention. Fig. 1B is a schematic cross-sectional view taken along line A-A' of Fig. 1. Fig. 1C is a schematic cross-sectional view taken along line B-B' of Fig. 1A.

請參照圖1A及圖1B,畫素結構10設置於基板110上,且其至少包括至少一有機薄膜電晶體100、至少一掃描線170、至少 一資料線180以及至少一畫素電極190。其中,有機薄膜電晶體100設置於畫素結構10的主動元件區A。在一些實施例中,基板110可以是硬質基板,例如是但不限於玻璃基板或藍寶石基板、可撓式基板(flexible substrate)或其它合適的基板材料(例如:石英、不透光/反射材料(例如:導電材料、金屬、晶圓、陶瓷、或其它可適用的材料)、上述至少二種之組合、或是其它可適用的材料)。較佳地,基板110可為可撓性的材料,舉例而言包括聚醯胺(Polyamide,PA)聚亞醯胺(Polyimide,PI)、聚甲基丙烯酸甲酯(Poly(methyl methacrylate),PMMA)、聚萘二甲酸乙二醇酯(polyethylene naphthalate,PEN)、聚對苯二甲酸乙二酯(polyethylene terephthalate,PET)、玻璃纖維強化塑膠(fiber reinforced plastics,FRP)、聚醚醚酮(polyetheretherketone,PEEK)、環氧樹脂或其它合適的材料或前述至少二種之組合,但不限於此。此外,當基板110為可撓性的材料,其材料可為全部是有機材料混合物、有機材料混合無機材料、有機分子與無機分子鍵結而成的材料、或是其它合適的材料。 Referring to FIG. 1A and FIG. 1B , the pixel structure 10 is disposed on the substrate 110 and includes at least one organic thin film transistor 100 , at least one scan line 170 , and at least A data line 180 and at least one pixel electrode 190. The organic thin film transistor 100 is disposed in the active device region A of the pixel structure 10. In some embodiments, the substrate 110 can be a rigid substrate such as, but not limited to, a glass substrate or a sapphire substrate, a flexible substrate, or other suitable substrate material (eg, quartz, opaque/reflective material ( For example: conductive materials, metals, wafers, ceramics, or other suitable materials), combinations of at least two of the foregoing, or other applicable materials). Preferably, the substrate 110 can be a flexible material, including, for example, Polyamide (PA) Polyimide (PI), Poly(methyl methacrylate), PMMA. ), polyethylene naphthalate (PEN), polyethylene terephthalate (PET), fiber reinforced plastics (FRP), polyetheretherketone (polyetheretherketone) , PEEK), epoxy resin or other suitable material or a combination of at least two of the foregoing, but is not limited thereto. In addition, when the substrate 110 is a flexible material, the material may be all organic material mixture, organic material mixed inorganic material, organic molecular and inorganic molecular bonding materials, or other suitable materials.

在本實施例中,有機薄膜電晶體100至少包括至少一源極120、至少一汲極122、至少一閘極124、至少一源極/汲極轉接電極130、至少一源極/汲極轉接電極132、至少一有機介面處理層140、至少一有機半導體層150及至少一有機閘極絕緣層160。 In this embodiment, the organic thin film transistor 100 includes at least one source 120, at least one drain 122, at least one gate 124, at least one source/drain transfer electrode 130, and at least one source/drain The transfer electrode 132, the at least one organic interface layer 140, the at least one organic semiconductor layer 150, and the at least one organic gate insulating layer 160.

資料線180、源極/汲極轉接電極130、132設置於基板110上。源極轉接電極130連接於源極120,汲極轉接電極132連接於 汲極122。 The data line 180 and the source/drain transfer electrodes 130 and 132 are disposed on the substrate 110. The source transfer electrode 130 is connected to the source 120, and the drain transfer electrode 132 is connected to Bungee 122.

於較佳實施例中,源極/汲極轉接電極130、132可具有多層導電層,例如包括至少兩層導電層。在本實施例中,源極/汲極轉接電極130包括第一圖案化導電層134A與第二圖案化導電層136A。源極/汲極轉接電極132也可具有多層導電層,例如包括至少兩層導電層。在本實施例中,源極/汲極轉接電極132包括第一圖案化導電層134B與第二圖案化導電層136B。然於其他變化實施例中,源極/汲極轉接電極130、132也可只具有單層。第一圖案化導電層134A與第一圖案化導電層134B例如是於同一道圖案化製程中所形成。第二圖案化導電層136A與第二圖案化導電層136B例如是於同一道圖案化製程中所形成。在一些實施例中,先分別形成多層(例如:兩層)導電材料,接著再於同一道圖案化製程中移除部份兩層導電材料後,形成第一圖案化導電層134A、第一圖案化導電層134B、第二圖案化導電層136A與第二圖案化導電層136B,但不限於此。於其它實施例中,可於不同圖案化製程中移除部份兩層導電材料後,形成第一圖案化導電層134A、第一圖案化導電層134B、第二圖案化導電層136A與第二圖案化導電層136B。 In a preferred embodiment, the source/drain transfer electrodes 130, 132 can have multiple layers of conductive layers, for example including at least two conductive layers. In the present embodiment, the source/drain transfer electrode 130 includes a first patterned conductive layer 134A and a second patterned conductive layer 136A. The source/drain transfer electrode 132 can also have multiple layers of conductive layers, for example including at least two conductive layers. In the present embodiment, the source/drain via electrode 132 includes a first patterned conductive layer 134B and a second patterned conductive layer 136B. However, in other variant embodiments, the source/drain transfer electrodes 130, 132 may also have only a single layer. The first patterned conductive layer 134A and the first patterned conductive layer 134B are formed, for example, in the same patterning process. The second patterned conductive layer 136A and the second patterned conductive layer 136B are formed, for example, in the same patterning process. In some embodiments, a plurality of (for example, two layers) conductive materials are separately formed, and then a portion of the two conductive materials are removed in the same patterning process to form a first patterned conductive layer 134A and a first pattern. The conductive layer 134B, the second patterned conductive layer 136A, and the second patterned conductive layer 136B are formed, but are not limited thereto. In other embodiments, after removing a portion of the two conductive materials in different patterning processes, the first patterned conductive layer 134A, the first patterned conductive layer 134B, the second patterned conductive layer 136A, and the second layer are formed. The conductive layer 136B is patterned.

在本實施例中,舉例而言,第一圖案化導電層134A可位於第二圖案化導電層136A與基板110之間,且第一圖案化導電層134B可位於第二圖案化導電層136B與基板110之間。因此,第一圖案化導電層134A與第一圖案化導電層134B不直接接觸源極 120與汲極122,而是第二圖案化導電層136A與第二圖案化導電層136B分別直接接觸源極120與汲極122,但不限於此。 In this embodiment, for example, the first patterned conductive layer 134A may be located between the second patterned conductive layer 136A and the substrate 110, and the first patterned conductive layer 134B may be located at the second patterned conductive layer 136B and Between the substrates 110. Therefore, the first patterned conductive layer 134A and the first patterned conductive layer 134B are not in direct contact with the source. 120 and the drain 122, but the second patterned conductive layer 136A and the second patterned conductive layer 136B directly contact the source 120 and the drain 122, respectively, but are not limited thereto.

源極/汲極轉接電極130、132為單層結構時,其材料例如可包括抗氧化之材料,例如包括金屬(例如鈦、鉬、鎢、金、鉑、鉻、鎳、鈀、鈷之其中至少一者、上述材料之複合層、或上述材料之合金)或金屬氧化物材料(例如銦錫氧化物、銦鋅氧化物、摻氟之氧化銦)或金屬氮化物導電材料(例如氮化鈦或氮化鉬)或上述材料之組合。 When the source/drain transfer electrodes 130, 132 are of a single layer structure, the material thereof may include, for example, an oxidation resistant material, for example, including a metal such as titanium, molybdenum, tungsten, gold, platinum, chromium, nickel, palladium, cobalt. At least one of, a composite layer of the above materials, or an alloy of the above materials) or a metal oxide material (eg, indium tin oxide, indium zinc oxide, fluorine-doped indium oxide) or a metal nitride conductive material (eg, nitride) Titanium or molybdenum nitride) or a combination of the above.

當源極/汲極轉接電極130、132為多層(例如:兩層)結構時,第一圖案化導電層134A、134B的材料例如為可包含低電阻之導電材料,例如包括金、銅、鉬、鈦、鋁、或其它合適的材料、或前述之合金、或前述至少二種之組合。第二圖案化導電層136A、136B的材料例如為抗氧化之導電材料,例如包括金屬(例如鈦、鉬、鎢、金、鉑、鉻、鎳、鉬、鈷之其中至少一者、上述材料之複合層或上述材料之合金)或金屬氧化物材料(例如銦錫氧化物、銦鋅氧化物、摻氟之氧化銦)或金屬氮化物導電材料(例如氮化鈦或氮化鉬)或上述材料之組合。於部份實施例中,第一圖案化導電層134A、134B的材料可實質上相同或不同,或者第二圖案化導電層136A、136B的材料可實質上相同或不同。在一些實施例中,第二圖案化導電層136A、136B可以減少第一圖案化導電層134A、134B在後續的圖案化製程中受到損害。 When the source/drain transfer electrodes 130, 132 are in a multi-layer (eg, two-layer) structure, the material of the first patterned conductive layer 134A, 134B is, for example, a conductive material that can include low resistance, for example, including gold, copper, Molybdenum, titanium, aluminum, or other suitable material, or an alloy of the foregoing, or a combination of at least two of the foregoing. The material of the second patterned conductive layer 136A, 136B is, for example, an anti-oxidation conductive material, for example, including a metal (for example, at least one of titanium, molybdenum, tungsten, gold, platinum, chromium, nickel, molybdenum, cobalt, the above materials) a composite layer or an alloy of the above materials) or a metal oxide material (such as indium tin oxide, indium zinc oxide, fluorine-doped indium oxide) or a metal nitride conductive material (such as titanium nitride or molybdenum nitride) or the like The combination. In some embodiments, the materials of the first patterned conductive layers 134A, 134B may be substantially the same or different, or the materials of the second patterned conductive layers 136A, 136B may be substantially the same or different. In some embodiments, the second patterned conductive layer 136A, 136B can reduce damage to the first patterned conductive layer 134A, 134B in subsequent patterning processes.

當資料線180為單層結構時,其材料例如可包括抗氧化 之材料,且抗氧化之材料可選用前述描述之實質上相同或不同之材料。當然資料線180也可包括多層導電層,例如包括至少兩層導電層。在本實施例中,資料線180包括第一圖案化導電層134C及第二圖案化導電層136C。然於其他變化實施例中,資料線180也可只具有單層。第一圖案化導電層134C及第二圖案化導電層136C係分別與第一圖案化導電層134A及第二圖案化導電層136A屬於同一膜層,舉例而言,第一圖案化導電層134A可延伸出主動元件區A形成第一圖案化導電層134C,第二圖案化導電層136A可延伸出主動元件區A形成第二圖案化導電層136C,且第一圖案化導電層134C及第二圖案化導電層136C的材料例如分別與第一圖案化導電層134A及第二圖案化導電層136A實質上相同,可參閱前述。於部份實施例中,第一圖案化導電層134C及第二圖案化導電層136C的材料例如分別與第一圖案化導電層134A及第二圖案化導電層136A不同,且其材料可參閱前述。 When the data line 180 is a single layer structure, its material may include, for example, antioxidant The material, and the anti-oxidation material may be selected from substantially the same or different materials as described above. Of course, the data line 180 can also include multiple layers of conductive layers, for example including at least two conductive layers. In the embodiment, the data line 180 includes a first patterned conductive layer 134C and a second patterned conductive layer 136C. However, in other variant embodiments, the data line 180 may also have only a single layer. The first patterned conductive layer 134C and the second patterned conductive layer 136C are respectively in the same film layer as the first patterned conductive layer 134A and the second patterned conductive layer 136A. For example, the first patterned conductive layer 134A can be Extending out the active device region A to form a first patterned conductive layer 134C, the second patterned conductive layer 136A may extend out of the active device region A to form a second patterned conductive layer 136C, and the first patterned conductive layer 134C and the second pattern The material of the conductive layer 136C is substantially the same as the first patterned conductive layer 134A and the second patterned conductive layer 136A, respectively, as described above. In some embodiments, the materials of the first patterned conductive layer 134C and the second patterned conductive layer 136C are different from the first patterned conductive layer 134A and the second patterned conductive layer 136A, respectively, and the materials thereof can be referred to the foregoing. .

在一些實施例中,由於資料線180包括低電阻之材料(例如第一圖案化導電層134℃之材料),因而使資料線180的線寬可以作的較小,增加了畫素結構10的開口率。 In some embodiments, since the data line 180 includes a low resistance material (eg, a material of the first patterned conductive layer 134 ° C), the line width of the data line 180 can be made smaller, increasing the pixel structure 10 Opening ratio.

有機介面處理層140可設置於基板110上且與源極120、汲極122及源極/汲極轉接電極130、132至少部分重疊。舉例而言,有機介面處理層140可設置於資料線180、源極/汲極轉接電極130、132上,則有機介面處理層140可覆蓋資料線180,且與源極/汲極轉接電極130、132部分重疊。於部份實施例中,部分的有 機介面處理層140可位於源極轉接電極130與汲極轉接電極132之間,有機介面處理層140部分之第一表面S1可直接接觸基板110,但不限於此。在本實施例中,有機介面處理層140的材料可以例如是含有矽氧烷、丙烯酸或其組合之有機材料,但不以此為限。 The organic interface layer 140 can be disposed on the substrate 110 and at least partially overlaps the source 120, the drain 122, and the source/drain transfer electrodes 130, 132. For example, the organic interface processing layer 140 can be disposed on the data line 180 and the source/drain transfer electrodes 130 and 132, and the organic interface processing layer 140 can cover the data line 180 and be connected to the source/drain The electrodes 130, 132 partially overlap. In some embodiments, some of The interface processing layer 140 may be located between the source transfer electrode 130 and the drain transfer electrode 132. The first surface S1 of the organic interface processing layer 140 may directly contact the substrate 110, but is not limited thereto. In this embodiment, the material of the organic interface treatment layer 140 may be, for example, an organic material containing a decane, an acrylic acid, or a combination thereof, but is not limited thereto.

於部份實施例中,有機介面處理層140具有第一接觸孔142、第二接觸孔144及接觸洞146。在一些實施例中,有機介面處理層140之第一接觸孔142、第二接觸孔144及接觸洞146是藉由圖案化製程所形成。 In some embodiments, the organic interface processing layer 140 has a first contact hole 142, a second contact hole 144, and a contact hole 146. In some embodiments, the first contact hole 142, the second contact hole 144, and the contact hole 146 of the organic interface processing layer 140 are formed by a patterning process.

於部份實施例中,源極120與汲極122可設置於有機介面處理層140上,且源極120與汲極122可分別經由第一接觸孔142與第二接觸孔144與對應的源極/汲極轉接電極130、132電性連接,但不限於此。資料線180可透過源極/汲極轉接電極130電性連接源極120。於部份實施例中,有機介面處理層140可位於源極120與基板110之間,並位於汲極122與基板110之間。 In some embodiments, the source 120 and the drain 122 may be disposed on the organic interface processing layer 140, and the source 120 and the drain 122 may respectively pass through the first contact hole 142 and the second contact hole 144 and the corresponding source. The pole/drain transfer electrodes 130, 132 are electrically connected, but are not limited thereto. The data line 180 can be electrically connected to the source 120 through the source/drain transfer electrode 130. In some embodiments, the organic interface processing layer 140 can be located between the source 120 and the substrate 110 and between the drain 122 and the substrate 110.

形成源極120與汲極122的方法例如包括先形成一層導電層(圖未示),接著在對導電層(圖未示)進行圖案化製程以形成相互分離之源極120與汲極122。源極120與汲極122可為單層或多層結構,且其材料可選用前述所述之導電層,但不限於此。 The method of forming the source 120 and the drain 122 includes, for example, forming a conductive layer (not shown), and then patterning the conductive layer (not shown) to form the source 120 and the drain 122 separated from each other. The source 120 and the drain 122 may be a single layer or a multilayer structure, and the material thereof may be selected from the foregoing conductive layers, but is not limited thereto.

在本實施例中,源極120可填入第一接觸孔142並與對應的源極/汲極轉接電極130(例如:第二圖案化導電層136A)連接,汲極122可填入第二接觸孔144並與對應的源極/汲極轉接電極 132(例如:第二圖案化導電層136B)連接。在本實施例中,源極120與汲極122的材料可以例如是功函數介於4.2ev至5.2ev的金屬,而功函數介於4.2ev至5.2ev的金屬例如為金、銀、銅、鉬、鈦、鋁、或其它合適的材料,或前述之合金,但不以此為限。 In this embodiment, the source 120 can be filled into the first contact hole 142 and connected to the corresponding source/drain transfer electrode 130 (eg, the second patterned conductive layer 136A), and the drain 122 can be filled in. Two contact holes 144 and corresponding source/drain transfer electrodes 132 (eg, second patterned conductive layer 136B) is connected. In this embodiment, the material of the source 120 and the drain 122 may be, for example, a metal having a work function of 4.2 ev to 5.2 ev, and a metal having a work function of 4.2 ev to 5.2 ev is, for example, gold, silver, copper, Molybdenum, titanium, aluminum, or other suitable materials, or alloys of the foregoing, but not limited thereto.

有機半導體層150設置於基板110上,且有機半導體層150可包覆源極120與汲極122。舉例而言,有機半導體層150可包覆源極120的側壁P1、P2以及其遠離基板110之表面S3(或稱上表面),有機半導體層150也可包覆汲極122的側壁P3、P4以及其遠離基板110之表面S4(或稱上表面),以避免源極120與汲極122於後續的製程中被破壞並污染設備腔體。從另一方向觀之,有機半導體層150係可設置於源極120與汲極122上。較佳地,有機半導體層150只位於主動元件區A中,且不位於資料線180上,但不限於此。於其它實施例中,有機半導體層150可延伸出主動元件區A,且有機半導體層150可與資料線180部份重疊,且其部份重疊以較不影響資料線180與其它元件間的預定電容為臨界值。有機半導體層150可為單層或多層結構,且其材料包含五苯(pentacene)、寡噻吩(oligothiophene)、酞菁(phtalocyanine)、碳六十或其衍生物、多芳胺(polyarylamine)、聚芴(polyfluorene)、聚噻吩(polythiophene)、或前述之衍生物、或其它合適的材料。 The organic semiconductor layer 150 is disposed on the substrate 110, and the organic semiconductor layer 150 may cover the source 120 and the drain 122. For example, the organic semiconductor layer 150 may cover the sidewalls P1 and P2 of the source 120 and the surface S3 (or upper surface thereof) away from the substrate 110. The organic semiconductor layer 150 may also cover the sidewalls P3 and P4 of the gate 122. And the surface S4 (or upper surface) away from the substrate 110 to prevent the source 120 and the drain 122 from being damaged in the subsequent process and contaminating the device cavity. Viewed from another direction, the organic semiconductor layer 150 can be disposed on the source 120 and the drain 122. Preferably, the organic semiconductor layer 150 is located only in the active device region A and is not located on the data line 180, but is not limited thereto. In other embodiments, the organic semiconductor layer 150 may extend out of the active device region A, and the organic semiconductor layer 150 may partially overlap the data line 180, and partially overlap to not affect the reservation between the data line 180 and other components. The capacitance is a critical value. The organic semiconductor layer 150 may be a single layer or a multilayer structure, and its material includes pentacene, oligothiophene, phtalocyanine, carbon sixty or a derivative thereof, polyarylamine, poly Polyfluorene, polythiophene, or a derivative thereof, or other suitable material.

在本實施例中,有機半導體層150可更覆蓋了部分有機介面處理層140,且有機介面處理層140部分之第二表面S2直接接觸部分有機半導體層150。在本實施例中,由於有機介面處理層 140形成於源極/汲極轉接電極130、132之後,因此有機半導體層150與有機介面處理層140交界(或稱為直接接觸區)的第二表面S2並不會因為濺鍍導電層(圖未示,即源極/汲極轉接電極130、132未圖案化前)而造成有機半導體層150與有機介面處理層140交界處之表面缺陷。 In this embodiment, the organic semiconductor layer 150 may further cover a portion of the organic interface processing layer 140, and the second surface S2 of the portion of the organic interface processing layer 140 directly contacts a portion of the organic semiconductor layer 150. In this embodiment, due to the organic interface processing layer The 140 is formed after the source/drain transfer electrodes 130, 132, so that the second surface S2 of the organic semiconductor layer 150 and the organic interface layer 140 (or referred to as a direct contact region) is not sputtered by the conductive layer ( The figure, not shown, before the source/drain transfer electrodes 130, 132 are unpatterned, causes surface defects at the interface of the organic semiconductor layer 150 and the organic interface layer 140.

有機閘極絕緣層160設置於基板110上,且有機閘極絕緣層160可設置於有機半導體層150與閘極124之間,且有機閘極絕緣層160可與有機介面處理層140至少一部分重疊。於部份實施例中,有機閘極絕緣層160可覆蓋於有機半導體層150與部分有機介面處理層140。有機閘極絕緣層160可包含單層或多層結構,且當有機閘極絕緣層160為多層結構時,其例如可包含第一有機層162與第二有機層164。舉例而言,第一有機層162位於第二有機層164與有機半導體層150之間,且第二有機層164覆蓋第一有機層162。第一有機層162可與有機半導體層150重疊,且第一有機層162可覆蓋於有機半導體層150。此外,第二有機層164可與有機介面處理層140部分重疊,且第二有機層164覆蓋部分有機介面處理層150。在一些實施例中,第二有機層164的介電常數較佳為大於第一有機層162的介電常數。於較佳實施例中,第一有機層162與有機半導體層150可由同一道圖案化製程所形成,例如:第一有機層162與有機半導體層150垂直投影於基板110上的圖形與投影範圍實質上相同,但不限於此。於部份實施例中,第一有機層162與有機半導體層150可由不同道圖案化製程所形 成、第一有機層162與有機半導體層150垂直投影於基板110上的圖形及/或投影範圍不同。 The organic gate insulating layer 160 is disposed on the substrate 110, and the organic gate insulating layer 160 may be disposed between the organic semiconductor layer 150 and the gate 124, and the organic gate insulating layer 160 may overlap at least a portion of the organic interface processing layer 140. . In some embodiments, the organic gate insulating layer 160 may cover the organic semiconductor layer 150 and a portion of the organic interface processing layer 140. The organic gate insulating layer 160 may include a single layer or a multilayer structure, and when the organic gate insulating layer 160 has a multilayer structure, it may include, for example, a first organic layer 162 and a second organic layer 164. For example, the first organic layer 162 is located between the second organic layer 164 and the organic semiconductor layer 150, and the second organic layer 164 covers the first organic layer 162. The first organic layer 162 may overlap the organic semiconductor layer 150, and the first organic layer 162 may cover the organic semiconductor layer 150. Further, the second organic layer 164 may partially overlap the organic interface processing layer 140, and the second organic layer 164 may cover a portion of the organic interface processing layer 150. In some embodiments, the dielectric constant of the second organic layer 164 is preferably greater than the dielectric constant of the first organic layer 162. In a preferred embodiment, the first organic layer 162 and the organic semiconductor layer 150 may be formed by the same patterning process, for example, the pattern and the projection range of the first organic layer 162 and the organic semiconductor layer 150 perpendicularly projected on the substrate 110. Same as above, but not limited to this. In some embodiments, the first organic layer 162 and the organic semiconductor layer 150 may be formed by different patterning processes. The pattern and/or projection range of the first organic layer 162 and the organic semiconductor layer 150 perpendicularly projected on the substrate 110 are different.

閘極124可設置於基板110上。掃描線170電性連接於閘極124。在本實施例中,閘極124可延伸出主動元件區A形成掃描線170,但不限於此。於其它實施例中,閘極124可不延伸出主動元件區A,仍可形成掃描線170,可稱為有機薄膜電晶體100與掃描線170部份重疊。閘極124例如可位於有機半導體層150之上,形成頂部閘極型(Top gate)薄膜電晶體,但本發明不以此為限。在其他實施例中,閘極124是也可以位於有機半導體層150與基板110之間或者是位於有機半導體層150之下,形成底部閘極型(Bottom gate)薄膜電晶體,但本發明並不以此為限。 The gate 124 may be disposed on the substrate 110. The scan line 170 is electrically connected to the gate 124. In the present embodiment, the gate 124 may extend out of the active device region A to form the scan line 170, but is not limited thereto. In other embodiments, the gate 124 may not extend out of the active device region A, and the scan line 170 may still be formed. The organic thin film transistor 100 may be partially overlapped with the scan line 170. The gate 124 may be, for example, over the organic semiconductor layer 150 to form a top gate thin film transistor, but the invention is not limited thereto. In other embodiments, the gate 124 may be located between the organic semiconductor layer 150 and the substrate 110 or under the organic semiconductor layer 150 to form a bottom gate transistor film, but the present invention does not This is limited to this.

畫素電極190透過源極/汲極轉接電極132而電性連接至汲極122,其中畫素電極190填入接觸洞146而與汲極轉接電極132電性連接。在本實施例中,有機介面處理層140位於有機閘極絕緣層160與源極/汲極轉接電極132之間,且接觸洞146位於有機閘極絕緣層160與有機介面處理層140中,但本發明不以此為限。在其他實施例中,至少部分有機閘極絕緣層160直接接觸源極/汲極轉接電極132,且接觸洞146只位於有機閘極絕緣層160。於一變化實施例中,更包括一保護層(圖未示)可覆蓋閘極124,且保護層(圖未示)位於有機閘極絕緣層160與畫素電極190之間。接觸洞146可位於有機閘極絕緣層160與保護層(圖未示)中,或者是接觸洞146位於有機閘極絕緣層160與有機介面處理層140或位 於有機閘極絕緣層160中,本發明不以此為限。然後,請參照圖1A與圖1C,圖1C是沿圖1A中交疊區剖線B-B’的剖面示意圖。在本實施例中,掃描線170與資料線180具有至少一交疊區F,且有機半導體層150不位於掃描線170與資料線180的交疊區F中,但不限於此。於其它實施例中,有機半導體層150可延伸出主動元件區A,且有機半導體層150可與交疊區F部份重疊,且其部份重疊以較不影響交疊區F之導電層(例如:掃描線170與資料線180)與其它元件間的預定電容為臨界值。在本實施例中,掃描線170與資料線180之間可具有有機介面處理層140以及第二有機層164。在一些實施例中,藉由調整有機介面處理層140的厚度及/或第二有機層164的厚度來減少掃描線170與資料線180之間產生寄生電容,進而改善電阻電容時間延遲的問題。 The pixel electrode 190 is electrically connected to the drain electrode 122 through the source/drain transfer electrode 132. The pixel electrode 190 is filled in the contact hole 146 to be electrically connected to the drain transfer electrode 132. In the present embodiment, the organic interface processing layer 140 is located between the organic gate insulating layer 160 and the source/drain transfer electrode 132, and the contact hole 146 is located in the organic gate insulating layer 160 and the organic interface processing layer 140. However, the invention is not limited thereto. In other embodiments, at least a portion of the organic gate insulating layer 160 directly contacts the source/drain via electrode 132, and the contact hole 146 is only located in the organic gate insulating layer 160. In a variant embodiment, a protective layer (not shown) may be covered to cover the gate 124, and a protective layer (not shown) is located between the organic gate insulating layer 160 and the pixel electrode 190. The contact hole 146 may be located in the organic gate insulating layer 160 and the protective layer (not shown), or the contact hole 146 may be located in the organic gate insulating layer 160 and the organic interface processing layer 140 or In the organic gate insulating layer 160, the invention is not limited thereto. Referring to Fig. 1A and Fig. 1C, Fig. 1C is a cross-sectional view taken along line B-B' of the overlapping portion of Fig. 1A. In the present embodiment, the scan line 170 and the data line 180 have at least one overlap region F, and the organic semiconductor layer 150 is not located in the overlap region F of the scan line 170 and the data line 180, but is not limited thereto. In other embodiments, the organic semiconductor layer 150 may extend out of the active device region A, and the organic semiconductor layer 150 may partially overlap the overlap region F, and partially overlap to not affect the conductive layer of the overlap region F ( For example, the predetermined capacitance between scan line 170 and data line 180) and other components is a critical value. In this embodiment, the organic interface processing layer 140 and the second organic layer 164 may be disposed between the scan line 170 and the data line 180. In some embodiments, the parasitic capacitance between the scan line 170 and the data line 180 is reduced by adjusting the thickness of the organic interface processing layer 140 and/or the thickness of the second organic layer 164, thereby improving the resistance time delay of the resistor.

圖2A是依照本發明另一實施例的一種畫素結構的俯視示意圖。圖2B是沿圖2A中C-C’的剖面示意圖。此必須說明的是,下述實施例沿用前述實施例的元件標號與部分內容,其中採用相同的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,下述實施例不再重複贅述。 2A is a top plan view of a pixel structure in accordance with another embodiment of the present invention. Fig. 2B is a schematic cross-sectional view taken along line C-C' of Fig. 2A. It is to be noted that the following embodiments use the same reference numerals and parts in the foregoing embodiments, in which the same reference numerals are used to refer to the same or similar elements, and the description of the same technical content is omitted. For the description of the omitted portions, reference may be made to the foregoing embodiments, and the following embodiments are not repeated.

請先同時參照圖1B與圖2B,本實施例的有機薄膜電晶體100a與圖1A中的有機薄膜電晶體100相似,惟二者主要差異之處在於:圖2B中的第二圖案化導電層136A以及第二圖案化導電層136B的面積較圖1B的第二圖案化導電層136A以及第二圖 案化導電層136B的面積小。 Referring to FIG. 1B and FIG. 2B simultaneously, the organic thin film transistor 100a of the present embodiment is similar to the organic thin film transistor 100 of FIG. 1A, but the main difference is that the second patterned conductive layer in FIG. 2B The area of 136A and the second patterned conductive layer 136B is larger than the second patterned conductive layer 136A of FIG. 1B and the second figure. The area of the conductive layer 136B is small.

在本實施例的有機薄膜電晶體100a中,源極/汲極轉接電極130的第二圖案化導電層136A對應第一接觸孔142的位置而設置,且第二圖案化導電層136A的面積例如僅略大於第一接觸孔142的底面積。 In the organic thin film transistor 100a of the present embodiment, the second patterned conductive layer 136A of the source/drain transfer electrode 130 is disposed corresponding to the position of the first contact hole 142, and the area of the second patterned conductive layer 136A For example, it is only slightly larger than the bottom area of the first contact hole 142.

源極/汲極轉接電極132的第二圖案化導電層136B例如包括兩個分離部分,分別對應第二接觸孔144及接觸洞146的位置而設置,且第二圖案化導電層136B之該兩個分離部分的面積例如分別略大於第二接觸孔144的底面積及接觸洞146的底面積,但不限於此。於其它實施例中,第一接觸孔142、第二接觸孔144與接觸洞146其中至少一者的底面積可實質上相等於所對應的導電層的面積(例如:第二圖案化導電層136A的面積、第二圖案化導電層136B之兩個分離部分的面積)。 The second patterned conductive layer 136B of the source/drain transfer electrode 132 includes, for example, two separate portions respectively disposed corresponding to the positions of the second contact holes 144 and the contact holes 146, and the second patterned conductive layer 136B The area of the two separated portions is, for example, slightly larger than the bottom area of the second contact hole 144 and the bottom area of the contact hole 146, respectively, but is not limited thereto. In other embodiments, the bottom area of at least one of the first contact hole 142, the second contact hole 144, and the contact hole 146 may be substantially equal to the area of the corresponding conductive layer (eg, the second patterned conductive layer 136A) The area, the area of the two separated portions of the second patterned conductive layer 136B).

在本實施例中,資料線180只由單層結構,例如:第一圖案化導電層134C所構成,藉此降低材料所需的成本。 In the present embodiment, the data line 180 is composed of only a single layer structure, such as the first patterned conductive layer 134C, thereby reducing the cost of the material.

綜上所述,在本發明的一些實施例中有機薄膜電晶體及畫素結構中,有機薄膜電晶體可透過源極/汲極轉接電極分別連接至畫素結構中的資料線與畫素電極,且於部份實施例中,有機半導體層可不位於掃描線與資料線的交疊區中。藉此畫素結構的開口率可以被增加,且能改善電阻電容時間延遲的問題。此外,在本發明的一些實施例中,由於源極/汲極轉接電極可設置於有機介面處理層的下方,使得本發明的有機薄膜電晶體的製程中可減少 有機介面處理層與有機半導體層交界面的缺陷。 In summary, in some embodiments of the present invention, in an organic thin film transistor and a pixel structure, an organic thin film transistor can be connected to a data line and a pixel in a pixel structure through a source/drain transfer electrode. The electrode, and in some embodiments, the organic semiconductor layer may not be located in the overlap region of the scan line and the data line. Thereby, the aperture ratio of the pixel structure can be increased, and the problem of the time delay of the resistance and capacitance can be improved. In addition, in some embodiments of the present invention, since the source/drain transfer electrode can be disposed under the organic interface processing layer, the process of the organic thin film transistor of the present invention can be reduced. A defect in the interface between the organic interface layer and the organic semiconductor layer.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

Claims (13)

一種有機薄膜電晶體,包括: 一基板; 至少一源極、至少一汲極與至少一閘極,設置於該基板上; 至少二源極/汲極轉接電極,設置於該基板上,且各該源極/汲極轉接電極具有多層導電層,其中,該至少二源極/汲極轉接電極分別連接於該至少一源極與該至少一汲極; 一有機介面處理層,設置於該基板上且與該至少一源極、該至少一汲極及該至少二源極/汲極轉接電極至少部分重疊; 至少一有機半導體層,設置於該基板上,且該至少一有機半導體層包覆該至少一源極與該至少一汲極;以及 至少一有機閘極絕緣層,設置於該基板上,且該至少一有機閘極絕緣層設置於該至少一閘極與該至少一有機半導體層之間,其中,該至少一有機閘極絕緣層與該有機介面處理層至少一部分重疊。An organic thin film transistor comprising: a substrate; at least one source, at least one drain and at least one gate disposed on the substrate; at least two source/drain transfer electrodes disposed on the substrate, and Each of the source/drain transfer electrodes has a plurality of conductive layers, wherein the at least two source/drain transfer electrodes are respectively connected to the at least one source and the at least one drain; an organic interface layer is disposed And at least partially overlapping the at least one source, the at least one drain, and the at least two source/drain transfer electrodes; at least one organic semiconductor layer disposed on the substrate, and the at least one organic The semiconductor layer covers the at least one source and the at least one drain; and the at least one organic gate insulating layer is disposed on the substrate, and the at least one organic gate insulating layer is disposed on the at least one gate and the at least Between an organic semiconductor layer, wherein the at least one organic gate insulating layer overlaps at least a portion of the organic interface processing layer. 如申請專利範圍第1項所述的有機薄膜電晶體,其中,該有機介面處理層覆蓋部分各該源極/汲極轉接電極與部分該基板。The organic thin film transistor according to claim 1, wherein the organic interface processing layer covers a portion of each of the source/drain transfer electrodes and a portion of the substrate. 如申請專利範圍第2項所述的有機薄膜電晶體,其中,該至少一源極與該至少一汲極設置於該有機介面處理層上。The organic thin film transistor according to claim 2, wherein the at least one source and the at least one drain are disposed on the organic interface treatment layer. 如申請專利範圍第3項所述的有機薄膜電晶體,其中,該些多層導電層包括一第一圖案化導電層與一第二圖案化導電層,且該有機介面處理層具有一第一接觸孔與一第二接觸孔,該至少一源極與該至少一汲極分別經由該第一接觸孔與該第二接觸孔與對應的該第二圖案化導電層連接。The organic thin film transistor according to claim 3, wherein the plurality of conductive layers comprise a first patterned conductive layer and a second patterned conductive layer, and the organic interface layer has a first contact And the second contact hole, the at least one source and the at least one drain are respectively connected to the corresponding second patterned conductive layer via the first contact hole and the second contact hole. 如申請專利範圍第1項所述的有機薄膜電晶體,其中,各該源極/汲極轉接電極包括抗氧化之材料。The organic thin film transistor according to claim 1, wherein each of the source/drain transfer electrodes comprises an anti-oxidation material. 如申請專利範圍第1項所述的有機薄膜電晶體,其中,該至少一有機半導體層更覆蓋部分該有機介面處理層。The organic thin film transistor according to claim 1, wherein the at least one organic semiconductor layer further covers a portion of the organic interface processing layer. 如申請專利範圍第1項所述的有機薄膜電晶體,其中,該至少一有機閘極絕緣層覆蓋於該至少一有機半導體層與部分該有機介面處理層。The organic thin film transistor according to claim 1, wherein the at least one organic gate insulating layer covers the at least one organic semiconductor layer and a portion of the organic interface processing layer. 如申請專利範圍第7項所述的有機薄膜電晶體,其中,該至少一有機閘極絕緣層包含一第一有機層與一第二有機層,該第一有機層與該至少一有機半導體層重疊,該第二有機層覆蓋該第一有機層與部分該有機介面處理層,其中,該第一有機層位於該至少一有機半導體層與該第二有機層之間。The organic thin film transistor according to claim 7, wherein the at least one organic gate insulating layer comprises a first organic layer and a second organic layer, the first organic layer and the at least one organic semiconductor layer Overlap, the second organic layer covers the first organic layer and a portion of the organic interface processing layer, wherein the first organic layer is between the at least one organic semiconductor layer and the second organic layer. 如申請專利範圍第1項所述的有機薄膜電晶體,其中,該至少一閘極位於該至少一有機半導體層之上或之下。The organic thin film transistor according to claim 1, wherein the at least one gate is located above or below the at least one organic semiconductor layer. 一種畫素結構,包括: 至少一有機薄膜電晶體,設置於一主動元件區,該至少一有機薄膜電晶體如申請專利範圍第1項至第9項中任一項所述,且該至少一有機半導體層只位於該主動元件區中; 一掃描線,電性連接於該至少一閘極; 一資料線,連接於該至少一源極,其中該至少一有機半導體層不位於該資料線上;以及 一畫素電極,電性連接於該至少二源極/汲極轉接電極其中一者。A pixel structure comprising: at least one organic thin film transistor disposed in an active device region, wherein the at least one organic thin film transistor is as described in any one of claims 1 to 9, and the at least one The organic semiconductor layer is located only in the active device region; a scan line electrically connected to the at least one gate; a data line connected to the at least one source, wherein the at least one organic semiconductor layer is not located on the data line; And a pixel electrode electrically connected to one of the at least two source/drain transfer electrodes. 如申請專利範圍第10項所述的畫素結構,其中,該畫素電極經由一接觸洞與該至少二源極/汲極轉接電極其中一者連接。The pixel structure of claim 10, wherein the pixel electrode is connected to one of the at least two source/drain transfer electrodes via a contact hole. 如申請專利範圍第10項所述的畫素結構,其中該資料線以及各該源極/汲極轉接電極分別具有對應的該多層導電層,該些多層導電層包括一第一圖案化導電層與一第二圖案化導電層,該資料線係由對應的該第一圖案化導電層及對應的該第二圖案化導電層所構成。The pixel structure of claim 10, wherein the data line and each of the source/drain transfer electrodes respectively have corresponding multi-layer conductive layers, and the plurality of conductive layers comprise a first patterned conductive layer. And a second patterned conductive layer, wherein the data line is formed by the corresponding first patterned conductive layer and the corresponding second patterned conductive layer. 如申請專利範圍第10項所述的畫素結構,其中該些多層導電層包括一第一圖案化導電層與一第二圖案化導電層,該資料線只由對應的該第一圖案化導電層所構成。The pixel structure of claim 10, wherein the plurality of conductive layers comprise a first patterned conductive layer and a second patterned conductive layer, the data lines are only corresponding to the first patterned conductive The layer is composed.
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