TWI647316B - Solder alloy - Google Patents

Solder alloy Download PDF

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TWI647316B
TWI647316B TW106123802A TW106123802A TWI647316B TW I647316 B TWI647316 B TW I647316B TW 106123802 A TW106123802 A TW 106123802A TW 106123802 A TW106123802 A TW 106123802A TW I647316 B TWI647316 B TW I647316B
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solder alloy
solder
mass
temperature
joint
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TW106123802A
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Chinese (zh)
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TW201809304A (en
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矢作政隆
古澤秀樹
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Jx金屬股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • B23K35/26Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C12/00Alloys based on antimony or bismuth

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Powder Metallurgy (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)

Abstract

提供一種新穎之焊料合金,含有Sn、Bi及Cu,藉由使Sn為0.05~1.50質量%,Cu為0.03~3.2質量%,剩餘部分為Bi及不可避免之雜質,而可於高溫區域使用。 A novel solder alloy comprising Sn, Bi and Cu is provided, wherein Sn is 0.05 to 1.50% by mass, Cu is 0.03 to 3.2% by mass, and the balance is Bi and unavoidable impurities, and can be used in a high temperature region.

Description

焊料合金 Solder alloy

本發明係關於一種焊料合金。 This invention relates to a solder alloy.

就環境方面考慮,推薦使用不含有鉛之焊料合金。焊料合金根據其組成,適於用作焊料之溫度區域發生變化。 For environmental considerations, solder alloys that do not contain lead are recommended. The solder alloy varies depending on its composition and is suitable for use as a temperature region of the solder.

功率裝置作為電力轉換用元件,於油電混合車、送變電等廣泛之領域中使用。以往可藉由Si晶片之裝置而應對,但於要求高耐壓、大電流用途、高速動作之領域,帶隙大於Si之SiC、GaN等近年來受到注目。 The power device is used as a component for power conversion, and is used in a wide range of fields such as hybrid vehicles and power transmission and distribution. In the past, it has been possible to cope with the device of the Si wafer. However, in the field where high withstand voltage, high current use, and high-speed operation are required, SiC and GaN having a band gap larger than Si have been attracting attention in recent years.

於以往之功率模組中,動作溫度為最高170℃左右,但於下一代型SiC、GaN等中,據說可能會超過200℃。伴隨於此,對搭載有該等晶片之模組中使用之各材料要求耐熱性、散熱性。 In the conventional power module, the operating temperature is about 170 ° C, but it is said to exceed 200 ° C in the next-generation SiC, GaN, and the like. Along with this, heat resistance and heat dissipation are required for each of the materials used in the module in which the wafers are mounted.

關於接合材料,就無Pb之觀點而言,較佳為Sn-3.0Ag-0.5Cu焊料,但由於在下一代型模組中動作溫度可能會超過200℃,故而與熔點為220℃附近之Sn-3.0Ag-0.5Cu焊料相比,進一步要求耐熱性。具體而言,就散熱器之冷卻及引擎周圍之溫度的容許性而言,謀求一種具有較佳為250℃以上之熔點的焊料。再者,焊料之組成只要未特別說明則為質量%表示,上述Sn-3.0Ag-0.5Cu係Ag:3.0質量%、Cu:0.5質量%、剩餘部分Sn之組 成。雖為RoHS之限制對象外,但若為就環境限制之觀點而言不佳之Pb焊料(Pb-5Sn),則可應對下一代型模組之動作溫度。與Pb焊料同樣地,作為耐熱焊料,使用Au系焊料(Au-Ge、Au-Si、Au-Sn)(非專利文獻1~3)。作為廉價之焊料,已知有一種Sn基焊料(專利文獻1、2)。 As for the bonding material, Sn-3.0Ag-0.5Cu solder is preferable from the viewpoint of no Pb, but since the operating temperature may exceed 200 ° C in the next-generation module, Sn with a melting point of 220 ° C is used. The heat resistance is further required as compared with the -3.0Ag-0.5Cu solder. Specifically, in terms of the cooling of the heat sink and the allowability of the temperature around the engine, a solder having a melting point of preferably 250 ° C or higher is desired. In addition, the composition of the solder is represented by mass % unless otherwise specified, and the Sn-3.0Ag-0.5Cu-based Ag: 3.0% by mass, Cu: 0.5% by mass, and the remaining Sn group to make. In addition to the limitation of RoHS, Pb solder (Pb-5Sn), which is not good from the viewpoint of environmental restrictions, can cope with the operating temperature of the next-generation module. In the same manner as the Pb solder, Au-based solder (Au-Ge, Au-Si, Au-Sn) is used as the heat-resistant solder (Non-Patent Documents 1 to 3). As an inexpensive solder, a Sn-based solder is known (Patent Documents 1 and 2).

因此,近年來,作為下一代型模組之接合材料而受到注目者係金屬細粉膏。由於金屬粉末之尺寸小,故而表面能量高,於遠低於該金屬之熔點的溫度開始燒結。而且,與焊料不同,一旦進行燒結,若不升溫至該金屬之熔點附近,則不進行再熔融。有效利用此種特性,利用Ag細粉膏進行開發(專利文獻3)。 Therefore, in recent years, as a joining material of a next-generation type module, a metal fine powder paste has been attracting attention. Since the metal powder has a small size, the surface energy is high, and sintering starts at a temperature far below the melting point of the metal. Further, unlike the solder, once the sintering is performed, if the temperature is not raised to the vicinity of the melting point of the metal, remelting is not performed. By utilizing such characteristics effectively, development is carried out using Ag fine powder paste (Patent Document 3).

Pb-5Sn焊料雖作為下一代型功率模組的接合材料之功能充分,但有鉛,就將來之環境限制之觀點而言,亦較理想為不使用。又,Au系焊料就功能、環境方面而言,作為接合材料而較為理想,但存在材料價格之問題。Sn基焊料於與Cu電極接合之情形時,有因動作環境下之熱負荷,而產生因接合界面附近之Sn與Cu之擴散速度差而產生之克根達空隙(Kirkendall void),使接合強度降低之虞。又,Ag細粉膏根據條件,可對接合層賦予充分之接合強度、耐熱性,但存在材料價格之問題。 Although Pb-5Sn solder is fully functional as a bonding material for next-generation power modules, it has lead, and it is preferable not to use it from the viewpoint of future environmental limitations. Further, the Au-based solder is preferable as a bonding material in terms of function and environment, but there is a problem of material price. When the Sn-based solder is bonded to the Cu electrode, there is a heat load in the operating environment, and a Kirkendall void is generated due to a difference in diffusion speed between Sn and Cu in the vicinity of the joint interface, so that the joint strength is obtained. Reduce the embarrassment. Further, the Ag fine powder paste can impart sufficient joint strength and heat resistance to the joint layer depending on the conditions, but there is a problem of the material price.

專利文獻4揭示有一種體積變化得到抑制之無鉛焊料膏,但熔點相對較低,高溫特性存在改良之餘地。又,專利文獻4之焊料合金有由於固相線溫度與液相線溫度之溫度差大,故而就焊接之尺寸精度之方面而言容易產生問題之不利。專利文獻5揭示有一種潤濕性得到改善之焊料膏。於專利文獻5之焊料膏中,成為混合組成不同之多種粉末,其熔融後成為合金之設計,因此,必需加熱超過各粉末之熔點,例如,若使用Cu粉, 但不加熱至Cu之熔點1084.6℃以上,則無法期待完全之熔融,有依賴於焊接時之加熱操作之不均一性之顧慮。 Patent Document 4 discloses a lead-free solder paste in which volume change is suppressed, but the melting point is relatively low, and there is room for improvement in high-temperature characteristics. Further, in the solder alloy of Patent Document 4, since the temperature difference between the solidus temperature and the liquidus temperature is large, it is disadvantageous in terms of dimensional accuracy of welding. Patent Document 5 discloses a solder paste having improved wettability. In the solder paste of Patent Document 5, a plurality of powders having different mixing compositions are formed, and after melting, they are designed as alloys. Therefore, it is necessary to heat more than the melting point of each powder. For example, if Cu powder is used, However, if it is not heated to a melting point of Cu of 1084.6 ° C or more, complete melting cannot be expected, and there is a concern depending on the unevenness of the heating operation at the time of welding.

[先前技術文獻] [Previous Technical Literature]

[專利文獻] [Patent Literature]

[專利文獻1]日本專利特開平9-271981號公開專利公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. Hei 9-271981

[專利文獻2]日本專利特開2000-141079號公開專利公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2000-141079

[專利文獻3]國際公開WO2011/155055號 [Patent Document 3] International Publication WO2011/155055

[專利文獻4]國際公開WO2007/018288號 [Patent Document 4] International Publication WO2007/018288

[專利文獻5]國際公開WO2007/055308號 [Patent Document 5] International Publication WO2007/055308

[非專利文獻] [Non-patent literature]

[非專利文獻1]P. Alexandrov, W. Wright, M. Pan, M. Weiner, L. Jiao and J. H. Zhao, Solid-State Electron., 47 (2003) p.263. [Non-Patent Document 1] P. Alexandrov, W. Wright, M. Pan, M. Weiner, L. Jiao and J. H. Zhao, Solid-State Electron., 47 (2003) p.263.

[非專利文獻2]R. W. Johnson and L. Williams, Mater. Sci. Forum 483-485 (2005) p.785. [Non-Patent Document 2] R. W. Johnson and L. Williams, Mater. Sci. Forum 483-485 (2005) p.785.

[非專利文獻3]S. Tanimoto, K. Matsui, Y. Murakami, H. Yamaguchi and H. Okumura, Proceedings of IMAPS HiTEC 2010 (May 11-13, 2010, Albuquerque, New Mexico, USA), p32-39. [Non-Patent Document 3] S. Tanimoto, K. Matsui, Y. Murakami, H. Yamaguchi and H. Okumura, Proceedings of IMAPS HiTEC 2010 (May 11-13, 2010, Albuquerque, New Mexico, USA), p32-39 .

如此,謀求一種於下一代型功率模組之接合材料要求之高溫區域(例如超過250℃之溫度區域)亦具有優異之特性的焊料合金。 In this way, a solder alloy having excellent characteristics in a high temperature region (for example, a temperature region exceeding 250 ° C) required for a bonding material of a next-generation power module is desired.

因此,本發明之目的在於提供一種不添加且不含有鉛,可於高溫區域使用之新穎之焊料合金。 Accordingly, it is an object of the present invention to provide a novel solder alloy which can be used in a high temperature region without adding and containing no lead.

本發明人進行努力研究,結果發現藉由下述Bi基焊料合金,可達成上述目的,從而完成本發明。 As a result of intensive studies, the inventors have found that the above object can be attained by the following Bi-based solder alloy, and the present invention has been completed.

因此,本發明含有以下之(1)以下。 Therefore, the present invention contains the following (1) or less.

(1) (1)

一種焊料合金,其含有Sn、Bi及Cu,Sn為0.05~1.50質量%,Cu為0.03~3.2質量%,剩餘部分為Bi及不可避免之雜質。 A solder alloy containing Sn, Bi and Cu, Sn of 0.05 to 1.50% by mass, Cu of 0.03 to 3.2% by mass, and the balance being Bi and unavoidable impurities.

(2) (2)

如(1)記載之焊料合金,其中,Bi為95.3~99.92質量%。 The solder alloy according to (1), wherein Bi is from 95.3 to 99.92% by mass.

(3) (3)

如(1)至(2)中任一項記載之焊料合金,其中,Sn為0.05~1.0質量%。 The solder alloy according to any one of (1) to (2), wherein Sn is 0.05 to 1.0% by mass.

(4) (4)

如(1)至(3)中任一項記載之焊料合金,其中,Cu為1.0~3.2質量%。 The solder alloy according to any one of (1) to (3), wherein Cu is 1.0 to 3.2% by mass.

(5) (5)

如(1)至(4)中任一項記載之焊料合金,其固相線溫度為250℃以上。 The solder alloy according to any one of (1) to (4), wherein the solidus temperature is 250 ° C or higher.

(6) (6)

如(1)至(5)中任一項記載之焊料合金,其液相線溫度為275℃以下。 The solder alloy according to any one of (1) to (5), wherein the liquidus temperature is 275 ° C or lower.

(7) (7)

如(1)至(6)中任一項記載之焊料合金,其中,下式:[液相線溫度] -[固相線溫度]之值為25℃以下。 The solder alloy according to any one of (1) to (6) wherein the following formula: [liquidus temperature] - The value of [solidus temperature] is 25 ° C or less.

(8) (8)

如(1)至(7)中任一項記載之焊料合金,其中,焊料合金之形狀為粉狀、球狀或片狀。 The solder alloy according to any one of (1) to (7) wherein the shape of the solder alloy is a powder, a sphere or a sheet.

(9) (9)

一種電子零件之內部接合焊接接頭,係以(1)至(8)中任一項記載之焊料合金焊接而成。 An internal joint welded joint of an electronic component obtained by welding the solder alloy according to any one of (1) to (8).

(10) (10)

一種功率電晶體之焊料接頭,係以(1)至(8)中任一項記載之焊料合金焊接而成。 A solder joint of a power transistor, which is obtained by welding a solder alloy according to any one of (1) to (8).

(11) (11)

一種印刷電路板,具有(1)至(8)中任一項記載之焊料合金。 A printed circuit board comprising the solder alloy according to any one of (1) to (8).

(12) (12)

一種電子零件,具有(1)至(8)中任一項記載之焊料合金。 An electronic component comprising the solder alloy according to any one of (1) to (8).

(13) (13)

一種功率電晶體,具有(1)至(8)中任一項記載之焊料合金。 A power transistor having the solder alloy according to any one of (1) to (8).

(14) (14)

一種電子機器,具有(9)至(10)中任一項記載之焊料接頭,或(11)記載之印刷電路板,或(12)記載之電子零件,或(13)記載之功率電晶體。 An electronic device comprising the solder joint according to any one of (9) to (10), or the printed circuit board according to (11), or the electronic component described in (12), or the power transistor described in (13).

(15) (15)

一種功率裝置,具有(9)至(10)中任一項記載之焊料接頭。 A power device comprising the solder joint according to any one of (9) to (10).

(16) (16)

一種構件,以(1)至(8)中任一項記載之焊料合金作為材料。 A member comprising the solder alloy according to any one of (1) to (8) as a material.

(17) (17)

如(1)至(8)中任一項記載之焊料合金,其接合強度為10MPa以上。 The solder alloy according to any one of (1) to (8), wherein the bonding strength is 10 MPa or more.

根據本發明,可獲得不添加且不含有鉛,於下一代型功率模組之接合材料要求之高溫區域(例如超過250℃之溫度區域)亦具有優異之特性的焊料合金。本發明之焊料合金由於不添加且不含有鉛,故而就將來之環境限制之觀點而言亦較為有利,由於不使用昂貴之Ag,故而就材料價格之方面而言亦較為有利。 According to the present invention, it is possible to obtain a solder alloy which does not contain and does not contain lead and which has excellent characteristics in a high temperature region (for example, a temperature region exceeding 250 ° C) required for a bonding material of a next-generation power module. Since the solder alloy of the present invention is not added and does not contain lead, it is also advantageous from the viewpoint of future environmental restrictions, and since expensive Ag is not used, it is also advantageous in terms of material price.

以下,列舉實施態樣詳細地說明本發明。本發明並不限定於以下列舉之具體之實施態樣。 Hereinafter, the present invention will be described in detail by way of examples. The invention is not limited to the specific embodiments set forth below.

[焊料合金] [solder alloy]

本發明之焊料合金含有Sn、Bi及Cu,Sn為0.05~1.50質量%,Cu為0.03~3.2質量%,剩餘部分為Bi及不可避免之雜質。 The solder alloy of the present invention contains Sn, Bi and Cu, Sn is 0.05 to 1.50% by mass, Cu is 0.03 to 3.2% by mass, and the balance is Bi and unavoidable impurities.

本發明之焊料合金係所謂無鉛焊料合金。無鉛焊料合金亦被稱為無Pb焊料,但可以環境負荷足夠低之程度之含量,含有鉛作為不可避免之雜質。本發明之焊料合金由於固相線溫度及液相線溫度均為高溫度 帶,故而於下一代型功率模組之接合材料要求之高溫區域(例如超過250℃之溫度區域)亦具有優異之特性。 The solder alloy of the present invention is a so-called lead-free solder alloy. Lead-free solder alloys are also known as Pb-free solders, but can contain lead as an unavoidable impurity at a level that is sufficiently low in environmental load. The solder alloy of the present invention has high temperature due to solidus temperature and liquidus temperature. Therefore, the high temperature region required for the bonding material of the next-generation power module (for example, a temperature region exceeding 250 ° C) also has excellent characteristics.

[Bi] [Bi]

Bi(鉍)係作為本發明之焊料合金的主要之構成元素而含有。於較佳之實施態樣中,Bi相對於焊料合金之含量例如可設為95.3~99.92質量%、98.5~99.8質量%、99.0~99.8質量%。 Bi (铋) is contained as a main constituent element of the solder alloy of the present invention. In a preferred embodiment, the content of Bi with respect to the solder alloy can be, for example, 95.3 to 99.92 mass%, 98.5 to 99.8 mass%, and 99.0 to 99.8 mass%.

[Sn] [Sn]

Sn相對於焊料合金之含量例如可設為0.05~1.50質量%、0.05~1.0質量%、0.10~0.50質量%、0.10~0.20質量%。 The content of Sn with respect to the solder alloy can be, for example, 0.05 to 1.50% by mass, 0.05 to 1.0% by mass, 0.10 to 0.50% by mass, and 0.10 to 0.20% by mass.

[Cu] [Cu]

Cu相對於焊料合金之含量例如可設為0.03~3.2質量%、1.0~3.2質量%。 The content of Cu with respect to the solder alloy can be, for example, 0.03 to 3.2% by mass and 1.0 to 3.2% by mass.

[固相線溫度] [solidus temperature]

固相線溫度例如可設為250℃以上或252℃以上。於為固相線溫度低之焊料合金之情形時,若並非為使用環氧樹脂作為補強材料之焊料膏,則無法於高溫區域使用,但於為固相線溫度高(例如250℃以上)之焊料合金之情形時,與無環氧樹脂之助焊劑加以混合,即便為無環氧樹脂之焊料膏,亦可於高溫區域使用。 The solidus temperature can be, for example, 250 ° C or more or 252 ° C or more. In the case of a solder alloy having a low solidus temperature, if it is not a solder paste using an epoxy resin as a reinforcing material, it cannot be used in a high temperature region, but the solidus temperature is high (for example, 250 ° C or higher). In the case of a solder alloy, it is mixed with a flux-free flux, and even if it is a non-epoxy solder paste, it can be used in a high temperature region.

[液相線溫度] [liquidus temperature]

液相線溫度例如可設為275℃以下或272℃以下。 The liquidus temperature can be, for example, 275 ° C or lower or 272 ° C or lower.

[液相線溫度及固相線溫度] [liquidus temperature and solidus temperature]

於較佳之實施態樣中,可將下式:[液相線溫度]-[固相線溫度]之值(固相液相溫度差:PR)設為25℃以下或22℃以下。PR例如可設為1℃以上。 本發明之焊料合金由於PR小,故而於用於焊接時,可實現優異之尺寸精度。 In a preferred embodiment, the value of the following formula: [liquidus temperature] - [solidus temperature] (solid phase liquid phase temperature difference: PR) can be set to 25 ° C or less or 22 ° C or less. PR can be set, for example, at 1 ° C or higher. Since the solder alloy of the present invention has a small PR, it can achieve excellent dimensional accuracy when used for soldering.

於焊接中,若PR大,則焊料難以變硬,尺寸精度變差。尤其對具有某一程度之大小,根據形狀容易發生焊接不良之焊球等而言,因PR之大小引起的影響大。例如,為藉由PR大之焊料合金形成的焊球之情形時,即便變硬,僅為外側,於內側成為混合有液狀者之狀態,形狀因接著時等之壓力而變形。於藉由多個焊球接合1片晶片之情形時,因使用形狀(高度)不同之焊球,而無法順利地接合晶片,容易發生焊接不良(例如立碑、舉離)。若PR小,則立即固化,故而空隙少,於焊接時混合存在液相固相之時間短,因此不易發生焊接不良。 In the welding, if the PR is large, the solder hardly hardens and the dimensional accuracy is deteriorated. In particular, for a solder ball or the like which has a certain size and is liable to cause soldering failure depending on the shape, the influence due to the size of the PR is large. For example, in the case of a solder ball formed of a large solder alloy of PR, even if it is hard, it is only the outer side, and the inside is in a state in which a liquid is mixed, and the shape is deformed by the pressure at the time of the next. When a single wafer is bonded by a plurality of solder balls, solder balls having different shapes (heights) are used, and the wafer cannot be smoothly bonded, and soldering failure (for example, tombstoning or lift-off) is likely to occur. When the PR is small, it is solidified immediately, so that the voids are small, and the time for mixing the liquid phase solid phase during welding is short, so that soldering defects are less likely to occur.

[較佳之組成] [better composition]

於較佳之實施態樣中,焊料合金之組成例如可設為以下。 In a preferred embodiment, the composition of the solder alloy can be set, for example, as follows.

Sn:Bi:Cu=0.14~0.16質量%:99.51~99.53質量%:0.32~0.34質量% Sn: Bi: Cu = 0.14 to 0.16 mass%: 99.51 to 99.53 mass%: 0.32 to 0.34 mass%

Sn:Bi:Cu=0.153質量%:99.520質量%:0.327質量% Sn: Bi: Cu = 0.153% by mass: 99.520% by mass: 0.327% by mass

[接合強度] [joint strength]

焊料合金之接合強度可藉由實施例中記載之手段進行測量。於較佳之實施態樣中,接合強度例如可設為10MPa以上或15MPa以上。 The bonding strength of the solder alloy can be measured by the means described in the examples. In a preferred embodiment, the joint strength can be, for example, 10 MPa or more or 15 MPa or more.

[焊料合金之形狀] [Shape of solder alloy]

本發明之焊料合金之形狀可適當採用用作焊料之視需要的形狀。如實施例中記載般,可形成為片狀之構件,進而,例如可形成為線、粉、球、板、棒等形狀之構件。焊料合金之形狀尤佳形成為粉體之形狀、焊球之形狀(球狀)或片狀。焊球係指例如直徑50μm~500μm之球。焊料粉係指例如粒徑50μm以下之粉末。焊料粉可用於焊料膏。 The shape of the solder alloy of the present invention can be suitably used as a shape desired for solder. As described in the examples, the member may be formed into a sheet shape, and further, for example, it may be formed into a member having a shape such as a thread, a powder, a ball, a plate, or a rod. The shape of the solder alloy is particularly preferably formed into the shape of a powder, the shape of a solder ball (spherical shape), or a sheet shape. The solder ball means, for example, a ball having a diameter of 50 μm to 500 μm. The solder powder refers to, for example, a powder having a particle diameter of 50 μm or less. Solder powder can be used for solder paste.

[實施例] [Examples]

以下,利用本發明之實施例詳細地說明本發明。本發明並不受以下所示之實施例限定。 Hereinafter, the present invention will be described in detail by way of examples of the invention. The invention is not limited by the examples shown below.

(例1) (example 1)

(實施例1) (Example 1)

稱量特定量之Bi、Cu、Sn,藉由真空熔解而熔製鑄錠。利用螢光X射線求出鑄錠之各成分,記載於表中。將其加工為厚度0.2mm之片狀。再者,鑄錠之各成分亦可使用ICP發射光譜分析器進行分析。 A specific amount of Bi, Cu, and Sn was weighed, and the ingot was melted by vacuum melting. The components of the ingot were determined by fluorescent X-rays and are described in the table. It was processed into a sheet having a thickness of 0.2 mm. Furthermore, the components of the ingot can also be analyzed using an ICP emission spectrometer.

焊料合金之固相線溫度及液相線溫度之測量係依據JIS Z3198-1:2014,利用藉由示差掃描熱量測量(DSC:Differential Scanning Calorimetry)之方法實施。 The measurement of the solidus temperature and the liquidus temperature of the solder alloy was carried out by a method by Differential Scanning Calorimetry (DSC) in accordance with JIS Z3198-1:2014.

準備各2mm之SiC晶片,於單面藉由濺鍍依序分別形成Ni層(厚度1μm)、Au層(厚度0.05μm)。於藉由電鍍分別將Ni層(厚度1μm)形成於底層及將Au層(厚度0.05μm)形成於最表層之引線框架上,放置每2mm切斷之厚度0.2mm的Bi-Sn-Cu之片,於其上以濺鍍面與上述片相對之方式放置SiC晶片並於甲酸(分壓40mmHg)之環境中進行加熱,使引線框架與SiC晶片接合。測量其接合強度。 Each 2 mm SiC wafer was prepared, and a Ni layer (thickness: 1 μm) and an Au layer (thickness: 0.05 μm) were sequentially formed on one surface by sputtering. A Ni layer (thickness: 1 μm) was formed on the underlayer by electroplating, and an Au layer (thickness: 0.05 μm) was formed on the lead frame of the outermost layer, and a Bi-Sn-Cu piece having a thickness of 0.2 mm cut every 2 mm was placed. The SiC wafer was placed on the sputtering surface opposite to the above-mentioned sheet, and heated in an environment of formic acid (partial pressure 40 mmHg) to bond the lead frame to the SiC wafer. The joint strength was measured.

接合強度係依據MIL STD-883G進行測量。安裝於負載感測器之工具下降至基板面,裝置檢測基板面並停止下降,工具自檢測之基板面上升至設定之高度,利用工具按壓接合部而測量破壞時之負載。 Bonding strength was measured in accordance with MIL STD-883G. The tool attached to the load sensor is lowered to the substrate surface, the device detects the substrate surface and stops falling, the tool rises from the detected substrate surface to the set height, and the tool is pressed by the joint to measure the load at the time of the damage.

<測量條件> <Measurement conditions>

裝置:dage公司製造之dage series 4000 Device: dage series 4000 manufactured by dage

方法:晶片剪切強度測試 Method: Wafer Shear Strength Test

測試速度:100μm/s Test speed: 100μm/s

測試高度:20.0μm Test height: 20.0μm

工具移動量:4mm(試片2mm) Tool movement amount: 4mm (test piece 2mm)

(實施例2~11) (Examples 2 to 11)

藉由與實施例1相同之順序,稱量特定量之Bi、Cu、Sn,藉由真空熔解而熔製鑄錠,利用螢光X射線求出鑄錠之各成分,加工為片狀,利用示差掃描熱量測量對固相線溫度及液相線溫度進行測量,進而測量接合強度。將該等結果彙總示於表1。 In the same procedure as in the first embodiment, a specific amount of Bi, Cu, and Sn were weighed, and the ingot was melted by vacuum melting, and each component of the ingot was obtained by fluorescent X-ray, and processed into a sheet shape. The differential scanning calorimetry measures the solidus temperature and the liquidus temperature to measure the joint strength. These results are summarized in Table 1.

(例2) (Example 2)

(比較例1~5) (Comparative examples 1 to 5)

藉由與實施例1相同之順序,稱量特定量之Bi、Cu、Sn,藉由真空熔解而熔製鑄錠,利用螢光X射線求出鑄錠之各成分,加工為片狀,利用示差掃描熱量測量對固相線溫度及液相線溫度進行測量,進而測量接合強度。將該等結果彙總示於表1。 In the same procedure as in the first embodiment, a specific amount of Bi, Cu, and Sn were weighed, and the ingot was melted by vacuum melting, and each component of the ingot was obtained by fluorescent X-ray, and processed into a sheet shape. The differential scanning calorimetry measures the solidus temperature and the liquidus temperature to measure the joint strength. These results are summarized in Table 1.

(例3) (Example 3)

(參考例1) (Reference example 1)

藉由與實施例1相同之順序真空熔解Pb、Sn之合金,獲得厚度0.2mm之片。使用該片,使SiC晶片與引線框架接合,測量接合強度。 The alloy of Pb and Sn was vacuum-melted in the same manner as in Example 1 to obtain a sheet having a thickness of 0.2 mm. Using this sheet, the SiC wafer was bonded to the lead frame, and the joint strength was measured.

(參考例2) (Reference example 2)

藉由與實施例1相同之順序真空熔解Sn、Ag、Cu之合金(SAC合金),獲得厚度0.2mm之片。使用該片,使SiC晶片與引線框架接合,測量接合 強度。 An alloy of Sn, Ag, and Cu (SAC alloy) was vacuum-melted in the same manner as in Example 1 to obtain a sheet having a thickness of 0.2 mm. Using the sheet, the SiC wafer is bonded to the lead frame, and the joint is measured. strength.

於表1中示出本發明之實施例的組成之接合強度、比較例及參考例的組成及接合強度。藉此,可知與參考例1之鉛焊料相比,為具有大致同等之接合強度的無鉛焊料。進而,與參考例2之SAC合金相比,亦具有同等之接合強度,關於實施例1~11,目標固相液相溫度差為25℃以下,接合強度亦為目標值10MPa以上。關於比較例1~3,雖固相液相溫度差滿足目標值,但接合強度不滿足目標值。若觀察參考例1、2及實施例1~11,則可知實施例1~11之焊料組成亦可適合作為現行之功率裝置之代替。又,根據實施例7、實施例8之對比,可知即便為相同之Cu量,於Sn較少之情形時,有PR變小之傾向。進而,根據實施例10、11,可知即便為相同之Sn量,於Cu較多之情形時,有PR變小之傾向。另一方面,於比較例4、5中,PR非常大。 Table 1 shows the bonding strength of the composition of the examples of the present invention, the composition of the comparative example and the reference example, and the bonding strength. As a result, it was found that the lead solder of the reference example 1 was a lead-free solder having substantially the same bonding strength. Further, compared with the SAC alloy of Reference Example 2, the joint strength was also the same. With respect to Examples 1 to 11, the target solid phase liquid phase temperature difference was 25 ° C or less, and the joint strength was also the target value of 10 MPa or more. In Comparative Examples 1 to 3, although the solid phase liquid phase temperature difference satisfies the target value, the joint strength does not satisfy the target value. When the reference examples 1 and 2 and the examples 1 to 11 are observed, it is understood that the solder compositions of the examples 1 to 11 can also be suitably used as a substitute for the current power device. Further, according to the comparison between Example 7 and Example 8, it is understood that even if the amount of Cu is the same, when PR is small, PR tends to be small. Further, according to the tenth and eleventh examples, it is understood that even if the amount of Sn is the same, when the amount of Cu is large, the PR tends to be small. On the other hand, in Comparative Examples 4 and 5, the PR was very large.

[產業上之可利用性] [Industrial availability]

本發明提供一種不添加且不含有鉛,於高溫溫度區域亦具有優異之特性的焊料合金。本發明為產業上有用之發明。 The present invention provides a solder alloy which does not contain and does not contain lead and which has excellent characteristics in a high temperature region. The present invention is an industrially useful invention.

Claims (14)

一種焊料合金,其含有Sn、Bi及Cu,Sn為0.05~1.50質量%,Cu為0.03~3.2質量%,剩餘部分為Bi及不可避免之雜質,固相線溫度為250℃以上,液相線溫度為275℃以下,下式:[液相線溫度]一[固相線溫度]之值為25℃以下。 A solder alloy containing Sn, Bi and Cu, Sn of 0.05 to 1.50 mass%, Cu of 0.03 to 3.2 mass%, remainder of Bi and unavoidable impurities, solidus temperature of 250 ° C or more, liquidus The temperature is 275 ° C or less, and the following formula: [liquidus temperature] - [solidus temperature] has a value of 25 ° C or less. 如申請專利範圍第1項之焊料合金,其中,Bi為95.3~99.92質量%。 For example, in the solder alloy of claim 1, wherein Bi is 95.3 to 99.92% by mass. 如申請專利範圍第1至2項中任一項之焊料合金,其中,Sn為0.05~1.0質量%。 The solder alloy according to any one of claims 1 to 2, wherein Sn is 0.05 to 1.0% by mass. 如申請專利範圍第1至2項中任一項之焊料合金,其中,Cu為1.0~3.2質量%。 The solder alloy according to any one of claims 1 to 2, wherein Cu is 1.0 to 3.2% by mass. 如申請專利範圍第1至2項中任一項之焊料合金,其中,焊料合金之形狀為粉狀、球狀或片狀。 The solder alloy according to any one of claims 1 to 2, wherein the shape of the solder alloy is a powder, a sphere or a sheet. 如申請專利範圍第1至2項中任一項之焊料合金,其接合強度為10MPa以上。 The solder alloy according to any one of claims 1 to 2, which has a bonding strength of 10 MPa or more. 一種電子零件之內部接合焊接接頭,係以申請專利範圍第1至5項中任一項之焊料合金焊接而成。 An internal joint welded joint of an electronic component obtained by welding a solder alloy according to any one of claims 1 to 5. 一種功率電晶體之焊料接頭,係以申請專利範圍第1至5項中任一項之焊料合金焊接而成。 A solder joint of a power transistor is soldered to a solder alloy according to any one of claims 1 to 5. 一種印刷電路板,具有申請專利範圍第1至5項中任一項之焊料合金。 A printed circuit board having the solder alloy of any one of claims 1 to 5. 一種電子零件,具有申請專利範圍第1至5項中任一項之焊料合金。 An electronic component having the solder alloy of any one of claims 1 to 5. 一種功率電晶體,具有申請專利範圍第1至5項中任一項之焊料合金。 A power transistor having the solder alloy of any one of claims 1 to 5. 一種電子機器,具有申請專利範圍第7或8項之焊料接頭,或申請專利範圍第9項之印刷電路板,或申請專利範圍第10項之電子零件,或申請專利範圍第11項之功率電晶體。 An electronic machine having a solder joint of claim 7 or 8 or a printed circuit board of claim 9 or an electronic component of claim 10 or a power supply of claim 11 Crystal. 一種功率裝置,具有申請專利範圍第7或8項之焊料接頭。 A power device having a solder joint of claim 7 or 8. 一種構件,以申請專利範圍第1至5項中任一項之焊料合金作為材料。 A member using the solder alloy of any one of claims 1 to 5 as a material.
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TW200732082A (en) * 2005-11-11 2007-09-01 Senju Metal Industry Co Soldering paste and solder joints
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