TWI643688B - Fluid-controlled wire tension mechanism - Google Patents

Fluid-controlled wire tension mechanism Download PDF

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Publication number
TWI643688B
TWI643688B TW107111264A TW107111264A TWI643688B TW I643688 B TWI643688 B TW I643688B TW 107111264 A TW107111264 A TW 107111264A TW 107111264 A TW107111264 A TW 107111264A TW I643688 B TWI643688 B TW I643688B
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Taiwan
Prior art keywords
fluid
closed container
wire
control mechanism
pressure
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Application number
TW107111264A
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Chinese (zh)
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TW201941851A (en
Inventor
Shun Tong Chen
陳順同
Ying Dan Chen
陳櫻丹
Jia Jin Zhong
鐘加晉
Yen Chia Chang
張晏嘉
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National Taiwan Normal University
國立臺灣師範大學
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Priority to TW107111264A priority Critical patent/TWI643688B/en
Priority to US16/131,602 priority patent/US20190300324A1/en
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Publication of TWI643688B publication Critical patent/TWI643688B/en
Publication of TW201941851A publication Critical patent/TW201941851A/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H59/00Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators
    • B65H59/02Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by regulating delivery of material from supply package
    • B65H59/04Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by regulating delivery of material from supply package by devices acting on package or support
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H59/00Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators
    • B65H59/38Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by regulating speed of driving mechanism of unwinding, paying-out, forwarding, winding, or depositing devices, e.g. automatically in response to variations in tension
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H59/00Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators
    • B65H59/38Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by regulating speed of driving mechanism of unwinding, paying-out, forwarding, winding, or depositing devices, e.g. automatically in response to variations in tension
    • B65H59/381Adjusting or controlling tension in filamentary material, e.g. for preventing snarling; Applications of tension indicators by regulating speed of driving mechanism of unwinding, paying-out, forwarding, winding, or depositing devices, e.g. automatically in response to variations in tension using pneumatic or hydraulic means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2406/00Means using fluid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H2701/00Handled material; Storage means
    • B65H2701/30Handled filamentary material
    • B65H2701/36Wires

Abstract

本發明提出一種流體式線張力控制機構,包含有一密閉容器、一控制閥、以及一送線軸。密閉容器具有一容置空間。控制閥耦接密閉容器,用以控制容置空間內之一流體壓力。送線軸耦接密閉容器,具有一受壓部以及一線圈部。受壓部容置於容置空間中,線圈部位於密閉容器外,用以送出一切割線。其中,一流體藉由控制閥進入容置空間並且施壓於受壓部。本發明利用流體壓力對送出切割線的送線軸產生旋轉阻抗,藉此零件不易磨損,線張力易於被控制且切割線的川流能長時間保持穩定。因此,應用本發明的放電加工技術,切割的效果與形狀也更精密。 The invention provides a fluid-type wire tension control mechanism, which includes a closed container, a control valve, and a wire feeding shaft. The closed container has a receiving space. The control valve is coupled to the closed container and is used to control a fluid pressure in the accommodating space. The spool is coupled to the closed container and has a pressure receiving portion and a coil portion. The pressure part is contained in the accommodating space, and the coil part is located outside the closed container for sending out a cutting line. Among them, a fluid enters the accommodating space through the control valve and presses the pressured portion. The invention uses the fluid pressure to generate a rotation resistance to the wire feeding shaft that sends out the cutting wire, thereby the parts are not easy to wear, the wire tension is easy to be controlled, and the stream of the cutting wire can remain stable for a long time. Therefore, by applying the electric discharge machining technology of the present invention, the cutting effect and shape are more precise.

Description

流體式線張力控制機構 Fluid type wire tension control mechanism

本發明提供一種線張力控制機構,並且特別地,關於一種利用流體壓力控制放電切割線之張力之非接觸式控制機構。 The invention provides a thread tension control mechanism, and in particular, relates to a non-contact control mechanism for controlling the tension of a discharge cutting wire by using fluid pressure.

近年來,隨著半導體、電子與機械等技術的進步,大多製品都朝向微小與精緻化方發展。尤其是兩兆雙星的產業,更是走向精微化方向發展。工業界對於輕、薄、短、小的元件製作,如精微模具、治具、刀具、工具、夾具或探針量等之需求極大。製造的材料也漸多為難切削之材料,如:鎢、氮化硼、聚晶鑽石、單晶鑽石等。上述之需求,都可以被線切割放電加工技術解決。線切割放電加工技術市場之大,顯而易見。 In recent years, with the advancement of semiconductor, electronics, and machinery technologies, most products have been developed towards small and refined aspects. In particular, the industry of two trillion double stars is developing in the direction of miniaturization. The industry has a great demand for the production of light, thin, short and small components, such as micro molds, jigs, tools, tools, fixtures or probes. The materials made are also increasingly difficult to cut, such as: tungsten, boron nitride, polycrystalline diamond, single crystal diamond, etc. All the above requirements can be solved by wire cutting EDM technology. The market for wire cutting EDM technology is obvious.

在線切割放電加工技術中,線張力是相當重要影響因素。線張力控制結構切割的精密性,影響加工精準度及判別線極是否斷裂。目前,產業對於其線張力的控制,多採用煞車組方式進行控制。但剎車組方式很難進行微小調整與控制。再者,以煞車組方式中,剎車組與放電線極需要直接接觸。受材料摩擦係數影響,切割線的線張力也很難被穩定控制。 In wire cutting EDM technology, wire tension is a very important factor. The cutting precision of the wire tension control structure affects the processing accuracy and judges whether the wire pole is broken. At present, the industry uses brakes to control its line tension. However, it is difficult to make small adjustments and controls in the brake group mode. Moreover, in the brake group mode, the brake group and the discharge line need to be in direct contact. Affected by the material friction coefficient, the line tension of the cutting line is difficult to be stably controlled.

使用永久性磁鐵取代煞車組,是一種非接觸式的控制方式。此方法之永久性磁鐵與線極之間的距離被調變,以控制線張力的大小。距離的調變範圍有其限度,同時線極的線張力亦無法準確的被調控。再者, 若需要同時使用多條線電極以達高效率切割時,具有陣列排列的線電極亦難以進行多個線張力的調整。並且,永久性磁鐵控制線張力時,磁滯現象易發生,使線的川流變得很不穩定。 Using permanent magnets instead of brakes is a non-contact control method. In this method, the distance between the permanent magnet and the wire pole is adjusted to control the amount of wire tension. The modulation range of the distance has its limits, and at the same time, the line tension of the poles cannot be accurately adjusted. Furthermore, If multiple wire electrodes need to be used at the same time to achieve high-efficiency cutting, it is difficult to adjust multiple wire tensions for the wire electrodes with an array arrangement. In addition, when the permanent magnet controls the tension of the wire, the hysteresis easily occurs, and the stream of the wire becomes very unstable.

因此,業界亟需一種新的張力控制裝置,取代煞車組式或是永久性磁鐵式的控制裝置。 Therefore, the industry urgently needs a new tension control device to replace the brake group or permanent magnet type control device.

有鑑於此,本發明提出了一種流體式線張力控制機構,利用流體對送出切割線的送線軸施加壓力,使送線軸產生旋轉阻抗。在收線軸定速收線的條件下,線張力可視流體對送線軸施加壓力的大小來決定,進而獲得適當之張力。 In view of this, the present invention proposes a fluid-type wire tension control mechanism, which uses a fluid to apply pressure to a wire feeding shaft that sends out a cutting wire, so that the wire feeding shaft generates a rotation resistance. Under the condition that the take-up shaft is taken up at a fixed speed, the thread tension can be determined by the pressure exerted by the fluid on the take-up shaft, and then the appropriate tension can be obtained.

本發明流體式線張力控制機構用以調整一流體所產生的一流體壓力以控制一切割線的張力,包含有一密閉容器、一控制閥、以及一送線軸。密閉容器具有一容置空間以容置流體。控制閥耦接密閉容器,用以控制容置空間內流體所產生之流體壓力。送線軸穿設於密閉容器,送線軸包含有一受壓部及一線圈部,該線圈部與該受壓部連動。受壓部容置於該容置空間中,線圈部位於密閉容器外並送出該切割線。其中,切割線的張力係由回應施加於受壓部的流體壓力之一流體阻尼力所控制。 The fluid-type thread tension control mechanism of the present invention is used to adjust a fluid pressure generated by a fluid to control the tension of a cutting line, and includes a closed container, a control valve, and a spool. The closed container has a containing space for containing a fluid. The control valve is coupled to the closed container and is used to control the fluid pressure generated by the fluid in the accommodating space. The spool is threaded through the closed container. The spool includes a pressure receiving portion and a coil portion, and the coil portion is linked with the pressure receiving portion. The pressure-receiving portion is accommodated in the accommodating space, and the coil portion is located outside the closed container and sends out the cutting line. The tension of the cutting line is controlled by a fluid damping force in response to a fluid pressure applied to the pressure receiving portion.

於一具體實施例中,流體係為液體或是氣體,且切割線係為一金屬線。 In a specific embodiment, the flow system is liquid or gas, and the cutting line is a metal line.

再者,線圈部耦接該切割線,線圈部連動於受壓部,用以讓切割線耦接或纏繞於上。 Furthermore, the coil part is coupled to the cutting wire, and the coil part is linked to the pressure receiving part for coupling or winding the cutting wire.

並且,線圈部係以可拆卸方式嵌合該受壓部。 The coil portion is detachably fitted into the pressure receiving portion.

於一具體實施例中,密閉容器進一步包含有一導流孔、一軸承、一密封蓋、一O型環以及一密封杯。導流孔用以讓流體進入容置空間。密封杯具有導流孔,且密封蓋和密封杯藉由O型環密封以形成容置空間。送線軸藉由軸承耦接於密封蓋上。 In a specific embodiment, the closed container further includes a flow guide hole, a bearing, a sealing cap, an O-ring, and a sealing cup. The diversion hole is used for allowing fluid to enter the accommodating space. The sealing cup has a flow guide hole, and the sealing cover and the sealing cup are sealed by an O-ring to form an accommodation space. The wire feeding shaft is coupled to the sealing cover through a bearing.

於一具體實施例中,流體式線張力控制機構進一步包含有一圓盤設置於送線軸之受壓部,圓盤用以承受流體施加之壓力。 In a specific embodiment, the fluid-type wire tension control mechanism further includes a disc disposed on the pressure receiving portion of the wire feeding shaft, and the disc is used to withstand the pressure applied by the fluid.

並且,流體式線張力控制機構進一步包含有一收線軸,用以接收送線軸之線圈部送出之切割線。 In addition, the fluid type thread tension control mechanism further includes a take-up shaft for receiving the cutting wire sent from the coil portion of the delivery shaft.

其中,送線軸用以控制該切割線之張力,且該收線軸用以控制該切割線之移動速率。 Among them, the feeding shaft is used to control the tension of the cutting line, and the winding shaft is used to control the moving speed of the cutting line.

於一具體實施例中,流體式線張力控制機構進一步包含有複數個送線軸。複數個送線軸形成一陣列且互相平行,且複數個送線軸可分別送出並控制切割線之張力。 In a specific embodiment, the fluid-type wire tension control mechanism further includes a plurality of wire feeding shafts. The plurality of thread feeding shafts form an array and are parallel to each other, and the plurality of thread feeding shafts can respectively send out and control the tension of the cutting line.

其中,控制閥可以控制容置空間內之該流體總量、流體進入容置空間的單位時間流入量、流體進入容置空間的流入壓力、或容置空間內的容積。 The control valve can control the total amount of the fluid in the accommodating space, the inflow amount of fluid per unit time into the accommodating space, the inflow pressure of the fluid into the accommodating space, or the volume in the accommodating space.

綜上所述,本發明利用流體對送出切割線的送線軸施加壓力,使送線軸產生旋轉阻抗。在收線軸定速收線的條件下,送線軸受到與送線方向相反的流體阻尼力。流體壓力越大,送線軸產生的阻尼效果越明顯。因此,當流體壓力增加時,切割線的張力值變大,切割線的筆直度也隨之變高。由於流體壓力不直接作用於切割線上,使切割線能保持穩定的川流,且線張力易於被掌握與控制。由於本發明並非使用固體接觸式摩擦 的方式產生阻力,線張力控制機構較不易有零件磨損之問題。因此,本發明流體式線張力控制機構能夠長時間維持切割線的穩定傳送,切割的形狀也更精密。 In summary, the present invention uses a fluid to apply pressure to a feeding shaft that sends out a cutting wire, so that the feeding shaft generates a rotational resistance. Under the condition that the take-up shaft takes up at a fixed speed, the take-up shaft is subject to a fluid damping force opposite to the direction of the take-up. The greater the fluid pressure, the more obvious the damping effect produced by the spool. Therefore, as the fluid pressure increases, the tension value of the cutting line becomes larger, and the straightness of the cutting line becomes higher accordingly. Because the fluid pressure does not directly act on the cutting line, the cutting line can maintain a stable stream, and the line tension is easy to grasp and control. Since the present invention does not use solid contact friction This method generates resistance, and the thread tension control mechanism is less prone to the problem of part wear. Therefore, the fluid thread tension control mechanism of the present invention can maintain stable transmission of the cutting line for a long time, and the shape of the cut is more precise.

1‧‧‧流體式線張力控制機構 1‧‧‧fluid wire tension control mechanism

10‧‧‧密閉容器 10‧‧‧ airtight container

11‧‧‧送線軸 11‧‧‧ send spool

15‧‧‧控制閥 15‧‧‧Control Valve

16‧‧‧收線軸 16‧‧‧ take-up spool

100‧‧‧容置空間 100‧‧‧ accommodation space

104‧‧‧油封 104‧‧‧oil seal

103‧‧‧軸承 103‧‧‧bearing

106‧‧‧導流孔 106‧‧‧ Diversion holes

107‧‧‧密封蓋 107‧‧‧Sealing cover

108‧‧‧密封杯 108‧‧‧Sealed Cup

109‧‧‧O型環 109‧‧‧O-ring

110‧‧‧受壓部 110‧‧‧Pressed section

111‧‧‧傳動軸 111‧‧‧Drive shaft

116‧‧‧線圈部 116‧‧‧Coil Department

6‧‧‧切割線 6‧‧‧ cutting line

A‧‧‧總表面積 A‧‧‧total surface area

A1‧‧‧第一面積 A1‧‧‧first area

A2‧‧‧第二面積 A2‧‧‧Second Area

A3‧‧‧第三面積 A3‧‧‧ Third Area

Rs1‧‧‧圓盤半徑 R s1 ‧‧‧disk radius

Rs2‧‧‧傳動軸半徑 R s2 ‧‧‧ Radius of transmission shaft

ts‧‧‧厚度 t s ‧‧‧ thickness

圖1係繪示根據本發明一具體實施例之流體式線張力控制機構之透視圖。 FIG. 1 is a perspective view illustrating a fluid type thread tension control mechanism according to an embodiment of the present invention.

圖2係繪示根據本發明一具體實施例之流體式線張力控制機構之示意圖。 FIG. 2 is a schematic diagram of a fluid type thread tension control mechanism according to a specific embodiment of the present invention.

圖3係繪示根據本發明一具體實施例之送線軸示意圖。 FIG. 3 is a schematic diagram of a bobbin according to a specific embodiment of the present invention.

圖4係繪示根據本發明一具體實施例之送線軸之另一角度示意圖。 FIG. 4 is a schematic diagram showing another angle of a spool according to a specific embodiment of the present invention.

圖5A係從遠離傳動軸之一端看向受壓部之平視圖。 FIG. 5A is a plan view of the pressure receiving portion as viewed from one end away from the transmission shaft.

圖5B係從傳動軸端看向受壓部之平視圖。 Fig. 5B is a plan view of the pressure receiving portion viewed from the end of the transmission shaft.

圖6係繪示根據本發明另一具體實施例之流體式線張力控制機構之示意圖。 FIG. 6 is a schematic diagram of a fluid type thread tension control mechanism according to another embodiment of the present invention.

為了讓本發明的優點,精神與特徵可以更容易且明確地了解,後續將以實施例並參照所附圖式進行詳述與討論。值得注意的是,這些實施例僅為本發明代表性的實施例,其中所舉例的特定方法,裝置,條件,材質等並非用以限定本發明或對應的實施例。 In order to make the advantages, spirits and features of the present invention easier and clearer, it will be detailed and discussed in the following with reference to the embodiments and the accompanying drawings. It is worth noting that these embodiments are only representative embodiments of the present invention, and the specific methods, devices, conditions, materials, etc. illustrated therein are not intended to limit the present invention or corresponding embodiments.

在本發明的描述中,需要理解的是,術語“縱向、橫向、上、下、前、後、左、右、頂、底、內、外”等指示的方位或位置關係為基於附圖所示的方位或位置關係,僅是為了便於描述本發明和簡化描述,而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作,因此不能理解為對本發明的限制。 In the description of the present invention, it should be understood that the orientation or position relationship indicated by the terms "vertical, horizontal, top, bottom, front, back, left, right, top, bottom, inside, outside" and the like is based on the drawings. The orientations or position relationships shown are only for the convenience of describing the present invention and simplify the description, and do not indicate or imply that the device or element referred to must have a specific orientation, structure and operation in a specific orientation, so it cannot be understood as limit.

此外,本發明裝置或元件前的不定冠詞“一”、“一種”和“一個”對裝置或元件的數量要求(即出現次數)無限制性。因此“一”應被解讀為包括一或至少一,並且單數形式的裝置或元件也包括複數形式,除非所述數量明顯指單數形式。 In addition, the indefinite articles "a", "an", and "an" before the device or element of the present invention do not limit the number of devices or elements (ie, the number of occurrences). Thus, "a" should be read as including one or at least one, and a device or element in the singular also includes the plural unless the number clearly refers to the singular.

請參閱圖1及圖2。圖1係繪示根據本發明一具體實施例之流體式線張力控制機構1透視圖。圖2係繪示根據本發明一具體實施例之流體式線張力控制機構1示意圖。本發明流體式線張力控制機構1用以調整一流體所產生的一流體壓力以控制一切割線6的張力,包含有一密閉容器10、一控制閥15、以及一送線軸11。密閉容器10具有一容置空間100以容置流體。控制閥15耦接密閉容器10,用以控制容置空間100內流體所產生之流體壓力。送線軸11穿設於密閉容器10,送線軸11包含有一受壓部110及一線圈部116,受壓部110與線圈部116連動。受壓部110容置於該容置空間100中,線圈部116位於密閉容器10外並送出該切割線6。其中,切割線6的張力係由回應施加於受壓部110的流體壓力之一流體阻尼力所控制。 Please refer to FIG. 1 and FIG. 2. FIG. 1 is a perspective view of a fluid type thread tension control mechanism 1 according to an embodiment of the present invention. FIG. 2 is a schematic diagram of a fluid type thread tension control mechanism 1 according to a specific embodiment of the present invention. The fluid-type wire tension control mechanism 1 of the present invention is used to adjust a fluid pressure generated by a fluid to control the tension of a cutting wire 6, and includes a closed container 10, a control valve 15, and a spool 11. The closed container 10 has a containing space 100 for containing a fluid. The control valve 15 is coupled to the closed container 10 to control a fluid pressure generated by the fluid in the accommodating space 100. The bobbin 11 is threaded through the closed container 10. The bobbin 11 includes a pressure receiving portion 110 and a coil portion 116. The pressure receiving portion 110 is linked with the coil portion 116. The pressure receiving portion 110 is accommodated in the accommodating space 100, and the coil portion 116 is located outside the closed container 10 and sends out the cutting line 6. The tension of the cutting line 6 is controlled by a fluid damping force in response to a fluid pressure applied to the pressure receiving portion 110.

流體進入容置空間100後會在容置空間100內產生流體壓力,此時容置空間100內的受壓部110會承受所述之流體壓力。當線圈部116因為送出切割線6而旋轉時,將同步帶動受壓部110旋轉。由於受壓部110於旋轉時會受到流體壓力所造成的旋轉阻抗影響,而帶動送線軸11另外一端的線圈部116趨向減緩轉速,進而產生了反向於送出切割線6方向的拉力。最終,因為切割線6移動速度不變,導致切割線6的張力變大。 After the fluid enters the accommodating space 100, a fluid pressure is generated in the accommodating space 100. At this time, the pressure receiving part 110 in the accommodating space 100 will bear the fluid pressure. When the coil portion 116 is rotated by sending out the cutting line 6, the pressure receiving portion 110 is rotated synchronously. Because the pressure receiving portion 110 is affected by the rotation resistance caused by the fluid pressure when rotating, the coil portion 116 that drives the other end of the spool 11 tends to slow down the rotation speed, thereby generating a tensile force opposite to the direction of the cutting line 6 being sent out. Finally, because the cutting wire 6 moves at a constant speed, the tension of the cutting wire 6 increases.

當調整控制閥15使容置空間100內的流體壓力提高時,受壓部110所承受的流體壓力和旋轉阻抗將變大,使施加在線圈部的拉力變強, 因此使切割線6的張力提高。反之,當調整控制閥15使容置空間100內的流體壓力降低時,切割線6的張力也隨之減小。於一實施例中,控制閥15控制容置空間100內的流體壓力大小的方式可以為持續送入流體進入容置空間。此時密閉容器10可另有一流體出口讓流體流出,進而調整密閉容器內的流體壓力,且流體出口亦可具有調節作用。而於另一實施例中,控制閥15透過一加壓裝置使容置空間100壓力增加。 When the control valve 15 is adjusted to increase the fluid pressure in the accommodating space 100, the fluid pressure and rotation resistance received by the pressure receiving portion 110 will increase, and the tensile force applied to the coil portion will become stronger. Therefore, the tension of the cutting wire 6 is increased. Conversely, when the control valve 15 is adjusted to reduce the fluid pressure in the accommodating space 100, the tension of the cutting wire 6 is also reduced accordingly. In one embodiment, the manner in which the control valve 15 controls the pressure of the fluid in the accommodating space 100 may be to continuously feed fluid into the accommodating space. At this time, the sealed container 10 may have another fluid outlet to allow the fluid to flow out, thereby adjusting the pressure of the fluid in the sealed container, and the fluid outlet may also have a regulating effect. In another embodiment, the control valve 15 increases the pressure of the accommodation space 100 through a pressure device.

然本發明不限於此,控制閥15之目的為控制容置空間100內的流體壓力。凡能達成此目的之控制閥15之途徑,例如控制容置空間內之該流體總量、流體進入容置空間的單位時間流入量、流體進入容置空間的流入壓力、容置空間內的容積,或是同時達成上述多種功能之控制閥15,皆在本發明之範疇之內。 However, the present invention is not limited to this. The purpose of the control valve 15 is to control the pressure of the fluid in the accommodation space 100. Any way to control the valve 15 for this purpose, such as controlling the total amount of the fluid in the containing space, the unit time inflow of fluid into the containing space, the inflow pressure of the fluid into the containing space, and the volume in the containing space Or, the control valve 15 which simultaneously achieves the above multiple functions is within the scope of the present invention.

於一具體實施例中,流體係為液體、凝膠態或是氣體,且切割線6係為一金屬線。液體可以是水。液體中亦可添加有固態物質或氣態物質,以增加或減少流體阻尼常數。固態物質可以係泥沙或粉塵。凝膠態流體可以是糨糊。氣體可以是空氣,金屬線係包含有銅線、鋅線等常見的線切割加工用之線材。 In a specific embodiment, the flow system is liquid, gel, or gas, and the cutting line 6 is a metal line. The liquid can be water. A solid or gaseous substance can also be added to the liquid to increase or decrease the fluid damping constant. Solid matter can be silt or dust. The gel state fluid may be a paste. The gas can be air, and the metal wire system includes common wire cutting wires such as copper wire and zinc wire.

再者,線圈部116可以視為一線筒纏繞有足量之金屬線,藉此使加工所使用之切割線6皆來自於線圈部116。並且,線圈部116係以可拆卸方式嵌合該受壓部110。當線圈部116送盡切割線6時,線圈部116可以被拆下以更換新的線圈部116。或是,一供線裝置與線圈部116協同作用,供線裝置送出之金屬線貼附或纏繞於線圈部116,此時送線軸11可視為一遞送金屬線並因為流體壓力產生阻力的元件。 In addition, the coil portion 116 can be regarded as a bobbin wound with a sufficient amount of metal wires, so that the cutting wires 6 used for processing all come from the coil portion 116. The coil portion 116 is detachably fitted into the pressure receiving portion 110. When the coil section 116 runs out of the cutting wire 6, the coil section 116 may be removed to replace the coil section 116 with a new one. Alternatively, a wire supply device cooperates with the coil portion 116, and the metal wire sent out by the wire supply device is affixed or wound around the coil portion 116. At this time, the spool 11 can be regarded as a component that delivers the metal wire and generates resistance due to fluid pressure.

於一具體實施例中,密閉容器10進一步包含有一導流孔106以及一密封蓋107。導流孔106用以讓流體進入容置空間100。於一具體實施例中,控制閥15可以耦合導流孔106上或對應於導流孔106外側而設置,便於控制流體進入密閉容器10之流量和密閉容器10內之流體壓力。於另一具體實施例中,導流孔106外另耦接有一閥門以調整流體進出密閉容器10之流量,控制閥15用以控制密閉容器10內之流體壓力。 In a specific embodiment, the closed container 10 further includes a flow guiding hole 106 and a sealing cover 107. The diversion holes 106 are used for allowing fluid to enter the accommodating space 100. In a specific embodiment, the control valve 15 may be disposed on the diversion hole 106 or corresponding to the outside of the diversion hole 106 to facilitate controlling the flow of fluid into the closed container 10 and the pressure of the fluid in the closed container 10. In another embodiment, a valve is coupled to the outside of the diversion hole 106 to adjust the flow rate of the fluid in and out of the closed container 10, and the control valve 15 is used to control the pressure of the fluid in the closed container 10.

此外,密閉容器10可包含有一軸承103,且送線軸11藉由軸承103耦接於密封蓋107上。線圈部116與受壓部110分別地位於被密封蓋107和軸承103隔開之兩側,並且使密閉容器10外之線圈部116不會直接承受到密閉容器10內的流體壓力。再者,由於線圈部116位於密閉容器10之外,因此送線軸11之線圈部116可便於被更換,或線圈部116上的切割線直接被更換。再者,密閉容器10可包含有一油封104。油封104耦接於密封蓋107上,且環繞送線軸11。油封104用以防止流體經由送線軸11和軸承103與密封蓋107上的嵌合處進入或逸出容置空間100。 In addition, the sealed container 10 may include a bearing 103, and the spool 11 is coupled to the sealing cover 107 through the bearing 103. The coil portion 116 and the pressure-receiving portion 110 are respectively located on both sides separated by the sealing cover 107 and the bearing 103, and the coil portion 116 outside the sealed container 10 is not directly subjected to the fluid pressure in the sealed container 10. Furthermore, since the coil portion 116 is located outside the closed container 10, the coil portion 116 of the spool 11 can be easily replaced, or the cutting wire on the coil portion 116 can be directly replaced. Furthermore, the closed container 10 may include an oil seal 104. The oil seal 104 is coupled to the sealing cover 107 and surrounds the spool 11. The oil seal 104 is used to prevent the fluid from entering or escaping from the accommodation space 100 via the joint between the spool 11 and the bearing 103 and the sealing cover 107.

再者,密閉容器10進一步包含有一O型環109以及一密封杯108。密封杯108上具有所述之導流孔106,且密封蓋107和密封杯108藉由O型環109密封以形成所述之容置空間100。密封杯108與密封蓋107亦以可拆卸之方式結合,因此可以更換容置空間100中受壓部110之組件。更進一步地,由於密封杯108與密封蓋107以可拆卸的方式結合,密封杯108內可以增添其它元件,或是更換成不同內裝的密封杯108以產生不同幾何形狀的容置空間。於一實施例中,容置空間100的幾何形狀大小亦可藉由控制閥15所控制。進一步地,控制閥15的一部分或全部可位於容置空間100中,藉以調整 容置空間100的幾何形狀大小。 Furthermore, the closed container 10 further includes an O-ring 109 and a sealed cup 108. The sealing cup 108 has the above-mentioned guide hole 106, and the sealing cover 107 and the sealing cup 108 are sealed by an O-ring 109 to form the accommodating space 100. The sealing cup 108 and the sealing cover 107 are also detachably combined, so the components of the pressure receiving part 110 in the accommodation space 100 can be replaced. Furthermore, since the sealing cup 108 and the sealing cover 107 are detachably combined, other components can be added to the sealing cup 108 or replaced with different built-in sealing cups 108 to generate accommodation spaces with different geometries. In one embodiment, the geometry of the accommodating space 100 can also be controlled by the control valve 15. Further, a part or all of the control valve 15 may be located in the accommodation space 100 to adjust The size of the geometric shape of the accommodation space 100.

請參閱圖3、圖4、圖5A及圖5B。圖3係繪示根據本發明一具體實施例之送線軸11示意圖。圖4係繪示根據本發明一具體實施例之送線軸11之另一角度示意圖。圖5A係從遠離傳動軸111之一端看向受壓部110之平視圖。圖5B係從傳動軸111端看向受壓部110之平視圖。於一具體實施例中,受壓部110可以為圓盤型。於另一具體實施例中,流體式線張力控制機構1進一步包含有一圓盤設置於送線軸11之受壓部110,圓盤用以承受流體施加之壓力。圓盤的面積越大,承受的阻尼力越大。送線軸11之受壓部110與線圈部116係藉由一傳動軸111所連接與傳動。 Please refer to FIGS. 3, 4, 5A and 5B. FIG. 3 is a schematic diagram of a spool 11 according to a specific embodiment of the present invention. FIG. 4 is a schematic diagram showing another angle of the spool 11 according to a specific embodiment of the present invention. FIG. 5A is a plan view of the pressure receiving portion 110 as viewed from one end remote from the transmission shaft 111. FIG. 5B is a plan view of the pressure receiving portion 110 as viewed from the end of the transmission shaft 111. In a specific embodiment, the pressure receiving portion 110 may be a disc type. In another specific embodiment, the fluid-type wire tension control mechanism 1 further includes a disc disposed on the pressure receiving portion 110 of the spool 11, and the disc is used to withstand the pressure exerted by the fluid. The larger the area of the disc, the greater the damping force it will bear. The pressure receiving part 110 and the coil part 116 of the wire feeding shaft 11 are connected and driven by a transmission shaft 111.

於另一具體實施例中,受壓部110可以裝設有其他非圓盤型的物件,例如其他形狀之物件、具扇葉的物件、或是表面粗糙化之物件。 In another specific embodiment, the pressure receiving portion 110 may be provided with other non-disk-type objects, such as objects of other shapes, objects with fan blades, or objects with roughened surfaces.

圖5A及圖5B中的受壓部110可以是圓盤型的受壓部110,或是另加裝有一圓盤的受壓部110。要計算流體阻尼力,需先知道受壓部110的總表面積。在圓盤兩側的直徑相同且厚度均勻的情況下第一面積A1為圓盤第一面之面積,第二面積A2為圓盤對應第一面的第二面所露出的面積。第三面積A3為圓盤側面之面積。總表面積A則為第一面積A1、第二面積A2、和第三面積A3的加總。圖5A中,第一面積A1為π×R s1 2。圖5B中,斜線覆蓋的第二面積A2為π×(R s1 2-R s2 2)。因此圓盤可接觸到流體的總表面積為A=π(2R s1 2-R s2 2)+2πR s1t s The pressure receiving portion 110 in FIGS. 5A and 5B may be a disk-shaped pressure receiving portion 110 or a disk-shaped pressure receiving portion 110. To calculate the fluid damping force, the total surface area of the pressured portion 110 needs to be known first. When the diameter of both sides of the disc is the same and the thickness is uniform, the first area A1 is the area of the first surface of the disc, and the second area A2 is the area exposed by the second surface of the disc corresponding to the first surface. The third area A3 is the area of the side of the disc. The total surface area A is the sum of the first area A1, the second area A2, and the third area A3. In FIG. 5A, the first area A1 is π × R s 1 2 . In FIG. 5B, the second area A2 covered by the oblique line is π × ( R s 1 2 - R s 2 2 ). Therefore, the total surface area that the disc can contact with the fluid is A = π (2 R s 1 2 - R s 2 2 ) + 2π R s 1 . t s

其中,A為受壓部110的總表面積(mm2),Rs1為受壓部110的圓盤半徑(mm),Rs2為傳動軸111的軸半徑(mm),ts為受壓部110圓盤的 厚度(mm)。於另一體實施例中,傳動軸落於容置空間100內之部分表面積亦須加總至總表面積A。 Among them, A is the total surface area (mm 2 ) of the pressure receiving section 110, R s1 is the disk radius (mm) of the pressure receiving section 110, R s2 is the shaft radius (mm) of the transmission shaft 111, and t s is the pressure receiving section 110 disc thickness (mm). In another embodiment, a part of the surface area of the transmission shaft falling in the accommodating space 100 must also be added up to the total surface area A.

接著再以總表面積A計算圓盤所承受的流體阻尼力。算式如下:F d =μ×P×A The total surface area A is then used to calculate the fluid damping force experienced by the disc. The formula is as follows: F d = μ × P × A

其中,F d 為流體阻尼力(N),μ為流體阻尼常數,P則為流體壓力(MPa)。 Among them, F d is the fluid damping force (N), μ is the fluid damping constant, and P is the fluid pressure (MPa).

當切割線6受到來自流體阻尼力引發的拉力作用,對線圈部116產生與送線方向相反之力量流體壓力越大,產生的流體阻尼力越大。此時,線圈部116半徑和線張力所產生的力矩與送線軸11半徑和阻尼力所產生的力矩相等,如下列算式所示:F d ×R s1=(T w -F f R b When the cutting wire 6 receives a tensile force caused by a fluid damping force, a force opposite to the wire feeding direction is generated to the coil portion 116. The greater the fluid pressure, the greater the fluid damping force generated. At this time, the moment generated by the radius and the wire tension of the coil portion 116 is equal to the moment generated by the radius and the damping force of the spool 11, as shown in the following formula: F d × R s 1 = ( T w - F f ) × R b

F d 為前面計算出之流體阻尼力(N),T w 為切割線6之線張力,Ff為流體式線張力控制機構1之軸承轉動摩擦力,R b 為線圈部116的半徑。透過已知的流體阻尼力、受壓部110圓盤的半徑、線圈部116的半徑與流體式線張力控制機構之摩擦力,即可計算出線張力的強度。 F d is the fluid damping force (N) calculated earlier, T w is the line tension of the cutting line 6, F f is the bearing rotational friction force of the fluid line tension control mechanism 1, and R b is the radius of the coil portion 116. The strength of the wire tension can be calculated from the known fluid damping force, the radius of the disc of the pressure receiving section 110, the radius of the coil section 116, and the friction force of the fluid type wire tension control mechanism.

請參閱圖1及圖6。圖6係繪示根據本發明一具體實施例之流體式線張力控制機構1之示意圖。於一具體實施例中,流體式線張力控制機構1進一步包含有一收線軸16,用以接收送線軸11之線圈部116送出之切割線6。其中,送線軸11用以控制該切割線6之張力,而該收線軸11用以控制該切割線6之移動速率。 Please refer to FIG. 1 and FIG. 6. FIG. 6 is a schematic diagram of a fluid type thread tension control mechanism 1 according to a specific embodiment of the present invention. In a specific embodiment, the fluid-type thread tension control mechanism 1 further includes a take-up spool 16 for receiving the cutting wire 6 sent from the coil portion 116 of the spool 11. Among them, the feed shaft 11 is used to control the tension of the cutting line 6, and the take-up shaft 11 is used to control the moving speed of the cutting line 6.

於一具體實施例中,流體式線張力控制機構1進一步包含有複數個送線軸11。複數個送線軸11形成一陣列且互相平行,且複數個送線軸11可分別送出並控制切割線6之張力,並有複數個收線軸16分別接收不同的切割線6。並且,由於複數個送線軸11耦接於單個密閉容器10上,因此在不須額外增加流體量或是流體壓力的情況下,亦能同時對每個送線軸11產生足夠的流體阻尼力。因此,本發明可達到降低能源消耗的效果。於另一具體實施例中,一個收線軸16亦可用以接收複數個送線軸11所送出之切割線。 In a specific embodiment, the fluid-type thread tension control mechanism 1 further includes a plurality of thread-feeding shafts 11. The plurality of feeding shafts 11 form an array and are parallel to each other, and the plurality of feeding shafts 11 can send out and control the tension of the cutting line 6 respectively, and a plurality of winding shafts 16 respectively receive different cutting lines 6. In addition, since the plurality of spools 11 are coupled to a single closed container 10, sufficient fluid damping force can be generated for each spool 11 at the same time without additional fluid volume or fluid pressure. Therefore, the present invention can achieve the effect of reducing energy consumption. In another specific embodiment, one take-up shaft 16 can also be used to receive the cutting lines sent by the plurality of feed shafts 11.

於一具體實施例中,若每一切割線6需求的線張力不同,則可以分別拆換上不同面積的每一送線軸11受壓部110的圓盤,或直接更換不同幾何形狀的受壓部110,藉以達到單一控制閥產生不同線張力的效果。 In a specific embodiment, if the thread tension required by each cutting line 6 is different, the discs of the pressure receiving portion 110 of each of the spools 11 with different areas can be replaced respectively, or the pressure of different geometric shapes can be directly replaced. The unit 110 is used to achieve the effect that a single control valve generates different thread tensions.

相較於習知技術,本發明利用流體對送出切割線的送線軸施加壓力,使送線軸產生旋轉阻抗。在收線軸定速收線的條件下,送線軸受到與送線方向相反的流體阻尼力。流體壓力越大,送線軸產生的阻尼效果越明顯。因此,當流體壓力增加時,切割線的張力值變大,切割線的筆直度也隨之變高。由於流體壓力不直接作用於切割線上,使切割線能保持穩定的川流,且線張力易於被掌握與控制。由於本發明並非使用固體接觸式摩擦的方式產生阻力,線張力控制機構較不易有零件磨損之問題。因此,本發明流體式線張力控制機構能夠長時間維持切割線的穩定傳送,切割出的形狀也更精密。 Compared with the conventional technology, the present invention uses a fluid to apply pressure to a feeding shaft that sends out a cutting wire, so that the feeding shaft generates a rotation resistance. Under the condition that the take-up shaft takes up at a fixed speed, the take-up shaft is subject to a fluid damping force opposite to the direction of the take-up. The greater the fluid pressure, the more obvious the damping effect produced by the spool. Therefore, as the fluid pressure increases, the tension value of the cutting line becomes larger, and the straightness of the cutting line becomes higher accordingly. Because the fluid pressure does not directly act on the cutting line, the cutting line can maintain a stable stream, and the line tension is easy to grasp and control. Since the present invention does not use the solid contact friction to generate resistance, the thread tension control mechanism is less prone to the problem of part wear. Therefore, the fluid thread tension control mechanism of the present invention can maintain stable transmission of the cutting line for a long time, and the cut shape is more precise.

藉由以上較佳具體實施例之詳述,係希望能更加清楚描述本發明之特徵與精神,而並非以上述所揭露的較佳具體實施例來對本發明之 範疇加以限制。相反地,其目的是希望能涵蓋各種改變及具相等性的安排於本發明所欲申請之專利範圍的範疇內。因此,本發明所申請之專利範圍的範疇應該根據上述的說明作最寬廣的解釋,以致使其涵蓋所有可能的改變以及具相等性的安排。 Based on the above detailed description of the preferred embodiments, it is hoped that the features and spirit of the present invention can be described more clearly, rather than the preferred embodiments disclosed above to describe the present invention. The scope is restricted. On the contrary, the intention is to cover various changes and equivalent arrangements within the scope of the patents to be applied for in the present invention. Therefore, the scope of the patent scope of the present invention should be interpreted in the broadest sense according to the above description, so that it covers all possible changes and equal arrangements.

Claims (10)

一種流體式線張力控制機構,用以調整一流體所產生的一流體壓力以控制一切割線的張力,包含有:一密閉容器,具有一容置空間以容置該流體;一控制閥,耦接該密閉容器,用以控制該容置空間內該流體所產生之該流體壓力;以及一送線軸,穿設於該密閉容器,該送線軸包含有一受壓部及一線圈部,該線圈部與該受壓部連動,該受壓部容置於該容置空間中,該線圈部位於該密閉容器外並送出該切割線;其中,該切割線的張力係由對應施加於該受壓部的該流體壓力之一流體阻尼力所控制;於送出該切割線時該線圈部與該受壓部同步轉動,且該送線軸與該密閉容器的相對位置固定。A fluid-type wire tension control mechanism for adjusting a fluid pressure generated by a fluid to control the tension of a cutting line includes: a closed container having an accommodating space for accommodating the fluid; a control valve, coupled Connected to the closed container to control the fluid pressure generated by the fluid in the accommodating space; and a bobbin passing through the closed container, the bobbin including a pressure receiving portion and a coil portion, the coil portion Interlocking with the pressure receiving portion, the pressure receiving portion is accommodated in the accommodating space, the coil portion is located outside the closed container and sends out the cutting line; wherein the tension of the cutting line is correspondingly applied to the pressure receiving portion One of the fluid pressures is controlled by a fluid damping force; when the cutting line is sent out, the coil part rotates synchronously with the pressure-receiving part, and the relative position of the feeding shaft and the closed container is fixed. 如申請專利範圍第1項所述之流體式線張力控制機構,其中該流體係為液體或是氣體,且該切割線係為一金屬線。The fluid-type wire tension control mechanism described in item 1 of the scope of patent application, wherein the flow system is a liquid or a gas, and the cutting line is a metal wire. 如申請專利範圍第1項所述之流體式線張力控制機構,進一步包含有一圓盤設置於該送線軸之該受壓部,該圓盤用以承受該流體壓力。The fluid-type wire tension control mechanism described in item 1 of the scope of the patent application, further includes a disc disposed on the pressure receiving part of the wire feeding shaft, and the disc is used to bear the fluid pressure. 如申請專利範圍第1項所述之流體式線張力控制機構,進一步包含有一收線軸,用以接收該切割線,其中該送線軸用以控制該切割線之張力,且該收線軸用以控制該切割線之移動速率。The fluid type thread tension control mechanism described in item 1 of the scope of patent application, further includes a take-up shaft for receiving the cutting line, wherein the delivery shaft is used to control the tension of the cutting line, and the take-up shaft is used to control The moving speed of the cutting line. 如申請專利範圍第1項所述之流體式線張力控制機構,其中該切割線纏繞於該線圈部,且該線圈部係以可拆卸方式嵌合該受壓部。The fluid-type wire tension control mechanism according to item 1 of the scope of patent application, wherein the cutting wire is wound around the coil portion, and the coil portion is detachably fitted into the pressure receiving portion. 如申請專利範圍第1項所述之流體式線張力控制機構,其中該密閉容器具有一導流孔,該流體藉由該導流孔進入該容置空間。The fluid-type linear tension control mechanism according to item 1 of the scope of the patent application, wherein the closed container has a diversion hole, and the fluid enters the accommodating space through the diversion hole. 如申請專利範圍第6項所述之流體式線張力控制機構,其中該密閉容器進一步包含有一O型環、一密封蓋以及一密封杯,該密封杯具有該導流孔,且該密封蓋和該密封杯藉由該O型環密封以形成該容置空間。The fluid-type linear tension control mechanism according to item 6 of the patent application scope, wherein the closed container further includes an O-ring, a sealing cap, and a sealing cup, the sealing cup has the flow guide hole, and the sealing cap and The sealing cup is sealed by the O-ring to form the receiving space. 如申請專利範圍第7項所述之流體式線張力控制機構,其中該密閉容器進一步包含有一軸承,且該送線軸藉由該軸承耦接於該密封蓋上。The fluid-type wire tension control mechanism according to item 7 of the scope of the patent application, wherein the closed container further includes a bearing, and the wire feeding shaft is coupled to the sealing cover through the bearing. 如申請專利範圍第1項所述之流體式線張力控制機構,進一步包含有複數個送線軸,其中該等送線軸形成一陣列且互相平行,且每一該等送線軸分別送出並控制對應之該切割線之張力。The fluid-type thread tension control mechanism described in item 1 of the scope of patent application, further includes a plurality of spools, wherein the spools form an array and are parallel to each other, and each such spool is sent out and controlled correspondingly. The tension of the cutting line. 如申請專利範圍第1項所述之流體式線張力控制機構,其中該控制閥係控制該容置空間內之該流體總量、該流體進入該容置空間的單位時間流入量、該流體進入該容置空間的流入壓力、或該容置空間內的容積。The fluid-type linear tension control mechanism according to item 1 of the scope of the patent application, wherein the control valve controls the total amount of the fluid in the accommodating space, the inflow of the fluid per unit time into the accommodating space, and the fluid entering The inflow pressure of the accommodating space or the volume in the accommodating space.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115635152A (en) * 2022-10-21 2023-01-24 苏州宝玛格精密机械有限公司 High-precision numerical control linear cutting machine tool

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102233463A (en) * 2010-04-27 2011-11-09 王丕文 Winding system of wire cutting machining machine and wire feeding method thereof
CN203738176U (en) * 2013-09-25 2014-07-30 北京阿奇夏米尔工业电子有限公司 Tension control device of wire cutting machine and wire cutting machine
CN105252092A (en) * 2015-11-02 2016-01-20 天津众达精密机械有限公司 Servo hydraulic control system for tensioning device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4513899A (en) * 1982-08-10 1985-04-30 Plessey Incorporated Stock feeder with adjustable width feed path
US4685631A (en) * 1983-06-24 1987-08-11 Fairchild Semiconductor Corporation Apparatus for feeding bonding wire
US5042737A (en) * 1989-08-09 1991-08-27 Ernest R. Sigle Multiple wire dispensing assembly
US20090308904A1 (en) * 2006-11-09 2009-12-17 Kulicke And Soffa Industries, Inc. Wire feed system and method of operating the same
EP3491954B1 (en) * 2012-08-31 2021-01-06 NIKE Innovate C.V. Motorized tensioning system
US9216878B1 (en) * 2012-11-19 2015-12-22 Robert John Schunck Spool support system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102233463A (en) * 2010-04-27 2011-11-09 王丕文 Winding system of wire cutting machining machine and wire feeding method thereof
CN203738176U (en) * 2013-09-25 2014-07-30 北京阿奇夏米尔工业电子有限公司 Tension control device of wire cutting machine and wire cutting machine
CN105252092A (en) * 2015-11-02 2016-01-20 天津众达精密机械有限公司 Servo hydraulic control system for tensioning device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115635152A (en) * 2022-10-21 2023-01-24 苏州宝玛格精密机械有限公司 High-precision numerical control linear cutting machine tool
CN115635152B (en) * 2022-10-21 2023-10-27 苏州宝玛格精密机械有限公司 High-precision numerical control linear cutting machine tool

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