TWI642904B - Measurement system, control device and measurement method - Google Patents

Abstract

A measurement system, a control device and a measurement method. The driving device correlates the information indicating the position of the measurement target with the time information from the timer and outputs it as the first information. The time information from the timer indicates the timing of acquiring the information indicating the position. The measurement device correlates the measurement information acquired by measuring the measurement object with the time information from the timer indicating the timing of acquiring the measurement information, and outputs it as the second information. The measurement system includes an information generation component that calculates a position associated with the time information included in the second information based on one or more first information, and based on the calculated position associated with the shared time information. In combination with the measurement information, information indicating the shape of the measurement object is generated.

Description

Measurement system, control device and measurement method

The invention relates to a measurement system, a control device, and a measurement method. The measurement system includes a measurement device that measures a measurement object and a driving device that changes a relative position relationship between the measurement device and the measurement object.

With the advancement of information and communication technology (ICT) in recent years, a system is proposed in which a control device and various measurement devices are integrated at a production site via a network or the like.

In a network used for such a system, each device including a control device and a measurement device has a timer synchronized with each other, and is based on timing managed by such synchronized timers. ) To ensure fixed-cycle data communication. For example, Japanese Patent Application Laid-Open No. 2009-157913 (Patent Document 1) discloses a structure that enables a relatively short time even between units including a timing component having a nanosecond (ns) timing function. Time is time synchronized without affecting control.

[Prior Art Literature]

[Patent Literature]

Patent Document 1: Japanese Patent Laid-Open No. 2009-157913

The Japanese Patent Application Laid-Open No. 2009-157913 (Patent Document 1) discloses a technique for maintaining timer synchronization between devices connected to a network. The treatment did not make any revelation.

An object of the present invention is to provide a measurement system capable of generating and displaying a measurement object with high accuracy even if a measurement device for a measurement target and a driving device that changes a relative position relationship between the measurement device and the measurement target are not directly connected. Of shape information.

A measurement system according to an aspect of the present invention includes: a measurement device that measures a measurement object; and a driving device that changes a relative position relationship between the measurement device and the measurement object. The measuring device and the driving device each have a synchronized timer. The driving device correlates the information indicating the position of the measurement target with the time information from the timer, and outputs the first information as the first information. The time information from the timer indicates the timing of acquiring the information indicating the position. The measurement device correlates the measurement information acquired by measuring the measurement object with the time information from the timer indicating the timing of acquiring the measurement information, and outputs it as the second information. The measurement system includes an information generation component that calculates a position associated with the time information contained in the second information based on one or more first information, and based on the calculated information associated with the shared time information. The combination of the position of the and measurement information generates information representing the shape of the measurement object.

Preferably, the first information further includes information indicating the acceleration of the measurement target and information indicating the speed, and the information generating means calculates the time based on the time before the target time. The measured acceleration and velocity of the measurement target are calculated to calculate the position of the calculation target time.

Preferably, the information generation means calculates the position of the calculation target time by interpolating the information indicating the position included in the plurality of first information associated with the time near the calculation target time.

Preferably, the measurement device and the driving device are connected via a timing-synchronized network.

Preferably, the measurement system further includes: a communication master (master), which manages data communication on the network and synchronization of timers. The information generating unit is provided in the communication host.

Preferably, the measurement device is configured to irradiate the measurement target with measurement light and receive reflected light from the measurement target to measure a characteristic value of the measurement target. The second information includes time information indicating an arbitrary timing during the period from the irradiation of the measurement light to the completion of the irradiation.

Preferably, the timing at which the driving device outputs the first information and the timing at which the measuring device outputs the second information are different from each other.

A measurement device according to another aspect of the present invention includes a network controller that performs a network connection between the measurement device and a driving device, the measurement device measures a measurement object, and the driving device enables a The relative positional relationship is changed; and the timer is synchronized between the timer of the measuring device and the timer of the driving device. The driving device correlates the information indicating the position of the measurement target and the time information from the timer, and outputs the information as the first information. The time information of the timer indicates the timing of obtaining information indicating the location. The measurement device correlates the measurement information acquired by measuring the measurement object with the time information from the timer indicating the timing of acquiring the measurement information, and outputs it as the second information. The control device includes an information generating unit that calculates a position associated with the time information contained in the second information based on one or more first information, and calculates a position based on the calculated time associated with the shared time information. The combination of the position of the and measurement information generates information representing the shape of the measurement object.

According to another aspect of the present invention, there is provided a measurement method, which is a measurement method in a measurement system, the measurement system includes a measurement device and a driving device, the measurement device measures a measurement object, and the driving device makes the measurement device The relative positional relationship with the measurement object changes. The measuring device and the driving device each have a synchronized timer. The measurement method includes the following steps: the drive device correlates information indicating the position of the measurement object with time information from a timer, and outputs the information as first information. The time information from the timer indicates acquiring and indicating the position. Timing of the information; the measurement device correlates the measurement information acquired by measuring the measurement object with the time information from the timer indicating the timing of acquiring the measurement information and outputs it as the second information; based on one or A plurality of first information to calculate a position associated with the time information included in the second information; and based on a combination of the calculated position and the measurement information associated with the shared time information, generating a shape indicating the shape of the measurement object Information.

The measurement system of the present invention is not limited The driving device that changes the relative positional relationship between the measurement device and the measurement object is not directly connected, and it is possible to accurately generate information indicating the shape of the measurement object.

1‧‧‧ measurement system

2‧‧‧Inspection device

4‧‧‧ base

6‧‧‧ carrier

10‧‧‧ Motor

12‧‧‧ Encoder

14‧‧‧ball screw

20‧‧‧Live Network

100‧‧‧control device

102, 202, 302‧‧‧ Timer

104‧‧‧Processor

106‧‧‧Main memory

108‧‧‧Flash memory

110‧‧‧System Program

112‧‧‧User Program

112A‧‧‧Sequence program

112B‧‧‧ Exercise Program

112C‧‧‧Shape Information Generation Program

114‧‧‧chipset

116‧‧‧Network Controller

118‧‧‧Memory Card Interface

120‧‧‧Memory Card

122‧‧‧ Internal Bus Controller

124, 204, 304‧‧‧ Field Network Controller

125‧‧‧Synchronous management function

126‧‧‧I / O unit

128‧‧‧ Internal Bus

200‧‧‧Drive unit

206‧‧‧Drive Controller

208‧‧‧Main circuit

210‧‧‧Pulse counter

300‧‧‧ measuring device

306‧‧‧ Camera Controller

308‧‧‧Data Processing Department

310‧‧‧Sensor head

312‧‧‧light source

314‧‧‧Light receiving element

316‧‧‧ lens

400, 410‧‧‧

402, 412‧‧‧Time information

404, 408, 414‧‧‧‧ Action Information

406, 416‧‧‧Measurement Information

420‧‧‧ Shape Information

424, 426‧‧‧ Time change

As1 ~ As4‧‧‧Acceleration

Dz1 ~ Dz4‧‧‧Measured value

S1 ~ S4, S (TZ1) ~ S (TZ4) ‧‧‧Position

S100 ~ S116, S200 ~ S208, S300 ~ S310‧‧‧step

SQ100 ~ SQ140‧‧‧Sequence

Ts‧‧‧Measurement period

TS1 ~ T16‧‧‧‧Moment of action

t1 ~ t12‧‧‧‧time

Texp‧‧‧ camera length

TZ1 ~ TZ5, TZ'1, TZ'2, TZ'3, TZ "1, TZ" 2, TZ "3‧‧‧Measurement time

Vs1 ~ Vs4, Vs (TZ2) ‧‧‧Speed

W‧‧‧ Workpiece

△ TS, △ TZ‧‧‧Time interval

△ VS‧‧‧Speed change

FIG. 1 is a schematic diagram showing an overall configuration example of a measurement system according to the present embodiment.

FIG. 2 is a schematic diagram showing an example of a hardware configuration of a control device constituting the measurement system of the present embodiment.

FIG. 3 is a schematic diagram showing an example of a hardware configuration of a drive unit constituting the measurement system of the present embodiment.

FIG. 4 is a schematic diagram showing an example of a hardware configuration of a measurement device constituting the measurement system of the present embodiment.

FIG. 5 is a diagram for explaining operation timings of the drive unit and the measurement device in the measurement system according to the present embodiment.

FIG. 6 is a diagram for explaining a process of generating shape information in the measurement system according to the present embodiment.

FIG. 7 is a diagram for explaining a process of generating shape information in the measurement system according to the present embodiment.

FIG. 8 is a sequence diagram showing a flow of processing executed in the measurement system of the present embodiment.

FIG. 9 is a flowchart showing a processing flow in a drive unit constituting the measurement system of the present embodiment.

FIG. 10 is a diagram showing a process in a measurement device constituting the measurement system of the present embodiment. Process flow chart.

FIG. 11 is a diagram for explaining exchange and processing of information in the measurement system according to the present embodiment.

12 (A) and 12 (B) are diagrams for explaining interpolation processing of motion information based on acceleration and speed.

FIG. 13 is a diagram for explaining interpolation processing of motion information based on nearby motion information.

FIG. 14 is a diagram for explaining a dynamic determination process of an exposure time in the measurement device constituting the measurement system of the present embodiment.

15 (A) to 15 (C) are diagrams for explaining the effect when the exposure time is dynamically determined in the measurement device constituting the measurement system of the present embodiment.

FIG. 16 is a flowchart showing a flow of generating shape information in the measurement system according to the present embodiment.

Embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same or equivalent parts in the drawings are marked with the same symbols and their descriptions will not be repeated.

<A. Example of overall configuration of measurement system>

First, an overall configuration example of the measurement system 1 according to the present embodiment will be described. FIG. 1 is a schematic diagram showing an overall configuration example of a measurement system 1 according to this embodiment.

Referring to FIG. 1, as an example, the measurement system 1 according to the present embodiment is adapted to measure a measurement target (hereinafter also referred to as “workpiece W”) disposed on the inspection device 2. The distances between the plurality of measurement points are optically measured, and shape information indicating the surface shape of the workpiece W is output.

In the present specification, the “shape information” is information indicating the shape of a measurement target (workpiece W), and is a concept including an arbitrary position set for the measurement target and a correspondence relationship with a measurement point about the position.

More specifically, the measurement system 1 includes a control device 100, a drive unit 200 connected to the control device 100 via a field network 20, and a measurement device 300 as main constituent elements. The measurement device 300 measures the workpiece W as a measurement target.

Typically, the field network 20 is a network that performs fixed-cycle communication that guarantees data arrival time. As such a network for performing fixed-cycle communication, EtherCAT (registered trademark) or the like can be used.

As an example, the control device 100 functions as a communication host in the field network 20. The communication host manages the synchronization of the timer among the devices connected to the field network 20, and manages the communication schedule of timings such as sending and receiving of scheduled data. That is, the control device 100 as a communication host manages data communication on the field network 20 and synchronization of a timer.

The drive unit 200 and the measurement device 300 function as a communication slave that transmits and receives data on the field network 20 in accordance with an instruction from the communication host.

More specifically, the control device 100 has a timer 102, the drive unit 200 has a timer 202, and the measurement device 300 has a timer 302. The timer 102 of the control device 100 generates a synchronization signal such as a reference clock. The timers 202 and 302 are synchronized with the timer 102. Therefore, the timing of data transmission and reception can be managed at a common time among the devices connected to the field network 20.

As such, the drive unit 200 and the measurement device 300 each have a synchronized timer. The drive unit 200 and the measurement device 300 are connected via a field network 20 which is a timing-synchronized network, so that the timers can be synchronized.

In this specification, "time" refers to the information that determines a certain point in the flow of time. In addition to the time with predetermined general meanings such as hours, minutes, and seconds, for example, it can also include timer values or counter values commonly used in the field network . The "time" is basically managed by a timer provided in each device. In addition, the "time information" includes information for determining the "time" in addition to the "time" itself (for example, a result obtained by encoding the "time" in some method, or counting from a reference time) Elapsed time since, etc.).

Generally, in a master-slave fixed-cycle network, as long as any one or more devices function as a communication master that manages synchronization of timers with each other. This communication host does not necessarily need to be the control device 100, and for example, any one of the drive unit 200 and the measurement device 300 may function as the communication host.

The control device 100 is an arbitrary computer, and is typically realized as a programmable logic controller (PLC) (programmable controller). The control device 100 gives an operation instruction to the driving unit 200 connected via the field network 20 and receives information (including operation information and time information) from the driving unit 200. Further, the control device 100 gives a measurement instruction to the measurement device 300, and receives information (including measurement) from the measurement device 300 Information and time information). The control device 100 integrates each feedback response from the drive unit 200 and the measurement device 300 to generate shape information about the workpiece W. The process of generating the shape information about the workpiece W will be described in detail later.

In addition, the control device 100 may perform certain control operations based on the generated shape information of the workpiece W, or may send the generated shape information of the workpiece W to a higher-level device such as a Manufacturing Execution System (MES).

The driving unit 200 corresponds to a driving device that changes the relative positional relationship between the measurement device 300 and the workpiece W as a measurement target. More specifically, the drive unit 200 drives a motor 10 that operates the inspection device 2 on which the workpiece W is placed. For example, the drive unit 200 includes a servo driver or an inverter unit. The driving unit 200 gives AC power or pulse power for driving the motor 10 in accordance with an operation instruction from the control device 100, and acquires an operation state of the motor 10 (for example, rotation position (phase angle), rotation speed, rotation acceleration, torque ( torque), etc.), and sends the designated information to the control device 100 as motion information. When an encoder is mounted in the motor 10 (refer to the encoder 12 shown in FIG. 3), an output signal from the encoder is input to the drive unit 200.

The motor 10 rotates to change the position of the stage 6 constituting the inspection device 2. For example, the stage 6 is movably arranged on the base 4, and the stage 6 is engaged with the ball screw 14. The motor 10 communicates with the ball screw 14 via a reduction gear Mechanically, the rotary motion of the motor 10 is given to the ball screw 14. As the ball screw 14 rotates, the relative positional relationship between the ball screw 14 and the stage 6 changes along the extending direction of the ball screw 14.

That is, by giving an operation command to the drive unit 200 from the control device 100, the position of the stage 6 of the inspection device 2 changes, and the position of the workpiece W disposed on the stage 6 also changes.

The measurement device 300 corresponds to a measurement unit that measures the displacement of the workpiece W. In this embodiment, as the displacement of the workpiece W, the distance from the sensor head 310 electrically or optically connected to the measurement device 300 to a measurement point on the surface of the workpiece W is assumed. For example, the measurement device 300 may use an optical displacement sensor that optically measures a distance to a measurement point on the surface of the workpiece W. Specifically, the measurement device 300 irradiates the workpiece W with measurement light from the sensor head 310 and receives light generated by the light reflected by the workpiece W, thereby measuring a distance to a measurement point on the surface of the workpiece W. As an example, a triangular ranging optical displacement sensor or a coaxial confocal optical displacement sensor may be used.

The measurement device 300 irradiates the workpiece W with measurement light, and receives reflected light from the workpiece W to measure a characteristic value of the workpiece W. More specifically, the measurement device 300 adjusts the measurement timing (for example, the intensity or timing of the measurement light irradiated to the workpiece W) in accordance with a measurement instruction from the control device 100, and will include a measurement calculated from the received reflected light The resulting measurement information is transmitted to the control device 100.

In addition, it is also possible to control the lighting time and lighting timing of the light source that generates light, or to expose the imaging element that receives the reflected light from the workpiece W The time and exposure timing are controlled to adjust the intensity and timing of the measurement light irradiated to the workpiece W.

In the measurement system 1 according to the present embodiment, time information related to the operation information is added to the operation information transmitted from the drive unit 200 to the control device 100. The time information indicates the timing and the like for obtaining associated action information. In this way, the drive unit 200 associates the information indicating the position of the workpiece W with the time information from the timer, and outputs it as the action information (the first information). The time information from the timer indicates that the position is acquired. Timing of information.

In this specification, “information indicating the position of the measurement target (workpiece W)” includes information indicating the position of the inspection device 2 or the motor 10 that is mechanically connected to the workpiece W in addition to the information indicating the position of the workpiece W itself. That is, the "information indicating the position of the measurement target (workpiece W)" includes any information that can directly or indirectly determine the position of the workpiece W. Moreover, the dimension of this information can be arbitrary. The same applies to "information indicating the speed of the measurement target (workpiece W)" and "information indicating the acceleration of the measurement target (workpiece W)".

Similarly, to the measurement information transmitted from the measurement device 300 to the control device 100, time information associated with the measurement information is added. The time information indicates, for example, a timing at which the associated measurement information is acquired, or a timing at which the measurement light used to acquire the associated measurement information is irradiated. In this way, the measurement device 300 correlates the measurement information acquired by measuring the workpiece W with the time information from the timer indicating the timing of acquiring the measurement information, and outputs the measurement information (second information).

The control device 100 adjusts the time relationship between the motion information and the measurement information using the time information associated with each of the motion information and the measurement information to generate the shape information of the workpiece W. More specifically, the control device 100 calculates a position associated with the time information included in the measurement information (the second information) based on one or more pieces of action information (the first information), and associates it with the shared time information based on The combination of the calculated position and the measurement information generates information (shape information) indicating the shape of the workpiece W.

<B. Example of hardware configuration of each device constituting the measurement system>

Next, an example of a hardware configuration of each device constituting the measurement system 1 according to the present embodiment will be described.

(b1: Control device)

FIG. 2 is a schematic diagram showing an example of a hardware configuration of the control device 100 constituting the measurement system 1 according to the present embodiment. Referring to FIG. 2, the control device 100 includes a processor 104, a main memory 106, and a flash memory in addition to a timer 102 that manages communication timing and the like in the field network 20. memory 108, chip set 114, network controller 116, memory card interface 118, internal bus controller 122, and field network controller 124.

The processor 104 includes a Central Processing Unit (CPU) or a Micro Processing Unit (MPU), etc., and reads out various programs stored in the flash memory 108 and expands them in the main memory 106. It executes to achieve the control corresponding to the control target and various processes described later.

In the flash memory 108, in addition to a system program 110 for providing basic functions of the control device 100, a user program 112 executed in the control device 100 is also stored.

The system program 110 is a command group for executing processing required to execute the user program 112 in the control device 100.

The user program 112 is a command group arbitrarily created according to a control object or the like, and includes, for example, a sequence program 112A, a motion program 112B, and a shape information generation program 112C.

The chipset 114 controls the processor 104 and each device to implement processing as a whole of the control device 100.

The network controller 116 exchanges data with a higher-level device and the like via a higher-level network.

The memory card interface 118 is a memory card 120 that is an example of a non-volatile storage medium that can be attached and detached. Data can be written to the memory card 120 and various data can be read from the memory card 120.

The internal bus controller 122 is an interface that exchanges data with an input / output (I / O) unit 126 installed in the control device 100 via an internal bus 128.

The field network controller 124 is an interface for performing a network connection with other devices including the drive unit 200 and the measurement device 300 and exchanging data via the field network 20. The field network controller 124 includes a synchronization management function 125 to function as a communication host in the field network 20.

The synchronization management function 125 calculates a time offset between devices based on the time from each device connected to the field network 20 (typically, a counter value output from a timer provided by each device) and the time from the timer 102, The synchronization signal after the time offset is corrected is output to each device. As such, the synchronization management function 125 synchronizes the timer 102 between the timer of the drive unit 200 and the timer of the measurement device 300.

In FIG. 2, a configuration example is shown in which a processor 104 executes a program to provide a required function. However, some or all of the functions provided may also use a dedicated hard wired circuit (such as a dedicated integrated circuit). (Application Specific Integrated Circuit, ASIC) or Field-Programmable Gate Array (FPGA), etc.) to implement. Alternatively, the main part of the control device 100 may be implemented using hardware conforming to a general-purpose architecture (for example, an industrial controller using a general-purpose computer as a base). At this time, a plurality of operating systems (OS) having different uses may be executed in parallel using a virtual technology, and a desired application may be executed on each OS.

(b2: drive unit 200)

FIG. 3 is a schematic diagram showing an example of a hardware configuration of a drive unit 200 constituting the measurement system 1 according to the present embodiment. 3, the drive unit 200 includes a field network controller 204, a drive controller 206, a main circuit 208, and a pulse counter 210, and the field network controller 204 includes a management unit for managing communication timing and the like in the field network 20. Timer 202.

The field network controller 204 is an interface for exchanging data with other devices including the control device 100 and the measurement device 300 via the field network 20.

The drive controller 206 generates a command value in accordance with a predetermined operation logic according to an operation command from the control device 100. More specifically, the drive controller 206 includes control operation logic that combines necessary control loops such as a position control loop, a speed control loop, and a torque control loop. The drive controller 206 calculates the operation state of the target motor 10 based on the count value counted by the pulse counter 210 and the like, and outputs the calculated state to the control device 100.

In addition to the software implementation of the drive controller 206 that enables the processor to execute programs to achieve the necessary processing and functions, the required processing and functions can also be achieved by using hard wired circuits such as ASICs or FPGAs. Hardware implementation (hardware implementation).

The main circuit 208 includes, for example, a converter circuit and an inverter circuit, and generates a predetermined current waveform or voltage waveform based on a command from the drive controller 206 and supplies the predetermined current waveform or voltage waveform to the connected motor 10.

The pulse counter 210 counts pulse signals from the encoder 12 mounted on the motor 10 and outputs the count value to the drive controller 206.

In addition, the main circuit 208, the pulse counter 210, and the like may be appropriately changed depending on the electrical characteristics or mechanical characteristics of the motor 10 as a drive target.

(b3: Measurement device 300)

FIG. 4 is a schematic diagram showing an example of a hardware configuration of a measurement device 300 constituting the measurement system 1 of the present embodiment. Referring to FIG. 4, the measurement device 300 includes a field network control Controller 304, camera controller 306, and data processing unit 308, the field network controller 304 includes a timer 302 that manages communication timing and the like in the field network 20.

The field network controller 304 is an interface for exchanging data with other devices including the control device 100 and the drive unit 200 via the field network 20.

The imaging controller 306 gives an irradiation instruction to the sensor head 310 based on an operation instruction from the control device 100. The data processing unit 308 calculates a distance to a measurement point on the surface of the workpiece W based on a light reception signal from the sensor head 310.

The sensor head 310 connected to the measurement device 300 includes a light emitting source 312, a light receiving element 314, and a lens 316.

The light emitting source 312 is a light source that is driven to generate a predetermined light in accordance with an instruction from the camera controller 306, and includes, for example, a white light emitting diode (LED) or a semiconductor laser.

The light-receiving element 314 is an element that receives reflected light from the target workpiece W and outputs the light-receiving signal to the data processing unit 308. For example, the light-receiving element 314 includes a light-receiving element (line sensor) or a two-dimensional arrangement. Configured light receiving elements (Charge Coupled Device (CCD), etc.).

The lens 316 is an optical system that adjusts the focal position of the measurement light radiated from the sensor head 310 and the light reflected from the workpiece W, and the like.

In addition, the optical structure and electrical structure of the sensor head 310 are appropriately designed based on the measurement principle, and therefore are not limited to the structure shown in FIG. 4.

<C. Shape information generation processing>

Next, the shape information generation performed in the measurement system 1 of the present embodiment is performed. The processing will be described.

FIG. 5 is a diagram for explaining operation timings of the drive unit 200 and the measurement device 300 in the measurement system 1 according to the present embodiment. Referring to FIG. 5, the drive unit 200 and the measurement device 300 execute processes at a cycle corresponding to their respective characteristics. Therefore, the driving unit 200 controls the timing and period of the operation of the motor 10 according to the operation command, and is different from the timing and period of the measurement device 300 measuring the distance to the workpiece W.

In the example shown in FIG. 5, the drive unit 200 performs control at operation timings TS1, TS2, ... (time interval ΔTS), and outputs operation information. In contrast, the measurement device 300 performs a measurement process (distance measurement) on the workpiece W at the measurement timings TZ1, TZ2, ... (time interval ΔTZ). In addition, the distance measured by the measurement device 300 is relative to the value calculated from the optical characteristics in the imaging data from the start of imaging to the completion of imaging. Therefore, the acquired measurement information may be associated with an indication for performing the measurement. The timing of when the imaging of the measurement information is completed is described.

The shape information (i.e., the profile) indicating the surface shape of the workpiece W is the relative positional relationship between the sensor head 310 and the workpiece W, and the distance from the workpiece W measured under the relative positional relationship. Relationships, relative positional relationships, and distances should all be obtained at the same time.

As shown in FIG. 5, the driving unit 200 and the measurement device 300 do not perform control and measurement in synchronization with each other, and therefore do not output motion information and measurement information at the same time. That is, the timing at which the drive unit 200 outputs operation information and the timing at which the measurement device 300 outputs measurement information may be different from each other.

In the measurement system 1 of the present embodiment, since the control device 100, the drive unit 200, and the measurement device 300 have timers synchronized with each other, the time axis of the time information output by each device can be regarded as shared. Therefore, the slave drive unit 200 outputs the time information in association with the motion information, and the slave device 300 outputs the time information in association with the measurement information. In addition, the control device 100 uses the time information as a reference to match the timing of the operation information from the drive unit 200 and the measurement information from the measurement device 300 to generate shape information about the workpiece W.

FIG. 6 and FIG. 7 are diagrams for explaining a process of generating shape information in the measurement system 1 according to the present embodiment.

Referring to FIG. 6, based on the information (motion information and time information) from the drive unit 200 and the information (measurement information and time information) from the measurement device 300, the motion information and measurement information are generated according to time based on the respective time information. The table 400 is arranged in sequence. That is, the control device 100 makes a table of the motion information, measurement information, and time information acquired from the drive unit 200 and the measurement device 300 in time series.

More specifically, the table 400 is composed of a record including action information 404, measurement information 406, and time information 402.

As shown in table 400 of FIG. 6, the action information 404 from the drive unit 200 and the measurement information 406 from the measurement device 300 are not limited to being acquired at the same time. Therefore, in this embodiment, any information is interpolated or estimated. To determine the combination of action information 404 and measurement information 406 at the same time.

In the example shown in FIG. 6, by interpolating the action information 404, from Then, the operation information at the time when the measurement information 406 is acquired is calculated. Here, the motion information may include information indicating acceleration of the workpiece W and information indicating speed in addition to the position at each time. By using such speed and acceleration information, the position at a specified time can be calculated.

More specifically, in the table 400 of FIG. 6, the action information 408 (action information 12) associated with the measurement information 1 at the measurement time TZ1 is by using the action information 1 of the neighboring action time TS1 and the neighboring action time TS2. Interpolate the motion information 2. In this way, the control device 100 performs interpolation based on the adjacent operation information to determine the operation information related to the measurement time of the measurement information output by the measurement device 300.

By performing such interpolation processing on each measurement time associated with the measurement information, a table 410 related to a time series is generated as shown in FIG. 6. The table 410 is composed of a record including action information 414, measurement information 416, and time information 412. When the positions included in the action information 414 and the measurement information 416 are plotted in association with each of the tables constituting the table 410, the shape information 420 shown in FIG. 6 is output.

For convenience of explanation, a processing example using a table has been described, but it is not limited to this, as long as it is implemented using any data processing technology. That is, as long as the shape information is generated by generating a combination of motion information and measurement information associated with the shared time, any processing may be adopted.

The process of generating the shape information shown in FIG. 6 is only required to substantially realize the process shown in FIG. 7. In FIG. 7, the time change 424 of the movement information and the change of the movement information with respect to the time information and the time change of the movement information with respect to the time information are shown. The time change 426 of the measured and measured information is arranged at the coordinates of the shared time information. Furthermore, regarding the temporal change 424 of the motion information, the motion information at the time when the motion information is not actually acquired is also estimated by interpolation processing. The two time changes are combined to remove the time information, and thus shape information 420 indicating the change of the measurement information with respect to the motion information can be generated.

In addition, the generation processing shown in FIGS. 6 and 7 is typically executed by the control device 100, but is not limited thereto, and may be executed by the drive unit 200 or the measurement device 300.

<D. Processing flow>

Next, a processing flow in the measurement system 1 according to the present embodiment will be described.

(d1: overall processing sequence)

FIG. 8 is a sequence diagram showing a processing flow executed in the measurement system 1 according to the present embodiment. In the sequence diagram shown in FIG. 8, attention is paid to the field of the processor 104 and the field network controller 124 of the control device 100, the field network controller 204 and the drive controller 206 of the drive unit 200, and the field of the measurement device 300. Processing executed between the network controller 304, the camera controller 306, and the data processing unit 308.

As described above, timing synchronization is performed between the devices connected to the field network 20. As an example, the timing synchronization is managed by the field network controller 124 of the control device 100. Specifically, the field network controller 124 of the control device 100 is based on the time from each device (communication slave) contained in the frames sequentially transmitted on the field network 20 (managed by each communication slave). The count value output by the timer) to calculate the timing offset (time offset) in each device (sequence SQ100), and sends a synchronization signal for correcting the calculated timing offset to each device (sequence SQ102). Each device (communication slave) corrects the managed timer based on a synchronization signal from the field network controller 124 of the control device 100. The synchronization signal specifies a time after the time offset is corrected.

In addition, the processes of the sequence SQ100 and the sequence SQ102 may also be executed independently of other processes at each predetermined cycle or at each predetermined event.

As a control action for the motor 10 in the drive unit 200, the drive controller 206 of the drive unit 200 performs a control process according to a motion command given in advance (sequence SQ110). At this time, the drive controller 206 acquires action information based on the execution result of the control process and the like. Further, the drive controller 206 acquires time information related to the execution timing of the control process from the field network controller 204 (timer 202) (sequence SQ112).

Then, the drive controller 206 sends the acquired action information to the control device 100 via the field network controller 204 (sequence SQ114), and sends the associated time information to the control device 100 via the field network controller 204. (Sequence SQ116). The operation information and associated time information transmitted from the drive unit 200 are stored in a main memory 106 and the like accessible to the processor 104 of the control device 100.

As a measurement process for the workpiece W in the measurement device 300, the data processing section 308 of the measurement device 300 notifies the camera controller 306 of the acquisition timing of the time information, which indicates the acquisition timing of the time information during the imaging period (exposure period). When to get the time information (sequence SQ120). Then, the camera controller 306 The imaging process is started based on the imaging conditions and the like specified in advance (sequence SQ122). Further, the camera controller 306 acquires the associated time information from the live network controller 304 (timer 302) during the imaging period based on the acquisition timing of the time information (sequence SQ124). Then, the imaging controller 306 outputs the imaging signal output from the imaging element to the data processing section 308 (sequence SQ126), and outputs associated time information (sequence SQ128).

The data processing unit 308 performs measurement processing based on an imaging signal from the imaging controller 306 to generate measurement information (sequence SQ130). Then, the data processing unit 308 sends the generated measurement information to the control device 100 via the field network controller 304 (sequence SQ132), and sends the associated time information to the control device 100 via the field network controller 304. (Sequence SQ134). The measurement information and associated time information transmitted from the measurement device 300 are stored in a main memory 106 and the like accessible to the processor 104 of the control device 100.

The control operation (sequences SQ110 to SQ116) and the measurement processing (sequence SQ120 to SQ134) of the motor 10 shown in FIG. 8 are repeated a predetermined number of times. When a series of measurement processing on the workpiece W is completed, the processor 104 of the control device 100 generates shape information based on the saved motion information, measurement processing, and time information (sequence SQ140).

The series of processes described above is repeatedly performed for each work W.

(d2: Processing flow in the drive unit 200)

Next, a processing flow in the drive unit 200 constituting the measurement system 1 of the present embodiment will be described. FIG. 9 shows a measurement system 1 constituting the present embodiment. A flowchart of a processing flow in the driving unit 200 of the.

Referring to FIG. 9, when the driving unit 200 receives a synchronization signal (step S200), it executes a process of correcting the time offset (step S202).

Then, the drive unit 200 executes a process of determining operation information based on a control operation on the motor 10 (step S204) and a process of determining associated time information (step S206). Then, the driving unit 200 outputs the determined operation information and time information (step S208). An output record containing these associated action information and time information is saved to the control device 100.

(d3: Processing flow in the measurement device 300)

Next, a processing flow in the measurement device 300 constituting the measurement system 1 of the present embodiment will be described. FIG. 10 is a flowchart showing a processing flow in the measurement device 300 constituting the measurement system 1 according to the present embodiment.

Referring to FIG. 10, when the measurement device 300 receives a synchronization signal (step S300), it executes a process of correcting the time offset (step S302).

Then, the measurement device 300 performs imaging processing such as measurement light irradiation of the workpiece W (step S304), and performs processing for determining measurement information based on the imaging result (step S306) and processing for determining associated time information (step S308) . Then, the measurement device 300 outputs the determined measurement information and time information (step S310). An output record containing these associated measurement information and time information is saved to the control device 100.

<E. Interpolation Processing of Action Information>

Next, regarding the operation information in the measurement system 1 of the present embodiment, Interpolation processing, explaining several implementation examples.

FIG. 11 is a diagram for explaining information exchange and processing in the measurement system 1 according to the present embodiment. For convenience of explanation, FIG. 11 shows an example in which the drive unit 200 and the measurement device 300 perform processing cyclically in the same control cycle, but the invention is not limited to this, and the processing may be performed in each of the inherent control cycles. Furthermore, acyclic processing may be performed for each specific event.

In the example shown in FIG. 11, the driving unit 200 outputs a position Sx, a speed Vsx, and an acceleration Asx (where x represents an index number) associated with each operation time TSx as the operation information. Furthermore, the measurement device 300 outputs measurement values Dzx (where x represents an index number) associated with each measurement time TZx as measurement information.

(e1: Part 1 of the interpolation process)

In the measurement system 1 of the present embodiment, the operation information is information from a motor 10 that is rotationally driven by a drive unit 200. Considering the characteristics of such a mechanical system subjected to a rotary drive, it is considered that the speed changes linearly with respect to time as long as the time is sufficiently short. That is, if the acceleration obtained at the previous operation time is regarded as fixed, the speed at the measurement time of the operation information to be estimated can be calculated by adding and subtracting the speed at the previous operation time and multiplying the acceleration by the elapsed time.

That is, since the speed at the previous operation time is known and the speed at the measurement time of the estimation target can be estimated, the position of the estimation target can be calculated based on the relationship between the two speeds.

FIG. 12 (A) and FIG. 12 (B) are diagrams for explaining interpolation processing based on acceleration and speed motion information. 12 (A) and 12 (B) are described by taking a case where the position S (TZ2) of the measurement time TZ2 shown in FIG. 11 is estimated as an example.

12 (A), it is assumed that the speed Vs1 and the acceleration As1 are acquired as the operation information of the operation time TS1. The period from the operation time TS1 to the estimation target measurement time TZ2 is regarded as the maintaining acceleration As1, and the speed Vs (TZ2) at the measurement time TZ2 can be calculated as follows.

Vs (TZ2) = Vs1 + △ Vs = Vs1 + As1 × (TZ2-TS1)

Referring to FIG. 12 (B), since the position of the operation time TS1 is the position S1, considering the speed change described above, the position S1 is added to the movement distance from the operation time TS1 to the measurement time TZ2 to obtain the measurement time TZ2. The position S (TZ2) can be calculated as follows.

S (TZ2) = [(Vs1 + As1 × (TZ2-TS1)} 2-Vs12] / 2 × As1

As described above, the position of the calculation target time may be calculated based on the acceleration and speed of the workpiece W at a time before the calculation target time.

(e2: Interpolation processing 2)

In the measurement system 1 of the present embodiment, motion information can be acquired periodically. Therefore, by performing interpolation processing using motion information in the time-series motion information that is near the measurement time of the estimated object, it is possible to estimate the position of the measurement time of the object. .

FIG. 13 is a diagram for explaining motion information based on nearby motion information. Interpolated graph. Referring to FIG. 13, for example, it is assumed that the positions of the operation timings TS1, TS2, and TS3 are positions S1, S2, and S3, respectively. For example, a case where the position S (TZ2) at the measurement time TZ2 between the operation time TS2 and the operation time TS3 is estimated is described as an example.

At this time, for example, the information of the positions S1, S2, and S3 of the operation times TS1, TS2, and TS3 is used to determine the interpolation formula, and the position S (TZ2) can be estimated based on the determined interpolation formula.

As the interpolation formula, a known interpolation method can be used. As such a known interpolation method, one-time interpolation, lagrange interpolation, spline interpolation, and the like are known. For example, if the operation information TS1, TS2, TS3 near the measurement time TZ2 is used, and Lagrange interpolation is applied, the position S (TZ2) can be estimated as follows.

S (TZ2) = S1 × (TZ2-T2) (TZ2-TS3) / (TS1-TS2) (TS1-TS3) + S2 × (TZ2-T1) (TZ2-TS3) / (TS2-TS1) (TS2- TS3) + S3 × (TZ2-T1) (TZ2-TS2) / (TS3-TS1) (TS3-TS2)

In addition, for convenience of explanation, an interpolation formula using three pieces of motion information in the vicinity of the estimated measurement time TZ2 is exemplified, but the number of motion information used for interpolation is not particularly limited, as long as the number corresponding to the situation is appropriately selected .

As described above, it is also possible to calculate the position of the time of the calculation target by interpolating the information indicating the position contained in the plurality of motion information (first information) associated with the time near the time of the calculation target.

(e3: supplementary)

In the measurement system 1 of the present embodiment, the motion information and the associated time information (motion time) are transmitted to the control device 100, and thus the timing associated with each motion information can be determined. However, when the control action in the drive unit 200 is executed cyclically at every predetermined control cycle managed on the field network 20, even when only the action information is received from the drive unit 200, it can be calculated with each action information. Associated time information (action time). Therefore, even if the measurement time to be the estimation target can be determined, the motion information (position) at the measurement time can also be estimated using any of the methods described above.

In the description, an example is shown in which the drive unit 200 periodically executes a control action and also periodically transmits action information in synchronization with the control action, but such a periodic control action is not necessarily required. As long as the motion information and the associated time information (motion time) are transmitted to the control device 100, the motion information (position) as the measurement time to be the target can be estimated by any of the methods described above.

Moreover, FIG. 11 shows an example in which the drive unit 200 and the measurement device 300 execute processing cyclically at every predetermined cycle, but it is not limited to this, even if the processing is performed at different cycles at either or both, or the processing is performed according to events In the case of the method, the motion information (position) can also be estimated by the method described above. That is, in the measurement system 1 according to the present embodiment, each device connected to the field network 20 has a time-synchronized timer. Therefore, by using the time information from such a time-synchronized timer, even for each device independently In a form where information is transmitted at a periodic interval, the information can also be collected by the communication host (control device 100) and the like based on the time.

In the description, an example has been described in which the motion information (position) output by the drive unit 200 is interpolated to estimate the motion information (position) associated with each measurement time, but the reverse is also possible. That is, the measurement information output by the measurement device 300 may be interpolated to estimate the measurement information associated with each operation time.

<F. Dynamic determination of exposure time>

In the measurement device 300 constituting the measurement system 1 of the present embodiment, a function for dynamically determining the imaging length (exposure time) may be installed. In this case, the measurement points on the surface of the workpiece W actually measured by the measurement device 300 will also change. Therefore, the time information associated with the measurement information must also be corrected based on the imaging time determined dynamically.

FIG. 14 is a diagram for explaining a dynamic determination process of an exposure time in the measurement device 300 constituting the measurement system 1 of the present embodiment. Referring to FIG. 14, for example, it is assumed that the measurement processing of the workpiece W is repeatedly performed at each predetermined measurement period Ts. At this time, it is assumed that after performing imaging processing throughout a certain imaging length Texp, certain processing results are obtained by processing the data of the imaging signals obtained by the imaging processing. Based on the obtained processing results, it can be judged whether the exposure is over or under. When it is determined that the exposure is insufficient, an imaging length longer than the previous imaging length is set to execute the next imaging process. On the other hand, when it is determined that the exposure is excessive, an imaging length shorter than the previous imaging length is set to execute the next imaging process.

As such, the imaging length (ie, exposure time) of the subsequent imaging process may be dynamically determined based on the processing result obtained by the previous imaging process. This automatic adjustment of the imaging length (exposure time) is performed within a preset maximum imaging length range. In other words, the imaging length will vary by a preset maximum length.

15 (A) to 15 (C) are diagrams for explaining the influence when the exposure time is dynamically determined in the measurement device 300 constituting the measurement system 1 of the present embodiment. 15 (A) to 15 (C) show a state in which the stage 6 on which the workpiece W is arranged is moved from the left side of the paper surface to the right side of the paper surface. With such movement of the workpiece W, the relative positional relationship between the workpiece W and the sensor head 310 will change with time. Therefore, as the imaging length (exposure time) changes, the position on the surface of the workpiece W irradiated with the measurement light also changes.

As an example, as shown in FIG. 15 (A), when the imaging length Texp is relatively short, the measurement light is irradiated to the right of the paper surface of the workpiece W. On the other hand, as shown in FIG. 15 (C), when the imaging length Texp is relatively long, the measurement light is irradiated to the left of the paper surface of the workpiece W. Further, as shown in FIG. 15 (B), when the imaging length Texp is a standard length, the measurement light is irradiated to an intermediate position between the two.

Changes in the irradiation position of such measurement light must be appropriately reflected to generate correct shape information.

Referring again to FIG. 14, the measurement information from the measurement device 300 includes measurement values (in the example, the distance to the surface of the workpiece W), and as the time information associated with the measurement information, for example, also It may include the measurement time TZ1 and the imaging length Texp, which indicate the start timing of the measurement period Ts. The control device 100 can also correct the The measurement time TZ1 included in the time information is used to calculate the original measurement time. At this time, the measurement points on the surface of the workpiece W are positions associated with the timings of the measurement times TZ'1, TZ'2, TZ'3,....

In addition, depending on the application, it may be preferable to set a position associated with the center during imaging as the measurement point. At this time, by using the imaging length Texp to correct 1/2 of the measurement time TZ1 included in the time information from the measurement device 300, the measurement time TZ "1, TZ" 2, TZ "3, etc. can be calculated.

Furthermore, in the above description, an example has been described in which the measurement time TZ1 and the imaging length Texp, which indicate the start timing of the measurement period Ts, are transmitted. However, the measurement time TZ'1, TZ'2, and TZ may be calculated on the measurement device 300 '3 ... or measurement time TZ "1, TZ" 2, TZ "3 ..., and sends it to the control device 100 as time information.

In this way, the time information at which the measurement device 300 acquires the measurement information includes time information indicating an arbitrary time period from the start of irradiation of the measurement light to the completion of the irradiation. That is, the time information at which the measurement device 300 acquires the measurement information may be any one of a timing corresponding to when the measurement light is irradiated, an arbitrary timing during the measurement light irradiation period, and a timing corresponding to the time when the measurement light irradiation is completed.

When a function of dynamically determining the imaging length (exposure time) is installed in the measurement device 300, it is preferable to acquire a measurement time associated with the imaging length (exposure time) and notify the acquired measurement time to Control device 100. At this time, an arbitrary method may be adopted as to which data format is used to notify the control device 100 of the measurement time.

<G. Processing flow for shape information generation>

Next, a processing flow related to generation of shape information will be described.

FIG. 16 is a flowchart showing a flow of generating shape information in the measurement system 1 according to the present embodiment. Each step shown in FIG. 16 is typically implemented by a program executed by the processor 104 of the control device 100.

Referring to FIG. 16, when the control device 100 receives information (action information and associated time information) from the driving unit 200 (YES in step S100), the time information is saved as a key. The received information (step S102). If not (NO in step S100), the processing of step S102 is skipped.

When the information (measurement information and associated time information) is received from the measurement device 300 (YES in step S104), the received information is saved using the time information as a keyword (step S106). If not (NO in step S104), the processing of step S106 is skipped.

Then, when the shape information generation instruction is received (YES in step S108), the control device 100 determines the time information associated with the measurement information contained in the saved information from the measurement device 300 (step S110), and The stored information from the drive unit 200 is used to calculate motion information (position) associated with the determined time information (step S112). Through the processing of steps S110 and S112, a combination of measurement information and motion information (position) associated with the information at a certain time can be determined. If the information generation instruction is not received (NO in step S108), the processing from step S100 is repeated.

Then, the control device 100 determines whether the All the time information included in the information of the setting 300 determines the combination of the measurement information and the motion information (position) (step S114). If there is time information for which a combination of measurement information and motion information (position) has been determined (NO in step S114), the processing from step S110 is repeated.

On the other hand, if the combination of measurement information and motion information (position) has been determined for all time information (YES in step S114), measurement information is generated based on the combination of measurement information and motion information (position) (step S116) . Then, the process ends.

<H. Modifications>

In the measurement system 1 of the present embodiment, a configuration example in which the control device 100 acquires information from the drive unit 200 and the measurement device 300 to generate shape information has been described, but it may be performed by either the drive unit 200 or the measurement device 300. Generate shape information. That is, the configuration of the communication host provided with the function of generating shape information on the field network 20 is exemplified, but it may be arranged on another device.

The measurement system 1 of the present embodiment shows an example in which the drive unit 200 and the measurement device 300 are connected to a single field network 20, but may be connected to different field networks. For example, imagine a configuration in which the control device functions as a communication host for two field networks, and the timers for the respective field networks are synchronized in the control device. In this structure, even different field networks can realize timing synchronization with each other, so there is no need to share field networks.

The measurement system 1 of the present embodiment shows a configuration example in which each of the drive unit 200 and the measurement device 300 is arranged, but it is not limited to this, and may be configured A plurality of driving units 200 and measuring devices 300 are provided. For example, two drive units 200 may be arranged in order to drive each motor 10 arranged along each axis while using an XY stage having two degrees of freedom as the stage 6. In this case, since the devices of each other are synchronized over time, the information obtained from each device can be brought together on the same timeline.

In the measurement system 1 according to this embodiment, the time information can be collected by the action information (position) and measurement information associated with the time information defined on the same time axis. Therefore, when certain abnormalities or events occur, as long as they can be obtained When it happens, information about the moment can help determine the cause.

<I. Advantages>

In the measurement system according to this embodiment, the measurement device for the measurement target and the driving device for changing the relative positional relationship between the measurement device and the measurement target each have a synchronized timer. The operation information of the drive device is provided with time information output from each timer. By correlating the measurement information and the motion information with this time information as a reference, it is possible to generate information representing the shape of the measurement target with high accuracy even if the devices are not directly connected.

It should be understood that the embodiments disclosed this time are merely examples in all respects and are not restrictive. The scope of the present invention is shown by the scope of the patent application rather than the description, and is intended to include any modifications within the meaning and scope equivalent to the scope of the patent application.

Claims (9)

A measurement system includes: a measurement device that measures a measurement object; and a driving device that changes a relative position relationship between the measurement device and the measurement object, and the measurement device and the driving device each have a A synchronized timer, the driving device correlates information indicating the position of the measurement object with the time information from the timer of the driving device, and outputs the information as the first information, the timing from the driving device The time information of the device indicates the timing of acquiring the information indicating the position, the measurement device will obtain the measurement information obtained by measuring the measurement object, and the measurement information from the measurement device indicates the timing of acquiring the measurement information. The time information of the timer is associated and output as second information. The measurement system includes an information generating component that calculates the information related to the second information based on one or more of the first information. Location with associated time information, and based on calculated location associated with shared time information In combination with the measurement information, information indicating the shape of the measurement object is generated. The measurement system according to item 1 of the scope of patent application, wherein the first information further includes information indicating acceleration of the measurement target and information indicating speed, and the information generating unit calculates a time based on a time before the time of the target, The acceleration and speed of the measurement target are used to calculate the position of the calculation target time. The measurement system according to item 1 of the scope of patent application, wherein the information generating means interpolates information indicating a position contained in a plurality of the first information associated with a time near a calculation target time, thereby The position of the calculation target time is calculated. The measuring system according to item 1 of the scope of patent application, wherein the measuring device and the driving device are connected via a timing-synchronized network. The measurement system according to item 4 of the scope of patent application, wherein the communication host manages the data communication on the network and the synchronization of the timer, and the information generating component is provided in the communication host. The measurement system according to any one of claims 1 to 5, wherein the measurement device is configured to irradiate the measurement object with measurement light and receive reflected light from the measurement object to Measuring the characteristic value of the measurement object, and the second information includes time information indicating a timing within a period from the irradiation of the measurement light to the completion of the irradiation. The measurement system according to any one of claims 1 to 5, wherein the timing at which the driving device outputs the first information is different from the timing at which the measuring device outputs the second information. the same. A control device includes: a network controller that performs a network connection between a measurement device and a driving device, the measurement device measures a measurement object, and the driving device makes a relative between the measurement device and the measurement object The positional relationship is changed; and a timer synchronized between the timer of the measuring device and the timer of the driving device, the driving device synchronizing information indicating the position of the measurement object with information from the driving device The time information of the timer of the device is associated and output as the first information. The time information of the timer from the driving device indicates the timing of acquiring the information indicating the position, and the measuring device The measurement information obtained by the subject performing measurement is associated with the time information from the timer of the measurement device indicating the timing of acquiring the measurement information, and is output as the second information. The control device further includes an information generating unit , The information generating unit calculates a time difference from the second information based on one or more of the first information. Associated with the location, and based on the calculated moment in combination with the common information associated with the measured position information, generates the information of the measured shape of the object. A measurement method is a measurement method in a measurement system. The measurement system includes a measurement device and a driving device, the measurement device measures a measurement object, and the driving device causes a measurement between the measurement device and the measurement object. The relative position relationship changes, and the measuring method includes: the measuring device and the driving device each have synchronized timers, and the measuring method includes the following steps: the driving device will indicate the The position information is associated with the time information from the timer of the driving device, and is output as the first information. The time information from the timer of the driving device indicates the timing of acquiring the information indicating the position; The measurement device associates measurement information acquired by measuring the measurement object with time information from a timer of the measurement device indicating a timing of acquiring the measurement information, and outputs the information as second information; Based on one or more of the first information, calculate a correlation with the time information contained in the second information Position; and based on the common time information associated with the combination of the calculated position of the measurement information, generates information about the shape of the object measured.