KR20220022441A - Location specifying device, control method of the location specifying device, information processing program and recording medium - Google Patents

Abstract

Even when at least one of a detection object and a detection device is moving, a position the detection object is specified with high accuracy. A position specifying device (10) determines the detection shift amount (Qd) calculated from a captured image (Im) captured while an imaging device (33) is moving, and a position (Pw) of the work (40) is specified from a position of the imaging device (33) at the detection time (Td).

Description

A location specifying device, a control method of a location specific device, an information processing program, and a recording medium

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a position specifying device and the like for specifying the position of a detection target.

Conventionally, by outputting a command value generated from a target trajectory to the servo control system at each control cycle, and taking the response delay time of the servo control system into consideration for the control device that controls the servo control system, the control by the servo control system is made with high precision. Attempts to do so are known.

For example, Patent Document 1 published below discloses a control device that executes the following processing in order to suppress trajectory shift caused by variations in response delay time between multiple axes (plural servo motors). . That is, the control apparatus which adjusts the command timing to each servo driver according to the response delay time of each servo motor is disclosed.

Japanese Patent Laid-Open No. 2017-102616

Using the above-described control device, if the detection position can completely coincide with the position of the detection object (for example, the central position of the detection object) during movement of at least one of the detection object and the detection apparatus, the detection object The position of may be specified only by the detection position.

However, even when the response delay time of the servo control system is taken into consideration, it is difficult to completely match the detection position with the position of the detection object during movement of at least one of the detection object and the detection device. Therefore, during movement of at least one of the detection object and the detection device, the position of the detection object cannot be specified only by the detection position.

One embodiment of the present invention aims at specifying the position of the detection object with high accuracy even when at least one of the detection object and the detection device is moving.

In order to solve the above problem, a position specifying device according to an embodiment of the present invention is a position specifying device for specifying the position of a detection target, and sets an expected detection position preset as a position where the detection target should exist as a target position a command unit for outputting a command value calculated from the target trajectory included as , to a servo control system that controls a position of at least one of the detection device and the detection target; At the detection time, which is a moving time of at least one of the detection device and the detection target, the target position of the servo control system calculated in consideration of a response delay time of the servo control system is a time coincident with the expected detection position, an acquisition unit configured to acquire a detection result of the detection device; A detection deviation amount for calculating a detection deviation amount that is a deviation amount between a detection position corresponding to the reference position and a position of the detection object from the deviation amount between the reference position and the position of the detection target in the detection result output unit; a detection position calculation unit configured to calculate the detection position from the position of the detection device at the detection time; and a position specifying unit for specifying the position of the detection target by correcting the detection position with the detection deviation amount.

According to the said structure, the said position specifying apparatus calculates the said detection deviation amount which is the deviation amount between the said detection position and the position of the said detection object from the said detection result. Moreover, the said position specifying apparatus calculates the said detection position from the position of the said detection apparatus at the said detection time. And the said position specifying apparatus specifies the position of the said detection object with the said detection deviation amount and the said detection position.

(Higher precision of position detection)

Therefore, even when the position of the detection target and the detection position do not coincide with the detection time at the detection time, the position specifying device can specify the position of the detection object with high accuracy by using the amount of deviation between the two. show the effect.

(High-precision and high-speed detection results)

In addition, according to the above configuration, in the position specifying device, the detection result at the detection time at which the target position of the servo control system calculated in consideration of the response delay time of the servo control system coincides with the expected detection position. From , the detection deviation amount is calculated.

Here, when the detection target does not exist within a range in which the detection device can detect the detection target at the timing at which the detection device performs detection, the detection deviation amount cannot be calculated from the detection result.

Therefore, in order to avoid the situation that "the detection target does not exist in a range in which the detection device can detect the detection target at the timing at which the detection device performs detection," the position specifying device is configured to: Acquire the detection result in

For example, when the servo control system moves only the detection device, the detection object is not moved, and the detection object is placed in the expected detection position in advance or is placed in a position sufficiently close to the expected detection position, The position specifying device executes the following processing. That is, the position specifying device sets the time when the target position of the servo control system calculated in consideration of the response delay time of the servo control system that controls the position of the detection device coincides with the expected detection position as the detection time. do.

Here, by considering the response delay time of the servo control system, the "target position of the servo control system for each time" coincides with "the feedback position of the servo control system for each time", or the amount of deviation between both is sufficiently I think it gets smaller In addition, the feedback position of the said servo control system which controls the position of the said detection apparatus can be regarded as the position of the said detection apparatus. Therefore, "the position of the detection device moved by the servo control system for each time" is "the target position for each time of the servo control system calculated in consideration of the response delay time of the servo control system" coincidentally, or the amount of deviation between both will be sufficiently small.

As described above, at the detection time, the "position of the detection device moved by the servo control system" and the expected detection position coincide, or the amount of deviation between the two will be sufficiently small. And, as described above, the detection target is placed in the expected detection position in advance or is placed in a position sufficiently close to the expected detection position. Therefore, at the detection time, the "position of the detection device moved by the servo control system" and the position of the detection target coincide, or the amount of deviation between the two becomes sufficiently small.

As a result, the position specifying apparatus can avoid the situation "the detection object does not exist within a range in which the detection apparatus can detect the detection object at the timing when the detection apparatus performs detection".

Further, for example, the servo control system moves only the detection target, the detection device is not moved, and the detection device is placed in the expected detection position in advance or is placed in a position sufficiently close to the expected detection position. In this case, the location specifying device executes the following processing. That is, the position specifying device sets the time when the target position of the servo control system calculated in consideration of the response delay time of the servo control system that controls the position of the detection target coincides with the expected detection position as the detection time. do.

As described above, by considering the response delay time of the servo control system, the "target position of the servo control system at each time" coincides with the "feedback position of the servo control system at each time", or a deviation between both The amount is thought to be sufficiently small. In addition, the feedback position of the said servo control system which controls the position of the said detection object can be regarded as the position of the said detection object. Therefore, "the position of the detection target moved by the servo control system for each time" is "the target position for each time of the servo control system calculated in consideration of the response delay time of the servo control system" coincidentally, or the amount of deviation between both will be sufficiently small.

As described above, at the detection time, the "position of the detection target moved by the servo control system" and the expected detection position coincide, or the amount of deviation between the two will be sufficiently small. And, as described above, the detection device is placed in the expected detection position in advance, or is placed in a position sufficiently close to the expected detection position. Therefore, at the detection time, "the position of the detection target moved by the servo control system" and the position of the detection device coincide with each other, or the amount of deviation between the two becomes sufficiently small.

As a result, the position specifying apparatus can avoid the situation "the detection object does not exist within a range in which the detection apparatus can detect the detection object at the timing when the detection apparatus performs detection".

Further, for example, when the first servo control system moves the detection device and the second servo control system moves the detection target, the position specifying device sets the following times as the detection times. That is, the time at which the target positions of the first servo control system and the second servo control system calculated in consideration of the response delay times of the first servo control system and the second servo control system coincide with the expected detection position together , as the detection time.

As described above, by considering the response delay time of the servo control system, the "target position of the servo control system at each time" coincides with the "feedback position of the servo control system at each time", or a deviation between both The amount is thought to be sufficiently small.

In addition, the feedback position of the said 1st servo control system which controls the position of the said detection apparatus can be regarded as the position of the said detection apparatus. In addition, the feedback position of the said 2nd servo control system which controls the position of the said detection object can be regarded as the position of the said detection object.

Therefore, the "position of the moving detection device for each time" coincides with "the target position for each time of the first servo control system calculated in consideration of the response delay time of the first servo control system" or , or the amount of deviation between both will be sufficiently small. In addition, the "position of the detection target in movement at each time" coincides with "the target position for each time of the second servo control system calculated in consideration of the response delay time of the second servo control system"; Alternatively, the amount of deviation between the two will be sufficiently small.

As described above, at the detection time, the "position of the moving detection device" and the "moving position of the detection target" coincide with the expected detection position, or the amount of deviation of the three characters will be sufficiently small .

As a result, the position specifying apparatus can avoid the situation "the detection object does not exist within a range in which the detection apparatus can detect the detection object at the timing when the detection apparatus performs detection".

The position specifying device is a moving time of at least one of the detection device and the detection target, which is the time “the position of the detection target coincides with the position of the detection device, or the amount of deviation between them is sufficiently small” The detection result at the detection time is acquired.

Here, since the position of the detection device at the detection time corresponds to the detection position, in the detection result at the detection time, the amount of deviation between the reference position and the position of the detection target is sufficiently small. I think. And, if it is known in advance that "in the detection result, the amount of deviation between the reference position and the position of the detection target is sufficiently small", "in the detection result, the amount of deviation between both is unpredictable or predicted to be large" ', the analysis to the detection result can be made more accurate than the case.

Therefore, the position specifying device acquires "the detection result at the detection time" capable of performing high-precision analysis, that is, calculates the detection deviation amount from "the detection result at the detection time" with high precision. road can be calculated.

Further, the position specifying device calculates the detection deviation amount from “the detection result detected by the detection device while moving at least one of the detection target and the detection device”. For this reason, the position specifying device acquires the detection result at a higher speed than in the case of "after stopping the movement of the detection target and the detection device, causing the detection device to detect and generate the detection result" As a result, it is possible to speed up the calculation of the detection deviation amount.

(Higher precision and higher speed of specifying the position of the detection target)

As described so far, the position specifying device can acquire the detection result capable of performing high-precision analysis at high speed, and can calculate the detection deviation amount from the detection result at high speed and with high accuracy. And the said position specifying apparatus specifies the position of the said detection object with the said detection shift amount calculated and the said detection position.

Therefore, the said position specifying apparatus exhibits the effect that the position of the said detection object can be specified with high speed and high precision.

A position specifying device according to an embodiment of the present invention communicates with the servo control system at every control cycle, and when the position of the detection device is controlled by the servo control system, the detection position calculation unit is configured to: You may calculate the position of the said detection device of from the feedback position for every said control period of the said servo control system which controls the position of the said detection device by interpolation calculation.

According to the above configuration, the position specifying device calculates the “feedback position of the servo control system that controls the position of the detection device at the detection time” from “the feedback position of the servo control system for each control period”. , calculated by interpolation calculation.

For example, when n is an "integer greater than or equal to 0" and the detection time is a time between the "n"th control cycle and the "n+1"th control cycle, the position specifying device is configured as follows: The feedback position of the servo control system at the detection time” is calculated. That is, the position specifying device is, from the "feedback position in the "n"th control cycle" and the "feedback position in the "n+1"th control cycle" of the servo control system, "at the detection time, The feedback position of the servo control system” is calculated.

Therefore, the position specifying device calculates the "feedback position of the servo control system at the detection time" with high precision even when the detection time is not an integer multiple of the control period that is the communication period with the servo control system. indicates that it can be done.

The position specifying device according to the embodiment of the present invention may output a command value in consideration of the response delay time of each of the plurality of servo control systems to each of the plurality of servo control systems synchronized with each other.

According to the said structure, the said position specifying apparatus outputs the command value in consideration of the response delay time of each of the said servo control systems to each of a plurality of servo control systems synchronized with each other.

Accordingly, the position specifying device exhibits an effect that high-precision position control of a work can be realized by controlling the plurality of servo control systems in a state in which they are synchronized with each other.

A position specifying device according to one embodiment of the present invention communicates with a detection control device that controls a detection operation by the detection device, a detection instruction time obtained by correcting the detection time in consideration of a response delay time of the detection device Designated by a control signal transmitted to the control device at each control cycle, and outputting a detection instruction to the detection control device to the communication control device at the detection instruction time, to the detection device at the detection time; The detection target may be detected.

According to the said structure, the said position specifying apparatus calculates the said detection instruction time which is the time which corrected the said detection time by "response delay time of the said detection apparatus". And the said position specifying apparatus designates the said detection instruction time in the said control signal output to the said communication control apparatus every control period.

The communication control apparatus receiving the control signal transmits the detection instruction to the detection control apparatus at the detection instruction time, and the detection control apparatus receiving the detection instruction provides the detection apparatus to the detection target to detect Therefore, the time at which the detection device detects the detection target becomes a time delayed from the detection instruction time by the response delay time of the detection device, that is, the detection time.

Here, when it is intended to cause the detection device to perform detection without considering the response delay time of the detection device, the time at which the detection device actually performs detection is from the time when the detection device is instructed to perform detection. , is delayed by the response delay time of the detection device.

Then, the said position specifying apparatus calculates the said detection instruction time which is the time which the said detection time was corrected by "response delay time of the said detection apparatus". Then, the position specifying device designates the detection instruction time as a time for instructing the detection device to execute detection.

Accordingly, the position specifying device designates the detection instruction time in consideration of the “response delay time of the detection device” as a time for instructing the detection device to execute detection, so that the detection device detects the detection at the detection time. shows the effect that it can be executed.

Further, the position specifying device designates the detection instruction time in the control signal transmitted for each control period, for example, the position specifying device controls the detection instruction time before the detection instruction time It is specified in the control signal in the period.

Accordingly, by designating the detection instruction time in the control signal, the position specifying device is configured to specify the detection instruction time at the detection time even when the detection instruction time is not an integer multiple of the control period that is a communication period with the communication control device. It shows the effect that the detection target can be detected.

With respect to the position specifying device according to the embodiment of the present invention, the detection device is an imaging device, and the detection deviation amount calculating unit includes: the reference position in the captured image captured by the imaging device; You may calculate the said detection deviation amount from the deviation amount with a detection object.

According to the said structure, the said position specifying apparatus calculates the said detection deviation amount by the deviation amount of the said reference position in the said captured image, and the position of the said detection object in the said captured image. And the said position specifying apparatus specifies the position of the said detection object by correct|amending the said detection position with the said detection deviation amount.

Here, the image analysis technique for specifying the position of an imaging target (detection target), etc. in a captured image with high speed and high precision is known.

Accordingly, the position specifying device exhibits an effect that high-speed and high-accuracy position identification of the detection target can be realized by the detection position and the detection deviation amount calculated from the captured image at high speed and high precision.

Further, as described above, at the detection time, the position of the detection target coincides with the position of the detection device, or the amount of deviation between the two becomes sufficiently small. Accordingly, for example, when the central position of the captured image is the reference position, in the captured image, the detection target is arranged substantially at the center.

By using a captured image in which the detection object is arranged substantially in the center, the position specifying device specifies the position of the detection object in the captured image as compared to a case in which a captured image in which the detection object is not arranged substantially in the center is used. It is possible to reduce the inspection area for Therefore, the said position specifying apparatus can implement|achieve the speedup of the image analysis process required for detecting the said detection object from the said captured image.

Further, in the captured image, since the detection target is disposed substantially in the center, the position specifying device has a sensed area of the detection target that is larger than that of the captured image, compared to a captured image in which the detection target is not disposed substantially in the center. The proportion of the total can be increased. That is, the said position specifying apparatus can generate|occur|produce the said captured image imaged by enlarging the said detection object. Therefore, the said position specifying apparatus can perform high-precision image analysis with respect to the said captured image which the said detection object was enlarged and was imaged.

Therefore, the position specifying device realizes high-speed and high-precision image analysis for the captured image, and utilizes the result of the image analysis to achieve the effect of realizing high-speed and high-precision position control of the detection target. indicates.

A position specifying device according to an embodiment of the present invention sequentially specifies a position of each of a plurality of detection objects, and (A) a first prediction that is a position where a first detection object, which is one of the plurality of detection objects, should exist. A reference displacement amount is calculated from a difference between the detection position and (B) a second expected detection position, which is a position where a second detection object whose position is to be specified after the first detection object should exist, and, in the position specifying unit A position obtained by adding the reference displacement amount to the position of the first detection target specified by The time expected to coincide with the two predicted detection positions may be defined as the detection time at which the second detection object is detected, and at the detection time, the detection device may generate the detection result regarding the second detection object .

According to the above configuration, the position specifying device calculates the reference displacement amount from the difference between the first expected detection position and the second expected detection position, and sets the calculated reference displacement amount to the position of the first detection target. Let the position added to to be the corrected second predicted detection position. Then, the position specifying device sends the detection device to the second detection target at a time when at least one of the second detection target and the detection device coincides with the corrected second expected detection position. to generate the detection result for

Accordingly, the position specifying device, when specifying the positions of each of the plurality of detection objects, uses the position of the detection object specified immediately before, so as to determine the position where the detection object to be next specified is located, with high precision. It shows the effect of being able to predict the road.

For example, with respect to the reference displacement amount that is the difference between the first expected detection position and the second expected detection position, the actual displacement amount that is the difference between the actual position of the first detection object and the actual position of the second detection object , is said to be as small as the difference (dP). Similarly, with respect to the reference displacement amount that is the difference between the second expected detection position and the expected detection position of a third detection object whose position is to be specified after the second detection object, the actual position of the second detection object and the third It is assumed that the actual displacement amount, which is the difference from the actual position of the detection target, is small by the difference dP.

Then, the actual position of the third detection object is smaller than the expected detection position of the third detection object by two differences dP, that is, 2 dP.

On the other hand, if the position obtained by adding the reference displacement to the actual position of the second detection object is the corrected third predicted detection position, the actual position of the third detection object and the corrected third predicted detection position are The shift amount of is the difference dP.

That is, by using the corrected third expected detection position corrected by the position of the second detection object as compared to using the expected detection position of the third detection object without considering the position of the second detection object, Prediction accuracy of the position of the third detection target can be improved.

In order to solve the above problem, a control method according to an embodiment of the present invention is a control method of a position specifying device for specifying a position of a detection target, and targets an expected detection position preset as a position where the detection target should exist. a command step of outputting a command value calculated from a target trajectory included as a position to a servo control system that controls a position of at least one of a detection device and the detection target; At the detection time, which is a moving time of at least one of the detection device and the detection target, the target position of the servo control system calculated in consideration of a response delay time of the servo control system is a time coincident with the expected detection position, an acquisition step of acquiring a detection result of the detection device; A detection deviation amount for calculating a detection deviation amount that is a deviation amount between a detection position corresponding to the reference position and a position of the detection object from the deviation amount between the reference position and the position of the detection target in the detection result calculation step; a detection position calculation step of calculating the detection position from the position of the detection device at the detection time; and a position specifying step of specifying the position of the detection target by correcting the detection position by the detection deviation amount.

According to the said structure, the said control method calculates the said detection shift amount which is the shift amount between the said detection position and the position of the said detection object from the said detection result. Moreover, the said control method calculates the said detection position from the position of the said detection apparatus at the said detection time. And the said control method specifies the position of the said detection object by the said detection shift amount and the said detection position.

(Higher precision of position detection)

Therefore, in the control method, even when the position of the detection object and the detection position do not coincide at the detection time, the position of the detection object can be specified with high precision by using the amount of deviation between the two. indicates

(High-precision and high-speed detection results)

In addition, according to the above configuration, in the control method, from the detection result at the detection time, the target position of the servo control system calculated in consideration of the response delay time of the servo control system is the time coincident with the expected detection position. , calculates the detection deviation amount.

Here, when the detection target does not exist within a range in which the detection device can detect the detection target at the timing at which the detection device performs detection, the detection deviation amount cannot be calculated from the detection result.

Therefore, in order to avoid the situation of "the detection target does not exist within a range in which the detection device can detect the detection target at the timing at which the detection device performs detection," the control method includes: of the above detection result is obtained.

For example, when the servo control system moves only the detection device, the detection object is not moved, and the detection object is placed in the expected detection position in advance or is placed in a position sufficiently close to the expected detection position, The control method executes the following processing. That is, in the control method, a time at which the target position of the servo control system calculated in consideration of a response delay time of the servo control system that controls the position of the detection device coincides with the expected detection position is defined as the detection time .

Here, by considering the response delay time of the servo control system, the "target position of the servo control system for each time" coincides with "the feedback position of the servo control system for each time", or the amount of deviation between both is sufficiently I think it gets smaller In addition, the feedback position of the said servo control system which controls the position of the said detection apparatus can be regarded as the position of the said detection apparatus. Therefore, "the position of the detection device moved by the servo control system for each time" is "the target position for each time of the servo control system calculated in consideration of the response delay time of the servo control system" coincidentally, or the amount of deviation between both will be sufficiently small.

As described above, at the detection time, the "position of the detection device moved by the servo control system" and the expected detection position coincide, or the amount of deviation between the two will be sufficiently small. And, as described above, the detection target is placed in the expected detection position in advance or is placed in a position sufficiently close to the expected detection position. Therefore, at the detection time, the "position of the detection device moved by the servo control system" and the position of the detection target coincide, or the amount of deviation between the two becomes sufficiently small.

As a result, the control method can avoid a situation in which "the detection object does not exist within a range in which the detection apparatus can detect the detection object at the timing when the detection apparatus performs detection".

Further, for example, the servo control system moves only the detection target, the detection device is not moved, and the detection device is placed in the expected detection position in advance or is placed in a position sufficiently close to the expected detection position. In this case, the control method executes the following processing. That is, in the control method, a time at which the target position of the servo control system calculated in consideration of a response delay time of the servo control system that controls the position of the detection target coincides with the expected detection position is defined as the detection time. .

As described above, by considering the response delay time of the servo control system, the "target position of the servo control system at each time" coincides with the "feedback position of the servo control system at each time", or a deviation between both The amount is thought to be sufficiently small. In addition, the feedback position of the said servo control system which controls the position of the said detection object can be regarded as the position of the said detection object. Therefore, "the position of the detection target moved by the servo control system for each time" is "the target position for each time of the servo control system calculated in consideration of the response delay time of the servo control system" coincidentally, or the amount of deviation between both will be sufficiently small.

As described above, at the detection time, the "position of the detection target moved by the servo control system" and the expected detection position coincide, or the amount of deviation between the two will be sufficiently small. And, as described above, the detection device is placed in the expected detection position in advance, or is placed in a position sufficiently close to the expected detection position. Therefore, at the detection time, "the position of the detection target moved by the servo control system" and the position of the detection device coincide with each other, or the amount of deviation between the two becomes sufficiently small.

As a result, the control method can avoid a situation in which "the detection object does not exist within a range in which the detection apparatus can detect the detection object at the timing when the detection apparatus performs detection".

Further, for example, when the first servo control system moves the detection device and the second servo control system moves the detection target, the control method uses the following times as the detection times. That is, the time at which the target positions of the first servo control system and the second servo control system calculated in consideration of the response delay times of the first servo control system and the second servo control system coincide with the expected detection position together , as the detection time.

As described above, by considering the response delay time of the servo control system, the "target position of the servo control system at each time" coincides with the "feedback position of the servo control system at each time", or a deviation between both The amount is thought to be sufficiently small.

In addition, the feedback position of the said 1st servo control system which controls the position of the said detection apparatus can be regarded as the position of the said detection apparatus. In addition, the feedback position of the said 2nd servo control system which controls the position of the said detection object can be regarded as the position of the said detection object.

Therefore, the "position of the moving detection device for each time" coincides with "the target position for each time of the first servo control system calculated in consideration of the response delay time of the first servo control system" or , or the amount of deviation between both will be sufficiently small. In addition, the "position of the detection target in movement at each time" coincides with "the target position for each time of the second servo control system calculated in consideration of the response delay time of the second servo control system"; Alternatively, the amount of deviation between the two will be sufficiently small.

As described above, at the detection time, the "position of the moving detection device" and the "moving position of the detection target" coincide with the expected detection position, or the amount of deviation of the three characters will be sufficiently small .

As a result, the control method can avoid a situation in which "the detection object does not exist within a range in which the detection apparatus can detect the detection object at the timing when the detection apparatus performs detection".

The control method is a moving time of at least one of the detection device and the detection target, the detection being the time “the position of the detection target coincides with the position of the detection device, or the amount of deviation between them is sufficiently small” The detection result at the time is acquired.

Here, since the position of the detection device at the detection time corresponds to the detection position, in the detection result at the detection time, the amount of deviation between the reference position and the position of the detection target is sufficiently small. I think. And, if it is known in advance that "in the detection result, the amount of deviation between the reference position and the position of the detection target is sufficiently small", "in the detection result, the amount of deviation between both is unpredictable or predicted to be large" ', the analysis to the detection result can be made more accurate than the case.

Therefore, the control method acquires "the detection result at the detection time" that can perform high-precision analysis, that is, calculates the detection deviation amount from "the detection result at the detection time" with high precision. road can be calculated.

Further, the control method calculates the detection deviation amount from “the detection result detected by the detection device while at least one of the detection target and the detection device is moving”. Therefore, in the control method, the detection result can be acquired at a higher speed than in the case of "stop the movement of the detection target and the detection device, then cause the detection device to detect and generate the detection result" As a result, it is possible to speed up the calculation of the detection deviation amount.

(Higher precision and higher speed of specifying the position of the detection target)

As described above, in the control method, the detection result capable of performing high-precision analysis can be acquired at high speed, and the detection deviation amount can be calculated from the detection result at high speed and with high precision. And the said control method specifies the position of the said detection target by the said detection shift amount calculated and the said detection position.

Accordingly, the control method has an effect that the position of the detection target can be specified at high speed and with high precision.

According to one embodiment of the present invention, even when at least one of the detection object and the detection device is moving, there is an effect that the position of the detection object can be specified with high accuracy.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the principal part of the position specifying apparatus which concerns on Embodiment 1 of this invention.
FIG. 2 is a diagram showing an overall overview of a control system including the position specifying device of FIG. 1 .
3 is a view for explaining an application example of the control system of FIG. 2 .
FIG. 4 is a diagram showing an operation example in which the position specifying device of FIG. 1 controls the position of the work through the servo control system for the application example shown in FIG. 3 .
It is a figure explaining the deformation|transformation of the imaging method of a workpiece|work.
It is a figure explaining "the amount of position shift in an image" calculated from a captured image.
7 is a view for explaining the servo position deviation and the like in the case where the response delay time of the servo control system is not taken into consideration.
Fig. 8 is a diagram for explaining the servo position deviation and the like when the response delay time of the servo control system is taken into consideration.
Fig. 9 is a diagram showing an example of a motion profile when an expected detection position is set to "100".
It is a figure explaining the shift|offset|difference between the feedback position and the target position which considered the response delay time of the servo control system at the detection time.
11 is a diagram showing an example of a motion profile in the case where an expected detection position is set to "40".
It is a figure explaining the pixel resolution required at the time of image analysis with respect to the captured image according to the difference of the required precision with respect to the position of the workpiece|work to be specified.
It is a figure explaining the process performed by the position specifying apparatus of FIG. 1, when specifying the position of each of a some work sequentially.
Fig. 14 is a flowchart for explaining the overall outline of processing executed by the location specifying apparatus of Fig. 1;
Fig. 15 is a flowchart for explaining an example of the detection instruction time determination process of Fig. 14;
16 is a flowchart for explaining an example of each of the detection deviation amount calculation processing and the detection position calculation processing of FIG. 14 .

[Embodiment 1]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment (hereinafter also referred to as “the present embodiment”) according to one aspect of the present invention will be described with reference to the drawings. In addition, the same code|symbol is attached|subjected to the same or equivalent part in a figure, and the description is not repeated. In the present embodiment, a position specifying device ( 10) will be described as a typical example of "a position specifying apparatus for specifying the position of a detection target".

§One. Application example

(Overview of the control system)

In order to facilitate understanding of the location specifying device 10 according to the embodiment of the present invention, first, an example of a case to which the present invention is applied, specifically, including the location specifying device 10 The outline|summary of the control system 1 is demonstrated using FIG.

FIG. 2 is a diagram showing the overall outline of the control system 1 . The control system 1 comprises a position specifying device 10 as a master, and a servo control system 20 and a detection system 30 as one or more slaves connected to the master via a network. It is a slave control system. The position specifying device 10 is called a "master" in the meaning of managing data transmission via a network in the control system 1, while "slave" is managed by the master, for example, , data collection and control of equipment installed in the factory. In the control system 1, as a network connecting the position specifying device 10 as a master, and the servo control system 20 and the detection system 30 as slaves, for example, EtherCAT (registered trademark) can be used. .

In addition, "master" and "slave" are defined with attention to the control function of data transmission on the network, and what kind of information is transmitted/received between each device is not particularly limited.

(location specific device)

The position specifying device 10 acquires, as a master, data indicating control results (eg, control amount and detection result) outputted by slaves such as the servo control system 20 and the detection system 30 for each control cycle Cc. do (receive). In addition, the position specifying device 10 serves as a master as slaves such as the servo control system 20 and the detection system 30, and includes a control signal Cs including a command value Cm and a detection instruction time aTd ( control instruction) is output (transmitted) for each control period Cc.

The position specifying device 10 is, for example, an industrial position specifying device such as a PLC (Programmable Logic Controller) that executes a user program for controlling a control device such as the servo motor 22 . In the control system 1, the position specifying device 10 is a high-level controller with respect to the servo driver 21 as a low-level controller.

Specifically, the position specifying device 10 controls the servo control system 20 including the servo driver 21 with the command value Cm generated for each control period Cc from the target trajectory Tt. Output every (Cc). In the servo control system 20, the servo driver 21 which received the command value Cm performs feedback control so that the control amount which is the output of the servomotor 22 etc. which is a control object may follow the command value Cm. Then, the position specifying device 10 receives data from the servo control system 20 (particularly, the servo driver 21 ) regarding the output (control amount, eg, torque, speed, position, etc.) of the servo motor 22 . is acquired for each control period Cc. The position specifying device 10 further sends a command value Cm to the servo control system 20 based on the control amount received from the servo control system 20 (eg, the feedback position Pf for each control period Cc). The servo control system 20 is controlled by generating and transmitting the generated command value Cm to the servo control system 20 .

Here, the position specifying apparatus 10 controls the some servo control system 20, for example, and specifically controls the some servo control system 20 as follows. That is, the position specifying device 10 generates the command trajectory Co for each servo control system 20 from the target trajectory Tt for each of the plurality of servo control systems 20 . Then, the position specifying device 10 transmits the “command value Cm for each servo control system 20” generated from the command trajectory Co for each servo control system 20 to each of the plurality of servo control systems 20 . It outputs for each control period Cc for each other, and cooperatively controls the plurality of servo control systems 20 . The position specifying apparatus 10 considers the response delay time Ds of each servo control system 20, and produces|generates the "command value Cm for each servo control system 20", whereby the plurality of servo control systems 20 ) is synchronized with the level of the operation result (control amount).

In the example shown in Fig. 2, the position specifying device 10, from the target trajectory Tt, the servo control systems 20(A) and 20(B), respectively, command trajectories Co(A) and Co(B) ) is created. The position specifying device 10 has the command values Cm(A) and Cm(B) of the servo control systems 20(A) and 20(B), respectively, from the command trajectories Co(A) and Co(B), respectively. )) is created. In particular, the position specifying apparatus 10 considers the response delay times Ds(A) and Ds(B) of each of the servo control systems 20(A) and 20(B), and the command value Cm(A) and Cm(B)). The position specifying device 10 outputs the command values Cm(A) and Cm(B) for each control period Cc of the servo control system 20, thereby causing the servo control systems 20(A) and 20(B) ) to cooperatively control each.

Moreover, in the control system 1, the position specifying apparatus 10 outputs the control signal Cs which designated the detection instruction time aTd, for example every control period Cc. Further, the position specifying device 10 receives, from the detection system 30 , a detection result (eg, captured image Im) that is a result of a detection operation (eg, imaging operation) performed by the detection system 30 , for example. For example, it is acquired (received) every control cycle Cc.

Although the specific content will be mentioned later, the position specifying apparatus 10 transmits the detection instruction time aTd which is the time which correct|amended the detection time Td by "response delay time Dd of the detection system 30" to a control signal It is specified in (Cs). Then, the position specifying device 10 outputs a control signal Cs specifying the detection instruction time aTd to the detection system 30, so that the imaging device 33 (detection device) at the detection time Td. A detection operation (imaging operation) is performed.

In the example shown in FIG. 2, with respect to the position specifying apparatus 10 as a master, two servo control systems 20 and one detection system 30 are servo control systems 20 (A) and 20 (B). , an example connected as a slave is shown. However, it is not essential that there are two servo control systems 20 connected to the position specifying device 10, and in the control system 1, there is only one servo control system 20 connected to the position specifying device 10 as a master. It may be more than one, for example, five may be sufficient.

In the following description, when it is necessary to distinguish each of the plurality of servo control systems 20 with respect to the servo control system 20, reference numerals "(A)", "(B)", "(C)", … , and a subscript such as “(Z)” to distinguish them. For example, "servo control system 20(A)", "servo control system 20(B))", "servo control system 20(C)", ... , "servo control system 20 (Z)" is described and distinguished. When it is not necessary to distinguish each of the plurality of servo control systems 20 in particular, it is only called "servo control system 20".

In addition, with respect to the workpiece|work 40, when it is necessary to distinguish each of the some workpiece|work 40, "(A)", "(B)", "(C)", ... , and a subscript such as “(Z)” to distinguish them. For example, "workpiece 40(A)", "workpiece 40(B))", "workpiece 40(C))", ... , "work 40 (Z)" is described and distinguished. When it is not necessary to distinguish each of the plurality of workpieces 40, it is simply referred to as "workpiece 40". The same applies to "position Pw of workpiece 40", "captured image Im", "detection time Td", "expected detection position pPd", and the like.

(Servo control system)

The servo control system 20 controls the output (eg, position) of the servo control system 20 according to the command value Cm from the position specifying device 10 , specifically, the imaging device 33 . and a feedback control system for controlling the position of at least one of the workpieces 40 . For example, in the example shown in FIG. 3 , the servo control system 20 controls the position of the imaging device 33 , and in the example shown in FIG. 4 , the servo control system 20 controls the position ( Pw) (more specifically, the position of the substrate on which the workpiece 40 is placed) is controlled.

The servo control system 20 includes a servo motor 22 as an actuator that changes the position of at least one of the imaging device 33 and the workpiece 40 , and a servo driver 21 that controls the servo motor 22 . includes

The servo driver 21, as a control device of the servo motor 22, receives the control signal Cs (specifically, the command value Cm) from the position specifying device 10 at every control cycle Cc, , controls the driving of the servo motor 22 according to the received control signal Cs. In addition, the servo driver 21 acquires actually measured values related to the output of the servo motor 22 such as position, speed, and torque from a position sensor and a torque sensor connected to the shaft of the servo motor 22 . do. The servo driver 21 outputs the acquired data regarding these measured values to the position specifying apparatus 10 for every control period Cc.

The servo motor 22 is an actuator whose output (specifically, the position of at least one of the imaging device 33 and the workpiece 40) is controlled according to the control of the servo driver 21, for example, a linear ( linear) actuator. The servo motor 22 changes the position of the imaging device 33 by, for example, driving the axis of a manipulator having the imaging device 33 on a fingertip, i.e., the detection position ( Pd) is changed. In the following description, "the output position of the servo control system 20" as an actually measured value regarding the output of the servomotor 22 is also called "feedback position Pf."

For example, when the servo control system 20 controls the position of the imaging device 33, the output of each of the servo motor 22 (A) and the servo motor 22 (B) causes the X-axis to be orthogonal to each other; The position of the imaging device 33 in each of the Y-axis is determined. That is, the values in each of the X and Y axes of the position of the imaging device 33 (in other words, the detection position Pd) are the values of the servo motor 22 (A) and the servo motor 22 (B), respectively. determined by the output. Each of the servo drivers 21 (A) and 21 (B) controls the output of each of the servo motors 22 (A) and 22 (B), ie, controls each drive.

For example, when the servo control system 20 controls the position of the imaging device 33 , the servo driver 21 (A) is one of the measured values (control amount) related to the output of the servo motor 22 (A). As , the feedback position Pf(A) in the X-axis of the imaging device 33 is transmitted to the position specifying device 10 . Similarly, the servo driver 21 (B) sets the feedback position Pf (B) in the Y-axis of the imaging device 33 as one of the control amounts of the servo motor 22 (B) into the position specifying device 10 . ) is sent to

(detection system)

The detection system 30 generates a detection result that is a result of detecting the workpiece 40, and in particular, information for calculating "the amount of deviation between the position Pw of the workpiece 40 and the detection position Pd" It generates as a detection result and notifies (transmits) the generated detection result to the location specifying apparatus 10. The detection system 30 illustrated in FIG. 2 includes an imaging device 33 that is a detection device, an imaging control device 32 that controls a detection operation (eg, imaging operation) by the imaging device 33 , and imaging control. It includes a communication device 31 for performing communication with the device 32 .

The imaging device 33, upon receiving a detection trigger (imaging trigger) from the imaging control device 32 , executes a detection operation (imaging operation), and displays the result of the executed detection operation, for example, an imaging operation The captured image Im generated by the execution of is output (transmitted) to the image capturing control device 32 .

The imaging control device 32 outputs (transmits) a detection trigger (imaging trigger) to the imaging device 33 , thereby causing the imaging device 33 to perform a detection operation (imaging operation), and furthermore, 33), a detection result (eg, captured image Im) that is a result of execution of the detection operation is received. In particular, when the imaging control device 32 receives an output instruction (detection instruction) instructing output of a detection trigger (imaging trigger) to the imaging device 33 from the communication device 31 , the imaging device 33 detects Send trigger.

When the imaging control device 32 receives, from the imaging device 33, a detection result (eg, the captured image Im) that is the execution result of the detection operation, the received detection result is transmitted to the location specifying device ( 10) to output (transmit). For example, the imaging control device 32 sets the detection result (eg, the captured image Im) that is the execution result of the detection operation by the imaging device 33 at a certain control period Cc after the detection time Td. ), output (transmits) to the location specifying device 10 via the network.

Although specific details will be described later, when the imaging control device 32 receives a detection result (eg, the captured image Im) that is the execution result of the detection operation from the imaging device 33, it interprets the received detection result, You may output an analysis result to the position specifying apparatus 10 via a network. For example, the imaging control device 32 performs image analysis on the captured image Im generated by the imaging device 33, and determines the result of the image analysis at a certain control period ( In Cc), you may output to the location specifying apparatus 10 via a network.

Specifically, the imaging control device 32 performs image analysis on the captured image Im to determine the position Pw of the work 40 in the captured image Im (eg, the central position of the work 40 ). ) and the reference position Rb, the amount of "position shift in the image" may be calculated. In addition, the imaging control apparatus 32 may output the calculated "positional shift in the image" amount to the position specifying apparatus 10 via a network. For example, the imaging control device 32 may transmit the calculated amount of "positional shift in the image" to the position specifying device 10 at a certain control period Cc after the detection time Td.

The communication device 31 receives the control signal Cs from the position specifying device 10 at every control period Cc, and at a detection instruction time aTd specified by the received control signal Cs, an output instruction (detection instruction) is output (transmitted) to the imaging control device 32 .

In the detection system 30, after the communication device 31 transmits an output instruction to the imaging control device 32, a predetermined time is required for the imaging device 33 to perform the detection operation, and this predetermined time is It is also called "response delay time Dd of detection system 30". The "response delay time Dd of the detection system 30" is also called "response delay time of the imaging device 33 (detection device)".

(Example of application of control system)

3 : is a figure explaining the application example of the control system 1. As shown in FIG. Specifically, the control system 1 moves the imaging device 33 in order to specify the position Pw of each of the plurality of workpieces 40 placed on the substrate, so as to be applied to each of the plurality of workpieces 40 . It is a figure explaining the example applied to the application which produces|generates the captured image Im.

The control system 1 (in particular, the position specifying device 10), as illustrated in FIG. 3, is a trajectory passing over the head of each of the plurality of workpieces 40 placed on the substrate, the imaging device 33 ) is moved. Moreover, the position specifying apparatus 10 makes the imaging apparatus 33 perform imaging on the head of each of the several workpiece|works 40, and produces|generates the captured image Im with respect to each of the several workpiece|works 40. As shown in FIG. Then, the position specifying device 10 determines the position of the imaging device 33 at the time at which the imaging device 33 generates the captured image Im for each of the plurality of workpieces 40 , and the plurality of workpieces 40 . ) The positions Pw of each of the plurality of workpieces 40 are specified from the captured images Im for each.

For example, as indicated by a dotted arrow in FIG. 3 , the position specifying device 10 first moves the imaging device 33 over the head of the work 40 (A), and then the work 40 (B) )) over the head, and further sequentially moves over the heads of the workpieces 40 (C), 40 (D), 40 (E)).

In addition, the position specifying device 10 causes the imaging device 33 to image over the heads of each of the workpieces 40(A) to 40(E), and the workpieces 40(A) to 40(E), respectively. A captured image Im is generated for , that is, a captured image Im(A) to a captured image Im(E) are generated.

Then, the position specifying device 10 determines the position of the imaging device 33 at the detection time Td(A), which is the time at which the imaging device 33 generates the captured image Im(A). , the position Pw(A) of the work 40(A) is specified from the captured image Im(A). The position specifying device 10 includes "the position of the imaging device 33 at the detection time Td(B), which is the time at which the imaging device 33 generates the captured image Im(B)", and imaging From the image Im(B), the position Pw(B) of the work 40(B) is specified. The position specifying device 10 includes "the position of the imaging device 33 at the detection time Td(C), which is the time at which the imaging device 33 generates the captured image Im(C)", and imaging From the image Im(C), the position Pw(C) of the work 40(C) is specified. The position specifying device 10 includes "the position of the imaging device 33 at the detection time Td(D), which is the time at which the imaging device 33 generates the captured image Im(D)", and imaging From the image Im(D), the position Pw(D) of the work 40(D) is specified. The position specifying device 10 includes "the position of the imaging device 33 at the detection time Td(E), which is the time at which the imaging device 33 generates the captured image Im(E)", and imaging From the image Im(E), the position Pw(E) of the work 40(E) is specified.

Here, in the example shown in FIG. 3, the workpiece|work 40 is a 1 mm or less microelectronic component, for example, a multilayer ceramic capacitor, a crystal oscillator, an IC chip, and other various elements. Since the miniaturization of components and miniaturization of circuits are progressing, high precision is calculated|required in the operation|work (position specification operation|work, inspection operation|work) for specifying the position of such an electronic component on a board|substrate. In addition, since the number of inspection points is increasing in accordance with the increase in the number of parts used, the time required for the position identification operation and the inspection operation is shortened by speeding up the above-mentioned position identification operation and inspection operation. is also required. That is, there is a desire to realize position inspection at high speed and with high precision for fine parts arrangement and fine print patterns.

Then, the control system 1 (particularly, the position specifying apparatus 10) specifies the position Pw of the workpiece|work 40 with high precision using the following two values. That is, the position specifying device 10 includes a "detection position Pd (that is, the position of the imaging device 33 at the detection time Td)" and a "detection position Pd and the position of the workpiece 40 ." The position Pw of the workpiece 40 is specified with high precision by the detection deviation amount Qd which is the deviation amount from (Pw)". Since the detection position Pd corresponds to the reference position Rb in the captured image Im, the detection shift amount Qd is defined as the “position Pw of the workpiece 40 in the captured image Im”. .

In addition, the control system 1 (in particular, the position specifying device 10 ) does not stop the movement of the imaging device 33 , and, while the imaging device 33 is moving, attaches the workpiece 40 to the imaging device 33 . is imaged, and the detection deviation amount Qd is calculated from the captured image Im obtained as a result. Therefore, the control system 1 (particularly, the position specifying device 10 ) considers the detection deviation amount Qd compared to the method of generating the captured image Im after stopping the movement of the imaging device 33 . High-precision positioning of the workpiece 40 can be realized at high speed.

(About the example of moving the detection device)

In the control system 1 illustrated in FIG. 3 , the position of the imaging device 33 as the detection device is controlled by the servo control system 20 , that is, the position of the imaging device 33 is determined by the servo control system 20 . is determined by the output of That is, the position specifying apparatus 10 makes the servo driver 21 control the output (output position) of the servo motor 22 by transmitting the command value Cm to the servo driver 21 . For example, the positions of the imaging device 33 on each of the X and Y axes orthogonal to each other are the outputs of the two servo control systems 20 called the servo control systems 20 (A) and 20 (B). (output location).

Specifically, the servo driver 21(A), which received the command value Cm(A) from the position specifying device 10, controls the servomotor 22(A), and the servomotor 22(A) ), the imaging device 33 moves in the X-axis direction. Further, the control result (output) of the servo motor 22 (A) is fed back to the servo driver 21 (A). Similarly, the servo driver 21 (B), which received the command value Cm (B) from the position specifying device 10, controls the servo motor 22 (B), and sends the servo motor 22 (B) to Accordingly, the imaging device 33 moves in the Y-axis direction. Further, the control result of the servo motor 22 (B) is fed back to the servo driver 21 (B).

In addition, in the control system 1 illustrated in FIG. 3 , the position specifying device 10 transmits the control signal Cs specifying the detection instruction time aTd to the detection system 30 (in particular, the communication device 31 ). ) to cause the imaging device 33 to perform imaging at the detection time Td. The detection time Td is a time at which the position of the imaging device 33 and the position Pw of the work 40 coincide or the amount of deviation between the two becomes sufficiently small. The captured image Im generated by the imaging device 33 performing imaging at the detection time Td is transmitted to the position specifying device 10 by the imaging control device 32 . The imaging control device 32 calculates the "position Pw and the reference position of the workpiece 40 in the captured image Im," calculated by image analysis on the captured image Im instead of the captured image Im. You may output to the position specifying device 10 the "amount of position shift in the image" which is the shift amount with (Rb).

Here, the detection position Pd, which is a position where the imaging device 33 detects the work 40, can be regarded as the position of the imaging device 33 at the detection time Td. Therefore, the position specifying device 10 can calculate the detection position Pd from the position of the imaging device 33 at the detection time Td.

In addition, the detection position Pd, ie, the position of the imaging device 33 at the detection time Td, is a reference position Rb in the captured image Im that is a detection result generated by the imaging device 33 . (For example, the center position of the captured image Im). Therefore, the position specifying apparatus 10 determines the detection position Pd corresponding to the reference position Rb from the amount of deviation between the reference position Rb in the captured image Im and the position Pw of the work 40 . ) and the displacement amount (detection displacement Qd) between the position Pw of the workpiece 40 can be calculated. In the example shown in FIG. 3, the reference position Rb in the captured image Im is shown as a point where the dashed-two dotted line in the captured image Im intersects.

Then, the position specifying device 10 is determined by the detection position Pd calculated from the position of the imaging device 33 at the detection time Td and the detection deviation amount Qd calculated from the captured image Im. , the position Pw of the work 40 is specified.

In the example shown in FIG. 3 , the example in which the position specifying device 10 controls the position of the imaging device 33 via the servo control system 20 has been described. The position Pw of the work 40 may be controlled through . Hereinafter, an example in which the position specifying device 10 controls the position Pw of the work 40 (more specifically, the position of the substrate on which the work 40 is placed) will be described with reference to FIG. 4 .

(About the example of moving the detection target)

4 shows an application example of the control system 1 as shown in FIG. 3 , in which the position specifying device 10, via the servo control system 20, the position Pw of the workpiece 40 to be detected (more Specifically, it is a figure which shows the example of operation which controls the position of the board|substrate on which the workpiece|work 40 is placed. That is, in FIG. 3 , the position Pw of the workpiece 40 is fixed and the imaging device 33 is moved, whereas in FIG. 4 , the position of the imaging device 33 is fixed and the position of the workpiece 40 is The position Pw moves. However, in other respects, the content of the processing executed by the location specifying device 10 is substantially the same as in the example shown in FIG. 4 and the example shown in FIG. 3 .

In the control system 1 illustrated in FIG. 4 , the position Pw of the workpiece 40 is controlled by the servo control system 20 , that is, the position Pw of the workpiece 40 is the servo control system 20 . ) is determined by the output of That is, the position specifying apparatus 10 makes the servo driver 21 control the output (output position) of the servo motor 22 by transmitting the command value Cm to the servo driver 21 . For example, the values of the position Pw of the workpiece 40 on each of the X and Y axes orthogonal to each other are two servo control systems (20 (A) and 20 (B)). 20) Each output (output position).

Specifically, the servo driver 21(A), which received the command value Cm(A) from the position specifying device 10, controls the servomotor 22(A), and the servomotor 22(A) ), the workpiece 40 moves in the X-axis direction. Further, the control result (output) of the servo motor 22 (A) is fed back to the servo driver 21 (A). Similarly, the servo driver 21 (B), which received the command value Cm (B) from the position specifying device 10, controls the servo motor 22 (B), and sends the servo motor 22 (B) to By this, the work 40 moves in the Y-axis direction. Further, the control result of the servo motor 22 (B) is fed back to the servo driver 21 (B).

Also in the example shown in Fig. 4, as shown in Fig. 3, the position specifying device 10 transmits, to the detection system 30, a control signal Cs specifying the detection instruction time aTd, so that the detection time ( At Td), the imaging device 33 performs imaging. And the position specifying apparatus 10 is the position of the workpiece|work 40 by the detection position Pd calculated from the position of the imaging apparatus 33, and the detection shift amount Qd calculated from the captured image Im. (Pw) is specified. Also in the example shown in FIG. 4, as shown in FIG. 3, the reference position Rb in the captured image Im is shown as a point where the dashed-two dotted line in the captured image Im intersects.

In FIG. 3 , the operation example in which the position specifying device 10 controls the imaging device 33 via the servo control system 20 is shown. In addition, in FIG. 4 , the position specifying device 10 includes the servo control system 20 . ) through the operation example of controlling the position (Pw) of the work 40 is shown. However, it is not necessary for the position specifying device 10 to control the position by either the imaging device 33 or the workpiece 40 , and the positioning device 10 includes the imaging device 33 and the workpiece 40 . You may control the positions of both sides of .

For example, in the control system 1, the position on the X-axis of the imaging device 33 is determined by the output of the servo control system 20(A), and the Y-axis of the position Pw of the work 40 The value of the phase may be determined by the output of the servo control system 20(B). That is, the position specifying device 10 transmits the command value Cm(A) to the servo driver 21 (A), thereby sending the servo driver 21 (A) to the servo motor 22 (A). The output (output position) is controlled, that is, the position of the imaging device 33 on the X-axis is controlled. Further, the position specifying device 10 transmits the command value Cm(B) to the servo driver 21 (B), thereby providing the servo driver 21 (B) with the servo motor 22 (B). The output (output position) is controlled, that is, the value of the position Pw of the work 40 on the Y-axis is controlled.

Specifically, the servo driver 21(A), which received the command value Cm(A) from the position specifying device 10, controls the servomotor 22(A), and the servomotor 22(A) ), the imaging device 33 moves in the X-axis direction. Further, the control result (output) of the servo motor 22 (A) is fed back to the servo driver 21 (A). Similarly, the servo driver 21 (B), which received the command value Cm (B) from the position specifying device 10, controls the servo motor 22 (B), and sends the servo motor 22 (B) to By this, the work 40 moves in the Y-axis direction. Further, the control result of the servo motor 22 (B) is fed back to the servo driver 21 (B).

Even in the case where the position specifying device 10 controls the positions of both the imaging device 33 and the work 40 , the "method of specifying the position Pw of the work 40" by the position specifying apparatus 10 is , as described with reference to FIGS. 3 and 4 . That is, the position specifying device 10 transmits to the detection system 30 the control signal Cs specifying the detection instruction time aTd, thereby causing the imaging device 33 to perform imaging at the detection time Td. Then, the position specifying device 10 is determined by the detection position Pd calculated from the position of the imaging device 33 at the detection time Td and the detection deviation amount Qd calculated from the captured image Im. , the position Pw of the work 40 is specified.

In the following, in order to facilitate understanding of the processing executed by the position specifying device 10 , “the position specifying device 10 controls the position of the imaging device 33 via the servo control system 20 . "The method of specifying the position Pw of the workpiece|work 40" by the position specifying apparatus 10 is demonstrated using an example. However, as described above, the position specifying device 10 only needs to control the position of at least one of the imaging device 33 and the work 40 , and the position of the imaging device 33 in the position specifying device 10 is determined. Control is not essential.

In addition, it is not essential for the position specifying apparatus 10 to perform image analysis with respect to the captured image Im. The position specifying device 10 determines the amount of deviation between the position Pw of the work 40 (eg, the central position of the work 40 ) in the captured image Im and the reference position Rb, “in the image”. Position shift amount", the detection shift amount Qd, which is the shift amount between the position Pw of the workpiece 40 and the detection position Pd, may be specified. The imaging control device 32 may perform image analysis on the captured image Im, in other words, when the imaging control device 32 performs image analysis on the captured image Im, You may calculate the "position shift" amount. In this case, the position specifying device 10 acquires the "position shift amount in the image" from the imaging control device 32, and determines the detection shift amount Qd from the acquired "position shift amount in the image" specify (calculate).

(The first study on the imaging method of a workpiece: generation of a captured image without stopping)

5 : is a figure explaining the deformation|transformation of the imaging method of the workpiece|work 40. As shown in FIG. Fig. 5(A) is a captured image for "calculating the amount of deviation (detection amount Qd) between the detection position Pd corresponding to the reference position Rb and the position Pw of the workpiece 40" (A) Im) is a diagram for explaining a conventional method for generating.

That is, conventionally, the method of stopping the movement of the imaging device 33, imaging the workpiece|work 40, and generating the imaging image Im was common. Specifically, the conventional control system temporarily sets the moving speed (servo speed Vs) of the imaging device 33 to "0", and after vibration of the imaging device 33 or the like is settled, that is, waiting time After (vibration attenuation waiting time) passed, a detection trigger was output and the imaging device was made to image. Then, the conventional control system uses the captured image generated by the imaging device to specify the position Pw of the work 40 and inspects whether the work 40 is at a desired position.

In the conventional method of "stop the movement of the imaging device 33 and generate the captured image Im", the detection position Pd corresponding to the reference position Rb and the position Pw of the workpiece 40 are It has the advantage of being able to generate|generate the captured image Im which can detect the shift amount (detected shift amount Qd) with high precision.

However, since the conventional control system performs imaging after processing such as "stop moving the imaging device 33" and "wait until the waiting time has elapsed", As described above, there is a problem in that the time required for the execution of imaging becomes long.

Fig. 5B is a diagram of a "detection position Pd corresponding to the reference position Rb and a position Pw of the workpiece 40" executed by the control system 1 (particularly, the position specifying device 10 ). It is a figure explaining the method of generating the captured image Im for calculating the shift amount (detected shift amount Qd) with . The position specifying device 10 generates the captured image Im without stopping the movement of the imaging device 33 , that is, without stopping. Specifically, as shown in FIG. 5B , the position specifying device 10 does not set the moving speed (servo speed Vs) of the imaging device 33 to “0”, and the imaging device ( 33), a detection trigger is output to cause the imaging device 33 to perform imaging.

The method of "generating the captured image Im without stop" of the position specifying device 10 shown in FIG. Compared to the method of generating the captured image Im after stopping the movement of (33), the tact can be raised.

In particular, as shown in FIG. 5 , in order to specify the position Pw of each of the plurality of workpieces 40, when it is desired to generate a plurality of captured images Im for each of the plurality of workpieces 40, The difference between the conventional method and the method performed by the location specifying device 10 becomes large.

That is, in the conventional method, whenever it is desired to generate the captured image Im, the moving speed of the imaging device 33 is temporarily set to "0", and after the waiting time elapses, the captured image Im is generated. Therefore, in order to generate a plurality of captured images Im, an enormous amount of time was required. On the other hand, since the position specifying device 10 does not stop the movement of the imaging device 33 , that is, sequentially generates a plurality of captured images Im during the movement of the imaging device 33 , a plurality of imaging The time required for generating the image Im can be significantly shortened compared to the conventional method.

As shown in FIG. 5A , whenever the captured image Im is generated, the movement of the imaging device 33 is stopped, the position of the imaging device 33 is placed at a predetermined position, and then image pickup is performed. In the case of generating the image Im, the time required for generating the captured image Im becomes long. However, since the position of the imaging device 33 at the generation time of the captured image Im is fixed, that is, the detection position Pd is fixed, the position Pw of the workpiece 40 is a preset detection position. It can be specified by the position Pd and "the amount of deviation of the position Pw of the workpiece 40 from the detection position Pd". And "the amount of deviation of the position Pw of the workpiece 40 from the detection position Pd" is the "reference position Rb of the position Pw of the workpiece 40" in the captured image Im. Amount of deviation from ” can be accurately calculated.

On the other hand, as shown in FIG. 5B , when the captured image Im is generated without stopping the movement of the imaging device 33, the time required to generate the captured image Im is, It can be shortened compared to "the movement of the imaging device 33 is stopped every time the captured image Im is generated". However, the position of the imaging device 33 at the time of generation of the captured image Im is not fixed, that is, the detection position Pd is not fixed.

Therefore, the position Pw of the work 40 is defined as "a position of the detection position Pd that changes with each time at the generation time of the captured image Im (that is, the detection time Td)" and " If the amount of deviation of the position Pw of the work 40 from the detection position Pd” cannot be accurately grasped, it cannot be calculated. That is, in order to specify the position Pw of the work 40, the position specifying device 10 first determines the detection position Pd at the detection time Td, in other words, at the “detection time Td”. , the position of the imaging device 33” must be precisely calculated. Second, the position specifying apparatus 10 calculates the "deviation amount of the position Pw of the workpiece 40 from the detection position Pd" in the captured image Im, and determines the "position Pw of the workpiece 40" in the captured image Im. ), the amount of deviation from the reference position Rb” must be precisely calculated.

The position specifying device 10 specifies the position Pw of the workpiece 40 from the captured image Im captured while the imaging device 33 is moving without stopping the movement of the imaging device 33, The following two values are precisely calculated. That is, the position specifying device 10 determines the "deviation amount of the position Pw of the workpiece 40 from the reference position Rb" in the captured image Im, and "at the detection time Td, The position of the imaging device 33” is precisely calculated.

Here, since the position of the imaging device 33 is controlled by the servo control system 20 , the position of the imaging device 33 can be regarded as the feedback position Pf of the servo control system 20 . Therefore, "the position of the imaging device 33 at the detection time Td" can be regarded as "the feedback position Pf of the servo control system 20 at the detection time Td".

In addition, "the amount of deviation of the position Pw of the work 40 from the detection position Pd" is the "reference position Rb of the position Pw of the work 40" in the captured image Im. amount of deviation from”. In the following description, "the amount of displacement of the position Pw of the workpiece 40 from the reference position Rb" in the captured image Im may be abbreviated as "positional displacement within the image" do.

Therefore, the "position Pw of the workpiece 40" is defined as "the amount of deviation of the position Pw of the workpiece 40 from the detection position Pd" and "the detection position Pd at the detection time Td". ' can be specified" can be expressed as follows. That is, it can be expressed as {position Pw of workpiece 40 = position shift in image + "feedback position Pf (actual position) of servo control system 20 at detection time Td"} .

(About the amount of deviation between the reference position and the position of the workpiece in the captured image)

6 : is a figure explaining "the amount of position shift in an image" calculated from the captured image Im. As described above, the position specifying apparatus 10 calculates "the amount of position shift in the image" from the captured image Im, that is, the "position Pw of the workpiece 40" in the captured image Im. ), the amount of deviation from the reference position Rb” is calculated. Then, the position specifying device 10 determines the amount of deviation (detection deviation) between the detection position Pd corresponding to the reference position Rb and the position Pw of the work 40 from “the amount of position deviation in the image”. quantity (Qd)) is calculated.

In FIG. 6, the point where the dashed-dotted line intersects represents "the reference position Rb corresponding to the detection position Pd in the captured image Im (for example, the center point of the captured image Im)". In addition, the asterisk has shown "the position Pw of the workpiece|work 40 (for example, the center position of the workpiece|work 40)".

As shown in Fig. 6A, the position Pw of the work 40 (for example, the central position of the work 40) is shifted to the right with respect to the position of the image capturing apparatus 33. 33), also in the captured image Im, the position Pw of the work 40 is shifted to the right with respect to the reference position Rb.

Similarly, as shown in FIG. 6B , when the imaging device 33 performs imaging in a state where the position Pw of the workpiece 40 is shifted to the left with respect to the position of the imaging device 33, Also in the captured image Im, the position Pw of the work 40 is shifted to the left with respect to the reference position Rb.

(Adjustment of timing to execute detection)

(Consideration of response delay time of servo control system)

Here, at the timing at which the imaging device 33 executes imaging (that is, the detection time Td), when the workpiece 40 does not exist within a range in which the imaging device 33 can image the workpiece 40, the position The specific apparatus 10 cannot calculate "the amount of position shift in the image" from the captured image Im.

Therefore, in order to avoid the situation of "the workpiece 40 does not exist within the range in which the imaging device 33 can image the workpiece 40 at the detection time Td", the position specifying device 10 is is processing. That is, the position specifying device 10 sends the imaging device 33 to the imaging device 33 at an expected time when the position of the imaging device 33 (that is, the detection position Pd) and the position Pw of the workpiece 40 coincide. Execute imaging.

For example, the position specifying device 10 is, from a design diagram of "a substrate on which the work 40 is placed", etc., "a position where the work 40 should exist (in other words, as a position where the work 40 is placed, The predicted detection position pPd, which is a position set in advance, etc.)" is acquired in advance. Then, the position specifying device 10 performs the following processing in order to "identify the position Pw of the work 40 actually placed on the substrate and confirm whether the work 40 is placed according to the above-described design diagram." run

In other words, the position specifying device 10 controls the servo control system 20 so that the imaging device 33 is “preliminarily placed at the expected detection position pPd on the substrate or close enough to the expected detection position pPd”. The imaging device 33 is moved so that it passes over the head of the "work 40 to be placed in the position". Specifically, the position specifying device 10 controls the servo control system 20 along a target trajectory Tt in which the expected detection position pPd of the workpiece 40 to be detected is the target position Pt. When the position specifying device 10 controls the position of the imaging device 33 via the servo control system 20 , the target trajectory Tt corresponds to a movement path of the imaging device 33 .

Here, when the response delay time Ds of the servo control system 20 is not considered with respect to the position control of the imaging device 33 by the servo control system 20, the large servo position deviation (servo control system) illustrated in FIG. 7 . (20), the difference between the target position Pt and the feedback position Pf) occurs.

7 : is a figure explaining the servo position deviation (difference between target position Pt and feedback position Pf) etc. in the case where the response delay time Ds of the servo control system 20 is not taken into consideration. As shown in FIG. 7A , the feedback position Pf of the servo control system 20 is "a target of the servo control system 20 that does not consider the response delay time Ds of the servo control system 20 . position Pt", it is delayed by the response delay time Ds of the servo control system 20. As a result, when the response delay time Ds of the servo control system 20 is not taken into consideration, as shown in Fig. 7B, a relatively large servo positional deviation periodically occurs.

8 is a view for explaining the servo position deviation (difference between the target position Pt and the feedback position Pf) and the like in the case where the response delay time Ds of the servo control system 20 is taken into consideration. In FIG. 8A , "the target position Pt of the servo control system 20 in consideration of the response delay time Ds of the servo control system 20" is indicated by a dotted line. As shown in Fig. 8A, the feedback position Pf of the servo control system 20 is the target position ( Pt)” is almost identical. As a result, when the response delay time Ds of the servo control system 20 is considered, as shown in FIG. 8B, the servo position deviation becomes sufficiently small.

Therefore, the position specifying apparatus 10 is "at an expected time when the position of the imaging device 33 (ie, the detection position Pd) and the position Pw of the work 40 coincide with the imaging device 33 , to perform imaging", the detection time Td is determined as follows. That is, in the position specifying device 10, "the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20" coincides with the predicted detection position pPd. Let the time to be taken as the detection time Td.

As illustrated in FIG. 8 , by considering the response delay time Ds of the servo control system 20, the "target position Pt for each time of the servo control system 20" and the "servo control system 20, The feedback position Pf for each time" coincides, or the amount of deviation of both becomes small enough. In addition, as described above, the feedback position Pf of the servo control system 20 can be regarded as the position of the imaging device 33 . Therefore, "the position of the imaging device 33 for each time" is the "target position for each time of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 ( Pt)", or the amount of deviation between both will be sufficiently small.

As described above, at the detection time Td, the "position of the imaging device 33" and the expected detection position pPd coincide, or the amount of deviation between both will be sufficiently small. And, as mentioned above, the workpiece|work 40 is set in advance at the predicted detection position pPd, or it is set in the position close enough to the predicted detection position pPd. Therefore, at the detection time Td, the position of the imaging device 33 and the position Pw of the work 40 coincide with each other, or the amount of deviation between the two becomes sufficiently small.

As a result, the position specifying device 10 can avoid the situation that "the workpiece 40 does not exist within the range in which the imaging device 33 can image the workpiece 40 at the detection time Td". .

In particular, the position specifying device 10 has the imaging device 33 at a detection time Td, which is a time at which the detection position Pd and the position Pw of the workpiece 40 coincide or the amount of deviation between the two becomes sufficiently small. ), the following captured image Im can be generated. That is, the position specifying device 10 is a captured image "the reference position Rb corresponding to the detection position Pd and the position Pw of the imaged workpiece 40 coincide or the amount of deviation between both is sufficiently small" (Im) can be created. For the captured image Im, "the reference position Rb corresponding to the detection position Pd and the position Pw of the imaged workpiece 40 coincide, or the amount of deviation between them is sufficiently small", high-resolution image analysis can be executed, the position specifying device 10 can calculate the detection deviation amount Qd with high accuracy.

9 : is a figure which shows an example of the motion profile in the case where the predicted detection position pPd (in other words, the target position Pt) is set to "100". Specifically, Fig. 9(A) shows a servo in which "response delay time Ds of the servo control system 20 is taken into account at each time when the expected detection position pPd is set to 100". The target position Pt of the control system 20" and "the corresponding target speed of the servo control system 20" are shown. Fig. 9(B) shows the servo control system 20 in which "response delay time Ds of the servo control system 20 is taken into account at each time when the predicted detection position pPd is set to "100". The amount of deviation of “the feedback position Pf of the servo control system 20” with respect to the “target position Pt of ” is shown.

When the expected detection position pPd is set to “100”, the “target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20” at each time The shift amount of "the feedback position Pf of the servo control system 20" is contained in the following range. It falls within the range of "-0.005 mm (ie, -5 micrometers)" to "+0.005 mm (ie, +5 micrometers)".

As shown in FIG. 9B , the feedback position Pf of the servo control system 20 at each time of the servo control system 20 considers the response delay time Ds of the servo control system 20 . Even if it does, it does not fully correspond with the target position Pt of the servo control system 20 at each time. That is, the position of the imaging device 33 at each time does not completely match the target position Pt of the servo control system 20 even if the response delay time Ds of the servo control system 20 is taken into consideration.

Here, as described above, at the detection time Td, "the target position Pt of the servo control system 20 taking the response delay time Ds of the servo control system 20 into account" is the expected detection position pPd matches to And, at the detection time Td, "the target position Pt of the servo control system 20 taking the response delay time Ds of the servo control system 20 into account" and "the feedback position Pf of the servo control system 20" (that is, the position of the imaging device 33)" does not match. Therefore, at the detection time Td, the position of the imaging device 33 does not completely coincide with the expected detection position pPd. However, as described above, by considering the "response delay time Ds of the servo control system 20", the "target position Pt of the servo control system 20" and the "feedback position Pf of the servo control system 20" )" is sufficiently small. That is, at the detection time Td, the amount of deviation between the expected detection position pPd and the position of the imaging device 33 is sufficiently small.

10 is a target position of the servo control system 20 in consideration of the "feedback position Pf of the servo control system 20" and the "response delay time Ds of the servo control system 20" at the detection time Td. (Pt)" is a figure explaining the shift|offset|difference. Specifically, in FIG. 10 , FIG. 9B and an enlarged view of FIG. 9B in the vicinity of the detection time Td are shown. In the enlarged view, the target of the servo control system 20 in consideration of the "feedback position Pf of the servo control system 20" and the "response delay time Ds of the servo control system 20" at the detection time Td in the enlarged view The shift (amount) with the "position Pt" is indicated by a dashed-dotted arrow.

11 : is a figure which shows an example of the motion profile in the case where the predicted detection position pPd (in other words, the target position Pt) is set to "40". Specifically, Fig. 11(A) shows a servo in which "response delay time Ds of the servo control system 20 is taken into consideration at each time when the expected detection position pPd is set to "40". The target position Pt of the control system 20" and "the corresponding target speed of the servo control system 20" are shown. Fig. 11(B) shows the servo control system 20 in which the "response delay time Ds of the servo control system 20 is taken into account at each time when the predicted detection position pPd is set to "40". The amount of deviation of “the feedback position Pf of the servo control system 20” with respect to the “target position Pt of ” is shown.

When the predicted detection position pPd is set to “40”, the “target position Pt of the servo control system 20 taking into account the response delay time Ds of the servo control system 20” at each time “ The shift amount of "the feedback position Pf of the servo control system 20" is contained in the following range. It is in the range of "-0.2 mm (ie, -200 micrometers)" to "+0.2 mm (ie, +200 micrometers)".

Compared to the “deviation amount when the expected detection position pPd is set to “100”” shown in FIG. 9B, the “expected detection position pPd” shown in FIG. 11B is “40”. The amount of deviation in the case of ” is large. That is, the "deviation amount when the expected detection position pPd is "100" shown in FIG. 9B fell within the range of "0.005 mm" to "+0.005 mm". On the other hand, the "deviation amount when the expected detection position pPd is set to "40"" shown in FIG. 11B is in the range of "-0.2 mm" to "+0.2 mm".

As shown in FIG. 11A , when the moving distance of the imaging device 33 is shortened, the motion profile becomes a triangular wave, and the feedback position Pf is set to the “response delay time Ds of the servo control system 20”. It becomes more difficult to follow the "target position Pt of the servo control system 20" in consideration of However, as described above, by considering the "response delay time Ds of the servo control system 20", the deviation between the expected detection position pPd and the position of the imaging device 33 at the detection time Td quantity can be reduced.

(Consideration of the response delay time of the detection system)

As described so far, the position specifying device 10 detects the detection time Td, which is the time when the position of the imaging device 33 and the position Pw of the work 40 coincide with each other, or the amount of deviation between the two becomes sufficiently small. , the captured image Im is generated.

However, even if the position specifying device 10 outputs the imaging instruction to the imaging device 33 at the detection time Td, the imaging device 33 cannot perform imaging at the detection time Td. As described above, the communication between the detection system 30 including the imaging device 33 and the position specifying device 10 is executed every control period Cc, and the response delay time of the detection system 30 is This is because (Dd) (for example, the response delay time Dd of the imaging device 33) also exists. Therefore, the position specifying device 10 outputs the detection instruction time aTd to the detection system 30 in advance so that the imaging device 33 can perform imaging at the detection time Td.

That is, the position specifying device 10 (in particular, the detection time determination unit 1150 in Fig. 1 ) first determines the "target position ( The time at which Pt) coincides with the expected detection position pPd” is defined as the detection time Td. For example, the detection time determination unit 1150 sets the response delay time Ds of the servo control system 20 from "the time at which the target position Pt of the servo control system 20 and the expected detection position pPd coincide" ) at which the elapsed time is defined as the detection time Td. Then, the detection time determination unit 1150 sets "the time at which the detection time Td is corrected by the response delay time Dd of the detection system 30" as the detection instruction time aTd. For example, the detection time determination unit 1150 sets "the time at which the response delay time Dd of the detection system 30 has moved backward from the detection time Td" as the detection instruction time aTd. Then, the position specifying device 10 (in particular, the command unit 1210 in FIG. 1 ) outputs the detection instruction time aTd to the detection system 30 in advance.

The position identification device 10 outputs to the detection system 30 in advance the detection instruction time aTd, which is "the time at which the detection time Td is corrected by the response delay time Dd of the detection system 30" By setting it, the imaging device 33 can perform imaging at the detection time Td. And at the detection time Td, "the target position Pt of the servo control system 20 taking the response delay time Ds of the servo control system 20 into consideration" and the predicted detection position pPd coincide. Therefore, if "the target position Pt of the servo control system 20 in consideration of the response delay time Ds of the servo control system 20" and "the feedback position Pf of the servo control system 20" coincide, the following relationship is established That is, at the detection time Td, "the feedback position Pf of the servo control system 20" and the expected detection position pPd coincide. That is, at the detection time Td, the position of the imaging device 33 and the expected detection position pPd coincide, in other words, at the detection time Td, the detection position Pd and the expected detection position pPd are match

(Summary of research to obtain detection results that enable high-precision analysis)

The contents described so far are summarized as follows. That is, the position specifying device 10 (in particular, the detection time determination unit 1150 in FIG. 1 ) first sets the detection time Td as “the target position of the servo control system 20 calculated from the target trajectory Tt”. (Pt) coincides with the predicted detection position pPd" and the response delay time Ds of the servo control system 20 are specified.

Then, the position specifying device 10 (detection time determination unit 1150 ) detects the detection instruction time aTd, which is the time at which the detection time Td is corrected by “the response delay time Dd of the detection system 30”. ) is calculated. The position specifying device 10 transmits the detection instruction time aTd to the detection system 30 (particularly, the communication device 31 ) in advance, so that the image pickup device 33 is imaged at the detection time Td. to run

The imaging device 33 performs imaging at the detection time Td, so that "the target position Pt of the servo control system 20 in consideration of the response delay time Ds of the servo control system 20" and the predicted detection A captured image Im with the same position pPd is generated.

As described above, the "target position Pt of the servo control system 20 in consideration of the response delay time Ds of the servo control system 20" and the position of the imaging device 33 coincide with each other, or the amount of deviation between the two will be small enough. Incidentally, the position of the imaging device 33 and the detection position Pd can be regarded as the same.

Therefore, at the detection time Td, the expected detection position pPd and the detection position Pd coincide, or the amount of deviation between them will be sufficiently small. Then, the work 40 is placed at the expected detection position pPd in advance, or is placed at a position sufficiently close to the expected detection position pPd.

Accordingly, in the captured image Im captured at the detection time Td, the position Pw of the work 40 (eg, the central position of the work 40) and the reference position Rb (eg, the captured image ( The center points of Im)) coincide, or the amount of deviation between them will be sufficiently small. That is, in the captured image Im, the work 40 is arranged around the reference position Rb, for example, almost at the center of the captured image Im.

Accordingly, the position specifying device 10 has a large ratio of the area in which the work 40 is captured to the entire captured image Im compared to the captured image Im in which the work 40 is hardly arranged in the center. This can be done, that is, the captured image Im obtained by enlarging the work 40 and capturing it can be generated. Therefore, the position specifying device 10 can perform high-precision image analysis with improved pixel resolution for the captured image Im on the captured image Im captured by expanding the work 40 .

With respect to the captured image Im, the required imaging range is determined by the size of the work 40 (the area of the surface on which the work 40 is imaged) and the expected "size of position misalignment (grasp misalignment)".

(Difference in the influence of the detection position (detection deviation amount) on the analysis result due to the difference in required accuracy)

12 shows the difference in how precisely (high precision) the position Pw of the workpiece 40 is specified, that is, the difference in precision required for the position Pw of the workpiece 40 to be specified. It is a figure explaining the pixel resolution required at the time of image analysis with respect to the captured image Im. In each of FIGS. 12A and 12B , the point where the dashed-dotted line intersects is "the reference position Rb corresponding to the detection position Pd in the captured image Im (eg, the captured image). (central point of (Im))" is shown. The asterisk indicates "the position Pw of the workpiece 40 (eg, the central position of the workpiece 40 )". In addition, in the examples shown in each of FIGS. 12A and 12B , the detection shift amount Qd that is the “deviation amount between the detection position Pd and the position Pw of the workpiece 40” is assumed to be “±5 μm”.

In the following description, "increasing the pixel resolution (or required precision)" refers to "reducing the value of the pixel resolution (or required precision)". When the position Pw of the workpiece 40 is to be specified with high precision, the detection displacement Qd, which is the “deviation amount between the detection position Pd and the position Pw of the workpiece 40”, needs to be calculated with high precision. there is And, when it is desired to calculate with high precision the amount of detection deviation Qd, which is “the amount of deviation between the detection position Pd and the position Pw of the work 40 ,” it is necessary to increase the pixel resolution of the captured image Im. there is. That is, raising the required precision is raising the pixel resolution. Specific details will be described below.

For example, when the required precision is a low value such as “100 μm”, when specifying the position Pw of the workpiece 40, the “detection position Pd” of “±5 μm” and the position (Pw) of the workpiece 40 ) is not a problem. That is, from the image analysis on the captured image Im, the detection deviation Qd, which is the "deviation amount between the detection position Pd and the position Pw of the workpiece 40", was "±5 μm". Even so, it's not a problem. Therefore, the pixel resolution may be, for example, about “10 μm”.

On the other hand, when the required precision is a high value such as “10 μm”, when specifying the position Pw of the workpiece 40, the “detection position Pd” and the position Pw of the workpiece 40 are “±5 μm” It becomes essential to calculate the amount of deviation from . And in order to calculate "±5 μm" which is "the amount of deviation between the detection position Pd and the position Pw of the workpiece 40" from the image analysis on the captured image Im, the pixel resolution is about "1 μm" it is necessary to do

Therefore, in order to specify the position Pw of the work 40 with high precision, that is, to satisfy the high required precision, and to specify the position Pw of the work 40, image analysis for the captured image Im It is necessary to increase the required pixel resolution.

The ratio of the area in which the workpiece 40 is captured to the entire captured image Im is as shown in FIG. 12(B) rather than the small captured image Im as shown in FIG. 12(A). The same large captured image Im can increase the pixel resolution of the workpiece 40 in the captured image Im. Therefore, if the image of the work 40 imaged in the captured image Im is enlarged, in other words, the captured image Im obtained by magnifying the work 40 is generated and the pixel resolution is increased, the captured image Im ), the detection deviation amount Qd can be accurately calculated (with high precision) from the image analysis.

That is, in order to accurately calculate the detection deviation amount Qd that is "the amount of deviation between the detection position Pd and the position Pw of the work 40" from image analysis for the captured image Im, the captured image Im ), it is necessary to increase the pixel resolution as much as possible. In addition, in order to increase the possible pixel resolution of the captured image Im, it is preferable to increase the ratio of the area in which the work 40 is imaged to the entire captured image Im, for example, the work 40 The captured image Im obtained by magnifying the .

(Correction of servo target position)

13 : is a figure explaining the process performed by the position specifying apparatus 10, when specifying the position Pw of each of the some workpiece|work 40 sequentially. In the example shown in FIG. 13, for example, the position specifying apparatus 10 is the workpiece|work 40(A), 40(B), 40(C), ..., 40(Z) placed on one board|substrate. ) Each position (Pw(A), Pw(B), Pw(C), ..., Pw(Z)) shall be sequentially specified.

Here, in the schematic diagram of the substrate on which the workpieces 40(A), 40(B), 40(C), ..., 40(Z) are placed, the workpieces 40(A), 40(B), 40(C), For each of ..., 40(Z)), it is assumed that the following two pieces of information illustrated in FIG. 13 have been previously set.

First, it is assumed that the diameter ? of each of the workpieces 40(A), 40(B), 40(C), ..., 40(Z) is set to be about 200 µm in advance.

Second, it is assumed that the predicted detection positions pPd of the workpieces 40(A), 40(B), 40(C), ..., 40(Z) are set to be 500 µm apart from each other in advance. That is, it is preset that the expected detection position pPd(A) of the workpiece 40(A) and the expected detection position pPd(B) of the workpiece 40(B) are 500 µm apart from each other. It is preset that the predicted detection position pPd(B) of the workpiece 40(B) and the predicted detection position pPd(C) of the workpiece 40(C) are 500 µm apart from each other. It is preset that the predicted detection position pPd(C) of the workpiece 40(C) and the predicted detection position pPd(D) of the workpiece 40(D) are 500 µm apart from each other. It is preset that the predicted detection position pPd(Y) of the workpiece 40(Y) and the predicted detection position pPd(Z) of the workpiece 40(Z) are 500 µm apart from each other.

(How to set the detection time according to the blueprint)

Then, the position specifying device 10 determines the position of the imaging device 33 according to "the design diagram of the substrate on which the workpieces 40 (A), 40 (B), 40 (C), ..., 40 (Z) are placed." to cause the imaging device 33 to perform imaging. For example, the position specifying device 10 causes the imaging device 33 to perform imaging whenever it moves 500 µm during the movement of the imaging device 33 .

For example, the expected detection position (pPd(A)) of the workpiece 40(A) is 500 µm, the expected detection position (pPd(B)) of the workpiece 40(B) is 1000 µm, and the workpiece 40(C) If the predicted detection position pPd(C) of ) is 1500 µm, the position specifying device 10 executes the following processing. That is, the position specifying device 10 picks up images at the detection times Td(A), Td(B), Td(C), which are the scheduled times at which the imaging device 33 will reach each of 500 μm, 1000 μm, and 1500 μm. The device 33 is made to perform imaging.

(A method of predicting the position of the next detection target according to the position of the previous detection target)

However, when the position specifying device 10 specifies the position Pw(P) of a certain work 40(P), it uses the specific position Pw(P) to perform a certain work 40(P) You may predict the position where the workpiece|work 40(Q) which is the object which should specify the position Pw next to should exist.

That is, it is known in advance that the predicted detection position pPd(P) of the workpiece 40(P) and the predicted detection position pPd(Q) of the workpiece 40(Q) are 500 µm apart from each other. Then, the position specifying apparatus 10 determines the position where the workpiece 40(Q) should exist, the position Pw(P) of the workpiece 40(P), and the predicted detection position pPd(P)). It is estimated from the displacement amount (reference displacement amount Rd(PQ), that is, "500 micrometers") between and the predicted detection position pPd(Q).

Specifically, the position specifying device 10 sets the position where the reference displacement amount Rd(PQ) (that is, 500 µm) advanced from the position Pw(P) of the work 40(P), the work piece 40(Q) )) should be present (that is, "predicted detection position pPd'(Q)) of the workpiece 40(Q) after correction").

Then, the position specifying device 10 sets the time at which the position of the imaging device 33 coincides with the “predicted detection position after correction (pPd'(Q))” as the “detection time after correction (Td'(Q))” , and the imaging device 33 may perform imaging at the "detection time after correction Td'(Q)".

For example, it is assumed that the predicted detection position pPd(P) of the workpiece 40(P) is “5500 μm” and the actual position Pw(P) of the workpiece 40(P) is “5499 μm”. In that case, the position specifying apparatus 10 calculates "the post-correction expected detection position pPd'(Q) of the workpiece 40(Q)" as follows. That is, the position specifying device 10 sets the position advanced by the reference displacement amount Rd(PQ) (ie, “500 μm”) from the position Pw(P) (that is, “5499 μm”), the “workpiece 40 ( Q)), the expected detection position after correction (pPd'(Q))”. Specifically, the position specifying device 10 sets "5999 μm" to "the predicted detection position pPd'(Q) of the workpiece 40(Q) after correction".

It is assumed that the predicted detection positions pPd of each of the plurality of workpieces 40 are 500 μm apart from each other, and when the positions Pw of each of the plurality of workpieces 40 are actually 499 μm apart from each other, the 11th workpiece 40 is , the predicted detection position (pPd) and the position (Pw) are 10 μm apart. As a result, for example, even if the imaging device 33 performs imaging at the detection time Td at which the expected detection position pPd of the eleventh work 40 and the position of the imaging device 33 coincide, imaging is performed. The eleventh work 40 may not be imaged in the image Im.

The “difference between the predicted detection positions pPd of each of the plurality of workpieces 40 (eg, 500 μm)” is referred to as the “reference displacement amount Rd”, and the “difference between the actual positions Pw of each of the plurality of workpieces 40 ” (eg, 499 μm)” is referred to as “actual displacement Ad”, the following can be pointed out for both. That is, even if the difference (dP) between the reference displacement amount (Rd) and the actual displacement amount (Ad) is a sufficiently small value (“1 μm” in the example above), if the difference dP is accumulated “n” times, “n+1” In the th work 40 , the deviation between the predicted detection position pPd and the position Pw may be “n×difference dP”.

Therefore, in order to avoid the difference dP from accumulating and the amount of deviation between the predicted detection position pPd and the position Pw with respect to a certain work 40 (eg, the work 40(Q)) from increasing, position specification The device 10 executes the following processing.

That is, the position specifying device 10 is the amount of displacement between the position Pw(P) of the workpiece 40(P) and "the expected detection position pPd(P) and the expected detection position pPd(Q)) Based on the reference displacement amount Rd(PQ)", the position where the workpiece 40(Q) should exist is predicted. For example, the position specifying device 10 has a reference displacement amount Rd(PQ) that is a displacement amount between the “expected detection position pPd(P) and the expected detection position pPd(Q)” from the position Pw(P). )" is defined as "a position where the workpiece 40 (Q) should exist" after correction. That is, the position specifying device 10 sets the position advanced by the reference displacement amount Rd(PQ) from the position Pw(P) to the "predicted detection position after correction pPd' ( Q))”.

§2. configuration example

Next, the specific content of the position specifying apparatus 10 which has demonstrated the outline so far is demonstrated using FIG.

1 : is a figure which shows the structural example of the position specifying apparatus 10. As shown in FIG. The position specifying device 10, as a functional block, includes, for example, a target trajectory acquisition unit 1110 for acquiring a target trajectory Tt, and a target position Pt for each time from the target trajectory Tt. A position command generation unit 1120 is provided.

In addition, as a functional block, the position specifying device 10 includes, for example, a detection deviation amount calculation unit 1160 for calculating the detection deviation amount Qd, and a detection position calculation unit ( 1170) are provided. Furthermore, the position specifying device 10 includes, as a functional block, a position specifying unit 1180 for specifying the position Pw of the workpiece 40 from, for example, the detection deviation Qd and the detection position Pd. are being prepared

The position specifying device 10 illustrated in FIG. 1 further includes, as a function block, a response delay time calculation unit 1130 that calculates a response delay time Ds of the servo control system 20, for example, and a detection instruction time A detection time determination unit 1150 for determining (aTd) is provided. Further, the position specifying device 10 includes, as a functional block, a command value generation unit 1140 that generates a command value Cm from “target position Pt for each time”, for example, and a servo control system 20 . ) and a communication unit 1200 for performing communication with each other.

In addition to each functional block mentioned above, the position specifying apparatus 10 may be provided with the following structures (function block), for example. That is, the position specifying device 10 sets the feedback position Pf of the servo control system 20 for each time, the target position Pt of the servo control system 20 for each time (particularly, the response of the servo control system 20 ) You may provide a servo control part etc. which make it match with the target position Pt) which considered the delay time Ds. In order to ensure the brevity of description, the structure of the position specifying apparatus 10 which is not directly related to this embodiment is abbreviate|omitted from description and block diagram. However, depending on the actual situation, the position specifying apparatus 10 may be provided with these abbreviate|omitted structure.

The above-described functional block included in the location specifying device 10 is, for example, a storage device in which a central processing unit (CPU) or the like is realized by a read only memory (ROM), a non-volatile random access memory (NVRAM), or the like. This can be realized by reading out a program stored in the (storage unit 1300) and executing it from a RAM (random access memory) (not shown) or the like. First, the specific content of functional blocks other than the storage unit will be described below.

(About function blocks other than the memory unit)

The target trajectory acquisition unit 1110 receives target trajectory data (target trajectory Tt) from the outside (eg, a user), and outputs the received target trajectory Tt to the position command generation unit 1120 . . The target trajectory Tt is the predicted detection position pPd of the work 40 at which the position specifying device 10 should specify the position Pw (that is, the position where the work 40 should exist) as the target position ( Pt) and, for example, the movement path of the imaging device 33 with the overhead of the predicted detection position pPd as a via point is shown.

In the substrate illustrated in FIG. 3 , an arrow indicated by a dotted line is an example of the target trajectory Tt. For example, each position Pw(A), Pw( B), Pw(C), ..., Pw(Z)), the target trajectory Tt includes the following target positions Pt. That is, the target trajectory Tt is the predicted detection positions pPd(A), pPd(B), pPd of the workpieces 40(A), 40(B), 40(C), ..., 40(Z), respectively. (C), ..., pPd(Z)) is included as the target position Pt.

The position command generation unit 1120 generates a “target position Pt for each time” from the target trajectory Tt, and uses the generated “target position Pt for each time” as the command value generation unit 1140 . output to

The command value generation unit 1140 acquires “the target position Pt for each time” from the position command generation unit 1120 , and the “response delay time of the servo control system 20 ” from the response delay time calculation unit 1130 . (Ds)” is obtained. The command value generation unit 1140 considers the “response delay time (Ds) of the servo control system 20” from “the target position Pt for each time”, and the “control period ( Command value (Cm) for each Cc)" is generated. The command value generation unit 1140 outputs the generated “command value Cm for each control period Cc for the servo control system 20 ” to the communication unit 1200 , particularly to the command unit 1210 .

For example, in the "target position Pt for each time" acquired from the position command generation unit 1120, if the predicted detection position pPd(n) at the time T(n) is P(n), The command value generation unit 1140 generates the following command values Cm. In other words, the command value generation unit 1140 predicts the detection position (pPd(n)) at the “time from the time T(n) to the “time back up the response delay time Ds of the servo control system 20”” A command value Cm with P(n) is generated.

Here, when the position specifying device 10 controls the plurality of servo control systems 20 , the command value generation unit 1140 performs the following steps in order to synchronize the control results (control amounts) of the plurality of servo control systems 20 . Execute processing. That is, for each of the plurality of servo control systems 20 , the time from when each of the plurality of servo drivers 21 receives the command value Cm until the corresponding servo motor 22 responds (response delay time ( Ds)) may be different in each of the plurality of servo control systems 20 . Therefore, the command value generation unit 1140 generates the command value Cm for each of the plurality of servo control systems 20 in consideration of the response delay time Ds of each of the plurality of servo control systems 20 .

Specifically, the command value generation unit 1140 considers the "response delay time Ds(A) of the servo control system 20(A)" from "the target position Pt for each time", and A command value Cm(A) for each control period Cc for the control system 20(A) is generated. The command value generation unit 1140 considers the “response delay time Ds(B) of the servo control system 20(B)” from the “target position Pt for each time”, and the servo control system 20( A command value Cm(B) for each control period Cc for B)) is generated.

By generating a command value Cm for each of the plurality of servo control systems 20 in consideration of the response delay time Ds different in each of the plurality of servo control systems 20 , the command value generation unit 1140 includes a plurality of The control results of each of the servo control systems 20 can be synchronized.

The response delay time calculation unit 1130 acquires servo parameters indicating the control characteristics of the servo control system 20 (particularly, the servo driver 21 ), and from the acquired servo parameters, “response delay time of the servo control system 20 ” (Ds)" is calculated. The response delay time calculation unit 1130 outputs the calculated "response delay time Ds of the servo control system 20" to the command value generation unit 1140 and the detection time determination unit 1150 .

The response delay time calculation unit 1130 uses the position loop gain of the servo driver 21 as a servo parameter indicating the control characteristics of the servo control system 20 to delay the response of the servo control system 20 . You may calculate the time Ds. For example, the response delay time calculation unit 1130 calculates the response delay time Ds(A) of the servo control system 20(A), a position loop that is one of the servo parameters of the servo driver 21(A). It may be set as the reciprocal of the gain. The response delay time calculation unit 1130 calculates the response delay time Ds(B) of the servo control system 20(B) as the inverse of the position loop gain that is one of the servo parameters of the servo driver 21(B). You can do it.

The detection time determination unit 1150 acquires "the target position Pt for each time" from the position command generation unit 1120 , and the "response delay time of the servo control system 20" from the response delay time calculation unit 1130 . (Ds)” is obtained. Further, the detection time determination unit 1150 refers to the storage unit 1300 , and obtains “information about the expected detection position pPd” from the expected detection position table 1310 , and the detector response delay time table 1320 . ), the "response delay time Dd of the detection system 30" is acquired. The detection time determination unit 1150 includes "target position Pt for each time", "response delay time (Ds) of servo control system 20", "information about expected detection position pPd", and "detection The detection time Td and the detection instruction time aTd are calculated from the "response delay time Dd of the system 30". Then, the detection time determination unit 1150 outputs the calculated detection instruction time aTd to the communication unit 1200 , particularly to the command unit 1210 .

Specifically, the detection time determination unit 1150 first determines the "target position Pt for each time", "response delay time Ds of the servo control system 20", and "expected detection position pPd)" information", the detection time Td is calculated. That is, the detection time determination unit 1150 considers the "response delay time Ds of the servo control system 20", and calculates the time calculated as the time at which the target position Pt and the expected detection position pPd coincide. , the detection time Td.

Next, the detection time determination unit 1150 calculates a detection instruction time aTd from the detection time Td and the "response delay time Dd of the detection system 30". That is, the detection time determination unit 1150 sets the detection instruction time aTd to the time at which the detection time Td is corrected by the "response delay time Dd of the detection system 30".

For example, if the "response delay time Ds of the servo control system 20" does not exist and the time at which the target position Pt and the expected detection position pPd coincide with the time T0, detection The time determining unit 1150 calculates the detection time Td and the detection instruction time aTd as follows. That is, the detection time determination unit 1150 elapses from the time T0 at which the "target position Pt and the expected detection position pPd coincide", the "response delay time Ds of the servo control system 20" Let one time be a detection time Td. In addition, the detection time determination part 1150 makes the time back up "response delay time Dd of the detection system 30" from the detection time Td the detection instruction time aTd.

The detection deviation amount calculation unit 1160 acquires the captured image Im from the communication unit 1200 , particularly from the control amount acquisition unit 1220 . The detection shift amount calculation unit 1160 performs image analysis on the captured image Im, and the “positional shift amount within the image” in the captured image Im (that is, “ The amount of deviation of the position Pw of the workpiece 40 from the reference position Rb”) is calculated. The detection deviation amount calculation unit 1160 is configured to calculate the displacement amount Qd (that is, the amount of deviation between the detected position Pd and the position Pw of the workpiece 40 ) from the calculated “position deviation amount in the image”. ) is specified. The detection deviation amount calculation unit 1160 outputs the specific detection deviation amount Qd to the position specifying unit 1180 .

Specifically, the detection deviation amount calculation unit 1160 performs image analysis on the captured image Im, and the position Pw of the work 40 in the captured image Im (eg, the work 40) "Amount of displacement in the image", which is the amount of deviation between the center position of ) and the reference position Rb, is calculated. Then, the detection displacement amount calculation unit 1160 calculates the work 40 at the “detection time Td” corresponding to the “position displacement amount in the image” from the calculated “position displacement amount in the image”. ), the amount of deviation between the position Pw and the detection position Pd”, which is the detection deviation amount Qd.

However, the detection deviation amount calculation unit 1160 may obtain an image analysis result of the captured image Im instead of the captured image Im from the communication unit 1200 (in particular, the control amount obtaining unit 1220), In particular, you may acquire "the amount of position shift in the image" in the captured image Im. The detection deviation amount calculation unit 1160 only needs to be able to specify the detection deviation amount Qd from the "position deviation amount in the image" in the captured image Im, and from the captured image Im The detection deviation amount calculating unit 1160 or the detection system 30 may be used to calculate the "position deviation amount".

That is, the position specifying device 10 (in particular, the control amount acquisition unit 1220 ) calculates the detection system 30 (eg, the imaging control device 32 ) by image analysis of the captured image Im. One "amount of position shift in the image" may be received. In addition, the detection deviation amount calculating part 1160 may calculate the detection deviation amount Qd from the "positional deviation amount in the image" received by the imaging control device 32 .

The detection position calculation unit 1170 acquires “the feedback position Pf of the servo control system 20 for each control period Cc” from the communication unit 1200 , particularly from the control amount acquisition unit 1220 . The detection position calculation unit 1170 interpolates from "the feedback position Pf of the servo control system 20 for every control period Cc", and the "feedback position Pf at the detection time Td" ' is calculated. The detection position calculation unit 1170 outputs the calculated "feedback position Pf at the detection time Td" to the position specifying unit 1180 .

For example, let n be "an integer greater than or equal to 0", and the detection time Td is between the "n"th control cycle (Cc(n)) and the "n+1"th control cycle (Cc(n+1)) At the time of , the detection position calculation unit 1170 executes the following processing. That is, the detection position calculation unit 1170 first, a "feedback position Pf(n)) in the control period Cc(n)" and a feedback position in the "control period Cc(n+1)" (Pf(n+1))" is obtained. And the detection position calculation part 1170 interpolates from the feedback position Pf(n) and the feedback position Pf(n+1), "feedback position Pf at detection time Td" ' is calculated. For example, the detection position calculation unit 1170 includes a straight line (or curve) connecting the feedback position Pf(n) and the feedback position Pf(n+1), and a straight line indicating the detection time Td. "The feedback position Pf at the detection time Td" is computed from the intersection of

That is, the detection position calculation unit 1170 interpolates from the plurality of "feedback positions Pf of the servo control system 20 for each control period Cc" acquired for each control period Cc, " You may calculate the "feedback position Pf at the detection time Td".

The position specifying unit 1180 obtains the detection deviation amount Qd (that is, the deviation amount between the detection position Pd and the position Pw of the work 40 ) from the detection deviation amount calculation unit 1160 , and detects it "The feedback position Pf at the detection time Td" is acquired from the position calculation part 1170. As described above, "the feedback position Pf at the detection time Td" is "the position of the imaging device 33 at the detection time Td", ie, it corresponds to the detection position Pd. Therefore, the position specifying unit 1180 determines the detection deviation Qd (that is, the amount of deviation between the detection position Pd and the position Pw of the work 40) and the “feedback position at the detection time Td”. (Pf)" (that is, the detection position Pd), the position Pw of the workpiece|work 40 is specified.

The communication unit 1200 communicates with each of the servo control system 20 and the detection system 30 as slaves periodically for each control period Cc, and includes a command unit 1210 and a control amount acquisition unit 1220. there is.

The command unit 1210 obtains “the command value Cm for each control period Cc for the servo control system 20” from the command value generation unit 1140 , and the detection time determination unit 1150 gives a detection instruction. Get the time aTd. The command unit 1210 sends, to the servo control system 20 and the detection system 30 serving as slaves, a control signal Cs (control instruction) including a command value Cm and a detection instruction time aTd, a control period. Outputs (transmits) every (Cc).

The control amount acquisition unit 1220 acquires, from the servo control system 20 and detection system 30 serving as slaves, data representing control results (eg, control amounts and detection results) output by these slaves for each control cycle Cc. do (receive). That is, the control amount acquisition unit 1220 acquires information indicating "the feedback position Pf of the servo control system 20 for every control period Cc" from the servo control system 20 , and from the detection system 30 , A captured image Im is acquired. The control amount acquisition unit 1220 transmits information indicating “the feedback position Pf of the servo control system 20 for each control period Cc” to the detection position calculation unit 1170 , and transmits the captured image Im It is output to the detection deviation amount calculation unit 1160 .

The information indicating "the feedback position Pf of the servo control system 20 for each control period Cc" is added to "the feedback position Pf of the servo control system 20 for each control period Cc", You may include the information which shows the actual measurement time Tm which is the time at which the feedback position Pf was detected. In that case, the detection position calculation part 1170 measures the "feedback position Pf(n)) in the control period Cc(n)" and the "feedback position Pf(n)" were detected, for example. Time (Tm(n))" is acquired. In addition, the detection position calculation unit 1170 is configured to calculate the "feedback position Pf(n+1)) in the control period Cc(n+1)" and the "feedback position Pf(n+1)" were detected. Measurement time (Tm(n+1))" is acquired. And the detection position calculation part 1170 is the feedback position Pf(n) at the actually measurement time Tm(n), and the feedback position Pf(n+) at the actual measurement time Tm(n+1). From 1)), "the feedback position Pf at the detection time Td" is computed.

In addition, as described above, the control amount acquisition unit 1220 sends the detection system 30 (eg, the imaging control device 32 ) to the captured image from the detection system 30 instead of the captured image Im. You may acquire "the amount of position shift in the image" calculated by image analysis for (Im). In this case, the control amount acquisition unit 1220 outputs the acquired "position shift amount in the image" to the detection shift amount calculation part 1160 .

(For the case of sequentially specifying the positions of multiple workpieces)

When the position specifying apparatus 10 sequentially specifies the positions Pw of each of the plurality of workpieces 40 placed on one substrate, for example, each functional block provided in the position specifying apparatus 10 is as follows: may be executed.

For example, when the position specifying unit 1180 specifies "the position Pw(P) of a certain work 40(P)", the position specifying unit 1180 sets the specific "a certain work 40(P)" ) is notified to the position command generating unit 1120 .

The position command generation unit 1120 determines the "predicted detection position pPd(P) of a certain work 40(P)" and "the position Pw after the certain work 40(P). The expected detection position pPd(Q)” of the work 40 (Q)” is acquired with reference to the expected detection position table 1310 . Then, the position command generation unit 1120 calculates a reference displacement amount Rd(PQ) that is a displacement amount from the expected detection position pPd(P) to the expected detection position pPd(Q). The position command generation unit 1120 uses the calculated reference displacement amount Rd(PQ) and the “position (Pw(P))” notified from the position specifying unit 1180 to “a certain work 40(P)”. ), the position at which the "workpiece 40 (Q)) whose position Pw should be specified" should exist is calculated. That is, the position command generation unit 1120 sets the position advanced by the reference displacement amount Rd(PQ) from the position Pw(P) to the position where the work 40(Q) should exist (that is, the “workpiece ( 40(Q)), the corrected expected detection position (pPd'(Q))").

The position command generation unit 1120 sets the target position of the "predicted detection position after correction (pPd'(Q))" instead of the "predicted detection position before correction (pPd(Q))" of the workpiece 40 (Q). From the target trajectory Tt' included as (Pt), a "target position Pt' for each time" is generated. Then, the position command generation unit 1120 notifies the "target position Pt' for each time" to the command value generation unit 1140 and the detection time determination unit 1150 .

The command value generation unit 1140 considers the "response delay time Ds of the servo control system 20" from the "target position Pt' for each time" notified from the position command generation unit 1120, A "command value Cm' for each control period Cc for the servo control system 20" is generated.

The detection time determination unit 1150 should use the "target position Pt' for each time" notified from the position command generation unit 1120 to image the workpiece 40(Q) by the imaging device 33 . The detection time Td'(Q), which is the time to be done, is calculated. The detection time determination unit 1150 includes the "target position Pt' for each time", the "response delay time Ds of the servo control system 20", and the "prediction after correction of the workpiece 40 (Q)" From the detection position pPd'(Q)", the detection time Td'(Q) is calculated. That is, the detection time determination unit 1150 determines that the "target position Pt' for each time" in consideration of the "response delay time Ds of the servo control system 20" of the "workpiece 40 (Q), A time coincident with the "predicted detection position pPd'(Q))" after correction is defined as the detection time Td'(Q).

For example, when the "response delay time Ds of the servo control system 20" does not exist, the time at which the target position Pt' and the "predicted detection position after correction (pPd'(Q))" coincide Assuming this time T'0, the detection time determination unit 1150 calculates the detection time Td'(Q) as follows. That is, the detection time determining unit 1150 is configured to, from a time T'0 at which the "target position Pt' and the "predicted detection position after correction (pPd'(Q))" coincide", the "servo control system 20 ), the time elapsed after the "response delay time Ds" is defined as the detection time Td'(Q).

Then, the detection time determination unit 1150 sets the time back up from the detection time Td'(Q) to the "response delay time Dd of the detection system 30", the detection instruction time aTd'(Q) ) to be The command unit 1210 notifies the detection system 30 of the detection instruction time aTd'(Q) in advance, so that the imaging device 33 performs imaging at the detection time Td'(Q). make it

(About the memory department)

The storage unit 1300 is a storage device for storing various data used by the location specifying device 10 . Further, the storage unit 1300 is an application program for executing (1) a control program, (2) an OS program, and (3) various functions included in the location specifying device 10 executed by the location specifying device 10 . , and (4) various data to be read when executing this application program may be stored non-temporarily. The data of (1) to (4) above, for example, ROM (read only memory), flash memory, EPROM (Erasable Programmable ROM), EEPROM (registered trademark) (Electrically EPROM), HDD (Hard Disc Drive), etc. stored in the non-volatile memory of The position specifying device 10 may include a temporary storage unit (not shown). The temporary storage unit is a so-called working memory that temporarily stores data used for calculations, calculation results, etc. in the course of various processes executed by the location specifying device 10, and includes a random access memory (RAM) or the like. It consists of a volatile memory device. As to which data is stored in which storage device, it is appropriately determined from the purpose of use of the location specifying device 10, convenience, cost, physical restrictions, and the like. Furthermore, the storage unit 1300 stores the expected detection position table 1310 and the detector response delay time table 1320 .

In the expected detection position table 1310, "information regarding the expected detection position pPd", specifically, "information specifying the expected detection position pPd" is stored. The predicted detection position pPd is stored in advance in the predicted detection position table 1310 as a “position where the workpiece 40 should be” based on a design drawing of “the substrate on which the workpiece 40 is placed” or the like.

In the detector response delay time table 1320, "response delay time Dd of the detection system 30" is stored.

The storage unit 1300 stores, in addition to the expected detection position table 1310 and the detector response delay time table 1320, servo parameters indicating the control characteristics of the servo control system 20 (in particular, the servo driver 21), there may be In particular, the memory|storage part 1300 may store the servo parameter which shows the control characteristic of each of the several servo control system 20 (particularly, the servo driver 21).

(Clean up for location-specific devices)

The contents described using FIGS. 1 to 13 so far can be summarized as follows. The position specifying apparatus 10 is a position specifying apparatus which specifies the position Pw of the workpiece|work 40 which is a detection object. The position specifying device 10 includes a command unit 1210 , a control amount acquisition unit 1220 (acquisition unit), a detection deviation amount calculation unit 1160 , a detection position calculation unit 1170 , and a position specifying unit ( 1180) are provided.

The command unit 1210 transmits the command value Cm calculated from the target trajectory Tt to the servo control system 20 that controls the position of at least one of the imaging device 33 (detection device) and the workpiece 40 . print out The target trajectory Tt includes, as the target position Pt, the predicted detection position pPd preset as "the position where the workpiece 40 should exist".

The control amount acquisition unit 1220 acquires a captured image Im that is a detection result of the imaging device 33 at a detection time Td that is a time during movement of at least one of the imaging device 33 and the work 40 . do. The detection time Td is the time at which "the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20" coincides with the expected detection position pPd. .

The detection deviation amount calculation unit 1160 is configured to calculate a "position corresponding to the reference position Rb" from "the amount of deviation between the reference position Rb and the position Pw of the workpiece 40 in the captured image Im" A detection shift amount Qd that is a shift amount between the phosphorus detection position Pd and the position Pw of the work 40” is calculated.

The detection position calculation unit 1170 calculates the detection position Pd from the position of the imaging device 33 at the detection time Td.

The position specifying unit 1180 corrects the detection position Pd calculated by the detection position calculation unit 1170 by the detection deviation amount Qd calculated by the detection deviation amount calculation unit 1160, and thereby corrects the work 40 ) to specify the position (Pw).

According to the said structure, the position specifying apparatus 10 calculates the detection deviation amount Qd which is the deviation amount of the detection position Pd and the position Pw of the workpiece|work 40 from the captured image Im. Further, the position specifying device 10 calculates the detection position Pd from the position of the imaging device 33 at the detection time Td. And the position specifying apparatus 10 specifies the position Pw of the workpiece|work 40 with the detection shift amount Qd and the detection position Pd.

(Higher precision of position detection)

Therefore, even when the position Pw of the workpiece 40 and the detection position Pd do not coincide at the detection time Td, the position specifying device 10 uses the amount of the deviation between the 40) shows the effect that the position Pw can be specified with high precision.

(High-precision and high-speed detection results)

Moreover, according to the said structure, in the position specifying apparatus 10, the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 is the predicted detection position pPd ), the detection deviation amount Qd is calculated from the captured image Im at the detection time Td, which is a time coincident with ).

Here, at the timing at which the imaging device 33 performs detection, when the workpiece 40 does not exist within a range in which the imaging device 33 can detect the workpiece 40, the detection deviation amount ( Qd) cannot be calculated.

Therefore, in order to avoid the situation of "the workpiece 40 does not exist within the range where the imaging device 33 can detect the workpiece 40 at the timing at which the imaging device 33 executes detection", the position The specific device 10 acquires the captured image Im at the detection time Td.

For example, the servo control system 20 moves only the imaging device 33, the workpiece 40 is not moved, and the workpiece 40 is previously placed at the expected detection position pPd, or the predicted detection position pPd ), the position specifying device 10 executes the following processing. That is, in the position specifying device 10, the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 that controls the position of the imaging device 33 is Let the time coincident with the expected detection position pPd be the detection time Td.

Here, by taking the response delay time Ds of the servo control system 20 into consideration, "the target position Pt of the servo control system 20 for each time" is "the feedback position of the servo control system 20 for each time" (Pf)", or the amount of deviation between both is considered to be sufficiently small. In addition, the feedback position Pf of the servo control system 20 which controls the position of the imaging device 33 can be regarded as the position of the imaging device 33 . Therefore, "the position of the imaging device 33 for each time" is the "target position for each time of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 ( Pt)", or the amount of deviation between both will be sufficiently small.

As described above, at the detection time Td, the "position of the imaging device 33 moved by the servo control system 20" and the expected detection position pPd coincide with each other, or the amount of deviation between the two is sufficient. will be smaller And, as mentioned above, the workpiece|work 40 is set in advance at the predicted detection position pPd, or it is set in the position close enough to the predicted detection position pPd. Therefore, at the detection time Td, the "position of the imaging device 33 moved by the servo control system 20" and the position Pw of the workpiece 40 coincide, or the amount of deviation between the two is sufficient. gets smaller

As a result, the position specifying device 10 determines that "at the timing at which the imaging device 33 executes detection, the workpiece 40 is not present within a range in which the imaging device 33 can detect the workpiece 40 . This situation can be avoided.

Further, for example, the servo control system 20 moves only the work 40, the imaging device 33 does not move, and the imaging device 33 is placed in the expected detection position pPd in advance, or the predicted detection When placed in a position sufficiently close to the position pPd, the position specifying device 10 executes the following processing. That is, the position specifying device 10 calculates the target position Pt of the servo control system 20 in consideration of the response delay time Ds of the servo control system 20 that controls the position Pw of the workpiece 40 . A time coincident with the expected detection position pPd is defined as the detection time Td.

As described above, by taking the response delay time Ds of the servo control system 20 into account, the "target position Pt of the servo control system 20 for each time" is "the target position Pt for each time of the servo control system 20" The feedback position Pf of ', or the amount of deviation between both is considered to be sufficiently small. In addition, the feedback position Pf of the servo control system 20 which controls the position Pw of the workpiece|work 40 can be regarded as the position Pw of the workpiece|work 40. Therefore, the "position of the workpiece 40 at each time" is the "target position Pt of the servo control system 20 for each time, calculated in consideration of the response delay time Ds of the servo control system 20 ." )", or the amount of deviation between the two will be sufficiently small.

As described above, at the detection time Td, the "position Pw of the workpiece 40 moved by the servo control system 20" and the expected detection position pPd coincide, or the amount of deviation between them will be small enough. And, as described above, the imaging device 33 is placed in the expected detection position pPd in advance, or is placed in a position sufficiently close to the expected detection position pPd. Therefore, at the detection time Td, "the position Pw of the workpiece 40 moved by the servo control system 20" and the position of the imaging device 33 coincide with each other, or the amount of deviation between the two is sufficient. gets smaller

As a result, the position specifying device 10 determines that "at the timing at which the imaging device 33 executes detection, the workpiece 40 is not present within a range in which the imaging device 33 can detect the workpiece 40 . This situation can be avoided.

Further, for example, when the first servo control system 20(1) moves the imaging device 33 and the second servo control system 20(2) moves the workpiece 40, the position specifying device ( 10), the following time is the detection time Td. That is, the position specifying device 10 calculates each response delay time Ds of the first servo control system 20(1) and the second servo control system 20(2) in consideration of each Let the time at which the target position Pt" coincide with the expected detection position pPd together as the detection time Td. At the detection time Td, the target position Pt( 1))" coincides with the expected detection position pPd. Further, at the detection time Td, the target position ( Pt(2))" coincides with the expected detection position pPd.

As described above, by taking the response delay time Ds of the servo control system 20 into account, the "target position Pt of the servo control system 20 for each time" is "the target position Pt for each time of the servo control system 20" The feedback position Pf of ', or the amount of deviation between both is considered to be sufficiently small.

In addition, the feedback position Pf(1) of the 1st servo control system 20(1) which controls the position of the imaging device 33 can be regarded as the position of the imaging device 33. As shown in FIG. In addition, it can be considered that the feedback position Pf(2) of the 2nd servo control system 20(2) which controls the position Pw of the workpiece|work 40 is the position Pw of the workpiece|work 40.

Therefore, "the position of the imaging device 33 in movement at each time" is calculated in consideration of the "response delay time Ds(1) of the first servo control system 20(1) for each time." The target position Pt(1)) of" or the amount of deviation between both will be sufficiently small. In addition, "the position of the moving workpiece 40 at each time" is a target for each time calculated in consideration of the "response delay time Ds(2) of the second servo control system 20(2)" position Pt(2)", or the amount of deviation between both will be sufficiently small.

As described above, at the detection time Td, the "position of the imaging device 33 in motion", the "position Pw of the moving workpiece 40" and the expected detection position pPd coincide, or Alternatively, the deviation amount of the three characters will be sufficiently small.

As a result, the position specifying device 10 determines that "at the timing at which the imaging device 33 executes detection, the workpiece 40 is not present within a range in which the imaging device 33 can detect the workpiece 40 . This situation can be avoided.

The position specifying device 10 is a moving time of at least one of the detection device and the work 40 , "the position Pw of the work 40 coincides with the position of the imaging device 33 , or both The captured image Im at the detection time Td, which is the time at which the shift amount becomes sufficiently small, is acquired.

Here, since the position of the imaging device 33 at the detection time Td corresponds to the detection position Pd, in the captured image Im at the detection time Td, the reference position Rb and the work It is considered that the amount of deviation from the position Pw at (40) is sufficiently small. And if it is known in advance that "in the captured image Im, the amount of deviation between the reference position Rb and the position Pw of the work 40 is sufficiently small", "in the captured image Im, the deviation of both Compared with the case where the amount is unpredictable or predicted to be large", the analysis to the captured image Im can be made with high precision.

Therefore, the position specifying device 10 acquires the "captured image Im at the detection time Td" that can perform high-precision analysis, that is, the "captured image at the detection time Td ( Im)", the detection deviation amount Qd can be calculated with high precision.

In addition, the position specifying device 10 sets the detection deviation amount Qd as "the captured image Im detected by the imaging device 33 while at least one of the workpiece 40 and the imaging device 33 is moving. ' is calculated from Therefore, the position specifying device 10 causes the image pickup device 33 to detect and generate the captured image Im after stopping the movement of the workpiece 40 and the imaging device 33 . In comparison, the captured image Im can be acquired at high speed, and as a result, the calculation of the detection deviation amount Qd can be accelerated.

(Higher precision and higher speed of specifying the position of the detection target)

As described above, the position specifying device 10 acquires the captured image Im capable of performing high-precision analysis at high speed, and determines the detection deviation Qd from the captured image Im at high speed and with high precision. can be calculated. And the position specifying apparatus 10 specifies the position Pw of the workpiece|work 40 with the calculated detection shift amount Qd and the detection position Pd.

Therefore, the position specifying apparatus 10 exhibits the effect that the position Pw of the workpiece|work 40 can be specified with high speed and high precision.

The position specifying device 10 communicates with the servo control system 20 for every control cycle Cc. When the position of the imaging device 33 is controlled by the servo control system 20 , the position specifying device 10 sets the position of the imaging device 33 at the detection time Td to the position of the imaging device 33 . It is calculated by interpolation calculation from the feedback position Pf for every control period Cc of the servo control system 20 which controls .

According to the above configuration, the position specifying device 10 sets the “feedback position Pf of the servo control system 20 that controls the position of the imaging device 33 at the detection time Td” to the “servo control system ( 20), it is computed by interpolation calculation from "feedback position Pf for every control period Cc".

Let n be "an integer greater than or equal to 0" and, for example, if the detection time Td is a time between the "n"th control cycle Cc and the "n+1"th control cycle Cc, the position specifying device ( 10) calculates "the feedback position Pf of the servo control system 20 at the detection time Td" as follows. That is, the position specifying device 10 is the servo control system 20 in the "feedback position Pf in the "n"th control cycle Cc" and in the "n+1"th control cycle Cc. "Feedback position Pf at detection time Td" is computed from "feedback position Pf of".

Therefore, even when the detection time Td is not an integer multiple of the control period Cc, which is the communication period with the servo control system 20, the position specifying device 10 has a high precision "at the detection time Td, The effect that the feedback position Pf of the servo control system 20" can be calculated is shown.

The position specifying apparatus 10 outputs, to each of the plurality of servo control systems 20 synchronized with each other, the command value Cm in consideration of the response delay time Ds of each of the plurality of servo control systems 20 . For example, the position specifying apparatus 10 considers the response delay time Ds(A) of the servo control system 20(A) in the servo control system 20(A), the command value Cm(A)) to output Further, the position specifying device 10 outputs the command value Cm(B) in consideration of the response delay time Ds(B) of the servo control system 20(B) to the servo control system 20(B). do.

According to the above configuration, the position specifying device 10 outputs a command value Cm in consideration of the response delay time Ds of each of the plurality of servo control systems 20 to each of the plurality of servo control systems 20 synchronized with each other. do.

Accordingly, the position specifying device 10 controls the plurality of servo control systems 20 in a state in which they are synchronized with each other, thereby exhibiting an effect that high-precision position control of the workpiece 40 can be realized.

In the control system 1, the imaging control device 32 (detection control device) controls the detection operation (specifically, imaging operation) by the imaging device 33, and the imaging control device 32 includes: Communication is performed with the communication device 31 (communication control device).

The position specifying device 10 transmits the control signal Cs to the communication device 31 every control period Cc, the response delay time Dd of the detection system 30 (response delay of the imaging device 33) The detection instruction time aTd obtained by correcting the detection time Td in consideration of the time Dd) is designated. The position specifying device 10 designates the detection instruction time aTd in the control signal Cs, so that the communication device 31 outputs the detection instruction to the imaging control device 32 at the detection instruction time aTd. run in When the detection instruction is received from the communication device 31 , the imaging control device 32 transmits a detection trigger to the imaging device 33 , and performs a detection operation (specifically, imaging operation) to the imaging device 33 . run it

According to the above configuration, the position specifying device 10 calculates the detection instruction time aTd, which is the time at which the detection time Td is corrected by the “response delay time Dd of the imaging device 33”. And the position specifying apparatus 10 designates the detection instruction time aTd with the control signal Cs output to the communication apparatus 31 every control period Cc.

The communication device 31 receiving the control signal Cs transmits the detection instruction to the imaging control device 32 at a detection instruction time aTd, and the imaging control device 32 receiving the detection instruction , the imaging device 33 detects the workpiece 40 . Therefore, the time at which the imaging device 33 detects the work 40 becomes a time delayed from the detection instruction time aTd by the response delay time Dd of the imaging device 33, that is, the detection time ( Td) becomes

Here, when it is attempted to cause the imaging device 33 to perform detection without considering the response delay time Dd of the imaging device 33, the time at which the imaging device 33 actually performs the detection is the imaging device ( From the time when execution of detection is instructed to 33), it becomes delayed by the response delay time Dd of the imaging device 33. As shown in FIG.

Then, the position specifying apparatus 10 calculates the detection instruction time aTd which is the time which the detection time Td was corrected by "response delay time Dd of the imaging device 33". Then, the position specifying device 10 designates the detection instruction time aTd as the time for instructing the imaging device 33 to perform detection.

Accordingly, the position specifying device 10 specifies, in the control signal Cs, a detection instruction time aTd in consideration of the “response delay time Dd of the imaging device 33” to the imaging device 33, It shows the effect that detection can be performed at the detection time Td.

Further, the position specifying device 10 designates the detection instruction time aTd in the control signal Cs transmitted for each control period Cc, for example, the position specifying apparatus 10 sets the detection instruction time ( aTd) is specified by the control signal Cs in the control period Cc before the detection instruction time aTd.

Accordingly, the position specifying device 10 designates the detection instruction time aTd in the control signal Cs, so that even when the detection instruction time aTd is not an integer multiple of the control period Cc, the detection time Td ) shows the effect that the workpiece 40 can be detected.

With respect to the position specifying apparatus 10, the imaging apparatus 33 is used as a detection apparatus which can detect "the amount of deviation between the position Pw and the detection position Pd of the workpiece 40". The detection deviation amount calculation unit 1160 is configured to provide a deviation between the reference position Rb in the captured image Im captured by the imaging device 33 and the position Pw of the workpiece 40 in the captured image Im. From the amount, the detection deviation amount Qd is calculated.

According to the above configuration, the position specifying device 10 detects a shift by the amount of shift between the reference position Rb in the captured image Im and the position Pw of the workpiece 40 in the captured image Im. Calculate the quantity (Qd). And the position specifying apparatus 10 specifies the position Pw of the workpiece|work 40 by correct|amending the detection position Pd with the detection deviation amount Qd.

Here, the image analysis technique for specifying the position of an imaging target (detection target), etc. in a captured image with high speed and high precision is known.

Accordingly, the position specifying device 10 determines the high-speed and high-accuracy position identification of the workpiece 40 by the detection shift amount Qd calculated from the captured image Im at high speed and high accuracy, and the detection position Pd. It shows the effect that can be realized.

Further, as described above, at the detection time Td, the position Pw of the work 40 and the position of the imaging device 33 coincide, or the amount of deviation between the two becomes sufficiently small. Therefore, for example, when making the center position of the captured image Im into the reference position Rb, in the captured image Im, the workpiece|work 40 is arrange|positioned substantially at the center.

By using the captured image Im in which the work 40 is arranged substantially in the center, the position specifying device 10 provides the captured image Im ), it is possible to reduce the inspection area for specifying the position (Pw) of the work (40). Therefore, the position specifying apparatus 10 can implement|achieve the speedup of the image analysis process required for detecting the workpiece|work 40 from the captured image Im.

In addition, in the captured image Im, since the work 40 is arranged almost at the center, in the position specifying device 10 , the work 40 is imaged compared to a captured image in which the work 40 is not arranged almost at the center. It is possible to increase the ratio of the area occupied by the captured image Im to the whole. That is, the position specifying apparatus 10 can generate|occur|produce the captured image Im imaged by enlarging the workpiece|work 40. As shown in FIG. Therefore, the position specifying apparatus 10 can perform high-precision image analysis with respect to the captured image Im imaged by the workpiece 40 being enlarged.

Therefore, the position specifying device 10 realizes high-speed and high-precision image analysis for the captured image Im, and uses the result of this image analysis to achieve high-speed and high-precision position control of the workpiece 40 . It shows that the effect can be realized.

The position specifying apparatus 10 sequentially specifies the position Pw of each of the plurality of works 40, for example, the position of the first work 40(1) which is one of the plurality of works 40 ( After specifying Pw(1), the following processing is performed when specifying the position Pw(2) of the second work 40(2). That is, the position specifying device 10 includes (A) a first expected detection position pPd(1), which is a position where the first work 40(1) should exist, and (B) a second work 40( The reference displacement amount Rd(12) is calculated from the difference from the second expected detection position pPd(2), which is a position where 2)) should exist. And the position specifying apparatus 10 is the position which added the reference displacement amount Rd(12) to the position Pw(1) of the 1st workpiece|work 40(1) specified by the position specifying part 1180. Let , be the corrected second predicted detection position pPd'(2).

The time at which the position specifying device 10 predicted that at least one of the second workpiece 40 ( 2 ) and the imaging device 33 coincided with the corrected second predicted detection position pPd' ( 2 ) Let , be a detection time Td'(2) at which the second work 40(2) is detected. And the position specifying apparatus 10 makes the imaging apparatus 33 generate|occur|produce the captured image Im regarding the 2nd workpiece|work 40(2) at the detection time Td'(2).

According to the above configuration, the position specifying device 10 calculates the reference displacement amount Rd(12) from the difference between the first expected detection position pPd(1) and the second expected detection position pPd(2). do. The position specifying device 10 adds the calculated reference displacement amount Rd(12) to the position Pw(1) of the first work 40(1), the corrected second predicted detection position ( pPd'(2)). And the position specifying apparatus 10 expects that at least one position of the 2nd workpiece|work 40(2) and the imaging apparatus 33 agrees with the 2nd predicted detection position pPd'(2) after correction|amendment. At one point in time, the imaging device 33 generates the captured image Im for the second detection target.

Therefore, the position specifying apparatus 10 uses the position Pw of the work 40 specified immediately before, when specifying the position of each of the plurality of works 40, the work 40 for which the position is to be specified next. ) has the effect of being able to predict with high precision the position where it exists.

For example, the difference between the actual position Pw(1) of the first work 40(1) and the actual position Pw(2) of the second work 40(2) is defined as "actual displacement Ad (12))”. In addition, it is assumed that the actual displacement amount Ad(12) is smaller by the difference dP than the reference displacement amount Rd(12). In addition, between the expected detection position pPd(2) and the “expected detection position pPd(3) of the third work 40(3) whose position should be specified after the second work 40(2)” Let the difference be "reference displacement amount Rd(23)". Further, the difference between the actual position Pw(2) of the second work 40(2) and the actual position Pw(3) of the third work 40(3) is defined as the "actual displacement amount Ad(23) ))”. It is assumed that the actual displacement amount Ad(23) is smaller than the reference displacement amount Rd(23) by the difference dP.

Then, the actual position Pw(3) of the third work 40(3) is 2 difference dP than the expected detection position pPd(3) of the third work 40(3); That is, it becomes 2dP smaller.

On the other hand, the position obtained by adding the reference displacement amount Rd(23) to the actual position Pw(2) of the second workpiece 40(2) is the corrected third predicted detection position pPd'(3)) , the following can be said about the third expected detection position pPd'(3) after correction. That is, the amount of deviation between the actual position Pw(3) of the third work 40(3) and the third expected detection position pPd'(3) after correction becomes the difference dP.

That is, compared to using the predicted detection position pPd(3), the corrected third predicted detection position pPd'(3) corrected by the actual position Pw(2) of the second workpiece 40(2). )), the prediction accuracy of the position Pw(3) of the third work 40(3) can be improved.

§3. action example

(for a full overview of processing)

14 is a flowchart for explaining an overall outline of the processing executed by the location specifying device 10. As shown in FIG. As shown in Fig. 14, in the position specifying device 10, the detection time determination unit 1150 executes a detection instruction time determination process (S110). Then, the communication unit 1200 (in particular, the command unit 1210 ) transmits the detection instruction time aTd determined by the detection instruction time determination processing and the command value Cm generated by the command value generation unit 1140 . transmit (S120).

The communication unit 1200 (in particular, the control amount acquisition unit 1220 ) provides a detection result of the detection system 30 (eg, captured image Im) and a control result of the servo control system 20 (eg, The feedback position Pf) for each control period Cc is received (S130). Then, the control amount acquisition unit 1220 notifies the detection deviation amount calculation unit 1160 of the received detection result of the detection system 30 , and further reports the received control result of the servo control system 20 to the detection position calculation unit (1170) is notified.

The detection deviation amount calculation unit 1160 uses the detection result of the detection system 30 to perform a detection deviation amount calculation process (S140). Further, the detection position calculation unit 1170 uses the control result of the servo control system 20 to execute detection position calculation processing (S150).

The position specifying unit 1180 corrects the detection position Pd calculated in S150 by the detection deviation amount Qd calculated in S140 to specify the position Pw of the work 40 (S160).

(About detection instruction time determination processing)

Fig. 15 is a flowchart for explaining an example of the detection instruction time determination processing (S110) of Fig. 14 . 15 , the detection time determination unit 1150 first considers the response delay time Ds of the servo control system 20 from the target trajectory Tt, and the target position Pt( t)) is calculated (S210). The detection time determination unit 1150 sets the time at which the "target position Pt(t) in consideration of the response delay time Ds of the servo control system 20" and the expected detection position pPd coincide with the detection time Td ) as specified (S220). The detection time determination unit 1150 determines the detection instruction time aTd in consideration of the response delay time Dd of the detection system 30 with respect to the detection time Td ( S230 ).

(About detection deviation amount calculation processing and detection position calculation processing)

Fig. 16 is a flowchart for explaining an example of each of the detection deviation amount calculation processing (S140) and the detection position calculation processing (S150) of Fig. 14 . Specifically, FIG. 16A is a flowchart for explaining an example of a detection deviation amount calculation process, and FIG. 16B is a flowchart for explaining an example of a detection position calculation process.

As shown in FIG. 16A , the detection deviation amount calculation unit 1160 first performs image analysis on the captured image Im at the detection time Td, and , the position Pw of the work 40 (eg, the central position of the work 40) is specified (S310).

The detection deviation amount calculation unit 1160 includes a specific "position Pw of the workpiece 40 in the captured image Im" and a reference position Rb corresponding to the detected position Pd in the captured image Im. ) (for example, the center point of the captured image Im)" is calculated (that is, "amount of positional displacement in the image") (S320).

The detection deviation amount calculation unit 1160 calculates the detection deviation amount Qd, which is “the amount of deviation between the detection position Pd and the position Pw of the workpiece 40 ,” from the deviation amount calculated in S320 ( S330 ). ).

As shown in FIG. 16(B) , the detection position calculation unit 1170 first, from the “feedback position Pf of the servo control system 20” for each control cycle Cc, the “detection time Td” ), the feedback position Pf of the servo control system 20" is calculated (S410). The detection position calculation unit 1170 sets the calculated "feedback position Pf of the servo control system 20 at the detection time Td" as the detection position Pd (S420).

The processing performed by the position specifying apparatus 10 demonstrated using FIGS. 14-16 so far can be summarized as follows. That is, the control method performed by the position specifying apparatus 10 is a control method of the position specifying apparatus which specifies the position Pw of the workpiece|work 40 which is a detection object. The control method includes a command step (S120), an acquisition step (S130), a detection shift amount calculation step (S140), a detection position calculation step (S150), and a position specifying step (S160).

In the command step, the command value Cm calculated from the target trajectory Tt is output to the servo control system 20 which controls the position of at least one of the imaging device 33 (detection device) and the workpiece 40 . The target trajectory Tt includes, as the target position Pt, the predicted detection position pPd preset as "the position where the workpiece 40 should exist".

The control amount acquisition step acquires a captured image Im that is a detection result of the imaging device 33 at a detection time Td that is a time during movement of at least one of the imaging device 33 and the work 40 . The detection time Td is the time at which "the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20" coincides with the expected detection position pPd. .

As exemplified in FIG. 16A , the detection shift amount calculation step starts from “the amount of shift between the reference position Rb and the position Pw of the work 40 in the captured image Im”, “ A detection deviation amount Qd that is a deviation amount between the detection position Pd and the position Pw of the work 40” is calculated.

As illustrated in FIG. 16B , the detection position calculation step calculates the detection position Pd from the position of the imaging device 33 at the detection time Td.

In the position specification step, the position of the work 40 is corrected by correcting the detection position Pd calculated by the detection position calculation unit 1170 by the detection deviation amount Qd calculated by the detection deviation amount calculation unit 1160 . (Pw) is specified.

According to the said structure, the said control method calculates the detection shift amount Qd which is the shift amount between the detection position Pd and the position Pw of the workpiece|work 40 from the captured image Im. In addition, the control method calculates the detection position Pd from the position of the imaging device 33 at the detection time Td. And the said control method specifies the position Pw of the workpiece|work 40 by the detection shift amount Qd and the detection position Pd.

(Higher precision of position detection)

Therefore, in the control method, even when the position Pw of the workpiece 40 and the detection position Pd do not coincide at the detection time Td, the control method uses the amount of the displacement of the workpiece 40 to The effect that the position Pw can be specified with high precision is shown.

(High-precision and high-speed detection results)

In addition, according to the above configuration, in the control method, the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 coincides with the expected detection position pPd A detection deviation amount Qd is calculated from the captured image Im at the detection time Td, which is a time to be performed.

Here, when the workpiece 40 does not exist within a range in which the imaging device 33 can detect the workpiece 40 at the timing at which the imaging device 33 executes detection, detection deviation from the captured image Im The quantity Qd cannot be calculated.

Therefore, in order to avoid the situation of "the workpiece 40 does not exist within a range where the imaging device 33 can detect the workpiece 40 at the timing when the imaging device 33 performs detection", The control method acquires the captured image Im at the detection time Td.

For example, the servo control system 20 moves only the imaging device 33, the workpiece 40 is not moved, and the workpiece 40 is previously placed at the expected detection position pPd, or the predicted detection position pPd ), the control method executes the following processing. That is, in the control method, the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 that controls the position of the imaging device 33 is the expected detection position. Let the time coincident with (pPd) be the detection time Td.

Here, by taking the response delay time Ds of the servo control system 20 into consideration, "the target position Pt of the servo control system 20 for each time" is "the feedback position of the servo control system 20 for each time" (Pf)", or the amount of deviation between both is considered to be sufficiently small. In addition, the feedback position Pf of the servo control system 20 which controls the position of the imaging device 33 can be regarded as the position of the imaging device 33 . Therefore, "the position of the imaging device 33 for each time" is the "target position for each time of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 ( Pt)", or the amount of deviation between both will be sufficiently small.

As described above, at the detection time Td, "the position of the imaging device 33 moved by the servo control system 20" and the expected detection position pPd coincide with each other, or the amount of deviation between the two is sufficient. will be smaller And, as described above, the workpiece 40 is placed at the expected detection position pPd in advance, or is placed at a position sufficiently close to the expected detection position pPd. Therefore, at the detection time Td, "the position of the imaging device 33 moved by the servo control system 20" and the position Pw of the work 40 coincide with each other, or the amount of deviation between the two is sufficient. gets smaller

As a result, the above control method states that "the workpiece 40 does not exist within the range in which the imaging device 33 can detect the workpiece 40 at the timing when the imaging device 33 performs detection". situation can be avoided.

Further, for example, the servo control system 20 moves only the work 40, the imaging device 33 does not move, and the imaging device 33 is placed in the expected detection position pPd in advance, or the predicted detection When placed at a position sufficiently close to the position pPd, the control method executes the following processing. That is, in the control method, the target position Pt of the servo control system 20 calculated in consideration of the response delay time Ds of the servo control system 20 that controls the position Pw of the work 40 is expected Let the time coincident with the detection position pPd be the detection time Td.

As described above, by taking the response delay time Ds of the servo control system 20 into account, the "target position Pt of the servo control system 20 for each time" is "the target position Pt for each time of the servo control system 20" The feedback position Pf of ', or the amount of deviation between both is considered to be sufficiently small. In addition, the feedback position Pf of the servo control system 20 which controls the position Pw of the workpiece|work 40 can be regarded as the position Pw of the workpiece|work 40. Therefore, the "position of the workpiece 40 at each time" is the "target position Pt of the servo control system 20 for each time, calculated in consideration of the response delay time Ds of the servo control system 20 ." )", or the amount of deviation between the two will be sufficiently small.

As described above, at the detection time Td, the "position Pw of the workpiece 40 moved by the servo control system 20" and the expected detection position pPd coincide, or the amount of deviation between them will be small enough. And, as described above, the imaging device 33 is placed in the expected detection position pPd in advance, or is placed in a position sufficiently close to the expected detection position pPd. Therefore, at the detection time Td, "the position Pw of the workpiece 40 moved by the servo control system 20" and the position of the imaging device 33 coincide with each other, or the amount of deviation between the two is sufficient. gets smaller

As a result, the above control method eliminates the situation "the workpiece 40 does not exist within the range in which the imaging device 33 can detect the workpiece 40 at the timing at which the imaging device 33 performs detection". can be avoided

Further, for example, when the first servo control system 20(1) moves the imaging device 33 and the second servo control system 20(2) moves the workpiece 40, the control method is , let the following times be the detection time Td. That is, in the above control method, each target position ( Pt)" together with the expected detection position pPd is defined as the detection time Td. At the detection time Td, the target position Pt( 1))" coincides with the expected detection position pPd. Further, at the detection time Td, the target position ( Pt(2))" coincides with the expected detection position pPd.

As described above, by taking the response delay time Ds of the servo control system 20 into account, the "target position Pt of the servo control system 20 for each time" is "the target position Pt for each time of the servo control system 20" The feedback position Pf of ', or the amount of deviation between both is considered to be sufficiently small.

In addition, it can be considered that the feedback position Pf(1) of the 1st servo control system 20(1) which controls the position of the imaging device 33 is the position of the imaging device 33. As shown in FIG. In addition, it can be considered that the feedback position Pf(2) of the 2nd servo control system 20(2) which controls the position Pw of the workpiece|work 40 is the position Pw of the workpiece|work 40.

Therefore, "the position of the imaging device 33 in movement at each time" is calculated in consideration of the "response delay time Ds(1) of the first servo control system 20(1) for each time." The target position Pt(1)) of" or the amount of deviation between both will be sufficiently small. In addition, "the position of the moving workpiece 40 at each time" is a target for each time calculated in consideration of the "response delay time Ds(2) of the second servo control system 20(2)" position Pt(2)", or the amount of deviation between both will be sufficiently small.

As described above, at the detection time Td, the "position of the imaging device 33 in motion", the "position Pw of the moving workpiece 40" and the expected detection position pPd coincide, or Alternatively, the deviation amount of the three characters will be sufficiently small.

As a result, the above control method states that "the workpiece 40 does not exist within the range in which the imaging device 33 can detect the workpiece 40 at the timing when the imaging device 33 performs detection". situation can be avoided.

In the control method, as the moving time of at least one of the detection device and the workpiece 40 , "the position Pw of the workpiece 40 matches the position of the imaging device 33 or the amount of deviation between both is sufficient. The captured image Im at the detection time Td which is the time to become small" is acquired.

Here, since the position of the imaging device 33 at the detection time Td corresponds to the detection position Pd, in the captured image Im at the detection time Td, the reference position Rb and the work It is considered that the amount of deviation from the position Pw at (40) is sufficiently small. And, if it is known in advance that "in the captured image Im, the amount of deviation between the reference position Rb and the position Pw of the workpiece 40 is sufficiently small", "in the captured image Im, both deviations are Compared with the case of "the amount is unpredictable or predicted to be large", the analysis to the captured image Im can be made with high precision.

Therefore, the control method acquires the "captured image Im at the detection time Td" that can perform high-precision analysis, that is, "the captured image Im at the detection time Td". From this, the detection deviation amount Qd can be calculated with high precision.

In addition, in the control method, the detection shift amount Qd is calculated from “a captured image Im detected by the imaging device 33 while at least one of the workpiece 40 and the imaging device 33 is moving” do. Therefore, in the control method described above, as compared to the case of "stop the movement of the workpiece 40 and the imaging device 33 and then cause the imaging device 33 to detect and generate the captured image Im", The image Im can be acquired at high speed, and as a result, the calculation of the detection deviation amount Qd can be accelerated.

(Higher precision and higher speed of specifying the position of the detection target)

As described so far, the above control method acquires the captured image Im capable of performing high-precision analysis at high speed, and calculates the detection deviation Qd from the captured image Im at high speed and with high precision. there is. And the said control method specifies the position Pw of the workpiece|work 40 by the calculated detection shift amount Qd and the detection position Pd.

Therefore, the said control method shows the effect that the position Pw of the workpiece|work 40 can be specified with high speed and high precision.

§4. variation example

Although the example in which the position specifying apparatus 10 controls the some servo control system 20 was demonstrated so far, the one servo control system 20 which the position specifying apparatus 10 controls may be sufficient. In addition, although the example in which the detection apparatus which detects the "deviation amount of the position Pw of the workpiece|work 40 and the detection position Pd" is the imaging apparatus 33 so far has been described, the detection apparatus is the imaging apparatus 33 It is not essential to be The position specifying device 10 is a detection device capable of detecting "the amount of deviation between the position Pw and the detection position Pd of the workpiece 40", It is only necessary to be able to acquire the detection result which can calculate the shift|deviation amount with (Pd). Furthermore, although the example in which the position specifying apparatus 10 mainly moves the imaging device 33 and specifies the position Pw of the fixed workpiece 40 so far has been described, the position specifying apparatus 10 moves The target may not be the imaging device 33 . For example, the position specifying device 10 may fix the position of the imaging device 33 and move the work 40 to specify the position Pw of the work 40 , the imaging device 33 and Both sides of the work 40 may be moved to specify the position Pw of the work 40 .

[Example of realization by software]

A control block of the position specifying device 10 (specifically, the target trajectory acquisition unit 1110, the position command generation unit 1120, the response delay time calculation unit 1130, the command value generation unit 1140, the detection time determination unit ( 1150), the detection deviation calculation unit 1160, the detection position calculation unit 1170, the position specifying unit 1180, and the communication unit 1200) are formed by a logic circuit (hardware) formed on an integrated circuit (IC chip) or the like. You may implement|achieve and you may implement|achieve by software.

In the latter case, the location specifying device 10 is provided with a computer that executes instructions of a program that is software for realizing each function. This computer is equipped with one or more processors, for example, and is equipped with the computer readable recording medium which memorize|stored the said program. And, in the computer, the object of the present invention is achieved when the processor reads and executes the program from the recording medium. As the processor, for example, a CPU (Central Processing Unit) can be used. As the recording medium, in addition to "a non-transitory tangible medium", for example, ROM (Read Only Memory) and the like, a tape, a disk, a card, a semiconductor memory, a programmable logic circuit, and the like can be used. Moreover, you may further comprise RAM (Random Access Memory) etc. which expand the said program. In addition, the said program may be supplied to the said computer via any transmission medium (communication network, a broadcast wave, etc.) which can transmit this program. Also, one embodiment of the present invention can be realized in the form of a data signal embedded in a carrier wave, in which the program is embodied by electronic transmission.

The present invention is not limited to each of the above-described embodiments, and various modifications are possible within the scope shown in the claims, and the embodiments obtained by appropriately combining the technical means disclosed in other embodiments, respectively, are also within the technical scope of the present invention. Included.

10 location-specific devices
20 Servo control system
30 detection system
31 Communication device (communication location specific device)
32 Imaging control unit (detection control unit)
33 Image pickup device (detection device)
40 work
1210 Command
1220 Control amount acquisition unit (acquisition unit)
1160 Detection deviation calculation unit
1170 Detection position calculator
1180 Location specific part
aTd detection instruction time
Cc control cycle
Cm command value
Cs control signal
Dd detection system response delay time
Ds Servo control system response delay time
Im captured image
Pd detection position
Pf feedback position
pPd expected detection position
Pt target position
Qd detection deviation
Rb reference position
S130 Acquisition Steps
S140 Detection deviation amount calculation step
S150 detection position calculation step
S160 Position Specific Steps
Td detection time
Tt target trajectory

Claims (9)

A position specifying device for specifying a position of a detection target, comprising:
A command unit for outputting a command value calculated from a target trajectory including, as a target position, an expected detection position set in advance as a position where the detection target should exist, to a servo control system that controls a position of at least one of the detection device and the detection target ;
At a detection time that is a moving time of at least one of the detection device and the detection target, the target position of the servo control system calculated in consideration of a response delay time of the servo control system is a time coincident with the expected detection position, an acquisition unit configured to acquire a detection result of the detection device;
A detection shift amount for calculating a detection shift amount that is a shift amount between a detection position that is a position corresponding to the reference position and a position of the detection target from the shift amount between the reference position and the position of the detection target in the detection result output unit;
a detection position calculation unit configured to calculate the detection position from the position of the detection device at the detection time; and
a position specifying unit for specifying the position of the detection target by correcting the detection position with the detection deviation amount;
A location specific device comprising a. The method according to claim 1,
communication with the servo control system at every control cycle;
When the position of the detection device is controlled by the servo control system, the detection position calculation unit determines the position of the detection device at the detection time at each control period of the servo control system that controls the position of the detection device. A position specifying device that calculates by interpolation calculation from the feedback position of . The method according to claim 1 or 2,
A position specifying device for outputting a command value in consideration of a response delay time of each of the plurality of servo control systems to each of a plurality of servo control systems synchronized with each other. The method according to claim 1 or 2,
A detection instruction time obtained by correcting the detection time in consideration of the response delay time of the detection device is specified in a control signal transmitted at each control cycle to a communication control device communicating with a detection control device that controls a detection operation by the detection device and,
A position specifying device for causing the detection device to detect the detection target at the detection time by causing the communication control device to output a detection instruction to the detection control device at the detection instruction time. The method according to claim 1 or 2,
The detection device is an imaging device,
The detection deviation amount calculation unit calculates the detection deviation amount from a deviation amount between the reference position in the captured image captured by the imaging device and the detection target in the captured image. The method according to claim 1 or 2,
sequentially specifying the positions of each of the plurality of detection targets;
(A) a first expected detection position that is a position where a first detection object, which is one of a plurality of detection objects, should exist, and (B) a second detection object whose position is to be specified after the first detection object must exist Calculate the reference displacement amount from the difference from the second expected detection position, which is the position to be
A position obtained by adding the reference displacement amount to the position of the first detection target specified by the position specifying unit is set as a corrected second predicted detection position;
A time when at least one of the second detection object and the detection device coincides with the corrected second expected detection position is defined as the detection time at which the second detection object is detected;
At the detection time, the detection device generates the detection result regarding the second detection target. A control method of a position specifying device for specifying a position of a detection target, comprising:
A command step of outputting a command value calculated from a target trajectory including, as a target position, an expected detection position set in advance as a position where the detection target should exist, to a servo control system that controls a position of at least one of the detection device and the detection target ;
At a detection time that is a moving time of at least one of the detection device and the detection target, the target position of the servo control system calculated in consideration of a response delay time of the servo control system is a time coincident with the expected detection position, an acquisition step of acquiring a detection result of the detection device;
A detection shift amount for calculating a detection shift amount that is a shift amount between a detection position that is a position corresponding to the reference position and a position of the detection target from the shift amount between the reference position and the position of the detection target in the detection result calculation step;
a detection position calculation step of calculating the detection position from the position of the detection device at the detection time; and
a position specifying step of specifying the position of the detection target by correcting the detection position by the detection deviation amount;
Including, a control method. An information processing program recorded in a non-transitory computer-readable recording medium for causing a computer to function as the location specifying device according to any one of claims 1 to 6. A computer-readable recording medium in which the information processing program according to claim 8 is recorded.

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