TWI640035B - Method of forming conductive pattern, on-cell type touch panel using the same, and transfer film used therein and on-cell type touch panel - Google Patents

Method of forming conductive pattern, on-cell type touch panel using the same, and transfer film used therein and on-cell type touch panel Download PDF

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TWI640035B
TWI640035B TW103138199A TW103138199A TWI640035B TW I640035 B TWI640035 B TW I640035B TW 103138199 A TW103138199 A TW 103138199A TW 103138199 A TW103138199 A TW 103138199A TW I640035 B TWI640035 B TW I640035B
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conductive
layer
film
metal
transfer
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TW201530628A (en
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內田博
宮村泰直
岡恵理
大籏英樹
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昭和電工股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/06Interconnection of layers permitting easy separation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04Interconnection of layers
    • B32B7/12Interconnection of layers using interposed adhesives or interposed materials with bonding properties
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00Properties of the layers or laminate
    • B32B2307/20Properties of the layers or laminate having particular electrical or magnetic properties, e.g. piezoelectric
    • B32B2307/202Conductive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00Electrical equipment
    • B32B2457/20Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/202LCD, i.e. liquid crystal displays
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Laminated Bodies (AREA)
  • Conductive Materials (AREA)

Abstract

發明之課題在於提供可以簡單適用於液晶顯示元件及其他元件之導電圖案形成方法以及使用於彼之轉印用膜。 An object of the invention is to provide a conductive pattern forming method which can be easily applied to a liquid crystal display element and other elements, and a transfer film used therefor.

本發明之解決手段係於支撐膜(10)之一方主面上形成接著層(12),於接著層(12)上把包含金屬奈米線及/或金屬奈米管之導電性油墨塗布為特定的圖案,形成導電預備層(14)。於此圖案,也包含於接著層(12)的全面塗布為全面狀。對前述導電預備層(14)照射脈衝光,呈現或者提高導電性,變換為導電層(16)。因應必要在導電層(16)上形成保護層(18)而得到轉印用膜。剝離支撐膜(10),透過接著層(12)把導電層(16)接著於基板(20)。使用具有保護層(18)的轉印膜的場合,除去保護層(18),使導電層(16)露出,因應必要藉由蝕刻處理等把形成為全面狀的導電層(16)加工為特定的圖案。 The solution of the present invention is to form an adhesive layer (12) on one of the main faces of the support film (10), and apply a conductive ink containing a metal nanowire and/or a metal nanotube to the adhesive layer (12). A specific pattern forms a conductive preparation layer (14). This pattern is also included in the overall coating of the adhesive layer (12) in a comprehensive shape. The conductive preliminary layer (14) is irradiated with pulsed light to exhibit or improve conductivity, and is converted into a conductive layer (16). A protective film (18) is formed on the conductive layer (16) as necessary to obtain a film for transfer. The support film (10) is peeled off, and the conductive layer (16) is attached to the substrate (20) through the adhesive layer (12). When a transfer film having a protective layer (18) is used, the protective layer (18) is removed and the conductive layer (16) is exposed, and it is necessary to process the conductive layer (16) formed into a comprehensive shape by etching or the like to be specific. picture of.

Description

導電圖案形成方法及使用彼之on-cell型觸控面板之製造方法、及使用於彼之轉印用膜以及on-cell型觸控面板 Conductive pattern forming method and manufacturing method using the same on-cell type touch panel, and transfer film and on-cell type touch panel used in the same

本發明係關於導電圖案形成方法及使用彼之on-cell型觸控面板之製造方法,及使用於彼之轉印用膜以及on-cell型觸控面板。 The present invention relates to a method of forming a conductive pattern and a method of manufacturing the same using the on-cell type touch panel, and a film for transfer and an on-cell type touch panel.

對於構成液晶顯示器的液晶顯示元件之驅動用電極、有機EL(電致發光)元件、太陽電池元件、觸控面板等,可以透過光的透明電極為必須的構成構件。 A transparent electrode that can transmit light is an essential constituent member for a driving electrode of a liquid crystal display element constituting a liquid crystal display, an organic EL (electroluminescence) element, a solar cell element, a touch panel, or the like.

使用於這些透明電極的透明導電膜,從前都一直使用ITO(氧化銦錫)。但是,使用於ITO的銦為稀有金屬,所以近年來其供給以及價格的安定化成為重要課題。此外,於ITO之成膜,使用濺鍍法或蒸鍍法等,所以必須要有真空製造裝置,除了製造時間長以外,成本也高。進而,ITO會因為彎曲等物理的應力而產生龜裂容易 損壞,所以對賦予可撓性的基板要適用是困難的。因此,持續進行著解決這些問題之ITO替代材料的探索。 For the transparent conductive film used for these transparent electrodes, ITO (Indium Tin Oxide) has been used until now. However, since indium used for ITO is a rare metal, the supply and price stabilization have become important issues in recent years. Further, in the film formation of ITO, a sputtering method, a vapor deposition method, or the like is used. Therefore, a vacuum manufacturing apparatus is required, and the cost is high in addition to the long manufacturing time. Furthermore, ITO can be cracked easily due to physical stress such as bending. It is damaged, so it is difficult to apply it to a substrate that imparts flexibility. Therefore, the exploration of ITO alternative materials to solve these problems continues.

因此,於「ITO替代材料」之中,作為不需使用真空製造裝置的可塗布成膜的材料,例如已被報告了(i)聚(3,4-亞乙基二氧噻吩)/聚(4-苯乙烯磺酸)(PEDOT:PSS)(例如參照專利文獻1)等高分子系導電材料,以及(ii)含有金屬奈米線的導電性材料(例如參照專利文獻2及非專利文獻1),以及(iii)含有奈米碳管的導電性材料(例如參照專利文獻3)等含有奈米構造的導電性成分之導電性材料。 Therefore, among the "ITO substitute materials", as a material which can be coated and formed without using a vacuum manufacturing apparatus, for example, (i) poly(3,4-ethylenedioxythiophene)/poly (i) has been reported. a polymer-based conductive material such as 4-pyrenesulfonic acid) (PEDOT: PSS) (for example, refer to Patent Document 1), and (ii) a conductive material containing a metal nanowire (see, for example, Patent Document 2 and Non-Patent Document 1) And (iii) a conductive material containing a conductive component of a nanostructure, such as a conductive material containing a carbon nanotube (for example, refer to Patent Document 3).

其中,(ii)之含有金屬奈米線的導電性材料,被報告了呈現低表面電阻以及高光線透過率(例如參照專利文獻2及非專利文獻1),進而具有可撓性,所以適合作為「ITO替代材料」。金屬奈米線的場合,為了使其呈現導電性,或者提高導電性,而有在高溫(200℃以上)進行加熱的方法,但是會有著要往缺乏耐熱性的樹脂膜上形成導電性膜或者利用低溫化而形成廉價的導電性膜為困難的問題(例如參照專利文獻4)。因此,揭示了藉由光照射呈現、提高導電性的方法(例如參照專利文獻5)。 Among them, the conductive material containing the metal nanowire (ii) has been reported to exhibit low surface resistance and high light transmittance (see, for example, Patent Document 2 and Non-Patent Document 1), and further has flexibility, so it is suitable as "ITO replacement materials". In the case of a metal nanowire, in order to exhibit electrical conductivity or to improve conductivity, there is a method of heating at a high temperature (200 ° C or higher), but a conductive film is formed on a resin film lacking heat resistance or It is difficult to form an inexpensive conductive film by lowering the temperature (for example, see Patent Document 4). Therefore, a method of exhibiting light conductivity by light irradiation has been disclosed (for example, refer to Patent Document 5).

此處,例如於觸控面板,如下列非專利文獻2所記載的,有外裝型與內藏型,於內藏型還可區分on-cell型與in-cell型。這些之中,內藏型(特別是on-cell型)之觸控面板,先形成液晶顯示元件之後使用含有前述金屬奈米線的導電性材料形成觸控面板之透明電極。 Here, for example, in the touch panel, as described in the following Non-Patent Document 2, there are an exterior type and a built-in type, and the on-cell type and the in-cell type can be distinguished in the built-in type. Among these, the touch panel of the built-in type (especially the on-cell type) first forms a liquid crystal display element and then forms a transparent electrode of the touch panel using a conductive material containing the metal nanowire.

另一方面,含有前述金屬奈米線的導電性材料,為了呈現或者提高導電性,有必要如前所述進行光照射或高溫(200℃以上)之加熱處理或者進行加壓,但是內藏於前述液晶顯示元件的液晶等被照射光或者高溫(200℃以上)加熱處理的話,會有受到液晶分解或TFT特性變化等影響之虞,所以會有最好不要對液晶顯示元件以及被形成觸控面板的基板進行直接光照射的問題。此外,還有對這樣的構件表面進行加壓處理並不容易,難以不對構件造成影響而賦予導電性的課題。 On the other hand, in order to exhibit or improve conductivity, the conductive material containing the metal nanowire needs to be subjected to light irradiation or high-temperature (200 ° C or higher) heat treatment or pressurization as described above, but is contained therein. When the liquid crystal of the liquid crystal display element is irradiated with light or heated at a high temperature (200 ° C or higher), it may be affected by liquid crystal decomposition or changes in TFT characteristics. Therefore, it is preferable that the liquid crystal display element and the touch are formed. The substrate of the panel is subjected to direct light irradiation. Further, it is not easy to pressurize the surface of such a member, and it is difficult to impart conductivity to the member without affecting the member.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特許第4077675號公報 [Patent Document 1] Japanese Patent No. 4076775

[專利文獻2]日本特表2009-505358號公報 [Patent Document 2] Japanese Patent Publication No. 2009-505358

[專利文獻3]日本特開2003-100147號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2003-100147

[專利文獻4]日本特開2004-273205號公報 [Patent Document 4] Japanese Patent Laid-Open Publication No. 2004-273205

[專利文獻5]國際公開第2013/133420號 [Patent Document 5] International Publication No. 2013/133420

[非專利文獻] [Non-patent literature]

非專利文獻1:Shih-Hsiang Lai, Chun-Yao Ou, Chia-Hao Tsai, Bor-Chuan Chuang, Ming-Ying Ma, and Shuo-Wei Liang; SID Symposium Digest of Technical Papers, Vol.39, Issue 1, pp. 1200-1202 (2008) Non-Patent Document 1: Shih-Hsiang Lai, Chun-Yao Ou, Chia-Hao Tsai, Bor-Chuan Chuang, Ming-Ying Ma, and Shuo-Wei Liang; SID Symposium Digest of Technical Papers, Vol.39, Issue 1, Pp. 1200-1202 (2008)

非專利文獻2:鵜飼 育弘「平面面板顯示器概論(6) 支撐FPD之構件/材料技術(1)觸控面板」THE CHEMICAL TIMES 2011 No.4(通卷222號)2-7 Non-Patent Document 2: Feeding Yu Hong "Introduction to Flat Panel Display (6) Component/Material Technology for Supporting FPD (1) Touch Panel" THE CHEMICAL TIMES 2011 No. 4 (Vol. 222) 2-7

本發明之目的在於提供on-cell型觸控面板等之往無法進行直接光照射或高溫加熱處理或者加壓處理的基板上之導電圖案形成方法以及使用彼之on-cell型觸控面板的製造方法,以及使用於彼之轉印用膜以及on-cell型觸控面板。 An object of the present invention is to provide a method for forming a conductive pattern on a substrate that cannot be subjected to direct light irradiation or high-temperature heat treatment or pressure treatment, such as an on-cell type touch panel, and the manufacture of an on-cell type touch panel using the same. The method, and the transfer film and the on-cell type touch panel used for the same.

為了達成前述目的,本發明之一實施型態,係一種導電圖案形成方法,特徵為具有:準備具備支撐膜、被形成於前述支撐膜上的接著層、被形成於前述接著層上之具有特定圖案形狀的包含金屬奈米線及/或金屬奈米管之導電層之轉印用膜的步驟,剝離前述轉印用膜之支撐膜,透過前述接著層把導電層接著於基板上的接著步驟。 In order to achieve the above object, an embodiment of the present invention is a method of forming a conductive pattern, comprising: providing a support film, an adhesive layer formed on the support film, and a specific layer formed on the adhesive layer a step of patterning the transfer film including the conductive layer of the metal nanowire and/or the metal nanotube, peeling off the support film of the transfer film, and then adhering the conductive layer to the substrate through the adhesive layer .

此外,在前述導電圖案形成方法,最好是在準備前述轉印用膜的步驟,具有在接著層上使包含金屬奈米線及/或金屬奈米管的導電性油墨塗布為特定的圖案形狀而形成導電預備層的步驟,以及藉由對前述導電預備層照射脈衝光形成包含金屬奈米線及/或金屬奈米管的導電 層的步驟。 Further, in the above-described conductive pattern forming method, preferably, in the step of preparing the transfer film, a conductive ink containing a metal nanowire and/or a metal nanotube is coated on a subsequent layer to a specific pattern shape. And forming a conductive preliminary layer, and forming a conductive material comprising a metal nanowire and/or a metal nanotube by irradiating the conductive preliminary layer with pulsed light The steps of the layer.

此外,在前述導電圖案形成方法,亦可於準備前述轉印用膜的步驟,具有在接著層上使包含金屬奈米線及/或金屬奈米管的導電性油墨塗布為全面狀而形成導電預備層的步驟,以及藉由對前述導電預備層照射脈衝光形成包含金屬奈米線及/或金屬奈米管的導電層的步驟,以及把導電層加工為特定圖案的圖案加工步驟。 Further, in the conductive pattern forming method, the step of preparing the transfer film may be performed by coating a conductive ink containing a metal nanowire and/or a metal nanotube on a bonding layer to form a conductive layer. a step of preparing a layer, and a step of forming a conductive layer comprising a metal nanowire and/or a metal nanotube by irradiating the conductive preliminary layer with pulsed light, and a pattern processing step of processing the conductive layer into a specific pattern.

此外,於準備轉印用膜的步驟,亦可具有包含在導電層之與具備接著劑層之主面相反的主面形成保護層的步驟,在前述接著步驟後除去保護層的保護層除去步驟。 Further, the step of preparing the film for transfer may have a step of forming a protective layer on the main surface opposite to the main surface of the conductive layer including the adhesive layer, and removing the protective layer after the subsequent step. .

此外,本發明之其他實施型態,係一種導電圖案形成方法,特徵為具有:準備具備包含在支撐膜上具有特定的圖案形狀的金屬奈米線及/或金屬奈米管之導電層,與被形成於導電層上的接著層之轉印用膜的步驟,把前述轉印用膜之接著層接著於基板上的接著步驟,以及除去前述支撐膜的步驟。 Further, another embodiment of the present invention is a conductive pattern forming method characterized by having a conductive layer prepared to have a metal nanowire and/or a metal nanotube having a specific pattern shape on a support film, and The step of transferring the film of the adhesive layer formed on the conductive layer, the subsequent step of attaching the adhesive layer of the transfer film to the substrate, and the step of removing the support film.

此外,本發明之其他實施型態,係一種on-cell型觸控面板之製造方法,特徵為在前述導電圖案形成方法,前述基板為封入液晶顯示元件的液晶之透明基板,前述接著層,被接著於前述透明基板之與封入液晶側相反側之面。 Further, another embodiment of the present invention is a method of manufacturing an on-cell type touch panel, characterized in that in the method of forming a conductive pattern, the substrate is a transparent substrate of liquid crystal in which a liquid crystal display element is sealed, and the adhesive layer is Next, the surface of the transparent substrate opposite to the side on which the liquid crystal side is sealed is formed.

此外,本發明之其他實施型態,係一種轉印用膜,特徵為依序被層積支撐膜、接著層、以及包含具有 特定的圖案之金屬奈米線及/或金屬奈米管的導電層。 Further, another embodiment of the present invention is a film for transfer characterized by sequentially laminating a support film, an adhesive layer, and comprising A specific pattern of metal nanowires and/or a conductive layer of a metal nanotube.

構成前述導電層之金屬奈米線及/或金屬奈米管彼此之交叉部分的至少一部分係融接著為較佳。 Preferably, at least a portion of the intersection of the metal nanowires and/or the metal nanotubes constituting the conductive layer is preferably followed.

此外,亦可在前述導電層之與具備接著劑層的主面相反的主面上具有保護層。 Further, a protective layer may be provided on the main surface of the conductive layer opposite to the main surface on which the adhesive layer is provided.

此外,本發明之其他實施型態,係一種on-cell型觸控面板,特徵為前述轉印用膜,被接著於液晶顯示元件之被封入液晶的透明基板之與封入液晶側相反側之面。 Further, another embodiment of the present invention is an on-cell type touch panel, characterized in that the transfer film is bonded to a surface of the liquid crystal display substrate on which the liquid crystal is sealed on the opposite side of the liquid crystal side. .

根據本發明的話,可以實現可簡單適用於液晶顯示元件及其他元件之導電圖案製造方法以及使用於彼之轉印用膜。 According to the present invention, a conductive pattern manufacturing method which can be easily applied to liquid crystal display elements and other elements, and a transfer film used therefor can be realized.

10‧‧‧支撐膜 10‧‧‧Support film

12‧‧‧接著層 12‧‧‧Next layer

14‧‧‧導電預備層 14‧‧‧ Conductive preparation layer

16‧‧‧導電層 16‧‧‧ Conductive layer

18‧‧‧保護層 18‧‧‧Protective layer

20‧‧‧基板 20‧‧‧Substrate

22‧‧‧轉印用膜 22‧‧‧Transfer film

24‧‧‧不銹鋼板 24‧‧‧Stainless steel plate

26‧‧‧彩色濾光片基板 26‧‧‧Color filter substrate

28‧‧‧陣列基板 28‧‧‧Array substrate

30‧‧‧液晶層 30‧‧‧Liquid layer

32‧‧‧TFT(薄膜電晶體) 32‧‧‧TFT (thin film transistor)

34‧‧‧on-cell型觸控面板用透明電極 34‧‧‧on-cell type touch panel transparent electrode

36、38‧‧‧偏光板 36, 38‧‧‧ polarizing plate

圖1係相關於實施型態之導電圖案製造方法的步驟例之剖面圖。 Fig. 1 is a cross-sectional view showing an example of a procedure relating to a method of manufacturing a conductive pattern of an embodiment.

圖2係供說明脈衝光的定義之圖。 Figure 2 is a diagram for explaining the definition of pulsed light.

圖3係表示在實施例製作的銀奈米線之SEM影像。 Fig. 3 is a view showing an SEM image of a silver nanowire prepared in the examples.

圖4係供說明對實施例3之轉印用膜照射光的方法之圖。 Fig. 4 is a view for explaining a method of irradiating light to the film for transfer of Example 3.

圖5係使用了藉由相關於實施型態的導電圖案形成方法形成作為on-cell型觸控面板用透明電極的導電層之on- cell型觸控面板之例。 FIG. 5 is an on-state of a conductive layer formed as a transparent electrode for an on-cell type touch panel by a conductive pattern forming method related to an embodiment. An example of a cell type touch panel.

以下依照圖式說明供實施本發明之型態(以下稱為實施型態)。 Hereinafter, the form for carrying out the invention (hereinafter referred to as an embodiment) will be described with reference to the drawings.

於圖1(a)~(h),顯示相關於本實施型態之一的導電圖案形成方法之步驟例之剖面圖,相同的構成要素被賦予同一符號。 1(a) to 1(h) are cross-sectional views showing a procedure example of a method of forming a conductive pattern according to one embodiment of the present embodiment, and the same constituent elements are denoted by the same reference numerals.

於圖1(a)所示的支撐膜10之一方主面上,如圖1(b)所示形成接著層12(接著層形成步驟)。作為接著層12的形成方法,例如可以舉出作用模具塗布機、凹版印刷塗布機等來塗布,或是網版印刷或凹版平版印刷、或接著層膜的貼附等,但不限於這些方法。其後,於前述接著層12上,把含有金屬奈米線及/或金屬奈米管的導電性油墨塗布為特定圖案(塗布步驟),形成導電預備層14(圖1(c))。在此場合,作為圖案,也包含除了電極等圖案以外,對接著層12的全面塗布為全面狀。於本說明書「塗布」一詞包含印刷。此外,「全面狀」係指於一定區域全面地塗布。 On one main surface of the support film 10 shown in Fig. 1(a), an adhesive layer 12 is formed as shown in Fig. 1(b) (the subsequent layer forming step). Examples of the method for forming the adhesive layer 12 include application by a die coater or a gravure coater, or screen printing, gravure lithography, or adhesion of a film, but are not limited thereto. Thereafter, a conductive ink containing a metal nanowire and/or a metal nanotube is applied to the specific layer (coating step) on the adhesive layer 12 to form a conductive preliminary layer 14 (Fig. 1(c)). In this case, as a pattern, the entire surface of the adhesive layer 12 is completely formed in addition to the pattern such as an electrode. The term "coating" as used in this specification includes printing. In addition, "comprehensive" means that it is fully applied in a certain area.

其次,藉由對前述導電預備層14(金屬奈米線及/或金屬奈米管)照射脈衝光,燒成(firing)金屬奈米線及/或金屬奈米管(使金屬奈米線及/或金屬奈米管彼此的外周交叉部分融接)使導電預備層14呈現導電性,或者提高導電預備層14的導電性而把導電預備層14變換為導電層 16(光照射步驟,圖1(d))。其後,於前述導電層16上因應必要形成保護層18(保護層形成步驟,圖1(e))。藉由以上的步驟,形成支撐膜10、接著層12、導電層16及保護層18依序被層積的轉印膜。 Next, by irradiating the conductive preparation layer 14 (the metal nanowire and/or the metal nanotube) with pulsed light, firing the metal nanowire and/or the metal nanotube (making the metal nanowire and / or the metal nanotubes are fused to each other at the peripheral intersection portion thereof to make the conductive preparation layer 14 exhibit conductivity, or to improve the conductivity of the conductive preparation layer 14 to convert the conductive preparation layer 14 into a conductive layer 16 (light irradiation step, Fig. 1 (d)). Thereafter, a protective layer 18 is formed on the conductive layer 16 as necessary (protective layer forming step, FIG. 1(e)). By the above steps, the transfer film in which the support film 10, the adhesive layer 12, the conductive layer 16, and the protective layer 18 are sequentially laminated is formed.

其次,剝離前述支撐膜10,透過接著層12把導電層16接著於基板20(接著步驟,圖1(f))。此基板20,例如亦可為在液晶顯示元件夾著液晶的陣列基板與彩色濾光片基板(參照圖5)。此外,往基板20之接著,例如可以使用層疊裝置或貼膜機等來實施。藉此,把導電層16轉印至基板20,可以在基板20上設導電圖案。作為轉印膜使用具有保護層18之膜的場合,其後除去前述導電層16上的保護層18(圖1(g),使導電層16露出(保護層除去步驟)。 Next, the support film 10 is peeled off, and the conductive layer 16 is then passed through the subsequent layer 12 to the substrate 20 (following step, Fig. 1 (f)). The substrate 20 may be, for example, an array substrate in which liquid crystal is sandwiched between liquid crystal display elements and a color filter substrate (see FIG. 5). Further, the substrate 20 may be carried out, for example, by using a laminating device, a laminator, or the like. Thereby, the conductive layer 16 is transferred to the substrate 20, and a conductive pattern can be provided on the substrate 20. When a film having the protective layer 18 is used as the transfer film, the protective layer 18 on the conductive layer 16 is removed (Fig. 1 (g), and the conductive layer 16 is exposed (protective layer removing step).

其次,因應形成觸控面板的透明電極的場合等必要,藉由光蝕刻法等蝕刻處理,把導電層16加工為透明電極等特定的圖案(圖案加工步驟,圖1(h))。作為金屬奈米線及/或金屬奈米管之一例,使用銀奈米線及/或金屬奈米管的場合,作為其蝕刻液可以使用例如林純藥工業公司製造的Pure Etch GNW Series等。又,導電層使用預先被加工為圖案形狀的轉印膜的場合,不需要圖案加工步驟。此外,藉由在後述的實施例例示的透過遮罩圖案照射脈衝光也可以形成具有導電部與非導電部的導電圖案。 Next, in the case where a transparent electrode of the touch panel is formed, the conductive layer 16 is processed into a specific pattern such as a transparent electrode by etching treatment such as photolithography (pattern processing step, FIG. 1(h)). When a silver nanowire and/or a metal nanotube is used as an example of the metal nanowire and/or the metal nanotube, for example, a Pure Etch GNW Series manufactured by Ivy Pure Chemical Industries, Ltd., or the like can be used. Further, when the conductive layer is used as a transfer film which is previously processed into a pattern shape, a pattern processing step is not required. Further, a conductive pattern having a conductive portion and a non-conductive portion can be formed by irradiating pulsed light through a transmission mask pattern exemplified in Examples to be described later.

此外,在前述光照射步驟之後,於導電層16上形成透明導電性高分子層亦可。進而,由接著層形成步 驟直到保護層形成步驟所製造的前述轉印膜,考慮到使用時的量產性,多數的場合被設想為以樹脂等筒形的芯作為軸,為卷狀物的型態的場合。此外,亦可為裁斷為薄片狀的型態。針對型態沒有特別限制。 Further, after the light irradiation step, a transparent conductive polymer layer may be formed on the conductive layer 16. Further, the step is formed by the subsequent layer In the case of the transfer film produced in the protective layer forming step, in consideration of the mass productivity at the time of use, it is assumed that a cylindrical core such as a resin is used as a shaft and is in the form of a roll. In addition, it may be a pattern that is cut into a sheet shape. There is no particular limitation on the type.

進而,前述圖1(a)~(g)的步驟,亦可變更順序。例如,於圖1(a)所示的支撐膜10之一方主面上以所要的圖案形成導電預備層14(於圖1(c)沒有接著層12的狀態),對此照射脈衝光,使導電預備層14呈現導電性,或是使導電預備層14的導電性提高把導電預備層14變換為導電層16(於圖1(d)沒有接著層12的狀態),其次於導電層16上形成接著層12,中介著此接著層12把支撐膜10及形成於支撐膜10上的導電層16接著於基板20。其後,藉由除去支撐膜10,成為圖1(g)的狀態。在此場合,可以提高被轉印至基板20的導電層16的表面(與基板20相反之面)的平滑性。 Further, the steps of FIGS. 1(a) to 1(g) may be changed in order. For example, the conductive preliminary layer 14 is formed in a desired pattern on one of the main faces of the support film 10 shown in FIG. 1(a) (in the state in which the layer 12 is not provided in FIG. 1(c)), and pulsed light is irradiated thereto. The conductive preparation layer 14 exhibits electrical conductivity or enhances the conductivity of the conductive preparation layer 14 to convert the conductive preparation layer 14 into the conductive layer 16 (in the state in which the layer 12 is not attached in FIG. 1(d)), secondarily on the conductive layer 16. The adhesive layer 12 is formed, and the support layer 10 and the conductive layer 16 formed on the support film 10 are bonded to the substrate 20 via the adhesive layer 12. Thereafter, the support film 10 is removed to be in the state of Fig. 1(g). In this case, the smoothness of the surface (the surface opposite to the substrate 20) transferred to the conductive layer 16 of the substrate 20 can be improved.

於圖5,顯示使用了藉由前述導電圖案形成方法形成有作為on-cell型觸控面板用透明電極的導電層16之on-cell型觸控面板之例。在圖5之例,在作為透明基板之玻璃基板(彩色濾光片基板26與陣列基板28)之間,被形成液晶層30與TFT(薄膜電晶體)32而構成液晶顯示元件。又,液晶層30,藉由未圖示的密封劑封入彩色濾光片基板26與陣列基板28之間。於圖5,作為on-cell型觸控面板用透明電極34之透明電極(導電層16),係藉由相關於本實施型態的導電圖案形成方法,透過未圖示的前 述接著層12接著於彩色濾光片基板26,形成on-cell型觸控面板。在此場合,導電層16,被接著於彩色濾光片基板26之與封入液晶層30之側相反側的面上。又,on-cell型觸控面板的液晶顯示元件所必要的偏光板36、38,分別被形成於陣列基板28與on-cell型觸控面板用透明電極34的外側。 FIG. 5 shows an example of an on-cell type touch panel in which a conductive layer 16 as a transparent electrode for an on-cell type touch panel is formed by the above-described conductive pattern forming method. In the example of FIG. 5, a liquid crystal display element is formed between the glass substrate (the color filter substrate 26 and the array substrate 28) as a transparent substrate, and the liquid crystal layer 30 and the TFT (thin film transistor) 32 are formed. Further, the liquid crystal layer 30 is sealed between the color filter substrate 26 and the array substrate 28 by a sealant (not shown). In FIG. 5, the transparent electrode (conductive layer 16) of the transparent electrode 34 for the on-cell type touch panel is transmitted through a conductive pattern forming method according to the present embodiment. The adhesive layer 12 is then applied to the color filter substrate 26 to form an on-cell type touch panel. In this case, the conductive layer 16 is adhered to the surface of the color filter substrate 26 opposite to the side on which the liquid crystal layer 30 is sealed. Further, the polarizing plates 36 and 38 necessary for the liquid crystal display element of the on-cell type touch panel are formed outside the array substrate 28 and the on-cell type touch panel transparent electrode 34, respectively.

作為前述支撐膜10,可以使用化學安定,熱安定,且可以成形為膜、薄片或板狀者。此外,也包含為了賦予剝離性在表面進行脫模處理者。具體而言,可以舉出聚乙烯、聚丙烯等聚烯烴,聚氯乙烯、聚二氯乙烯等聚鹵化乙烯類,醋酸纖維素、硝基纖維素、賽璐玢(cellophane)等纖維素衍生物、聚醯胺、聚苯乙烯、聚碳酸酯、聚醯亞胺、聚酯。這些之中特佳者為尺寸安定性優異,照射光時可透光的聚酯的一種之2軸延伸聚對苯二甲酸乙二酯膜。 As the support film 10, chemical stability, heat stability, and formation into a film, a sheet, or a plate shape can be used. In addition, it also includes a mold release process for imparting peelability to the surface. Specific examples thereof include polyolefins such as polyethylene and polypropylene, polyhalogenated vinyls such as polyvinyl chloride and polydichloroethylene, and cellulose derivatives such as cellulose acetate, nitrocellulose, and cellophane. , polyamine, polystyrene, polycarbonate, polyimine, polyester. Among these, a two-axis extended polyethylene terephthalate film which is excellent in dimensional stability and which is permeable to light when irradiated with light is a two-axis stretch polyethylene terephthalate film.

前述接著層12之機能係為了確保導電層16與基板20(被轉印體)之接著性。此外,因應必要而設的透明導電性高分子層的目的,係不損失導電層16的導電性而提高表面平滑性。 The function of the above-mentioned adhesive layer 12 is to ensure the adhesion of the conductive layer 16 to the substrate 20 (the transferred body). Further, the purpose of the transparent conductive polymer layer provided as necessary is to improve the surface smoothness without losing the conductivity of the conductive layer 16.

接著層12及透明導電性高分子層的膜厚,分別為0.1~50μm為佳,0.3~30μm更佳,0.5~10μm特佳。膜厚太過厚的話無法對應於裝置的薄膜化。此外,透明導電性高分子層於導電性高分子自身有著色,所以膜厚太厚會使光線透過率降低。接著層12太薄的話,與基板 20(被轉印體)之接著性變得不充分,導電性高分子太薄的話無法呈現使表面平滑的效果。 The film thickness of the layer 12 and the transparent conductive polymer layer is preferably 0.1 to 50 μm, more preferably 0.3 to 30 μm, and particularly preferably 0.5 to 10 μm. If the film thickness is too thick, it cannot correspond to the thinning of the device. Further, since the transparent conductive polymer layer is colored by the conductive polymer itself, the film thickness is too thick, and the light transmittance is lowered. Then the layer 12 is too thin, and the substrate The adhesion of 20 (the transferred body) is insufficient, and when the conductive polymer is too thin, the effect of smoothing the surface cannot be exhibited.

作為前述接著層12,例如可以舉出丙烯酸樹脂、苯乙烯樹脂、環氧樹脂、醯胺樹脂、醯胺環氧樹脂、醇酸樹脂、苯酚樹脂、酯樹脂、胺甲酸乙酯樹脂、環氧樹脂與(甲基)丙烯酸樹脂反應所得的環氧丙烯酸酯樹脂、乙酸乙烯酯樹脂、部分鹼化乙酸乙烯酯樹脂、聚乙烯醇(poval)樹脂、聚乙烯基丁縮醛(butyral)樹脂那樣的聚縮醛樹脂等。這些樹脂,可以單獨使用1種或組合2種以上。在此,「丙烯酸樹脂」,意味著主要具有來自具有(甲基)丙烯醯基的聚合性單量體之單體單位的聚合體。又,所謂「(甲基)丙烯醯基」意味著丙烯醯基以及甲基丙烯醯基。同樣地「(甲基)丙烯基」意味著丙烯基以及甲基丙烯基。 Examples of the adhesion layer 12 include an acrylic resin, a styrene resin, an epoxy resin, a guanamine resin, a guanamine epoxy resin, an alkyd resin, a phenol resin, an ester resin, a urethane resin, and an epoxy resin. Polycondensation of an epoxy acrylate resin, a vinyl acetate resin, a partially alkalized vinyl acetate resin, a poval resin, a butyral resin obtained by reacting with a (meth)acrylic resin Acetal resin and the like. These resins may be used alone or in combination of two or more. Here, the "acrylic resin" means a polymer mainly having a monomer unit derived from a polymerizable unitary body having a (meth) acrylonitrile group. Moreover, "(meth)acryl fluorenyl" means an acryl fluorenyl group and a methacryl fluorenyl group. Similarly, "(meth)acrylyl" means a propylene group and a methacryl group.

前述丙烯酸樹脂,可以使用把具有(甲基)丙烯醯基的聚合性單量體進行自由基聚合而製造者。此丙烯酸樹脂,可以單獨使用1種或組合2種以上。 The acrylic resin can be produced by radically polymerizing a polymerizable unit having a (meth)acryl fluorenyl group. These acrylic resins may be used alone or in combination of two or more.

作為前述具有(甲基)丙烯醯基的聚合性單量體,例如,可以舉出二丙酮丙烯醯胺等丙烯醯胺,(甲基)丙烯酸烷基酯,(甲基)丙烯酸四氫糠基酯,(甲基)丙烯酸二甲基胺基乙酯,(甲基)丙烯酸二乙基胺基乙酯,(甲基)丙烯酸縮水甘油酯,(甲基)丙烯酸2,2,2-三氟乙酯,(甲基)丙烯酸2,2,3,3-四氟丙酯等。 Examples of the polymerizable mono-weight having a (meth) acrylonitrile group include acrylamide such as diacetone acrylamide, alkyl (meth) acrylate, and tetrahydro fluorenyl (meth) acrylate. Ester, dimethylaminoethyl (meth)acrylate, diethylaminoethyl (meth)acrylate, glycidyl (meth)acrylate, 2,2,2-trifluoro(meth)acrylate Ethyl ester, 2,2,3,3-tetrafluoropropyl (meth)acrylate, and the like.

此外,前述丙烯酸樹脂,除了如前所述具有(甲基)丙烯醯基的聚合性單量體以外,亦可以是在苯乙 烯、乙烯基甲苯、α-甲基苯乙烯等之α-位或者芳香族環被置換的可聚合的苯乙烯衍生物,丙烯腈、乙烯基-n-丁醚等乙烯醇之醚類等之1種或2種以上的聚合性單量體被共聚合。 Further, the aforementioned acrylic resin may be in the form of a polymerizable monomer having a (meth)acryl fluorenyl group as described above. a polymerizable styrene derivative in which an α-position such as an olefin, a vinyl toluene or an α-methyl styrene or an aromatic ring is substituted, an ether of a vinyl alcohol such as acrylonitrile or vinyl-n-butyl ether; One type or two or more types of polymerizable units are copolymerized.

這些樹脂的重量平均分子量以3000~1000000為佳。 The weight average molecular weight of these resins is preferably from 3,000 to 1,000,000.

此外,前述透明導電性高分子層由包含導電性高分子的材料所構成,作為導電性高分子,有聚噻吩系,聚乙炔(polyacetylene)系,聚對苯(poly(para-phenylene),PPP)系,聚苯胺系,聚對苯亞乙烯系,聚吡咯系等導電性高分子,其中作為有透明性的導電性高分子,可以舉出摻雜聚苯乙烯磺酸(PSS),聚乙烯基磺酸(PVS),或者p-甲苯磺酸(TSO)之聚(3,4-亞乙二氧基噻吩)(PEDOT),亦即所謂的PEDOT/PSS、PEDOT/PVS、PEDOT/TSO等。 Further, the transparent conductive polymer layer is composed of a material containing a conductive polymer, and examples of the conductive polymer include polythiophene-based, polyacetylene-based, poly(para-phenylene), and PPP. A conductive polymer such as polyaniline, polyparaphenylene vinylene or polypyrrole. Among them, a conductive polymer having transparency is doped polystyrenesulfonic acid (PSS) and polyethylene. Sulfonic acid (PVS), or poly(3,4-ethylenedioxythiophene) (PEDOT) of p-toluenesulfonic acid (TSO), also known as PEDOT/PSS, PEDOT/PVS, PEDOT/TSO, etc. .

作為聚噻吩系導電性高分子,例如可以使用在以下的化學式所示的具有聚噻吩系高分子所構成的主鏈之未摻雜的高分子,摻雜碘等鹵素或者其他氧化劑,藉此使前述高分子部分氧化,形成陽離子構造者。 As the polythiophene-based conductive polymer, for example, an undoped polymer having a main chain composed of a polythiophene-based polymer represented by the following chemical formula, and a halogen or other oxidizing agent such as iodine may be used. The polymer is partially oxidized to form a cation structure.

於前述化學式,R1基、R2基各自可以相互獨立地選擇,作為選項,可以例示氫原子;氟原子、氯原子、溴原子、碘原子等鹵素原子;氰基;甲基、乙基、丙基、丁基(n-丁基)、戊基(n-戊基)、己基、辛基、十二基、十六基、十八基等直鏈烷基;異丙基、異丁基、sec-丁基、tert-丁基、異戊基、新戊基等有側鏈的烷基;甲氧基、乙氧基、丙氧基、異丙氧基、丁氧基、異丁氧基、sec-丁氧基、tert-丁氧基等直鏈或者有側鏈的烷氧基;乙烯基、丙烯基、烯丙基、丁烯基、油烯基等烯基、乙炔基、丙炔基、丁炔基等炔基;甲氧基甲基、2-甲氧基乙基、2-乙氧基乙基、3-乙氧基丙基等烷氧基烷基;C2H5O(CH2CH2O)mCH2CH2基(m為1以上之整數)、CH3O(CH2CH2O)mCH2CH2基(m為1以上之整數)等聚醚基;氟甲基等,前述置換基之氟等鹵素置換衍生物等。 In the above chemical formula, each of the R 1 group and the R 2 group may be independently selected from each other, and as an option, a hydrogen atom; a halogen atom such as a fluorine atom, a chlorine atom, a bromine atom or an iodine atom; a cyano group; a methyl group; an ethyl group; a straight-chain alkyl group such as propyl, butyl (n-butyl), pentyl (n-pentyl), hexyl, octyl, dodecyl, hexadecanyl, octadecyl; isopropyl, isobutyl , sec-butyl, tert-butyl, isopentyl, neopentyl and the like having an alkyl group; methoxy, ethoxy, propoxy, isopropoxy, butoxy, isobutoxy a straight or chain alkoxy group such as a sec-butoxy group or a tert-butoxy group; an alkenyl group such as a vinyl group, a propenyl group, an allyl group, a butenyl group or an oleyl group; an ethynyl group; Alkynyl, butynyl and the like alkynyl; methoxymethyl, 2-methoxyethyl, 2-ethoxyethyl, 3-ethoxypropyl, etc. alkoxyalkyl; C 2 H 5 Polyethers such as O(CH 2 CH 2 O) m CH 2 CH 2 group (m is an integer of 1 or more) and CH 3 O(CH 2 CH 2 O) m CH 2 CH 2 group (m is an integer of 1 or more) A fluoromethyl group or the like, a halogen-substituted derivative such as fluorine of the above-mentioned substituent, or the like.

此聚噻吩系導電性高分子中,以3,4-亞乙二氧基噻吩(PEDOT)為佳。特別是將PEDOT以聚苯乙烯磺酸(PSS)摻雜之PEDOT-PSS,透明性高且低電阻所以較佳。 Among the polythiophene-based conductive polymers, 3,4-ethylenedioxythiophene (PEDOT) is preferred. In particular, PEDOT-PSS in which PEDOT is doped with polystyrenesulfonic acid (PSS) is preferred because of its high transparency and low electrical resistance.

作為市售品,可以舉出H.C.Starck公司製Baytron(登錄商標)P以及Heraeus公司製Clevios(登錄商標)SV3、或是Nagase ChemteX公司製Denatron(登錄商標)# 5002LA、Agfa-Gevaert公司製Orgacon(登錄商標)S300或者Orgacon3040等。 As a commercial item, Baytron (registered trademark) P manufactured by HC Starck Co., Ltd. and Clevios (registered trademark) SV3 manufactured by Heraeus Co., Ltd., or Denatron (registered trademark) #5002LA manufactured by Nagase ChemteX Co., Ltd., or Orgacon manufactured by Agfa-Gevaert Co., Ltd. Registered trademark) S300 or Orgacon3040.

前述金屬奈米線及/或金屬奈米管,係分散於含有在5~40℃的範圍不具有流動性的熱硬化性或熱塑性結合劑樹脂的溶液(分散媒)作為導電性油墨,使用此導電性油墨,藉由凹版印刷、網版印刷、凹版平版印刷、凸版印刷等,在被形成於支撐膜10表面的接著層12上進行圖案印刷為特定的形狀,形成導電預備層14。又,於圖案印刷,包含往接著層12的全面之全面塗布(形成全面圖案)。此外,所謂前述5~40℃,意味了通常進行印刷的室溫。 The metal nanowire and/or the metal nanotube are dispersed in a solution (dispersion medium) containing a thermosetting or thermoplastic binder resin having no fluidity in the range of 5 to 40 ° C as a conductive ink. The conductive ink is patterned into a specific shape on the adhesive layer 12 formed on the surface of the support film 10 by gravure printing, screen printing, gravure lithography, letterpress printing, or the like to form the conductive preliminary layer 14. Further, in the pattern printing, a comprehensive overall coating (forming a full pattern) to the adhesive layer 12 is included. Further, the above-mentioned 5 to 40 ° C means a room temperature at which printing is normally performed.

此外,如前所述,導電預備層14藉由照射脈衝光被變換為導電層16。此時,藉由金屬奈米線及/或金屬奈米管的交叉的外周部進行融接,構成透明且具導電性的導電層16。 Further, as described above, the conductive preliminary layer 14 is converted into the conductive layer 16 by the irradiation of the pulsed light. At this time, the outer peripheral portion of the intersection of the metal nanowire and/or the metal nanotube is fused to form a transparent conductive layer 16 having conductivity.

作為在前述5~40℃的範圍不具有流動性的熱硬化性或熱塑性結合劑樹脂,只要是透明的樹脂,其自身 在室溫沒有流動性而溶解於溶媒者即可,可以無特別限制地使用,但耐熱性高而吸濕性低者更佳。此處,「熱硬化性樹脂」意味著在未硬化的狀態溶解於溶媒者。熱硬化性樹脂以藉由後述之光照射而熱硬化者為佳。作為這些的結合劑樹脂,例如可以舉出丙烯酸樹脂、環氧樹脂、環氧丙烯酸酯樹脂、聚氨酯丙烯酸酯樹脂、不飽和聚酯樹脂、烯丙基酯樹脂、鄰苯二甲酸二烯丙酯(DAP)樹脂、胺甲酸乙酯樹脂、聚矽氧樹脂、聚酯樹脂、聚碳酸酯樹脂、聚醯胺樹脂(尼龍)、非晶質聚烯烴樹脂、聚苯乙烯、聚乙酸乙烯酯、聚N-乙烯基醯胺、聚-4-甲基戊烯-1等。其中特別以與銀的親和性優異者,可以舉出聚N-乙烯基咯烷酮、聚N-乙烯基己內醯胺、聚N-乙烯基乙醯胺、聚N-乙烯基甲醯胺等聚N-乙烯基醯胺類、環氧樹脂、聚氨酯丙烯酸酯樹脂、胺甲酸乙酯樹脂或透明性優異的環烯烴高分子(COP,Cyclic Olefin Polymer)、環烯烴共聚合物(COC,Cyclic Olefin Copolymer)等之絕緣性樹脂,但因應必要可以使用公知的導電性樹脂。 The thermosetting or thermoplastic binder resin which does not have fluidity in the range of 5 to 40 ° C, as long as it is a transparent resin, is itself It is not particularly limited as long as it has no fluidity at room temperature and is dissolved in a solvent. However, it is preferably used because it has high heat resistance and low hygroscopicity. Here, the "thermosetting resin" means a substance which is dissolved in a solvent in an unhardened state. The thermosetting resin is preferably thermally cured by light irradiation described later. Examples of the binder resin include acrylic resin, epoxy resin, epoxy acrylate resin, urethane acrylate resin, unsaturated polyester resin, allyl ester resin, diallyl phthalate ( DAP) resin, urethane resin, polyoxyn epoxide resin, polyester resin, polycarbonate resin, polyamide resin (nylon), amorphous polyolefin resin, polystyrene, polyvinyl acetate, poly N - Vinyl decylamine, poly-4-methylpentene-1, and the like. Among them, in particular, those having excellent affinity with silver include poly N-vinyl pyrrolidone, poly N-vinyl caprolactam, poly N-vinylacetamide, poly N-vinylformamide Iso-N-vinylamine, epoxy resin, urethane acrylate resin, urethane resin or cycloolefin polymer (COP, Cyclic Olefin Polymer), cyclic olefin copolymer (COC, Cyclic) An insulating resin such as Olefin Copolymer), but a known conductive resin can be used as necessary.

特別以聚N-乙烯基吡咯烷酮、聚N-乙烯基己內醯胺、聚N-乙烯基乙醯胺、聚N-乙烯基甲醯胺等聚N-乙烯基醯胺類,也使用於奈米線的合成時,此外可作為合成後進而兼具防止凝集的保護膜材料來添加,所以藉由在奈米線的製造階段過剩地使用,除了製造上也容易,也可提高電極的品質,所以更佳。 In particular, poly N-vinyl decylamines such as poly N-vinylpyrrolidone, poly N-vinyl caprolactam, poly N-vinylacetamide, poly N-vinylformamide, and the like are also used. In the synthesis of the rice noodles, it can be added as a protective film material which is combined with the prevention of aggregation, so that it can be used in the production stage of the nanowire, and it is easy to manufacture, and the quality of the electrode can be improved. So better.

前述金屬奈米線或金屬奈米管,是指直徑的粗細為奈米等級的尺寸之金屬,金屬奈米線為線狀,金屬 奈米管為具有多孔質或者非多孔之管狀的形狀之導電性材料。於本說明書,「線狀」與「管狀」均為線狀,但前者意指中央非中空者,後者的中央為中空者。性狀可以是柔軟的,也可以是剛直的。金屬奈米線或金屬奈米管,使用任一種亦可,混合二者使用亦可。 The aforementioned metal nanowire or metal nanotube refers to a metal having a diameter of a nanometer size, a metal nanowire being linear, and a metal. The nanotube is a conductive material having a porous or non-porous tubular shape. In the present specification, both "linear" and "tubular" are linear, but the former means that the center is not hollow, and the latter is hollow. The trait can be soft or straight. The metal nanowire or the metal nanotube may be used singly or in combination.

構成金屬奈米線或金屬奈米管的金屬種類,可以舉出選自金、銀、鉑、銅、鎳、鐵、鈷、鋅、釕、銠、鈀、鎘、鋨、銥之群的至少一種或組合這些金屬的合金等。為了得到低表面電阻且高全光線透過率的塗膜,以至少含有金、銀及銅任一之至少1種為較佳。這些金屬導電性高,所以得到特定的表面電阻時,可以減少金屬在面上所佔的密度,所以可實現高的全光線透過率。 The metal species constituting the metal nanowire or the metal nanotube may be at least one selected from the group consisting of gold, silver, platinum, copper, nickel, iron, cobalt, zinc, ruthenium, rhodium, palladium, cadmium, osmium, and iridium. One or a combination of alloys of these metals and the like. In order to obtain a coating film having a low surface resistance and a high total light transmittance, it is preferred to contain at least one of gold, silver and copper. Since these metals have high conductivity, when a specific surface resistance is obtained, the density of the metal on the surface can be reduced, so that a high total light transmittance can be achieved.

這些金屬之中,以含有金或銀之至少1種為更佳。作為最適合的態樣,可以舉出銀之奈米線。 Among these metals, at least one of gold or silver is more preferable. As a most suitable aspect, a silver nanowire can be cited.

構成導電層16的金屬奈米線及/或金屬奈米管之直徑粗細、長軸長度及長寬比具有一定的分布為較佳。此分布,以提高相關於本實施型態的導電圖案(透明電極)之全光線透過率且降低表面電阻的方式來選擇。具體而言,金屬奈米線及金屬奈米管的直徑粗細的平均以1~500nm為佳,5~200nm更佳,5~100nm進而又更佳,10~80nm特佳。此外,金屬奈米線及金屬奈米管的長軸長度的平均,以1~100μm為佳,1~50μm更佳,2~50μm進而又更佳,5~30μm特佳。金屬奈米線及金屬奈米管,直徑粗細的平均及長軸長度的平均滿足前述範圍,同時長 寬比的平均比5還大者為佳,10以上更佳,100以上進而更佳,200以上特佳。此處,長寬比,係將金屬奈米線及金屬奈米管之直徑的平均粗細近似為b,長軸的平均長度近似為a的場合,以a/b求得之值。a及b可以使用掃描型電子顯微鏡任意測定20根求出其平均值。 It is preferable that the metal nanowires and/or the metal nanotubes constituting the conductive layer 16 have a certain distribution of the diameter, the major axis length, and the aspect ratio. This distribution is selected in such a manner as to increase the total light transmittance of the conductive pattern (transparent electrode) according to the present embodiment and reduce the surface resistance. Specifically, the average diameter of the metal nanowire and the metal nanotube is preferably 1 to 500 nm, more preferably 5 to 200 nm, more preferably 5 to 100 nm, and more preferably 10 to 80 nm. Further, the average length of the long axis of the metal nanowire and the metal nanotube is preferably 1 to 100 μm, more preferably 1 to 50 μm, further preferably 2 to 50 μm, and more preferably 5 to 30 μm. Metal nanowires and metal nanotubes, the average of the diameter and the length of the long axis satisfy the above range, and are long The average width ratio is preferably greater than 5, more preferably 10 or more, 100 or more, and more preferably 200 or more. Here, the aspect ratio is a value obtained by a/b when the average thickness of the diameter of the metal nanowire and the metal nanotube is approximately b, and the average length of the major axis is approximately a. A and b can be arbitrarily measured by a scanning electron microscope to determine the average value of 20 pieces.

作為金屬奈米線的製造方法,可以使用公知的製造方法。例如,銀奈米線,可以使用多元醇(Poly-ol)法,在聚乙烯吡咯啶酮存在下藉由還原硝酸銀而合成(參照Chem.Mater.,2002,14,4736)。金奈米線也同樣,可以在聚乙烯吡咯啶酮存在下藉由還原氯化金酸水和物而合成(參照J.Am.Chem.Soc.,2007,129,1733)。關於銀奈米線及金奈米線之大規模的合成及精製的技術,詳細記載於國際公開公報WO2008/073143號小冊與國際公開第2008/046058號小冊。具有多孔構造的金奈米管,可以把銀奈米線作為鑄模,藉由還原氯化金酸溶液而合成。此處,使用於鑄模的銀奈米線係藉由與氯化金酸之氧化還原反應而溶出至溶液中,結果可以形成具有多孔構造的金奈米管。(參照J.Am.Chem.Soc.,2004,126,3892-3901)。 As a manufacturing method of a metal nanowire, a well-known manufacturing method can be used. For example, a silver nanowire can be synthesized by reducing a silver nitrate in the presence of polyvinylpyrrolidone using a poly-ol method (see Chem. Mater., 2002, 14, 4736). Similarly, the gold nanowire can be synthesized by reducing the water of gold chloride in the presence of polyvinylpyrrolidone (refer to J. Am. Chem. Soc., 2007, 129, 1733). The technique for large-scale synthesis and purification of the silver nanowire and the golden nanowire is described in detail in International Publication WO2008/073143 and International Publication No. 2008/046058. A gold nanotube having a porous structure can be synthesized by reducing a gold chloride solution by using a silver nanowire as a mold. Here, the silver nanowire used in the mold is eluted into the solution by a redox reaction with gold chloride acid, and as a result, a gold nanotube having a porous structure can be formed. (Refer to J. Am. Chem. Soc., 2004, 126, 3892-3901).

適用於本發明之實施型態的導電圖案形成用導電性油墨,係把前述之在5~40℃之範圍(室溫)不具有流動性的熱硬化性或熱塑性的結合劑樹脂溶解於溶媒,藉著把金屬奈米線及/或金屬奈米管分散於其中而可調製。作為此處使用的溶媒,只要是一般可使用於凹版印刷、網版印刷、凹版平版印刷、凸版印刷等的溶媒即可,可以無 特別限制地使用。在凹版印刷的場合,使用沸點比較低的溶媒,網版印刷的場合使用沸點比較高的溶媒。 The conductive ink for forming a conductive pattern to be applied to the embodiment of the present invention dissolves the thermosetting or thermoplastic binder resin having no fluidity in the range of 5 to 40 ° C (room temperature) in the solvent. It can be prepared by dispersing a metal nanowire and/or a metal nanotube therein. The solvent to be used herein may be any solvent which can be generally used for gravure printing, screen printing, gravure lithography, letterpress printing, etc., and may be omitted. Use it with special restrictions. In the case of gravure printing, a solvent having a relatively low boiling point is used, and in the case of screen printing, a solvent having a relatively high boiling point is used.

作為可以使用於凹版印刷的沸點比較低的溶媒,沸點為50℃以上200℃以下,較佳為150℃以下,例如可以利用甲苯、二甲苯等芳香族烴系、丙酮、甲乙酮等酮系、乙酸乙酯、醋酸N丙酯等酯系,異丙醇、正丙醇、2-丁醇、異丁醇、n-丁醇等醇系溶劑等有機溶劑。 The solvent having a relatively low boiling point which can be used for gravure printing has a boiling point of 50 ° C or more and 200 ° C or less, preferably 150 ° C or less. For example, an aromatic hydrocarbon such as toluene or xylene, a ketone system such as acetone or methyl ethyl ketone, or acetic acid can be used. An ester such as ethyl ester or N-propyl acetate; an organic solvent such as an alcohol solvent such as isopropyl alcohol, n-propanol, 2-butanol, isobutanol or n-butanol.

可以使用於網版印刷的沸點比較高的溶媒為沸點360℃以下120℃以上,較佳為150℃以上,具體而言可以舉出丁基卡必醇醋酸酯(butyl carbitol acetate)、二乙二醇丁醚、萜品醇(terpineol)、異莰基環己醇(商品名:Terusolve MTPH、日本萜烯製造)、二甲苯、bis-乙氧基乙烷、乙二醇、丙二醇(propylene glycol)等。 The solvent having a relatively high boiling point which can be used for screen printing has a boiling point of 360° C. or lower and 120° C. or higher, preferably 150° C. or higher, and specific examples thereof include butyl carbitol acetate and diethyl phthalate. Alcohol butyl ether, terpineol, isodecyl cyclohexanol (trade name: Terusolve MTPH, manufactured by Japanese terpene), xylene, bis-ethoxyethane, ethylene glycol, propylene glycol Wait.

又,這些溶媒可以使用1種或組合2種以上。 Further, these solvents may be used alone or in combination of two or more.

相關於本實施型態的導電性油墨之金屬奈米線及/或金屬奈米管的含量,由其良好的分散性及由導電性油墨所得到的塗膜之良好的圖案形成性、高導電性及良好的光學特性的觀點來看,對導電性油墨總質量之金屬奈米線及/或金屬奈米管為0.01~10質量%之量,更佳為0.05~2質量%之量。金屬奈米線及/或金屬奈米管未滿0.01質量%的話,要確保所要的導電性,必須要把透明導電膜層印刷成非常厚,除了印刷難度變高,而且乾燥時要維持圖案會變難。此外,超過10質量%的話,要確保所 要的透明度,必須要印刷成非常薄,在此場合印刷也變難。 The content of the metal nanowire and/or the metal nanotube of the conductive ink according to the present embodiment is excellent in dispersibility and good pattern formation of the coating film obtained from the conductive ink, and high conductivity. From the viewpoint of properties and good optical properties, the metal nanowire and/or the metal nanotube of the total mass of the conductive ink is 0.01 to 10% by mass, more preferably 0.05 to 2% by mass. If the metal nanowire and/or the metal nanotube is less than 0.01% by mass, to ensure the desired conductivity, the transparent conductive film layer must be printed to be very thick, except that the printing difficulty becomes high, and the pattern is maintained when dry. It is difficult. In addition, if it exceeds 10% by mass, be sure to The transparency required must be printed to be very thin, and printing on this occasion becomes difficult.

進而,加入此金屬奈米線及/或金屬奈米管之在室溫不具有流動性的熱硬化性或熱塑性結合劑樹脂的配合量,隨著使用的樹脂其最適合的配合量也不同,一般而言,對金屬奈米線及/或金屬奈米管100質量份,含有100質量份至2500質量份之量,較佳為150質量份~2000質量份之量。結合劑樹脂100質量份以下的話表面平滑性變低。此外,超過2500質量份的話即使照射脈衝光,也無法降低表面電阻。 Further, the amount of the thermosetting or thermoplastic binder resin which does not have fluidity at room temperature by adding the metal nanowire and/or the metal nanotube is different depending on the resin to be used. In general, the amount of the metal nanowire and/or the metal nanotube is 100 parts by mass to 2500 parts by mass, preferably 150 parts by mass to 2000 parts by mass. When the binder resin is 100 parts by mass or less, the surface smoothness is lowered. Further, when the amount of the pulsed light is more than 2,500 parts by mass, the surface resistance cannot be lowered.

被適用於本實施型態的導電性油墨,在不損及其性質的範圍,亦可包含前述成分(金屬奈米線、金屬奈米管、結合劑樹脂)以外的任意成分,例如改善與基材之潤濕性的潤濕分散劑、表面調整劑、消泡劑、觸變劑、流平劑(leveling agent)、防腐蝕劑、密接促進劑、界面活性劑、流變控制劑等。 The conductive ink to be applied to the present embodiment may contain any component other than the above components (metal nanowire, metal nanotube, or binder resin) in a range that does not impair the properties thereof, for example, improvement and basis. A wetting and dispersing agent, a surface conditioner, an antifoaming agent, a thixotropic agent, a leveling agent, an anticorrosive agent, a adhesion promoter, a surfactant, a rheology control agent, and the like.

作為潤濕分散劑可以舉出DISPERBYK(登錄商標)-106、DISPERBYK(登錄商標)-108(BYK‧Japan(股)製造)、作為表面調整劑可舉出BYK(登錄商標)-300、BYK(登錄商標)-306(BYK‧Japan(股)製造)、作為消泡劑可舉出BYK(登錄商標)-051、BYK(登錄商標)-054(BYK‧Japan(股)製造)、作為觸變劑可以舉出AEROSIL(登錄商標)380、AEROSIL(登錄商標)R106、AEROSIL(登錄商標)R-812(日本Aerosil(股)製造)、作為流平劑(leveling agent)可舉出BYKETOL(登錄商標)-OK(BYK‧Japan(股)製造)、作為防腐蝕劑可以舉出苯並三唑等,作為密接促進劑可舉出2-羥基甲基纖維素等、作為界面活性劑可舉出商品名F-472SF(DIC(股)製造)、作為流變控制劑可舉出BYK(登錄商標)-405、BYK(登錄商標)-410、BYK(登錄商標)-311(BYK‧Japan(股)製造)等。 Examples of the wetting and dispersing agent include DISPERBYK (registered trademark)-106, DISPERBYK (registered trademark)-108 (manufactured by BYK‧Japan), and surface modifiers include BYK (registered trademark)-300 and BYK ( Registered trademark) - 306 (manufactured by BYK ‧ Japan Co., Ltd.), and as a defoaming agent, BYK (registered trademark) -051, BYK (registered trademark) - 054 (manufactured by BYK‧ Japan), as a thixotropic The agent may be AEROSIL (registered trademark) 380, AEROSIL (registered trademark) R106, AEROSIL (registered trademark) R-812 (manufactured by Japan Aerosil Co., Ltd.), and leveling agent (leveling) Illustrative examples of the agent include BYKETOL (registered trademark)-OK (manufactured by BYK‧Japan), benzotriazole as the anticorrosive agent, and 2-hydroxymethylcellulose as the adhesion promoter. The surfactant is F-472SF (manufactured by DIC), and the rheology control agent is BYK (registered trademark)-405, BYK (registered trademark)-410, BYK (registered trademark)- 311 (made by BYK‧Japan).

相關於本實施型態之導電性油墨,可以藉由把前述成分,以公知的方法適當選擇進行攪拌、混合、加熱、冷卻、溶解、分散等而製造。 The conductive ink according to the present embodiment can be produced by appropriately selecting, stirring, mixing, heating, cooling, dissolving, dispersing, or the like by a known method.

相關於本實施型態的導電性油墨之較佳的黏度,隨著印刷方法而不同,但凹版印刷的場合,25℃之黏度為50~10000mPa‧s為較佳,更佳為300~5000mPa‧s。網版印刷的場合,25℃之黏度以100~2×105mPa‧s為佳,更佳為1×103~5×104mPa‧s。又,黏度係使用旋轉黏度劑測定之值。在後述之實施例、比較例,使用了Brookfield公司HBDV-II+Pro(板型式CP-40(低黏度時為26~87,200mPa‧s)或者CP-52(高黏度時為800~2,620,000mPa‧s))。 The preferred viscosity of the conductive ink according to this embodiment differs depending on the printing method, but in the case of gravure printing, the viscosity at 25 ° C is preferably from 50 to 10,000 mPa·s, more preferably from 300 to 5,000 mPa. s. In the case of screen printing, the viscosity at 25 ° C is preferably from 100 to 2 × 10 5 mPa ‧ , more preferably from 1 × 10 3 to 5 × 10 4 mPa ‧ s. Further, the viscosity is a value measured by using a rotational viscosity agent. In the examples and comparative examples described later, Brookfield HBDV-II+Pro (plate type CP-40 (26 to 87, 200 mPa‧s at low viscosity) or CP-52 (800 to 2, 620,000 mPa at high viscosity) was used. s)).

使用如此進行調製的導電性油墨,藉由利用模具塗布機、凹版印刷塗布機之塗布,或者凹版印刷、網版印刷、噴墨印刷、凸版印刷等在接著層12上進行所要的形狀的圖案印刷。 The conductive ink prepared in this manner is subjected to pattern printing of a desired shape on the adhesive layer 12 by coating with a die coater or a gravure coater, or gravure printing, screen printing, ink jet printing, letterpress printing or the like. .

導電性油墨的塗布量,考慮依用途所要求的導電層16的厚度而決定。導電層16的厚度,可以藉由調 整導電性油墨的塗布量及塗布方法之條件而調整。較佳的厚度為60nm~3μm。 The amount of the conductive ink to be applied is determined in consideration of the thickness of the conductive layer 16 required for the application. The thickness of the conductive layer 16 can be adjusted by The coating amount of the conductive ink and the conditions of the coating method were adjusted. A preferred thickness is 60 nm to 3 μm.

印刷(塗布)的導電性油墨,因應需要加熱處理塗布物使其乾燥。加熱溫度隨著構成分散媒的液狀成分而有所不同,但乾燥溫度太高的話可能無法保持形成了的圖案。因此,乾燥溫度最高也在120℃以下,更佳為100℃以下。特別是最初的乾燥溫度是重要的,由40~80℃程度開始乾燥,因應必要而階段性升溫在不超過120℃的範圍為特佳。 The printed (coated) conductive ink is dried by heating the coated material as needed. The heating temperature varies depending on the liquid component constituting the dispersion medium, but if the drying temperature is too high, the formed pattern may not be maintained. Therefore, the drying temperature is also at most 120 ° C or lower, more preferably 100 ° C or lower. In particular, the initial drying temperature is important, and drying starts at 40 to 80 ° C, and it is particularly preferable to gradually increase the temperature in a range of not more than 120 ° C as necessary.

導電層16的表面電阻、全光線透過率及霧度值,藉由調整其膜厚、亦即藉由適當選擇使用的導電性油墨的組成、塗布量及塗布方法等,可以得到所要的值。 The surface resistance, the total light transmittance, and the haze value of the conductive layer 16 can be obtained by adjusting the film thickness, that is, the composition, the coating amount, the coating method, and the like of the conductive ink which is appropriately selected and used.

一般而言,膜厚越厚,表面電阻及全光線透過率越低。此外,導電性油墨中的金屬奈米線或金屬奈米管的濃度越高,表面電阻及全光線透過率越低,霧度也越高。 In general, the thicker the film thickness, the lower the surface resistance and total light transmittance. Further, the higher the concentration of the metal nanowire or the metal nanotube in the conductive ink, the lower the surface resistance and the total light transmittance, and the higher the haze.

如前所述,對藉由導電性油墨形成的導電預備層14照射脈衝光而變換為導電層16,但在本說明書中所謂的「脈衝光」,是指光照射期間(照射時間)為短時間的光,反覆複數次光照射的場合,如圖2所示,意味著在第一光照射期間(on)與第二光照射期間(on)之間具有不照射光的期間(照射間隔(off))之光照射。在圖2顯示脈衝光的光強度為一定,但在1次之光照射期間(on)內光強度改變亦可。前述脈衝光,係由具備氙氣閃光燈等閃光燈的光 源來照射。使用這樣的光源,對前述導電預備層14的金屬奈米線及/或金屬奈米管照射脈衝光。n次反覆照射的場合,使圖2之1循環(on+off)反覆n次。又,反覆照射的場合,在進行下次之脈衝光照射時,為了要使支撐膜10可以冷卻至室溫附近,以從支撐膜10側進行冷卻為佳。 As described above, the conductive preliminary layer 14 formed of the conductive ink is irradiated with the pulsed light to be converted into the conductive layer 16. However, the term "pulsed light" as used herein means that the light irradiation period (irradiation time) is short. When the light of time is repeatedly irradiated with light, as shown in FIG. 2, it means that there is a period of non-irradiation between the first light irradiation period (on) and the second light irradiation period (on) (irradiation interval ( Off)) The light is illuminated. In Fig. 2, the light intensity of the pulsed light is constant, but the light intensity may be changed during the primary light irradiation (on). The aforementioned pulse light is light that has a flash lamp such as a xenon flash lamp. Source to illuminate. Using such a light source, the metal nanowires and/or the metal nanotubes of the conductive preliminary layer 14 are irradiated with pulsed light. In the case of n times of repeated irradiation, the cycle of Fig. 2 (on + off) is repeated n times. Further, in the case of the reverse irradiation, it is preferable to cool the support film 10 from the side of the support film 10 in order to cool the support film 10 to the vicinity of the room temperature when the next pulsed light is irradiated.

此外,作為前述脈衝光,可以使用波長範圍1pm~1m之電磁波,較佳為波長範圍10nm~1000μm之電磁波(遠紫外線至遠紅外線),進而較佳為波長範圍100nm~2000nm之電磁波。作為這樣的電磁波之例,可以舉出伽瑪射線、X線、紫外線、可見光、紅外線等。又,考慮到變換為熱能的場合,波長太短的場合,對於進行圖案印刷的支撐膜10(樹脂基板)、接著層12等的損傷很大所以不佳。此外,波長太長的場合無法有效率地吸收而發熱所以不佳。亦即,波長的範圍,在前述波長之中特別以紫外線到紅外線的範圍為佳,更佳為100~2000nm之範圍的波長。 Further, as the pulse light, an electromagnetic wave having a wavelength range of 1 pm to 1 m, preferably an electromagnetic wave having a wavelength range of 10 nm to 1000 μm (far ultraviolet ray to far infrared ray), and further preferably an electromagnetic wave having a wavelength range of 100 nm to 2000 nm can be used. Examples of such electromagnetic waves include gamma rays, X-rays, ultraviolet rays, visible rays, infrared rays, and the like. In the case where the wavelength is too short, the damage of the support film 10 (resin substrate) and the adhesive layer 12 for pattern printing is large, and it is not preferable. Further, in the case where the wavelength is too long, it is not efficiently absorbed and is heated, which is not preferable. That is, the wavelength range is particularly preferably in the range of ultraviolet rays to infrared rays among the above wavelengths, more preferably in the range of 100 to 2000 nm.

脈衝光之1次的照射時間(on)隨著光強度而不同,但以在20微秒~50毫秒的範圍為佳。比20微秒更短的話,無法進行金屬奈米線及/或金屬奈米管的燒結,導電層16性能提高的效果變低。此外,比50毫秒更長的話會因為光劣化、熱劣化而對支撐膜10、接著層12等造成不良影響,此外,變得容易吹飛金屬奈米線及/或金屬奈米管。更佳為40微秒~10毫秒。由前述理由,在本實施型態不使用連續光而使用脈衝光。脈衝光的照射即使實 施單發照射亦有效果,但也可以如前所述反覆實施。反覆實施的場合,照射間隔(off)為20微秒~5秒,更佳為2毫秒~2秒的範圍為佳。比20微秒更短的話,變成接近於連續光,一次照射之後沒有放冷的時間就被照射,所以支撐膜10、接著層12等會被加熱溫度變高而有劣化的可能性。此外,比5秒更長的話,製程時間變長所以不佳。 The irradiation time (on) of the pulsed light is different depending on the light intensity, but is preferably in the range of 20 microseconds to 50 milliseconds. When it is shorter than 20 microseconds, the sintering of the metal nanowire and/or the metal nanotube can not be performed, and the effect of improving the performance of the conductive layer 16 is lowered. In addition, if it is longer than 50 milliseconds, the support film 10, the adhesive layer 12, and the like are adversely affected by photodegradation and thermal deterioration, and it is easy to blow the metal nanowire and/or the metal nanotube. More preferably 40 microseconds to 10 milliseconds. For the above reasons, in the present embodiment, pulsed light is used without using continuous light. Pulsed light irradiation even if Single irradiation is also effective, but it can be repeated as described above. In the case of repeated implementation, the irradiation interval (off) is preferably in the range of 20 microseconds to 5 seconds, more preferably in the range of 2 milliseconds to 2 seconds. When it is shorter than 20 microseconds, it becomes close to continuous light, and it is irradiated after the time of the one-time irradiation, and it is the possibility that the heating film temperature of the support film 10 and the adhesive layer 12 may become high and it may deteriorate. In addition, if it is longer than 5 seconds, the process time becomes longer and it is not good.

製造相關於本實施型態的導電圖案的場合,如前所述對導電預備層14使用氙氣式的脈衝式照射燈等,照射脈衝幅(on)為20微秒~50毫秒,更佳為40微秒~10毫秒之脈衝光,接合金屬奈米線及/或金屬奈米管相互的外周交叉部。此處,所謂接合,應該是因為奈米線或奈米管的材料(金屬)吸收脈衝光,引起內部發熱而使交叉部分融接而堅固地連接,因此表面電阻下降。藉由此接合,可以使交叉部分的奈米線間的連接面積增加而降低表面電阻。如此,藉由照射脈衝光而接合金屬奈米線及/或金屬奈米管的交點,被形成金屬奈米線及/或金屬奈米管成為網目狀的導電層16。因此,可以提高導電圖案的導電性。又,金屬奈米線及/或金屬奈米管形成的網目,在沒有空出間隔而密集的狀態是不佳的。因為不空出間隔的話,光的透過率會降低。 In the case of manufacturing the conductive pattern according to this embodiment, an Xenon-type pulse type illumination lamp or the like is used for the conductive preparation layer 14 as described above, and the irradiation pulse width (on) is 20 microseconds to 50 milliseconds, more preferably 40. The pulsed light of microseconds to 10 milliseconds is joined to the outer peripheral intersection of the metal nanowires and/or the metal nanotubes. Here, the bonding is because the material (metal) of the nanowire or the nanotube absorbs the pulsed light, causes internal heat generation, and the intersecting portion is fused and firmly connected, so that the surface resistance is lowered. By this bonding, the connection area between the nanowires of the intersection portion can be increased to lower the surface resistance. In this manner, by the irradiation of the pulsed light, the intersection of the metal nanowire and/or the metal nanotube is joined, and the metal nanowire and/or the metal nanotube is formed into a mesh-like conductive layer 16. Therefore, the conductivity of the conductive pattern can be improved. Further, the mesh formed by the metal nanowires and/or the metal nanotubes is not dense in a state where there is no vacancy interval. Since there is no space, the transmittance of light will decrease.

如前所述而得到的導電層16,表面電阻率之值為5~1000Ω/□,且全光線透過率為80%以上者為佳,表面電阻率之值為10~200Ω/□,且全光線透過率為90%以上者更佳。 The conductive layer 16 obtained as described above has a surface resistivity of 5 to 1000 Ω/□ and a total light transmittance of 80% or more, and a surface resistivity of 10 to 200 Ω/□, and It is better to have a light transmittance of 90% or more.

此外,脈衝光照射後,在導電層16之上部作為保護層18貼附保護膜保護導電層16亦可。藉此,可以防止導電層16受到氧化或硫化的影響,或是傷痕或異物附著等。作為保護膜,以化學安定及熱安定,且容易從導電層16剝離者為較佳。具體而言以聚乙烯、聚丙烯、聚對苯二甲酸乙二酯、聚乙烯醇等之薄的薄片狀者且表面平滑性高者為佳。也包含為了賦予剝離性在表面進行脫模處理者。保護膜的厚度,太薄的話不容易操作而且也變得無法充分發揮保護效果,太厚的話成本上變得不利,所以5~500μm為佳,更佳為10~188μm。又,也可以在導電層的上部貼附保護膜之後照射脈衝光。 Further, after the pulsed light is irradiated, a protective film may be attached to the upper portion of the conductive layer 16 as a protective layer 18 to protect the conductive layer 16. Thereby, it is possible to prevent the conductive layer 16 from being affected by oxidation or vulcanization, or adhesion or foreign matter adhesion. It is preferable that the protective film is chemically stable and thermally stable, and is easily peeled off from the conductive layer 16. Specifically, those having a thin sheet shape such as polyethylene, polypropylene, polyethylene terephthalate or polyvinyl alcohol and having a high surface smoothness are preferred. Also included is a mold release process for imparting peelability to the surface. When the thickness of the protective film is too thin, it is not easy to handle and the protective effect is not sufficiently exerted. If it is too thick, the cost becomes unfavorable, so 5 to 500 μm is preferable, and more preferably 10 to 188 μm. Further, pulsed light may be irradiated after attaching a protective film to the upper portion of the conductive layer.

[實施例] [Examples]

以下,具體說明本發明之實施例。又,以下的實施例,是供容易理解本發明之例,本發明的範圍並不受限於這些實施例。 Hereinafter, embodiments of the invention will be specifically described. Further, the following examples are examples for easily understanding the present invention, and the scope of the present invention is not limited to the examples.

<銀奈米線的製作> <Production of silver nanowire>

把聚N-乙烯基吡咯烷酮K-90((股)日本觸媒公司製造)(0.049g)、AgNO3(0.052g)及FeCl3(0.04mg),溶解於乙二醇(12.5ml),在150℃加熱反應1小時。藉由離心分離將得到的析出物分離,乾燥析出物而得到目的之銀奈米線。於圖3(a),(b)顯示得到的銀奈米線的SEM影像。使用的SEM,為日立高科技股份有限公司製造之FE-SEM S-5200。 Poly N-vinylpyrrolidone K-90 (manufactured by Nippon Shokubai Co., Ltd.) (0.049 g), AgNO 3 (0.052 g), and FeCl 3 (0.04 mg) were dissolved in ethylene glycol (12.5 ml). The reaction was heated at 150 ° C for 1 hour. The obtained precipitate was separated by centrifugation, and the precipitate was dried to obtain a desired silver nanowire. The SEM images of the obtained silver nanowires are shown in Fig. 3 (a) and (b). The SEM used was FE-SEM S-5200 manufactured by Hitachi High-Technologies Corporation.

由圖3(a)、(b)可知,銀奈米線為線狀,該線狀的線之直徑約70nm,長度為10~20μm程度,成長為線狀者佔全體的約95%以上。又,其餘為粒狀。 3(a) and 3(b), the silver nanowires have a linear shape, and the linear lines have a diameter of about 70 nm, a length of about 10 to 20 μm, and a linear shape of about 95% or more. Also, the rest is granular.

前述乙二醇、聚N-乙烯基吡咯烷酮K-90、AgNO3、FeCl3係和光純藥工業股份有限公司製造。 The above-mentioned ethylene glycol, poly N-vinylpyrrolidone K-90, AgNO 3 , FeCl 3 system and Wako Pure Chemical Industries, Ltd. were manufactured.

此外,銀奈米線的長度及直徑以SEM與TEM測定。又,使用的TEM為日本電子股份有限公司製造之TEM;JEOL,JEM-2100透過型電子顯微鏡。 In addition, the length and diameter of the silver nanowire were measured by SEM and TEM. Further, the TEM used was a TEM manufactured by JEOL Ltd.; JEOL, JEM-2100 transmission electron microscope.

實施例1.轉印用膜的製作 Example 1. Production of a film for transfer

作為支撐膜,使用聚矽氧塗布脫模PET膜(Panac股份有限公司製造,SP-PET-100-01BU,附剝離層100μm之PET膜,未揭示剝離層的內容),於此表面作為接著層形成了高分子A層。高分子A層係藉由將S-LEC KS-3(積水化學製造聚縮醛樹脂)溶解於乙酸乙酯(約10質量%)之溶液,以成為10μm厚的方式以桿塗布器塗布於聚矽氧塗布脫模PET膜上後,在80℃乾燥1小時而形成。接著,於高分子A層上塗布含銀奈米線的導電性油墨使其乾燥而形成導電預備層。導電性油墨,係使用對以將聚N-乙烯基吡咯烷酮K-30成為1質量%的方式溶解於異丙醇之溶液,以銀奈米線含量成為0.1質量%的方式調製者。將此導電性油墨使用玻璃棒塗布於前述接著層之上後,在80℃花1小時乾燥而形成了導電預備層。對此導電預備層 藉由使用NovaCentrix公司製之氙氣照射裝置Pulse Forge3300,進行脈衝光照射而使導電預備層變成導電層。又,脈衝光的照射條件,為光源的驅動電壓600V,照射時間以60μsec照射1次。表面電阻率為80Ω/□。表面電阻值,使用三菱化學股份有限公司製造之LORESTA-GP MCP-T610 4探針法表面電阻率、體積電阻率測定裝置進行了測定。最後,於導電層上作為保護膜(保護層)以聚矽氧塗布面與導電層對向的方式層積聚矽氧塗布脫膜PET膜,藉由在保護膜之上滾動玻璃棒而層積,得到銀奈米線轉印用膜。 As a support film, a release PET film (SP-PET-100-01BU, a PET film with a release layer of 100 μm, and a peeling layer of 100 μm, which was manufactured by Panac Co., Ltd.) was used as a support film, and the surface was used as an adhesive layer. A polymer A layer was formed. The polymer A layer was coated on a polystyrene resin by dissolving S-LEC KS-3 (a polyacetal resin produced by Sekisui Chemical Co., Ltd.) in a solution of ethyl acetate (about 10% by mass) so as to be 10 μm thick. After the epoxy coating was applied to the release PET film, it was formed by drying at 80 ° C for 1 hour. Next, a conductive ink containing a silver nanowire is applied onto the polymer A layer and dried to form a conductive preliminary layer. The conductive ink was prepared by dissolving a solution in which poly(N-vinylpyrrolidone K-30 was 1% by mass) in isopropyl alcohol, and the content of the silver nanowire was 0.1% by mass. This conductive ink was applied onto the above-mentioned adhesive layer using a glass rod, and then dried at 80 ° C for 1 hour to form a conductive preliminary layer. Conductive preparation layer The conductive preparation layer was changed into a conductive layer by pulsed light irradiation using a pulse irradiation apparatus Pulse Forge 3300 manufactured by NovaCentrix Co., Ltd. Further, the irradiation conditions of the pulsed light were a driving voltage of the light source of 600 V, and the irradiation time was irradiated once at 60 μsec. The surface resistivity is 80 Ω/□. The surface resistance value was measured using a LORESTA-GP MCP-T610 4 probe method surface resistivity and volume resistivity measuring apparatus manufactured by Mitsubishi Chemical Corporation. Finally, a protective film (protective layer) is deposited as a protective film (protective layer) on the conductive coating layer opposite to the conductive layer, and the film is deposited by rolling the glass rod over the protective film. A film for silver nanowire transfer was obtained.

實施例2.導電圖案形成方法 Embodiment 2. Conductive pattern forming method

切出5cm見方之實施例1所得到的轉印用膜,以剝開支撐膜後露出的接著層與玻璃基板對向的方式層積,藉由從其上使玻璃棒由一端滾動於膜上而在玻璃基板上中介著接著層轉印導電層(全面圖案)。轉印後,剝離保護膜而測定導電層的表面電阻率值的結果,確認了表面電阻率原狀維持轉印前之轉印用膜的導電膜的表面電阻率。 The transfer film obtained in Example 1 of 5 cm square was cut out, and the adhesive layer exposed after the support film was peeled off was laminated so as to face the glass substrate, by which the glass rod was rolled from one end to the film. On the glass substrate, a conductive layer (overall pattern) is transferred through the adhesive layer. After the transfer, the protective film was peeled off and the surface resistivity value of the conductive layer was measured. It was confirmed that the surface resistivity maintained the surface resistivity of the conductive film of the transfer film before transfer.

實施例3. Example 3.

作為支撐膜,使用聚矽氧塗布脫模PET膜(Panac股份有限公司製造,SP-PET-100-01BU,附剝離層100μm之PET膜,未揭示剝離層的內容),於此表面作為接著層形成了高分子A層。高分子A層係將S-LEC KS-3(積水化學 製造聚縮醛樹脂)溶解於乙酸乙酯(約10質量%)之溶液,以成為10μm厚的方式以桿塗布器塗布於聚矽氧塗布脫模PET膜上後,在80℃乾燥1小時而形成。接著,於高分子A層上塗布含銀奈米線的導電性油墨使其乾燥而形成導電預備層。導電性油墨,係使用對以聚N-乙烯基吡咯烷酮K-30成為1質量%的方式溶解於異丙醇之溶液,以銀奈米線含量成為0.1質量%的方式調製者。將此導電性油墨使用玻璃棒塗布於前述接著層之上後,在80℃花1小時乾燥而形成了導電預備層。 As a support film, a release PET film (SP-PET-100-01BU, a PET film with a release layer of 100 μm, and a peeling layer of 100 μm, which was manufactured by Panac Co., Ltd.) was used as a support film, and the surface was used as an adhesive layer. A polymer A layer was formed. Polymer A layer will be S-LEC KS-3 A solution obtained by dissolving a polyacetal resin in ethyl acetate (about 10% by mass) was applied to a polyoxynitride-coated release PET film by a bar coater so as to be 10 μm thick, and then dried at 80 ° C for 1 hour. form. Next, a conductive ink containing a silver nanowire is applied onto the polymer A layer and dried to form a conductive preliminary layer. The conductive ink was prepared by dissolving the solution in an amount of 1% by mass of poly-N-vinylpyrrolidone K-30 in isopropyl alcohol, and the content of the silver nanowire was 0.1% by mass. This conductive ink was applied onto the above-mentioned adhesive layer using a glass rod, and then dried at 80 ° C for 1 hour to form a conductive preliminary layer.

將此轉印用膜22切出13cm×6cm。此後,將2枚2cm×8cm×3mm厚的不銹鋼板24,如圖4所示地重疊,使用NovaCentrix公司製之氙氣照射裝置Pulse Forge3300進行了脈衝光照射。又,脈衝光的照射條件,為光源的驅動電壓600V,照射時間以60μsec照射1次。與實施例2同樣測定銀奈米線層的表面電阻率後,確認了以不銹鋼板24遮罩處,不呈現導電性,被照射光處,表面電阻率為80Ω/□。其後,與實施例1同樣藉著把保護膜貼附於導電層上,剝離支撐膜後,與實施例2同樣在玻璃基板上中介著接著層貼附前述轉印用膜22,把導電圖案轉印至玻璃基板。轉印後,再剝離保護膜而測定導電層的表面電阻率的結果,絕緣部分之處維持絕緣原狀,係表面電阻率為80Ω/□處,維持導電。 This transfer film 22 was cut out to 13 cm × 6 cm. Thereafter, two stainless steel sheets 24 each having a thickness of 2 cm × 8 cm × 3 mm were stacked as shown in Fig. 4, and pulsed light irradiation was performed using a helium gas irradiation apparatus Pulse Forge 3300 manufactured by NovaCentrix. Further, the irradiation conditions of the pulsed light were a driving voltage of the light source of 600 V, and the irradiation time was irradiated once at 60 μsec. When the surface resistivity of the silver nanowire layer was measured in the same manner as in Example 2, it was confirmed that the surface was covered with the stainless steel plate 24, and the surface was not irradiated, and the surface resistivity was 80 Ω/□. Then, the protective film was adhered to the conductive layer in the same manner as in the first embodiment, and after the support film was peeled off, the transfer film 22 was attached to the glass substrate via the adhesive layer in the same manner as in the example 2, and the conductive pattern was placed. Transfer to the glass substrate. After the transfer, the protective film was peeled off and the surface resistivity of the conductive layer was measured. The insulating portion was maintained in an insulating state, and the surface resistivity was 80 Ω/□, and the conduction was maintained.

Claims (14)

一種導電圖案形成方法,其特徵為具有:準備具備支撐膜、被形成於前述支撐膜上的接著層、被形成於前述接著層上之具有特定圖案形狀的導電層之轉印用膜的步驟,及剝離前述轉印用膜之支撐膜,透過前述接著層把前述導電層接著於基板上的接著步驟;前述導電層包含金屬奈米線及/或金屬奈米管以及絕緣性結合劑樹脂,對金屬奈米線及金屬奈米管合計100質量份,含有絕緣性結合劑樹脂100質量份至2500質量份。 A method for forming a conductive pattern, comprising: a step of preparing a transfer film having a support film, an adhesive layer formed on the support film, and a transfer film having a conductive layer having a specific pattern shape formed on the adhesive layer, And a step of peeling off the support film of the transfer film and then adhering the conductive layer to the substrate through the adhesive layer; the conductive layer comprises a metal nanowire and/or a metal nanotube and an insulating binder resin, The metal nanowire and the metal nanotube are 100 parts by mass in total, and the insulating binder resin is contained in an amount of from 100 parts by mass to 2,500 parts by mass. 如申請專利範圍第1項之導電圖案形成方法,其中於準備前述轉印用膜的步驟,具有在接著層上使包含金屬奈米線及/或金屬奈米管的導電性油墨塗布為特定的圖案形狀而形成導電預備層的步驟,以及藉由對前述導電預備層照射脈衝光形成包含金屬奈米線及/或金屬奈米管的導電層的步驟。 The method of forming a conductive pattern according to claim 1, wherein the step of preparing the film for transfer has a conductive ink containing a metal nanowire and/or a metal nanotube coated on a subsequent layer to a specific one. a step of forming a conductive preliminary layer by patterning, and a step of forming a conductive layer comprising a metal nanowire and/or a metal nanotube by irradiating the conductive preliminary layer with pulsed light. 如申請專利範圍第1項之導電圖案形成方法,其中於準備前述轉印用膜的步驟,具有在接著層上使包含金屬奈米線及/或金屬奈米管的導電性油墨塗布為全面狀而形成導電預備層的步驟,以及藉由對前述導電預備層照射脈衝光形成包含金屬奈米線及/或金屬奈米管的導電層的步驟,以及把導電層加工為特定圖案的圖案加工步驟。 The method of forming a conductive pattern according to the first aspect of the invention, wherein the step of preparing the film for transfer has a conductive ink comprising a metal nanowire and/or a metal nanotube on a bonding layer. a step of forming a conductive preliminary layer, and a step of forming a conductive layer comprising a metal nanowire and/or a metal nanotube by irradiating the conductive preliminary layer with pulsed light, and a pattern processing step of processing the conductive layer into a specific pattern . 如申請專利範圍第1~3項之任一項之導電圖案形 成方法,其中於準備前述轉印用膜的步驟,具有包含在導電層之與具備接著劑層之主面相反的主面形成保護層的步驟,在前述接著步驟後除去保護層的保護層除去步驟。 Such as the conductive pattern shape of any one of the patent scopes 1 to 3 In the method of preparing the film for transfer, the step of forming a protective layer on the main surface opposite to the main surface of the conductive layer including the adhesive layer, and removing the protective layer of the protective layer after the subsequent step step. 一種導電圖案形成方法,其特徵為具有:準備具備包含在支撐膜上具有特定的圖案形狀的金屬奈米線及/或金屬奈米管以及絕緣性結合劑樹脂,而對金屬奈米線及金屬奈米管合計100質量份,含有絕緣性結合劑樹脂100質量份至2500質量份之導電層,與被形成於導電層上的接著層之轉印用膜的步驟,把前述轉印用膜之接著層接著於基板上的接著步驟,以及除去前述支撐膜的步驟。 A method for forming a conductive pattern, comprising: preparing a metal nanowire and/or a metal nanotube having a specific pattern shape on a support film, and an insulating binder resin, and a metal nanowire and a metal 100 parts by mass of the nanotubes, and the conductive film containing 100 parts by mass to 2500 parts by mass of the insulating binder resin and the film for transfer of the adhesive layer formed on the conductive layer, the film for transfer The layer is then followed by a subsequent step on the substrate, and the step of removing the aforementioned support film. 一種on-cell型觸控面板之製造方法,其特徵為在申請專利範圍第1~5項之任一項之導電圖案形成方法,前述基板為封入液晶顯示元件的液晶之透明基板,前述接著層,被接著於前述透明基板之與封入液晶側相反側之面。 A method of forming an on-cell type touch panel, wherein the substrate is a transparent substrate of a liquid crystal in which a liquid crystal display element is sealed, and the bonding layer is a method of forming a conductive pattern according to any one of claims 1 to 5. And being adhered to the surface of the transparent substrate opposite to the side on which the liquid crystal side is sealed. 一種轉印用膜,其特徵為依序被層積支撐膜、接著層、以及包含具有特定的圖案之金屬奈米線及/或金屬奈米管以及絕緣性結合劑樹脂,而對金屬奈米線及金屬奈米管合計100質量份,含有絕緣性結合劑樹脂100質量份至2500質量份的導電層。 A film for transfer characterized by sequentially laminating a support film, an adhesive layer, and a metal nanowire and/or a metal nanotube having a specific pattern and an insulating binder resin, and for the metal nano 100 parts by mass of the wire and the metal nanotubes in total, containing 100 parts by mass to 2500 parts by mass of the conductive layer of the insulating binder resin. 如申請專利範圍第7項之轉印用膜,其中前述導電層之金屬奈米線及/或金屬奈米管彼此之交 叉部分的至少一部分係融接著。 The film for transfer of claim 7, wherein the metal nanowires and/or the metal nanotubes of the conductive layer are in contact with each other At least a portion of the fork portion is fused. 如申請專利範圍第7或8項之轉印用膜,其中在前述導電層之與具備接著劑層的主面相反的主面上具有保護層。 The film for transfer according to claim 7 or 8, wherein the conductive layer has a protective layer on a main surface opposite to a main surface on which the adhesive layer is provided. 一種on-cell型觸控面板,其特徵為申請專利範圍第7~9項之任一項之轉印用膜,被接著於液晶顯示元件之被封入液晶的透明基板之與封入液晶側相反側之面。 An on-cell type touch panel, which is characterized in that the transfer film of any one of claims 7 to 9 is attached to the opposite side of the transparent substrate on which the liquid crystal display element is sealed and which is sealed on the liquid crystal side. The face. 如申請專利範圍第1或5項之導電圖案形成方法,其中前述導電層之導電成分為金屬奈米線及/或金屬奈米管。 The method for forming a conductive pattern according to claim 1 or 5, wherein the conductive component of the conductive layer is a metal nanowire and/or a metal nanotube. 如申請專利範圍第7項之轉印用膜,其中前述導電層之導電成分為金屬奈米線及/或金屬奈米管。 The film for transfer according to claim 7, wherein the conductive component of the conductive layer is a metal nanowire and/or a metal nanotube. 如申請專利範圍第1或5項之導電圖案形成方法,其中前述絕緣性結合劑樹脂為聚N-乙烯基咯烷酮、聚N-乙烯基己內醯胺、聚N-乙烯基乙醯胺、聚N-乙烯基甲醯胺、環氧樹脂、聚氨酯丙烯酸酯樹脂、胺甲酸乙酯樹脂、環烯烴高分子(COP,Cyclic Olefin Polymer)、或環烯烴共聚合物(COC,Cyclic Olefin Copolymer)。 The method for forming a conductive pattern according to claim 1 or 5, wherein the insulating binder resin is poly N-vinyl rotane ketone, poly N-vinyl caprolactam, poly N-vinyl acetamide , poly N-vinylformamide, epoxy resin, urethane acrylate resin, urethane resin, cyclic olefin polymer (COP, Cyclic Olefin Polymer), or cyclic olefin copolymer (COC, Cyclic Olefin Copolymer) . 如申請專利範圍第7項之轉印用膜,其中前述絕緣性結合劑樹脂為聚N-乙烯基咯烷酮、聚N- 乙烯基己內醯胺、聚N-乙烯基乙醯胺、聚N-乙烯基甲醯胺、環氧樹脂、聚氨酯丙烯酸酯樹脂、胺甲酸乙酯樹脂、環烯烴高分子(COP,Cyclic Olefin Polymer)、或環烯烴共聚合物(COC,Cyclic Olefin Copolymer)。 The film for transfer according to item 7 of the patent application, wherein the insulating binder resin is poly N-vinylrrolidone or poly N- Vinyl caprolactam, poly N-vinylacetamide, poly N-vinylformamide, epoxy resin, urethane acrylate resin, urethane resin, cyclic olefin polymer (COP, Cyclic Olefin Polymer ), or a cyclic olefin copolymer (COC, Cyclic Olefin Copolymer).
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