TWI639518B - Apparatus configured for alignment of a screen device with respect to a substrate used in the manufacture of a solar cell, system for deposition of a material on a substrate used in the manufacture of a solar cell, and method for aligning a screen device - Google Patents

Apparatus configured for alignment of a screen device with respect to a substrate used in the manufacture of a solar cell, system for deposition of a material on a substrate used in the manufacture of a solar cell, and method for aligning a screen device Download PDF

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Publication number
TWI639518B
TWI639518B TW105130412A TW105130412A TWI639518B TW I639518 B TWI639518 B TW I639518B TW 105130412 A TW105130412 A TW 105130412A TW 105130412 A TW105130412 A TW 105130412A TW I639518 B TWI639518 B TW I639518B
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Taiwan
Prior art keywords
rotatable
screen
substrate
screen device
devices
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TW105130412A
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Chinese (zh)
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TW201720662A (en
Inventor
丹尼爾 吉絲隆
丹尼耶雷 安德瑞歐拉
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義大利商.應用材料意大利有限公司
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Publication of TWI639518B publication Critical patent/TWI639518B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/08Machines
    • B41F15/0881Machines for printing on polyhedral articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/14Details
    • B41F15/34Screens, Frames; Holders therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41PINDEXING SCHEME RELATING TO PRINTING, LINING MACHINES, TYPEWRITERS, AND TO STAMPS
    • B41P2215/00Screen printing machines
    • B41P2215/10Screen printing machines characterised by their constructional features
    • B41P2215/11Registering devices
    • B41P2215/112Registering devices with means for displacing the frame
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
    • H05K3/1225Screens or stencils; Holders therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
    • H05K3/1233Methods or means for supplying the conductive material and for forcing it through the screen or stencil

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Screen Printers (AREA)
  • Photovoltaic Devices (AREA)

Abstract

本揭露書提供經配置用於將網版裝置(110)相對於被使用在太陽能電池的製造中的基板(10)對準的設備(100)。該設備包括底座裝置(120)和一或多個可旋轉裝置,一或多個可旋轉裝置經配置以接觸網版裝置(110),其中一或多個可旋轉裝置之至少一個第一可旋轉裝置(130)經由一或多個彈性元件(140)而連接至底座裝置(110)。 This disclosure provides an apparatus (100) configured for aligning a screen device (110) with respect to a substrate (10) used in the manufacture of solar cells. The apparatus includes a base device (120) and one or more rotatable devices, the one or more rotatable devices configured to contact the screen device (110), wherein at least one of the one or more rotatable devices is rotatable The device (130) is connected to the base device (110) via one or more elastic elements (140).

Description

經配置以用於將網版裝置相對於被使用在太陽能電池的製 造中的基板而對準的設備、用於將材料沉積在被使用在太陽能電池的製造中的基板上的系統及用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的方法 Configured to use the screen device with respect to Equipment for aligning substrates in production, systems for depositing materials on substrates used in the manufacture of solar cells, and methods for placing screen devices relative to substrates used in the manufacture of solar cells Standard method

本揭露書的實施例關於經配置用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設備、用於將材料沉積在被使用在太陽能電池的製造中的基板上的系統及用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的方法。本揭露書的實施例尤其關於經配置用於被使用在太陽能電池的製造中之基板上的網版印刷之設備。 The embodiments of the present disclosure relate to an apparatus configured to align a screen device with respect to a substrate used in the manufacture of solar cells, for depositing materials on a substrate used in the manufacture of solar cells System and method for aligning a screen device with respect to a substrate used in the manufacture of solar cells. The embodiments of the present disclosure relate particularly to equipment configured for screen printing on substrates used in the manufacture of solar cells.

太陽能電池是將太陽光直接轉換成電功率的光伏裝置。在這個領域內,已知的是在基板(諸如結晶矽底座)上,使用印刷技術(諸如網版印刷)製造太陽能電 池,以提供導線圖案(諸如選擇性發射極)在太陽能電池的結構的一或多個表面上。 Solar cells are photovoltaic devices that directly convert sunlight into electrical power. In this field, it is known to use a printing technique (such as screen printing) to manufacture solar power on a substrate (such as a crystalline silicon base) Cells to provide a pattern of wires (such as selective emitters) on one or more surfaces of the structure of the solar cell.

在太陽能電池的製造中,基板和印刷頭可使用對準裝置相對於彼此而置中或對準。作為一個例子,印刷頭或印刷頭的部件(諸如網版裝置)可相對於基板而移動。導線圖案可接著被印刷成相對於基板而對準。對準裝置可以使用在對準裝置和網版裝置之間的機械接觸,以移動和對準網版裝置。隨著時間的推移,對準裝置可能磨耗,且對準可能變得不準確。對準裝置應在很短的時間間隔中被維修,以提供準確的對準,而用於維護對準裝置的成本很高。太陽能電池製造設備的停機時間可能被增加,且基板產量可能被降低。 In the manufacture of solar cells, the substrate and the print head can be centered or aligned relative to each other using an alignment device. As an example, the print head or components of the print head (such as a screen device) can move relative to the substrate. The wire pattern can then be printed to be aligned with respect to the substrate. The alignment device may use mechanical contact between the alignment device and the screen device to move and align the screen device. Over time, the alignment device may wear out, and the alignment may become inaccurate. The alignment device should be repaired in a short time interval to provide accurate alignment, and the cost for maintaining the alignment device is high. The downtime of solar cell manufacturing equipment may be increased, and substrate yield may be reduced.

有鑑於以上,克服了在本領域中的至少一些問題的經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的新設備、用於將材料沉積在被使用在太陽能電池的製造中的基板上的新系統及用於將網版裝置對準的新方法是有益的。具體地,存在有提供允許用於在一段長的時間週期準確對準的設備、系統和方法之需求。更具體地,存在有允許減少在網版裝置的對準中所使用的機械部件之磨耗的效果的設備、系統和方法之需求。 In view of the above, a new device configured to align a screen device with respect to a substrate used in the manufacture of solar cells, which overcomes at least some of the problems in the art, for depositing materials on New systems used on substrates in the manufacture of solar cells and new methods for aligning screen devices are beneficial. In particular, there is a need to provide devices, systems and methods that allow for accurate alignment over a long period of time. More specifically, there is a need for devices, systems, and methods that allow the effect of reducing the wear of mechanical components used in the alignment of screen devices.

有鑑於上,提供有經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設 備、用於將材料沉積在被使用在太陽能電池的製造中的基板上的系統及用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的方法。本揭露書之進一步的態樣、優點和特徵是由申請專利範圍、說明書和附隨的圖式而顯而易見的。 In view of the above, a device configured for aligning a screen device with respect to a substrate used in the manufacture of solar cells is provided A system for depositing materials on a substrate used in the manufacture of solar cells and a method for aligning a screen device with respect to the substrate used in the manufacture of solar cells. Further aspects, advantages and features of this disclosure are obvious from the scope of patent application, the description and the accompanying drawings.

根據本揭露書的一個態樣,提供有經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設備。該設備包括底座裝置和一或多個可旋轉裝置,一或多個可旋轉裝置經配置以接觸網版裝置,其中一或多個可旋轉裝置之至少一個第一可旋轉裝置經由一或多個彈性元件而連接至底座裝置。 According to one aspect of this disclosure, there is provided an apparatus configured to align the screen device with respect to the substrate used in the manufacture of solar cells. The apparatus includes a base device and one or more rotatable devices, the one or more rotatable devices are configured to contact the screen device, wherein at least one first rotatable device of the one or more rotatable devices is passed through one or more The elastic element is connected to the base device.

根據本揭露書的另一個態樣,提供有一種用於將材料沉積在被使用在太陽能電池的製造中的基板上的系統。該系統包括網版裝置和根據於此所述的實施例之經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設備。 According to another aspect of this disclosure, there is provided a system for depositing materials on a substrate used in the manufacture of solar cells. The system includes a screen device and a device configured for aligning the screen device relative to a substrate used in the manufacture of solar cells according to the embodiments described herein.

根據本揭露書的又一個態樣,提供有一種用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的方法。該方法包括以下步驟:以對準設備之一或多個可旋轉裝置接觸網版裝置,其中一或多個可旋轉裝置之至少一個第一可旋轉裝置經由一或多個彈性元件而連接至對準設備之底座裝置;及旋轉一或多個可旋轉裝置之至少一個可旋轉裝置,以相對於基板而對準網版裝置。 According to yet another aspect of the present disclosure, there is provided a method for aligning a screen device with respect to a substrate used in the manufacture of solar cells. The method includes the steps of: contacting the screen device with one or more rotatable devices of the alignment device, wherein at least one first rotatable device of the one or more rotatable devices is connected to the pair via one or more elastic elements The base device of the standard equipment; and at least one rotatable device that rotates one or more rotatable devices to align the screen device relative to the substrate.

實施例還關於用於實現所揭露的方法的設備且包括用於實施每一所述方法的態樣之設備零件。這些方法的態樣可由硬體部件、由適當的軟體所編程的計算機、由兩者的任意組合,或以任何其它方式來實施。更有甚者,根據本揭露書的實施例還關於用於操作所述設備的方法。用於操作所述設備的方法包括用於實現設備的每一功能之方法的態樣。 The embodiments also relate to equipment for implementing the disclosed methods and include equipment parts for implementing the aspects of each of the described methods. The aspects of these methods can be implemented by hardware components, a computer programmed with appropriate software, by any combination of the two, or in any other way. What's more, the embodiment according to this disclosure also relates to a method for operating the device. The method for operating the device includes aspects of a method for implementing each function of the device.

1‧‧‧X軸 1‧‧‧X axis

2‧‧‧Y軸 2‧‧‧Y axis

3‧‧‧Z軸 3‧‧‧Z axis

4‧‧‧θ軸 4‧‧‧θ axis

5‧‧‧力 5‧‧‧force

6‧‧‧印刷方向 6‧‧‧Printing direction

10‧‧‧基板 10‧‧‧ substrate

20‧‧‧基板支撐件 20‧‧‧ substrate support

100‧‧‧設備 100‧‧‧ Equipment

110‧‧‧網版裝置 110‧‧‧ Screen device

112‧‧‧網版框架 112‧‧‧ Screen frame

113‧‧‧滑動表面 113‧‧‧Sliding surface

114‧‧‧網版 114‧‧‧ Web version

115‧‧‧軸線 115‧‧‧Axis

116‧‧‧變形 116‧‧‧Transformation

120‧‧‧底座裝置 120‧‧‧Base device

130‧‧‧第一可旋轉裝置 130‧‧‧The first rotatable device

132‧‧‧第一旋轉軸線 132‧‧‧The first axis of rotation

140‧‧‧彈性元件/第一彈性元件 140‧‧‧Elastic element / first elastic element

142‧‧‧第二彈性元件 142‧‧‧Second elastic element

150‧‧‧安裝裝置 150‧‧‧Installation device

300‧‧‧設備 300‧‧‧ Equipment

320‧‧‧底座裝置 320‧‧‧Base device

322‧‧‧第一部分 322‧‧‧Part 1

324‧‧‧第二部分 324‧‧‧Part Two

326‧‧‧第三部分 326‧‧‧Part III

330‧‧‧第一可旋轉裝置 330‧‧‧The first rotatable device

332‧‧‧第一旋轉軸線 332‧‧‧First axis of rotation

350‧‧‧安裝裝置 350‧‧‧Installation device

360‧‧‧第二可旋轉裝置 360‧‧‧ Second rotatable device

362‧‧‧第二旋轉軸線 362‧‧‧Second axis of rotation

370‧‧‧第三可旋轉裝置 370‧‧‧The third rotatable device

372‧‧‧第三旋轉軸線 372‧‧‧The third axis of rotation

400‧‧‧系統 400‧‧‧System

480‧‧‧印刷頭 480‧‧‧Print head

482‧‧‧刮板 482‧‧‧Scraper

600‧‧‧設備 600‧‧‧ Equipment

610‧‧‧網版裝置 610‧‧‧ Screen device

620‧‧‧底座裝置 620‧‧‧Base device

625‧‧‧開口 625‧‧‧ opening

630‧‧‧第一可旋轉裝置 630‧‧‧The first rotatable device

640‧‧‧第一彈性元件 640‧‧‧The first elastic element

642‧‧‧第二彈性元件 642‧‧‧Second elastic element

650‧‧‧安裝裝置 650‧‧‧Installation device

652‧‧‧固定部分 652‧‧‧Fixed part

654‧‧‧可移動部分 654‧‧‧Moveable part

655‧‧‧狹縫 655‧‧‧ slit

660‧‧‧第二可旋轉裝置 660‧‧‧Second rotatable device

670‧‧‧第三可旋轉裝置 670‧‧‧The third rotatable device

800‧‧‧方法 800‧‧‧Method

810‧‧‧方塊 810‧‧‧box

820‧‧‧方塊 820‧‧‧block

使得本揭露書的以上所載之特徵可被詳細理解的方式,可參照實施例而獲得本揭露書(簡要地摘要於上)之較特定的說明。附隨的圖式關於本揭露書的實施例,且在下面說明:第1圖顯示根據於此所述之實施例的網版裝置的θ對準的概要圖;第2圖顯示根據於此所述之實施例的經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設備的概要圖;第3圖顯示根據於此所述之進一步的實施例的經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設備的概要圖;第4圖顯示根據於此所述之實施例的用於將材料沉積在被使用在太陽能電池的製造中的基板上的系統的概要圖; 第5圖顯示根據於此所述之實施例的經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設備之一區域的概要圖;第6圖顯示根據於此所述之實施例的經配置以用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的設備的概要圖;第7A圖顯示在第6圖中所示的設備之細節的概要圖;第7B圖顯示根據於此所述之實施例的設備之安裝裝置的概要圖;及第8圖顯示根據於此所述之實施例的用於將網版裝置相對於被使用在太陽能電池的製造中的基板而對準的方法之流程圖。 For a way to make the above-mentioned features of this disclosure can be understood in detail, refer to the embodiments to obtain a more specific description of this disclosure (briefly summarized above). The accompanying drawings relate to the embodiment of this disclosure and are explained below: FIG. 1 shows a schematic diagram of θ alignment of the screen device according to the embodiment described here; FIG. 2 shows a diagram based on this A schematic view of an apparatus of the embodiment described that is configured for aligning a screen device relative to a substrate used in the manufacture of solar cells; FIG. 3 shows a further embodiment according to the invention A schematic view of an apparatus configured for aligning a screen device with respect to a substrate used in the manufacture of solar cells; FIG. 4 shows a method for depositing materials on a substrate according to an embodiment described herein A schematic diagram of the system used on the substrate in the manufacture of solar cells; Figure 5 shows a schematic view of a region of an apparatus configured for aligning a screen device relative to a substrate used in the manufacture of solar cells according to embodiments described herein; Figure 6 shows A schematic view of an apparatus configured for aligning a screen device relative to a substrate used in the manufacture of solar cells according to the embodiments described herein; FIG. 7A is shown in FIG. 6 A schematic diagram of the details of the device; FIG. 7B shows a schematic diagram of the installation device of the device according to the embodiment described herein; and FIG. 8 shows a screen device relative to the screen device according to the embodiment described herein. Flow chart of a method for aligning a substrate used in the manufacture of solar cells.

現將詳細地參照揭露書的各種實施例,其中一或多個例子係顯示在圖式中。在圖式的以下說明內,相同的元件符號代表相同的部件,僅說明與個別實施例有關的差異。每一例子是由解釋本揭露書的方式而提供,且不意味著作為本揭露書的限制。此外,顯示為或描述為一個實施例的一部分之特徵可使用在其它實施例上或與其它實施例結合使用,以產生又一個進一步的實施例。意欲令實施方式包括這樣的修改和變化。 Reference will now be made in detail to various embodiments of the disclosure, where one or more examples are shown in the drawings. In the following description of the drawings, the same element symbols represent the same parts, and only differences related to individual embodiments are explained. Each example is provided by way of explaining this disclosure, and does not mean that the work is limited by this disclosure. In addition, features shown or described as part of one embodiment can be used on or in combination with other embodiments to produce yet another embodiment. It is intended that the embodiments include such modifications and changes.

經配置以用於網版裝置的對準之設備(在下文中也稱為「對準裝置」)可以使用在對準裝置和網版裝置之間的機械接觸,以對準網版裝置。具體而言,對準 裝置掃描被用以相對於基板而移動網版裝置,以實施對準。隨著時間的推移,對準裝置可能磨耗,且對準可能變得不準確。對準設備應在很短的時間間隔中被維修,以提供準確的對準,而用於維護對準設備的成本很高。此外,太陽能電池製造設備的停機時間可能被增加,且太陽能電池製造設備的產量可能被降低。 An apparatus configured for alignment of the screen device (hereinafter also referred to as "alignment device") may use mechanical contact between the alignment device and the screen device to align the screen device. Specifically, align Device scanning is used to move the screen device relative to the substrate to perform alignment. Over time, the alignment device may wear out, and the alignment may become inaccurate. The alignment equipment should be repaired in a short time interval to provide accurate alignment, and the cost of maintaining the alignment equipment is high. In addition, the downtime of the solar cell manufacturing equipment may be increased, and the output of the solar cell manufacturing equipment may be reduced.

本揭露書提供經配置以用於使用接觸網版裝置之一或多個可旋轉裝置將網版裝置對準,以相對於基板而對準網版裝置的設備。一或多個可旋轉裝置可繞個別的旋轉軸線而旋轉,其中網版裝置係藉由旋轉一或多個可旋轉裝置而移動和對準。一或多個可旋轉裝置的至少一個第一可旋轉裝置係經由一或多個彈性元件而連接到底座裝置。一或多個彈性元件推動至少一個第一可旋轉裝置抵住網版裝置。舉例來說,即便在網版裝置或(多個)可旋轉裝置處存在著變形或不規則,這些變形或不規則可藉由一或多個彈性元件所提供的推力而補償。此外,一旦設備被組裝或設置,使用者不需改變或操作由設備所提供的磨損補償裝置。部件的磨損是藉由一或多個彈性元件所提供的推力而自動地補償。太陽能電池製造設備具有減少的停機時間,並提供增加的效率。 This disclosure provides an apparatus configured for aligning a screen device using one or more rotatable devices that contact the screen device to align the screen device relative to the substrate. One or more rotatable devices can rotate about individual axes of rotation, wherein the screen device is moved and aligned by rotating one or more rotatable devices. At least one first rotatable device of one or more rotatable devices is connected to the base device via one or more elastic elements. One or more elastic elements push at least one first rotatable device against the screen device. For example, even if there are deformations or irregularities at the screen device or rotatable device (s), these deformations or irregularities can be compensated by the thrust provided by one or more elastic elements. In addition, once the equipment is assembled or set up, the user does not need to change or operate the wear compensation device provided by the equipment. The wear of the components is automatically compensated by the thrust provided by one or more elastic elements. Solar cell manufacturing equipment has reduced downtime and provides increased efficiency.

本揭露書的設備、系統和方法允許在一段長的時間週期的準確對準。具體地,藉由機械部件(諸如網版裝置及/或可旋轉裝置)之磨損對於對準準確度所導致的影響可被最小化或甚至被避免。維修之間的間隔可延 長,且可降低維護費用。太陽能電池製造設備的停機時間可被減少,且太陽能電池製造設備的產量和效率可被提高。一或多個可旋轉裝置允許對網版或網版裝置的改良平面對準(或改良的平面度條件)。 The device, system and method of this disclosure allow accurate alignment over a long period of time. In particular, the effect on the accuracy of alignment caused by the wear of mechanical components, such as screen devices and / or rotatable devices, can be minimized or even avoided. The interval between repairs can be extended Long, and can reduce maintenance costs. The downtime of the solar cell manufacturing equipment can be reduced, and the yield and efficiency of the solar cell manufacturing equipment can be improved. One or more rotatable devices allows for improved plane alignment (or improved flatness conditions) of the screen or screen device.

第1圖顯示根據於此所述的實施例之網版裝置110的θ對準的概要圖。 FIG. 1 shows a schematic view of θ alignment of the screen device 110 according to the embodiment described herein.

用於將材料沉積在被使用在太陽能電池的製造中之系統可包括印刷頭(未顯示)和經配置用於在基板10上形成一或多個導線圖案的網版裝置110。在一些實施方式中,網版裝置110可包括在印刷頭中。一或多個導線圖案可以選自由太陽能電池的指狀物和匯流條所組成的群組。在印刷一或多個導線圖案之前及/或在用於在基板10上印刷兩個導線圖案的兩個連續的印刷製程之間,基板10可相對於網版裝置110而對準。 The system for depositing materials in use in the manufacture of solar cells may include a printing head (not shown) and a screen device 110 configured to form one or more wire patterns on the substrate 10. In some embodiments, the screen device 110 may be included in the print head. The one or more wire patterns may be selected from the group consisting of solar cell fingers and bus bars. The substrate 10 may be aligned relative to the screen device 110 before printing one or more wire patterns and / or between two consecutive printing processes for printing two wire patterns on the substrate 10.

可藉由移動網版裝置110且任選地藉由移動基板10來執行對準。在一些實施方式中,對準可包括網版裝置110沿著X軸1及/或Y軸2的平移移動的至少一者。對準還包括繞θ軸(以元件符號「4」所指示)的旋轉對準。θ軸可界定網版裝置110在其中移動和對準的移動平面。移動平面也可稱為「對準平面」。移動平面可跨越X軸1和Y軸2。根據一些實施例,移動平面實質地平行於材料待被沉積(例如,被印刷)於上之基板10的表面。特別是當關於移動平面或對準平面相對於基板 10或基板的表面之相對取向時,實質地平行是被理解成允許從正確的平行取向偏離(例如)10°或更小。 Alignment can be performed by moving the screen device 110 and optionally by moving the substrate 10. In some embodiments, the alignment may include at least one of translational movement of the screen device 110 along the X axis 1 and / or the Y axis 2. Alignment also includes rotational alignment about the θ axis (indicated by the element symbol "4"). The θ axis may define a plane of movement in which the screen device 110 moves and aligns. The moving plane may also be referred to as "aligned plane". The moving plane can span the X axis 1 and the Y axis 2. According to some embodiments, the moving plane is substantially parallel to the surface of the substrate 10 on which the material is to be deposited (eg, printed). Especially when it comes to the moving plane or the alignment plane relative to the substrate When 10 or the relative orientation of the surface of the substrate, substantially parallel is understood to allow deviation from the correct parallel orientation by, for example, 10 ° or less.

在一些實施方式中,諸如X軸1、Y軸和θ軸的軸線可用於相對於基板10而對準網版裝置110,使得印刷圖案(如,一或多個導線圖案)實質地置中於基板10的表面上。 In some embodiments, axes such as X-axis 1, Y-axis, and θ-axis can be used to align the screen device 110 relative to the substrate 10 such that the printed pattern (eg, one or more wire patterns) is substantially centered On the surface of the substrate 10.

第2圖顯示根據於此所述的實施例之經配置用於將網版裝置110相對於在被使用於太陽能電池的製造中之基板10對準之設備100的概要圖。 FIG. 2 shows a schematic view of an apparatus 100 configured to align the screen device 110 with respect to the substrate 10 used in the manufacture of solar cells according to the embodiments described herein.

設備100包括底座裝置120和經配置用於接觸網版裝置110的一或多個可旋轉裝置。一或多個可旋轉裝置的至少一個第一可旋轉裝置130經由一或多個彈性元件140而連接到底座裝置120。一或多個彈性元件140提供將至少一個第一可旋轉裝置130推抵在網版裝置110上的力(以元件符號「5」而表示)。由(例如)磨損所造成的變形及/或不規則性可被補償,且準確的對準可被確保甚至在一段長的時間週期內。 The apparatus 100 includes a base device 120 and one or more rotatable devices configured to contact the screen device 110. At least one first rotatable device 130 of one or more rotatable devices is connected to the base device 120 via one or more elastic elements 140. The one or more elastic elements 140 provide a force (indicated by the element symbol "5") that pushes the at least one first rotatable device 130 against the screen device 110. Deformation and / or irregularities caused by, for example, wear can be compensated, and accurate alignment can be ensured even over a long period of time.

根據可與於此所述的其它實施例結合的一些實施例,一或多個可旋轉裝置經配置以藉由繞旋轉軸線而旋轉一或多個可旋轉裝置之至少一個可旋轉裝置而相對於基板10對準網版裝置110。作為例子,至少一個第一可旋轉裝置130可繞第一旋轉軸線132而可旋轉的。一或多個可旋轉裝置(諸如至少一個第一可旋轉裝置130)的旋轉被機械地傳送到網版裝置110,以(例如)在 參照第1圖而解釋的移動平面或對準平面中移動網版裝置110。具體地,可使用一或多個可旋轉裝置的旋轉而執行在移動平面或對準平面中的θ對準。 According to some embodiments, which may be combined with other embodiments described herein, the one or more rotatable devices are configured to be relative to the at least one rotatable device by rotating the one or more rotatable devices about an axis of rotation The substrate 10 is aligned with the screen device 110. As an example, at least one first rotatable device 130 may be rotatable about a first axis of rotation 132. The rotation of one or more rotatable devices (such as at least one first rotatable device 130) is mechanically transmitted to the screen device 110 to (for example) The screen device 110 is moved in the moving plane or the alignment plane explained with reference to FIG. In particular, theta alignment in the movement plane or alignment plane may be performed using the rotation of one or more rotatable devices.

遍及本揭露書而使用的術語「底座裝置」應理解為一或多個彈性元件可連接到的元件,使得至少一個第一可旋轉裝置130相對於底座裝置而可移動的。根據一些實施方式,底座裝置120是靜止的或固定定位。至少一個第一可旋轉裝置130相對於底座裝置120而可移動的,使得一或多個彈性元件140可將至少一個第一可旋轉裝置130推抵在網版裝置110上。根據可與於此所述之其它實施例結合的一些實施例,至少一個第一可旋轉裝置130經由一或多個彈性元件140而連接到底座裝置120,以在垂直於至少一個第一可旋轉裝置130的第一旋轉軸線132之方向上係可移動的。作為例子,至少一個第一可旋轉裝置130可在實質地平行於移動平面的方向上移動。 The term "base device" used throughout this disclosure should be understood as an element to which one or more elastic elements can be connected such that at least one first rotatable device 130 is movable relative to the base device. According to some embodiments, the base device 120 is stationary or fixedly positioned. The at least one first rotatable device 130 is movable relative to the base device 120 so that one or more elastic elements 140 can push the at least one first rotatable device 130 against the screen device 110. According to some embodiments that can be combined with other embodiments described herein, at least one first rotatable device 130 is connected to the base device 120 via one or more elastic elements 140 to be perpendicular to the at least one first rotatable device The device 130 is movable in the direction of the first axis of rotation 132. As an example, at least one first rotatable device 130 can move in a direction substantially parallel to the plane of movement.

在可與於此所述之其它實施方式結合的一些實施方式中,一或多個可旋轉裝置可為輥或輪。作為例子,一或多個可旋轉裝置可具有圓柱形,其中圓柱形的圓柱軸線可對應於相應的可旋轉裝置的旋轉軸線。在其它例子中,一或多個可旋轉裝置可為圓形的或球形的。 In some embodiments that may be combined with other embodiments described herein, the one or more rotatable devices may be rollers or wheels. As an example, one or more rotatable devices may have a cylindrical shape, wherein the cylindrical axis of the cylinder may correspond to the axis of rotation of the corresponding rotatable device. In other examples, one or more rotatable devices may be circular or spherical.

根據可與於此所述的其它實施例結合的一些實施例,設備包括經配置以旋轉一或多個可旋轉裝置的至少一個可旋轉裝置之一或多個致動器(諸如馬達)。作 為例子,一或多個可旋轉裝置的每一可旋轉裝置可連接到相應的致動器或馬達,以旋轉可旋轉裝置,以移動和對準網版裝置110。在一些實施方式中,設備100可包括一或多個進一步的致動器,經配置用於(例如)沿著參照第1圖而描述的X軸及/或Y軸平移移動網版裝置110。 According to some embodiments, which may be combined with other embodiments described herein, the apparatus includes one or more actuators (such as motors) of at least one rotatable device configured to rotate one or more rotatable devices. Make As an example, each rotatable device of one or more rotatable devices may be connected to a corresponding actuator or motor to rotate the rotatable device to move and align the screen device 110. In some embodiments, apparatus 100 may include one or more further actuators configured to translate mobile screen device 110, for example, along the X-axis and / or Y-axis described with reference to FIG. 1.

根據可與於此所述的其它實施例結合的一些實施例,一或多個可旋轉裝置經配置以在實質地平行於基板10的表面的二維平面中相對於基板而對準網版裝置110。作為例子,二維平面可為移動平面或對準平面或對應於移動平面或對準平面。基板10的表面可為材料待被沉積(例如,被印刷)於上的表面。具體地,基板10的表面可為形成(例如)太陽能電池的指狀物及/或匯流條的一或多個導線圖案待被沉積或被印刷於上的表面。 According to some embodiments that may be combined with other embodiments described herein, one or more rotatable devices are configured to align the screen device relative to the substrate in a two-dimensional plane that is substantially parallel to the surface of the substrate 10 110. As an example, the two-dimensional plane may be or correspond to a moving plane or an alignment plane. The surface of the substrate 10 may be the surface on which the material is to be deposited (eg, printed). Specifically, the surface of the substrate 10 may be a surface on which one or more wire patterns forming, for example, fingers and / or bus bars of a solar cell are to be deposited or printed on.

在一些實施方式中,一或多個可旋轉裝置可圍繞實質地垂直於移動平面及/或材料待被沉積於上之基板10的表面的相應旋轉軸線而可旋轉的。術語「實質地垂直」關於旋轉軸線和移動平面或基板10的表面之實質地垂直的取向,其中距正確的垂直取向之幾度的偏差(如,高達10°或甚至高達15°)仍然被認為是「實質地垂直」。 In some embodiments, one or more rotatable devices may be rotatable about respective axes of rotation that are substantially perpendicular to the plane of movement and / or the surface of the substrate 10 on which the material is to be deposited. The term "substantially perpendicular" with respect to the substantially vertical orientation of the axis of rotation and the surface of the moving plane or substrate 10, where a deviation of several degrees from the correct vertical orientation (eg, up to 10 ° or even up to 15 °) is still considered "Substantially vertical."

根據可與於此所述的其它實施例結合的一些實施例,一或多個可旋轉裝置可包括四或更少個可旋轉裝置,具體地三或更少個可旋轉裝置,且可更具體地為三個可旋轉裝置。在其它實施方式中,一或多個可旋轉 裝置可為一個單一可旋轉裝置,如其係顯示在第2圖之例子中。具體地,網版裝置110可被可旋轉地安裝在設置在網版裝置110的第一側或第一邊緣部分的軸線115上。單一可旋轉裝置可在網版裝置110的第二側或第二邊緣部分處接觸網版裝置,以繞軸線115旋轉網版裝置110。第一側或第一邊緣部分和第二側或第二邊緣部分可為網版裝置110的相對側或側部分。 According to some embodiments that may be combined with other embodiments described herein, one or more rotatable devices may include four or less rotatable devices, specifically three or less rotatable devices, and may be more specific The ground is three rotatable devices. In other embodiments, one or more can be rotated The device may be a single rotatable device, as shown in the example in Figure 2. Specifically, the screen device 110 may be rotatably mounted on the axis 115 provided on the first side or first edge portion of the screen device 110. A single rotatable device may contact the screen device at the second side or second edge portion of the screen device 110 to rotate the screen device 110 about the axis 115. The first side or first edge portion and the second side or second edge portion may be opposite sides or side portions of the screen device 110.

在一些實施方式中,一或多個可旋轉裝置經配置用於接觸網版裝置110的橫向側表面。橫向側表面也可被稱為「滑動表面」或「接觸表面」。網版裝置110的橫向側表面可實質地垂直於移動平面而延伸。根據一些實施例,網版裝置110可具有兩個延伸表面,其中兩個延伸表面中的一個表面經配置以面向基板10,且兩個延伸表面的另一個表面經配置以背離基板10,例如,朝向印刷頭或其刮板。網版裝置110的橫向側表面可連接兩個延伸表面。在一些實施例中,兩個延伸表面可實質地平行於移動平面及/或材料待被沉積於上之基板10的表面。 In some embodiments, one or more rotatable devices are configured to contact the lateral side surface of screen device 110. The lateral side surface may also be referred to as "sliding surface" or "contact surface". The lateral side surface of the screen device 110 may extend substantially perpendicular to the moving plane. According to some embodiments, the screen device 110 may have two extended surfaces, wherein one of the two extended surfaces is configured to face the substrate 10, and the other surface of the two extended surfaces is configured to face away from the substrate 10, for example, Towards the print head or its scraper. The lateral side surface of the screen device 110 may connect two extended surfaces. In some embodiments, the two extended surfaces may be substantially parallel to the moving plane and / or the surface of the substrate 10 on which the material is to be deposited.

在一些實施方式中,設備100進一步包括安裝裝置150,安裝裝置150經配置以支撐繞第一旋轉軸線132而可旋轉的至少一個第一可旋轉裝置130。具體地,至少一個第一可旋轉裝置130可安裝到安裝裝置150。在一些實施方式中,安裝裝置150可為撓性接頭。安裝裝置150可經由一或多個彈性元件140而連接到底 座裝置120。具體地,至少一個第一可旋轉裝置130可經由安裝裝置150而連接到底座裝置120。 In some embodiments, the apparatus 100 further includes a mounting device 150 configured to support at least one first rotatable device 130 rotatable about the first axis of rotation 132. Specifically, at least one first rotatable device 130 may be mounted to the mounting device 150. In some embodiments, the mounting device 150 may be a flexible joint. The mounting device 150 can be connected to the bottom via one or more elastic elements 140 座 装置 120。 Seat device 120. Specifically, at least one first rotatable device 130 may be connected to the base device 120 via the mounting device 150.

根據一些實施例,安裝裝置150可僅經由一或多個彈性元件140而連接到底座裝置120。在另一個例子中,設備100可包括引導裝置(未顯示),引導裝置將安裝裝置150連接到底座裝置120。導向裝置可允許安裝裝置150(例如)在實質地垂直於第一旋轉軸線132的方向上之引導移動,以將至少一個第一可旋轉裝置130推抵在網版裝置110上。 According to some embodiments, the mounting device 150 may be connected to the base device 120 only via one or more elastic elements 140. In another example, the apparatus 100 may include a guide device (not shown) that connects the mounting device 150 to the base device 120. The guide device may allow the guide device 150 to guide movement in a direction substantially perpendicular to the first rotation axis 132 to push the at least one first rotatable device 130 against the screen device 110, for example.

根據可與於此所述的其它實施例結合的一些實施例,一或多個彈性元件140為彈簧。作為例子,一或多個彈性元件140選自以下所組成的群組:線圈彈簧、板簧、板片彈簧及其任何組合。在一些實施方式中,一或多個彈性元件140可設置為撓性體材料,諸如橡膠。然而,應理解本揭露書不限於此,且一或多個彈性元件可為經配置以提供力,以將至少一個第一可旋轉裝置130推抵在網版裝置110上的另一元件。 According to some embodiments that can be combined with other embodiments described herein, one or more elastic elements 140 are springs. As an example, one or more elastic elements 140 are selected from the group consisting of coil springs, leaf springs, leaf springs, and any combination thereof. In some embodiments, one or more elastic elements 140 may be provided as a flexible body material, such as rubber. However, it should be understood that the present disclosure is not limited thereto, and one or more elastic elements may be configured to provide a force to push at least one first rotatable device 130 against another element on the screen device 110.

第3圖顯示根據於此所述的進一步的實施例之經配置用於將網版裝置110相對於被使用在太陽能電池之製造中的基板10而對準的設備300的概要圖。 FIG. 3 shows a schematic view of an apparatus 300 configured to align the screen device 110 with respect to the substrate 10 used in the manufacture of solar cells according to further embodiments described herein.

根據可與於此所述的其它實施例結合的一些實施例,一或多個可旋轉裝置可包括四或更少個可旋轉裝置,具體地三或更少個的可旋轉裝置,且可更具體地為三個可旋轉裝置。作為例子,一或多個可旋轉裝置包 括至少一個第一可旋轉裝置330和至少一個進一步的可旋轉裝置,諸如第二可旋轉裝置360和第三可旋轉裝置370。至少一個第一可旋轉裝置330和第二可旋轉裝置360和第三可旋轉裝置370提供與網版裝置110的三點接觸。具體地,三點接觸可提供網版裝置110在移動平面中的改良的對準,具體地由於促進了正確的網版平面性的尋找。 According to some embodiments, which may be combined with other embodiments described herein, one or more rotatable devices may include four or less rotatable devices, in particular three or less rotatable devices, and may be more Specifically three rotatable devices. As an example, one or more rotatable device packages At least one first rotatable device 330 and at least one further rotatable device are included, such as a second rotatable device 360 and a third rotatable device 370. At least one first rotatable device 330 and second rotatable device 360 and third rotatable device 370 provide three-point contact with the screen device 110. In particular, the three-point contact can provide improved alignment of the screen device 110 in the moving plane, particularly because it facilitates the search for correct screen flatness.

至少一個第一可旋轉裝置330藉由安裝裝置350支撐,以繞第一旋轉軸線332為可旋轉的。至少一個第一可旋轉裝置330使用藉由一或多個彈性元件(諸如第一彈性元件140和第二彈性元件142)所提供的力而推抵網版裝置110上。至少一個進一步的可旋轉裝置可被可旋轉地安裝在底座裝置320上。作為例子,第二可旋轉裝置360可繞第二旋轉轉軸線362為可旋轉的。第三可旋轉裝置370可繞第三旋轉軸線372為可旋轉的。具體地,至少一個進一步的可旋轉裝置藉由底座裝置320而可旋轉地支撐,但不能相對於底座裝置320而移位或平移。 At least one first rotatable device 330 is supported by the mounting device 350 to be rotatable about the first axis of rotation 332. The at least one first rotatable device 330 is pushed against the screen device 110 using the force provided by one or more elastic elements, such as the first elastic element 140 and the second elastic element 142. At least one further rotatable device may be rotatably mounted on the base device 320. As an example, the second rotatable device 360 may be rotatable about the second axis of rotation 362. The third rotatable device 370 may be rotatable about the third axis of rotation 372. Specifically, at least one further rotatable device is rotatably supported by the base device 320, but cannot be displaced or translated relative to the base device 320.

在一些實施方式中,一或多個可旋轉裝置的旋轉軸線可實質地彼此平行。具體地,第一旋轉軸線332、第二旋轉軸線362和第三旋轉軸線372可實質地彼此平行。然而,本揭露書不限於此,且旋轉軸線可相對於彼此而傾斜。 In some embodiments, the axes of rotation of one or more rotatable devices may be substantially parallel to each other. Specifically, the first rotation axis 332, the second rotation axis 362, and the third rotation axis 372 may be substantially parallel to each other. However, the present disclosure is not limited to this, and the rotation axes may be inclined with respect to each other.

根據可與於此所述的其它實施例結合的一些實施例,底座裝置320可為框架。框架可具有實質地彼此平行而延伸的第一部分322和第二部分324,其中網版裝置110可位於第一部分322和第二部分324之間。第一部分322和第二部分324可藉由第三部分326而連接。第一部分322、第二部分324和第三部分326可界定經配置用於容納網版裝置110的孔或接收空間。在一些實施方式中,框架可具有U形或矩形形狀,諸如閉合的矩形形狀。 According to some embodiments that may be combined with other embodiments described herein, the base device 320 may be a frame. The frame may have a first portion 322 and a second portion 324 that extend substantially parallel to each other, wherein the screen device 110 may be located between the first portion 322 and the second portion 324. The first part 322 and the second part 324 may be connected by the third part 326. The first portion 322, the second portion 324, and the third portion 326 may define an aperture or receiving space configured to receive the screen device 110. In some embodiments, the frame may have a U-shape or a rectangular shape, such as a closed rectangular shape.

根據一些實施例,至少一個第一可旋轉裝置330可使用一或多個彈性元件和任選地安裝裝置350而安裝到第三部分326。至少一個進一步的可旋轉裝置可被可旋轉地安裝在第一部分322及/或第二部分324上。作為例子,第二可旋轉裝置360可被可旋轉地安裝到第一部分322,且第三可旋轉裝置370可被安裝到第二部分324。 According to some embodiments, at least one first rotatable device 330 may be mounted to the third portion 326 using one or more elastic elements and optionally a mounting device 350. At least one further rotatable device may be rotatably mounted on the first part 322 and / or the second part 324. As an example, the second rotatable device 360 may be rotatably mounted to the first part 322, and the third rotatable device 370 may be mounted to the second part 324.

根據可與於此所述的其它實施例結合的一些實施例,一或多個彈性元件包括將安裝裝置350連接到底座裝置320的第一彈性元件140和第二彈性元件142。至少一個第一可旋轉裝置330可被支撐在安裝裝置350之在第一彈性元件140和第二彈性元件142之間的位置處。作為例子,安裝裝置350可為棒形的。第一彈性元件140可連接到安裝裝置350的第一端部分,且第二彈性元件142可連接到安裝裝置350的第二端部 分。第一端部分和第二端部分可為安裝裝置350的相對端部分。至少一個第一可旋轉裝置330可設置在第一彈性元件140和第二彈性元件142之間(例如)在安裝裝置150的中間部分處。 According to some embodiments that can be combined with other embodiments described herein, the one or more elastic elements include a first elastic element 140 and a second elastic element 142 that connect the mounting device 350 to the base device 320. At least one first rotatable device 330 may be supported at a position of the mounting device 350 between the first elastic element 140 and the second elastic element 142. As an example, the mounting device 350 may be bar-shaped. The first elastic element 140 may be connected to the first end portion of the mounting device 350, and the second elastic element 142 may be connected to the second end portion of the mounting device 350 Minute. The first end portion and the second end portion may be opposite end portions of the mounting device 350. At least one first rotatable device 330 may be disposed between the first elastic element 140 and the second elastic element 142 (for example) at a middle portion of the mounting device 150.

根據一些實施例,安裝裝置350可包括具有開口的安裝框架。至少一個第一可旋轉裝置330可被可旋轉地安裝在開口中。作為例子,至少一個第一可旋轉裝置330的第一旋轉軸線332的第一端部分可被可旋轉地連接到安裝框架的第一框架部分。第一旋轉軸線332的第二端部分可被可旋轉地連接到安裝框架的第二框架部分。第一框架部分和第二框架部分可實質地彼此平行。至少一個第一可旋轉裝置330可定位在第一框架部分和第二框架部分之間。 According to some embodiments, the mounting device 350 may include a mounting frame having an opening. At least one first rotatable device 330 may be rotatably installed in the opening. As an example, the first end portion of the first rotation axis 332 of the at least one first rotatable device 330 may be rotatably connected to the first frame portion of the mounting frame. The second end portion of the first rotation axis 332 may be rotatably connected to the second frame portion of the mounting frame. The first frame portion and the second frame portion may be substantially parallel to each other. At least one first rotatable device 330 may be positioned between the first frame portion and the second frame portion.

第4圖顯示根據於此所述的實施例之用於將材料沉積在被使用於太陽能電池的製造中使用的基板10之系統400的概要圖。系統400包括網版裝置110和經配置用於對準根據於此所述的實施例之網版裝置110的設備。在一些實施方式中,系統400可為網版印刷系統。 FIG. 4 shows a schematic view of a system 400 for depositing materials on a substrate 10 used in the manufacture of solar cells according to embodiments described herein. The system 400 includes a screen device 110 and an apparatus configured to align the screen device 110 according to the embodiments described herein. In some embodiments, the system 400 may be a screen printing system.

基板10可定位在基板支撐件20(諸如印刷巢)上。基板支撐件20可經配置以在印刷製程(諸如網版印刷製程)期間支撐基板10。任選地,基板支撐件20可經配置用於在兩或更多個製程站(諸如印刷站和檢查站)之間輸送基板10。 The substrate 10 may be positioned on a substrate support 20 (such as a printing nest). The substrate support 20 may be configured to support the substrate 10 during a printing process, such as a screen printing process. Optionally, the substrate support 20 may be configured to transport the substrate 10 between two or more process stations, such as printing stations and inspection stations.

在一些實施方式中,網版裝置110包括網版框架112和網版114。網版114界定對應於待被印刷在基板10上之結構(例如一或多個導線圖案,諸如指狀物及/或匯流條)的網版圖案或特徵。網版圖案或特徵可包括洞、槽、切口或其它孔之至少一者。 In some embodiments, the screen device 110 includes a screen frame 112 and a screen 114. The screen 114 defines a screen pattern or feature corresponding to the structure to be printed on the substrate 10 (eg, one or more wire patterns, such as fingers and / or bus bars). The screen pattern or feature may include at least one of a hole, groove, cutout, or other hole.

根據一些實施例,系統400包括經配置用於在基板10上進行網版印刷的至少一個印刷頭480。在一些實施方式中,網版裝置110可包括在至少一個印刷頭480中。在其它實施方式中,網版裝置110可提供作為分離的實體。至少一個印刷頭480可包括經配置用於接觸網版114的印刷裝置(諸如刮板482)。刮板482沿著印刷方向6移動,並將待被印刷的材料(稱為「印刷材料」)通過網版114,且特別地通過界定一或多個導線圖案的網版圖案而推動到基板10上。 According to some embodiments, the system 400 includes at least one print head 480 configured for screen printing on the substrate 10. In some embodiments, the screen device 110 may be included in at least one print head 480. In other embodiments, the screen device 110 may be provided as a separate entity. The at least one print head 480 may include a printing device (such as a squeegee 482) configured to contact the screen 114. The squeegee 482 moves in the printing direction 6 and pushes the material to be printed (referred to as "printed material") through the screen 114, and in particular by the screen pattern that defines one or more wire patterns to the substrate 10 on.

根據可與於此所述的其它實施方案結合的一些實施例,印刷材料可選自以下所組成的群組:銀、鋁、銅、錫、鎳、矽基糊料及其任何組合。 According to some examples that may be combined with other embodiments described herein, the printed material may be selected from the group consisting of silver, aluminum, copper, tin, nickel, silicon-based paste, and any combination thereof.

如第4圖中所示,一或多個可旋轉裝置的旋轉軸線(諸如至少一個第一可旋轉裝置的第一旋轉軸線132)可實質地垂直於印刷方向6。印刷方向6及/或旋轉軸線可實質地平行於垂直方向3。垂直方向3可平行於重力。 As shown in FIG. 4, the rotation axis of one or more rotatable devices (such as the first rotation axis 132 of at least one first rotatable device) may be substantially perpendicular to the printing direction 6. The printing direction 6 and / or the axis of rotation may be substantially parallel to the vertical direction 3. The vertical direction 3 may be parallel to gravity.

第5圖顯示根據於此所述的實施例之經配置用於使網版裝置相對於被使用於太陽能電池的製造中之基板而對準的設備的剖面的概要圖。 FIG. 5 shows a schematic view of a cross section of an apparatus configured to align a screen device with respect to a substrate used in the manufacture of solar cells according to embodiments described herein.

根據可於此所述的其它實施例結合的一些實施例,安裝裝置150可為彈性接頭。一或多個彈性元件140(諸如彈簧)可推動安裝裝置150,以補償藉由網版裝置110的橫向側表面所提供的滑動表面113之變形116。在一些實施方式中,變形116可由於連續及/或重複的θ移動和網版裝置110的對準而產生。 According to some embodiments that may be combined with other embodiments described herein, the mounting device 150 may be an elastic joint. One or more elastic elements 140 (such as springs) can push the mounting device 150 to compensate for the deformation 116 of the sliding surface 113 provided by the lateral side surface of the screen device 110. In some embodiments, the deformation 116 may result from continuous and / or repeated θ movement and alignment of the screen device 110.

第6圖顯示根據於此所述的實施例之經配置用於將網版裝置610相對於被使用在太陽能電池的製造中之基板(未顯示)而對準的設備600的概要圖。第7A圖顯示第6圖中所示的設備600的細節的概要圖。第7B圖顯示設備600的安裝裝置的概要圖。 FIG. 6 shows a schematic view of an apparatus 600 configured to align the screen device 610 relative to a substrate (not shown) used in the manufacture of solar cells according to the embodiments described herein. FIG. 7A shows a schematic view of the details of the device 600 shown in FIG. 6. FIG. 7B shows a schematic diagram of the installation device of the device 600.

設備600包括網版裝置610和一或多個可旋轉裝置。一或多個可旋轉裝置包括藉由安裝裝置650而可旋轉地支撐的至少一個第一可旋轉裝置630。一或多個可旋轉裝置可包括至少一個進一步的可旋轉裝置,諸如可旋轉地安裝到底座裝置620之第二可旋轉裝置660和第三可旋轉裝置670。安裝裝置650使用一或多個彈性元件(諸如第一彈性元件640和第二彈性元件642)而安裝到底座裝置620。 The apparatus 600 includes a screen device 610 and one or more rotatable devices. The one or more rotatable devices include at least one first rotatable device 630 rotatably supported by the mounting device 650. The one or more rotatable devices may include at least one further rotatable device, such as a second rotatable device 660 and a third rotatable device 670 rotatably mounted to the base device 620. The mounting device 650 is mounted to the base device 620 using one or more elastic elements such as the first elastic element 640 and the second elastic element 642.

根據可與於此所述的其它實施例結合的一些實施例,底座裝置620具有經配置以容納網版裝置610 及/或基板10的開口625。在一些實施方式中,網版裝置610安裝在底座裝置620的頂部表面上。一或多個可旋轉裝置可從底座裝置620的頂部表面突出,以接觸網版裝置610的橫向側表面。 According to some embodiments that can be combined with other embodiments described herein, the base device 620 has a screen device 610 configured to accommodate And / or the opening 625 of the substrate 10. In some embodiments, the screen device 610 is mounted on the top surface of the base device 620. One or more rotatable devices may protrude from the top surface of the base device 620 to contact the lateral side surface of the screen device 610.

根據可與於此所述的其它實施例結合的一些實施例,安裝裝置650包括固定部分652和可移動部分654。具有固定部分652和可移動部分654的安裝裝置650可配置作為彈性接頭。固定部分652可連接到底座裝置620。具體地,固定部分652可相對於底座裝置620為靜止的。在一些實施例中,可移動部分654可相對於固定部分652及/或底座裝置620為可移動的。作為例子,可移動部分654可安裝到固定部分652,以相對於固定部分652為可移動的。 According to some embodiments that can be combined with other embodiments described herein, the mounting device 650 includes a fixed portion 652 and a movable portion 654. The mounting device 650 having the fixed portion 652 and the movable portion 654 may be configured as an elastic joint. The fixing part 652 may be connected to the base device 620. Specifically, the fixed portion 652 may be stationary relative to the base device 620. In some embodiments, the movable portion 654 may be movable relative to the fixed portion 652 and / or the base device 620. As an example, the movable portion 654 may be mounted to the fixed portion 652 to be movable relative to the fixed portion 652.

根據一些實施例,可移動部分654可包括第一端部分、第二端部分和設置在第一端部分和第二端部分之間的中間部分。第一端部分和第二端部分可連接到固定部分652。可移動部分654的至少中間部分可相對於固定部652為可移動的。在一些實施方式中,可移動部分654至少部分地設置在由固定部分652所提供的接收空間中。 According to some embodiments, the movable portion 654 may include a first end portion, a second end portion, and an intermediate portion disposed between the first end portion and the second end portion. The first end portion and the second end portion may be connected to the fixed portion 652. At least a middle portion of the movable portion 654 may be movable relative to the fixed portion 652. In some embodiments, the movable portion 654 is at least partially disposed in the receiving space provided by the fixed portion 652.

在一些實施例中,固定部分652和可移動部分654藉由安裝裝置650的本體而提供。具體地,安裝裝置650的本體可具有經配置以將可移動部分654從固定部分652分離的一或多個切口或狹縫655。作為例 子,安裝裝置650的本體可為單件式的材料,諸如金屬(如鋼或鋁)或聚合物材料(諸如塑膠)。一或多個切口或狹縫655可設置在本體中,使得可移動部分654相對於固定部分652為可移動的。 In some embodiments, the fixed portion 652 and the movable portion 654 are provided by the body of the mounting device 650. Specifically, the body of the mounting device 650 may have one or more cutouts or slits 655 configured to separate the movable portion 654 from the fixed portion 652. As an example The body of the mounting device 650 may be a single piece of material, such as metal (such as steel or aluminum) or polymer material (such as plastic). One or more cuts or slits 655 may be provided in the body so that the movable portion 654 is movable relative to the fixed portion 652.

在一些實施方式中,至少一個第一可旋轉裝置630藉由可移動部分654(例如,中間部分)而被可旋轉地支撐或安裝到可移動部分654。作為例子,一或多個彈性元件(諸如第一彈性元件640和第二彈性元件642)可經配置以提供作用在可移動部分654上的力,以將至少一個第一可旋轉裝置630推抵網版裝置610上。作為例子,一或多個彈性元件的第一端或端部分可連接到底座裝置620及/或固定部分652。一或多個彈性元件的第二端或端部分可經配置以接觸可移動部分654,以在朝向網版裝置610的方向上推動可移動部分654。在一些實施方式中,一或多個彈性元件的第二端或端部分可連接到可移動部分654。 In some embodiments, at least one first rotatable device 630 is rotatably supported or mounted to the movable portion 654 by the movable portion 654 (eg, the middle portion). As an example, one or more elastic elements (such as the first elastic element 640 and the second elastic element 642) may be configured to provide a force acting on the movable portion 654 to push the at least one first rotatable device 630 against On the screen device 610. As an example, the first end or end portion of the one or more elastic elements may be connected to the base device 620 and / or the fixed portion 652. The second end or end portion of the one or more elastic elements may be configured to contact the movable portion 654 to push the movable portion 654 in a direction toward the screen device 610. In some embodiments, the second end or end portion of one or more elastic elements can be connected to the movable portion 654.

一旦設備被組裝或設置,使用者不需要改變或操作由設備所提供的磨損補償裝置。部件的磨損藉由一或多個彈性元件所提供的力而自動地補償。太陽能電池製造設備具有減少的停機時間且提供增加的效率。 Once the device is assembled or set up, the user does not need to change or operate the wear compensation device provided by the device. The wear of the components is automatically compensated by the force provided by one or more elastic elements. Solar cell manufacturing equipment has reduced downtime and provides increased efficiency.

第8圖顯示根據於此所述的實施例之用於將網版裝置相對於被使用在太陽能電池的製造中之基板而對準的方法800的流程圖。 Figure 8 shows a flowchart of a method 800 for aligning a screen device with respect to a substrate used in the manufacture of solar cells according to embodiments described herein.

方法800包括(在方塊810中)使網版裝置與對準設備的一或多個可旋轉裝置接觸,其中一或多個可旋轉裝置的至少一個第一可旋轉裝置經由一或多個彈性元件而連接到對準設備的底座裝置。在方塊820中,方法包括旋轉一或多個可旋轉裝置的至少一個可旋轉裝置,以相對於基板而對準網版裝置。 The method 800 includes (in block 810) contacting the screen device with one or more rotatable devices of the alignment apparatus, wherein at least one first rotatable device of the one or more rotatable devices is via one or more elastic elements And connected to the base device of the alignment device. At block 820, the method includes rotating at least one rotatable device of one or more rotatable devices to align the screen device relative to the substrate.

在一些實施方式中,方法800包括使用由一或多個彈性元件所提供的力將至少一個第一可旋轉裝置推抵在網版裝置上。作為例子,在至少一個可旋轉裝置的旋轉期間(例如在對準過程中),至少一個第一可旋轉裝置被推抵在網版裝置上。 In some embodiments, the method 800 includes using the force provided by the one or more elastic elements to push the at least one first rotatable device against the screen device. As an example, during rotation of the at least one rotatable device (eg, during the alignment process), at least one first rotatable device is pushed against the screen device.

根據一些實施例,方法進一步包括用於在網版裝置相對於基板10對準之後在基板10上印刷一或多個第一導線圖案的第一印刷製程。在一些實施方式中,具有一或多個第一導線圖案印刷於上的基板10可被乾燥。作為例子,基板10可移動到乾燥站,用於乾燥一或多個第一導線圖案。在另一例子中,一或多個第一導線圖案可在印刷站中被乾燥而不移動基板10。 According to some embodiments, the method further includes a first printing process for printing one or more first wire patterns on the substrate 10 after the screen device is aligned with respect to the substrate 10. In some embodiments, the substrate 10 having one or more first wire patterns printed thereon may be dried. As an example, the substrate 10 may be moved to a drying station for drying one or more first wire patterns. In another example, one or more first wire patterns may be dried in the printing station without moving the substrate 10.

根據一些實施例,方法包括用於在基板10上印刷一或多個第二導線圖案的第二印刷製程,例如在一或多個第一導線圖案上或上方。在第二印刷製程中使用的網版裝置可使用於此所述之實施例而相對於基板10而對準。網版裝置可為在第一印刷製程中所使用的相同網版裝置,或可為(例如)在另一個印刷站中所提供的不 同網版裝置。在一些實施方式中,具有一或多個第二導線圖案印刷於上的基板10可被乾燥。 According to some embodiments, the method includes a second printing process for printing one or more second wire patterns on the substrate 10, such as on or above one or more first wire patterns. The screen device used in the second printing process can be used with the embodiments described herein to be aligned with respect to the substrate 10. The screen device can be the same screen device used in the first printing process, or it can be, for example, a different one provided in another printing station Same as screen device. In some embodiments, the substrate 10 having one or more second wire patterns printed thereon may be dried.

根據一些實施例,在方法800中所使用的對準設備根據於此所述的實施例而配置。具體地,方法800可利用於此所述的設備、結構和系統。 According to some embodiments, the alignment device used in method 800 is configured according to the embodiments described herein. Specifically, the method 800 can be utilized in the devices, structures, and systems described herein.

根據於此所述的實施例,用於將網版裝置相對於被使用在太陽能電池製造中的基板而對準的方法可以使用計算機程式、軟體、計算機軟體產品和相關的控制器來進行,控制器可具有與用於處理大面積基板之設備的對應部件通訊的CPU、記憶體、使用者介面以及輸入及輸出裝置。 According to the embodiments described herein, the method for aligning the screen device with respect to the substrate used in solar cell manufacturing can be performed using computer programs, software, computer software products, and related controllers. The device may have a CPU, memory, user interface, and input and output devices that communicate with corresponding components of equipment used to process large-area substrates.

本揭露書的實施例允許在一段長的時間週期的準確對準。具體地,可最小化或甚至避免由機械部件(諸如網版裝置及/或可旋轉裝置)的磨損而導致之對準準確度的影響。在維修之間的間隔可延長,且可降低維護成本。可減少太陽能電池製造設備的停機時間,且可增加太陽能電池製造設備的產量和效率。一或多個可旋轉裝置允許網版或網版裝置的改良平面對準(或改良的平面條件)。此外,一旦設備被組裝或設置,使用者不需要改變或操作由設備所提供的磨損補償裝置。部件的磨損藉由一或多個彈性元件所提供的力而自動地補償。太陽能電池製造設備具有減少的停機時間且提供增加的效率。 The embodiments of the present disclosure allow accurate alignment over a long period of time. In particular, the influence of the alignment accuracy caused by the wear of mechanical components such as screen devices and / or rotatable devices can be minimized or even avoided. The interval between repairs can be extended, and maintenance costs can be reduced. The downtime of solar cell manufacturing equipment can be reduced, and the output and efficiency of solar cell manufacturing equipment can be increased. One or more rotatable devices allow the screen or the improved plane alignment of the screen device (or improved plane conditions). In addition, once the equipment is assembled or set up, the user does not need to change or operate the wear compensation device provided by the equipment. The wear of the components is automatically compensated by the force provided by one or more elastic elements. Solar cell manufacturing equipment has reduced downtime and provides increased efficiency.

雖然前述內容關於本揭露書的實施例,本揭露書的其它和進一步的實施例可經設計而不背離本揭露書的基本範圍,且本揭露書的範圍由以下的申請專利範圍而確定。 Although the foregoing content relates to embodiments of the disclosure, other and further embodiments of the disclosure can be designed without departing from the basic scope of the disclosure, and the scope of the disclosure is determined by the scope of the following patent applications.

Claims (20)

一種經配置以用於將一網版裝置相對於被使用在一太陽能電池的製造中的一基板而對準的設備,該設備包含:一底座裝置;及一或多個可旋轉裝置,經配置以接觸該網版裝置,其中該一或多個可旋轉裝置之至少一個第一可旋轉裝置經由一或多個彈性元件而連接至該底座裝置的一或多側。An apparatus configured for aligning a screen device with respect to a substrate used in the manufacture of a solar cell, the apparatus comprising: a base device; and one or more rotatable devices, configured To contact the screen device, wherein at least one first rotatable device of the one or more rotatable devices is connected to one or more sides of the base device via one or more elastic elements. 如請求項1所述之設備,其中該一或多個可旋轉裝置為三個或更少個可旋轉裝置。The apparatus of claim 1, wherein the one or more rotatable devices are three or less rotatable devices. 如請求項1所述之設備,其中該一或多個可旋轉裝置經配置以藉由該一或多個可旋轉裝置的至少一個可旋轉裝置繞一旋轉軸線的旋轉而相對於該基板而對準該網版裝置。The apparatus of claim 1, wherein the one or more rotatable devices are configured to be opposed to the substrate by rotation of at least one rotatable device of the one or more rotatable devices about a rotation axis Quasi-screen device. 如請求項1所述之設備,其中該一或多個可旋轉裝置經配置以在平行於該基板的一表面之一二維平面中相對於該基板而對準該網版裝置。The apparatus of claim 1, wherein the one or more rotatable devices are configured to align the screen device relative to the substrate in a two-dimensional plane parallel to a surface of the substrate. 如請求項1所述之設備,其中該一或多個可旋轉裝置包括可旋轉地安裝到該底座裝置的至少一個第二可旋轉裝置。The apparatus of claim 1, wherein the one or more rotatable devices includes at least one second rotatable device rotatably mounted to the base device. 如請求項1所述之設備,進一步包括一安裝裝置,經配置以支撐該至少一個第一可旋轉裝置繞一第一旋轉軸線而可旋轉,其中該安裝裝置係經由該一或多個彈性元件而連接到該底座裝置。The apparatus of claim 1, further comprising a mounting device configured to support the at least one first rotatable device to be rotatable about a first axis of rotation, wherein the mounting device is via the one or more elastic elements And connected to the base device. 如請求項6所述之設備,其中該一或多個彈性元件包括將該安裝裝置連接到該底座裝置的一第一彈性元件和一第二彈性元件,且其中該至少一個第一可旋轉裝置被支撐在該安裝裝置在該第一彈性元件和該第二彈性元件之間之一位置處。The apparatus according to claim 6, wherein the one or more elastic elements include a first elastic element and a second elastic element connecting the mounting device to the base device, and wherein the at least one first rotatable device It is supported at a position of the mounting device between the first elastic element and the second elastic element. 如請求項6所述之設備,其中該安裝裝置包括一固定部分和一可移動部分,其中該至少一個第一可旋轉裝置係藉由該可移動部分而可旋轉地支撐。The apparatus according to claim 6, wherein the mounting device includes a fixed part and a movable part, wherein the at least one first rotatable device is rotatably supported by the movable part. 如請求項1所述之設備,其中該至少一個第一可旋轉裝置係經由該一或多個彈性元件而連接到該底座裝置,以在垂直於該至少一個第一可旋轉裝置的該第一旋轉軸線的方向上為可移動的。The apparatus of claim 1, wherein the at least one first rotatable device is connected to the base device via the one or more elastic elements so as to be perpendicular to the first of the at least one first rotatable device The direction of the axis of rotation is movable. 如請求項1所述之設備,其中該一或多個彈性元件是彈簧。The device of claim 1, wherein the one or more elastic elements are springs. 如請求項1所述之設備,其中該底座裝置包括具有一開口的一框架,該開口經配置以容納該網版裝置和該基板的至少一者。The apparatus of claim 1, wherein the base device includes a frame having an opening configured to accommodate at least one of the screen device and the substrate. 如請求項1到11任一項所述之設備,進一步包括一或多個致動器,經配置以旋轉該一或多個可旋轉裝置的至少一個可旋轉裝置。The apparatus of any one of claims 1 to 11, further comprising one or more actuators configured to rotate at least one rotatable device of the one or more rotatable devices. 如請求項12所述之設備,其中該設備經配置以藉由旋轉該至少一個可旋轉裝置而移動和對準該網版裝置。The apparatus of claim 12, wherein the apparatus is configured to move and align the screen device by rotating the at least one rotatable device. 一種用於將一材料沉積在被使用在一太陽能電池的製造中的一基板上的系統,該系統包含:一網版裝置;及請求項1到11任一項所述的設備。A system for depositing a material on a substrate used in the manufacture of a solar cell, the system comprising: a screen device; and the device according to any one of claims 1 to 11. 如請求項14所述之系統,進一步包括至少一個印刷裝置,經配置以在該基板上進行網版印刷。The system of claim 14, further comprising at least one printing device configured to perform screen printing on the substrate. 一種用於將一網版裝置相對於被使用在一太陽能電池的製造中的一基板而對準的方法,該方法包含以下步驟:以一對準設備之一或多個可旋轉裝置接觸該網版裝置,其中該一或多個可旋轉裝置之至少一個第一可旋轉裝置經由一或多個彈性元件而連接至該對準設備之一底座裝置的一或多個側面;及旋轉該一或多個可旋轉裝置之至少一個可旋轉裝置,以相對於該基板而對準該網版裝置。A method for aligning a screen device with respect to a substrate used in the manufacture of a solar cell, the method comprising the steps of: contacting the screen with one or more rotatable devices of an alignment device Plate device, wherein at least one first rotatable device of the one or more rotatable devices is connected to one or more sides of a base device of the alignment apparatus via one or more elastic elements; and the one or more are rotated At least one rotatable device of the plurality of rotatable devices is aligned with the screen device relative to the substrate. 如請求項16所述之方法,其中該至少一個可旋轉裝置係藉由該對準設備的一或多個致動器而旋轉。The method of claim 16, wherein the at least one rotatable device is rotated by one or more actuators of the alignment device. 如請求項16所述之方法,其中該網版裝置藉由旋轉該至少一個可旋轉裝置而移動和對準。The method of claim 16, wherein the screen device is moved and aligned by rotating the at least one rotatable device. 如請求項17所述之方法,其中該網版裝置藉由旋轉該至少一個可旋轉裝置而移動和對準。The method of claim 17, wherein the screen device is moved and aligned by rotating the at least one rotatable device. 如請求項16所述之方法,其中該對準設備係根據請求項1而配置。The method according to claim 16, wherein the alignment device is configured according to claim 1.
TW105130412A 2015-09-25 2016-09-21 Apparatus configured for alignment of a screen device with respect to a substrate used in the manufacture of a solar cell, system for deposition of a material on a substrate used in the manufacture of a solar cell, and method for aligning a screen device TWI639518B (en)

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