TWI633312B - Method and system for measuring channel precision of crossed roller bearing - Google Patents
Method and system for measuring channel precision of crossed roller bearing Download PDFInfo
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Abstract
一種量測交叉滾子軸承溝道精度的方法及系統,其係以伺服電機單元驅動交叉滾子軸承旋轉。並以電流輸入模組於時間軸擷取伺服電機單元的電流訊號。再以運算控制單元讀取電流訊號,並將電流訊號記錄為電流時域訊號;並以快速傅立葉轉換模組將電流時域訊號轉換為頻域訊號,再由頻域訊號之特徵判斷出交叉滾子軸承的檢測品質資訊,其中,檢測品質資訊係選自交叉滾子軸承的溝道真圓度、滾子直徑大小變異率、溝道粗糙度以及組配精度等資訊,俾能藉由與伺服電機單元之摩擦阻力對應的電機電流採集來獲得交叉滾子軸承的檢測品質資訊。 A method and system for measuring the channel accuracy of a crossed roller bearing, wherein the servo motor unit drives the cross roller bearing to rotate. The current input module captures the current signal of the servo motor unit on the time axis. Then, the operation control unit reads the current signal, and records the current signal as the current time domain signal; and converts the current time domain signal into the frequency domain signal by using the fast Fourier transform module, and then judges the cross roll by the characteristics of the frequency domain signal. The inspection quality information of the sub-bearings, wherein the inspection quality information is selected from the information of the channel roundness of the crossed roller bearing, the variation of the roller diameter, the channel roughness and the assembly accuracy, etc., and the servo motor The motor current is collected corresponding to the frictional resistance of the unit to obtain the inspection quality information of the crossed roller bearing.
Description
本發明係有關一種量測交叉滾子軸承溝道精度的方法及系統,尤指一種藉由與摩擦阻力對應之電機電流採集技術來獲得交叉滾子軸承之檢測品質資訊的軸承量測技術。 The invention relates to a method and a system for measuring the channel precision of a crossed roller bearing, in particular to a bearing measuring technology for obtaining the quality information of the cross roller bearing by the motor current collecting technology corresponding to the frictional resistance.
按,習知的軸承技術領域中,由於交叉滾子軸承係為具有高度旋轉精度的滾子軸承,而且會以正交的方式安排圓形滾子,故可承受各個方向的負荷,也因如此,交叉滾子軸承確實已經廣泛地受到相關產業的重視與青睞。至於軸承的檢驗大多是以接觸式方式接觸軸承外環來進行振動檢測,藉此來檢測出軸承的具體檢測數據為何?具體來說,一般軸承廠商使用的軸承檢驗設備之探針係採接觸式接觸於軸承外環上;或是以振動感測器來感測軸承的振動狀態,以抓取其振動訊號(即時間域),並藉由頻譜分析設備再透過快速傅立葉轉換(FFT)方式將振動訊號由時間域訊號換為頻域訊號;其中,以軸承內環缺陷所產生之振動為例,當滾動體接觸到缺陷時,則會產生連續性短暫的脈衝(pulses),此微弱脈衝(pulses)信號會激發在不同的頻帶上,此類頻帶可以從幾百Hz到幾百kHz之間。這些脈衝(pulses)信號經過低通濾波器,並利用包絡法分析與快速傅立葉轉換(FFT),即可檢視出軸承缺陷的頻率分佈為何?上述習知檢測技術雖然可藉由已為習知技術之頻域訊號特徵分析檢測技術(即以頻率分佈特徵對照軸承溝道真圓度、 滾子外徑精度、溝道粗糙度等之檢測數據判斷技術)來判斷軸承的品質檢測數據;惟,由於該習知技術係採探針接觸方式來檢測軸承的振動狀態,因而會有探針接觸操作難度較高及浪費工時等缺失產生,因而造成檢測上的不便與困擾情事產生。 According to the conventional bearing technology, since the crossed roller bearing is a roller bearing with high rotation precision, and the circular roller is arranged in an orthogonal manner, the load in all directions can be withstood, and thus Cross-roller bearings have indeed been widely valued and favored by related industries. As for the bearing inspection, most of the bearings are contacted to contact the outer ring of the bearing for vibration detection. What is the specific test data for the bearing? Specifically, the probe of the bearing inspection equipment used by the general bearing manufacturer adopts contact contact with the outer ring of the bearing; or the vibration sensor is used to sense the vibration state of the bearing to capture the vibration signal (ie, time) Domain), and the frequency spectrum signal is changed from the time domain signal to the frequency domain signal by the spectrum analysis device and then through the fast Fourier transform (FFT) method; wherein, the vibration generated by the inner ring defect of the bearing is taken as an example, when the rolling element contacts In the case of defects, transient short pulses are generated, which are excited in different frequency bands, which can range from a few hundred Hz to several hundred kHz. These pulse signals are passed through a low-pass filter and analyzed by envelope analysis and fast Fourier transform (FFT) to see the frequency distribution of bearing defects. The above-mentioned conventional detection techniques can be analyzed by the frequency domain signal feature detection technology that has been the prior art (ie, the frequency distribution characteristics are compared with the bearing channel roundness, The detection data judgment technique of the outer diameter accuracy of the roller and the channel roughness is used to judge the quality detection data of the bearing; however, since the conventional technique uses the probe contact method to detect the vibration state of the bearing, there is a probe. The difficulty of contact operation and the waste of working hours are caused, resulting in inconvenience and troubles in detection.
除此之外,一般軸承廠商亦會使用如下所示的軸承檢驗設備來檢測軸承各種檢測項目的品質優劣: In addition, general bearing manufacturers will also use the bearing inspection equipment shown below to test the quality of various bearing inspection items:
1.軸承內外徑檢測,係透過軸承內外徑檢測儀來檢測交叉滾子軸承的內外徑數據,以判斷軸承製品是否有內外徑尺寸的誤差。 1. The inner and outer diameter of the bearing is detected by the inner and outer diameter detectors of the bearing to detect the inner and outer diameter data of the crossed roller bearing to determine whether the bearing product has an inner and outer diameter dimension error.
2.軸承徑向壓力測試,係透過大型軸承壓力測試機來檢測交叉滾子軸承的徑向壓力數據,以判斷軸承製品的徑向壓力是否達到預設壓力值。 2. Bearing radial pressure test, through the large bearing pressure test machine to detect the radial pressure data of the crossed roller bearing to determine whether the radial pressure of the bearing product reaches the preset pressure value.
3.軸承鹽霧測試,係透過大型軸承鹽霧測試機來檢測交叉滾子軸承的抗鹽霧數據,以判斷軸承製品的抗鹽霧能力是否達到預設標準值以內。 3. Bearing salt spray test, through the large bearing salt spray test machine to detect the salt spray resistance data of the cross roller bearing to determine whether the salt spray resistance of the bearing product reaches the preset standard value.
4.軸承真圓度測試,係透過大型軸承真圓度測試機來檢測交叉滾子軸承的真圓度數據,以判斷軸承製品的真圓度數據是否在標準值以內。 4. Bearing roundness test, through the large bearing roundness test machine to detect the roundness data of the crossed roller bearing to determine whether the roundness data of the bearing product is within the standard value.
5.軸承遊隙測試,係透過軸承遊隙測試儀來檢測交叉滾子軸承的軸承遊隙數據,以判斷軸承製品的遊隙數據是否在標準值以內。 5. Bearing clearance test, through the bearing clearance tester to detect the bearing clearance data of the crossed roller bearing to determine whether the clearance data of the bearing product is within the standard value.
6.軸承金相/硬度測試,係透過大型軸承金相/硬度測試機來 檢測交叉滾子軸承的金相/硬度數據,以判斷軸承製品的金相/硬度數據是否在標準值以內。 6. Bearing metallographic/hardness test, through large bearing metallographic/hardness tester The metallographic/hardness data of the crossed roller bearing is measured to determine if the metallographic/hardness data of the bearing product is within the standard value.
7.軸承壽命測試,係透過大型軸承壽命測試機來檢測交叉滾子軸承的使用壽命數據,以判斷軸承製品的使用壽命是否在標準值以內。 7. Bearing life test, through the large bearing life test machine to detect the service life data of the cross roller bearing to determine whether the service life of the bearing product is within the standard value.
由上述得知,習知交叉滾子軸承檢測技術在每進行一項檢測項目時,則必須使用專屬檢測項目用途的檢測設備,於此,方能檢測出專屬檢測項目的檢測數據,該習知檢測技術雖然可以檢測出專屬檢測項目的檢測數據;惟,每一專屬檢測項目的檢測設備的造價並不便宜,以致造成檢測成本的爆增,而且還會增加檢測的工時以及人力成本的支出,因此,該習知檢測技術確實未臻完善,仍有再改善的必要性。 It is known from the above that the conventional cross-roller bearing detection technology must use the detection equipment for the purpose of detecting the project for each test item, and thus the detection data of the exclusive inspection item can be detected. Although the detection technology can detect the detection data of the exclusive inspection items; however, the cost of the inspection equipment for each exclusive inspection item is not cheap, resulting in an explosion of inspection costs, and also increases the labor of inspection and labor costs. Therefore, the conventional detection technology is indeed not perfect, and there is still a need for further improvement.
鑒於上述習知交叉滾子軸承檢測技術及該專利所致的缺失,有鑑於此,本發明創作人乃經不斷的努力研發之下,終於研發出一套有別於上述習知技術的本發明。 In view of the above-mentioned conventional cross roller bearing detection technology and the defects caused by the patent, in view of this, the creator of the present invention has continuously developed a set of inventions different from the above-mentioned prior art. .
本發明主要目的在於提供一種量測交叉滾子軸承溝道精度的方法及系統,主要是藉由電機電流採集的機能設置,並利用交叉滾子軸承滾子與溝道為負游隙組配的特性,故可藉由與伺服電機單元之摩擦阻力對應的電機電流採集技術來獲得交叉滾子軸承的多種檢測品質資訊。達成本發明主要目的之技術手段,係以伺服電機單元驅動交叉滾子軸承旋轉。並以電流輸入模組於時間軸擷取伺服電機單元的電流訊號。再以運算控制單元讀取電流訊號,並將電流訊號記錄為電流時域訊號;並以快速傅立葉 轉換模組將電流時域訊號轉換為頻域訊號,再由頻域訊號之特徵判斷出交叉滾子軸承的檢測品質資訊,其中,檢測品質資訊係選自交叉滾子軸承的溝道真圓度、滾子直徑大小變異率、溝道粗糙度以及組配精度中之至少其中一種資訊。 The main object of the present invention is to provide a method and system for measuring the channel accuracy of a crossed roller bearing, mainly by setting the function of the motor current collecting, and using the cross roller bearing roller and the channel to form a negative clearance. The characteristics of the cross-roller bearing can be obtained by the motor current collecting technology corresponding to the frictional resistance of the servo motor unit. The technical means for achieving the main object of the present invention is to drive the cross roller bearing to rotate by a servo motor unit. The current input module captures the current signal of the servo motor unit on the time axis. Then, the operation control unit reads the current signal, and records the current signal as the current time domain signal; and uses the fast Fourier The conversion module converts the current time domain signal into a frequency domain signal, and then determines the detection quality information of the crossed roller bearing by the characteristics of the frequency domain signal, wherein the detection quality information is selected from the channel roundness of the crossed roller bearing, At least one of the roller diameter size variation rate, channel roughness, and assembly accuracy.
1‧‧‧交叉滾子軸承 1‧‧‧cross roller bearing
10‧‧‧伺服電機單元 10‧‧‧Servo motor unit
20‧‧‧電流輸入模組 20‧‧‧current input module
30‧‧‧運算控制單元 30‧‧‧Operation Control Unit
11‧‧‧馬達驅動器 11‧‧‧Motor drive
12‧‧‧伺服馬達 12‧‧‧Servo motor
120‧‧‧輸出軸 120‧‧‧ Output shaft
31‧‧‧機電控制器 31‧‧‧Electromechanical controller
32‧‧‧訊號傳輸模組 32‧‧‧Signal transmission module
33‧‧‧電腦裝置 33‧‧‧ computer equipment
40‧‧‧電源供應器 40‧‧‧Power supply
50‧‧‧驅動介面 50‧‧‧Drive interface
圖1係本發明具體架構的功能方塊實施示意圖。 FIG. 1 is a schematic diagram of a functional block implementation of a specific architecture of the present invention.
圖2係本發明具體電路架構的實施示意圖。 2 is a schematic diagram of the implementation of a specific circuit architecture of the present invention.
為讓 貴審查委員能進一步瞭解本發明整體的技術特徵與達成本發明目的之技術手段,玆以具體實施例並配合圖式加以詳細說明:請配合參看圖1~2所示,為達成本發明主要目的之實施例,係包括一伺服電機單元10、一電流輸入模組20及一運算控制單元30等技術特徵。本發明主要是於運算控制單元30內建有一快速傅立葉轉換模組(FFT;及具備執行快速傅立葉轉換法的軟體)。接著,是以伺服電機單元10來驅動交叉滾子軸承1旋轉;並以電流輸入模組20於一時間軸(約20秒~15分鐘)擷取伺服電機單元10的電流訊號;再以運算控制單元30讀取電流訊號,並將電流訊號記錄為對應該時間軸的曲線,於此,即可獲得該曲線的電流時域訊號;緊接著,以上述快速傅立葉轉換模組(FFT)將電流時域訊號轉換為頻域訊號,再由已為習知之一軸承分析檢測技術所建立的一已知軸承精度頻域訊號特徵(即與頻率分佈特徵對照出溝道真圓度、滾子外徑精度、溝道粗糙度等之檢測數據判斷技術)來判斷出交叉滾子軸承1的檢測品質資訊是否符合標準(可以是與否的資訊來表示),此檢測品質資訊可以是指 交叉滾子軸承1的溝道真圓度是否符合標準、滾子的直徑大小變異率是否符合標準是否符合標準、溝道粗糙度以及組配精度是否符合標準中的其中一種資訊而言。 In order to allow the reviewing committee to further understand the technical features of the present invention and the technical means for achieving the object of the present invention, it will be described in detail by way of specific embodiments and drawings: please refer to FIGS. 1 to 2 to achieve the present invention. The main purpose embodiments include a servo motor unit 10, a current input module 20, and an arithmetic control unit 30. The present invention mainly provides a fast Fourier transform module (FFT; and a software having a fast Fourier transform method) built in the arithmetic control unit 30. Next, the servo motor unit 10 drives the cross roller bearing 1 to rotate; and the current input module 20 captures the current signal of the servo motor unit 10 on a time axis (about 20 seconds to 15 minutes); The unit 30 reads the current signal and records the current signal as a curve corresponding to the time axis. Here, the current time domain signal of the curve is obtained; and then, the current time is measured by the fast Fourier transform module (FFT). The domain signal is converted into a frequency domain signal, and then a known bearing accuracy frequency domain signal feature has been established for one of the conventional bearing analysis and detection technologies (ie, channel roundness, roller outer diameter accuracy, and frequency distribution characteristics are compared) The detection data judgment technique such as the channel roughness determines whether the detection quality information of the crossed roller bearing 1 conforms to the standard (which may be indicated by information or not), and the detection quality information may refer to Whether the channel roundness of the crossed roller bearing 1 conforms to the standard, whether the diameter variability of the roller conforms to the standard, whether the channel roughness and the assembly accuracy conform to one of the standards.
此外,必須說明的是,由於上述頻域訊號特徵分析檢測技術,確實已為各大軸承廠商所廣為熟知的檢測技術,故不再對頻域訊號特徵分析檢測技術做詳細的內容贅述。 In addition, it must be noted that, due to the above-mentioned frequency domain signal feature analysis and detection technology, it has indeed been widely known as detection technology for major bearing manufacturers, so the detailed description of the frequency domain signal feature analysis and detection technology will not be repeated.
請配合參看圖1~2所示的一種具體的實施例中,伺服電機單元10係包含一馬達驅動器11及一伺服馬達12。交叉滾子軸承1係裝設在伺服馬達12的輸出軸120上(但不以此為限),馬達驅動器11可受運算控制單元30的控制而驅動伺服馬達12及交叉滾子軸承1旋轉。具體而言,上述電流訊號係擷取自伺服電機單元10之伺服馬達12的輸入電流及輸出電流。 Referring to a specific embodiment shown in FIGS. 1 and 2, the servo motor unit 10 includes a motor driver 11 and a servo motor 12. The cross roller bearing 1 is mounted on the output shaft 120 of the servo motor 12 (but not limited thereto), and the motor driver 11 can be driven to rotate the servo motor 12 and the cross roller bearing 1 under the control of the arithmetic control unit 30. Specifically, the current signal is extracted from the input current and output current of the servo motor 12 of the servo motor unit 10.
請配合參看圖1~2所示的一種具體實施例中,上述運算控制單元30係包含一機電控制器31、一訊號傳輸模組32(如網際網路;或乙太網路與數據機;或路由器的組合)及一電腦裝置33。機電控制器31分別與伺服電機單元10之馬達驅動器11及電流輸入模組20電性連接,用以接收自電流輸入模組20所傳輸的電流訊號,並控制馬達驅動器11的運作。另一方面,電腦裝置33係透過訊號傳輸模組32接收自機電控制器31所傳輸的電流訊號,以記錄電流訊號為電流時域訊號。至於快速傅立葉轉換模組(FFT)則是內建於電腦裝置33內,以將電流時域訊號轉換為頻域訊號。 Referring to a specific embodiment shown in FIG. 1 to FIG. 2, the operation control unit 30 includes an electromechanical controller 31 and a signal transmission module 32 (such as the Internet; or an Ethernet network and a data machine; Or a combination of routers) and a computer device 33. The electromechanical controller 31 is electrically connected to the motor driver 11 and the current input module 20 of the servo motor unit 10 for receiving the current signal transmitted from the current input module 20 and controlling the operation of the motor driver 11. On the other hand, the computer device 33 receives the current signal transmitted from the electromechanical controller 31 through the signal transmission module 32 to record the current signal as a current time domain signal. The Fast Fourier Transform Module (FFT) is built into the computer device 33 to convert the current time domain signal into a frequency domain signal.
具體的,如圖2所示的實施例中,本發明機電控制器31可以是一種Compact RIO控制器,並以一台型號PS-15的電源供應器40來供應Compact RIO控制器所需的電源,而電流輸入模組20可以是一台型號NI-9227的資料擷取器,伺服馬達12可以是一台型號AKM13C的無刷伺服 馬達12,至於馬達驅動器11可以是一種AKD馬達驅動器11,AKD馬達驅動器11與Compact RIO控制器之間電性連接一台驅動介面50,此驅動介面50可以是一種型號NI-9514的驅動介面卡運動模組,於此,即可構成本發明電路的具體實施架構。 Specifically, in the embodiment shown in FIG. 2, the electromechanical controller 31 of the present invention may be a Compact RIO controller, and the power supply required for the Compact RIO controller is supplied by a power supply 40 of the model PS-15. The current input module 20 can be a data picker of the model NI-9227, and the servo motor 12 can be a brushless servo of the model AKM13C. The motor driver 11 can be an AKD motor driver 11, and the AKD motor driver 11 and the Compact RIO controller are electrically connected to a driving interface 50. The driving interface 50 can be a driving interface card of the model NI-9514. The motion module, here, may constitute a specific implementation architecture of the circuit of the present invention.
在本發明的一種具體檢測的實施例中,係將交叉滾子軸承1置於伺服馬達12的輸出軸120上;接著,以電流輸入模組20來擷取伺服馬達12的電流訊號(即輸入電流或是輸出電流;或是同時擷取輸入電流與輸出電流);再以運算控制單元30讀取電流訊號,並將電流訊號記錄為對應時間軸的曲線,於此,即可獲得該曲線的電流時域訊號;接著,以快速傅立葉轉換模組(FFT)將電流時域訊號轉換為頻域訊號,再由頻域訊號之特徵判斷出交叉滾子軸承1的檢測品質資訊為何? In a specific detection embodiment of the present invention, the crossed roller bearing 1 is placed on the output shaft 120 of the servo motor 12; then, the current input module 20 is used to capture the current signal of the servo motor 12 (ie, input). The current or the output current; or the input current and the output current are simultaneously taken; and the current control signal is read by the operation control unit 30, and the current signal is recorded as a curve corresponding to the time axis, thereby obtaining the curve. Current time domain signal; Next, the current time domain signal is converted into a frequency domain signal by a fast Fourier transform module (FFT), and then the characteristics of the frequency domain signal are used to determine the detection quality information of the crossed roller bearing 1
具體的,當交叉滾子軸承1內環有缺陷且其滾動體接觸到缺陷時,則會產生連續性短暫的振動,此一微弱振動會引起交叉滾子軸承1的磨擦力增加,一旦交叉滾子軸承1的磨擦力增加,伺服馬達12的輸出電流訊號則會同步跟隨變小,而負載變大,因而使得輸出電流訊號輸出為類似習知技術之振動脈衝信號的電流脈衝訊號,這些電流脈衝訊號經過低通濾波器後,可以利用上述快速傅立葉轉換模組(FFT)將電流脈衝訊號(時域)轉為頻域訊號,由於在轉為頻域訊號後,電流脈衝訊號會激發在不同的頻帶上,所以使得頻帶可以從幾百Hz到幾百kHz之間,於此,即可藉由已為習知技術之頻域訊號特徵分析檢測技術(即以頻率分佈特徵對照溝道真圓度、滾子外徑精度、溝道粗糙度等之檢測數據的判斷技術)來判斷軸承的品質檢測數據為何?亦即,溝道真圓度、滾子外徑精度、溝道粗糙度等諸多的檢測品質資訊。 Specifically, when the inner ring of the crossed roller bearing 1 is defective and the rolling elements thereof are in contact with the defect, a transient short-lived vibration is generated, and this weak vibration causes the frictional force of the crossed roller bearing 1 to increase, once the cross roll is rolled. The frictional force of the sub-bearing 1 is increased, and the output current signal of the servo motor 12 is synchronously reduced to become smaller, and the load becomes larger, so that the output current signal is output as a current pulse signal similar to the vibration pulse signal of the prior art, and these current pulses After the signal passes through the low-pass filter, the current pulse signal (time domain) can be converted into a frequency domain signal by using the above-mentioned fast Fourier transform module (FFT). Since the current pulse signal is excited after being converted into a frequency domain signal, the current pulse signal is excited. In the frequency band, the frequency band can be from several hundred Hz to several hundred kHz. Here, the frequency domain signal characteristic analysis detection technique (that is, the frequency distribution feature is compared with the channel roundness, What is the judgment technique of the detection data of the outer diameter accuracy of the roller and the channel roughness, etc.) That is, the detection quality information such as channel roundness, roller outer diameter accuracy, and channel roughness.
因此,藉由上述具體實施例的說明,本發明確實可藉由電機 電流採集的機能設置,並利用交叉滾子軸承滾子與溝道為負游隙組配的特性,以藉由軸承摩擦阻力大小即電機電流採集數據來判斷交叉滾子軸承的多種精度等級資訊,例如軸承的溝道真圓度、滾子直徑大小變異率、溝道粗糙度以及組配精度等檢測品質資訊。 Therefore, the present invention can be made by the motor by the description of the above specific embodiments. The function of current collecting is set, and the characteristics of the cross-roller bearing roller and the channel are combined with the negative clearance, so as to judge the multiple precision level information of the crossed roller bearing by the bearing frictional resistance, that is, the motor current collecting data. For example, the bearing quality information such as the channel roundness of the bearing, the variation rate of the roller diameter, the channel roughness, and the assembly accuracy.
以上所述,僅為本發明之可行實施例,並非用以限定本發明之專利範圍,凡舉依據下列請求項所述之內容、特徵以及其精神而為之其他變化的等效實施,皆應包含於本發明之專利範圍內。本發明所具體界定於請求項之結構特徵,未見於同類物品,且具實用性與進步性,已符合發明專利要件,爰依法具文提出申請,謹請 鈞局依法核予專利,以維護本申請人合法之權益。 The above is only a possible embodiment of the present invention, and is not intended to limit the scope of the patents of the present invention, and the equivalent implementations of other changes according to the contents, features and spirits of the following claims should be It is included in the patent of the present invention. The invention is specifically defined in the structural features of the request item, is not found in the same kind of articles, and has practicality and progress, has met the requirements of the invention patent, and has filed an application according to law, and invites the bureau to approve the patent according to law to maintain the present invention. The legal rights of the applicant.
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TWI589791B (en) * | 2015-10-28 | 2017-07-01 | 財團法人工業技術研究院 | Hydrostatic bearing monitoring system and method thereof |
TWM552594U (en) * | 2017-07-04 | 2017-12-01 | Buffalo Machinery Company Ltd | Bearing monitoring device |
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CN100430706C (en) * | 2003-09-24 | 2008-11-05 | Skf股份公司 | Method and sensor arrangement for load measurement on rolling element bearing based on model deformation |
TWI589791B (en) * | 2015-10-28 | 2017-07-01 | 財團法人工業技術研究院 | Hydrostatic bearing monitoring system and method thereof |
TWM552594U (en) * | 2017-07-04 | 2017-12-01 | Buffalo Machinery Company Ltd | Bearing monitoring device |
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