TWI624380B - Printhead,print bar,and print cartridge including molded die slivers with exposed front and back surfaces - Google Patents

Printhead,print bar,and print cartridge including molded die slivers with exposed front and back surfaces Download PDF

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TWI624380B
TWI624380B TW103144309A TW103144309A TWI624380B TW I624380 B TWI624380 B TW I624380B TW 103144309 A TW103144309 A TW 103144309A TW 103144309 A TW103144309 A TW 103144309A TW I624380 B TWI624380 B TW I624380B
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die
fluid
molded
strip
molded article
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TW103144309A
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TW201536571A (en
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清華 陳
麥可W 庫米比
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惠普發展公司有限責任合夥企業
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Priority claimed from PCT/US2014/030945 external-priority patent/WO2014153305A1/en
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Abstract

在一示範實作中,一種列印頭包括一晶粒條片,其模製於一模製品中。該晶粒條片包括一前表面暴露於該模製品外而且與該模製品齊平以分配流體,以及一後表面暴露於該模製品外而且與該模製品齊平以接收流體。該晶粒條片的數個邊緣與該模製品接觸以在該晶粒條片與該模製品之間形成一接合部。 In an exemplary implementation, a printhead includes a die strip molded into a molded article. The die strip includes a front surface exposed to the mold and flush with the molded article to dispense fluid, and a rear surface exposed to the mold and flush with the molded article to receive fluid. A plurality of edges of the die strip contact the molded article to form a joint between the die strip and the molded article.

Description

包括具暴露前與後表面之模製晶粒條片的列印頭、列印條及列印卡匣 Includes print heads, print strips, and print cartridges with molded die strips that expose the front and back surfaces

本發明係有關於具有經暴露的前與後表面之模製晶粒條片。 The present invention is directed to molded grain strips having exposed front and back surfaces.

噴墨筆及列印條可包括一或更多列印頭晶粒,各有多個流體注射元件在矽基板的表面上。流體通常通過在基板中形成於相反基板表面之間的一或更多流體輸送狹縫流到注射元件。儘管此類狹縫有效地輸送流體到流體注射元件,仍有一些與彼等之使用有關的缺點。以成本觀點而言,例如,流體輸送狹縫佔用有價值的矽可用面積以及大幅增加狹縫加工成本。通過縮減晶粒尺寸可部份達成減少列印頭晶粒成本。不過,較小晶粒尺寸導致矽基板中有較緊的狹縫間距及/或狹縫寬度,這額外增加與較小晶粒整合於噴墨筆有關的總成成本。此外,移除基板的材料以形成墨水輸送狹縫使列印頭晶粒的結構變弱。因此,當單一列印頭晶粒有多個狹縫(例如,為了改善單色列印頭晶粒的印刷品質及速度,或提供多色列印頭晶粒的不同顏色),列印 頭晶粒隨著每個狹縫的增加而更加脆弱。 The inkjet pen and print strip can include one or more printhead dies each having a plurality of fluid injection elements on the surface of the ruthenium substrate. The fluid typically flows to the injection element through one or more fluid delivery slits formed in the substrate between opposing substrate surfaces. While such slits effectively deliver fluid to fluid injection components, there are still some disadvantages associated with their use. From a cost perspective, for example, fluid delivery slits occupy valuable 矽 available area and significantly increase slit processing costs. Partial reduction in the cost of the print head die can be achieved by reducing the grain size. However, the smaller grain size results in tighter slit pitches and/or slit widths in the tantalum substrate, which additionally increases the cost of assembly associated with the integration of smaller grains into the inkjet pen. Further, removing the material of the substrate to form an ink delivery slit weakens the structure of the print head die. Thus, when a single printhead die has multiple slits (eg, to improve the print quality and speed of the monochrome printhead die, or to provide different colors for the multicolor printhead die), print The head grains are more fragile as each slit increases.

依據本發明之一實施例,係特地提出一種列印頭,其係包括:模製於一模製品中之一晶粒條片,該晶粒條片包括:一前表面,其暴露於該模製品外而且與該模製品齊平以分配流體;一後表面,其暴露於該模製品外而且與該模製品齊平以接收流體;以及,數個邊緣,其與該模製品接觸以在該晶粒條片與該模製品之間形成一接合部。 According to an embodiment of the present invention, a printing head is specifically provided, comprising: a die strip molded in a molded article, the die strip comprising: a front surface exposed to the mold An outer portion of the article and flush with the molded article to dispense a fluid; a rear surface exposed to the outside of the molded article and flush with the molded article to receive a fluid; and a plurality of edges that are in contact with the molded article to A joint is formed between the die strip and the molded article.

100‧‧‧模製列印頭晶粒/列印頭晶粒/模製列印頭/晶粒/列印頭 100‧‧‧Molded head die/print head die/molded print head/die/print head

102‧‧‧晶粒條片/條片基板 102‧‧‧Met strip/strip substrate

104‧‧‧模製品材料/模製品/成型體 104‧‧‧Molded material/molded article/molded body

106‧‧‧後表面 106‧‧‧Back surface

108‧‧‧前表面 108‧‧‧ front surface

110‧‧‧矽晶粒基板/基板/矽基板/塊矽基板/晶粒條片基板 110‧‧‧矽Crystal substrate/substrate/矽 substrate/block substrate/die strip substrate

112‧‧‧流體進給孔 112‧‧‧Fluid feed hole

114‧‧‧第一基板表面 114‧‧‧First substrate surface

116‧‧‧第二基板表面/第二表面 116‧‧‧Second substrate surface/second surface

118‧‧‧射流架構層/射流層/層 118‧‧‧Blowing architecture layer/jet layer/layer

120‧‧‧注射室/腔室 120‧‧Injection chamber/chamber

122‧‧‧對應流孔/流孔/墨水注射流孔 122‧‧‧ Corresponding orifice/flow orifice/ink injection orifice

124‧‧‧焊墊 124‧‧‧ solder pads

126、704‧‧‧邊緣 126, 704‧‧‧ edge

300‧‧‧載體 300‧‧‧ Carrier

302‧‧‧熱剝離膠帶/膠帶/熱膠帶 302‧‧‧Hot peeling tape/tape/hot tape

304‧‧‧塑封蓋 304‧‧‧plastic cover

306‧‧‧薄矽帽蓋 306‧‧‧small cap

400‧‧‧接合強化形貌體/形貌體 400‧‧‧Joining enhanced morphological/morphological

402‧‧‧錐形邊緣/錐形基板邊緣 402‧‧‧Cone edge/conical substrate edge

404‧‧‧模製唇部 404‧‧‧Molded lips

500、600、700‧‧‧接合強化形貌體 500, 600, 700‧‧‧ Bonded Strengthened Morphology

502‧‧‧向外錐形邊緣/錐形基板邊緣/錐形邊緣 502‧‧‧Outward tapered edge / tapered substrate edge / tapered edge

504‧‧‧向內錐形邊緣/錐形基板邊緣/錐形邊緣 504‧‧‧Inward tapered edge / tapered substrate edge / tapered edge

506‧‧‧上模製唇部區/模製唇部區 506‧‧‧Upper molded lip area/molded lip area

508‧‧‧下模製唇部區/模製唇部區 508‧‧‧Molded lip area/molded lip area

602‧‧‧帶凹口邊緣/帶凹口基板邊緣 602‧‧‧With notched edge/with notched substrate edge

604‧‧‧模製帶凹口區域 604‧‧‧Molded notched area

702‧‧‧錐形邊緣/邊緣 702‧‧‧Conical edge/edge

706‧‧‧模製唇部區 706‧‧‧Molded lip area

800、924‧‧‧列印頭總成 800, 924‧‧‧ print head assembly

802‧‧‧印刷電路板(PCB) 802‧‧‧ Printed Circuit Board (PCB)

804‧‧‧窗口 804‧‧‧ window

900、1200‧‧‧噴墨列印裝置/噴墨印表機/列表機 900, 1200‧‧‧Inkjet printing device / inkjet printer / list machine

902‧‧‧列印卡匣/卡匣 902‧‧ Print Card/Card

904‧‧‧滑架 904‧‧‧Carriage

906‧‧‧印刷媒體/媒體 906‧‧‧Printing media/media

908‧‧‧流體隔室/隔室 908‧‧‧Fluid compartment/compartment

910‧‧‧外部供應器/墨水供應器 910‧‧‧External supply/ink supply

911、1214‧‧‧歧管 911, 1214‧‧‧Management

912‧‧‧媒體傳送總成 912‧‧‧Media delivery assembly

913‧‧‧晶粒載體 913‧‧‧ grain carrier

914‧‧‧控制器 914‧‧‧ Controller

915‧‧‧對應孔洞 915‧‧‧ corresponding holes

916‧‧‧卡匣殼體/殼體 916‧‧‧Carshell housing/housing

917‧‧‧低輪廓保護罩 917‧‧‧Low profile protection cover

918‧‧‧墨水埠口 918‧‧‧Ink mouth

920‧‧‧電觸點/觸點 920‧‧‧Electrical contacts/contacts

922‧‧‧撓性電路 922‧‧‧Flexible circuit

1202‧‧‧列印條 1202‧‧‧Printing strips

1204‧‧‧印刷媒體 1204‧‧‧Print media

1206‧‧‧流量調節器 1206‧‧‧Flow Regulator

1208‧‧‧媒體傳送機構 1208‧‧‧Media transmission agency

1210‧‧‧印刷流體供應器/供應器 1210‧‧‧Printing fluid supply/supplier

1212‧‧‧列表機控制器/控制器 1212‧‧‧Listing machine controller/controller

1300‧‧‧模製列印條/列印條 1300‧‧‧Molded print/print strips

此時參考附圖描述數個實施例。 Several embodiments are now described with reference to the drawings.

圖1的透視圖圖示適用於流體注射裝置的減薄模製列印頭晶粒實施例;圖2為示範列印頭晶粒沿著圖1之直線A-A繪出的橫截面;圖3圖示用於製成及減薄模製列印頭晶粒之示範方法的數個基本步驟;圖4至圖7的模製列印頭晶粒實施例有數個埋藏晶粒條片包含不同的接合強化形貌體實施例;圖8圖示有數個附著模製列印頭晶粒的示範列印頭總成;圖9圖示示範噴墨印表機的方塊圖,其中示範列 印卡匣包含有一或更多減薄模製列印頭晶粒的列印頭總成實施例;圖10圖示示範列印卡匣的透視圖;圖11圖示示範列印卡匣的透視圖;圖12圖示示範噴墨印表機的方塊圖,其中媒體寬列印條實現示範減薄模製列印頭晶粒;圖13圖示有多個減薄模製列印頭晶粒之示範模製列印條的透視圖。 1 is a perspective view of a thinned die head die embodiment suitable for use in a fluid injection device; FIG. 2 is a cross section of the exemplary print head die taken along line AA of FIG. 1; Several basic steps are shown for an exemplary method of making and thinning a die of a printhead; the embodiment of the diehead die of Figures 4 through 7 has a plurality of buried die strips comprising different bonds Reinforced topography embodiment; Figure 8 illustrates an exemplary printhead assembly with a number of die-printed printhead dies; Figure 9 illustrates a block diagram of an exemplary inkjet printer with exemplary columns The print cartridge includes one or more print head assembly embodiments for thinning the printhead die; FIG. 10 illustrates a perspective view of an exemplary print cartridge; and FIG. 11 illustrates a perspective view of the exemplary print cartridge Figure 12 is a block diagram of an exemplary ink jet printer in which a media wide print strip achieves an exemplary thinned print head die; Figure 13 illustrates a plurality of thinned print head die A perspective view of an exemplary molded printing strip.

附圖中,類似但不一定相同的元件用相同的元件符號表示。 In the figures, similar, but not necessarily identical elements are denoted by the same element symbols.

過去已通過縮減晶粒尺寸及降低晶圓成本達成減少噴墨列印頭晶粒的成本。晶粒尺寸大幅取決於經形成穿過矽基板之流體輸送狹縫的間距,該等狹縫從在晶粒之一面上的貯器輸送墨水到在晶粒另一面上的流體注射元件。因此,用來縮減晶粒尺寸的先前方法大部份已包括通過矽開槽法(silicon slotting process)來減少狹縫間距及大小,可包括,例如,雷射機械加工法,異向性濕蝕刻法,乾蝕刻法,彼等之組合,諸如此類。可惜,矽開槽法本身增加列印頭晶粒的成本相當多。此外,當晶粒尺寸減少時,與較小晶粒整合於噴墨筆或列印條有關的成本及複雜度開始超過較小晶粒可省下的效益。此外,當晶粒尺寸減少,移除晶粒材料以形成墨水輸送狹縫對於晶粒強度有遞增的負面影響,這可能增加晶粒故障率。 In the past, the cost of inkjet printhead dies has been reduced by reducing die size and reducing wafer cost. The grain size is substantially dependent on the spacing of the fluid transport slits formed through the tantalum substrate, which transport ink from the reservoir on one side of the die to the fluid injection element on the other side of the die. Therefore, most of the prior methods for reducing the grain size have included reducing the slit pitch and size by a silicon slotting process, which may include, for example, laser machining, anisotropic wet etching. Method, dry etching, combinations of these, and the like. Unfortunately, the cost of the squeezing method itself increases the cost of the print head die. In addition, as the grain size is reduced, the cost and complexity associated with integrating smaller die into an inkjet pen or print strip begins to outweigh the benefits of smaller die. In addition, as the grain size decreases, the removal of the grain material to form an ink delivery slit has an incremental negative impact on grain strength, which may increase the grain failure rate.

模製流體流動結構的最近開發,包括模製噴墨列印頭及模製噴墨列印條,已廢除在晶粒基板中使用流體輸送狹縫。模製流體流動結構及方法用以製作此類結構的實施例揭示於在2013年6月17日申請之國際專利申請案第PCT/US2013/046065號,標題為Printhead Die,以及在2013年3月20日申請之第PCT/US2013/033046號,標題為Molding A Fluid Flow Structure,兩者全部內容併入本文作為參考資料。 Recent developments in molded fluid flow structures, including molded ink jet print heads and molded ink jet print strips, have abolished the use of fluid transport slits in die substrates. An example of a molded fluid flow structure and method for making such a structure is disclosed in International Patent Application No. PCT/US2013/046065, filed on Jun. 17, 2013, entitled Printhead Die, and in March 2013. PCT/US2013/033046, filed on Jun. 20, entitled,,,,,,,,,,,,,,,,,,,,

這些模製流體流動結構(例如,模製噴墨列印頭)致能使用極小的列印頭晶粒「條片」。晶粒條片包括薄矽,玻璃或其他基板(亦即,厚約650皮米或更小)以及長寬比(L/W)至少等於3。模製流體流動結構,例如模製噴墨列印頭,沒有經形成穿過晶粒條片基板的流體狹縫。反而,各個晶粒條片被模製於一單體成型體(monolithic molded body)中,其透過在晶粒條片後表面形成進入模製品的流體通道來提供射流扇出。因此,模製列印頭結構避免與先前晶粒開槽法及使噴墨筆及列印條歧管形貌體進入帶狹縫晶粒之相關總成有關的顯著成本。 These molded fluid flow structures (e.g., molded inkjet printheads) enable the use of very small printhead die "strips". The grain strips comprise a thin crucible, glass or other substrate (i.e., about 650 picometers or less) and an aspect ratio (L/W) of at least three. Molded fluid flow structures, such as molded ink jet printheads, are not formed through fluid slits through the die strip substrate. Instead, each of the die strips is molded into a monolithic molded body that provides a jet fan-out by forming a fluid passage into the molded article at the rear surface of the die strip. Thus, the molded printhead structure avoids significant costs associated with previous die grooving methods and associated assemblies for inkjet pen and printer strip manifolds entering the slotted die.

在先前模製噴墨列印頭設計中,形成於成型體中的流體通道致能印刷流體流到各個晶粒條片的後表面。經形成穿過晶粒條片從後表面到前表面的流體/墨水進給孔(ink feed hole,簡稱IFH)致能流體流動穿過條片到在前表面上的流體液滴注射室,它在此通過噴嘴由模製列印頭射出。用於形成進入成型體之流體通道以及進入晶粒條片之 墨水進給孔的方法,相較於與先前列印頭設計關連之晶粒開槽及組裝法,其成本及複雜度小很多。不過,這些方法仍有附加成本及難題。例如,在一製程中,切割鋸用來潛入切割穿過成型體以在模製列印頭晶粒中形成流體通道,如在2013年6月27日申請之國際專利申請案第PCT/US2013/048214號所述,標題為Molded Fluid Flow Structure with Saw Cut Channel,其全部內容併入本文作為參考資料。在其他實施例中,通過壓縮模造法及轉移模造法可形成該等流體通道於成型體中,例如各自描述於以下文獻者:在2013年7月29日申請之國際專利申請案第PCT/US2013/052512號,標題為Compression Molded Fluid Channel,以及在2013年7月29日申請之第PCT/US2013/052505號,標題為Transfer Molded Fluid Flow Structure,兩者全部內容併入本文作為參考資料。因此,儘管有許多方法可用來在成型體中形成流體通道,各個對於衡量製造模製噴墨列印頭的成本及複雜度都有貢獻。 In previous molded inkjet printhead designs, fluid channels formed in the shaped body enabled the printing fluid to flow to the back surface of each of the die strips. An ink/ink feed hole (IFH) formed through the die strip from the back surface to the front surface enables fluid to flow through the strip to the fluid droplet injection chamber on the front surface, which Here, the print head is ejected through the nozzle. Used to form a fluid passage into the molded body and into the grain strip The method of ink feed holes is much less costly and complicated than the die grooving and assembly methods associated with previous print head designs. However, these methods still have additional costs and problems. For example, in a process, a dicing saw is used to sneak into a shaped body to form a fluid passage in a molded printhead die, as in International Patent Application No. PCT/US2013/ filed on Jun. 27, 2013. The title is Molded Fluid Flow Structure with Saw Cut Channel, which is incorporated herein by reference. In other embodiments, the fluid passages may be formed in the molded body by a compression molding method and a transfer molding method, for example, each of which is described in the following: International Patent Application No. PCT/US2013 filed on Jul. 29, 2013 U.S. Patent Application Serial No. PCT/US2013/052505, the entire disclosure of which is incorporated herein by reference. Thus, while there are many ways to form fluid passages in a shaped body, each contributes to measuring the cost and complexity of manufacturing a molded inkjet printhead.

為了完成進一步降低模製噴墨列印頭的成本及複雜度,描述於本文的實施例包括含有埋入成型體之一或更多晶粒條片的「減薄」模製列印頭晶粒。該模製列印頭晶粒從背面減薄或磨薄以移除成型體在模製列印頭晶粒之後表面的部份。由於模製列印頭晶粒逐步減薄到埋入模製品之晶粒條片(或數個晶粒條片)的表面,因此沒有形成進入成型體的流體通道以引導流體到晶粒條片的後表面,如同先前模製噴墨列印頭設計地。反而,各個晶粒條片的前、 後表面皆與有晶粒條片埋入於其中的模製品材料齊平。以此方式減薄模製列印頭晶粒打開先前在各個晶粒條片從後表面形成的流體/墨水進給孔(簡稱IFH)以致能流體從晶粒條片後表面流到在晶粒條片前表面上的流體注射室。 In order to accomplish the further reduction in cost and complexity of the molded inkjet printhead, the embodiments described herein include "thinned" molded printhead dies comprising one or more die strips embedded in the shaped body. . The molded print head die is thinned or thinned from the back side to remove portions of the surface of the molded body after molding the die of the print head. Since the molding die grain is gradually thinned to the surface of the die strip (or a plurality of die strips) embedded in the molded article, no fluid passage into the molded body is formed to guide the fluid to the die strip The back surface is designed as previously molded inkjet print heads. Instead, the front of each die strip, The back surface is flush with the molding material in which the grain strips are embedded. Thinning the molding head die in this manner opens the fluid/ink feed holes (IFH) previously formed on the back surface of each of the die strips to enable fluid to flow from the back surface of the die strip to the die A fluid injection chamber on the front surface of the strip.

在一實施例中,一列印頭包括模製於一模製品之一晶粒條片。該晶粒條片包括前表面,其係與模製品齊平以及暴露於該模製品外以分配流體。該晶粒條片也包括與模製品齊平且暴露於模製品外以接收流體的後表面。該晶粒條片有與該模製品接觸的數個邊緣以在該晶粒條片與該模製品之間形成一接合部(joint)。 In one embodiment, a row of printheads includes a die strip molded into a molded article. The die strip includes a front surface that is flush with the molded article and exposed to the molded article to dispense fluid. The die strips also include a rear surface that is flush with the molded article and exposed to the outside of the molded article to receive the fluid. The die strip has a plurality of edges in contact with the molded article to form a joint between the die strip and the molded article.

在另一實施例中,一列印條包括埋入模製品材料的多個減薄模製列印頭晶粒。該等模製列印頭晶粒沿著印刷電路板(PCB)的長度大體端對端地(end to end)配置成一交錯組態,其中該等晶粒中之一或更多重疊該等晶粒中之一或更多與其毗鄰者。各個模製列印頭晶粒包括一晶粒條片具有暴露於該模製品外之一前表面與一後表面。該後表面是要接收流體以及前表面是要分配通過晶粒條片之流體進給孔從後表面流到前表面的流體。 In another embodiment, a row of print strips includes a plurality of thinned molded print head dies embedded in a molding material. The molded print head dies are arranged in a staggered configuration substantially end to end along the length of the printed circuit board (PCB), wherein one or more of the dies overlap the crystal One or more of the granules are adjacent to it. Each of the molded print head dies includes a die strip having a front surface and a rear surface exposed to the outside of the molded article. The rear surface is a fluid to receive fluid and the front surface is to be dispensed through the fluid feed holes of the die strips from the back surface to the front surface.

在另一實施例中,一列印卡匣包括能包含一印刷流體的一殼體,以及一減薄模製列印頭晶粒。該減薄模製列印頭晶粒包括埋在一模製品中的一晶粒條片。該晶粒條片有數個邊緣與該模製品形成一接合部,以及暴露於該模製品外之前表面及後表面。該後表面是要接收流體以及前表面是要分配將會通過晶粒條片之流體進給孔從後表面流 到前表面的流體。 In another embodiment, a stack of print cartridges includes a housing that can include a printing fluid, and a thinned molded printhead die. The thinned molded print head die comprises a die strip embedded in a molded article. The die strip has a plurality of edges forming a joint with the molded article, and is exposed to the front surface and the rear surface of the molded article. The rear surface is to receive fluid and the front surface is to be dispensed from the back surface of the fluid feed hole that will pass through the die strip The fluid to the front surface.

如使用於本文的「列印頭」及「列印頭晶粒」係指噴墨印表機或其他噴墨型分配器中可從一或更多噴嘴開口分配出流體的部份。一列印頭包括一或更多列印頭晶粒,以及一列印頭晶粒包括一或更多晶粒條片。晶粒「條片」係指厚約200皮米和長寬比(L/W)至少等於3的薄基板(例如,矽或玻璃)。列印頭及列印頭晶粒不受限用於分配墨水及其他印刷流體,反而也可分配用於印刷以外之用途的其他流體。 As used herein, "printing head" and "printing head die" refer to the portion of an ink jet printer or other ink jet type dispenser that can dispense fluid from one or more nozzle openings. A row of printheads includes one or more printhead dies, and a row of printhead dies includes one or more die strips. A "strip" of a grain refers to a thin substrate (eg, tantalum or glass) having a thickness of about 200 picometers and an aspect ratio (L/W) of at least three. The print head and print head die are not limited for dispensing ink and other printing fluids, but may instead dispense other fluids for purposes other than printing.

圖1的透視圖圖示「減薄的」模製列印頭晶粒100實施例適合使用於流體注射裝置,例如噴墨印表機的列印卡匣及/或列印條。此外,圖1圖示一或更多列印頭晶粒100可如何配置於列印頭總成800內。以下用圖8更詳細地描述示範列印頭總成800。圖2為示範列印頭總成800沿著圖1之直線A-A繪出的橫截面圖。 The perspective view of Figure 1 illustrates a "thinned" molded printhead die 100 embodiment suitable for use in a fluid injection device, such as a print cartridge and/or print strip of an ink jet printer. In addition, FIG. 1 illustrates how one or more of the printhead dies 100 can be disposed within the printhead assembly 800. The exemplary printhead assembly 800 is described in greater detail below using FIG. 2 is a cross-sectional view of the exemplary printhead assembly 800 taken along line A-A of FIG.

大體參考圖1及圖2,圖1的示範模製列印頭晶粒100包括4個晶粒條片102。模製列印頭晶粒100已被「減薄」成模製品材料104(在本文可與模製品104或成型體104互換),含有環氧樹脂模造物(epoxy mold compound)、塑料或其他合適可模造材料,已被磨薄到各個晶粒條片102的後表面106。因此,各個晶粒條片102的後表面106與模製品材料104齊平以及暴露於模製品材料104外(亦即,不被覆蓋)。 Referring generally to Figures 1 and 2, the exemplary molded printhead die 100 of Figure 1 includes four die strips 102. The molded printhead die 100 has been "thinned" into a molded article material 104 (which may be interchanged herein with the molded article 104 or molded article 104), containing an epoxy mold compound, plastic or other suitable material. The moldable material has been thinned to the back surface 106 of each of the die strips 102. Thus, the back surface 106 of each of the die strips 102 is flush with the molded article material 104 and exposed to the outside of the molded article material 104 (i.e., not covered).

各個晶粒條片102有與其後表面106相反的前表 面108。透過將晶粒條片102模製於模製品材料104中的一模造製程,前表面108與模製品材料104齊平而且仍然暴露於其外,這使得各個晶粒條片102(及列印頭晶粒100)能分配流體。各個晶粒條片102包括含有薄矽條片的矽晶粒基板110,該薄矽條片包括流體進給孔112經乾蝕刻或以其他方式形成於其中以致能流體從第一基板表面114到第二基板表面116流動通過基板110。除了移除晶粒條片102後表面106的模製品材料104以外,用來減薄模製列印頭晶粒100的方法(例如,研磨法)也可移除掩蓋流體進給孔112的薄矽帽蓋層(未圖示)使得在後表面106的流體能進入以及流動通過流體進給孔112到前表面108。 Each of the die strips 102 has a front table opposite the back surface 106 thereof Face 108. Through a molding process in which the die strips 102 are molded into the molded article material 104, the front surface 108 is flush with the molded article material 104 and is still exposed thereto, which causes the individual die strips 102 (and the print heads) The die 100) is capable of dispensing a fluid. Each of the die strips 102 includes a tantalum die substrate 110 comprising a thin tantalum strip comprising a fluid feed aperture 112 that is dry etched or otherwise formed therein to enable fluid to pass from the first substrate surface 114 to The second substrate surface 116 flows through the substrate 110. In addition to removing the molding material 104 of the back surface 106 of the die strip 102, the method for thinning the stamping die 100 (e.g., grinding) can also remove the thin masking fluid feed holes 112. A lidcap layer (not shown) allows fluid at the back surface 106 to enter and flow through the fluid feed aperture 112 to the front surface 108.

形成於第二基板表面116上的是界定射流架構的一或更多層118以利模製列印頭晶粒100之流體液滴的注射。由層(或數個)118界定的射流架構大體包括注射室120,它有數個對應流孔(orifice)122,一歧管(未圖示),及其他射流通道和結構。該(等)層118可包括,例如,形成於基板110上的腔室層(chamber layer),以及在腔室層上面個別形成的流孔層。在其他實施例中,該(等)層118可包括組合該腔室與流孔層的單一單體層。該射流架構層118通常由SU8環氧樹脂或一些其他聚亞醯胺材料形成,而且可用各種方法形成,包括旋塗法與積層法。 Formed on the second substrate surface 116 is one or more layers 118 defining a fluidic architecture to facilitate injection of fluid droplets of the molding head die 100. The fluidic architecture defined by layers (or plurality) 118 generally includes an injection chamber 120 having a plurality of corresponding orifices 122, a manifold (not shown), and other jet channels and structures. The (iso) layer 118 can include, for example, a chamber layer formed on the substrate 110, and a via layer formed separately over the chamber layer. In other embodiments, the (etc.) layer 118 can comprise a single unitary layer that combines the chamber with the orifice layer. The fluidic architecture layer 118 is typically formed from SU8 epoxy or some other polyamine material and can be formed by a variety of methods, including spin coating and lamination.

除了矽基板110上由該(等)層118界定的射流架構以外,各個晶粒條片102包括用薄膜層及元件(未圖示)形成於基板110上的積體電路。例如,與各個注射室120 對應的是形成於基板110之第二表面116上的注射元件,例如熱電阻器注射元件或壓電注射元件。該等注射元件經啟動以從腔室120通過流孔122注射出墨水或其他印刷流體的液滴或串流。因此,各個腔室120及對應流孔122和注射元件大體構成形成於基板110之第二表面116上的流體液滴產生器(fluid drop generator)。各個晶粒條片102上的注射元件直接或通過基板110連接至晶粒條片102上的焊墊124或其他適當電端子。一般而言,線接點(wire bond)使晶粒條片焊墊124連接至印刷電路板,以及印刷電路板通過撓性電路922(圖10、圖11)的訊號跡線連接至噴墨列印裝置(圖9,900;圖12,1200)上的控制器(圖9,914;圖12,1212),如在2013年11月5日申請之國際專利申請案第CT/US2013/068529號所述,標題為Molded Printhead,其全部內容併入本文作為參考資料。 In addition to the jet architecture defined by the (iso) layer 118 on the germanium substrate 110, each die strip 102 includes an integrated circuit formed on the substrate 110 using a thin film layer and components (not shown). For example, with each injection chamber 120 Corresponding to is an injection element formed on the second surface 116 of the substrate 110, such as a thermal resistor injection element or a piezoelectric injection element. The injection elements are activated to inject droplets or streams of ink or other printing fluid from the chamber 120 through the orifices 122. Thus, each of the chambers 120 and corresponding orifices 122 and injection elements generally form a fluid drop generator formed on the second surface 116 of the substrate 110. The injection elements on each of the die strips 102 are connected to the pads 124 or other suitable electrical terminals on the die strips 102 either directly or through the substrate 110. In general, a wire bond connects the die strip pads 124 to the printed circuit board, and the printed circuit board is connected to the inkjet columns via the signal traces of the flex circuit 922 (FIGS. 10, 11). The controller on the printing device (Fig. 9, 900; Fig. 12, 1200) (Fig. 9, 914; Fig. 12, 1212), as of the international patent application No. CT/US2013/068529 filed on November 5, 2013 The title is Molded Printhead, the entire contents of which are incorporated herein by reference.

圖3圖示用於製成及減薄模製列印頭晶粒100的數個基本步驟。如圖3所示,在部份「A」,晶粒條片102用熱剝離膠帶(thermal release tape)302附接至載體300。晶粒條片102放在膠帶302上,其中前表面108經定位成其係朝載體300向下以及貼著膠帶302。前表面108與膠帶302的接觸密封焊墊124四周的區域以及阻止環氧樹脂模造物材料在後續模製期間進入。 FIG. 3 illustrates several basic steps for making and thinning the stamping die 100. As shown in FIG. 3, at portion "A", the die strip 102 is attached to the carrier 300 with a thermal release tape 302. The die strips 102 are placed on the tape 302 with the front surface 108 positioned such that it is directed downward toward the carrier 300 and against the tape 302. Contact of the front surface 108 with the tape 302 seals the area around the bond pad 124 and prevents the epoxy molding material from entering during subsequent molding.

大體在圖3圖示於部份「B」的模造法可為壓縮模造法,例如,或另一適當模造法,例如轉移模造法。在壓縮模造法,預熱模製品材料104,例如塑料或環氧樹脂模 造物,而且與晶粒條片102一起放入下模(bottom mold)(未特別圖示)。然後,降低塑封蓋(mold top)304,及加熱加壓迫使模製品材料104進入模子內的所有區域(除了在被膠帶302密封之焊墊124四周的區域外)使得它囊封晶粒條片102。在壓縮模製期間,薄矽帽蓋306阻止模製品材料104進入條片基板102的流體進給孔112。 The molding method generally illustrated in Fig. 3 in the portion "B" may be a compression molding method, for example, or another suitable molding method such as transfer molding. In compression molding, preheating the molding material 104, such as a plastic or epoxy mold The creation is placed in a bottom mold (not specifically shown) together with the die strips 102. Then, the mold top 304 is lowered, and the heat and pressure forces the molding material 104 into all areas of the mold (except in the area around the pad 124 sealed by the tape 302) so that it encapsulates the grain strips. 102. The thin cap 306 prevents the molding material 104 from entering the fluid feed hole 112 of the strip substrate 102 during compression molding.

在壓縮模造法後,由熱膠帶302剝下載體300,以及移除模製列印頭晶粒100的膠帶,如圖3的部份「C」所示。如圖3的部份「D」所示,模製列印頭晶粒100經減薄成可移除覆蓋晶粒條片102後表面106的模製品材料,以及覆蓋流體進給孔112的薄矽帽蓋306。減薄晶粒100可包括用鑽石磨輪、ELID(在線電解修整)磨輪或另一合適研磨法,磨薄模製品材料104及薄矽帽蓋306。模製列印頭晶粒100的減薄留下露出的後表面106(亦即,不被模製品材料104覆蓋)而且與模製品材料104齊平,而且它打開流體進給孔112使得流體可從後表面106至前表面108流動通過晶粒條片102。 After the compression molding process, the carrier 300 is peeled off by the thermal tape 302, and the tape of the molding die 100 is removed, as shown in part "C" of FIG. As shown in part "D" of FIG. 3, the molded print head die 100 is thinned to a mold material that can cover the back surface 106 of the die strip 102, and a thin cover fluid feed hole 112. Cap 306. Thinning the die 100 may include grinding the molded article material 104 and the thin cap 306 with a diamond wheel, an ELID (on-line electrolytic dressing) grinding wheel, or another suitable grinding method. The thinning of the molded printhead die 100 leaves the exposed back surface 106 (i.e., not covered by the molding material 104) and is flush with the molding material 104, and it opens the fluid feed aperture 112 so that the fluid can Flow from the back surface 106 to the front surface 108 through the die strips 102.

該模造法及該減薄法留下埋在模製品材料104內的晶粒條片102使得邊緣126或晶粒條片102的側面包括形成接合部或與模製品104連接的表面區數量。在一些實施例中,在晶粒條片102與模製品104之間製作更強健的接合部,接合強化形貌體加在晶粒條片102的邊緣126。該接合強化形貌體大體增加晶粒條片102與模製品材料104的表面積接觸量以改善連接以及減少晶粒條片102由 模製品材料104鬆開的可能性。 The molding and the thinning process leaves the die strips 102 embedded within the molded article material 104 such that the sides of the edges 126 or die strips 102 include the number of surface regions that form the joints or are joined to the molded article 104. In some embodiments, a more robust joint is made between the die strip 102 and the molded article 104, which is applied to the edge 126 of the die strip 102. The bond-enhanced topography generally increases the surface area contact of the die strips 102 with the molded article material 104 to improve bonding and reduce the number of die strips 102 The possibility of the molded material 104 being loosened.

圖4至圖7圖示模製列印頭晶粒100的實施例,在此埋藏晶粒條片102包括接合強化形貌體400的實施例。圖示於圖4至圖7的接合強化形貌體400非旨在按比例繪製,而且它們包括可加在晶粒條片102邊緣126的各種實體形貌體實施例以改善晶粒條片102與模製品材料104的連接。因此,提供形貌體400是為了圖解說明,以及實際上可做成不同的形狀而且可比圖4至圖7所示的小或大。 4 through 7 illustrate an embodiment of a molded printhead die 100, in which the buried die strip 102 includes an embodiment of a bonded strengthened topography 400. The bonded strengthened topography 400 illustrated in Figures 4-7 is not intended to be drawn to scale, and they include various solid topography embodiments that may be applied to the edge 126 of the die strip 102 to improve the die strip 102. Connection to the molded article material 104. Thus, the topography 400 is provided for illustration, and may actually be formed in a different shape and may be smaller or larger than that shown in Figures 4-7.

如圖4所示,提供一接合強化形貌體400實施例,在此晶粒條片102之塊矽基板110的邊緣126均為錐形。在圖4中,基板110的錐形邊緣402從第二基板表面116到第一基板表面114向外漸縮(亦即,遠離晶粒條片102)。在模製期間,模製品材料104形成模製唇部404區,在此模製品材料104座落在錐形基板邊緣402上面。模製唇部404與錐形邊緣402有助於在模製品材料104與晶粒條片102之間形成強健接合部。該接合部可形成於晶粒條片102的所有邊緣(亦即,矩形晶粒條片102的4個邊緣126)的周圍,或較少邊緣,例如兩個邊緣。 As shown in FIG. 4, an embodiment of a bonded strengthened topography 400 is provided in which the edges 126 of the bulk substrate 110 of the die strip 102 are tapered. In FIG. 4, the tapered edge 402 of the substrate 110 tapers outwardly from the second substrate surface 116 to the first substrate surface 114 (ie, away from the die strip 102). During molding, the molding material 104 forms a region of the molded lip 404 where the molding material 104 is seated over the tapered substrate edge 402. The molded lip 404 and the tapered edge 402 help to form a strong joint between the molded article material 104 and the die strip 102. The joints may be formed around all edges of the die strips 102 (i.e., the four edges 126 of the rectangular die strips 102), or fewer edges, such as two edges.

如圖5所示,提供另一接合強化形貌體500實施例,在此晶粒條片102之塊矽基板110的邊緣126在兩個不同的方向漸縮。在圖5中,基板110的邊緣126包括從第二基板表面116向第一基板表面114漸縮的向外錐形邊緣502(亦即,在此邊緣係遠離晶粒條片102地漸縮),以及 從第一基板表面114往第二基板表面116反向朝晶粒條片102漸縮的向內錐形邊緣504。在模製期間,模製品材料104形成上、下模製唇部區506、508,在此模製品材料104係環繞錐形基板邊緣502、504。模製唇部區506、508與錐形邊緣502、504有助於在模製品材料104與晶粒條片102之間形成強健接合部。該接合部可形成於晶粒條片102之所有邊緣(亦即,矩形晶粒條片102的4個邊緣)的周圍,或較少邊緣,例如兩個邊緣。 As shown in FIG. 5, another embodiment of a bonded reinforcement topography 500 is provided in which the edge 126 of the bulk substrate 110 of the die strip 102 tapers in two different directions. In FIG. 5, the edge 126 of the substrate 110 includes an outwardly tapered edge 502 that tapers from the second substrate surface 116 toward the first substrate surface 114 (ie, the edge is tapered away from the die strip 102). ,as well as From the first substrate surface 114 to the second substrate surface 116, the inwardly tapered edge 504 is tapered toward the die strip 102. During molding, the molding material 104 forms upper and lower molding lip regions 506, 508 where the molding material 104 surrounds the tapered substrate edges 502, 504. The molded lip regions 506, 508 and tapered edges 502, 504 help to form a strong joint between the molded article material 104 and the die strip 102. The joints may be formed around all edges of the die strips 102 (i.e., the four edges of the rectangular die strips 102), or fewer edges, such as two edges.

如圖6所示,提供另一接合強化形貌體600實施例,在此晶粒條片102之塊矽基板110的邊緣126有凹口。在圖6中,基板110的帶凹口邊緣602都向內凹(亦即,朝向晶粒條片102),但是在其他實施例中,它們可向外凹(亦即,遠離晶粒條片102)。在模製期間,模製品材料104形成突入或填入基板110之帶凹口邊緣602的模製帶凹口區域604。模製帶凹口區域604與帶凹口基板邊緣602有助於在模製品材料104與晶粒條片102之間形成強健接合部。該接合部可形成於晶粒條片102之所有邊緣(亦即,矩形晶粒條片102的4個邊緣)的周圍,或較少邊緣,例如兩個邊緣。 As shown in FIG. 6, another embodiment of a bonded reinforcement topography 600 is provided in which the edge 126 of the bulk substrate 110 of the die strip 102 has a recess. In Figure 6, the notched edges 602 of the substrate 110 are all concave (i.e., toward the die strips 102), but in other embodiments they may be concave (i.e., away from the die strips). 102). During molding, the molding material 104 forms a molded notched region 604 that projects into or fills the notched edge 602 of the substrate 110. Molded notched region 604 and notched substrate edge 602 help form a strong joint between molded article material 104 and die strip 102. The joints may be formed around all edges of the die strips 102 (i.e., the four edges of the rectangular die strips 102), or fewer edges, such as two edges.

如圖7,提供另一接合強化形貌體700實施例,在此晶粒條片102之塊矽基板110的邊緣126呈錐形。在圖7中,基板110的錐形邊緣702從第一基板表面114到第二基板表面116向外漸縮(亦即,遠離晶粒條片102)。這導致晶粒條片基板110稍微比形成該射流架構層118的 SU8寬。因此,在模製期間,模製品材料104環繞基板110的邊緣702及704,而形成模製唇部區706。該模製唇部區706與基板110邊緣702及704有助於在模製品材料104與晶粒條片102之間形成強健接合部。該接合部可形成於晶粒條片102所有邊緣(亦即,矩形晶粒條片102的4個邊緣)的周圍,或較少邊緣,例如兩個邊緣。 As shown in Fig. 7, another embodiment of a bonded strengthened topography 700 is provided in which the edge 126 of the bulk substrate 110 of the die strip 102 is tapered. In FIG. 7, the tapered edge 702 of the substrate 110 tapers outwardly from the first substrate surface 114 to the second substrate surface 116 (ie, away from the die strip 102). This results in the die strip substrate 110 being slightly more than the formation of the fluidic architecture layer 118. SU8 is wide. Thus, during molding, the molding material 104 surrounds the edges 702 and 704 of the substrate 110 to form a molded lip region 706. The molded lip region 706 and the substrate 110 edges 702 and 704 help to form a strong joint between the molded article material 104 and the die strip 102. The joints may be formed around all edges of the die strips 102 (i.e., the four edges of the rectangular die strips 102), or fewer edges, such as two edges.

儘管在此用矽基板110與在晶粒條片102邊緣126的射流層(fluidics layer)118來圖示及描述接合強化形貌體的特定實施例,然而該等形貌體的形狀及組態在此方面不受限。反而,製作在晶粒條片102邊緣126的接合強化形貌體大體可採用許多其他形狀及組態,包括例如,凹槽,切口,凹口,通道,錐體,凹痕,凸塊,彼等之組合,諸如此類。 Although a specific embodiment of the bonded strengthened topography is illustrated and described herein with a germanium substrate 110 and a fluidics layer 118 at the edge 126 of the die strip 102, the shape and configuration of the shaped bodies There is no limit in this respect. Rather, the bond-reinforced topography formed at the edge 126 of the die strip 102 can take many other shapes and configurations, including, for example, grooves, cuts, notches, channels, cones, indentations, bumps, and the like. a combination of the like, and the like.

如圖8所示,一或更多模製列印頭晶粒100可黏接至或以其他方式附著至列印頭總成800。列印頭總成800通常包括附接一或更多模製列印頭晶粒100的印刷電路板(PCB)802。使模製列印頭晶粒100附接至PCB 802的方法包括,例如,使用黏著劑或使用將PCB 802及模製列印頭晶粒100模造成單體結構的附加模造法。在圖8的示範列印頭總成800,4個模製列印頭晶粒100各自位於由PCB 802切出的窗口804內。然後,可進一步使模製列印頭晶粒100及PCB 802附著至晶粒載體(圖9;913)及其他結構元件,例如列印卡匣或列印條的歧管供使用於噴墨列印裝置內。 As shown in FIG. 8, one or more of the molded printhead dies 100 can be bonded or otherwise attached to the printhead assembly 800. The printhead assembly 800 typically includes a printed circuit board (PCB) 802 that attaches one or more molded printhead dies 100. The method of attaching the molded printhead die 100 to the PCB 802 includes, for example, the use of an adhesive or an additional molding method that molds the PCB 802 and the molded printhead die 100 into a single structure. In the exemplary printhead assembly 800 of FIG. 8, the four molded printhead dies 100 are each located within a window 804 cut out by the PCB 802. The molded printhead die 100 and PCB 802 can then be further attached to the die carrier (Fig. 9; 913) and other structural components, such as a manifold for printing a cartridge or a print strip for use in an inkjet column. Printed inside the device.

如上述,減薄的模製列印頭晶粒100適合使用 於,例如,噴墨列印裝置的列印卡匣及/或列印條。圖9的方塊圖圖示噴墨印表機900的實施例,其中列印卡匣902包括含有一或更多減薄的模製列印頭晶粒100的列印頭總成800實施例。在列表機900中,滑架(carriage)904在印刷媒體906上方來回掃描列印卡匣902以按所欲圖案施加墨水至媒體906。列印卡匣902內包括一或更多流體隔室908與列印頭100,列印頭100接受來自外部供應器910的墨水以及提供墨水給模製列印頭晶粒100。在其他實施例中,墨水供應器910可與隔室(或數個)908整合成為自給式列印卡匣902的部件。大體說來,隔室908在卡匣902中的個數與晶粒條片102埋入模製列印頭晶粒100的個數對應,使得各個晶粒條片102可由不同的隔室908供給不同的印刷流體(例如,顏色不同的墨水)。歧管911包括肋條或其他內部路由結構具有耦合至晶粒條片102及/或晶粒載體913之後表面106的對應孔洞915(例如,圖1)以將來自各個隔室908的印刷流體路徑配送到在模製列印頭晶粒100中的適當晶粒條片102。在列印期間,媒體傳送總成912按所欲圖案使印刷媒體906對於列印卡匣902移動以促進施加墨水至媒體906。控制器914大體包括程式、處理器(或數個),記憶體(或數個),電子電路及其他必要組件以控制列表機900的操作元件。 As described above, the thinned molded print head die 100 is suitable for use. For example, a print cartridge and/or a print strip of an ink jet printing device. The block diagram of FIG. 9 illustrates an embodiment of an inkjet printer 900 in which the print cartridge 902 includes an embodiment of a printhead assembly 800 that includes one or more thinned molded printhead dies 100. In the lister 900, a carriage 904 scans the print cartridge 902 back and forth over the print media 906 to apply ink to the media 906 in the desired pattern. The print cartridge 902 includes one or more fluid compartments 908 and printheads 100 that receive ink from an external supply 910 and provide ink to the molded printhead die 100. In other embodiments, the ink supply 910 can be integrated with the compartment (or plurality) 908 as a component of the self-contained printing cassette 902. In general, the number of compartments 908 in the cassette 902 corresponds to the number of die strips 102 embedded in the molded printhead die 100 such that each die strip 102 can be supplied by a different compartment 908. Different printing fluids (for example, inks of different colors). The manifold 911 includes ribs or other internal routing structures having corresponding holes 915 (e.g., FIG. 1) coupled to the die strip 102 and/or the rear surface 106 of the die carrier 913 to distribute printed fluid paths from the various compartments 908. To the appropriate die strips 102 in the molding die 100. During printing, the media transfer assembly 912 moves the print media 906 to the print cartridge 902 in a desired pattern to facilitate application of ink to the media 906. Controller 914 generally includes a program, a processor (or plurality), a memory (or plurality), electronic circuitry, and other necessary components to control the operating elements of lister 900.

圖10圖示示範列印卡匣902的透視圖。請參考圖9及圖10,列印卡匣902包括由卡匣殼體916支撐的減薄的模製列印頭晶粒100。模製列印頭晶粒100包括埋入模 製品材料104(例如,環氧樹脂模造物)的4個長形晶粒條片102及PCB 802。在圖示實施例中,晶粒條片102經配置成彼等彼此平行地橫過模製列印頭晶粒100的寬度。列印頭晶粒100位於已由PCB 802切出的窗口804內。儘管單一模製列印頭晶粒100的列印卡匣902圖示有4個晶粒條片102,然而仍可能有其他組態,例如具有各有更多或更少晶粒條片102的更多或更少列印頭晶粒100。在晶粒條片102另一端的是被低輪廓保護罩917覆蓋的焊線(未圖示),低輪廓保護罩917包含適當的保護材料,例如環氧樹脂,以及放在保護材料上的平帽蓋。 FIG. 10 illustrates a perspective view of an exemplary print cartridge 902. Referring to FIGS. 9 and 10, the print cartridge 902 includes a thinned molded printhead die 100 supported by a cassette housing 916. The molded print head die 100 includes a buried mold Four elongated die strips 102 and PCB 802 of article material 104 (eg, epoxy molding). In the illustrated embodiment, the die strips 102 are configured to traverse the width of the molded printhead die 100 in parallel with one another. The printhead die 100 is located within a window 804 that has been cut by the PCB 802. Although the print cartridge 902 of the single molded printhead die 100 illustrates four die strips 102, other configurations are possible, such as having more or fewer die strips 102 each. More or less print head die 100. At the other end of the die strip 102 is a bond wire (not shown) that is covered by a low profile protective cover 917 that contains a suitable protective material, such as epoxy, and a flat placed over the protective material. Cap.

列印卡匣902通過墨水埠口918流體連接(fluidically connect)至墨水供應器910,以及通過電觸點920電性連接至控制器914。觸點920形成於附著至殼體916的撓性電路922中。埋在撓性電路922內的訊號跡線(未圖示)使觸點920連接至列印頭晶粒100上的對應觸點(未圖示)。各個晶粒條片102上的墨水注射流孔122(未圖示於圖9及圖10)沿著卡匣殼體916的底部通過撓性電路922的開口暴露。 The print cartridge 902 is fluidically connected to the ink supply 910 through an ink port 918 and electrically coupled to the controller 914 via electrical contacts 920. Contact 920 is formed in flexible circuit 922 that is attached to housing 916. Signal traces (not shown) embedded within flex circuit 922 connect contacts 920 to corresponding contacts (not shown) on printhead die 100. Ink injection orifices 122 (not shown in FIGS. 9 and 10) on each of the die strips 102 are exposed through the opening of the flex circuit 922 along the bottom of the cassette housing 916.

圖11的透視圖圖示適用於列表機900的另一示範列印卡匣902。在此實施例中,列印卡匣902包括列印頭總成924,它有4個減薄的模製列印頭晶粒100及PCB 802埋入模製品材料104以及由卡匣殼體916支撐。各個模製列印頭晶粒100包括4個晶粒條片102以及位於由PCB 802切出的窗口804內。儘管此示範列印卡匣902的列印頭總 成924圖示成有4個減薄的模製列印頭晶粒100,然而仍可能有其他組態,例如具有各有更多或更少晶粒條片102的更多或更少模製列印頭晶粒100。各個模製列印頭100中在晶粒條片102另一端的是被低輪廓保護罩917覆蓋的焊線(未圖示),低輪廓保護罩917包含適當的保護材料,例如環氧樹脂,以及放在保護材料上的平帽蓋。如同圖示於圖10的示範卡匣902,墨水埠口918流體連接卡匣902與墨水供應器910以及電觸點920使卡匣902的列印頭總成924通過埋入撓性電路922的訊號跡線電性連接至控制器914。各個晶粒條片102上的墨水注射流孔122(未圖示於圖11)沿著卡匣殼體916的底部通過撓性電路922的開口暴露。 The perspective view of FIG. 11 illustrates another exemplary print cartridge 902 that is suitable for use with the lister 900. In this embodiment, the print cartridge 902 includes a printhead assembly 924 having four thinned molded printhead dies 100 and a PCB 802 embedded in the molded article material 104 and by the cassette housing 916. support. Each of the molded printhead dies 100 includes four die strips 102 and is located within a window 804 that is cut by the PCB 802. Despite the total print head of this exemplary print cartridge 902 924 is illustrated as having four thinned molded printhead dies 100, although other configurations are possible, such as more or less molding with more or fewer die strips 102, respectively. The head die 100 is printed. At the other end of the die strip 102 in each of the mold print heads 102 is a bond wire (not shown) covered by a low profile protective cover 917, the low profile protective cover 917 comprising a suitable protective material, such as epoxy, And a flat cap placed on the protective material. As with the exemplary cassette 902 illustrated in FIG. 10, the ink port 918 fluidly connects the cassette 902 with the ink supply 910 and the electrical contacts 920 such that the print head assembly 924 of the cassette 902 is embedded in the flex circuit 922. The signal trace is electrically coupled to controller 914. Ink injection orifices 122 (not shown in FIG. 11) on each of the die strips 102 are exposed through the opening of the flex circuit 922 along the bottom of the cassette housing 916.

圖12的方塊圖圖示噴墨印表機1200有實現另一減薄的模製列印頭晶粒100實施例的媒體寬之列印條1202。列表機1200包括跨越印刷媒體1204寬度的列印條1202,與列印條1202關連的流量調節器1206,媒體傳送機構1208,墨水或其他印刷流體供應器1210,以及列表機控制器1212。控制器1212為程式,處理器(或數個)及相關記憶體,以及電子電路及必要組件以控制列表機1200的操作元件。列印條1202包括由減薄的模製列印頭晶粒100組成的配置用於分配印刷流體到一張或連續一卷的紙張或其他印刷媒體1204上。在各個模製列印頭晶粒100內的晶粒條片102由供應器1210通過流徑接收印刷流體進入及通過列印條1202的流量調節器1206及歧管1214。 The block diagram of FIG. 12 illustrates the ink jet printer 1200 having a media wide print strip 1202 that implements another thinned molded printhead die 100 embodiment. The lister 1200 includes a print bar 1202 across the width of the print media 1204, a flow conditioner 1206 associated with the print bar 1202, a media transfer mechanism 1208, an ink or other printing fluid supply 1210, and a lister controller 1212. The controller 1212 is a program, a processor (or several) and associated memory, and electronic circuitry and necessary components to control the operating elements of the lister 1200. The print strip 1202 includes a configuration of thinned molded printhead dies 100 for dispensing printing fluid onto a sheet or continuous roll of paper or other print media 1204. The die strips 102 within each of the molded printhead dies 100 are received by the supply 1210 through the flow path through the flow path into the flow regulators 1206 and manifolds 1214 of the print strips 1202.

圖13的透視圖圖示模製列印條1300具有多個減 薄的模製列印頭晶粒100適用於圖示於圖12的列表機1200。模製列印條1300包括埋入模製品材料104的多個減薄的模製列印頭晶粒100與PCB 802。模製列印頭晶粒100經配置於由PCB 802切出的窗口804內橫過列印條1300縱向成一排地呈交錯組態,其中各個模製列印頭晶粒100係重疊毗鄰的模製列印頭晶粒100。雖然圖示呈交錯組態的10個模製列印頭晶粒100,然而相同或不同的組態可使用更多或更少列印頭晶粒100。各個列印頭晶粒100中在晶粒條片102另一端的是被低輪廓保護罩917覆蓋的焊線(未圖示),低輪廓保護罩917包含適當的保護材料,例如環氧樹脂,以及放在保護材料上的平帽蓋。 Figure 13 is a perspective view showing the molded print strip 1300 having a plurality of subtractions The thin molded printhead die 100 is suitable for use in the lister 1200 of FIG. Molded print strip 1300 includes a plurality of thinned stamped die grains 100 and PCB 802 embedded in molding material 104. The molded print head die 100 is disposed in a staggered configuration in a vertical direction in a row across the print bar 1300 in a window 804 cut out by the PCB 802, wherein each of the molded print head die 100 overlaps the adjacent die. The print head die 100 is formed. Although the ten molded printhead dies 100 are illustrated in a staggered configuration, the same or different configurations may use more or fewer printhead dies 100. At the other end of the die strip 102 in each of the die blanks 102 is a bond wire (not shown) covered by a low profile protective cover 917, the low profile protective cover 917 comprising a suitable protective material, such as epoxy, And a flat cap placed on the protective material.

Claims (15)

一種列印頭,其係包括:模製於一模製品中之一晶粒條片,該晶粒條片包括:一前表面,其暴露於該模製品外且與該模製品齊平以分配流體;一後表面,其暴露於該模製品外且與該模製品齊平以接收流體;以及具有數個邊緣的一矽基板,該等邊緣與該模製品接觸以在該晶粒條片與該模製品之間形成一接合部。 A printing head comprising: a die strip molded in a molded article, the die strip comprising: a front surface exposed outside the molded article and flush with the molded article to be dispensed a fluid; a rear surface exposed to the molding and flush with the molding to receive a fluid; and a substrate having a plurality of edges, the edges being in contact with the molded article to be in contact with the molded article A joint is formed between the molded articles. 如請求項1所述之列印頭,其更包括:數個流體進給孔,其形成於該晶粒條片中,以使流體能從該後表面流動至該前表面通過該晶粒條片。 The print head of claim 1, further comprising: a plurality of fluid feed holes formed in the die strip to allow fluid to flow from the rear surface to the front surface through the die strip sheet. 如請求項1所述之列印頭,其中該等邊緣包括錐形邊緣,而該接合部包括覆蓋該等錐形邊緣之一模製唇部。 The printhead of claim 1 wherein the edges comprise tapered edges and the joint comprises a molded lip covering the tapered edges. 如請求項3所述之列印頭,其中該晶粒條片更包括一射流層,且其中該等錐形邊緣向外漸縮使得該矽基板比該射流層寬。 The print head of claim 3, wherein the die strip further comprises a fluidic layer, and wherein the tapered edges taper outwardly such that the tantalum substrate is wider than the jet layer. 如請求項1所述之列印頭,其更包括:一接合強化形貌體,其用以增加該等邊緣與該模製品之間的表面積接觸。 The print head of claim 1, further comprising: a joint-strengthened topography for increasing surface area contact between the edges and the molded article. 如請求項5所述之列印頭,其中該接合強化形貌體係選 自於以下形貌體所組成之群組:凹槽、切口、凹口、通道、錐體、凹痕、凸塊及/或彼等之組合。 The print head according to claim 5, wherein the joint reinforcement topography system is selected A group consisting of a groove, a slit, a notch, a channel, a cone, a dent, a bump, and/or a combination thereof. 如請求項2所述之列印頭,其更包括:一射流層,其在該前表面上;以及數個液滴產生器,其形成於該射流層中,以接收來自該等流體進給孔的流體及射出流體液滴。 The print head of claim 2, further comprising: a fluidic layer on the front surface; and a plurality of droplet generators formed in the fluidic layer to receive the fluid feed from the fluid The fluid of the well and the droplets of the fluid are ejected. 如請求項1所述之列印頭,其更包括:多個晶粒條片,其模製於該模製品中;以及包含多個孔洞的一歧管,各孔洞與該等晶粒條片中之一不同者相關聯以輸送一特定流體給它。 The print head of claim 1, further comprising: a plurality of die strips molded in the molded article; and a manifold including a plurality of holes, the holes and the die strips One of the different ones is associated to deliver a particular fluid to it. 如請求項8所述之列印頭,其更包括供該等多個晶粒條片黏附的一晶粒載體。 The print head of claim 8 further comprising a grain carrier for adhering the plurality of die strips. 一種列印條,其係包括:多個模製列印頭晶粒,沿著一印刷電路板(PCB)的長度大體端對端地配置成一交錯組態,其中該等晶粒中之一或多者與該等晶粒中之一或多個毗鄰者重疊;各個模製列印頭晶粒有埋設入一模製品材料之多個晶粒條片,該等晶粒條片各有暴露於該模製品材料外之一前表面與一後表面,該後表面係用以接收流體,以及該前表面用以分配透過該晶粒條片中之數個流體進給孔從該後表面流到該前表面之流體;其中該等晶粒條片各包含具有數個邊緣的一矽基板,該等邊緣接觸該模製品材料以在該晶粒條片與該模製品材料間形成一接合部。 A printing strip comprising: a plurality of molded printhead dies arranged substantially end-to-end along a length of a printed circuit board (PCB) in a staggered configuration, wherein one of the dies Exchanging one or more adjacent ones of the dies; each of the molding head dies has a plurality of die strips embedded in a molding material, each of the dies being exposed to a front surface and a rear surface of the molded article material, the rear surface for receiving a fluid, and the front surface for dispensing through the plurality of fluid feed holes in the die strip from the rear surface to The fluid of the front surface; wherein the die strips each comprise a substrate having a plurality of edges, the edges contacting the molding material to form a joint between the die strip and the molding material. 如請求項10所述之列印條,其中該前表面及該後表面皆與該模製品材料齊平。 The print strip of claim 10, wherein the front surface and the back surface are flush with the molding material. 一種列印卡匣,其係包括:能含容一印刷流體的一殼體;以及一減薄的模製列印頭晶粒,其係包括:埋設在一模製品中的一晶粒條片,該晶粒條片包括具有與該模製品形成一接合部之數個邊緣的一矽基板,以及暴露於該模製品外之一前表面及一後表面,該後表面係用以接收流體,而該前表面係用以分配流體,該流體係將通過該晶粒條片中的數個流體進給孔而從該後表面流到該前表面。 A printing cartridge comprising: a housing capable of containing a printing fluid; and a thinned molded head die comprising: a die strip embedded in a molded article The die strip includes a substrate having a plurality of edges forming a joint portion with the molded article, and a front surface and a rear surface exposed to the outside of the molded article, the rear surface being adapted to receive a fluid, The front surface is for dispensing a fluid that will flow from the back surface to the front surface through a plurality of fluid feed holes in the die strip. 如請求項12所述之列印卡匣,其中該減薄的模製列印頭晶粒包括配置成沿著該殼體的一底部部份彼此平行地橫過該模製品的多個晶粒條片,以及其中該列印卡匣更包括:多個隔室,各個隔室能保存一不同的印刷流體;以及一歧管,其用以對各印刷流體提供路徑配送到該等晶粒條片中之一不同者。 The print cartridge of claim 12, wherein the thinned molded print head die comprises a plurality of dies configured to traverse the molded article in parallel with each other along a bottom portion of the housing The strip, and wherein the print cartridge further comprises: a plurality of compartments, each compartment capable of holding a different printing fluid; and a manifold for providing a path for each printing fluid to be delivered to the strips One of the different ones in the film. 如請求項12所述之列印卡匣,其更包括:供該減薄的模製列印頭晶粒黏附的一晶粒載體;以及一歧管,其用以對各印刷流體提供路徑配送通過該 晶粒載體到該等晶粒條片中之一不同者。 The print cartridge of claim 12, further comprising: a die carrier for adhering the thinned die head die; and a manifold for providing path for each printing fluid Pass this The grain carrier is different from one of the grain strips. 如請求項12所述之列印卡匣,其中該接合部包括:該晶粒條片的一錐形邊緣;以及該模製品中與該晶粒條片之該錐形邊緣鄰近的一模製唇部。 The printing cartridge of claim 12, wherein the engaging portion comprises: a tapered edge of the die strip; and a molding in the molded article adjacent to the tapered edge of the die strip Lips.
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