TWI620016B - Photosensitive composition and printed wiring board having hardened layer thereof - Google Patents

Photosensitive composition and printed wiring board having hardened layer thereof Download PDF

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TWI620016B
TWI620016B TW102117740A TW102117740A TWI620016B TW I620016 B TWI620016 B TW I620016B TW 102117740 A TW102117740 A TW 102117740A TW 102117740 A TW102117740 A TW 102117740A TW I620016 B TWI620016 B TW I620016B
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compound
carboxyl group
photosensitive
group
resin
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TW102117740A
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TW201407281A (en
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Makoto Hayashi
Shuichi Yamamoto
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Taiyo Ink Mfg Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings
    • H05K3/285Permanent coating compositions
    • H05K3/287Photosensitive compositions

Abstract

為了可於印刷配線板上,形成可良好地顯影、長時間維持絕緣性、且機械強度優良的硬化皮膜,感光性組成物係含有(A)含有羧基之感光性化合物、(B)光聚合起始劑、及(C)環氧化合物,或進一步含有(D)不具有羧基之感光性化合物,該感光性組成物之雙鍵當量,在不含有有機溶劑及填料的狀態下,為400以上。於另一態樣中,係含有(A’)含有羧基之化合物、(B)光聚合起始劑、及(C)環氧化合物之感光性組成物,且前述(C)環氧化合物之環氧基,相對於前述(A’)含有羧基之化合物之羧基1當量,為1.5當量以上、4當量以下,該感光性組成物中所含之液狀成分的含有率,相對於有機溶劑及填料以外的全部成分,為5質量%以上、30質量%以下。 In order to form a hardened film that can develop well, maintain insulation for a long time, and have excellent mechanical strength on a printed wiring board, the photosensitive composition contains (A) a photosensitive compound containing a carboxyl group and (B) photopolymerization. The initiator, and (C) the epoxy compound, or (D) a photosensitive compound not having a carboxyl group, and the double bond equivalent of the photosensitive composition is 400 or more in a state where it does not contain an organic solvent and a filler. In another aspect, it is a photosensitive composition containing (A ') a compound containing a carboxyl group, (B) a photopolymerization initiator, and (C) an epoxy compound, and the ring of the aforementioned (C) epoxy compound The oxygen group is 1.5 equivalents or more and 4 equivalents or less with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing compound (A ′). The content of the liquid component contained in the photosensitive composition is relative to the organic solvent and the filler. All other components are 5 mass% or more and 30 mass% or less.

Description

感光性組成物及具有其硬化層之印刷配線板 Photosensitive composition and printed wiring board having hardened layer thereof

本發明係關於感光性組成物及具有其硬化層之印刷配線板。 The present invention relates to a photosensitive composition and a printed wiring board having a cured layer.

於印刷配線板,在具有電路圖型之導體層的基材上,係形成有抗焊阻劑。作為如此的抗焊阻劑之材料,以往提出了各種感光性組成物。例如,專利文獻1揭示了含有:具有羧基之聚合物、具有乙烯性不飽和鍵之光聚合性化合物、與光聚合起始劑之永久阻劑用感光性樹脂組成物。 On a printed wiring board, a solder resist is formed on a substrate having a conductor layer of a circuit pattern. As a material of such a solder resist, various photosensitive compositions have conventionally been proposed. For example, Patent Document 1 discloses a photosensitive resin composition for a permanent resist containing a polymer having a carboxyl group, a photopolymerizable compound having an ethylenically unsaturated bond, and a photopolymerization initiator.

此外,近年來,特別是將抗焊阻劑等之感光性組成物使用於車載用之印刷配線板時,於高溫高濕度環境下,係要求長時間維持絕緣性、或不發生裂痕之機械強度。 In addition, in recent years, especially when a photosensitive composition such as a solder resist is used for a printed wiring board for a vehicle, the mechanical strength required to maintain the insulation for a long time or to prevent cracks under a high temperature and high humidity environment .

〔先前技術文獻〕 [Previous Technical Literature] 〔專利文獻〕 [Patent Literature]

[專利文獻1]日本特開2005-99647號公報(申請專利 範圍) [Patent Document 1] Japanese Patent Laid-Open No. 2005-99647 (patent application range)

但是,以往的感光性組成物,當光聚合性單體之含量多時,會產生高溫高濕度下無法長期間維持絕緣性、或發生多量裂痕之問題。 However, in the conventional photosensitive composition, when the content of the photopolymerizable monomer is large, problems such as failure to maintain insulation for a long period of time under high temperature and high humidity, or occurrence of a large number of cracks have been caused.

另一方面,減低光聚合性單體含量時,由於感度會下降,亦會產生圖型形成困難之問題。 On the other hand, when the content of the photopolymerizable monomer is reduced, the sensitivity is lowered, and the problem of pattern formation is difficult.

本發明係有鑑於前述之習知技術的問題點而為者,其基本的目的係提供可良好地形成圖型、可維持長時間絕緣性、且可形成機械強度優良之硬化皮膜的感光性組成物。 The present invention has been made in view of the problems of the conventional techniques described above, and its basic object is to provide a photosensitive composition that can form a pattern well, maintain long-term insulation, and form a hardened film with excellent mechanical strength. Thing.

進一步本發明之目的係提供具有具備如此優良特性之感光性組成物之硬化層的長期信賴性高之印刷配線板。 A further object of the present invention is to provide a printed wiring board having a long-term reliability of a cured layer of a photosensitive composition having such excellent characteristics.

為了達成前述目的,依據本發明之第一態樣,係提供 一種感光性組成物,其係含有(A)含有羧基之感光性化合物、(B)光聚合起始劑、及(C)環氧化合物之感光性組成物,其特徵為該感光性組成物之雙鍵當量,在不含有有機溶劑及填 料之狀態下,為400以上。 In order to achieve the foregoing object, according to a first aspect of the present invention, it is provided A photosensitive composition comprising (A) a photosensitive compound containing a carboxyl group, (B) a photopolymerization initiator, and (C) an epoxy compound, which is characterized in that Double bond equivalent, in the absence of organic solvents and filling In the state of the material, it is 400 or more.

另一態樣中,係提供一種感光性組成物,其特徵為,於上述各成分之外,進一步含有(D)不具有羧基之感光性化合物。 In another aspect, a photosensitive composition is provided, which further comprises (D) a photosensitive compound having no carboxyl group in addition to the above-mentioned components.

依據適合的態樣,前述感光性組成物之雙鍵當量,在不含有有機溶劑及填料之狀態下,為400以上、680以下,更佳為450以上、650以下,又更佳為500以上、650以下。依據更進一步適合的態樣,前述(A)含有羧基之感光性化合物與(D)不具有羧基之感光性化合物之混合成分之中,(D)成分之含有率為30質量%以下。依據又更適合的態樣,前述(C)環氧化合物之環氧基,相對於前述(A)含有羧基之化合物之羧基1當量,為1.5當量以上。 According to a suitable aspect, the double bond equivalent of the photosensitive composition is 400 or more and 680 or less, more preferably 450 or more and 650 or less, and more preferably 500 or more, in a state where no organic solvent or filler is contained. Below 650. According to a more suitable aspect, the content ratio of the (D) component among the mixed components of the (A) carboxyl group-containing photosensitive compound and (D) the carboxyl group-free photosensitive compound is 30% by mass or less. According to a more suitable aspect, the epoxy group of the epoxy compound (C) is 1.5 equivalents or more with respect to 1 equivalent of the carboxyl group of the compound containing a carboxyl group (A).

進一步,依照本發明之第二態樣,係提供一種感光性組成物,其係含有(A’)含有羧基之化合物、(B)光聚合起始劑、及(C)環氧化合物之感光性組成物,其特徵在於 前述(C)環氧化合物之環氧基,相對於前述(A’)含有羧基之化合物之羧基1當量,為1.5當量以上、4當量以下,且該感光性組成物中所含之液狀成分之含有率,相對於有機溶劑及填料以外之全部成分,為5質量%以上、30質量%以下。 Furthermore, according to a second aspect of the present invention, there is provided a photosensitive composition containing the photosensitivity of (A ') a compound containing a carboxyl group, (B) a photopolymerization initiator, and (C) an epoxy compound. Composition, characterized by The epoxy group of the (C) epoxy compound is 1.5 equivalents or more and 4 equivalents or less with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing compound (A '), and the liquid component contained in the photosensitive composition The content rate is 5 mass% or more and 30 mass% or less with respect to all components other than an organic solvent and a filler.

依據適合的態樣,前述(C)環氧化合物之環氧基數 目為2。 According to a suitable aspect, the epoxy group number of the aforementioned (C) epoxy compound Head is 2.

進一步地,依據本發明,亦提供一種印刷配線板,其特徵為具有使用前述感光性組成物而形成之硬化層。 Furthermore, according to the present invention, there is also provided a printed wiring board having a hardened layer formed using the photosensitive composition.

本發明之第一態樣之感光性組成物,如前所述,藉由在不含有機溶劑及填料的狀態下,使感光性組成物之雙鍵當量成為400以上,可良好地形成圖型、即使在高溫高濕度下亦可維持長時間絕緣性、且可抑制裂痕之產生。因此,藉由使用具有如此的優良特性之感光性組成物,來形成抗焊阻劑或層間絕緣層等之硬化層,可提供長期信賴性高之印刷配線板。 As described above, the photosensitive composition of the first aspect of the present invention can form a good pattern by making the double bond equivalent of the photosensitive composition 400 or more in a state without an organic solvent and a filler. Insulation can be maintained for a long time even under high temperature and high humidity, and the occurrence of cracks can be suppressed. Therefore, by using a photosensitive composition having such excellent characteristics to form a hardened layer such as a solder resist or an interlayer insulating layer, a printed wiring board having high long-term reliability can be provided.

又,本發明之第二態樣之感光性組成物,如前所述,係含有(A’)含有羧基之化合物、(B)光聚合起始劑、及(C)環氧化合物之感光性組成物,藉由使前述(C)環氧化合物之環氧基,相對於前述(A’)含有羧基之化合物之羧基1當量,成為1.5當量以上、4當量以下,且使該感光性組成物中所含之液狀成分之含有率,相對於有機溶劑及填料以外的全部成分,成為5質量%以上、30質量%以下,可良好地形成圖型、即使在高溫高濕度下亦可維持長時間絕緣性、且可抑制裂痕的產生。因此,藉由使用具有如此的優良特性之感光性組成物,來形成抗焊阻劑或層間絕緣層等之硬化層,可提供長期信賴性 高之印刷配線板。 In addition, as described above, the photosensitive composition of the second aspect of the present invention contains (A ') a compound containing a carboxyl group, (B) a photopolymerization initiator, and (C) an epoxy compound. The composition is such that the epoxy group of the (C) epoxy compound is 1.5 equivalents or more and 4 equivalents or less with respect to 1 equivalent of the carboxyl group of the compound containing a carboxyl group (A '), and the photosensitive composition is made. The content of the liquid component contained in it is 5 mass% or more and 30 mass% or less with respect to all components other than the organic solvent and the filler. It can form a good pattern, and can maintain long even under high temperature and high humidity. It is time-insulating and suppresses the occurrence of cracks. Therefore, by using a photosensitive composition having such excellent characteristics to form a hardened layer such as a solder resist or an interlayer insulating layer, long-term reliability can be provided. Takayuki printed wiring board.

1a‧‧‧液狀判定用試驗管 1a‧‧‧ liquid test tube

1b‧‧‧溫度測定用試驗管 1b‧‧‧Test tube for temperature measurement

2‧‧‧標線(A線) 2‧‧‧marking line (A line)

3‧‧‧標線(B線) 3‧‧‧marking line (B line)

4a,4b‧‧‧橡皮塞 4a, 4b ‧‧‧ rubber stopper

5‧‧‧溫度計 5‧‧‧ thermometer

[圖1]顯示使用於實施例及比較例中之液狀判定的2支試驗管的概略側面圖。 [Fig. 1] A schematic side view showing two test tubes used for liquid state determination in Examples and Comparative Examples.

依據本發明者等人的研究,發現了含有(A)含有羧基之感光性化合物、(B)光聚合起始劑、及(C)環氧化合物之感光性組成物、或進一步含有(D)不具有羧基之感光性化合物之感光性組成物,且該感光性組成物之雙鍵當量,在不含有機溶劑及填料之狀態下為400以上的情況,可解決本發明之課題。 According to research by the present inventors, a photosensitive composition containing (A) a photosensitive compound containing a carboxyl group, (B) a photopolymerization initiator, and (C) an epoxy compound was found, or further containing (D) When the photosensitive composition of a photosensitive compound having no carboxyl group and the double bond equivalent of the photosensitive composition is 400 or more in a state without an organic solvent and a filler, the problem of the present invention can be solved.

又,發現了前述不具有羧基之感光性化合物、亦即感光性單體(光聚合性單體)之含量多時,在高溫高濕度下無法長時間維持絕緣性,另一方面,降低感光性單體之含量時,感度會下降,因此難以形成圖型的問題,在使感光性組成物中有機成分之總量的雙鍵當量成為特定範圍、亦即前述感光性組成物之雙鍵當量,在不含有機溶劑及填料之狀態下為400以上的情況時,可得到解決,因而完成了本發明。 In addition, it was found that when the content of the photosensitive compound having no carboxyl group, that is, the photosensitive monomer (photopolymerizable monomer) is large, the insulation cannot be maintained for a long time under high temperature and high humidity, and on the other hand, the sensitivity is lowered. When the content of the monomer is decreased, the sensitivity is reduced, so it is difficult to form a pattern. The double bond equivalent of the total amount of organic components in the photosensitive composition is set to a specific range, that is, the double bond equivalent of the aforementioned photosensitive composition. In the case where the organic solvent and the filler are not contained in the case of 400 or more, it can be solved, and the present invention has been completed.

進一步地依據本發明者等人的研究,發現了含有(A’)含有羧基之化合物、(B)光聚合起始劑、及 (C)環氧化合物之感光性組成物,前述(C)環氧化合物之環氧基,相對於前述(A’)含有羧基之化合物之羧基1當量,為1.5當量以上、4當量以下,且該感光性組成物中所含之液狀成分的含有率,相對於有機溶劑及填料以外的全部成分,為5質量%以上、30質量%以下時,可解決本發明之課題。此處,「液狀」與否的判定,係在20℃進行。 Further based on research by the present inventors, it was found that a compound containing (A ') a carboxyl group, (B) a photopolymerization initiator, and (C) A photosensitive composition of an epoxy compound, wherein the epoxy group of the (C) epoxy compound is 1.5 equivalents or more and 4 equivalents or less based on 1 equivalent of the carboxyl group of the compound containing the carboxyl group (A '); and When the content rate of the liquid component contained in this photosensitive composition is 5 mass% or more and 30 mass% or less with respect to all components other than an organic solvent and a filler, the subject of this invention can be solved. Here, the determination of "liquid state" is made at 20 ° C.

如前所述,不具有羧基之感光性化合物、亦即感光性單體(光聚合性單體)之含量多時,容易引起在高溫高濕度下無法長時間維持絕緣性的問題,但本發明之感光性組成物中不含有感光性單體、或即使含有亦為少量,因此如此問題發生的可能性小。另一方面,降低感光性單體之含量時,一般而言軟化點會上昇,因此溶解性降低,難以形成圖型的問題,在前述(C)環氧化合物之環氧基,相對於前述(A’)含有羧基之化合物之羧基1當量,為1.5當量以上、4當量以下,且該感光性組成物中所含之液狀成分之含有率,相對於有機溶劑及填料以外的全部成分,為5質量%以上、30質量%以下的情況時,可得到解決,因而完成了本發明。 As described above, when the content of the photosensitive compound having no carboxyl group, that is, the photosensitive monomer (photopolymerizable monomer) is large, the problem that the insulation cannot be maintained for a long time under high temperature and high humidity is easily caused, but the present invention Since the photosensitive composition does not contain a photosensitive monomer or even contains a small amount, such a problem is less likely to occur. On the other hand, when the content of the photosensitive monomer is reduced, generally, the softening point increases, so the solubility decreases, and it is difficult to form a pattern. The epoxy group of the (C) epoxy compound has a higher content than the ( A ') 1 equivalent of the carboxyl group of the compound containing a carboxyl group is 1.5 equivalents or more and 4 equivalents or less, and the content of the liquid component contained in the photosensitive composition is relative to all components other than the organic solvent and the filler. In the case of 5 mass% or more and 30 mass% or less, it can be solved, and the present invention has been completed.

以下,說明本發明之感光性組成物的各構成成分。 Hereinafter, each component of the photosensitive composition of this invention is demonstrated.

前述含有羧基之感光性化合物(A)中之乙烯性不飽和雙鍵,較佳為來自丙烯酸或甲基丙烯酸或該等之衍生物者。 The ethylenically unsaturated double bond in the carboxyl group-containing photosensitive compound (A) is preferably one derived from acrylic acid or methacrylic acid or a derivative thereof.

另一方面,前述含有羧基之化合物(A’),可使用分 子中具有羧基之公知慣用的樹脂化合物。作為含有羧基之樹脂,其本身不具有乙烯性不飽和雙鍵之含有羧基之樹脂、或具有乙烯性不飽和雙鍵之含有羧基之感光性樹脂,均可使用,並不限定為特定者,但由光硬化性或耐顯影性方面而言,更佳為含有羧基之感光性樹脂。 On the other hand, for the compound (A ') containing a carboxyl group, A known and commonly used resin compound having a carboxyl group in the ions. As the carboxyl group-containing resin, a carboxyl group-containing resin having no ethylenically unsaturated double bond itself or a carboxyl group-containing photosensitive resin having an ethylenically unsaturated double bond can be used, and is not limited to a specific one, but In terms of photocurability or development resistance, a photosensitive resin containing a carboxyl group is more preferred.

如此之含有羧基之感光性化合物或含有羧基之化合物的具體例,可列舉以下所列舉的化合物(寡聚物及聚合物均可)。 Specific examples of such a carboxyl group-containing photosensitive compound or a carboxyl group-containing compound include the following compounds (both oligomers and polymers).

(1)藉由使(甲基)丙烯酸等之不飽和羧酸,與苯乙烯、α-甲基苯乙烯等之具有不飽和雙鍵與苯環的化合物共聚合所得之含有羧基之樹脂。 (1) A carboxyl group-containing resin obtained by copolymerizing an unsaturated carboxylic acid such as (meth) acrylic acid with a compound having an unsaturated double bond such as styrene and α-methylstyrene and a benzene ring.

(2)使分子內具有1個以上之乙烯性不飽和基與1個環氧基之化合物,與藉由使(甲基)丙烯酸等之不飽和羧酸,與苯乙烯、α-甲基苯乙烯等之具有不飽和雙鍵與苯環之化合物共聚合所得之含有羧基之樹脂反應而成之含有羧基之感光性樹脂。 (2) A compound having one or more ethylenically unsaturated groups and one epoxy group in the molecule, and an unsaturated carboxylic acid such as (meth) acrylic acid, and styrene and α-methylbenzene A carboxyl group-containing photosensitive resin obtained by reacting a carboxyl group-containing resin obtained by copolymerizing an unsaturated double bond such as ethylene with a benzene ring compound.

(3)芳香族二異氰酸酯,與二羥甲基丙酸、二羥甲基丁烷酸等之含有羧基之二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二醇、具有酚性羥基及醇性羥基之化合物等的二醇化合物之加成聚合反應以合成含有羧基之胺基甲酸酯樹脂當中,添加(甲基)丙烯酸羥基烷酯等分子內具有1個氫氧基與1個以上之(甲基)丙烯酸基之化合物,以進行末端(甲基)丙烯 酸酯化而得之含有羧基之感光性胺基甲酸酯樹脂。 (3) Aromatic diisocyanates, diol compounds containing carboxyl groups such as dimethylolpropionic acid, dimethylolbutanoic acid, and polycarbonate-based polyols, polyether-based polyols, and polyester-based polyols Addition polymerization reaction of diol compounds such as polyolefin polyols, acrylic polyols, bisphenol A-based alkylene oxide adduct diols, compounds having phenolic hydroxyl groups and alcoholic hydroxyl groups to synthesize carboxyl-containing compounds In the urethane resin, a compound having one hydroxyl group and one or more (meth) acrylic groups in the molecule such as hydroxyalkyl (meth) acrylate is added to perform terminal (meth) acrylic acid. Photosensitive urethane resin containing a carboxyl group obtained by acidification.

(4)脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯,與雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲苯酚(bixylenol)型環氧樹脂、雙酚型環氧樹脂等之具有苯環的2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含有羧基之二醇化合物及二醇化合物之加成聚合反應而得之含有羧基之感光性胺基甲酸酯樹脂。 (4) Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, aromatic diisocyanates, and bisphenol A type epoxy resin, bisphenol F type epoxy resin, and bisphenol S type (Meth) acrylates of bifunctional epoxy resins having a benzene ring, such as epoxy resins, bixylenol-type epoxy resins, bisphenol-type epoxy resins, bisphenol-type epoxy resins, etc. A carboxyl group-containing photosensitive urethane resin obtained by addition polymerization of a diol compound and a diol compound.

(5)前述(3)之樹脂合成中,添加(甲基)丙烯酸羥基烷酯等之分子內具有1個氫氧基與1個以上之(甲基)丙烯酸基的化合物、或異佛酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等之分子內具有1個異氰酸酯基與1個以上之(甲基)丙烯酸基的化合物,以進行末端(甲基)丙烯酸酯化而得之含有羧基之感光性胺基甲酸酯樹脂。 (5) In the resin synthesis of the above (3), a compound having one hydroxyl group and one or more (meth) acrylic acid groups in the molecule, such as hydroxyalkyl (meth) acrylate, or isophorone di, is added. Isocyanate, pentaerythritol triacrylate, and other mole compounds such as a compound having one isocyanate group and one or more (meth) acrylic acid groups in the molecule, which are obtained by terminal (meth) acrylation Photosensitive urethane resin.

(6)使(甲基)丙烯酸與後述之具有苯環的2官能或其以上之多官能環氧樹脂反應,對存在於側鏈之氫氧基加成鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐等之2元酸酐而得之含有羧基之感光性樹脂。 (6) The (meth) acrylic acid is reacted with a bifunctional or more polyfunctional epoxy resin having a benzene ring described later, and phthalic anhydride and tetrahydrophthalic acid are added to a hydroxyl group existing in a side chain. A carboxyl group-containing photosensitive resin obtained from dibasic acid anhydrides such as dicarboxylic anhydride and hexahydrophthalic anhydride.

(7)使(甲基)丙烯酸與將後述之具有苯環的2官能環氧樹脂之氫氧基進一步以表氯醇來環氧基化而得之多官能環氧樹脂反應,對所生成之氫氧基加成2元酸酐而得之含有羧基之感光性樹脂。 (7) The (meth) acrylic acid is reacted with a polyfunctional epoxy resin obtained by further epoxidizing the hydroxyl group of a bifunctional epoxy resin having a benzene ring described later with epichlorohydrin, and A photosensitive resin containing a carboxyl group obtained by adding a hydroxyl group to a dibasic acid anhydride.

(8)使環氧乙烷等之環狀醚及/或碳酸伸丙酯等之環狀碳酸酯加成於如酚醛清漆之多官能酚化合物,將所得之氫氧基以(甲基)丙烯酸部分酯化,使馬來酸酐、四氫鄰苯二甲酸酐、偏苯三甲酸酐、苯均四酸酐等之多元酸酐與剩餘的氫氧基反應而得之含有羧基之感光性樹脂。 (8) A cyclic ether such as ethylene oxide and / or a cyclic carbonate such as propylene carbonate are added to a polyfunctional phenol compound such as novolac, and the obtained hydroxyl group is (meth) acrylic acid Partial esterification, a photosensitive resin containing a carboxyl group obtained by reacting polybasic acid anhydrides such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride and the like with the remaining hydroxyl groups.

(9)對如上述(1)~(8)之樹脂進一步加成(甲基)丙烯酸環氧丙酯、(甲基)丙烯酸α-甲基環氧丙酯等之分子中具有1個環氧基與1個以上之(甲基)丙烯醯基的化合物而成之含有羧基之感光性樹脂。 (9) The epoxy resin (1) to (8) is further added with epoxy (meth) acrylate, α-methyl glycidyl (meth) acrylate, and the like having one epoxy in the molecule. A carboxyl group-containing photosensitive resin composed of a compound having one or more (meth) acrylfluorenyl groups.

再者,本說明書中,(甲基)丙烯酸酯,為總稱丙烯酸酯、甲基丙烯酸酯及該等之混合物之用語,其他類似表現亦相同。 In addition, in this specification, (meth) acrylic acid is a generic term for acrylate, methacrylic acid, and mixtures thereof, and other similar expressions are also the same.

如前述之含有羧基之感光性化合物或含有羧基之化合物,於聚合物骨架之側鏈具有多數羧基,因此能夠以稀鹼水溶液顯影。 As the aforementioned carboxyl group-containing photosensitive compound or carboxyl group-containing compound has a large number of carboxyl groups on the side chain of the polymer skeleton, it can be developed with a dilute aqueous alkali solution.

又,前述含有羧基之感光性化合物或含有羧基之化合物之酸價,適當者為30~200mg KOH/g之範圍,更佳為30~150mgKOH/g、特佳為45~120mgKOH/g之範圍。含有羧基之感光性化合物之酸價低於30mgKOH/g時則難以鹼顯影,另一方面,超過200mgKOH/g時則為了進行顯影液所致之曝光部的溶解,線會必要以上地變為窄細,隨情況不同,會有曝光部與未曝光部無區別地被顯影液溶解剝離,難以描繪正常的阻劑圖型,故不佳。 The acid value of the carboxyl group-containing photosensitive compound or the carboxyl group-containing compound is suitably in the range of 30 to 200 mg KOH / g, more preferably 30 to 150 mg KOH / g, and particularly preferably 45 to 120 mg KOH / g. When the acid value of the photosensitive compound containing a carboxyl group is less than 30 mgKOH / g, alkali development is difficult. On the other hand, when it exceeds 200 mgKOH / g, in order to dissolve the exposed portion caused by the developer, the line becomes narrower than necessary. Thin, depending on the situation, the exposed part and the unexposed part are dissolved and peeled by the developing solution without distinction, and it is difficult to draw a normal resist pattern, which is not good.

又,前述含有羧基之感光性化合物或含有羧 基之化合物之例如以凝膠滲透層析(GPC)測定時的重量平均分子量Mw(聚苯乙烯換算之重量平均分子量),雖隨著樹脂骨架而不同,但較佳為大於4,000、150,000以下;更佳為5,000以上、100,000以下之範圍者。重量平均分子量為4,000以下時,抗黏著(tack-free)性能可能不佳,可能使曝光後之塗膜的耐濕性差,顯影時產生膜減少,解像度大幅劣化。另一方面,重量平均分子量超過150,000時,顯影性可能會顯著變差,故不佳。 The photosensitive compound containing a carboxyl group or a carboxyl group For example, the weight average molecular weight Mw (polystyrene equivalent weight average molecular weight) when measured by gel permeation chromatography (GPC) is different depending on the resin skeleton, but it is preferably greater than 4,000 and less than 150,000; More preferably, it is a range of 5,000 or more and 100,000 or less. When the weight-average molecular weight is 4,000 or less, the tack-free performance may be poor, and the moisture resistance of the coating film after exposure may be poor, the film may be reduced during development, and the resolution may be significantly deteriorated. On the other hand, when the weight average molecular weight exceeds 150,000, the developability may be significantly deteriorated, which is not preferable.

含有羧基之感光性化合物,只要於分子中具有乙烯性不飽和雙鍵,則不限於前述列舉者,均可使用,亦可1種或混合2種以上使用。 As long as the photosensitive compound containing a carboxyl group has an ethylenically unsaturated double bond in the molecule, it is not limited to those listed above, and may be used singly or in combination of two or more kinds.

本發明中所用之光聚合起始劑(B),可適合使用由具有肟酯基之肟酯系光聚合起始劑、α-胺基苯乙酮系光聚合起始劑、醯基氧化膦系光聚合起始劑所構成群組中選擇之至少1種之光聚合起始劑。 As the photopolymerization initiator (B) used in the present invention, an oxime ester-based photopolymerization initiator having an oxime ester group, an α-aminoacetophenone-based photopolymerization initiator, and a fluorenyl phosphine oxide can be suitably used. It is a photopolymerization initiator of at least one selected from the group consisting of photopolymerization initiators.

前述肟酯系光聚合起始劑,可適合使用分子內具有2個肟酯基之光聚合起始劑。 As the oxime ester-based photopolymerization initiator, a photopolymerization initiator having two oxime ester groups in the molecule can be suitably used.

如此之肟酯系光聚合起始劑之摻合量,較佳為組成物全體量之0.02~10質量%。低於0.02質量%時,銅上之光硬化性不足,塗膜會剝離,而且耐藥品性等之塗膜特性會降低。另一方面,超過10質量%時,會有於乾燥塗膜表面之光吸收變得激烈,深部硬化性降低的傾向。 The blending amount of such an oxime ester-based photopolymerization initiator is preferably 0.02 to 10% by mass based on the total amount of the composition. If it is less than 0.02% by mass, the photo-hardenability on copper is insufficient, the coating film is peeled off, and the coating film characteristics such as chemical resistance are reduced. On the other hand, when it exceeds 10% by mass, the light absorption on the surface of the dried coating film becomes intense, and the deep hardenability tends to decrease.

前述α-胺基苯乙酮系光聚合起始劑,具體而言可列舉2-甲基-1-[4-(甲基硫代)苯基]-2-嗎啉基丙酮- 1、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、2-(二甲基胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基(morpholinyl))苯基]-1-丁酮、N,N-二甲基胺基苯乙酮等。 Specific examples of the α-aminoacetophenone-based photopolymerization initiator include 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinylacetone- 1, 2-benzyl-2-dimethylamino-1- (4-morpholinylphenyl) -butane-1-one, 2- (dimethylamino) -2-[(4- Methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, N, N-dimethylaminoacetophenone, and the like.

前述醯基氧化膦系光聚合起始劑,具體而言可列舉氧化2,4,6-三甲基苄醯基二苯基膦、氧化雙(2,4,6-三甲基苄醯基)-苯基膦、氧化雙(2,6-二甲氧基苄醯基)-2,4,4-三甲基-戊基膦等。 Specific examples of the fluorenylphosphine oxide-based photopolymerization initiator include 2,4,6-trimethylbenzylfluorenyldiphenylphosphine oxide and bis (2,4,6-trimethylbenzylfluorenyl oxide). ) -Phenylphosphine, bis (2,6-dimethoxybenzylfluorenyl) -2,4,4-trimethyl-pentylphosphine, and the like.

此等α-胺基苯乙酮系光聚合起始劑、醯基氧化膦系光聚合起始劑之摻合量,較佳為組成物全體量之0.5~15質量%。低於0.5質量%時,同樣地於銅上的光硬化性不足,塗膜會剝離,而且耐藥品性等之塗膜特性會降低。另一方面,超過15質量%時,無法得到出氣之降低效果,且會有於乾燥塗膜表面之光吸收變得激烈,深部硬化性降低的傾向。 The blending amount of these α-aminoacetophenone-based photopolymerization initiators and fluorenylphosphine oxide-based photopolymerization initiators is preferably 0.5 to 15% by mass of the entire composition. If it is less than 0.5% by mass, similarly, the photocurability on copper is insufficient, the coating film is peeled off, and the coating film characteristics such as chemical resistance are reduced. On the other hand, if it exceeds 15% by mass, the effect of reducing outgassing cannot be obtained, and the light absorption on the surface of the dried coating film becomes intense, which tends to reduce deep hardenability.

其他,可適合使用於本發明之感光性組成物的光聚合起始劑、光起始助劑及增感劑,可列舉苯偶姻化合物、苯乙酮化合物、蒽醌化合物、噻噸酮化合物、縮酮化合物、二苯甲酮化合物、3級胺化合物、及呫噸酮化合物等。 Other photopolymerization initiators, photostarters, and sensitizers that can be suitably used in the photosensitive composition of the present invention include benzoin compounds, acetophenone compounds, anthraquinone compounds, and thioxanthone compounds. , Ketal compounds, benzophenone compounds, tertiary amine compounds, and xanthone compounds.

前述苯偶姻化合物,具體而言可列舉例如苯偶姻、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻異丙基醚等。 Specific examples of the benzoin compound include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.

前述苯乙酮化合物,具體而言可列舉例如苯 乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮等。 Specific examples of the acetophenone compound include benzene Ethyl ketone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, and the like.

前述蒽醌化合物,具體而言可列舉例如2-甲基蒽醌、2-乙基蒽醌、2-t-丁基蒽醌、1-氯蒽醌等。 Specific examples of the anthraquinone compound include 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, and 1-chloroanthraquinone.

前述噻噸酮化合物,具體而言可列舉例如2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等。 Specific examples of the thioxanthone compound include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone. Tons of ketones and so on.

前述縮酮化合物,具體而言可列舉例如苯乙酮二甲基縮酮、苄基二甲基縮酮等。 Specific examples of the ketal compound include acetophenone dimethyl ketal and benzyl dimethyl ketal.

前述二苯甲酮化合物,具體而言可列舉例如二苯甲酮、4-苄醯基二苯基硫化物、4-苄醯基-4’-甲基二苯基硫化物、4-苄醯基-4’-乙基二苯基硫化物、4-苄醯基-4’-丙基二苯基硫化物等。 Specific examples of the benzophenone compound include benzophenone, 4-benzylfluorenyldiphenyl sulfide, 4-benzylfluorenyl-4'-methyldiphenylsulfide, and 4-benzylfluorene. -4'-ethyldiphenyl sulfide, 4-benzylfluorenyl-4'-propyldiphenyl sulfide, and the like.

前述3級胺化合物,具體而言可列舉例如乙醇胺化合物、具有二烷基胺基苯構造之化合物,例如4,4’-二甲基胺基二苯甲酮、4,4’-二乙基胺基二苯甲酮等之二烷基胺基二苯甲酮;7-(二乙基胺基)-4-甲基-2H-1-苯并吡喃-2-酮(7-(二乙基胺基)-4-甲基香豆素)等之含有二烷基胺基之香豆素化合物;4-二甲基胺基安息香酸乙酯、2-二甲基胺基安息香酸乙酯、4-二甲基胺基安息香酸(n-丁氧基)乙酯、p-二甲基胺基安息香酸異戊基乙酯、4-二甲基胺基安息香酸2-乙基己酯等。 Specific examples of the tertiary amine compound include ethanolamine compounds and compounds having a dialkylaminobenzene structure, such as 4,4'-dimethylaminobenzophenone and 4,4'-diethyl. Dialkylaminobenzophenones such as aminobenzophenone; 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (bis Ethylamino) -4-methylcoumarin) and other coumarin compounds containing dialkylamino groups; ethyl 4-dimethylaminobenzoate, ethyl 2-dimethylaminobenzoate Ester, 4-dimethylaminobenzoic acid (n-butoxy) ethyl ester, p-dimethylaminobenzoic acid isoamylethyl ester, 4-dimethylaminobenzoic acid 2-ethylhexyl Esters, etc.

前述光聚合起始劑、光起始助劑及增感劑當中,較佳為噻噸酮化合物及3級胺化合物。特別是由深部 硬化性的方面而言,較佳為含有噻噸酮化合物。其中尤以含有2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等之噻噸酮化合物為更佳。 Among the aforementioned photopolymerization initiators, photostarters, and sensitizers, thioxanthone compounds and tertiary amine compounds are preferred. Especially deep In terms of sclerosing property, a thioxanthone compound is preferably contained. Among them, thioxanthone compounds containing 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, etc. For the better.

如此之噻噸酮化合物之摻合量,較佳為組成物全體量之15質量%以下。噻噸酮化合物之摻合量超過15質量%時,厚膜硬化性會降低,而且會造成製品成本上昇。更佳為10質量%以下。 The blending amount of such a thioxanthone compound is preferably 15% by mass or less of the total amount of the composition. When the amount of the thioxanthone compound exceeds 15% by mass, the thick film hardenability is reduced, and the cost of the product is increased. It is more preferably 10% by mass or less.

又,3級胺化合物,較佳為具有二烷基胺基苯構造之化合物,其中尤以二烷基胺基二苯甲酮化合物、最大吸收波長為350~450nm之含有二烷基胺基之香豆素化合物及香豆素酮類特佳。 The tertiary amine compound is preferably a compound having a dialkylaminobenzene structure. Among them, a dialkylaminobenzophenone compound having a maximum absorption wavelength of 350 to 450nm and containing a dialkylamine group is preferred. Coumarin compounds and coumarin ketones are particularly preferred.

前述二烷基胺基二苯甲酮化合物,以4,4’-二乙基胺基二苯甲酮毒性亦低,故較佳。前述二烷基胺基含有香豆素化合物,最大吸收波長為350~410nm,係在紫外線區域,因此除了當然可提供著色少、無色透明之感光性組成物,亦可提供使用著色顏料,而反映了著色顏料本身之顏色的經著色之硬化層。特別是7-(二乙基胺基)-4-甲基-2H-1-苯并吡喃-2-酮,對波長400~410nm之雷射光會顯示優良的增感效果,故較佳。 The aforementioned dialkylaminobenzophenone compound is also preferred because of its low toxicity with 4,4'-diethylaminobenzophenone. The aforementioned dialkylamine group contains a coumarin compound with a maximum absorption wavelength of 350 to 410 nm and is in the ultraviolet region. Therefore, in addition to providing a light-sensitive, colorless and transparent photosensitive composition, it is also possible to provide the use of colored pigments. A pigmented hardened layer that expresses the color of the pigment itself. In particular, 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferred because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.

如此之3級胺化合物之摻合量,較佳為組成物全體量之0.1~15質量%。3級胺化合物之摻合量低於0.1質量%時,會有無法得到充分之增感效果的傾向。超過15質量%時,會有3級胺化合物之乾燥塗膜的表面之光吸收變得激烈,深部硬化性降低的傾向。 The blending amount of such a tertiary amine compound is preferably 0.1 to 15% by mass based on the total amount of the composition. When the content of the tertiary amine compound is less than 0.1% by mass, there is a tendency that a sufficient sensitization effect cannot be obtained. When it exceeds 15% by mass, the light absorption on the surface of the dried coating film of the tertiary amine compound becomes intense, and the deep hardenability tends to decrease.

此等之光聚合起始劑、光起始助劑及增感劑,能夠單獨或作為2種以上之混合物來使用。 These photopolymerization initiators, photoinitiators and sensitizers can be used alone or as a mixture of two or more kinds.

如此之光聚合起始劑、光起始助劑、及增感劑之總量,相對於前述含有羧基之感光性化合物或含有羧基之化合物100質量份,較佳為35質量份以下。超過35質量份時,會有因該等光吸收而使深部硬化性降低的傾向。 The total amount of such a photopolymerization initiator, photoinitiator, and sensitizer is preferably 35 parts by mass or less with respect to 100 parts by mass of the aforementioned carboxyl group-containing photosensitive compound or carboxyl group-containing compound. When it exceeds 35 parts by mass, there is a tendency that the deep hardenability is reduced due to such light absorption.

再者,此等光聚合起始劑、光起始助劑、及增感劑,因為吸收特定波長,故隨情況不同而感度變低,有作為紫外線吸收劑的作用。但是,該等並非僅以提高組成物之感度為目的來使用。可依需要吸收特定波長之光,提高表面之光反應性,使阻劑之線形狀及開口變化為垂直、錐狀、反錐狀,而且提高線寬或開口徑之加工精度。 In addition, these photopolymerization initiators, photoinitiators, and sensitizers absorb specific wavelengths, and therefore have lower sensitivity depending on the situation, and function as ultraviolet absorbers. However, these are not only used for the purpose of improving the sensitivity of the composition. It can absorb light of specific wavelength according to the need, improve the light reactivity of the surface, change the line shape and opening of the resist to vertical, tapered, reverse tapered, and improve the processing accuracy of line width or opening diameter.

前述環氧化合物(C),較佳為於分子中具有複數個環氧基之多官能環氧樹脂,特佳為具有苯環之多官能環氧樹脂。環氧樹脂之具體例,可列舉雙酚A型環氧樹脂、溴化環氧樹脂、酚醛清漆型環氧樹脂、雙酚F型環氧樹脂、氫化雙酚A型環氧樹脂、環氧丙基胺型環氧樹脂、尿囊素型環氧樹脂、三羥基苯基甲烷型環氧樹脂、聯二甲苯酚型或雙酚型環氧樹脂或該等之混合物、四苯酚基乙烷型環氧樹脂、雜環式環氧樹脂、鄰苯二甲酸二環氧丙酯樹脂、四環氧丙基二甲苯醯基乙烷樹脂、含有萘基之環氧樹脂、具有二環戊二烯骨架之環氧樹脂、甲基丙烯酸環氧丙酯共聚合系環氧樹脂、進而環己基馬來醯亞胺與甲基丙烯酸環氧丙酯之共聚合環氧樹脂、環氧基改質之聚丁二烯橡 膠衍生物、CTBN改質環氧樹脂等,但不限定於該等。此等之環氧樹脂,可單獨或組合2種以上使用。 The aforementioned epoxy compound (C) is preferably a polyfunctional epoxy resin having a plurality of epoxy groups in the molecule, and particularly preferably a polyfunctional epoxy resin having a benzene ring. Specific examples of the epoxy resin include bisphenol A epoxy resin, brominated epoxy resin, novolac epoxy resin, bisphenol F epoxy resin, hydrogenated bisphenol A epoxy resin, and propylene oxide. Amine type epoxy resin, allantoin type epoxy resin, trihydroxyphenylmethane type epoxy resin, bixylenol type or bisphenol type epoxy resin or a mixture thereof, tetraphenol ethane type ring Oxygen resin, heterocyclic epoxy resin, diglycidyl phthalate resin, tetraglycidyl xylylene ethane resin, naphthyl-containing epoxy resin, dicyclopentadiene skeleton Epoxy resin, epoxy propylene methacrylate copolymerization epoxy resin, further copolymerized epoxy resin of cyclohexyl maleimide and propylene methacrylate, epoxy modified polybutadiene Rubber Gum derivatives, CTBN modified epoxy resins, etc. are not limited to these. These epoxy resins can be used alone or in combination of two or more.

前述環氧化合物之摻合量,相對於組成物中之羧基1當量,較佳為1.5當量以上之範圍;更佳為1.5當量以上、5當量以下之範圍;又更佳為1.5當量以上、4當量以下之範圍。環氧化合物之摻合量低於1.5當量時,硬化層之絕緣性與耐裂痕性會降低,故不佳。另一方面,環氧化合物之摻合量超過5當量時,顯影性降低,故不佳。 The blending amount of the aforementioned epoxy compound is preferably in the range of 1.5 equivalents or more relative to 1 equivalent of the carboxyl group in the composition; more preferably in the range of 1.5 equivalents or more and 5 equivalents or less; more preferably in the range of 1.5 equivalents or more, 4 Range below equivalent. When the blending amount of the epoxy compound is less than 1.5 equivalents, the insulation properties and crack resistance of the hardened layer are reduced, so it is not good. On the other hand, if the blending amount of the epoxy compound exceeds 5 equivalents, the developability is lowered, which is not preferable.

本發明之感光性組成物,可進一步添加例如咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-(2-氰基乙基)-2-乙基-4-甲基咪唑等之咪唑衍生物;二氰二醯胺、苄基二甲基胺、4-(二甲基胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等之胺化合物;己二酸醯肼、癸二酸醯肼等之肼化合物;三苯基膦等之磷化合物等作為硬化觸媒。特別地,只要是促進具有環狀醚基之化合物與羧基之反應者,則不限定於此等。此等觸媒可單獨或混合2種以上使用。又,亦可使用亦作為密合性賦予劑功能之胍胺、乙胍胺、苯并胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪.三聚異氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪.三聚異氰酸加成物等之S-三嗪衍生物, 較佳為將此等化合物與前述硬化觸媒合併使用。上述硬化觸媒之摻合量係通常量的比例即為充分,例如,相對於前述含有羧基之感光性化合物或含有羧基之化合物100質量份,為0.1~20質量份、較佳為0.5~15.0質量份之比例。 The photosensitive composition of the present invention may further include, for example, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1 -Cyanoethyl-2-phenylimidazole, 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole, and other imidazole derivatives; dicyandiamide, benzyldimethyl Amine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4-methyl-N, N-di Amine compounds such as methylbenzylamine; hydrazine compounds such as hydrazine adipate and hydrazine sebacate; phosphorus compounds such as triphenylphosphine and the like are used as hardening catalysts. In particular, as long as it promotes a reaction between a compound having a cyclic ether group and a carboxyl group, it is not limited thereto. These catalysts can be used alone or in combination of two or more. In addition, guanamine, eguanidamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloxyethyl-S-tri, which also functions as an adhesion-imparting agent, can also be used. Azine, 2-vinyl-2,4-diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine. Trimeric isocyanate adduct, 2,4-diamino-6-methacryl methoxyethyl-S-triazine. S-triazine derivatives such as trimeric isocyanate adducts, These compounds are preferably used in combination with the aforementioned hardening catalyst. The blending amount of the hardening catalyst is a ratio of a normal amount. For example, it is 0.1 to 20 parts by mass, and preferably 0.5 to 15.0 with respect to 100 parts by mass of the aforementioned carboxyl group-containing photosensitive compound or carboxyl group-containing compound. The proportion by mass.

前述不具有羧基之感光性化合物(D)、亦即感光性單體,可使用分子中具有1個以上、較佳為2個以上之乙烯性不飽和雙鍵的化合物。感光性單體係藉由活性能量線照射而光硬化,使前述含有羧基之感光性化合物不溶於鹼水溶液,或幫助不溶化者。如此之化合物可使用慣用公知之聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯、碳酸酯(甲基)丙烯酸酯、(甲基)丙烯酸環氧酯,具體而言,可列舉丙烯酸2-羥基乙酯、丙烯酸2-羥基丙酯等之丙烯酸羥基烷酯類;乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等之二醇醚之二丙烯酸酯類;N,N-二甲基丙烯醯胺、N-羥甲基丙烯醯胺、N,N-二甲基胺基丙基丙烯醯胺等之丙烯醯胺類;丙烯酸N,N-二甲基胺基乙酯、丙烯酸N,N-二甲基胺基丙酯等之丙烯酸胺基烷酯類;己二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、參-羥基乙基三聚異氰酸酯等之多元醇或該等之環氧乙烷加成物、環氧丙烷加成物、或ε-己內酯加成物等之多價丙烯酸酯類;丙烯酸苯氧酯、雙酚A二丙烯酸酯、及該等之酚類的環氧乙烷加成物或環氧丙烷加成物等之多價丙烯酸酯類;甘油二環氧丙基醚、甘油三環氧丙基醚、三羥甲基丙烷三環氧丙基醚、三環氧丙基三聚 異氰酸酯等之環氧丙基醚之多價丙烯酸酯類;不限於上述,可列舉將聚醚多元醇、聚碳酸酯二醇、氫氧基末端聚丁二烯、聚酯多元醇等之多元醇直接丙烯酸酯化、或透過二異氰酸酯而胺基甲酸酯丙烯酸酯化之丙烯酸酯類及三聚氰胺丙烯酸酯、及/或對應於上述丙烯酸酯之各甲基丙烯酸酯類等。 As the photosensitive compound (D) having no carboxyl group, that is, a photosensitive monomer, a compound having one or more, preferably two or more ethylenically unsaturated double bonds in the molecule can be used. The photosensitive single system is light-hardened by irradiation with active energy rays, so that the aforementioned photosensitive compound containing a carboxyl group is insoluble in an alkaline aqueous solution, or assists an insoluble person. As such a compound, conventionally known polyester (meth) acrylate, polyether (meth) acrylate, urethane (meth) acrylate, carbonate (meth) acrylate, (meth) ) Acrylic epoxy esters, specifically, hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, Diacrylates of glycol ethers such as propylene glycol; N, N-dimethylacrylamide, N-methylmethacrylamide, N, N-dimethylaminopropylacrylamide, etc. Amines; N, N-dimethylaminoethyl acrylate, N, N-dimethylaminopropyl acrylate, and other amine alkyl acrylates; hexanediol, trimethylolpropane, pentaerythritol, diamine Polyols such as pentaerythritol, ginsyl-hydroxyethyltrimeric isocyanate, etc., or polyvalent acrylates such as ethylene oxide adduct, propylene oxide adduct, or ε-caprolactone adduct; Polyvalent acrylates such as phenoxy acrylate, bisphenol A diacrylate, and phenolic ethylene oxide adducts or propylene oxide adducts thereof; glycerol Diglycidyl ether, glycerin triglycidyl ether, trimethylolpropane triglycidyl ether, triglycidyl trimer Polyvalent acrylates of glycidyl ether such as isocyanate; not limited to the above, examples include polyether polyols, polycarbonate diols, hydroxyl-terminated polybutadiene, polyester polyols and the like Acrylates and melamine acrylates which are directly acrylated or urethane acrylated through diisocyanate, and / or each methacrylate corresponding to the acrylate, and the like.

進一步地,可列舉使丙烯酸與甲酚酚醛清漆型環氧樹脂等之多官能環氧樹脂反應而得之丙烯酸環氧酯樹脂、或進一步使季戊四醇三丙烯酸酯等之羥基丙烯酸酯與異佛酮二異氰酸酯等之二異氰酸酯之半胺基甲酸酯化合物與該丙烯酸環氧酯樹脂之氫氧基反應而得之環氧基胺基甲酸酯丙烯酸酯化合物等。如此之丙烯酸環氧酯系樹脂,可在不使指觸乾燥性降低之下,提高光硬化性。 Further examples thereof include an acrylic epoxy resin obtained by reacting acrylic acid with a polyfunctional epoxy resin such as a cresol novolac epoxy resin, or a hydroxy acrylate such as pentaerythritol triacrylate and isophorone di. An epoxy urethane acrylate compound and the like obtained by reacting a diisocyanate half urethane compound such as isocyanate with the hydroxyl group of the acrylic epoxy resin. Such an acrylic epoxy resin can improve the photo-hardening property without reducing the touch dryness.

如前述之不具有羧基之感光性化合物,例如為GPC測定之重量平均分子量Mw4000以下的化合物。 The photosensitive compound having no carboxyl group as described above is, for example, a compound having a weight average molecular weight Mw4000 or less measured by GPC.

又,不具有羧基之感光性化合物之摻合量,為全部感光性成分(含有羧基之感光性化合物+不具有羧基之感光性化合物)之30質量%以下;較佳為1質量%以上、10質量%以下;又更佳為1質量%以上、5質量%以下為適當。 The blending amount of the photosensitive compound having no carboxyl group is 30% by mass or less of the total photosensitive components (the photosensitive compound containing a carboxyl group and the photosensitive compound having no carboxyl group); preferably 1% by mass or more, 10 Mass% or less; more preferably 1 mass% or more and 5 mass% or less is appropriate.

本發明之感光性組成物,亦可依照需要,為了提高與聚醯亞胺等之基材的密合性,而含有公知慣用之巰基化合物或密合促進劑。巰基化合物可列舉2-巰基丙酸、三羥甲基丙烷參(2-硫代丙酸酯)、2-巰基乙醇、2- 胺基硫酚、3-巰基-1,2,4-三唑、3-巰基-丙基三甲氧基矽烷等之含有巰基之矽烷偶合劑等。密合促進劑係有例如苯并咪唑、苯并噁唑、苯并噻唑、2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑、3-嗎啉基甲基-1-苯基-三唑-2-硫酮、5-胺基-3-嗎啉基甲基-噻唑-2-硫酮、2-巰基-5-甲基硫-噻二唑、三唑、四唑、苯并三唑、羧基苯并三唑、含有胺基之苯并三唑、乙烯基三嗪等。此等可分別單獨使用、亦可組合2種以上使用。其摻合量,相對於每100質量份的前述含有羧基之感光性化合物或含有羧基之化合物,以10質量份以下之範圍為適當。此等化合物之摻合量超過上述範圍時,會消耗交聯反應所必要之前述環氧化合物的環氧基(與環氧基反應),交聯密度會降低故為不佳。 The photosensitive composition of the present invention may contain a well-known and commonly used mercapto compound or an adhesion promoter in order to improve the adhesion to a substrate such as polyimide, if necessary. Examples of the mercapto compound include 2-mercaptopropionic acid, trimethylolpropane (2-thiopropionate), 2-mercaptoethanol, and 2-mercaptoethanol. Mercapto-containing silane coupling agents such as aminothiophenol, 3-mercapto-1,2,4-triazole, and 3-mercapto-propyltrimethoxysilane. Examples of adhesion promoters include benzimidazole, benzoxazole, benzothiazole, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, and 3-morpholinylmethyl- 1-phenyl-triazole-2-thione, 5-amino-3-morpholinylmethyl-thiazole-2-thione, 2-mercapto-5-methylthio-thiadiazole, triazole, Tetrazole, benzotriazole, carboxybenzotriazole, amine-containing benzotriazole, vinyltriazine, and the like. These can be used individually or in combination of 2 or more types. The blending amount thereof is preferably in a range of 10 parts by mass or less per 100 parts by mass of the aforementioned carboxyl group-containing photosensitive compound or carboxyl group-containing compound. When the compounding amount of these compounds exceeds the above-mentioned range, the epoxy group of the aforementioned epoxy compound necessary for the cross-linking reaction (reacts with the epoxy group) is consumed, and the cross-linking density is lowered, which is not preferable.

多數之高分子材料,一旦氧化開始,則不斷連鎖地發生氧化劣化,造成高分子素材之功能降低,因此本發明之感光性組成物中,為了防止氧化,可添加將(1)產生的自由基無效化之自由基補捉劑或/及將(2)產生之過氧化物分解為無害物質,使不產生新的自由基之過氧化物分解劑等之抗氧化劑。 In many polymer materials, once oxidation begins, oxidative degradation will continue to occur continuously, resulting in a decrease in the function of the polymer material. Therefore, in order to prevent oxidation in the photosensitive composition of the present invention, free radicals generated by (1) may be added. An antioxidant such as a deactivated radical scavenger or / and a peroxide decomposer which decomposes the peroxide generated in (2) into a harmless substance so that no new radical is generated.

作為自由基補捉劑而作用的抗氧化劑,可列舉例如氫醌、4-t-丁基兒茶酚、2-t-丁基氫醌、氫醌單甲基醚、2,6-二-t-丁基-p-甲酚、2,2-亞甲基-雙(4-甲基-6-t-丁基酚)、1,1,3-參(2-甲基-4-羥基-5-t-丁基苯基)丁烷、1,3,5-三甲基-2,4,6-參(3,5-二-t-丁基-4-羥基苄基)苯、 1,3,5-參(3’,5’-二-t-丁基-4-羥基苄基)-S-三嗪-2,4,6-(1H,3H,5H)三酮等之酚系;甲基醌、苯醌等之醌系化合物;雙(2,2,6,6-四甲基-4-哌啶基)-癸二酸酯、吩噻嗪等之胺系化合物等。 Examples of the antioxidant acting as a free radical recovery agent include hydroquinone, 4-t-butylcatechol, 2-t-butylhydroquinone, hydroquinone monomethyl ether, and 2,6-di- t-butyl-p-cresol, 2,2-methylene-bis (4-methyl-6-t-butylphenol), 1,1,3-ginseng (2-methyl-4-hydroxy -5-t-butylphenyl) butane, 1,3,5-trimethyl-2,4,6-para (3,5-di-t-butyl-4-hydroxybenzyl) benzene, 1,3,5-ginseng (3 ', 5'-di-t-butyl-4-hydroxybenzyl) -S-triazine-2,4,6- (1H, 3H, 5H) trione, etc. Phenol-based; quinone-based compounds such as methylquinone, benzoquinone; bis (2,2,6,6-tetramethyl-4-piperidinyl) -sebacate, amine-based compounds such as phenothiazine, etc. .

作為過氧化物分解劑而作用的抗氧化劑,可列舉例如三苯基亞磷酸酯等之磷系化合物、季戊四醇四月桂基硫代丙酸酯、二月桂基硫代二丙酸酯、二硬脂基3,3’-硫代二丙酸酯等之硫系化合物等。 Examples of the antioxidant acting as a peroxide decomposing agent include phosphorus-based compounds such as triphenylphosphite, pentaerythritol tetralauryl thiopropionate, dilauryl thiodipropionate, and distearate. Sulfur compounds such as 3,3'-thiodipropionate and the like.

如上述之抗氧化劑,可單獨1種或組合2種以上使用。 These antioxidants can be used alone or in combination of two or more.

本發明之感光性組成物,於上述抗氧化劑以外,可使用紫外線吸收劑。 In the photosensitive composition of the present invention, an ultraviolet absorber can be used in addition to the above-mentioned antioxidant.

如此之紫外線吸收劑,可列舉二苯甲酮衍生物、安息香酸酯衍生物、苯并三唑衍生物、三嗪衍生物、苯并噻唑衍生物、桂皮酸酯衍生物、鄰胺苯甲酸酯衍生物、二苄醯基甲烷衍生物等。 Examples of such ultraviolet absorbers include benzophenone derivatives, benzoate derivatives, benzotriazole derivatives, triazine derivatives, benzothiazole derivatives, cinnamate derivatives, and anthranilic acid. Ester derivatives, dibenzyl fluorenylmethane derivatives, and the like.

如前述之紫外線吸收劑,可單獨1種或組合2種以上使用,藉由與抗氧化劑合併使用,由本發明之感光性組成物所得之成形物可實現安定化。 The aforementioned ultraviolet absorbers can be used singly or in combination of two or more. By using them in combination with an antioxidant, the formed article obtained from the photosensitive composition of the present invention can be stabilized.

進一步地,本發明之感光性組成物中,只要不損及本發明之效果,亦可添加前述成分以外之其他添加劑。添加劑可列舉公知慣用之增黏劑、聚矽氧系、氟系、高分子系等之消泡劑及/或調平劑、酞花青藍、酞花青綠、雙偶氮黃、氧化鈦、碳黑、萘黑(naphthalene black)等之公知著色劑等。進一步地,可依照需要,添加公知慣用之熱聚合抑制劑;咪唑系、噻唑系、三唑系等之矽烷偶合劑;可塑劑、發泡劑、阻燃劑、抗靜電劑、抗老化劑、抗菌.防黴劑等。 Further, in the photosensitive composition of the present invention, additives other than the aforementioned components may be added as long as the effects of the present invention are not impaired. Examples of the additives include well-known and commonly used thickeners, polysiloxane-based, fluorine-based, polymer-based defoamers and / or leveling agents, phthalocyanine blue, phthalocyanine green, disazo yellow, titanium oxide, Carbon black, naphthalene black) and the like. Further, a known and commonly used thermal polymerization inhibitor may be added according to need; silane coupling agents such as imidazole, thiazole, and triazole; plasticizers, foaming agents, flame retardants, antistatic agents, anti-aging agents, Antibacterial. Mildew, etc.

[填料] [filler]

本發明之感光性組成物中,可進一步依需要,以提高密合性、硬度、耐熱性等之特性為目的,含有由無機填料及有機填料所構成群組中選出之至少1種填料。無機填料可列舉硫酸鋇、碳酸鈣、鈦酸鋇、氧化矽、無定形二氧化矽、滑石、黏土、水滑石、紐柏格(Neuburger)矽土粒子、雲母粉等,有機填料可列舉矽粉、耐綸粉、氟粉等。進一步地,為了得到白色外觀或阻燃性,亦可使用氧化鈦或金屬氧化物、氫氧化鋁等之金屬氫氧化物作為顏料增效劑(extender)填料。上述填料當中,低吸濕性、低體積膨脹性特優者為二氧化矽。二氧化矽不論熔融、結晶性,亦可為此等之混合物,特別是經偶合劑等表面處理之二氧化矽的情況,可提高電絕緣性故較佳。其他,作為上述填料可列舉有機膨潤土、蒙脫土、玻璃纖維、碳纖維、氮化硼纖維等之纖維強化材等。 The photosensitive composition of the present invention may further contain at least one kind of filler selected from the group consisting of an inorganic filler and an organic filler for the purpose of improving characteristics such as adhesion, hardness, and heat resistance as needed. Examples of the inorganic filler include barium sulfate, calcium carbonate, barium titanate, silicon oxide, amorphous silicon dioxide, talc, clay, hydrotalcite, Neuburger silica particles, mica powder, and the like, and organic fillers include silicon powder. , Nylon powder, fluorine powder, etc. Furthermore, in order to obtain a white appearance or flame retardancy, a metal hydroxide such as titanium oxide, metal oxide, aluminum hydroxide, or the like may be used as a pigment extender filler. Among the above fillers, silicon dioxide is particularly excellent in low hygroscopicity and low volume expansion. Regardless of the melting and crystallinity, silicon dioxide can also be a mixture of these, especially in the case of surface-treated silicon dioxide, such as a coupling agent, which can improve electrical insulation and is therefore preferred. Other examples of the filler include fiber-reinforced materials such as organic bentonite, montmorillonite, glass fibers, carbon fibers, and boron nitride fibers.

填料之平均粒徑(D50)為25μm以下、更佳為10μm以下、又更佳為3μm以下。此處D50意指根據米氏(Mie)散射理論,使用雷射繞射散射式粒度分布測定法而得之體積積分50%之粒徑。更具體而言,可藉由雷射 繞射散射式粒度分布測定裝置,以體積為基準作成微粒子之粒度分布,以其之中數徑作為平均粒徑來藉以測定。測定樣品較佳可使用以超音波將微粒子分散於水中者。雷射繞射式粒度分布測定裝置可使用(股)堀場製作所製LA-500等。此等無機及/或有機填料之摻合量,相對於前述含有羧基之感光性化合物或含有羧基之化合物每100質量份,以300質量份以下為適當,較佳為5~150質量份之比例。填料之摻合量超過上述比例時,硬化皮膜之耐折性降低,故不佳。 The average particle diameter (D 50 ) of the filler is 25 μm or less, more preferably 10 μm or less, and even more preferably 3 μm or less. Here, D 50 means a particle diameter of 50% of a volume integral obtained by using a Mie scattering theory and a laser diffraction scattering particle size distribution measurement method. More specifically, the particle size distribution of the microparticles can be prepared by using a laser diffraction scattering type particle size distribution measuring device on the basis of volume, and the number diameter can be used as the average particle diameter for measurement. As the measurement sample, it is preferable to use a method in which fine particles are dispersed in water by ultrasonic waves. As the laser diffraction type particle size distribution measuring device, LA-500 manufactured by Horiba, etc. can be used. The blending amount of these inorganic and / or organic fillers is preferably 300 parts by mass or less per 100 parts by mass of the aforementioned carboxyl group-containing photosensitive compound or carboxyl group-containing compound, and is preferably a proportion of 5 to 150 parts by mass. . When the blending amount of the filler exceeds the above-mentioned ratio, the folding resistance of the hardened film is reduced, which is not preferable.

[有機溶劑] [Organic solvents]

本發明之感光性組成物中,為了使前述含有羧基之感光性化合物或環氧化合物容易溶解或分散,或為了調整為適合塗佈的黏度,可使用有機溶劑。如此之有機溶劑,可列舉酮類、芳香族烴類、二醇醚醚類、二醇醚醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。更具體而言,係甲基乙基酮、環己酮等之酮類;甲苯、二甲苯、四甲基苯等之芳香族烴類;賽璐索芙、甲基賽璐索芙、丁基賽璐索芙、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、三乙二醇單乙基醚等之二醇醚醚類;乙酸乙酯、乙酸丁酯、二丙二醇甲基醚乙酸酯、丙二醇甲基醚乙酸酯、丙二醇乙基醚乙酸酯、丙二醇丁基醚乙酸酯、2-羥基異丁酸甲酯等之酯類;乙醇、丙醇、乙二醇、丙二醇等之醇類;辛烷、癸烷 等之脂肪族烴;石油醚、石油腦、氫化石油腦、溶劑石油腦等之石油系溶劑等。如此之有機溶劑,可單獨或作為2種以上之混合物來使用。有機溶劑之摻合量,可依照所期望之黏度作適當設定。 In the photosensitive composition of the present invention, an organic solvent may be used in order to make the aforementioned carboxyl group-containing photosensitive compound or epoxy compound easily dissolve or disperse, or to adjust the viscosity suitable for coating. Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ether ethers, glycol ether ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum-based solvents. More specifically, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; and celluloid, methylcellulose, and butyl Cellusof, carbitol, methylcarbitol, butylcarbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether, etc. Glycol ether ethers; ethyl acetate, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol butyl ether acetate, 2- Esters of methyl isobutyrate; alcohols such as ethanol, propanol, ethylene glycol, propylene glycol; octane, decane And other aliphatic hydrocarbons; petroleum-based solvents such as petroleum ether, petroleum brain, hydrogenated petroleum brain, and solvent petroleum brain. Such an organic solvent can be used alone or as a mixture of two or more kinds. The blending amount of the organic solvent can be appropriately set according to the desired viscosity.

本發明之感光性組成物,可藉由調整為適合於例如以前述有機溶劑塗佈之方法的黏度,於基材上以浸塗法、淋塗法、輥塗佈法、棒塗佈法、網版印刷法、簾塗法等之方法來塗佈,再藉由以約60~100℃之溫度將組成物中所含之有機溶劑揮發乾燥(臨時乾燥),形成抗黏著之塗膜。又,藉由使將上述組成物塗佈於載體薄膜上並乾燥而作為薄膜被捲繞者貼合於基材上,可形成乾燥塗膜。之後藉由接觸式(或非接觸方式),通過形成有圖型之光罩選擇性地以活性能量線曝光或以雷射直接曝光機進行直接圖型曝光,將未曝光部以稀鹼水溶液(例如0.3~3質量%碳酸鈉水溶液)顯影而形成阻劑圖型。進一步地,可使用高壓水銀燈等,以積算曝光量成為500~2000mJ/cm2的方式照射紫外線,來進行終飾硬化。又,可藉由加熱至例如約140~180℃之溫度以熱硬化,使前述含有羧基之感光性化合物或含有羧基之化合物之羧基與環氧化合物之環氧基反應,形成耐熱性、耐藥品性、耐吸濕性、密合性、電特性等之各種特性優良的硬化塗膜。 The photosensitive composition of the present invention can be adjusted to a viscosity suitable for, for example, the aforementioned method of coating with an organic solvent, and the substrate may be subjected to a dip coating method, a shower coating method, a roll coating method, a rod coating method, It is applied by screen printing method, curtain coating method, etc., and the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C to form an anti-adhesive coating film. In addition, a dry coating film can be formed by applying the composition to a carrier film and drying it, and then attaching it as a film to a substrate by a winder. Then, by contact (or non-contact), a patterned mask is used to selectively expose with active energy rays or direct pattern exposure with a laser direct exposure machine, and expose the unexposed part with a dilute alkali aqueous solution ( For example, 0.3 ~ 3 mass% sodium carbonate aqueous solution) is developed to form a resist pattern. Further, a high pressure mercury lamp, etc. may be used to totalizer exposure amount became 500 ~ 2000mJ / cm 2 of ultraviolet rays irradiated, to finish hardening. In addition, by heating to a temperature of, for example, about 140 to 180 ° C., the film may be cured by heat to react the carboxyl group containing the carboxyl group or the carboxyl group-containing compound with the epoxy group epoxy group to form heat resistance and chemical resistance. Hardened coating film with excellent properties including moisture resistance, moisture resistance, adhesion, and electrical properties.

上述基材,除了使用預先形成有電路之印刷配線板或可撓性印刷配線板之外,可使用使用了紙-酚樹脂、紙-環氧樹脂、玻璃布-環氧樹脂、玻璃-聚醯亞胺、玻 璃布/不纖布-環氧樹脂、玻璃布/紙-環氧樹脂、合成纖維-環氧樹脂、氟樹脂.聚乙烯.PPO.氰酸酯等之複合材之全部等級(FR-4等)之銅箔層合板、聚醯亞胺薄膜、PET薄膜、玻璃基板、陶瓷基板、晶圓板等。 The substrate can be a paper-phenol resin, paper-epoxy resin, glass cloth-epoxy resin, glass-polyurethane, in addition to a printed wiring board or a flexible printed wiring board with a circuit formed in advance. Imine, glass Glass cloth / non-fiber cloth-epoxy resin, glass cloth / paper-epoxy resin, synthetic fiber-epoxy resin, fluororesin. Polyethylene. PPO. Copper foil laminates, polyimide films, PET films, glass substrates, ceramic substrates, wafer plates, etc. of all grades of composite materials such as cyanate esters (FR-4, etc.).

塗佈本發明之感光性組成物後所進行之揮發乾燥,可使用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等(使用具備蒸氣之空氣加熱方式的熱源者使乾燥機內之熱風逆流接觸的方法及由噴嘴對支持體吹送的方式)來進行。 Volatile drying performed after coating the photosensitive composition of the present invention can use a hot-air circulation type drying oven, IR furnace, heating plate, convection oven, etc. (using a heat source with air heating method of steam to make hot air in the dryer The method of countercurrent contact and the method of blowing the support from a nozzle).

如以上方式塗佈本發明之感光性組成物,揮發乾燥後,對所得之乾燥塗膜進行曝光(活性能量線之照射)。乾燥塗膜其曝光部(被活性能量線照射之部分)會硬化。 The photosensitive composition of the present invention is applied in the above manner, and after evaporation and drying, the obtained dried coating film is exposed (irradiation of active energy rays). The exposed part (the part irradiated with active energy rays) of the dried coating film is hardened.

用於上述活性能量線照射之曝光機,可使用直接描繪裝置(例如藉由來自電腦的CAD數據直接以雷射描繪影像之雷射直接造影裝置)、搭載金屬鹵化物燈之曝光機、搭載(超)高壓水銀燈之曝光機、搭載水銀短弧燈之曝光機、或使用了(超)高壓水銀燈等之紫外線燈之直接描繪裝置。活性能量線只要係使用最大波長在350~410nm之範圍的雷射光,則氣體雷射、固體雷射均可。又,其曝光量雖隨膜厚等而不同,但一般而言可為5~800mJ/cm2、較佳可為5~700mJ/cm2之範圍內。上述直接描繪裝置可使用例如日本Orbotech公司製、ORC公司製等者,只要使最大波長為350~410nm雷射光震盪的裝 置,則可使用任意裝置。 The exposure machine used for the above-mentioned active energy ray irradiation can use a direct drawing device (for example, a laser direct imaging device that directly draws an image by laser using CAD data from a computer), an exposure machine equipped with a metal halide lamp, and a ( Ultra-high-pressure mercury lamp exposure machine, exposure machine equipped with mercury short-arc lamp, or direct-drawing device of ultraviolet light using (ultra-high-pressure mercury lamp). As long as the active energy ray uses laser light having a maximum wavelength in the range of 350 to 410 nm, both gas lasers and solid lasers can be used. In addition, although the exposure amount varies depending on the film thickness and the like, it may be generally within a range of 5 to 800 mJ / cm 2 , and preferably within a range of 5 to 700 mJ / cm 2 . The direct drawing device may be, for example, manufactured by Orbotech Corporation, ORC Corporation, etc. Any device may be used as long as the device oscillates laser light having a maximum wavelength of 350 to 410 nm.

前述顯影方法,可使用浸漬法、噴灑法、噴霧法、毛刷法等,顯影液可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等之鹼水溶液。 As the development method, a dipping method, a spray method, a spray method, a brush method, or the like can be used, and the developing solution can be potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines, etc. Of alkaline aqueous solution.

本發明之感光性組成物,除了以液狀直接塗佈於基材之方法以外,亦可以具有預先於聚對苯二甲酸乙二酯等之薄膜塗佈感光性組成物後乾燥而形成之乾燥塗膜之乾薄膜形態來使用。將本發明感光性組成物作為乾薄膜使用的情況係如以下所示。 The photosensitive composition of the present invention may have a method in which the photosensitive composition is directly applied to a substrate in a liquid state, and the photosensitive composition may be dried in advance by coating the photosensitive composition on a film such as polyethylene terephthalate. It is used in the form of a dry film of a coating film. The case where the photosensitive composition of the present invention is used as a dry film is as follows.

乾薄膜係具有依序層合載體薄膜、乾燥塗膜、依需要使用之可剝離的覆膜之構造者。乾燥塗膜係為將例如鹼顯影性之感光性組成物塗佈於載體薄膜或覆膜並乾燥而得之層。於載體薄膜形成乾燥塗膜之後,將覆膜層合於其上、或於覆膜上形成乾燥塗膜,將此層合體層合於載體薄膜即可得到乾薄膜。 The dry film is a structure having a carrier film, a dry coating film, and a peelable coating film used in order, which are laminated. The dry coating film is a layer obtained by applying, for example, an alkali developable photosensitive composition to a carrier film or a coating film and drying it. After the carrier film is formed into a dry coating film, a coating film is laminated thereon, or a dry coating film is formed on the coating film, and this laminate is laminated on the carrier film to obtain a dry film.

載體薄膜可使用2~150μm之厚度的聚酯薄膜等之熱可塑性薄膜。 As the carrier film, a thermoplastic film such as a polyester film having a thickness of 2 to 150 μm can be used.

乾燥塗膜,係將鹼顯影性之感光性組成物以刮刀塗佈器、唇式塗佈器(lip coater)、逗號式塗佈器(comma coater)、薄膜塗佈器等於載體薄膜或覆膜上以10~150μm之厚度均勻地塗佈並乾燥而形成。 Dry coating film is used to make the alkali-developable photosensitive composition equal to the carrier film or coating by using a doctor blade coater, lip coater, comma coater, or film coater. It is formed by uniformly coating and drying at a thickness of 10 to 150 μm.

覆膜可使用聚乙烯薄膜、聚丙烯薄膜等,較佳為與乾燥塗膜之接著力比載體薄膜小者。 As the film, a polyethylene film, a polypropylene film, or the like can be used, and the adhesion force with the dried coating film is preferably smaller than that of the carrier film.

使用乾薄膜於印刷配線板上製作保護膜(永久保護膜),係將覆膜剝離,將乾燥塗膜與形成有電路之基材重疊,使用疊合機等貼合,於形成有電路之基材上形成乾燥塗膜。對形成之乾燥塗膜,與前述同樣方式曝光、顯影、加熱硬化,即可形成硬化層。載體薄膜可在曝光前或曝光後任一者時剝離。 Use a dry film to make a protective film (permanent protective film) on a printed wiring board. The film is peeled off, the dry coating film is overlapped with the substrate on which the circuit is formed, and the substrate is formed using a laminator and the like. A dry coating film is formed on the material. A hardened layer can be formed by exposing, developing, and heating and curing the formed dry coating film in the same manner as described above. The carrier film can be peeled off before or after exposure.

再者,本發明之感光性組成物,適合作為印刷配線板之永久被膜用材料,其中尤適合作為抗焊阻劑用材料、層間絕緣材料。 Furthermore, the photosensitive composition of the present invention is suitable as a material for a permanent film of a printed wiring board, and among them, it is particularly suitable as a material for a solder resist and an interlayer insulating material.

〔實施例〕 [Example]

以下,顯示實施例及比較例,以具體地說明本發明,但本發明當然不受下述實施例所限定。再者,以下記載「%」及「份」者,若無特別指明,全部為質量基準。 Hereinafter, examples and comparative examples are shown to specifically explain the present invention, but the present invention is not limited to the following examples. In addition, the "%" and "parts" described below are all based on quality unless otherwise specified.

合成例1 Synthesis Example 1

於具備溫度計、氮導入裝置兼環氧烷導入裝置及攪拌裝置之高壓釜中,置入昭和高分子股份有限公司製酚醛清漆型甲酚樹脂(商品名「Shonol CRG951」、OH當量:119.4)119.4份、氫氧化鉀1.19份、甲苯119.4份,一邊攪拌,同時將系統內氮取代,加熱昇溫。接著,慢慢滴入環氧丙烷63.8份,於125~132℃、0~4.8kg/cm2反應16小時。之後,冷卻至室溫,於此反應溶液中添加混合89%磷 酸1.56份,中和氫氧化鉀,得到不揮發成分62.1%、氫氧基價182.2g/eq.之酚醛清漆型甲酚樹脂之環氧丙烷加成反應物的溶液。此為酚性氫氧基每1當量平均加成約1.08莫耳之環氧烷者。 In an autoclave equipped with a thermometer, a nitrogen introduction device, an alkylene oxide introduction device, and a stirring device, a novolac cresol resin (trade name "Shonol CRG951", OH equivalent weight: 119.4) manufactured by Showa Polymer Co., Ltd. 119.4 Parts, potassium hydroxide 1.19 parts, and toluene 119.4 parts. While stirring, the nitrogen in the system was replaced, and the temperature was raised by heating. Next, 63.8 parts of propylene oxide was slowly dropped, and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours. After that, it was cooled to room temperature, and 1.56 parts of 89% phosphoric acid was added to the reaction solution to neutralize potassium hydroxide to obtain a novolac type cresol resin having a nonvolatile content of 62.1% and a hydroxyl value of 182.2 g / eq. Solution of propylene oxide addition reactant. This is a phenolic hydroxyl group with an average addition of about 1.08 moles of alkylene oxide per equivalent.

將所得之酚醛清漆型甲酚樹脂之環氧烷加成反應物的溶液293.0份、丙烯酸43.2份、甲烷磺酸11.53份、甲基氫醌0.18份、甲苯252.9份,置入具備攪拌機、溫度計、空氣吹入管之反應器,將空氣以10ml/分之速度吹入,一邊攪拌,同時於110℃反應12小時。藉由反應所生成之水,係作為與甲苯之共沸混合物而餾出了12.6份之水。之後,冷卻至室溫,將所得之反應溶液以15%氫氧化鈉水溶液35.35份中和,接著水洗。之後,以蒸發器將甲苯以二乙二醇單乙基醚乙酸酯118.1份取代同時餾除,得到酚醛清漆型丙烯酸酯樹脂溶液。接著,將所得之酚醛清漆型丙烯酸酯樹脂溶液332.5份、環烷酸鉻0.8份、環烷酸鋰0.4份,置入具備攪拌機、溫度計、空氣吹入管之反應器,將空氣以10ml/分之速度吹入,一邊攪拌,同時緩慢添加四氫鄰苯二甲酸酐60.8份,於95~101℃反應6小時,冷卻後取出。如此所得之含有羧基之感光性化合物,不揮發成分為70.9%、固體成分酸價為82.1mgKOH/g。 293.0 parts of a solution of the alkylene oxide addition reaction product of the obtained novolac cresol resin, 43.2 parts of acrylic acid, 11.53 parts of methanesulfonic acid, 0.18 parts of methylhydroquinone, and 252.9 parts of toluene were placed in a mixer, a thermometer, Air was blown into the reactor of the tube, and air was blown in at a rate of 10 ml / min, while stirring, while reacting at 110 ° C for 12 hours. The water produced by the reaction was distilled as 12.6 parts of water as an azeotropic mixture with toluene. After that, it was cooled to room temperature, and the obtained reaction solution was neutralized with 35.35 parts of a 15% sodium hydroxide aqueous solution, followed by washing with water. Thereafter, toluene was replaced with an evaporator by 118.1 parts of diethylene glycol monoethyl ether acetate and distilled off to obtain a novolac type acrylate resin solution. Next, 332.5 parts of the obtained novolak-type acrylate resin solution, 0.8 parts of chromium naphthenate, and 0.4 parts of lithium naphthenate were placed in a reactor equipped with a stirrer, a thermometer, and an air blowing tube, and air was blown at While blowing in at a speed, while stirring, slowly add 60.8 parts of tetrahydrophthalic anhydride, react at 95-101 ° C for 6 hours, and take it out after cooling. The carboxyl group-containing photosensitive compound thus obtained had a nonvolatile content of 70.9% and a solid content acid value of 82.1 mgKOH / g.

實施例1~9及比較例1~3 Examples 1 to 9 and Comparative Examples 1 to 3

以如表1及表2所示比例摻合各成分,攪拌後,以3支輥磨機分散而得到感光性組成物。 Each component was blended in the ratios shown in Tables 1 and 2, and after stirring, it was dispersed with a three-roll mill to obtain a photosensitive composition.

前述表1及表2中之酸價、環氧當量、雙鍵當量係如以下方法測定。 The acid values, epoxy equivalents, and double bond equivalents in the aforementioned Tables 1 and 2 were measured as follows.

<相對於有機成分總量之酸價的測定法> <Measurement method of acid value with respect to total organic component>

將感光性組成物於70℃乾燥24小時,去除有機溶 劑,得到固體成分。於固體成分中添加丙酮以溶解/分散,以離心分離機從固體成分分離填料。使用填料經分離之有機成分,遵照JIS K2501測定酸價。如此方式所得之酸價,係相對於有機成分總量的酸價。 The photosensitive composition was dried at 70 ° C for 24 hours to remove organic solvents. Agent to obtain a solid content. Acetone was added to the solid content to dissolve / disperse it, and the filler was separated from the solid content by a centrifugal separator. Using the separated organic components of the filler, the acid value was measured in accordance with JIS K2501. The acid value obtained in this way is the acid value relative to the total amount of organic components.

<相對於有機成分總量之環氧當量的測定法> <Method for measuring epoxy equivalent with respect to total organic component>

以與測定酸價時同樣方式,得到填料經分離之有機成分。使用此有機成分,遵照JIS K7236,測定第1當量。 In the same manner as in the case of measuring the acid value, an isolated organic component of the filler was obtained. Using this organic component, the first equivalent was measured in accordance with JIS K7236.

另一方面,除了不使用溴化四乙基銨以外,係與第1當量之測定方法同樣的方式,測定第2當量。 On the other hand, the second equivalent was measured in the same manner as the method for measuring the first equivalent except that tetraethylammonium bromide was not used.

將第1當量減去第2當量,算出「相對於有機成分總量之環氧當量」。 Subtract the second equivalent from the first equivalent to calculate the "epoxy equivalent to the total amount of organic components."

<雙鍵當量之測定方法> <Method for measuring double bond equivalent>

以與測定酸價時同樣方式,得到填料經分離之有機成分。使嗎啉與此有機成分反應後,添加乙酸酐,與未反應之嗎啉反應。藉由將有機成分與嗎啉之反應物以過氯酸滴定,算出第3當量。 In the same manner as in the case of measuring the acid value, an isolated organic component of the filler was obtained. After reacting morpholine with this organic component, acetic anhydride is added to react with unreacted morpholine. The third equivalent was calculated by titrating the reactant between the organic component and morpholine with perchloric acid.

將第3當量減去第1當量,得到「相對於有機成分總量之雙鍵當量」。 Subtract the 1st equivalent from the 3rd equivalent to obtain the "double bond equivalent with respect to the total amount of organic components".

<液狀成分之判定方法> <Method for judging liquid components>

液狀之判定,係根據關於危險物之試驗及性狀的省令(平成元年自治省令第1號)別紙第2之「液狀之確認方 法」來進行。 The determination of the liquid state is based on the "Confirmation of liquid state" according to the provincial ordinance (Provincial Decree No. 1 of the Heisei year of the first year) on the test of dangerous substances and properties. Law.

(1)裝置 (1) Device

使用具備恆溫水槽:攪拌機、加熱器、溫度計、自動溫度調節器(可溫度控制±0.1℃者)且深度150mm以上者。 Use a constant temperature water tank: agitator, heater, thermometer, automatic temperature regulator (those with a temperature control of ± 0.1 ℃) and a depth of 150mm or more.

再者,液狀成分之判定,均使用Yamato科學(股)製之低溫恆溫水槽(型式BU300)與投入式恆溫裝置Thermomate(型式BF500)的組合,將自來水約22公升加入低溫恆溫水槽(型式BU300),於其開啟組裝之Thermomate(型式BF500)的電源,設定設定溫度(20℃),將水溫以Thermomate(型式BF500)微調整至設定溫度±0.1℃,但只要是可進行同樣調整之裝置均可使用。 For the determination of liquid components, a combination of a low-temperature thermostatic water tank (type BU300) manufactured by Yamato Scientific Co., Ltd. and a thermostat thermostat (type BF500) was used to add approximately 22 liters of tap water to the low-temperature thermostatic water tank (type BU300). ), Turn on the assembled Thermomate (type BF500) power supply, set the set temperature (20 ° C), and finely adjust the water temperature to the set temperature ± 0.1 ° C with Thermomate (type BF500), but as long as it is a device that can be adjusted the same Can be used.

試驗管: Test tube:

試驗管如圖1所示,係使用內徑30mm、高度120mm之平底圓筒型透明玻璃製者,由管底起算於55mm及85mm之高度分別畫上標線2、3,且將試驗管口以橡皮塞4a密閉之液狀判定用試驗管1a;及同樣尺寸且以同樣方式畫上標線,以於中央設置用以插入/支持溫度計之孔的橡皮塞4b來密閉試驗管口,且於橡皮塞4b插入溫度計5之溫度測定用試驗管1b。以下,將自管底起算55mm高度之標線稱為「A線」、自管底起算85mm高度之標線稱為 「B線」。 As shown in Figure 1, the test tube is made of a flat-bottomed cylindrical transparent glass with an inner diameter of 30mm and a height of 120mm. The heights of 55mm and 85mm from the bottom of the tube are marked with lines 2, 3, and the test tube mouth The test tube 1a for determining the liquid state is sealed with a rubber stopper 4a; and the same size and in the same manner are marked with a rubber stopper 4b for inserting / supporting a thermometer hole in the center to seal the test tube opening, and The rubber stopper 4b is inserted into the temperature measurement test tube 1b of the thermometer 5. In the following, the line with a height of 55mm from the bottom of the tube is referred to as the "A line" and the line with a height of 85mm from the bottom of the tube is referred to as "B line".

溫度計5雖係使用JIS B7410(1982)「石油類試驗用玻璃製溫度計」中規定之凝固點測定用者(SOP-58刻度範圍20~50℃),但只要可測定0~50℃之溫度範圍者即可。 Thermometer 5 is used for measuring the freezing point (SOP-58 scale range 20 ~ 50 ℃) specified in JIS B7410 (1982) "Glass Thermometer for Petroleum Testing", but those who can measure the temperature range of 0 ~ 50 ℃ Just fine.

(2)試驗之實施順序 (2) Test execution sequence

將於溫度20±5℃之大氣壓下放置24小時以上之試料,分別置入到圖1(a)所示液狀判定用試驗管1a與圖1(b)所示溫度測定用試驗管1b中的A線為止。將2支試驗管1a,1b直立靜置於低溫恆溫水槽中使B線在水面下。使溫度計之下端在A線30mm下方。 Samples that have been left for more than 24 hours at an atmospheric pressure of 20 ± 5 ° C are placed in the test tube 1a for determining the liquid state shown in Fig. 1 (a) and the test tube 1b for temperature measurement shown in Fig. 1 (b). Up to the A line. Place two test tubes 1a, 1b upright and place them in a low temperature thermostatic water tank so that the B line is below the water surface. Make the lower end of the thermometer below 30mm of the A line.

試料溫度達到設定溫度20±0.1℃之後保持其狀態10分鐘。10分後,將液狀判斷用試驗管1a由低溫恆溫水槽取出,立即水平放倒於水平的試驗台上,以馬錶測定試驗管內之液面先端由A線移動至B線之時間並記錄。試料在設定溫度中,當測定時間在90秒以內者判定為液狀、超過90秒者判斷為固體狀。 After the sample temperature reaches the set temperature of 20 ± 0.1 ° C, it is maintained for 10 minutes. After 10 minutes, take out the liquid test tube 1a from the low-temperature constant temperature water tank, immediately level it down on a horizontal test bench, and use a horse watch to measure the time at which the liquid tip in the test tube moves from line A to line B recording. At the set temperature, the sample is judged to be liquid when the measurement time is within 90 seconds, and it is judged to be solid when it is longer than 90 seconds.

對各感光性組成物,由以下方式製作試驗基板,進行下述特性評估。結果示於表3及表4。 For each photosensitive composition, a test substrate was prepared in the following manner, and the following characteristics were evaluated. The results are shown in Tables 3 and 4.

<試驗基板之製作> <Manufacture of test substrate>

藉由網版印刷法,將感光性組成物使用100網目之聚酯篩網,以成為20~30μm之厚度的方式,於形成有銅圖 型之印刷配線基板上整面塗佈,將塗膜使用80℃之熱風乾燥器乾燥60分鐘後,將具有阻劑圖型之負片與塗膜密合,使用紫外線曝光裝置((株)ORC製作所、型式HMW-680GW),照射曝光量500mJ/cm2之紫外線。接著,以1%之碳酸鈉水溶液以60秒鐘、2.5kg/cm2之噴壓顯影。之後,對此基板藉由高壓水銀燈以累積曝光量成為1000mJ/cm2的方式照射紫外進行終飾硬化,於160℃加熱1小時進行後硬化,成為評估基板。 Using a screen printing method, a 100-mesh polyester screen was used for the photosensitive composition to form a thickness of 20 to 30 μm on the entire surface of a printed wiring board on which a copper pattern was formed, and a coating film was applied. After drying in a hot air dryer at 80 ° C for 60 minutes, the negative film with a resist pattern was adhered to the coating film, and an ultraviolet exposure device (ORC Manufacturing Co., Ltd., type HMW-680GW) was used, and the exposure amount was 500 mJ / cm 2 Of ultraviolet. Next, it was developed with a 1% sodium carbonate aqueous solution at a spray pressure of 2.5 kg / cm 2 for 60 seconds. Thereafter, the substrate was irradiated with ultraviolet rays by a high-pressure mercury lamp so that the cumulative exposure amount became 1000 mJ / cm 2 , and then cured at 160 ° C. for 1 hour to obtain an evaluation substrate.

絕緣性、裂痕性、圖型形成性(顯影性)及黏著性之試驗係如以下方式進行。 The tests of insulation, cracking, pattern formation (developing properties) and adhesion were performed as follows.

<PCBT中之絕緣電阻> <Insulation resistance in PCBT>

使用IPCB-25之梳型電極B試料,以上述條件製作評估基板,對此梳型電極施加DC30V之偏電壓,使用PCT裝置(ESPEC股份有限公司製HAST YSTEM TPC-412MD),以121℃、濕度97%之條件處理,測定電阻值降低至1.0×107Ω以下的時間。需要300小時以上的情況可評估為良好。 Using the comb electrode B specimen of IPCB-25, an evaluation substrate was prepared under the above conditions. A bias voltage of 30 VDC was applied to the comb electrode. A PCT device (HAST YSTEM TPC-412MD, manufactured by ESPEC Corporation) was used at 121 ° C and humidity. 97% of conditions, the time required to reduce the resistance value to 1.0 × 10 7 Ω or less was measured. A situation that requires more than 300 hours can be evaluated as good.

<TCT角落裂痕> <TCT corner crack>

於形成有2mm之銅線圖型的基板上塗佈前述感光性組成物,與上述同樣方式曝光、顯影後,進行紫外線照射、熱硬化,製作於銅線上形成有7個3mm見方之阻劑圖型的評估基板。將此評估基板置入在-65℃與150℃之間 進行溫度循環之冷熱循環機,進行TCT(Thermal Cycle Test)。此外,觀察1000循環時之外觀,計數裂痕數。裂痕數為30/68以下的情況則可評估為良好。再者,分母之數值「68」意指3mm見方之阻劑圖型的4角(4個)×17個,共68處之角,分子之數值「30」表示裂痕發生數目。 The aforementioned photosensitive composition was coated on a substrate having a copper wire pattern of 2 mm, and exposed and developed in the same manner as above, followed by ultraviolet irradiation and thermal curing. Seven copper resists of 3 mm square size were formed on the copper wire. Type evaluation substrate. Place this evaluation substrate between -65 ° C and 150 ° C The hot and cold cycle machine that performs temperature cycling performs TCT (Thermal Cycle Test). In addition, the appearance at 1,000 cycles was observed, and the number of cracks was counted. A case where the number of cracks is 30/68 or less can be evaluated as good. In addition, the value of the denominator "68" means 4 corners (4) x 17 corners of a 3mm square resist pattern, a total of 68 corners, and the value of the numerator "30" indicates the number of cracks.

<圖型形成性> <Pattern formation>

以放大鏡來目視判定曝光、顯影後的狀態。結果如表3及表4所示,實施例1~9、比較例1~3中,可形成圖型。 Use a magnifying glass to visually determine the state after exposure and development. The results are shown in Tables 3 and 4. In Examples 1 to 9 and Comparative Examples 1 to 3, patterns can be formed.

<黏著性> <Adhesiveness>

分別將感光性組成物以網版印刷整面塗佈於形成有圖型之銅箔基板上,以80℃之熱風循環式乾燥爐乾燥30分鐘,放冷至室溫。將PET製負片觸抵於此基板,以ORC公司製(HMW-GW20)在1分鐘減壓條件下壓合,之後,評估負片剝離後薄膜之貼附狀態。 The photosensitive composition was coated on the entire surface of the patterned copper foil substrate by screen printing, dried in a hot air circulation drying oven at 80 ° C. for 30 minutes, and allowed to cool to room temperature. A PET negative film was brought into contact with this substrate, and pressed under a reduced pressure condition of ORC (HMW-GW20) for 1 minute, and then the state of the film after the negative film was peeled off was evaluated.

良好:薄膜剝離時,無抵抗力,於塗膜未殘留痕跡。 Good: When the film is peeled off, there is no resistance and no trace remains on the coating film.

不良:薄膜剝離時,有抵抗力,於塗膜殘留有痕跡。 Defective: When the film is peeled off, it has resistance, leaving traces on the coating film.

如表3所示,實施例1~9中可良好地形成圖型,即使在高溫高濕度下亦可維持長時間絕緣性、且可抑制裂痕產生。但是,如表4所示,由感光性組成物中去除填料後組成物全體之雙鍵當量未達400之比較例1~3中,在高溫高濕度下無法長時間維持絕緣性、且裂痕產生亦多。 As shown in Table 3, the patterns can be formed well in Examples 1 to 9, and the insulation can be maintained for a long time even under high temperature and high humidity, and the occurrence of cracks can be suppressed. However, as shown in Table 4, in Comparative Examples 1 to 3 in which the double bond equivalent of the entire composition was less than 400 after the filler was removed from the photosensitive composition, the insulation could not be maintained for a long time under high temperature and high humidity, and cracks occurred. Also many.

〔產業上之可利用性〕 [Industrial availability]

本發明之硬化性樹脂組成物或其乾薄膜,適合作為印刷配線板之永久被膜用材料,其中尤可有利於使用作為抗焊阻劑用材料、層間絕緣材料。 The curable resin composition or the dry film of the present invention is suitable as a material for a permanent coating of a printed wiring board, and among them, it is particularly advantageous to be used as a material for a solder resist and an interlayer insulating material.

Claims (6)

一種感光性組成物,其係含有(A)含有羧基之感光性化合物、(B)光聚合起始劑、及(C)環氧化合物之感光性組成物,其特徵在於該感光性組成物之雙鍵當量,於不含有有機溶劑及填料之狀態下,為450以上、646以下,前述(C)環氧化合物之環氧基,相對於前述(A)含有羧基之感光性化合物之羧基1當量,為1.84當量以上、4當量以下,且前述(A)含有羧基之感光性化合物,包含下述(2)~(9)之任一種:(2)使分子內具有1個以上之乙烯性不飽和基與1個環氧基之化合物,與藉由使不飽和羧酸,與具有不飽和雙鍵與苯環之化合物共聚合所得之含有羧基之樹脂反應而成之含有羧基之感光性樹脂;(3)於芳香族二異氰酸酯、與含有羧基之二醇化合物及二醇化合物之加成聚合反應以合成含有羧基之胺基甲酸酯樹脂當中,添加分子內具有1個氫氧基與1個以上之(甲基)丙烯酸基之化合物,以進行末端(甲基)丙烯酸酯化而得之含有羧基之感光性胺基甲酸酯樹脂;(4)二異氰酸酯、與具有苯環的2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含有羧基之二醇化合物及二醇化合物之加成聚合反應而得之含有羧基之感光性胺基甲酸酯樹脂;(5)於芳香族二異氰酸酯、與含有羧基之二醇化合物及二醇化合物之加成聚合反應以合成含有羧基之胺基甲酸酯樹脂當中,添加分子內具有1個異氰酸酯基與1個以上之(甲基)丙烯酸基的化合物,以進行末端(甲基)丙烯酸酯化而得之含有羧基之感光性胺基甲酸酯樹脂;(6)使(甲基)丙烯酸與具有苯環的2官能或其以上之多官能環氧樹脂反應,對存在於側鏈之氫氧基加成2元酸酐而得之含有羧基之感光性樹脂;(7)使(甲基)丙烯酸與將具有苯環的2官能環氧樹脂之氫氧基進一步以表氯醇來環氧基化而得之多官能環氧樹脂反應,對所生成之氫氧基加成2元酸酐而得之含有羧基之感光性樹脂;(8)使環狀醚及/或環狀碳酸酯加成於多官能酚化合物,將所得之氫氧基以(甲基)丙烯酸部分酯化,使多元酸酐與剩餘的氫氧基反應而得之含有羧基之感光性樹脂;及(9)對如上述(3)~(8)之樹脂進一步加成分子中具有1個環氧基與1個以上之(甲基)丙烯醯基的化合物而成之含有羧基之感光性樹脂。A photosensitive composition containing (A) a photosensitive compound containing a carboxyl group, (B) a photopolymerization initiator, and (C) an epoxy compound, characterized in that the photosensitive composition The double bond equivalent is 450 or more and 646 or less in the state of not containing an organic solvent and a filler. The epoxy group of the (C) epoxy compound is equivalent to the carboxyl group of the (A) carboxyl group-containing photosensitive compound , Which is 1.84 equivalents or more and 4 equivalents or less, and the (A) carboxyl group-containing photosensitive compound includes any one of the following (2) to (9): (2) The molecule has at least one ethylenic compound. A compound containing a saturated group and an epoxy group, and a carboxyl group-containing photosensitive resin obtained by reacting a carboxyl group-containing resin obtained by copolymerizing an unsaturated carboxylic acid with a compound having an unsaturated double bond and a benzene ring; (3) In the addition polymerization reaction of aromatic diisocyanate, carboxyl group-containing diol compound and diol compound to synthesize carboxyl group-containing urethane resin, add 1 hydroxyl group and 1 in the molecule The above (meth) acrylic group compound is a photosensitive urethane resin containing carboxyl group obtained by terminal (meth) acrylic esterification; (4) diisocyanate and bifunctional ring with benzene ring (Meth) acrylic acid esters of oxygen resins or their partial anhydride modified products, carboxyl group-containing diol compounds and diol compounds obtained by the addition polymerization reaction of carboxyl group-containing photosensitive urethane resins; (5) Addition polymerization reaction of aromatic diisocyanate, carboxyl group-containing diol compound and diol compound to synthesize carboxyl group-containing carbamate resin, adding one isocyanate group and one or more (methyl ) Acrylic-based compound, a carboxyl group-containing photosensitive urethane resin obtained by terminal (meth) acrylic esterification; (6) (Meth) acrylic acid and a bifunctional benzene ring or more The reaction of a multifunctional epoxy resin to add a dibasic acid anhydride to the hydroxyl group present in the side chain to obtain a photosensitive resin containing a carboxyl group; The hydroxyl group of the oxygen resin is further reacted with epichlorohydrin to obtain a multifunctional epoxy resin, and a carboxyl group-containing photosensitive resin is obtained by adding a dibasic acid anhydride to the generated hydroxyl group; (8 ) Adding cyclic ether and / or cyclic carbonate to the multifunctional phenol compound, partially esterifying the resulting hydroxyl group with (meth) acrylic acid, and reacting the polyhydric anhydride with the remaining hydroxyl group Carboxyl photosensitive resin; and (9) The resin as described in (3) to (8) above is further added with a compound having one epoxy group and more than one (meth) acryloyl group in the molecule Photosensitive resin containing carboxyl groups. 如申請專利範圍第1項之感光性組成物,其進一步含有(D)不具有羧基之感光性化合物,且該(D)係分子中具有1個以上之乙烯性不飽和雙鍵的化合物。For example, the photosensitive composition of claim 1 further contains (D) a photosensitive compound having no carboxyl group, and (D) is a compound having one or more ethylenically unsaturated double bonds in the molecule. 如申請專利範圍第2項之感光性組成物,其中前述(A)含有羧基之感光性化合物與前述(D)不具有羧基之感光性化合物之混合成分中的前述(D)不具有羧基之感光性化合物之含有率為30質量%以下。The photosensitive composition as claimed in Item 2 of the patent application, wherein the (D) photosensitive compound without a carboxyl group in the mixed component of the aforementioned (A) photosensitive compound containing a carboxyl group and the aforementioned (D) photosensitive compound without a carboxyl group The content rate of the sexual compound is 30% by mass or less. 一種感光性組成物,其係含有(A’)含有羧基之化合物、(B)光聚合起始劑、及(C)環氧化合物之感光性組成物,其特徵在於前述(A’)含有羧基之化合物,包含下述(1)~(9)之任一種:(1)藉由使(甲基)丙烯酸等之不飽和羧酸、與具有不飽和雙鍵與苯環的化合物共聚合所得之含有羧基之樹脂;(2)使分子內具有1個以上之乙烯性不飽和基與1個環氧基之化合物,與藉由使不飽和羧酸,與具有不飽和雙鍵與苯環之化合物共聚合所得之含有羧基之樹脂反應而成之含有羧基之感光性樹脂;(3)於芳香族二異氰酸酯、與含有羧基之二醇化合物及二醇化合物之加成聚合反應以合成含有羧基之胺基甲酸酯樹脂當中,添加分子內具有1個氫氧基與1個以上之(甲基)丙烯酸基之化合物,以進行末端(甲基)丙烯酸酯化而得之含有羧基之感光性胺基甲酸酯樹脂;(4)二異氰酸酯、與具有苯環的2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含有羧基之二醇化合物及二醇化合物之加成聚合反應而得之含有羧基之感光性胺基甲酸酯樹脂;(5)於芳香族二異氰酸酯、與含有羧基之二醇化合物及二醇化合物之加成聚合反應以合成含有羧基之胺基甲酸酯樹脂當中,添加分子內具有1個異氰酸酯基與1個以上之(甲基)丙烯酸基的化合物,以進行末端(甲基)丙烯酸酯化而得之含有羧基之感光性胺基甲酸酯樹脂;(6)使(甲基)丙烯酸與具有苯環的2官能或其以上之多官能環氧樹脂反應,對存在於側鏈之氫氧基加成2元酸酐而得之含有羧基之感光性樹脂;(7)使(甲基)丙烯酸與將具有苯環的2官能環氧樹脂之氫氧基進一步以表氯醇來環氧基化而得之多官能環氧樹脂反應,對所生成之氫氧基加成2元酸酐而得之含有羧基之感光性樹脂;(8)使環狀醚及/或環狀碳酸酯加成於多官能酚化合物,將所得之氫氧基以(甲基)丙烯酸部分酯化,使多元酸酐與剩餘的氫氧基反應而得之含有羧基之感光性樹脂;及(9)對如上述(1)、(3)~(8)之樹脂進一步加成分子中具有1個環氧基與1個以上之(甲基)丙烯醯基的化合物而成之含有羧基之感光性樹脂;前述(C)環氧化合物之環氧基,相對於前述(A’)含有羧基之化合物之羧基1當量,為1.84當量以上、4當量以下,且該感光性組成物中所含有之液狀成分之含有率,相對於有機溶劑及填料以外的全部成分,為5質量%以上、30質量%以下,該感光性組成物之雙鍵當量,於不含有有機溶劑及填料之狀態下,為450以上、646以下。A photosensitive composition comprising (A ') a carboxyl group-containing compound, (B) a photopolymerization initiator, and (C) an epoxy compound, which is characterized in that the aforementioned (A') contains a carboxyl group The compound includes any of the following (1) to (9): (1) obtained by copolymerizing an unsaturated carboxylic acid such as (meth) acrylic acid with a compound having an unsaturated double bond and a benzene ring Resins containing carboxyl groups; (2) Compounds that have more than one ethylenically unsaturated group and one epoxy group in the molecule, and compounds that have unsaturated double bonds and benzene rings by making unsaturated carboxylic acids The carboxyl group-containing photosensitive resin obtained by reacting the carboxyl group-containing resin obtained by copolymerization; (3) Addition polymerization reaction of aromatic diisocyanate, carboxyl group-containing diol compound and diol compound to synthesize carboxyl group-containing amine In the urethane resin, a compound having one hydroxyl group and one or more (meth) acrylic groups in the molecule is added to obtain a carboxyl group-containing photosensitive amine group obtained by esterifying the terminal (meth) acrylate Formate resin; (4) Addition polymerization of diisocyanate, (meth) acrylate with bifunctional epoxy resin having benzene ring or partial acid anhydride modification, diol compound containing carboxyl group and diol compound The resulting carboxyl group-containing photosensitive urethane resin; (5) Addition polymerization reaction of aromatic diisocyanate, carboxyl group-containing diol compound and diol compound to synthesize carboxyl group-containing urethane group Among the resins, a compound containing a carboxyl group-containing photosensitive urethane resin obtained by adding a compound having one isocyanate group and one or more (meth) acrylic groups in the molecule for terminal (meth) acrylate esterification; (6) A carboxyl group-containing photosensitive resin obtained by reacting (meth) acrylic acid with a bifunctional or more multifunctional epoxy resin having a benzene ring to add a dibasic acid anhydride to the hydroxyl group present in the side chain ; (7) reacting (meth) acrylic acid with a polyfunctional epoxy resin obtained by further epoxidizing the hydroxyl group of a bifunctional epoxy resin having a benzene ring with epichlorohydrin, and reacting with the generated hydrogen A photosensitive resin containing a carboxyl group obtained by adding an oxygen group to a dibasic acid anhydride; (8) Adding a cyclic ether and / or cyclic carbonate to a multifunctional phenol compound, and converting the resulting hydroxyl group to (methyl) Acrylic acid partially esterified to make polyacid anhydride react with the remaining hydroxyl group to obtain a carboxyl group-containing photosensitive resin; and (9) The above resins (1), (3) to (8) are further added to the molecular weight A carboxyl group-containing photosensitive resin composed of a compound having one epoxy group and one or more (meth) acryloyl groups; the epoxy group of the aforementioned (C) epoxy compound contains more than the aforementioned (A ') The equivalent of the carboxyl group of the carboxyl compound is 1.84 equivalents or more and 4 equivalents or less, and the content of the liquid component contained in the photosensitive composition is 5 mass% or more relative to all components except the organic solvent and the filler 30% by mass or less, the double bond equivalent of the photosensitive composition is 450 or more and 646 or less in the state of not containing organic solvents and fillers. 如申請專利範圍第4項之感光性組成物,其中前述(C)環氧化合物之環氧基的數目為2。For example, in the photosensitive composition of claim 4, the number of epoxy groups of the aforementioned (C) epoxy compound is 2. 一種印刷配線板,其特徵在於具有使用如申請專利範圍第1~5項中任一項之感光性組成物而形成之硬化層。A printed wiring board is characterized by having a hardened layer formed using the photosensitive composition as described in any one of patent application items 1 to 5.
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