TWI618753B - Color photoresist composition - Google Patents

Color photoresist composition Download PDF

Info

Publication number
TWI618753B
TWI618753B TW105116138A TW105116138A TWI618753B TW I618753 B TWI618753 B TW I618753B TW 105116138 A TW105116138 A TW 105116138A TW 105116138 A TW105116138 A TW 105116138A TW I618753 B TWI618753 B TW I618753B
Authority
TW
Taiwan
Prior art keywords
photoresist composition
resin material
copolymer
dielectric constant
weight
Prior art date
Application number
TW105116138A
Other languages
Chinese (zh)
Other versions
TW201741403A (en
Inventor
許晉瑞
Original Assignee
住華科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住華科技股份有限公司 filed Critical 住華科技股份有限公司
Priority to TW105116138A priority Critical patent/TWI618753B/en
Publication of TW201741403A publication Critical patent/TW201741403A/en
Application granted granted Critical
Publication of TWI618753B publication Critical patent/TWI618753B/en

Links

Landscapes

  • Materials For Photolithography (AREA)

Abstract

一種彩色光阻組成物及其介電常數損失率的檢測方法。彩色光阻組成物包括一紅色料、一樹脂材料、一光聚合性單體以及一光起始劑。樹脂材料係為一第一共聚物或一第二共聚物。第一共聚物包括三環癸基丙烯酸甲酯(tricyclodecyl methacrylate,TCDMA)、苯(benzene)和丙烯酸(AA),第二共聚物包括環氧二環戊烯甲基丙烯酸酯(epoxy dicyclopentenyl acrylate,EDCPA)、二環戊烯甲基丙烯酸酯(dicyclopentenyl acrylate,DCPA)、乙烯甲苯(vinyl toluene,VT)和丙烯酸(AA)。樹脂材料相對於樹脂材料和光聚合性單體之總和的重量比例係為大於或等於30wt%。光起始劑包括一肟系(oxime)光起始劑。 A color photoresist composition and a method for detecting a dielectric constant loss rate thereof. The color photoresist composition includes a red material, a resin material, a photopolymerizable monomer, and a photoinitiator. The resin material is a first copolymer or a second copolymer. The first copolymer includes tricyclodecyl methacrylate (TCDMA), benzene, and acrylic acid (AA). The second copolymer includes epoxy dicyclopentenyl acrylate (EDCPA). ), Dicyclopentenyl acrylate (DCPA), vinyl toluene (VT), and acrylic acid (AA). The weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is 30% by weight or more. Photoinitiators include an oxime photoinitiator.

Description

彩色光阻組成物 Color photoresist composition

本揭露內容是有關於一種彩色光阻組成物及其介電常數損失率的檢測方法,特別是一種用於彩色濾光層的彩色光阻組成物及其介電常數損失率的檢測方法。 The disclosure relates to a color photoresist composition and a method for detecting a dielectric constant loss rate thereof, and more particularly to a color photoresist composition for a color filter layer and a method for detecting a dielectric constant loss rate thereof.

彩色液晶顯示裝置採用彩色濾光層以呈現彩色的顯示畫面,而彩色濾光層的光學特性對於彩色液晶顯示裝置的光學顯示效果具有關鍵的影響。彩色濾光層包括不同顏色的光阻層。 The color liquid crystal display device uses a color filter layer to present a color display screen, and the optical characteristics of the color filter layer have a key influence on the optical display effect of the color liquid crystal display device. The color filter layer includes photoresist layers of different colors.

當顯示裝置的操作頻率改變時,光阻層材料基於其本身的特性有可能因為操作頻率的改變而崩解,使得介電常數隨著操作頻率的改變而下降,進而對於顯示裝置的電氣特性有不良的影響。 When the operating frequency of the display device is changed, the photoresist layer material may be disintegrated due to the change of the operating frequency based on its own characteristics, so that the dielectric constant will decrease with the change of the operating frequency, which will have an impact on the electrical characteristics of the display device. Adverse effects.

本揭露內容係有關於一種彩色光阻組成物及其介電常數損失率的檢測方法。根據本揭露內容之實施例的彩色光阻組成物均具有較佳的介電常數穩定性,因而可使得製作而成的光阻層具有較佳的電氣特性。 This disclosure relates to a color photoresist composition and a method for detecting its dielectric constant loss rate. The color photoresist compositions according to the embodiments of the present disclosure all have better dielectric constant stability, so that the photoresist layer manufactured can have better electrical characteristics.

根據本揭露內容之一實施例,係提出一種彩色光阻組成物。彩色光阻組成物包括一紅色料、一樹脂材料、一光聚合性單體以及一光起始劑。樹脂材料係為一第一共聚物或一第二共聚物。第一共聚物包括三環癸基丙烯酸甲酯(tricyclodecyl methacrylate,TCDMA)和丙烯酸(AA),第二共聚物包括環氧二環戊烯甲基丙烯酸酯(epoxy dicyclopentenyl acrylate,EDCPA)、二環戊烯甲基丙烯酸酯(dicyclopentenyl acrylate,DCPA)、乙烯甲苯(vinyl toluene,VT)和丙烯酸(AA)。樹脂材料相對於樹脂材料和光聚合性單體之總和的重量比例係為大於或等於30wt%。光起始劑包括一肟系(oxime)光起始劑。 According to an embodiment of the present disclosure, a color photoresist composition is provided. The color photoresist composition includes a red material, a resin material, a photopolymerizable monomer, and a photoinitiator. The resin material is a first copolymer or a second copolymer. The first copolymer includes tricyclodecyl methacrylate (TCDMA) and acrylic acid (AA), and the second copolymer includes epoxy dicyclopentenyl acrylate (EDCPA), dicyclopentyl Dicyclopentenyl acrylate (DCPA), vinyl toluene (VT) and acrylic acid (AA). The weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is 30% by weight or more. Photoinitiators include an oxime photoinitiator.

根據本揭露內容之另一實施例,係提出一種彩色光阻組成物。彩色光阻組成物包括一彩色料、一樹脂材料、一光聚合性單體以及一肟系(oxime)光起始劑。彩色料包括一C.I.顏料綠58以及一C.I.顏料黃138。樹脂材料包括一第一共聚物或一第二共聚物。第一共聚物包括三環癸基丙烯酸甲酯(tricyclodecyl methacrylate,TCDMA)和丙烯酸(AA),第二共聚物包括環氧二環戊烯甲基丙烯酸酯(EDCPA)、二環戊烯甲基丙烯酸酯(DCPA)、乙烯甲苯(VT)和丙烯酸(AA)。 According to another embodiment of the present disclosure, a color photoresist composition is provided. The color photoresist composition includes a color material, a resin material, a photopolymerizable monomer, and an oxime photoinitiator. The color material includes a C.I. Pigment Green 58 and a C.I. Pigment Yellow 138. The resin material includes a first copolymer or a second copolymer. The first copolymer includes tricyclodecyl methacrylate (TCDMA) and acrylic acid (AA), and the second copolymer includes epoxy dicyclopentene methacrylate (EDCPA), dicyclopentene methacrylate Esters (DCPA), vinyltoluene (VT) and acrylic acid (AA).

根據本揭露內容之又一實施例,係提出一種彩色光阻組成物的介電常數損失率的檢測方法。彩色光阻組成物的介電常數損失率的檢測方法包括:提供一彩色光阻組成物;於一第一操作頻率時對彩色光阻組成物進行量測以得到一第一介電常數E1;以及於一第二操作頻率時對彩色光阻組成物進行量測以得到一第二介電常數E2,則彩色光阻組成物的介電常數損失率係為 |E1-E2|/E1。 According to another embodiment of the present disclosure, a method for detecting a dielectric constant loss rate of a color photoresist composition is provided. The method for detecting the dielectric constant loss rate of the color photoresist composition includes: providing a color photoresist composition; measuring the color photoresist composition at a first operating frequency to obtain a first dielectric constant E1; And measuring the color photoresist composition at a second operating frequency to obtain a second dielectric constant E2, the dielectric constant loss rate of the color photoresist composition is | E1-E2 | / E1.

為了對本發明之上述及其他方面有更佳的瞭解,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下: In order to have a better understanding of the above and other aspects of the present invention, preferred embodiments are described below in detail with the accompanying drawings, as follows:

S1~S2‧‧‧曲線 S1 ~ S2‧‧‧ Curve

第1圖繪示根據本揭露內容之實施例和比較例的紅色光阻組成物的介電常數損失率及介電常數損失。 FIG. 1 illustrates the dielectric constant loss rate and the dielectric constant loss of the red photoresist composition according to the examples and comparative examples of the present disclosure.

第2圖繪示根據本揭露內容之實施例和比較例的綠色光阻組成物的介電常數損失率及介電常數損失。 FIG. 2 illustrates the dielectric constant loss rate and the dielectric constant loss of the green photoresist composition according to the examples and comparative examples according to the disclosure.

根據本揭露內容之實施例的彩色光阻組成物均具有較佳的介電常數穩定性,因而可使得製作而成的光阻層具有較佳的電氣特性。實施例所提出的組成為舉例說明之用,並非對本揭露內容欲保護之範圍做限縮。具有通常知識者當可依據實際實施態樣的需要對該些組成加以修飾或變化。 The color photoresist compositions according to the embodiments of the present disclosure all have better dielectric constant stability, so that the photoresist layer manufactured can have better electrical characteristics. The composition proposed in the embodiment is for illustrative purposes, and is not intended to limit the scope of the disclosure to be protected. Those with ordinary knowledge should modify or change these components according to the needs of actual implementation.

本文所述之「介電常數損失率」表示在不同操作頻率下測得的兩個介電常數之數值差異的比例,例如「介電常數損失率(20~1000Hz)」的計算方式為:((介電常數(1000Hz)-介電常數(20Hz))/介電常數(1000Hz),其中介電常數(1000Hz)表示該等材料在操作頻率為1000Hz時所測得的介電常數,介電常數(20Hz)表示該等材料在操作頻率為20Hz時所測得的介電常數。「介電常數損失率」表示該等材料在操作頻率改變時,其介電常數的變化情 形,可以用來呈現該等材料相對於不同操作頻率的電氣特性的穩定性。 The "dielectric constant loss rate" described in this article represents the ratio of the two dielectric constant values measured at different operating frequencies. For example, the "dielectric constant loss rate (20 ~ 1000Hz)" is calculated as: ( (Dielectric constant (1000Hz)-Dielectric constant (20Hz)) / Dielectric constant (1000Hz), where the dielectric constant (1000Hz) represents the dielectric constant measured by these materials when the operating frequency is 1000Hz. The constant (20Hz) represents the dielectric constant of these materials measured at an operating frequency of 20Hz. The "dielectric constant loss rate" represents the change in the dielectric constant of these materials when the operating frequency changes. Shape can be used to show the stability of the electrical characteristics of these materials with respect to different operating frequencies.

根據本揭露內容之一些實施例,係提出一種彩色光阻組成物的介電常數損失率的檢測方法。彩色光阻組成物的介電常數損失率的檢測方法包括:提供一彩色光阻組成物;於一第一操作頻率時對彩色光阻組成物進行量測以得到一第一介電常數E1;以及於一第二操作頻率時對彩色光阻組成物進行量測以得到一第二介電常數E2,第一介電常數E1大於第二介電常數E2,則彩色光阻組成物的介電常數損失率係為|E1-E2|/E1。 According to some embodiments of the present disclosure, a method for detecting a dielectric constant loss rate of a color photoresist composition is proposed. The method for detecting the dielectric constant loss rate of the color photoresist composition includes: providing a color photoresist composition; measuring the color photoresist composition at a first operating frequency to obtain a first dielectric constant E1; And measuring the color photoresist composition at a second operating frequency to obtain a second dielectric constant E2, where the first dielectric constant E1 is greater than the second dielectric constant E2, the dielectric of the color photoresist composition The constant loss rate is | E1-E2 | / E1.

一些實施例中,第一操作頻率例如是1000Hz,第二操作頻率例如是20Hz。 In some embodiments, the first operating frequency is, for example, 1000 Hz, and the second operating frequency is, for example, 20 Hz.

根據本揭露內容之一些實施例,係提供一種彩色光阻組成物。一些實施例中,彩色光阻組成物可包括一紅色料、一樹脂材料、一光聚合性單體以及一光起始劑。樹脂材料係為一第一共聚物或一第二共聚物。第一共聚物包括三環癸基丙烯酸甲酯(tricyclodecyl methacrylate,TCDMA)和丙烯酸(AA),並且以苯(benzene)作為溶劑,也就是說,第一共聚物主要是由三環癸基丙烯酸甲酯(TCDMA)和丙烯酸進行共聚合反應而成。第二共聚物包括環氧二環戊烯甲基丙烯酸酯(epoxy dicyclopentenyl acrylate,EDCPA)、二環戊烯甲基丙烯酸酯(dicyclopentenyl acrylate,DCPA)、乙烯甲苯(vinyl toluene,VT)和丙烯酸(AA),也就是說,第二共聚物主要是由環氧二環戊烯甲基丙烯酸酯(EDCPA)、二環戊烯甲基丙烯酸酯(DCPA)、乙烯甲苯(VT)和丙烯酸進行共聚合反應而成。樹脂材料相對於樹脂材料和光聚合性單體之總和的重量 比例例如係為大於或等於30wt%。光起始劑包括一肟系(oxime)光起始劑。 According to some embodiments of the present disclosure, a color photoresist composition is provided. In some embodiments, the color photoresist composition may include a red material, a resin material, a photopolymerizable monomer, and a photoinitiator. The resin material is a first copolymer or a second copolymer. The first copolymer includes tricyclodecyl methacrylate (TCDMA) and acrylic acid (AA), and uses benzene as a solvent, that is, the first copolymer is mainly composed of tricyclodecyl methacrylate Ester (TCDMA) and acrylic acid are copolymerized. The second copolymer includes epoxy dicyclopentenyl acrylate (EDCPA), dicyclopentenyl acrylate (DCPA), vinyl toluene (VT), and acrylic acid (AA) ), That is, the second copolymer is mainly copolymerized by epoxy dicyclopentene methacrylate (EDCPA), dicyclopentene methacrylate (DCPA), vinyl toluene (VT), and acrylic acid. Made. The weight of the resin material relative to the sum of the resin material and the photopolymerizable monomer The ratio is, for example, 30% by weight or more. Photoinitiators include an oxime photoinitiator.

三環癸基丙烯酸甲酯(TCDMA)以化學式表示如下: The tricyclic decyl methyl acrylate (TCDMA) is represented by the chemical formula as follows:

二環戊烯甲基丙烯酸酯(DCPA)以化學式表示如下: Dicyclopentene methacrylate (DCPA) is represented by the chemical formula as follows:

環氧二環戊烯甲基丙烯酸酯(EDCPA)以化學式表示如下: The epoxy dicyclopentene methacrylate (EDCPA) is represented by the chemical formula as follows:

實施例中,光聚合性單體係為具有不飽和雙鍵(unsaturated double bond)並且可以進行光聚合交聯反應的任何適合單體。 In the examples, the photopolymerizable single system is any suitable monomer having an unsaturated double bond and capable of performing a photopolymerization crosslinking reaction.

根據本揭露內容之實施例,彩色光阻組成物例如可以用於製作彩色濾光層的彩色光阻層。 According to the embodiment of the present disclosure, the color photoresist composition can be used to make a color photoresist layer of a color filter layer, for example.

一些實施例中,紅色料包括一C.I.顏料紅254以及一紅色染料,則彩色光阻組成物例如是紅色光阻組成物,可以用於製作紅色光阻層。 In some embodiments, the red material includes a C.I. Pigment Red 254 and a red dye. The color photoresist composition is, for example, a red photoresist composition, and can be used to make a red photoresist layer.

一些實施例中,樹脂材料相對於樹脂材料和光聚合性單體之總和的重量比例例如係為小於72wt%。一些實施例中,樹脂材料相對於樹脂材料和光聚合性單體之總和的重量比例例如係為60~68wt%。 In some embodiments, the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is, for example, less than 72% by weight. In some embodiments, the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is, for example, 60 to 68% by weight.

一實施例中,紅色光阻組成物中的光起始劑係為肟系(oxime)光起始劑,且樹脂材料係為如前述的第一共聚物,且樹脂材料相對於樹脂材料和光聚合性單體之總和的重量比例例如係為大於或等於55wt%。 In one embodiment, the photoinitiator in the red photoresist composition is an oxime photoinitiator, and the resin material is a first copolymer as described above, and the resin material is polymerized with respect to the resin material and the photopolymer. The weight ratio of the sum of the sexual monomers is, for example, 55 wt% or more.

一實施例中,紅色光阻組成物中的樹脂材料係為前述的第二共聚物,且樹脂材料相對於樹脂材料和光聚合性單體之總和的重量比例例如係為大於或等於56wt%。 In one embodiment, the resin material in the red photoresist composition is the aforementioned second copolymer, and the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is, for example, 56% by weight or more.

一實施例中,紅色光阻組成物中的光起始劑係為肟系(oxime)光起始劑,且樹脂材料係為第二共聚物。 In one embodiment, the photoinitiator in the red photoresist composition is an oxime photoinitiator, and the resin material is a second copolymer.

一些實施例中,紅色光阻組成物中的紅色染料係為氧雜蔥酮(xanthene)染料。 In some embodiments, the red dye in the red photoresist composition is an xanthene dye.

一些實施例中,光聚合性單體例如可以選用以化學式表示如下的化合物: In some embodiments, for example, the photopolymerizable monomer may be a compound represented by the following chemical formula:

其中R係為氫(hydrogen)或丙烯醯基(acryloyl)。 Wherein R is hydrogen or acryl.

根據本揭露內容之實施例的紅色光阻組成物均具有較佳的介電常數穩定性,因而可使得製作而成的紅色光阻層具有較佳的電氣特性。在操作頻率為20Hz至1000Hz的條件下,實施例的紅色光阻組成物之介電常數損失率均為3.5%以下。一些實施例中,介電常數損失率均為3%以下,較佳地係為2.5%以下。 The red photoresist compositions according to the embodiments of the present disclosure all have better dielectric constant stability, so that the red photoresist layer manufactured can have better electrical characteristics. Under the condition that the operating frequency is 20 Hz to 1000 Hz, the dielectric constant loss ratios of the red photoresist compositions in the examples are all 3.5% or less. In some embodiments, the dielectric constant loss rates are all 3% or less, preferably 2.5% or less.

根據本揭露內容之一些實施例,彩色光阻組成物可包括一彩色料、一樹脂材料、一光聚合性單體以及一肟系(oxime)光起始劑。彩色料包括一C.I.顏料綠58以及一C.I.顏料黃138,樹脂材料可包括如前所述的第一共聚物或如前所述的第二共聚物。一些實施例中,彩色料包括C.I.顏料綠58以及C.I.顏料黃138,則彩色光阻組成物例如是綠色光阻組成物,可以用於製作綠色光阻層。 According to some embodiments of the present disclosure, the color photoresist composition may include a color material, a resin material, a photopolymerizable monomer, and an oxime photoinitiator. The color material includes a C.I. Pigment Green 58 and a C.I. Pigment Yellow 138. The resin material may include a first copolymer as described above or a second copolymer as described above. In some embodiments, the color material includes C.I. Pigment Green 58 and C.I. Pigment Yellow 138. The color photoresist composition is, for example, a green photoresist composition, and can be used to make a green photoresist layer.

一實施例中,綠色光阻組成物中的樹脂材料係為如前述的第一共聚物,且光聚合性單體例如可以選用以化學式表示如下的化合物: In one embodiment, the resin material in the green photoresist composition is the aforementioned first copolymer, and the photopolymerizable monomer may be, for example, a compound represented by the following chemical formula:

其中R係為氫(hydrogen)或丙烯醯基(acryloyl)。 Wherein R is hydrogen or acryl.

一些實施例中,綠色光阻組成物中的樹脂材料包括前述的第一共聚物以及一第三共聚物,第三共聚物包括三環癸基丙烯酸甲酯(tricyclodecyl methaerylate,TCDMA)、二酸酐(succinic anhydride,SA)和甲基丙烯酸環氧丙酯(glycidyl methacrylate,GMA),也就是說,第三共聚物主要是由三環癸基丙烯酸甲酯(TCDMA)、二酸酐(SA)和甲基丙烯酸環氧丙酯(GMA)進行共聚合反應而成。 In some embodiments, the resin material in the green photoresist composition includes the aforementioned first copolymer and a third copolymer, and the third copolymer includes tricyclodecyl methaerylate (TCDMA), diacid anhydride ( succinic anhydride (SA) and glycidyl methacrylate (GMA), that is, the third copolymer is mainly composed of methyl tricyclodecyl acrylate (TCDMA), dianhydride (SA) and methyl Glycidyl acrylate (GMA) is copolymerized.

一實施例中,綠色光阻組成物中的樹脂材料包括前述的第一共聚物以及前述的第三共聚物,且第一共聚物相對於樹脂材料和光聚合性單體之總和的重量比例例如係為大於或等於30wt%。 In one embodiment, the resin material in the green photoresist composition includes the aforementioned first copolymer and the aforementioned third copolymer, and the weight ratio of the first copolymer to the sum of the resin material and the photopolymerizable monomer is, for example, It is 30% by weight or more.

一實施例中,綠色光阻組成物中的樹脂材料包括前述的第一共聚物以及前述的第三共聚物,且第一共聚物相對於樹脂材料的重量比例例如係為大於或等於60wt%。 In one embodiment, the resin material in the green photoresist composition includes the aforementioned first copolymer and the aforementioned third copolymer, and a weight ratio of the first copolymer to the resin material is, for example, 60% by weight or more.

根據本揭露內容之實施例的綠色光阻組成物均具有較佳的介電常數穩定性,因而可使得製作而成的綠色光阻層具有較佳的電氣特性。在操作頻率為20Hz至1000Hz的條件下,實施例的綠色光阻組成物之介電常數損失率均為5%以下。一些實施 例中,介電常數損失率均為4%以下。 The green photoresist compositions according to the embodiments of the present disclosure all have better dielectric constant stability, so that the green photoresist layer manufactured can have better electrical characteristics. Under the condition that the operating frequency is 20 Hz to 1000 Hz, the dielectric constant loss rates of the green photoresist composition of the examples are all 5% or less. Some implementation In the examples, the dielectric constant loss rates are all 4% or less.

本揭露內容的一些實施例中,肟系(oxime)光起始劑例如可包括1,2-辛烷二酮-1-[4-(苯硫基)苯基]-2-(O-苯醯肟)、1,2-丁烷二酮-1-[4-(苯硫基)苯基]-2-(O-苯醯肟)、1,2-丁烷二酮-1-[4-(苯硫基)苯基]-2-(O-乙醯基肟)、1,2-辛烷二酮-1-[4-(甲基硫基)苯基]-2-(O-苯醯肟)、1,2-辛烷二酮-1-[4-(苯硫基)苯基]-2-(O-(4-甲基苯醯肟))。肟系(oxime)光起始劑例如可包括肟酯系化合物中,例如是1-[9-乙基-6-(2-甲基苯醯)-9H-咔唑-3-基]-乙烷-1-酮肟-O-乙酸酯、乙酮-1-[9-乙基-6-(2-甲基-4-四氫呋喃基甲氧基苯醯)-9H-咔唑-3-基]-1-(O-乙醯基肟)、乙酮-1-[9-乙基-6-{2-甲基-4-(2,2-二甲基-1,3-二氧雜環戊基)甲氧基苯醯}-9H-咔唑-3-基]-1-(O-乙醯基肟)等。實施例中,肟酯系化合物的感度非常高,即使低曝光量也可形成無邊緣缺損及底切的圖形。實施例中,肟酯系化合物可單獨或組合兩種以上來使用。 In some embodiments of the present disclosure, the oxime photoinitiator may include 1,2-octanedione-1- [4- (phenylthio) phenyl] -2- (O-benzene Peroxime), 1,2-butanedione-1- [4- (phenylthio) phenyl] -2- (O-phenylhydrazine), 1,2-butanedione-1- [4 -(Phenylthio) phenyl] -2- (O-acetamidooxime), 1,2-octanedione-1- [4- (methylthio) phenyl] -2- (O- Phenylhydrazine), 1,2-octanedione-1- [4- (phenylthio) phenyl] -2- (O- (4-methylbenzoxime)). An oxime photoinitiator may be included in an oxime ester compound, for example, 1- [9-ethyl-6- (2-methylphenylhydrazone) -9H-carbazol-3-yl] -ethyl Alkan-1-one oxime-O-acetate, ethyl ketone-1- [9-ethyl-6- (2-methyl-4-tetrahydrofurylmethoxyphenylhydrazone) -9H-carbazole-3- Yl] -1- (O-ethenyloxime), ethyl ketone-1- [9-ethyl-6- {2-methyl-4- (2,2-dimethyl-1,3-dioxo Heteropentyl) methoxyphenylfluorene} -9H-carbazol-3-yl] -1- (O-ethylfluorenyloxime) and the like. In the examples, the sensitivity of the oxime ester compound is very high, and even at a low exposure amount, a pattern without edge defects and undercuts can be formed. In the examples, the oxime ester compounds can be used alone or in combination of two or more.

以下係就實施例作進一步說明。以下係列出實施例和比較例之紅色光阻組成物和綠色光阻組成物及其介電常數損失率的量測結果,以說明應用本揭露內容所製得之彩色光阻組成物的特性。然而以下之實施例僅為例示說明之用,而不應被解釋為本揭露內容實施之限制。以下各個實施例及比較例之組成如表1~2所述,其中各個成分所選用的種類說明如下。 The embodiments are further described below. The measurement results of the red photoresist composition and the green photoresist composition and the dielectric constant loss rate of the examples and comparative examples are listed below to illustrate the characteristics of the color photoresist composition prepared by applying the present disclosure. However, the following embodiments are for illustrative purposes only and should not be construed as limitations on the implementation of the disclosure. The composition of each of the following examples and comparative examples is described in Tables 1-2, and the types of each component used are described below.

(1)共聚物(1):TCDMA(1~30重量份)/AA(1~40重量份)共聚物/苯(benzene)(50~80重量份)(溶劑),共聚物(1)的分子量為10000~20000。 (1) Copolymer (1): TCDMA (1 to 30 parts by weight) / AA (1 to 40 parts by weight) copolymer / benzene (50 to 80 parts by weight) (solvent), copolymer (1) The molecular weight is 10,000 ~ 20,000.

(2)共聚物(2):EDCPA(50~90重量份)/AA(10~30重 量份)/VT(1~30)/DCPA(1~10重量份)共聚物,共聚物(2)的分子量為10000~20000。 (2) Copolymer (2): EDCPA (50 to 90 parts by weight) / AA (10 to 30 parts by weight) Amount) / VT (1 ~ 30) / DCPA (1 ~ 10 parts by weight) copolymer, the molecular weight of the copolymer (2) is 10,000 ~ 20,000.

(3)共聚物(3):TCDMA(1~40重量份)/SA(10~50重量份)/GMA共聚物(20~40重量份),共聚物(3)的分子量為5000~15000。 (3) Copolymer (3): TCDMA (1 to 40 parts by weight) / SA (10 to 50 parts by weight) / GMA copolymer (20 to 40 parts by weight), and the molecular weight of the copolymer (3) is 5000 to 15,000.

(4)共聚物(4):EDCPA(5~50重量份)/AA(1~40重量份)/N-環己基馬來醯亞胺(N-cyclohexylmaleimide,CHMI)(40~90重量份)/甲基丙烯酸羥乙酯(hydroxyethyl methacrylate,HEMA)共聚物(1~40重量份),共聚物(4)的分子量為5000~15000。 (4) Copolymer (4): EDCPA (5 to 50 parts by weight) / AA (1 to 40 parts by weight) / N-cyclohexylmaleimide (CHMI) (40 to 90 parts by weight) / Hydroxyethyl methacrylate (HEMA) copolymer (1 to 40 parts by weight), and the molecular weight of the copolymer (4) is 5000 to 15,000.

(5)光聚合性單體(5):以化學式表示如下: (5) Photopolymerizable monomer (5): The chemical formula is as follows:

其中R係為氫(hydrogen)或丙烯醯基(acryloyl)。 Wherein R is hydrogen or acryl.

(6)光聚合性單體(6):以化學式表示如下: (6) Photopolymerizable monomer (6): The chemical formula is as follows:

(7)光聚合性單體(7):以化學式表示如下: (7) Photopolymerizable monomer (7): The chemical formula is as follows:

(8)光起始劑(Oxime):肟系(oxime)光起始劑。 (8) Oxime: Oxime photoinitiator.

(9)光起始劑(DETX-S):2,4-二乙基噻唑酮(2 4-dimethyl 9h-thioxanthen-9-one)。 (9) Photo initiator (DETX-S): 2,4-diethylthiazolone (2 4-dimethyl 9h-thioxanthen-9-one).

(10)紅色顏料(R254):C.I.顏料紅254。 (10) Red pigment (R254): C.I. Pigment Red 254.

(11)紅色染料(xanthene):氧雜蔥酮(xanthene)染料。 (11) Red dye (xanthene): xanthene dye.

(12)綠色顏料(G58):C.I.顏料綠58。 (12) Green pigment (G58): C.I. Pigment Green 58.

(13)黃色顏料(Y138):C.I.顏料黃138。 (13) Yellow pigment (Y138): C.I. Pigment Yellow 138.

第1圖繪示根據本揭露內容之實施例E1-1~E1-3和比較例C1-1~C1-4的紅色光阻組成物的介電常數損失率及介電常數損失,第2圖繪示根據本揭露內容之實施例E2-1~E2-9和比較例C2的綠色光阻組成物的介電常數損失率及介電常數損失。第1~2圖中,左側Y軸的介電常數損失率(20~1000Hz)的計算方式為:((介電常數(1000Hz)-介電常數(20Hz))/介電常數(1000Hz),以條狀圖表示;右側Y軸的介電常數損失(30Hz)則為操作頻率為30Hz時量測得到的介電常數損失,以虛線曲線S1、S2表示。 FIG. 1 shows the dielectric constant loss rate and the dielectric constant loss of the red photoresist composition of Examples E1-1 to E1-3 and Comparative Examples C1-1 to C1-4 according to the present disclosure. The dielectric constant loss rate and the dielectric constant loss of the green photoresist composition of Examples E2-1 to E2-9 and Comparative Example C2 according to the disclosure are shown. In Figures 1-2, the dielectric constant loss rate (20 ~ 1000Hz) of the left Y axis is calculated as: ((dielectric constant (1000Hz)-dielectric constant (20Hz)) / dielectric constant (1000Hz) It is represented by a bar graph; the dielectric constant loss (30Hz) on the right Y-axis is the dielectric constant loss measured at an operating frequency of 30Hz, and is represented by dashed curves S1 and S2.

首先,請參照第1圖,可看出所有實施例的介電常 數損失率都低於3.5%。詳細來說,實施例E1-1和E1-2中,當樹脂材料僅採用第一共聚物(共聚物(1))且第一共聚物佔樹脂材料的55wt%以上時,介電常數損失率都低於3%,甚至實施例E1-2的介電常數損失率可以低於2.5%。並且,實施例E1-3中,當樹脂材料僅採用第二共聚物(共聚物(2))且第二共聚物佔樹脂材料的56wt%以上時,介電常數損失率可以低於3.5%。 First, referring to FIG. 1, the dielectric constants of all the embodiments can be seen. The number of loss rates are all below 3.5%. In detail, in Examples E1-1 and E1-2, when only the first copolymer (copolymer (1)) is used as the resin material and the first copolymer accounts for more than 55 wt% of the resin material, the dielectric constant loss rate Both are lower than 3%, and even the dielectric constant loss rate of Example E1-2 may be lower than 2.5%. In addition, in Example E1-3, when the resin material only uses the second copolymer (copolymer (2)) and the second copolymer accounts for 56 wt% or more of the resin material, the dielectric constant loss rate may be lower than 3.5%.

請參照比較例C1-1和C1-2,當樹脂材料採用第一共聚物或第二共聚物之外類型的共聚物時,介電常數損失率則高於3.5%。請同時參照實施例E1-3和比較例C1-3,即便樹脂材料都採用第二共聚物,當樹脂材料相對於樹脂材料和光聚合性單體之總和的重量比例大於72wt%時,介電常數損失率便會大幅上升,實施例E1-3和比較例C1-3的介電常數損失率之差距高達將近3%。此外,請參照比較例C1-4,當光起始劑採用肟系(oxime)光起始劑之外的類型時,也會導致介電常數損失率的上升。 Please refer to Comparative Examples C1-1 and C1-2. When the resin material uses a copolymer other than the first copolymer or the second copolymer, the dielectric constant loss rate is higher than 3.5%. Please refer to Example E1-3 and Comparative Example C1-3 at the same time. Even if the resin material is a second copolymer, when the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is greater than 72% by weight, the dielectric constant The loss rate will increase sharply, and the difference between the dielectric constant loss rates of Example E1-3 and Comparative Example C1-3 is as high as nearly 3%. In addition, please refer to Comparative Example C1-4. When a photoinitiator other than an oxime photoinitiator is used, the dielectric constant loss rate may also increase.

再者,請參照第2圖,可看出所有實施例的介電常數損失率都低於5%。詳細來說,實施例E2-1~E2-5和E2-7~E2-9均包括第一共聚物(共聚物(1))且光聚合性單體均採用光聚合性單體(5),而實施例E2-6包括第二共聚物((共聚物(2))且光聚合性單體亦採用光聚合性單體(5),其介電常數損失率都低於5%。並且,實施例E2-3~E2-5和E2-7~E2-9中,第一共聚物(共聚物(1))相對於樹脂材料和光聚合性單體之總和的重量比例為大於或等於30wt%,其介電常數損失率均都大約等於或低於4%。並且,實施例E2-5和E2-9中,即使樹脂材料進一步採用其他的共聚物,第一共聚物(共聚物(1))相對於樹脂材料的重量比例為大於或等於60 wt%,其介電常數損失率均都大約等於或低於4%。 Furthermore, referring to FIG. 2, it can be seen that the dielectric constant loss rate of all the embodiments is lower than 5%. In detail, each of Examples E2-1 to E2-5 and E2-7 to E2-9 includes the first copolymer (copolymer (1)) and the photopolymerizable monomers each use the photopolymerizable monomer (5) And Example E2-6 includes the second copolymer ((copolymer (2)) and the photopolymerizable monomer also uses the photopolymerizable monomer (5), and the dielectric constant loss ratios thereof are all less than 5%. In Examples E2-3 to E2-5 and E2-7 to E2-9, the weight ratio of the first copolymer (copolymer (1)) to the sum of the resin material and the photopolymerizable monomer is 30 wt. Or more %, And their dielectric constant loss ratios are all approximately equal to or lower than 4%. Moreover, in Examples E2-5 and E2-9, even if the resin material further uses other copolymers, the first copolymer (copolymer (1 )) The weight ratio to the resin material is 60 or more wt%, and their dielectric constant loss rates are all about 4% or less.

相較而言,請參照比較例C2,其中光聚合性單體並非採用光聚合性單體(5),介電常數損失率則大幅上升至接近6%。 In comparison, please refer to Comparative Example C2, in which the photopolymerizable monomer is not a photopolymerizable monomer (5), and the dielectric constant loss rate is greatly increased to nearly 6%.

綜上所述,雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。 In summary, although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention pertains can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the attached patent application.

S1‧‧‧曲線 S1‧‧‧ curve

Claims (10)

一種彩色光阻組成物,包括:100重量份的一紅色料,包括一C.I.顏料紅254以及一氧雜蔥酮(xanthene)紅色染料;60~68重量份的一樹脂材料,其中該樹脂材料係為一第一共聚物或一第二共聚物,該第一共聚物包括三環癸基丙烯酸甲酯(tricyclodecyl methacrylate,TCDMA)和丙烯酸(AA),其中三環癸基丙烯酸甲酯和丙烯酸的重量份比例係為1~30:1~40,該第二共聚物包括環氧二環戊烯甲基丙烯酸酯(epoxy dicyclopentenyl acrylate,EDCPA)、二環戊烯甲基丙烯酸酯(dicyclopentenyl acrylate,DCPA)、乙烯甲苯(vinyl toluene,VT)和丙烯酸(AA),其中環氧二環戊烯甲基丙烯酸酯、二環戊烯甲基丙烯酸酯、乙烯甲苯和丙烯酸的重量份比例係為50~90:1~10:1~30:10~30;32~40重量份的一光聚合性單體,其中該樹脂材料相對於該樹脂材料和該光聚合性單體之總和的重量比例係為大於或等於30wt%,且該光聚合性單體係以化學式表示如下: 其中R係為氫(hydrogen)或丙烯醯基(acryloyl);以及100重量份的一光起始劑,包括一肟系(oxime)光起始劑。 A color photoresist composition includes: 100 parts by weight of a red material, including a CI pigment red 254 and a xanthene red dye; 60-68 parts by weight of a resin material, wherein the resin material is It is a first copolymer or a second copolymer. The first copolymer includes tricyclodecyl methacrylate (TCDMA) and acrylic acid (AA). The weight of tricyclodecyl methacrylate and acrylic acid is The proportion is 1 ~ 30: 1 ~ 40. The second copolymer includes epoxy dicyclopentenyl acrylate (EDCPA), dicyclopentenyl acrylate (DCPA). , Vinyl toluene (VT) and acrylic acid (AA), wherein the weight ratio of epoxy dicyclopentene methacrylate, dicyclopentene methacrylate, vinyl toluene and acrylic acid is 50 to 90: 1 to 10: 1 to 30: 10 to 30; 32 to 40 parts by weight of a photopolymerizable monomer, wherein the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is greater than or Equal to 30wt%, and the photopolymerizable single system is The chemical formula is as follows: Wherein R is hydrogen or acryloyl; and 100 parts by weight of a photoinitiator, including an oxime photoinitiator. 如申請專利範圍第1項所述之彩色光阻組成物,其中該樹脂材料相對於該樹脂材料和該光聚合性單體之總和的重量比例係為60~68wt%。 The color photoresist composition according to item 1 of the scope of the patent application, wherein the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is 60 to 68 wt%. 如申請專利範圍第1項所述之彩色光阻組成物,其中該樹脂材料係為該第一共聚物,該樹脂材料相對於該樹脂材料和該光聚合性單體之總和的重量比例係為大於或等於55wt%。 The color photoresist composition according to item 1 of the scope of patent application, wherein the resin material is the first copolymer, and the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is 55wt% or more. 如申請專利範圍第1項所述之彩色光阻組成物,其中該彩色光阻組成物的一介電常數損失率低於3.5%,其中於一第一操作頻率時對該彩色光阻組成物進行量測以得到一第一介電常數E1,於一第二操作頻率時對該彩色光阻組成物進行量測以得到一第二介電常數E2,該第一介電常數E1大於該第二介電常數E2,該彩色光阻組成物的該介電常數損失率係為|E1-E2|/E1。 The color photoresist composition according to item 1 of the patent application range, wherein a dielectric constant loss rate of the color photoresist composition is less than 3.5%, and the color photoresist composition is at a first operating frequency. The measurement is performed to obtain a first dielectric constant E1, and the color photoresist composition is measured to obtain a second dielectric constant E2 at a second operating frequency. The first dielectric constant E1 is greater than the first dielectric constant E1. Two dielectric constants E2, and the dielectric constant loss rate of the color photoresist composition is | E1-E2 | / E1. 如申請專利範圍第1項所述之彩色光阻組成物,其中該樹脂材料係為該第二共聚物。 The color photoresist composition according to item 1 of the patent application scope, wherein the resin material is the second copolymer. 如申請專利範圍第5項所述之彩色光阻組成物,其中該樹脂材料相對於該樹脂材料和該光聚合性單體之總和的重量比例係為小於72wt%。 The color photoresist composition according to item 5 of the scope of the patent application, wherein the weight ratio of the resin material to the sum of the resin material and the photopolymerizable monomer is less than 72% by weight. 一種彩色光阻組成物,包括:100重量份的一彩色料,包括一C.I.顏料綠58以及一C.I. 顏料黃138;30~70重量份的一樹脂材料,其中該樹脂材料包括一第一共聚物或一第二共聚物,該第一共聚物包括三環癸基丙烯酸甲酯(TCDMA)和丙烯酸(AA),其中三環癸基丙烯酸甲酯和丙烯酸的重量份比例係為1~30:1~40,該第二共聚物包括環氧二環戊烯甲基丙烯酸酯(EDCPA)、二環戊烯甲基丙烯酸酯(DCPA)、乙烯甲苯(VT)和丙烯酸(AA),其中環氧二環戊烯甲基丙烯酸酯、二環戊烯甲基丙烯酸酯、乙烯甲苯和丙烯酸的重量份比例係為50~90:1~10:1~30:10~30;70~30重量份的一光聚合性單體,且該光聚合性單體係以化學式表示如下: 其中R係為氫(hydrogen)或丙烯醯基(acryloyl);以及100重量份的一肟系(oxime)光起始劑。 A color photoresist composition includes: 100 parts by weight of a color material, including a CI Pigment Green 58 and a CI Pigment Yellow 138; and 30 to 70 parts by weight of a resin material, wherein the resin material includes a first copolymer Or a second copolymer, the first copolymer includes methyl tricyclodecyl acrylate (TCDMA) and acrylic acid (AA), wherein the weight ratio of methyl tricyclodecyl acrylate and acrylic acid is 1 to 30: 1 ~ 40, the second copolymer includes epoxy dicyclopentene methacrylate (EDCPA), dicyclopentene methacrylate (DCPA), vinyl toluene (VT), and acrylic acid (AA), of which epoxy two The proportion by weight of cyclopentene methacrylate, dicyclopentene methacrylate, vinyl toluene, and acrylic acid is 50 to 90: 1 to 10: 1 to 30: 10 to 30; 70 to 30 parts by weight of one A photopolymerizable monomer, and the photopolymerizable single system is represented by a chemical formula as follows: Wherein R is hydrogen or acrylyl; and 100 parts by weight of an oxime photoinitiator. 如申請專利範圍第7項所述之彩色光阻組成物,其中該樹脂材料更包括一第三共聚物,該第三共聚物包括三環癸基丙烯酸甲酯(tricyclodecyl methacrylate,TCDMA)和甲基丙烯酸環氧丙酯(glycidyl methacrylate,GMA)。 The color photoresist composition according to item 7 of the patent application scope, wherein the resin material further includes a third copolymer, and the third copolymer includes tricyclodecyl methacrylate (TCDMA) and methyl Glycidyl methacrylate (GMA). 如申請專利範圍第7項所述之彩色光阻組成物,其中該第一共聚物相對於該樹脂材料和該光聚合性單體之總和的重量比例係為大於或等於30wt%,及/或該第一共聚物相對於該樹脂材料的重量比例係為大於或等於60wt%。 The color photoresist composition according to item 7 in the scope of the patent application, wherein the weight ratio of the first copolymer to the sum of the resin material and the photopolymerizable monomer is 30% by weight or more, and / or The weight ratio of the first copolymer to the resin material is 60% by weight or more. 如申請專利範圍第7項所述之彩色光阻組成物,其中該彩色光阻組成物的一介電常數損失率低於5%,其中於一第一操作頻率時對該彩色光阻組成物進行量測以得到一第一介電常數E1,於一第二操作頻率時對該彩色光阻組成物進行量測以得到一第二介電常數E2,該第一介電常數E1大於該第二介電常數E2,該彩色光阻組成物的該介電常數損失率係為|E1-E2|/E1。 The color photoresist composition according to item 7 of the patent application range, wherein a dielectric constant loss rate of the color photoresist composition is less than 5%, and the color photoresist composition is at a first operating frequency. The measurement is performed to obtain a first dielectric constant E1, and the color photoresist composition is measured to obtain a second dielectric constant E2 at a second operating frequency. The first dielectric constant E1 is greater than the first dielectric constant E1. Two dielectric constants E2, and the dielectric constant loss rate of the color photoresist composition is | E1-E2 | / E1.
TW105116138A 2016-05-24 2016-05-24 Color photoresist composition TWI618753B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW105116138A TWI618753B (en) 2016-05-24 2016-05-24 Color photoresist composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW105116138A TWI618753B (en) 2016-05-24 2016-05-24 Color photoresist composition

Publications (2)

Publication Number Publication Date
TW201741403A TW201741403A (en) 2017-12-01
TWI618753B true TWI618753B (en) 2018-03-21

Family

ID=61230144

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105116138A TWI618753B (en) 2016-05-24 2016-05-24 Color photoresist composition

Country Status (1)

Country Link
TW (1) TWI618753B (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201232118A (en) * 2010-10-28 2012-08-01 Toppan Printing Co Ltd Color filter substrate and fringe field switching type liquid crystal display device using the same
TW201403230A (en) * 2012-04-27 2014-01-16 Sumitomo Chemical Co Colored photosensitive resin composition
TW201410793A (en) * 2012-06-11 2014-03-16 Sumitomo Chemical Co Colored photosensitive resin composition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201232118A (en) * 2010-10-28 2012-08-01 Toppan Printing Co Ltd Color filter substrate and fringe field switching type liquid crystal display device using the same
TW201403230A (en) * 2012-04-27 2014-01-16 Sumitomo Chemical Co Colored photosensitive resin composition
TW201410793A (en) * 2012-06-11 2014-03-16 Sumitomo Chemical Co Colored photosensitive resin composition

Also Published As

Publication number Publication date
TW201741403A (en) 2017-12-01

Similar Documents

Publication Publication Date Title
JP6496119B2 (en) Colored curable resin composition
JP4469365B2 (en) Negative photoresist composition
JP5013003B2 (en) Photosensitive resin composition
JP6393136B2 (en) Compound
JP2016027149A (en) Colored curable resin composition
JP2006023716A (en) Photosensitive resin composition
JP4643722B2 (en) Negative resist composition
TW201623225A (en) Composition of black matrix photoresist for liquid crystal display panel
JP6986830B2 (en) Radiation-sensitive resin composition, pattern, pattern forming method and display element
JP2017186550A (en) Curable resin composition and cured film
JP2018127596A (en) Compound
TWI618753B (en) Color photoresist composition
WO2016103844A1 (en) Resin composition, color filter and method for producing same, and image display element
TWI642687B (en) Detection method of dielectric constant loss rate of color photoresist composition
JP2012172083A (en) Polyrotaxane and curable composition
CN107450268B (en) Color photoresist composition and method for detecting dielectric constant loss rate thereof
JP2018106172A (en) Resin composition for liquid crystal display devices, film for liquid crystal display devices, and copolymer
JP7203627B2 (en) Colored curable resin composition
JP2012234154A (en) Photosensitive resin composition
JP7203626B2 (en) Colored curable resin composition
JP7273539B2 (en) Colored curable resin composition, color filter and display device
JP7148226B2 (en) Red curable resin composition
CN108017747B (en) Alkali-soluble resin polymer, preparation method thereof and photosensitive resin composition
JP5696389B2 (en) Dyes and coloring compositions
JP6722442B2 (en) Compound, colored curable resin composition, color filter and liquid crystal display device