TWI614500B - Image registering and stitching method and image detection system for cell detection chip - Google Patents

Image registering and stitching method and image detection system for cell detection chip Download PDF

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TWI614500B
TWI614500B TW105138138A TW105138138A TWI614500B TW I614500 B TWI614500 B TW I614500B TW 105138138 A TW105138138 A TW 105138138A TW 105138138 A TW105138138 A TW 105138138A TW I614500 B TWI614500 B TW I614500B
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翁翊軒
鄭宇辰
曾繁根
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國立清華大學
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Abstract

一種細胞檢測晶片的影像定位與拼接方法及影像檢測系統。此方法依據影像擷取裝置的攝像區域的大小及細胞檢測晶片的檢測區域的大小,規劃影像擷取裝置拍攝細胞檢測晶片的影像的移動路徑,其中所述檢測區域中包括配置用以定位影像的多個記號。然後,控制影像擷取裝置依照所規劃的移動路徑於細胞檢測晶片上方移動以拍攝細胞檢測晶片的多張影像。最後,依據影像中出現的記號的位置,對影像進行定位並拼接為完整的晶片影像。A method for image localization and splicing of a cell detection wafer and an image detection system. According to the size of the imaging area of the image capturing device and the size of the detection area of the cell detecting device, the image planning device captures a moving path of the image of the cell detecting chip, wherein the detecting area includes a configuration for positioning the image. Multiple tokens. Then, the image capturing device is controlled to move over the cell detecting wafer in accordance with the planned moving path to capture a plurality of images of the cell detecting wafer. Finally, the image is positioned and stitched into a complete wafer image based on the position of the mark appearing in the image.

Description

細胞檢測晶片的影像定位與拼接方法及影像檢測系統Image detection and splicing method for cell detection wafer and image detection system

本案是有關於一種細胞檢測方法及裝置,且特別是有關於一種細胞檢測晶片的影像定位與拼接方法及影像檢測系統。The present invention relates to a cell detection method and device, and more particularly to a method for image localization and splicing of a cell detection wafer and an image detection system.

隨著生技產業的發達,檢測癌細胞的方法也逐漸被開發。其中一種檢測方法為循環腫瘤細胞(Circulating Tumor Cell,CTC)檢測,也就是檢測循環系統中的癌細胞。雖然目前CTC的分析尚在研究階段,但利用CTC數量的分析依然有其臨床的價值。例如,透過病患血液中CTC的數量,醫師得以進行腫瘤轉移的預測及治療方式的評估。CTC數量的多寡通常關係到腫瘤轉移的可能性,因此其數量越多表示轉移的機率越高,也代表源發腫瘤的成長程度。With the development of the biotechnology industry, methods for detecting cancer cells have also been gradually developed. One of the detection methods is the detection of circulating tumor cells (CTC), that is, detecting cancer cells in the circulatory system. Although the current CTC analysis is still in the research stage, the analysis of the number of CTCs still has its clinical value. For example, through the number of CTCs in the patient's blood, the physician can make predictions of tumor metastasis and assessment of treatment modalities. The amount of CTC is usually related to the possibility of tumor metastasis, so the higher the number, the higher the probability of metastasis, and also the degree of growth of the source tumor.

當取得血液的檢體時,由於檢體內的細胞數量相當的多,尤其是紅血球等等,因此必須先經過純化的步驟。在CTC分離的技術上,主要分為四種,分別是利用細胞密度梯度離心、細胞尺寸分選(類似於過濾器過濾的概念)、免疫抗體被覆微結構捕捉及免疫磁珠分離等方式。透過不同的方法分離出CTC後,才會進行DNA或螢光訊號等分析。在CTC的分離上,由於血液樣本的數量龐大,需要高通量的生物晶片來同時檢測大量的細胞,例如採二維陣列排列的晶片,並且使晶片邊緣產生5 um的狹縫來限制細胞的排列範圍,避免細胞遺失。由於二微陣列能夠排列到單層的結構,就可以利用細胞螢光的對比來達到高敏感度的檢測。When a blood sample is taken, since the number of cells in the sample is quite large, especially red blood cells, etc., it is necessary to go through a purification step. In the technology of CTC separation, there are four main types, namely, cell density gradient centrifugation, cell size sorting (similar to the concept of filter filtration), immune antibody-coated microstructural capture, and immunomagnetic bead separation. After the CTC is separated by different methods, DNA or fluorescent signals are analyzed. On the separation of CTCs, due to the large number of blood samples, high-throughput biochips are required to simultaneously detect a large number of cells, such as wafers arranged in a two-dimensional array, and a 5 μm slit is created at the edge of the wafer to limit the cells. Align the range to avoid cell loss. Since the two microarrays can be arranged in a single layer structure, cell fluorescence contrast can be utilized to achieve high sensitivity detection.

然而,即使簡化了晶片的結構進而縮短的晶片的操作時間,在檢測時依然會耗費相當長的時程。However, even if the structure of the wafer is simplified and the operation time of the wafer is shortened, a considerable time period is still incurred in the detection.

本案提供一種細胞檢測晶片的影像定位與拼接方法及影像檢測系統,可提供所拍攝晶片影像的定位及拼接功能。The present invention provides an image localization and splicing method for a cell detection wafer and an image detection system, which can provide positioning and splicing functions of the captured wafer image.

本案的細胞檢測晶片的影像定位及拼接方法適於由具有處理器的電子裝置控制影像擷取裝置拍攝細胞檢測晶片的影像並對所拍攝的影像進行定位及拼接。此方法依據影像擷取裝置的攝像區域的大小及細胞檢測晶片的檢測區域的大小,規劃影像擷取裝置拍攝細胞檢測晶片的影像的移動路徑,其中所述檢測區域中包括配置用以定位影像的多個記號。接著,控制影像擷取裝置依照所規劃的移動路徑於細胞檢測晶片上方移動以拍攝細胞檢測晶片的多張影像。然後,依據影像中出現的記號的位置,對影像進行定位並拼接為完整的晶片影像。The image localization and splicing method of the cell detection wafer of the present invention is suitable for controlling an image capturing device to capture an image of a cell detecting chip by an electronic device having a processor, and positioning and splicing the captured image. According to the size of the imaging area of the image capturing device and the size of the detection area of the cell detecting device, the image planning device captures a moving path of the image of the cell detecting chip, wherein the detecting area includes a configuration for positioning the image. Multiple tokens. Next, the control image capturing device moves over the cell detecting wafer in accordance with the planned moving path to capture a plurality of images of the cell detecting wafer. The image is then positioned and stitched into a complete wafer image based on the location of the mark appearing in the image.

在本案的一實施例中,所述依據影像中出現的記號的位置,對影像進行定位並拼接為完整的晶片影像的步驟更包括 依據各張影像在移動路徑中的拍攝順序或拍攝位置,找出相鄰影像,而依據相鄰影像中出現的記號的位置拼接相鄰影像以獲得完整的晶片影像。In an embodiment of the present invention, the step of locating and splicing the image into a complete wafer image according to the position of the mark appearing in the image further includes searching according to the shooting sequence or shooting position of each image in the moving path. Adjacent images are imaged, and adjacent images are stitched according to the positions of the marks appearing in adjacent images to obtain a complete wafer image.

在本案的一實施例中,所述的細胞檢測晶片中的記號的數量及位置包括依據影像擷取裝置的攝像區域的大小及細胞檢測晶片的檢測區域的大小來決定,使得影像擷取裝置所拍攝的各張影像中包括至少一個所述的記號。In an embodiment of the present invention, the number and location of the marks in the cell detecting wafer are determined according to the size of the imaging area of the image capturing device and the size of the detection area of the cell detecting wafer, so that the image capturing device is At least one of the symbols is included in each of the captured images.

在本案的一實施例中,所述的方法更包括於細胞檢測晶片上使用光阻製作記號,所述的光阻包括SU-8或AZ9260。In an embodiment of the present invention, the method further comprises using a photoresist to make a mark on the cell detecting wafer, the photoresist comprising SU-8 or AZ9260.

在本案的一實施例中,所述於細胞檢測晶片上使用光阻製作記號的步驟包括於玻片表面塗佈第一光阻並進行軟烤、曝光及顯影,以製作流道的微結構,以及於玻片表面上各個記號的位置塗佈第二光阻並進行軟烤、曝光及顯影,以製作記號的微結構。In an embodiment of the present invention, the step of using a photoresist to make a mark on the cell detecting wafer comprises applying a first photoresist to the surface of the slide and performing soft baking, exposure and development to form a microstructure of the flow channel, And applying a second photoresist to the position of each mark on the surface of the slide and performing soft baking, exposure and development to form a microstructure of the mark.

本案的細胞檢測晶片的影像檢測系統包括影像擷取裝置及電子裝置。其中,影像擷取裝置係配置於細胞檢測晶片上方,用以移動拍攝細胞檢測晶片的多張影像。電子裝置包括連接裝置、儲存裝置及處理器。連接裝置係用以連接影像擷取裝置。儲存裝置係用以儲存多個模組。處理器係耦接連接裝置及儲存裝置,用以執行儲存裝置中儲存的模組。所述模組包括移動路徑規劃模組、控制模組及影像拼接模組。移動路徑規劃模組係依據影像擷取裝置的攝像區域的大小及細胞檢測晶片的檢測區域的大小,規劃影像擷取裝置拍攝細胞檢測晶片的影像的移動路徑,其中所述的檢測區域中包括配置用以定位影像的多個記號。控制模組係用以控制影像擷取裝置依照移動路徑規劃模組所規劃的移動路徑於細胞檢測晶片上方移動以拍攝影像。影像拼接模組係用以依據影像中出現的記號的位置,對所述影像進行定位並拼接為完整的晶片影像。The image detecting system of the cell detecting wafer of the present invention includes an image capturing device and an electronic device. The image capturing device is disposed above the cell detecting wafer for moving a plurality of images of the cell detecting wafer. The electronic device includes a connection device, a storage device, and a processor. The connecting device is used to connect the image capturing device. The storage device is used to store a plurality of modules. The processor is coupled to the connection device and the storage device for executing the module stored in the storage device. The module includes a moving path planning module, a control module, and an image mosaic module. The moving path planning module is configured to plan a moving path of the image of the cell detecting chip according to the size of the imaging area of the image capturing device and the size of the detection area of the cell detecting device, wherein the detecting area includes the configuration A number of markers used to locate an image. The control module is configured to control the image capturing device to move over the cell detecting wafer according to the moving path planned by the moving path planning module to capture an image. The image splicing module is configured to position and splice the image into a complete wafer image according to the position of the mark appearing in the image.

在本案的一實施例中,所述的影像拼接模組包括依據各張影像在移動路徑中的拍攝順序或拍攝位置,找出相鄰影像,並依據相鄰影像中出現的記號的位置拼接相鄰影像以獲得完整的晶片影像。In an embodiment of the present invention, the image splicing module includes finding a neighboring image according to a shooting sequence or a shooting position of each image in a moving path, and splicing the splicing according to the position of the mark appearing in the adjacent image. Neighbor images to obtain a complete wafer image.

在本案的一實施例中,所述的移動路徑規劃模組更依據影像擷取裝置的攝像區域的大小及細胞檢測晶片的檢測區域的大小,決定細胞檢測晶片中的記號的數量及位置,使得影像擷取裝置所拍攝的各張影像中包括至少一個記號。In an embodiment of the present invention, the moving path planning module further determines the number and position of the marks in the cell detecting chip according to the size of the imaging area of the image capturing device and the size of the detection area of the cell detecting chip. At least one symbol is included in each image captured by the image capturing device.

在本案的一實施例中,所述的記號包括數字、字母、符號、圖案其中之一或其組合。In an embodiment of the present invention, the indicia comprises one of a number, a letter, a symbol, a pattern, or a combination thereof.

基於上述,本案的細胞檢測晶片的影像定位與拼接方法及影像檢測系統藉由在細胞檢測晶片的檢測區域中配置可用以定位的記號,並利用相機以錄影及定時擷圖的方式,拍攝檢測區域中各個區域的影像。之後,藉由影像拼接演算法,找出各張影像中的記號以及具有相同記號的影像,再根據記號在影像中的位置對各張影像進行對位及拼接,使得拼接後影像中的記號重疊。藉由上述記號的輔助,電子裝置得以快速辨認出重疊的部分,並將這些晶片影像拼接成完整的晶片影像。Based on the above, the image localization and splicing method and the image detection system of the cell detection wafer of the present invention are configured to record the detection area by using a camera to record and time-lapse by using a camera to locate the mark in the detection area of the cell detection wafer. Images of various areas in the middle. Then, through the image mosaic algorithm, the symbols in each image and the images with the same mark are found, and then the images are aligned and spliced according to the position of the marks in the image, so that the marks in the stitched images overlap. . With the aid of the above symbols, the electronic device can quickly recognize the overlapping portions and splicing the wafer images into a complete wafer image.

為讓本案的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present invention more comprehensible, the following embodiments are described in detail with reference to the accompanying drawings.

本發明一實施例使用密度離心法(例如Ficoll)直接從血液中分離出循環腫瘤細胞(Circulating Tumor Cell,CTC)及淋巴細胞等,並對分離出的樣本進行螢光標定,之後滴入本發明一實施例的細胞自組裝陣列(Self-Assembled Cell Array,SACA)晶片中。此晶片利用流體的特性,使得滴入的樣本在經過一段時間後可呈現細胞單層排列。An embodiment of the present invention uses a density centrifugation method (for example, Ficoll) to directly separate a circulating tumor cell (CTC), a lymphocyte, and the like from the blood, and performs a cursor on the separated sample, and then drops the present invention. In an embodiment of a Self-Assembled Cell Array (SACA) wafer. This wafer utilizes the properties of the fluid such that the instilled sample can exhibit a single layer arrangement of cells over time.

詳言之,本發明一實施例係使用微流道井式檢測平台來實施細胞分選,利用流體作用使得細胞落點能夠分散,避免同一位置落下的細胞數量過多而造成檢測效果降低。圖1A及圖1B分別是依照本發明一實施例所繪示的細胞檢測平台與細胞檢測晶片的示意圖。請參照圖1A,細胞檢測平台1上可配置多個細胞檢測晶片(例如晶片10),其例如選用透明材質的材料(例如玻片)作為平台主體,並在玻片表面以黃光微影製成厚度約5微米(μm)的流道,以作為帶動細胞流動的動力源。詳言之,晶片10中間的圓孔係作為細胞懸浮液的注入孔,晶片10周圍的孔洞則作為蒸發孔,使得流道內的液體可由此處蒸發。液體蒸發時的向外拉力,不僅可給予細胞穩定的流動拉力,將中心的細胞向外圍擴散,更能避免水分蒸發速度過快造成細胞死亡。In detail, an embodiment of the present invention uses a micro-flow well type detection platform to perform cell sorting, and utilizes a fluid action to enable cell drop points to be dispersed, thereby avoiding excessive number of cells falling at the same position and causing a decrease in detection effect. 1A and 1B are schematic diagrams of a cell detection platform and a cell detection wafer, respectively, according to an embodiment of the invention. Referring to FIG. 1A, a plurality of cell detecting wafers (for example, wafers 10) may be disposed on the cell detecting platform 1, for example, a material of a transparent material (for example, a glass slide) is used as a platform main body, and a thickness is formed by yellow lithography on the surface of the slide glass. A flow path of about 5 micrometers (μm) serves as a power source for driving cell flow. In detail, the circular hole in the middle of the wafer 10 serves as an injection hole for the cell suspension, and the hole around the wafer 10 serves as an evaporation hole, so that the liquid in the flow path can be evaporated therefrom. The outward pulling force when the liquid evaporates not only gives the cells a stable flow pulling force, but also spreads the center cells to the periphery, and more avoids the rapid evaporation of water to cause cell death.

請參照圖1B,晶片10例如是由上下兩片玻片12、14疊合而成,兩片玻片12、14中間夾著一層以黃光微影製成的5微米厚度的光阻16。玻片12中間的開孔係作為細胞懸浮液的注入孔,而光阻16的厚度則作為井壁,使得井底部有向外流通的狹窄通道,井中的液體通過此流道而經由周圍的孔洞向外蒸發。此蒸發所導致的力量有二:一為側向拉力,其可使得井中心的細胞向外移動,產生「攤平」的現象;另一則向下拉力,其可加速細胞的沈降及排列。藉由小幅的加速排列,可以減少細胞推積的可能性。Referring to FIG. 1B, the wafer 10 is formed, for example, by laminating two upper and lower slides 12, 14. The two slides 12, 14 are sandwiched by a 5 micron-thick photoresist 16 made of yellow lithography. The opening in the middle of the slide 12 serves as an injection hole for the cell suspension, and the thickness of the photoresist 16 serves as a well wall, so that the bottom of the well has a narrow passage that flows outward, through which the liquid in the well passes through the surrounding hole. Evaporate outward. The evaporation causes two forces: one is the lateral pulling force, which causes the cells in the center of the well to move outward, resulting in a "flattening" phenomenon; the other pulls down the force, which accelerates the sedimentation and alignment of the cells. With a small acceleration alignment, the possibility of cell desorption can be reduced.

需說明的是,為了避免細胞隨著井內液體的蒸發而跟著流失,前述光阻36的厚度定為至少5微米,此可使得直徑大於此厚度的細胞被侷限在井中。由圖1B右側的放大圖可知,光阻36的作用如同一個濾孔,其可以使液體通過,但細胞卻會因為被上下兩玻片12、14卡住而留在井內。It should be noted that in order to prevent the cells from escaping as the liquid in the well evaporates, the thickness of the photoresist 36 is set to be at least 5 microns, which allows cells having a diameter greater than this thickness to be confined in the well. As can be seen from the enlarged view on the right side of Fig. 1B, the photoresist 36 acts like a filter hole, which allows the liquid to pass, but the cells remain in the well because they are caught by the upper and lower slides 12, 14.

以下搭配圖1B簡述將細胞注入晶片10的流程,首先在晶片10內填充PBS溶液,再由細胞懸浮液注入口滴入細胞懸浮液18。此時細胞18a會受向下的重力和側向的拉力,較靠近井緣的細胞會受到側向拉力影響快速往底部側向流道流動,最後細胞會受到狹窄濾孔的阻隔而侷限在井中。藉此,可避免細胞過度分散。另一方面,接近中心的細胞雖然所受到的側向拉力較小,仍會因為重力的影響向下沉降,最終沉降在同一位置的細胞會被攤平(如細胞18b),而不致於因細胞堆疊而無法形成單層排列。The flow of injecting cells into the wafer 10 will be briefly described below with reference to FIG. 1B. First, the wafer 10 is filled with a PBS solution, and then dropped into the cell suspension 18 from the cell suspension injection port. At this time, the cell 18a will be subjected to downward gravity and lateral pulling force, and the cells closer to the well edge will be affected by the lateral pulling force to rapidly flow to the bottom lateral flow channel, and finally the cell will be blocked by the narrow filter hole and confined in the well. . Thereby, excessive cell dispersion can be avoided. On the other hand, cells close to the center, although subjected to a small lateral pull force, will still settle down due to the influence of gravity, and the cells that eventually settle at the same position will be flattened (eg, cell 18b) without causing cells. Stacked to form a single layer arrangement.

為求能夠在短時間內完成晶片10內細胞的檢測,本發明一實施例為此晶片10設計了一套自動檢測影像系統,其係在晶片10的檢測區域中預留記號,並利用電控平台控制相機在晶片10上移動以錄製晶片影像,再利用所拍攝影像中的記號對所拍攝影像進行定位及拼接,最終獲得完整的晶片影像。藉此,除了能夠大幅縮短手動操作所耗費的時間外,也可讓研究員無需致力於後續的影像分析上。In order to be able to complete the detection of cells in the wafer 10 in a short time, an embodiment of the present invention designs an automatic detection imaging system for the wafer 10, which is reserved in the detection area of the wafer 10 and utilizes electronic control. The platform controls the camera to move on the wafer 10 to record the wafer image, and then uses the marks in the captured image to position and splicing the captured image to obtain a complete wafer image. In this way, in addition to significantly reducing the time spent on manual operations, researchers can also eliminate the need for subsequent image analysis.

舉例來說,圖2是依照本發明一實施例所繪示的細胞檢測晶片的影像檢測系統的方塊圖。請參照圖2,本實施例的影像檢測系統2包括電子裝置20及影像擷取裝置30,其中電子裝置20例如是具備運算能力的個人電腦、伺服器、工作站或等計算機裝置,其中包括連接裝置22、儲存裝置24及處理器26,其功能分述如下:For example, FIG. 2 is a block diagram of an image detecting system for a cell detecting wafer according to an embodiment of the invention. Referring to FIG. 2, the image detecting system 2 of the present embodiment includes an electronic device 20 and an image capturing device 30, wherein the electronic device 20 is, for example, a personal computer, a server, a workstation, or the like having computing power, including a connecting device. 22. The storage device 24 and the processor 26 are described as follows:

連接裝置22例如是通用序列匯流排(USB)、RS232介面、通用非同步收發傳輸器(UART)、積體電路匯流排(I2C)、串行外設介面(SPI)、顯示埠(Display port)、雷電(Thunderbolt)介面或區域網路(LAN)介面,其可提供電子裝置20透過有線的方式連接影像擷取裝置30,以控制影像擷取裝置30移動並拍攝影像。The connection device 22 is, for example, a universal serial bus (USB), an RS232 interface, a universal asynchronous transceiver (UART), an integrated circuit bus (I2C), a serial peripheral interface (SPI), and a display port. The Thunderbolt interface or the local area network (LAN) interface can provide the electronic device 20 to connect to the image capturing device 30 by wire to control the image capturing device 30 to move and capture images.

需說明的是,影像擷取裝置30例如包括鏡頭、影像感測器及致動器等元件。鏡頭例如是由一或多個凹凸透鏡組合而成,藉由改變透鏡的位置而改變焦距,而聚焦在所拍攝的物體上。影像感測器中例如配置有電荷耦合元件(Charge Coupled Device,CCD)、互補性氧化金屬半導體(Complementary Metal-Oxide Semiconductor,CMOS)元件或其他種類的感光元件,其可感測進入鏡頭的光線強度以產生影像。致動器例如是步進馬達,其可根據由電子裝置20發出的控制訊號,推動影像擷取裝置30的鏡頭在細胞檢測晶片上方移動以拍攝細胞檢測晶片的影像。It should be noted that the image capturing device 30 includes components such as a lens, an image sensor, and an actuator. The lens is, for example, a combination of one or more meniscus lenses that change the focal length by changing the position of the lens to focus on the object being photographed. The image sensor is configured, for example, with a Charge Coupled Device (CCD), a Complementary Metal-Oxide Semiconductor (CMOS) component, or other kinds of photosensitive elements, which can sense the light intensity entering the lens. To produce an image. The actuator is, for example, a stepper motor that pushes the lens of the image capturing device 30 over the cell detecting wafer to capture an image of the cell detecting wafer based on a control signal emitted by the electronic device 20.

儲存裝置24可以是任何型態的固定式或可移動式隨機存取記憶體(random access memory,RAM)、唯讀記憶體(read-only memory,ROM)、快閃記憶體(flash memory)或類似元件或上述元件的組合。在本實施例中,儲存裝置24用以儲存移動路徑規劃模組242、控制模組244及影像拼接模組246,這些模組例如是儲存在儲存裝置24中的程式。The storage device 24 can be any type of fixed or removable random access memory (RAM), read-only memory (ROM), flash memory or Similar elements or combinations of the above elements. In this embodiment, the storage device 24 is configured to store the mobile path planning module 242, the control module 244, and the image mosaic module 246. The modules are, for example, programs stored in the storage device 24.

處理器26例如是中央處理單元(Central Processing Unit,CPU),或是其他可程式化之一般用途或特殊用途的微處理器(Microprocessor)、數位訊號處理器(Digital Signal Processor,DSP)、可程式化控制器、特殊應用積體電路(Application Specific Integrated Circuits,ASIC)、可程式化邏輯裝置(Programmable Logic Device,PLD)或其他類似裝置或這些裝置的組合。處理器26耦接連接裝置22及儲存裝置24,其會從儲存裝置24載入移動路徑規劃模組242、控制模組244及影像拼接模組246的程式,據以執行本案的細胞檢測晶片的影像定位及拼接方法。以下即舉實施例說明此方法的詳細步驟。The processor 26 is, for example, a central processing unit (CPU), or another programmable general purpose or special purpose microprocessor (Microprocessor), a digital signal processor (DSP), and a programmable program. Controllers, Application Specific Integrated Circuits (ASICs), Programmable Logic Devices (PLDs), or other similar devices or combinations of these devices. The processor 26 is coupled to the connection device 22 and the storage device 24, and loads the program of the mobile path planning module 242, the control module 244, and the image mosaic module 246 from the storage device 24, thereby performing the cell detection chip of the present invention. Image positioning and stitching methods. The detailed steps of this method are illustrated by the following examples.

圖3是依照本案一實施例所繪示之細胞檢測晶片的影像定位及拼接方法的流程圖。請同時參照圖2及圖3,本實施例的方法適用於圖2的影像檢測系統2,以下即搭配影像檢測系統2中的各項元件說明本案之影像定位及拼接方法的詳細步驟。FIG. 3 is a flow chart of a method for image positioning and splicing of a cell detecting wafer according to an embodiment of the present invention. Referring to FIG. 2 and FIG. 3 simultaneously, the method of the present embodiment is applicable to the image detecting system 2 of FIG. 2, and the detailed steps of the image positioning and splicing method of the present invention are described below with the components in the image detecting system 2.

首先,由電子裝置20處理器26執行移動路徑規劃模組242,以依據影像擷取裝置30的攝像區域的大小以及所欲檢測的細胞檢測晶片的檢測區域的大小,規劃影像擷取裝置30拍攝細胞檢測晶片的影像的移動路徑(步驟S302),其中所述的檢測區域中包括配置用以定位影像的多個記號。First, the mobile path planning module 242 is executed by the processor 26 of the electronic device 20 to plan the image capturing device 30 according to the size of the imaging area of the image capturing device 30 and the size of the detection area of the cell detecting wafer to be detected. The cell detects a moving path of the image of the wafer (step S302), wherein the detecting area includes a plurality of marks configured to locate the image.

詳言之,在影像檢測系統2進行影像擷取裝置30的控制時,為了減少整個晶片掃描時的影像張數,本發明一實施例使用4倍的物鏡鏡頭進行影像掃描。4倍物鏡所達到的影像解析度約為0.62像素/微米(pixel/μm),以白血球細胞的平均大小10μm進行計算,一個細胞可被分配到的解析度約為6*6像素,此解析度已足以用於分辨細胞螢光,並進行基本的循環腫瘤細胞的判定。In detail, in the case where the image detecting system 2 performs the control of the image capturing device 30, in order to reduce the number of images during the entire wafer scanning, an embodiment of the present invention uses a 4x objective lens for image scanning. The image resolution achieved by the 4x objective lens is about 0.62 pixels/μm (pixel/μm), and the average size of white blood cells is 10μm. A cell can be assigned a resolution of about 6*6 pixels. It is sufficient for distinguishing cell fluorescence and performing basic circulatory tumor cell determination.

需說明的是,在上述實施例中,影像檢測系統2係利用電子裝置20控制影像擷取裝置30移動,並以錄影的方式進行影像的記錄。而在另一實施例中,影像檢測系統2可製作成可攜帶式的小型電控平台,其可適用於任何顯微鏡系統上。藉由將其放置於光學顯微鏡本身的平台的上,並移動顯微鏡平台進行最基本的位置校準,將晶片中心移到物鏡中間即可。It should be noted that, in the above embodiment, the image detecting system 2 controls the movement of the image capturing device 30 by the electronic device 20, and records the image by video recording. In yet another embodiment, the image sensing system 2 can be fabricated as a portable, small electronically controlled platform that can be applied to any microscope system. The wafer center can be moved to the middle of the objective lens by placing it on the platform of the optical microscope itself and moving the microscope platform for the most basic positional calibration.

另一方面,由於本實施例在細胞檢測晶片中使用高密度的細胞檢測方式,不同區域影像的差異性較不明顯。為了增加差異性,以便於後續拼接影像,本實施例例如是在細胞檢測晶片底部增加數字、字母、符號、圖案等記號,必要時再利用光學暗場效果強化記號邊緣。其中,光學暗場的原理為利用不透光結構遮擋入射光,使得光線無法直接進入物鏡及目鏡。在沒有物體的情況下,視野全黑,而當有物體時,光線會在物體邊緣產生漫射,使其邊緣在暗場中變得明亮可見。藉此,可在不干擾螢光訊號的情況下,對不同區域的影像進行簡易的辨識及定位。On the other hand, since the present embodiment uses a high-density cell detection method in the cell detection wafer, the difference in image of different regions is less obvious. In order to increase the difference in order to facilitate the subsequent stitching of the image, the embodiment adds markers such as numbers, letters, symbols, patterns, and the like to the bottom of the cell detecting wafer, and if necessary, enhances the edge of the mark by using an optical dark field effect. Among them, the principle of the optical dark field is to block the incident light by the opaque structure, so that the light cannot directly enter the objective lens and the eyepiece. In the absence of an object, the field of view is completely black, and when there is an object, the light is diffused at the edge of the object, making its edges bright and visible in the dark field. In this way, images of different regions can be easily identified and positioned without disturbing the fluorescent signal.

圖4是依據本發明一實施例所繪示之細胞檢測晶片的檢測區域的示意圖。請參照圖4,本實施例繪示圖1中細胞檢測晶片10的檢測區域40中的詳細結構。其中,檢測區域40中包括採用之字形依序排列的數字圖形42,這些數字圖形42例如是採用光阻製作,藉由採用形狀較為複雜的數字圖形42作為檢測區域40中各個區域的記號,可供電子裝置20做為後續拼接影像的參考。此外,透過此方式也能夠藉由數字的大小得知所拍攝影像在細胞檢測晶片上的對應位置。4 is a schematic diagram of a detection area of a cell detection wafer according to an embodiment of the invention. Referring to FIG. 4, this embodiment illustrates the detailed structure in the detection area 40 of the cell detection wafer 10 of FIG. The detection area 40 includes digital patterns 42 arranged in a zigzag order. The digital patterns 42 are formed by using a photoresist, for example, by using a digital graphic 42 having a relatively complicated shape as a mark of each area in the detection area 40. The electronic device 20 serves as a reference for subsequent stitching images. In addition, in this way, the corresponding position of the captured image on the cell detecting wafer can also be known by the size of the number.

需說明的是,在上述光阻的製作方面,本發明一實施例係採用SU-8 3000系統的光阻來製作玻片上的微結構,再以AZ 9620的光阻來製作玻片上的數字圖形,其製作流程搭配圖5A~5E說明如下:It should be noted that, in the fabrication of the above photoresist, an embodiment of the present invention uses the photoresist of the SU-8 3000 system to fabricate the microstructure on the slide, and then uses the photoresist of the AZ 9620 to fabricate the digital pattern on the slide. The production process is shown in Figure 5A~5E as follows:

在圖5A中,使用丙酮、異丙醇、DI Water依序清洗玻片52的表面,並放置於加熱板上進行去水烘烤(120℃,5分鐘)。In Fig. 5A, the surface of the slide 52 was sequentially washed with acetone, isopropyl alcohol, DI Water, and placed on a hot plate for dewatering (120 ° C, 5 minutes).

在圖5B中,將玻片52移至破片用旋轉塗機塗佈光阻54。其中,本實施例使用的光阻為SU-8 3010。塗佈完成後進行軟烤的步驟,藉此去除光阻54中大部分的溶劑,使結構較為穩固。待玻片52的溫度降至室溫後,使用單側(single side)進行曝光,曝光後並進行曝後烤,以加強曝光時產生反應的結構,完成後同樣進行自然降溫。In Fig. 5B, the slide 52 is moved to the fragment and the photoresist 54 is coated with a spin coater. The photoresist used in this embodiment is SU-8 3010. After the coating is completed, the soft baking step is performed, thereby removing most of the solvent in the photoresist 54 to make the structure relatively stable. After the temperature of the slide glass 52 is lowered to room temperature, exposure is performed using a single side, and after exposure and post-exposure baking, the structure which reacts upon exposure is enhanced, and natural cooling is also performed after completion.

在圖5C中,使用SU-8的顯影液對玻片52上的光阻54進行顯影以產生結構。為了確認結構是否完成,顯影30秒後可以異丙醇沖洗,吹乾後確認顯影是否完成。顯影完畢後再以DI Water清洗玻片52上的異丙醇,即可完成流道的微結構54a的製作。In Figure 5C, the photoresist 54 on the slide 52 is developed using SU-8 developer to create a structure. In order to confirm whether or not the structure was completed, it was rinsed with isopropyl alcohol after 30 seconds of development, and it was confirmed by drying after drying. After the development is completed, the isopropyl alcohol on the slide 52 is washed with DI Water to complete the fabrication of the microstructure 54a of the flow path.

需說明的是,由於SU-8對於玻璃的附著性有極限,較小的記號無法黏附於玻璃表面上,因此在製作記號的部分係使用AZ 9260光阻進行製作。在塗佈AZ 9260光阻之前,會先使用異丙醇及DI Water依序清洗玻片52,進行去水烘烤後,使用HMDS蒸鍍5分鐘,以增加AZ 9260光阻在玻片52上的附著性。It should be noted that since the adhesion of SU-8 to glass is limited, a small mark cannot adhere to the surface of the glass, and therefore the portion where the mark is made is made using AZ 9260 photoresist. Prior to coating the AZ 9260 photoresist, the slide 52 was washed sequentially with isopropyl alcohol and DI Water, and then dehydrated and baked using HMDS for 5 minutes to increase the AZ 9260 photoresist on the slide 52. Adhesion.

在圖5D中,以2000的轉速(rpm)、30秒的參數在已製作微結構54a的玻片52上塗佈AZ 9260光阻56,厚度為10微米,接著將玻片52放置在100℃的加熱板軟烤約2分鐘,軟烤後再進行曝光的動作,曝光的劑量為200毫焦耳/平方公分(mJ/cm 2)。 In Figure 5D, an AZ 9260 photoresist 56 is applied to the slide 52 on which the microstructure 54a has been fabricated at a rotational speed (rpm) of 2000, with a thickness of 10 microns, and then the slide 52 is placed at 100 °C. The heating plate was soft baked for about 2 minutes, and then exposed to light after exposure, and the exposure dose was 200 mJ/cm 2 (mJ/cm 2 ).

在圖5E中,使用AZ 400K的顯影液混合DI Water(比例為1:3),顯影時間約90秒,對已塗佈AZ 9260光阻56的玻片52進行顯影,顯影後以DI Water沖洗並放置於加熱板上進行硬烤(120℃,5分鐘)即完成記號的微結構56a的製作。In Fig. 5E, the AZ 400K developer was mixed with DI Water (1:3 ratio), and the development time was about 90 seconds. The slide 52 coated with the AZ 9260 photoresist 56 was developed, and after development, it was rinsed with DI Water. It was placed on a hot plate for hard baking (120 ° C, 5 minutes) to complete the fabrication of the marked microstructure 56a.

回到圖3的流程,處理器26接著執行控制模組244以控制影像擷取裝置30依照移動路徑規劃模組242所規劃的移動路徑,於細胞檢測晶片上方移動以拍攝細胞檢測晶片的多張影像(步驟S304)。詳言之,本實施例的影像檢測系統2更提供電子裝置20設計移動速度、移動路線等功能。路線的設計可以使用影像擷取裝置30的攝像區域的面積來作為參考依據。舉例來說,利用已知尺寸的圖形(例如細胞計數盤的網格,一小格為50微米)進行測量,即可獲得影像擷取裝置30在一定倍率下的攝像區域。若影像擷取裝置30的攝像區域約為長2毫米、寬1毫米左右,影像擷取裝置30在Y軸的移動最少需移動7次(基於晶片的孔洞為7毫米)。Returning to the flow of FIG. 3, the processor 26 then executes the control module 244 to control the image capturing device 30 to move over the cell detecting wafer to capture multiple sheets of the cell detecting wafer according to the moving path planned by the moving path planning module 242. Image (step S304). In detail, the image detecting system 2 of the present embodiment further provides the electronic device 20 to design a moving speed, a moving route, and the like. The design of the route can use the area of the imaging area of the image capturing device 30 as a reference. For example, by using a pattern of a known size (for example, a grid of cell counting disks, a cell size of 50 microns), an imaging area of the image capturing device 30 at a certain magnification can be obtained. If the imaging area of the image capturing device 30 is about 2 mm long and 1 mm wide, the movement of the image capturing device 30 on the Y axis needs to be moved at least 7 times (the wafer-based hole is 7 mm).

最後,處理器26執行影像拼接模組246,以依據影像擷取裝置30所擷取影像中出現的記號的位置,對這些影像進行定位並拼接為完整的晶片影像(步驟S306)。詳言之,在一實施例中,移動路徑規劃模組242例如會依據影像擷取裝置30的攝像區域的大小及細胞檢測晶片的檢測區域的大小,決定細胞檢測晶片中的記號的數量及位置,使得影像擷取裝置30所拍攝的各張影像中包括至少一個記號。藉此,影像拼接模組246即可依據每張影像中的記號,得知其在晶片影像中的對應位置,此時再利用記號的圖形對相鄰影像進行拼接,而獲得完整的晶片影像。在另一實施例中,影像拼接模組246則可直接依據各張影像在移動路徑中的拍攝順序或拍攝位置,找出相鄰影像,並依據相鄰影像中出現的記號的位置對相鄰影像進行拼接,以獲得完整的晶片影像。Finally, the processor 26 executes the image splicing module 246 to position and splice the images into the complete wafer image according to the positions of the symbols appearing in the image captured by the image capturing device 30 (step S306). In an embodiment, the mobile path planning module 242 determines the number and location of the symbols in the cell detection chip according to, for example, the size of the imaging area of the image capturing device 30 and the size of the detection area of the cell detecting chip. At least one mark is included in each of the images captured by the image capturing device 30. In this way, the image splicing module 246 can know the corresponding position in the wafer image according to the mark in each image, and then use the pattern of the mark to splicing the adjacent images to obtain a complete wafer image. In another embodiment, the image splicing module 246 can directly locate adjacent images according to the shooting sequence or shooting position of each image in the moving path, and adjacent to each other according to the position of the mark appearing in the adjacent image. The images are stitched together to obtain a complete wafer image.

舉例來說,圖6A是依據本發明一實施例所繪示之移動影像擷取裝置的示意圖。圖6B及圖6C是依據本發明一實施例所繪示之拼接影像的示意圖。請參照圖6A,本實施例的影像擷取裝置的移動路線例如是簡易的弓字形,透過對攝像區域60進行錄影及定時擷圖的方式,即可取得檢測區域40中各個區域的影像。影像擷取裝置的移動速度的最大值例如是0.35毫米/秒(mm/s),為了避免錄影時會產生殘影,影像擷取裝置的移動速度可設為0.25毫米/秒。圖6B繪示影像擷取裝置在移動過程中所擷取的影像(例如影像62、64、66),藉由對這些影像進行拼接,即可取得如圖6C所示的完整晶片影像68。For example, FIG. 6A is a schematic diagram of a moving image capturing device according to an embodiment of the invention. FIG. 6B and FIG. 6C are schematic diagrams showing a stitched image according to an embodiment of the invention. Referring to FIG. 6A, the moving path of the image capturing device of the present embodiment is, for example, a simple bow shape. By recording and timing the image capturing area 60, the image of each area in the detecting area 40 can be obtained. The maximum moving speed of the image capturing device is, for example, 0.35 mm/sec (mm/s). To avoid image sticking during recording, the moving speed of the image capturing device can be set to 0.25 mm/sec. FIG. 6B illustrates images (eg, images 62, 64, 66) captured by the image capture device during movement, and by stitching the images, a complete wafer image 68 as shown in FIG. 6C can be obtained.

圖7A及圖7B是依據本發明一實施例所繪示之依據影像中記號位置拼接影像的示意圖。請參照圖7A,在本實施例中,由於細胞檢測晶片的檢測區域的各個位置都有對應的數字圖形,且影像擷取裝置在拍攝過程中所拍攝的影像之間會有重疊,因此利用此重疊部分中出現的數字圖形的特徵,即可透過影像處理軟體將各個區或的影像拼接為完整的晶片影像。例如透過影像72及影像74中出現的數字圖形8及數字圖形5的特徵,即可拼接影像72與影像74。藉由上述方式逐一拼接相鄰影像,最終即可拼接為如圖7B所示的完整的晶片影像76。7A and 7B are schematic diagrams of stitching images according to symbol positions in an image according to an embodiment of the invention. Referring to FIG. 7A, in this embodiment, since each position of the detection area of the cell detecting wafer has a corresponding digital figure, and the image capturing device overlaps between the images captured during the shooting, the use of this The features of the digital graphics appearing in the overlapping portion can be used to splicing the images of the regions or images into a complete wafer image through the image processing software. For example, the image 72 and the image 74 can be spliced through the features of the digital graphic 8 and the digital graphic 5 appearing in the image 72 and the image 74. The adjacent images are stitched one by one by the above method, and finally spliced into a complete wafer image 76 as shown in FIG. 7B.

綜上所述,本案的細胞檢測晶片的影像定位與拼接方法及影像檢測系統係在細胞檢測晶片的檢測區域中配置可用以定位的記號,並利用相機以錄影及定時擷圖的方式,拍攝檢測區域中各個區域的影像。之後,藉由影像拼接演算法,找出各張影像中的記號以及具有相同記號的影像,再根據記號在影像中的位置對各張影像進行對位及拼接,使得拼接後影像中的記號重疊。藉由上述記號的輔助,電子裝置得以快速辨認出重疊的部分,並將這些晶片影像拼接成完整的晶片影像。In summary, the image localization and splicing method of the cell detection wafer of the present invention and the image detection system are arranged in the detection area of the cell detection chip to configure the mark which can be used for positioning, and the camera is used for recording and timing by means of video recording and timing mapping. An image of each area in the area. Then, through the image mosaic algorithm, the symbols in each image and the images with the same mark are found, and then the images are aligned and spliced according to the position of the marks in the image, so that the marks in the stitched images overlap. . With the aid of the above symbols, the electronic device can quickly recognize the overlapping portions and splicing the wafer images into a complete wafer image.

雖然本案已以實施例揭露如上,然其並非用以限定本案,任何所屬技術領域中具有通常知識者,在不脫離本案的精神和範圍內,當可作些許的更動與潤飾,故本案的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present case. Any person having ordinary knowledge in the technical field can protect the case without making any changes or refinements without departing from the spirit and scope of the present case. The scope is subject to the definition of the scope of the patent application.

1‧‧‧細胞檢測平台1‧‧‧ cell detection platform

10‧‧‧晶片10‧‧‧ wafer

12、14‧‧‧玻片12, 14‧‧‧ slides

16‧‧‧光阻16‧‧‧Light resistance

18‧‧‧細胞懸浮液18‧‧‧ cell suspension

18a、18b‧‧‧細胞18a, 18b‧‧‧ cells

2‧‧‧影像檢測系統2‧‧‧Image Detection System

20‧‧‧電子裝置20‧‧‧Electronic devices

22‧‧‧連接裝置22‧‧‧Connecting device

24‧‧‧儲存裝置24‧‧‧Storage device

242‧‧‧移動路徑規劃模組242‧‧‧Mobile Path Planning Module

244‧‧‧控制模組244‧‧‧Control Module

246‧‧‧影像拼接模組246‧‧‧Image splicing module

26‧‧‧處理器26‧‧‧ Processor

30‧‧‧影像擷取裝置30‧‧‧Image capture device

40‧‧‧檢測區域40‧‧‧Detection area

42‧‧‧數字圖形42‧‧‧Digital graphics

52‧‧‧玻片52‧‧‧ slides

54、56‧‧‧光阻54, 56‧‧‧Light resistance

54a‧‧‧流道微結構54a‧‧ ‧ flow path microstructure

56a‧‧‧記號微結構56a‧‧‧mark microstructure

60‧‧‧攝像區域60‧‧‧Photography area

62、64、66、72、74‧‧‧影像62, 64, 66, 72, 74‧ ‧ images

76‧‧‧完整晶片影像76‧‧‧Complete wafer imagery

S302~S306‧‧‧本案一實施例之細胞檢測晶片的影像定位及拼接方法的步驟S302~S306‧‧‧ steps of image localization and splicing method of cell detection wafer in an embodiment of the present invention

圖1A及圖1B分別是依照本發明一實施例所繪示的細胞檢測平台與細胞檢測晶片的示意圖。 圖2是依照本發明一實施例所繪示的細胞檢測晶片的影像檢測系統的方塊圖。 圖3是依照本案一實施例所繪示之細胞檢測晶片的影像定位及拼接方法的流程圖。 圖4是依據本發明一實施例所繪示之細胞檢測晶片的檢測區域的示意圖。 圖5A~5E是依據本發明一實施例所繪示之製作流道及記號微結構的示意圖。 圖6A是依據本發明一實施例所繪示之移動影像擷取裝置的示意圖。 圖6B及圖6C是依據本發明一實施例所繪示之拼接影像的示意圖。 圖7A及圖7B是依據本發明一實施例所繪示之依據影像中記號位置拼接影像的示意圖。1A and 1B are schematic diagrams of a cell detection platform and a cell detection wafer, respectively, according to an embodiment of the invention. 2 is a block diagram of an image detection system for a cell detection wafer according to an embodiment of the invention. FIG. 3 is a flow chart of a method for image positioning and splicing of a cell detecting wafer according to an embodiment of the present invention. 4 is a schematic diagram of a detection area of a cell detection wafer according to an embodiment of the invention. 5A-5E are schematic diagrams showing the fabrication of a runner and a marker microstructure in accordance with an embodiment of the invention. FIG. 6A is a schematic diagram of a moving image capturing device according to an embodiment of the invention. FIG. 6B and FIG. 6C are schematic diagrams showing a stitched image according to an embodiment of the invention. 7A and 7B are schematic diagrams of stitching images according to symbol positions in an image according to an embodiment of the invention.

S302~S306‧‧‧步驟 S302~S306‧‧‧Steps

Claims (10)

一種細胞檢測晶片的影像定位及拼接方法,適於由具有處理器的電子裝置控制影像擷取裝置拍攝細胞檢測晶片的影像並對所拍攝的所述影像進行定位及拼接,該方法包括下列步驟:依據該影像擷取裝置的攝像區域的大小及該細胞檢測晶片的檢測區域的大小,規劃該影像擷取裝置拍攝該細胞檢測晶片的所述影像的移動路徑,其中該檢測區域中包括配置用以定位所述影像的多個記號;控制該影像擷取裝置依照所規劃的該移動路徑於該細胞檢測晶片上方移動以拍攝該細胞檢測晶片的多張影像;以及依據所述影像中出現的所述記號的位置,定位所述影像並拼接所述影像為完整的晶片影像,其中所述記號是在該細胞檢測晶片上使用黃光微影製程的光阻製作而成。 A method for image localization and splicing of a cell detection wafer is adapted to control an image capturing device to capture an image of a cell detecting wafer by an electronic device having a processor and to position and splicing the captured image. The method comprises the following steps: And locating the image capturing device to capture the moving path of the image of the cell detecting chip according to the size of the image capturing area of the image capturing device and the size of the detecting area of the cell detecting device, wherein the detecting region includes a configuration for Positioning a plurality of marks of the image; controlling the image capturing device to move over the cell detecting wafer according to the planned moving path to capture a plurality of images of the cell detecting wafer; and according to the appearance in the image The position of the mark, the image is positioned and the image is spliced into a complete wafer image, wherein the mark is made on the cell detection wafer using a photoresist of a yellow lithography process. 如申請專利範圍第1項所述的方法,其中依據所述影像中出現的所述記號的位置,定位所述影像並拼接所述影像為完整的該晶片影像的步驟更包括:依據各所述影像在該移動路徑中的拍攝順序或拍攝位置,找出相鄰影像;以及依據所述相鄰影像中出現的所述記號的位置拼接所述相鄰影像以獲得完整的該晶片影像。 The method of claim 1, wherein the step of locating the image and splicing the image into a complete image of the wafer according to the position of the mark appearing in the image further comprises: And capturing an adjacent image according to a shooting order or a shooting position in the moving path; and splicing the adjacent image according to a position of the mark appearing in the adjacent image to obtain a complete image of the wafer. 如申請專利範圍第1項所述的方法,其中該細胞檢測晶片中的所述記號的數量及位置包括依據該影像擷取裝置的該攝像區域的大小及該細胞檢測晶片的該檢測區域的大小來決定,使得該影像擷取裝置所拍攝的各所述影像中包括至少一所述記號。 The method of claim 1, wherein the number and location of the marks in the cell detecting wafer comprises a size of the image capturing area according to the image capturing device and a size of the detecting area of the cell detecting wafer It is determined that at least one of the symbols is included in each of the images captured by the image capturing device. 如申請專利範圍第1項所述的方法,其中所述光阻包括SU-8或AZ9260。 The method of claim 1, wherein the photoresist comprises SU-8 or AZ9260. 如申請專利範圍第4項所述的方法,其中於該細胞檢測晶片上使用光阻製作所述記號的步驟包括:於玻片表面塗佈第一光阻並進行軟烤、曝光及顯影,以製作流道的微結構;以及於該玻片表面上各所述記號的位置塗佈第二光阻並進行軟烤、曝光及顯影,以製作所述記號的微結構。 The method of claim 4, wherein the step of using the photoresist on the cell detection wafer to form the mark comprises: coating a first photoresist on the surface of the slide and performing soft baking, exposure and development, A microstructure of the flow channel is formed; and a second photoresist is applied to the position of each of the marks on the surface of the slide and soft baked, exposed and developed to produce the microstructure of the mark. 如申請專利範圍第1項所述的方法,其中所述記號包括數字、字母、符號、圖案其中之一或其組合。 The method of claim 1, wherein the symbol comprises one of a number, a letter, a symbol, a pattern, or a combination thereof. 一種細胞檢測晶片的影像檢測系統,包括:影像擷取裝置,配置於細胞檢測晶片上方,移動拍攝該細胞檢測晶片的多張影像;以及電子裝置,包括:連接裝置,連接該影像擷取裝置;儲存裝置,儲存多個模組;以及處理器,耦接該連接裝置及該儲存裝置,執行該儲存裝置中儲存的所述模組,所述模組包括: 移動路徑規劃模組,依據該影像擷取裝置的攝像區域的大小及該細胞檢測晶片的檢測區域的大小,規劃該影像擷取裝置拍攝該細胞檢測晶片的所述影像的移動路徑,其中該檢測區域中包括配置用以定位所述影像的多個記號;控制模組,控制該影像擷取裝置依照該移動路徑規劃模組所規劃的該移動路徑於該細胞檢測晶片上方移動以拍攝所述影像;以及影像拼接模組,依據所述影像中出現的所述記號的位置,定位所述影像並拼接所述影像為完整的晶片影像,其中所述記號是在該細胞檢測晶片上使用黃光微影製程的光阻製作而成。 An image detecting system for a cell detecting wafer, comprising: an image capturing device disposed above a cell detecting wafer to move a plurality of images of the cell detecting wafer; and an electronic device comprising: a connecting device connected to the image capturing device; a storage device that stores a plurality of modules; and a processor coupled to the connection device and the storage device to execute the module stored in the storage device, the module comprising: The moving path planning module plans to capture the moving path of the image of the cell detecting chip according to the size of the imaging area of the image capturing device and the size of the detection area of the cell detecting device, wherein the detecting The area includes a plurality of symbols configured to locate the image; and the control module controls the image capturing device to move over the cell detecting wafer according to the moving path planned by the moving path planning module to capture the image. And an image splicing module, according to the position of the mark appearing in the image, positioning the image and splicing the image into a complete wafer image, wherein the mark is a yellow lithography process on the cell detecting wafer Made of photoresist. 如申請專利範圍第7項所述的系統,其中該影像拼接模組包括依據各所述影像在該移動路徑中的拍攝順序或拍攝位置,找出相鄰影像,並依據所述相鄰影像中出現的所述記號的位置拼接所述相鄰影像以獲得完整的該晶片影像。 The system of claim 7, wherein the image splicing module comprises: finding an adjacent image according to a shooting sequence or a shooting position of each of the images in the moving path, and according to the adjacent image The location of the indicia that appears appears to stitch the adjacent image to obtain a complete image of the wafer. 如申請專利範圍第7項所述的系統,其中移動路徑規劃模組更依據該影像擷取裝置的該攝像區域的大小及該細胞檢測晶片的該檢測區域的大小,決定該細胞檢測晶片中的所述記號的數量及位置,使得該影像擷取裝置所拍攝的各所述影像中包括至少一所述記號。 The system of claim 7, wherein the moving path planning module further determines the size of the cell detection wafer according to the size of the imaging area of the image capturing device and the size of the detection area of the cell detecting wafer. The number and position of the marks are such that at least one of the marks is included in each of the images captured by the image capturing device. 如申請專利範圍第7項所述的系統,其中所述記號包括數字、字母、符號、圖案其中之一或其組合。 The system of claim 7, wherein the indicia comprises one of a number, a letter, a symbol, a pattern, or a combination thereof.
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