TWI607212B - Image generation device, defect inspection device, and defect inspection method - Google Patents

Image generation device, defect inspection device, and defect inspection method Download PDF

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TWI607212B
TWI607212B TW103101491A TW103101491A TWI607212B TW I607212 B TWI607212 B TW I607212B TW 103101491 A TW103101491 A TW 103101491A TW 103101491 A TW103101491 A TW 103101491A TW I607212 B TWI607212 B TW I607212B
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image data
sheet
dimensional image
pixel
formed body
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TW201435333A (en
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尾崎麻耶
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住友化學股份有限公司
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T3/00Geometric image transformations in the plane of the image
    • G06T3/40Scaling of whole images or parts thereof, e.g. expanding or contracting
    • G06T3/4038Image mosaicing, e.g. composing plane images from plane sub-images
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901Optical details; Scanning details
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/30Subject of image; Context of image processing
    • G06T2207/30108Industrial image inspection
    • G06T2207/30124Fabrics; Textile; Paper

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  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
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  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)

Description

圖像產生裝置、缺陷檢查裝置及缺陷檢查方法 Image generating device, defect inspection device, and defect inspection method

本發明係關於一種產生用以檢查片狀成形體之缺陷之圖像資料的圖像產生裝置、具備該圖像產生裝置之缺陷檢查裝置、及缺陷檢查方法。 The present invention relates to an image generating apparatus that generates image data for inspecting a defect of a sheet-shaped formed body, a defect inspecting apparatus including the image generating apparatus, and a defect inspecting method.

自先前以來,作為用以檢查偏光膜或相位差膜等片狀成形體之缺陷之方法,已知有使用相機之檢查。例如,於日本專利特開2007-333563號公報(專利文獻1)中,藉由光源對片狀成形體照射光,並利用線感測器相機拍攝於該片狀成形體中透過及折射之透過光像,藉此檢查該片狀成形體之缺陷。又,自先前以來亦已知有代替拍攝透過光像而藉由拍攝反射光像來檢查片狀成形體之缺陷之方法。 A method of using a camera has been known as a method for inspecting defects of a sheet-like formed body such as a polarizing film or a retardation film. For example, in Japanese Laid-Open Patent Publication No. 2007-333563 (Patent Document 1), a sheet-like molded body is irradiated with light by a light source, and transmitted through the sheet-shaped molded body by a line sensor camera. The light image is thereby used to inspect the defects of the sheet-shaped formed body. Further, a method of inspecting a defect of a sheet-shaped formed body by photographing a reflected light image instead of photographing a transmitted light image has been known.

使用圖10,對利用線感測器相機檢查於片狀成形體有無產生點狀之凹缺陷之方法之一例進行說明。圖10所示之片狀成形體L於其寬度方向X中央產生有點狀之凹缺陷L1。片狀成形體L係向其長度方向Y之一側被搬送,其結果,如圖10(a)~圖10(c)所示,凹缺陷L1向長度方向Y之一側依次移動。 An example of a method of detecting whether or not a dot-shaped concave defect is generated in a sheet-shaped formed body by a line sensor camera will be described with reference to FIG. The sheet-like formed body L shown in Fig. 10 has a pit-shaped concave defect L 1 in the center in the width direction X thereof. The sheet-like formed body L is conveyed to one side in the longitudinal direction Y. As a result, as shown in FIGS. 10( a ) to 10 ( c ), the concave defects L 1 are sequentially moved to one side in the longitudinal direction Y.

如圖10(a)~圖10(c)所示,藉由沿寬度方向X延伸之未圖示之光源,而於片狀成形體L產生有明部L2與暗部L3。光源之位置被固定,藉由搬送片狀成形體L,從而明部L2之位置於片狀成形體L上向長度方向Y之另一側依次移動。以該明部L2與暗部L3之交界線附近成為拍 攝範圍B之方式設置未圖示之線感測器相機。只要線感測器相機之位置相對於光源固定,片狀成形體L被穩定地搬送,且凹缺陷L1不位於拍攝區域附近,則如圖10(a)及圖10(c)所示,明部L2與暗部L3之交界線附近之圖像相同,藉由線感測器相機所取得之圖像G1、G3亦相同。但是,如圖10(b)所示,於凹缺陷L1位於拍攝區域附近之情形時,明部L2與暗部L3之交界線附近之圖像因該凹缺陷L1而產生變化,其結果,與圖像G1、G3不同,於藉由線感測器相機所取得之圖像G2中暗部L3被較大地拍入。因此,如圖10(d)所示,藉由依次合成利用線感測器相機取得之圖像,可合成由暗部表示凹缺陷L1之位置之檢查用圖像G4As shown in FIGS. 10(a) to 10(c), a bright portion L 2 and a dark portion L 3 are formed in the sheet-like formed body L by a light source (not shown) extending in the width direction X. The position of the light source is fixed, and by moving the sheet-shaped formed body L, the position of the bright portion L 2 is sequentially moved on the other side of the sheet-shaped formed body L in the longitudinal direction Y. A line sensor camera (not shown) is provided so that the vicinity of the boundary line between the bright portion L 2 and the dark portion L 3 is the imaging range B. As long as the line sensor camera, the position of the light source with respect to the fixed, the sheet material L is stably conveyed, and L recessed defect. 1 is not located near the imaging area, FIG. 10 (a) and 10 (C), The images near the boundary between the bright portion L 2 and the dark portion L 3 are the same, and the images G 1 and G 3 obtained by the line sensor camera are also the same. However, in FIG. 10 (b), the concave defect in case L 1 is located in the vicinity of the imaging region, the turn of the image line L 3 L 2 near the bright portion and the dark portion due to the recessed defect is generated change L 1, which is As a result, unlike the images G 1 and G 3 , the dark portion L 3 is captured in the image G 2 obtained by the line sensor camera. Thus, FIG. 10 (d), the acquisition of the image by using the line sensor camera are sequentially synthesized, the examination position can be synthesized represents L of the concave defect 1 G 4 by the dark image portion.

如使用圖10所說明之缺陷檢查之方法係如上所述般以片狀成形體L被穩定地搬送為前提。然而,存在片狀成形體L於搬送中晃動之情形,未必被穩定地搬送。若片狀成形體L於搬送中晃動,則存在如下情形:該片狀成形體L與線感測器相機及光源之位置關係產生變化,藉由上述缺陷檢查之方法無法順利地發現缺陷。 The method of detecting the defect described with reference to FIG. 10 is based on the assumption that the sheet-like molded body L is stably conveyed as described above. However, there is a case where the sheet-like formed body L is shaken during transportation, and it is not necessarily stably conveyed. When the sheet-like formed body L is shaken during conveyance, there is a case where the positional relationship between the sheet-like formed body L and the line sensor camera and the light source changes, and the defect cannot be smoothly found by the above-described defect inspection method.

再者,於本發明中,所謂片狀成形體晃動之狀態,例如於在水平方向上搬送片狀成形體之情形時,指片狀成形體之一部分或全部劇烈地上下搖動之狀態,例如於在垂直方向上搬送片狀成形體之情形時,指片狀成形體之一部分或全部劇烈地左右搖動之狀態。 In the present invention, the state in which the sheet-like molded body is swayed, for example, when the sheet-shaped formed body is conveyed in the horizontal direction, is a state in which part or all of the sheet-like formed body is vigorously rocked up and down, for example, When the sheet-like formed body is conveyed in the vertical direction, a part or all of the sheet-like formed body is violently shaken left and right.

使用圖11,對片狀成形體L晃動之情形進行說明。於圖11(a)及圖11(b)中,未產生晃動,為與圖10(a)及圖10(b)相同之狀態,於圖11(c)中,產生有晃動。如圖11(c)所示,若片狀成形體L晃動,則即便凹缺陷L1不位於拍攝區域附近,明部L2與暗部L3之交界線附近之圖像亦會因晃動而產生變化,其結果,存在如下情形:與圖像G1、G2不同,於藉由線感測器相機所取得之圖像G5中暗部L3被較大地拍入。於此種情形時,如圖11(d)所示般於應由暗部表示凹缺陷L1之位置之檢查用圖 像G6中產生與凹缺陷L1無關之暗部,而有錯誤地判斷為於與凹缺陷L1無關之位置亦存在缺陷之虞。又,於與圖11不同之晃動之狀態下,亦存在於凹缺陷L1位於拍攝區域附近時藉由線感測器相機所取得之圖像中未拍入暗部L3之情況,而有錯誤地判斷為於片狀成形體L不存在缺陷之虞。 The case where the sheet-like formed body L is shaken will be described with reference to Fig. 11 . In Figs. 11(a) and 11(b), no sway occurs, and the same state as in Figs. 10(a) and 10(b) is shown, and sway occurs in Fig. 11(c). FIG. 11 (c), the fluctuation when the sheet material L, even if the concave defect is not located. 1 L photographing region, bright image of the vicinity of the portion L 2 and L 3 at the turn of the dark portion caused by a fluctuation boundaries will be generated As a result, there is a case where, unlike the images G 1 and G 2 , the dark portion L 3 is largely captured in the image G 5 obtained by the line sensor camera. When in this case, as shown in FIG 11 (d) shall be as shown in the dark portion represents the check of the position of a concave defect image L G, L 6 generates a concave defect unrelated to the dark portion, and there is determined erroneously There is also a flaw in the position unrelated to the concave defect L 1 . Further, at the state of FIG 11 is different from the rock, is also present in the concave defect is located near the L 1 region captured image acquired by the line sensor camera does not shoot the case where the dark portion of L 3, while the error It is judged that there is no defect in the sheet-like formed body L.

本發明係用以解決此種課題者,其目的在於提供一種產生用以檢查片狀成形體之缺陷之圖像資料且可防止因片狀成形體之晃動等而導致對缺陷之有無產生錯誤判斷之圖像產生裝置、具備該圖像產生裝置之缺陷檢查裝置、及缺陷檢查方法。 The present invention has been made to solve such a problem, and an object of the invention is to provide an image data for inspecting defects of a sheet-shaped formed body, and to prevent erroneous determination of the presence or absence of defects due to shaking of the sheet-shaped formed body or the like. An image generating device, a defect inspection device including the image generating device, and a defect inspection method.

本發明提供一種圖像產生裝置,其產生用以檢查片狀成形體之缺陷之圖像資料,且包括:搬送部,其將片狀成形體沿該片狀成形體之長度方向搬送;光照射部,其具備於片狀成形體之寬度方向上呈直線狀延伸之光源,藉由該光源對片狀成形體照射光;拍攝部,其係對搬送中之上述片狀成形體進行拍攝動作而產生表示二維圖像之二維圖像資料,且於在該二維圖像內包含對應於上述光源之明部與亮度較該明部低之暗部之位置對片狀成形體進行複數次拍攝動作;及檢查用圖像資料產生部,其係自藉由上述拍攝部而產生之複數個二維圖像資料產生檢查用圖像資料,且包括:交界提取部,其提取由各二維圖像資料表示之各二維圖像內之上述明部與上述暗部之交界線部;重新提取部,其將上述交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式,將該表觀上之交界線平滑化,而自二維圖像資料中提取構成經平滑化而獲得之本來之交界線之像素;及 合成部,其產生包含由上述重新提取部提取之像素之一維圖像資料,並合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料而產生檢查用圖像資料。 The present invention provides an image generating apparatus that generates image data for inspecting a defect of a sheet-shaped formed body, and includes: a conveying portion that conveys the sheet-shaped formed body along a length direction of the sheet-shaped formed body; And a light source that linearly extends in the width direction of the sheet-like molded body, wherein the sheet-shaped molded body is irradiated with light by the light source, and the image capturing unit performs an image capturing operation on the sheet-shaped formed body during conveyance. Generating a two-dimensional image data representing a two-dimensional image, and performing a plurality of shots on the sheet-shaped formed body in a position corresponding to a bright portion of the light source and a dark portion having a lower brightness than the bright portion in the two-dimensional image And an inspection image data generation unit that generates inspection image data from a plurality of two-dimensional image data generated by the imaging unit, and includes: a boundary extraction unit that extracts each two-dimensional image a boundary line portion between the bright portion and the dark portion in each of the two-dimensional images represented by the data; and a re-extraction portion that connects the boundary portions to form an apparent boundary line on the apparent boundary line Appear The sharp peaks disappearance embodiment, the turn of the apparent boundary smoothing, configured to extract from the two-dimensional image data obtained by the smoothed boundaries of the original turn of pixels; and a synthesizing unit that generates one-dimensional image data including pixels extracted by the re-extraction unit, and synthesizes a plurality of one-dimensional image data obtained from the plurality of two-dimensional image data in the same manner to generate an inspection image data.

又,本發明提供一種缺陷檢查裝置,其包括:上述圖像產生裝置;及顯示部,其顯示由藉由上述圖像產生裝置之檢查用圖像資料產生部而產生之檢查用圖像資料表示之圖像。 Moreover, the present invention provides a defect inspection apparatus including: the image generation device; and a display unit that displays an inspection image data generated by the inspection image data generation unit of the image generation device The image.

又,本發明提供一種缺陷檢查方法,其用以檢查片狀成形體之缺陷,且包括:拍攝步驟,其係於一面藉由在片狀成形體之寬度方向上呈直線狀延伸之光源對該片狀成形體照射光、一面將該片狀成形體沿該片狀成形體之長度方向搬送之狀態下,對該片狀成形體進行拍攝動作而產生表示二維圖像之二維圖像資料,且以於該二維圖像內包含對應於上述光源之明部與亮度較該明部低之暗部之方式對片狀成形體進行複數次拍攝動作;交界提取步驟,其係提取由上述拍攝步驟中所產生之各二維圖像資料表示之各二維圖像內之上述明部與上述暗部之交界線部;重新提取步驟,其係將上述交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式,將該表觀上之交界線平滑化,而自二維圖像資料中提取構成經平滑化而獲得之本來之交界線之像素;合成步驟,其係產生包含上述重新提取步驟中提取出之像素之一維圖像資料,並合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料而產生檢查用圖像資料;及顯示步驟,其係顯示由上述合成步驟中所產生之檢查用圖像資料表示之圖像。 Further, the present invention provides a defect inspection method for inspecting defects of a sheet-shaped formed body, and comprising: a photographing step of illuminating the light source by a light source extending linearly in a width direction of the sheet-shaped formed body The sheet-shaped molded body is irradiated with light, and the sheet-like formed body is imaged in the longitudinal direction of the sheet-like formed body, and the sheet-shaped molded body is imaged to generate two-dimensional image data representing the two-dimensional image. And the plurality of imaging operations are performed on the sheet-shaped formed body corresponding to the bright portion of the light source and the dark portion having a lower brightness than the bright portion in the two-dimensional image; and the boundary extraction step is performed by the above-mentioned shooting Each of the two-dimensional image data generated in the step represents a boundary line between the bright portion and the dark portion in each of the two-dimensional images; and a re-extraction step of connecting the boundary portions to form an apparent boundary The line smoothes the apparent boundary line in the manner that the sharp peak appearing on the apparent boundary line disappears, and extracts the original result obtained by smoothing from the two-dimensional image data. a pixel of a line; a synthesis step of generating a plurality of one-dimensional image data obtained by including one of the pixels extracted in the above-mentioned re-extraction step, and synthesizing the plurality of two-dimensional image data in the same manner And generating image data for inspection; and displaying a step of displaying an image represented by the image data for inspection generated in the above-described synthesis step.

根據本發明,於圖像產生裝置中,於對搬送中之片狀成形體照射光之狀態下,對該片狀成形體進行複數次拍攝動作而產生複數個二維圖像資料。而且,提取由各二維圖像資料表示之各二維圖像內之明部與暗部之交界線部。繼而,將該交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式,使該表觀上之交界線平滑化。自二維圖像資料中重新提取構成以此方式平滑化而獲得之本來之交界線之像素,產生包含構成本來之交界線之像素的一維圖像資料。合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料而產生檢查用圖像資料。 According to the present invention, in the image forming apparatus, a plurality of two-dimensional image data are generated by performing a plurality of imaging operations on the sheet-shaped molded body in a state where light is applied to the sheet-shaped molded body during conveyance. Further, a boundary line portion between the bright portion and the dark portion in each of the two-dimensional images indicated by the respective two-dimensional image data is extracted. Then, the boundary line portions are connected to form an apparent boundary line, and the apparent boundary line is smoothed in such a manner that the sharp peak appearing on the apparent boundary line disappears. The pixels constituting the original boundary line obtained by smoothing in this manner are re-extracted from the two-dimensional image data, and one-dimensional image data including pixels constituting the original boundary line is generated. The inspection image data is generated by synthesizing a plurality of one-dimensional image data obtained from a plurality of two-dimensional image data in the same manner.

於片狀成形體產生有缺陷之情形時,於穩定地搬送該片狀成形體且缺陷位於交界線部附近時,表觀上之交界線因該缺陷而成為出現有尖銳之波峰之歪曲之曲線。因此,使該表觀上之交界線平滑化而獲得之本來之交界線與表觀上之交界線不同。又,於片狀成形體產生有缺陷之情形時,於該片狀成形體在搬送中晃動且缺陷不位於交界線部附近時,表觀上之交界線因該片狀成形體之晃動而成為平緩之曲線。因此,使該表觀上之交界線平滑化而獲得之本來之交界線為與表觀上之交界線大致相同之曲線、或與表觀上之交界線相同之曲線。 When the sheet-like formed body is defective, when the sheet-shaped formed body is stably conveyed and the defect is located in the vicinity of the boundary portion, the apparent boundary line becomes a curved curve in which a sharp peak appears due to the defect. . Therefore, the original boundary line obtained by smoothing the apparent boundary line is different from the apparent boundary line. Further, when the sheet-like formed body is defective, when the sheet-shaped formed body is shaken during conveyance and the defect is not located in the vicinity of the boundary portion, the apparent boundary line becomes due to the sway of the sheet-shaped formed body. A gentle curve. Therefore, the original boundary line obtained by smoothing the apparent boundary line is a curve substantially the same as the apparent boundary line or the same curve as the apparent boundary line.

由此,自各二維圖像資料產生包含構成本來之交界線之像素之一維圖像資料,並合成以此方式獲得之複數個一維圖像資料而設為檢查用圖像資料,藉此,可產生由明部及暗部之位置關係表示缺陷之位置之檢查用圖像資料。其結果,可基於該檢查用圖像資料判斷片狀成形體有無缺陷,且可防止因片狀成形體之晃動等而導致對缺陷之有無產生錯誤判斷。 Thereby, one-dimensional image data including pixels constituting the original boundary line is generated from each two-dimensional image data, and a plurality of one-dimensional image data obtained in this manner are synthesized and used as inspection image data. The inspection image data indicating the position of the defect by the positional relationship between the bright part and the dark part can be generated. As a result, it is possible to determine whether or not the sheet-shaped formed body is defective based on the inspection image data, and it is possible to prevent an erroneous determination of the presence or absence of the defect due to the sway of the sheet-shaped formed body.

又,根據本發明,缺陷檢查裝置包括上述本發明之圖像產生裝置、及顯示部。顯示部顯示由藉由圖像產生裝置之檢查用圖像資料產生部而產生之檢查用圖像資料表示之圖像。藉由觀察由顯示部基於檢 查用圖像資料而顯示之圖像,可判斷有無缺陷,且可防止因片狀成形體之晃動等而導致對缺陷之有無產生錯誤判斷。 Moreover, according to the present invention, the defect inspection apparatus includes the image generation apparatus of the present invention described above and a display unit. The display unit displays an image indicated by the inspection image data generated by the inspection image data generating unit of the image generating device. By observation based on the display By checking the image displayed by the image data, it is possible to determine whether or not there is a defect, and it is possible to prevent the occurrence of an erroneous determination of the presence or absence of the defect due to the shaking of the sheet-shaped formed body.

又,根據本發明,在缺陷檢查方法中,於拍攝步驟中,於對搬送中之片狀成形體照射有光之狀態下對該片狀成形體進行複數次拍攝動作而產生複數個二維圖像資料。而且,於交界提取步驟中,提取由各二維圖像資料表示之各二維圖像內之明部與暗部之交界線部。繼而,於重新提取步驟中,將該交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式,使該表觀上之交界線平滑化。自二維圖像資料中重新提取構成以此方式平滑化而獲得之本來之交界線之像素。進而,於合成步驟中,產生包含構成本來之交界線之像素之一維圖像資料,並合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料,而產生由明部及暗部之位置關係表示缺陷之位置之檢查用圖像資料,於顯示步驟中,顯示由檢查用圖像資料表示之圖像。藉由觀察於顯示步驟中顯示之基於檢查用圖像資料而表示之圖像,可判斷有無缺陷,且可防止因片狀成形體之晃動等而導致對缺陷之有無產生錯誤判斷。 Further, according to the present invention, in the image capturing step, the sheet-like molded body is subjected to a plurality of imaging operations in a state in which light is applied to the sheet-shaped molded body during conveyance, and a plurality of two-dimensional images are generated. Like information. Further, in the boundary extraction step, a boundary line portion between the bright portion and the dark portion in each of the two-dimensional images indicated by the respective two-dimensional image data is extracted. Then, in the re-extraction step, the boundary line portions are connected to form an apparent boundary line, and the apparent boundary line is smoothed in such a manner that the sharp peak appearing on the apparent boundary line disappears. . The pixels constituting the original boundary line obtained by smoothing in this manner are re-extracted from the two-dimensional image data. Further, in the synthesizing step, generating one-dimensional image data including one of the pixels constituting the original boundary line, and synthesizing a plurality of one-dimensional image data obtained from the plurality of two-dimensional image data in the same manner, and generating The positional relationship between the bright part and the dark part indicates the image data for inspection of the position of the defect, and in the display step, the image indicated by the image data for inspection is displayed. By observing the image represented by the inspection image data displayed in the display step, it is possible to determine whether or not there is a defect, and it is possible to prevent an erroneous determination of the presence or absence of the defect due to the sway of the sheet-shaped molded body or the like.

1‧‧‧圖像產生裝置 1‧‧‧Image generating device

11‧‧‧搬送部 11‧‧‧Transportation Department

12‧‧‧光照射部 12‧‧‧Lighting Department

13‧‧‧拍攝部 13‧‧‧Photography Department

14‧‧‧資訊處理裝置 14‧‧‧Information processing device

21‧‧‧顯示部 21‧‧‧Display Department

100‧‧‧缺陷檢查裝置 100‧‧‧ Defect inspection device

141‧‧‧檢查用圖像資料產生部 141‧‧‧Image data generation department for inspection

1411‧‧‧交界提取部 1411‧‧The Border Extraction Department

1412‧‧‧重新提取部 1412‧‧‧Re-extraction department

1413‧‧‧合成部 1413‧‧‧Combination Department

A‧‧‧二點鏈線 A‧‧‧ two-point chain

B‧‧‧拍攝範圍 B‧‧‧ Shooting range

G1‧‧‧圖像 G 1 ‧‧‧ image

G2‧‧‧圖像 G 2 ‧‧‧ image

G3‧‧‧圖像 G 3 ‧‧‧ image

G4‧‧‧檢查用圖像 G 4 ‧‧‧Image for inspection

G5‧‧‧圖像 G 5 ‧‧‧ image

G6‧‧‧檢查用圖像 G 6 ‧‧‧Image for inspection

j1‧‧‧交界線 j 1 ‧‧ ‧ boundary line

j2‧‧‧交界線 j 2 ‧‧ ‧ boundary line

j3‧‧‧交界線 j 3 ‧‧ ‧ boundary line

j4‧‧‧交界線 j 4 ‧‧ ‧ boundary line

K‧‧‧片狀成形體 K‧‧‧Fabric shaped body

K1‧‧‧凹缺陷 K 1 ‧‧‧ concave defect

K2‧‧‧明部 K 2 ‧‧ ‧Ministry

K3‧‧‧暗部 K 3 ‧‧‧Dark Department

L‧‧‧片狀成形體 L‧‧‧Fabric shaped body

L1‧‧‧凹缺陷 L 1 ‧‧‧ concave defect

L2‧‧‧明部 L 2 ‧‧ ‧Ministry

L3‧‧‧暗部 L 3 ‧‧‧Dark Department

P1‧‧‧像素 P 1 ‧ ‧ pixels

P2‧‧‧像素 P 2 ‧ ‧ pixels

P3‧‧‧像素 P 3 ‧ ‧ pixels

P4‧‧‧像素 P 4 ‧ ‧ pixels

P5‧‧‧像素 P 5 ‧ ‧ pixels

P6‧‧‧像素 P 6 ‧ ‧ pixels

P7‧‧‧像素 P 7 ‧ ‧ pixels

P8‧‧‧像素 P 8 ‧ ‧ pixels

P9‧‧‧像素 P 9 ‧ ‧ pixels

S1‧‧‧步驟 S1‧‧‧ steps

S2‧‧‧步驟 S2‧‧‧ steps

S3‧‧‧步驟 S3‧‧‧ steps

S4‧‧‧步驟 S4‧‧‧ steps

S5‧‧‧步驟 S5‧‧ steps

X‧‧‧方向 X‧‧‧ direction

Y‧‧‧方向 Y‧‧‧ direction

圖1係表示本發明之缺陷檢查裝置100之立體圖。 Fig. 1 is a perspective view showing a defect inspection apparatus 100 of the present invention.

圖2係表示本發明之缺陷檢查裝置100之方塊圖。 Fig. 2 is a block diagram showing the defect inspection apparatus 100 of the present invention.

圖3係表示本發明之缺陷檢查方法之步驟圖。 Fig. 3 is a view showing the steps of the defect inspection method of the present invention.

圖4(a)-(c)係表示片狀成形體K之情況之圖。 4(a) to 4(c) are views showing the state of the sheet-shaped formed body K.

圖5(a)-(c)係表示藉由對片狀成形體K進行拍攝而獲得之圖像之圖。 5(a) to 5(c) are views showing an image obtained by photographing the sheet-shaped formed body K.

圖6(a)-(d)係表示藉由對片狀成形體K進行拍攝而獲得之圖像之圖。 6(a) to 6(d) are views showing an image obtained by photographing the sheet-shaped formed body K.

圖7(a)-(c)係表示藉由對片狀成形體K進行拍攝而獲得之圖像之 圖。 7(a)-(c) show images obtained by photographing the sheet-shaped formed body K. Figure.

圖8係表示藉由對片狀成形體K進行拍攝而獲得之圖像之圖。 Fig. 8 is a view showing an image obtained by photographing the sheet-shaped formed body K.

圖9(a)-(e)係用以說明藉由重新提取部1412進行之處理之具體例之圖。 9(a) to 9(e) are diagrams for explaining a specific example of processing by the re-extraction unit 1412.

圖10(a)-(d)係用以對利用線感測器相機檢查於片狀成形體L有無產生點狀之凹缺陷之方法之一例進行說明之圖。 FIGS. 10(a) to 10(d) are views for explaining an example of a method of detecting whether or not a dot-shaped concave defect is formed in the sheet-like formed body L by a line sensor camera.

圖11(a)-(d)係用以對片狀成形體L晃動之情形進行說明之圖。 11(a) to 11(d) are views for explaining a case where the sheet-like formed body L is shaken.

以下,對本發明之圖像產生裝置、缺陷檢查裝置及缺陷檢查方法進行說明。圖1係表示本發明之缺陷檢查裝置100之立體圖。圖2係表示本發明之缺陷檢查裝置100之方塊圖。圖3係表示本發明之缺陷檢查方法之步驟圖。缺陷檢查裝置100係用以檢查片狀成形體之缺陷之裝置,且係可實施用以檢查該缺陷之方法即本發明之缺陷檢查方法之裝置。缺陷檢查裝置100可檢查作為片狀成形體之例如偏光膜或相位差膜等光學膜,尤其適合於捲繞成網狀進行保管及輸送之長條之光學膜之檢查。 Hereinafter, an image generating apparatus, a defect inspecting apparatus, and a defect inspecting method of the present invention will be described. Fig. 1 is a perspective view showing a defect inspection apparatus 100 of the present invention. Fig. 2 is a block diagram showing the defect inspection apparatus 100 of the present invention. Fig. 3 is a view showing the steps of the defect inspection method of the present invention. The defect inspection device 100 is a device for inspecting a defect of a sheet-shaped formed body, and is a device for inspecting the defect, that is, the method of the defect inspection method of the present invention. The defect inspection apparatus 100 can inspect an optical film such as a polarizing film or a retardation film which is a sheet-shaped molded body, and is particularly suitable for inspection of a long optical film which is wound into a mesh shape for storage and transportation.

片狀成形體例如包含熱塑性樹脂等樹脂。作為包含樹脂之片狀成形體,例如可列舉藉由如下步驟而成形者:實施使自擠出機擠出之熱塑性樹脂通過輥之間隙而對表面賦予平滑性或光澤之處理,且一面於搬送輥上冷卻一面藉由捲取輥捲取。成為片狀成形體之材料之熱塑性樹脂例如為甲基丙烯酸樹脂、甲基丙烯酸甲酯-苯乙烯共聚物、聚乙烯、聚丙烯等聚烯烴、聚碳酸酯、聚氯乙烯、聚苯乙烯、聚乙烯醇、三醋酸纖維素樹脂等。片狀成形體既可僅包含該等熱塑性樹脂中之一種,亦可為積層該等熱塑性樹脂之複數種而成者。 The sheet-like formed body contains, for example, a resin such as a thermoplastic resin. For example, a sheet-shaped molded body containing a resin is formed by subjecting a thermoplastic resin extruded from an extruder to a surface of a roll to impart smoothness or gloss to the surface, and to convey the surface. The cooling side of the roll is taken up by a take-up roll. The thermoplastic resin which becomes a material of the sheet-shaped formed body is, for example, a methacrylic resin, a methyl methacrylate-styrene copolymer, a polyolefin such as polyethylene or polypropylene, a polycarbonate, a polyvinyl chloride, a polystyrene, or a poly Vinyl alcohol, cellulose triacetate resin, and the like. The sheet-like formed body may contain only one of the thermoplastic resins, or may be a plurality of layers of the thermoplastic resins.

片狀成形體可具有任意之厚度。例如,片狀成形體既可為如偏光膜或相位差膜等通常被稱作「膜」之具有相對較薄之厚度者,亦可 為如通常被稱作「板」之具有相對較厚之厚度者。 The sheet-shaped formed body may have any thickness. For example, the sheet-like formed body may be a relatively thin thickness such as a polarizing film or a retardation film, which is generally called a "film", and may also be It is a relatively thick thickness as commonly referred to as a "plate".

作為此種片狀成形體之缺陷之例,可列舉於成形時產生之氣泡、魚眼(Fisheye)、異物、輪胎痕、凹痕、刮痕等點狀之缺陷(點缺陷)、因折痕等而導致產生之所謂裂點(knick)、因厚度之差異而導致產生之所謂原片條紋等線狀之缺陷(線缺陷)。 Examples of the defects of the sheet-like formed body include dot-shaped defects (point defects) such as bubbles, fisheye, foreign matter, tire marks, dents, and scratches generated during molding, and creases. A so-called crack (knick) which is caused by the like, and a linear defect (line defect) such as a so-called original stripe which is caused by a difference in thickness.

如圖1及圖2所示,缺陷檢查裝置100包括本發明之圖像產生裝置1、及顯示部21。缺陷檢查裝置100之圖像產生裝置1包括:搬送部11,其將片狀成形體K向其長度方向(以下,稱作「Y方向」)之一側搬送;光照射部12,其具有於片狀成形體K之寬度方向(以下,稱作「X方向」)上呈直線狀延伸之光源;拍攝部13,其對片狀成形體K進行拍攝動作而產生表示二維圖像之二維圖像資料;及資訊處理裝置14。資訊處理裝置14包含檢查用圖像資料產生部141,該檢查用圖像資料產生部141包含交界提取部1411、重新提取部1412及合成部1413。資訊處理裝置14亦包含控制搬送部11之動作之未圖示之搬送控制部。資訊處理裝置14係藉由PC(Personal Computer,個人電腦)等實現。再者,資訊處理裝置14中之檢查用圖像資料產生部141亦可藉由FPGA(Field-programmable gate array,現場可編輯邏輯閘陣列)或GPGPU(General-purpose computing on graphics processing units,通用圖形處理器)等圖像處理板或拍攝部13之內部之硬體實現。 As shown in FIGS. 1 and 2, the defect inspection apparatus 100 includes the image generation apparatus 1 and the display unit 21 of the present invention. The image generation device 1 of the defect inspection device 100 includes a conveyance unit 11 that conveys the sheet-shaped formed body K to one side in the longitudinal direction (hereinafter referred to as "Y direction"), and the light irradiation unit 12 has The light source extending linearly in the width direction of the sheet-like formed body K (hereinafter referred to as "X direction"), and the imaging unit 13 performs an imaging operation on the sheet-shaped formed body K to generate a two-dimensional image representing a two-dimensional image. Image data; and information processing device 14. The information processing device 14 includes an inspection image data generation unit 141 including a boundary extraction unit 1411, a re-extraction unit 1412, and a synthesizing unit 1413. The information processing device 14 also includes a transport control unit (not shown) that controls the operation of the transport unit 11. The information processing device 14 is realized by a PC (Personal Computer) or the like. Furthermore, the inspection image data generating unit 141 in the information processing device 14 can also use an FPGA (Field-programmable gate array) or a GPGPU (General-purpose computing on graphics processing units). The processor or the like is implemented by an image processing board or an internal hardware of the imaging unit 13.

如圖3所示,本發明之缺陷檢查方法包括拍攝步驟S1、交界提取步驟S2、重新提取步驟S3、合成步驟S4、及顯示步驟S5。 As shown in FIG. 3, the defect inspection method of the present invention includes a shooting step S1, a boundary extraction step S2, a re-extraction step S3, a synthesis step S4, and a display step S5.

拍攝步驟S1中,於一面藉由光照射部12之光源對片狀成形體K照射光一面藉由搬送部11將片狀成形體向Y方向之一側搬送之狀態下,以於二維圖像內包含對應於光照射部12之光源之明部與亮度較該明部低之暗部之方式,藉由拍攝部13對片狀成形體K進行複數次拍攝動作。 In the imaging step S1, the sheet-like molded body is conveyed to one side in the Y direction by the transport unit 11 while the sheet-like molded body K is irradiated with light by the light source of the light-irradiating portion 12, and is in a two-dimensional view. The imaging unit 13 performs a plurality of imaging operations on the sheet-shaped formed body K by the imaging unit 13 so as to include a bright portion corresponding to the light source of the light-irradiating portion 12 and a dark portion having a lower brightness than the bright portion.

交界提取步驟S2係如下步驟:藉由交界提取部1411提取在拍攝步驟S1中藉由拍攝部13而產生之各二維圖像資料所表示之各二維圖像內之由明部變為暗部之交界線部、或由暗部變為明部之交界線部。 The boundary extraction step S2 is a step of extracting from the bright portion to the dark portion in each two-dimensional image represented by each two-dimensional image data generated by the imaging unit 13 in the imaging step S1 by the boundary extraction unit 1411. The boundary line portion or the dark portion becomes the boundary line portion of the Ming Dynasty.

重新提取步驟S3係如下步驟:藉由重新提取部1412將在交界提取步驟S2中所獲得之交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式使該表觀上之交界線平滑化,自二維圖像資料中提取構成經平滑化而獲得之本來之交界線之像素。 The re-extraction step S3 is a step of connecting the boundary line portions obtained in the boundary extraction step S2 by the re-extraction portion 1412 to form an apparent boundary line on which the sharp peak appears on the apparent boundary line. The disappearing method smoothes the apparent boundary line, and extracts pixels constituting the original boundary line obtained by smoothing from the two-dimensional image data.

合成步驟S4係如下步驟:藉由合成部1413產生包含在重新提取步驟S3中由重新提取部1412提取之像素之一維圖像資料,並合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料,而產生藉由亮度之變化表示凹缺陷或凸缺陷之位置之檢查用圖像資料。例如,於自明部變為暗部時之交界線部,以亮度較暗之部位表示凹缺陷之位置。 The synthesizing step S4 is a step of: generating, by the synthesizing unit 1413, one-dimensional image data of the pixels extracted by the re-extracting unit 1412 in the re-extracting step S3, and synthesizing the two-dimensional image data obtained in the same manner from the plurality of two-dimensional image data. The plurality of one-dimensional image data is generated to generate inspection image data indicating the position of the concave defect or the convex defect by the change in brightness. For example, in the boundary line portion when the bright portion is changed from the bright portion, the position of the concave defect is indicated by the portion where the brightness is dark.

顯示步驟S5係如下步驟:將在合成步驟S4中藉由合成部1413而產生之檢查用圖像資料所表示之檢查用圖像顯示於顯示部21。 The display step S5 is a step of displaying the inspection image indicated by the inspection image data generated by the synthesizing unit 1413 in the synthesis step S4 on the display unit 21.

使用圖4~圖8對各步驟S1~S5進行說明。圖4係表示片狀成形體K之情況之圖,圖5~圖8係表示藉由對片狀成形體K進行拍攝而獲得之圖像之圖。如圖4所示,於片狀成形體K產生有點狀之凹缺陷K1。又,片狀成形體K係按照圖4(a)、圖4(b)、圖4(c)所示之順序向Y方向之一側被搬送。 Each of steps S1 to S5 will be described with reference to Figs. 4 to 8 . 4 is a view showing a state of the sheet-like formed body K, and FIGS. 5 to 8 are views showing an image obtained by photographing the sheet-shaped formed body K. As shown in Fig. 4, a concave defect K 1 having a bit shape is generated in the sheet-like formed body K. Further, the sheet-like formed body K is conveyed to one side in the Y direction in the order shown in Figs. 4(a), 4(b), and 4(c).

如圖4(a)所示,於X方向上呈直線狀延伸之光照射部12之光源使片狀成形體K上產生於X方向上呈直線狀延伸之明部K2、及亮度較該明部K2低之暗部K3。明部K2呈直線狀延伸係於片狀成形體K被穩定地搬送而片狀成形體K未晃動、且凹缺陷K1不位於明部K2之附近時。如圖4(b)所示,當凹缺陷K1位於明部K2之附近時,明部K2不再為直線 狀。圖4(c)與圖4(a)及圖4(b)不同,表示於搬送中片狀成形體K晃動之情形,於此情形時,雖然凹缺陷K1不位於明部K2附近,但因片狀成形體K之晃動而導致明部K2不再為直線狀。 As shown in Fig. 4 (a), the light source of the light-irradiating portion 12 extending linearly in the X direction causes the sheet-shaped molded body K to have a bright portion K 2 extending linearly in the X direction, and the brightness is higher than that. bright portion of a dark portion of low K 2 K 3. The bright portion K 2 is linearly extended when the sheet-shaped formed body K is stably conveyed, and the sheet-shaped formed body K is not shaken, and the concave defect K 1 is not located in the vicinity of the bright portion K 2 . 4 (b), when the concave defect K 1 K 2 is located in the bright portion, the bright portion K 2 is no longer a linear shape as shown in FIG. FIG. 4 (c) and FIG. 4 (a) and FIG. 4 (b) is different in the case shown in conveying the sheet material K of shaking, when in this case, although concave defects K 1 K is not near the bright portion 2, However, due to the sway of the sheet-like formed body K, the bright portion K 2 is no longer linear.

圖4所示之二點鏈線A表示拍攝部13之拍攝範圍。於拍攝步驟S1中,拍攝部13以明部K2及鄰接於該明部K2之暗部K3進入至該拍攝範圍內之方式進行拍攝動作。作為圖4(a)中之拍攝結果之二維圖像為圖5(a)所示之二維圖像,作為圖4(b)中之拍攝結果之二維圖像為圖6(a)所示之二維圖像,作為圖4(c)中之拍攝結果之二維圖像為圖7(a)所示之二維圖像。構成各二維圖像之各像素係被分配圖5、圖6、及圖7中隨著朝向X方向右側而連續變大之整數之X座標值、與隨著朝向Y方向下側而連續變大之整數之Y座標值。再者,於圖5(a)、圖6(a)、及圖7(a)中,將明部設為白色部,將暗部設為斜線部。 The two-dot chain line A shown in FIG. 4 indicates the imaging range of the imaging unit 13. Shooting at step S1, the imaging unit 13, and bright portions K 2 K adjacent to the bright portions of the dark portion 2 K 3 enters into the imaging range of the mode for photographing operation. The two-dimensional image as the result of the photographing in FIG. 4(a) is the two-dimensional image shown in FIG. 5(a), and the two-dimensional image as the photographing result in FIG. 4(b) is FIG. 6(a). The two-dimensional image shown as the two-dimensional image of the photographing result in Fig. 4(c) is the two-dimensional image shown in Fig. 7(a). Each of the pixels constituting each of the two-dimensional images is assigned an X coordinate value which becomes an integer which continuously increases toward the right side in the X direction in FIG. 5, FIG. 6, and FIG. 7, and continuously changes toward the lower side in the Y direction. The Y coordinate value of the large integer. In addition, in FIGS. 5(a), 6(a), and 7(a), the bright portion is a white portion, and the dark portion is a diagonal portion.

於交界提取步驟S2中,藉由交界提取部1411自圖5(a)、圖6(a)、及圖7(a)所示之各二維圖像提取交界線部。交界線部例如為二維圖像內之明部之一部分中向鄰接於該明部且Y座標值較該明部大之暗部變化之部分。交界線部可藉由先前公知之邊緣提取方法進行提取。例如,對於二維圖像中之沿Y方向之1行像素行之資料,自Y座標值最小之像素起依次設為注目像素,只要於Y座標值較該注目像素大1之像素之亮度值較該注目像素之亮度值大特定之閾值以上時,將Y座標值較該注目像素大1之像素作為構成交界線部之像素而提取即可。以下,將以此方式提取之像素稱作提取像素。將由自圖5(a)、圖6(a)、及圖7(a)所示之各二維圖像提取之像素構成之交界線部分別示於圖5(b)、圖6(b)、及圖7(b)。藉由將相鄰之像素行之交界線部連接,而獲得表觀上之交界線。 In the boundary extraction step S2, the boundary extraction unit 1411 extracts the boundary line portion from each of the two-dimensional images shown in FIGS. 5(a), 6(a), and 7(a). The boundary line portion is, for example, a portion of a portion of the bright portion in the two-dimensional image that changes to a dark portion that is adjacent to the bright portion and has a larger Y coordinate value than the bright portion. The boundary line portion can be extracted by a previously known edge extraction method. For example, for the data of one row of pixel rows in the Y direction in the two-dimensional image, the pixel having the smallest value of the Y coordinate is sequentially set as the pixel of interest, as long as the luminance value of the pixel whose Y coordinate value is larger than the pixel of interest is 1 When the brightness value of the pixel of interest is larger than a certain threshold value, a pixel having a Y coordinate value larger than the target pixel may be extracted as a pixel constituting the boundary line portion. Hereinafter, the pixels extracted in this way are referred to as extracted pixels. The boundary line portions formed by the pixels extracted from the respective two-dimensional images shown in FIGS. 5(a), 6(a), and 7(a) are shown in FIG. 5(b) and FIG. 6(b), respectively. And Figure 7(b). An apparent boundary line is obtained by connecting the boundary lines of adjacent pixel rows.

於在明部與暗部之交界線附近存在缺陷之情形時,以此方式獲得之表觀上之交界線受到該缺陷之影響而出現尖銳之波峰。重新提取 步驟S3係獲得形成將該缺陷之影響排除後之本來之交界線之交界線部的步驟。因此,於重新提取步驟S3中,首先,以於表觀上之交界線無尖銳之波峰之方式使表觀上之交界線平滑化。例如,將波峰之高度為波峰之寬度之特定倍(例如1/2倍~2倍)以上之波峰視為尖銳之波峰,以該尖銳之波峰消失之方式將該波峰之底邊之直線設為本來之交界線。於重新提取步驟S3中,自原來之二維圖像資料中提取構成以此方式獲得之本來之交界線之像素。以下,將以此方式提取之像素稱作重新提取像素。 When there is a defect near the boundary between the bright part and the dark part, the apparent boundary line obtained in this way is affected by the defect and a sharp peak appears. Re-extract Step S3 is a step of obtaining a boundary line portion which forms an original boundary line after the influence of the defect is excluded. Therefore, in the re-extraction step S3, first, the apparent boundary line is smoothed so that the apparent boundary line has no sharp peaks. For example, a peak whose peak height is a specific multiple of the width of the peak (for example, 1/2 times to 2 times) is regarded as a sharp peak, and the line of the bottom side of the peak is set such that the sharp peak disappears. The original boundary line. In the re-extraction step S3, the pixels constituting the original boundary line obtained in this way are extracted from the original two-dimensional image data. Hereinafter, the pixels extracted in this way are referred to as re-extracted pixels.

於在明部與暗部之交界線附近不存在缺陷之情形時,在交界提取步驟S2中所獲得之表觀上之交界線未出現尖銳之波峰,從而在重新提取步驟S3中所獲得之本來之交界線與在交界提取步驟S2中所獲得之表觀上之交界線相同。因此,於在明部與暗部之交界線附近不存在缺陷,而於交界提取步驟S2中所獲得之表觀上之交界線不存在尖銳之波峰之情形時,亦可實質上跳過重新提取步驟S3。 In the case where there is no defect near the boundary line between the bright portion and the dark portion, the apparent boundary line obtained in the boundary extraction step S2 does not have a sharp peak, thereby obtaining the original in the re-extraction step S3. The boundary line is the same as the apparent boundary line obtained in the boundary extraction step S2. Therefore, there is no defect near the boundary line between the bright portion and the dark portion, and when the apparent boundary line obtained in the boundary extraction step S2 does not have a sharp peak, the re-extraction step can be substantially skipped. S3.

於圖5(b)、圖6(b)、及圖7(b)中,分別以二點鏈線表示表觀上之交界線j1、j2、j3。圖5(b)所示之交界線j1為直線,圖7(b)所示之交界線j3為無尖銳之波峰之平緩之曲線。因此,對於圖5(a)所示之二維圖像及圖7(a)所示之二維圖像,無需於重新提取步驟S3中進行像素之重新提取,構成表觀上之交界線之像素成為構成本來之交界線之像素。相對於此,圖6(b)所示之交界線j2為具有尖銳之波峰之歪曲之曲線。使該歪曲之交界線j2平滑化後之曲線為圖6(b)中以虛線表示之直線j4。因此,本來之交界線係於X座標值1~4及8~10處與作為表觀上之交界線之j2相同,於X座標值5~7處成為直線j4。於重新提取步驟S3中,自原來之二維圖像資料中提取構成所獲得之本來之交界線之像素之資料。將自圖6(a)所示之二維圖像內提取之重新提取像素示於圖6(c)。重新提取像素中之X座標值5~7之像素對應於原來之二維圖像資料中 所包含之因缺陷部而導致歪曲之交界線部,具有較其他像素亮或暗之亮度值。 In FIGS. 5(b), 6(b), and 7(b), the apparent boundary lines j 1 , j 2 , and j 3 are respectively indicated by two-dot chain lines. The boundary line j 1 shown in Fig. 5(b) is a straight line, and the boundary line j 3 shown in Fig. 7(b) is a gentle curve without a sharp peak. Therefore, for the two-dimensional image shown in FIG. 5(a) and the two-dimensional image shown in FIG. 7(a), it is not necessary to perform re-extraction of pixels in the re-extraction step S3 to form an apparent boundary line. The pixel becomes a pixel that constitutes the original boundary line. On the other hand, the boundary line j 2 shown in FIG. 6(b) is a curve having a sharp peak. The curve obtained by smoothing the boundary j 2 of the distortion is a straight line j 4 indicated by a broken line in Fig. 6(b). Therefore, the original boundary line is the same as j 2 which is the apparent boundary line at the X coordinate values 1 to 4 and 8 to 10, and becomes the straight line j 4 at the X coordinate value 5 to 7. In the re-extraction step S3, the data constituting the pixels of the obtained original boundary line is extracted from the original two-dimensional image data. The re-extracted pixels extracted from the two-dimensional image shown in Fig. 6(a) are shown in Fig. 6(c). The pixel of the X coordinate value 5 to 7 in the re-extraction pixel corresponds to the boundary line portion which is distorted due to the defect portion included in the original two-dimensional image data, and has a brightness value which is brighter or darker than other pixels.

於合成步驟S4中,藉由合成部1413自於重新提取步驟S3中藉由重新提取部1412而自各二維圖像內提取之重新提取像素產生表示一維圖像之一維圖像資料。一維圖像資料係重新提取像素之X座標值與亮度值建立有對應之圖像資料。於圖5(c)、圖6(d)、及圖7(c)中表示對應於圖5(a)、圖6(a)、及圖7(a)所示之各二維圖像之一維圖像。 In the synthesizing step S4, the one-dimensional image data representing the one-dimensional image is generated by the re-extracting pixels extracted from the respective two-dimensional images by the re-extracting portion 1412 in the re-extracting step S3 by the synthesizing portion 1413. The one-dimensional image data is obtained by re-extracting the X coordinate value of the pixel and the brightness value to establish corresponding image data. 5(c), 6(d), and 7(c) show the respective two-dimensional images corresponding to those shown in Figs. 5(a), 6(a), and 7(a). One-dimensional image.

進而,於合成步驟S4中,合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料而產生檢查用圖像資料。合成係藉由如下方法進行:以對應於藉由拍攝部13先產生之二維圖像資料之一維圖像資料具有較小之Y座標值,對應於藉由拍攝部13後產生之二維圖像資料之一維圖像資料具有較大之Y座標值之方式,且使各一維圖像資料之X座標值保持不變,將複數個一維圖像資料於Y方向上連續地配置並組合。於圖8中表示檢查用圖像,該檢查用圖像係由自表示圖5(c)、圖6(d)、及圖7(c)所示之一維圖像之一維圖像資料合成之檢查用圖像資料所表示。 Further, in the synthesizing step S4, a plurality of one-dimensional image data obtained from a plurality of pieces of two-dimensional image data in the same manner are synthesized to generate inspection image data. The synthesis is performed by the method of having a smaller Y coordinate value corresponding to one of the two-dimensional image data generated by the imaging unit 13 first, corresponding to the two-dimensional image generated by the imaging unit 13. One of the image data has a larger Y coordinate value, and the X coordinate value of each one-dimensional image data remains unchanged, and a plurality of one-dimensional image data are continuously arranged in the Y direction. And combined. FIG. 8 shows an inspection image obtained by representing one-dimensional image data of one of the dimensional images shown in FIGS. 5(c), 6(d), and 7(c). The synthetic inspection is represented by image data.

於合成步驟S4中,亦可對各一維圖像資料進行二值化。成為二值化之閾值之亮度值係以一維圖像資料所表示之一維圖像內之明部之像素與暗部之像素於二值化後成為互不相同之值之方式進行設定。例如,二值化之閾值為該一維圖像資料中之最大亮度值與最小亮度值之相加平均值。於進行二值化之情形時,於對各一維圖像資料進行二值化之後,進行檢查用圖像資料之合成。再者,二值化之順序並不限定於上述順序,亦可藉由在合成一維圖像資料之後對其合成後之二維圖像資料進行二值化,而產生檢查用圖像資料。 In the synthesizing step S4, each one-dimensional image data may also be binarized. The luminance value which becomes the threshold of binarization is set so that the pixel of the bright part in the one-dimensional image and the pixel of the dark part in the one-dimensional image are binarized and become mutually different values. For example, the threshold of binarization is the sum of the maximum luminance value and the minimum luminance value in the one-dimensional image data. In the case of binarization, after the one-dimensional image data is binarized, the image data for inspection is synthesized. Furthermore, the order of binarization is not limited to the above-described order, and the image data for inspection may be generated by binarizing the two-dimensional image data synthesized after synthesizing the one-dimensional image data.

於顯示步驟S5中,使由檢查用圖像資料表示之檢查用圖像顯示於顯示部21。檢查用圖像例如係基於各像素之亮度值,以暗部成為黑 色、明部成為白色之方式顯示於顯示部21。 In the display step S5, the inspection image indicated by the inspection image data is displayed on the display unit 21. The inspection image is based on, for example, the brightness value of each pixel, and the dark portion becomes black. The display unit 21 is displayed in a manner that the color and the bright portion are white.

根據此種藉由缺陷檢查裝置100實施之包括各步驟S1~S5之缺陷檢查方法,於在片狀成形體K產生有凹缺陷K1之情形時,於如圖4(b)所示般該片狀成形體K被穩定地搬送且凹缺陷位於交界線部附近時,因該凹缺陷K1而導致如圖6(b)所示般表觀上之交界線成為歪曲之曲線j2。因此,構成使該交界線j2平滑化所得之直線j4之二維圖像內之像素如圖6(c)所示般包含暗部。又,於在片狀成形體K產有凹缺陷K1之情形時,於如圖4(c)所示般該片狀成形體K於搬送中晃動且凹缺陷K1不位於交界線部附近時,因該片狀成形體K之晃動而導致如圖7(b)所示般表觀上之交界線j3成為平緩之曲線。因此,使該交界線j3平滑化所得之曲線為與交界線j3大致相同之曲線、或與交界線j3相同之曲線,對應於該曲線之二維圖像內之像素不會較大地偏離作為明部之一部分之交界線部,與圖7(b)所示者相同。由此,自該等各部分產生圖6(d)及圖7(c)所示之各一維圖像資料,並合成複數個一維圖像資料而設為檢查用圖像資料,藉此可產生由暗部表示缺陷之位置之檢查用圖像資料。其結果,可藉由觀察基於該檢查用圖像資料而顯示之圖8所示之檢查用圖像來判斷有無缺陷,且可防止因片狀成形體K之晃動等而導致對缺陷之有無產生錯誤之判斷。 According to such embodiment 100 by the defect inspection apparatus comprising the defect inspection method of the steps S1 ~ S5, the sheet-K in the molded article produced in the recess when the case of the defective K 1 in FIG. 4 (b) as shown in the when the sheet-shaped molded body K is conveyed stably and concave defect portion is located near the boundary line, because of the concave defect caused by K 1 in FIG. 6 (b) as shown in the turn of the apparent distortion of a curved line j 2. Therefore, the pixels in the two-dimensional image constituting the straight line j 4 obtained by smoothing the boundary line j 2 include dark portions as shown in FIG. 6(c). Further, in the sheet material to yield K K concave defects of a case, in FIG. 4 (c) as shown in K of the sheet material conveyed in the concave defect and shaking K is not near a boundary line portion When the sheet-like formed body K is shaken, the apparent boundary line j 3 becomes a gentle curve as shown in Fig. 7(b). Thus, j is approximately the same as the profile of the boundary line 3 of the smoothing curve obtained with the boundary line j 3, the same or boundary line j of curve 3, corresponding to the pixels within the two-dimensional image of the curve does not largely The deviation from the boundary portion which is a part of the bright portion is the same as that shown in Fig. 7(b). Thereby, each of the one-dimensional image data shown in FIGS. 6(d) and 7(c) is generated from the respective portions, and a plurality of one-dimensional image data are synthesized and used as inspection image data. It is possible to generate inspection image data indicating the position of the defect by the dark portion. As a result, it is possible to determine the presence or absence of a defect by observing the inspection image shown in FIG. 8 displayed based on the inspection image data, and it is possible to prevent the occurrence of defects due to the shaking of the sheet-shaped formed body K and the like. The judgment of the error.

以下,對缺陷檢查裝置100更詳細地進行說明。圖1及圖2所示之搬送部11係將以固定寬度於Y方向上連續之片狀成形體K於Y方向上搬送之裝置。搬送部11例如具備於Y方向上搬送片狀成形體K之送出輥與接收輥,且可藉由旋轉編碼器等計測搬送距離。搬送部11於Y方向上搬送片狀成形體K之搬送速度例如設定為2m/分鐘~30m/分鐘。 Hereinafter, the defect inspection device 100 will be described in more detail. The conveying unit 11 shown in Fig. 1 and Fig. 2 is a device for conveying the sheet-shaped formed body K continuous in the Y direction in the Y direction. The conveyance unit 11 includes, for example, a feed roller and a take-up roller that convey the sheet-shaped formed body K in the Y direction, and can measure the conveyance distance by a rotary encoder or the like. The conveyance speed of the sheet-like molded body K conveyed by the conveyance part 11 in the Y direction is set to 2 m/min - 30 m / minute, for example.

光照射部12包括沿與Y方向正交之方向即X方向延伸之直線狀之光源、及使該光源之位置以成為相對於搬送部11之送出輥及接收輥之固定位置之方式固定之未圖示之固定構件。光源係以片狀成形體K為 基準,以可於與拍攝部13相同之側或拍攝部13之相反側對該片狀成形體K之表面照射光之方式配置。光源以距片狀成形體K之表面上之明部之距離成為例如200mm之方式配置。作為光源,只要為金屬鹵素燈、鹵素線狀燈、螢光燈等發出不對片狀成形體K之組成及性質產生影響之光者,則無特別限定。 The light-irradiating portion 12 includes a linear light source extending in a direction orthogonal to the Y direction, that is, an X-direction, and a position where the position of the light source is fixed to a fixed position of the delivery roller and the receiving roller of the conveying portion 11. The fixed member shown. The light source is formed by a sheet-shaped formed body K The reference is arranged such that the surface of the sheet-like formed body K can be irradiated with light on the same side as the imaging unit 13 or on the opposite side of the imaging unit 13. The light source is disposed such that the distance from the bright portion on the surface of the sheet-shaped formed body K is, for example, 200 mm. The light source is not particularly limited as long as it emits light that does not affect the composition and properties of the sheet-like formed body K, such as a metal halide lamp, a halogen linear lamp, or a fluorescent lamp.

光照射部12亦可具備配置於光源與片狀成形體K之間之長條構件。長條構件例如為於包含樹脂之具有透光性之板狀基材上,於Y方向上隔開特定之間隔形成具有遮光性且沿X方向延伸之帶狀之遮光區域部而成之構件。於光照射部12具備此種長條構件之情形時,可於片狀成形體K之表面形成沿X方向延伸之明部與暗部交替地重複之明暗圖案,從而可利用該明暗圖案產生檢查用圖像資料。 The light irradiation unit 12 may include a long member disposed between the light source and the sheet-shaped formed body K. The elongate member is, for example, a member having a light-shielding plate-like base material containing a resin and forming a light-shielding region having a light-shielding property and extending in the X direction at a predetermined interval in the Y direction. When the light-irradiating portion 12 is provided with such a long member, a light-dark pattern in which the bright portion and the dark portion extending in the X direction are alternately repeated on the surface of the sheet-shaped formed body K can be formed, and the light-dark pattern can be used for inspection. Image data.

拍攝部13包括CCD(Charge Coupled Device,電荷耦合器件)或CMOS(Complementary Metal-Oxide Semiconductor,互補式金屬氧化物半導體)之區域感測器。拍攝部13係以片狀成形體K為基準,以可於與光源相同之側或光源之相反側拍攝該片狀成形體K之表面之方式配置,接收來自該片狀成形體K之透過光或反射光而產生二維圖像資料。拍攝部13既可藉由1個區域感測器產生二維圖像資料,亦可根據由在X方向上排列之複數個區域感測器取得之資料產生二維圖像資料。拍攝部13係以拍攝範圍成為片狀成形體K之X方向之整個區域之方式配置。 The imaging unit 13 includes a region sensor of a CCD (Charge Coupled Device) or a CMOS (Complementary Metal-Oxide Semiconductor). The imaging unit 13 is disposed so as to receive the surface of the sheet-shaped formed body K on the same side as the light source or the opposite side of the light source, and receives the transmitted light from the sheet-shaped formed body K with reference to the sheet-shaped molded body K. Or reflect light to produce two-dimensional image data. The imaging unit 13 can generate two-dimensional image data by one area sensor, or can generate two-dimensional image data based on data acquired by a plurality of area sensors arranged in the X direction. The imaging unit 13 is disposed such that the imaging range is the entire area of the X-direction of the sheet-shaped formed body K.

圖1所示之拍攝範圍之Y方向上之長度W較佳為拍攝部13之快門時間內所搬送之片狀成形體K之搬送距離之至少2倍以上。換言之,拍攝範圍之Y方向上之長度W較佳為以對片狀成形體K之同一部分進行2次以上拍攝動作之方式進行設定。例如,於拍攝部13之快門時間為1/30秒~1秒時,拍攝範圍之Y方向上之長度W設定為5mm~50mm左右。如此,使片狀成形體K之同一部分之拍攝次數增加,藉此可高 精度地檢查缺陷。 The length W in the Y direction of the imaging range shown in FIG. 1 is preferably at least twice or more the conveyance distance of the sheet-shaped formed body K conveyed during the shutter time of the imaging unit 13. In other words, the length W in the Y direction of the imaging range is preferably set so that the same portion of the sheet-shaped formed body K is subjected to the imaging operation twice or more. For example, when the shutter time of the imaging unit 13 is 1/30 second to 1 second, the length W in the Y direction of the imaging range is set to about 5 mm to 50 mm. In this way, the number of times of photographing the same portion of the sheet-shaped formed body K is increased, whereby the height can be increased. Check defects accurately.

顯示部21例如為液晶顯示器、EL(Electroluminescence,電致發光)顯示器、電漿顯示器等。顯示部21於顯示畫面顯示由檢查用圖像資料表示之檢查用圖像。 The display unit 21 is, for example, a liquid crystal display, an EL (Electroluminescence) display, a plasma display or the like. The display unit 21 displays an inspection image indicated by the inspection image data on the display screen.

檢查用圖像資料產生部141包括CPU(Central Processing Unit,中央處理單元)等控制運算電路、DDR SDRAM(Double Data Rate Synchronous Dynamic Random Access Memory,雙倍數據率同步動態隨機存取記憶體)等揮發性記憶體、及快閃ROM(Read Only Memory,唯讀記憶體)、EEPROM(Electrically Erasable Programmable Read-Only Memory,電子抹除式可複寫唯讀記憶體)、HDD(Hard Disk Drive,硬碟驅動器)等非揮發性記憶體。於檢查用圖像資料產生部141之非揮發性記憶體中記憶有用以作為交界提取部1411、重新提取部1412、及合成部1413發揮功能之程式資料,按照該程式資料,檢查用圖像資料產生部141發揮交界提取部1411、重新提取部1412、及合成部1413之功能。再者,檢查用圖像資料產生部141亦可藉由FPGA或GPGPU等圖像處理板或拍攝部13內部之硬體實現。 The inspection image data generation unit 141 includes a control arithmetic circuit such as a CPU (Central Processing Unit) or a DDR SDRAM (Double Data Rate Synchronous Dynamic Random Access Memory). Memory, and Flash ROM (Read Only Memory), EEPROM (Electrically Erasable Programmable Read-Only Memory), HDD (Hard Disk Drive) ) and other non-volatile memory. The program data for functioning as the boundary extraction unit 1411, the re-extraction unit 1412, and the synthesis unit 1413 is stored in the non-volatile memory of the inspection image data generation unit 141, and the inspection image data is used in accordance with the program data. The generating unit 141 functions as the boundary extracting unit 1411, the re-extracting unit 1412, and the synthesizing unit 1413. Furthermore, the inspection image data generation unit 141 can also be realized by an image processing board such as an FPGA or a GPGPU or a hardware inside the imaging unit 13.

交界提取部1411藉由先前公知之邊緣提取方法自藉由拍攝部13而產生之二維圖像資料所表示之二維圖像內提取交界線部。重新提取部1412將交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式使該表觀上之交界線平滑化,自二維圖像資料中重新提取構成經平滑化而獲得之本來之交界線之像素。合成部1413產生包含重新提取之像素之一維圖像資料,並合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料,從而產生檢查用圖像資料。 The boundary extraction unit 1411 extracts the boundary line portion from the two-dimensional image indicated by the two-dimensional image data generated by the imaging unit 13 by the previously known edge extraction method. The re-extraction unit 1412 connects the boundary line portions to form an apparent boundary line, and smoothes the apparent boundary line in such a manner that the sharp peaks appearing on the apparent boundary line are smoothed, from the two-dimensional image. The data is re-extracted to form pixels of the original boundary line obtained by smoothing. The synthesizing unit 1413 generates one-dimensional image data including one of the re-extracted pixels, and synthesizes a plurality of one-dimensional image data obtained from the plurality of two-dimensional image data in the same manner, thereby generating inspection image data.

以下,對藉由重新提取部1412進行之重新提取詳細地進行說明。重新提取部1412藉由以下(1)~(8)之處理而進行自二維圖像內之像素之重新提取。 Hereinafter, the re-extraction by the re-extraction unit 1412 will be described in detail. The re-extraction unit 1412 performs re-extraction of pixels from the two-dimensional image by the following processes (1) to (8).

(1)將由交界提取部1411提取之提取像素中X座標值最小之像素設為最初之注目像素。於(1)之處理後,進入(2)之處理。 (1) The pixel having the smallest X coordinate value among the extracted pixels extracted by the boundary extraction unit 1411 is set as the first pixel of interest. After the processing of (1), the processing of (2) is entered.

(2)假定為構成交界線部之提取像素且自注目像素起向+X方向至特定數(例如,成為提取對象之二維圖像之X方向上之所有像素數之1/40~1/20之數)為止之範圍內之提取像素及向-X方向至該特定數為止之範圍內之提取像素,判定是否滿足如下條件:<1>該等範圍內之所有提取像素之Y座標值為該注目像素之Y座標值以上,且,<2>+X方向之該範圍內之提取像素中之至少1個及-X方向之該範圍內之提取像素中之至少1個均具有大於該注目像素之Y座標值之Y座標值。 (2) It is assumed that the extracted pixels constituting the boundary line portion are from the pixel of interest to the +X direction to a specific number (for example, 1/40 to 1/ of all the pixels in the X direction of the two-dimensional image to be extracted) The extracted pixels in the range up to the number of 20) and the extracted pixels in the range from the -X direction to the specific number determine whether the following conditions are satisfied: <1> The Y coordinate value of all the extracted pixels in the range is The target pixel has a Y coordinate value or more, and at least one of the extracted pixels in the range of <2>+X direction and at least one of the extracted pixels in the range of the -X direction have greater than the attention. The Y coordinate value of the Y coordinate value of the pixel.

於滿足該等<1>及<2>之兩者之條件之情形時,將現注目像素設定為波峰頂點像素,進入(3)之處理。 In the case where the conditions of both <1> and <2> are satisfied, the current attention pixel is set as the peak vertex pixel, and the process proceeds to (3).

於未滿足該等<1>及<2>之兩者或其中任一者之條件之情形時,於存在X座標值較現注目像素大1之提取像素時,將X座標值較現注目像素大1之提取像素變更為下一個注目像素,再次進行(2)之處理。 In the case where the conditions of either or both of <1> and <2> are not satisfied, the X coordinate value is compared with the current pixel when there is an extracted pixel whose X coordinate value is larger than the current target pixel. The extracted pixel of the big 1 is changed to the next pixel of interest, and the processing of (2) is performed again.

於未滿足該等<1>及<2>之兩者或其中任一者之條件之情形時,於不存在X座標值較現注目像素大1之提取像素時,進入(5)之處理。 In the case where the conditions of either or both of <1> and <2> are not satisfied, when there is no extracted pixel whose X coordinate value is larger than the current target pixel, the process proceeds to (5).

使用圖9,說明藉由重新提取部1412進行之處理之具體例。圖9(a)表示二維圖像之一部分,圖9(b)表示藉由交界提取部1411自該二維圖像提取之提取像素之一部分。將於將上述特定數設定為3且將圖9(b)之像素P1設為注目像素時之包含該注目像素之上述範圍內之提取像素示於圖9(c)。又,將於將上述特定數設定為3且將圖9(b)之像素P2設為注目像素時之包含該注目像素之上述範圍內之提取像素示於圖9(d)。於圖9(c)所示之提取像素中,包含其Y座標值小於作為注目像素之像素P1之Y座標值之提取像素。因此,不將像素P1設定為波峰頂點 像素,將X座標值較像素P1大1之提取像素變更為下一個注目像素。圖9(d)所示之全部各提取像素之Y座標值大於作為注目像素之像素P2之Y座標值。因此,像素P2被設定為波峰頂點像素,進入(3)之處理。 A specific example of the processing performed by the re-extracting unit 1412 will be described with reference to Fig. 9 . Fig. 9(a) shows a part of the two-dimensional image, and Fig. 9(b) shows a part of the extracted pixels extracted from the two-dimensional image by the boundary extracting unit 1411. The extracted pixel within the above range including the target pixel when the specific number is set to 3 and the pixel P 1 of FIG. 9(b) is set as the target pixel is shown in FIG. 9(c). Further, the extracted pixel within the above range including the target pixel when the specific number is set to 3 and the pixel P 2 of FIG. 9(b) is the target pixel is shown in FIG. 9(d). In FIG. 9 (c) of extracting the pixel shown, which comprises less than the Y coordinate is extracted as the pixel value of target pixel P Y coordinate values of a pixel. Therefore, the pixel P 1 is not set as the peak vertex pixel, and the extracted pixel whose X coordinate value is larger than the pixel P 1 is changed to the next target pixel. The Y coordinate value of all the extracted pixels shown in FIG. 9(d) is larger than the Y coordinate value of the pixel P 2 which is the target pixel. Therefore, the pixel P 2 is set as the peak vertex pixel, and the processing of (3) is entered.

(3)將X座標值小於波峰頂點像素之提取像素中之Y座標值大於波峰頂點像素且X座標值最大之提取像素設為波峰左端候補像素。又,將X座標值大於波峰頂點像素之提取像素中之Y座標值大於波峰頂點像素且X座標值最小之提取像素設為波峰右端候補像素。於將圖9(b)所示之像素P2設定為波峰頂點像素時,像素P3成為波峰左端候補像素,像素P4成為波峰右端候補像素。於(3)之處理後,進入(4)之處理。 (3) The extracted pixel in which the X coordinate value is smaller than the peak pixel of the peak and the Y coordinate value is larger than the peak pixel of the peak and the X coordinate value is the largest is the candidate pixel of the left end of the peak. Moreover, the extracted pixel in which the X coordinate value is larger than the peak pixel of the peak and the Y coordinate value is larger than the peak vertex pixel and the X coordinate value is the smallest is set as the peak right end candidate pixel. When the pixel P 2 shown in FIG. 9(b) is set as the peak apex pixel, the pixel P 3 becomes the peak left end candidate pixel, and the pixel P 4 becomes the peak right end candidate pixel. After the processing of (3), the processing of (4) is entered.

(4)依次或並列進行以下(4-1)之處理與(4-2)之處理。 (4) The following processes (4-1) and (4-2) are performed in sequence or in parallel.

(4-1)判定是否滿足X座標值較現波峰左端候補像素小1之提取像素之Y座標值大於現波峰左端候補像素之Y座標值之條件。 (4-1) It is determined whether the Y coordinate value of the extracted pixel whose X coordinate value is smaller than the candidate pixel of the left end of the current peak is larger than the Y coordinate value of the candidate pixel of the left end of the current peak.

於滿足該條件之情形時,將X座標值較現波峰左端候補像素小1之提取像素變更為下一個波峰左端候補像素,再次進行(4-1)之處理。於不滿足該條件之情形時,將現波峰左端候補像素設定為對應於現波峰頂點像素(最近設定之波峰頂點像素)之波峰左端像素。 When the condition is satisfied, the extracted pixel whose X coordinate value is smaller than the candidate peak of the left end of the current peak is changed to the candidate pixel of the left peak of the next peak, and the processing of (4-1) is performed again. When the condition is not satisfied, the candidate peak at the left end of the current peak is set to correspond to the left end pixel of the peak of the current peak vertex pixel (the most recently set peak apex pixel).

(4-2)判定是否滿足X座標值較現波峰右端候補像素大1之提取像素之Y座標值大於現波峰右端候補像素之Y座標值之條件。 (4-2) It is determined whether the Y coordinate value of the extracted pixel whose X coordinate value is larger than the right end candidate pixel of the current peak is larger than the Y coordinate value of the candidate pixel of the right peak of the current peak.

於滿足該條件之情形時,將X座標值較現波峰右端候補像素大1之提取像素變更為下一個波峰右端候補像素,再次進行(4-2)之處理。於不滿足該條件之情形時,將現波峰右端候補像素設定為對應於現波峰頂點像素(直近設定之波峰頂點像素)之波峰右端像素。 When the condition is satisfied, the extracted pixel whose X coordinate value is larger than the right end candidate pixel of the current peak is changed to the next peak candidate pixel of the next peak, and the processing of (4-2) is performed again. When the condition is not satisfied, the right-end candidate pixel of the current peak is set to correspond to the peak right-end pixel of the current peak vertex pixel (the peak peak pixel set directly).

於藉由(4-1)之處理及(4-2)之處理設定對應於現波峰頂點像素之波峰左端像素及波峰右端像素之後,判定現波峰左端像素或現波峰右端像素是否已被設定為對應於其他波峰頂點像素之波峰左端像素或波 峰右端像素。 After the processing of (4-1) and (4-2), the pixel corresponding to the peak of the peak of the current peak and the pixel of the right end of the peak are set, and it is determined whether the pixel at the left end of the current peak or the pixel at the right end of the current peak has been set to The pixel or wave at the left end of the peak corresponding to the peak of the other peak The pixel at the right end of the peak.

於現波峰左端像素或現波峰右端像素已被設定為對應於其他波峰頂點像素之波峰左端像素或波峰右端像素時,解除現波峰頂點像素以及對應於其之現波峰左端像素及現波峰右端像素之設定。於現波峰左端像素或現波峰右端像素未被設定為對應於其他波峰頂點像素之波峰左端像素或波峰右端像素時,不解除現波峰頂點像素以及對應於其之現波峰左端像素及現波峰右端像素之設定而維持原樣。 When the left end pixel of the current peak or the right end pixel of the current peak has been set to correspond to the peak left end pixel or the right end pixel of the peak of the other peak peak pixel, the current peak peak pixel and the left end pixel corresponding to the current peak and the right end pixel of the current peak are cancelled. set up. When the left end pixel of the current peak or the right end pixel of the current peak is not set to correspond to the peak left end pixel or the right end pixel of the peak of the other peak peak pixel, the current peak peak pixel and the left peak pixel corresponding to the current peak and the right peak of the current peak are not cancelled. Set it to stay the same.

於解除現波峰頂點像素、現波峰左端像素、及現波峰右端像素之設定或維持原樣之後,若存在X座標值較現注目像素大1之提取像素,則將X座標值較現注目像素大1之提取像素變更為下一個注目像素,再次進行(2)之處理,若不存在X座標值較現注目像素大1之提取像素,則進入(5)之處理。 After the pixel of the current peak is removed, the pixel at the left end of the current peak, and the pixel at the right end of the current peak are set or maintained as they are, if there is an extracted pixel whose X coordinate value is larger than the current pixel, the X coordinate value is larger than the current pixel. The extracted pixel is changed to the next target pixel, and the processing of (2) is performed again. If there is no extracted pixel whose X coordinate value is larger than the current target pixel, the process proceeds to (5).

於圖9(b)所示之例之情形時,藉由上述(1)~(4)之處理,將像素P2設定為波峰頂點像素,將像素P5及像素P6分別設定為對應於其之波峰左端像素及波峰右端像素。又,將像素P7設定為另一個波峰頂點像素,將像素P8及像素P9分別設定為對應於其之波峰左端像素及波峰右端像素。 In the case of the example shown in FIG. 9(b), the pixel P 2 is set as the peak vertex pixel by the processing of the above (1) to (4), and the pixel P 5 and the pixel P 6 are respectively set to correspond to The peak at the left end of the peak and the pixel at the right end of the peak. Further, the pixel P 7 is set to another peak apex pixel, and the pixel P 8 and the pixel P 9 are respectively set to correspond to the peak left end pixel and the peak right end pixel.

(5)將波峰頂點像素中之X座標值最小之像素設為最初之注目像素。 (5) The pixel with the smallest X coordinate value in the peak of the peak is set as the first pixel of interest.

於(5)之處理後,進入(6)之處理。 After the processing of (5), the processing of (6) is entered.

(6)判定是否滿足如下條件:對應於注目像素之波峰左端像素與波峰右端像素之X方向上之距離(波峰右端像素之X座標值-波峰左端像素之X座標值)為特定像素數(例如,成為提取對象之二維圖像之X方向上之所有像素數之(1/20~1/5)之數)以下。 (6) It is determined whether the following condition is satisfied: the distance in the X direction corresponding to the peak of the peak of the pixel of interest and the pixel of the right end of the peak (the X coordinate value of the pixel at the right end of the peak - the X coordinate value of the pixel at the left end of the peak) is a specific number of pixels (for example) It is equal to or less than the number of all pixels in the X direction of the extracted two-dimensional image (1/20 to 1/5).

於滿足該條件之情形時,進入(7)之處理。 When the condition is satisfied, the process proceeds to (7).

於不滿足該條件之情形時,於存在X座標值大於現注目像素之波 峰頂點像素時,將X座標值大於現注目像素且X座標值最近之波峰頂點像素變更為下一個注目像素,再次進行(6)之處理。 In the case where the condition is not satisfied, there is a wave having an X coordinate value larger than the current pixel of interest. In the case of the peak vertex pixel, the peak vertex pixel whose X coordinate value is larger than the current target pixel and whose X coordinate value is the closest is changed to the next target pixel, and the processing of (6) is performed again.

於不滿足該條件之情形時,於不存在X座標值大於現注目像素之波峰頂點像素時,結束一連串之處理。 When the condition is not satisfied, when there is no peak vertex pixel whose X coordinate value is larger than the current pixel of interest, the series of processing ends.

(7)判定是否滿足如下條件:現注目像素與對應於現注目像素之波峰左端像素之Y方向上之距離(波峰左端像素之Y座標值-波峰頂點像素之Y座標值)、或現注目像素與對應於現注目像素之波峰右端像素之Y方向上之距離(波峰右端像素之Y座標值-波峰頂點像素之Y座標值)中較短之距離為波峰左端像素與波峰右端像素之X方向上之距離(波峰右端像素之X座標值-波峰左端像素之X座標值)之特定倍(例如,1/2倍~2倍)以上。 (7) It is determined whether the following condition is satisfied: the distance between the current pixel of interest and the Y-direction of the peak of the peak corresponding to the current pixel of interest (the Y coordinate value of the pixel at the left end of the peak - the Y coordinate value of the peak of the peak peak), or the current pixel of interest The shorter distance in the Y direction corresponding to the right end pixel of the peak corresponding to the current pixel (the Y coordinate value of the pixel at the right end of the peak - the Y coordinate value of the peak pixel of the peak) is in the X direction of the pixel at the left end of the peak and the pixel at the right end of the peak. The distance (the X coordinate value of the pixel at the right end of the peak - the X coordinate value of the pixel at the left end of the peak) is a specific multiple (for example, 1/2 times to 2 times).

於滿足該條件之情形時,進入(8)之處理。 When the condition is satisfied, the process proceeds to (8).

於不滿足該條件之情形時,於存在X座標值大於現注目像素之波峰頂點像素時,將X座標值大於現注目像素且X座標值最近之波峰頂點像素變更為下一個注目像素,再次進行(6)之處理。 When the condition is not satisfied, when there is a peak vertex pixel whose X coordinate value is larger than the current target pixel, the peak value of the peak with the X coordinate value larger than the current target pixel and the X coordinate value being the closest is changed to the next target pixel, and then performed again. (6) Processing.

於不滿足該條件之情形時,於不存在X座標值大於現注目像素之波峰頂點像素時,結束一連串之處理。 When the condition is not satisfied, when there is no peak vertex pixel whose X coordinate value is larger than the current pixel of interest, the series of processing ends.

於圖9(b)所示之例之情形時,波峰頂點像素P2、以及對應於其之波峰左端像素P5及波峰右端像素P6滿足(6)之條件及(7)之條件。波峰頂點像素P7、以及對應於其之波峰左端像素P8及波峰右端像素P9由於波峰頂點像素P7與波峰左端像素P8之Y方向上之距離、及波峰頂點像素P7與波峰右端像素P9之Y方向上之距離為波峰左端像素P8與波峰右端像素P9之X方向上之距離之1/5而非特定值(例如,1/2~2)倍以上,因此,不滿足(7)之條件。 In the case of the example shown in FIG. 9(b), the peak vertex pixel P 2 and the peak left end pixel P 5 and the peak right end pixel P 6 satisfy the condition of (6) and the condition of (7). The peak vertex pixel P 7 , and the peak left end pixel P 8 and the peak right end pixel P 9 corresponding thereto are the distance in the Y direction from the peak vertex pixel P 7 and the peak left end pixel P 8 , and the peak vertex pixel P 7 and the peak right end the distance in the X direction 9 of the left peak to the peak pixel P 8 on the right end of the pixel from the pixel P P 9 of the Y direction is 1/5 instead of a specific value or more (e.g., 1/2 - 2) times, therefore, is not Meet the conditions of (7).

如此,根據(6)之條件及(7)之條件,僅選擇認為由缺陷引起之尖銳之波峰,而不選擇認為並非由缺陷引起之平緩之波峰。 Thus, according to the conditions of (6) and the conditions of (7), only the sharp peaks considered to be caused by the defects are selected, and the peaks considered to be not caused by the defects are not selected.

(8)算出表示連結對應於現注目像素之波峰左端像素與波峰右端像素之線段之式子,提取該線段上之像素作為重新提取像素。但是,於該線段通過於X方向上位於波峰左端像素與波峰右端像素之間且於Y方向上鄰接之2個像素M(xp,yq)、N(xp,yq+1)之間時,將像素N(xp,yq+1)作為重新提取像素。關於由交界提取部1411提取之提取像素中之具有與重新提取像素相同之X座標值且具有與重新提取像素不同之Y座標值之提取像素,作為構成交界線部之像素,以重新提取像素置換提取像素。以此方式將提取像素之一部分置換為重新提取像素而獲得之交界線部形成將缺陷之影響排除後之本來之交界線。如圖9(e)所示,置換後之提取像素成為對應於原來之二維圖像資料中所包含之因凹缺陷導致歪曲之交界線部而包含暗部者,可藉由該暗部表示凹缺陷之位置。 (8) Calculate an expression indicating that a line segment corresponding to the peak of the peak of the current pixel and the pixel of the right end of the peak is connected, and extract the pixel on the line as the re-extracted pixel. However, the line segment passes through two pixels M(x p , y q ), N(x p , y q +1) which are located between the pixel at the left end of the peak and the pixel at the right end of the peak in the X direction and are adjacent in the Y direction. In the inter-time, the pixel N(x p , y q +1) is taken as the re-extracted pixel. Regarding the extracted pixel having the same X coordinate value as the re-extracted pixel and having the Y coordinate value different from the re-extracted pixel among the extracted pixels extracted by the boundary extracting portion 1411, as the pixels constituting the boundary line portion, the re-extracted pixel replacement is performed. Extract pixels. In this way, the boundary portion obtained by replacing one of the extracted pixels with the re-extracted pixel forms an original boundary line after the influence of the defect is excluded. As shown in FIG. 9(e), the extracted pixel after replacement is a dark portion corresponding to the boundary line portion which is distorted due to the concave defect included in the original two-dimensional image data, and the concave portion can be represented by the dark portion. The location.

重新提取部1412係藉由以上之(1)~(8)之處理進行重新提取,但重新提取之方法並不限定於此。例如,作為其他重新提取之方法,亦可使由函數表達之曲線擬合於由交界提取部1411提取之交界線部,求出擬合曲線(函數曲線),繼而,求出使該擬合曲線平滑化所得之平滑化曲線,最後,將擬合於該平滑化曲線之二維圖像內之像素設為提取像素。作為用於擬合之函數,可列舉n次函數、高斯函數、勞倫茲函數、Voigt函數、該等函數之組合等。作為進行擬合時所使用之擬合之評價方法,例如可使用最小平方法。 The re-extraction unit 1412 performs re-extraction by the above processes (1) to (8), but the method of re-extraction is not limited thereto. For example, as another method of re-extracting, a curve expressed by a function may be fitted to a boundary line portion extracted by the boundary extracting unit 1411 to obtain a fitting curve (function curve), and then the fitting curve may be obtained. The resulting smoothing curve is smoothed, and finally, the pixels in the two-dimensional image fitted to the smoothing curve are set as extracted pixels. As a function for fitting, an n-th order function, a Gaussian function, a Lorentz function, a Voigt function, a combination of these functions, and the like can be cited. As the evaluation method of the fitting used in the fitting, for example, the least square method can be used.

1‧‧‧圖像產生裝置 1‧‧‧Image generating device

11‧‧‧搬送部 11‧‧‧Transportation Department

12‧‧‧光照射部 12‧‧‧Lighting Department

13‧‧‧拍攝部 13‧‧‧Photography Department

14‧‧‧資訊處理裝置 14‧‧‧Information processing device

21‧‧‧顯示部 21‧‧‧Display Department

100‧‧‧缺陷檢查裝置 100‧‧‧ Defect inspection device

141‧‧‧檢查用圖像資料產生部 141‧‧‧Image data generation department for inspection

1411‧‧‧交界提取部 1411‧‧The Border Extraction Department

1412‧‧‧重新提取部 1412‧‧‧Re-extraction department

1413‧‧‧合成部 1413‧‧‧Combination Department

Claims (3)

一種圖像產生裝置,其產生用以檢查片狀成形體之缺陷之圖像資料,且包括:搬送部,其將片狀成形體沿該片狀成形體之長度方向搬送;光照射部,其具備於片狀成形體之寬度方向上呈直線狀延伸之光源,藉由該光源對片狀成形體照射光;拍攝部,其係對搬送中之上述片狀成形體進行拍攝動作而產生表示二維圖像之二維圖像資料,且於該二維圖像內包含對應於上述光源之明部與亮度較該明部低之暗部之位置對片狀成形體進行複數次拍攝動作;及檢查用圖像資料產生部,其係自藉由上述拍攝部而產生之複數個二維圖像資料產生檢查用圖像資料,且包括:交界提取部,其提取由各二維圖像資料表示之各二維圖像內之上述明部與上述暗部之交界線部;重新提取部,其將上述交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式,將該表觀上之交界線平滑化,而自二維圖像資料中提取構成經平滑化而獲得之本來之交界線之像素;及合成部,其產生包含由上述重新提取部提取之像素之一維圖像資料,並合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料而產生檢查用圖像資料。 An image generating device that generates image data for inspecting a defect of a sheet-shaped formed body, and includes: a conveying portion that conveys the sheet-shaped formed body along a longitudinal direction of the sheet-shaped formed body; and a light-irradiating portion A light source that linearly extends in the width direction of the sheet-like formed body, and the sheet-shaped molded body is irradiated with light by the light source, and the image capturing unit performs an image capturing operation on the sheet-shaped formed body during conveyance to generate a representation a two-dimensional image data of the dimensional image, and the plurality of imaging operations performed on the sheet-shaped formed body corresponding to the position of the bright portion of the light source and the dark portion having a lower brightness than the bright portion in the two-dimensional image; and inspection The image data generating unit generates inspection image data from a plurality of pieces of two-dimensional image data generated by the imaging unit, and includes a boundary extraction unit that extracts and displays the two-dimensional image data. a boundary line portion between the bright portion and the dark portion in each two-dimensional image; and a re-extraction portion that connects the boundary portion to form an apparent boundary line, and the sharp line appears on the apparent boundary line Wave peak elimination In the manner of smoothing the apparent boundary line, extracting pixels constituting the original boundary line obtained by smoothing from the two-dimensional image data; and synthesizing the portion including the extraction by the re-extraction unit One-dimensional image data of the pixel, and a plurality of one-dimensional image data obtained from the plurality of two-dimensional image data in the same manner are synthesized to generate inspection image data. 一種缺陷檢查裝置,其包括:如請求項1之圖像產生裝置;及顯示部,其顯示由藉由上述圖像產生裝置之檢查用圖像資料產生部所產生之檢查用圖像資料表示之圖像。 A defect inspection device comprising: the image generation device of claim 1; and a display portion displayed by the inspection image data generated by the inspection image data generation portion of the image generation device image. 一種缺陷檢查方法,其用以檢查片狀成形體之缺陷,且包括:拍攝步驟,其係於一面藉由在片狀成形體之寬度方向上呈直線狀延伸之光源對該片狀成形體照射光、一面將該片狀成形體沿該片狀成形體之長度方向搬送之狀態下,對該片狀成形體進行拍攝動作而產生表示二維圖像之二維圖像資料,且以於該二維圖像內包含對應於上述光源之明部與亮度較該明部低之暗部之方式對片狀成形體進行複數次拍攝動作;交界提取步驟,其係提取由上述拍攝步驟中所產生之各二維圖像資料表示之各二維圖像內之上述明部與上述暗部之交界線部;重新提取步驟,其係將上述交界線部連接而形成表觀上之交界線,以該表觀上之交界線上出現之尖銳之波峰消失之方式,將該表觀上之交界線平滑化,而自二維圖像資料中提取構成經平滑化而獲得之本來之交界線之像素;合成步驟,其係產生包含上述重新提取步驟中提取出之像素之一維圖像資料,並合成以相同之方式自複數個二維圖像資料獲得之複數個一維圖像資料而產生檢查用圖像資料;及顯示步驟,其係顯示由上述合成步驟中所產生之檢查用圖像資料表示之圖像。 A defect inspection method for inspecting a defect of a sheet-shaped formed body, comprising: a photographing step of irradiating the sheet-shaped formed body with a light source extending linearly in a width direction of the sheet-shaped formed body In the state in which the sheet-like formed body is conveyed in the longitudinal direction of the sheet-like formed body, the sheet-shaped formed body is imaged to generate two-dimensional image data representing a two-dimensional image, and The two-dimensional image includes a plurality of imaging operations on the sheet-shaped formed body corresponding to a bright portion of the light source and a dark portion having a lower brightness than the bright portion; and an interface extraction step of extracting the image forming step a boundary line between the bright portion and the dark portion in each two-dimensional image represented by each two-dimensional image data; and a re-extraction step of connecting the boundary portions to form an apparent boundary line, The way in which the sharp peaks appearing on the boundary line disappears, smoothes the boundary line of the apparent view, and extracts pixels from the two-dimensional image data that constitute the original boundary line obtained by smoothing; a step of generating a one-dimensional image data including one of the pixels extracted in the above-mentioned re-extraction step, and synthesizing a plurality of one-dimensional image data obtained from the plurality of two-dimensional image data in the same manner to generate an inspection map An image data; and a display step of displaying an image represented by the inspection image data generated in the above-described synthesis step.
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