TWI604913B - Swinging mechanism - Google Patents

Description

Swing mechanism

The present invention relates to a swinging mechanism, and more particularly to a swinging mechanism having an eccentric shaft.

In order to reduce pollution and increase production, the semiconductor industry often uses one or more robotic arms to carry workpieces such as silicon wafers or electronic wafers for subsequent processing steps or electrical testing.

In general, the robot arm is adjustable in the vertical direction by a motor drive linear guide. The conventional robot arm is equipped with an external member to be connected to the motor, and when the motor drives the robot arm to move, the external member moves along with the robot arm. That is, the weight of the overall moving element is the weight of the robot arm plus the weight of the outer member. An increase in the overall weight of the moving element causes the inertial motion of the robot arm to become apparent. The inertial action is, for example, the sway caused by starting or stopping, and when the sway is increased, the risk of the workpiece carried on the robot arm falling is increased.

In addition, the above-mentioned problem that the sloshing becomes large due to the obvious inertial motion also occurs in the electrical test process. The electrical test process generally connects the probe through the swing arm, and the swing arm drives the probe to perform electrical testing with respect to the swing of the workpiece. However, if the swinging degree of the swing arm becomes large or the number of times becomes large, it is easy to cause the probe to scratch the working piece. Therefore, how to suppress the undesired shaking or the degree of sloshing of the above-mentioned machine components is one of the problems that the researcher should solve.

SUMMARY OF THE INVENTION The present invention is directed to a swing mechanism for suppressing unintended shaking or reducing the degree of sway of the above-described arm.

The swinging mechanism disclosed in one embodiment of the present invention comprises a base, an eccentric shaft, a bearing, a connecting rod and a swinging member. The eccentric shaft includes a connected body portion and a connecting portion. The body portion is pivoted on the base, and the axis line of the connecting portion and the axis line of the body portion are non-coaxial. The bearing sleeve is sleeved on the connecting portion of the eccentric shaft. The connecting rod member includes a first pivoting portion and a pushing rod portion. The first pivoting portion is pivoted to the bearing. The pushing rod portion is coupled to the first pivot portion and extends in a radial direction of the first pivot portion. The swinging member includes a second pivoting portion and a first extending arm portion. The second pivoting portion is pivoted to the base. The first extension arm is movably abutted against the push rod. When the eccentric shaft rotates, the pushing rod portion of the connecting rod member can move along the axial direction and the radial direction of the bearing, and drive the first extending arm portion of the swinging member to swing relative to the base.

According to the swinging mechanism of the above embodiment, since the connecting portion of the eccentric shaft and the connecting rod member is pivoted through the bearing, the connecting rod can be pushed against the rod through the characteristic that the inner ring and the outer ring of the bearing slightly swing relative to each other. The portion can continue to abut against the first extending arm portion of the swinging member during the swinging of the swinging member. In this way, the swinging member can slow down its own sway due to the abutment of the pushing rod.

The above description of the present invention and the following description of the embodiments are intended to illustrate and explain the principles of the invention, and to provide a further explanation of the scope of the invention.

Please refer to Figure 1 to Figure 3. 1 is a perspective view showing a combination of a swing mechanism and a drive motor according to a first embodiment of the present invention. Figure 2 is a top plan view of Figure 1. Figure 3 is a schematic cross-sectional view of Figure 2.

The swing mechanism 10 of the present embodiment includes a base 100, an eccentric shaft 200, a bearing 300, a connecting rod member 400, and a swinging member 500.

The base 100 includes an assembly housing 110 , a first pivot arm 120 , and a second pivot arm 130 . The assembly housing 110 is provided for a drive motor 20. The drive motor 20 has a torque output shaft 22. The first pivoting arm 120 and the second pivoting arm 130 are coupled to the assembly housing 110 and extend toward the same side of the assembly housing 110.

The eccentric shaft 200 includes a connected body portion 210 and a connecting portion 220. The body portion 210 is pivotally mounted on the assembly housing 110 of the base 100 and has a shaft hole 211. The shaft hole 211 is assembled for the torque output shaft 22 of the drive motor 20. The connecting portion 220 extends along the axis A1 of the shaft hole 211, and the axis A1 of the shaft hole 211 of the body portion 210 and the axis A2 of the connecting portion 220 are non-coaxial.

The bearing 300 is, for example, a ball bearing or a roller bearing. The bearing 300 is sleeved on the connecting portion 220 of the eccentric shaft 200. Taking a ball bearing as an example, the bearing 300 generally includes inner and outer rings and balls sandwiched between the inner ring and the outer ring. The rotation lubrication of the inner ring and the outer ring can be increased by the rotation of the balls. In addition, the inner ring also slightly oscillates relative to the outer ring in the axial direction of the bearing 300 by the aid of the balls.

The connecting rod 400 includes a first pivoting portion 410 and a pushing rod portion 420. The first pivoting portion 410 is pivotally mounted to the bearing 300. The pushing rod portion 420 is coupled to the first pivoting portion 410 and extends in a radial direction of the first pivoting portion 410. That is, the push rod portion 420 extends in the radial direction of the bearing 300. In addition, when the eccentric shaft 200 rotates, the pushing rod portion 420 of the connecting rod member 400 can be moved along the axial direction of the bearing 300 by the action of the bearing 300 in addition to being movable in the radial direction of the bearing 300.

The swinging member 500 includes a second pivoting portion 510, a first extending arm portion 520 and a second extending arm portion 530. The second pivoting portion 510 is pivotally mounted to the assembly housing 110 of the base 100 through a pivot 600. The extending direction of the first extending arm portion 520 is substantially parallel to the axial direction of the bearing 300. The extending direction of the second extension arm portion 530 is substantially parallel to the radial direction of the bearing 300. The aforementioned so-called substantially parallel covers parallel or nearly parallel (about within 10 degrees of the two). The first extending arm portion 520 is movably abutted against the pushing rod portion 420 such that the first extending arm portion 520 of the swinging member 500 can be oscillated relative to the base 100 by being pushed against the rod portion 420. In more detail, the first extension arm portion 520 has a ball joint 521 on one side away from the bearing 300, and the push rod portion 420 has a recessed hole 421. The ball joint 521 is located between the recessed hole 421 and the bearing 300. The ball joint 521 is movably located in the recessed hole 421 and abuts against the push rod portion 420.

The ball joint 521 may be a one-piece design integrally formed with the first extension arm portion 520 or a two-piece design separated from the first extension arm portion 520.

In the embodiment, the swing mechanism 10 further includes a reset member 650. The opposite ends of the reset member 650 are respectively disposed on the base 100 and the first extending arm portion 520 of the swinging member 500. Wherein, the pushing rod portion 420 can push against the first extending arm portion 520 to move the first extending arm portion 520 toward the bearing 300, and the resetting member 650 can push against the first extending arm portion 520 to make the first extension The arm portion 520 moves in a direction away from the bearing 300. In addition, through the action of the resetting member 650, it is ensured that the spherical joint 521 of the first extending arm portion 520 can be held against the pushing rod portion 420 during the swinging of the swinging member 500.

In addition, the swing mechanism 10 further includes a swing arm 700. The swing arm 700 is coupled to the second extension arm portion 530, and the swing arm 700 extends in a direction substantially parallel to the radial direction of the bearing 300. The swing arm 700 can be swung with the second extension arm portion 530, and the swing arm 700 is separated from one end of the second extension arm portion 530, for example, with a probe to enable detection of a test object such as a light-emitting diode die.

It should be noted that in the present embodiment, the swing arm 700 is coupled to the second extending arm portion 530 of the swinging member 500. However, in other embodiments, the swinging member 500 may not have the second extending arm portion 530. The arm 700 can be directly connected to the second pivoting portion 510 of the swinging member 500.

Please refer to Figure 2 to Figure 5. 4 is a top plan view of the eccentric shaft of FIG. 2 rotated by an angle. Figure 5 is a schematic cross-sectional view of Figure 4.

As shown in Figures 2 and 3, the swinging member 500 is in a first position. Next, the drive motor 20 drives the torque output shaft 22 to rotate in the direction a, and the torque output shaft 22 drives the eccentric shaft 200 to rotate. Since the axial line A1 of the shaft hole 211 of the main body portion 210 and the axial line A2 of the connecting portion 220 are not coaxial, when the eccentric shaft 200 rotates, the connecting rod 400 pivotally connected to the connecting portion 220 is driven along the bearing 300. The radial direction moves to drive the swinging member 500 to a second position (as shown in FIGS. 4 and 5).

As shown in FIG. 4 and FIG. 5, when the connecting rod 400 moves in the direction b, the pushing rod portion 420 of the connecting rod member 400 drives the swinging member 500 to rotate in the counterclockwise direction. In detail, the pushing rod portion 420 drives the first extending arm portion 520 of the swinging member 500 away from the bearing 300 in the direction b away from one end of the pivot shaft 600, and is relatively away from the pivot shaft 600 in the direction c. That is, the vertical distance of the axis of the first extension arm 520 and the pivot 600 may increase, and the horizontal distance of the axis of the first extension arm 520 and the pivot 600 may decrease.

It should be noted that when the eccentric shaft 200 rotates, the pushing rod portion 420 of the connecting rod member 400 can be acted upon by the bearing 300 along the bearing 300 in addition to being movable along the radial direction of the bearing 300 (such as the parallel direction b). Axial activity (such as parallel direction c). In this way, since the pushing lever portion 420 of the connecting rod member 400 can move in the vertical direction and the horizontal direction, the horizontal displacement amount and the vertical displacement amount of the first extending arm portion 520 in the first position and the second position can be reduced. The effect is such that the pushing rod portion 420 abuts against the first extending arm portion 520 with almost no play.

The advantage of the pushing rod portion 420 abutting against the first extending arm portion 520 without any gap is that when the first extending arm portion 520 is subjected to inertia and wants to continue to sway, the pushing rod portion 420 is pressed against the first extending arm portion. 520 can achieve the effect of slowing the sway.

The first pivoting portion 410 of the connecting rod member 400 and the pushing rod portion 420 are integrally formed, but are not limited thereto. Please refer to Figure 6. Figure 6 is a second embodiment in accordance with the present invention. A perspective view of a combination of a swinging mechanism and a drive motor as described in the embodiment.

The swing mechanism 10a of the present embodiment is similar to the swing mechanism 10 of the above-described embodiment of Fig. 1, and therefore, only the differences will be described next.

In the swing mechanism 10a of the present embodiment, the first pivoting portion 410 of the connecting rod member 400a is a pushing rod portion 420 pivotally connected to the connecting rod member 400a. However, whether it is an integrally formed structure or a pivotal structure, the pushing lever portion 420 of the connecting rod member 400a is also used to push against the first extending arm portion 520, so that the function is not described again.

Please refer to Figure 7. Fig. 7 is a partially enlarged schematic view showing a swinging mechanism according to a third embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 1 described above, so that only the differences will be described next.

This embodiment further includes a suppression component 800. The restraining assembly 800 includes an elastic member 810 and a pressing member 820. The pressing member 820 is movably located at the first extending arm portion 520 of the swinging member 500. The opposite ends of the elastic member 810 are respectively pressed against the first extending arm portion 520 and the pressing member 820 to press the pressing member 820 against the pivot 600.

The advantage of the pressing member 820 against the pivot 600 is that when the first extending arm portion 520 is subjected to inertia and is intended to continue to sway, the pressing member 820 is pressed against the pivot 600 to achieve the effect of slowing the sway.

It should be noted that the suppression component 800 of the present embodiment is disposed on the first extension arm 520, but is not limited thereto. In other embodiments, the suppression component 800 can also be disposed on the first pivot arm. 120 on. In detail, the pressing member 820 is movably located at the first pivot arm 120. The opposite ends of the elastic member 810 are respectively pressed against the first pivoting arm 120 and the pressing member 820 to press the pressing member 820 against the pivot 600.

Please refer to Figure 8. Figure 8 is a plan view showing a base and a swinging member according to a fourth embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 1 described above, so that only the differences will be described next.

This embodiment further includes two clamping blocks 900, and the clamping block 900 is, for example, a rubber pad. The two clamping blocks 900 are respectively disposed between the first pivoting arm 120 and the second pivoting arm 130 , and the two clamping blocks 900 are respectively protruded from the first pivoting arm 120 and the second pivoting arm 130 . In addition, the distance D2 of the two clamping blocks 900 is smaller than the width D1 of the second pivoting portion 510, so that the two clamping blocks 900 are pressed against the second pivoting portion 510.

The advantage that the two clamping blocks 900 are pressed against the second pivoting portion 510 is that when the first extending arm portion 520 is subjected to inertia and is required to continue to sway, the two clamping blocks 900 can be pressed against the second pivoting portion 510. Slow down the effect of swaying.

In this embodiment, the clamping block 900 and the pivoting arms 120, 130 are respectively two-piece, but not limited thereto. In other embodiments, the clamping block 900 and the pivoting arms 120, 130 may also be It is a one-piece structure.

In addition, the number of the clamping blocks 900 is two, but not limited thereto. In other embodiments, the number of the clamping blocks 900 may be only one, and may be optionally disposed on the first pivoting arm 120. Or the second pivot arm 130.

According to the swinging mechanism of the above embodiment, since the connecting portion of the eccentric shaft and the connecting rod member is pivoted through the bearing, the connecting rod can be pushed against the rod through the characteristic that the inner ring and the outer ring of the bearing slightly swing relative to each other. The portion can continue to abut against the first extending arm portion of the swinging member during the swinging of the swinging member. In this way, the swinging member can slow down its own sway due to the abutment of the pushing rod.

Furthermore, a restraining assembly is disposed on the first extending arm portion or the first pivoting arm, and the pressing member of the inhibiting assembly can be pressed against the pivot to slow the sway of the swinging member.

In addition, a clamping pad is disposed on the first pivoting arm or the second pivoting arm, and the clamping pad can press against the pivot to slow down the shaking of the swinging member.

While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The patent protection scope of the invention is subject to the definition of the scope of the patent application attached to the specification.

10, 10a‧‧‧ swinging mechanism

20‧‧‧Drive motor

22‧‧‧Torque output shaft

100‧‧‧Base

110‧‧‧Assemble the housing

120‧‧‧First pivot arm

130‧‧‧Second pivot arm

200‧‧‧Eccentric shaft

210‧‧‧ Body Department

211‧‧‧ shaft hole

220‧‧‧Connecting Department

300‧‧‧ bearing

400, 400a‧‧‧ connecting rods

410‧‧‧First pivotal

420‧‧‧Pushing the pole

421‧‧‧ recessed hole

500‧‧‧Swing parts

510‧‧‧Second pivotal

520‧‧‧First extension arm

521‧‧‧Ball joints

530‧‧‧Second extension arm

600‧‧‧ pivot

650‧‧‧Reset parts

700‧‧‧ swing arm

800‧‧‧Suppression components

810‧‧‧Flexible parts

820‧‧‧Resistance parts

900‧‧‧clamping block

A1, A2‧‧‧ axis line

D1, D2‧‧‧ distance

a, b, c‧‧‧ directions

1 is a perspective view showing a combination of a swing mechanism and a drive motor according to a first embodiment of the present invention. Figure 2 is a top plan view of Figure 1. Figure 3 is a schematic cross-sectional view of Figure 2. 4 is a top plan view of the eccentric shaft of FIG. 2 rotated by an angle. Figure 5 is a schematic cross-sectional view of Figure 4. Figure 6 is a perspective view showing a combination of a swing mechanism and a drive motor according to a second embodiment of the present invention. Fig. 7 is a partially enlarged schematic view showing a swinging mechanism according to a third embodiment of the present invention. Figure 8 is a plan view showing a base and a swinging member according to a fourth embodiment of the present invention.

20‧‧‧Drive motor

22‧‧‧Torque output shaft

110‧‧‧Assemble the housing

120‧‧‧First pivot arm

200‧‧‧Eccentric shaft

210‧‧‧ Body Department

211‧‧‧ shaft hole

220‧‧‧Connecting Department

300‧‧‧ bearing

400‧‧‧Connecting rods

410‧‧‧First pivotal

420‧‧‧Pushing the pole

421‧‧‧ recessed hole

500‧‧‧Swing parts

510‧‧‧Second pivotal

520‧‧‧First extension arm

521‧‧‧Ball joints

530‧‧‧Second extension arm

600‧‧‧ pivot

650‧‧‧Reset parts

700‧‧‧ swing arm

A1, A2‧‧‧ axis line

A‧‧‧direction

Claims (10)

A swinging mechanism includes: a base; an eccentric shaft, comprising a connected body portion and a connecting portion, the body portion is pivotally mounted on the base, and the axis of the connecting portion and the axis of the body portion The wire is non-coaxial; a bearing is sleeved on the connecting portion of the eccentric shaft; a connecting rod member includes a first pivoting portion and a pushing rod portion, and the first pivoting portion is pivotally mounted on the bearing The pushing rod portion is connected to the first pivoting portion and extends along a radial direction of the first pivoting portion; and a swinging member includes a second connecting portion and a first extending arm portion. The second pivoting portion is pivotally disposed on the base, and the first extending arm portion is movably abutting against the pushing rod portion. When the eccentric shaft rotates, the pushing rod portion of the connecting rod member can be along the The axial and radial movement of the bearing drives the first extension arm of the oscillating member to oscillate relative to the base. The swinging mechanism of claim 1, wherein the body portion of the eccentric shaft has a shaft hole extending along an axial line of the shaft hole, and the connecting portion and the shaft line of the shaft hole Non-coaxial. The oscillating mechanism of claim 1, wherein when the eccentric shaft rotates, the eccentric shaft drives the connecting rod to move along a radial direction of the eccentric shaft through the bearing, thereby driving the first portion of the oscillating member An extension arm moves in a radial direction of the eccentric shaft. The oscillating mechanism of claim 1, wherein the first extending arm portion further has a ball joint, and the connecting rod member has a recessed hole, and the ball joint is movably located at the recessed hole. The swinging mechanism of claim 1, further comprising a resetting member, wherein the opposite ends of the resetting member are respectively disposed on the base and the first extending arm portion of the swinging member. The swinging mechanism of claim 1, further comprising a swing arm, wherein the swinging member further comprises a second extending arm portion connected to the second pivoting portion, the extending direction of the first extending arm portion The second extending arm portion extends substantially parallel to the radial direction of the bearing substantially parallel to the axial direction of the bearing, and the swing arm is disposed at the second extending arm portion. The oscillating mechanism of claim 1, further comprising a pivoting member and a damper assembly, the oscillating member being pivotally connected to the pedestal through the pivot, the damper assembly comprising an elastic member and a pressing member The pressing member is movably disposed on the base, and opposite ends of the elastic member respectively press against the base and the pressing member to press the pressing member against the pivot. The oscillating mechanism of claim 1, further comprising a pivoting member and a damper assembly, the oscillating member being pivotally connected to the pedestal through the pivot, the damper assembly comprising an elastic member and a pressing member The pressing member is movably located at the first extending arm portion of the oscillating member, and the opposite ends of the elastic member respectively press against the first extending arm portion and the pressing member to press the pressing member On the pivot. The oscillating mechanism of claim 1, further comprising a pivot and a clamping block, the base having a first pivoting arm and a second pivoting arm, the clamping block protruding from the The first pivoting arm is adjacent to one side of the second pivoting arm, and the second pivoting portion of the swinging member is pivotally disposed on the first pivoting arm and the second pivoting arm through the pivot, and the clip The spacing between the block and the second pivoting arm is smaller than the width of the second pivoting portion to press the clamping block against the second pivoting portion. The oscillating mechanism of claim 1, further comprising a pivot and two clamping blocks, the base having a first pivoting arm and a second pivoting arm, wherein the two clamping blocks are located Between the first pivoting arm and the second pivoting arm, the second pivoting portion of the swinging member is pivotally disposed on the first pivoting arm and the second pivoting arm through the pivot, and the two clamps The spacing of the holding blocks is smaller than the width of the second pivoting portion, so that the two clamping blocks are pressed against the second pivoting portion.