TWI597335B - A method of forming an ITO conductive film-forming coating and an ITO conductive film - Google Patents

A method of forming an ITO conductive film-forming coating and an ITO conductive film Download PDF

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TWI597335B
TWI597335B TW102143770A TW102143770A TWI597335B TW I597335 B TWI597335 B TW I597335B TW 102143770 A TW102143770 A TW 102143770A TW 102143770 A TW102143770 A TW 102143770A TW I597335 B TWI597335 B TW I597335B
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ito
conductive film
surface treatment
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mass
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TW201433608A (en
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米澤岳洋
山崎和彦
竹之下愛
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三菱綜合材料股份有限公司
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ITO導電膜形成用塗料及ITO導電膜的形成方法 Coating method for forming ITO conductive film and method for forming ITO conductive film

本發明係關於用於形成能夠在高溫高濕下抑制ITO導電膜的電阻值的上升的ITO導電膜的塗料。本說明書中,ITO是指銦錫氧化物(Indium Tin Oxide)。 The present invention relates to a coating material for forming an ITO conductive film capable of suppressing an increase in resistance value of an ITO conductive film under high temperature and high humidity. In the present specification, ITO means Indium Tin Oxide.

在LCD(Liquid Crystal Display)和PDP(Plasma Display Panel)、有機EL(ElectroLuminescence)觸控面板等顯示裝置中,係使用透明電極。該透明電極通常由包含ITO等的透明導電材料構成。這種透明電極通常係藉由濺鍍法等來形成為膜狀(例如參考專利文獻1)。然而,濺鍍裝置昂貴,且有成膜效率差且其膜易產生龜裂等問題。作為形成不易產生該龜裂的彎曲性優異的ITO導電膜的方法,提出了將ITO導電膜形成用塗料塗佈於基板的方法來代替濺鍍法。然而,用塗佈方式所得到的透明電極若放置在高溫高濕下,則電阻值因環境中的氧和水分原因而有上升傾向,這已成為使可靠性下降的一個原因。 In a display device such as an LCD (Liquid Crystal Display), a PDP (Plasma Display Panel), or an organic EL (Electro Luminescence) touch panel, a transparent electrode is used. The transparent electrode is usually composed of a transparent conductive material containing ITO or the like. Such a transparent electrode is usually formed into a film shape by a sputtering method or the like (for example, refer to Patent Document 1). However, the sputtering apparatus is expensive, and has a problem that the film forming efficiency is poor and the film is liable to be cracked. As a method of forming an ITO conductive film having excellent flexibility in which cracking is unlikely to occur, a method of applying a coating material for forming an ITO conductive film to a substrate has been proposed instead of the sputtering method. However, if the transparent electrode obtained by the coating method is placed under high temperature and high humidity, the electric resistance value tends to increase due to oxygen and moisture in the environment, which has become a cause of deterioration in reliability.

為了解決該問題,作為依塗佈方式的ITO導 電膜形成用塗料,提出了如下透明導電材料:包含將具有耐水性的ITO粉末這樣的導電粉的表面用表面處理劑進行處理而成的表面處理導電粉及硬化性化合物的透明導電材料(例如參考專利文獻2)、或含有樹脂、如ITO粉末之透明導電粒子、二氧化矽材料及矽烷偶合劑的透明導電材料(例如參考專利文獻3)。 In order to solve this problem, as an ITO guide according to the coating method In the coating material for forming an electric film, a transparent conductive material comprising a surface-treated conductive powder obtained by treating a surface of a conductive powder such as ITO powder having water resistance with a surface treatment agent and a transparent conductive material of a curable compound (for example, Reference is made to Patent Document 2) or a transparent conductive material containing a resin, a transparent conductive particle such as ITO powder, a ceria material, and a decane coupling agent (for example, refer to Patent Document 3).

先前技術文獻 Prior technical literature 專利文獻 Patent literature

專利文獻1:日本特開2004-315951號公報([0002]段) Patent Document 1: Japanese Laid-Open Patent Publication No. 2004-315951 (paragraph [0002])

專利文獻2:日本特開2006-59772號公報(摘要、請求項1) Patent Document 2: Japanese Laid-Open Patent Publication No. 2006-59772 (abstract, claim 1)

專利文獻3:日本特開2009-135044號公報(摘要、請求項1) Patent Document 3: Japanese Laid-Open Patent Publication No. 2009-135044 (Summary, Request Item 1)

藉由上述專利文獻2及3所示的透明導電材料所形成的ITO導電膜的透明電極,即使在高溫高濕下也能夠充分抑制水分的影響所致之電阻值的上升。然而,近年來,透明電極的用途更加多樣化,要求即使在比以往更苛刻的條件下也能夠抑制高溫高濕下的透明電極的電阻值的上升的ITO導電膜形成用塗料。 The transparent electrode of the ITO conductive film formed of the transparent conductive material described in the above Patent Documents 2 and 3 can sufficiently suppress the increase in the resistance value due to the influence of moisture even under high temperature and high humidity. However, in recent years, the use of a transparent electrode is more diversified, and it is required to suppress a coating material for forming an ITO conductive film which can increase the resistance value of a transparent electrode under high temperature and high humidity even under more severe conditions than in the past.

本發明的目的在於提供一種即使在比以往更苛刻的條件下也能夠抑制包含ITO導電膜的透明電極在高溫高濕下的電阻值的上升的ITO導電膜形成用塗料。 An object of the present invention is to provide a coating material for forming an ITO conductive film capable of suppressing an increase in the electric resistance value of a transparent electrode including an ITO conductive film under high temperature and high humidity even under more severe conditions than in the prior art.

本發明的第1觀點為,一種ITO導電膜形成用塗料,其包含ITO粉末、該ITO粉末的分散介質及該ITO粉末的表面處理劑,其中,該分散介質為醇系溶液,該表面處理劑為烷基的碳數為2以下的矽酸酯,或者,該表面處理劑為於末端基具有胺基或巰基的矽烷偶合劑,相對於該ITO粉末100質量%,該矽酸酯含有1~30質量%,或者,相對於該ITO粉末100質量%,該矽烷偶合劑含有0.1~30質量%。 According to a first aspect of the invention, there is provided a coating material for forming an ITO conductive film, comprising: an ITO powder; a dispersion medium of the ITO powder; and a surface treatment agent for the ITO powder, wherein the dispersion medium is an alcohol solution, and the surface treatment agent The phthalic acid ester having an alkyl group having 2 or less carbon atoms, or the surface treatment agent is a decane coupling agent having an amine group or a fluorenyl group at the terminal group, and the phthalate ester contains 1% based on 100% by mass of the ITO powder. 30% by mass, or the decane coupling agent is contained in an amount of 0.1 to 30% by mass based on 100% by mass of the ITO powder.

本發明的第2觀點是ITO導電膜形成用塗料,其係基於第1觀點的發明,該矽酸酯為具有碳數為1的烷基的四甲氧基矽烷或具有碳數為2的烷基的四乙氧基矽烷。 A second aspect of the present invention is the coating material for forming an ITO conductive film according to the first aspect of the invention, wherein the phthalic acid ester is tetramethoxy decane having an alkyl group having 1 carbon atom or an alkane having 2 carbon atoms Base tetraethoxy decane.

本發明的第3觀點是ITO導電膜形成用塗料,其係基於第1觀點的發明,該矽烷偶合劑為N-2-(胺乙基)-3-胺丙基三甲氧基矽烷、3-胺丙基三甲氧基矽烷、3-巰丙基甲基二甲氧基矽烷或3-巰丙基三甲氧基矽烷。 A third aspect of the present invention is the coating material for forming an ITO conductive film according to the first aspect of the invention, wherein the decane coupling agent is N-2-(aminoethyl)-3-aminopropyltrimethoxydecane, 3- Aminopropyltrimethoxydecane, 3-mercaptopropylmethyldimethoxydecane or 3-mercaptopropyltrimethoxydecane.

本發明的第4觀點係使用第1~第3中任一觀點所記載的塗料來形成ITO導電膜的方法。 According to a fourth aspect of the invention, there is provided a method of forming an ITO conductive film using the coating material according to any one of the first to third aspects.

本來,作為ITO的主要構成要素的In2O3,係呈現方鐵錳礦(Bixbyite)結構,能夠表現為從螢石結構有規則地去氧的結構。若該結構中作為摻雜劑的Sn的量增加等,則成為在晶格之間易吸收氧的結構。因此,若ITO粉末放置在高溫高濕下,則吸附於粉末表面的水在粉末表面的氧空位或晶格之間,會作為-OH而結合,且捕獲載流子電子,從而降低ITO粉末的導電性。 Originally, In 2 O 3 , which is a main component of ITO, has a structure of a bixbyite, and can be expressed as a structure in which oxygen is regularly deoxidized from a fluorite structure. When the amount of Sn as a dopant in the structure is increased or the like, a structure in which oxygen is easily absorbed between the crystal lattices is obtained. Therefore, if the ITO powder is placed under high temperature and high humidity, water adsorbed on the surface of the powder will combine as an oxygen vacancie or crystal lattice on the surface of the powder, and will trap carrier electrons, thereby reducing the ITO powder. Electrical conductivity.

本發明的第1觀點的ITO導電膜形成用塗料中,係使用包含:烷基的碳數為2以下的特定量的矽酸酯,或者,於末端基具有胺基或巰基的特定量的矽烷偶合劑表面處理劑處理ITO粉末的表面。上述矽酸酯為在矽與烴鏈之間具有1個以上的酯鍵的有機矽化合物(Si-O-R,惟R為烷基)。並且,上述矽烷偶合劑為於末端基具有胺基或巰基。 In the coating material for forming an ITO conductive film according to the first aspect of the present invention, a specific amount of phthalic acid ester having an alkyl group having a carbon number of 2 or less or a specific amount of decane having an amine group or a fluorenyl group at the terminal group is used. The coupler surface treatment agent treats the surface of the ITO powder. The above phthalate ester is an organic hydrazine compound (Si-O-R, but R is an alkyl group) having one or more ester bonds between hydrazine and a hydrocarbon chain. Further, the above decane coupling agent has an amine group or a fluorenyl group at the terminal group.

若用該等表面處理劑進行處理,則認為在上述矽酸酯的情況下,藉由在上述粉末表面的氧空位和晶格之間結合有矽酸酯,或者在上述矽烷偶合劑的情況下,藉由在上述粉末表面的氧空位和晶格之間結合有胺基或巰基,從而分別大幅改善相對於水的穩定性。並且,在一般的ITO表面上,-OH已存在於粒子表面,因此藉由在此結合有上述矽酸酯或上述矽烷偶合劑,所捕獲的電子被釋放而亦得到導電性提高的效果。其結果,本發明的塗料能夠抑制由該塗料形成的ITO導電膜在高溫高濕下的電阻值的上升。 When treated with such a surface treating agent, it is considered that in the case of the above phthalate ester, a phthalate is bonded between an oxygen vacancy and a crystal lattice on the surface of the powder, or in the case of the above decane coupling agent. By combining an amine group or a sulfhydryl group between the oxygen vacancies and the crystal lattice on the surface of the above powder, the stability against water is greatly improved, respectively. Further, on the surface of the general ITO, -OH is already present on the surface of the particles. Therefore, by incorporating the above-described phthalate ester or the above-described decane coupling agent, the trapped electrons are released and an effect of improving conductivity is obtained. As a result, the coating material of the present invention can suppress an increase in the electric resistance value of the ITO conductive film formed of the coating material under high temperature and high humidity.

10‧‧‧多結晶ITO粒子 10‧‧‧Multicrystalline ITO particles

11‧‧‧棒狀中心核 11‧‧‧ rod center nucleus

12‧‧‧棒狀體 12‧‧‧ rods

圖1係本發明的ITO粉末的多結晶ITO粒子的示意圖。(a)為示意立體圖,(b)為示意截面圖。 1 is a schematic view of polycrystalline ITO particles of the ITO powder of the present invention. (a) is a schematic perspective view, and (b) is a schematic cross-sectional view.

圖2是將本發明的多結晶ITO粒子、ITO粉末的一形態藉由TEM進行拍攝的照片圖。(a)為10000倍的照片圖,(b)為50000倍的照片圖。 Fig. 2 is a photographic view showing an aspect of the polycrystalline ITO particles and ITO powder of the present invention taken by TEM. (a) is a 10,000-fold photo map, and (b) is a 50,000-time photo map.

接著,根據圖式對用於實施本發明的形態進行說明。 Next, an embodiment for carrying out the invention will be described based on the drawings.

<ITO粉末> <ITO powder>

如圖1的(a)及(b)中示意性地表示地,本發明的ITO粉末包含多結晶ITO粒子10。該多結晶ITO粒子10包括棒狀中心核11及複數個棒狀體12,且一體形成為複數個棒狀體12沿著與棒狀中心核11的長度方向基本相同的方向圍繞棒狀中心核11。另外如圖2的照片圖所示,多結晶ITO粒子中,可觀察到複數個短的棒狀體如小樹枝,並且能夠觀察到該等短的棒狀體圍繞棒狀中心核的周圍並且相互鄰接,並且以相同的方向排列而固定於棒狀中心核。另外,如圖2所示,複數個棒狀體的各自的直徑及長度不需要一定相同,其截面形狀、表面形狀也不需要一定相同。 As schematically shown in (a) and (b) of FIG. 1, the ITO powder of the present invention contains polycrystalline ITO particles 10. The polycrystalline ITO particles 10 include a rod-shaped central core 11 and a plurality of rod-shaped bodies 12, and are integrally formed such that a plurality of rod-like bodies 12 surround the rod-shaped central core in substantially the same direction as the longitudinal direction of the rod-shaped central core 11. 11. Further, as shown in the photographic diagram of Fig. 2, in the polycrystalline ITO particles, a plurality of short rod-like bodies such as twigs can be observed, and it can be observed that the short rod-like bodies surround the rod-shaped central core and mutually Adjacent, and arranged in the same direction and fixed to the rod-shaped central core. Further, as shown in FIG. 2, the respective diameters and lengths of the plurality of rod-shaped bodies are not necessarily the same, and the cross-sectional shape and the surface shape thereof are not necessarily the same.

本發明的多結晶ITO粒子10的平均長度L在 0.2~5.0μm的範圍內,較佳為在1.0~5.0μm的範圍內。將多結晶ITO粒子10的平均直徑設為D時,L/D在2~20的範圍內,較佳為在3~10的範圍內。L小於0.2μm時,容易與形成ITO導電膜的基板面垂直而立,無法得到如橄欖球那樣易倒的效果。若L超過5.0μm,則粒子之間的填密性變差。並且,L/D小於2時,無法得到由各向異性而產生的導電性提高的效果,若超過20,則在製作塗膜時產生棒狀粒子斷裂而導致變短的情況。 The average length L of the polycrystalline ITO particles 10 of the present invention is In the range of 0.2 to 5.0 μm, it is preferably in the range of 1.0 to 5.0 μm. When the average diameter of the polycrystalline ITO particles 10 is D, L/D is in the range of 2 to 20, preferably in the range of 3 to 10. When L is less than 0.2 μm, it is easy to stand perpendicular to the surface of the substrate on which the ITO conductive film is formed, and it is impossible to obtain an effect that is easy to fall like a football. When L exceeds 5.0 μm, the packing property between the particles is deteriorated. In addition, when L/D is less than 2, the effect of improving conductivity by anisotropy cannot be obtained, and when it exceeds 20, when the coating film is produced, the rod-shaped particles are broken and shortened.

本發明的ITO粉末的多結晶ITO粒子具有上述形狀,因此例如製造塗佈型ITO薄膜時,當對包含該ITO粉末的塗料進行加壓同時塗佈於樹脂薄膜時,容易沿塗佈方向配向於樹脂薄膜面。即,多結晶ITO粒子容易在樹脂薄膜面滾動而橫臥。並且,本發明的ITO粒子為多結晶,因此在晶界產生適度偏離的結果,粒子之間的空隙易被填充,多結晶ITO粒子之間變得密集。其結果,將本發明的ITO粒子用在透明電極等材料時,藉由進一步降低電阻而得到良好的導電性。並且,不僅如此,多結晶ITO粒子之間被填充的結果,塗佈於透明基板和薄膜上時,塗佈層成為緻密組織,藉此能夠使薄膜太陽能電池的受光面和光學器件的透明電極等的透光率良好,並且降低霧度。 Since the polycrystalline ITO particles of the ITO powder of the present invention have the above-described shape, for example, when a coating ITO film is produced, when the coating material containing the ITO powder is applied while being applied to the resin film, it is easy to be aligned in the coating direction. Resin film surface. That is, the polycrystalline ITO particles are likely to roll on the surface of the resin film and lie on their sides. Further, since the ITO particles of the present invention are polycrystalline, as a result of a moderate deviation at the grain boundaries, voids between the particles are easily filled, and the polycrystalline ITO particles become dense. As a result, when the ITO particles of the present invention are used for a material such as a transparent electrode, good electrical conductivity can be obtained by further reducing the electric resistance. In addition, when the polycrystalline ITO particles are filled and applied to the transparent substrate and the film, the coating layer becomes a dense structure, whereby the light-receiving surface of the thin film solar cell and the transparent electrode of the optical device can be obtained. The light transmittance is good and the haze is lowered.

<ITO粉末的製造方法> <Method for Producing ITO Powder>

以下對本發明的ITO粉末的製造方法進行說明。 Hereinafter, a method for producing the ITO powder of the present invention will be described.

首先,作為第1步驟,以特定的比例稱取並混合錫鹽 和銦鹽,將該混合物溶解於純水而作為錫鹽和銦鹽的混合溶液,使該混合溶液與鹼反應而生成含錫之氫氧化銦的懸浮液。作為混合方法,較佳為向錫鹽和銦鹽的混合水溶液添加氨等鹼來進行反應的方法。若向錫鹽和銦鹽的混合水溶液添加鹼,則易生成各向異性粒子,而且通過控制添加鹼時的溫度、添加速度及/或粒子濃度,能夠控制所生成的氫氧化物粒子的大小或軸比。 First, as a first step, weigh and mix the tin salt in a specific ratio. And an indium salt, the mixture is dissolved in pure water to be a mixed solution of a tin salt and an indium salt, and the mixed solution is reacted with a base to form a suspension of tin-containing indium hydroxide. As a mixing method, a method of adding a base such as ammonia to a mixed aqueous solution of a tin salt and an indium salt is preferred. When a base is added to a mixed aqueous solution of a tin salt and an indium salt, anisotropic particles are easily formed, and by controlling the temperature, the addition rate, and/or the particle concentration at the time of adding a base, the size of the produced hydroxide particles can be controlled or Axis ratio.

另外,本發明中,將特定頻率的超音波照射於混合中的上述反應液。藉由賦予該超音波,能夠製造包括如下多結晶ITO粒子的ITO粉末,即在ITO棒狀中心核的周圍,短於該ITO棒狀中心核的複數個ITO棒狀體一體形成為沿著與ITO棒狀中心核的長度方向相同的方向且圍繞ITO棒狀中心核。超音波的頻率設為20~10000kHz。頻率小於20kHz時,超音波的攪拌效果弱,另一方面若超過10000kHz,則超音波的輸出功率將下降而無法得到充分的效果。頻率更佳設為20~1000kHz。 Further, in the present invention, ultrasonic waves of a specific frequency are irradiated to the above-mentioned reaction liquid in the mixing. By imparting the ultrasonic wave, it is possible to manufacture an ITO powder including polycrystalline ITO particles, that is, a plurality of ITO rod-like bodies shorter than the ITO rod-like central core are integrally formed around the ITO rod-shaped central core. The ITO rod-shaped central core has the same direction in the longitudinal direction and surrounds the ITO rod-shaped central core. The frequency of the ultrasonic wave is set to 20 to 10000 kHz. When the frequency is less than 20 kHz, the agitation effect of the ultrasonic wave is weak. On the other hand, if it exceeds 10,000 kHz, the output power of the ultrasonic wave is lowered, and a sufficient effect cannot be obtained. The frequency is better set to 20~1000kHz.

將超音波賦予到上述懸浮液的特定時間需要藉由頻率和中和液的容量等來進行適當調整。例如,超音波的頻率為100kHz時,當反應液的容量為1L時一邊照射超音波一邊滴入鹼的時間較佳為20~600分鐘。若超音波的賦予時間過短,則產生無法充分得到超音波照射的效果的不良情況,若過長,則產生粒子變得過長的不良情況。將反應液的液面與超音波照射裝置的液面(從照射裝置向反應器傳送超音波的介質)設為相同,以使超音波均 勻地賦予到反應液中。藉由賦予該超音波,能夠在防止各向異性ITO粒子的單質彼此凝集的同時得到多結晶ITO粒子,該多結晶ITO粒子係在ITO棒狀中心核的周圍,比中心核短的複數個ITO棒狀體固定成以沿著與ITO棒狀中心核的長度方向相同的方向且圍繞ITO棒狀中心核。 The specific time at which the ultrasonic wave is applied to the above suspension needs to be appropriately adjusted by the frequency, the capacity of the neutralizing liquid, and the like. For example, when the frequency of the ultrasonic wave is 100 kHz, when the capacity of the reaction liquid is 1 L, the time for dropping the alkali while irradiating the ultrasonic wave is preferably 20 to 600 minutes. If the application time of the ultrasonic wave is too short, there is a problem that the effect of the ultrasonic irradiation cannot be sufficiently obtained, and if it is too long, the particle may become too long. The liquid level of the reaction liquid is set to be the same as the liquid level of the ultrasonic irradiation device (the medium that transmits the ultrasonic wave from the irradiation device to the reactor) so that the ultrasonic waves are both It is uniformly applied to the reaction liquid. By imparting the ultrasonic wave, it is possible to obtain polycrystalline ITO particles which are a plurality of ITOs which are shorter than the central core by preventing the aggregation of the anisotropic ITO particles from each other while being aggregated. The rod is fixed in the same direction as the longitudinal direction of the ITO rod-like central core and surrounds the ITO rod-like central core.

其中,作為錫及銦的鹽,係有鹽酸鹽、硫酸鹽、或硝酸鹽等,但通常較佳為鹽酸鹽。並且,作為鹼使用有氨、苛性鈉、苛性鉀或該等之碳酸鹽,但從減少生成含錫之氫氧化銦的漿料後的雜質的觀點來看,較佳為使用氨。 Among them, as the salt of tin and indium, a hydrochloride, a sulfate, or a nitrate is used, but a hydrochloride is usually preferable. Further, ammonia, caustic soda, caustic potash or the like carbonate is used as the base, but from the viewpoint of reducing impurities after the slurry of the tin-containing indium hydroxide is formed, ammonia is preferably used.

藉由固液分離來採集所生成的含錫之氫氧化銦的漿料,並藉由純水洗淨雜質來得到純度高的含錫之氫氧化銦的塊狀物。藉由在室溫以上,較佳為以80℃以上的溫度對所得到的塊狀物進行乾燥,從而得到含錫之氫氧化銦的乾燥粉。 The resulting slurry of tin-containing indium hydroxide is collected by solid-liquid separation, and impurities are washed by pure water to obtain a bulk of tin-containing indium hydroxide having high purity. The obtained cake is dried at room temperature or higher, preferably at a temperature of 80 ° C or higher, to obtain a dry powder of tin-containing indium hydroxide.

在含錫之氫氧化銦中,亦存在有錫取代氫氧化銦的銦的情況,但也存在作為氧化錫及/或氫氧化錫與氫氧化銦共沈澱的情況,還存在作為氧化錫及/或氫氧化錫與氫氧化銦成為非晶質的混合體的情況。 In the case of tin-containing indium hydroxide, there is also a case where tin is substituted for indium hydroxide, but there are cases where tin oxide and/or tin hydroxide are coprecipitated with indium hydroxide, and it is also present as tin oxide and/or Or a case where tin hydroxide and indium hydroxide become an amorphous mixture.

如上所述,含錫之氫氧化銦的粒徑在得到氫氧化物的步驟中被決定。具體而言,藉由分別將反應溫度控制在40~90℃的範圍內,將反應時間(全部中和所需時間)控制在20~600分鐘的範圍內,將最終粒子濃度控制在0.01~3mol/L的範圍內,能夠得到具有所希望的粒 徑的含錫之氫氧化銦。 As described above, the particle size of the tin-containing indium hydroxide is determined in the step of obtaining the hydroxide. Specifically, by controlling the reaction temperature in the range of 40 to 90 ° C, respectively, the reaction time (the time required for total neutralization) is controlled within a range of 20 to 600 minutes, and the final particle concentration is controlled to 0.01 to 3 mol. Within the range of /L, it is possible to obtain the desired particles The tin-containing indium hydroxide of the diameter.

其中,當合成例如多結晶ITO粒子的平均長度L為1μm、平均直徑D為0.2μm的含錫之氫氧化銦的棒狀粒子時,將反應溫度設為60℃,將反應時間(全部中和所需時間)設為75分鐘、將最終粒子濃度設為0.5mol/L即可。另一方面,當製造平均長度小於含錫之氫氧化銦的棒狀粒子的粒子時,將反應溫度設定得較低,或將反應時間設定得較短或將粒子濃度設定得較高即可。另外,最終生成的多結晶ITO粒子的尺寸大致上係由該含錫氫氧化物的尺寸決定。即,該含錫氫氧化物變成ITO粒子時,平均長度L及平均直徑D均收縮70~80%左右。 In the case where, for example, rod-shaped particles of tin-containing indium hydroxide having an average length L of polycrystalline ITO particles of 1 μm and an average diameter D of 0.2 μm are synthesized, the reaction temperature is set to 60 ° C, and the reaction time (all neutralization) The time required is set to 75 minutes, and the final particle concentration is set to 0.5 mol/L. On the other hand, when particles of rod-shaped particles having an average length smaller than that of tin-containing indium hydroxide are produced, the reaction temperature is set to be low, or the reaction time is set to be short or the particle concentration is set to be high. Further, the size of the finally formed polycrystalline ITO particles is roughly determined by the size of the tin-containing hydroxide. That is, when the tin-containing hydroxide is converted into ITO particles, the average length L and the average diameter D both shrink by about 70 to 80%.

接著,對作為第2步驟的燒成所得到的含錫之氫氧化銦的步驟進行說明。該燒成步驟的目的是為了由含錫之氫氧化銦生成作為氧化物的ITO、及對所得到的ITO結晶賦予氧缺陷。由此,該燒成步驟為了對ITO的結晶賦予氧缺陷而在混合有惰性氣體和還原性氣體的弱還原環境下進行。通常,作為弱還原環境,使用將氫或一氧化碳、氨氣及醇混合到氮或氦、氬等惰性氣體中而得的混合氣體。混合氣體中的各氣體的混合比率藉由欲賦予到ITO的結晶的氧缺陷量適當決定。但是,若混合氣體的還原力過強,則導致含錫之氫氧化銦成為InO、金屬In等。並且,氫和一氧化碳等的混合比率較佳為設為混合氣體在大氣中不超過爆炸極限的程度的濃度。 Next, the procedure of the tin-containing indium hydroxide obtained by the firing in the second step will be described. The purpose of this firing step is to form ITO as an oxide from tin-containing indium hydroxide and to impart oxygen defects to the obtained ITO crystal. Thus, this baking step is performed in a weakly reducing environment in which an inert gas and a reducing gas are mixed in order to impart oxygen defects to the crystal of ITO. Usually, as a weakly reducing environment, a mixed gas obtained by mixing hydrogen or carbon monoxide, ammonia, and an alcohol into an inert gas such as nitrogen or helium or argon is used. The mixing ratio of each gas in the mixed gas is appropriately determined by the amount of oxygen deficiency of the crystal to be imparted to the ITO. However, if the reducing power of the mixed gas is too strong, the tin-containing indium hydroxide becomes InO, metal In, or the like. Further, the mixing ratio of hydrogen and carbon monoxide or the like is preferably a concentration at which the mixed gas does not exceed the explosion limit in the atmosphere.

在燒成步驟中,係首先進行燒成,接著進行 還原處理。燒成係使含錫之氫氧化銦脫水而成為氧化銦。燒成溫度為300~1000℃。在300℃以上時,能夠得到完全的氧化物。在1000℃以下時,能夠避免ITO粒子之間的劇烈燒結。較佳為燒成溫度為350~800℃以下。燒成時間為0.1小時以上即可,但脫水反應一結束,就不需要再進行燒成。環境設為大氣。 In the firing step, the firing is first performed, followed by Restore processing. In the firing, the tin-containing indium hydroxide is dehydrated to become indium oxide. The firing temperature is 300 to 1000 °C. When it is 300 ° C or more, a complete oxide can be obtained. When it is 1000 ° C or less, severe sintering between ITO particles can be avoided. Preferably, the firing temperature is 350 to 800 ° C or less. The firing time is preferably 0.1 hours or longer, but once the dehydration reaction is completed, it is not necessary to perform further firing. The environment is set to atmosphere.

燒成後的還原處理較佳為在200℃以上且小於500℃的溫度且上述還原環境下進行。若為200℃以上,則能夠賦予氧缺陷,若小於500℃,則由於能夠得到適當的還原力,因此不生成絕緣性的InO。還原處理時間為0.5~5小時。若小於0.5小時,則氧缺陷的形成不充分,即使超過5小時也不會出現優越的變化。經過以上步驟,能夠得到包含本發明的ITO粒子的ITO粉末。如此在向惰性氣體中混合有醇的混合氣體中燒成的ITO粉末中,由於在粉末表面上的OH基多,因此作為後述表面處理劑的矽酸酯或矽烷偶合劑容易與該OH基結合,所以由矽酸酯或矽烷偶合劑進行的表面處理的效果更高,且能夠進一步抑制在高溫高濕下的ITO導電膜的電阻的上升。 The reduction treatment after the firing is preferably carried out at a temperature of 200 ° C or more and less than 500 ° C in the above-mentioned reducing atmosphere. When it is 200 ° C or more, oxygen deficiency can be provided, and if it is less than 500 ° C, since an appropriate reducing power can be obtained, insulating InO is not formed. The reduction treatment time is 0.5 to 5 hours. If it is less than 0.5 hours, the formation of oxygen defects is insufficient, and even if it exceeds 5 hours, no favorable change will occur. Through the above steps, an ITO powder containing the ITO particles of the present invention can be obtained. In the ITO powder fired in the mixed gas in which the alcohol is mixed with the inert gas, since the OH group on the surface of the powder is large, the phthalate or decane coupling agent which is a surface treatment agent described later is easily bonded to the OH group. Therefore, the surface treatment by the phthalate or decane coupling agent has a higher effect, and the increase in the electric resistance of the ITO conductive film under high temperature and high humidity can be further suppressed.

<ITO導電膜形成用塗料的製造方法> <Method for Producing Coating Material for Forming ITO Conductive Film>

相對於添加表面處理劑的醇系溶液100質量%,將上述ITO粉末以1~70質量%的比例進行混合,藉由用攪拌機進行攪拌來製備ITO導電膜形成用塗料。其中,表面處理劑為烷基的碳數為2以下的矽酸酯,或者該表面處理劑 為在末端基具有胺基(-R-NH2、-R-NHR、-R-NR1R2)或巰基(-R-SH)的矽烷偶合劑。其中,R、R1、R2分別為烷基。作為烷基的碳數為2以下的矽酸酯,例示了四甲氧基矽烷或四乙氧基矽烷。並且,作為於末端基具有胺基或巰基的矽烷偶合劑,例示了N-2-(胺乙基)-3-胺丙基三甲氧基矽烷、3-胺丙基三甲氧基矽烷、3-巰丙基甲基二甲氧基矽烷或3-巰丙基三甲氧基矽烷。另外,本發明的矽酸酯較佳為在結合於粒子表面之後,容易以SiO2組成網,且具有複數個酯鍵。 The ITO powder was mixed at a ratio of 1 to 70% by mass based on 100% by mass of the alcohol-based solution to which the surface treatment agent was added, and the coating material for forming an ITO conductive film was prepared by stirring with a stirrer. Wherein, the surface treatment agent is a phthalic acid ester having an alkyl group having a carbon number of 2 or less, or the surface treatment agent has an amine group at the terminal group (-R-NH 2 , -R-NHR, -R-NR 1 R 2 Or a decane coupling agent based on fluorenyl (-R-SH). Wherein R, R 1 and R 2 are each an alkyl group. The phthalic acid ester having 2 or less carbon atoms in the alkyl group is exemplified by tetramethoxy decane or tetraethoxy decane. Further, as a decane coupling agent having an amine group or a mercapto group at the terminal group, N-2-(aminoethyl)-3-aminopropyltrimethoxydecane, 3-aminopropyltrimethoxydecane, and 3- are exemplified. Methyl propyl dimethoxy decane or 3-mercaptopropyl trimethoxy decane. Further, the phthalate ester of the present invention preferably has a network composed of SiO 2 and has a plurality of ester bonds after being bonded to the surface of the particles.

表面處理劑為矽酸酯時,相對於ITO粉末100質量%,該矽酸酯在塗料中的濃度為1~30質量%。並且,表面處理劑為矽烷偶合劑時,相對於ITO粉末100質量%,該矽烷偶合劑在塗料中的濃度為0.1~30質量%。各自的摻合量小於下限值時,無法得到作為目的的抑制ITO導電膜在高溫高濕下的電阻值的上升的效果。並且,若超過上限值,則在形成ITO導電膜時會有表面處理劑阻礙ITO粒子彼此的接觸、導致初期表面電阻變大的問題。 When the surface treatment agent is phthalic acid ester, the concentration of the phthalic acid ester in the coating material is 1 to 30% by mass based on 100% by mass of the ITO powder. Further, when the surface treatment agent is a decane coupling agent, the concentration of the decane coupling agent in the coating material is 0.1 to 30% by mass based on 100% by mass of the ITO powder. When the amount of each of the blending amounts is less than the lower limit value, the effect of suppressing an increase in the electric resistance value of the ITO conductive film under high temperature and high humidity cannot be obtained. In addition, when the ITO conductive film is formed, the surface treatment agent hinders contact between the ITO particles and causes an initial surface resistance to increase.

作為ITO粉末的分散介質,例示了乙醇、2-丁醇及1-丙醇等醇系溶液。相對於該醇系溶液100質量%,以1~70質量%的範圍添加並混合ITO粉末。當小於1質量%時,很難在導電膜形成厚度充分的膜,若超過70質量%,則分散液的黏度較高而難以進行塗佈。並且,根據需要將上述ITO導電膜形成用塗料放入到均質器和珠磨 粉碎機等中,並對該塗料中的ITO粉末進行粉碎處理。進一步,可根據需要在不使電阻惡化的範圍內,將二氧化矽溶膠-凝膠或丙烯酸樹脂等黏合劑添加到上述ITO導電膜形成用塗料中。 As the dispersion medium of the ITO powder, an alcohol-based solution such as ethanol, 2-butanol or 1-propanol is exemplified. The ITO powder is added and mixed in an amount of from 1 to 70% by mass based on 100% by mass of the alcohol-based solution. When it is less than 1% by mass, it is difficult to form a film having a sufficient thickness in the conductive film, and if it exceeds 70% by mass, the viscosity of the dispersion is high and coating is difficult. And, if necessary, the above-mentioned ITO conductive film forming paint is placed in a homogenizer and a bead mill In the pulverizer or the like, the ITO powder in the coating material is pulverized. Further, a binder such as cerium oxide sol-gel or acrylic resin may be added to the coating material for forming an ITO conductive film as long as the electric resistance is not deteriorated.

<ITO導電膜的製造方法> <Method for Producing ITO Conductive Film>

ITO導電膜例如根據如下方法來製造。預先製作用於形成ITO導電膜的基材。該基材為單面塗佈有聚胺基甲酸酯的聚對苯二甲酸乙酯(PET)等的薄膜,且利用雙面膠帶等來將該薄膜中未塗佈有聚胺基甲酸酯的面黏貼到玻璃基板上來製作。首先,藉由棒塗法、模塗法、刮板法等來將ITO導電膜形成用塗料塗佈於固定在玻璃基板上的基材上之後使其乾燥。接著,從玻璃基板剝離塗佈有ITO導電膜形成用塗料的基材,使PET等其他薄膜與基材中ITO導電膜形成用塗料的塗佈面疊合,在該狀態下,藉由輥壓機等在輥壓力100~2000kg/cm、送出速度10~50cm/分鐘的條件下施加壓力之後,剝離其他薄膜。藉此,在薄膜上形成ITO導電膜。 The ITO conductive film is produced, for example, according to the following method. A substrate for forming an ITO conductive film is prepared in advance. The substrate is a film of polyethylene terephthalate (PET) coated with a polyurethane on one side, and the film is not coated with a polyaminocarboxylic acid by a double-sided tape or the like. The surface of the ester is adhered to a glass substrate to be fabricated. First, a coating material for forming an ITO conductive film is applied onto a substrate fixed to a glass substrate by a bar coating method, a die coating method, a doctor blade method, or the like, followed by drying. Then, the substrate coated with the coating material for forming an ITO conductive film is peeled off from the glass substrate, and another film such as PET is laminated on the coated surface of the coating material for forming an ITO conductive film in the substrate, and in this state, by rolling. After the pressure is applied under the conditions of a roller pressure of 100 to 2000 kg/cm and a delivery speed of 10 to 50 cm/min, the other film is peeled off. Thereby, an ITO conductive film is formed on the film.

<ITO導電膜的評估方法> <Evaluation method of ITO conductive film>

關於如上所述得到的透明導電膜,如下對表面電阻進行評估。即,關於如上所述得到的透明導電膜的預先設定的測定點,藉由Mitsubishi Petrochemical Co.,Ltd.製LorestaAPMCP-T400進行測定,且將其測定值設為初期電 阻值。之後,在被控制為85℃、且相對濕度85%RH的恆溫恆濕槽內保管2000小時之後,在設定於初期電阻測定時的測定點中再次測定電阻值,將該等作為加濕後電阻值。並且,根據下述式計算變化率。 Regarding the transparent conductive film obtained as described above, the surface resistance was evaluated as follows. In other words, the measurement points of the transparent conductive film obtained as described above are measured by the Loresta APMCP-T400 manufactured by Mitsubishi Petrochemical Co., Ltd., and the measured value is set as the initial electricity. Resistance value. Thereafter, after storing in a constant temperature and humidity chamber controlled to 85 ° C and a relative humidity of 85% RH for 2,000 hours, the resistance value was measured again at the measurement point set at the initial resistance measurement, and the resistance was measured as a humidification resistance. value. Further, the rate of change was calculated according to the following formula.

變化率=[加濕後電阻值/初期電阻值] Rate of change = [resistance value after humidification / initial resistance value]

[實施例] [Examples]

接著,將本發明的實施例與比較例一同進行詳細說明。 Next, an embodiment of the present invention will be described in detail together with a comparative example.

<實施例1> <Example 1>

向作為分散介質的乙醇39.9g慢慢滴入作為表面處理劑的四甲氧基矽烷0.1g(Tama Chemicals Co.,Ltd.製,商品名:正矽酸甲酯)來製備溶液。將該溶液攪拌30分鐘。將藉由上述方法得到的ITO粉末10g添加到該溶液,且用超音波均質器分散30分鐘來製備ITO導電膜形成用塗料。相對於ITO粉末100質量%,該表面處理劑的濃度為1質量%。根據上述透明導電膜的製造方法,將該ITO導電膜形成用塗料藉由棒塗法成膜於PET薄膜上,且以輥壓力700kg/cm且送出速度30cm/分鐘對該膜施加壓力來得到ITO導電膜。 A solution of 0.1 g of tetramethoxynonane (manufactured by Tama Chemicals Co., Ltd., trade name: methyl n-decanoate) as a surface treatment agent was slowly added dropwise to 39.9 g of ethanol as a dispersion medium. The solution was stirred for 30 minutes. 10 g of the ITO powder obtained by the above method was added to the solution, and dispersed by an ultrasonic homogenizer for 30 minutes to prepare a coating material for forming an ITO conductive film. The concentration of the surface treatment agent was 1% by mass based on 100% by mass of the ITO powder. According to the method for producing a transparent conductive film, the ITO conductive film-forming coating material was formed on a PET film by a bar coating method, and pressure was applied to the film at a roll pressure of 700 kg/cm and a feed rate of 30 cm/min to obtain ITO. Conductive film.

<實施例2> <Example 2>

向作為分散介質的甲醇39g慢慢滴入與實施例1相同的表面處理劑1g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為10質量%。 A solution of 1 g of the same surface treatment agent as in Example 1 was slowly added dropwise to 39 g of methanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 10% by mass based on 100% by mass of the ITO powder.

<實施例3> <Example 3>

向作為分散介質的2-丙醇37g慢慢滴入與實施例1相同的表面處理劑3g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 1 to 37 g of 2-propanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 30% by mass based on 100% by mass of the ITO powder.

<實施例4> <Example 4>

向作為分散介質的1-丁醇39.9g慢慢滴入作為表面處理劑的矽酸酯的低聚物即四甲氧基矽烷的3~5聚體(Tama Chemicals Co.,Ltd.製,商品名:M矽酸鹽51)0.1g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為1質量%。 A 3 to 5 polymer of tetramethoxy decane which is an oligomer of phthalic acid ester as a surface treatment agent (manufactured by Tama Chemicals Co., Ltd., commercially available as a product of 39.9 g of 1-butanol as a dispersion medium) Name: M citrate 51) 0.1 g to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 1% by mass based on 100% by mass of the ITO powder.

<實施例5> <Example 5>

向作為分散介質的甲醇39g慢慢滴入與實施例4相同的表面處理劑1g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為10質量%。 A solution of 1 g of the same surface treatment agent as in Example 4 was slowly added dropwise to 39 g of methanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 10% by mass based on 100% by mass of the ITO powder.

<實施例6> <Example 6>

向作為分散介質的乙醇37g慢慢滴入與實施例4相同的表面處理劑3g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 4 to 37 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 30% by mass based on 100% by mass of the ITO powder.

<實施例7> <Example 7>

向作為分散介質的1-丙醇39.9g慢慢滴入作為表面處理劑的四乙氧基矽烷(Tama Chemicals Co.,Ltd.製,商品名:高純度正矽酸乙酯)0.1g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為1質量%。 It was prepared by slowly dropping 39.9 g of 1-propanol as a dispersion medium into 0.1 g of tetraethoxysilane (manufactured by Tama Chemicals Co., Ltd., trade name: high purity n-decanoic acid ethyl ester) as a surface treatment agent. Solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 1% by mass based on 100% by mass of the ITO powder.

<實施例8> <Example 8>

向作為分散介質的乙醇39g慢慢滴入與實施例7相同的表面處理劑1g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為10質量%。 A solution was prepared by slowly dropping 1 g of the same surface treatment agent as in Example 7 into 39 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 10% by mass based on 100% by mass of the ITO powder.

<實施例9> <Example 9>

向作為分散介質的乙醇37g慢慢滴入與實施例7相同的表面處理劑3g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表 面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 7 into 37 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The table is 100% by mass relative to the ITO powder. The concentration of the surface treatment agent was 30% by mass.

<實施例10> <Example 10>

向作為分散介質的1-丙醇39.9g慢慢滴入作為表面處理劑的矽酸酯的低聚物即四乙氧基矽烷的3~5聚體(Tama Chemicals Co.,Ltd.製,商品名:矽酸鹽40)0.1g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為1質量%。 3 to 5 mer of tetraethoxy decane which is an oligomer of phthalic acid ester as a surface treatment agent (manufactured by Tama Chemicals Co., Ltd., a product of 39.9 g of 1-propanol as a dispersion medium) Name: decanoate 40) 0.1 g to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 1% by mass based on 100% by mass of the ITO powder.

<實施例11> <Example 11>

向作為分散介質的2-丙醇39g慢慢滴入與實施例10相同的表面處理劑1g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為10質量%。 A solution was prepared by slowly dropping 1 g of the same surface treatment agent as in Example 10 to 39 g of 2-propanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 10% by mass based on 100% by mass of the ITO powder.

<實施例12> <Example 12>

向作為分散介質的乙醇37g慢慢滴入與實施例10相同的表面處理劑3g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 10 to 37 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 30% by mass based on 100% by mass of the ITO powder.

<實施例13> <Example 13>

向作為分散介質的乙醇39.99g慢慢滴入作為表面處 理劑的N-2-(胺乙基)-3-胺丙基三甲氧基矽烷(Shin-Etsu Chemical Co.,Ltd.製,商品名:KBM603)0.01g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.1質量%。 Slowly drip 39.99g of ethanol as a dispersion medium as a surface A solution of 0.01 g of N-2-(aminoethyl)-3-aminopropyltrimethoxydecane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBM603) was prepared to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.1% by mass based on 100% by mass of the ITO powder.

<實施例14> <Example 14>

向作為分散介質的2-丁醇39.5g慢慢滴入與實施例13相同的表面處理劑0.5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為5質量%。 A solution was prepared by slowly dropping 0.5 g of the same surface treatment agent as in Example 13 to 39.5 g of 2-butanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 5% by mass based on 100% by mass of the ITO powder.

<實施例15> <Example 15>

向作為分散介質的2-丙醇37g慢慢滴入與實施例13相同的表面處理劑3g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 13 to 37 g of 2-propanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 30% by mass based on 100% by mass of the ITO powder.

<實施例16> <Example 16>

向作為分散介質的甲醇39.99g慢慢滴入作為表面處理劑的3-胺丙基三甲氧基矽烷(Shin-Etsu Chemical Co.,Ltd.製,商品名:KBM903)0.01g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.1質量%。 A solution of 3-aminopropyltrimethoxydecane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBM903) as a surface treatment agent was slowly added dropwise to 39.99 g of methanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.1% by mass based on 100% by mass of the ITO powder.

<實施例17> <Example 17>

向作為分散介質的乙醇39.5g慢慢滴入與實施例16相同的表面處理劑0.5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為5質量%。 A solution was prepared by slowly dropping 0.5 g of the same surface treatment agent as in Example 16 to 39.5 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 5% by mass based on 100% by mass of the ITO powder.

<實施例18> <Example 18>

向作為分散介質的乙醇37g慢慢滴入與實施例16相同的表面處理劑3g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 16 into 37 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 30% by mass based on 100% by mass of the ITO powder.

<實施例19> <Example 19>

向作為分散介質的乙醇39.99g慢慢滴入作為表面處理劑的3-巰丙基甲基二甲氧基矽烷(Shin-Etsu Chemical Co.,Ltd.製,商品名:KBM802)0.01g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.1質量%。 To a solution of 39.99 g of ethanol as a dispersion medium, 0.01 g of 3-mercaptopropylmethyldimethoxydecane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBM802) as a surface treatment agent was added dropwise. Solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.1% by mass based on 100% by mass of the ITO powder.

<實施例20> <Example 20>

向作為分散介質的1-丁醇39.5g慢慢滴入與實施例19相同的表面處理劑0.5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量 %,該表面處理劑的濃度為5質量%。 A solution was prepared by slowly dropping 0.5 g of the same surface treatment agent as in Example 19 to 39.5 g of 1-butanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. 100 mass relative to ITO powder %, the concentration of the surface treatment agent was 5% by mass.

<實施例21> <Example 21>

向作為分散介質的乙醇37g慢慢滴入與實施例19相同的表面處理劑3g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 19 to 37 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 30% by mass based on 100% by mass of the ITO powder.

<實施例22> <Example 22>

向作為分散介質的乙醇39.99g慢慢滴入作為表面處理劑的3-巰丙基三甲氧基矽烷(Shin-Etsu Chemical Co.,Ltd.製,商品名:KBM803)0.01g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.1質量%。 A solution was prepared by slowly dropping 0.01 g of 3-mercaptopropyltrimethoxydecane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBM803) as a surface treatment agent to 39.99 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.1% by mass based on 100% by mass of the ITO powder.

<實施例23> <Example 23>

向作為分散介質的乙醇39.5g慢慢滴入與實施例22相同的表面處理劑0.5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為5質量%。 A solution was prepared by slowly dropping 0.5 g of the same surface treatment agent as in Example 22 to 39.5 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 5% by mass based on 100% by mass of the ITO powder.

<實施例24> <Example 24>

向作為分散介質的乙醇37g慢慢滴入與實施例22相同的表面處理劑3g來製備溶液。除此之外,與實施例1 相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為30質量%。 A solution was prepared by slowly dropping 3 g of the same surface treatment agent as in Example 22 to 37 g of ethanol as a dispersion medium. In addition to this, with the embodiment 1 The ITO conductive film was obtained in the same manner. The concentration of the surface treatment agent was 30% by mass based on 100% by mass of the ITO powder.

<比較例1> <Comparative Example 1>

不向作為分散介質的乙醇40.0g加入表面處理劑,而添加在前述方法中得到的ITO粉末10.0g,用超音波均質器分散30分鐘來得到ITO導電膜形成用塗料。除此之外,與實施例1相同地得到ITO導電膜。 The surface treatment agent was added to 40.0 g of ethanol as a dispersion medium, and 10.0 g of the ITO powder obtained in the above method was added, and the mixture was dispersed by an ultrasonic homogenizer for 30 minutes to obtain a coating material for forming an ITO conductive film. An ITO conductive film was obtained in the same manner as in Example 1 except the above.

<比較例2> <Comparative Example 2>

向作為分散介質的乙醇39.5g慢慢滴入作為表面處理劑的專利文獻2中所記載的矽氮烷化合物即六甲基二矽氮烷(Shin-Etsu Chemical Co.,Ltd.製,商品名:SZ-31)0.5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為5質量%。 The product was produced by Shin-Etsu Chemical Co., Ltd., which is a decazane compound described in Patent Document 2, which is a surface treatment agent, which is gradually added dropwise to 39.5 g of ethanol as a dispersion medium. :SZ-31) 0.5 g to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 5% by mass based on 100% by mass of the ITO powder.

<比較例3> <Comparative Example 3>

向作為分散介質的乙醇39.95g慢慢滴入與實施例1相同的表面處理劑0.05g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.5質量%。 A solution of 0.05 g of the same surface treatment agent as in Example 1 was slowly added dropwise to 39.95 g of ethanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.5% by mass based on 100% by mass of the ITO powder.

<比較例4> <Comparative Example 4>

向作為分散介質的2-丙醇35g慢慢滴入與實施例1相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 1 into 35 g of 2-propanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較例5> <Comparative Example 5>

向作為分散介質的甲醇39.95g慢慢滴入與實施例4相同的表面處理劑0.05g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.5質量%。 A solution of 0.05 g of the same surface treatment agent as in Example 4 was slowly added dropwise to 39.95 g of methanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.5% by mass based on 100% by mass of the ITO powder.

<比較例6> <Comparative Example 6>

向作為分散介質的乙醇35g慢慢滴入與實施例4相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 4 into 35 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較例7> <Comparative Example 7>

向作為分散介質的1-丁醇39.95g慢慢滴入與實施例7相同的表面處理劑0.05g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.5質量%。 A solution was prepared by slowly dropping 0.05 g of the same surface treatment agent as in Example 7 to 39.95 g of 1-butanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.5% by mass based on 100% by mass of the ITO powder.

<比較例8> <Comparative Example 8>

向作為分散介質的乙醇35g慢慢滴入與實施例7相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 7 into 35 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較例9> <Comparative Example 9>

向作為分散介質的乙醇39.95g慢慢滴入與實施例10相同的表面處理劑0.05g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.5質量%。 A solution was prepared by slowly dropping 0.05 g of the same surface treatment agent as in Example 10 to 39.95 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.5% by mass based on 100% by mass of the ITO powder.

<比較例10> <Comparative Example 10>

向作為分散介質的乙醇35g慢慢滴入與實施例10相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 10 into 35 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較例11> <Comparative Example 11>

向作為分散介質的1-丁醇39.999g慢慢滴入與實施例13相同的表面處理劑0.001g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.01質量%。 A solution of 0.001 g of the same surface treatment agent as in Example 13 was slowly added dropwise to 39.999 g of 1-butanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.01% by mass based on 100% by mass of the ITO powder.

<比較例12> <Comparative Example 12>

向作為分散介質的乙醇35g慢慢滴入與實施例13相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 13 into 35 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較例13> <Comparative Example 13>

向作為分散介質的乙醇39.999g慢慢滴入與實施例16相同的表面處理劑0.001g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.01質量%。 A solution of 0.001 g of the same surface treatment agent as in Example 16 was slowly added dropwise to 39.999 g of ethanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.01% by mass based on 100% by mass of the ITO powder.

<比較例14> <Comparative Example 14>

向作為分散介質的乙醇35g慢慢滴入與實施例16相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 16 into 35 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較例15> <Comparative Example 15>

向作為分散介質的乙醇39.999g慢慢滴入與實施例19相同的表面處理劑0.001g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.01質量%。 A solution of 0.001 g of the same surface treatment agent as in Example 19 was slowly added dropwise to 39.999 g of ethanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.01% by mass based on 100% by mass of the ITO powder.

<比較例16> <Comparative Example 16>

向作為分散介質的乙醇35g慢慢滴入與實施例19相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 19 to 35 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較例17> <Comparative Example 17>

向作為分散介質的1-丙醇39.999g慢慢滴入與實施例22相同的表面處理劑0.001g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為0.01質量%。 A solution of 0.001 g of the same surface treatment agent as in Example 22 was slowly added dropwise to 39.999 g of 1-propanol as a dispersion medium to prepare a solution. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 0.01% by mass based on 100% by mass of the ITO powder.

<比較例18> <Comparative Example 18>

向作為分散介質的乙醇35g慢慢滴入與實施例22相同的表面處理劑5g來製備溶液。除此之外,與實施例1相同地得到ITO導電膜。相對於ITO粉末100質量%,該表面處理劑的濃度為50質量%。 A solution was prepared by slowly dropping 5 g of the same surface treatment agent as in Example 22 into 35 g of ethanol as a dispersion medium. An ITO conductive film was obtained in the same manner as in Example 1 except the above. The concentration of the surface treatment agent was 50% by mass based on 100% by mass of the ITO powder.

<比較測試及評估> <Comparative Testing and Evaluation>

關於在實施例1~24及比較例1~18中所得到的ITO導電膜,根據前述評估方法,測定每一個膜之初期電阻值及加濕後電阻值。此外,藉由將加濕後電阻值除以初期電阻值來求出變化率。將其結果示於表1及表2。另外,表1及表2中,用“濃度”表示相對於ITO粉末100質量%的表面處理劑的質量%。 With respect to the ITO conductive films obtained in Examples 1 to 24 and Comparative Examples 1 to 18, the initial resistance value of each film and the resistance value after humidification were measured according to the above evaluation method. Further, the rate of change was obtained by dividing the resistance value after humidification by the initial resistance value. The results are shown in Tables 1 and 2. In addition, in Tables 1 and 2, the "concentration" indicates the mass % of the surface treatment agent with respect to 100 mass % of ITO powder.

如從表1及表2可知,關於分別在沒有添加表面處理劑的比較例1、使用專利文獻2的表面處理劑的 比較例2、以及表面處理劑的摻合比例小於特定範圍的下限值的比較例3、5、7、9、11、13、15及17中得到的ITO導電膜,從初期電阻值到加濕後電阻值的變化率均大至28倍以上。並且,關於在表面處理劑的摻合比例超過特定範圍的上限值的比較例4、6、8、10、12、14、16及18中得到的ITO導電膜,初期電阻值均高至2800Ω/□以上。相對於此,關於在實施例1~24中得到的ITO導電膜,從初期電阻值到加濕後電阻值的變化率均小至20倍以下,並且初期電阻值均低至930Ω/□以下。藉此,根據實施例1~24的ITO導電膜形成用塗料,可知初期電阻值較低,並且即使在高溫高濕下也能夠充分抑制電阻值的上升。 As can be seen from Tables 1 and 2, in Comparative Example 1 in which no surface treatment agent was added, the surface treatment agent of Patent Document 2 was used. Comparative Example 2, and the ITO conductive film obtained in Comparative Examples 3, 5, 7, 9, 11, 13, 15, and 17 in which the blending ratio of the surface treating agent was less than the lower limit of the specific range, from the initial resistance value to the addition The rate of change of the resistance value after wet is as large as 28 times or more. In addition, in the ITO conductive films obtained in Comparative Examples 4, 6, 8, 10, 12, 14, 16, and 18 in which the blending ratio of the surface treatment agent exceeded the upper limit of the specific range, the initial resistance values were as high as 2800 Ω. /□ Above. On the other hand, in the ITO conductive films obtained in Examples 1 to 24, the rate of change from the initial resistance value to the resistance value after humidification was as small as 20 times or less, and the initial resistance values were all as low as 930 Ω/□ or less. According to the coating materials for forming an ITO conductive film of Examples 1 to 24, it is understood that the initial resistance value is low, and the increase in the resistance value can be sufficiently suppressed even under high temperature and high humidity.

10‧‧‧多結晶ITO粒子 10‧‧‧Multicrystalline ITO particles

11‧‧‧棒狀中心核 11‧‧‧ rod center nucleus

12‧‧‧棒狀體 12‧‧‧ rods

Claims (4)

一種ITO導電膜形成用塗料,其係包含ITO粉末、前述ITO粉末的分散介質、與前述ITO粉末的表面處理劑之ITO導電膜形成用塗料,其特徵在於,前述ITO粒子係在棒狀中心核的周圍,短於前述中心核的複數個棒狀體一體形成為沿著與棒狀中心核的長度方向相同的方向且圍繞棒狀中心核而成之多結晶ITO粒子的集合體,前述分散介質為醇系溶液,前述表面處理劑為烷基的碳數為2以下的矽酸酯,或者,前述表面處理劑為於末端基具有胺基或巰基的矽烷偶合劑,相對於前述ITO粉末100質量%,前述矽酸酯含有1~30質量%,或者,相對於前述ITO粉末100質量%,前述矽烷偶合劑含有0.1~30質量%。 A coating material for forming an ITO conductive film, comprising: an ITO powder; a dispersion medium of the ITO powder; and a coating material for forming an ITO conductive film with a surface treatment agent of the ITO powder, wherein the ITO particles are in a rod-shaped central core a plurality of rod-shaped bodies shorter than the central core are integrally formed as an aggregate of polycrystalline ITO particles which are formed in the same direction as the longitudinal direction of the rod-shaped central core and surround the rod-shaped central core, the dispersion medium In the alcohol-based solution, the surface treatment agent is a phthalic acid ester having an alkyl group having 2 or less carbon atoms, or the surface treatment agent is a decane coupling agent having an amine group or a fluorenyl group at a terminal group, and is 100 mass with respect to the ITO powder described above. %, the phthalic acid ester is contained in an amount of 1 to 30% by mass, or the decane coupling agent is contained in an amount of 0.1 to 30% by mass based on 100% by mass of the ITO powder. 如請求項1之ITO導電膜形成用塗料,其中前述矽酸酯為具有碳數為1的烷基之四甲氧基矽烷或具有碳數為2的烷基之四乙氧基矽烷。 The coating material for forming an ITO conductive film according to claim 1, wherein the phthalic acid ester is tetramethoxy decane having an alkyl group having 1 carbon atom or tetraethoxy decane having an alkyl group having 2 carbon atoms. 如請求項1之ITO導電膜形成用塗料,其中前述矽烷偶合劑為N-2-(胺乙基)-3-胺丙基三甲氧基矽烷、3-胺丙基三甲氧基矽烷、3-巰丙基甲基二甲氧基矽烷或3-巰丙基三甲氧基矽烷。 The coating material for forming an ITO conductive film according to claim 1, wherein the decane coupling agent is N-2-(aminoethyl)-3-aminopropyltrimethoxydecane, 3-aminopropyltrimethoxydecane, 3- Methyl propyl dimethoxy decane or 3-mercaptopropyl trimethoxy decane. 一種ITO導電膜的形成方法,其係使用如請求項1~3中任一項之塗料來形成ITO導電膜。 A method of forming an ITO conductive film by using the coating material according to any one of claims 1 to 3 to form an ITO conductive film.
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