TWI597183B - A piezoelectric inkjet print head having a plurality of vibrating pieces - Google Patents

Description

Piezoelectric inkjet head having a plurality of actuator sheets

The present invention relates to a piezoelectric ink jet head, and more particularly to a piezoelectric ink jet head having a plurality of actuating sheets.

With the advancement of inkjet technology, inkjet technology is no longer only used in the traditional printing market. In recent years, it has been applied to the process technology of flat panel display and semiconductor industry. However, in order to reduce costs and save process time, new ones are sought. Inkjet technology, the most widely used of these, is piezoelectric inkjet technology.

Please refer to FIGS. 1A and 1B, wherein FIG. 1A is a schematic plan view of a conventional piezoelectric inkjet head, and FIG. 1B is a cross-sectional view of AA of FIG. 1A. As shown in FIG. 1A, a conventional piezoelectric spray is shown. The ink head 1 has a liquid supply flow path 11 through which a fluid flows, and a single movable piece 12, and as shown in FIG. 1B, the conventional piezoelectric ink jet head 1 further includes a pressure chamber 13 and an outlet flow path 14. And a micro-structure such as the orifice plate 15 having the injection hole 151, and a vibrating plate 16 is disposed above the microstructures of the pressure chamber 13, the liquid outlet flow path 14, and the injection hole 151, and is above the vibration plate 16, and The single actuator piece 12 is disposed corresponding to the position of the pressure chamber 13.

When a voltage is applied to the upper and lower poles of the actuating piece 12, an electric field is generated, so that the actuating piece 12 is subjected to bending deformation under the action of the electric field. Since the actuating piece 12 is disposed on the vibrating plate 16, actuation is performed. The suction and thrust generated by the sheet 12 are transmitted to the vibrating plate 16, so that the vibrating plate 16 is also pressed and deformed. When the actuating sheet 12 generates suction, the fluid will pass through The liquid flow path 11 enters the pressure chamber 13 inside the piezoelectric ink jet head 1. When the actuating piece 12 generates a thrust, the fluid stored in the pressure chamber 13 is sent to the pressure chamber 13 by being pressed to The liquid discharge passage 14 is ejected through the injection hole 151.

Referring to FIGS. 1A and 1B again, the actuator 12 used in the conventional piezoelectric inkjet head 1 has a size of 2700 um x 2700 um, and the orifice plate 15 is only matched with one orifice 151, and the orifice 151 is opposite to the actuation sheet. 12 is symmetrical or centered with a pore size between 30 and 120 um. Please refer to FIG. 2 , which is a schematic diagram of a driving signal of a conventional piezoelectric inkjet head. The driving signal V used by the conventional piezoelectric inkjet head 1 is mainly 30V, that is, the peak is +30V, and the trough is -30V.

The conventional piezoelectric inkjet head 1 uses a single pressure chamber 13 and a single actuation piece 12, that is, one pressure chamber 13 is provided with an actuation piece 12, although different sizes can be printed by adjusting the drive signal and Viscosity fluids, but lack of versatility, limit the applicable fluids. The conventional piezoelectric inkjet head 1 can print a low-viscosity fluid such as pure water when the size of the actuating sheet 12 is about 1400000 um2, but if it is desired to be suitable for a higher viscosity fluid, the industry currently adopts a direct configuration of a large size actuator. Sheet 12 addresses the above-mentioned conventional deficiencies, such as the use of a 3750 um x 3750 um actuator 12 size, which is about 10 times the aforementioned printable area of 1400000 um2, so that the actuator sheet 12 can be simultaneously applied to fluids of various viscosities. For printing, but this solution requires a large driving signal to drive the actuator 12 to operate, so that only low-voltage driving is required when printing low-viscosity fluids or small-sized droplets. The signal can be printed, but it is conventional to output an excessive drive signal to drive the actuator 12 to print a low viscosity fluid, which will result in wasted energy.

Therefore, how to develop a piezoelectric ink jet head having a plurality of actuating sheets which can improve the above-mentioned conventional techniques is an urgent problem to be solved.

The main purpose of the present invention is to provide a piezoelectric ink jet head having a plurality of actuating sheets, which solves the problem that the conventional piezoelectric ink jet head is configured with a large-sized actuating sheet for fluid printing of various different viscosities, but The driving signal can be driven by a large driving signal, so that excessive driving signals when printing low-viscosity droplets may cause unnecessary energy waste.

In order to achieve the above object, a generalized embodiment of the present invention provides a piezoelectric ink jet head including at least one ink jet unit and a liquid supply flow channel, the ink jet unit including a pressure chamber and a vibration plate, wherein The pressure chamber is connected to the liquid supply flow channel, and the vibration plate is adjacent to the pressure chamber; a spray orifice plate, and the spray orifice plate respectively forms a spray hole corresponding to each of the ink jet units, and the spray hole and the spray hole The pressure chamber is connected to the liquid supply flow path for printing the liquid droplets; and the actuating unit is disposed on the vibration plate and corresponds to the pressure chamber, and the actuation unit comprises a plurality of actuations formed by cutting Each of the actuating plates receives a driving signal actuation; wherein each of the actuating plates selectively receives the driving signal to drive the plurality of actuating plates to operate at a plurality of frequencies, the driving signals being according to the aperture of the nozzle holes The droplet characteristics are adjusted so that the orifices print droplets of different sizes and different viscosities.

1, 2, 3, 7, 8, 9‧‧‧ Piezoelectric inkjet heads

12‧‧‧Acoustic film

13, 23‧‧‧ Pressure chamber

14, 24‧‧‧ liquid flow channel

15, 25‧‧‧ orifice plate

151, 251, 74, 83, 93‧‧ ‧ orifice

16, 26‧‧‧ vibrating plate

22, 32, 73, 82, 92‧‧‧ actuation unit

221, 321‧‧‧ first actuating film

222, 322‧‧‧second actuating film

323‧‧‧third actuating film

11, 21, 71‧‧‧ liquid supply channels

72, 811, 812, 813, 814, 911, 912, 913, 914 ‧ ‧ inkjet units

731, 732, 733, 734, 821, 822, 823, 824, 921, 922, 923, 924‧‧‧ actuation

75‧‧‧ Positioning marks

X1, X2, X3, X4‧‧‧ length

Y1, Y2, Y3‧‧‧ width

V‧‧‧ motion signal

X5, X6, X8, Y4, Y6, Y8, Y10, Y11, Y13‧‧‧ cutting distance

X7, Y5, Y7, Y9, Y12‧‧‧ spacing

L1~L10, C1~C8‧‧‧ cutting line

Cutting steps of S71-S75, S81-S86, S91-96‧‧‧ Piezoelectric inkjet head actuator

Fig. 1A is a schematic plan view of a conventional piezoelectric ink jet head.

Fig. 1B is a cross-sectional view taken along line A-A of Fig. 1A.

Fig. 2 is a schematic diagram of a driving signal of a conventional piezoelectric ink jet head.

Fig. 3A is a plan view showing the piezoelectric ink jet head of the first preferred embodiment of the present invention.

Fig. 3B is a cross-sectional view taken along line B-B of Fig. 3A.

4A to 4E are schematic diagrams showing driving signals of the piezoelectric ink jet head shown in Fig. 3A.

Fig. 5A is a plan view showing the piezoelectric ink jet head of the second preferred embodiment of the present invention.

Figure 5B is a cross-sectional view taken along line C-C of Figure 5A.

6A to 6I are schematic diagrams showing driving signals of the piezoelectric ink jet head shown in Fig. 5A.

Fig. 7A is a schematic view showing the cutting of the piezoelectric ink jet head of the third preferred embodiment of the present invention.

Fig. 7B is a flow chart showing the cutting method of the piezoelectric ink jet head actuating sheet of the third preferred embodiment of the present invention.

Fig. 7C is a schematic view showing the piezoelectric ink jet head of the third preferred embodiment of the present invention.

Fig. 8A is a schematic view showing the cutting of the piezoelectric ink jet head of the fourth preferred embodiment of the present invention.

Fig. 8B is a flow chart showing the cutting method of the piezoelectric ink jet head actuating sheet of the fourth preferred embodiment of the present invention.

Fig. 8C is a schematic view showing a piezoelectric ink jet head of a fourth preferred embodiment of the present invention.

Fig. 9A is a schematic view showing the cutting of the piezoelectric ink jet head of the fifth preferred embodiment of the present invention.

Fig. 9B is a flow chart showing the cutting method of the piezoelectric ink jet head actuating sheet of the fifth preferred embodiment of the present invention.

Fig. 9C is a schematic view showing the piezoelectric ink jet head of the fifth preferred embodiment of the present invention.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in the various aspects of the present invention, and the description and illustration are in the nature of

Please refer to FIGS. 3A and 3B , wherein FIG. 3A is a plan view of the piezoelectric inkjet head of the first preferred embodiment of the present invention, and FIG. 3B is a BB cross-sectional view of FIG. 3A, as shown in the figure. The piezoelectric inkjet head 2 of the embodiment has a liquid supply flow path 21 through which a fluid flows, at least one ink ejection unit, an ejection flow path 24, a orifice plate 25, and an actuation unit 22, which are actuated in this embodiment. The unit 22 includes a first actuation piece 221 and a second actuation piece 222 formed by cutting, and the orifice plate 25 respectively forms an injection hole 251 for printing ink droplets for printing ink droplets, and the inkjet unit The pressure chamber 23 and the vibration plate 26 are connected, and the pressure chamber 23 is connected to the injection hole 251 and the liquid supply channel 21, and The vibrating plate 26 is disposed above the microstructures of the pressure chamber 23, the liquid outlet channel 24, and the injection hole 251. The vibrating plate 26 is disposed adjacent to the pressure chamber 23 and above the vibrating plate 26 and corresponds to the pressure chamber. The first actuating piece 221 and the second actuating piece 222 are disposed at a position of the body 23.

Referring to FIG. 3A again, the first actuation piece 221 and the second actuation piece 222 of the preferred embodiment are formed by cutting the actuation piece shown in FIG. 1A in a cross-cut manner by a laser cutting device. The lengths of the two are the same, and the widths Y1 and Y2 are the same. In this embodiment, the length X can be, but is not limited to, 3800um, and the widths Y1 and Y2 can be, but are not limited to, 1900um, of course, the first actuation The size of the piece 221 and the second actuating piece 222 are not limited thereto, and the sizes of the two pieces may be different. The wafer cutting device can be used to cut out the required size according to requirements.

The first actuating piece 221 and the second actuating piece 222 of the present invention are a piezoelectric plate, and can be manufactured by using a piezoelectric powder of a high-voltage electric coefficient lead zirconate titanate (PZT) series.

Referring to FIG. 3B, the first actuation piece 221 and the second actuation piece 222 can respectively receive a driving signal V and operate by respectively applying a driving signal V to the first actuation. The upper and lower poles of the piece 221 and the second actuating piece 222 are used to generate an electric field, so that the first actuating piece 221 and the second actuating piece 222 are bent and deformed by the electric field, because the first actuating piece 221 and The second actuating piece 222 is disposed on the vibrating plate 26, so that the suction force and the thrust generated by the first actuating piece 221 and the second actuating piece 222 are transmitted to the vibrating plate 26, so that the vibrating plate 26 is also pressed. Deformation, when the first actuating piece 221 and the second actuating piece 222 generate suction force, that is, expand and deform upward, the fluid will enter the pressure chamber 23 inside the piezoelectric inkjet head 2 via the liquid supply flow path 21, when When the first actuating piece 221 and the second actuating piece 222 generate a thrust, that is, the downward pressing deformation, the fluid stored in the pressure chamber 23 will be transferred to the liquid discharge channel by the pressure chamber 23 being squeezed. 24 is ejected through the injection hole 251.

Referring to FIGS. 3A and 3B , the first actuating piece 221 and the second actuating piece 222 are disposed above and below, so that the first actuating piece 221 and the second actuating piece 222 can selectively receive the same. The driving signal V is driven to drive the first actuating plate 221 and the second actuating plate 222 to operate at a plurality of frequencies, and the driving signal V is adjusted according to the aperture and the droplet characteristics of the nozzle hole 251, so that the nozzle hole 251 is printed differently. The droplets of different sizes and different viscosities, that is, selectively driving at least one of the first actuating sheet 221 and the second actuating sheet 222 by different driving signals V, can achieve different printing The use of different drive signals V to drive at least one of the first actuation piece 221 and the second actuation piece 222 to operate, as well as the requirements of different sizes of fluids and different printing speeds, and The achievable function is shown in FIG. 3B and FIG. 4A and FIG. 4B. In this embodiment, one of the first actuation piece 221 and the second actuation piece 222 can receive the drive signal V separately to control only The single actuation piece is actuated, that is, the first actuation piece 221 is separately driven and the second actuation piece 222 is not operated (as shown in FIG. 4A), or the second actuation piece 222 is separately driven and the first actuation piece is driven. 221 does not work (as shown in FIG. 4B), so that the nozzle hole 251 can be sprayed out of small size or low viscosity. In the embodiment, the first actuation piece 221 and the second actuation piece 222 can simultaneously receive the drive signal V of the in-phase displacement to make the two together. The phase shifting is performed to enable the nozzle 251 to eject large-sized or high-viscosity droplets; please refer to FIGS. 3B and 4D. In this embodiment, the first actuating sheet 221 and the second actuating sheet 222 can simultaneously Receiving the driving signal V of the reverse displacement, so that the two actuate in reverse displacement, that is, the first actuating piece 221 and the second actuating piece 222 are in an up-and-down reverse displacement action, which can be achieved by the user. The nozzle 251 is required to eject a droplet of a desired size or viscosity; please refer to FIGS. 3B and 4E. In this embodiment, the first actuation piece 221 and the second actuation piece 222 can receive the drive signal V in turn. In order to make the two actions in turn to increase the ink jet frequency of the single nozzle hole 251 to twice, the effect of increasing the ink jet speed can be achieved; the above-mentioned nozzle hole 251 has a hole diameter of between 30 and 120 um, and the above driving The voltage value of signal V can be mainly +/- 30V, but it can be adjusted to, for example, +/- according to requirements. 50V, of course, the voltage value of the drive signal V is not limited to the above +/- 30V or +/- 50V can be adjusted according to demand.

5A and 5B, wherein FIG. 5A is a plan view of a piezoelectric inkjet head according to a second preferred embodiment of the present invention, and FIG. 5B is a CC cross-sectional view of FIG. 5A, as shown in FIG. 5A. The piezoelectric inkjet head 3 of the present embodiment has a liquid supply path 21 and an actuation unit 32. In this embodiment, the actuation unit 32 includes a first actuation piece 321 and a second actuation piece formed by cutting. 322 and the third actuation piece 323, as shown in FIG. 5B, the piezoelectric inkjet head 3 further includes a pressure chamber 23, an outlet flow path 24, an orifice plate 25 having a spray hole 251, and a vibration plate 26. The microstructure, wherein the liquid supply passage 21, the single pressure chamber 23, the liquid outlet passage 24, the orifice plate 25 having the injection hole 251, and the vibrating plate 26 are disposed and the purpose and function can be achieved. It is described in detail in the first preferred embodiment, and therefore will not be described again.

Compared with the first embodiment, the piezoelectric inkjet head 3 of the present embodiment includes a first actuation piece 321, a second actuation piece 322, and a third actuation piece 323, and as shown in FIG. 5B, the first The actuating piece 321 , the second actuating piece 322 and the third actuating piece 323 are disposed above the vibrating plate 26 and corresponding to the position of the pressure chamber 23 , and the three are arranged adjacent to each other The second actuation piece 322 is disposed between the first actuation piece 321 and the third actuation piece 323, so that the injection hole 251 is correspondingly disposed on the second actuation piece 322, and can be longitudinally cut by using a laser cutting device. The method is formed by, for example, the actuating sheet shown in FIG. 1A, and the lengths X2, X3, and X4 of the three are similar, and the width Y3 is the same. In this embodiment, the lengths X2, X3, and X4 are respectively 1266um. 1268um, 1266um, the width Y3 may be, but not limited to, 3800um. Of course, the sizes of the first actuation piece 321, the second actuation piece 322 and the third actuation piece 323 are not limited thereto, and the size may also be Differently, the wafer cutting device can be used to cut out the required size as needed.

As for the first actuation piece 321 , the second actuation piece 322 , and the third actuation piece 323 , the piezoelectric plate can be made of piezoelectric powder of high-voltage electric coefficient lead zirconate titanate (PZT) series. Cheng, and The mode of operation and the purpose and function that can be achieved are detailed in the first preferred embodiment and therefore will not be described again.

Please refer to FIG. 5A and FIG. 5B again. Since the present embodiment only includes a single pressure chamber 23, and the first actuation piece 321, the second actuation piece 322 and the third actuation piece 323 are disposed adjacent to each other, The second actuation piece 322 is disposed between the first actuation piece 321 and the third actuation piece 323, so that the injection hole 251 is correspondingly disposed on the second actuation piece 322, so that the first actuation piece 321 can be The second actuation piece 322 and the third actuation piece 323 selectively receive the driving signal V to drive the first actuation piece 321 , the second actuation piece 322 and the third actuation piece 323 to operate at a plurality of different frequencies. The nozzle hole 251 is sprayed with droplets of different sizes and different viscosities, that is, the first actuation piece 321 , the second actuation piece 322 and the third actuation piece 323 are selectively driven by different driving signals V. At least one actuating plate can be operated to meet the requirements of different printing sizes, fluids with different viscosities, and different printing speeds. The following will exemplify the use of different driving signals V to drive the first actuating plate 321 and the second actuating plate. At least one of the 322 and the third actuation piece 323 operates, and the achievable effect: see section 5 B and the 6A, 6B, and 6C diagrams. In this embodiment, one of the first actuation piece 321, the second actuation piece 322, and the third actuation piece 323 receives the drive signal V separately to control only the single An actuating piece is actuated in the vibrating area, that is, the first actuating piece 321 is separately driven, and the second actuating piece 322 and the third actuating piece 323 are not operated (as shown in FIG. 6A), and the second actuating piece is separately driven. 322, the first actuation piece 321 and the third actuation piece 323 do not operate (as shown in FIG. 6B) or separately drive the third actuation piece 323 without the first actuation piece 321 and the second actuation piece 322 Operation (as shown in FIG. 6C), the nozzle hole 251 can be sprayed with a small size or a low viscosity droplet, but if the nozzle hole 251 is opposite to the first actuation piece 321, the second actuation piece 322, and the third Preferably, the area formed by the movable piece 323 is centered, and it is preferable to drive the second actuating piece 322.

Referring to FIG. 5B and FIG. 6D , in the embodiment, the first actuation piece 321 , the second actuation piece 322 , and the third actuation piece 323 can simultaneously receive the drive signal V of the in-phase displacement, so that the three By moving in phase, it is possible to cause the orifice 251 to eject large or high-viscosity droplets.

Referring to FIGS. 5B and 6E, 6F and 6G, in the embodiment, two of the first actuation piece 321, the second actuation piece 322 and the third actuation piece 323 receive the drive signal V, so that A plurality of actuation pieces of the plurality of actuation pieces act to simultaneously drive the first actuation piece 321 and the second actuation piece 322 while the third actuation piece 323 does not operate (as shown in FIG. 6E), or simultaneously Driving the second actuation piece 322 and the third actuation piece 323 while the first actuation piece 321 does not operate (as shown in FIG. 6F), or simultaneously drives the first actuation piece 321 and the third actuation piece 323 The second actuating sheet 322 does not operate (as shown in Fig. 6F), so that the orifice 251 can be ejected with a medium size or moderately sized droplet.

Referring to FIG. 5B and FIG. 6H , in the embodiment, the first actuation piece 321 , the second actuation piece 322 , and the third actuation piece 323 receive the drive signal V at the same time, and the two adjacent actuations are performed. The reverse displacement displacement between the two sheets is performed, that is, the reverse displacement action between the two adjacent actuation pieces is performed, wherein the first actuation piece 321 and the third actuation piece 323 are displaced in the same direction, and the second actuation is performed. The sheets 322 are displaced in opposite directions to allow the orifices 251 to eject droplets of the desired size or viscosity as desired by the user.

Referring to FIGS. 5B and 6I, in the embodiment, the first actuating piece 321, the second actuating piece 322, and the third actuating piece 323 receive the driving signal V in turn, so that the three act in turn. In order to increase the ink jet frequency of the single nozzle 251 to three times, the effect of increasing the ink jet speed can be achieved.

The voltage value of the driving signal V may be +/- 30V, but not limited thereto, and may be adjusted to, for example, +/- 50V according to requirements. Of course, the voltage value of the driving signal V is not limited to the above +/- 30V. Or +/- 50V can be adjusted as needed.

The size of the plurality of actuators included in the piezoelectric inkjet head of the present invention is not limited to be substantially the same, and may be cut into different sizes by the wafer cutting device, and cut into the first form as shown in FIG. 5A. The three pieces of the movable piece 321 , the second actuating piece 322 and the third actuating piece 323 are taken as an example, wherein the volume of the second actuating piece 322 disposed in the intermediate portion may be larger than the first actuating piece 321 and the third actuating The sheet 323, at this time, only the second actuation piece 322 which is individually driven to the intermediate block can be ejected as a principle.

Similarly, the number of actuators included in the piezoelectric inkjet heads 2, 3 of the present invention is not limited to 2 or 3 as shown in Figures 3A and 5A, and the desired area can be cut out using a wafer cutting device as needed. The number of blocks is only required to drive the actuators closer to the nozzles to be ink-jettable, and the actuators disposed in other blocks are only adapted to increase the total area of the actuators that are effectively driven, thereby ejecting various sizes or viscosities. Droplets.

It can be seen from the above that the piezoelectric ink jet head of the present invention configures a plurality of actuating sheets by a single pressure chamber, and adjusts the driving signals according to different requirements to simultaneously drive one or more of the actuating sheets, that is, different for printing. Dimensions, droplets with different viscosities, and different inkjet frequency requirements allow the case to flexibly match the number of drive actuators and the voltage value of the drive signal to achieve the goal, such as reducing the amount of low-viscosity droplets. The number of moving parts and the voltage value of the driving signal can meet the demand, and the method of reducing the voltage value of the driving signal can avoid unnecessary energy waste, and the comparison is made by using the same total actuation area. The technology only uses a single actuator to limit the size of the printable droplets. In contrast, in this case, the number of actuations of the actuator can be controlled according to the demand to achieve the requirement of printing more droplets of different sizes to enhance the general purpose. Sex.

Please refer to FIG. 7A and FIG. 7B , wherein FIG. 7A is a schematic structural view of a piezoelectric inkjet head according to a third preferred embodiment of the present invention, and FIG. 7B is a piezoelectric inkjet head according to a third preferred embodiment of the present invention. The flow chart of the cutting method of the actuating piece, as shown in Fig. 7A, the piezoelectric ink jet head 7 of the present case is more than one The layer structure is mainly formed by stacking a vibrating plate and a plurality of plates (not shown), and the piezoelectric ink jet head 7 has a liquid supply flow path 71 and a plurality of ink jet units 72, wherein In an embodiment, the actuation areas of the plurality of ink ejection units 72 are distributed in four different quadrants but are not symmetrically disposed with each other, and each of the ink ejection units 72 has a pressure chamber (not shown), and The piezoelectric inkjet head 7 further includes an orifice plate (not shown) having the plurality of orifices 74. Each of the inkjet units 72 is provided with a corresponding orifice 74, and the pressure of each of the inkjet units 72. The chambers are connected to the liquid supply flow path 71, so that the printing fluid can flow into the pressure chamber from the liquid supply flow path 71, and the actuating unit 73 is disposed at the pressure chamber of the plurality of ink jet units 72. The actuating unit 73 can be formed by, but not limited to, a lead zirconate Titanate (PZT) piezoelectric material, and the actuating unit 73 can be cut by a cutting device, so that the actuating unit 73 corresponds to Each of the pressure chambers of the ink jet unit 72 produces a uniform moving piece, that is, the actuating pieces 731, 73 shown in FIG. 7A. 2, 733, 734, actuation pieces 731, 732, 733, 734 are respectively formed on the pressure chamber of the plurality of ink ejection units 72, and selectively receive a driving signal V to operate, and each of the injection holes 74 respectively The relative positions of the corresponding actuation pieces 731, 732, 733, and 734 are substantially centered.

Wherein, the volume of each pressure chamber is substantially proportional to the size of the actuating sheets 731, 732, 733, 734 and the aperture of each of the injection holes 74, whereby the respective actuation pieces 731, 732, 733, 734 are selectively received. The driving signal V is adjusted according to the aperture and the droplet characteristics of each of the injection holes 74 to drive the plurality of actuation pieces 731, 732, 733, and 734 to operate at a plurality of frequencies, so that the injection holes 74 are printed differently. Droplets of different sizes and viscosities.

Please refer to FIG. 7B , which is a flow chart of a method for cutting a piezoelectric ink jet head actuating sheet according to a third preferred embodiment of the present invention. As shown in the figure, the piezoelectric ink jet head actuating sheet of the embodiment is The cutting method comprises the following steps: First, a piezoelectric ink jet head 7 is provided which has a liquid supply flow path 71 and a plurality of ink jet units 72, wherein the plurality of ink jet units 72 respectively have a liquid supply flow path 71 is connected to one of the pressure chambers, and an injection hole 74 is formed in each of the ink ejection units 72 (as shown in step S71), and in the embodiment, the plurality of ink ejection units 72 may be, but are not limited to, Arranged in four quadrants respectively, and then an actuating unit 73 is disposed above the pressure chambers of the plurality of ink jet units 72. The actuating unit 73 includes a plurality of actuating sheets 731, 732, 733, 734 and is actuated. The sheets 731, 732, 733, and 734 are respectively formed on the pressure chambers of the plurality of ink ejection units 72, and selectively receive the driving signal V to be actuated, and the respective injection holes 74 are respectively formed on the corresponding actuation sheets 731 and 732. 733, 734 is approximately in the relative position of the center (as shown in step S72), and then the actuation area of the actuation pieces 731, 732, 733, 734 is set, and a plurality of labels can be marked on the piezoelectric inkjet head 7. The positioning mark 75 is, for example, marked with an L-shaped positioning mark 75 by a scribe line, and the actuation unit 73 is fixed in a range formed by the plurality of positioning marks 75, so that the actuation unit 73 can be correspondingly disposed in the plural number. Above the pressure chamber of the ink jet unit 72 (as shown in step S73), of course, the actuating unit 73 The positioning method is not limited to the positioning of the positioning mark 75 by the scribe line, and the positioning mark 75 is not limited to the L shape, and any actuation unit 73 can be fixed above the pressure chamber of the plurality of ink ejection units 72. The methods are the scope of protection in this case.

Next, the cutting unit 73 is cut by a cutting device according to the area of each of the actuating sheets set in step S73 (as shown in step S74), so that the actuating unit 73 corresponds to each of the pressure chambers. Whereas, the actuating blades 731, 732, 733, 734 (shown in step S75) shown in FIG. 7A are respectively generated, whereby the pressure chambers respectively have a predetermined area of the actuating piece 731, 732, 733, 734, and selectively receiving the driving signal V to operate, the driving signal V is adjusted according to the aperture and the droplet characteristics of each of the injection holes 74 to drive the actuation pieces 731, 732, 733, 734 to operate at a plurality of frequencies, so that The actuation pieces 731, 732, 733, and 734 are selected to act on droplets of different sizes and different viscosities.

The cutting device used in this embodiment may be, but is not limited to, a wafer cutting device, such as a laser machine. Finally, the actuation unit 73 is other than the actuation pieces 731, 732, 733, and 734. The waste material is removed to form the piezoelectric ink jet head 7 as shown in Fig. 7C.

In this embodiment, the actuation pieces 731, 732, 733, 734 can be of different sizes and are square structures and distributed in four different quadrants, for example, if the actuation piece 12 of FIG. 1A is The actuation area is 10 units, and the actuation areas of the actuation pieces 731, 732, 733, 734 shown in FIG. 7A can be about 3, 5, 8, 10 units, respectively, and each ink ejection unit 72 The aperture of the orifice 74 is substantially proportional to the volume of the corresponding pressure chamber and the actuation area of the inkjet unit 72, that is, the aperture of the orifice 74 of each inkjet unit 72 is substantially the same as the actuation tabs 731, 732, 733. The size of the 734 and the volume of the pressure chamber are proportional to each other. The apertures of the injection holes 74 corresponding to the actuation pieces 731, 732, 733, and 734 may be, for example, 30, 45, 60, 90 um, respectively. Of course, the actuation piece 731, The actuation area of 732, 733, and 734 and the corresponding aperture size of the injection hole 74 are not limited thereto, and may be changed according to actual needs.

Please refer to FIG. 8A and FIG. 8B , wherein FIG. 8A is a schematic view showing the cutting of the piezoelectric inkjet head according to the fourth preferred embodiment of the present invention, and FIG. 8B is a piezoelectric inkjet head according to a fourth preferred embodiment of the present invention. A flow chart of the cutting method of the actuating piece, as shown in FIG. 8A, the piezoelectric ink jet head 8 of the present embodiment is a multi-layer structure, which is also composed of a vibrating plate and a plurality of plates (not shown). The piezoelectric inkjet head 8 has a liquid supply flow path 71 and a plurality of ink ejection units 811, 812, 813, 814. In the embodiment, the plurality of ink ejection units 811, 812 813, 814 are arranged symmetrically with each other in a longitudinally aligned manner, but not limited thereto, and may be changed to be symmetrically arranged in a lateral arrangement according to requirements, and the inkjet units 811, 812, 813, and 814 have respectively a pressure chamber (not shown), the pressure chambers are equidistantly equidistant in one direction and unequal in the other direction, and the piezoelectric inkjet head 8 further comprises a spray having the plurality of nozzles 83 Orifice plates (not shown), respectively, in the inkjet units 811, 812, 813, 814 Correspondingly, an injection hole 83 is disposed, and the pressure chambers of the inkjet units 811, 812, 813, and 814 are all in communication with the liquid supply flow path 71, so that the printing fluid can flow into the pressure chamber from the liquid supply flow path 71. And an actuating unit 82 is disposed at the pressure chamber of the inkjet units 811, 812, 813, and 814, wherein the actuating unit 82 can be, but is not limited to, a lead zirconate Titanate (PZT) piezoelectric material. Forming, the actuation unit 82 can be cut by a cutting device, so that the actuation unit 82 respectively generates a consistent motion piece corresponding to the pressure chamber of each of the ink ejection units 811, 812, 813, 814, ie, Actuating plates 821, 822, 823, 824 shown in Figures 8A and 8C, actuating plates 821, 822, 823, 824 are formed on the pressure chambers of the ink jet units 811, 812, 813, 814, respectively, and actuated The length ratio of the pieces 821, 822, 823, and 824 is 2 or less, and selectively receives a driving signal V to be respectively activated, and each of the injection holes 83 is formed in the corresponding actuating piece 821, 822, 823, and 824, respectively. The relative position of the center.

The volume of each pressure chamber is substantially proportional to the size of the actuating plates 821, 822, 823, and 824 and the aperture of each of the injection holes 83, whereby each of the actuating plates 821, 822, 823, and 824 is selectively received. The driving signal V is adjusted according to the aperture and the droplet characteristics of each of the injection holes 83 to drive the plurality of actuation pieces 821, 822, 823, and 824 to operate at a plurality of frequencies, so that the injection holes 83 are printed differently. Droplets of different sizes and viscosities.

Please refer to FIGS. 8A and 8B, wherein FIG. 8B is a flow chart of a method for cutting a piezoelectric inkjet head actuating sheet according to a fourth preferred embodiment of the present invention. As shown in the figure, the piezoelectric inkjet of the embodiment is shown. The cutting method of the head actuating sheet comprises the following steps: First, a piezoelectric ink jet head 8 is provided which has a liquid supply flow path 71 and ink jet units 811, 812, 813, 814, wherein the ink jet units 811, 812 813 and 814 respectively have a pressure chamber connected to the liquid supply flow path 71, and an injection hole 83 is formed in the ink ejection units 811, 812, 813, and 814, respectively (as shown in step S81), and is implemented in the present embodiment. In the example, the inkjet units 811, 812, 813, and 814 are symmetrically arranged in a longitudinal direction, but are not limited thereto, and may be changed to be arranged in a horizontal direction as needed. Arranging symmetrically with each other, then, an actuator unit 82 is disposed above the pressure chambers of the inkjet units 811, 812, 813, 814. The actuation unit 82 includes a plurality of actuation pieces 821, 822, 823, 824, and the actuation piece 821, 822, 823, and 824 are respectively formed on the pressure chambers of the inkjet units 811, 812, 813, and 814, and selectively receive the driving signal V to operate (as shown in step S82), and then set each of the nozzles. The actuation area of the ink units 811, 812, 813, 814, the cutting distance of a first direction, and the separation distance between the plurality of ink ejection units 811, 812, 813, 814 (as shown in step S83), wherein The first direction may be, but is not limited to, the X direction, and the cutting distance of the first direction of each of the inkjet units 811, 812, 813, 814 is equal, that is, the inkjet units 811, 812 as shown in FIG. 8A. The cutting distances X5 of the 813 and 814 in the X direction are equal, and the spacing distance between the inkjet units 811, 812, 813, and 814 is the spacing distances Y5, Y7, and Y9 as shown in FIG. 8A, respectively.

Next, each of the inkjet units 811 is calculated according to the actuation area of each of the inkjet units 811, 812, 813, and 814 set in step S83 and the cutting distance of the first direction, that is, the cutting distance X5 in the X direction. The cutting distance of the 812, 813, and 814 in a second direction may be, but is not limited to, the Y direction, that is, the cutting distance Y4 of the inkjet unit 811 in the Y direction as shown in FIG. 8A, and the inkjet unit 812 The cutting distance Y3 in the Y direction, the cutting distance Y8 of the ink jet unit 813 in the Y direction, and the cutting distance Y10 of the ink jet unit 814 in the Y direction (as shown in step S84).

Subsequently, a plurality of positioning marks 75 may be marked on the piezoelectric inkjet head 8, for example, an L-shaped positioning mark 75 is marked by a scribe line to fix the actuation unit 82 to the plurality of positioning marks 25 In the range formed, the actuation unit 82 can be correspondingly disposed above the pressure chambers of the plurality of inkjet units 811, 812, 813, 814 (as shown in step S85). Of course, the positioning method of the actuation unit 82 of the present invention is It is not limited to the implementation of the positioning mark 75 by the scribe line, and the positioning mark 75 is not limited to the L shape, and any achievable actuation unit 82 can be fixed. The manner in which the pressure chambers of the plurality of ink jet units 811, 812, 813, and 814 are above the range protected by the present invention.

Next, the cutting distance of the plurality of inkjet units 811, 812, 813, 814 in the first direction set by the cutting device according to step S83, and the interval between the plurality of inkjet units 811, 812, 813, 814 The distance, and the cutting distance of each of the inkjet units 811, 812, 813, 814 calculated in the step S84 in the second direction is cut, that is, the plurality of inkjet units 811, 812, 813, 814 a cutting distance X5 in the X direction, a spacing distance Y5, Y7, Y9 between the plurality of inkjet units 811, 812, 813, 814, and a cutting distance Y4 of the inkjet unit 811 in the Y direction, and an inkjet unit 812 The cutting distance Y6 in the Y direction, the cutting distance Y8 of the inkjet unit 813 in the Y direction, and the cutting distance Y10 of the inkjet unit 814 in the Y direction are used to cut the actuation unit 82 so that the actuation unit 82 is respectively The pressure chambers are correspondingly formed with the movable pieces, that is, the actuating pieces 821, 822, 823, and 824 shown in FIG. 8C, and the respective injection holes are respectively formed corresponding to the respective actuating pieces. Relative position (as shown in step S86), whereby each pressure chamber is predetermined Actuating plates 821, 822, 823, 824, and selectively receiving the driving signal V, the driving signal V is adjusted according to the aperture and the droplet characteristics of each of the nozzle holes 83 to drive the actuating plates 821, 822, 823, Actuator 824 operates at a plurality of frequencies such that actuating plates 821, 822, 823, and 824 are selected for actuation of droplets of different sizes and different viscosities.

In this embodiment, the cutting lines L1 L L8 can be marked on the actuating unit 82 according to the cutting distances Y4, Y6, Y8, Y10 and the spacing distances Y5, Y7, Y9, and the cutting is marked on the actuating unit 82 according to the cutting distance X1. Lines L9~L10 enable the cutting device to cut the actuating unit 82 along the cutting lines L1~L10, so as to form the actuating pieces 821, 822, 823, and 824 on the actuating unit 82 and respectively correspond to each spray The pressure chambers of the ink units 811, 812, 813, and 814, of course, the cutting order of the cutting device is not limited to cutting in the order of the cutting lines L1 to L10. The cutting sequence can be changed according to the requirements, and the cutting method that can be used in the present invention is not limited to the marking of the cutting line by scribing, and any cutting according to the plurality of inkjet units 811, 812, 813, and 814 can be performed in the first direction. The distance, the separation distance between the plurality of inkjet units 811, 812, 813, 814, and the cutting distance of each of the inkjet units 811, 812, 813, 814 in the second direction are cut on the actuation unit 82. The manner of the moving pieces 821, 822, 823, and 824 is the scope protected by the present case.

The cutting device used in this embodiment may be, but is not limited to, a wafer cutting device, such as a laser machine. Finally, the actuating unit 82 is actuated as shown in FIG. 8A except the actuating plate. The waste ink other than the sheets 821, 822, 823, and 824 is removed to form the piezoelectric ink jet head 8 as shown in Fig. 8C.

In this embodiment, the actuation pieces 821, 822, 823, 824 can be of different sizes and arranged symmetrically with each other in a longitudinally aligned manner, and the first direction of the actuation pieces 821, 822, 823, 824 is the same size. That is, the cutting distance X5 in the X direction is the same, so that the general cutting device can be used to cut out the actuating unit 82, which can reduce the manufacturing cost, and the scrap is also less than that of the first embodiment using the laser cutting process. For example, if the actuation area of the actuation piece 12 shown in FIG. 1A is 10 units, the actuation areas of the actuation pieces 821, 822, 823, and 824 shown in FIG. 8A may be about 10, respectively. 3, 5, 8 units, since the first direction of the actuation pieces 821, 822, 823, 824 is the same size, that is, the X direction is the same size, so the actuation pieces 821, 822, 823, 824 are in the second The size of the direction, that is, the size of the Y direction, will have a proportional relationship of 10:3:5:8, such that the actuation pieces 821, 822, 823, 824 are rectangular rather than square, in which case the actuation piece The dimensions of the X and Y directions of the 821, 822, 823, and 824 must be carefully adjusted to prevent the actuation of the actuators 821, 822, 823, and 824 from being too long. Therefore, refer to Table 1 below, in this embodiment. The aspect ratio (X/Y) of the actuation pieces 821, 822, 823, 824 is controlled to be about 2 or less:

The apertures of the ejection holes 83 of each of the ink ejection units 811, 812, 813, and 814 are substantially proportional to the size of the corresponding actuation pieces 821, 822, 823, and 824 and the area of the pressure chamber, that is, the actuation piece 821. The apertures of the nozzle holes 83 corresponding to 822, 823, and 824 may be, for example, 90, 30, 45, 60 um, respectively. Of course, the actuation areas of the actuation pieces 821, 822, 823, and 824 and the corresponding apertures of the injection holes 83. The size is not limited to this and can be changed according to actual needs.

Further, the order in which the actuating sheets 821, 822, 823, and 824 are placed is not limited to the one shown in FIG. 8C, but the fluid that is printed toward the middle portion of the liquid supply path 21 is smoother, Therefore, in this embodiment, the relatively frequent 3, 5 actuation area units of the actuation pieces 822 and 823 are placed in the middle. Of course, this position can also be modified to have a high viscosity or a large flow demand of 8 or 10 The actuators 824 and 821 of the moving area unit.

Please refer to FIG. 9A and FIG. 9B , wherein FIG. 9A is a schematic view showing the cutting of the piezoelectric inkjet head of the fifth preferred embodiment of the present invention, and FIG. 9B is a piezoelectric inkjet head of the fifth preferred embodiment of the present invention. A flow chart of the cutting method of the actuating piece, as shown in FIG. 9A, the piezoelectric ink jet head 9 of the present embodiment is a multi-layer structure, which is also composed of a vibrating plate and a plurality of plates (not shown). The piezoelectric inkjet head 9 has a liquid supply flow path 71 and a plurality of ink ejection units 911, 912, 913, 914. In the embodiment, the plurality of ink ejection units 911, 912 913, 914 are distributed in four different quadrants and are symmetrically arranged with each other. The inkjet units 911, 912, 913, 914 respectively have a pressure chamber (not shown), and the piezoelectric inkjet head 9 further comprises the same One of the plurality of orifices 93 (not shown) is provided with an orifice 93 corresponding to the inkjet units 911, 912, 913, and 914, and the pressure chambers of the inkjet units 911, 912, 913, and 914 Both of them are in communication with the liquid supply flow path 71, so that the printing fluid can flow into the pressure chamber from the liquid supply flow path 71, and in the ink ejection units 911, 912, 913, and 914. A pressure chamber provided at the actuator unit 92, wherein the actuating means 92 may be but are not limited system (, PZT Lead Zirconate Titanate) formed by the piezoelectric material of lead zirconate titanate, can be cut by a single actuation devices The element 92 performs cutting so that the actuating unit 92 generates a uniform moving piece corresponding to the pressure chamber of each of the ink discharging units 911, 912, 913, 914, that is, the actuating piece 921 shown in FIGS. 9A and 9C, 922, 923, 924, actuating pieces 921, 922, 923, 924 are respectively formed on the pressure chambers of the ink jet units 911, 912, 913, 914 and arranged in different quadrants and arranged corresponding to each other, and each actuating piece 921, 922, 923, 924 have a length to width ratio of 2 or less, and selectively receive a driving signal V to operate, and each of the injection holes 93 is formed in the corresponding actuation piece 921, 922, 923, 924. The relative position in the presentation.

Wherein, the volume of each pressure chamber is substantially proportional to the size of the actuating plates 921, 922, 923, and 924 and the aperture of each of the injection holes 93, whereby each of the actuating plates 921, 922, 923, and 924 is selectively received. The driving signal V and the driving signal V are adjusted according to the aperture and the droplet characteristics of each of the injection holes 93 to drive the plurality of actuation pieces 921, 922, 923, and 924 to operate at a plurality of frequencies, so that the injection holes 93 are printed with different sizes and different shapes. The droplet of viscosity.

Please refer to FIG. 9A and FIG. 9B, wherein FIG. 9B is a flow chart of a method for cutting a piezoelectric inkjet head actuating sheet according to a fifth preferred embodiment of the present invention. As shown in the figure, the piezoelectric inkjet of the embodiment is shown. The cutting method of the head actuating sheet comprises the following steps: First, a piezoelectric ink jet head 9 is provided which has a liquid supply flow path 71 and a plurality of ink jet units 911, 912, 913, 914, each of which is ink jetted. The units 911, 912, 913, 914 respectively have a pressure chamber in communication with the liquid supply flow path 71 (as shown in step S91), and in the embodiment, the plurality of ink ejection units 911, 912, 913, The 914 series are distributed in four different quadrants and arranged symmetrically with each other. Then, an actuating unit 92 is disposed above the pressure chambers of the ink jet units 911, 912, 913 and 914, and the actuating unit 92 includes a plurality of actuating pieces 921, 922, 923, 924, and the actuation pieces 921, 922, 923, 924 are respectively formed on the pressure chambers of the ink ejection units 911, 912, 913, 914, and selectively receive the driving signal V to operate (step S92) Shown).

Subsequently, the actuation area of each of the inkjet units 911, 912, 913, 914, the cutting distance of a first direction, and the separation distance between the plurality of inkjet units 911, 912, 913, 914 are set (step S93). The first direction may be, but is not limited to, the X direction, and the cutting distance of the first direction of the inkjet unit adjacent to the upper and lower of the plurality of inkjet units 911, 912, 913, 914 is Equivalently, as shown in FIG. 9A, the ink jet units 911 and 912 are arranged in a vertical relationship, that is, symmetrically arranged in a longitudinal arrangement, so that the cutting distances X6 of the ink jet units 911 and 912 in the X direction are equal. In addition, the inkjet units 913 and 914 are also arranged in a vertical relationship, that is, symmetrically arranged in a longitudinal arrangement, so that the cutting distances X8 of the inkjet units 913 and 914 in the X direction are equal, as for the plurality of inkjets. The separation distance between the units 911, 912, 913, and 914 is the separation distances X7 and Y12 as shown in Fig. 9A, respectively. In addition, the actuation area of the ink ejection unit 914 in the plurality of ink ejection units 911, 912, 913, 914 is the largest and the actuation area of the ink ejection unit 911 is the smallest, so the actuation area of the ink ejection unit 914 and the ink ejection The multiplication of the actuation area of unit 911 is equal to the multiplication of the actuation area of inkjet units 912, 913.

Then, each of the inkjet units is calculated according to the actuation area of each of the inkjet units 911, 912, 913, and 914 set in step S93 and the cutting distance of the first direction, that is, the cutting distances X6, X8 in the X direction. a cutting distance of the 911, 912, 913, and 914 in the second direction, wherein the second direction may be, but not limited to, the Y direction, and the plurality of inkjet units 911, 912, 913, and 914 are adjacent to the left and right The cutting distance of the second direction of the ink unit is equal, and the largest actuation area of the plurality of ink ejection units 911, 912, 913, 914 is multiplied by the minimum actuation area by the other actuation area ( As shown in step S94, the ink-jet units 911 and 913 shown in FIG. 9A are arranged in a left-right relationship, that is, symmetrically arranged in a laterally aligned manner, so that the ink-jet units 911 and 913 are cut in the Y direction. The distance Y13 is equal, and the inkjet units 912 and 914 are also arranged in a left-right relationship, that is, in the horizontal direction. Since the columns are arranged symmetrically with each other, the cutting distances Y11 of the ink jet units 912 and 914 in the Y direction are equal.

Subsequently, a plurality of positioning marks 75 may be marked on the piezoelectric ink-jet head 9, for example, a positioning mark 75 showing an L-shape is indicated by a scribe line to fix the actuating unit 92 to the plurality of positioning marks 75. In the range formed, the actuation unit 92 can be correspondingly disposed above the pressure chambers of the plurality of inkjet units 911, 912, 913, 914 (as shown in step S95). Of course, the positioning method of the actuation unit 92 of the present invention is The positioning mark 75 is not limited to being marked by a scribe line, and the positioning mark 75 is not limited to the L shape. Any achievable actuation unit 92 can be fixed to the plurality of ink jet units 911, 912, 913, and 914. The way above the pressure chamber is the scope protected by this case.

Next, the cutting distance of the plurality of inkjet units 911, 912, 913, and 914 in the first direction set by the cutting device according to step S93, and the interval between the plurality of inkjet units 911, 912, 913, and 914 The distance, and the cutting distance of each of the inkjet units 911, 912, 913, 914 calculated in step S94 in a second direction, is cut by the actuation unit 92, that is, in the X direction according to the inkjet units 911, 912. The distance 62, the cutting distance X8 of the inkjet units 913, 914 in the X direction, the separation distance X7, Y12 between the plurality of inkjet units 911, 912, 913, 914, and the inkjet units 911, 913 in the Y direction Cutting the distance Y13, the cutting distance Y11 of the inkjet units 912, 914 in the Y direction to cut the actuation unit 92, so that the actuation unit 92 respectively forms a uniform motion piece at each of the pressure chambers, that is, Actuating sheets 921, 922, 923, and 924 shown in Figs. 9A and 9C, and each of the nozzle holes is formed at a relative position corresponding to each of the actuating sheets (as shown in step S96). Therefore, each of the pressure chambers has a predetermined area of the actuation pieces 921, 922, 923, 924, And selectively receiving the driving signal V to act, the driving signal V according to the aperture of each of the injection holes 93 and the droplet The adjustment is performed to drive the actuation pieces 921, 922, 923, and 924 to operate at a plurality of frequencies, so that the actuation pieces 921, 922, 923, and 924 are selected to be corresponding to droplets of different sizes and different viscosities.

In this embodiment, the cutting lines C1 C C4 can be marked on the actuating unit 92 according to the cutting distances Y11, Y13 and the spacing distance Y12, and the cutting lines can be marked on the actuating unit 92 according to the cutting distances X6, X8 and the spacing distance X7. C5~C8, the wafer cutting device cuts the actuating unit 92 along the cutting lines C1~C8, and can form the actuating piece 921, 922, 923, 924 on the actuating unit 92, of course, the wafer cutting device The order of cutting is not limited to cutting in the order of the cutting lines C1 to C8, and the cutting order can be changed according to the requirements, and the cutting method that can be used in the present case is not limited to the marking line by the scribing method, and any a cutting distance of the plurality of inkjet units 911, 912, 913, 914 in the first direction, a separation distance between the plurality of inkjet units 911, 912, 913, 914, and each of the plurality of inkjet units 911, 912 The manner in which the cutting distances of 913 and 914 are cut in a second direction and formed on the actuating unit 92 to form the actuating sheets 921, 922, 923, and 924 are all protected by the present invention.

The cutting device used in this embodiment may be, but is not limited to, a wafer cutting device, such as a laser machine. Finally, the actuation unit 92 is actuated in addition to the actuation piece, that is, shown in FIG. 9A. The waste other than the sheets 921, 922, 923, and 924 is removed to form the piezoelectric ink jet head 9 as shown in Fig. 9C.

In this embodiment, the actuation pieces 921, 922, 923, 924 can be different sizes and distributed in four different quadrants and symmetrically disposed with each other, and the upper and lower adjacent ones of the actuation pieces 921, 922, 923, 924 The size of the first direction of the moving piece is the same, the size of the second direction of the adjacent left and right actuating pieces is the same, and the largest actuating area is multiplied by the minimum actuating area to be multiplied by the other actuating areas. Therefore, the general wafer cutting apparatus can be used to cut the actuation unit 92, which can reduce the manufacturing cost, and the waste is also less than that of the first embodiment using the laser cutting process, and the configuration of the embodiment has a space. Use optimization Therefore, the separation distance between the respective ink-jet units can be made larger than that of the second preferred embodiment, and the occurrence of improper cross-talk between the fluid chambers can be reduced. For example, if the actuation area of the actuation piece 12 shown in FIG. 1A is 10 units, the actuation areas of the actuation pieces 921, 922, 923, and 924 shown in FIG. 9A may be about 3, respectively. 5, 7.5, 12.5 units, and its X, Y direction dimensions are shown in the following list 2, which satisfies the relationship of 3 and 12.5 unit area multiplications equal to 5 and 7.5 unit areas. Similarly, the aspect ratios of the actuation pieces 921, 922, 923, and 924 are controlled to be about 2 or less, so that the actuation pieces 921, 922, 923, and 924 are not too long to affect the actuation.

The aperture of the ejection orifice 93 of each of the ink ejection units 911, 912, 913, and 914 is substantially proportional to the size of the corresponding actuation pieces 921, 922, 923, and 924 and the area of the pressure chamber, that is, the actuation piece 921. The apertures of the nozzle holes 93 corresponding to the 922, 923, and 924 may be, for example, 30, 50, 75, and 120 um, respectively. Of course, the actuation areas of the actuation pieces 921, 922, 923, and 924 and the corresponding nozzle holes 93 are The aperture size is not limited to this and can be changed according to actual needs. In addition, each of the actuating pieces 921, 922, 923, and 924 is matched with an injection hole 93, and the injection holes 93 are generally symmetrical or centered with respect to the corresponding actuating pieces 921, 922, 923, and 924 thereof. In this case, the distance between the individual orifices 93 is usually not equal. Therefore, if the piezoelectric inkjet head 9 has the point of filling or the multiple orifices 93 to be simultaneously printed, the distance between the orifices 93 can be designed to be equal, that is, the position of the orifice 93 shown in FIG. 9A is changed to In the position shown in FIG. 9C, the distance between the adjacent two injection holes 93 may be 4064 um, but not limited thereto.

Further, the order in which the actuating sheets 921, 922, 923, and 924 are placed is not limited to the one shown in Fig. 9C, and can be adjusted in accordance with the actual printing requirements.

Furthermore, the number of actuating sheets disposed on the piezoelectric ink jet head of the present invention is not limited to four, and four or more or less may be arranged, depending on the space of the piezoelectric ink jet head and the area of the actuating sheet and The X and Y direction size adjustment conditions are adjusted.

In summary, the piezoelectric ink jet head having a plurality of actuating sheets in the present case is provided with a single pressure chamber and a plurality of actuating sheets, and the driving signals are adjusted according to different requirements to simultaneously drive one or more of the actuators. The moving piece can achieve the effects of printing different sizes, different viscosity droplets and increasing the inkjet frequency, and can adjust the voltage value of the driving signal when printing low-viscosity droplets; further, by the inkjet of the present invention The cutting method of the head piezoelectric actuating unit mainly uses setting the actuating area of each of the ink jetting units, so that each of the ink jetting units of the piezoelectric inkjet head of the present invention is provided with a pressure chamber respectively to generate a uniform moving piece. According to different printing requirements, it is possible to select and drive a suitable actuator to print droplets of different sizes and different viscosities. In this case, it is flexible to drive a suitable actuator and achieve the purpose with appropriate driving signal voltage values, for example, When printing low-viscosity droplets, it is only necessary to select an actuator with a small actuation area to operate and reduce the voltage value of the driving voltage to meet the demand, and the method of reducing the voltage value of the driving signal can be used. Unnecessary energy waste to solve the conventional piezoelectric inkjet head is configured with a large-sized actuator to be suitable for fluid printing of various viscosities, but requires a large driving signal to drive the actuator Therefore, excessive driving signals during the printing of low-viscosity droplets may cause unnecessary energy waste.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

2‧‧‧ Piezoelectric inkjet head

21‧‧‧ Liquid supply channel

221‧‧‧First Actuator

222‧‧‧Second Actuation

22‧‧‧Activity unit

X1‧‧‧ length

Y1, Y2‧‧‧ width

Claims (17)

A piezoelectric ink jet head comprising at least one ink jet unit and a liquid supply flow channel, the ink jet unit comprising a pressure chamber and a piezoelectric vibration plate, wherein the pressure chamber is in communication with the liquid supply flow path The piezoelectric vibrating plate is disposed adjacent to the pressure chamber; an orifice plate, wherein the nozzle plate respectively forms an injection hole corresponding to each of the ink ejection units, and the nozzle hole communicates with the pressure chamber and the liquid supply flow channel, And a piezoelectric actuator unit disposed on the piezoelectric vibration plate and corresponding to the pressure chamber, the piezoelectric actuation unit comprising a plurality of piezoelectric actuators formed by cutting, Each of the piezoelectric actuators receives a driving signal actuation; wherein the orifice plate and the piezoelectric vibration plate are disposed on opposite sides of the pressure chamber, and each piezoelectric actuator selectively receives the The driving signal drives the plurality of piezoelectric actuators to operate at a plurality of frequencies, and the driving signal is adjusted according to the aperture and the droplet characteristics of the nozzle holes, so that the nozzle holes print droplets of different sizes and different viscosities. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator and a second piezoelectric actuator, and the first pressure One of the electrically actuated sheet and the second piezoelectric actuator receives the drive signal separately to control the actuation of a single piezoelectric actuator. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator and a second piezoelectric actuator, and the first pressure The electrically actuated sheet and the second piezoelectrically actuated sheet simultaneously receive the drive signal in the same phase displacement to cause the two to act in the same phase. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator and a second piezoelectric actuator, and the first pressure Electrical actuation The sheet and the second piezoelectric actuator simultaneously receive the drive signal of the reverse displacement to cause the two to operate in an inverted displacement. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator and a second piezoelectric actuator, and the first pressure The electrically actuated piece and the second piezoelectrically actuated piece receive the drive signal in turn to cause the two to act in turn. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator, a second piezoelectric actuator and a third piezoelectric An actuation piece, the second piezoelectric actuator is located between the first piezoelectric actuator and the third piezoelectric actuator, so that the nozzle is correspondingly disposed on the second piezoelectric actuator, and the One of the first piezoelectric actuator, the second piezoelectric actuator, and the third piezoelectric actuator receives the drive signal separately to control the single piezoelectric actuator to actuate in the vibration region. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator, a second piezoelectric actuator and a third piezoelectric An actuation piece, the second piezoelectric actuator is located between the first piezoelectric actuator and the third piezoelectric actuator, so that the nozzle is correspondingly disposed on the second piezoelectric actuator, and the The first piezoelectric actuator, the second piezoelectric actuator and the third piezoelectric actuator simultaneously receive the drive signal in the same phase displacement to cause the three to operate in the same phase. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator, a second piezoelectric actuator and a third piezoelectric An actuation piece, the second piezoelectric actuator is located between the first piezoelectric actuator and the third piezoelectric actuator, so that the nozzle is correspondingly disposed on the second piezoelectric actuator, and the Two of the first piezoelectric actuator, the second piezoelectric actuator, and the third piezoelectric actuator receive the driving signal to cause a plurality of piezoelectrics in the plurality of piezoelectric actuators Actuate the piece to move. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator, a second piezoelectric actuator and a third piezoelectric An actuation piece, the second piezoelectric actuator is located between the first piezoelectric actuator and the third piezoelectric actuator, so that the nozzle is correspondingly disposed on the second piezoelectric actuator, and the The first piezoelectric actuator, the second piezoelectric actuator and the third piezoelectric actuator simultaneously receive the driving signal to cause an inverse displacement between the two adjacent piezoelectric actuators. The piezoelectric inkjet head according to claim 1, wherein the plurality of piezoelectric actuators comprise a first piezoelectric actuator, a second piezoelectric actuator and a third piezoelectric An actuation piece, the second piezoelectric actuator is located between the first piezoelectric actuator and the third piezoelectric actuator, so that the nozzle is correspondingly disposed on the second piezoelectric actuator, and the The first piezoelectric actuator, the second piezoelectric actuator and the third piezoelectric actuator receive the drive signal in turn to cause the three to act in turn. The piezoelectric ink jet head according to claim 1, wherein the orifice diameter is between 30 and 120 um, and the voltage value of the drive signal is preferably +/- 30 volts. A piezoelectric ink jet head comprising: a plurality of ink jet units and a liquid supply flow path, each of the ink jet units respectively having a pressure chamber connected to the liquid supply flow path and adjacent to the pressure chamber a piezoelectric vibration plate; an orifice plate, wherein the orifice plate respectively forms an injection hole for printing ink droplets; and a piezoelectric actuation unit disposed on the piezoelectric vibration plate The piezoelectric actuator unit includes a plurality of piezoelectric actuators formed by cutting, each of the piezoelectric actuators respectively corresponding to each of the pressure chambers, and respectively receiving a driving signal to act; wherein the orifice plate and the pressure The electric vibrating plate is disposed on opposite sides of the pressure chamber, and the volume of each pressure chamber is different from the size of the piezoelectric actuator and the aperture of the nozzle a proportional relationship, whereby each of the piezoelectric actuators selectively receives the driving signal, and the driving signal is adjusted according to a hole diameter and a droplet characteristic of the nozzle hole to drive the plurality of piezoelectric actuators to operate at a plurality of frequencies, so that The orifices print droplets of different sizes and different viscosities. The piezoelectric ink jet head according to claim 12, wherein the piezoelectric actuator unit comprises a plurality of piezoelectric actuators cut by a laser cutting device. A piezoelectric ink jet head comprising: a plurality of ink jet units and a liquid supply flow path, each of the ink jet units respectively having a pressure chamber connected to the liquid supply flow path, and adjacent to the pressure chamber a piezoelectric vibrating plate and the pressure chambers are equidistantly arranged in equal length in one direction and unequal in the other direction; an orifice plate, which respectively forms an orifice for each of the ink jet units, And printing a droplet; and a piezoelectric actuator unit disposed on the piezoelectric vibration plate, the piezoelectric actuation unit comprising a plurality of piezoelectric actuators formed by cutting, each of the piezoelectric actuators respectively correspondingly disposed Each of the pressure chambers has an aspect ratio of 2 or less to receive a driving signal, wherein the orifice plate and the piezoelectric diaphragm are disposed in the pressure chamber. The two opposite sides of the body, and the volume of each of the pressure chambers is proportional to the size of the piezoelectric actuator and the aperture of the nozzle, whereby each of the piezoelectric actuators selectively receives the driving signal. The driving signal is adjusted according to the aperture and the droplet characteristics of the nozzle to drive the complex piezoelectric actuation The sheet is actuated at a plurality of frequencies to cause the orifice to print droplets of different sizes and different viscosities. The piezoelectric ink jet head according to claim 14, wherein the piezoelectric actuator unit comprises the plurality of piezoelectric actuator sheets formed by cutting with a wafer cutting device. A piezoelectric inkjet head comprising: a plurality of ink jet units and a liquid supply flow channel, each of the ink jet units respectively having a pressure chamber connected to the liquid supply flow path; and an orifice plate, wherein the ink jet plate forms a corresponding one for each of the ink jet units a nozzle for printing a droplet; and a piezoelectric actuator unit disposed on the piezoelectric diaphragm, the piezoelectric actuator unit comprising a plurality of piezoelectric actuators formed by cutting, each of the piezoelectric actuators The sheets are respectively disposed in the respective pressure chambers and arranged in different quadrants and arranged corresponding to each other, and each of the piezoelectric actuators has a length to width ratio of 2 or less to receive a driving signal respectively; wherein The orifice plate and the piezoelectric vibration plate are disposed on opposite sides of the pressure chamber, and the volume of each pressure chamber is proportional to the size of the piezoelectric actuator and the aperture of the nozzle, thereby Each of the piezoelectric actuators selectively receives the driving signal, and the driving signal is adjusted according to the aperture and the droplet characteristics of the nozzle to drive the plurality of piezoelectric actuators to operate at a plurality of frequencies to print the nozzles. Droplets of different sizes and different viscosities. The piezoelectric ink jet head according to claim 16, wherein the piezoelectric actuator unit comprises a wafer cutting device for cutting to form the plurality of piezoelectric actuator sheets.