TWI596700B - Door latching mechanism of semiconductor container - Google Patents

Description

Door plate locking mechanism of semiconductor carrier

The present invention relates to a door panel latching mechanism, and more particularly to a door panel latching mechanism for use in a semiconductor carrier.

With the development of semiconductor technology, the size of semiconductor wafers has continued to evolve, and the density of circuit patterns on them has become higher and higher. In the processing of semiconductor processes, any particles (such as dust, dust, or other contaminants) attached to a semiconductor wafer, reticle, or other semiconductor component may damage the surface of the wafer, reticle, or semiconductor component. It is also possible that process quality problems occur when performing different semiconductor processing steps. For example, in a semiconductor wafer undergoing a patterning exposure process, a problem of degradation of projection pattern imaging occurs, resulting in the quality of the final semiconductor product being affected. In particular, as the density of the pattern increases, the wavelength of the light source used in the optical lithography becomes shorter and shorter, and the semiconductor process has an increasingly higher requirement for the number of particles and the cleanliness of the space.

Under such circumstances, it is very important to maintain the high cleanliness of the interior space for containers or vehicles used to transport and store semiconductor wafers or reticle. Question. In addition to being able to maintain the internal space tightness to isolate the pollutants from the outside, it is also necessary to avoid the generation of particles due to vibration during transportation, and the opening and closing process of the container also needs to avoid the generation of particles.

A variety of carriers are known in the art for protecting semiconductor wafers or reticle. For example, the Front Opening Unified Pod (FOUP) is used to form an internal sealed space by locking the door of the carrier with the carrier body. The invention patent of the Republic of China Patent No. I258447 (hereinafter referred to as TW ' 447 patent) discloses a wafer carrier door and a two-position spring loaded latch mechanism. The wafer carrier has a gate provided with at least one latch mechanism, wherein the latch mechanism has a spring member that holds the latch mechanism at a desired position corresponding to one or more of a latch open and latch closed condition.

Please refer to FIG. 1 , which is a plan view showing a preferred embodiment of the latch assembly of the TW ' 447 patent. The left side plan view shows the latch assembly in the open position, and the right side plan view shows the latch assembly is closed. In the location. The spring member (the member of reference numeral 86 in Fig. 1) is pivotally attached to the cam member (the member of reference numeral 68 in Fig. 1) at the pivot (the member of reference numeral 88 in Fig. 1). When the cam member is rotated in the clockwise direction, the spring member is stressed and a steadily increasing force is applied to the cam member in a counterclockwise direction. As shown in the plan view on the right side of Fig. 1, the cam member is in the fully latched position, and if the cam member is rotated in the counterclockwise direction from this position, the spring member is forced, and a force of steadily increasing is applied to the cam member, and the cam is advanced clockwise. member. From this, it can be seen that in the case of a single spring member, it is biased by a single side of the cam member or the latch arm and acts on a single support point. Therefore, the cam member or the latch arm is liable to be easily deflected due to a force imbalance, and is easily worn.

Please refer to FIG. 2, which is a plan view showing another specific example of the latch assembly of TW ' 447. The plan view on the left side shows the latch assembly in the open position, and the plan view on the right side shows the latch assembly in the closed position. in. The cam member (the member of reference numeral 68 in Fig. 2) has a radial projection (a member of reference numeral 108 in Fig. 2). The curved spring member (the member of reference numeral 110 in Fig. 2) has a V-bend that is adjacent to the tip end. In the plan view on the right side of Fig. 2, the cam member is in the latched closed position and the projection of the cam member cooperates with the catching tip to provide the cam member in the active position. The spring member is biased via a V-bend to push the cam member. From this, it can be seen that the spring member is biased by the single side direction of the cam member or the latch arm. Therefore, the cam member is easily deflected due to the unbalanced force, and is easily worn.

Please refer to FIG. 3, which shows a plan view of another alternative embodiment of the latch assembly of TW ' 447. The plan view on the left side shows the latch assembly in the open position, and the plan view on the right side shows the latch assembly in the closed position. . Taking a spring member (a member of reference numeral 120 in FIG. 3) positioned above the cam member (the member of reference numeral 68 in FIG. 3) as an example, when the cam member is rotated in the counterclockwise direction from the latch-on braking position, the latch arm is (The member of reference numeral 58 in Fig. 3) is translated outward, causing the center pivot (the member of reference numeral 128 in Fig. 3) to move outward. The spring member is compressed by the load and acts through the central pivot to prevent movement of the latch arm. It can be seen that the spring member is biased to the latch arm via a single support point (central pivot). Therefore, the latch arm is easily deflected due to the unbalanced force, and is easily worn.

According to the foregoing, the spring member is biased by a single side direction and a single support point, and the force application method easily deflects the components in the latch mechanism, causing vibration and friction when the latch mechanism is actuated, and generating unnecessary components. Wear and mechanism burden, it is easier to produce particles, which does not help the semiconductor carrier's cleanliness requirements.

In view of the above, the present invention provides a door panel locking mechanism for a semiconductor carrier, wherein the latching arm is moved by applying an elastic member to a pair of abutting members in a direction of a biasing force. It can be avoided that the conventional technique causes the components to wear due to the single direction and the single support point, and the particles are generated so that the cleanliness cannot be achieved.

According to an aspect of the invention, a door panel locking mechanism is provided, comprising a door panel base, a rotating member, a latching arm and an elastic member. The rotating member is disposed on the door panel base, and the door panel base has a pair of abutting members. The latch arm is coupled to the rotating member for moving between a latching position and a tripping position as the rotating member rotates. The elastic member is connected to the latching arm for applying a force to the abutting member according to one of the symmetry directions, thereby moving the latching arm. When the latch arm is within a first predetermined range of travel, the resilient member urges the abutment member to urge the latch arm toward the latched position.

In one embodiment, when the latch arm is within a second predetermined range of travel, the resilient member urges the abutment member to urge the latch arm toward the trip position. The elastic member has a pair of force applying sides for applying force to the abutment. Each of the force applying sides is V-shaped and has a first oblique side and a second oblique side. The elastic member applies abutting force to the abutting member via the first oblique side when the latching arm is located within the first predetermined stroke range; and the elastic member applies the second oblique side when the latching arm is located within the second predetermined stroke range Abutment.

In another embodiment, when the elastic member applies a force to the abutting member in a symmetrical biasing direction, the component force of the abutting force in the direction perpendicular to the movement of the latching arm is substantially zero, and The component force in the direction parallel to the movement of the latch arm is not zero.

In another embodiment, the elastic member has a pair of biasing sides and a pair of connecting sides The side of the force is applied to the abutting member, and the connecting side is connected to the latching arm. Each of the connecting sides is adjacent to each of the biasing sides.

In another embodiment, the door panel locking mechanism further includes a bearing sleeved on the abutting member to bias the elastic member against the abutting member in a non-direct contact manner.

In another embodiment, the abutment members are located on opposite sides of the latch arms.

According to another aspect of the present invention, a door panel locking mechanism for a semiconductor carrier is provided, comprising a door panel base, a rotating member, a latching arm, an elastic member and a pair of abutting members. The rotating member is disposed on the door base. The latch arm is coupled to the rotating member for moving between a latching position and a tripping position as the rotating member rotates. The resilient member is configured to urge the latching arm to urge the latching arm to the latching position when the latching arm is within a first predetermined range of travel. The abutting member is used for the elastic member to apply a force to one of the symmetry directions, thereby moving the latch arm.

In an embodiment, the elastic member has a pair of biasing sides and a pair of connecting sides. The side of the force is applied to the abutting member, and the connecting side is connected to the latching arm. Each of the connecting sides is adjacent to each of the biasing sides.

In another embodiment, the door panel locking mechanism further includes a bearing sleeved on the abutting member to bias the elastic member against the abutting member in a non-direct contact manner.

In another embodiment, the resilient member is configured to urge the latch arm to the trip position when the latch arm is within a second predetermined range of travel. The elastic member has a pair of force applying sides for applying force to the abutment. Each of the force applying sides is V-shaped and has a first oblique side and a second oblique side. When the latching arm is within the first predetermined stroke range, the elastic member applies a force to the abutting member via the first oblique side. When the latch arm is within the second predetermined range of travel, the resilient member applies a force to the abutment via the second bevel.

In another embodiment, the abutting member is disposed on the rotating member, and when the elastic member is biased against the abutting member in a symmetrical biasing direction, the resultant force of the abutting member is perpendicular to the moving direction of the latching arm. The component force is substantially zero, and the component force in the direction parallel to the movement of the latch arm is also substantially zero.

In another embodiment, the abutment is disposed on the door panel base. When the elastic member applies a force to the abutting member in a symmetrical biasing direction, the resultant force of the abutting member in the direction perpendicular to the movement of the latching arm is substantially zero, and moves parallel to the latch arm The component force in the direction is not zero.

In another embodiment, the abutment is disposed on the door panel base. When the elastic member applies a force to the abutting member in a symmetrical biasing direction, the resultant force of the abutting member in the direction perpendicular to the movement of the latching arm is substantially zero, and moves parallel to the latch arm The component force in the direction is also substantially zero.

In another embodiment, the abutment members are located on opposite sides of the latch arms.

The door panel locking mechanism of the semiconductor carrier of the present invention uses the elastic member to apply force to the abutting member according to a symmetrical biasing direction, so that the members in the door panel locking mechanism can be evenly stressed, and the wear caused during the operation is reduced. Reduce the chance of particle generation.

100,200‧‧‧ door locking mechanism

110, 210‧‧‧ door base

120, 220‧‧‧ rotating components

130, 230‧‧‧Latch arm

140, 140 ' , 140 " , 240 , 240 ' , 240 " ‧ ‧ elastic members

141, 241‧‧‧ force side

141a, 241a‧‧‧ first bevel

141b, 241b‧‧‧second bevel

Vertex 141c, 241c‧‧

142, 242‧‧‧ connected sides

150A, 150B, 250A, 250A ' , 250A " , 250B, 250B ' , 250B " ‧‧‧ Abutments

F1~F8‧‧‧ Direction of force

L1, L2‧‧‧ moving direction

R1‧‧‧ clockwise direction

R2‧‧‧ counterclockwise direction

T1~T4‧‧‧Travel range

X1~X8‧‧‧ Vertical direction of force

Y1~Y8‧‧‧ parallel direction of force

The above and other features, advantages and embodiments of the present invention will become more apparent and understood, and the description of the drawings is as follows: FIG. 1 is a plan view showing a preferred embodiment of the latch assembly of the TW ' 447 patent; 2 is a plan view showing another specific example of the latch assembly of TW ' 447; FIG. 3 is a plan view showing another alternative example of the latch assembly of TW ' 447; FIG. 4 is a view showing a preferred embodiment of the latch assembly of TW ' 447 FIG. 5 is a perspective view showing the relative movement of the elastic member and the abutting member located at the top in FIG. 4; and FIG. 6 is a view showing the relative operation of the door member locking mechanism of the fourth embodiment; 3 is a perspective view of the buckle mechanism in the unfastened state; FIG. 7 is a schematic view showing the relative movement of the elastic member and the abutting member located above in FIG. 6; FIG. 8 is a view showing a sleeve bearing according to another embodiment of the invention. FIG. 9 is a perspective view of the door panel locking mechanism in the latching state according to another embodiment of the present invention; FIG. 10 is a view showing the elastic member and the abutting in FIG. The relative actuation diagram of the piece; Figure 11 shows the door locking machine of the ninth figure FIG. 12 is a perspective view showing the relative movement of the elastic member and the abutting member in the locked state.

The door panel locking mechanism of the semiconductor carrier of the present invention applies a force to a pair of abutting members along one of the symmetrical directions of the elastic members, thereby moving the latch arms. By means of the symmetrical force application, the components in the door panel locking mechanism can be subjected to force and force application, and the latching arm or the rotating member can be operated in a more stable and smooth manner, thereby reducing wear between the components and reducing particles. generate. Hereinafter, the door panel locking mechanism of the semiconductor carrier of the present invention will be described in detail with reference to the embodiments of the present invention.

Please refer to FIG. 4 , which illustrates a door panel locking mechanism according to an embodiment of the invention. Stereo view in the state of the lock. The door latch mechanism 100 is configured to lock the door panel of the semiconductor carrier to the body of the semiconductor carrier, and includes a door base 110, a rotating member 120, a latch arm 130, an elastic member 140, and a Pair of abutments 150A, 150B. When the latch arm 130 is in the latching position (as shown in FIG. 4), the door panel is locked to the body, and when the latch arm 130 is in the unfastened position, the door panel can be opened from the body or Remove.

In the present embodiment, the abutting members 150A, 150B are disposed and fixed to the door panel base 110, the rotating member 120 is disposed on the door panel base 110, and the latching arm 130 is coupled to the rotating member 120. The latch arm 130 is coupled to the rotating member 120 such that when the rotating member 120 rotates, the latch arm 130 is movable between a latching position and a tripping position. As in the latch state shown in Fig. 4, the latch arm 130 is in the latching position. The elastic member 140 is coupled to the latching arm 130 for biasing the abutting members 150A, 150B in a direction of biasing force in accordance with one of the symmetry, thereby causing the latching arm 130 to move. In the present embodiment, the elastic member 140 moves together with the latch arm 130 between the latching position and the tripping position. By biasing the resilient member 140 against the abutting members 150A, 150B, the resilient member 140 can urge the latching arm 130 to the latching position when the latching arm 130 is within a first predetermined range of travel.

It should be noted that the elastic member 140 in the preceding paragraph pushes the latching arm 130 to the locking position, which means that the elastic member 140 is applied to the abutting members 150A, 150B, and is disposed and fixed to the door panel by the abutting members 150A, 150B. No movement occurs on the base 110, so that the elastic member 140 drives the latch arm 130 to move toward the latch position. When the latch arm 130 is not in the latching position, the latch arm 130 will move toward the latching position; when the latching arm 130 is already in the latching position, the elastic member 140 will continue to push toward the latching position. The force is held at the latching position to prevent the latch arm 130 from shaking.

Next, the interaction between the abutting members 150A, 150B and the elastic member 140 is closed. For further explanation. Please refer to FIG. 4 and FIG. 5 at the same time. FIG. 5 is a schematic view showing the relative movement of the elastic member and the abutting member located above in FIG. Other elements than the elastic member 140 and the abutting members 150A, 150B are omitted in Fig. 5 to clearly show the features of the embodiment. In this embodiment, the pair of abutting members 150A, 150B are located on opposite sides of the latch arm 130, and the elastic member 140 has a pair of force applying sides 141 and a pair of connecting side edges 142. The elastic member 140 is biased to the pair of abutting members 150A, 150B via the pair of biasing sides 141, respectively, and is connected to the latch arm 130 via the pair of connecting sides 142. Each of the force applying sides 141 is V-shaped and has a first oblique side 141a, a second oblique side 141b and a vertex 141c. In the state of FIGS. 4 and 5, the latch arm 130 is at the latching position, and the elastic member 140 is biased against the abutting members 150A, 150B via the symmetrical biasing directions F1, F2.

As can be seen from Fig. 5, the elastic member 140 is biased against the abutting members 150A, 150B via the first oblique side 141a of the biasing side 141. The resultant force of the abutting members 150A, 150B is substantially zero in the direction perpendicular to the movement of the latch arm 130, and the component force in the direction parallel to the movement of the latch arm 130 is not zero. That is, the resultant force of the abutting member 150 on the vertical component direction X1, X2 of one of the moving directions L1, L2 of the vertical latch arm 130 is substantially zero, and the elastic member 140 and the abutting member 150A can be stabilized. The relative relationship of 150B, no skew or shaking. The abutting members 150A, 150B are not subjected to the resultant force in the parallel component directions Y1, Y2 of one of the moving directions L1, L2 of the parallel latch arms 130, and the elastic member 140 can push the latch arm 130 to the latch Position and enable the latch arm 130 to be held in the latch position.

When the rotating member 120 is forced to rotate in the clockwise direction R1 (indicated in FIG. 4) (for example, the user applies a force to rotate the rotating member 120), the latch arm 130 is moved along the moving direction L2, and The elastic member 140 is moved relative to the abutting members 150A, 150B along the moving direction L2. The elastic member 140 continues to apply force to the abutment 150A before the elastic member 140 moves to a position where the vertex 141c thereof is aligned with the center line of the abutting members 150A, 150B (the position of the elastic member 140 ' of the broken line in FIG. 5). 150B. When the rotating member 120 stops being stressed, the latch arm 130 is caused to be pushed to the latching position in the moving direction L1. Therefore, the first predetermined stroke range T1 of the latch arm 130 is defined at the first oblique side 141a before the vertex 141c. When the latch arm 130 is within the first predetermined stroke range T1, the resilient member 140 is biased against the abutment 150A, 150B via the first bevel 141a to urge the latch arm 130 to the latched position.

In FIG. 5, when the rotating member 120 continues to be forced to rotate in the clockwise direction R1, the elastic member 140 and the latch arm 130 are caused to continue to move in the moving direction L2. When the abutment member passes over the apex 141c of the biasing side 141, the elastic member 140 is biased by the second bevel 141b against the abutting members 150A, 150B. At this time, when the rotating member 120 stops being stressed, the latch arm 130 is pushed to the trip position along the moving direction L2.

Please refer to FIG. 6 , which is a perspective view of the door panel locking mechanism of FIG. 4 in a tripped state. In the present embodiment, the elastic member 140 moves together with the latch arm 130 between the latching position and the tripping position, and the latching arm 130 is biased by the elastic member 140 to the abutting members 150A, 150B. The resilient member 140 can push the latch arm 130 to the trip position during a second predetermined range of travel. The elastic member 140 pushes the latching arm 130 to the unlocking position because the abutting members 150A, 150B are disposed and fixed on the door panel base 110 without moving, so that the elastic member 140 drives the latching arm 130 to the unfastened position. mobile. When the latch arm 130 is not in the trip position, the latch arm 130 will move toward the trip position; when the latch arm 130 is already in the trip position, the elastic member 140 will continue to push to the trip position. The force is held in the trip position to prevent the latch arm 130 from shaking.

Please refer to Figure 6 and Figure 7 at the same time. Figure 7 shows the bomb located above in Figure 6. Schematic diagram of the relative actuation of the component and the abutment. Other elements than the elastic member 140 and the abutting members 150A, 150B are omitted in Fig. 7 to clearly show the features of the embodiment. In the state of FIGS. 6 and 7, the latch arm 130 is in the trip position, and the elastic member 140 is biased against the abutting members 150A, 150B via the symmetrical biasing directions F3, F4.

As can be seen from Fig. 7, the elastic member 140 is biased against the abutting members 150A, 150B via the second oblique side 141b of the biasing side 141. The resultant force of the abutting members 150A, 150B in the direction perpendicular to the movement of the latch arm 130 is substantially zero; and the component force in the direction parallel to the movement of the latch arm 130 is not zero. That is to say, the resultant force of the abutting members 150A, 150B in the vertical component directions X3, X4 is substantially zero, and the relative relationship between the elastic member 140 and the abutting members 150A, 150B can be stabilized without skewing or shaking. . In addition, the resultant force of the abutting members 150A, 150B in the parallel component directions Y3, Y4 is not zero, and the elastic member 140 pushes the latch arm 130 to the trip position, and the latch arm 130 can be held in the solution. Buckle position.

When the rotating member 120 is forced to rotate in the counterclockwise direction R2 (indicated in FIG. 6) (for example, the user applies a force to rotate the rotating member 120), the latch arm 130 is moved along the moving direction L1, and The elastic member 140 is moved relative to the abutting members 150A, 150B along the moving direction L1. In the elastic member 140 moves to the apex 141c is properly aligned against the midline member 150A, 150B before (dotted line of the elastic member 140 "is in the position of FIG. 7), the elastic member 140 continues to abut against the biasing member 150A, 150B. When the rotating member 120 stops receiving force, the latch arm 130 is pushed to the trip position in the moving direction L2. Therefore, the latch arm 130 is defined in the second oblique side 141b before the vertex 141c is not crossed. The second predetermined stroke range T2. When the latch arm 130 is within the second predetermined stroke range T2, the elastic member 140 is biased against the abutting members 150A, 150B via the second oblique side 141b to push the latch arm 130 to the solution. Buckle position.

In another aspect, in various embodiments, the door panel locking mechanism 100 can further include a bearing 160. Please refer to FIG. 8 , which is a schematic view showing an abutting member and an elastic member which are sleeved with a bearing according to another embodiment of the invention. The bearing 160 is sleeved on the abutting members 150A, 150B, so that the elastic member 140 is biased against the abutting members 150A, 150B in a non-direct contact manner, and the elastic member 140 and the abutting members 150A, 150B can be further reduced. Wear. In addition to extending the life of the component, the generation of particles can be further avoided.

The door panel locking mechanism 100 according to the embodiment of the present invention is described by taking only the latch arm 130 and the elastic member 140 located above the rotating member 120 as an example. However, in practical applications, the rotating member 120 can be as shown in FIG. 4 and As shown in FIG. 6, the latch arms 130 are respectively connected to the upper and lower sides, so that the door panel of the semiconductor carrier can be simultaneously locked from above and below to the body of the semiconductor carrier. The number of the latch arms 130 and the elastic members 140, and their connection configuration with the rotating member 120, is not limited in the present invention. Any application of the elastic member 140 by the symmetrical biasing force to the abutting member 150 is within the scope of the present invention.

The door panel locking mechanism 100 of the semiconductor carrier according to the above embodiment of the present invention is applied to the abutting members 150A, 150B in a symmetrical manner by the elastic member 140 such that the resultant force of the abutting members 150A, 150B is perpendicular to The component force in the direction in which the latch arm 130 moves is substantially zero, and the component force in the direction parallel to the movement of the latch arm 130 is not zero. Therefore, the problem that the component is unevenly applied to increase the wear can be avoided, and the actuation stability is improved, and the latch arm 130 can be pushed to the latch position within the first predetermined stroke range T1, in the second predetermined stroke range. T2 is pushed to the trip position.

Please refer to FIG. 9 , which is a perspective view of the door panel locking mechanism in a latching state according to another embodiment of the present invention. The door panel locking mechanism 200 includes a door panel base 210 and a spin The rotating member 220, a latch arm 230, an elastic member 240, and a pair of abutting members 250A, 250B. In the present embodiment, the abutting members 250A, 250B are disposed and fixed to the rotating member 220 to rotate with the rotating member 220. The rotating member 220 is disposed on the door panel base 210, and the latch arm 230 is coupled to the rotating member 220. The latch arm 230 is coupled to the rotating member 220 such that when the rotating member 220 rotates, the latch arm 230 is movable between a latching position and a tripping position.

As in the latch state shown in Fig. 9, the latch arm 230 is located at the latching position. The elastic member 240 is in contact with the abutting members 250A, 250B for biasing the abutting members 250A, 250B in a direction of the biasing force in accordance with one of the symmetry, thereby causing the latching arm 230 to move. In the present embodiment, the elastic member 240 is disposed at a position substantially corresponding to the rotating member 220 and does not move together with the latch arm 230. The elastic member 240 can push the latch arm 230 to the latching position when the latch arm 230 is within a first predetermined range of travel by the resilient member 240 biasing the abutment members 250A, 250B.

The elastic member 240 in the preceding paragraph pushes the latch arm 230 to the latching position, which means that when the elastic member 240 is biased against the abutting members 250A, 250B, the elastic members 240 are disposed and fixed to the rotating member 220 by the abutting members 250A, 250B. The member 240 rotates the rotating member 220 via the abutting members 250A, 250B. The elastic member 240 also drives the latch arm 230 to move toward the latching position via the abutting members 250A and 250B. When the latch arm 230 is not in the latching position, the latch arm 230 will move toward the latching position; when the latching arm 230 is in the latching position, it will be held in the latching position to prevent the latching arm 230 from occurring. Shake.

Next, the interaction relationship between the abutting members 250A, 250B and the elastic member 240 will be further explained. Please refer to FIG. 9 and FIG. 10 at the same time. FIG. 10 is a schematic diagram showing the relative operation of the elastic member and the abutting member of FIG. Other elements than the elastic member 240 and the abutting members 250A, 250B are omitted in Fig. 10 to clearly show the features of the embodiment. Elastic member 240 There is a pair of biasing sides 241 and a pair of connecting sides 242. The elastic member 240 is biased to the abutting members 250A, 250B via the pair of biasing sides 241, and is connected to the door panel base 210 via the pair of connecting sides 242. Each of the force applying sides 241 is, for example, V-shaped, and has a first oblique side 241a, a second oblique side 241b, and a vertex 241c. In the state of FIGS. 9 and 10, the latch arm 230 is at the latching position, and the elastic member 240 is biased to the abutting members 250A, 250B via the symmetrical biasing directions F5, F6.

As can be seen from Fig. 10, the elastic member 240 is biased against the abutting members 250A, 250B via the first oblique side 241a of the biasing side 241. The resultant force of the abutting members 250A, 250B in the direction perpendicular to the movement of the latch arm 230 is substantially zero; and the component force in the direction parallel to the movement of the latch arm 230 is substantially zero. That is, the resultant force of the abutting members 250A, 250B in the vertical component directions X5, X6 of one of the moving directions L1, L2 of the vertical latch arm 230 is substantially 0; and the abutting members 250A, 250B are parallel The resultant force in the parallel component directions Y5 and Y6 of one of the moving directions L1 and L2 of the latch arm 230 is substantially zero. The elastic member 240 applies a force to the pair of abutting members 250A, 250B via the symmetrical biasing directions F5, F6, thereby applying a force to the rotating member 220, thereby pushing the latch arm 230 to the latching position and latching The arm 230 can be held in the latching position.

When the rotating member 220 is forced to rotate in the clockwise direction R1 (indicated in FIG. 9) (for example, the user applies a force to rotate the rotating member 220), the latch arm 230 is moved by the abutting members 250A, 250B. For example, the latch arm 230 positioned above the rotating member 220 in FIG. 9 moves along the moving direction L2. The elastic member 240 continues to apply force to the abutment 250A before the abutting members 250A, 250B move to just align with the vertex 241c (the position of the dashed elastic member 240 ' and the abutting members 250A ' , 250B ' in FIG. 10). 250B. When the rotating member 220 stops being stressed, the elastic member 240 applies a force to urge the latch arm 230 to the latching position. For example, the latch arm 230 located above the rotating member 220 in FIG. 9 is pushed to the latching position in the moving direction L1.

Therefore, the first oblique side 241a before the apex 241c is defined, a stroke range T3 in which the abutting members 250A, 250B and the rotating member 220 are pushed in the counterclockwise direction, that is, corresponding to the latch arm 230 is defined. The first predetermined range of travel. That is, when the latch arm 230 is within the first predetermined range of travel, the resilient member 240 is biased against the abutment members 250A, 250B via the first beveled edge 241a to urge the latch arm 230 to the latched position.

In Fig. 10, when the rotating member 220 continues to be forced to rotate in the clockwise direction R1, the abutting members 250A, 250B are caused to continue to move in the clockwise direction R1. When the abutment member 250 passes over the apex 241c of the biasing side 241, the elastic member 240 is biased by the second bevel 241b against the abutting members 250A, 250B. At this time, when the rotating member 220 stops being stressed, the elastic member 240 pushes the abutting members 250A, 250B toward the clockwise direction R1, at which time the latch arm 230 is pushed to the trip position. Taking the upper latch arm 230 in FIG. 9 as an example, it is pushed to the trip position along the moving direction L2.

Please refer to FIG. 11 , which is a perspective view of the door panel locking mechanism of FIG. 9 in a tripped state. In the present embodiment, the elastic member 240 is disposed at a position substantially corresponding to the rotating member 220 and does not move together with the latch arm 230. The resilient member 240 can urge the latch arm 230 to the trip position when the latch arm 230 is within a second predetermined range of travel by the resilient member 240 biasing the abutment members 250A, 250B.

The elastic member 240 pushes the latch arm 230 to the trip position, which means that when the elastic member 240 is biased against the abutting members 250A, 250B, the elastic member 240 is disposed and fixed to the rotating member 220 by the abutting members 250A, 250B. The rotating member 220 is rotated by the abutting members 250A, 250B. The elastic member 240 also drives the latch arm 230 to move toward the trip position via the abutting members 250A, 250B. When the latch arm 230 is not in the trip position, the latch arm 230 will move toward the trip position; when the latch arm 230 is in the trip position, it will be held in the trip position to prevent the latch arm 230 from occurring. Shake.

Please refer to FIG. 11 and FIG. 12 at the same time. FIG. 12 is a schematic diagram showing the relative operation of the elastic member and the abutting member of FIG. Other elements than the elastic member 240 and the abutting members 250A, 250B are omitted in Fig. 12 to clearly show the features of the embodiment. At this time, the latch arm 230 is at the trip position, and the elastic member 240 is biased to the abutting members 250A, 250B via the symmetrical biasing directions F7, F8.

As can be seen from Fig. 12, the elastic member 240 is biased against the abutting members 250A, 250B via the second oblique side 241b of the biasing side 241. The resultant force of the abutting members 250A, 250B in the direction perpendicular to the movement of the latch arm 230 is substantially zero; and the component force in the direction parallel to the movement of the latch arm 230 is substantially zero. That is, the resultant force of the abutting members 250A, 250B in the vertical component directions X7, X8 is substantially zero; the resultant force in the parallel component directions Y7, Y8 is substantially zero. The elastic member 240 applies a force to the pair of abutting members 250A, 250B via the symmetrical biasing directions F7, F8, thereby applying a force to the rotating member 220, thereby pushing the latch arm 230 to the trip position and latching The arm 230 can be held in the trip position.

When the rotating member 220 is forced to rotate in the counterclockwise direction R2 (indicated in FIG. 11) (for example, the user applies a force to rotate the rotating member 220), the latch arm 230 is moved by the abutting members 250A, 250B. For example, the latch arm 230 located above the rotating member 220 in FIG. 11 moves along the moving direction L1. Before abutment 250A, 250B to move the vertex 241c is properly aligned (FIG. 12 in broken line of the elastic member 240 "and the abutment 250A", 250B "position), the elastic member 240 continues to force abutment 250A, 250B. When the rotating member 220 stops receiving force, the elastic member 240 applies a force to push the latch arm 230 to the trip position. Taking the latch arm 230 located above the rotating member 220 in FIG. 11 as an example, Push to the trip position along the moving direction L2.

Therefore, the second oblique side 241b before the apex 241c is defined, a stroke range T4 in which the abutting members 250A, 250B and the rotating member 220 are pushed in the clockwise direction, that is, corresponding to the latch arm 230 is defined. The second predetermined range of travel. That is, when the latch arm 230 is within the second predetermined stroke range, the resilient member 240 is biased against the abutment members 250A, 250B via the second bevel 241b to urge the latch arm 230 to the trip position.

In the foregoing door panel locking mechanism 200 according to another embodiment of the present invention, the abutting members 250A, 250B are disposed on the rotating member 220, and the elastic member 240 is coupled to the door panel base 210. By the elastic members 240 biasing the abutting members 250A, 250B in a symmetrical direction, the components in the door panel locking mechanism 200 can be subjected to an average force, reducing wear and generation of particles.

A door panel latching mechanism for a semiconductor carrier according to the above-described various embodiments of the present invention includes a door panel base, a rotating member, a latching arm, an elastic member, and a pair of abutting members. The elastic member is biased to the abutting member according to a direction of urging of the symmetry, so that when the latching arm is within a first predetermined stroke range, the latching arm is pushed to the latching position. In this way, the latch arm can be held in the latching position without sloshing, so that the door panel of the semiconductor carrier can be firmly locked to the body of the semiconductor carrier. During the rotation of the rotating member, or during the movement of the latching arm, the elastic member continues to apply force to the abutting member in a symmetrical biasing direction, so that when the rotating member, the latching arm or other member is actuated, It can average the force, reduce the burden on the mechanism, avoid unnecessary wear, reduce the generation of particles, and help maintain the cleanliness of the semiconductor carrier.

While the invention has been described above in terms of various embodiments, it is not intended to limit the invention. It will be apparent to those skilled in the art that various modifications and changes may be made without departing from the spirit and scope of the invention, and the scope of the invention is defined by the scope of the appended claims.

100‧‧‧ door lock mechanism

110‧‧‧door base

120‧‧‧Rotating components

130‧‧‧Latch arm

140‧‧‧Flexible components

141‧‧‧ force side

141a‧‧‧First bevel

141b‧‧‧second bevel

142‧‧‧Connected sides

150A, 150B‧‧‧Abutment

L2‧‧‧ moving direction

R1‧‧‧ clockwise direction

Claims (19)

A door panel locking mechanism for a semiconductor carrier, comprising: a door panel base having a pair of abutting members; a rotating member disposed on the door panel base; a latching arm coupled to the rotating member for When the rotating member rotates, moving between a tripping position and a latching position; and an elastic member coupled to the latching arm for biasing the pair of abutting members according to one of the symmetry directions Causing the latch arm to move, wherein when the latch arm is within a first predetermined range of travel, the resilient member applies a force to the pair of abutments to urge the latch arm to the latch position When the latch arm is in the latching position, one of the semiconductor carriers is latched to a body of the semiconductor carrier. The door panel latching mechanism of claim 1, wherein the elastic member applies a force to the pair of abutting members when the latching arm is within a second predetermined stroke range to Push to the trip position. The door panel locking mechanism of claim 2, wherein the elastic member has a pair of biasing sides for applying force to the pair of abutting members, each of the biasing sides being V-shaped, having a first a beveled edge and a second beveled edge, the elastic member is biased to the pair of abutting members via the first beveled edge when the latching arm is located within the first predetermined range of travel, when the latching arm is located The elastic member applies a force to the pair of abutments via the second bevel when the second predetermined stroke range is within. The door panel locking mechanism of claim 1, wherein when the elastic member applies a force to the pair of abutting members in a direction of urging, the resultant force of the pair of abutting members is perpendicular to the pair The component force in the direction in which the latch arm moves is substantially zero. The door panel locking mechanism of claim 4, wherein when the elastic member applies a force to the pair of abutting members in a direction of urging, the resultant force of the pair of abutting members is parallel to the The component force in the direction in which the latch arm moves is not zero. The door panel locking mechanism of claim 1, wherein the elastic member has: a pair of force applying sides for applying force to the pair of abutting members; and a pair of connecting side edges for connecting to The latching arm has a side of each of the connecting sides adjacent to each of the biasing sides. The door panel locking mechanism according to any one of the preceding claims, further comprising: a bearing disposed on the pair of abutting members, the elastic member is biased to the pair in a non-direct contact manner Abutment. The door panel locking mechanism of claim 1, wherein the pair of abutting members are located on opposite sides of the latching arm. A door panel locking mechanism for a semiconductor carrier, comprising: a door panel base; a rotating member disposed on the door panel base; a latching arm coupled to the rotating member for moving between a latching position and a tripping position when the rotating member rotates; an elastic member when the latching arm is in a first predetermined range of travel Internally, the elastic member is used to push the latching arm to the latching position; and a pair of abutting members are provided for the elastic member to apply a force to one of the symmetrical directions, thereby allowing the latching The arm moves, wherein when the latch arm is in the latching position, one of the semiconductor carriers is latched to a body of the semiconductor carrier. The door panel locking mechanism of claim 9, wherein the elastic member has: a pair of force applying sides for applying force to the pair of abutting members; and a pair of connecting side edges for connecting to The latching arm has a side of each of the connecting sides adjacent to each of the biasing sides. The door panel locking mechanism according to any one of the preceding claims, further comprising: a bearing disposed on the pair of abutting members, the elastic member is biased to the pair in a non-direct contact manner Abutment. The door panel latching mechanism of claim 9, wherein the resilient member is configured to urge the latching arm to the tripping position when the latching arm is within a second predetermined range of travel. The door panel locking mechanism of claim 12, wherein the elastic member has a pair of biasing sides for applying force to the pair of abutting members, each of the biasing sides being V-shaped, having a first a hypotenuse and a second bevel, the elasticity when the latch arm is within the first predetermined range of travel The member applies a force to the pair of abutting members via the first oblique side, and the elastic member applies a force to the pair of abutting members via the second oblique side when the latching arm is located within the second predetermined stroke range. The door panel locking mechanism of claim 9, wherein when the elastic member applies a force to the pair of abutting members in a direction of urging, the resultant force of the pair of abutting members is perpendicular to the pair The component force in the direction in which the latch arm moves is substantially zero. The door panel locking mechanism of claim 14, wherein when the elastic member applies a force to the pair of abutting members in a direction of urging, the resultant force of the pair of abutting members is parallel to the The component force in the direction in which the latch arm moves is substantially zero. The door panel locking mechanism according to any one of claims 9 to 15, wherein the pair of abutting members are disposed on the rotating member. The door panel locking mechanism of claim 14, wherein when the elastic member applies a force to the pair of abutting members in a direction of urging, the resultant force of the pair of abutting members is parallel to the The component force in the direction in which the latch arm moves is not zero. The door panel locking mechanism according to any one of claims 9 to 15 and 17, wherein the pair of abutting members are disposed on the door panel base. The door panel latching mechanism of any one of claims 9 to 15 and 17, wherein the pair of abutting members are located on opposite sides of the latching arm.