TWI596331B - Quasi-radial polarized surface plasmon excitation device and imaging method thereof - Google Patents

Quasi-radial polarized surface plasmon excitation device and imaging method thereof Download PDF

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TWI596331B
TWI596331B TW105130351A TW105130351A TWI596331B TW I596331 B TWI596331 B TW I596331B TW 105130351 A TW105130351 A TW 105130351A TW 105130351 A TW105130351 A TW 105130351A TW I596331 B TWI596331 B TW I596331B
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light
quasi
plasma
linear
excitation device
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TW201812280A (en
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Jian-Yuan Han
Kun-Huang Chen
jian-hong Ye
wei-xuan Wu
Jing- Chen
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Jing- Chen
Kun-Huang Chen
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Description

準徑向偏極光之表面電漿激發裝置及其成像方法Quasi-radial polarized light surface plasma excitation device and imaging method thereof

本發明係有關一種光學元件,尤指一種準徑向偏極光之表面電漿激發裝置及其成像方法。 The invention relates to an optical component, in particular to a surface-plasma excitation device for quasi-radial polarization and an imaging method thereof.

如第6圖所示,為習用之徑向偏極光之表面電漿激發裝置,係由一雷射產生器91發出雷射光束911,雷射光束911會經一徑向偏振轉換器92而產生如第7圖所示之徑向偏振的效果,起偏後的雷射光束911再經接物鏡93而在金膜94表面反射而產生表面電漿共振現象,反射後的雷射光束911回到接物鏡93後,便在一影像感測器95上有一如第8圖所示之成像圖,明顯可見一內圈96(圖中以虛線表示),該內圈96顯示表面電漿共振時之光強驟降現象,常見應用在生醫領域之檢測。 As shown in FIG. 6, a surface-plasma excitation device for conventional radial polarization, a laser beam 911 is emitted from a laser generator 91, and the laser beam 911 is generated by a radial polarization converter 92. As shown by the effect of the radial polarization shown in Fig. 7, the polarized laser beam 911 is reflected by the objective lens 93 and reflected on the surface of the gold film 94 to generate a surface plasma resonance phenomenon, and the reflected laser beam 911 is returned. After the objective lens 93 is attached, an image of the image sensor 95 is shown in Fig. 8. An inner ring 96 (shown by a broken line in the figure) is clearly visible, and the inner ring 96 shows the surface plasma resonance. Light intensity dips, commonly used in the field of biomedical testing.

然而,為求檢測的結果達到預期的精準度,故於表面電漿激發過程所用的器材,特別是前述徑向偏振轉換器92(元件或裝置),皆有一定的精密度與穩定度要求,也因此有著造價昂貴的問題,此為本發明欲解決之主要重點所在。 However, in order to achieve the desired accuracy of the test results, the equipment used in the surface plasma excitation process, particularly the aforementioned radial polarization converter 92 (component or device), has certain precision and stability requirements. Therefore, there is a problem of expensive construction, which is the main focus of the invention.

本發明之主要目的,在於解決上述的問題而提供一種準徑向偏極光之表面電漿激發裝置及其成像方法,透過線性偏振片在驅動源帶 動下旋轉,令穿透之光源得以產生時域疊加準徑向偏振之特性,而以相對較低的造價獲得可接受的檢測結果。 The main object of the present invention is to solve the above problems and provide a quasi-radial polarized light surface plasma excitation device and an imaging method thereof, which are driven through a linear polarizer in a driving source band. Rotating downwards allows the penetrating source to produce a quasi-radial polarization characteristic in the time domain, while obtaining acceptable detection results at a relatively low cost.

為達前述之目的,本發明之準徑向偏極光之表面電漿激發裝置,包括:一光源產生器可發出一準直之光束,且依該光束的路徑依序穿透一線性偏極旋轉器、一空間光濾波器、一光罩及一分光鏡,且在該光束於該分光鏡部分穿透的路徑設一組複合透鏡,並在該光束於該分光鏡部分反射的路徑設一影像感測器;其中,該線性偏極旋轉器中依序設有被該光束穿透的至少一相位延遲波片和一線性偏振片,該線性偏振片被一驅動源帶動而得以其中心軸旋轉,該光束通過旋轉時之該線性偏振片而產生時域疊加準徑向偏振之特性。 For the purpose of the foregoing, the surface-plasma plasma excitation device of the present invention includes: a light source generator that emits a collimated beam and sequentially penetrates a linear polarization rotator according to the path of the beam a spatial optical filter, a reticle and a beam splitter, and a set of composite lenses disposed in a path through which the beam penetrates the beam splitter, and an image sense is provided on a path of the beam reflected by the beam splitter portion The linear polarization rotator is provided with at least one phase retardation wave plate and a linear polarization plate penetrated by the light beam, and the linear polarization plate is driven by a driving source to rotate its central axis. The beam produces a time domain superimposed quasi-radial polarization characteristic by the linear polarizer as it rotates.

其中,該至少一相位延遲波片包括一可產生二分之一波長之相位差的第一波片和一可產生四分之一波長之相位差的第二波片,該第一波片、該第二波片和該線性偏振片在該光束的路徑被先後穿透。 Wherein the at least one phase delay wave plate comprises a first wave plate capable of generating a phase difference of one-half wavelength and a second wave plate capable of generating a phase difference of a quarter wavelength, the first wave plate, The second wave plate and the linear polarizer are sequentially penetrated in the path of the light beam.

其中,該複合透鏡由二凸透鏡和一半球耦合稜鏡組成,該二凸透鏡依該光束的路徑一前一後並排而設,該半球耦合稜鏡的表面有一半球面和一平面,該金膜貼設在該平面,前述部分穿透該分光鏡的光束先後穿透該二凸透鏡後,再由該半球面穿透該半球耦合稜鏡,且於該金膜表面發生表面電漿激發現象之反射。 Wherein, the composite lens is composed of a lenticular lens and a hemispherical coupling ,, and the lenticular lens is arranged side by side according to the path of the light beam, and the surface of the hemispherical coupling 有 has a half sphere and a plane, and the gold film paste In the plane, the beam passing through the beam splitter penetrates the lenticular lens successively, and then the hemispherical surface penetrates the hemispherical coupling 稜鏡, and a surface plasma excitation phenomenon is reflected on the surface of the gold film.

其中,該光源產生器為一雷射產生器,該光束為其發出準直之雷射光束。 Wherein, the light source generator is a laser generator, and the light beam is a collimated laser beam.

其中,該光源產生器有一白光光源和一色彩濾波片所組成,由該白光光源發光並穿透該色彩濾波片,以形成該光束。 Wherein, the light source generator comprises a white light source and a color filter, and the white light source emits light and penetrates the color filter to form the light beam.

為達前述之目的,本發明之準徑向偏極光之表面電漿激發裝置之成像方法,包括:由該光源產生器發出該光束,該光束在穿經該空間光濾波器之前或之後,穿經該線性偏極旋轉器之至少一相位延遲波片和該線性偏振片,穿經該空間光濾波器所形成之擴束準直光束在穿經該分光鏡後,被該分光鏡分成二部分穿透的光束和二部分反射的光束,該二部分穿透的光束經該複合透鏡聚焦在該金膜的表面形成表面電漿共振,且經反射回到該分光鏡而和該二部分再經由該分光鏡反射的光束在該影像感測器上進行影像記錄;其中,該光束在穿透該線性偏極旋轉器時,該線性偏振片被該驅動源帶動而旋轉,該光束通過旋轉時之該線性偏振片而時域疊加準產生徑向偏振之特性,且該影像感測器在不同偏振角度所生的影像予以記錄疊加,以獲得一準徑向偏極光之表面電漿共振結果的影像。 For the purpose of the foregoing, an imaging method for a surface-plasma plasma excitation device of the present invention includes: emitting, by the light source generator, the light beam, which is worn before or after passing through the spatial light filter Through the at least one phase retardation wave plate of the linear polarization rotator and the linear polarization plate, the beam expanding collimated beam formed by the spatial optical filter passes through the beam splitter and is divided into two parts by the beam splitter a penetrating beam and a two-part reflected beam, the two-part penetrating beam being focused on the surface of the gold film by the composite lens to form a surface plasma resonance, and reflected back to the beam splitter and then through the two parts The beam reflected by the beam splitter performs image recording on the image sensor; wherein when the beam penetrates the linear polarization rotator, the linear polarizer is rotated by the driving source, and the beam passes through the rotating The linear polarizing plate and the time domain superimposition quasi-radiation polarization characteristic, and the image sensor generates recording superimposed on images generated by different polarization angles to obtain a quasi-radial polarized light surface plasma Image vibration results.

本發明之上述及其他目的與優點,不難從下述所選用實施例之詳細說明與附圖中,獲得深入了解。 The above and other objects and advantages of the present invention will be readily understood from

當然,本發明在某些另件上,或另件之安排上容許有所不同,但所選用之實施例,則於本說明書中,予以詳細說明,並於附圖中展示其構造。 Of course, the invention may be varied on certain components, or in the arrangement of the components, but the selected embodiments are described in detail in the specification and their construction is shown in the drawings.

(習用部分) (customized part)

91‧‧‧雷射產生器 91‧‧‧Laser Generator

911‧‧‧雷射光束 911‧‧‧Laser beam

92‧‧‧徑向偏振轉換器 92‧‧‧radial polarization converter

93‧‧‧接物鏡 93‧‧‧Contact objective

94‧‧‧金膜 94‧‧‧ gold film

95‧‧‧感測器 95‧‧‧ sensor

96‧‧‧內圈 96‧‧‧ inner circle

(本發明部分) (part of the invention)

1‧‧‧光源產生器 1‧‧‧Light source generator

11‧‧‧光束 11‧‧‧ Beam

2‧‧‧線性偏極旋轉器 2‧‧‧Linear Polarity Rotator

21‧‧‧線性偏振片 21‧‧‧Linear polarizer

22‧‧‧第一波片 22‧‧‧First wave

23‧‧‧第二波片 23‧‧‧second wave plate

3‧‧‧空間光濾波器 3‧‧‧Spatial optical filter

4‧‧‧光罩 4‧‧‧Photomask

5‧‧‧分光鏡 5‧‧‧beam splitter

6‧‧‧複合透鏡 6‧‧‧Composite lens

61‧‧‧凸透鏡 61‧‧‧ convex lens

62‧‧‧凸透鏡 62‧‧‧ convex lens

63‧‧‧半球耦合稜鏡 63‧‧‧ hemispherical coupling

631‧‧‧半球面 631‧‧‧ hemisphere

632‧‧‧平面 632‧‧‧ plane

7‧‧‧影像感測器 7‧‧‧Image sensor

8‧‧‧金膜 8‧‧‧gold film

11’‧‧‧擴束準直光束 11'‧‧‧Expanded collimated beam

111’‧‧‧光束 111’‧‧‧ Beam

112’‧‧‧光束 112’‧‧‧ Beam

1A‧‧‧光源產生器 1A‧‧‧Light source generator

11A‧‧‧光束 11A‧‧‧beam

12A‧‧‧白光光源 12A‧‧‧White light source

13A‧‧‧色彩濾波片 13A‧‧‧Color Filter

第1圖係本發明之第一實施例之準徑向偏極光表面電漿激發裝置之配置示意圖。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the configuration of a quasi-radial polarization solar surface plasma excitation device according to a first embodiment of the present invention.

第2圖係本發明之第一實施例之線性偏振片被帶動旋轉而產生時域疊加準徑向偏振特性之過程的示意圖。 Fig. 2 is a view showing a process in which the linear polarizing plate of the first embodiment of the present invention is rotated to generate a time-domain superimposed quasi-radial polarization characteristic.

第3圖係本發明之準徑向偏極光表面電漿激發裝置和習知徑向偏振轉換器分別獲得之表面電漿共振結果的影像比較圖。 Fig. 3 is an image comparison diagram of the surface plasma resonance results obtained by the quasi-radial polar-polar surface plasma excitation device of the present invention and the conventional radial polarization converter, respectively.

第4圖係本發明之第二實施例之準徑向偏極光表面電漿激發裝置之配置示意圖。 Fig. 4 is a schematic view showing the arrangement of a quasi-radial polarization solar surface plasma excitation device according to a second embodiment of the present invention.

第5圖係本發明之第三實施例之準徑向偏極光表面電漿激發裝置之配置示意圖。 Fig. 5 is a schematic view showing the arrangement of a quasi-radial polarization laser surface plasma excitation device according to a third embodiment of the present invention.

第6圖係習用表面電漿激發裝置之配置示意圖。 Figure 6 is a schematic view showing the configuration of a conventional surface plasma excitation device.

第7圖係習知雷射光束經徑向偏振轉換器所產生徑向偏振特性之示意圖。 Figure 7 is a schematic illustration of the radial polarization characteristics of a conventional laser beam through a radial polarization converter.

第8圖係習知表面電漿激發裝置在影像感測器上獲得表面電漿共振結果的影像示意圖。 Fig. 8 is a schematic diagram showing the image of the surface plasma resonance obtained by the conventional surface plasma excitation device on the image sensor.

請參閱第1圖至第3圖,圖中所示者為本發明所選用之實施例結構,此僅供說明之用,在專利申請上並不受此種結構之限制。 Referring to Figures 1 through 3, the structure of the embodiment selected for use in the present invention is for illustrative purposes only and is not limited by such structure in the patent application.

本實施例提供一種準徑向偏極光之表面電漿激發裝置及其成像方法,所述準徑向偏極光之表面電漿激發裝置,係如第1圖所示,包括一光源產生器1、一線性偏極旋轉器2、一空間光濾波器3、一光罩4、一分光鏡5、一複合透鏡6及一影像感測器7,其中: The embodiment provides a surface-plasma excitation device for quasi-radial polarization, and an imaging method thereof. The surface-plasma excitation device of the quasi-radial polarization is shown in FIG. 1 and includes a light source generator. a linear polarization rotator 2, a spatial optical filter 3, a reticle 4, a beam splitter 5, a composite lens 6 and an image sensor 7, wherein:

如第1圖所示,光源產生器1可發出一光束11,此光束11係經準直校正,空間光濾波器3、光罩4及分光鏡5依光束11的路徑依序設置而穿透,線性偏極旋轉器2於本實施例中設在空間光濾波器3前,且在光束11於分光鏡5部分穿透的路徑設複合透鏡6,以該複合透鏡6對準半球耦合稜鏡63所設之待測金膜8(於不同實施例中亦可為銀膜),並在光束11於分 光鏡5部分反射的路徑設影像感測器7。其中,線性偏極旋轉器2中依序設有被光束11穿透的相位延遲波片和一線性偏振片21,線性偏振片21被一驅動源(可為手動操作或以馬達驅動而旋轉)帶動而得以其中心軸旋轉,光束11通過旋轉時之線性偏振片21而產生時域疊加準徑向偏振之特性。本實施例中,光源產生器1為一雷射產生器,前述光束11為其發出準直之雷射光束。 As shown in FIG. 1, the light source generator 1 can emit a light beam 11 which is collimated and corrected, and the spatial light filter 3, the reticle 4 and the beam splitter 5 are sequentially arranged to penetrate according to the path of the light beam 11. The linear polarization rotator 2 is disposed in front of the spatial optical filter 3 in the present embodiment, and a composite lens 6 is disposed in a path through which the beam 11 is partially penetrated by the beam splitter 5, and the composite lens 6 is aligned with the hemispherical coupling. The gold film 8 to be tested (which may also be a silver film in different embodiments) is provided in the beam 11 The path of the light mirror 5 partially reflected is provided with an image sensor 7. Wherein, the linear polarization rotator 2 is sequentially provided with a phase retardation wave plate penetrated by the light beam 11 and a linear polarization plate 21, and the linear polarization plate 21 is driven by a driving source (which can be manually operated or driven by a motor) The light is rotated by its central axis, and the light beam 11 is subjected to the characteristic of temporally superimposed quasi-radial polarization by the linear polarizing plate 21 at the time of rotation. In this embodiment, the light source generator 1 is a laser generator, and the beam 11 is a collimated laser beam.

如第1圖所示,前述相位延遲波片於本實施例中包括一第一波片22和一第二波片23,第一波片22可產生二分之一波長之相位差,第二波片23則可產生四分之一波長之相位差,光束11在穿透第一波片22後才穿透第二波片23,最後再穿透線性偏振片21。當光束11穿透第一波片22時產生線性偏振,而在穿透第二波片23時產生圓偏振。 As shown in FIG. 1 , the phase retardation wave plate includes a first wave plate 22 and a second wave plate 23 in the embodiment. The first wave plate 22 can generate a phase difference of one-half wavelength, and second. The wave plate 23 can generate a phase difference of a quarter wavelength, and the light beam 11 penetrates the second wave plate 23 after penetrating the first wave plate 22, and finally penetrates the linear polarizing plate 21. When the light beam 11 penetrates the first wave plate 22, linear polarization is generated, and when the second wave plate 23 is penetrated, circular polarization is generated.

如第1圖所示,複合透鏡6由二凸透鏡61、62和一半球耦合稜鏡63組成,二凸透鏡61、62依該光束11的路徑一前一後並排而設,半球耦合稜鏡63的表面有一半球面631和一平面632,金膜8貼設在平面632,前述部分穿透分光鏡5的光束11先後穿透二凸透鏡61、62後,再由半球面631穿透半球耦合稜鏡63,且於金膜8之表面反射。 As shown in Fig. 1, the composite lens 6 is composed of a lenticular lens 61, 62 and a half ball coupling 稜鏡 63. The lenticular lenses 61, 62 are arranged side by side in the path of the light beam 11, and the hemispherical coupling 稜鏡 63 The surface has a semi-spherical surface 631 and a flat surface 632. The gold film 8 is attached to the plane 632. The beam 11 that penetrates the beam splitter 5 penetrates the two convex lenses 61 and 62 successively, and then the hemispherical surface 631 penetrates the hemispherical coupling. 63, and reflected on the surface of the gold film 8.

前述準徑向偏極光之表面電漿激發裝置,其成像方法主要係由光源產生器1發出光束11,光束11在穿經線性偏極旋轉器2之相位延遲波片(第一波片22和一第二波片23)和線性偏振片21後,再穿經空間光濾波器3而形成擴束準直光束11’,該擴束準直光束11’接著穿經光罩4和分光鏡5後,被分光鏡5分成二部分穿透的光束111’和二部分反射的光束112’,該二部分穿透的光束111’經二凸透鏡61、62和半球耦合稜鏡63聚焦在金膜8的表面形成表面電漿共振,且經反射回到分光鏡5再次反射在影像感測器7上記錄影像。當光束11在穿透線性偏極旋轉器2時,線性偏振片21 被該驅動源帶動而旋轉,光束11通過旋轉時之線性偏振片21而產生時域疊加準徑向偏振之特性。如第2圖所示,可見在不同偏振角度所生的影像在影像感測器7予以記錄並疊加,以獲得一準徑向偏極光表面電漿共振結果的影像。又如第3圖所示,第(a)圖為以上述實施例之準徑向偏極光之表面電漿激發裝置所獲得之實際表面電漿共振結果的影像,而第(b)圖為習知以徑向偏振轉換器92所獲得之實際表面電漿共振結果的影像,前後兩者皆可獲得徑向偏極光表面電漿共振時之光強驟降所產生暗環的現象。 The surface quenching device of the quasi-radial polarized light is mainly formed by the light source generator 1 emitting a light beam 11 passing through the phase retardation wave plate of the linear polarization rotator 2 (the first wave plate 22 and a second wave plate 23) and a linear polarizing plate 21 are then passed through the spatial light filter 3 to form a beam expanding collimated beam 11', which then passes through the reticle 4 and the beam splitter 5 Thereafter, the beam splitter 5 is divided into a two-part penetrating beam 111' and a two-part reflecting beam 112'. The two-part penetrating beam 111' is focused on the gold film 8 via the lenticular lenses 61, 62 and the hemispherical coupling 稜鏡 63. The surface forms a surface plasma resonance, and is reflected back to the beam splitter 5 to reflect again to record an image on the image sensor 7. When the light beam 11 is passing through the linear polarization rotator 2, the linear polarizing plate 21 Rotating by the driving source, the light beam 11 generates a characteristic of temporally superimposed quasi-radial polarization by the linear polarizing plate 21 when rotated. As shown in Fig. 2, it can be seen that images generated at different polarization angles are recorded and superimposed on the image sensor 7 to obtain an image of the quasi-radial polarization photochemical resonance results. Further, as shown in FIG. 3, the (a)th image is an image of the actual surface plasma resonance result obtained by the surface-plasma plasma excitation device of the quasi-radial polarization light of the above embodiment, and the (b) figure is a habit. Knowing the image of the actual surface plasma resonance obtained by the radial polarization converter 92, both of the front and the rear can obtain the phenomenon of the dark ring generated by the sudden drop of the light intensity at the time of the radial polarization of the surface plasma.

由上述之說明不難發現本發明之優點在於,本發明僅利用一線性偏振片21透過驅動源帶動而旋轉,即可取代習知徑向偏振轉換器92,同樣可獲得表面電漿共振結果的影像,且和習知以徑向偏振轉換器92所獲得之影像相當類似而具有參考性,惟造價相對低於習知以徑向偏振轉換器92許多,藉此解決習知表面電漿激發過程所用的器材造價昂貴的問題。 It is not difficult to find out from the above description that the present invention can be used to replace the conventional radial polarization converter 92 by using only one linear polarizing plate 21 to be rotated by the driving source, and the surface plasma resonance result can also be obtained. The image, and is conventionally similar to the image obtained by the radial polarization converter 92, is referenced, but is relatively inexpensive compared to conventional radial polarization converters 92, thereby solving the conventional surface plasma excitation process. The equipment used is expensive.

當然,本發明仍存在許多例子,其間僅細節上之變化。請參閱第4圖,其係本發明之第二實施例,和第一實施例之主要差異在於,本實施例之線性偏極旋轉器2,是設在空間光濾波器3後(於此設在光罩4和分光鏡5之間),於本實施例中的光束11在穿經空間光濾波器3而形成擴束準直光束11’,並穿經光罩4和線性偏極旋轉器2之相位延遲波片(第一波片22和一第二波片23)和線性偏振片21後,即穿經分光鏡5而被分光鏡5分成二部分穿透的光束111’和二部分反射的光束112’,同樣可達成和第一實施例相同之功效。 Of course, there are many examples of the invention, with only minor variations in the details. Referring to FIG. 4, which is a second embodiment of the present invention, the main difference from the first embodiment is that the linear polarization rotator 2 of the present embodiment is disposed after the spatial optical filter 3 (this is Between the reticle 4 and the beam splitter 5, the light beam 11 in the present embodiment passes through the spatial light filter 3 to form a beam expanding collimated beam 11', and passes through the reticle 4 and the linear polarization rotator After the phase retardation wave plate (the first wave plate 22 and the second wave plate 23) and the linear polarizing plate 21, the beam splitter 5 is passed through the beam splitter 5 and split into two parts to penetrate the light beam 111' and the two parts. The reflected beam 112' can also achieve the same effect as the first embodiment.

再請參閱第5圖,其係本發明之第三實施例,和第一實施例之主要差異在於,本實施例之光源產生器1A有一白光光源12A和一色彩濾 波片13A所組成,由白光光源12A發光並穿透色彩濾波片13A,以形成如第一實施例之光束11的光束11A,同樣可達成和第一實施例相同之功效。 Referring to FIG. 5, which is a third embodiment of the present invention, the main difference from the first embodiment is that the light source generator 1A of the present embodiment has a white light source 12A and a color filter. The wave plate 13A is composed of a white light source 12A that emits light and penetrates the color filter 13A to form the light beam 11A of the light beam 11 of the first embodiment, and the same effect as that of the first embodiment can be achieved.

以上所述實施例之揭示係用以說明本發明,並非用以限制本發明,故舉凡數值之變更或等效元件之置換仍應隸屬本發明之範疇。 The above description of the embodiments is intended to be illustrative of the invention and is not intended to limit the scope of the invention.

由以上詳細說明,可使熟知本項技藝者明瞭本發明的確可達成前述目的,實已符合專利法之規定,爰提出專利申請。 From the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objects and is in accordance with the provisions of the Patent Law.

1‧‧‧光源產生器 1‧‧‧Light source generator

11‧‧‧光束 11‧‧‧ Beam

2‧‧‧線性偏極旋轉器 2‧‧‧Linear Polarity Rotator

21‧‧‧線性偏振片 21‧‧‧Linear polarizer

22‧‧‧第一波片 22‧‧‧First wave

23‧‧‧第二波片 23‧‧‧second wave plate

3‧‧‧空間光濾波器 3‧‧‧Spatial optical filter

4‧‧‧光罩 4‧‧‧Photomask

5‧‧‧分光鏡 5‧‧‧beam splitter

6‧‧‧複合透鏡 6‧‧‧Composite lens

61‧‧‧凸透鏡 61‧‧‧ convex lens

62‧‧‧凸透鏡 62‧‧‧ convex lens

63‧‧‧半球耦合稜鏡 63‧‧‧ hemispherical coupling

631‧‧‧半球面 631‧‧‧ hemisphere

632‧‧‧平面 632‧‧‧ plane

7‧‧‧影像感測器 7‧‧‧Image sensor

8‧‧‧金膜 8‧‧‧gold film

11’‧‧‧擴束準直光束 11'‧‧‧Expanded collimated beam

111’‧‧‧光束 111’‧‧‧ Beam

112’‧‧‧光束 112’‧‧‧ Beam

Claims (5)

一種準徑向偏極光之表面電漿激發裝置,包括:一光源產生器可發出一準直之光束,且依該光束的路徑依序穿透一空間光濾波器、一光罩及一分光鏡,一線性偏極旋轉器依該光束的路徑設在該空間光濾波器的前或後,且在該光束於該分光鏡部分穿透的路徑設一聚焦在待測金膜的表面而形成表面電漿共振之複合透鏡,並在該光束於該分光鏡部分反射的方向設一影像感測器;其中,該線性偏極旋轉器中依序設有被該光束穿透的一可產生二分之一波長之相位差的第一波片、一可產生四分之一波長之相位差的第二波片以及一線性偏振片,該線性偏振片被一驅動源帶動而得以其中心軸旋轉,該光束通過旋轉時之該線性偏振片而產生時域疊加準徑向偏振之特性。 A surface-plasma plasma excitation device for quasi-radial polarization, comprising: a light source generator for emitting a collimated beam, and sequentially penetrating a spatial optical filter, a photomask and a beam splitter according to the path of the beam; a linear polarization rotator is disposed in front of or behind the spatial light filter according to the path of the light beam, and a surface of the gold film to be tested is formed on the path of the light beam penetrating the beam splitter to form a surface electricity a composite lens of the plasma resonance, and an image sensor is disposed in a direction in which the light beam is partially reflected by the beam splitter; wherein the linear polarized rotator is sequentially provided with a light penetrating one of the light beams a first wave plate having a phase difference of one wavelength, a second wave plate capable of generating a phase difference of a quarter wavelength, and a linear polarizing plate driven by a driving source to be rotated by a central axis thereof, The beam is characterized by a time domain superimposed quasi-radial polarization by the linear polarizer as it rotates. 依請求項1所述之準徑向偏極光之表面電漿激發裝置,其中,該複合透鏡由二凸透鏡和一半球耦合稜鏡組成,該二凸透鏡依該光束的路徑一前一後並排而設,該半球耦合稜鏡的表面有一半球面和一平面,該金膜貼設在該平面,前述部分穿透該分光鏡的光束先後穿透該二凸透鏡後,再由該半球面穿透該半球耦合稜鏡,且於該金膜之表面反射。 The surface-plasma plasma excitation device according to claim 1, wherein the composite lens is composed of a lenticular lens and a hemispherical coupling ,, and the lenticular lens is arranged side by side according to the path of the light beam. The surface of the hemispherical coupling enthalpy has a semi-spherical surface and a plane. The gold film is attached to the plane, and the beam passing through the spectroscope penetrates the lenticular lens successively, and then the hemisphere penetrates the hemisphere. Coupling 稜鏡 and reflecting on the surface of the gold film. 依請求項1所述之準徑向偏極光之表面電漿激發裝置,其中,該光源產生器為一雷射產生器,該光束為其發出準直之雷射光束。 A surface-plasma plasma excitation device according to claim 1, wherein the light source generator is a laser generator that emits a collimated laser beam. 依請求項1所述之準徑向偏極光之表面電漿激發裝置,其中,該光源產生器有一白光光源和一色彩濾波片所組成,由該白光光源發光並穿透該色彩濾波片,以形成該光束。 A surface-plasma plasma excitation device according to claim 1, wherein the light source generator comprises a white light source and a color filter, and the white light source emits light and penetrates the color filter to The beam is formed. 一種依請求項1至4中任一項所述之準徑向偏極光之表面電漿激發裝置之成像方法,包括:由該光源產生器發出該光束,該光束在穿經該空間光濾波器之前或之後,穿經該線性偏極旋轉器之至少一相位延遲波片和該線性偏振片,穿經該空間光濾波器所形成之擴束準直光束在穿經該分光鏡後,被該分光鏡分成二部分穿透的光束和二部分反射的光束,該二部分穿透的光束經該複合透鏡聚焦在該金膜的表面形成表面電漿共振,且經反射回到該分光鏡而和該二部分再經由該分光鏡反射的光束在該影像感測器上形成影像記錄;其中,該光束在穿透該線性偏極旋轉器時,該線性偏振片被該驅動源帶動而旋轉,該光束通過旋轉時之該線性偏振片而產生時域疊加準徑向偏振之特性,且該影像感測器在不同偏振角度所記錄的影像予以疊加,以獲得一準徑向偏極光表面電漿共振結果的影像。An image forming method of a surface-plasma plasma excitation device according to any one of claims 1 to 4, comprising: emitting, by the light source generator, the light beam passing through the spatial light filter Before or after, passing through at least one phase retardation wave plate of the linear polarization rotator and the linear polarization plate, the beam expanding collimated beam formed by the spatial optical filter passes through the beam splitter after being passed through the beam splitter The beam splitter is divided into a two-part penetrating beam and a two-part reflecting beam, and the two-part penetrating beam is focused on the surface of the gold film by the compound lens to form a surface plasma resonance, and is reflected back to the beam splitter and The two portions of the light beam reflected by the beam splitter form an image record on the image sensor; wherein the light beam is rotated by the driving source when the light beam penetrates the linear polarization rotator, The light beam is rotated by the linear polarizer to generate a time-domain superimposed quasi-radial polarization characteristic, and the images recorded by the image sensor at different polarization angles are superimposed to obtain a quasi-radial polarized surface electric Resonance imaging results.
TW105130351A 2016-09-20 2016-09-20 Quasi-radial polarized surface plasmon excitation device and imaging method thereof TWI596331B (en)

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US6229647B1 (en) * 1992-12-14 2001-05-08 Canon Kabushiki Kaisha Reflection and refraction optical system and projection exposure apparatus using the same
US20020126380A1 (en) * 1995-09-23 2002-09-12 Carl-Zeiss-Stiftung Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangement
TW200517397A (en) * 2003-10-16 2005-06-01 Nard Kenkyusho Kabushiki Kaisha Method of measuring surface plasma resonance and noble metal compound for use in the method
CN201307189Y (en) * 2008-10-23 2009-09-09 中国计量学院 Device for realizing conversion from linearly polarized light into radially polarized light

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6229647B1 (en) * 1992-12-14 2001-05-08 Canon Kabushiki Kaisha Reflection and refraction optical system and projection exposure apparatus using the same
US20020126380A1 (en) * 1995-09-23 2002-09-12 Carl-Zeiss-Stiftung Radial polarization-rotating optical arrangement and microlithographic projection exposure system incorporating said arrangement
TW200517397A (en) * 2003-10-16 2005-06-01 Nard Kenkyusho Kabushiki Kaisha Method of measuring surface plasma resonance and noble metal compound for use in the method
CN201307189Y (en) * 2008-10-23 2009-09-09 中国计量学院 Device for realizing conversion from linearly polarized light into radially polarized light

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