TWI596318B - Optical inspection system and optical imaging system - Google Patents

Description

Optical measurement system and optical imaging system

The present invention relates to an optical measurement system and an optical imaging system.

In recent years, due to the reduction in component size, many automated high-precision testing devices have been developed to detect various small parts and even various samples. These detecting devices obtain information of the sample to be tested by detecting the light reflected by the sample to be tested. Among them, how to set the light source and the photosensitive element on the optical path of the detecting device is an important issue.

In some of the detecting devices, a beam splitter is often provided to couple the light transmitting path of the light source with the light receiving path of the photosensitive element so that the reflected light can be efficiently captured by the photosensitive element. However, the setting of the beam splitter tends to reduce the light intensity, resulting in a serious energy loss of the light source. In addition, since the light source is often directly disposed on the optical axis during the coupling process of the light transmission path, the light-emitting diode dies in the light source may generate images, and ghosts may be observed during the detection process.

In another part of the detecting device, the light source is disposed at the foremost end of the detecting device to illuminate the sample to be tested in close proximity, and the light source is disposed off-axis to prevent occlusion The sample to be tested reflects light. However, this design may cause the light of the light source to be too oblique and cause the reflected light to fall outside the receiving range of the photosensitive element, resulting in an unsensible condition.

Some embodiments of the present invention provide an optical measuring system, wherein the light source module has an opening, and the light source module is disposed at the position of the aperture diaphragm of the optical measuring system, so that the light source module can not affect the reflection of the sample to be tested. In the case of light, try to be as close as possible to the optical axis of the optical measurement system. In this way, the light source module can provide light near the forward incidence, so that the reflected light can fall within the receiving range of the photosensitive element, and the energy consumption is not seriously caused by the use of the beam splitter, and the light source can be avoided. The problem of ghosting occurs directly on the optical axis. In addition, in some cases, when the surface of the sample to be tested is not flat, compared with the light that is completely positively incident, the light that is close to the forward incidence is more likely to fall within the receiving range of the photosensitive element, which is beneficial to Detection of optical measurement systems.

Some embodiments of the present invention provide an optical imaging system, wherein the light source module has an opening, and the light source module can provide light that is near normal incidence, and the light source module can be imaged on the object to be tested through the lens. In some cases, when the surface of the sample to be tested is too uneven, the identification pattern formed by the near-positive light is advantageous for recognition compared to the light that is completely incident.

In some embodiments of the present invention, an optical measurement system includes a lens module, a light source module, and a photosensitive element. The lens module includes a first lens assembly and a second lens assembly. The first lens assembly is disposed on the second lens assembly and the object side Between, and the first lens assembly and the second lens assembly have an optical axis in common. The light source module is disposed between the first lens component and the second lens component, wherein the light source module has an opening, and the light axis passes through the opening, and the light source module is configured to emit light toward the object side through the first lens component. The photosensitive element is located on a side opposite to the object side of the lens module, wherein the photosensitive element is configured to receive light from the object side through the opening of the lens module and the light source module.

In some embodiments of the present invention, an optical imaging system includes a lens module and a light source module. The lens module is disposed between a test object and a photosensitive side and has an optical axis. The light source module is disposed between the lens module and the photosensitive side, the light source module has an opening, the optical axis of the lens module passes through the opening, and the light source module is configured to image the image on the object to be tested through the lens module So that the object to be tested reflects the image to the photosensitive side.

100‧‧‧Optical measuring system

110‧‧‧ lens module

112‧‧‧First lens assembly

114‧‧‧Second lens assembly

120‧‧‧Light source module

122‧‧‧ openings

310‧‧‧Lens module

320‧‧‧Light source module

322‧‧‧ openings

324‧‧‧Light source

326‧‧‧Mirror body

326a‧‧‧ openings

124‧‧‧Light source

124a‧‧‧Light source

124b‧‧‧Light source

126‧‧‧ Carrier

126a‧‧‧ openings

126b‧‧‧ Groove

126c‧‧‧ bottom

126d‧‧‧ wall

127‧‧‧reflective layer

128‧‧‧Optical film

129‧‧‧Mirror body

129a‧‧‧ openings

129b‧‧‧ surface

130‧‧‧Photosensitive elements

200‧‧‧ object side

300‧‧‧Optical imaging system

328‧‧‧Light source lens

400‧‧‧Test objects

500‧‧‧Photosensitive side

O1‧‧‧ optical axis

O2‧‧‧ optical axis

P1‧‧‧Part 1

P2‧‧‧ Part II

P3‧‧‧Part III

P4‧‧‧Part IV

SL‧‧‧Light

PL‧‧‧Light

OL‧‧‧ object light

SL1‧‧‧Light

SL2‧‧‧Light

RA‧‧‧Surface area

RB‧‧‧ surface area

1A is a schematic illustration of an optical measurement system in accordance with an embodiment of the present invention.

Figure 1B is a front elevational view of the light source module of the optical measurement system of Figure 1A.

Figure 1C is a cross-sectional view of the light source module of the optical measurement system of Figure 1B.

1D is a cross-sectional view of a light source module of an optical measuring system in accordance with another embodiment of the present invention.

2A is a front elevational view of a light source module of an optical measurement system in accordance with yet another embodiment of the present invention.

Figure 2B is a schematic diagram of the operation of the light source module of the optical measuring system of Figure 2A.

2C is a front elevational view of a light source module of an optical measuring system in accordance with still another embodiment of the present invention.

Figure 3A is a schematic illustration of an optical measurement system in accordance with another embodiment of the present invention.

Figure 3B is a schematic illustration of an optical measurement system in accordance with yet another embodiment of the present invention.

3C is a schematic diagram of a light source module of an optical measurement system in accordance with another embodiment of the present invention.

Figure 4A is a schematic illustration of an optical measurement system in accordance with yet another embodiment of the present invention.

Figure 4B is a schematic illustration of an optical measurement system in accordance with another embodiment of the present invention.

Figure 4C is a schematic illustration of an optical measurement system in accordance with yet another embodiment of the present invention.

Figure 5A is a schematic illustration of an optical imaging system in accordance with an embodiment of the present invention.

Figure 5B is a schematic illustration of an optical imaging system in accordance with another embodiment of the present invention.

The various embodiments of the present invention are disclosed in the drawings, and in the claims Of course However, it should be understood that these practical details are not intended to limit the invention. That is, in some embodiments of the invention, these practical details are not necessary. In addition, some of the conventional structures and elements are shown in the drawings in a simplified manner.

1A is a schematic illustration of an optical measurement system 100 in accordance with an embodiment of the present invention. The optical measurement system 100 includes a lens module 110, a light source module 120, and a photosensitive element 130. The lens module 110 includes a first lens assembly 112 and a second lens assembly 114. The first lens assembly 112 is disposed between the second lens assembly 114 and the object side 200, and the first lens assembly 112 and the second lens assembly 114 have an optical axis O1 in common. The light source module 120 is disposed between the first lens assembly 112 and the second lens assembly 114. The light source module 120 has an opening 122. The optical axis O1 passes through the opening 122. The light source module 120 is configured to face the first lens assembly 112. The object side 200 emits light SL. The photosensitive element 130 is located on a side opposite to the object side 200 of the lens module 110. The photosensitive element 130 is configured to receive the object light OL from the object side 200 through the lens module 110 and the opening 122 of the light source module 120.

The optical measurement system 100 is provided with an aperture stop in the optical measurement system 100 where the beam diameter is the smallest to limit the diameter of the lens module 110. In the present embodiment, the first lens assembly 112 is confocal with the second lens assembly 114 to form a confocal system. An aperture stop is disposed at a confocal position of the first lens assembly 112 and the second lens assembly 114. In one or more embodiments of the present invention, the light source module 120 is placed in an Aperture Stop position of the optical measurement system 100. More precisely, the narrowest portion of the opening 122 of the light source module 120 is an aperture stop. In other words, the opening of the light source module 120 can be used as the optical measurement system 100. The aperture. Here, the dual telecentric system is taken as an example, but the scope of the present invention should not be limited thereto. The light source module 120 can achieve the effect of illuminating and limiting the size of the optical path at the same position of the aperture diaphragm in other systems.

When detecting the object to be tested on the object side 200, the light source module 120 provides the light beam SL to the object side 200, and the light beam SL passes through the first lens assembly 112 and is transmitted to the sample to be tested on the object side 200, after being reflected by the sample to be tested. The object light OL is transmitted to the photosensitive element 130 through the first lens assembly 112, the opening 122 of the light source module 120, and the second lens assembly 114. The surface information of the sample to be tested can be imaged by the lens module 110 to the photosensitive element 130. In the above, the photosensitive element 130 obtains information of the sample to be tested.

In detail, in various embodiments of the present invention, the sample to be tested (located on the object side 200), the position of the lens module 110, the photosensitive element 130, and the internal component arrangement of the lens module 110 may conform to an imaging formula. Here, taking the thin lens as an example, the lens module 110 is regarded as a thin lens with a focal length f, and in order to achieve the purpose of imaging, the sample to be tested and the configuration of the photosensitive element 130 satisfy the thin lens imaging formula: u ^-1 + v ^-1 =f ^-1 . Where u is the distance from the sample to be tested to the thin lens, and v is the distance from the photosensitive element 130 to the thin lens. In practical applications, since the lens has a certain thickness and the thickness of the lens group needs to be considered, it should not be limited to the thin lens imaging formula.

In one embodiment of the present invention, on one hand, by providing the light source module 120 having the opening 122, the light beam SL transmission path of the light source module 120 can be in the same direction as the transmission path of the receiving object light OL of the photosensitive element 130. On the optical path, that is, the center of the light beam substantially coincides, the optical measuring system 100 does not cause serious energy loss due to the use of the beam splitter, and can also be avoided because the light source is directly set. A problem of ghosting placed on the optical axis O1. On the other hand, by arranging the light source module 120 at the position of the aperture stop of the optical measurement system 100, the light source module 120 can be as close as possible to the optical axis O1 of the optical measurement system 100 without affecting or blocking the object light OL. The light source module 120 can provide light near the positive incident object side 200 (for example, the angle between the advancing direction of the light beam SL after passing through the first lens assembly 112 and the optical axis O1 is within a range of ±0.1 degrees to ±10 degrees. , within the range of ±0.1 degrees to ±5 degrees, within the range of ±0.1 degrees to ±3 degrees, etc.). In some embodiments, the light passing through the first lens assembly 112 can approximately exclude the light that is completely incident (the light whose direction of advancement is at an angle of 0 degrees with respect to the optical axis O1). Here, the F/8 optical measurement system (lens) can be less than ±3 degrees.

In various embodiments of the present invention, the light source module 120 is annular, and may be referred to as an annular light source module 120. However, the scope of the present invention should not be limited thereto. The light source module 120 may be square, elliptical, triangular, or the like. However, there are still other shapes in which the opening 122 is located, or the light source module 120 may be composed of a plurality of light source components that are discontinuous or not connected to each other.

Figure 1B is a front elevational view of the light source module 120 of the optical measurement system 100 of Figure 1A. 1C is a cross-sectional view of the light source module 120 of the optical measurement system 100 of FIG. 1B. Refer to both FIG. 1B and FIG. 1C. In one or more embodiments of the present invention, the light source module 120 includes a plurality of light sources 124 and a carrier 126. The light source 124 emits light toward the object side 200 (refer to FIG. 1A), and the carrier 126 is configured to carry the light source 124. The carrier 126 has an opening 126a for the optical axis O1 (refer to FIG. 1A) to pass through to form the light source module 120. Opening 122.

In this embodiment, the carrier 126 of the light source module 120 has a recess 126b disposed on at least one side of the opening 126a of the carrier 126, and the recess 126b The opening 126a faces the object side 200 (see FIG. 1A), and the light source 124 is at least partially disposed in the recess 126b to emit light toward the object side 200 (refer to FIG. 1A). Here, the light source 124 can be disposed on the bottom surface 126c and the wall surface 126d of the carrier 126. In other embodiments, the light source 124 may be disposed only on the bottom surface 126c of the carrier 126 and not on the wall surface 126d due to process difficulty. In the present embodiment, the recess 126b surrounds the opening 126a of the carrier 126 such that the light source 124 also surrounds the opening 126a. The practical application is not limited thereto, and the light source 124 and the carrier 126 can be configured according to the space requirement of the optical measurement system 100.

In some embodiments, the light source module 120 can include a reflective layer 127 disposed between the carrier 126 and the light source 124. Here, the reflective layer 127 may be disposed in the recess 126b to form a reflective cup for enhancing the output light. In some embodiments, the recess 126b has inclined side walls that facilitate the reflective layer 127 disposed thereon to reflect light on the one hand and the narrowest portion of the opening 126a on the other hand, for example, the first portion This narrowest portion of the figure is adjacent the object side 200 to determine the position of the aperture stop of the optical measurement system 100.

In addition, the light source module 120 may further include an optical film 128, such as a diffusion film, a Fresnel lens film, or the like, disposed between the light source 124 and the object side 200 for uniformly distributing the output light of the light source 124.

Here, the light source 124 may be a light-emitting element such as a halogen lamp, a light-emitting diode, or an organic light-emitting diode. The material of the carrier 126 may be glass, plastic, metal, etc., with suitable rigidity to support the light source 124 and its circuitry. In some embodiments, the carrier 126 can also block light from the object side 200 (see FIG. 1A), which has a lower spectral range within the applicable optical measurement system. The penetration rate. The material of the reflective layer 127 may be a material having a reflectance greater than 80% within the spectral range to which the optical measurement system is applicable, such as high reflectivity materials such as silver, aluminum, copper, barium sulfate or titanium dioxide. The material of the optical film 128 may be a vinyl acetate polyester. The photosensitive element 130 may be a Charge-coupled Device (CCD) or other element having a photosensitive property.

In some embodiments of the invention, the light source 124 can be a visible light source or an invisible light source. The materials of the reflective layer 127, the optical film 128, the first lens assembly 112, and the second lens assembly 114 can be adjusted correspondingly as the light spectrum is different. For example, in the spectral range of the visible to infrared region, silver has a high reflectivity, but in the spectral range where the wavelength is less than 340 nm, the reflectance of silver is low; aluminum in the ultraviolet to infrared region High reflectivity in the spectrum. When the light source 124 is a visible light source, a material having a high silver content may be used as the reflective layer 127 to reflect visible light. In contrast, when the light source 124 is an ultraviolet light source, a material having a higher aluminum content may be used as the reflective layer 127 to reflect ultraviolet light.

In addition, the materials of the first lens assembly 112 and the second lens assembly 114 should avoid greatly absorbing the light of the light source 124, and the material properties thereof are not easily broken by the light of the light source 124 (the ultraviolet light is deteriorated, and the glue is separated by the infrared light heat radiation).

1D is a cross-sectional view of a light source module 120 of an optical measurement system 100 in accordance with another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 1C except that the carrier 126 of the light source module 120 of the present embodiment does not have the recess 126b, and the light source 124 is directly disposed on the side of the planar carrier 126 facing the object side 200.

Similarly, the light source module 120 can include a reflective layer 127 disposed between the carrier 126 and the light source 124 to enhance the output light.

Other details of the present embodiment are substantially as described in the embodiment of FIG. 1C, and are not described herein again. In practical applications, the structure of the light source module 120 may be appropriately configured according to the space of the optical measurement system 100, and the scope of the present invention should not be limited by the drawings.

2A is a front elevational view of a light source module 120 of an optical measurement system in accordance with yet another embodiment of the present invention. In one or more embodiments of the present invention, the light source 124 is annularly arranged on the carrier 126 to expose the opening 126a of the carrier 126. In some embodiments, the light source 124 can be switched together through a single control system. In some embodiments, the light source 124 can control the switches of the different portions of the light source 124 by a plurality of control systems, each of which can have a different illumination angle. Here, a manner of controlling the light source 124 of the light source module 120 by a plurality of control systems will be described.

In detail, in the present embodiment, the light source 124a of the first portion P1 may be designed to be annularly arranged and adjacent to the opening 126a of the carrier 126. The light source 124b of the second portion P2 is annularly arranged and away from the opening 126a of the carrier 126. The light source 124a of the first portion P1 and the light source 124b of the second portion P2 have different illumination angles, respectively. For example, for the object side 200 (see FIG. 1A), the light of the light source 124a of the first portion P1 is closer to the normal incidence than the light of the light source 124b of the second portion P2.

FIG. 2B is a schematic diagram of the operation of the light source module 120 of the optical measuring system of FIG. 2A. Here, for convenience of explanation, only the photosensitive element 130 and the object to be tested on the object side are shown, and the light source mode in the optical measuring system is omitted. Group and related lens modules. Refer to both Figures 2A and 2B. When detecting the object to be tested, the light source SL1 may be provided by the light source 124a of the first portion P1, and then the light source SL2 may be provided by the light source 124b of the second portion P2, and the object to be tested may receive different illuminations in sequence. Angles of light SL1, SL2.

In some embodiments, the light sources SL1, SL2 can be simultaneously supplied with the light source 124a of the first portion P1 and the light source 124b of the second portion P2. In this way, the flatter surface area RA can reflect the light ray SL1 and the light ray SL2 to the photosensitive element 130, while the less flat surface area RB can only reflect the light ray SL2 to the photosensitive element 130. At this time, the wavelength of the light generated by the light source 124a and the light source 124b can be configured to increase the discrimination effect. For example, the light source 124a is a blue light source, the light source 124b is a red light source, the surface area RA is purple (blue light is mixed with red light), and the surface area RB is red. The light source 124a and the light source 124b of different illumination angles can detect the surface of the object to be tested hierarchically to obtain detailed information of the surface contour of the object to be tested.

Here, the light SL1 is shown as being completely vertical to facilitate the explanation that the light SL1 is closer to the optical axis than the light SL2, but in actual configuration, the light SL1 is not completely vertical. FIG. 2B is only for explaining this design, and the scope of the present invention should not be limited by the angle of the light, the surface of the object to be tested, and the like.

2C is a front elevational view of the light source module 120 of the optical measurement system in accordance with yet another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 2A except that in the present embodiment, the light source 124 includes the first portion P1, the second portion P2, the third portion P3, and the fourth portion P4. When detecting the object to be tested, the first part P1 and the fourth part P4 may be controlled to simultaneously illuminate, or the second The portion P2 and the third portion P3 illuminate simultaneously, and the illumination pattern of the light source 124 is not completely symmetrical.

Likewise, the light sources 124 of these portions can have different illumination angles and colors to achieve the efficacy of layered detection.

Here, the scope of the present invention should not be limited by the drawings in FIGS. 2A and 2C, and there are still many designs in which the light sources 124 are arranged in practice. For example, light source 124 may not be annularly arranged but still contain multiple portions to achieve the efficacy of delamination detection.

3A is a schematic illustration of an optical measurement system 100 in accordance with another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 1A except that in the present embodiment, the light source module 120 includes at least one light source 124 and a mirror body 129. Light source 124 is used to emit light. The mirror body 129 is configured to reflect light from the light source 124 to advance the light toward the object side, wherein the mirror body 129 has an opening 129a through which the optical axis O1 passes to form an opening of the light source module 120.

In the present embodiment, the mirror body 129 is a plane mirror comprising a reflective layer body having high reflectivity, and the material thereof may be a high reflectivity material such as silver, aluminum, copper, barium sulfate or titanium dioxide for reflecting light. The reflective layer body can have a flat surface. Furthermore, the center line average roughness (Ra) of the surface of the mirror body 129 can be set below a specific roughness, and the mirror body 129 having this specific roughness can be regarded as a perfect mirror (perfect mirror) ) or a flat mirror with a homogenizing function. In some embodiments, this particular roughness can be set in accordance with the requirements of the optical measurement system 100. For example, the particular roughness can be less than about 1.6 microns. Of course, the scope of the invention should not be limited by this roughness value, and other embodiments Wherein, the particular roughness can be any value in the range of from about 1 micron to about 1.6 microns.

In the present embodiment, the angle between the light traveling direction of the light source 124 and the normal direction of the plane mirror (mirror body 129) is substantially equal to the angle between the normal direction of the plane mirror (mirror body 129) and the optical axis O1. For example, the included angle is approximately 45 degrees, but should not limit the scope of the present invention. In practice, the angle can be determined by the spatial configuration of the optical measurement system 100.

When detecting the object to be tested on the object side 200, the light source 124 is reflected by the mirror body 129 to provide the light beam SL to the object side 200, and the light beam SL is transmitted to the sample to be tested on the object side 200 through the first lens assembly 112, and is tested. After the sample is reflected, the object light OL is transmitted to the photosensitive element 130 through the first lens assembly 112, the opening 129a of the mirror body 129 of the light source module 120, and the second lens assembly 114, so that the photosensitive element 130 acquires information of the sample to be tested. Other details of the present embodiment are substantially as described in the embodiment of FIG. 1A, and are not described herein again.

Figure 3B is a schematic illustration of an optical measurement system 100 in accordance with yet another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 3A. The difference is that in the embodiment, the mirror body 129 is composed of two plane mirrors, and the number of the light sources 124 is two, and the plane mirrors are respectively disposed on opposite sides of the optical axis O1. And together have an opening 129a.

Similarly, in the present embodiment, the angle of the light advancing direction of each light source 124 and the normal direction of each plane mirror (mirror body 129) is substantially equal to the normal direction of each plane mirror (mirror body 129) and the optical axis O1. The angle of the. Other details of the present embodiment are substantially as described in the foregoing embodiments, and are not described herein again.

It should be understood that in addition to the configurations of FIGS. 3A and 3B, the mirror body 129 and the light source 124 may be otherwise designed. 3C is a schematic diagram of a light source module 120 of an optical measurement system in accordance with another embodiment of the present invention. In the structural configuration of the light source module 120, the mirror body 129 may have a rough reflective surface 129b on the side facing the object side. In other words, the mirror body 129 may not be the aforementioned plane mirror. When the light is transmitted from the light source 124 to the surface 129b, the surface 129b diffuses the light to the object side to produce a relatively uniform light intensity distribution. The mirror body 129 of the present embodiment has a stronger uniformity than the plane mirror described above. Function. Specifically, in the present embodiment, the center line average roughness Ra of the surface 129b of the mirror body 129 may be larger than the aforementioned specific roughness, for example, 1.6 μm.

The various configurations of the mirror body 129 are described above. It should be understood that although the top view of the mirror body 129 is not illustrated herein, those skilled in the art will appreciate that the mirror body 129 may be circular, square, or elliptical. Shape, triangle, etc. but with a shape that opens in it. The mirror body 129 may be a complete continuous structure, or the mirror body 129 may be composed of a plurality of discrete or non-connected reflective components, and the present invention should not be limited by the structure of the mirror body 129 depicted in the drawings. The scope.

4A is a schematic diagram of an optical measurement system 100 in accordance with yet another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 1A except that in the present embodiment, the first lens assembly 112 and the second lens assembly 114 together form a double Gauss lens group (Double Gauss Lens). Here, the light source module 120 is located at the aperture diaphragm position of the double Gaussian mirror group. More precisely, the narrowest portion of the opening 122 of the light source module 120 is an aperture diaphragm. Double Gaussian mirror is A lens group formed by symmetry of an aperture diaphragm, wherein a negative lens surrounds the aperture stop, and a positive lens and a meniscus lens are used as a periphery, wherein the positive lens is spaced apart from the meniscus lens by an appropriate distance.

In other words, in the present embodiment, the first lens assembly 112 is substantially the same as the second lens assembly 114, and includes a negative lens, a positive lens, and a meniscus lens, respectively, and the narrowest portion of the opening 122 of the light source module 120 is Centrally symmetric setting.

Other details of the present embodiment are substantially as described in the embodiment of FIG. 1A, and are not described herein again.

Figure 4B is a schematic illustration of an optical measurement system 100 in accordance with another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 1A except that in the present embodiment, the first lens assembly 112 and the second lens assembly 114 together form a Cooke Triplet. The light source module 120 is an aperture diaphragm of the Cook three-piece lens set.

In detail, the first lens assembly 112 includes a convex lens and a concave lens, and the second lens assembly 114 includes a convex lens. The convex lens of the first lens assembly 112 and the convex lens of the second lens assembly 114 are respectively disposed at a distance from the concave lens of the first lens assembly 112 to form a substantially symmetrical design. The light source module 120 is located at the aperture stop position between the concave lens of the first lens assembly 112 and the convex lens of the second lens assembly 114.

Other details of the present embodiment are substantially as described in the embodiment of FIG. 1A, and are not described herein again.

Figure 4C is a schematic illustration of an optical measurement system 100 in accordance with yet another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 1A. The difference is that in the present embodiment, the first lens assembly 112 and the second lens assembly 114 together form a celestial mirror group (Tessar). The light source module 120 is located at the aperture diaphragm position of the celestial mirror group.

In detail, the first lens assembly 112 includes a convex lens and a concave lens, and the second lens assembly 114 includes a composite lens group. The convex lens of the first lens assembly 112 and the composite lens group of the second lens assembly 114 are respectively disposed at a certain distance before and after the concave lens of the first lens assembly 112. The light source module 120 is disposed as an aperture stop between the concave lens of the first lens assembly 112 and the composite lens group of the second lens assembly 114.

Other details of the present embodiment are substantially as described in the embodiment of FIG. 1A, and are not described herein again.

Figure 5A is a schematic illustration of an optical imaging system 300 in accordance with an embodiment of the present invention. The optical imaging system 300 includes a lens module 310 and a light source module 320. The lens module 310 is disposed between the object to be tested 400 and the photosensitive side 500 and has an optical axis O2. The light source module 320 is disposed between the lens module 310 and the photosensitive side 500. The light source module 320 has an opening 322. The optical axis O2 of the lens module 310 passes through the opening 322. The light source module 320 is used to image the image on the object to be tested 400 through the lens module 310, so that the object to be tested 400 will be This image is reflected to the photosensitive side 500.

In this embodiment, the light source module 320 includes at least one light source 324, at least one mirror body 326, and at least one light source lens member 328. The mirror body 326 is configured to reflect the light from the light source 324 to advance the light PL toward the object to be tested 400. The mirror body 326 has an opening 326a for the optical axis O2 to pass through to form the opening 322 of the light source module 320. Here, the mirror body 129 like the foregoing embodiment (see the 3A), the mirror body 326 is a plane mirror, and the angle between the forward direction of the light source 324 and the normal direction of the plane mirror is substantially equal to the angle between the normal direction of the plane mirror and the optical axis O2. The light source lens member 328 is disposed between the light source 324 and the mirror body 326 to assist the smooth imaging of the pattern emitted by the light source 324 onto the object to be tested 400.

In various embodiments of the invention, the light emitted by source 324 may itself carry a particular pattern. Alternatively, a light-shielding sheet with a specific pattern opening (e.g., a slit, a square hole) may be placed in front of the uniform light source 324 such that the light from the light source 324 passes through the light-shielding sheet with a specific pattern. In various embodiments of the present invention, by adjusting the configuration of the light source 324, the light source lens member 328, the lens module 310, and the object to be tested 400 to conform to an imaging formula, the pattern of the light source 324 can be imaged to the object to be tested 400. on. For convenience of explanation, here, taking a thin lens as an example, the light source lens member 328 and the lens module 310 together are regarded as a thin lens having a focal length f, and for the purpose of imaging, the light source 324, the light source lens member 328, The configuration of the lens module 310 and the object to be tested 400 satisfies the thin lens imaging formula: u ^-1 + v ^-1 = f ^-1 . Where u is the distance from the light source 324 to the thin lens, and v is the distance from the object 400 to the thin lens. In practical applications, since the lens has a certain thickness and the thickness of the lens group needs to be considered, it should not be limited to the thin lens imaging formula.

In this way, the light source module 320 can be imaged on the object to be tested 400. By designing the mirror body 326 of the light source module 320 to have an opening 326a, the light source module 320 can provide light PL that is near normal incidence. In some embodiments, the light source PL provided by the light source module 320 does not include light that is completely incident. In some cases, when the surface of the object to be tested 400 is too uneven, it is more completely positive. The incident light, which is close to the positively incident light, is advantageous for positively reflecting the identification pattern for subsequent recognition.

Here, the object to be tested 400 can reflect the image to the photosensitive side 500 through the opening 322. In detail, the photosensitive side 500 may be provided with a photosensitive element as in the foregoing embodiment, and the photosensitive element is disposed on the optical axis O2 to receive a pattern from the object to be tested 400. As in the foregoing embodiment of FIG. 1A, other lenses may be disposed between the photosensitive element and the lens module 310, so that the configuration of the object to be tested 400, the photosensitive element, the other lens, and the lens module 310 conform to the imaging formula, and The pattern reflected by the object 400 is smoothly imaged on the photosensitive element. However, it should be understood that these photosensitive elements are not limited to being disposed on the optical axis O2, and the photosensitive element can detect the pattern on the object to be tested 400 from the side without passing through the opening 322. In practical applications, the optical imaging system 300 may not include the photosensitive element, but directly observe the pattern on the object to be tested 400 with the naked eye.

Although only a single plane mirror is shown in the figure, the practical application should not be limited thereto. In some embodiments, as described above, the mirror body 326 can be composed of two plane mirrors, and the number of the light sources 324 is two. The plane mirrors are respectively disposed on opposite sides of the optical axis O2 and have openings together, wherein the light source of each light source 324 advances. The angle with the normal direction of each plane mirror is substantially equal to the angle between the normal direction of each plane mirror and the optical axis O2. Alternatively, the mirror body 326 may have a rough surface (eg, a centerline average roughness greater than 1.6 microns) to diffuse light to the object to be tested 400.

In the present embodiment, the light source lens member 328 may be a double-glued lens, which is composed of a concave lens and a convex lens as shown in the drawings, but the scope of the present invention should not be limited by the drawings. In addition, the light source module 320 of the embodiment may include There are a variety of designs. For related designs, reference may be made to the light source module 120 of the foregoing embodiment, and details thereof will not be described in detail.

Figure 5B is a schematic illustration of an optical imaging system 300 in accordance with another embodiment of the present invention. This embodiment is similar to the embodiment of FIG. 5A except that the light source module 320 of the present embodiment includes a plurality of light sources and a carrier.

In this embodiment, the light emitted by the light source module 320 can be designed with pattern information, and the pattern information is converted by the lens module 310 to form a pattern on the object to be tested 400. Here, the configuration of the lens module 310 is for illustrative purposes only, and the scope of the present invention should not be limited by the drawings.

For the configuration of the light source module 320 of the present embodiment, reference may be made to the design of the light source module 120 of the first embodiment to the first embodiment. Similarly, the light source emits light toward the object to be tested, and the carrier is used to carry the light source, wherein the carrier has an opening for the optical axis to pass through to form an opening of the light source module. In some embodiments, the light source is annularly arranged on the carrier to expose the opening of the carrier. An optical film having an opening, such as a diffusion film, a Fresnel lens film, or the like, may be disposed in front of the lens to uniformly distribute the output light of the light source or be combined with the lens module 310 as a lens in the imaging system.

Other details of the present embodiment are substantially as described in the embodiment of FIG. 5A, and are not described herein.

Some embodiments of the present invention provide an optical measuring system, wherein the light source module has an opening, and the light source module is disposed at the position of the aperture diaphragm of the optical measuring system, so that the light source module can not affect the reflection of the sample to be tested. In the case of light, try to be as close as possible to the optical axis of the optical measurement system. In this way, the light source module can provide light that is close to the normal incidence, so that the reflected light can fall on the photosensitive Within the receiving range of the component, the energy consumption is not severe due to the use of the beam splitter, and the problem of ghosting due to the direct arrangement of the light source on the optical axis can be avoided. In addition, in some cases, when the surface of the sample to be tested is not flat, compared with the light that is completely positively incident, the light that is close to the forward incidence is more likely to fall within the receiving range of the photosensitive element, which is beneficial to Detection of optical measurement systems.

Some embodiments of the present invention provide an optical imaging system, wherein the light source module has an opening, and the light source module can provide light that is near normal incidence, and the light source module can be imaged on the object to be tested through the lens. In some cases, when the surface of the sample to be tested is too uneven, the identification pattern formed by the near-positive light is advantageous for recognition compared to the light that is completely incident.

While the invention has been described above in terms of various embodiments, it is not intended to limit the invention, and the invention may be modified and modified without departing from the spirit and scope of the invention. The scope of protection is subject to the definition of the scope of the patent application attached.

100‧‧‧Optical measuring system

110‧‧‧ lens module

112‧‧‧First lens assembly

114‧‧‧Second lens assembly

120‧‧‧Light source module

122‧‧‧ openings

130‧‧‧Photosensitive elements

200‧‧‧ object side

O1‧‧‧ optical axis

SL‧‧‧Light

OL‧‧‧ object light

Claims (20)

An optical measuring system comprising: a lens module comprising: a first lens assembly; and a second lens assembly, wherein the first lens assembly and the second lens assembly together have an optical axis, the first lens assembly a light source module is disposed between the first lens component and the second lens component, wherein the light source module has an opening through which the optical axis passes. The light source module is configured to emit a light toward the object side through the first lens component; and a photosensitive element is located on a side of the lens module opposite to the object side, wherein the photosensitive element is configured to receive the object from the object side The lens module and one of the openings of the light source module are light rays. The optical measurement system of claim 1, wherein the first lens assembly is confocal with the second lens assembly to form a confocal system. The optical measuring system of claim 1, wherein the first lens component and the second lens component together form a double Gauss Lens, a Cook Threet, or a day. The mirror group (Tessar). The optical measuring system of claim 1, wherein the light source module is disposed at a position of an aperture stop of the optical measuring system. The optical measurement system of claim 1, wherein the light source module comprises: a plurality of light sources, wherein the light sources emit light toward the object side; and a carrier for carrying the light sources, wherein the carrier has an opening The optical axis is passed through to form the opening of the light source module. The optical measuring system of claim 5, wherein the light sources are annularly arranged on the carrier to expose the opening of the carrier. The optical measuring system of claim 5, wherein the first portions of the light sources and the second portions of the light sources have different illumination angles. The optical measuring system of claim 7, wherein the first portions of the light sources are annularly arranged adjacent to the opening of the carrier, and the light sources of the second portion are annularly arranged and away from the opening of the carrier. The optical measuring system of claim 5, wherein the carrier of the light source module has a recess disposed on at least one side of the opening of the carrier, the opening of the recess facing the object side, the light sources being at least Partially disposed in the groove. The optical measurement system of claim 9, wherein the groove surrounds the opening of the carrier. The optical measuring system of claim 5, wherein the light source module comprises a reflective layer disposed between the carrier and the light sources. The optical measurement system of claim 1, wherein the light source module comprises: at least one light source for emitting the light; and a mirror body for reflecting the light from the light source to direct the light toward the object side Advancing, wherein the mirror body has an opening for the optical axis to pass through to form the opening of the light source module. The optical measuring system of claim 12, wherein the mirror body is a plane mirror, and an angle between a light traveling direction of the light source and a normal direction of the plane mirror is substantially equal to an angle between a normal direction of the plane mirror and the optical axis. The optical measuring system of claim 12, wherein the mirror body is composed of two plane mirrors, the number of the light sources is two, and the plane mirrors are respectively disposed on opposite sides of the optical axis and have the opening of the mirror body The angle between the forward direction of the light of each of the light sources and the normal direction of each of the planar mirrors is substantially equal to the angle between the normal direction of each of the planar mirrors and the optical axis. An optical imaging system comprising: a lens module disposed between an object to be tested and a photosensitive side, having an optical axis; a light source module is disposed between the lens module and the photosensitive side, wherein the light source module has an opening and a light emitting portion surrounding the opening, the optical axis of the lens module passes through the opening, the light source The light emitting portion of the module is configured to image an image on the object to be tested through the lens module, so that the object to be tested reflects the image to the photosensitive side. The optical imaging system of claim 15, wherein the light source module comprises: a plurality of light sources, wherein the light sources emit light toward the object to be tested; and a carrier for carrying the light sources, wherein the carrier has a An opening is provided through the optical axis to form the opening of the light source module. The optical imaging system of claim 16, wherein the light sources are annularly arranged on the carrier to expose the opening of the carrier. The optical imaging system of claim 15, wherein the light source module comprises: at least one light source for emitting a light; and at least one mirror body for reflecting the light from the light source to direct the light toward the test Moving forward, wherein the mirror body has an opening for the optical axis to pass through to form the opening of the light source module; and at least one light source lens member disposed between the light source and the mirror body. The optical imaging system of claim 18, wherein the mirror body is a plane mirror, and an angle between a light traveling direction of the light source and a normal direction of the plane mirror is substantially equal to an angle between a normal direction of the plane mirror and the optical axis. The optical imaging system of claim 18, wherein the mirror body is composed of two plane mirrors, the number of the light sources is two, and the plane mirrors are respectively disposed on opposite sides of the optical axis and have the opening of the mirror body The angle between the direction of the light of each of the light sources and the normal direction of each of the plane mirrors is substantially equal to the angle between the normal direction of each of the plane mirrors and the optical axis.