TWI592204B - 過濾構件、過濾器及自光阻劑移除凝膠之方法 - Google Patents

過濾構件、過濾器及自光阻劑移除凝膠之方法 Download PDF

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Publication number
TWI592204B
TWI592204B TW101116479A TW101116479A TWI592204B TW I592204 B TWI592204 B TW I592204B TW 101116479 A TW101116479 A TW 101116479A TW 101116479 A TW101116479 A TW 101116479A TW I592204 B TWI592204 B TW I592204B
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TW
Taiwan
Prior art keywords
layer
filter member
nylon
retention
filter
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TW101116479A
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English (en)
Chinese (zh)
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TW201311331A (zh
Inventor
勞爾 拉米瑞茲
蔡偉明
Original Assignee
恩特葛瑞斯股份有限公司
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Publication of TW201311331A publication Critical patent/TW201311331A/zh
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Publication of TWI592204B publication Critical patent/TWI592204B/zh

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1216—Three or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/10—Testing of membranes or membrane apparatus; Detecting or repairing leaks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/26—Polyalkenes
    • B01D71/261—Polyethylene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/56—Polyamides, e.g. polyester-amides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/02—Types of fibres, filaments or particles, self-supporting or supported materials
    • B01D2239/025—Types of fibres, filaments or particles, self-supporting or supported materials comprising nanofibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/39—Electrospinning

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
TW101116479A 2011-05-09 2012-05-09 過濾構件、過濾器及自光阻劑移除凝膠之方法 TWI592204B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201161483820P 2011-05-09 2011-05-09

Publications (2)

Publication Number Publication Date
TW201311331A TW201311331A (zh) 2013-03-16
TWI592204B true TWI592204B (zh) 2017-07-21

Family

ID=47139959

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101116479A TWI592204B (zh) 2011-05-09 2012-05-09 過濾構件、過濾器及自光阻劑移除凝膠之方法

Country Status (7)

Country Link
US (1) US20150001146A2 (https=)
EP (1) EP2707125A4 (https=)
JP (1) JP6030639B2 (https=)
KR (1) KR101936451B1 (https=)
CN (1) CN103648623B (https=)
TW (1) TWI592204B (https=)
WO (1) WO2012154790A2 (https=)

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TWI460007B (zh) 2009-04-13 2014-11-11 Entegris Inc 多孔複合薄膜
CN105413480B (zh) 2011-04-01 2019-03-29 Emd密理博公司 含有纳米纤维的复合材料结构
JP2015197509A (ja) * 2014-03-31 2015-11-09 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物の製造方法及び感活性光線性又は感放射線性樹脂組成物
CN104014197B (zh) * 2014-06-11 2015-12-02 中鸿纳米纤维技术丹阳有限公司 一种含有溶剂式纳米纤维的过滤膜及其制备方法
JP6568545B2 (ja) * 2014-06-26 2019-08-28 イー・エム・デイー・ミリポア・コーポレイシヨン 増強された汚れ保持容量を有するフィルタ構造
TWI666055B (zh) * 2014-11-20 2019-07-21 美商恩特格林斯公司 接枝超高分子量聚乙烯微孔膜
EP3283202B1 (en) 2015-04-17 2025-10-01 EMD Millipore Corporation Method of purifying a biological materia of interest in a sample using nanofiber ultrafiltration membranes operated in tangential flow filtration mode
US10429738B2 (en) * 2015-09-30 2019-10-01 Tokyo Ohka Kogyo Co., Ltd. Filtration filter, filtration method, production method of purified liquid chemical product for lithography, and method of forming resist pattern
EP3655142B1 (en) 2017-07-21 2026-02-25 Merck Millipore Ltd Non-woven fiber membranes
KR102298236B1 (ko) 2017-07-26 2021-09-07 후지필름 가부시키가이샤 여과 장치, 정제 장치, 약액의 제조 장치, 여과 완료 피정제물, 약액, 및 감활성광선성 또는 감방사선성 수지 조성물
KR102916913B1 (ko) * 2017-11-13 2026-01-22 더블유. 엘. 고어 앤드 어소시에이트스, 인코포레이티드 다공성 멤브레인을 포함하는 필터 백
EP3787783A4 (en) * 2018-04-30 2022-01-19 Entegris, Inc. POLYAMIDE COATED FILTER MEMBRANE, FILTERS AND PROCESS
US20200139309A1 (en) * 2018-11-01 2020-05-07 Entegris, Inc. Porous polyethylene filter membrane with asymmetric pore structure, and related filters and methods
US11998878B2 (en) 2019-03-15 2024-06-04 Entegris, Inc. Composite hollow fiber and related methods and products
JPWO2021070590A1 (https=) * 2019-10-09 2021-04-15
JP2024511911A (ja) * 2020-09-17 2024-03-18 ザ・ホンコン・ユニバーシティー・オブ・サイエンス・アンド・テクノロジー 透明で再利用可能な超高分子量ポリエチレンナノポーラスエアフィルタ
KR102483728B1 (ko) * 2020-12-30 2023-01-02 금오공과대학교 산학협력단 정렬된 기공층을 포함하는 멤브레인 및 이의 제조방법
US20240391220A1 (en) * 2021-08-30 2024-11-28 Massachusetts Institute Of Technology Alternative nanoporous network materials and processes
KR20240065085A (ko) * 2021-09-20 2024-05-14 셀가드 엘엘씨 여과용 건식-공정 멤브레인
EP4606464A1 (en) * 2024-02-20 2025-08-27 Sartorius Stedim Biotech GmbH Method of performing gas/liquid-based integrity test

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Also Published As

Publication number Publication date
CN103648623A (zh) 2014-03-19
WO2012154790A3 (en) 2013-01-31
CN103648623B (zh) 2016-06-15
JP2014514158A (ja) 2014-06-19
EP2707125A2 (en) 2014-03-19
KR101936451B1 (ko) 2019-01-08
EP2707125A4 (en) 2014-11-19
WO2012154790A2 (en) 2012-11-15
US20140061114A1 (en) 2014-03-06
KR20140042811A (ko) 2014-04-07
JP6030639B2 (ja) 2016-11-24
TW201311331A (zh) 2013-03-16
US20150001146A2 (en) 2015-01-01

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