TWI592204B - 過濾構件、過濾器及自光阻劑移除凝膠之方法 - Google Patents

過濾構件、過濾器及自光阻劑移除凝膠之方法 Download PDF

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Publication number
TWI592204B
TWI592204B TW101116479A TW101116479A TWI592204B TW I592204 B TWI592204 B TW I592204B TW 101116479 A TW101116479 A TW 101116479A TW 101116479 A TW101116479 A TW 101116479A TW I592204 B TWI592204 B TW I592204B
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TW
Taiwan
Prior art keywords
layer
filter member
nylon
retention
filter
Prior art date
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TW101116479A
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English (en)
Chinese (zh)
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TW201311331A (zh
Inventor
勞爾 拉米瑞茲
蔡偉明
Original Assignee
恩特葛瑞斯股份有限公司
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Application filed by 恩特葛瑞斯股份有限公司 filed Critical 恩特葛瑞斯股份有限公司
Publication of TW201311331A publication Critical patent/TW201311331A/zh
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Publication of TWI592204B publication Critical patent/TWI592204B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1216—Three or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/14—Other self-supporting filtering material ; Other filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/10—Testing of membranes or membrane apparatus; Detecting or repairing leaks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/02—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor characterised by their properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/26—Polyalkenes
    • B01D71/261—Polyethylene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/56—Polyamides, e.g. polyester-amides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
    • B01D2239/02—Types of fibres, filaments or particles, self-supporting or supported materials
    • B01D2239/025—Types of fibres, filaments or particles, self-supporting or supported materials comprising nanofibres
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/39—Electrospinning

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
TW101116479A 2011-05-09 2012-05-09 過濾構件、過濾器及自光阻劑移除凝膠之方法 TWI592204B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201161483820P 2011-05-09 2011-05-09

Publications (2)

Publication Number Publication Date
TW201311331A TW201311331A (zh) 2013-03-16
TWI592204B true TWI592204B (zh) 2017-07-21

Family

ID=47139959

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101116479A TWI592204B (zh) 2011-05-09 2012-05-09 過濾構件、過濾器及自光阻劑移除凝膠之方法

Country Status (7)

Country Link
US (1) US20150001146A2 (enExample)
EP (1) EP2707125A4 (enExample)
JP (1) JP6030639B2 (enExample)
KR (1) KR101936451B1 (enExample)
CN (1) CN103648623B (enExample)
TW (1) TWI592204B (enExample)
WO (1) WO2012154790A2 (enExample)

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TWI460007B (zh) 2009-04-13 2014-11-11 Entegris Inc 多孔複合薄膜
WO2012135679A2 (en) 2011-04-01 2012-10-04 Emd Millipore Corporation Nanofiber containing composite structures
JP2015197509A (ja) * 2014-03-31 2015-11-09 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物の製造方法及び感活性光線性又は感放射線性樹脂組成物
CN104014197B (zh) * 2014-06-11 2015-12-02 中鸿纳米纤维技术丹阳有限公司 一种含有溶剂式纳米纤维的过滤膜及其制备方法
US12059644B2 (en) * 2014-06-26 2024-08-13 Emd Millipore Corporation Filter structure with enhanced dirt holding capacity
SG11201704043VA (en) * 2014-11-20 2017-06-29 Entegris Inc Grafted ultra high molecular weight polyethylene microporous membranes
KR102206963B1 (ko) 2015-04-17 2021-01-25 이엠디 밀리포어 코포레이션 접선방향 유동 여과 모드에서 작동되는 나노섬유 한외여과막을 사용하여 샘플에서 목적하는 생물학적 물질을 정제하는 방법
US10429738B2 (en) * 2015-09-30 2019-10-01 Tokyo Ohka Kogyo Co., Ltd. Filtration filter, filtration method, production method of purified liquid chemical product for lithography, and method of forming resist pattern
WO2019016605A1 (en) 2017-07-21 2019-01-24 Merck Millipore Ltd MEMBRANES OF NONWOVEN FIBERS
KR102298236B1 (ko) 2017-07-26 2021-09-07 후지필름 가부시키가이샤 여과 장치, 정제 장치, 약액의 제조 장치, 여과 완료 피정제물, 약액, 및 감활성광선성 또는 감방사선성 수지 조성물
WO2019094042A1 (en) * 2017-11-13 2019-05-16 W. L. Gore & Associates, Inc. Filter bags comprising a porous membrane
EP4732938A3 (en) * 2018-04-30 2026-07-22 Entegris, Inc. Polyamide coated filter membrane, filters, and methods
US20200139309A1 (en) 2018-11-01 2020-05-07 Entegris, Inc. Porous polyethylene filter membrane with asymmetric pore structure, and related filters and methods
JP7384922B2 (ja) * 2019-03-15 2023-11-21 インテグリス・インコーポレーテッド 複合中空糸ならびに関連する方法および製品
KR102796443B1 (ko) * 2019-10-09 2025-04-16 후지필름 가부시키가이샤 감방사선성 수지 조성물의 제조 방법, 패턴 형성 방법, 전자 디바이스의 제조 방법
WO2022004217A1 (ja) * 2020-06-30 2022-01-06 富士フイルムエレクトロニクスマテリアルズ株式会社 処理液の製造方法
US12558655B2 (en) * 2020-09-17 2026-02-24 The Hong Kong University Of Science And Technology Transparent reusable ultrahigh molecular weight polyethylene air filter
KR102483728B1 (ko) * 2020-12-30 2023-01-02 금오공과대학교 산학협력단 정렬된 기공층을 포함하는 멤브레인 및 이의 제조방법
US20240391220A1 (en) 2021-08-30 2024-11-28 Massachusetts Institute Of Technology Alternative nanoporous network materials and processes
WO2023043935A1 (en) * 2021-09-20 2023-03-23 Celgard, Llc Dry-process membrane for filtration
EP4606464A1 (en) * 2024-02-20 2025-08-27 Sartorius Stedim Biotech GmbH Method of performing gas/liquid-based integrity test

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US8268395B2 (en) * 2005-12-05 2012-09-18 E. I. Du Pont De Nemours And Company Method for providing resistance to biofouling in a porous support
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US8361180B2 (en) * 2006-11-27 2013-01-29 E I Du Pont De Nemours And Company Durable nanoweb scrim laminates
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TWI460007B (zh) * 2009-04-13 2014-11-11 Entegris Inc 多孔複合薄膜
US8523971B2 (en) * 2009-05-07 2013-09-03 The Hong Kong Polytechnic University Multilayer nanofiber filter

Also Published As

Publication number Publication date
TW201311331A (zh) 2013-03-16
JP2014514158A (ja) 2014-06-19
CN103648623A (zh) 2014-03-19
JP6030639B2 (ja) 2016-11-24
KR20140042811A (ko) 2014-04-07
KR101936451B1 (ko) 2019-01-08
WO2012154790A2 (en) 2012-11-15
WO2012154790A3 (en) 2013-01-31
EP2707125A2 (en) 2014-03-19
US20140061114A1 (en) 2014-03-06
US20150001146A2 (en) 2015-01-01
EP2707125A4 (en) 2014-11-19
CN103648623B (zh) 2016-06-15

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