TWI587421B - An apparatus for assembling devices - Google Patents

Description

Component selection system

The present disclosure relates to a component selection system, and more particularly to a micro component selection system.

With the miniaturization of electronic components, the processing, assembly, and configuration processes for micro-components are becoming more and more complicated. Under different processes, problems such as incompatibility of engineering methods are easily generated, resulting in difficulties in relying on conventional processing methods, and difficulty in fabrication. Relatively increased.

In the batch production of micro-components, in addition to the different considerations of the latter process, there is also the problem of product yield. If the batch-produced micro-components can be selected and processed, assembled, etc., Complex structures can be obtained at relatively low cost, and therefore assembly and configuration techniques related to micro-components are receiving increasing attention.

The present disclosure provides a component selection system, including: an array of a plurality of actuation elements disposed on a substrate, wherein each of the actuation elements includes: a first electrode, And disposed on the substrate and electrically connected to the substrate; a pad disposed on the substrate; a layer of electro-deformable material having a first surface and a second surface, wherein one end of the first surface is disposed And being fixed to the first electrode, and the other end of the first surface is disposed and fixed to the pad; and a second electrode is disposed on the second surface of the electro-deformable material layer and electrically connected to the Substrate.

The present disclosure provides a component selection system, comprising: a substrate, comprising a plurality of actuation elements arranged on the substrate in an array, wherein each of the actuation elements comprises: a first electrode disposed on the substrate, and electrically The substrate is connected to the substrate; a pad is disposed on the substrate; a layer of electro-deformable material has a first surface and a second surface, wherein one end of the first surface is disposed and fixed to the first electrode, And the other end of the first surface is disposed and fixed to the pad; and a second electrode is disposed on the second surface of the electro-deformable material layer and electrically connected to the substrate; an airtight structure; a partition plate disposed adjacent to the airtight structure on the substrate, the partition plate comprising a plurality of through holes, wherein each of the through holes is respectively located corresponding to the electro-deformable material of each of the actuating elements a layer; wherein the substrate, the airtight structure, and the spacer form a chamber, and the substrate further includes a first-class channel for connecting the interior of the cavity and the exterior of the cavity.

The above described features and advantages of the present invention will be more apparent from the following description.

10‧‧‧Substrate

20‧‧‧Actuating element

201‧‧‧First electrode

202‧‧‧ pads

203‧‧‧Electromorphic material layer

203a‧‧‧ first surface

203b‧‧‧ second surface

204‧‧‧second electrode

205‧‧‧ dielectric layer

206‧‧‧ third electrode

207‧‧‧Substrate layer

208‧‧‧Stacked material layer

30‧‧‧ airtight structure

40‧‧‧Baffle

401‧‧‧through holes

402‧‧‧Surface area

403‧‧‧Layer of elastic material

50‧‧‧ flow path

60‧‧‧ components

70‧‧‧Block structure

1A is a cross-sectional view of a component selection system in accordance with an embodiment of the present disclosure.

1B is a top plan view of a component selection system in accordance with an embodiment of the present disclosure.

2 is an enlarged schematic view of a portion A of the component selection system of FIG. 1A.

3 is an enlarged schematic view of a portion A of the component selection system of FIG. 1A.

4 is an enlarged schematic view showing a portion A of the component selection system of FIG. 1A.

5A and 5B are enlarged views of a portion A of the component selection system of Fig. 1A.

Figure 6 is an enlarged partial view of a portion B of the component selection system of Figure 1A.

7A is a partial cross-sectional view of a component selection system in accordance with another embodiment of the present disclosure.

7B is a top plan view of a component selection system in accordance with another embodiment of the present disclosure.

FIG. 8A is a partial cross-sectional view of a component selection system according to still another embodiment of the present disclosure.

FIG. 8B is a top plan view of a component selection system according to still another embodiment of the present disclosure.

9 is a partial cross-sectional view of a component selection system in accordance with yet another embodiment of the present disclosure.

Figure 10 is a partial cross-sectional view of a component selection system in accordance with yet another embodiment of the present disclosure.

1A is a cross-sectional view of a component selection system according to an embodiment of the present disclosure, and FIG. 1B is a plan view of a component selection system according to an embodiment of the present disclosure. Referring to FIGS. 1A and 1B simultaneously, the component selection system includes a substrate 10, a plurality of actuation elements 20, a hermetic structure 30, and a spacer 40. The plurality of actuating elements 20 are disposed on the substrate 10 and located between the substrate 10 and the separator 40. The spacer 40 includes a plurality of through holes 401, and the spacers 40 are connected to the substrate 10 through the airtight structure 30, wherein each of the through holes 401 corresponds to the plurality of actuation elements 20, respectively. The airtight structure is located on the substrate 10 and the partition 40 Between the substrate 10 and the separator 40, the substrate 10, the hermetic structure 30, and the separator 40 form a chamber. The substrate 10 includes a flow path 50 for connection to an external vacuum suction machine.

FIG. 2 is an enlarged schematic view of a portion A of the component selection system of FIG. 1A, showing a structural view of a single actuation element 20. The actuation element 20 includes a first electrode 201, a pad 202, an electro-deformable material layer 203, a second electrode 204, and a dielectric layer 205. The first electrode 201 and the pad 202 are disposed on the substrate 10 , and the first electrode 201 is electrically connected to the substrate 10 . The electro-deformable material layer 203 includes a first surface 203a and a second surface 203b. One end of the first surface 203a is disposed on the first electrode 201, and the other end of the second surface 203b is disposed on the pad 202. The second electrode 204 is disposed on the second surface 203b of the electro-deformable material layer 203, and the second electrode 204 is electrically connected to the substrate 10.

In this embodiment, the first electrode 201 and the second electrode 204 are disposed in the same direction, and a dielectric layer 205 is disposed between the first electrode 201 and the second electrode 204. However, in different embodiments, the first electrode 201 and the second electrode 204 may be disposed in different directions to electrically insulate the first electrode 201 from the second electrode 204. Therefore, the disclosure is not limited thereto.

3 is an enlarged cross-sectional view of a portion of the component selection system of FIG. 1A, showing a structural view of a single actuation element 20 in other embodiments. The actuation element 20 includes a first electrode 201, a third electrode 206, an electro-deformable material layer 203, a second electrode 204, and a dielectric layer 205. The first electrode 201 and the third electrode 206 are disposed on the substrate 10 , and the first electrode 201 and the third electrode 206 are electrically connected to the substrate 10 . Electricity The deformable material layer 203 includes a first surface 203a and a second surface 203b. One end of the first surface 203a is disposed on the first electrode 201, and the other end of the second surface 203b is disposed on the third electrode 206. The second electrode 204 is disposed on the second surface 203b of the electro-deformable material layer 203, and the second electrode 204 is electrically connected to the substrate 10. In the present embodiment, the potentials of the first electrode 201 and the third electrode 206 are the same, and the potentials of the first electrode 201 and the second electrode 204 are different. The material of the electro-deformable material layer 203 is, for example, a Nafion film, a polyaniline, a polypyrrole, or a polyacetylene, or other segments including a polymer main chain. A conjugated structure, when properly doped, produces an oxidation or reduction of a conductive charge, such a typical conductive polymer material.

In this embodiment, the first electrode 201 and the second electrode 204 are disposed in the same direction, and a dielectric layer 205 is disposed between the first electrode 201 and the second electrode 204. However, in different embodiments, the first electrode 201 and the second electrode 204 may be disposed in different directions to electrically insulate the first electrode 201 from the second electrode 204. Therefore, the disclosure is not limited thereto.

4 is an enlarged cross-sectional view showing a portion of the component selection system of FIG. 1A, showing a structural diagram when a single actuator element 20 is applied with a voltage. The actuation element 20 includes a first electrode 201, a pad 202, an electro-deformable material layer 203, a second electrode 204, and a dielectric layer 205. The first electrode 201 and the pad 202 are disposed on the substrate 10 , and the first electrode 201 is electrically connected to the substrate 10 . The electro-deformable material layer 203 includes a first surface 203a and a second surface 203b, and one end of the first surface 203a is disposed and fixed On the first electrode 201, the other end of the second surface 203b is disposed and fixed on the pad 202. The second electrode 204 is disposed on the second surface 203b of the electro-deformable material layer 203, and the second electrode 204 is electrically connected to the substrate 10.

When the first electrode 201 provides a first voltage to the first surface 203a of the electro-deformable material layer 203, and the second electrode 204 provides a second voltage to the second surface 203b of the electro-deformable material layer 203, The first surface 203a of the deformed material layer 203 and the second surface 203b have a voltage difference, and thus the electro-deformable material layer 203 is deformed and bent to protrude from the substrate 10. In this embodiment, the material of the electro-deformable material layer 203 is a Nafion film, and the first voltage is less than the second voltage, so that the electro-deformable material layer 203 is deformed when a voltage is applied and is bent and protruded on the substrate 10 . However, this disclosure is not limited to this. In other embodiments, the electro-deformable material layer 203 may also adopt other conjugated structures including the polymer main chain, and when doped, it has a conductive charge property. Oxidation or reduction, the typical conductive polymer material, the relationship between the first voltage and the second voltage varies depending on the material.

It should be noted that, in the present embodiment, the electro-deformable material layer 203 is a single material layer, but the disclosure is not limited thereto. In other embodiments, the layer of electrodeformable material may also be stacked with a single layer or a plurality of other layers of materials to form a layer of stacked material. For example, as shown in FIG. 5A, a layer 208 of a stack of material is formed with a layer 207 of electro-deformable material and a substrate layer 207. When the layer of electro-deformable material 203 is expanded by an applied voltage, the substrate layer 207 is not The applied voltage is affected, so that the stacked material layer 208 is bent toward one side of the electro-deformable material layer 203. For example, as shown As shown in FIG. 5B, when the electro-deformable material layer 203 is subjected to an applied voltage and the volume is contracted, since the base material layer 207 is not affected by the applied voltage, the stacked material layer 208 is bent toward one side of the base material layer 207.

Figure 6 is an enlarged partial view of a portion B of the component selection system of Figure 1A. The component selection system includes a substrate 10, an actuation element 20, a hermetic structure 30, and a spacer 40. The actuating element 20 is disposed on the substrate 10 and between the substrate 10 and the spacer 40. The partition 40 includes a through hole 401, and the partition 40 is connected to the substrate 10 through the airtight structure 30, wherein the through hole 401 corresponds to the position of the actuating member 20, respectively. The substrate 10, the hermetic structure 30, and the separator 40 form a chamber. The substrate 10 includes a flow path 50 for connection to an external vacuum suction machine.

When the external vacuum suction machine acts, the through hole 401 generates suction so that the element 60 is adsorbed onto the through hole 401. In the present embodiment, the substrate 10 further includes a plurality of switching elements respectively connected to the first electrode 201 or the second electrode 204 of each of the actuating elements 20 to activate the selected actuating element 20. The first electrodes 201 of each of the actuating elements 20 are, for example, disposed in parallel on the substrate 10, and the second electrodes 204 of each of the actuating elements 20 are disposed, for example, in parallel on the substrate 10. The layer of electro-deformable material 203 of the actuated element 20 that is activated is deformed and blocks the corresponding through-hole 401, while the actuating element 20 that is not activated is not deformed such that the actuating element 20 is not activated. The through hole 401 is capable of sucking the component 60, thereby achieving the function of component selection.

7A is a partial cross-sectional view of a component selection system according to another embodiment of the present disclosure, and FIG. 6B is a top plan view of a component selection system according to another embodiment of the present disclosure. please 7A and 7B, the component selection system includes a substrate 10, an actuation element 20, a hermetic structure 30, a spacer 40, and a barrier structure 70. The actuating element 20 is disposed on the substrate 10 and between the substrate 10 and the spacer 40. The partition 40 includes a through hole 401, and the partition 40 is connected to the substrate 10 through the airtight structure 30, wherein the through hole 401 corresponds to the position of the actuating member 20, respectively. The substrate 10, the hermetic structure 30, and the separator 40 form a chamber. The substrate 10 includes a flow path 50 for connection to an external vacuum suction machine. The barrier structures 70 are spaced apart in the chamber and are connected to the substrate 10 and the spacers 40, respectively, to strengthen the structure of the chamber to ensure the distance between the substrate 10 and the spacer 40 when the external vacuum suction machine is actuated. The blocking structure 70 is, for example, arranged in an array in the chamber, but the disclosure is not limited thereto.

8A is a partial cross-sectional view of a component selection system according to still another embodiment of the present disclosure, and FIG. 8B is a top plan view of a component selection system according to still another embodiment of the present disclosure. Referring to FIGS. 8A and 8B simultaneously, the component selection system includes a substrate 10, an actuation element 20, a hermetic structure 30, a spacer 40, and a barrier structure 70. The actuating element 20 is disposed on the substrate 10 and between the substrate 10 and the spacer 40. The partition 40 includes a through hole 401, and the partition 40 is connected to the substrate 10 through the airtight structure 30, wherein the through hole 401 corresponds to the position of the actuating member 20, respectively. The substrate 10, the hermetic structure 30, and the separator 40 form a chamber. The substrate 10 includes a flow path 50 for connection to an external vacuum suction machine. The barrier structure 70 is disposed in the airtight structure 30 and connects the substrate 10 and the spacer 40, respectively, to strengthen the structure of the chamber to ensure the distance between the substrate 10 and the spacer 40 when the external vacuum suction machine is actuated.

9 is a partial view of a component selection system according to still another embodiment of the present disclosure. Sectional view. The component selection system includes a substrate 10, an actuation element 20, a hermetic structure 30, and a spacer 40. The actuating element 20 is disposed on the substrate 10 and between the substrate 10 and the spacer 40. The partition 40 includes a through hole 401, and the partition 40 is connected to the substrate 10 through the airtight structure 30, wherein the through hole 401 corresponds to the position of the actuating member 20, respectively. The substrate 10, the hermetic structure 30, and the separator 40 form a chamber. The substrate 10 includes a flow path 50 for connection to an external vacuum suction machine. In the present embodiment, the spacer 40 includes surface regions 402 of different heights on the outside of the chamber for enhancing the ability of the component selection system of the present embodiment to select components of different thicknesses.

Figure 10 is a partial cross-sectional view of a component selection system in accordance with yet another embodiment of the present disclosure. The component selection system includes a substrate 10, an actuation element 20, a hermetic structure 30, and a spacer 40. The actuating element 20 is disposed on the substrate 10 and between the substrate 10 and the spacer 40. The partition 40 includes a through hole 401, and the partition 40 is connected to the substrate 10 through the airtight structure 30, wherein the through hole 401 corresponds to the position of the actuating member 20, respectively. The substrate 10, the hermetic structure 30, and the separator 40 form a chamber. The substrate 10 includes a flow path 50 for connection to an external vacuum suction machine. In the present embodiment, the spacer 40 includes an elastic material layer 403 disposed on the surface of the spacer 40 on the outdoor side of the chamber. When the thickness of the component to be selected is different at the same time, the elastic material layer 403 can be deformed to be effective. For components of different thicknesses or materials, components of different thicknesses or materials are adsorbed by the component selection system.

In summary, the component selection system of the present disclosure can select one or at the same time to select a plurality of components according to requirements, thereby achieving the effect of rapid assembly, and can effectively select the application when applied to the batch production process. The required components are not The same follow-up production process to achieve fast mass production component packaging.

The present disclosure has been disclosed in the above embodiments, but it is not intended to limit the disclosure, and any person skilled in the art can make some changes and refinements without departing from the spirit and scope of the disclosure. The scope of protection of this disclosure is subject to the definition of the scope of the appended claims.

10‧‧‧Substrate

20‧‧‧Actuating element

201‧‧‧First electrode

202‧‧‧ pads

203‧‧‧Electromorphic material layer

203a‧‧‧ first surface

203b‧‧‧ second surface

204‧‧‧second electrode

205‧‧‧ dielectric layer

Claims (20)

A component selection system, comprising: a plurality of actuating elements arranged in an array on a substrate, wherein each of the actuating elements comprises: a first electrode disposed on the substrate and electrically connected to the substrate; a pad disposed on the substrate; a layer of electro-deformable material having a first surface and a second surface, wherein one end of the first surface is disposed and fixed to the first electrode, and the first surface is further One end is disposed and fixed to the pad; and a second electrode is disposed on the second surface of the electro-deformable material layer and electrically connected to the substrate. The component selection system of claim 1, wherein the first electrodes are disposed in parallel on the substrate, and the second electrodes are disposed in parallel on the substrate. The component selection system of claim 1, wherein the first electrodes provide a first voltage, and the second electrodes provide a second voltage to activate the actuation elements and The layer of electromorphic material is deformed. A component selection system according to claim 3, further comprising a plurality of switching elements respectively connected to the first electrode or the second electrode of each of the actuation elements to selectively activate at least one of the Actuating elements. The component selection system of claim 1, wherein the pad is a third electrode, and the third electrode is equipotential to the first electrode. The component selection system of claim 1, wherein the first electrode and the second electrode further comprise a dielectric layer electrically insulating the first electrode and the second electrode. A component selection system according to claim 1, wherein each of the components The actuating elements further comprise a substrate layer stacked with the electro-deformable material layer to form a layer of stacked material, the layer of the stacked material being bent toward one side of the layer of electro-deformable material when the layer of electro-deformable material is expanded and deformed. When the electroformable material layer is contracted and deformed, the layer of the stacked material is bent toward one side of the substrate layer. A component selection system, comprising: a substrate, comprising a plurality of actuating elements arranged on the substrate, wherein each of the actuating elements comprises: a first electrode disposed on the substrate and electrically connected to a substrate; a pad disposed on the substrate; a layer of electro-deformable material having a first surface and a second surface, wherein one end of the first surface is disposed and fixed to the first electrode, and the first The other end of a surface is disposed and fixed to the pad; and a second electrode is disposed on the second surface of the electro-deformable material layer and electrically connected to the substrate; an airtight structure; and a spacer Adjacent to the substrate through the airtight structure, the spacer includes a plurality of through holes, wherein the positions of each of the through holes respectively correspond to the layer of electro-deformable material of each of the actuating elements; The substrate, the hermetic structure, and the spacer form a chamber, and the substrate further includes a first-class channel for connecting the interior of the cavity to the exterior of the cavity. The component selection system of claim 8, wherein the first electrodes are disposed in parallel on the substrate, and the second electrodes are disposed in parallel on the substrate. The component selection system of claim 8, wherein the first electrodes provide a first voltage, and the second electrodes provide a second voltage to activate the actuation elements and The layer of electro-deformable material is deformed to close or open the corresponding The through holes. A component selection system according to claim 10, further comprising a plurality of switching elements respectively connected to the first electrode or the second electrode of each of the actuation elements to selectively activate at least one of the Actuating elements. A component selection system according to claim 8 wherein the flow path is connected to a vacuum suction machine. A component selection system according to claim 8, wherein the spacer further comprises a layer of elastic material disposed on the spacer and outside the chamber. A component selection system according to claim 8, wherein the spacer on the outdoor side of the chamber has surface areas of different heights. The component selection system of claim 8, further comprising a plurality of barrier structures disposed between the substrate and the spacer, and the barrier structures are not in contact with the actuation elements. A component selection system according to claim 15, wherein the array of barrier structures is disposed between the substrate and the spacer. A component selection system according to claim 15, wherein the barrier structures are disposed between the substrate and the spacer and are located in the airtight structure. A component selection system according to claim 8, wherein the pad is a third electrode, and the third electrode has the same potential as the first electrode. The component selection system of claim 8, wherein the first electrode and the second electrode further comprise a dielectric layer to electrically insulate the first electrode from the second electrode. The component selection system of claim 8, wherein each of the actuation elements further comprises a substrate layer and the electro-deformable material layer stacked to form a layer of stacked material, wherein the electro-deformable material layer When the expansion is deformed, the layer of the stacked material is electrically changed One side of the layer of material is curved; when the layer of electroformed material is contracted and deformed, the layer of the layer of material is bent toward one side of the substrate layer.