TWI584909B - Fixed fixture - Google Patents

Fixed fixture Download PDF

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Publication number
TWI584909B
TWI584909B TW102111348A TW102111348A TWI584909B TW I584909 B TWI584909 B TW I584909B TW 102111348 A TW102111348 A TW 102111348A TW 102111348 A TW102111348 A TW 102111348A TW I584909 B TWI584909 B TW I584909B
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Taiwan
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workpiece
supporting member
fixing jig
laser processing
processing head
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TW102111348A
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Chinese (zh)
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TW201408414A (en
Inventor
Yasuki Nishiwaki
Yohei Komuro
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Nippon Sharyo Ltd
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Description

工件固定治具 Workpiece fixing fixture

本發明係有關於一種固定雷射加工用薄板之工件的工件固定治具,尤其係有關於一種可支撐工件之下面的工件固定治具。 The present invention relates to a workpiece fixing jig for fixing a workpiece of a sheet for laser processing, and more particularly to a workpiece fixing jig capable of supporting a workpiece below.

在製作組裝基板時所使用之金屬遮罩係使用雷射加工機所製作。雷射加工機係對是板厚為0.03mm~0.5mm之金屬薄板的工件,照射聚光的雷射光,而且噴射輔助氣體,進行高精度、高品質之微細切割的加工裝置。這種雷射加工機係例如記載於如下的專利文獻1,在以適當之張力(tension)將工件保持拉伸下進行雷射加工。 The metal mask used in the production of the assembled substrate was produced using a laser processing machine. The laser processing machine is a processing device that performs high-precision, high-quality micro-cutting by irradiating concentrated laser light to a workpiece of a thin metal plate having a thickness of 0.03 mm to 0.5 mm. Such a laser processing machine is described, for example, in Patent Document 1 below, and performs laser processing while holding a workpiece under an appropriate tension.

這是在作用於工件之張力過小的情況,由於在工件產生鬆弛,而焦點透鏡與工件的距離(工件距離)變動,而無法進行高精度之雷射加工。另一方面,在作用於工件之張力過大的情況,由於在雷射加工中在工件發生斷裂或伸長等之變形。如第9圖所示,在如下之專利文獻1所記載之雷射加工機101係在將工件W安裝於一體地裝入加工台102的固持裝置103後,對工件W賦予適當之張力。 This is because when the tension acting on the workpiece is too small, the distance between the focus lens and the workpiece (the workpiece distance) varies due to slack in the workpiece, and high-precision laser processing cannot be performed. On the other hand, in the case where the tension acting on the workpiece is excessively large, deformation of the workpiece due to breakage or elongation during laser processing is caused. As shown in FIG. 9, the laser processing machine 101 described in the following Patent Document 1 applies an appropriate tension to the workpiece W after the workpiece W is attached to the holding device 103 that is integrally mounted in the processing table 102.

【先行專利文獻】 [Prior patent documents] 【專利文獻】 [Patent Literature]

[專利文獻1]特開2004-160495號公報 [Patent Document 1] JP-A-2004-160495

可是,近年來,有預先對工件賦予適當之張力,再將該狀態之工件安裝於雷射加工機並進行雷射加工的要求。在應付這種要求的情況,對雷射加工機另外設置固定工件的工件固定治具,並預先對以該工件固定治具所固定工件賦予張力,然後,將工件與工件固定治具一起安裝於雷射加工機,進行雷射加工。 However, in recent years, there has been a demand for applying a proper tension to a workpiece in advance, and attaching the workpiece in this state to a laser processing machine and performing laser processing. In the case of coping with such a request, a workpiece fixing fixture for fixing the workpiece is additionally provided to the laser processing machine, and tension is applied to the workpiece fixed by the workpiece fixing fixture in advance, and then the workpiece is mounted together with the workpiece fixing fixture. Laser processing machine for laser processing.

可是,在使用這種工件固定治具的情況,具有以下的問題點。即,在固定於工件固定治具之薄板的工件進行雷射加工時,在工件所加工之孔或開口變多,而在工件發生鬆弛。尤其,如框加工般,以雷射加工對固定後之工件在幾乎整個區域切割而形成大的開口孔時,在開口孔的一部分發生下垂。發生這種工件之鬆弛或下垂時,焦點透鏡與工件的距離(工件距離)變動,雷射加工精度不穩定,有未切斷的情況。 However, in the case of using such a workpiece fixing jig, the following problems are caused. That is, when the workpiece fixed to the thin plate of the workpiece fixing jig is subjected to laser processing, the number of holes or openings processed in the workpiece increases, and the workpiece is slackened. In particular, as in the frame processing, when the fixed workpiece is cut by laser processing to form a large opening hole in almost the entire area, a part of the opening hole sag. When such a workpiece is slack or sagging, the distance between the focus lens and the workpiece (work distance) fluctuates, the laser processing accuracy is unstable, and there is no cut.

對此,為了防止工件之鬆弛或下垂所造成之工件距離的變動,想到支撐工件的下面。可是,若將支撐工件之下面整體的支撐機構設置於工件固定治具的情況,支撐機構變大,而工件固定治具的重量變大。結果,將工件固定治具安裝於雷射加工機時之搬運變成很麻煩。又,即使是設置支撐工件之下面之一部分的支撐體,而且設置使該支撐體在工件之平面方向移動之致動器的情況,亦需要新追加致動器,而工件固定治具變成昂貴。 In order to prevent the variation of the workpiece distance caused by the slack or sagging of the workpiece, it is conceivable to support the underside of the workpiece. However, if the support mechanism that supports the entire lower surface of the workpiece is placed on the workpiece fixing jig, the support mechanism becomes large, and the weight of the workpiece fixing jig becomes large. As a result, handling of the workpiece fixing jig when it is mounted on a laser processing machine becomes troublesome. Further, even in the case where a support that supports one of the lower portions of the workpiece is provided and an actuator that moves the support in the planar direction of the workpiece is provided, it is necessary to newly add an actuator, and the workpiece fixing jig becomes expensive.

因此,本發明之目的在於為了解決上述之課題,提供一種能以便宜且簡單的構成防止工件的鬆弛或下垂所造成之工件距離之變動的工件固定治具。 Accordingly, an object of the present invention is to provide a workpiece fixing jig capable of preventing a variation in a workpiece distance caused by slack or sagging of a workpiece in an inexpensive and simple configuration in order to solve the above problems.

本發明之工件固定治具,係在藉拉伸是雷射加工用薄板的工件而賦予張力的狀態固定,並在安裝於雷射加工機後被進行雷射加工,該工件固定治具的特徵為包括:第1、第2縱架,係在該工件之拉伸方向延伸並彼此平行;固定側橫架,係在與該工件之拉伸方向及與該工件之平面垂直的方向之兩方向正交之方向延伸並固定該工件的一端側;可動側橫架,係與該固定側橫架平行地延伸並在握持該工件之另一端側的狀態拉伸;工件支撐構件,係與該固定側橫架平行地延伸並支撐該工件中與該雷射加工機的加工頭相對向之部分的下面;及追蹤移動機構,係以追蹤在該加工頭之該工件之拉伸方向之移動的方式使該工件支撐構件在該工件的拉伸方向移動。 The workpiece fixing jig of the present invention is fixed in a state in which tension is applied to a workpiece which is a laser processing sheet, and is subjected to laser processing after being mounted on a laser processing machine, and the workpiece fixing jig is characterized. The method includes: the first and second longitudinal frames extend in the stretching direction of the workpiece and are parallel to each other; the fixed side cross frame is in two directions from the stretching direction of the workpiece and the direction perpendicular to the plane of the workpiece. Extending and fixing one end side of the workpiece in the orthogonal direction; the movable side cross frame extends in parallel with the fixed side cross frame and stretches while holding the other end side of the workpiece; the workpiece supporting member is fixed with the fixing a lateral cross member extending in parallel and supporting a lower portion of the workpiece opposite the processing head of the laser processing machine; and a tracking movement mechanism for tracking movement of the workpiece in the stretching direction of the processing head The workpiece supporting member is moved in the stretching direction of the workpiece.

在此情況,因為工件支撐構件支撐與加工頭相對向之部分的下面,所以隨著雷射加工的進展而在工件所加工之孔或開口變多,亦不會在工件發生鬆弛或下垂。因此,可防止工件距離的變動,而可使雷射加工精度變成穩定。又,因為工件支撐構件係以追蹤在加工頭之工件的拉伸方向之移動的方式移動,所以不必支撐工件的下面整體,而支撐至少與加工頭相對向之部分的下面即可。因此,支撐工件之下面的機構不會變大。進而,不必設置使工件支撐構件移動的致動器。因此,可便宜且簡單地構成工件固定治具。 In this case, since the workpiece supporting member supports the lower portion of the portion opposite to the processing head, the number of holes or openings processed in the workpiece increases as the laser processing progresses, and the workpiece does not slack or sag. Therefore, the variation of the distance of the workpiece can be prevented, and the laser processing accuracy can be stabilized. Further, since the workpiece supporting member is moved in such a manner as to follow the movement in the stretching direction of the workpiece of the processing head, it is not necessary to support the entire lower surface of the workpiece, but to support at least the lower portion of the portion facing the processing head. Therefore, the mechanism supporting the underside of the workpiece does not become large. Further, it is not necessary to provide an actuator that moves the workpiece supporting member. Therefore, the workpiece fixing jig can be constructed inexpensively and simply.

又,在本發明之工件固定治具,最好該追蹤移動機構係具有:各滑動構件,係安裝成可沿著該第1、第2縱架滑動,並安裝該工件支撐構件之兩端部;及一對加工頭追蹤構件,係與該固定側橫架平行地延伸,而且配置成在該工件之拉伸方向夾住該加工頭,藉由該加工頭抵接,使該各滑動構件滑動。 Further, in the workpiece fixing jig of the present invention, preferably, the tracking movement mechanism has: each sliding member mounted to be slidable along the first and second vertical frames, and mounting both end portions of the workpiece supporting member And a pair of processing head tracking members extending in parallel with the fixed side cross frame, and configured to sandwich the processing head in a stretching direction of the workpiece, and the sliding members are slid by the processing head abutting .

在此情況,在加工頭在工件之拉伸方向移動時,加工頭與加工頭追蹤構件抵接,而各滑動構件沿著第1、第2縱架滑動。藉此,兩端部安裝於各滑動構件的工件支撐構件係以追蹤加工頭之移動的方式在工件之拉伸方向移動。依此方式,因為利用加工頭與加工頭追蹤構件之抵接,使工件支撐構件移動,所以不必在加工頭(雷射加工機)與工件支撐構件之間設置連結構件,而可更簡單地構成工件固定治具。 In this case, when the machining head moves in the drawing direction of the workpiece, the machining head abuts against the machining head tracking member, and each of the sliding members slides along the first and second vertical frames. Thereby, the workpiece supporting members attached to the respective sliding members at both end portions are moved in the stretching direction of the workpiece so as to track the movement of the processing head. In this way, since the workpiece supporting member is moved by the abutment of the machining head and the machining head tracking member, it is not necessary to provide a coupling member between the machining head (laser processing machine) and the workpiece support member, and the composition can be more simply constructed. Workpiece fixing fixture.

又,在本發明之工件固定治具,最好該工件支撐構件係支撐該工件之下面的部分的截面為圓形;該工件支撐構件之兩端部係經由可轉動地支撐該工件支撐構件的轉動支撐機構,安裝於該各滑動構件。 Further, in the workpiece fixing jig of the present invention, preferably, the workpiece supporting member supports a lower portion of the workpiece to have a circular cross section; both ends of the workpiece supporting member are rotatably supported by the workpiece supporting member. A support mechanism is rotated and attached to each of the sliding members.

在此情況,因為在各滑動構件在工件之拉伸方向移動時,工件支撐構件係其兩端部經由轉動支撐機構安裝於各滑動構件,所以在對工件的下面大致線接觸之狀態一面轉動一面追蹤加工頭的移動。因此,可降低工件支撐構件與工件之下面接觸阻力,工件支撐構件不會硬拉工件之下面的毛邊,而可幾乎消除在工件之下面所產生的刮傷。因此,可防止所製作之工件的品質降低,而且可大幅度減少對刮傷所進行之研磨加工 的時間,而可提高工件的生產效率。 In this case, since the workpiece supporting member is attached to each of the sliding members via the rotation supporting mechanism when the sliding members are moved in the drawing direction of the workpiece, the surface of the workpiece supporting member is rotated by a substantially linear contact with the lower surface of the workpiece. Track the movement of the machining head. Therefore, the contact resistance between the workpiece supporting member and the workpiece can be reduced, and the workpiece supporting member does not hardly pull the underside of the workpiece, and the scratch generated under the workpiece can be almost eliminated. Therefore, the quality of the workpiece to be produced can be prevented from being lowered, and the grinding of the scratch can be greatly reduced. Time can increase the productivity of the workpiece.

又,在本發明之工件固定治具,在該滑動構件,設置將該工件支撐構件朝向該工件之下面偏壓的偏壓構件較佳。 Further, in the workpiece fixing jig of the present invention, it is preferable that the sliding member is provided with a biasing member that biases the workpiece supporting member toward the lower surface of the workpiece.

在此情況,因為偏壓構件總是將工件支撐構件朝向工件的下面偏壓,所以可維持藉工件支撐構件所支撐之工件的下面附近總是拉伸之狀態。結果,隨著雷射加工的進展而在工件所加工之孔或開口變多,亦雷射之焦點難偏移,而可使雷射加工精度變成穩定。 In this case, since the biasing member always biases the workpiece supporting member toward the lower surface of the workpiece, it is possible to maintain a state in which the vicinity of the lower surface of the workpiece supported by the workpiece supporting member is always stretched. As a result, as the laser processing progresses, the number of holes or openings processed in the workpiece increases, and the focus of the laser is hardly shifted, so that the laser processing accuracy becomes stable.

又,在本發明之工件固定治具,該工件支撐構件係以成為彼此平行的方式設置一對,並配置成對從該加工頭所照射之雷射光在該工件之拉伸方向相距固定量。 Further, in the workpiece fixing jig of the present invention, the workpiece supporting members are provided in a pair so as to be parallel to each other, and are arranged such that the laser light irradiated from the processing head is fixed by a fixed amount in the stretching direction of the workpiece.

在此情況,因為以彼此成為平行的方式設置一對工件支撐構件,所以易支撐與加工頭相對向之部分的下面。又,因為工件支撐構件配置成遠離雷射光,所以可防止雷射加工所產生之熔化物落入形成於一對工件支撐構件之間的空間,並附著於工件支撐構件。 In this case, since the pair of workpiece supporting members are disposed in parallel with each other, it is easy to support the lower surface of the portion opposite to the processing head. Further, since the workpiece supporting member is disposed away from the laser light, it is possible to prevent the melt generated by the laser processing from falling into the space formed between the pair of workpiece supporting members and adhering to the workpiece supporting member.

若依據本發明,提供一種能以便宜且簡單的構成防止工件的鬆弛或下垂所造成之工件距離之變動的工件固定治具。 According to the present invention, there is provided a workpiece fixing jig capable of preventing a variation in a workpiece distance caused by slack or sagging of a workpiece with an inexpensive and simple configuration.

1‧‧‧雷射加工機 1‧‧ ‧ laser processing machine

10、10A‧‧‧工件固定治具 10, 10A‧‧‧ workpiece fixture

11‧‧‧第1縱架 11‧‧‧1st vertical frame

12‧‧‧第2縱架 12‧‧‧2nd vertical frame

13‧‧‧第1橫架 13‧‧‧1st cross frame

14‧‧‧第2橫架 14‧‧‧2nd cross frame

15‧‧‧固定側橫架 15‧‧‧Fixed side cross frame

16‧‧‧可動側橫架 16‧‧‧ movable side cross frame

20‧‧‧螺絲機構 20‧‧‧ screw mechanism

30‧‧‧加工頭 30‧‧‧Processing head

32‧‧‧焦點透鏡 32‧‧‧Focus lens

40‧‧‧工件支撐構件 40‧‧‧Workpiece support members

41‧‧‧滑動構件 41‧‧‧Sliding members

42‧‧‧加工頭追蹤構件 42‧‧‧Processing head tracking component

50‧‧‧工件支撐構件 50‧‧‧Workpiece support members

60‧‧‧滑動構件 60‧‧‧Sliding members

63‧‧‧線圈彈簧 63‧‧‧ coil spring

70‧‧‧轉動支撐機構 70‧‧‧Rotary support mechanism

71‧‧‧軸管 71‧‧‧ shaft tube

72‧‧‧具有凸緣之軸承 72‧‧‧Flanged bearings

73‧‧‧軸管 73‧‧‧ shaft tube

74‧‧‧具有六角孔之螺栓 74‧‧‧Bolts with hexagonal holes

75‧‧‧墊圈 75‧‧‧ Washer

W‧‧‧工件 W‧‧‧Workpiece

Wa‧‧‧一端側 Wa‧‧‧ one end side

Wb‧‧‧另一端側 Wb‧‧‧ the other end side

WU‧‧‧下面 WU‧‧‧ below

第1圖係第1實施形態之工件固定治具的平面圖。 Fig. 1 is a plan view showing a workpiece fixing jig of the first embodiment.

第2圖係沿著第1圖之A-A線的剖面圖。 Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

第3圖係切割雷射加工機之一部分的部分剖面圖。 Figure 3 is a partial cross-sectional view of a portion of a laser processing machine.

第4圖係從下面側觀察第3圖所示之工件時的圖。 Fig. 4 is a view when the workpiece shown in Fig. 3 is viewed from the lower side.

第5圖係第2實施形態之工件固定治具的平面圖。 Fig. 5 is a plan view showing the workpiece fixing jig of the second embodiment.

第6圖係第5圖所示之工件支撐構件與轉動支撐機構的部分剖面圖。 Fig. 6 is a partial cross-sectional view showing the workpiece supporting member and the rotation supporting mechanism shown in Fig. 5.

第7圖係第5圖所示之B部分的放大圖。 Fig. 7 is an enlarged view of a portion B shown in Fig. 5.

第8圖係沿著第5圖之C-C線的剖面圖。 Fig. 8 is a cross-sectional view taken along line C-C of Fig. 5.

第9圖係在模式上表示以往之雷射加工機的圖。 Fig. 9 is a view showing a conventional laser processing machine in a mode.

一面參照圖面,一面說明本發明之工件固定治具的實施形態如下。第1圖係第1實施形態之工件固定治具10的平面圖,第2圖係沿著第1圖之A-A線的剖面圖。工件固定治具10係藉由拉伸雷射加工用薄板之工件W,在賦予張力之狀態固定。該工件固定治具10係在固定工件W之狀態向雷射加工機1(參照第3圖)搬運後,安裝於雷射加工機1。 The embodiment of the workpiece fixing jig of the present invention will be described below with reference to the drawings. Fig. 1 is a plan view showing a workpiece fixing jig 10 according to the first embodiment, and Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1. The workpiece fixing jig 10 is fixed by a state in which tension is applied by stretching the workpiece W of the laser processing sheet. The workpiece fixing jig 10 is attached to the laser processing machine 1 after being conveyed to the laser processing machine 1 (see FIG. 3) in a state where the workpiece W is fixed.

工件W係在將焊料塗布於電子元件之基板時用以遮蔽的不銹鋼板,是板厚為0.03mm~0.5mm之矩形的薄板。工件W之長度方向(第1圖之上下方向)的長度是約600mm,在與工件W之長度方向正交之方向(第1圖之左右方向)的長度是約480mm。藉由從雷射加工機1對該工件W照射雷射光,形成貫穿孔。 The workpiece W is a stainless steel plate for shielding when solder is applied to a substrate of an electronic component, and is a rectangular thin plate having a thickness of 0.03 mm to 0.5 mm. The length of the longitudinal direction of the workpiece W (the upper and lower directions in the first drawing) is about 600 mm, and the length in the direction orthogonal to the longitudinal direction of the workpiece W (the horizontal direction in the first drawing) is about 480 mm. The workpiece W is irradiated with laser light from the laser processing machine 1 to form a through hole.

工件固定治具10係如第1圖及第2圖所示,是其外形形成矩形的框體,具有在工件W之拉伸方向(以下,適當 地稱為「縱向」)所延伸的第1縱架11與第2縱架12、及在與工件W之拉伸方向及與工件W之平面垂直的方向之兩方向正交之方向(以下,適當地稱為「橫向」)所延伸的第1橫架13及第2橫架14。此外,在第1圖,以箭號表示工件W之拉伸方向(縱向)。又,工件固定治具10係在第1橫架13之附近具有在橫向所延伸的固定側橫架15,在第2橫架14之附近具有在橫向所延伸的可動側橫架16。 The workpiece fixing jig 10 is a frame having a rectangular outer shape as shown in Figs. 1 and 2, and has a stretching direction in the workpiece W (hereinafter, appropriate The first vertical frame 11 and the second vertical frame 12 extending in the "longitudinal direction" are orthogonal to the direction perpendicular to the direction in which the workpiece W is stretched and the direction perpendicular to the plane of the workpiece W (hereinafter, The first cross frame 13 and the second cross frame 14 extended as appropriate are referred to as "horizontal". Further, in Fig. 1, the drawing direction (longitudinal direction) of the workpiece W is indicated by an arrow. Further, the workpiece fixing jig 10 has a fixed side cross frame 15 extending in the lateral direction in the vicinity of the first cross frame 13, and a movable side cross frame 16 extending in the lateral direction in the vicinity of the second cross frame 14.

第1、第2縱架11、12係彼此平行,兩端部經由螺栓與第1、第2橫架13、14連結。第1、第2縱架11、12之長度方向的長度係約660mm。在第1、第2縱架11、12,形成用以使後述之滑動構件41及可動側橫架16在縱向滑動的導軌11a、12a。第1、第2橫架13、14係彼此平行,其長度方向的長度係約500mm。 The first and second vertical frames 11 and 12 are parallel to each other, and both end portions are coupled to the first and second transverse frames 13 and 14 via bolts. The length of the first and second longitudinal frames 11 and 12 in the longitudinal direction is about 660 mm. The first and second vertical frames 11 and 12 are formed with guide rails 11a and 12a for sliding the slide member 41 and the movable side cross frame 16 which will be described later in the longitudinal direction. The first and second transverse frames 13, 14 are parallel to each other, and the length in the longitudinal direction is about 500 mm.

固定側橫架15係握持工件W之一端側Wa的夾緊板,其位置被固定。可動側橫架16係握持工件W之另一端側Wb的夾緊板,並在兩端具有導件16a。該導件16a係安裝成可沿著第1、第2縱架11、12的導軌11a、12a滑動。依此方式,可動側橫架16藉由導件16a沿著導軌11a、12a滑動,而可在縱向滑動。又,可動側橫架16係藉第2橫架14而不會從第1、第2縱架11、12之第1圖下端脫落。 The fixed-side cross frame 15 is a clamp plate that holds one end side Wa of the workpiece W, and its position is fixed. The movable side cross frame 16 holds the clamping plate of the other end side Wb of the workpiece W, and has guides 16a at both ends. The guide 16a is attached so as to be slidable along the guide rails 11a, 12a of the first and second vertical frames 11, 12. In this manner, the movable side cross frame 16 is slidable in the longitudinal direction by the guide member 16a sliding along the guide rails 11a, 12a. Further, the movable side cross frame 16 is not detached from the lower end of the first figure of the first and second vertical frames 11 and 12 by the second cross frame 14.

在此,在該工件固定治具10,使用在第1圖之左右方向配置於對稱位置的螺絲機構20,對工件W賦予適當的張力。這是用以在雷射加工中防止工件W發生鬆弛、或者斷裂或伸長。各螺絲機構20由貫穿第2橫架14並螺接於可動側 橫架16的螺絲部21、與使該螺絲部21轉動的轉動部22所構成。以下,說明對工件賦予適當之張力的步驟。 Here, in the workpiece fixing jig 10, the screw mechanism 20 disposed at the symmetrical position in the left-right direction of FIG. 1 is used to apply an appropriate tension to the workpiece W. This is to prevent the workpiece W from being slackened, or broken or elongated during laser processing. Each screw mechanism 20 is threaded through the second cross frame 14 and screwed to the movable side The screw portion 21 of the cross frame 16 and the rotating portion 22 that rotates the screw portion 21 are formed. Hereinafter, a step of imparting an appropriate tension to the workpiece will be described.

首先,如第1圖所示,使固定側橫架15握持工件W的一端側Wa,同時使工件W之另一端側Wb握持可動側橫架16,藉此,將工件W定位並固定。接著,將螺絲機構20安裝於工件固定治具10後,使轉動部22轉動,而將可動側橫架16拉至第1圖的下側。在此時,將轉動部22的轉動量調整成對工件W賦予適當的張力。 First, as shown in Fig. 1, the fixed side cross frame 15 is held by the one end side Wa of the workpiece W, and the other end side Wb of the workpiece W is held by the movable side cross frame 16, whereby the workpiece W is positioned and fixed. . Next, after the screw mechanism 20 is attached to the workpiece fixing jig 10, the rotating portion 22 is rotated, and the movable side cross frame 16 is pulled to the lower side of the first drawing. At this time, the amount of rotation of the rotating portion 22 is adjusted to impart an appropriate tension to the workpiece W.

然後,在對工件W賦予適當之張力的狀態,以螺栓17連結可動側橫架16與第1、第2縱架11、12。然後,從工件固定治具10拆下螺絲機構20。依此方式,即使所拉伸之工件W想回到原來之狀態,而可動側橫架16想移至第1圖之上側,亦藉螺栓17限制該移動。即,在該工件固定治具10,可一面維持對工件W賦予適當之張力的狀態,一面搬至雷射加工機1。 Then, the movable side cross frame 16 and the first and second vertical frames 11 and 12 are coupled by bolts 17 in a state where an appropriate tension is applied to the workpiece W. Then, the screw mechanism 20 is removed from the workpiece fixing jig 10. In this manner, even if the workpiece W to be stretched is intended to return to the original state, and the movable side cross frame 16 is intended to move to the upper side of the first figure, the movement is restricted by the bolts 17. In other words, the workpiece fixing jig 10 can be moved to the laser processing machine 1 while maintaining a proper tension to the workpiece W.

其次,說明對工件W進行雷射加工之雷射加工機1的示意構成。第3圖係切割雷射加工機1之一部分的部分剖面圖。又,第4圖係從下面WU側觀察第3圖所示之工件W時的圖。如上述所示,固定工件W之工件固定治具10係安裝於雷射加工機1的固持裝置(省略圖示),並對工件W進行雷射加工。雷射加工機1係如第3圖所示,具有加工頭30。 Next, a schematic configuration of the laser processing machine 1 for performing laser processing on the workpiece W will be described. Fig. 3 is a partial cross-sectional view showing a portion of the laser processing machine 1. Moreover, Fig. 4 is a view when the workpiece W shown in Fig. 3 is viewed from the lower WU side. As described above, the workpiece fixing jig 10 for fixing the workpiece W is attached to a holding device (not shown) of the laser processing machine 1 and performs laser processing on the workpiece W. The laser processing machine 1 has a processing head 30 as shown in FIG.

加工頭30係照射雷射光的裝置,具有從上方導入雷射光的頭本體31、係配置於頭本體31內之是凸透鏡的焦點透鏡32、及配置成與焦點透鏡32同軸之圓錐筒形的噴嘴33。 該加工頭30係可藉未圖示之高架等的位移機構部等在工件W之平面方向(縱向及橫向)移動,一面在工件W之平面方向移動,一面切割工件W。此外,在第3圖及第4圖,以箭號表示工件W之拉伸方向。 The processing head 30 is a device that irradiates laser light, and has a head main body 31 that introduces laser light from above, a focus lens 32 that is a convex lens disposed in the head main body 31, and a conical cylindrical nozzle that is disposed coaxially with the focus lens 32. 33. In the processing head 30, the workpiece W can be cut while moving in the planar direction of the workpiece W (longitudinal direction and lateral direction) by a displacement mechanism portion or the like (such as an overhead frame (not shown). Further, in FIGS. 3 and 4, the drawing direction of the workpiece W is indicated by an arrow.

在本實施形態之工件固定治具10,藉由支撐工件W之下面WU,防止工件W之鬆弛或下垂,而防止焦點透鏡32與工件W之距離,即工件距離變動。以下,詳細說明工件固定治具10支撐工件W之下面WU的構成。 In the workpiece fixing jig 10 of the present embodiment, by supporting the lower surface WU of the workpiece W, the slack or sagging of the workpiece W is prevented, and the distance between the focus lens 32 and the workpiece W, that is, the workpiece distance is prevented from changing. Hereinafter, the configuration in which the workpiece fixing jig 10 supports the lower surface WU of the workpiece W will be described in detail.

工件固定治具10係如第1圖~第4圖所示,包括:在橫向所延伸之2支工件支撐構件40、連結(固定)該工件支撐構件40之兩端部的各滑動構件41、及配置成在縱向夾住在橫向所延伸之加工頭30的一對加工頭追蹤構件42。 The workpiece fixing jig 10 includes two workpiece supporting members 40 extending in the lateral direction, and sliding members 41 that connect (fix) both end portions of the workpiece supporting member 40, as shown in FIGS. 1 to 4, And a pair of processing head tracking members 42 configured to clamp the processing head 30 extending in the lateral direction in the longitudinal direction.

各工件支撐構件40係如第4圖所示,用以支撐工件W中至少與加工頭30相對向之部分的下面(背面)WU。這些工件支撐構件40係配置於工件W之下面WU側,如第1圖所示,為了可支撐工件W之橫向的整體,比工件W之橫向的長度更長。一對工件支撐構件40係以隔著加工頭30之噴嘴33之尖端的方式平行地配置成對從加工頭30所照射之雷射光在縱向相距既定量。這是為了防止雷射加工所產生之熔化物落入形成於一對工件支撐構件40之間的空間,並附著於工件支撐構件40。又,設置2支工件支撐構件40係為了比一支更易支撐與加工頭30相對向之工件W的下面WU。此外,如第3圖所示,工件支撐構件40係圓棒狀,但是工件支撐構件40的形狀係可適當地變更,亦可是截面為四角形或上側為平面狀的三 角形。又,亦可工件支撐構件40是板狀。 Each of the workpiece supporting members 40 is a lower surface (back surface) WU for supporting at least a portion of the workpiece W opposed to the processing head 30 as shown in FIG. These workpiece supporting members 40 are disposed on the lower side of the workpiece W on the WU side. As shown in Fig. 1, in order to support the lateral whole of the workpiece W, the length in the lateral direction of the workpiece W is longer. The pair of workpiece supporting members 40 are arranged in parallel so as to be spaced apart from each other in the longitudinal direction by the laser beam irradiated from the processing head 30 so as to be spaced apart from the tip end of the nozzle 33 of the processing head 30. This is to prevent the melt generated by the laser processing from falling into the space formed between the pair of workpiece supporting members 40 and adhering to the workpiece supporting member 40. Further, two workpiece supporting members 40 are provided to more easily support the lower surface WU of the workpiece W opposed to the processing head 30 than one. Further, as shown in FIG. 3, the workpiece supporting member 40 is formed in a round bar shape, but the shape of the workpiece supporting member 40 may be appropriately changed, or may be a quadrangular cross section or a flat upper side. Angled. Further, the workpiece supporting member 40 may have a plate shape.

各滑動構件41係用以沿著第1、第2縱架11、12在縱向滑動。各滑動構件41係如第3圖及第4圖所示,具有連接各工件支撐構件40之兩端部的連結體41a、與安裝於第1、第2縱架11、12之導軌11a、12a的移動體41b。連結體41a係形成大致的長方體形狀,並將加工頭追蹤構件42固定於上面。移動體41b係可利用未圖示之球的滾動沿著導軌11a、12a進行直線運動。即,這些移動體41b與導軌11a、12a形成直線引導機構。 Each of the sliding members 41 is slidable in the longitudinal direction along the first and second vertical frames 11 and 12. Each of the sliding members 41 has a connecting body 41a that connects the both end portions of the respective workpiece supporting members 40 and guide rails 11a and 12a that are attached to the first and second vertical frames 11 and 12, as shown in Figs. 3 and 4 . Mobile body 41b. The connecting body 41a is formed into a substantially rectangular parallelepiped shape, and the processing head tracking member 42 is fixed to the upper surface. The moving body 41b is linearly movable along the guide rails 11a and 12a by rolling of a ball (not shown). That is, these moving bodies 41b form a linear guide mechanism with the guide rails 11a and 12a.

各加工頭追蹤構件42係藉加工頭30抵接,使各滑動構件41滑動。這一對加工頭追蹤構件42係如第1圖所示,在橫向架設於各滑動構件41之間。又,如第3圖所示,在縱向(拉伸方向),很小的間隙X1形成於加工頭30與各加工頭追蹤構件42之間。藉此,加工頭30係在橫向移動時,不會與各加工頭追蹤構件42抵接。可是,加工頭30係在縱向移動時,不論其橫向的位置,都與各加工頭追蹤構件42抵接。這些加工頭追蹤構件42係從橫向之兩端延伸至下方,下端固定於各滑動構件41的連結體41a之上面。 Each of the machining head tracking members 42 is brought into contact with the machining head 30 to slide the respective sliding members 41. The pair of processing head tracking members 42 are bridged between the respective sliding members 41 as shown in Fig. 1 . Further, as shown in Fig. 3, a small gap X1 is formed between the machining head 30 and each of the machining head tracking members 42 in the longitudinal direction (stretching direction). Thereby, the processing head 30 does not come into contact with each of the processing head tracking members 42 when moving in the lateral direction. However, when the machining head 30 moves in the longitudinal direction, it abuts against each of the machining head tracking members 42 regardless of the lateral position. These processing head tracking members 42 extend from both ends in the lateral direction to the lower side, and the lower ends are fixed to the upper surfaces of the coupling bodies 41a of the respective sliding members 41.

如第3圖所示,一對加工頭追蹤構件42配置於在縱向對加工頭30之中心線O1對稱的位置。各加工頭追蹤構件42與加工頭30之間之縱向的間隙X1係小至約1mm,在加工頭30與各加工頭追蹤構件42的抵接部分,為使抵接的加工精度不受影響,安裝降低撞擊的緩衝構件(省略圖示)。此外,加工頭追蹤構件42係圓棒狀,加工頭追蹤構件42的形狀係可適 當地變更,亦可截面是四角形。又,亦可加工頭追蹤構件42是板狀。在本實施形態,各加工頭追蹤構件42與各滑動構件41相當於本發明之追蹤移動機構。 As shown in FIG. 3, the pair of machining head tracking members 42 are disposed at positions symmetrical with respect to the center line O1 of the machining head 30 in the longitudinal direction. The longitudinal gap X1 between the machining head tracking member 42 and the machining head 30 is as small as about 1 mm, and the machining accuracy of the abutment is not affected by the abutment portion of the machining head 30 and each machining head tracking member 42. Install a cushioning member that reduces impact (not shown). Further, the processing head tracking member 42 is in the shape of a round bar, and the shape of the processing head tracking member 42 is suitable. Local changes, or the cross section is a quadrangle. Further, the processing head tracking member 42 may be in a plate shape. In the present embodiment, each of the machining head tracking members 42 and each of the sliding members 41 corresponds to the tracking movement mechanism of the present invention.

其次,說明第1實施形態之工件固定治具10的作用效果。工件固定治具10係在對工件W賦予適當之張力的狀態安裝於雷射加工機1,被進行雷射加工。在此時,即使加工頭30在橫向(第1圖之左右方向)移動,亦因為工件支撐構件40的長度比工件W之橫向的長度長,所以工件支撐構件40可總是支撐與加工頭30相對向之部分的下面WU(參照第4圖)。又,加工頭30在縱向(第1圖之上下方向)移動時,加工頭30與加工頭追蹤構件42抵接,各滑動構件41沿著第1、第2縱架11、12移動。藉此,各工件支撐構件40係以追蹤加工頭30之移動的方式在縱向移動,而可總是支撐與加工頭30相對向之部分的下面WU。 Next, the operation and effect of the workpiece fixing jig 10 of the first embodiment will be described. The workpiece fixing jig 10 is attached to the laser processing machine 1 in a state in which an appropriate tension is applied to the workpiece W, and is subjected to laser processing. At this time, even if the processing head 30 is moved in the lateral direction (the left-right direction of FIG. 1), since the length of the workpiece supporting member 40 is longer than the lateral length of the workpiece W, the workpiece supporting member 40 can always be supported and processed by the processing head 30. The lower part of the WU is opposite (see Figure 4). Further, when the machining head 30 moves in the vertical direction (the downward direction in the first drawing), the machining head 30 comes into contact with the machining head tracking member 42, and the sliding members 41 move along the first and second vertical frames 11 and 12. Thereby, each of the workpiece supporting members 40 is moved in the longitudinal direction in such a manner as to track the movement of the processing head 30, and the lower surface WU which is opposed to the processing head 30 can always be supported.

依此方式,不管加工頭30的移動,都可支撐與加工頭30相對向之部分的下面WU。隨著雷射加工的進展而在工件W所加工之孔或開口變多,亦不會在工件W發生鬆弛或下垂。因此,可防止工件距離的變動,而可使雷射加工精度變成穩定。而且,若依據本工件固定治具10,因為工件支撐構件40以追蹤加工頭30之縱向之移動的方式移動,所以不必支撐工件W的下面WU整體,而支撐工件W之下面WU的機構不會變大。進而,不必設置使工件支撐構件40移動的致動器。因此,可便宜且簡單地構成工件固定治具10。 In this manner, the lower portion of the WU opposite the processing head 30 can be supported regardless of the movement of the processing head 30. As the laser processing progresses, the number of holes or openings processed in the workpiece W increases, and the workpiece W does not slack or sag. Therefore, the variation of the distance of the workpiece can be prevented, and the laser processing accuracy can be stabilized. Further, if the jig 10 is fixed in accordance with the workpiece, since the workpiece supporting member 40 moves in such a manner as to track the longitudinal movement of the processing head 30, it is not necessary to support the entire lower WU of the workpiece W, and the mechanism for supporting the lower WU of the workpiece W does not Become bigger. Further, it is not necessary to provide an actuator that moves the workpiece support member 40. Therefore, the workpiece fixing jig 10 can be configured inexpensively and simply.

又,若依據第1實施形態的工件固定治具10,如 上述所示,利用加工頭30與加工頭追蹤構件42的抵接,使工件支撐構件40移動。因此,不必將連結構件設置於加工頭30(雷射加工機1)與工件支撐構件40之間,而可更簡單地構成工件固定治具10。 Moreover, according to the workpiece fixing jig 10 of the first embodiment, As described above, the workpiece supporting member 40 is moved by the contact of the machining head 30 with the machining head tracking member 42. Therefore, it is not necessary to provide the joint member between the machining head 30 (the laser processing machine 1) and the workpiece support member 40, and the workpiece fixture jig 10 can be configured more simply.

又,若依據第1實施形態的工件固定治具10,因為如第4圖所示以彼此成為平行的方式設置一對工件支撐構件40,所以易支撐與加工頭30相對向之部分的下面WU。又,工件支撐構件40配置成遠離所照射之雷射光,所以可遠離雷射加工所產生之熔化物落入形成於一對工件支撐構件40之間的空間,並附著於工件支撐構件40。 Further, according to the workpiece fixing jig 10 of the first embodiment, since the pair of workpiece supporting members 40 are provided in parallel with each other as shown in Fig. 4, it is easy to support the lower portion of the portion opposite to the processing head 30. . Further, since the workpiece supporting member 40 is disposed away from the irradiated laser light, the melt which is generated away from the laser processing falls into the space formed between the pair of workpiece supporting members 40 and adheres to the workpiece supporting member 40.

其次,說明第2實施形態的工件固定治具10A。在上述之第1實施形態的工件固定治具10,各工件支撐構件40之兩端部固定於各滑動構件41。因此,在各滑動構件41及工件支撐構件40在縱向(第1圖之上下方向)移動時,各工件支撐構件40與工件W之下面WU的接觸阻力變大,各工件支撐構件40一面捲入工件W之下面WU的毛邊一面硬拉,而可能在工件W之下面WU產生很多刮傷。依此方式產生刮傷時,不僅所製作之工件的品質降低,而且需要進行研磨之使刮傷變成不顯眼的作業。而且,在產生很多刮傷的情況,進行研磨加工的時間需要多,成為工件之生產效率降低的原因。因此,在第2實施形態的工件固定治具10A,為了應付上述的問題,而如以下所示構成。 Next, the workpiece fixing jig 10A of the second embodiment will be described. In the workpiece fixing jig 10 of the first embodiment described above, both end portions of the workpiece supporting members 40 are fixed to the respective sliding members 41. Therefore, when each of the sliding member 41 and the workpiece supporting member 40 moves in the longitudinal direction (the lower direction in the first drawing), the contact resistance between each of the workpiece supporting members 40 and the lower surface of the workpiece W becomes larger, and each of the workpiece supporting members 40 is entangled. The burr of the WU below the workpiece W is hard-drawn on one side, and there may be many scratches on the WU below the workpiece W. When a scratch is generated in this manner, not only the quality of the workpiece to be produced is lowered, but also the grinding is required to cause the scratch to become an inconspicuous work. Further, in the case where a large number of scratches are generated, the polishing processing time is required to be large, which causes a decrease in the production efficiency of the workpiece. Therefore, the workpiece fixing jig 10A of the second embodiment is configured as follows in order to cope with the above problems.

第5圖係第2實施形態之工件固定治具10A的平面圖。在第5圖所示之第2實施形態的工件固定治具10A與第 1圖所示之第1實施形態的工件固定治具10,因為第1、第2縱架11、12、第1、第2橫架13、14、固定側橫架15、可動側橫架16及加工頭追蹤構件42係相同的構成,所以附加相同的符號,並省略其說明。另一方面,在第2實施形態的工件固定治具10A,因為工件支撐構件50與滑動構件60的構成係與第1實施形態的構成相異,還新設置轉動支撐機構70,所以說明工件支撐構件50、滑動構件60及轉動支撐機構70。 Fig. 5 is a plan view showing the workpiece fixing jig 10A of the second embodiment. The workpiece fixing jig 10A and the second embodiment shown in Fig. 5 The workpiece fixing fixture 10 of the first embodiment shown in Fig. 1 has first and second vertical frames 11 and 12, first and second transverse frames 13, 14 and a fixed side cross frame 15 and a movable side cross frame 16. The processing head tracking member 42 has the same configuration, and the same reference numerals will be given thereto, and the description thereof will be omitted. On the other hand, in the workpiece fixing jig 10A of the second embodiment, since the configuration of the workpiece supporting member 50 and the sliding member 60 is different from that of the first embodiment, the rotation supporting mechanism 70 is newly provided, so that the workpiece supporting is described. The member 50, the sliding member 60, and the rotation support mechanism 70.

第6圖係第5圖所示之工件支撐構件50與轉動支撐機構70的部分剖面圖。工件支撐構件50係如第5圖及第6圖所示,是在橫向(第5圖之左右方向)所延伸之中空圓筒形的管,並具有圓孔狀的貫穿孔50a。而且,工件支撐構件50之外形的截面是圓形,其外徑為10mm。該工件支撐構件50係不考慮工件W之下面WU的鬆弛,就對工件W的下面WU以大致線接觸(不是面接觸)之狀態支撐,兩端部50b、50c分別經由轉動支撐機構70安裝於滑動構件60。 Fig. 6 is a partial cross-sectional view showing the workpiece supporting member 50 and the rotation support mechanism 70 shown in Fig. 5. The workpiece supporting member 50 is a hollow cylindrical tube extending in the lateral direction (the left-right direction of FIG. 5) as shown in FIGS. 5 and 6, and has a circular hole-shaped through hole 50a. Further, the outer shape of the workpiece supporting member 50 is circular in shape and has an outer diameter of 10 mm. The workpiece supporting member 50 is supported in a state of substantially line contact (not surface contact) with respect to the lower surface WU of the workpiece W regardless of the slack of the lower surface of the workpiece W, and the both end portions 50b, 50c are respectively mounted via the rotation support mechanism 70. Sliding member 60.

轉動支撐機構70係將工件支撐構件50支撐成可轉動,如第6圖所示,構成為包括軸管71、具有凸緣之軸承72、軸環管73、具有六角孔之螺栓74及墊圈75。而且,具有凸緣之軸承72、軸環管73、具有六角孔之螺栓74及墊圈75係分別設置各2個。 The rotation support mechanism 70 supports the workpiece support member 50 to be rotatable, as shown in Fig. 6, and is configured to include a shaft tube 71, a bearing 72 having a flange, a collar tube 73, a bolt 74 having a hexagonal hole, and a washer 75. . Further, the bearing 72 having the flange, the collar tube 73, the bolt 74 having the hexagonal hole, and the washer 75 are provided in each of two.

軸管71係比工件支撐構件50更長之在橫向所延伸之中空圓筒形的管,並具有圓孔形的貫穿孔71a。該軸管71係同軸地貫穿工件支撐構件50的貫穿孔50a。兩端部71b、71c從工件支撐構件50之兩端部50b、50c突出。而且,工件支撐 構件50之兩端部50b、50c係藉各具有凸緣之軸承72對軸管71組裝成可轉動。 The shaft tube 71 is a hollow cylindrical tube extending in the lateral direction longer than the workpiece supporting member 50, and has a through hole 71a having a circular hole shape. The shaft tube 71 penetrates the through hole 50a of the workpiece supporting member 50 coaxially. Both end portions 71b and 71c protrude from both end portions 50b and 50c of the workpiece supporting member 50. Moreover, the workpiece support Both end portions 50b, 50c of the member 50 are assembled to be rotatable by the bearing 72 having a flange.

各具有凸緣之軸承72係組裝於工件支撐構件50之貫穿孔50a的兩端,並藉凸緣掛在工件支撐構件50之兩端的側面。此外,因為工件支撐構件50之一端部50b側的構成與工件支撐構件50之另一端部50c側的構成係一樣,所以在以下僅說明工件支撐構件50之一端部50b側的構成。 Each of the flanged bearings 72 is assembled to both ends of the through hole 50a of the workpiece supporting member 50, and is hung on the side surfaces of both ends of the workpiece supporting member 50 by flanges. Further, since the configuration of the one end portion 50b side of the workpiece supporting member 50 is the same as the configuration of the other end portion 50c side of the workpiece supporting member 50, only the configuration of the one end portion 50b side of the workpiece supporting member 50 will be described below.

軸環管73係用以防止具有凸緣之軸承72從貫穿孔50a脫落。該軸環管73係中空圓筒形的管,具有圓孔形的貫穿孔73a,並組裝於軸管71之一端部71b的外周。具有六角孔之螺栓74係用以防止軸環管73從軸管71之一端部71b的外周脫落。該具有六角孔之螺栓74係使用墊圈75安裝於軸環管73的貫穿孔73a。 The collar tube 73 is for preventing the bearing 72 having the flange from coming off the through hole 50a. The collar tube 73 is a hollow cylindrical tube having a circular hole-shaped through hole 73a and assembled to the outer circumference of one end portion 71b of the shaft tube 71. The bolt 74 having a hexagonal hole is for preventing the collar tube 73 from coming off the outer circumference of one end portion 71b of the shaft tube 71. The bolt 74 having a hexagonal hole is attached to the through hole 73a of the collar tube 73 using a washer 75.

其次,一面參照第7圖,一面說明工件支撐構件50之一端部50b經由轉動支撐機構70安裝於滑動構件60的狀態。第7圖係第5圖所示之B部分的放大圖。如第7圖所示,軸環管73係貫穿形成於滑動構件60之連結體60a的貫穿孔60c,在此狀態,使用螺栓62將壓板61從上方安裝於滑動構件60的連結體60a。藉由依此方式將軸環管73安裝於滑動構件60,藉轉動支撐機構70使工件支撐構件50可對滑動構件60轉動。 Next, a state in which one end portion 50b of the workpiece supporting member 50 is attached to the sliding member 60 via the rotation support mechanism 70 will be described with reference to FIG. Fig. 7 is an enlarged view of a portion B shown in Fig. 5. As shown in Fig. 7, the collar pipe 73 penetrates the through hole 60c formed in the coupling body 60a of the sliding member 60. In this state, the pressure plate 61 is attached to the coupling body 60a of the sliding member 60 from above by the bolt 62. By attaching the collar tube 73 to the sliding member 60 in this manner, the workpiece supporting member 50 can rotate the sliding member 60 by the rotation support mechanism 70.

接著,一面參照第8圖,一面說明將工件支撐構件50朝向工件W之下面WU偏壓的狀態。第8圖係沿著第5圖之C-C線的剖面圖。如第8圖所示,在鉛垂方向所延伸之 2個安裝孔60d形成於滑動構件60的連結體60a,線圈彈簧63配置於各安裝孔60d之中。而且,線圈彈簧63係在軸環管73與安裝孔60d之底部分稍微壓縮,而將軸環管73(軸管71的一端部71b)朝向上方偏壓。藉此,將工件支撐構件50朝向工件W之下面WU稍微地偏壓。在本實施形態,線圈彈簧63相當於本發明之「偏壓構件」,但是偏壓構件係可適當地變更,例如亦可是圓形彈簧。此外,因為滑動構件60之其他的構成係與第1實施形態之滑動構件41的構成一樣,所以附加60之符號,並省略其說明。 Next, a state in which the workpiece supporting member 50 is biased toward the lower surface WU of the workpiece W will be described with reference to FIG. Fig. 8 is a cross-sectional view taken along line C-C of Fig. 5. As shown in Figure 8, extending in the vertical direction The two attachment holes 60d are formed in the coupling body 60a of the slide member 60, and the coil spring 63 is disposed in each attachment hole 60d. Further, the coil spring 63 is slightly compressed at the bottom portion of the collar tube 73 and the attachment hole 60d, and the collar tube 73 (one end portion 71b of the shaft tube 71) is biased upward. Thereby, the workpiece supporting member 50 is slightly biased toward the lower surface WU of the workpiece W. In the present embodiment, the coil spring 63 corresponds to the "biasing member" of the present invention, but the biasing member may be appropriately changed, and may be, for example, a circular spring. In addition, since the other structure of the sliding member 60 is the same as that of the sliding member 41 of the first embodiment, the reference numeral 60 is attached, and the description thereof is omitted.

說明第2實施形態之作用效果。若依據第2實施形態之工件固定治具10A,與第1實施形態之工件固定治具10一樣,在進行雷射加工時,加工頭30在縱向(第5圖之上下方向)移動時,加工頭30與加工頭追蹤構件42抵接,各滑動構件60沿著第1、第2縱架11、12移動。藉此,各工件支撐構件40係以追蹤加工頭30之移動的方式在縱向移動,而可支撐與加工頭30相對向之部分的下面WU。結果,可防止在工件W發生鬆弛或下垂,而可使雷射加工精度變成穩定。 The effects of the second embodiment will be described. According to the workpiece fixing jig 10A of the second embodiment, as in the workpiece fixing jig 10 of the first embodiment, when the machining head 30 is moved in the vertical direction (the lower direction in the fifth drawing) during the laser processing, the machining is performed. The head 30 abuts on the machining head tracking member 42, and each of the sliding members 60 moves along the first and second vertical frames 11 and 12. Thereby, each of the workpiece supporting members 40 is longitudinally moved to track the movement of the processing head 30, and can support the lower surface WU of the portion opposite to the processing head 30. As a result, slack or sagging in the workpiece W can be prevented, and the laser processing accuracy can be stabilized.

進而,若依據第2實施形態的工件固定治具10A,因為在各滑動構件60縱向移動時,各工件支撐構件50係其兩端部50b、50c經由轉動支撐機構70安裝於各滑動構件60,所以在對工件W的下面WU大致線接觸之狀態一面轉動一面追蹤加工頭30的移動。因此,與第1實施形態相比,可降低工件支撐構件50與工件W之下面WU的接觸阻力,工件支撐構件50不會硬拉工件W之下面WU的毛邊,而可幾乎消除在工 件W之下面WU所產生的刮傷。因此,可防止所製作之工件W的品質降低,而且可大幅度減少對刮傷所進行之研磨加工的時間,而可提高工件W的生產效率。此外,因為可降低工件支撐構件50與工件W之下面WU的接觸阻力,所以可使各滑動構件60、各加工頭追蹤構件42及加工頭30之縱向的移動變成圓滑。 Further, according to the workpiece fixing jig 10A of the second embodiment, when the sliding members 60 are longitudinally moved, the respective workpiece supporting members 50 are attached to the respective sliding members 60 via the rotation supporting mechanism 70, and the both end portions 50b and 50c are attached to the respective sliding members 60. Therefore, the movement of the processing head 30 is tracked while rotating the lower surface of the workpiece W in a substantially line contact state. Therefore, compared with the first embodiment, the contact resistance between the workpiece supporting member 50 and the lower surface WU of the workpiece W can be reduced, and the workpiece supporting member 50 does not hardly pull the burr of the lower surface of the workpiece W, but can almost eliminate the work. The scratch caused by the WU below the piece W. Therefore, the quality of the workpiece W to be produced can be prevented from being lowered, and the time required for the polishing process for the scratch can be greatly reduced, and the production efficiency of the workpiece W can be improved. Further, since the contact resistance between the workpiece supporting member 50 and the lower surface WU of the workpiece W can be reduced, the longitudinal movement of each of the sliding members 60, the respective machining head tracking members 42, and the machining head 30 can be made smooth.

又,若依據第2實施形態的工件固定治具10A,如第8圖所示,因為線圈彈簧63總是將工件支撐構件50朝向工件W之下面WU持續偏壓,所以可維持工件支撐構件50所支撐之工件W的下面WU附近總是伸展之狀態。結果,隨著雷射加工的進展而在工件W所加工之孔或開口變多,雷射光之焦點亦難偏移,而可使雷射加工精度變成穩定。 Further, according to the workpiece fixing jig 10A of the second embodiment, as shown in Fig. 8, since the coil spring 63 always constantly biases the workpiece supporting member 50 toward the lower surface WU of the workpiece W, the workpiece supporting member 50 can be maintained. The vicinity of the WU below the supported workpiece W is always in a stretched state. As a result, as the number of holes or openings processed in the workpiece W increases as the laser processing progresses, the focus of the laser light is hardly shifted, and the laser processing accuracy can be stabilized.

以上,說明了本發明之工件固定治具的各實施形態,但是本發明係未限定如此,可在不超出其主旨之範圍進行各種變更。 Although the embodiments of the workpiece fixing jig of the present invention have been described above, the present invention is not limited thereto, and various modifications can be made without departing from the scope of the invention.

例如,在第1實施形態及第2實施形態,構成為藉由加工頭30與加工頭追蹤構件42直接抵接,而工件支撐構件40、50可追蹤在加工頭30之縱向的移動。可是,亦可藉由工件支撐構件40與使加工頭30移動之高架等的位移機構部等連結,而可追蹤在加工頭30之縱向的移動。 For example, in the first embodiment and the second embodiment, the processing head 30 and the processing head tracking member 42 are directly in contact with each other, and the workpiece supporting members 40 and 50 can follow the movement in the longitudinal direction of the processing head 30. However, the movement of the workpiece support member 40 in the longitudinal direction of the processing head 30 can be tracked by connecting the workpiece supporting member 40 to a displacement mechanism portion or the like that moves the processing head 30 or the like.

又,在第1實施形態及第2實施形態,藉2支工件支撐構件40、50支撐工件W的下面WU,但是工件支撐構件40、50係未限定為2支,可適當地變更。因此,若是3支以上的工件支撐構件40、50,可更穩定地支撐工件W的下面 WU。 In the first embodiment and the second embodiment, the lower surface WU of the workpiece W is supported by the two workpiece supporting members 40 and 50. However, the workpiece supporting members 40 and 50 are not limited to two, and can be appropriately changed. Therefore, if there are three or more workpiece supporting members 40, 50, the lower surface of the workpiece W can be more stably supported. WU.

又,在第1實施形態,使用螺絲機構20對工件W賦予適當之張力,但是對工件W賦予張力之方式係可適當地變更,例如亦可使用氣壓缸等之致動器對工件W賦予適當之張力。 Further, in the first embodiment, the workpiece W is appropriately tensioned by the screw mechanism 20. However, the tension is applied to the workpiece W, and the workpiece W can be appropriately changed. For example, an actuator such as a pneumatic cylinder can be used to appropriately apply the workpiece W. The tension.

又,在第2實施形態,使用外徑是10mm的工件支撐構件50,但是工件支撐構件之外徑係可適當地變更。在此,預先比較並說明使用外徑是10mm之工件支撐構件50的情況與例如使用外徑是8mm之工件支撐構件的情況。外徑是10mm之工件支撐構件50具有真直度比外徑是8mm之工件支撐構件大,即對軸心之偏差小的優點。進而,在使用外徑是10mm之工件支撐構件50的情況,與使用外徑是8mm之工件支撐構件的情況相比,藉由支撐工件W的下面WU之部分的曲率小,對稍微發生鬆弛或下垂之工件W的下面WU的接觸面積變大,而可更穩定地支撐工件W的下面WU。另一方面,在使用外徑是8mm之工件支撐構件的情況,與使用外徑是10mm之工件支撐構件50的情況相比,工件支撐構件本身之重量變輕,而可使各滑動構件60、加工頭追蹤構件42及加工頭30的移動更圓滑。 Further, in the second embodiment, the workpiece supporting member 50 having an outer diameter of 10 mm is used, but the outer diameter of the workpiece supporting member can be appropriately changed. Here, a case where the workpiece supporting member 50 having an outer diameter of 10 mm is used and a case where a workpiece supporting member having an outer diameter of 8 mm is used, for example, is compared and explained. The workpiece supporting member 50 having an outer diameter of 10 mm has an advantage that the straightness is larger than the workpiece supporting member having an outer diameter of 8 mm, that is, the deviation from the axial center is small. Further, in the case of using the workpiece supporting member 50 having an outer diameter of 10 mm, compared with the case of using the workpiece supporting member having an outer diameter of 8 mm, the curvature of the portion of the lower portion WU supporting the workpiece W is small, and the pair is slightly slackened or The contact area of the lower portion of the workpiece W of the drooping workpiece W becomes large, and the lower surface WU of the workpiece W can be more stably supported. On the other hand, in the case of using the workpiece supporting member having an outer diameter of 8 mm, the weight of the workpiece supporting member itself is lighter than in the case of using the workpiece supporting member 50 having an outer diameter of 10 mm, and the respective sliding members 60, The movement of the machining head tracking member 42 and the machining head 30 is more rounded.

15‧‧‧固定側橫架 15‧‧‧Fixed side cross frame

Wa‧‧‧一端側 Wa‧‧‧ one end side

10‧‧‧工件固定治具 10‧‧‧Working fixture

W‧‧‧工件 W‧‧‧Workpiece

11‧‧‧第1縱架 11‧‧‧1st vertical frame

12‧‧‧第2縱架 12‧‧‧2nd vertical frame

13‧‧‧第1橫架 13‧‧‧1st cross frame

11a、12a‧‧‧導軌 11a, 12a‧‧‧ rails

40‧‧‧工件支撐構件 40‧‧‧Workpiece support members

41‧‧‧滑動構件 41‧‧‧Sliding members

42‧‧‧加工頭追蹤構件 42‧‧‧Processing head tracking component

41a‧‧‧連結體 41a‧‧‧Connected body

41b‧‧‧移動體 41b‧‧‧Mobile

16‧‧‧可動側橫架 16‧‧‧ movable side cross frame

16a‧‧‧導件 16a‧‧‧Guide

17‧‧‧螺栓 17‧‧‧ bolt

14‧‧‧第2橫架 14‧‧‧2nd cross frame

20‧‧‧螺絲機構 20‧‧‧ screw mechanism

21‧‧‧螺絲部 21‧‧‧ Screw Department

22‧‧‧轉動部 22‧‧‧Rotation

Wb‧‧‧另一端側 Wb‧‧‧ the other end side

Claims (5)

一種工件固定治具,藉由拉伸雷射加工用薄板的工件,而使工件在賦予張力的狀態下固定,並在安裝於雷射加工機後被進行雷射加工,其特徵在於包括:第1縱架、第2縱架,係在該工件之拉伸方向延伸並彼此平行;固定側橫架,係在與該工件之拉伸方向及與該工件之平面垂直的方向之兩方向正交之方向延伸並固定該工件的一端側;可動側橫架,係與該固定側橫架平行地延伸並在握持該工件之另一端側的狀態拉伸;工件支撐構件,係與該固定側橫架平行地延伸並支撐該工件中與該雷射加工機的加工頭相對向之部分的下面;及追蹤移動機構,係以追蹤在該加工頭之該工件之拉伸方向之移動的方式使該工件支撐構件在該工件的拉伸方向移動。 A workpiece fixing jig for fixing a workpiece in a state of imparting tension by stretching a workpiece of a sheet for laser processing, and performing laser processing after being mounted on a laser processing machine, characterized in that: 1 longitudinal frame and second longitudinal frame extending in the stretching direction of the workpiece and parallel to each other; the fixed side transverse frame is orthogonal to the direction perpendicular to the stretching direction of the workpiece and the direction perpendicular to the plane of the workpiece a direction extending and fixing one end side of the workpiece; a movable side cross frame extending in parallel with the fixed side cross frame and being stretched while holding the other end side of the workpiece; the workpiece supporting member is transverse to the fixed side a frame extending in parallel and supporting a lower portion of the workpiece opposite the processing head of the laser processing machine; and a tracking movement mechanism for tracking movement of the workpiece in the stretching direction of the processing head The workpiece support member moves in the stretching direction of the workpiece. 如申請專利範圍第1項之工件固定治具,其中該追蹤移動機構係具有:各滑動構件,係安裝成可沿著該第1縱架、第2縱架滑動,並安裝該工件支撐構件之兩端部;及一對加工頭追蹤構件,係與該固定側橫架平行地延伸,而且配置成在該工件之拉伸方向夾住該加工頭,藉由該加工頭抵接,使該各滑動構件滑動。 The workpiece fixing jig according to claim 1, wherein the tracking moving mechanism has: each sliding member installed to slide along the first vertical frame and the second vertical frame, and the workpiece supporting member is mounted And a pair of processing head tracking members extending in parallel with the fixed side cross frame, and arranged to sandwich the processing head in a stretching direction of the workpiece, and the processing head abuts The sliding member slides. 如申請專利範圍第2項之工件固定治具,其中該工件支撐構件係支撐該工件之下面的部分的截面為圓形;該工件支撐構件之兩端部係經由可轉動地支撐該工件支撐構件的轉動支撐機構,安裝於該各滑動構件。 The workpiece fixing fixture of claim 2, wherein the workpiece supporting member supports a lower portion of the workpiece to have a circular cross section; both ends of the workpiece supporting member rotatably support the workpiece supporting member A rotation support mechanism is attached to each of the sliding members. 如申請專利範圍第3項之工件固定治具,其中在該滑動構件,設置將該工件支撐構件朝向該工件之下面偏壓的偏壓構件。 A workpiece fixing jig according to claim 3, wherein in the sliding member, a biasing member biasing the workpiece supporting member toward a lower surface of the workpiece is provided. 如申請專利範圍第1至4項中任一項之工件固定治具,其中該工件支撐構件係以成為彼此平行的方式設置一對,並配置成對從該加工頭所照射之雷射光在該工件之拉伸方向相距固定量。 The workpiece fixing jig according to any one of claims 1 to 4, wherein the workpiece supporting members are disposed in a pair to be parallel to each other, and are disposed to face the laser light irradiated from the processing head. The stretching direction of the workpiece is a fixed amount.
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